JP5618209B2 - Glass plate end face imaging device and imaging method thereof - Google Patents

Description

  The present invention relates to a glass plate end surface imaging device and an imaging method therefor, and more particularly, to a technique for imaging an orthogonal end surface in a direction orthogonal to a conveyance direction of a glass plate being conveyed.

  As is well known, when manufacturing various image display devices such as a liquid crystal display, a plasma display, an electroluminescence display, and a field emission display, a plurality of display elements are formed on a large glass substrate, and then each display element is partitioned. A so-called multi-chamfering method that divides every time has been adopted. For this reason, there is a current situation in which a glass substrate manufactured by a glass manufacturer or the like is being increased in size.

  These glass substrates are cut into a rectangular and predetermined size after forming glass, and then subjected to a polishing process on the cut end surface, and then the front and back surfaces of the glass plate are clean surfaces. It is obtained by performing a washing process and a drying process for the purpose. In addition, in order to avoid the situation where the cut end face or its corners are damaged after polishing, or the glass substrate is completed and then the other adjacent glass substrate is damaged when being laminated and transported, On the other hand, chamfering may be performed together with polishing. That is, after cutting the formed material glass to obtain a glass plate of a predetermined size, the cutting end surface is subjected to polishing, and the corner portion of the cutting end surface is chamfered with a diamond wheel or the like, The strength of the cut end face or its corner is increased to prevent breakage.

  However, when processing as described above is performed, defects such as burrs and scratches may occur on the cut end surface and the corners due to the use state of the processing tool. When such a defect occurs, the end face strength of the glass plate is lowered, and there is an increased risk of breakage. For this reason, it is necessary to exclude the glass plate from which the defects that may lead to breakage are observed from the production line by observing the end face and the corners thereof.

  In particular, when producing a glass substrate for display, the glass plate to be a glass substrate is usually subjected to polishing processing on the end surfaces of all four sides, and chamfering processing is performed as necessary. Therefore, it is necessary to image all the end faces and inspect for the presence or absence of defects.

  Here, for example, in Patent Document 1 below, the two side end faces parallel to the transport direction of the glass substrate being transported, which are arranged adjacent to the transport device for transporting the glass substrate, and the vicinity thereof are imaged, and defects such as chipping. A defect inspection apparatus for inspecting for the presence or absence of the above is described.

  Further, in Patent Document 2 below, a defect detection device having a ring illumination and two CCD cameras is sandwiched between glass plates at predetermined positions with respect to two side end faces parallel to the conveyance direction of the glass plate to be conveyed. A method is described in which the inspection is performed by imaging the side end face of the glass plate when the glass plate passes through the defect detection device.

  Further, in Patent Document 2 below, as a method of performing the defect inspection of the end surface of the glass plate over the entire circumference, first, after performing the defect inspection of the two side end surfaces parallel to the transport direction as described above, The orientation of the glass plate is changed by 90 degrees without changing the orientation of the glass plate so that the two end faces of the inspection are parallel to the transport direction, and an illumination system and a camera similar to the above are placed at predetermined positions with respect to the two end faces that are not inspected. Are provided, and when the glass plate passes through the defect detection device, the two end faces of the glass plate are sequentially imaged to perform a defect inspection.

  Further, in Patent Document 2 below, an imaging means including at least an illumination means having a ring illumination and a CCD camera is attached to a hand of an articulated robot, and the hand is sequentially moved along the outer peripheral end surface of the glass plate, A method is described in which the entire circumference of the end surface of the glass plate is sequentially imaged and the presence or absence of defects is inspected based on the captured image.

JP 2006-30067 JP JP 2006-220540 A

  Thus, according to the method described in Patent Document 1, only the side end face parallel to the transport direction can be imaged when the glass plate is transported. Further, among the imaging means described in Patent Document 2, the means for imaging the end faces of all four sides of the glass plate by converting the conveyance direction by 90 degrees changes the direction of the glass plate with respect to the conveyance direction, This is a method of imaging the side end surface parallel to the conveyance direction of the glass plate twice, and does not image an end surface (orthogonal end surface) in a direction orthogonal to the conveyance direction of the glass plate being conveyed.

  When the camera described in the above-mentioned Patent Document 2 is moved and the means for sequentially imaging the entire circumference of the end face of the glass plate is taken, the end faces of all four sides can be imaged. It is necessary to stop the glass plate when imaging any end face. Further, as described above, when the conveyance direction is changed by 90 degrees and the side end surface parallel to the conveyance direction of the glass plate is imaged, the conveyance line is interrupted at the corner portion of the conveyance line (configured by separate conveyance means). Therefore, when the glass plate is transferred from one transfer line to the other transfer line, it is necessary to temporarily stop the glass plate. In order to stop the glass plate, the transport line must also be stopped, which may lead to a reduction in work efficiency and, in turn, tact time.

  In view of the above circumstances, it is to provide a glass plate end surface imaging device and an imaging method thereof capable of imaging an orthogonal end surface in the direction orthogonal to the conveyance direction and its vicinity without stopping the glass plate being conveyed. This is a technical problem to be solved by the present invention.

The solution to the above problem is achieved by the glass plate end face imaging apparatus according to the present invention. That is, the end surface imaging device includes a transport unit that transports the glass plate in a predetermined direction in a horizontal state, and an imaging unit that captures an orthogonal end surface in the direction orthogonal to the transport direction of the glass plate transported by the transport unit and its vicinity. The moving means for moving the imaging means in an oblique direction with respect to the conveyance direction of the glass plate, and the imaging means by the moving means while maintaining the distance between the imaging means and the orthogonal end face constant during the conveyance of the glass plate A movement control means that is movable along the orthogonal end face , the conveying means is disposed below the glass plate, and is divided by traversing the conveying means obliquely with respect to the conveying direction. has a space, the imaging means dividing the space that passes, and movable along the imaging means to the orthogonal end face, thereby a point which enables the imaging across the perpendicular end face on both sides side by the imaging means It characterized me.

  According to the above-described configuration, the imaging unit is moved from one side to the other side in the width direction of the orthogonal end surface orthogonal to the conveyance direction of the glass plate (direction orthogonal to the conveyance direction) while conveying the glass plate in a predetermined direction. Can be moved. At this time, since the image pickup means can be moved by the movement control means while keeping the distance from the orthogonal end face constant, the image pickup means can be relatively disposed at a position where the orthogonal end face can always be imaged. it can. Therefore, while avoiding a collision with the glass plate, an orthogonal end surface orthogonal to the conveyance direction and the vicinity thereof can be sequentially imaged over the entire width direction, thereby enabling an appropriate defect inspection without leakage. Moreover, since the said orthogonal end surface can be imaged without stopping conveyance of a glass plate, it is not necessary to stop a conveyance line and a tact time can be maintained.

  Moreover, the end surface imaging device according to the present invention includes two imaging units having the above-described configuration, and enables one imaging unit to move along the orthogonal end surface located on the front side in the conveyance direction of the glass plate, and the other The imaging means may be movable along the orthogonal end face located on the rear side in the conveying direction of the glass plate.

  For example, when an image of the orthogonal end faces before and after the conveyance direction of the glass plate is to be imaged by one imaging means, first, the imaging means is moved along the orthogonal end face on the front side in the conveyance direction, and the orthogonal end face on the front side is imaged. However, after that, it is necessary to move the imaging means with different inclination directions so as to follow the orthogonal end surface on the rear side in the transport direction. In this case, the moving means becomes more complicated, and the imaging means may not be able to take the trajectory as described above due to the size of the glass plate and the space of the transport line. In addition, it takes time to move one imaging unit twice. In this regard, according to the end surface imaging device having the above-described configuration, each of the two imaging means disposed at a predetermined position in the transport direction is moved so that each of the orthogonal end surfaces before and after the transport direction of one glass plate is once. Images can be taken by each movement. Therefore, the size of the glass plate and the space of the conveyance line are not particularly limited, and it is not necessary to perform imaging by moving one imaging unit twice in different directions. Thereby, both orthogonal end surfaces of a glass plate can be efficiently imaged in the time for one movement, and a tact time can be maintained.

  Further, in the end surface imaging device according to the present invention, the imaging unit may be capable of imaging across the end surface of the glass plate across both the front and back surfaces, and in this case, the conveying unit is disposed below the glass plate. In addition, there is a dividing space that is divided by traversing the conveying means in an oblique direction with respect to the conveying direction, and the imaging means passes through the dividing space so that the imaging means can be moved along the orthogonal end surface. It may be a thing.

  As described above, defects that occur at the end of the glass plate mainly occur at the end surface of the glass plate and the corners located on the front and back both sides, so for example, when the end surface is imaged from diagonally above the glass plate, It is difficult to image corners on the lower surface side (back surface side). Therefore, the imaging means may be configured to be capable of imaging across the front and back both sides of the glass plate, for example, but this time, this time, the imaging means is arranged at the same height as the glass plate, Since it is necessary to move while maintaining this height, it is inevitably necessary to avoid interference with the conveying means disposed below the glass plate. Here, for example, the conveying means is disposed below the glass plate and has a dividing space that is divided by crossing the conveying means in an oblique direction with respect to the conveying direction. You may comprise an end surface imaging device so that an imaging means can be moved along the orthogonal end surface of a glass plate by passing. By configuring in this way, it is possible to image the vicinity region including the orthogonal end surface of the glass plate and the corners on both the front and back surfaces, while avoiding interference between the image capturing device and the transport device.

  Further, in the end face imaging device according to the present invention, the conveying means is disposed between the levitation support means for levitation support of the glass plate at atmospheric pressure and the side of the levitation support means, and rolls between the glass plate. It may comprise a conveying roller that conveys a glass plate, and the floating support means may be provided with a dividing space, and in this case, the glass moves in synchronization with the imaging means and passes through the dividing space. It may further comprise a moving support means for floatingly supporting the plate.

  In order to be movable along the orthogonal end surfaces of the glass plate, it is desirable to move the imaging means linearly. On the other hand, a belt conveyor or a roller conveyor is generally used as the glass plate conveying means. When the conveying means is constituted by such a conveyor, the imaging means passes (moves) in an oblique direction with respect to the conveying direction. There is a problem that it is difficult to provide a possible dividing space. Therefore, as the conveying means, if the floating support means and a conveying roller that conveys the glass plate by rolling are used, and a dividing space is provided in the floating supporting means, the dividing space can be easily formed. In addition, it is possible to provide a space in which the imaging means can move linearly in an oblique direction with respect to the transport direction.

  In this case, the end face imaging device according to the present invention is further provided with moving support means that moves in synchronization with the imaging means and floats and supports the glass plate that is passing through the dividing space. A portion of the plate that is imaged by the imaging means on the dividing space can also be supported. Therefore, even when the dividing space is provided in the conveying means (the levitation support means), it is possible to prevent or suppress the deflection and vertical shaking when the glass plate being conveyed passes through the dividing space. Imaging can be performed while keeping the height of the imaging region constant.

  In addition, the end surface imaging device according to the present invention further includes a side end surface imaging means that images the side end surface parallel to the transport direction of the glass plate that is transported in a horizontal state and the vicinity thereof, which is fixedly disposed on the side of the transport means. It may be what you did.

  Thus, in addition to the imaging means for imaging the orthogonal end face in the direction orthogonal to the conveyance direction of the glass plate and the vicinity thereof, the side end face imaging means for imaging the side end face parallel to the conveyance direction and the vicinity thereof is further provided. The end faces of all four sides of the glass plate can be imaged without bending the transport line and without rotating the glass plate. Therefore, the end face imaging device according to the present invention can be applied without making any changes to the current transport line.

  The glass plate end surface imaging device according to the above description determines, for example, the presence or absence of defects present on the orthogonal end surface of the glass plate and its vicinity based on the end surface imaging device and image information obtained by imaging with the imaging means. It can also be provided as a defect inspection line for a glass plate provided with a judging means.

  By constructing a defect inspection line in this way, it is possible to continuously image the end surfaces of all glass plates after polishing and the vicinity thereof, so that it is possible to carry out defect inspection without significant equipment changes. It becomes possible.

Moreover, the solution of the above-mentioned problem is also achieved by the method for imaging the end face of the glass plate according to the present invention. That is, this imaging method uses an imaging means to image an orthogonal end face in the direction orthogonal to the conveyance direction of the glass plate conveyed in a horizontal state and the vicinity thereof, and is orthogonal to the imaging means during conveyance of the glass plate. By moving the imaging means obliquely with respect to the conveyance direction of the glass plate while keeping the distance from the end surface constant, the imaging means can be moved along the orthogonal end surface, and the conveyance means is arranged below the glass plate. And providing a dividing space that is divided by traversing the conveying means in an oblique direction with respect to the conveying direction, and the imaging means passes through the dividing space to move the imaging means along the orthogonal end surface. It is characterized by the fact that it is possible to take an image across the end face on both the front and back sides .

  According to this imaging method, similarly to the glass plate end face imaging apparatus according to the present invention described above, the width of the orthogonal end face perpendicular to the glass plate transport direction is measured while the glass plate is transported in a predetermined direction. The direction can be moved from one side to the other side. At this time, by moving the imaging unit while keeping the distance from the orthogonal end surface constant, the imaging unit can be relatively disposed at a position where the orthogonal end surface can always be imaged. Therefore, it is possible to sequentially image the end face perpendicular to the conveyance direction and the vicinity thereof across the entire width direction while avoiding a collision with the glass plate, thereby enabling an appropriate defect inspection without leakage. Moreover, since the said orthogonal end surface can be imaged without stopping conveyance of a glass plate, it is not necessary to stop a conveyance line and a tact time can be maintained.

  As described above, according to the glass plate end surface imaging device and the imaging method thereof according to the present invention, the orthogonal end surface in the direction orthogonal to the transport direction and the vicinity thereof are imaged without stopping the glass plate being transported. Can do.

It is a top view of the defect inspection line incorporating the end surface imaging device of the glass plate which concerns on one Embodiment of this invention. It is a perspective view of the imaging means shown in FIG. It is a fragmentary sectional view for demonstrating notionally the internal structure containing the optical system of an imaging means. It is sectional drawing orthogonal to the conveyance direction of the conveyance means shown in FIG. It is a principal part enlarged plan view for demonstrating an example of the imaging method using the end surface imaging device which concerns on this invention, Comprising: It is a top view for demonstrating the method of imaging the orthogonal end surface of the conveyance direction front side of a glass plate. is there. It is a principal part enlarged plan view for demonstrating an example of the imaging method using the end surface imaging device which concerns on this invention, Comprising: It is a top view for demonstrating the method of imaging the orthogonal end surface of the conveyance direction back side of a glass plate. is there.

  Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. In the present embodiment, a case where an image of an end face of a polished glass plate is imaged in the process of manufacturing a display glass substrate will be described as an example.

  FIG. 1: has shown the top view of the defect inspection line 1 incorporating the end surface imaging device of the glass plate which concerns on one Embodiment of this invention. As shown in the figure, the defect inspection line 1 images the orthogonal end faces 4a and 4b in the direction orthogonal to the conveying direction of the glass plate 2 being conveyed in the predetermined direction by the conveying means 3 and the vicinity thereof. Glass plate end face imaging device 5 and determination means 6 for judging the presence or absence of defects existing in orthogonal end faces 4a and 4b of glass plate 2 and the vicinity thereof based on image information obtained by imaging with end face imaging device 5. It has. Hereinafter, details of the end face imaging device 5 according to the present invention will be described.

  The glass plate end surface imaging device 5 is configured to convey the glass plate 2 with the conveying unit 3, the imaging unit 7 that images the orthogonal end surfaces 4 a and 4 b of the glass plate 2 conveyed in the horizontal state and the vicinity thereof, and the imaging unit 7. The moving means 8 that moves in an oblique direction with respect to the direction and the glass plate 2 are conveyed, while the distance between the imaging means 7 and the orthogonal end faces 4a, 4b is kept constant, the imaging means 7 is moved by the moving means 8 to the orthogonal end face 4a. , 4b, and a movement control means 9 that can move along the line 4b. In this embodiment, the imaging means 7 is a first imaging means 7a for imaging the orthogonal end face 4a on the front side in the conveyance direction of the glass plate 2, and a second for imaging the orthogonal end face 4b on the rear side in the conveyance direction. The first imaging unit 7a is moved along the orthogonal end surface 4a on the front side in the transport direction (in other words, from one side to the other side in the width direction of the orthogonal end surface 4a). The second imaging means 7b is configured to be movable along the orthogonal end face 4b on the rear side in the transport direction. Moreover, in this embodiment, the end surface imaging device 5 further includes a dividing space 10 that divides the conveying unit 3 by crossing the conveying unit 3 in an oblique direction with respect to the conveying direction, and the dividing space 10 is divided into each imaging unit 7a, By passing 7b, the imaging means 7a, 7b can be moved along the orthogonal end faces 4a, 4b, respectively.

  As shown in FIG. 3, the optical system of the imaging means 7 (7a, 7b) is disposed so as to be opposed to the light sources 11, 11 such as a halogen lamp and the front and back both sides of the end 2a (2b) of the glass plate 2. 11 and 11, a pair of prisms 12 and 12 for bending and condensing the light reflected on the orthogonal end surface 4a (4b) and the vicinity thereof of the glass plate 2 in a predetermined direction upon receiving irradiation light from the glass plate 2, and from the prisms 12 and 12, respectively. The emitted light is received through the mirror 13, and thereby the camera is configured to image the orthogonal end face 4 a (4 b) and its vicinity. In the illustrated example, a backlight 15 is provided behind the mirror 13. Further, in front of the prisms 12 and 12, in other words, on the rear side in the insertion direction of the glass plate 2, the glass plate 2 with the end 2 a (2 b) inserted between the prisms 12 and 12 is contact-supported from the back side. A support roller 16 is provided for this purpose. Accordingly, the end 2a (2b) of the glass plate 2 can be inserted between the pair of prisms 12 and 12 while maintaining the end 2a (2b) at a predetermined height. In this embodiment, the first and second imaging means 7a and 7b have the same structure as shown in FIGS. 2 and 3, and are installed to the conveying means 3 as shown in FIG. However, in order to perform imaging suitable for each of the orthogonal end faces 4a and 4b, a different structure may be adopted.

  As shown in FIGS. 1 and 2, the moving means 8 is attached to the rail 17 attached to the conveying means 3 side and the imaging means 7 (7 a, 7 b) side. A slider 18 that slides integrally with the image pickup means 7 (7a, 7b) along the longitudinal direction of 17 and, although not shown in the figure, receives a command from the movement control means 9 to drive or stop the slider 18. It is comprised with a drive part.

  Moreover, in this embodiment, the conveyance means 3 is disposed on the side of the levitation support means 19 that levitates and supports the glass plate 2 at atmospheric pressure, and rolls between the glass plate 2. It is comprised with the conveyance roller 20 (small diameter part 20a, large diameter part 20b) which conveys the glass plate 2 by. Specifically, as shown in FIG. 4, the upper surface portion of the levitation support means 19 is formed of a plate-like body (also referred to as a dispersion plate) having a plurality of openings, and the plate-like body is moved upward from below. The glass plate 2 can be levitated and supported by a pressurized gas such as pressurized air that has passed toward the surface. Moreover, the conveyance roller 20 is located in the width direction outer side of the small diameter part 20a, the small diameter part 20a which contacts and supports the width direction both ends (both ends orthogonal to a conveyance direction) of the glass plate 2, and is smaller than the small diameter part 20a. The large-diameter portion 20b has a large diameter. Therefore, the glass plate 2 is supported in contact with the small-diameter portion 20a of the conveying roller 20 in a state where it is levitated and supported at a predetermined height from the upper surface of the levitating support means 19, and rolls with the conveying roller 20 (small-diameter portion 20a) As a result, it is conveyed in a predetermined direction. At this time, the position in the width direction of the glass plate 2 is regulated by the large-diameter portion 20 b of the transport roller 20.

  When the transport means 3 is configured as described above, the levitation support means 19 is provided with a dividing space 10 so as to cross the levitation support means 19 obliquely as shown in FIG. In addition, each of the imaging units 7a and 7b is integrally provided with a moving support unit 21 that floats and supports the glass plate 2 that is passing over the dividing space 10. This moving support means 21 has a support structure equivalent to the above-mentioned levitation support means 19, and passes through the dividing space 10 together with the image pickup means 7a and 7b as attachment destinations as shown in FIGS. The size is as large as possible. Further, in this embodiment, the movement support means 21 is disposed at substantially the same height as the adjacent levitation support means 19. In addition, if it moves in synchronization with the imaging means 7 (7a, 7b) and can float and support the glass plate 2 as described above, the moving support means 21 is provided separately from the imaging means 7 (7a, 7b). It doesn't matter if you do.

  The movement control means 9 is provided in each of the imaging means 7 a and 7 b and is provided in the displacement sensor 22 that detects the relative displacement between the glass plate 2 and the imaging means 7 and the conveying means 3, and is brought into contact with the glass plate 2. Information detected by the displacement sensor 22 and the position sensor 23 is acquired by communicating between the position sensor 23 for detecting the position in the conveyance direction, the displacement sensor 22 and the position sensor 23, and an imaging unit is obtained based on the acquired information. And a control unit 24 for controlling the movement of the imaging means 7 by sending a predetermined command (such as a drive signal or a stop signal) to the drive unit 7.

  Among these, as shown in FIG. 2, the displacement sensor 22 is a horizontal for detecting the horizontal distance (displacement amount) between the orthogonal end face 4a (4b) of the glass plate 2 and the imaging means 7 (7a, 7b). A direction displacement sensor unit 22a, and a vertical direction displacement sensor unit 22b for detecting a vertical distance (displacement amount) between the end 2a (2b) of the glass plate 2 and the imaging means 7 (7a, 7b) are provided. . For example, information detected by the horizontal displacement sensor unit 22a is sent to the control unit 24, and a predetermined command is sent from the control unit 24 to the driving unit of the moving unit 8 based on the sent information. Thus, the movement of the imaging means 7 (7a, 7b) by the moving means 8 in the oblique direction is controlled. Information detected by the vertical direction displacement sensor unit 22b is sent to the control unit 24, and a predetermined command is sent from the control unit 24 to the levitation support means 19 or the movement support means 21 based on the sent information. . Thereby, the height direction position with respect to the imaging means 7 (7a, 7b) of especially the edge part 2a (2b) of the glass plate 2 is controlled.

  Further, among the position sensors 23, the position sensor (first position sensor 23a) on the front side in the transport direction is provided at a predetermined position in the transport direction of the transport means 3, and comes into contact with the glass plate 2 being transported. By detecting that the glass plate 2 has reached a predetermined position in the transport direction, the first imaging unit 7a is set to start moving via the control unit 24. Moreover, about the position sensor (2nd position sensor 23b) of the conveyance direction back side among the position sensors 23, it is provided in the conveyance direction predetermined position of the conveyance means 3, and contacts the glass plate 2 in conveyance, It detects again that the said glass plate 2 reached | attained the conveyance direction predetermined position, and the glass plate 2 passed the 2nd position sensor 23b completely, and it detected again that the contact state with the glass plate 2 was cancelled | released. Thus, the second imaging unit 7b is set to start moving via the control unit 24.

  Hereinafter, an imaging method of the orthogonal end faces 4a and 4b using the end face imaging device 5 having the above-described configuration will be described.

  First, as shown in FIG. 5, the front end 2a of the glass plate 2 being conveyed reaches the first position sensor 23a on the downstream side (left side in FIG. 1) in the conveyance direction, By contacting the first position sensor 23a, the position of the end 2a on the front side in the transport direction of the glass plate 2 is detected. The detected information is sent to the control unit 24 shown in FIG. 1, and a drive command is sent from the control unit 24 to the moving means 8 based on the sent information, so that the first image pickup means 7a has a downstream dividing space. 10 starts to move from one longitudinal side to the other side. At this time, the horizontal distance between the first imaging means 7a and the first orthogonal end surface 4a of the glass plate 2 is kept constant by the horizontal direction displacement sensor section 22a and the control section 24 provided in the first imaging means 7a. The moving speed of the first imaging means 7a is controlled so as to be leaned. Accordingly, the first imaging means 7a is moved along the first orthogonal end face 4a while the first imaging means 7a is relatively disposed so that the first orthogonal end face 4a is always in a position where the image can be taken. Can do. Accordingly, while the glass plate 2 is being conveyed, the first orthogonal end surface 4a and the vicinity thereof can be sequentially imaged across the entire width direction while avoiding the collision between the glass plate 2 and the first imaging means 7a.

  Moreover, about the 2nd orthogonal end surface 4b, as shown in FIG. 1, after the edge part 2a of the conveyance direction front side of the glass plate 2 contacts the 2nd position sensor 23b of the conveyance direction upstream first, a glass plate The glass plate 2 completely passes through the second position sensor 23 while maintaining the contact state with the second position sensor 23, and the contact state between the glass plate 2 and the second position sensor 23 is released (see FIG. 6). See), and the position of the end 2b on the rear side in the transport direction of the glass plate 2 is indirectly detected. The detected information is sent to the control unit 24 shown in FIG. 1, and a drive command is sent from the control unit 24 to the moving means 8 based on the sent information, so that the second imaging means 7b is connected to the upstream dividing space 10. Starts to move from one longitudinal side to the other side. At this time, the horizontal distance between the second image pickup means 7b and the second orthogonal end face 4b of the glass plate 2 is kept constant by the horizontal direction displacement sensor section 22a and the control section 24 provided in the second image pickup means 7b. The moving speed of the second image pickup means 7b is controlled so as to lean. Accordingly, the second imaging means 7b is moved along the second orthogonal end face 4b while the second imaging means 7b is relatively arranged so that the second orthogonal end face 4b is always in a position where the image can be taken. Can do. Therefore, while the glass plate 2 is being conveyed, the second orthogonal end surface 4b and its vicinity can be sequentially imaged across the entire width direction while avoiding a collision between the glass plate 2 and the second imaging means 7b.

  Further, in this embodiment, the support roller 16 is provided in each of the imaging means 7a and 7b. Specifically, the support roller 16 is provided such that the height position of the apex is slightly higher than the back surface of the glass plate 2 in a state of being supported by the floating support means 19. With this configuration, the glass plate 2 passes through the dividing space 10 where it does not receive the levitation force from the levitation support means 19 and reaches the horizontal position where the end 2a (2b) can be imaged. When this is done, the end 2a (2b) is supported in such a manner that it slightly rides on the support roller 16 (see FIG. 3). Thereby, since the imaging location of the edge part 2a (2b) is maintained at a predetermined height position, the camera 14 can be focused.

  Moreover, in this embodiment, the moving support means 21 is provided in the imaging means 7 (7a, 7b), and in the divided space 10, the imaging means 7 main body to the glass plate 2 are moved along with the movement of the imaging means 7 (7a, 7b). It was made to move so that the area | region to the edge part 2a (2b) used as the imaging side might be filled. As a result, the vicinity of the portion that is about to be imaged in the end portion 2a (2b) of the glass plate 2 is levitated and supported by the moving support means 21, and the glass plate 2 partially passes through the dividing space 10. It is possible to prevent a deflection or a large shaking up and down. Accordingly, it is possible to maintain the focus of the camera 14 while keeping the imaging position of the end 2a (2b) at a predetermined height position.

  In addition, in this embodiment, the horizontal direction displacement sensor unit 22a and the vertical direction displacement sensor unit 22b provided in the imaging unit 7 (7a, 7b) are in the horizontal direction with respect to the imaging unit 7 (7a, 7b) of the glass plate 2. The position or the vertical position is detected, and the detected information is fed back to the movement of the imaging means 7 (7a, 7b) and the levitation force of the levitation support means 19 and the movement support means 21 by the control unit 24. Thereby, the relative positional accuracy of the glass plate 2 with respect to the imaging means 7 can be further increased, and high imaging accuracy can be ensured.

  When the value detected by the horizontal direction displacement sensor 22a provided in the first image pickup means 7a described above greatly fluctuates, the moving speed (the conveyance direction component) of the first image pickup means 7a is set to the glass plate 2. It is also possible to set the first imaging means 7a and the glass plate 2 so as to be separated to a distance that does not cause a collision with certainty. Further, when the value detected by the horizontal direction displacement sensor unit 22a provided in the second image pickup means 7b largely fluctuates, the second image pickup means 7b is stopped and the second image pickup means 7a and the glass plate 2 are stopped. It is also possible to set the two so as to be separated to a distance that does not cause a collision.

  Moreover, in this embodiment, as shown in FIG. 1, the side end surface imaging means 25 for imaging the side end surface parallel to the conveyance direction of the glass plate 2 and the vicinity thereof is a predetermined position on the side of the levitation support means 19, In the illustrated example, it is fixedly arranged upstream of the first and second imaging means 7a and 7b. In this case, first, the side end face parallel to the transport direction of the glass plate 2 being transported and the vicinity thereof are imaged by the side end face image pickup means 25 along the longitudinal direction, and then the glass that is subsequently transported in the same direction. The orthogonal end faces 4a and 4b in the direction orthogonal to the conveying direction of the plate 2 are imaged by the first and second imaging means 7a and 7b. The image information obtained by imaging is sent to the determination means 6, and based on the sent image information, the presence / absence of defects present on the orthogonal end faces 4a and 4b of the glass plate 2 and the vicinity thereof is determined. And about the workpiece | work (glass plate 2) determined to have defects, such as a crack and a crack, it is excluded from a manufacturing line, and especially the workpiece | work (glass plate 2) by which the defect was not recognized is sent to the following process. In this way, the defect inspection for all the end faces of the four sides of the glass plate 2 is performed over the entire number.

  As mentioned above, although one Embodiment of this invention was described, naturally the end surface imaging device of the glass plate which concerns on this invention, or its imaging method can take arbitrary forms within the scope of the present invention.

  In the above embodiment, the control of the height direction of the glass plate 2 with respect to the imaging means 7 (7a, 7b) is adjusted by the levitation force of the levitation support means 19 to the movement support means 21, but the movement means 8 is, for example, the imaging means. 7 (7a, 7b) may be a mechanism capable of adjusting the relative height position with respect to the conveying means 3, and the movement control means 9 may control the mechanism.

  Further, if the glass plate 2 is supported by the levitating support means 19, for example, although not shown, a moving means that can move freely in a two-dimensional direction is provided without providing the dividing space 10, and this moving means is provided with this moving means. For example, the image pickup means 7 (7a, 7b) may be controlled so as to be suspended and supported at a position slightly above the levitation support means 19 and moved in an oblique direction with respect to the transport direction. Of course, it is possible to adopt a structure other than that shown in the drawing for the optical system.

  In addition, the end surface imaging device and the imaging method thereof according to the present invention are not limited to imaging the end surface of a polished glass plate in the process of manufacturing a glass substrate for display, and other uses that require end surface observation. It is possible to apply suitably also to this glass plate.

DESCRIPTION OF SYMBOLS 1 Defect inspection line 2 Glass plate 2a, 2b End part (before and behind conveyance direction) 3 Conveyance means 4a, 4b Orthogonal end surface 5 orthogonal to the conveyance direction of a glass plate End surface imaging device 6 Determination means 7 (7a, 7b) Imaging means 8 Movement means 9 Movement control means 10 Dividing space 11 Light source 12 Prism 13 Mirror 14 Camera 15 Backlight 16 Support roller 17 Rail 18 Slider 19 Floating support means 20 Transport roller 21 Movement support means 22 Displacement sensor 22a Horizontal displacement sensor section 22b Vertical direction Displacement sensor unit 23 (23a, 23b) Position sensor 24 Control unit 25 Side end surface imaging means

Claims (6)

Conveying means for conveying the glass plate in a predetermined direction in a horizontal state;
Imaging means for imaging an orthogonal end face in the direction orthogonal to the conveying direction of the glass plate conveyed by the conveying means and the vicinity thereof;
Moving means for moving the imaging means in an oblique direction with respect to the conveying direction of the glass plate;
A movement control means for allowing the imaging means to be moved along the orthogonal end face by the moving means while keeping the distance between the imaging means and the orthogonal end face constant during conveyance of the glass plate ;
The conveying means is disposed below the glass plate, and has a dividing space for dividing the conveying means by crossing in an oblique direction with respect to the conveying direction,
A glass plate that allows the imaging means to move along the orthogonal end face by passing through the dividing space, thereby enabling the imaging means to image the orthogonal end face across both front and back sides . End face imaging device.   Two imaging means are provided, one of the imaging means is movable along the orthogonal end surface located on the front side in the conveyance direction of the glass plate, and the other imaging means is in the conveyance direction of the glass plate. The end surface imaging device of the glass plate of Claim 1 which was movable along the said orthogonal end surface located in the back side. The conveying means is a flotation supporting means for levitating and supporting the glass plate at atmospheric pressure, and a conveyance that conveys the glass plate by rolling between the flotation supporting means and the glass plate. Composed of rollers,
The dividing space is provided in the levitation support means,
The glass plate end face imaging device according to claim 1, further comprising movement support means that moves in synchronization with the imaging means and floats and supports the glass plate passing through the dividing space. Is fixedly disposed on the side of said conveying means further claim 1-3 provided with the side end surface imaging means for imaging the parallel side end surface and the vicinity thereof in the conveying direction of the glass plate is conveyed in a horizontal state The end surface imaging device of the glass plate as described in 2. The glass plate end face image pickup device according to any one of claims 1 to 4 , and determination means for determining presence / absence of a defect existing in the orthogonal end face and the vicinity thereof based on image information obtained by imaging with the image pickup means. Defect inspection line for glass plates equipped with In a method of imaging an orthogonal end face in the direction orthogonal to the conveyance direction of a glass plate conveyed in a horizontal state and its vicinity using an imaging means,
When the glass plate is transported, the image capturing means is moved in an oblique direction with respect to the transport direction of the glass plate while keeping the distance between the image capturing means and the orthogonal end face constant, thereby moving the image capturing means to the orthogonal position. It can move along the end face ,
While providing the conveying means below the glass plate, and providing a dividing space to divide the conveying means by crossing in an oblique direction with respect to the conveying direction,
End surface imaging of a glass plate , wherein the imaging unit moves along the orthogonal end surface by allowing the imaging unit to pass through the dividing space, and the orthogonal end surface can be imaged across both front and back surfaces. Method.

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