JP2008014706A - Visual inspection method and system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a visual inspection method capable of more efficiently performing the visual inspection of a substrate, and a visual inspection system. <P>SOLUTION: In the visual inspection method for performing the inspection of the substrate while irradiating the substrate, which is held on a substrate supporting part 4, with the light emitted from a light source, the substrate supporting part 4 is arranged under the feed surface of a substrate feed device 6 for feeding the substrate and, in a stage that the substrate is fed to the region above the substrate supporting part 4 is moved upward while the substrate is scooped up to be supported on the substrate supporting part 4. In a stage that the substrate supported on the substrate supporting part 4 is inspected, the substrate supporting part 4 is returned to the original position to return the substrate to the feed surface of the substrate feed device 6. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an appearance inspection method and an appearance inspection apparatus for a substrate such as a glass substrate for a flat display panel (FPD). For example, a substrate conveyed by a substrate conveyance apparatus in a production line is directly supported by the substrate of the appearance inspection apparatus. The present invention relates to an appearance inspection method and an appearance inspection apparatus that receive and inspect at a section.

  Conventionally, a glass substrate for flat display panel (FPD) (hereinafter referred to as a substrate) is formed by irradiating a substrate with illumination light and visually observing the reflected light or transmitted light by an observer to detect irregularly reflected light. Defects such as unevenness of resist applied on the surface and pinholes, and the presence or absence of dust adhesion are confirmed. In this type of visual inspection, a so-called visual inspection apparatus, which includes a light source for irradiating light onto a substrate, a substrate support section for holding the substrate, and the like is used. Further, the substrate to be inspected by the appearance inspection apparatus is transferred to the appearance inspection apparatus by, for example, a transfer robot, and is inspected by being held while being placed on the substrate support portion.

  However, it takes a lot of time to transport the substrate to the appearance inspection apparatus, and there is a problem that productivity is lowered because the appearance inspection of the substrate is performed. For this reason, an appearance inspection device is provided in the vicinity of the substrate transfer device of the production line, and the substrate conveyed in the production line is directly received by the transfer robot and transferred to the appearance inspection device arranged in the vicinity for inspection. Therefore, the transport distance of the substrate by the transport robot is shortened to shorten the time required for the inspection (see, for example, Patent Document 1).

In addition, the substrate placed on the substrate support part of the appearance inspection apparatus by the transfer robot needs to acquire the origin coordinates by aligning the substrate with the reference position before the inspection in order to specify the position of the defect detected by the inspection. is there. The reference alignment of the substrate reduces the frictional force between the placed substrate and the substrate support part by, for example, discharging the pressure gas from the lower surface side of the substrate and floating the substrate, and in this state, For example, the end portion is pressed with a positioning pin or the like, and the substrate is moved to a predetermined reference position (see, for example, Patent Document 2).
JP 2004-79614 A JP 2000-9661 A

  However, even when an inspection is performed by placing an appearance inspection device near the substrate transfer device on the production line described above, the inspection is still performed because the substrate is transferred between the production line and the appearance inspection device via the transfer robot. Therefore, it has been desired to further reduce the time required for the inspection.

  Further, in the above-described appearance inspection method, since the appearance inspection apparatus and the transfer robot are provided in the vicinity of the substrate transfer apparatus, there is a problem that these large occupied spaces are required.

  In view of the above circumstances, an object of the present invention is to provide an appearance inspection method and an appearance inspection apparatus that can more efficiently perform an appearance inspection of a substrate.

  In order to achieve the above object, the present invention provides the following means.

  An appearance inspection method according to the present invention is an appearance inspection method for inspecting a substrate while irradiating light emitted from a light source onto a substrate held on a substrate support, and is below a transport surface of a substrate transport device that transports the substrate. The substrate support portion is disposed on the substrate support portion, and when the substrate has been transported above the substrate support portion, the substrate support portion is moved upward and the substrate is picked up and supported by the substrate support portion. The substrate is returned to the transfer surface of the substrate transfer device by returning the substrate support to the original position when the substrate supported by the substrate support is inspected. To do.

  In the appearance inspection method according to the present invention, for example, a substrate transported by a substrate transport device in a production line can be received and inspected directly from the substrate transport device by a substrate support unit, and the substrate that has been inspected is a substrate. It can be returned directly to the substrate transfer device in the production line from the support portion.

  The appearance inspection apparatus of the present invention is an appearance inspection apparatus for inspecting the substrate while irradiating light emitted from a light source onto the substrate held on the substrate support portion, and is a substrate conveyance device for conveying the substrate. The substrate support portion is disposed below the transfer surface of the substrate, and the substrate support portion is configured to scoop up and hold the substrate transferred upward while moving upward. .

  In the visual inspection apparatus according to the present invention, for example, when the substrate transported by the substrate transport device in the production line has been transported above the substrate support, the substrate support is moved by moving the substrate support upward. The board can be picked up and received at the section. Then, after inspecting the substrate held by the substrate support unit, the substrate can be returned onto the transfer surface of the substrate transfer device by returning the substrate support portion below the transfer surface of the substrate transfer device again.

  According to the appearance inspection method and the appearance inspection apparatus of the present invention, since the substrate can be directly transferred to the substrate transfer device by the substrate support portion, the transfer robot for transferring the substrate to the substrate support portion of the appearance inspection device. Therefore, the inspection time can be shortened. This makes it possible to improve the efficiency of inspection. In addition, the space occupied by the transfer robot and the appearance inspection apparatus can be saved.

  Hereinafter, an appearance inspection method and an appearance inspection apparatus according to an embodiment of the present invention will be described with reference to FIGS. 1 to 7.

  An embodiment of the present invention is an appearance inspection apparatus that directly receives and inspects an FPD glass substrate 1 (hereinafter referred to as a substrate) conveyed in a production line as shown in FIGS. 1 and 3 to 4. 2. As shown in FIG. 1, the appearance inspection apparatus 2 has a light source 3a, a rectangular plate-like mirror 3b that deflects light emitted from the light source 3a, and an abbreviation such as a Fresnel lens that converges light deflected by the mirror 3b. A light projecting unit 3 having a disc-shaped converging lens 3c, a substrate supporting unit 4 for holding a rectangular thin plate-shaped substrate 1 irradiated with illumination light converged by the converging lens 3c, and a substrate supporting unit 4 In a cantilever state, it is connected to a rotation driving means 5 such as a motor, and is composed of a rotation shaft portion 5a for driving the rotation driving means 5 and rotating the substrate support portion 4 about the axis O1.

  As shown in FIGS. 3 to 4, the substrate support unit 4 is transported by a rectangular frame portion 4 a connected to a rotation shaft portion 5 a having an axis O <b> 1 parallel to the transport direction X of the substrate 1 and a substrate transport device 6 described later. A plurality of support members 4 d extending in the axial direction of the rotation shaft 6 a of the substrate transport device 6 so as to connect both end portions 4 b and 4 c of the rectangular frame portion 4 a along the transport direction X of the substrate 1 to be formed. ing. At this time, the plurality of support members 4d are juxtaposed at a certain interval in the transport direction X so as to be disposed between adjacent rotating shafts 6a. Further, as shown in FIGS. 5 to 6, the substrate support portion 4 is provided with an abutting pin 4f for supporting the substrate 1 on the rotating shaft portion 5a side of the rectangular frame portion 4a, and an upper surface of the support member 4d. On the side, a frictional force reducing means 4h composed of a plurality of rotating rollers 4g for reducing the frictional force between the substrate 1 and the substrate support portion 4 is installed.

  On the other hand, as shown in FIGS. 1 to 4, the substrate transport apparatus 6 provided in the production line for transporting the substrate 1 is a rectangular disk-shaped base whose longitudinal axis O2 coincides with the transport direction X of the substrate 1. A rectangular plate-like support plate portions 6f and 6g projecting vertically along the conveying direction X from both ends 6d and 6e in the longitudinal direction of the upper surface 6c of the base portion 6b, and the support plate portions 6f and 6g. A cylindrical rod-shaped rotary shaft 6a that is rotatably supported and is connected to the support plate portions 6f, 6g at a plurality of equal intervals so that the axis O3 is arranged in a direction orthogonal to the transport direction X, and the rotary shaft 6a The outer peripheral surface 6h is wound around the plurality of ring-shaped rotating bodies 6i whose frictional contact with the lower surface 1a of the substrate 1 and the side surface 6j of the supporting plate 6g are wound around the plurality of rotating shafts 6a. Endless belt 6k, and this belt 6k is driven to rotate, for example Is composed of a rotary shaft drive means 6l such over data. In the present embodiment, the upper ends of the outer peripheral surfaces 6 h of the plurality of rotating bodies 6 i provided on the plurality of rotating shafts 6 a of the substrate transport device 6 are respectively positioned on the same horizontal plane, and the same horizontal plane is used to mount the substrate 1. A conveyance surface to be conveyed is formed.

  Here, as shown in FIG. 2, the support plate portions 6f and 6g have notches cut out in a rectangular shape between the rotating shaft 6a and the rotating shaft 6a from the upper end portion 6m toward the lower end portion 6O. A portion 6n is formed, and the notch 6n is formed such that the lower end 6p is located below the axis O3 of the rotation shaft 6a. Further, the belt 6k is wound around the end portion of the rotating shaft 6a that is pivotally supported by the support plate portion 6g and protrudes outward from the support plate portion 6g, and is disposed below the notch portion 6n. It is provided by being wound around a cylindrical rod-like support pin 6q fixed so as to be orthogonal to the outer side surface 6j of the support plate portion 6g. Further, as shown in FIG. 7, when the substrate 1 transported on the substrate transport device 6 stops on the substrate support unit 4 (not shown), the substrate transport device 6 transports the substrate 1 in the transport direction X. Positioning pins 6r for adjusting the position of the substrate 1 with respect to the transport direction X by pressing the downstream end 1b are provided. The positioning pin 6r is configured to press the downstream end 1b of the substrate 1 by inverting vertically using appropriate means such as an actuator.

  Next, a method for inspecting the substrate 1 using the appearance inspection apparatus 2 and the substrate transport apparatus 6 having the above-described configuration will be described.

  First, as shown in FIGS. 2 and 5, when the rotating shaft 6a of the substrate transport device 6 is driven by the rotating shaft driving means 61, the substrate 1 whose lower surface 1a contacts the outer peripheral surface 6h of the rotating body 6i is changed to the substrate transport device. 6 (on the transport surface) is transported in one direction X. At this stage, in the substrate support portion 4 of the appearance inspection apparatus 2 shown in FIGS. 1 to 3, the rectangular frame portion 4a and the support member 4d are inserted into the notch portions 6n of the support plate portions 6f and 6g, and the support member 4d The substrate support 4 is arranged so that the rotating roller 4g is positioned below the outer peripheral surface 6h (the lower surface 1a of the substrate 1 and the conveying surface of the substrate conveying device 6) positioned above the rotating body 6i of the substrate conveying device 6. Has been. Then, at the stage where the substrate 1 has been transported above the substrate support portion 4, the rotary shaft driving means 6 l of the substrate transport device 6 is stopped once. At this stage, as shown in FIG. 7, while positioning the positioning pins 6 r provided in the substrate transport device 6, the end 1 b on the downstream side in the transport direction X of the substrate 1 is pressed to bring the substrate 1 in the transport direction X. Move to a predetermined reference position.

  Next, as shown in FIGS. 1 and 3 to 6, the rotation driving means 5 of the appearance inspection apparatus 2 is driven to rotate the substrate support portion 4 about the axis O <b> 1 of the rotation shaft portion 5 a toward the upper side. As a result, the substrate 1 is scooped up by the upper surface 4e of the substrate support portion 4, and the substrate 1 is supported by the rotating roller 4g of the frictional force reducing means 4h provided on the upper surface 4e. As shown in FIGS. 1 and 5 to 6, the upper surface 4e of the substrate support portion 4 is inclined by further rotation around the axis O1 of the rotation shaft portion 5a and is supported by the rotation roller 4g of the frictional force reducing means 4h. The substrate 1 thus moved moves downward on the substrate support portion 4 due to its own weight and rotation of the rotating roller 4g, and is held in contact with the contact pin 4f on the rotation shaft portion 5a side of the substrate support portion 4. Thereby, the reference position in the direction Y orthogonal to the transport direction X of the substrate 1 is matched.

  Next, as shown in FIG. 1, the substrate 1 arranged at the reference position on the substrate support 4 is irradiated with light from the light projecting unit 3, and the substrate support 4 is rotated around the axis O1 of the rotation shaft 5a. Swing while moving. Then, the observer 7 visually observes the reflected light from the swinging substrate 1 and confirms the presence or absence of reflected light that is irregularly reflected on the surface 1c of the substrate 1, that is, confirms the presence or absence of a defect on the surface 1c of the substrate 1. To do.

  Next, at the stage where the above inspection is completed, as shown in FIGS. 4 to 5, the rotating roller 4 g of the substrate support unit 4 is positioned above the rotating body 6 i attached to the rotating shaft 6 a of the substrate transport device 6. The substrate support portion 4 is returned to the original position so as to be positioned below the positioned outer peripheral surface 6h, and the substrate 1 is again supported by the rotating body 6i. At the stage where the substrate 1 is supported by the rotating body 6i, as shown in FIGS. 1 to 4, the rotating shaft driving means 6l of the substrate transport device 6 is driven to return the substrate 1 to the production line.

  Therefore, according to the visual inspection apparatus 2 having the above-described configuration and the visual inspection method using the visual inspection apparatus 2, the substrate transport device 6 that transports the substrate 1 and the substrate support portion 4 of the visual inspection apparatus 2 on the production line. By superposing the substrates, the substrate 1 transported by the substrate transport device 6 can be directly supported by the substrate support unit 4. Thereby, it becomes possible to hold | maintain the board | substrate 1 conveyed to the board | substrate support part 4 of the external appearance inspection apparatus from the conventional manufacturing line using the conveyance robot by the board | substrate support part 4 without using a conveyance robot. Further, the inspected substrate 1 can be returned to the production line without using a transfer robot. And since the board | substrate 1 can be delivered between the board | substrate conveyance apparatus 6 and the external appearance inspection apparatus 2 in this way, the time which inspection requires can be shortened. Further, the space occupied by the appearance inspection apparatus can be saved.

  Further, according to the appearance inspection apparatus 2 and the substrate transport apparatus 6 having the above-described configuration, in the reference position alignment of the substrate 1 on the substrate support portion 4, the reference position alignment in the transport direction X is driven and positioned by the substrate transport apparatus 6. Since the reference position alignment in the direction Y orthogonal to the conveyance direction X can be performed together with the rotation of the substrate support portion 4, the reference position alignment of the substrate 1 can be performed with respect to the conventional visual inspection apparatus. From this point, the time required for the inspection can be shortened.

  In addition, this invention is not limited to said one Embodiment, It can change suitably in the range which does not deviate from the meaning. For example, the reference position alignment of the substrate 1 in the transport direction X is performed by pressing the positioning pin 6r against the end 1b on the downstream side in the transport direction X of the substrate 1 after stopping the substrate transport device 6. The pin 6r may be provided on the upstream side in the transport direction X, and the upstream side substrate 1 end 1d may be pressed. In addition, when the substrate 1 has been transported onto the substrate support portion 4, the substrate 1 is moved back and forth in the transport direction X by driving the substrate transport device 6 without using the positioning pins 6 r, thereby transporting the substrate 1 in the transport direction. X reference alignment may be performed. Further, for example, as shown in FIG. 8, a sensor 8 for detecting the end portions 1 b and 1 d of the substrate 1 is provided in the substrate transport device 6, and the rotational axis drive of the substrate transport device 6 shown in FIG. The means 6l is controlled, and when the substrate 1 conveyed onto the substrate support 4 stops, the sensor 8 and the rotation axis driving means 6l controlled by the sensor 8 are used to perform the reference position alignment of the substrate 1. May be.

  Further, the frictional force reducing means 4h for aligning the substrate 1 supported by the substrate support part 4 is provided with a through hole in the rectangular frame part 4a and the support member 4d of the substrate support part 4, for example, and pressure is applied from the through hole. It is also possible to eliminate the frictional resistance between the substrate support portion 4 and the substrate 1 by discharging the gas and thereby perform alignment by sliding the substrate 1 on the substrate support portion 4.

  Moreover, the board | substrate support part 4 may be formed so that the one end side part 4b facing the rotating shaft part 5a side along the conveyance direction X of the rectangular frame part 4a may be eliminated, and a comb shape may be exhibited.

  Further, in one embodiment of the present invention, the substrate 1 is inspected by irradiating the surface 1c of the substrate 1 from the light projecting unit 3 and observing the reflected light. You may comprise so that it may test | inspect by irradiating light from the back surface of the supported board | substrate 1 and observing the transmitted light.

It is sectional drawing which showed the external appearance inspection apparatus and board | substrate conveyance apparatus which concern on one Embodiment of this invention. It is the perspective view which showed the board | substrate conveyance apparatus which concerns on one Embodiment of this invention. It is the perspective view which showed the board | substrate conveyance apparatus and board | substrate support part which concern on one Embodiment of this invention. It is a perspective view which shows the state which made the board | substrate support part support the board | substrate directly from the board | substrate conveyance apparatus which concerns on one Embodiment of this invention. It is a perspective view which shows the frictional force reduction means and contact pin which were provided in the board | substrate support part which concerns on one Embodiment of this invention. It is a perspective view which shows the state which performed the reference position alignment of the Y direction by the board | substrate support part which concerns on one Embodiment of this invention. It is a perspective view which shows the state which performed the reference position alignment of the conveyance direction X of the board | substrate on the board | substrate conveyance apparatus which concerns on one Embodiment of this invention using the positioning pin. It is a perspective view which shows the sensor which performs the reference | standard position alignment of the conveyance direction X of the board | substrate on the board | substrate conveyance apparatus which concerns on one Embodiment of this invention.

Explanation of symbols

1 Substrate 1a Bottom surface (back surface) of substrate
1c Substrate surface 3a Light source 4 Substrate support 4h Friction force reducing means 6 Substrate transport device 6a Rotating shaft 6l Rotating shaft driving means O3 Axis X Conveying direction Y The direction orthogonal to the conveying direction

Claims (3)

In the appearance inspection method for inspecting the substrate while irradiating the substrate held by the substrate support with the light emitted from the light source,
The substrate support unit is arranged below the transfer surface of the substrate transfer device that transfers the substrate, and the substrate support unit is moved upward when the substrate is transferred above the substrate support unit. In addition, the substrate is scooped up and supported by the substrate support unit, and when the substrate supported by the substrate support unit is inspected, the substrate support unit is returned to the original position to return the substrate to the original position. An appearance inspection method characterized by returning to the transfer surface of the substrate transfer apparatus. The appearance inspection method according to claim 1,
In the stage where the substrate moving on the transfer surface of the substrate transfer device is arranged above the substrate support part, the reference position alignment in the transfer direction of the substrate is performed on the transfer surface of the substrate transfer device, and Due to the inclination of the substrate support portion moved so as to support the substrate, the substrate is moved in a direction orthogonal to the transport direction so as to slide on the substrate support portion, and in a direction orthogonal to the transport direction of the substrate. An appearance inspection method characterized by performing reference alignment. An appearance inspection apparatus for inspecting the substrate while irradiating the substrate held by the substrate support with light emitted from a light source,
The substrate support unit is disposed below a transfer surface of a substrate transfer apparatus that transfers the substrate, and the substrate support unit is configured to scoop up and hold the substrate that has been transferred upward. An appearance inspection apparatus characterized by being made.

Images