JP2008076171A - Substrate inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate inspection device capable of efficiently inspecting a substrate from different inspection directions in a reduced space. <P>SOLUTION: The substrate inspection device 1 is equipped with a first feed part 10 for feeding the substrate W in a predetermined first feed direction P, a second feed part 20 for feeding the substrate W in a second feed direction Q different from the first feed direction P, a delivery means 30 for delivering the substrate W to the second feed part 20 from the first feed part 10 without changing the direction of the substrate W and a substrate inspection means 2 capable of inspecting the substrate W in a first inspection direction A almost parallel to the first feed direction P on a plan view in a state that the substrate W is fed by the first feed part 10 and capable of also inspecting the substrate W in a second inspection direction B almost parallel to the second feed direction Q in a state that the substrate W is fed by the second feed part 20. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a substrate inspection apparatus that performs defect inspection of a substrate to be inspected.

  In a liquid crystal display used for a thin television or the like, a glass substrate having a fine electric circuit formed on the surface is used. Such a fine electric circuit on a glass substrate is formed by using a photographic technique, but is unnecessary for a part thereof due to a defect of a manufacturing apparatus or adhesion of surrounding particles in a manufacturing process. Defects such as conductive parts and broken parts may occur. Such defects in the substrate are detected by irradiating a glass substrate moving on a plane with line-shaped inspection light and continuously photographing the reflected light with a line sensor camera (for example, see Patent Document 1). .

Here, a fine electric circuit on a glass substrate is formed by forming a fine pattern with directionality or overlapping a number of layers having a slight thickness but different light transmittances. Has been. For this reason, the appearance of the defect is different depending on the difference in the irradiation direction (inspection direction) of the inspection light to the substrate, and the defect can be detected in a certain direction, but the same defect may not be detected in a different direction. . For this reason, in order to detect defects reliably, a rotation mechanism (for example, refer to Patent Document 2) that changes the orientation of the substrate in the middle of conveyance is provided, and after the inspection is performed in a certain direction, the rotation mechanism It is conceivable to perform the above inspection again by changing the direction.
JP 2000-9661 A JP 2000-62951 A

  However, in the substrate inspection apparatus as described above, it is necessary to separately provide a transfer device that rotates the glass substrate shown in Patent Document 2 by 90 degrees for substrate inspection. For example, when the inspection apparatus of Patent Document 1 is combined with the rotation mechanism shown in Patent Document 2, a space for installing the rotation mechanism is required separately from the inspection apparatus, and the cost of the apparatus increases. Further, in the above inspection process, in order to change the direction of the glass substrate by 90 degrees and inspect, it is necessary to perform at least two movements of the forward path and the backward path by the transport unit and one rotational movement by the rotation mechanism. This causes a problem that it takes a very long inspection time. Further, when the inspection apparatus is arranged in the glass substrate production line, the transfer unit needs to move three times from the forward path to the return path, and further to the forward path, and the movement of the glass substrate by the transfer unit increases once. Furthermore, there arises a problem that it takes an inspection time.

  The present invention has been made in view of the above-described circumstances, and provides a substrate inspection apparatus capable of inspecting a substrate from a different inspection direction efficiently in a small space.

In order to solve the above problems, the present invention proposes the following means.
The substrate inspection apparatus of the present invention includes a first transport unit that transports a substrate in a predetermined first transport direction, and a second transport that transports the substrate in a second transport direction different from the first transport direction. A transfer means for transferring the substrate from the first transfer unit to the second transfer unit without changing the orientation of the substrate, and the substrate being transferred by the first transfer unit The substrate can be inspected in a first inspection direction substantially parallel to the first transport direction in plan view, and the second transport direction and plan view in a state where the substrate is transported by the second transport unit. And a substrate inspection means capable of inspecting the substrate in a substantially parallel second inspection direction.

  According to the substrate inspection apparatus of the present invention, the first conveyance unit, the second conveyance unit, and the delivery unit convey the substrate in different directions without changing the direction of the substrate. The board can be inspected in the first inspection direction and the second inspection direction according to the above. That is, since the substrate can be inspected from different directions without being reciprocated or rotated, the substrate can be efficiently inspected in a small space.

  Hereinafter, a substrate inspection apparatus according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows a substrate inspection apparatus 1 as an embodiment of the present invention. The substrate inspection apparatus 1 according to the present embodiment can detect surface defects present on the substrate to be inspected based on images obtained by continuously photographing the entire substrate to be inspected such as a mother glass substrate on which a plurality of liquid crystal displays are manufactured. Is. As shown in FIG. 1, the substrate inspection apparatus 1 includes a first transport unit 10 capable of transporting a substrate W to be inspected in a first transport direction P, and a second transport capable of transporting in a second transport direction Q. Part 20. The 1st conveyance part 10 and the 2nd conveyance part 20 are arrange | positioned so that the 1st conveyance direction P and the 2nd conveyance direction Q may be substantially orthogonal in planar view. Further, the carry-in port 20a of the second transport unit 20 is provided close to the carry-out port 10a of the first transport unit 10, and between the first transport unit 10 and the second transport unit 20 is provided. A delivery means 30 is provided for delivering the substrate W to be inspected unloaded from the first transport unit 10 to the second transport unit 20 without changing the orientation. Below, the specific structure of the 1st conveyance part 10, the 2nd conveyance part 20, and the delivery means 30 is described.

  The first transport unit 10 includes frames 11 and 11 extending along the first transport direction P, a plurality of rotating shafts 12 rotatably mounted between the frames 11 and 11, and a rotating shaft. And a plurality of rotating rollers 13 provided on each rotating shaft 12 so as to be rotatable together with the rotating shaft 12. One end portion 12 a of each rotating shaft 12 protrudes from the frame 11, and a driving roller 14 is rotatably provided with the rotating shaft 12 at one end portion 12 a. A belt 15 is wound around the driving roller 14 of each rotating shaft 12, and a driving motor 16 is provided on any one of the plurality of rotating shafts 12. For this reason, the plurality of rotating rollers 13 can rotate in a certain direction by transmitting the rotational driving of the driving motor 16 to each rotating shaft 12 via the belt 15 and the driving roller 14. Thus, the inspected substrate W placed on the rotating roller 13 can be transported along the first transport direction P.

  Similarly, the second transport unit 20 includes frames 21 and 21 extending along the second transport direction Q, and a plurality of rotating shafts 22 rotatably mounted between the frames 21 and 21. A plurality of rotating rollers 23 are provided on each rotating shaft 22 so as to be rotatable together with the rotating shaft 22. A driving roller 24 is rotatably provided with the rotating shaft 22 at one end portion 22 a protruding from the frame 21 in each rotating shaft 22. A belt 25 is wound around the driving roller 24 of each rotating shaft 22, and a driving motor 26 is provided on any one of the plurality of rotating shafts 22. For this reason, the plurality of rotating rollers 23 can rotate in a certain direction by transmitting the rotational driving of the driving motor 26 to each rotating shaft 22 via the belt 25 and the driving roller 24. Thus, the inspected substrate W placed on the rotating roller 23 can be transported along the second transport direction Q.

  The delivery means 30 includes a first rotary shaft 32 that is rotatably mounted by the first frames 31 and 31 so as to be substantially parallel to the rotary shaft 12 of the first transport unit 10, and a first rotary shaft 32. And a plurality of first rotating rollers 33 provided on the first rotating shaft 32 so as to be rotatable. The outer diameter of the first rotating roller 33 is set to be approximately equal to the outer diameter of the rotating roller 13 of the first transport unit 10. In addition, one end portion 32a of each first rotation shaft 32 protrudes from the first frame 31, and a first drive roller 34 is rotatably provided with the first rotation shaft 32, and a plurality of first rotation shafts 32 are provided. A first belt 35 is wound around one drive roller 34. One of the plurality of first rotation shafts 32 is provided with a first drive motor 36, and the first drive motor 36 and the drive motor 16 of the first transport unit 10 are synchronized. Thus, it is possible to receive the substrate W to be inspected carried out from the carry-out port 10a of the first transfer unit 10 at a substantially equal transfer speed.

  The delivery means 30 further includes a second rotary shaft 38 that is rotatably supported by the second frames 37, 37 so as to be substantially parallel to the rotary shaft 22 of the second transport unit 20, and a second rotary shaft 38. And a plurality of second rotating rollers 39 provided on the second rotating shaft 38 in a rotatable manner. The outer diameter of the second rotating roller 39 is set to be approximately equal to the outer diameter of the rotating roller 23 of the second transport unit 20. In addition, one end portion 38a of each second rotating shaft 38 protrudes from the second frame 37, and a second drive roller 40 is rotatably provided with the second rotating shaft 38, and a plurality of first rotating shafts 38 are provided. A second belt 41 is wound around the second driving roller 40. One of the plurality of second rotation shafts 38 is provided with a second drive motor 42 to synchronize the second drive motor 42 and the drive motor 26 of the second transport unit 20. Thus, the inspected substrate W can be delivered to the carry-in port 20a of the second transfer unit 20 at a substantially equal transfer speed. The board inspection apparatus 1 includes a control unit (not shown), the drive motor 16 of the first transport unit 10, the drive motor 26 of the second transport unit 20, and the first drive motor 36 of the delivery means 30. The second drive motor 42 can be driven or not driven in synchronization with the controller.

  The second rotary shaft 38 is disposed below the first rotary shaft 32 and is moved up and down together with the second frame 37 by an up-and-down mechanism 43 that moves the second frame 37 up and down. Is possible. As shown in FIG. 2, the outer diameter of the second rotating roller 39 is set to be larger than the outer diameter of the first rotating roller 33, and the second rotating shaft 38 is raised by the vertical mechanism 43. Then, the upper end of the second rotating roller 39 protrudes upward from the first rotating roller 33, and the upper end of the second rotating roller 39 is in the first state when the second rotating shaft 38 is lowered. It is set to be in a state of being submerged below the rotating roller 33.

  As shown in FIG. 1, the substrate inspection apparatus 1 includes substrate inspection means 2 that detects surface defects of the substrate W to be inspected. The substrate inspection means 2 includes a first inspection unit 3 that inspects the substrate W to be inspected in a state where the substrate W to be inspected is transported by the first transport unit 10, and a substrate W to be inspected by the second transport unit 20. And a second inspection unit 4 that inspects the inspected substrate W in a state where the substrate is conveyed. As shown in FIG. 3, the first inspection unit 3 and the second inspection unit 4 respectively include a line illumination 5 that is a light emitting unit that irradiates the inspection light L onto the substrate W to be inspected, and an inspection light of the line illumination 5. The detection TV camera 6 which is a light receiving unit that acquires an image of the inspection target substrate W by the reflected light L1 reflected by the inspection target substrate W and the reflected light L1 from the inspection target substrate W reach the detection TV camera 6. And a mirror 7 to be operated. As shown in FIGS. 1 and 3, the line illumination 5 of each of the first inspection unit 3 and the second inspection unit 4 has the first inspection direction A or the first inspection direction A substantially parallel to the first transport direction P in plan view. The inspection light L can be irradiated onto the inspection substrate W in the second inspection direction B substantially parallel to the second transport direction Q in plan view. Further, the line illumination 5 can irradiate the inspection light L in a line shape, and irradiates the inspected substrate W in the direction orthogonal to the corresponding first transport direction P or second transport direction Q, respectively. It is arranged to be possible. For this reason, the TV camera for detection 6 continuously receives the reflected light L1 generated in a line by the inspection light L as the substrate W to be inspected is transported in the first transport direction P and the second transport direction Q. By taking a picture, it is possible to obtain the entire inspected substrate W as an image.

  Next, the operation of the substrate inspection apparatus 1 of this embodiment will be described. As shown in FIG. 1, first, the inspected substrate W carried into the first transport unit 10 is transported in the first transport direction P by the rotation of the rotation roller 13 of the first transport unit 10. Then, the first inspection unit 3 supplies the inspection light L to the inspection substrate W in the first inspection direction A by the line illumination 5 as the inspection substrate W is conveyed by the first conveyance unit 10. The substrate to be inspected W is continuously photographed by the detection TV camera 6 by the reflected light L1. And the to-be-inspected board | substrate W passes the range test | inspected by the 1st test | inspection unit 3, and is carried out to the delivery means 30 from the carry-out exit 10a.

  At this time, the first rotating roller 33 of the delivery means 30 is rotated by the first drive motor 36 at substantially the same rotational speed as that of the rotating roller 13 of the first transport unit 10, and the second rotating roller 39 is It is lowered by the up-and-down mechanism 43 so as to be immersed below the first roller 33. When the inspected substrate W is unloaded from the unloading port 10a of the first transfer unit 10 and is completely placed on the first rotating roller 33 of the delivery means 30, the first drive motor The drive of 36 is stopped and the rotation of the first rotating roller 33 is stopped. Next, the inspection substrate W is placed on the second rotating roller 39 by raising the second rotating roller 39 by the vertical mechanism 43. In this state, the substrate W to be inspected changes its direction by rotating the second rotation roller 39 by the second drive motor 42 at substantially the same rotational speed as the rotation roller 23 of the second transport unit 20. Instead, it is carried into the second transport unit 20 from the carry-in entrance 20a and is transported in the second transport direction Q by the rotation of the rotating roller 23 of the second transport unit 20. Then, the second inspection unit 4 sends the inspection light L to the inspection substrate W in the second inspection direction B by the line illumination 5 as the inspection substrate W is conveyed by the second conveyance unit 20. The substrate to be inspected W can be continuously photographed by the detection TV camera 6 by the reflected light L1.

  As described above, according to the substrate inspection apparatus 1 of this embodiment, the first inspection unit 3 and the second inspection unit 4 of the substrate inspection unit 2 can be moved, for example, 90 degrees in the horizontal plane with respect to the substrate W to be inspected. The inspected substrate W can be inspected by irradiating the inspection light L from different inspection directions. Therefore, while the glass substrate W is transported in one direction of the transport line without reciprocating, the TV camera 6 for detection of either the first inspection unit 3 or the second inspection unit 4 reliably Defects can be detected. At this time, the substrate W to be inspected is merely transported continuously from the first transport unit 10 to the delivery unit 30 and from the delivery unit 30 to the second transport unit 20 without changing its direction. . That is, since the inspection target substrate W can be inspected from different directions without being reciprocated or rotated, it is possible to efficiently inspect the inspection target substrate W in a small space.

  As described above, the substrate inspection apparatus 1 includes a transport unit having a configuration in which only the transport direction is changed to a 90 degree direction without changing the orientation of the inspected substrate W, and the transport unit has a configuration of 90 degrees. The substrate inspection means is capable of inspecting in different inspection directions in an inspection direction substantially parallel to the conveyance direction in a different conveyance direction. For this reason, for example, as shown in FIG. 4, it has a transport means 50 for transporting the substrate W to be inspected by turning it back 90 degrees and 90 degrees without rotating the substrate W to be inspected. In the substrate production line 53 having various manufacturing apparatuses 51 and 52 such as an exposure machine that performs processing such as processing of the substrate W, and a C / D (resist coating apparatus, development apparatus), the substrate W is transported by the delivery means 30 and the like. By providing the first inspection unit 3 and the second inspection unit 4 before and after the switching position 54 for switching the direction, the same configuration as the substrate inspection apparatus 1 can be realized. In other words, the inspection units 3 and 4 are conventionally used in the board production line by arranging the inspection units 3 and 4 in the space before and after the switching position 54 where the apparatus for processing the inspected substrate W such as the manufacturing apparatuses 51 and 52 cannot be arranged. It is possible to effectively use a dead space as an inspection space, and there is no need to provide a new inspection device space, and it is possible to use the delivery means 30 and no need to provide a new substrate rotation mechanism. The cost can be reduced and the installation area in the clean room can be reduced.

  Moreover, in the above, as the 1st conveyance part 10, the 2nd conveyance part 20, and the delivery means 30, although it was set as the mechanism conveyed in a predetermined conveyance direction by a rotating roller, it is not restricted to this, Various. The thing of a conveyance method can be used. FIG. 5 shows a modification thereof. As shown in FIG. 5, in the substrate transfer apparatus 60 of this modification, the first transfer unit 70, the second transfer unit 80, and the delivery means 90 are provided with a levitation stage 61 that levitates the substrate W to be inspected with compressed air. Have. As shown in FIG. 6, the levitation stage 61 is formed in a box shape, and a blow hole 61a communicating with the inside is formed on the upper surface. And the to-be-inspected board | substrate W on the levitation | floating stage 61 can be levitated by disperse | distributing the compressed air C sent inside and making it blow out upward from each blowing hole 61a. In this modification, the levitation stage 61 is provided continuously to the first transport unit 70, the second transport unit 80, and the delivery means 90, but may be independent of each other.

  The first transport unit 70 is provided on the side of the levitation stage 61 and holds the end of the substrate W to be inspected. The moving mechanism 72 moves the holding mechanism 71 in the first transport direction P. With. As shown in FIG. 7, the holding mechanism 71 includes a pedestal 73 and a clamp 74 that holds the glass substrate W from both sides on the pedestal 73. The clamp 74 can be opened and closed, so that the inspected substrate W can be attached and detached. Further, as shown in FIG. 5, the moving mechanism 72 includes a linear motor 75 and a linear guide 76 disposed along the first transport direction P at the side of the levitation stage 61. The holding mechanism 71 can be moved in the first transport direction P along the linear guide 76 by driving the linear motor 75. Similarly, the second transport unit 80 is provided on the side of the floating stage 61 and holds the end of the substrate W to be inspected. The moving mechanism 82 moves the holding mechanism 81 in the second transport direction Q. With. As shown in FIG. 7, the holding mechanism 81 includes a pedestal 83 and a clamp 84. Further, as shown in FIG. 5, the moving mechanism 82 includes a linear motor 85 and a linear guide 86. The holding mechanism 81 can be moved in the second transport direction Q along the linear guide 86 by driving the linear motor 85. In the moving mechanisms 72 and 82, the means for moving each holding mechanism is not limited to a linear motor, but may be a ball screw. Further, the means for holding the inspected substrate W is not limited to the clamp 74 described above, and for example, it may have an adsorbing means for vacuum adsorbing the back surface of the inspected substrate W.

  Here, the linear motor 75 and the linear guide 76 of the first transport unit 70 extend from the carry-out port 70 a of the first transport unit 70 to the delivery means 90. Similarly, the linear motor 85 and the linear guide 86 of the second transport unit 80 extend from the carry-in port 80 a of the second transport unit 80 to the delivery means 90. For this reason, the holding mechanism 71 of the first transfer unit 70 can hold the one side W1 of the substrate W to be inspected and transfer it to the delivery means 90, and the holding mechanism 81 of the second transfer unit 80 can receive the delivery. By waiting at the position of the means 90 and gripping the other side W2 adjacent to one side W1 of the transferred substrate W to be inspected, the substrate to be inspected is not changed from the holding mechanism 71 of the first transfer unit 70. W can be received, that is, the delivery mechanism 90 is configured by the holding mechanism 71 of the first transport unit 70 and the holding mechanism 81 of the second transport unit 80.

(Second Embodiment)
Next, a second embodiment of the present invention will be described. FIG. 8 shows a second embodiment of the present invention. In this embodiment, members that are the same as those used in the above-described embodiment are assigned the same reference numerals, and descriptions thereof are omitted.

  As shown in FIG. 8, the substrate inspection apparatus 100 according to the present embodiment includes a first transfer unit 10, a second transfer unit 20, a delivery unit 30, and a substrate inspection unit 101 that inspects a substrate W to be inspected. It has. In FIG. 8, the first transport unit 10, the second transport unit 20, and the delivery means 30 are simplified for easy explanation. The board inspection unit 101 includes an inspection unit 102 including a line illumination 5, a detection TV camera 6, and a mirror 7, which are integrally supported by a frame 103. The frame 103 is rotatably supported by the rotation mechanism 104 above the delivery means 30, and the inspection unit 102 can be rotated by a driving unit (not shown). More specifically, the inspection unit 102 transmits the inspection light L to the inspection target substrate W being transported in the first transport direction P on the first transport unit 10 by the line illumination 5 by the rotation mechanism 104. From the state that can be irradiated in the inspection direction A, the inspection light L is irradiated in the second inspection direction B by the line illumination 5 onto the inspected substrate W transported in the second transport direction Q on the second transport unit 20. It is possible to rotate about 90 degrees to a possible state.

  In the substrate inspection apparatus 100 according to this embodiment, the inspection target substrate W is inspected in the first inspection direction A by the line illumination 5 of the inspection unit 102 while the inspection target substrate W is being transported by the first transport unit 10. The light L is irradiated and the inspection substrate W is photographed by the detection TV camera 6. Then, when the substrate to be inspected W is unloaded from the first transfer unit 10 and transferred to the second transfer unit 20 by the transfer means 30, the rotation unit 104 rotates the inspection unit 102 by about 90 degrees. Let Therefore, when the inspected substrate W is transported in the second transport direction Q by the second transport unit 10, the inspection light L is irradiated to the inspected substrate W in the second inspection direction B by the line illumination 5. Then, the inspection substrate W can be photographed by the detection TV camera 6. That is, the substrate inspection apparatus 100 according to the present embodiment includes the rotation mechanism 104, so that the inspection target substrate W can be inspected from different directions by one inspection unit 102. The mechanism for rotating the inspection unit 102 can be simpler than the mechanism for rotating and moving the substrate W to be inspected, and therefore, the apparatus cost can be reduced.

(Third embodiment)
Next, a third embodiment of the present invention will be described. FIG. 9 shows a third embodiment of the present invention. In this embodiment, members that are the same as those used in the above-described embodiment are assigned the same reference numerals, and descriptions thereof are omitted.

  As shown in FIG. 9, the substrate inspection apparatus 110 according to the present embodiment includes a first transfer unit 10, a second transfer unit 20, a delivery unit 30, and a substrate inspection unit 111 that inspects a substrate W to be inspected. It has. In FIG. 9, the first transport unit 10, the second transport unit 20, and the delivery means 30 are simplified for easy explanation. In addition, the substrate inspection unit 111 includes a first line illumination 5a (first light emitting unit) that can irradiate the inspection light L in the first inspection direction A onto the inspection target substrate W transported on the first transport unit 10. ), A second line illumination 5b (second light emitting unit) capable of irradiating the inspection light L in the second inspection direction B onto the substrate W to be inspected conveyed on the second conveyance unit 20, and delivery means 30 and a TV camera 6 for detection provided above. Each of the first line illumination 5a and the second line illumination 5b is provided with a first mirror 7a and a second mirror 7b, respectively, and the inspection light L is irradiated onto the inspected substrate W, respectively. The reflected light L1 generated in this way can be reflected so as to reach the TV camera 6 for detection. Further, the detection TV camera 6 is provided with a rotation mechanism 112 and can be rotated about 90 degrees so that the reflected light L1 of the first line illumination 5a and the second line illumination 5b can be received. .

  In the substrate inspection apparatus 110 of this embodiment, in the state where the substrate to be inspected W is transported by the first transport unit 10, the inspection light is directed to the substrate to be inspected W in the first inspection direction A by the first line illumination 5a. L is irradiated, and the inspection substrate W is photographed by the TV camera 6 for detection. Then, when the inspected substrate W is unloaded from the first transfer unit 10 and is transferred to the second transfer unit 20 by the transfer means 30, the rotation TV camera 112 moves the detection TV camera 6 about 90 degrees. Rotate. For this reason, when the inspected substrate W is transported in the second transport direction Q by the second transport unit 10, the inspection light in the second inspection direction B is applied to the inspected substrate W by the second line illumination 5b. The substrate W to be inspected can be imaged by the TV camera 6 for detection. That is, in the substrate inspection apparatus 100 of the present embodiment, the rotation mechanism 112 is provided, so that the inspection substrate W can be inspected from different directions by one detection TV camera 6. Further, since the object to be rotated is only the detection TV camera 6 as compared with the substrate inspection apparatus 100 of the second embodiment, the rotation mechanism 112 can be made simpler, and the light receiving units are respectively By providing separately according to the inspection direction, it is possible to obtain line illumination having an optimum length according to the long side or the short side of the substrate W to be inspected.

  As mentioned above, although embodiment of this invention was explained in full detail with reference to drawings, the concrete structure is not restricted to this embodiment, The design change etc. of the range which does not deviate from the summary of this invention are included.

It is a top view of the board | substrate inspection apparatus of the 1st Embodiment of this invention. It is sectional drawing to which the delivery means of the board | substrate inspection apparatus of the 1st Embodiment of this invention was expanded. It is sectional drawing of an inspection unit in the board | substrate inspection apparatus of the 1st Embodiment of this invention. It is a top view of the board | substrate inspection apparatus of the modification of the 1st Embodiment of this invention. It is a top view of the board | substrate inspection apparatus of the other modification of the 1st Embodiment of this invention. In the board | substrate inspection apparatus of the other modification of the 1st Embodiment of this invention, it is sectional drawing to which the floating stage was expanded. It is sectional drawing to which the holding mechanism was expanded in the board | substrate inspection apparatus of the other modification of the 1st Embodiment of this invention. It is a top view of the board | substrate inspection apparatus of the 2nd Embodiment of this invention. It is a top view of the board | substrate inspection apparatus of the 3rd Embodiment of this invention.

Explanation of symbols

1, 60, 100, 110 Substrate inspection device 2, 101, 111 Substrate inspection means 3 First inspection unit 4 Second inspection unit 5 Line illumination (light emitting section)
5a 1st line illumination (1st light emission part)
5b Second line illumination (second light emitting section)
6 TV camera for detection (light receiving part)
10, 70 First transport unit 20, 80 Second transport unit 30, 90 Delivery unit 102 Inspection unit 104, 112 Rotating mechanism A First inspection direction B Second inspection direction L Inspection light L1 Reflected light P First One transport direction Q Second transport direction W Substrate to be inspected (substrate)

Claims (6)

A first transport unit that transports the substrate in a predetermined first transport direction;
A second transport unit for transporting the substrate in a second transport direction different from the first transport direction;
Delivery means for delivering the substrate from the first transport unit to the second transport unit without changing the orientation of the substrate;
The substrate can be inspected in a first inspection direction substantially parallel to the first transport direction in a state where the substrate is transported by the first transport unit, and the second transport unit can A substrate inspection apparatus comprising substrate inspection means capable of inspecting the substrate in a second inspection direction substantially parallel to the second transport direction in a state where the substrate is transported. The board inspection apparatus according to claim 1,
The substrate inspection apparatus, wherein the first transfer unit and the second transfer unit are arranged such that the first transfer direction and the second transfer direction are substantially orthogonal to each other in plan view. . In the board | substrate inspection apparatus of Claim 1 or Claim 2,
The substrate inspection means includes a light emitting unit capable of irradiating the substrate with inspection light in at least one of the first inspection direction and the second inspection direction;
A substrate inspection apparatus comprising: a light receiving unit that detects reflected light reflected by the inspection light irradiated from the light emitting unit on the substrate. In the board | substrate inspection apparatus in any one of Claims 1-3,
The substrate inspection means includes a first inspection unit capable of inspecting the substrate in a state where the substrate is transported by the first transport unit;
And a second inspection unit capable of inspecting the substrate in a state where the substrate is transported by the second transport unit. In the board | substrate inspection apparatus in any one of Claims 1-3,
The substrate inspection means includes an inspection unit capable of inspecting the substrate in a certain inspection direction
Rotation capable of rotating the inspection unit between the first transport unit and the second transport unit so that the inspection can be performed in the first inspection direction or the second inspection direction, respectively. A board inspection apparatus comprising: a mechanism. In the board | substrate inspection apparatus of Claim 1 or Claim 2,
The substrate inspection means includes a first light emitting unit capable of irradiating the substrate with inspection light in the first inspection direction in a state where the substrate is conveyed by the first conveyance unit;
A second light emitting unit capable of irradiating the substrate with inspection light in the second inspection direction in a state where the substrate is conveyed by the second conveyance unit;
A light receiving unit capable of receiving reflected light reflected by the inspection light irradiated on the substrate;
The light receiving unit in each of a state capable of receiving reflected light from the inspection light emitted from the first light emitting unit and a state capable of receiving reflected light from the inspection light emitted from the second light emitting unit And a rotation mechanism capable of rotating the substrate.

Images