WO2017077744A1 - Sheet inspection device and sheet inspection method - Google Patents

Sheet inspection device and sheet inspection method Download PDF

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Publication number
WO2017077744A1
WO2017077744A1 PCT/JP2016/071719 JP2016071719W WO2017077744A1 WO 2017077744 A1 WO2017077744 A1 WO 2017077744A1 JP 2016071719 W JP2016071719 W JP 2016071719W WO 2017077744 A1 WO2017077744 A1 WO 2017077744A1
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WO
WIPO (PCT)
Prior art keywords
sheet
imaging
unit
main body
angle
Prior art date
Application number
PCT/JP2016/071719
Other languages
French (fr)
Japanese (ja)
Inventor
塘口　直樹
洋一 木川
誠 土永
慎 佐々木
Original Assignee
日東電工株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日東電工株式会社 filed Critical 日東電工株式会社
Priority to KR1020187010774A priority Critical patent/KR102569341B1/en
Priority to CN201680061620.3A priority patent/CN108139337B/en
Publication of WO2017077744A1 publication Critical patent/WO2017077744A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined

Definitions

  • the present invention relates to a sheet inspection apparatus and inspection method.
  • a protective film (original fabric sheet) is laminated on both sides of a strip-shaped polarizer (original fabric sheet), and a retardation film (original fabric sheet) is laminated on one protective film via an adhesive. Further, a separator (raw sheet) is laminated on the retardation film via an adhesive, and a surface treatment agent layer is laminated on the other protective film.
  • a polarizing plate is in the state of a laminate (laminated sheet) in which a release liner (raw fabric sheet) is laminated on a surface treatment agent layer, and is distributed through inspections such as foreign matter inspection.
  • an inspection unit including a light source unit that irradiates light to a laminated sheet and an imaging unit that images the laminated sheet irradiated with the light is moved.
  • an inspection apparatus configured to irradiate a laminated sheet that is irradiated with light by a light source unit, and to image the laminated sheet irradiated with the light with an imaging unit (see Patent Documents 1 and 2).
  • an inspection apparatus is installed at the subsequent stage of the stacking unit that stacks the original fabric sheets so that the position and focus of the imaging unit with respect to the stacked sheet are adjusted, and the positional relationship between the stacked sheet and the imaging unit does not change.
  • the laminated sheet is inspected in a state of being fixedly arranged on the sheet (see Patent Documents 1 and 2).
  • the inspection of the laminated sheet as described above is performed so as not to distribute a defective product in which a defect such as mixing of foreign matters into the laminated sheet occurs.
  • a defect such as mixing of foreign matters into the laminated sheet occurs.
  • simply preventing the distribution of defective products to the market cannot suppress a decrease in yield during the production of laminated sheets. Therefore, when a product defect is discovered, it is desirable to determine the cause of the occurrence and to take measures to suppress the occurrence of the product defect in the subsequent production of the laminated sheet.
  • an object of the present invention is to provide a sheet inspection apparatus and inspection method capable of sufficiently specifying the occurrence position and cause of sheet failure.
  • the sheet inspection apparatus includes: A sheet inspection apparatus for inspecting a belt-shaped sheet moving along a movement path, A movable mount; An inspection unit supported by the gantry and inspecting the sheet; The inspection unit A light source unit for irradiating the sheet with light; The sheet is configured so that the relative imaging position and imaging angle relative to the sheet can be adjusted in a state in which the gantry is arranged at an arbitrary position in the movement path, and the light source unit irradiates light. And an imaging unit.
  • the imaging unit An imaging body, A position adjusting unit capable of adjusting the relative imaging position by moving the imaging main body with respect to the sheet; It is preferable to have an angle adjustment unit capable of adjusting the relative imaging angle by rotating the imaging main body with respect to the sheet.
  • the position adjustment unit is configured to move the imaging main body in a first direction with respect to the sheet and a second direction perpendicular to the first direction
  • the angle adjustment unit may be configured to rotate the imaging main body about a first rotation axis and a second rotation axis perpendicular to the first rotation axis with respect to the sheet. Good.
  • the position adjustment unit includes a first position adjustment unit capable of moving the imaging main body in a direction approaching and separating from the sheet, and a direction perpendicular to a moving direction of the first position adjustment unit And a second position adjustment unit capable of moving the imaging main body unit,
  • the angle adjusting unit rotates the imaging main body with respect to the sheet about the first rotation axis, and rotates the imaging main body about the second rotation axis. You may have a 2nd angle adjustment part.
  • a control unit that is electrically connected to the imaging unit and obtains a test result from the imaging unit; It is preferable that the control unit is configured to be movable according to the movement of the gantry.
  • the sheet inspection method according to the present invention includes: Using the sheet inspection device, A method for inspecting the sheet.
  • FIG. 2 Schematic side view showing a sheet conveying apparatus provided with a sheet inspection apparatus according to an embodiment of the present invention
  • FIG. 2 is a schematic top view showing the periphery of the inspection apparatus from the direction B in FIG.
  • Schematic side view showing the imaging position adjustment operation of the first and second position adjustment units Schematic side view showing the imaging position adjustment operation of the first and second position adjustment units
  • Schematic side view showing the imaging position adjustment operation of the first and second position adjustment units Schematic side view showing the imaging position adjustment operation of the first and second position adjustment units
  • Schematic side view showing the imaging angle adjustment operation of the first and second angle adjustment units Schematic side view showing the imaging angle adjustment operation of the first and second angle adjustment units
  • Schematic side view showing the imaging angle adjustment operation of the first and second angle adjustment units Schematic side view showing a state in which the imaging position of the imaging main body relative to the sheet is adjusted by the first position adjustment unit
  • Schematic side view showing a state in which the imaging position of the imaging main body relative to the sheet is adjusted by the first position adjustment unit
  • Schematic side view showing a state in which the imaging position of the imaging main body relative to the sheet is adjusted by the second
  • the sheet conveying apparatus 1 removes an original sheet 60 from a plurality of roll bodies 61 in which an original sheet 60 as a belt-like sheet 40 is wound.
  • a plurality of feeding sections 3 that respectively feed out, a laminated section 7 that forms a laminated sheet 50 as a sheet 40 by laminating the fed raw sheet 60, and a winding that winds up the laminated sheet 50 and collects it as a roll body 51.
  • a take-up section 9 and an inspection apparatus 20 that can move and inspect the sheet 40 are provided.
  • two inspection apparatuses 20 are provided so as to form a pair along the width direction of the sheet 40, and the pair of inspection apparatuses 20 inspect the sheet 40.
  • the raw sheet 60 fed out from the feeding unit 3 is laminated by the laminating unit 7 to form a laminated sheet 50, and the formed laminated sheet 50 is wound up by the winding unit 9. It has become. Further, when the sheet 40 is moved, the sheet 40 is inspected by the inspection apparatus 20.
  • the inspection apparatus 20 is an inspection apparatus 20 for a sheet 40 that inspects a belt-like sheet 40 that moves along a movement path.
  • the inspection apparatus 20 includes a movable base 21 and a movable base 21.
  • an inspection unit 22 that is supported and inspects the sheet 40.
  • the inspection unit 22 includes a light source unit 23 that irradiates light to the sheet 40 and a relative imaging position and imaging angle with respect to the sheet 40 in a state in which the gantry 21 is disposed at an arbitrary position in the movement path of the sheet 40.
  • an imaging unit 25 that images the sheet 40 irradiated with light from the light source unit 23.
  • the inspection device 20 for the sheet 40 further includes a control unit 37 that is electrically connected to the imaging unit 25 and acquires the inspection result from the imaging unit 25, and the control unit 37 moves the gantry 21. It is configured to be movable according to the situation.
  • the gantry 21 is configured to be movable so as to move the inspection location, and is moved to an arbitrary position in the movement path of the sheet 40.
  • the inspection apparatus 20 is moved by moving the gantry 21 together with the inspection unit 22.
  • the gantry 21 is attached to the frame 5 of the conveyance device 1 in the movement path of the sheet 40.
  • the gantry 21 is attached to the frame 5 with bolts or the like.
  • FIG. 1 illustrates a state in which the gantry 21 is attached to the frame 5 in the vicinity of one of the two feeding portions 3.
  • the gantry 21 is formed in a size that can be carried by an operator. As described above, since the gantry 21 is formed to be portable, the gantry 21 can be easily moved.
  • the gantry 21 has an L-shaped main body portion 21a that forms the main body and a reinforcing portion 21b that reinforces the main body portion 21a.
  • One end portion of the L-shape of the main body portion 21a is fixed to the side surface of the frame 5 with a bolt or the like, and the other end portion protrudes inward from the side surface side (outer side) of the frame 5.
  • a light source unit 23 is fixed to one end of the L shape.
  • An imaging unit 25 is fixed to the other end of the L shape.
  • the reinforcing portion 21b is arranged on the side surface portion of the main body portion 21a so as to reinforce the main body portion 21a.
  • the inspection unit 22 includes a light source unit 23 that irradiates light to the sheet 40 and an imaging unit 25.
  • the imaging unit 25 is configured to be able to adjust a relative imaging position and imaging angle with respect to the sheet 40 in a state where the gantry 21 is arranged at an arbitrary position in the movement path of the sheet 40, and light is emitted from the light source unit 23.
  • the sheet 40 being irradiated is imaged.
  • the light source unit 23 irradiates the sheet 40 with light.
  • the light source unit 23 includes a light source main body 23 a and a connection part 23 b connected to the gantry 21, and the connection part 23 b is connected to the one end of the main body 21 a of the gantry 21.
  • the light source unit 23 emits light from one surface (here, the lower surface) side of the sheet 40 toward the sheet 40.
  • the imaging unit 25 is configured to be able to adjust a relative imaging position and imaging angle with respect to the sheet 40, and images the sheet 40 irradiated with light from the light source unit 23.
  • the imaging angle is an angle formed by the imaging surface (here, the upper surface) of the sheet 40 and the imaging direction of the imaging unit 25.
  • the imaging unit 25 images the sheet 40 irradiated with light from one surface (here, the lower surface) side from the other surface (here, the upper surface) side.
  • the imaging unit 25 is configured to be able to adjust the imaging position and imaging angle relative to the sheet 40. Specifically, as shown in FIGS. 4 to 7, the imaging unit 25 can adjust the relative imaging position by moving the imaging main body 27 with respect to the imaging main body 27 and the sheet 40. It has a position adjustment unit 31 that can be adjusted, and an angle adjustment unit 33 that can adjust the relative imaging angle by rotating the imaging main body 27 with respect to the sheet 40.
  • the imaging main body 27 is a main body that images the sheet 40.
  • a conventionally known camera or the like can be adopted.
  • the position adjusting unit 31 can adjust the relative imaging position by moving the imaging main body 27 with respect to the sheet 40. Specifically, the position adjustment unit 31 moves the imaging main body 27 in one direction (first direction) and in a direction (second direction) perpendicular to the one direction (first direction). Is configured to be possible.
  • the position adjusting unit 31 moves the imaging main body 27 in a direction approaching and separating from the sheet 40 (a first direction, here, a vertical direction, that is, a direction perpendicular to the sheet 40).
  • the first position adjustment unit 31a capable of imaging and the imaging main body in a direction perpendicular to the moving direction by the first position adjustment unit 31a (second direction, here, the horizontal direction, that is, the width direction of the sheet 40)
  • second direction here, the horizontal direction, that is, the width direction of the sheet 40
  • a second position adjusting unit 31b capable of moving the unit 27.
  • the first position adjustment unit 31a includes two stage units 31aa and 31ab that are movable relative to each other, and two stage units.
  • a movement amount adjustment unit 31ac for adjusting the relative movement amounts of 31aa and 31ab and a flat bottom surface 31ad are provided.
  • As the movement amount adjustment unit 31ac a knob unit that can adjust the movement amount by rotating is adopted.
  • a first position adjusting unit 31a a unit in which two stage units 31aa and 31ab are connected by a rack and pinion mechanism so that one moves linearly with respect to the other can be used.
  • Examples of the first position adjusting unit 31a include a coarse / fine movement rack and pinion stage (for example, product number TAR-38801D) manufactured by Sigma Kogyo Co., Ltd.
  • the first position adjusting unit 31a is arranged so that the two stage units 31aa and 31ab can move relative to each other in a direction approaching and separating from the sheet 40 (here, a vertical direction). .
  • the second position adjustment unit 31b includes two stage units 31ba and 31bb that can move relative to each other, and a movement amount adjustment unit 31bc for adjusting the relative movement amounts of the two stage units 31ba and 31bb. And a flat bottom surface 31bd.
  • a knob unit that can adjust the movement amount by rotating is adopted.
  • a second position adjusting unit 31b a unit in which two stage units 31ba and 31bb are coupled by a rack and pinion mechanism so that one moves linearly with respect to the other can be used.
  • a coarse / fine movement rack and pinion stage for example, a product number TAR-38801D manufactured by Sigma Koki Co., Ltd.
  • the two stage units 31ba and 31bb are relatively relative to each other in a direction perpendicular to the moving direction of the first position adjusting unit 31a (here, the horizontal direction, that is, the width direction of the sheet 40). It is arranged to be movable.
  • first and second position adjusting units 31a and 31b two position adjusting units having the same configuration are arranged so that their moving directions are inclined by 90 °. Is done.
  • one stage 31ab of the first position adjusting unit 31a is coupled to one stage 31ba of the second position adjusting unit 31b by a connection unit (not shown). Yes.
  • the other stage portion 31aa of the first position adjustment portion 31a is attached to the gantry 21 by a connection portion (not shown).
  • the angle adjusting unit 33 can adjust the relative imaging angle by rotating the imaging main body 27 with respect to the sheet 40.
  • the change in the imaging angle corresponds to a change in the posture of the imaging main body 27.
  • the angle adjustment unit 33 is configured to have an imaging body centering on an arbitrary one rotation axis (first rotation axis) R1 and a rotation axis (second rotation axis) R2 perpendicular to the rotation axis R1. It is comprised so that the part 27 may be rotated (refer FIG. 4, FIG. 6).
  • the angle adjustment unit 33 is a rotation axis R1 (here, a rotation axis parallel to the bottom surface 33ad of the first angle adjustment unit 33a and parallel to the width direction of the sheet 40, that is, the width of the sheet 40).
  • a rotation angle R2 perpendicular to the rotation axis R1 of the first angle adjustment unit 33a and a first angle adjustment unit 33a that rotates the imaging main body 27 with respect to the sheet 40.
  • the rotation axis is parallel to the flat bottom surface 33bd of the second angle adjustment unit 33b and is perpendicular to the rotation axis R1 of the first angle adjustment unit 33a, that is, the rotation axis perpendicular to the seat 40).
  • the first angle adjusting unit 33a includes two stage units 33aa and 33ab that are rotatable relative to each other, and two stage units.
  • a rotation amount adjustment unit 33ac for adjusting the relative rotation amounts of 33aa and 33ab and a flat bottom surface 33ad are provided.
  • the rotation amount adjustment unit 33ac a knob unit that can adjust the rotation amount by rotating is adopted.
  • a gonio stage formed by connecting two stage units 33aa and 33ab so that one moves in an arc with respect to the other may be used.
  • Examples of the first angle adjusting unit 33a include an ⁇ axis goniometer stage (for example, product numbers GOH-60A115, GOH-60A50, etc.) manufactured by Sigma Kogyo Co., Ltd.
  • the two stage units 33aa and 33ab are parallel to the bottom surface 33ad of the stage unit 33aa (that is, the bottom surface of the first angle adjusting unit 33a) and parallel to the width direction of the sheet 40.
  • a rotation axis R1 that is, a rotation axis parallel to the width direction of the sheet 40 as described above).
  • the second angle adjustment unit 33b includes two stage units 33ba and 33bb that can rotate relative to each other, and a rotation amount adjustment unit 33bc for adjusting the relative rotation amount of the two stage units 33ba and 33bb. And have.
  • a rotation amount adjustment unit 33bc a knob unit that can adjust the rotation amount by rotating is adopted.
  • a gonio stage in which two stage units 33ba and 33bb are connected so that one moves in an arc with respect to the other may be used.
  • an ⁇ -axis goniometer stage for example, product numbers GOH-60A115, GOH-60A50, etc. manufactured by Sigma Koki Co., Ltd.
  • the two stage units 33ba and 33bb are parallel to the bottom surface 33bd of the stage unit 33ba (that is, the bottom surface of the second angle adjusting unit 33b), and the first angle adjusting unit 33a.
  • the two stage units 33ba and 33bb are parallel to the bottom surface 33bd of the stage unit 33ba (that is, the bottom surface of the second angle adjusting unit 33b), and the first angle adjusting unit 33a.
  • first and second angle adjusting units 33a and 33b two angle adjusting units having the same configuration are arranged so that their rotation axes are inclined by 90 °. Has been.
  • one stage portion 33ab of the first angle adjustment portion 33a is coupled to one stage portion 33ba of the second angle adjustment portion 33b by a connection portion (not shown). Yes. Further, the other stage portion 33aa of the first angle adjustment portion 33a is connected to a stage portion 31bb on the side opposite to the first position adjustment portion 31a in the second position adjustment portion 31b by a connection portion (not shown). ing.
  • the stage unit attached to the gantry 21 is operated.
  • the other stage portion 31ab moves in the vertical direction with respect to 31aa.
  • the second position adjustment unit 31b, the angle adjustment unit 33, and the imaging main body 27 move in the vertical direction as described above.
  • the imaging position of the imaging main body 27 with respect to the sheet 40 in the direction perpendicular to the sheet 40 that is, the shortest distance L connecting the sheet 40 and the center of the imaging main body 27
  • the stage of the first position adjusting unit 31a is operated.
  • the other stage portion 31bb moves in the width direction of the sheet 40 as described above with respect to the stage portion 31ba of the second position adjustment portion 31b connected to the portion 31ab.
  • the angle adjustment unit 33 and the imaging main body 27 move in the width direction of the sheet 40 as described above. Thereby, the imaging position of the imaging main body 27 with respect to the sheet 40 in the width direction of the sheet 40 can be adjusted.
  • the second position adjustment unit 31b rotates around the rotation axis R1 parallel to the width direction of the sheet 40 as described above with respect to the stage portion 33aa of the first angle adjustment portion 33a connected to the stage portion 31bb.
  • the second angle adjustment unit 33b and the imaging main body 27 rotate around the rotation axis R1 parallel to the width direction of the sheet 40 as described above.
  • the imaging angle component ⁇ 1 in a virtual plane perpendicular to the sheet 40 and perpendicular to the width direction of the sheet 40 (parallel to the longitudinal direction) can be adjusted.
  • the first angle adjusting unit 33a is operated.
  • the other stage portion 33bb is parallel to the bottom surface 33bd of the stage portion 33ba and the first angle adjustment is performed with respect to the stage portion 33ba of the second angle adjustment portion 33b connected to the stage portion 33ab.
  • the portion 33a rotates about a rotation axis R2 perpendicular to the rotation axis R1 (that is, a rotation axis perpendicular to the seat 40).
  • the imaging main body 27 is parallel to the bottom surface 33bd of the stage portion 33ba and is perpendicular to the rotation axis R1 of the first angle adjustment unit 33a (that is, perpendicular to the sheet 40).
  • a rotation axis) that rotates about R2.
  • the imaging position of the imaging main body 27 with respect to the sheet 40 is determined. It can be adjusted freely.
  • the imaging angle of the imaging main body 27 with respect to the sheet 40 is set. It can be adjusted freely.
  • the control unit 37 is electrically connected to the imaging unit 25, and the inspection result in the imaging unit 25 is transmitted as electronic data, and the transmitted inspection result is acquired. Moreover, the control part 37 is comprised so that a movement is possible, and the control part 37 is moved by the movement of the mount frame 21 by this. Examples of the control unit 37 include a computer having a central processing unit (CPU).
  • the inspection apparatus 20 is moved to the frame 5 of the transport apparatus 1 and the gantry 21 is attached.
  • the frame 21 of the inspection apparatus 20 is attached to the frame 5 in the vicinity of the feeding portion 3 of the original fabric sheet 60 (sheet 40).
  • the position adjustment unit 31 and the angle adjustment unit 33 allow the imaging unit 25 with respect to the original fabric sheet 60 The imaging position and imaging angle are adjusted.
  • the imaging position adjustment of the imaging main body 27 in the direction approaching and separating from the original fabric sheet 60 by the first position adjustment unit 31a see FIGS. 10A to 10C.
  • Adjustment of the imaging angle component ⁇ 1 of the imaging main body 27 with respect to the original fabric sheet 60 on a virtual plane perpendicular to the width direction of the original fabric sheet 60 see FIGS.
  • the adjustment of the imaging angle component ⁇ 2 of the imaging main body 27 with respect to the original sheet 60 on the virtual plane parallel to the original sheet 60 is performed in combination.
  • the imaging position and imaging angle of the imaging main body 27 with respect to the original fabric sheet 60 are adjusted, and thereby the imaging target region and focus of the imaging main body 27 are made appropriate.
  • the raw sheet 60 is fed from the roll body 61 by the feeding unit 3, and the light source unit 23 emits light to the original fabric sheet 60 that is moved by being fed in this way, so that the light is emitted.
  • the inspection is performed by imaging the irradiated raw sheet 60 by the imaging main body 27 of the imaging unit 25.
  • the obtained inspection result is transmitted from the imaging unit 25 to the control unit 37 as electronic data.
  • the inspection apparatus 20 is moved to the claim 5 in the vicinity of the feeding unit 3, and the original fabric sheet 60 is inspected at the position where the inspection apparatus 20 is moved.
  • the inspected original sheet 60 and the original sheet 60 fed out from the other feeding unit 3 are laminated by the laminating unit 7 to be laminated sheet 50. (Sheet 40) is formed, and the formed laminated sheet 50 is taken up by the take-up unit 9 and collected as the roll body 51.
  • the inspection device 20 is removed from the frame 5 near the winding unit 3, for example, the frame near the stacking unit 7.
  • the inspection apparatus 20 is moved to (not shown), the inspection apparatus 20 is attached to the frame in the same manner as described above, and the laminated sheet 50 is inspected at the position where the inspection apparatus 20 is moved.
  • the inspection apparatus 20 for the sheet 40 of the present embodiment is An inspection apparatus for a sheet 40 for inspecting a belt-like sheet 40 moving along a movement path, A movable base 21; An inspection unit 22 that is supported by the gantry 21 and inspects the sheet 40; The inspection unit 22 A light source unit 23 for irradiating the sheet 40 with light; The seat 40 is configured such that the relative imaging position and imaging angle with respect to the sheet 40 can be adjusted in a state in which the gantry 21 is arranged at an arbitrary position in the movement path of the sheet 40, and light is irradiated by the light source unit 23. And an image pickup unit 25 for picking up images.
  • the inspection apparatus 20 can be moved to an arbitrary position in the movement path of the sheet 40 by moving the gantry 21 together with the inspection unit 22. And the imaging position and imaging angle of the imaging part 25 with respect to the sheet
  • the imaging unit 25 An imaging main body 27; A position adjusting unit 31 capable of adjusting the relative imaging position by moving the imaging main body 27 with respect to the sheet 40; An angle adjustment unit 33 that can adjust the relative imaging angle by rotating the imaging main body 27 with respect to the sheet 40 is provided.
  • the position adjustment unit 31 moves the imaging main body 27 with respect to the sheet 40 to adjust the relative imaging position
  • the angle adjustment unit 33 adjusts the imaging main body 27 with respect to the sheet 40.
  • the imaging position adjustment and the imaging angle adjustment of the imaging main body 27 with respect to the sheet 40 can be performed independently, or the imaging position adjustment and the imaging angle adjustment can be performed in combination.
  • the imaging position and imaging angle of the unit 27 can be adjusted in more detail. Therefore, the imaging position and imaging angle of the imaging main body 27 can be adjusted to a desired imaging position and imaging angle without being affected by the arrangement state of the gantry 21, thereby causing the occurrence position of the sheet defect. And the cause of occurrence can be identified more fully.
  • the position adjustment unit 31 is configured to move the imaging main body 27 in a first direction with respect to the sheet 40 and a second direction perpendicular to the first direction.
  • the angle adjustment unit 33 is configured to rotate the imaging main body 27 about the first rotation axis R1 and the second rotation axis R2 perpendicular to the first rotation axis R1 with respect to the sheet 40. ing.
  • the imaging position and imaging angle of the imaging main body 27 can be adjusted in more detail.
  • the position adjustment unit 31 is capable of moving the imaging main body 27 in a direction approaching and separating from the sheet 40, and is perpendicular to the movement direction of the first position adjustment unit 31a.
  • a second position adjusting unit 31b capable of moving the imaging main body 27 in any direction,
  • the angle adjustment unit 33 includes a first angle adjustment unit 33a that rotates the imaging main body 27 about the first rotation axis R1 with respect to the sheet 40, and an imaging main body 27 about the second rotation axis R2. And a second angle adjusting unit 33b to be rotated.
  • the imaging main body 27 with respect to the sheet 40 is combined with the movement of the imaging main body 27 by the first position adjustment unit 31a and the movement of the imaging main body 27 by the second position adjustment unit 31b.
  • the image pickup position can be freely adjusted.
  • the imaging angle of the imaging main body 27 with respect to the sheet 40 is set. It can be adjusted freely. Therefore, the imaging position and imaging angle of the imaging main body 27 can be adjusted in more detail.
  • the light source unit 23 is disposed on the lower side of the sheet 40 and the imaging unit 25 is disposed on the upper side of the sheet 40.
  • the inspection apparatus 20 for the sheet 40 of the present embodiment is A control unit 37 that is electrically connected to the imaging unit 25 and obtains a test result from the imaging unit 25;
  • the control unit 37 is configured to be movable according to the movement of the gantry 21.
  • the control unit 37 can acquire the inspection result from the imaging unit 25 by moving the control unit 37 according to the movement of the gantry 21 (that is, the movement of the imaging unit 25). Accordingly, the wiring for electrically connecting the imaging unit 25 and the control unit 37 can be shortened. Moreover, since the freedom degree of arrangement
  • the inspection apparatus 20 becomes more useful.
  • the method for inspecting the sheet 40 of this embodiment is as follows. This is a method for inspecting the sheet 40 using the inspection apparatus 20 for the sheet 40. According to such a configuration, by performing the inspection of the sheet 40 using the inspection apparatus 20 for the sheet 40, it is possible to sufficiently specify the occurrence position and the cause of occurrence of the sheet defect as described above.
  • the inspection device 20 for the sheet 40 is used, and the inspection device 20 is moved to a predetermined position in the movement path to inspect the sheet 40. According to such a configuration, by performing inspection using the inspection apparatus 20, it is possible to sufficiently identify the occurrence position and cause of the sheet defect.
  • the sheet 40 can be transported while inspecting the sheet 40 by the inspection device 20. In this way, by transporting the sheet 40 while inspecting using the inspection apparatus 20, it is possible to transport the sheet 40 while sufficiently identifying the occurrence position and cause of the sheet failure.
  • the sheet 40 can be conveyed while inspecting the sheet 40.
  • the inspection apparatus 20 for the sheet 40 of the present embodiment.
  • the inspection apparatus 20 and the inspection method for the sheet 40 that can sufficiently specify the generation position and the generation cause of the sheet defect are provided.
  • the inspection apparatus 1 and the inspection method for the sheet 40 of the present embodiment have the above-described configuration and have the advantages as described above.
  • the present invention is not limited to the above-described embodiment, and is within the intended scope of the present invention.
  • the design can be changed as appropriate.
  • a laminated sheet (polarizing plate) 50 as shown in FIG. 14 may be employed as the sheet 40 to be inspected by the inspection apparatus 20.
  • the laminated sheet 50 shown in FIG. 14 has a separator 60a, a retardation film 60b, a protective film 60c, a polarizer 60d, a protective film 60e, and a release liner 60f as original sheets.
  • Each of the original fabric sheets is fed out from each roller body by the feeding unit and supplied to the laminating unit, and is laminated at the laminating unit to form a laminated sheet 50. Further, the formed laminated sheet 50 is wound and collected.
  • the inspection apparatus 20 is moved to an arbitrary position in any one of the movement paths of each of the original films 60a to 60f and the laminated sheet 50, and at the position where the inspection apparatus 20 is moved, A mode in which the sheet is inspected may be employed.
  • the inspection device 20 is provided in the transport device 1 having a mode as shown in FIG. 15 .
  • the original fabric sheet 60 is fed out by a feeding unit 3 from a roll body 61 in which the original fabric sheet 60 as a sheet 40 is wound, and the fed original fabric sheet 60 is fed to a first drying unit 71.
  • the coating liquid is applied to the original sheet 60 by the coating unit 75, dried by the second drying unit 77, and applied to the original sheet 60.
  • the sheet 63 (sheet 40) formed with the film is formed, the sheet 63 moves while being stretched around the tension roller 79, is wound up by the winding unit 9, and is collected as the roll body 65.
  • the inspection apparatus 20 can be moved to an arbitrary position in the movement path of the sheet 63 formed with the raw sheet 60 and the coating film, and each sheet can be inspected.
  • SYMBOLS 1 Conveyance apparatus, 3: Feeding part, 7: Lamination

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

This sheet inspection device, which inspects a band-shaped sheet moving along a movement path, is provided with a movable frame and an inspection unit which is supported by the frame and inspects the sheet, wherein the inspection unit includes: a light source unit irradiates the sheet with light; and an imaging unit which is configured such that the imaging position and the imaging angle relative to the sheet can be adjusted in a state where the frame is disposed at an arbitrarily defined position in the movement path, and which captures an image of the sheet being irradiated with light by the light source unit.

Description

シートの検査装置及び検査方法Sheet inspection apparatus and inspection method 関連出願の相互参照Cross-reference of related applications
　本願は、２０１５年１１月５日出願の日本国特願２０１５－２１７５６０号の優先権を主張し、その内容は引用によって本願明細書の記載に組み込まれる。 This application claims the priority of Japanese Patent Application No. 2015-217560 filed on November 5, 2015, the contents of which are incorporated herein by reference.
　本発明は、シートの検査装置及び検査方法に関する。 The present invention relates to a sheet inspection apparatus and inspection method.
　従来、例えば偏光板は、帯状の偏光子（原反シート）の両面に保護フィルム（原反シート）が積層され、一方の保護フィルムに接着剤を介して位相差フィルム（原反シート）が積層され、さらに位相差フィルムに粘着剤を介してセパレータ（原反シート）が積層され、また、他方の保護フィルムには表面処理剤層が積層されて構成されている。かかる偏光板は、表面処理剤層に剥離ライナー（原反シート）が積層された積層体（積層シート）の状態で、異物検査等の検査を経て流通されている。 Conventionally, for example, in a polarizing plate, a protective film (original fabric sheet) is laminated on both sides of a strip-shaped polarizer (original fabric sheet), and a retardation film (original fabric sheet) is laminated on one protective film via an adhesive. Further, a separator (raw sheet) is laminated on the retardation film via an adhesive, and a surface treatment agent layer is laminated on the other protective film. Such a polarizing plate is in the state of a laminate (laminated sheet) in which a release liner (raw fabric sheet) is laminated on a surface treatment agent layer, and is distributed through inspections such as foreign matter inspection.
　この種のシートの検査に用いられる検査装置として、例えば、積層シートに光を照射する光源部と、該光が照射されている積層シートを撮像する撮像部とを有する検査部を備え、移動している積層シートに光源部によって光を照射し、該光が照射されている積層シートを撮像部で撮像するように構成された検査装置が提案されている（特許文献１、２参照）。また、かかる検査装置は、原反シート同士を積層する積層部の後段に据え付けられ、積層シートに対する撮像部の位置及び焦点が合わされたうえで、積層シートと撮像部との位置関係が変化しないように固定配置された状態で積層シートを検査するようになっている（特許文献１、２参照）。 As an inspection apparatus used for inspecting this type of sheet, for example, an inspection unit including a light source unit that irradiates light to a laminated sheet and an imaging unit that images the laminated sheet irradiated with the light is moved. 2. Description of the Related Art There has been proposed an inspection apparatus configured to irradiate a laminated sheet that is irradiated with light by a light source unit, and to image the laminated sheet irradiated with the light with an imaging unit (see Patent Documents 1 and 2). In addition, such an inspection apparatus is installed at the subsequent stage of the stacking unit that stacks the original fabric sheets so that the position and focus of the imaging unit with respect to the stacked sheet are adjusted, and the positional relationship between the stacked sheet and the imaging unit does not change. The laminated sheet is inspected in a state of being fixedly arranged on the sheet (see Patent Documents 1 and 2).
日本国特開２００５－６２１６５号公報Japanese Unexamined Patent Publication No. 2005-62165 日本国特開平０６－２４２０２３号公報Japanese Laid-Open Patent Publication No. 06-242023
　ところで、上記したような積層シートの検査は、積層シートへの異物の混入といった不良が発生した不良品を市場に流通させないように行われるものである。しかし、不良品の市場への流通を防ぐだけでは、積層シートの作製時の歩留まりの低下を抑制することができない。そこで、製品不良が発見されたら、その発生原因を突き止め、それ以降の積層シートの作製において、製品不良の発生を抑制する対策を施すことが望ましい。 By the way, the inspection of the laminated sheet as described above is performed so as not to distribute a defective product in which a defect such as mixing of foreign matters into the laminated sheet occurs. However, simply preventing the distribution of defective products to the market cannot suppress a decrease in yield during the production of laminated sheets. Therefore, when a product defect is discovered, it is desirable to determine the cause of the occurrence and to take measures to suppress the occurrence of the product defect in the subsequent production of the laminated sheet.
　しかし、完成段階で出荷前に検査を行う特許文献１、２の検査装置では、異物等の不良の発生原因を十分に突き止めることが困難である。
　また、このことは、積層シートだけの問題点だけではなく、積層されていないシートの問題点でもある。 However, in the inspection apparatuses of Patent Documents 1 and 2 that inspect before shipment at the completion stage, it is difficult to sufficiently determine the cause of the occurrence of a defect such as a foreign object.
This is not only a problem of the laminated sheet alone, but also a problem of the non-laminated sheets.
　上記事情に鑑み、本発明は、シート不良の発生位置及び発生原因を十分に特定し得るシートの検査装置及び検査方法を提供することを課題とする。 In view of the above circumstances, an object of the present invention is to provide a sheet inspection apparatus and inspection method capable of sufficiently specifying the occurrence position and cause of sheet failure.
　本発明に係るシートの検査装置は、
　移動経路に沿って移動する帯状のシートを検査するシートの検査装置であって、
　移動可能な架台と、
　前記架台に支持されて前記シートを検査する検査部とを備え、
　前記検査部は、
　前記シートに光を照射する光源部と、
　前記架台が前記移動経路における任意の位置に配された状態で前記シートに対する相対的な撮像位置及び撮像角度を調整可能に構成され、且つ、前記光源部によって光が照射されている前記シートを撮像する撮像部とを有している。 The sheet inspection apparatus according to the present invention includes:
A sheet inspection apparatus for inspecting a belt-shaped sheet moving along a movement path,
A movable mount;
An inspection unit supported by the gantry and inspecting the sheet;
The inspection unit
A light source unit for irradiating the sheet with light;
The sheet is configured so that the relative imaging position and imaging angle relative to the sheet can be adjusted in a state in which the gantry is arranged at an arbitrary position in the movement path, and the light source unit irradiates light. And an imaging unit.
　上記構成のシートの検査装置においては、
　前記撮像部は、
　撮像本体部と、
　前記シートに対して前記撮像本体部を移動させて前記相対的な撮像位置を調整することが可能な位置調整部と、
　前記シートに対して前記撮像本体部を回転させて前記相対的な撮像角度を調整することが可能な角度調整部とを有していることが好ましい。 In the sheet inspection apparatus configured as described above,
The imaging unit
An imaging body,
A position adjusting unit capable of adjusting the relative imaging position by moving the imaging main body with respect to the sheet;
It is preferable to have an angle adjustment unit capable of adjusting the relative imaging angle by rotating the imaging main body with respect to the sheet.
　上記構成のシートの検査装置においては、
　前記位置調整部は、前記シートに対して第１の方向と、該第１の方向に垂直な第２の方向とに前記撮像本体部を移動させるように構成され、
　前記角度調整部は、前記シートに対して第１の回転軸と、該第１の回転軸に垂直な第２の回転軸とを中心として前記撮像本体部を回転させるように構成されていてもよい。 In the sheet inspection apparatus configured as described above,
The position adjustment unit is configured to move the imaging main body in a first direction with respect to the sheet and a second direction perpendicular to the first direction,
The angle adjustment unit may be configured to rotate the imaging main body about a first rotation axis and a second rotation axis perpendicular to the first rotation axis with respect to the sheet. Good.
　上記構成のシートの検査装置においては、
　前記位置調整部は、前記シートに対して接近及び離間する方向に前記撮像本体部を移動させることが可能な第１の位置調整部と、該第１の位置調整部による移動方向に垂直な方向に前記撮像本体部を移動させることが可能な第２の位置調整部とを有し、
　前記角度調整部は、前記シートに対して前記１の回転軸を中心として前記撮像本体部を回転させる第１の角度調整部と、前記第２の回転軸を中心として前記撮像本体部を回転させる第２の角度調整部とを有していてもよい。 In the sheet inspection apparatus configured as described above,
The position adjustment unit includes a first position adjustment unit capable of moving the imaging main body in a direction approaching and separating from the sheet, and a direction perpendicular to a moving direction of the first position adjustment unit And a second position adjustment unit capable of moving the imaging main body unit,
The angle adjusting unit rotates the imaging main body with respect to the sheet about the first rotation axis, and rotates the imaging main body about the second rotation axis. You may have a 2nd angle adjustment part.
　上記構成のシートの検査装置においては、
　前記撮像部と電気的に接続されて、前記撮像部からの検査結果を取得する制御部をさらに備え、
　前記制御部は、前記架台の移動に応じて移動可能に構成されていることが好ましい。 In the sheet inspection apparatus configured as described above,
A control unit that is electrically connected to the imaging unit and obtains a test result from the imaging unit;
It is preferable that the control unit is configured to be movable according to the movement of the gantry.
　本発明に係るシートの検査方法は、
　前記シートの検査装置を用い、
　前記シートを検査する方法である。 The sheet inspection method according to the present invention includes:
Using the sheet inspection device,
A method for inspecting the sheet.
本発明の実施形態のシートの検査装置を備えたシートの搬送装置を示す概略側面図Schematic side view showing a sheet conveying apparatus provided with a sheet inspection apparatus according to an embodiment of the present invention 図１のＡ方向から検査装置周辺を示す概略正面図Schematic front view showing the periphery of the inspection apparatus from direction A in FIG. 図２のＢ方向から検査装置周辺を示す概略上面図FIG. 2 is a schematic top view showing the periphery of the inspection apparatus from the direction B in FIG. 図３のＣ方向から検査装置周辺を示す概略側面図Schematic side view showing the periphery of the inspection apparatus from the direction C in FIG. 図４の検査装置に各部が配される状態を示す概略上面図Schematic top view showing a state in which each part is arranged in the inspection apparatus of FIG. 図４のＤ方向から検査装置周辺を示す概略上面図Schematic top view showing the periphery of the inspection apparatus from the direction D in FIG. 図６の検査装置に各部が配される状態を示す概略上面図Schematic top view showing a state where each part is arranged in the inspection apparatus of FIG. 第１及び第２の位置調整部の撮像位置調整動作を示す概略側面図Schematic side view showing the imaging position adjustment operation of the first and second position adjustment units 第１及び第２の位置調整部の撮像位置調整動作を示す概略側面図Schematic side view showing the imaging position adjustment operation of the first and second position adjustment units 第１及び第２の位置調整部の撮像位置調整動作を示す概略側面図Schematic side view showing the imaging position adjustment operation of the first and second position adjustment units 第１及び第２の角度調整部の撮像角度調整動作を示す概略側面図Schematic side view showing the imaging angle adjustment operation of the first and second angle adjustment units 第１及び第２の角度調整部の撮像角度調整動作を示す概略側面図Schematic side view showing the imaging angle adjustment operation of the first and second angle adjustment units 第１及び第２の角度調整部の撮像角度調整動作を示す概略側面図Schematic side view showing the imaging angle adjustment operation of the first and second angle adjustment units 第１の位置調整部によってシートに対する撮像本体部の撮像位置が調整される状態を示す概略側面図Schematic side view showing a state in which the imaging position of the imaging main body relative to the sheet is adjusted by the first position adjustment unit 第１の位置調整部によってシートに対する撮像本体部の撮像位置が調整される状態を示す概略側面図Schematic side view showing a state in which the imaging position of the imaging main body relative to the sheet is adjusted by the first position adjustment unit 第１の位置調整部によってシートに対する撮像本体部の撮像位置が調整される状態を示す概略側面図Schematic side view showing a state in which the imaging position of the imaging main body relative to the sheet is adjusted by the first position adjustment unit 第２の位置調整部によってシートに対する撮像本体部の撮像位置が調整される状態を示す概略側面図Schematic side view showing a state in which the imaging position of the imaging main body relative to the sheet is adjusted by the second position adjustment unit 第２の位置調整部によってシートに対する撮像本体部の撮像位置が調整される状態を示す概略側面図Schematic side view showing a state in which the imaging position of the imaging main body relative to the sheet is adjusted by the second position adjustment unit 第２の位置調整部によってシートに対する撮像本体部の撮像位置が調整される状態を示す概略側面図Schematic side view showing a state in which the imaging position of the imaging main body relative to the sheet is adjusted by the second position adjustment unit 第１の角度調整部によってシートに対する撮像本体部の撮像角度が調整される状態を示す概略側面図The schematic side view which shows the state in which the imaging angle of the imaging main-body part with respect to a sheet | seat is adjusted by the 1st angle adjustment part 第１の角度調整部によってシートに対する撮像本体部の撮像角度が調整される状態を示す概略側面図The schematic side view which shows the state in which the imaging angle of the imaging main-body part with respect to a sheet | seat is adjusted by the 1st angle adjustment part 第１の角度調整部によってシートに対する撮像本体部の撮像角度が調整される状態を示す概略側面図The schematic side view which shows the state in which the imaging angle of the imaging main-body part with respect to a sheet | seat is adjusted by the 1st angle adjustment part 第２の角度調整部によってシートに対する撮像本体部の撮像角度が調整される状態を示す概略側面図Schematic side view showing a state in which the imaging angle of the imaging main body relative to the sheet is adjusted by the second angle adjustment unit 第２の角度調整部によってシートに対する撮像本体部の撮像角度が調整される状態を示す概略側面図Schematic side view showing a state in which the imaging angle of the imaging main body relative to the sheet is adjusted by the second angle adjustment unit 第２の角度調整部によってシートに対する撮像本体部の撮像角度が調整される状態を示す概略側面図Schematic side view showing a state in which the imaging angle of the imaging main body relative to the sheet is adjusted by the second angle adjustment unit 本実施形態の検査装置が適用される一例のシートを示す概略側面図Schematic side view showing a sheet of an example to which the inspection apparatus of the present embodiment is applied 本実施形態の検査装置を備えた他のシートの搬送装置を示す概略側面図略側面図The schematic side view which shows the conveying apparatus of the other sheet | seat provided with the inspection apparatus of this embodiment Schematic side view
　以下、本発明の実施形態に係るシートの検査装置及び検査方法について、図面を参照しながら説明する。なお、図１～図７、図１０～図１３、図１５においてシートの搬送方向を白抜き矢印で示す。 Hereinafter, a sheet inspection apparatus and inspection method according to an embodiment of the present invention will be described with reference to the drawings. 1 to 7, 10 to 13, and 15, the sheet conveyance direction is indicated by a white arrow.
　まず、本実施形態のシートの検査装置を備えたシートの搬送装置について説明される。 First, a sheet conveying apparatus including the sheet inspection apparatus according to the present embodiment will be described.
　図１及び図２に示されるように、本実施形態のシート４０の搬送装置１は、帯状のシート４０としての原反シート６０が巻き回されてなる複数のロール体６１から原反シート６０をそれぞれ繰り出す複数の繰り出し部３と、繰り出された原反シート６０同士を積層してシート４０としての積層シート５０を形成する積層部７と、積層シート５０を巻き取ってロール体５１として回収する巻き取り部９と、移動可能であって、シート４０を検査可能な検査装置２０とを備えている。
　本実施形態では、２つの検査装置２０がシート４０の幅方向に沿って対をなすようにして備えられ、これら一対の検査装置２０が、シート４０を検査するようになっている。 As shown in FIG. 1 and FIG. 2, the sheet conveying apparatus 1 according to the present embodiment removes an original sheet 60 from a plurality of roll bodies 61 in which an original sheet 60 as a belt-like sheet 40 is wound. A plurality of feeding sections 3 that respectively feed out, a laminated section 7 that forms a laminated sheet 50 as a sheet 40 by laminating the fed raw sheet 60, and a winding that winds up the laminated sheet 50 and collects it as a roll body 51. A take-up section 9 and an inspection apparatus 20 that can move and inspect the sheet 40 are provided.
In the present embodiment, two inspection apparatuses 20 are provided so as to form a pair along the width direction of the sheet 40, and the pair of inspection apparatuses 20 inspect the sheet 40.
　この搬送装置１は、繰り出し部３から繰り出された原反シート６０同士が積層部７で積層されて積層シート５０が形成され、形成された積層シート５０が巻き取り部９によって巻き取られるようになっている。
　また、このシート４０の移動の際、シート４０が検査装置２０によって検査されるようになっている。 In the conveying device 1, the raw sheet 60 fed out from the feeding unit 3 is laminated by the laminating unit 7 to form a laminated sheet 50, and the formed laminated sheet 50 is wound up by the winding unit 9. It has become.
Further, when the sheet 40 is moved, the sheet 40 is inspected by the inspection apparatus 20.
　本実施形態では、２つの検査装置２０が全く同じ構成を有するため、以下、一方の検査装置２０（図２の右側の検査装置２０）についてのみ説明する。
　図２及び図３に示すように、検査装置２０は、移動経路に沿って移動する帯状のシート４０を検査するシート４０の検査装置２０であって、移動可能な架台２１と、前記架台２１に支持されて前記シート４０を検査する検査部２２とを備えている。前記検査部２２は、前記シート４０に光を照射する光源部２３と、前記架台２１がシート４０の移動経路における任意の位置に配された状態で前記シート４０に対する相対的な撮像位置及び撮像角度を調整可能に構成され、且つ、前記光源部２３によって光が照射されている前記シート４０を撮像する撮像部２５とを有している。 In the present embodiment, since the two inspection apparatuses 20 have exactly the same configuration, only one inspection apparatus 20 (the inspection apparatus 20 on the right side in FIG. 2) will be described below.
As shown in FIGS. 2 and 3, the inspection apparatus 20 is an inspection apparatus 20 for a sheet 40 that inspects a belt-like sheet 40 that moves along a movement path. The inspection apparatus 20 includes a movable base 21 and a movable base 21. And an inspection unit 22 that is supported and inspects the sheet 40. The inspection unit 22 includes a light source unit 23 that irradiates light to the sheet 40 and a relative imaging position and imaging angle with respect to the sheet 40 in a state in which the gantry 21 is disposed at an arbitrary position in the movement path of the sheet 40. And an imaging unit 25 that images the sheet 40 irradiated with light from the light source unit 23.
　また、シート４０の検査装置２０は、前記撮像部２５と電気的に接続されて、前記撮像部２５からの検査結果を取得する制御部３７をさらに備え、前記制御部３７は、架台２１の移動に応じて移動可能に構成されている。 The inspection device 20 for the sheet 40 further includes a control unit 37 that is electrically connected to the imaging unit 25 and acquires the inspection result from the imaging unit 25, and the control unit 37 moves the gantry 21. It is configured to be movable according to the situation.
　架台２１は、検査箇所を移動させるべく移動可能に構成されており、シート４０の移動経路において任意の位置に移動されるものである。この架台２１が検査部２２と共に移動されることによって、検査装置２０が移動されるようになっている。
　図１に示される態様では、架台２１は、シート４０の移動経路において、搬送装置１が有するフレーム５に取り付けられるようになっている。例えば、架台２１は、ボルト等によってフレーム５に取り付けられるようになっている。
　この図１には、２つの繰り出し部３のうち一方の繰り出し部３の近傍のフレーム５に架台２１が取り付けられた状態が例示される。 The gantry 21 is configured to be movable so as to move the inspection location, and is moved to an arbitrary position in the movement path of the sheet 40. The inspection apparatus 20 is moved by moving the gantry 21 together with the inspection unit 22.
In the aspect shown in FIG. 1, the gantry 21 is attached to the frame 5 of the conveyance device 1 in the movement path of the sheet 40. For example, the gantry 21 is attached to the frame 5 with bolts or the like.
FIG. 1 illustrates a state in which the gantry 21 is attached to the frame 5 in the vicinity of one of the two feeding portions 3.
　架台２１は、作業者が持ち運びできるような大きさに形成されている。
　このように、架台２１が持ち運び可能に形成されていることによって、架台２１の移動が容易となる。 The gantry 21 is formed in a size that can be carried by an operator.
As described above, since the gantry 21 is formed to be portable, the gantry 21 can be easily moved.
　図２、図３に示すように、架台２１は、その主体をなすＬ字状の本体部２１ａと、該本体部２１ａを補強する補強部２１ｂとを有している。本体部２１ａのＬ字の一端部は、フレーム５の側面にボルト等によって固定され、他端部は、該フレーム５の側面側（外側）から内側に向かって突出している。上記Ｌ字の一端部には、光源部２３が固定されている。上記Ｌ字の他端部には、撮像部２５が固定されている。補強部２１ｂは、本体部２１ａの側面部に配されて、該本体部２１ａを補強するようになっている。 As shown in FIGS. 2 and 3, the gantry 21 has an L-shaped main body portion 21a that forms the main body and a reinforcing portion 21b that reinforces the main body portion 21a. One end portion of the L-shape of the main body portion 21a is fixed to the side surface of the frame 5 with a bolt or the like, and the other end portion protrudes inward from the side surface side (outer side) of the frame 5. A light source unit 23 is fixed to one end of the L shape. An imaging unit 25 is fixed to the other end of the L shape. The reinforcing portion 21b is arranged on the side surface portion of the main body portion 21a so as to reinforce the main body portion 21a.
　検査部２２は、シート４０に光を照射する光源部２３と、撮像部２５とを有している。
　撮像部２５は、架台２１がシート４０の移動経路における任意の位置に配された状態でシート４０に対する相対的な撮像位置及び撮像角度を調整可能に構成され、且つ、前記光源部２３によって光が照射されている前記シート４０を撮像するように構成されている。 The inspection unit 22 includes a light source unit 23 that irradiates light to the sheet 40 and an imaging unit 25.
The imaging unit 25 is configured to be able to adjust a relative imaging position and imaging angle with respect to the sheet 40 in a state where the gantry 21 is arranged at an arbitrary position in the movement path of the sheet 40, and light is emitted from the light source unit 23. The sheet 40 being irradiated is imaged.
　光源部２３は、シート４０に光を照射するものである。該光源部２３は、光源本体部２３ａと、架台２１に接続される接続部２３ｂとを有しており、該接続部２３ｂが架台２１の本体部２１ａの上記一端部に接続されている。光源部２３は、シート４０の一面（ここでは下面）側からシート４０に向かって光を照射するようになっている。 The light source unit 23 irradiates the sheet 40 with light. The light source unit 23 includes a light source main body 23 a and a connection part 23 b connected to the gantry 21, and the connection part 23 b is connected to the one end of the main body 21 a of the gantry 21. The light source unit 23 emits light from one surface (here, the lower surface) side of the sheet 40 toward the sheet 40.
　撮像部２５は、シート４０に対する相対的な撮像位置及び撮像角度を調整可能に構成され、且つ、前記光源部２３によって光が照射されている前記シート４０を撮像するものである。
　上記撮像角度は、シート４０の被撮像面（ここでは上面）と撮像部２５の撮像方向とがなす角度である。
　本実施形態では、撮像部２５は、シート４０の一面（ここでは下面）側から光が照射されているシート４０を、他面（ここでは上面）側から撮像するようになっている。 The imaging unit 25 is configured to be able to adjust a relative imaging position and imaging angle with respect to the sheet 40, and images the sheet 40 irradiated with light from the light source unit 23.
The imaging angle is an angle formed by the imaging surface (here, the upper surface) of the sheet 40 and the imaging direction of the imaging unit 25.
In the present embodiment, the imaging unit 25 images the sheet 40 irradiated with light from one surface (here, the lower surface) side from the other surface (here, the upper surface) side.
　撮像部２５は、シート４０に対する相対的な撮像位置及び撮像角度を調整可能であるように構成されている。
　具体的には、図４～７に示されるように、撮像部２５は、撮像本体部２７と、シート４０に対して撮像本体部２７を移動させて上記相対的な撮像位置を調整することが可能な位置調整部３１と、シート４０に対して撮像本体部２７を回転させて上記相対的な撮像角度を調整することが可能な角度調整部３３とを有している。 The imaging unit 25 is configured to be able to adjust the imaging position and imaging angle relative to the sheet 40.
Specifically, as shown in FIGS. 4 to 7, the imaging unit 25 can adjust the relative imaging position by moving the imaging main body 27 with respect to the imaging main body 27 and the sheet 40. It has a position adjustment unit 31 that can be adjusted, and an angle adjustment unit 33 that can adjust the relative imaging angle by rotating the imaging main body 27 with respect to the sheet 40.
　撮像本体部２７は、シート４０を撮像する主体をなすものである。
　かかる撮像本体部２７としては、従来公知のカメラ等が採用され得る。 The imaging main body 27 is a main body that images the sheet 40.
As the imaging main body 27, a conventionally known camera or the like can be adopted.
　位置調整部３１は、シート４０に対して撮像本体部２７を移動させることによって上記相対的な撮像位置を調整可能なものである。具体的には、位置調整部３１は、一方向（第１の方向）、及び、該一方向（第１の方向）に垂直な方向（第２の方向）に撮像本体部２７を移動させることが可能に構成されている。 The position adjusting unit 31 can adjust the relative imaging position by moving the imaging main body 27 with respect to the sheet 40. Specifically, the position adjustment unit 31 moves the imaging main body 27 in one direction (first direction) and in a direction (second direction) perpendicular to the one direction (first direction). Is configured to be possible.
　より具体的には、位置調整部３１は、シート４０に対して接近及び離間する方向（第１の方向、ここでは鉛直方向、すなわち、シート４０に垂直な方向）に撮像本体部２７を移動させることが可能な第１の位置調整部３１ａと、該第１の位置調整部３１ａによる移動方向に垂直な方向（第２の方向、ここでは水平方向、すなわち、シート４０の幅方向）に撮像本体部２７を移動させることが可能な第２の位置調整部３１ｂとを有している。 More specifically, the position adjusting unit 31 moves the imaging main body 27 in a direction approaching and separating from the sheet 40 (a first direction, here, a vertical direction, that is, a direction perpendicular to the sheet 40). The first position adjustment unit 31a capable of imaging and the imaging main body in a direction perpendicular to the moving direction by the first position adjustment unit 31a (second direction, here, the horizontal direction, that is, the width direction of the sheet 40) And a second position adjusting unit 31b capable of moving the unit 27.
　図５及び図７が参照されつつ、図８Ａ～図８Ｃに示されるように、第１の位置調整部３１ａは、互いに相対的に移動可能な２つのステージ部３１ａａ、３１ａｂと、２つのステージ部３１ａａ、３１ａｂの相対的な移動量を調整するための移動量調整部３１ａｃと、平坦な底面３１ａｄとを有している。移動量調整部３１ａｃとしては、回転させることによって上記移動量を調整可能なツマミ部が採用されている。
　このような第１の位置調整部３１ａとしては、一方が他方に対して直線的に移動するように２つのステージ部３１ａａ、３１ａｂがラックピニオン機構によって連結されてなるものが用いられ得る。かかる第１の位置調整部３１ａとしては、シグマ光機社製の粗微動ラックピニオンステージ（例えば、品番ＴＡＲ－３８８０１Ｄ等）が挙げられる。
　この第１の位置調整部３１ａは、２つのステージ部３１ａａ、３１ａｂが、シート４０に対して接近及び離間する方向（ここでは鉛直方向）に互いに相対的に移動可能になるように配されている。 8 and 8C, the first position adjustment unit 31a includes two stage units 31aa and 31ab that are movable relative to each other, and two stage units. A movement amount adjustment unit 31ac for adjusting the relative movement amounts of 31aa and 31ab and a flat bottom surface 31ad are provided. As the movement amount adjustment unit 31ac, a knob unit that can adjust the movement amount by rotating is adopted.
As such a first position adjusting unit 31a, a unit in which two stage units 31aa and 31ab are connected by a rack and pinion mechanism so that one moves linearly with respect to the other can be used. Examples of the first position adjusting unit 31a include a coarse / fine movement rack and pinion stage (for example, product number TAR-38801D) manufactured by Sigma Kogyo Co., Ltd.
The first position adjusting unit 31a is arranged so that the two stage units 31aa and 31ab can move relative to each other in a direction approaching and separating from the sheet 40 (here, a vertical direction). .
　また、第２の位置調整部３１ｂは、互いに相対的に移動可能な２つのステージ部３１ｂａ、３１ｂｂと、２つのステージ部３１ｂａ、３１ｂｂの相対的な移動量を調整するための移動量調整部３１ｂｃと、平坦な底面３１ｂｄとを有している。移動量調整部３１ｂｃとしては、回転させることによって上記移動量を調整可能なツマミ部が採用されている。
　このような第２の位置調整部３１ｂとしては、一方が他方に対して直線的に移動するように２つのステージ部３１ｂａ、３１ｂｂがラックピニオン機構によって連結されてなるものが用いられ得る。かかる第２の位置調整部３１ｂとしては、上記同様、シグマ光機社製の粗微動ラックピニオンステージ（例えば、品番ＴＡＲ－３８８０１Ｄ等）が挙げられる。
　この第２の位置調整部３１ｂは、２つのステージ部３１ｂａ、３１ｂｂが、第１の位置調整部３１ａによる移動方向に垂直な方向（ここでは水平方向、すなわちシート４０の幅方向）に互いに相対的に移動可能になるように配されている。 The second position adjustment unit 31b includes two stage units 31ba and 31bb that can move relative to each other, and a movement amount adjustment unit 31bc for adjusting the relative movement amounts of the two stage units 31ba and 31bb. And a flat bottom surface 31bd. As the movement amount adjustment unit 31bc, a knob unit that can adjust the movement amount by rotating is adopted.
As such a second position adjusting unit 31b, a unit in which two stage units 31ba and 31bb are coupled by a rack and pinion mechanism so that one moves linearly with respect to the other can be used. As the second position adjustment unit 31b, a coarse / fine movement rack and pinion stage (for example, a product number TAR-38801D) manufactured by Sigma Koki Co., Ltd. can be cited as described above.
In the second position adjusting unit 31b, the two stage units 31ba and 31bb are relatively relative to each other in a direction perpendicular to the moving direction of the first position adjusting unit 31a (here, the horizontal direction, that is, the width direction of the sheet 40). It is arranged to be movable.
　なお、本実施形態では、第１及び第２の位置調整部３１ａ、３１ｂとして、同じ構成を有する２つの位置調整部が、互いの移動方向が９０°傾いているように配されたものが採用される。 In the present embodiment, as the first and second position adjusting units 31a and 31b, two position adjusting units having the same configuration are arranged so that their moving directions are inclined by 90 °. Is done.
　図５及び図７に示されるように、第１の位置調整部３１ａの一方のステージ部３１ａｂは、第２の位置調整部３１ｂの一方のステージ部３１ｂａに、不図示の接続部によって連結されている。また、第１の位置調整部３１ａの他方のステージ部３１ａａは、不図示の接続部によって架台２１に取り付けられている。 As shown in FIGS. 5 and 7, one stage 31ab of the first position adjusting unit 31a is coupled to one stage 31ba of the second position adjusting unit 31b by a connection unit (not shown). Yes. The other stage portion 31aa of the first position adjustment portion 31a is attached to the gantry 21 by a connection portion (not shown).
　角度調整部３３は、シート４０に対して撮像本体部２７を回転させることによって上記相対的な撮像角度を調整可能なものである。なお、撮像角度の変更は、撮像本体部２７の姿勢の変更に相当する。具体的には、角度調整部３３は、任意の一の回転軸（第１の回転軸）Ｒ１、及び、該回転軸Ｒ１に垂直な回転軸（第２の回転軸）Ｒ２を中心として撮像本体部２７を回転させるように構成されている（図４、図６参照）。 The angle adjusting unit 33 can adjust the relative imaging angle by rotating the imaging main body 27 with respect to the sheet 40. Note that the change in the imaging angle corresponds to a change in the posture of the imaging main body 27. Specifically, the angle adjustment unit 33 is configured to have an imaging body centering on an arbitrary one rotation axis (first rotation axis) R1 and a rotation axis (second rotation axis) R2 perpendicular to the rotation axis R1. It is comprised so that the part 27 may be rotated (refer FIG. 4, FIG. 6).
　より具体的には、角度調整部３３は、回転軸Ｒ１（ここでは第１の角度調整部３３ａの底面３３ａｄに平行、且つ、シート４０の幅方向に平行な回転軸、すなわち、シート４０の幅方向に平行な回転軸）を中心として、シート４０に対して撮像本体部２７を回転させる第１の角度調整部３３ａと、該第１の角度調整部３３ａの回転軸Ｒ１に垂直な回転軸Ｒ２（ここでは、第２の角度調整部３３ｂの平坦な底面３３ｂｄに平行、且つ、第１の角度調整部３３ａの回転軸Ｒ１に垂直な回転軸、すなわち、シート４０に垂直な回転軸）を中心として、シート４０に対して撮像本体部２７を回転させる第２の角度調整部３３ｂとを有している。 More specifically, the angle adjustment unit 33 is a rotation axis R1 (here, a rotation axis parallel to the bottom surface 33ad of the first angle adjustment unit 33a and parallel to the width direction of the sheet 40, that is, the width of the sheet 40). A rotation angle R2 perpendicular to the rotation axis R1 of the first angle adjustment unit 33a and a first angle adjustment unit 33a that rotates the imaging main body 27 with respect to the sheet 40. (Here, the rotation axis is parallel to the flat bottom surface 33bd of the second angle adjustment unit 33b and is perpendicular to the rotation axis R1 of the first angle adjustment unit 33a, that is, the rotation axis perpendicular to the seat 40). As a second angle adjusting unit 33b that rotates the imaging main body 27 with respect to the sheet 40.
　図５及び図７が参照されつつ、図９Ａ～図９Ｃに示されるように、第１の角度調整部３３ａは、互いに相対的に回転可能な２つのステージ部３３ａａ、３３ａｂと、２つのステージ部３３ａａ、３３ａｂの相対的な回転量を調整するための回転量調整部３３ａｃと、平坦な底面３３ａｄとを有している。回転量調整部３３ａｃとしては、回転させることによって上記回転量を調整可能なツマミ部が採用されている。
　このような第１の角度調整部３３ａとしては、一方が他方に対して円弧を描いて移動するように２つのステージ部３３ａａ、３３ａｂが連結されてなるゴニオステージが用いられ得る。かかる第１の角度調整部３３ａとしては、シグマ光機社製のα軸ゴニオステージ（例えば、品番ＧＯＨ－６０Ａ１１５、ＧＯＨ－６０Ａ５０等）が挙げられる。
　この第１の角度調整部３３ａは、２つのステージ部３３ａａ、３３ａｂが、ステージ部３３ａａの底面（すなわち、第１の角度調整部３３ａの底面）３３ａｄに平行、且つ、シート４０の幅方向に平行な回転軸Ｒ１（すなわち、上記の通り、シート４０の幅方向に平行な回転軸）を中心として互いに相対的に回転可能になるように配されている。 9A to 9C, the first angle adjusting unit 33a includes two stage units 33aa and 33ab that are rotatable relative to each other, and two stage units. A rotation amount adjustment unit 33ac for adjusting the relative rotation amounts of 33aa and 33ab and a flat bottom surface 33ad are provided. As the rotation amount adjustment unit 33ac, a knob unit that can adjust the rotation amount by rotating is adopted.
As such a first angle adjusting unit 33a, a gonio stage formed by connecting two stage units 33aa and 33ab so that one moves in an arc with respect to the other may be used. Examples of the first angle adjusting unit 33a include an α axis goniometer stage (for example, product numbers GOH-60A115, GOH-60A50, etc.) manufactured by Sigma Kogyo Co., Ltd.
In the first angle adjusting unit 33a, the two stage units 33aa and 33ab are parallel to the bottom surface 33ad of the stage unit 33aa (that is, the bottom surface of the first angle adjusting unit 33a) and parallel to the width direction of the sheet 40. Are arranged so as to be rotatable relative to each other around a rotation axis R1 (that is, a rotation axis parallel to the width direction of the sheet 40 as described above).
　また、第２の角度調整部３３ｂは、互いに相対的に回転可能な２つのステージ部３３ｂａ、３３ｂｂと、２つのステージ部３３ｂａ、３３ｂｂの相対的な回転量を調整するための回転量調整部３３ｂｃとを有している。回転量調整部３３ｂｃとしては、回転させることによって上記回転量を調整可能なツマミ部が採用されている。
　このような第２の角度調整部３３ｂとしては、一方が他方に対して円弧を描いて移動するように２つのステージ部３３ｂａ、３３ｂｂが連結されてなるゴニオステージが用いられ得る。かかる第２の角度調整部３３ｂとしては、上記同様、シグマ光機社製のα軸ゴニオステージ（例えば、品番ＧＯＨ－６０Ａ１１５、ＧＯＨ－６０Ａ５０等）が挙げられる。
　この第２の角度調整部３３ｂは、２つのステージ部３３ｂａ、３３ｂｂが、ステージ部３３ｂａの底面（すなわち、第２の角度調整部３３ｂの底面）３３ｂｄに平行、且つ、第１の角度調整部３３ａの回転軸Ｒ１に垂直な回転軸Ｒ２（すなわち、上記の通り、シート４０に垂直な回転軸）を中心として互いに相対的に回転可能になるように配されている。 The second angle adjustment unit 33b includes two stage units 33ba and 33bb that can rotate relative to each other, and a rotation amount adjustment unit 33bc for adjusting the relative rotation amount of the two stage units 33ba and 33bb. And have. As the rotation amount adjustment unit 33bc, a knob unit that can adjust the rotation amount by rotating is adopted.
As such a second angle adjusting unit 33b, a gonio stage in which two stage units 33ba and 33bb are connected so that one moves in an arc with respect to the other may be used. As the second angle adjusting unit 33b, as described above, an α-axis goniometer stage (for example, product numbers GOH-60A115, GOH-60A50, etc.) manufactured by Sigma Koki Co., Ltd. may be used.
In the second angle adjusting unit 33b, the two stage units 33ba and 33bb are parallel to the bottom surface 33bd of the stage unit 33ba (that is, the bottom surface of the second angle adjusting unit 33b), and the first angle adjusting unit 33a. Are arranged so as to be rotatable relative to each other around a rotation axis R2 perpendicular to the rotation axis R1 (that is, as described above, a rotation axis perpendicular to the seat 40).
　なお、本実施形態では、第１及び第２の角度調整部３３ａ、３３ｂとして、同じ構成を有する２つの角度調整部が、互いの回転軸が９０°傾いているように配されたものが採用されている。 In the present embodiment, as the first and second angle adjusting units 33a and 33b, two angle adjusting units having the same configuration are arranged so that their rotation axes are inclined by 90 °. Has been.
　図５及び図７に示されるように、第１の角度調整部３３ａの一方のステージ部３３ａｂは、第２の角度調整部３３ｂの一方のステージ部３３ｂａに、不図示の接続部によって連結されている。また、第１の角度調整部３３ａの他方のステージ部３３ａａは、第２の位置調整部３１ｂにおける第１の位置調整部３１ａとは反対の側のステージ部３１ｂｂに不図示の接続部によって連結されている。 As shown in FIGS. 5 and 7, one stage portion 33ab of the first angle adjustment portion 33a is coupled to one stage portion 33ba of the second angle adjustment portion 33b by a connection portion (not shown). Yes. Further, the other stage portion 33aa of the first angle adjustment portion 33a is connected to a stage portion 31bb on the side opposite to the first position adjustment portion 31a in the second position adjustment portion 31b by a connection portion (not shown). ing.
　上記位置調整部３１及び角度調整部３３による、シート４０に対する撮像本体部２７の撮像位置及び撮像角度の調整について、以下に説明される。 The adjustment of the imaging position and imaging angle of the imaging main body 27 with respect to the sheet 40 by the position adjusting unit 31 and the angle adjusting unit 33 will be described below.
　図１０Ａ～図１０Ｃに示されるように、第１の位置調整部３１ａの移動量調整部３１ａｃが回転されることによって該第１の位置調整部３１ａが作動すると、架台２１に取り付けられたステージ部３１ａａに対して他方のステージ部３１ａｂが、上記の通り、鉛直方向に移動する。この移動に伴って、第２の位置調整部３１ｂ、角度調整部３３、及び撮像本体部２７が、上記の通り、鉛直方向に移動する。これにより、シート４０に垂直な方向におけるシート４０に対する撮像本体部２７の撮像位置（すなわち、シート４０と撮像本体部２７の中心とを結ぶ最短距離Ｌ）が調整され得る。 As shown in FIGS. 10A to 10C, when the first position adjusting unit 31a is actuated by rotating the movement amount adjusting unit 31ac of the first position adjusting unit 31a, the stage unit attached to the gantry 21 is operated. As described above, the other stage portion 31ab moves in the vertical direction with respect to 31aa. With this movement, the second position adjustment unit 31b, the angle adjustment unit 33, and the imaging main body 27 move in the vertical direction as described above. Thereby, the imaging position of the imaging main body 27 with respect to the sheet 40 in the direction perpendicular to the sheet 40 (that is, the shortest distance L connecting the sheet 40 and the center of the imaging main body 27) can be adjusted.
　図１１Ａ～図１１Ｃに示すように、第２の位置調整部３１ｂの移動量調整部３１ｂｃが回転されることによって該第２の位置調整部３１ｂが作動すると、第１の位置調整部３１ａのステージ部３１ａｂに連結された第２の位置調整部３１ｂのステージ部３１ｂａに対して、他方のステージ部３１ｂｂが、上記の通り、シート４０の幅方向に移動する。この移動に伴って、角度調整部３３、及び撮像本体部２７が、上記の通り、シート４０の幅方向に移動する。これにより、シート４０の幅方向におけるシート４０に対する撮像本体部２７の撮像位置が調整され得る。 As shown in FIGS. 11A to 11C, when the second position adjusting unit 31b is operated by rotating the movement amount adjusting unit 31bc of the second position adjusting unit 31b, the stage of the first position adjusting unit 31a is operated. The other stage portion 31bb moves in the width direction of the sheet 40 as described above with respect to the stage portion 31ba of the second position adjustment portion 31b connected to the portion 31ab. Along with this movement, the angle adjustment unit 33 and the imaging main body 27 move in the width direction of the sheet 40 as described above. Thereby, the imaging position of the imaging main body 27 with respect to the sheet 40 in the width direction of the sheet 40 can be adjusted.
　図１２Ａ～図１２Ｃに示されるように、第１の角度調整部３３ａの回転量調整部３３ａｃが回転されることによって該第１の角度調整部３３ａが作動すると、第２の位置調整部３１ｂのステージ部３１ｂｂに連結された第１の角度調整部３３ａのステージ部３３ａａに対して、他方のステージ部３３ａｂが、上記の通り、シート４０の幅方向に平行な回転軸Ｒ１を中心として回転する。この回転に伴って、第２の角度調整部３３ｂ、及び撮像本体部２７が、上記の通り、シート４０の幅方向に平行な回転軸Ｒ１を中心として回転する。これにより、シート４０に対する撮像本体部２７の撮像角度のうち、シート４０に垂直、且つ、シート４０の幅方向に垂直（長手方向に平行）な仮想平面における撮像角度成分θ１が調整され得る。 As shown in FIGS. 12A to 12C, when the rotation amount adjustment unit 33ac of the first angle adjustment unit 33a is rotated to operate the first angle adjustment unit 33a, the second position adjustment unit 31b The other stage portion 33ab rotates around the rotation axis R1 parallel to the width direction of the sheet 40 as described above with respect to the stage portion 33aa of the first angle adjustment portion 33a connected to the stage portion 31bb. With this rotation, the second angle adjustment unit 33b and the imaging main body 27 rotate around the rotation axis R1 parallel to the width direction of the sheet 40 as described above. Thereby, among the imaging angles of the imaging main body 27 with respect to the sheet 40, the imaging angle component θ1 in a virtual plane perpendicular to the sheet 40 and perpendicular to the width direction of the sheet 40 (parallel to the longitudinal direction) can be adjusted.
　図１３Ａ～図１３Ｃに示されるように、第２の角度調整部３３ｂの回転量調整部３３ｂｃをが回転されることによって該第２の角度調整部３３ｂが作動すると、第１の角度調整部３３ａのステージ部３３ａｂに連結された第２の角度調整部３３ｂのステージ部３３ｂａに対して、他方のステージ部３３ｂｂが、上記の通り、ステージ部３３ｂａの底面３３ｂｄに平行、且つ、第１の角度調整部３３ａの回転軸Ｒ１に垂直な回転軸（すなわち、シート４０に垂直な回転軸）Ｒ２を中心として回転する。この回転に伴って、撮像本体部２７が、上記の通り、ステージ部３３ｂａの底面３３ｂｄに平行、且つ、第１の角度調整部３３ａの回転軸Ｒ１に垂直な回転軸（すなわち、シート４０に垂直な回転軸）Ｒ２を中心として回転する。これにより、シート４０に対する撮像本体部２７の撮像角度のうち、シート４０に平行な仮想平面における撮像角度成分θ２が調整され得る。 As shown in FIGS. 13A to 13C, when the second angle adjusting unit 33b is operated by rotating the rotation amount adjusting unit 33bc of the second angle adjusting unit 33b, the first angle adjusting unit 33a is operated. As described above, the other stage portion 33bb is parallel to the bottom surface 33bd of the stage portion 33ba and the first angle adjustment is performed with respect to the stage portion 33ba of the second angle adjustment portion 33b connected to the stage portion 33ab. The portion 33a rotates about a rotation axis R2 perpendicular to the rotation axis R1 (that is, a rotation axis perpendicular to the seat 40). With this rotation, as described above, the imaging main body 27 is parallel to the bottom surface 33bd of the stage portion 33ba and is perpendicular to the rotation axis R1 of the first angle adjustment unit 33a (that is, perpendicular to the sheet 40). A rotation axis) that rotates about R2. Thereby, the imaging angle component θ <b> 2 in the virtual plane parallel to the sheet 40 among the imaging angles of the imaging main body 27 with respect to the sheet 40 can be adjusted.
　上記した第１の位置調整部３１ａによる撮像本体部２７の移動動作と第２の位置調整部３１ｂによる撮像本体部２７の移動動作とを組み合わせることにより、シート４０に対する撮像本体部２７の撮像位置を自在に調整することができる。 By combining the moving operation of the imaging main body 27 by the first position adjusting unit 31a and the moving operation of the imaging main body 27 by the second position adjusting unit 31b, the imaging position of the imaging main body 27 with respect to the sheet 40 is determined. It can be adjusted freely.
　上記した第１の角度調整部３３ａによる撮像本体部２７の回転動作と第２の角度調整部３３ｂによる撮像本体部２７の回転動作とを組み合わせることにより、シート４０に対する撮像本体部２７の撮像角度を自在に調整することができる。 By combining the rotation operation of the imaging main body 27 by the first angle adjustment unit 33a and the rotation operation of the imaging main body 27 by the second angle adjustment unit 33b, the imaging angle of the imaging main body 27 with respect to the sheet 40 is set. It can be adjusted freely.
　制御部３７は、撮像部２５と電気的に接続されており、撮像部２５での検査結果が電子データとして送信され、送信された検査結果を取得するものである。
　また、制御部３７は、移動可能に構成されており、これにより、架台２１の移動に伴って制御部３７が移動されるようになっている。
　かかる制御部３７としては、中央処理装置（ＣＰＵ）を備えたコンピューター等が挙げられる。 The control unit 37 is electrically connected to the imaging unit 25, and the inspection result in the imaging unit 25 is transmitted as electronic data, and the transmitted inspection result is acquired.
Moreover, the control part 37 is comprised so that a movement is possible, and the control part 37 is moved by the movement of the mount frame 21 by this.
Examples of the control unit 37 include a computer having a central processing unit (CPU).
　次に、本実施形態のシート４０の搬送装置１において、移動しているシート４０を、検査装置２０を用いて検査する検査方法について、以下に説明される。 Next, an inspection method for inspecting the moving sheet 40 using the inspection apparatus 20 in the sheet conveying apparatus 1 of the present embodiment will be described below.
　まず、搬送装置１のフレーム５に、検査装置２０が移動されて架台２１が取り付けられる。
　例えば、図１に示すように、原反シート６０（シート４０）の繰り出し部３の近傍のフレーム５に、検査装置２０の架台２１が取り付けられる。 First, the inspection apparatus 20 is moved to the frame 5 of the transport apparatus 1 and the gantry 21 is attached.
For example, as shown in FIG. 1, the frame 21 of the inspection apparatus 20 is attached to the frame 5 in the vicinity of the feeding portion 3 of the original fabric sheet 60 (sheet 40).
　架台２１が取り付けられた後（すなわち、架台２１がシート４０の移動経路における任意の位置に配された状態で）、位置調整部３１及び角度調整部３３によって、原反シート６０に対する撮像部２５の撮像位置及び撮像角度が調整される。 After the gantry 21 is attached (that is, in a state where the gantry 21 is arranged at an arbitrary position in the movement path of the sheet 40), the position adjustment unit 31 and the angle adjustment unit 33 allow the imaging unit 25 with respect to the original fabric sheet 60 The imaging position and imaging angle are adjusted.
　具体的には、上記したように、第１の位置調整部３１ａによる、原反シート６０に対して接近する方向及び離間する方向における撮像本体部２７の撮像位置調整（図１０Ａ～図１０Ｃ参照）と、第２の位置調整部３１ｂによる、原反シート６０の幅方向における撮像本体部２７の撮像位置調整（図１１Ａ～図１１Ｃ参照）と、第１の角度調整部３３ａによる、原反シート６０に垂直且つ原反シート６０の幅方向に垂直な仮想平面上での原反シート６０に対する撮像本体部２７の撮像角度成分θ１の調整（図１２Ａ～図１２Ｃ参照）と、第２の角度調整部３３ｂによる、原反シート６０に平行な仮想平面上での原反シート６０に対する撮像本体部２７の撮像角度成分θ２の調整（図１３Ａ～図１３Ｃ参照）とが組み合わされて行われることにより、原反シート６０に対する撮像本体部２７の撮像位置及び撮像角度が調整され、これによって、撮像本体部２７の撮像対象領域及び焦点が適切なものとされる。 Specifically, as described above, the imaging position adjustment of the imaging main body 27 in the direction approaching and separating from the original fabric sheet 60 by the first position adjustment unit 31a (see FIGS. 10A to 10C). The imaging position adjustment (see FIGS. 11A to 11C) of the imaging main body 27 in the width direction of the original sheet 60 by the second position adjusting unit 31b and the original sheet 60 by the first angle adjusting unit 33a. Adjustment of the imaging angle component θ1 of the imaging main body 27 with respect to the original fabric sheet 60 on a virtual plane perpendicular to the width direction of the original fabric sheet 60 (see FIGS. 12A to 12C), and a second angle adjustment unit The adjustment of the imaging angle component θ2 of the imaging main body 27 with respect to the original sheet 60 on the virtual plane parallel to the original sheet 60 (see FIGS. 13A to 13C) is performed in combination. Thus, the imaging position and imaging angle of the imaging main body 27 with respect to the original fabric sheet 60 are adjusted, and thereby the imaging target region and focus of the imaging main body 27 are made appropriate.
　この状態で、ロール体６１から繰り出し部３によって原反シート６０が繰り出され、このように繰り出されることによって移動している原反シート６０に対して、光源部２３によって光が照射され、光が照射されている原反シート６０が撮像部２５の撮像本体部２７によって撮像されることによって、検査が行われる。 In this state, the raw sheet 60 is fed from the roll body 61 by the feeding unit 3, and the light source unit 23 emits light to the original fabric sheet 60 that is moved by being fed in this way, so that the light is emitted. The inspection is performed by imaging the irradiated raw sheet 60 by the imaging main body 27 of the imaging unit 25.
　得られた検査結果は、電子データとして撮像部２５から制御部３７に送信される。 The obtained inspection result is transmitted from the imaging unit 25 to the control unit 37 as electronic data.
　このように、繰り出し部３の近傍のクレーム５に検査装置２０が移動されて、該検査装置２０が移動された位置にて、原反シート６０が検査される。 Thus, the inspection apparatus 20 is moved to the claim 5 in the vicinity of the feeding unit 3, and the original fabric sheet 60 is inspected at the position where the inspection apparatus 20 is moved.
　また、このように原反シート６０の検査が行われつつ、検査された原反シート６０と、他の繰り出し部３から繰り出された原反シート６０とが積層部７によって積層されて積層シート５０（シート４０）が形成され、形成された積層シート５０が、巻き取り部９によって巻き取られてロール体５１として回収される。 In addition, while the original sheet 60 is inspected in this way, the inspected original sheet 60 and the original sheet 60 fed out from the other feeding unit 3 are laminated by the laminating unit 7 to be laminated sheet 50. (Sheet 40) is formed, and the formed laminated sheet 50 is taken up by the take-up unit 9 and collected as the roll body 51.
　さらに、シート４０の移動経路において、他の位置でシート４０の検査が行われる場合には、巻き取り部３の近傍のフレーム５から検査装置２０が取り外され、例えば、積層部７の近傍のフレーム（不図示）に検査装置２０が移動され、該フレームに検査装置２０が上記と同様にして取り付けられて、該検査装置２０が移動された位置にて、積層シート５０の検査が行われる。 Further, when the sheet 40 is inspected at another position in the movement path of the sheet 40, the inspection device 20 is removed from the frame 5 near the winding unit 3, for example, the frame near the stacking unit 7. The inspection apparatus 20 is moved to (not shown), the inspection apparatus 20 is attached to the frame in the same manner as described above, and the laminated sheet 50 is inspected at the position where the inspection apparatus 20 is moved.
　上記した本実施形態のシート４０の検査装置２０及びシート４０の検査方法は、以下のような利点を有する。 The above-described sheet inspection apparatus 20 and sheet inspection method of the present embodiment have the following advantages.
　すなわち、本実施形態のシート４０の検査装置２０は、
　移動経路に沿って移動する帯状のシート４０を検査するシート４０の検査装置であって、
　移動可能な架台２１と、
　架台２１に支持されてシート４０を検査する検査部２２とを備え、
　検査部２２は、
　シート４０に光を照射する光源部２３と、
　架台２１がシート４０の移動経路における任意の位置に配された状態でシート４０に対する相対的な撮像位置及び撮像角度を調整可能に構成され、且つ、光源部２３によって光が照射されているシート４０を撮像する撮像部２５とを有している。 That is, the inspection apparatus 20 for the sheet 40 of the present embodiment is
An inspection apparatus for a sheet 40 for inspecting a belt-like sheet 40 moving along a movement path,
A movable base 21;
An inspection unit 22 that is supported by the gantry 21 and inspects the sheet 40;
The inspection unit 22
A light source unit 23 for irradiating the sheet 40 with light;
The seat 40 is configured such that the relative imaging position and imaging angle with respect to the sheet 40 can be adjusted in a state in which the gantry 21 is arranged at an arbitrary position in the movement path of the sheet 40, and light is irradiated by the light source unit 23. And an image pickup unit 25 for picking up images.
　かかる構成によれば、検査部２２と共に架台２１を移動させることによって、シート４０の移動経路における任意の位置に検査装置２０を移動させることができる。そして、このように検査装置２０が移動された位置で、シート４０に対する撮像部２５の撮像位置及び撮像角度を調整することができる。これにより、撮像部２５の撮像対象領域及び焦点を適切に合わせて、シート４０の検査を行うことが可能となる。
　従って、どの位置でどのような不良が発生したのかといった、シート不良の発生位置及び発生原因を十分に特定することができる。 According to this configuration, the inspection apparatus 20 can be moved to an arbitrary position in the movement path of the sheet 40 by moving the gantry 21 together with the inspection unit 22. And the imaging position and imaging angle of the imaging part 25 with respect to the sheet | seat 40 can be adjusted in the position to which the test | inspection apparatus 20 was moved in this way. Accordingly, it is possible to inspect the sheet 40 by appropriately adjusting the imaging target region and the focus of the imaging unit 25.
Therefore, it is possible to sufficiently specify the occurrence position and cause of the sheet defect, such as what kind of defect has occurred at which position.
　本実施形態のシート４０の検査装置２０においては、
　撮像部２５は、
　撮像本体部２７と、
　シート４０に対して撮像本体部２７を移動させて上記相対的な撮像位置を調整することが可能な位置調整部３１と、
　シート４０に対して撮像本体部２７を回転させて上記相対的な撮像角度を調整することが可能な角度調整部３３とを有している。 In the inspection apparatus 20 for the sheet 40 of the present embodiment,
The imaging unit 25
An imaging main body 27;
A position adjusting unit 31 capable of adjusting the relative imaging position by moving the imaging main body 27 with respect to the sheet 40;
An angle adjustment unit 33 that can adjust the relative imaging angle by rotating the imaging main body 27 with respect to the sheet 40 is provided.
　かかる構成によれば、位置調整部３１によって、シート４０に対して撮像本体部２７を移動させて上記相対的な撮像位置を調整し、角度調整部３３によって、シート４０に対して撮像本体部２７を回転させて上記相対的な撮像角度を調整することができる。
　これにより、シート４０に対する撮像本体部２７の撮像位置調整と撮像角度調整とを独立して行うことも、これら撮像位置調整と撮像角度調整とを組み合わせて行うこともできるため、シート４０に対する撮像本体部２７の撮像位置及び撮像角度をより詳細に調整することができる。
　従って、架台２１の配置状態に影響されることなく、撮像本体部２７の撮像位置と撮像角度とを、所望の撮像位置と撮像角度とに調整することができ、これにより、シート不良の発生位置及び発生原因をより十分に特定することができる。 According to such a configuration, the position adjustment unit 31 moves the imaging main body 27 with respect to the sheet 40 to adjust the relative imaging position, and the angle adjustment unit 33 adjusts the imaging main body 27 with respect to the sheet 40. Can be rotated to adjust the relative imaging angle.
Accordingly, the imaging position adjustment and the imaging angle adjustment of the imaging main body 27 with respect to the sheet 40 can be performed independently, or the imaging position adjustment and the imaging angle adjustment can be performed in combination. The imaging position and imaging angle of the unit 27 can be adjusted in more detail.
Therefore, the imaging position and imaging angle of the imaging main body 27 can be adjusted to a desired imaging position and imaging angle without being affected by the arrangement state of the gantry 21, thereby causing the occurrence position of the sheet defect. And the cause of occurrence can be identified more fully.
　本実施形態のシート４０の検査装置２０においては、
　位置調整部３１は、シート４０に対して第１の方向と、該第１の方向に垂直な第２の方向に撮像本体部２７を移動させるように構成され、
　角度調整部３３は、シート４０に対して第１の回転軸Ｒ１と、該第１の回転軸Ｒ１に垂直な第２の回転軸Ｒ２とを中心として撮像本体部２７を回転させるように構成されている。 In the inspection apparatus 20 for the sheet 40 of the present embodiment,
The position adjustment unit 31 is configured to move the imaging main body 27 in a first direction with respect to the sheet 40 and a second direction perpendicular to the first direction.
The angle adjustment unit 33 is configured to rotate the imaging main body 27 about the first rotation axis R1 and the second rotation axis R2 perpendicular to the first rotation axis R1 with respect to the sheet 40. ing.
　かかる構成によれば、撮像本体部２７の撮像位置と撮像角度とを、より詳細に調整することができる。 According to this configuration, the imaging position and imaging angle of the imaging main body 27 can be adjusted in more detail.
　本実施形態のシート４０の検査装置２０においては、
　位置調整部３１は、シート４０に対して接近及び離間する方向に撮像本体部２７を移動させることが可能な第１の位置調整部３１ａと、該第１の位置調整部３１ａによる移動方向に垂直な方向に撮像本体部２７を移動させることが可能な第２の位置調整部３１ｂとを有し、
　角度調整部３３は、シート４０に対して第１の回転軸Ｒ１を中心として撮像本体部２７を回転させる第１の角度調整部３３ａと、第２の回転軸Ｒ２を中心として撮像本体部２７を回転させる第２の角度調整部３３ｂとを有している。 In the inspection apparatus 20 for the sheet 40 of the present embodiment,
The position adjustment unit 31 is capable of moving the imaging main body 27 in a direction approaching and separating from the sheet 40, and is perpendicular to the movement direction of the first position adjustment unit 31a. A second position adjusting unit 31b capable of moving the imaging main body 27 in any direction,
The angle adjustment unit 33 includes a first angle adjustment unit 33a that rotates the imaging main body 27 about the first rotation axis R1 with respect to the sheet 40, and an imaging main body 27 about the second rotation axis R2. And a second angle adjusting unit 33b to be rotated.
　かかる構成によれば、第１の位置調整部３１ａによる撮像本体部２７の移動動作と第２の位置調整部３１ｂによる撮像本体部２７の移動動作とを組み合わせることにより、シート４０に対する撮像本体部２７の撮像位置を自在に調整することができる。
　また、第１の角度調整部３３ａによる撮像本体部２７の回転動作と第２の角度調整部３３ｂによる撮像本体部２７の回転動作とを組み合わせることにより、シート４０に対する撮像本体部２７の撮像角度を自在に調整することができる。
　よって、撮像本体部２７の撮像位置と撮像角度とを、さらに詳細に調整することができる。 According to this configuration, the imaging main body 27 with respect to the sheet 40 is combined with the movement of the imaging main body 27 by the first position adjustment unit 31a and the movement of the imaging main body 27 by the second position adjustment unit 31b. The image pickup position can be freely adjusted.
Further, by combining the rotation operation of the imaging main body 27 by the first angle adjustment unit 33a and the rotation operation of the imaging main body 27 by the second angle adjustment unit 33b, the imaging angle of the imaging main body 27 with respect to the sheet 40 is set. It can be adjusted freely.
Therefore, the imaging position and imaging angle of the imaging main body 27 can be adjusted in more detail.
　本実施形態のシート４０の検査装置２０においては、光源部２３がシート４０の下側に配され、撮像部２５がシート４０の上側に配されるようになっている。 In the inspection apparatus 20 for the sheet 40 of the present embodiment, the light source unit 23 is disposed on the lower side of the sheet 40 and the imaging unit 25 is disposed on the upper side of the sheet 40.
　かかる構成によれば、異物等が撮像部２５に落下することを抑制することができるため、該撮像部２５への異物の付着に起因する検査精度の低下を抑制することができる。 According to such a configuration, it is possible to suppress the foreign matter and the like from falling on the imaging unit 25, and thus it is possible to suppress a decrease in inspection accuracy caused by the adhesion of the foreign matter to the imaging unit 25.
　本実施形態のシート４０の検査装置２０は、
　撮像部２５と電気的に接続されて、撮像部２５からの検査結果を取得する制御部３７をさらに備え、
　制御部３７は、架台２１の移動に応じて移動可能に構成されている。 The inspection apparatus 20 for the sheet 40 of the present embodiment is
A control unit 37 that is electrically connected to the imaging unit 25 and obtains a test result from the imaging unit 25;
The control unit 37 is configured to be movable according to the movement of the gantry 21.
　かかる構成によれば、架台２１の移動（すなわち、撮像部２５の移動）に応じて制御部３７を移動させることによって、撮像部２５からの検査結果を制御部３７が取得することができるため、その分、撮像部２５と制御部３７とを電気的に接続するための配線を短くすることができる。また、撮像部２５と制御部３７の配置の自由度が高まるため、両者をより移動させ易くすることができ、これにより、より簡便にシート４０を検査することができる。しかも、複数の位置での検査結果をより簡便に取得することができる。
　また、複数の位置で検査結果を取得する態様を採用する場合には、取得した複数の検査結果を比較し、より異物が発生し易い位置を特定することが可能となるため、シート４０の移動経路における検査すべき位置をより適切に特定することができる。
　このように、検査装置２０がより有用なものとなる。 According to such a configuration, the control unit 37 can acquire the inspection result from the imaging unit 25 by moving the control unit 37 according to the movement of the gantry 21 (that is, the movement of the imaging unit 25). Accordingly, the wiring for electrically connecting the imaging unit 25 and the control unit 37 can be shortened. Moreover, since the freedom degree of arrangement | positioning of the imaging part 25 and the control part 37 increases, both can be made to move more easily and, thereby, the sheet | seat 40 can be test | inspected more simply. In addition, the test results at a plurality of positions can be acquired more easily.
Further, in the case of adopting an aspect in which the inspection results are acquired at a plurality of positions, it is possible to compare the plurality of acquired inspection results and specify a position where foreign matter is more likely to be generated. The position to be inspected in the route can be specified more appropriately.
Thus, the inspection apparatus 20 becomes more useful.
　本実施形態のシート４０の検査方法は、
　シート４０の検査装置２０を用い、シート４０を検査する方法である。
　かかる構成によれば、上記シート４０の検査装置２０を用いてシート４０の検査を行うことによって、上記と同様、シート不良の発生位置及び発生原因を十分に特定することができる。 The method for inspecting the sheet 40 of this embodiment is as follows.
This is a method for inspecting the sheet 40 using the inspection apparatus 20 for the sheet 40.
According to such a configuration, by performing the inspection of the sheet 40 using the inspection apparatus 20 for the sheet 40, it is possible to sufficiently specify the occurrence position and the cause of occurrence of the sheet defect as described above.
　本実施形態のシート４０の検査方法においては、シート４０の検査装置２０を用い、移動経路における所定の位置に検査装置２０を移動させてシート４０を検査する。
　かかる構成によれば、検査装置２０を用いて検査を行うことによって、シート不良の発生位置及び発生原因を十分に特定することができる。 In the inspection method for the sheet 40 of the present embodiment, the inspection device 20 for the sheet 40 is used, and the inspection device 20 is moved to a predetermined position in the movement path to inspect the sheet 40.
According to such a configuration, by performing inspection using the inspection apparatus 20, it is possible to sufficiently identify the occurrence position and cause of the sheet defect.
　本実施形態のシート４０の検査装置２０が備えられた搬送装置１によれば、検査装置２０によってシート４０を検査しながらシート４０を搬送することができる。
　このように、検査装置２０を用いて検査を行いながらシート４０を搬送することによって、シート不良の発生位置及び発生原因を十分に特定しながらシート４０を搬送することが可能となる。 According to the transport device 1 provided with the inspection device 20 for the sheet 40 of the present embodiment, the sheet 40 can be transported while inspecting the sheet 40 by the inspection device 20.
In this way, by transporting the sheet 40 while inspecting using the inspection apparatus 20, it is possible to transport the sheet 40 while sufficiently identifying the occurrence position and cause of the sheet failure.
　本実施形態のシート４０の検査装置２０を用いたシート４０の搬送方法によれば、シート４０を検査しながらシート４０を搬送することができる。
　このように、検査装置２０を用いて検査を行いながらシート４０を搬送することによって、シート不良の発生位置及び発生原因を十分に特定しながらシート４０を搬送することが可能となる。 According to the conveyance method of the sheet 40 using the inspection apparatus 20 for the sheet 40 of the present embodiment, the sheet 40 can be conveyed while inspecting the sheet 40.
In this way, by transporting the sheet 40 while inspecting using the inspection apparatus 20, it is possible to transport the sheet 40 while sufficiently identifying the occurrence position and cause of the sheet failure.
　以上の通り、本実施形態によれば、シート不良の発生位置及び発生原因を十分に特定し得るシート４０の検査装置２０及び検査方法が提供される。 As described above, according to the present embodiment, the inspection apparatus 20 and the inspection method for the sheet 40 that can sufficiently specify the generation position and the generation cause of the sheet defect are provided.
　本実施形態のシート４０の検査装置１及び検査方法は、上記のごとき構成を備え、上記のごとき利点を有するが、本発明は、上記実施形態に限定されず、本発明の意図する範囲内において適宜設計変更されることが可能である。 The inspection apparatus 1 and the inspection method for the sheet 40 of the present embodiment have the above-described configuration and have the advantages as described above. However, the present invention is not limited to the above-described embodiment, and is within the intended scope of the present invention. The design can be changed as appropriate.
　例えば、検査装置２０で検査されるシート４０として、図１４に示すような積層シート（偏光板）５０が採用されてもよい。図１４に示される積層シート５０は、それぞれ原反シートとしてのセパレータ６０ａ、位相差フィルム６０ｂ、保護フィルム６０ｃ、偏光子６０ｄ、保護フィルム６０ｅ、剥離ライナー６０ｆを有している。これら各原反シートが、各ローラ体から繰り出し部によって繰り出されて積層部に供給されつつ、積層部にて積層されて、積層シート５０が形成されるようになっている。さらに、形成された積層シート５０が巻き取られて回収されるようになっている。
　このような各原反フィルム６０ａ～６０ｆ、及び、積層シート５０のいずれかの移動経路において任意の位置に検査装置２０が移動されて、該検査装置２０が移動された位置にて、該いずれかのシートが検査される態様が採用されてもよい。 For example, a laminated sheet (polarizing plate) 50 as shown in FIG. 14 may be employed as the sheet 40 to be inspected by the inspection apparatus 20. The laminated sheet 50 shown in FIG. 14 has a separator 60a, a retardation film 60b, a protective film 60c, a polarizer 60d, a protective film 60e, and a release liner 60f as original sheets. Each of the original fabric sheets is fed out from each roller body by the feeding unit and supplied to the laminating unit, and is laminated at the laminating unit to form a laminated sheet 50. Further, the formed laminated sheet 50 is wound and collected.
The inspection apparatus 20 is moved to an arbitrary position in any one of the movement paths of each of the original films 60a to 60f and the laminated sheet 50, and at the position where the inspection apparatus 20 is moved, A mode in which the sheet is inspected may be employed.
　また、例えば、図１５に示されるような態様の搬送装置１に検査装置２０が備えられる態様が採用されてもよい。この搬送装置１は、シート４０としての原反シート６０が巻き回されてなるロール体６１から繰り出し部３によって原反シート６０が繰り出され、繰り出された原反シート６０が第１の乾燥部７１によって乾燥され、コロナ処理部７３によってコロナ処理された後、塗工部７５によって原反シート６０に塗工液が塗工され、第２の乾燥部７７によって乾燥されて、原反シート６０に塗工膜が形成されてなるシート６３（シート４０）が形成された後、該シート６３がテンションローラ７９に架け渡されながら移動し、巻き取り部９によって巻き取られてロール体６５として回収されるように構成されている。この場合、原反シート６０及び塗工膜が形成されてなるシート６３の移動経路において任意の位置に検査装置２０が移動されて、各シートが検査され得る。 Further, for example, a mode in which the inspection device 20 is provided in the transport device 1 having a mode as shown in FIG. 15 may be adopted. In the conveying apparatus 1, the original fabric sheet 60 is fed out by a feeding unit 3 from a roll body 61 in which the original fabric sheet 60 as a sheet 40 is wound, and the fed original fabric sheet 60 is fed to a first drying unit 71. The coating liquid is applied to the original sheet 60 by the coating unit 75, dried by the second drying unit 77, and applied to the original sheet 60. After the sheet 63 (sheet 40) formed with the film is formed, the sheet 63 moves while being stretched around the tension roller 79, is wound up by the winding unit 9, and is collected as the roll body 65. It is configured as follows. In this case, the inspection apparatus 20 can be moved to an arbitrary position in the movement path of the sheet 63 formed with the raw sheet 60 and the coating film, and each sheet can be inspected.
　１：搬送装置、３：繰り出し部、７：積層部、９：巻き取り部、２０：検査装置、２１：架台、２２：検査部、２３：光源部、２５：撮像部、２７：撮像本体部、３１：位置調整部、３３：角度調整部、３７：制御部、４０：シート、５０：積層シート、６０：原反シート
  DESCRIPTION OF SYMBOLS 1: Conveyance apparatus, 3: Feeding part, 7: Lamination | stacking part, 9: Winding part, 20: Inspection apparatus, 21: Mounting stand, 22: Inspection part, 23: Light source part, 25: Imaging part, 27: Imaging main-body part 31: Position adjustment unit, 33: Angle adjustment unit, 37: Control unit, 40: Sheet, 50: Laminated sheet, 60: Original fabric sheet

Claims (6)

  1. 　移動経路に沿って移動する帯状のシートを検査するシートの検査装置であって、
    　移動可能な架台と、
    　前記架台に支持されて前記シートを検査する検査部とを備え、
    　前記検査部は、
    　前記シートに光を照射する光源部と、
    　前記架台が前記移動経路における任意の位置に配された状態で前記シートに対する相対的な撮像位置及び撮像角度を調整可能に構成され、且つ、前記光源部によって光が照射されている前記シートを撮像する撮像部とを有している、シートの検査装置。     A sheet inspection apparatus for inspecting a belt-shaped sheet moving along a movement path,
    A movable mount;
    An inspection unit supported by the gantry and inspecting the sheet;
    The inspection unit
    A light source unit for irradiating the sheet with light;
    The sheet is configured so that the relative imaging position and imaging angle relative to the sheet can be adjusted in a state in which the gantry is arranged at an arbitrary position in the movement path, and the light source unit irradiates light. A sheet inspection apparatus having an imaging unit.
  2. 　前記撮像部は、
    　撮像本体部と、
    　前記シートに対して前記撮像本体部を移動させて前記相対的な撮像位置を調整することが可能な位置調整部と、
    　前記シートに対して前記撮像本体部を回転させて前記相対的な撮像角度を調整することが可能な角度調整部とを有する、請求項１に記載のシートの検査装置。     The imaging unit
    An imaging body,
    A position adjusting unit capable of adjusting the relative imaging position by moving the imaging main body with respect to the sheet;
    The sheet inspection apparatus according to claim 1, further comprising: an angle adjusting unit capable of adjusting the relative imaging angle by rotating the imaging main body with respect to the sheet.
  3. 　前記位置調整部は、前記シートに対して第１の方向と、該第１の方向に垂直な第２の方向とに前記撮像本体部を移動させるように構成され、
    　前記角度調整部は、前記シートに対して第１の回転軸と、該第１の回転軸に垂直な第２の回転軸とを中心として前記撮像本体部を回転させるように構成されている、請求項２に記載のシートの検査装置。     The position adjustment unit is configured to move the imaging main body in a first direction with respect to the sheet and a second direction perpendicular to the first direction,
    The angle adjustment unit is configured to rotate the imaging main body unit around a first rotation axis and a second rotation axis perpendicular to the first rotation axis with respect to the sheet. The sheet inspection apparatus according to claim 2.
  4. 　前記位置調整部は、前記シートに対して接近及び離間する方向に前記撮像本体部を移動させることが可能な第１の位置調整部と、該第１の位置調整部による移動方向に垂直な方向に前記撮像本体部を移動させることが可能な第２の位置調整部とを有し、
    　前記角度調整部は、前記シートに対して前記１の回転軸を中心として前記撮像本体部を回転させる第１の角度調整部と、前記第２の回転軸を中心として前記撮像本体部を回転させる第２の角度調整部とを有している、請求項３に記載のシートの検査装置。     The position adjustment unit includes a first position adjustment unit capable of moving the imaging main body in a direction approaching and separating from the sheet, and a direction perpendicular to a moving direction of the first position adjustment unit And a second position adjustment unit capable of moving the imaging main body unit,
    The angle adjusting unit rotates the imaging main body with respect to the sheet about the first rotation axis, and rotates the imaging main body about the second rotation axis. The sheet inspection apparatus according to claim 3, further comprising a second angle adjustment unit.
  5. 　前記撮像部と電気的に接続されて、前記撮像部からの検査結果を取得する制御部をさらに備え、
    　前記制御部は、前記架台の移動に応じて移動可能に構成されている、請求項１～４のいずれかに記載のシートの検査装置。     A control unit that is electrically connected to the imaging unit and obtains a test result from the imaging unit;
    The sheet inspection apparatus according to any one of claims 1 to 4, wherein the control unit is configured to be movable in accordance with movement of the gantry.
  6. 　請求項１～５のいずれかに記載のシートの検査装置を用い、
    　前記シートを検査する、シートの検査方法。
     
          Using the sheet inspection apparatus according to any one of claims 1 to 5,
    A sheet inspection method for inspecting the sheet.

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