JP2010066241A - Substrate inspection apparatus and substrate inspection method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To inspect a substrate to be inspected at a line pattern in the substrate width direction which crosses the substrate feed direction while saving a space and in a short time, in a substrate inspection apparatus and a substrate inspection method. <P>SOLUTION: The substrate inspection apparatus 1 which inspects the substrate to be inspected (2) at the line pattern while transferring it includes: a first inspecting section 4 having a line-pattern illuminating section 4a which irradiates the substrate to be inspected (2) with illumination light L1 at the line pattern extending in the substrate transfer direction (arrow D1) of the substrate to be inspected (2), and a detecting section 4b for detecting illumination light L2 with which the substrate to be inspected (2) is irradiated by the line-pattern illuminating section 4a; and a drive means (8) for moving the first inspecting section 4 in the substrate transfer direction (arrow D1) and in the substrate width direction (arrow D2) which crosses the substrate transfer direction so as to follow the substrate to be inspected (2). <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a substrate inspection apparatus and a substrate inspection method for inspecting a substrate to be inspected such as a flat panel display (FPD).

  Conventionally, in the manufacturing process of a flat panel display such as a liquid crystal display (LCD) used as a display device for a flat-screen TV, a PC monitor, a game machine, etc., light is applied to the mother glass substrate manufactured in each manufacturing process. A method of inspecting the state of the mother glass substrate by detecting the reflected light and transmitted light is used.

  A liquid crystal display uses a glass substrate on the surface of which a fine electric circuit is formed. Such a fine electric circuit on a glass substrate is formed using photographic technology, but due to a defect in a manufacturing apparatus or adhesion of surrounding particles in a manufacturing process, an unnecessary conductive portion or Defects such as broken parts may occur. Therefore, defect detection is performed by irradiating a glass substrate moving on a plane with linear illumination light and detecting reflected light or transmitted light by, for example, continuous imaging (for example, Patent Document 1 and 2).

  Here, the electric circuit on the glass substrate is formed by superimposing a directional fine pattern on a plurality of layers having different light transmittances. Therefore, the appearance of defects differs depending on the illumination direction (inspection direction) of the illumination light on the glass substrate, and the defect can be detected in a certain direction, but the same defect cannot be detected in a different direction. is there.

Therefore, it is necessary to inspect from a plurality of directions in order to detect defects reliably. In order to inspect the glass substrate from a plurality of directions, for example, a rotation mechanism (for example, refer to Patent Document 3) that changes the direction of the glass substrate on the conveyance path is provided, and after the inspection is performed in a certain direction, the rotation mechanism is used. It is conceivable to inspect in another direction by changing the direction of the glass substrate.
JP 2007-107945 A JP 2000-9661 A JP 2000-62951 A

  However, when the inspection is performed from a plurality of directions by changing the direction of the inspected substrate such as the glass substrate as described above, it is necessary to separately provide the rotation mechanism. For this reason, a space for installing the rotation mechanism is required, and the apparatus cost is increased.

  In addition, there is a problem that the inspection time becomes long because of the rotation operation by the rotation mechanism. Further, when the substrate inspection apparatus is arranged in the production line of the substrate to be inspected, the substrate to be inspected is rotated in the outward direction after passing the substrate inspection apparatus in the substrate conveyance direction, and rotated in the direction of substrate conveyance. It is necessary to move the return path for passing the substrate inspection apparatus in the opposite direction and the forward path for transporting in the substrate transport direction three times, and the inspection time becomes even longer.

  An object of the present invention is to provide a substrate inspection apparatus and a substrate inspection method capable of inspecting a substrate to be inspected in a line shape in the substrate width direction crossing the substrate transport direction in a space-saving and short time in view of the above-described conventional situation. Is to provide.

  In order to solve the above-mentioned problems, the substrate inspection apparatus of the present invention is a substrate inspection apparatus that inspects in a line while transporting a substrate to be inspected, and the substrate to be inspected in a line extending in the substrate transport direction of the substrate to be inspected. A first inspection unit having a line illumination unit that irradiates the illumination light and a detection unit that detects illumination light irradiated to the substrate to be inspected by the line illumination unit; and And a driving unit that moves the first inspection unit in the substrate transport direction and in the substrate width direction crossing the substrate transport direction.

  In order to solve the above-mentioned problems, the substrate inspection method of the present invention is a substrate inspection method for inspecting in a line while transporting a substrate to be inspected, wherein the substrate to be inspected is in a line extending in the substrate transport direction of the substrate to be inspected A first inspection unit including a line-shaped illumination unit that irradiates the illumination light and a detection unit that detects illumination light irradiated on the substrate to be inspected by the line-shaped illumination unit. Following this, a step of inspecting the substrate to be inspected by moving in the substrate transport direction and in the substrate width direction crossing the substrate transport direction is included.

  In the present invention, the first inspection unit follows the substrate to be inspected, moves in the substrate transport direction and in the substrate width direction crossing the substrate transport direction, and in a line extending in the substrate transport direction, Perform an inspection.

  Accordingly, since the substrate to be inspected can be inspected in a line shape in the substrate width direction without changing the direction of the substrate to be inspected by rotating the substrate to be inspected by the rotation mechanism, there is no need to provide a rotation mechanism. Therefore, it is possible to save the space for the rotation mechanism, and it is possible to shorten the time required for rotating the substrate to be inspected and the time for transporting the substrate to be inspected by switching the substrate transport direction.

  Therefore, according to the present invention, the substrate to be inspected can be inspected in a line shape in the substrate width direction crossing the substrate transport direction in a small space and in a short time.

Hereinafter, a substrate inspection apparatus and a substrate inspection method according to embodiments of the present invention will be described with reference to the drawings.
<One embodiment>
In the present embodiment, a substrate inspection apparatus 1 that inspects a rectangular glass substrate (substrate to be inspected) 2 manufactured on a flat panel display manufacturing line will be described.

FIG. 1 is a schematic plan view showing a substrate inspection apparatus 1 according to an embodiment of the present invention.
The substrate inspection apparatus 1 shown in the figure includes a conveyance path 3 for conveying the glass substrate 2 in the substrate conveyance direction (arrow D1), a first inspection unit 4 having a line-shaped illumination unit 4a and a detection unit 4b, A gate-shaped gantry 5 arranged so as to straddle the conveyance path 3, a second inspection unit 6 having a line illumination unit 6a and a detection unit 6b and fixed to the bottom surface of the gantry 5, and a substrate conveyance direction ( A pair of linear guide portions 7 and 7 extending across the arrow D1) and extending in the substrate width direction (arrow D2) orthogonal to the substrate transfer direction (arrow D1), and the substrate transfer direction (arrow And a pair of movable base parts (drive parts) 8 and 8 that move to D1).

  As the conveyance path 3, for example, conveyance rollers that contact the glass substrate 2 and convey the glass substrate 2 are arranged in a matrix, or floating plates that float the glass substrate 2 by discharging air are arranged in a matrix. What is formed can be used.

  The line-shaped illumination units 4a and 6a of the first inspection unit 4 and the second inspection unit 6 irradiate the glass substrate 2 with illumination light L1 in a line shape obliquely downward. The detection units 4b and 6b of the first inspection unit 4 and the second inspection unit 6 detect the reflected light L2 from the glass substrate 2 of the illumination light L1 irradiated by the line-shaped illumination units 4a and 6a. Thereby, the inspection unit 4 inspects the line-shaped inspection region CR indicated by a two-dot chain line in FIG.

  The line-shaped illumination unit 4a and the detection unit 4b of the first inspection unit 4 place the light source and the sensor in the substrate conveyance direction (arrow D1) so that the entire length of the glass substrate 2 in the substrate conveyance direction (arrow D1) can be inspected. ) In parallel.

  Moreover, the line-shaped illumination part 6a and the detection part 6b of the 2nd test | inspection part 6 let a light source and a sensor be board | substrate width direction (arrow) so that the whole width | variety in the board | substrate width direction (arrow D2) of the glass substrate 2 can be test | inspected. D2) are arranged in parallel.

In FIG. 1, only four light sources and sensors of the line illumination units 4a and 6a and the detection units 4b and 6b are illustrated, but in actuality, it is assumed that a larger number are arranged in parallel.
The first inspection unit 4 follows the glass substrate 2 along the straight guide portions 7 and 7 located near both ends in the substrate transport direction (arrow D1) by a drive unit (not shown) such as a linear motor. Move in the direction (arrow D2). Further, the first inspection unit 4 moves along the substrate transport direction together with the linear guide portions 7 and 7 by moving the movable bases 8 and 8 in the substrate transport direction (arrow D1) following the glass substrate 2 by a linear motor or the like. Move to (arrow D1).

Here, the speed S at which the movable base portions 8 and 8 move in the substrate transport direction (arrow D1) is the same as the speed S at which the glass substrate 2 moves on the transport path 3 in the substrate transport direction (arrow D1). Yes.
Therefore, the first inspection unit 4 moves in the substrate transport direction (arrow D1) by the movement of the movable base portions 8 and 8, and moves in the substrate width direction (arrow D2) along the linear guide portions 7 and 7. Then, the substrate moves in the substrate transport direction (arrow D1) and in the substrate width direction (arrow D2), that is, in the direction inclined from the substrate transport direction (arrow D1) to the substrate width direction (arrow D2), and transports on the transport path 3. It is possible to inspect the glass substrate 2 in a line shape in the substrate width direction (arrow D2).

  In addition, the speed | rate which the 1st test | inspection part 4 moves to a board | substrate width direction (arrow D2) complete | finishes the test | inspection of the glass substrate 2 in the time when the movable base part 8 moves the movable distance, or less. What is necessary is just to determine suitably so that it can do.

  The second inspection unit 6 is fixed to the bottom surface of the fixed gantry 5, and the glass substrate 2 being transported is formed in a line parallel to the substrate width direction (arrow D2), opposite to the substrate transport direction (arrow D1). Inspect in the direction.

Hereinafter, the inspection of the glass substrate 2 by the substrate inspection apparatus 1 will be described.
FIG. 2 is a schematic plan view for explaining the inspection of the glass substrate 2 by the substrate inspection apparatus 1.

First, the glass substrate 2 is placed on the transfer path 3 by a transfer robot (not shown). Then, the glass substrate 2 is transported on the transport path 3 at a speed S in the substrate transport direction (arrow D1).
Next, when the glass substrate 2 is conveyed below the first inspection unit 4 as shown in FIG. 1, the movable bases 8 and 8 follow the glass substrate 2 ′ as shown in FIG. The glass substrate 2 ′ moves in the substrate transport direction (arrow D1) at the same speed S as the transport speed S of the glass substrate 2 ′. Moreover, the 1st test | inspection part 4 moves to a board | substrate width direction (arrow D2) along the linear guide parts 7 and 7 by the drive part which is not shown in figure.

  Thereby, the first inspection unit 4 is in the substrate transport direction (arrow D1) and in the substrate width direction (arrow D2), that is, in the direction inclined from the substrate transport direction (arrow D1) to the substrate width direction (arrow D2). Move (first inspection unit 4 ') and inspect the glass substrate 2' conveyed on the conveyance path 3 in a line shape parallel to the substrate conveyance direction (arrow D1) in the substrate width direction (arrow D2). To do.

  After the first inspection unit 4 inspects the glass substrate 2 in the substrate width direction (arrow D2), the glass substrate 2 'passes below the gantry 5 at the speed S as it is. During this passage, the second inspection unit 6 inspects the glass substrate 2 in the direction parallel to the substrate width direction (arrow D2) in the direction opposite to the substrate transport direction (arrow D1).

  While the second inspection unit 6 is inspecting the glass substrate 2, the first inspection unit 4 moves along the straight guide portions 7 and 7 in the direction opposite to the substrate width direction (arrow D2). At the same time, the movable base portions 8 and 8 move in the direction opposite to the substrate transport direction (arrow D1) to move to a standby position where the inspection of the newly transported glass substrate 2 is started.

  In the present embodiment described above, the first inspection unit 4 follows the glass substrate 2 and moves in the substrate transport direction (arrow D1) and in the substrate width direction (arrow D2) while moving in the substrate transport direction (arrow The glass substrate 2 is inspected in a line extending to D1).

  Accordingly, since the glass substrate 2 can be inspected in a line shape in the substrate width direction (arrow D2) without changing the direction of the glass substrate 2 by rotating the glass substrate 2 by the rotation mechanism, a rotation mechanism is provided. Therefore, the space for the rotation mechanism can be saved, and the time required for rotating the glass substrate 2 and the time for transporting the glass substrate 2 by switching the substrate transport direction (arrow D1) can be shortened. be able to.

Therefore, according to the present embodiment, it is possible to inspect the glass substrate 2 in a line shape in the substrate width direction (arrow D2) crossing the substrate transport direction (arrow D1) in a small amount of space and in a short time.
In the present embodiment, the second inspection unit 6 inspects the glass substrate 2 in a line extending in the substrate width direction (arrow D2) in the direction opposite to the substrate transport direction (arrow D1). Therefore, the glass substrate 2 can be inspected in the substrate width direction (arrow D2) by the first inspection unit 4, and the glass substrate 2 in the direction opposite to the substrate transport direction (arrow D1) by the second inspection unit 6. Can be inspected. Therefore, it is possible to detect defects that are difficult to detect by inspection from one direction, and it is possible to inspect the glass substrate 2 with higher accuracy.

  In the present embodiment, the first inspection unit 4 inspects the glass substrate 2 while moving at the same speed S as the transport speed S of the glass substrate 2 in the substrate transport direction (arrow D1). Therefore, the glass substrate 2 can be inspected without requiring complicated image processing.

  In the present embodiment, the first inspection section 4 moves in the substrate width direction (arrow D2) along the straight guide sections 7 and 7, and the straight guide sections 7 and 7 by the movable base sections 8 and 8 are used. Is moved in the substrate transfer direction (arrow D1). Therefore, the glass substrate 2 can be inspected by easily moving the first inspection unit 4 in the substrate transport direction (arrow D1) and in the substrate width direction (arrow D2).

  In the present embodiment, the configuration in which the reflected light from the glass substrate 2 is detected by the detection units 4b and 6b has been described. However, the line-like illumination units 4a and 6a are disposed below the glass substrate 2, and the glass substrate 2 It is good also as a structure which detects the light which permeate | transmitted by detection part 4b, 6b.

  In the present embodiment, the configuration has been described in which the movable base portions (drive portions) 8 and 8 themselves move to move the glass substrate 2 in the substrate transport direction (arrow D1), but only the linear guide portions 7 and 7 are used. May be configured to move in the substrate transport direction (arrow D1).

<Other embodiments>
Since this embodiment is substantially the same as the above-described embodiment except for the configuration for moving the first inspection unit 4, the same or similar configurations are denoted by the same reference numerals in FIGS. A description thereof will be omitted.

FIG. 3 is a schematic plan view showing a substrate inspection apparatus 11 according to another embodiment of the present invention.
In the substrate inspection apparatus 11 shown in the figure, instead of the linear guide portions 7 and 7 and the movable base portions 8 and 8 described in the above embodiment, a substrate transport direction (arrow D1) and a substrate width direction (arrow D2). ), That is, a pair of inclined guide portions 17 and 17 extending in a direction inclined in the substrate width direction (arrow D2) from the substrate transport direction (arrow D1).

  The first inspection unit 4 is suspended from the inclined guide portions 17 and 17 in the vicinity of both ends in the substrate transport direction (arrow D1), and follows the glass substrate 2 by a drive unit (not shown) such as a linear motor, so that the inclined guide unit. 17 and 17 along the substrate transport direction (arrow D1) and the substrate width direction (arrow D2).

Here, the speed S of the component in the substrate transport direction (D1) among the speeds at which the first inspection section 4 moves along the tilt guide sections 17, 17 is the same as the transport speed S of the glass substrate 2.
Therefore, the 1st test | inspection part 4 is conveyed on the conveyance path 3 by moving in the board | substrate conveyance direction (arrow D1) and a board | substrate width direction (arrow D2) along the inclination guide parts 17 and 17. FIG. It is possible to inspect the glass substrate 2 in a line shape in the substrate width direction (arrow D2).

Hereinafter, the inspection of the glass substrate 2 by the substrate inspection apparatus 11 will be described.
FIG. 4 is a schematic plan view for explaining the inspection of the glass substrate 2 by the substrate inspection apparatus 11.

First, the glass substrate 2 is placed on the transfer path 3 by a transfer robot (not shown). Then, the glass substrate 2 is transported on the transport path 3 at a speed S in the substrate transport direction (arrow D1).
Next, when the glass substrate 2 is transported below the first inspection unit 4 as shown in FIG. 3, the first inspection unit 4 follows the glass substrate 2 ′ as shown in FIG. Then, the substrate moves along the tilt guides 17 and 17 in the substrate transport direction (arrow D1) and in the substrate width direction (arrow D2), that is, in the direction inclined from the substrate transport direction (arrow D1) to the substrate width direction (arrow D2). (First inspection unit 4 ').

  At this time, the speed S of the component in the substrate transport direction (D1) out of the speed at which the first inspection unit 4 moves along the inclined guide parts 17 and 17 is the same as the transport speed S of the glass substrate 2, One inspection unit 4 inspects the glass substrate 2 ′ being conveyed on the conveyance path 3 in a line shape parallel to the substrate conveyance direction (arrow D <b> 1) in the substrate width direction (arrow D <b> 2).

  After the first inspection section 4 inspects the glass substrate 2 ′ in the substrate width direction (arrow D2), the glass substrate 2 passes below the gantry 5 at a speed S as it is. During this passage, the second inspection unit 6 inspects the glass substrate 2 in the direction parallel to the substrate width direction (arrow D2) in the direction opposite to the substrate transport direction (arrow D1).

  While the second inspection unit 6 is inspecting the glass substrate 2, the first inspection unit 4 is tilted toward the standby position for starting the inspection of the newly conveyed glass substrate 2. It moves in the opposite direction along the parts 17 and 17.

  Also in the present embodiment described above, the first inspection unit 4 follows the glass substrate 2 and moves in the substrate transport direction (arrow D1) and in the substrate width direction (arrow D2) while moving in the substrate transport direction (arrow D2). The glass substrate 2 is inspected in a line extending in the direction of the arrow D1). Therefore, according to the present embodiment, the glass substrate 2 can be inspected in a line shape in the substrate width direction (arrow D2) crossing the substrate transport direction (arrow D1) in a short time and in a space-saving manner.

  In the present embodiment, the first inspection unit 4 moves along the inclined guide portions 17 and 17 in the substrate transport direction (arrow D1) and in the substrate width direction (arrow D2). Therefore, the configuration for moving the first inspection unit 4 is simplified, and the substrate inspection apparatus 11 can be further configured to save space.

It is a schematic plan view which shows the board | substrate inspection apparatus which concerns on one embodiment of this invention. It is a schematic plan view for demonstrating the test | inspection of the glass substrate by the board | substrate inspection apparatus which concerns on one embodiment of this invention. It is a schematic plan view which shows the board | substrate inspection apparatus which concerns on other embodiment of this invention. It is a schematic plan view for demonstrating the test | inspection of the glass substrate by the board | substrate inspection apparatus which concerns on other embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Board | substrate inspection apparatus 2 Glass 3 Conveyance path 4 1st test | inspection part 4a Line-shaped illumination part 4b Detection part 5 Gantry 6 2nd test | inspection part 6a Line-shaped illumination part 6b Detection part 7 Linear guide part 8 Movable base part 11 Board | substrate inspection Device 17 Inclined guide part

Claims (7)

In substrate inspection equipment that inspects in a line while conveying the substrate to be inspected,
A line-shaped illumination unit that irradiates the substrate to be inspected with the illumination light in a line extending in the substrate transport direction of the substrate to be inspected, and an illumination light that is irradiated onto the substrate to be inspected by the line-shaped illumination unit A first inspection unit having a detection unit;
Drive means for moving the first inspection unit in the substrate width direction crossing the substrate transport direction in the substrate transport direction following the substrate to be inspected.
A board inspection apparatus comprising:   A line-shaped illumination unit that irradiates the substrate to be inspected with the illumination light in a line extending in the substrate width direction, and a detection unit that detects the illumination light irradiated on the substrate to be inspected by the line-shaped illumination unit. The substrate inspection apparatus according to claim 1, further comprising a second inspection unit having the second inspection unit.   3. The substrate inspection apparatus according to claim 1, wherein the driving unit moves the first inspection unit in the substrate transport direction at the same speed as the transport speed of the substrate to be inspected. Further comprising a linear guide portion extending in the substrate width direction,
The driving means moves the first inspection unit in the substrate width direction along the linear guide unit, and moves the linear guide unit in the substrate transport direction to move the first inspection unit. A drive unit that moves the unit in the substrate transport direction,
The substrate inspection apparatus according to any one of claims 1 to 3, wherein An inclined guide portion extending in the substrate transport direction and in the substrate width direction;
The drive means moves the first inspection unit in the substrate transport direction and the substrate width direction along the inclined guide unit,
The substrate inspection apparatus according to any one of claims 1 to 3, wherein In a substrate inspection method for inspecting in a line while conveying a substrate to be inspected,
A line-shaped illumination unit that irradiates the substrate to be inspected with the illumination light in a line extending in the substrate transport direction of the substrate to be inspected, and an illumination light that is irradiated onto the substrate to be inspected by the line-shaped illumination unit A step of inspecting the substrate to be inspected by moving a first inspection unit having a detection unit in the substrate width direction crossing the substrate transport direction in the substrate transport direction following the substrate to be inspected. including,
A method for inspecting a substrate.   A line-shaped illumination unit that irradiates the substrate to be inspected with the illumination light in a line extending in the substrate width direction, and a detection unit that detects the illumination light irradiated on the substrate to be inspected by the line-shaped illumination unit. The substrate inspection method according to claim 6, further comprising a step of inspecting the substrate to be inspected by a second inspection unit.