JP4307872B2 - Board inspection equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To restrain deflection and vibration of a glass substrate to inspect the substrate accurately. <P>SOLUTION: Both end part sides of the glass substrate 28 floated by air blown out of respective plane floating blocks 31, 32 are suction-fixed onto respective glass driving stages 26, 27, and the glass substrate 28 is quickly moved by driving the glass driving stages 26, 27. <P>COPYRIGHT: (C)2005,JPO&amp;NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate inspection apparatus for inspecting a large glass substrate, a color filter, and the like used in a flat panel display (FPD) such as a liquid crystal display (LCD) or a plasma display panel (PDP).
[0002]
[Prior art]
Glass substrates and color filters used in large displays such as LCDs and PDPs are inspected in the manufacturing process.
[0003]
In this substrate inspection, as an inspection method, an enlarged image of the glass substrate surface is acquired using a microscope, and this enlarged image is observed to detect a defective portion such as a scratch or a stain. Thus, since the magnified image of the glass substrate surface is observed using a microscope, if the glass substrate is slightly bent, the focus position of the microscope deviates from the glass substrate surface. Further, the glass substrate may be vibrated due to external vibration or downflow in the flat panel manufacturing process. When the glass substrate vibrates, the enlarged image acquired by the microscope shakes, and the substrate inspection becomes impossible.
[0004]
The size of the glass substrate manufactured in the flat panel display manufacturing process tends to increase in size in order to meet demands such as an increase in screen size and cost reduction. For example, the size is increased to a size of 1250 × 1100 mm.
[0005]
When the glass substrate is enlarged, the glass substrate is easily bent and easily affected by vibration. Patent Document 1 describes a technique for minimizing the influence of vibration during inspection and observation of a glass substrate. That is, in Patent Document 1, the periphery of the glass substrate is sucked and held by a suction pad, and the glass substrate is pressed from below with a predetermined urging force by a pressing mechanism in the vicinity including the optical axis of the observation system to prevent vibration. . The pressing mechanism supports the periphery of the observation region of the glass substrate with a roller that rolls in synchronization with the conveyance of the glass substrate.
[0006]
Moreover, there exists a technique shown in patent document 2 as a method of conveying a large sized glass substrate. In this patent document 2, both the left and right sides of the lower surface of the glass substrate are supported by a support roller mechanism, and pressure air is blown from the lower surface of the glass substrate so that the intermediate portion of the glass substrate does not bend downward due to its own weight. Floating in the air.
[0007]
[Patent Document 1]
JP-A-11-94755
[0008]
[Patent Document 2]
JP 2000-193604 A
[0009]
[Problems to be solved by the invention]
In Patent Document 1, each roller of a pressing mechanism is directly brought into contact with a glass substrate, and the glass substrate is pressed from below with a predetermined urging force by these rollers. For this reason, when conveying a glass substrate, a slip generate | occur | produces between a glass substrate and a roller, and the back surface of a glass substrate may be damaged. Further, if the roller is soiled, the soil adheres to the glass substrate.
[0010]
Since Patent Document 2 uses a roller to transport the glass substrate, as in Patent Document 1, scratches and dirt may be attached to the rolling surface in contact with the glass substrate and the roller.
[0011]
However, in Patent Documents 1 and 2, since the glass substrate is transported by a roller or a roller, the glass substrate is damaged by the back surface of the glass substrate, or dirt is attached. There is a demand for non-contact transfer technology that has been levitated. In this air levitation conveyance technology, the influence of the vibration of the glass substrate does not become a big problem. However, in a micro inspection device that magnifies the surface of a glass substrate such as a microscope, the air floating of the glass substrate is not stable, it is difficult to obtain the flatness of the glass substrate, and the substrate inspection is impossible due to vibration. Become.
[0012]
Then, an object of this invention is to provide the board | substrate inspection apparatus which can suppress a board | substrate bending and a vibration and can perform an exact board | substrate inspection.
[0013]
[Means for Solving the Problems]
The present invention Glass A levitating block for levitating the substrate, and the levitating block on the levitating block Glass Substrate Hold the side edge in one direction Formed on the floating block so as to intersect the substrate transport section to be transported and the transport direction of the substrate transport section Was Opening and said opening In the longitudinal direction It can be moved along The Microscope objective lens, and For microscope Confronting the objective lens Transmission provided movably along the opening An illumination unit; For microscope Objective lens by Around the observation area Provided with respect to the glass substrate Air Blow out Above Glass It is a board | substrate inspection apparatus provided with the air holding means which hold | maintains a board | substrate horizontally.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.
[0015]
FIG. 1 is an external configuration diagram of a substrate inspection apparatus. A base 2 is provided on the vibration isolation table 1 via each leg 2a with a height adjusting mechanism. A microscope frame 3 is movably provided on the base 2.
[0016]
FIG. 2 is a partial configuration diagram showing the base 2 and the microscope frame 3. The upper surface of the base 2 is formed in a plane. The upper surface of the base 2 is horizontally provided by adjusting the height of each leg 2a with a height adjusting mechanism. The linear guides 4 and 5 are fixed to both ends of the upper surface of the base 2, and the linear guides 6 and 7 are fixed to the center. These linear guides 4 to 7 are provided in parallel to each other in the X direction.
[0017]
A microscope frame 3 is provided on these linear guides 4 to 7 so as to be movable in the X direction. The microscope frame 3 moves on the linear guides 4 to 7 by, for example, a method of rotationally driving wheels or the like, a method using a linear motor, or the like. The microscope frame 3 is formed in a quadrilateral frame shape that is long in the horizontal direction.
[0018]
A microscope unit 10 is provided on the upper frame of the microscope frame 3. The microscope unit 10 includes a rotatable revolver 11, a plurality of objective lenses 12 attached to the revolver 11, and a CCD camera 13 that captures an image of the glass substrate 24 captured via the objective lens 12. Have.
[0019]
A transmission illumination unit 14 is provided on the upper surface of the lower frame in the microscope frame 3. The transmitted illumination unit 14 is provided with the optical axis of the transmitted transmitted illumination light coincident with the optical axis of the objective lens 12. Specifically, the transmission illumination unit 14 includes a lamp house 15 having a light source, a mirror 16 that reflects the transmission illumination light emitted from the lamp house 15, and a condenser lens that collects the transmission illumination light reflected by the mirror 16. 17.
[0020]
As shown in FIG. 1, a glass stage base 20 is fixed on the base 2. FIG. 3 is a partial configuration diagram showing the glass stage base 20. The glass stage base 20 includes a stage upper surface plate 21 and leg plates 22 and 23 provided on both side edges of the stage upper surface plate 21. The glass stage base 20 is fixed on the base 2 through the space 9 of the microscope frame 3 as shown in FIG.
[0021]
A hole 22 a is provided in the leg plate 22 of the glass stage base 20. This hole 22a moves the transmitted illumination unit 14 to the outside of the leg plate 22 when the microscope frame 3 shown in FIG. Thereby, the transmitted illumination unit 14 does not contact the leg plate 22.
[0022]
The straight stage guides 24 and 25 are fixed in the Y direction along both side edges on the glass stage base 20. Glass driving stages 26 and 27 are provided on the stage guides 24 and 25, respectively, so as to be movable in the Y direction. The glass driving stages 26 and 27 move on the stage guides 24 and 25 by, for example, a method of rotationally driving wheels or the like, a method using a linear motor, or the like.
[0023]
The glass driving stages 26 and 27 are each formed in a rectangular plate shape, and are provided on the stage guides 24 and 25 so as to protrude in directions facing each other. Note that the width (retreat area) W in the X direction of one glass drive stage 26 is such that the microscope frame 3 can retreat out of the plane levitation blocks 31 and 32 serving as an air conveyance path described later. It is formed wider than the width in the X direction. The retreat area W is an area in which the microscope frame 3 is retreated when the glass substrate 28 is transferred onto the flat floating blocks 31 and 32.
[0024]
The glass drive stages 26 and 27 move on the stage guides 24 and 25 at the same speed in synchronism with each other. The distance between the glass driving stages 26 and 27 is set to be narrower than the width of the glass substrate 28. The distance between the glass drive stages 26 and 27 can be varied according to the size of the glass substrate 28.
[0025]
A plurality of substrate suction holes 29 and 30 for sucking and holding the glass substrate 28 are provided at predetermined intervals along the opposing side edge portions of the glass drive stages 26 and 27. These substrate suction holes 28 and 29 are connected to an air suction device (not shown). One glass drive stage 26 is provided with a pressing pin 26a, and the other glass drive stage 26 is provided with positioning reference pins 27a and 27b.
[0026]
Two plane floating blocks 31 and 32 are arranged on the upper surface of the glass stage base 20 in the Y direction. These plane floating blocks 31 and 32 are provided on the left side in the drawing, that is, on the glass driving stage 27 side from the center position in the X direction of the glass stage base 20. As a result, the center positions in the X direction of the plane levitation blocks 31 and 32 are provided so as to substantially coincide with the center positions of the intervals between the glass drive stages 26 and 27.
[0027]
Each upper surface of these plane floating blocks 31 and 32 is formed in a plane, and a large number of air circulation holes 33 are provided in these upper surfaces at predetermined intervals, for example in the vertical and horizontal directions. These air circulation holes 33 are connected to an air blowing device or an air suction device (not shown). Accordingly, for example, the air circulation holes 33 for blowing air and the air circulation holes 33 for sucking air are alternately arranged in the air circulation holes 33.
[0028]
The plurality of air circulation holes 33 may all be used for blowing air, or the ratio and arrangement of the air circulation holes 33 for blowing air and the air circulation holes 33 for sucking air can be arbitrarily changed. It is. In any case, the arrangement of the air circulation holes 33 for blowing air and the air circulation holes 33 for sucking air is as long as the glass substrate 28 does not float and vibrate above the plane floating blocks 31 and 32. Any change may be made.
[0029]
The heights of the plane floating blocks 31 and 32 are formed slightly lower than the upper surfaces of the glass driving stages 26 and 27, respectively. This is because the glass substrate 28 that has floated above the plane floating blocks 31 and 32 is attracted and transported onto the glass driving stages 26 and 27.
[0030]
A gap is provided between the plane floating blocks 31 and 32 so that the condenser lens 17 of the transmission illumination unit 14 described above can move. The glass stage base 20 is formed with a long hole for moving the condenser lens 17 of the transmission illumination unit 14 along the gap between the plane floating blocks 31 and 32.
[0031]
The glass substrate 28 is enlarged and observed by the microscope unit 10. In order to stabilize the observation part including the enlarged observation area on the glass substrate 28 without bending and vibrating, the following means are taken.
[0032]
FIG. 4 is a configuration diagram showing each ridge line portion between the plane floating blocks 31 and 32. A plurality of air circulation holes 34 are provided, for example, in a row in each ridge line portion facing each other between the plane floating blocks 31 and 32. The intervals between the air circulation holes 34 are narrower than the intervals between the air circulation holes 33. These air circulation holes 34 are connected to an air blowing device or an air suction device (not shown).
[0033]
Accordingly, for example, the air circulation holes 34 for blowing air and the air circulation holes 34 for sucking air are alternately arranged in the air circulation holes 34. In addition, these air circulation holes 34 can change arbitrarily the ratio and arrangement | positioning of the air circulation hole 34 which blows off air, and the air circulation hole 34 which attracts | sucks air.
[0034]
The plurality of air circulation holes 34 may be provided in a plurality of rows in each ridge line portion as shown in FIG. 5 or in a staggered manner as shown in FIG. Further, the diameter of the air circulation holes 34 for blowing out air may be reduced or the arrangement density may be increased as compared with the air circulation holes 33 formed on the flat floating blocks 31 and 32. Further, as shown in FIG. 7, the plurality of air circulation holes 34 may be provided with a plurality of air circulation holes 34a on the inclined surfaces 31a and 32a formed at the ridges between the plane floating blocks 31 and 32, respectively. Good. In this case, the plurality of air circulation holes 34a follow the movement of the glass substrate 28 so that the front end portion and the rear end portion of the glass substrate 28 conveyed on the plane floating blocks 31 and 32 do not hang down in a gap. It is preferable to blow air from below the glass substrate 28. Each inclined surface 31a, 32a is formed in a bar shape with a semicircular cross section, and is provided rotatably on each ridge line portion of the plane floating blocks 31, 32. In this case, immediately before the front end of the glass substrate 28 passes over the gap, the spray angle of the inclined surface 32a is directed below the conveying surface, and immediately after the rear end of the glass substrate 28 passes over the gap, When the spray angle of the inclined surface 31a is directed downward from the transport surface, the glass substrate 28 can be transported stably without the front end portion and the rear end portion of the glass substrate 28 being blown by air.
[0035]
FIG. 8 is a configuration diagram showing each ridge line portion between the plane floating blocks 31 and 32. The porous bodies 35 and 36 are provided at the ridges between the plane floating blocks 31 and 32, respectively. These porous bodies 35 and 36 are made of a sintered metal (for example, ceramics, resin, carbon, etc.) having a porosity (for example, 40%) necessary for floating the glass substrate 28. This porosity can be changed according to the required floating rigidity. The inclined surfaces 35a, 36a are formed on the ridge lines of the porous bodies 35, 36 facing each other. These porous bodies 35 and 36 are each connected to an air blower (not shown).
[0036]
Therefore, each porous body 35, 36 blows off air in an oblique and lateral direction from above as shown in FIG. Thereby, even if the edge part of the glass substrate 28 moves upward between each plane floating block 31 and 32, since air is injected in diagonally horizontal direction from each inclined surface 35a, 36a, the edge of the glass substrate 28 The part can maintain a high flatness without being bent by receiving air blowing from below.
[0037]
FIG. 10 is a peripheral configuration diagram of the objective lens 12 and the transmission illumination unit 14. The mirror 16 is provided in the mirror box 16b. The mirror box 16b is provided with a lens barrel 17a provided with a condenser lens 17. A cylinder 37 for supplying air is provided on the same axis as the lens barrel 17a on the outer peripheral side of the lens barrel 17a. A plurality of air circulation holes 38 are provided in the thick portion of the cylindrical body 37. These air circulation holes 38 are connected to an air blowing device or an air suction device (not shown).
[0038]
Accordingly, for example, the air circulation holes 38 for blowing air and the air circulation holes 38 for sucking air are alternately arranged in the air circulation holes 38. Note that these air circulation holes 38 may all blow out air and absorb air from the gap between the lens barrel 17a and the cylindrical body 37, or vice versa. Further, the ratio and arrangement of the air circulation holes 38 for blowing air and the air circulation holes 38 for sucking air can be arbitrarily changed.
[0039]
In addition, the formation method of each air circulation hole 38 on the cylindrical body 37 can be modified as follows. Each air circulation hole 38 changes the injection direction of the hole in the thick part of the cylindrical body 37, for example, as shown in FIG. 11, the air blown toward the outside and the inside and the air blown toward the inside. Good.
[0040]
FIG. 12 is a configuration diagram in which a plurality of air circulation holes 40 are formed also in the thick portion of the lens barrel 17a. Thereby, it becomes a double structure of each outer air circulation hole 38 and each inner air circulation hole 40. For example, the air circulation holes 38 for blowing air and the air circulation holes 38 for sucking air are alternately arranged in each of the outer air circulation holes 38. Similarly, for example, the air circulation holes 40 for blowing air and the air circulation holes 40 for sucking air are alternately arranged in the inner air circulation holes 40. Further, each of the outer air circulation holes 38 may be used to blow out air, and each of the inner air circulation holes 40 may be used only for air suction, or vice versa. Further, the air circulation hole 38 and the air circulation hole 40 may be only air blowing, and only the suction from the gap between the lens barrel 17a and the cylindrical body 37 may be used, or vice versa.
[0041]
FIG. 13 is a configuration diagram in which air supply tubes 41 and 42 having different outer diameters are provided on the outer peripheral side of the lens barrel 17a. These air supply cylinders 41 and 42 are provided coaxially with the lens barrel 17a. For example, air is jetted between the lens barrel 17a and the air supply cylinder 41. For example, air is sucked between the air supply tubes 41 and 42. These air blowing and air suction may be reversed.
[0042]
Each of the air circulation holes 33, 34, 38, 40 is connected to an air blowing device or an air suction device. These air blowing devices or air suction devices can control the air blowing pressure and the air suction force, respectively. Therefore, the pressure of the air blown out from each air circulation hole 33, 34, 38, 40, and the air suction force can be adjusted from constant to individual. Thereby, the height position of the glass substrate 28, particularly the height position of the observation part on the glass substrate 28 by the microscope unit 10 is controlled so as to always coincide with the focus point of the microscope unit 10.
[0043]
Next, the operation of the apparatus configured as described above will be described.
[0044]
When inspecting the glass substrate 28, the microscope frame 3 moves in the X direction (on the right side in FIG. 1) and retreats to the retreat area W.
[0045]
In this state, for example, an uninspected glass substrate 28 is carried into the plane floating block 31 from the carry-in entrance A. At this time, each glass drive stage 26, 27 has moved to the carry-in entrance A side as shown in FIG.
[0046]
Each plane floating block 31, 32 blows air from a predetermined air circulation hole 33 among the plurality of air circulation holes 33 by driving the air blowing device, and air by driving the air suction device from the other air circulation holes 33. Aspirate.
[0047]
Thereby, the glass substrate 28 floats from the upper surface of the plane floating block 31 by blowing and sucking air from each air circulation hole 33. In addition, although air may be blown out from all the air circulation holes 33, the stability of the planar state of the glass substrate 28 is increased by sucking air from some of the air circulation holes 33.
[0048]
Next, the pressing pin 26 a on one glass driving stage 26 presses the end portion of the glass substrate 28 toward the positioning reference pins 27 a and 27 b on the other glass driving stage 27. Thereby, since the glass substrate 28 is floating, it moves to the positioning reference pins 27a and 27b side with a slight pressing force and is positioned at the reference position.
[0049]
Next, the substrate suction holes 29 and 30 of the glass driving stages 26 and 27 suck air by driving the air suction device. As a result, both ends of the glass substrate 28 are sucked and fixed on the glass driving stages 26 and 27.
[0050]
Next, the glass driving stages 26 and 27 move on the stage guides 24 and 25 in synchronism with each other at the same speed while maintaining a positional relationship facing each other. Thereby, the glass substrate 28 is pulled by the glass driving stages 26 and 27 and moved in the Y direction in a state where the glass substrate 28 is levitated above the flat levitating block 31.
[0051]
At this time, since both ends of the glass substrate 28 are sucked and fixed by the plurality of substrate suction holes 29 and 30 on the respective glass drive stages 26 and 27, the glass substrate 28 swings left and right and up and down, for example, in the moving direction. It is transported stably without any problems.
[0052]
Moreover, since each glass drive stage 26 and 27 moves the glass substrate 28 which floats, the drive force of the movement of the glass substrate 28 may be slight. Therefore, the glass substrate 28 can move at high speed.
[0053]
If the air blown from the air circulation hole 33 is ionized, static electricity is neutralized by the subsequent high-speed conveyance of the glass substrate 28. As a result, charging to the glass substrate 28 is prevented.
[0054]
In this way, the glass substrate 28 reaches the observation part including the enlarged observation region by the microscope unit 10 between the plane floating blocks 31 and 32 as shown in FIG.
[0055]
The planar state of the glass substrate 28 in the observation unit is maintained at high stability by, for example, the following means.
[0056]
As shown in FIG. 4, a plurality of air circulation holes 34 provided at each ridge line portion between each plane floating block 31, 32 are, for example, alternately arranged air circulation holes 34 and air suction air circulation holes. 34, air is blown out and air suction is performed. Since a plurality of these air circulation holes 34 are provided in the observation part, the planar state of the glass substrate 28 in the observation part is kept highly stable.
[0057]
Similarly, as shown in FIG. 5, air blowing and air suction may be performed by a plurality of air circulation holes 34 provided in each of the ridge line portions, for example, two rows. Further, as shown in FIG. 6, air may be blown out and air suction may be performed by a plurality of air circulation holes 34 provided in a staggered manner. Further, as shown in FIG. 7, air may be blown out and air suction may be performed by a plurality of air circulation holes 34 provided in the inclined surfaces 31 a and 32 a of the flat floating blocks 31 and 32.
[0058]
As shown in FIG. 9, each porous body 35, 36 shown in FIG. 8 ejects air in an oblique and lateral direction from above. Thereby, the observation part in the glass substrate 28 receives the blowing of air from each porous body 35 and 36, and maintains high flatness, without bending. In particular, when the end portion of the glass substrate 28 moves upward between the plane floating blocks 31 and 32, the end portion of the glass substrate 28 receives air blown from the porous bodies 35 and 36 without being bent. Keep high flatness.
[0059]
As shown in FIG. 10, the plurality of air circulation holes 38 of the cylindrical body 37 on the side of the transmissive illumination unit 14 are, for example, air blown by air flow holes 38 for air blows and air flow holes 38 for air suction arranged alternately. , Perform air suction. These air blowing and suction are performed on the back surface of the glass substrate 28 facing the objective lens 12. Therefore, the flatness of the magnified observation area on the glass substrate 28 by the objective lens 12 is kept locally high.
[0060]
Note that air blowing may be performed from the transmitted illumination unit 14 side toward the outer side and the inner side as shown in FIG.
[0061]
Also, as shown in FIG. 12, for example, each of the outer air circulation holes 38 blows out air and sucks air by, for example, alternately arranged air circulation holes 38 and air blowing holes 38. At the same time, the air flow holes 40 on the inner side may be blown out and sucked by air flow holes 40 and air suction holes 40 arranged alternately, for example.
[0062]
Further, as shown in FIG. 13, for example, air may be blown out from between the lens barrel 17a and the air supply cylinder 41, and air may be sucked from between the air supply cylinders 41 and.
[0063]
When the glass substrate 28 reaches the observation part of the microscope unit 10, the glass substrate 28 is inspected. Each glass drive stage 26, 27 moves in the Y direction while maintaining a positional relationship facing each other, for example, and stops according to the coordinate data of a defective portion such as a scratch or dirt detected by an auto macro inspection apparatus, for example. Similarly, the microscope frame 3 moves in the X direction according to the coordinate data of the defect portion such as a scratch or dirt detected by the auto macro inspection apparatus, and stops. Thereby, the optical axis passing through the objective lens 12 and the transmission illumination unit 14 is arranged on the defect portion.
[0064]
The CCD camera 13 images the defect portion enlarged by the microscope unit 10 and outputs the image signal. An image processing device (not shown) processes an image signal from the CCD camera 13 and displays the image data on a display or stores it in an image memory.
[0065]
In the inspection of the glass substrate 28, the glass substrate 28 in the observation part does not bend, is not affected by external vibrations, and can maintain a high stability in a state where it always floats at the same height position. Thereby, the microscope unit 10 can maintain the focus point on the surface of the glass substrate 28. Therefore, since the CCD 13 can always capture an image in focus, the inspection accuracy of the glass substrate 28 can be improved by observing this image.
[0066]
As another inspection method for the glass substrate 28, the glass driving stages 26 and 27 are moved stepwise in the Y direction every predetermined time, for example, while maintaining a positional relationship facing each other. The distance of this step movement corresponds to the length in the Y direction in the enlarged observation region of the microscope unit 10.
[0067]
During the stop period of each glass drive stage 26 and 27 for each step movement, the microscope frame 3 moves in the X direction. During this movement, the CCD camera 13 images the defect portion enlarged by the microscope unit 10 and outputs the image signal.
[0068]
The image processing apparatus processes an image signal from the CCD camera 13 and displays the image data on a display or stores it in an image memory.
[0069]
Therefore, the CCD camera 13 images the entire surface of the glass substrate 28 by repeating the step movement of the glass drive stages 26 and 27 and the movement of the microscope frame 3. As a result, the image processing apparatus acquires image data of the entire surface of the glass substrate 28. Therefore, the glass substrate 28 can be inspected by observing an image acquired in real time during imaging by the CCD camera 13 or observing an image of the entire surface of the glass substrate 28.
[0070]
As described above, in the first embodiment, a plurality of substrates on the glass driving stages 26 and 27 are arranged on both sides of the glass substrate 28 that is levitated by the air blown out from the plane floating blocks 31 and 32. The glass substrate 28 is fastened by suction by the suction holes 30 and driven by the glass drive stages 26 and 27.
[0071]
Therefore, both side edges of the glass substrate 28 are suction-fixed on the glass driving stages 26 and 27, so that the glass substrate 28 does not bend and is externally deformed even when the glass substrate 28 is a large size. It is not affected by the vibration of the flat panel, does not vibrate due to the down flow in the flat panel manufacturing process, and does not fluctuate in the horizontal direction and the vertical direction during the movement, for example, in the moving direction.
[0072]
As a result, by placing both ends of the glass substrate 28 on the glass driving stages 26 and 27, the glass substrate 28 is not scratched or soiled. Since the glass substrate 28 can be moved at high speed, the inspection can be speeded up and the tact time can be shortened.
[0073]
In the observation unit of the microscope unit 10, that is, between the plane floating blocks 31 and 32, air is blown out and air is sucked through the plurality of air circulation holes 34 provided in the ridge lines of the plane floating blocks 31 and 32.
[0074]
In addition, as a means to hold | maintain the planar state of the part corresponding to the observation part of the glass substrate 28 with high stability, the structure shown in FIG. 4 thru | or FIG. 13 can be taken. As a result, the glass substrate 28 in the observation unit is not bent by the blowing and suction of air, is not affected by external vibrations, and can maintain a high stability in a state where it always floats at the same height position. Thereby, the microscope unit 10 can maintain the focus point on the surface of the glass substrate 28. Therefore, the inspection accuracy of the glass substrate 28 can be improved by always observing the focused image.
[0075]
Further, since the microscope unit 10 and the transmission illumination unit 14 are moved between the respective plane floating blocks 31 and 32, the transmission illumination light can be applied to the back surface of the glass substrate 28 without being obstructed by the light shielding object.
[0076]
Next, a second embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.
[0077]
FIG. 16 is an external configuration diagram of the substrate inspection apparatus. A support 50 is provided on the leg plate 22 of the glass stage base 20. An eyepiece tube unit 51 is provided above the support column 50. An oscillating extension optical unit 52 is provided between the eyepiece tube unit 51 and the optical axis of the observation optical system.
[0078]
The oscillating extension optical unit 52 transmits the image from the objective lens 12 to the eyepiece tube unit 51. This oscillating extension optical unit 52 has two optical arms 53 and 54 each housing a relay optical system. The optical arm 53 is rotatably connected at each connection point between the eyepiece tube unit 51 and the optical arm 54. The optical arm 54 is rotatably connected at each connection point between the optical arm 54 and the CCD camera 13.
[0079]
Therefore, when the microscope frame 3 is moved in the X direction, the swinging extension optical unit 52 rotates the two optical arms 53 and 54 at the respective connection points, so that the eyepiece tube unit 51 and the optical axis of the observation optical system are rotated. Keep the optical coupling between. As a result, the image obtained through the objective lens 12 is transmitted to the eyepiece tube unit 51 by the relay optical system in the oscillating extension optical unit 52. As a result, an enlarged image of the glass substrate 28 can be observed from the eyepiece tube unit 51.
[0080]
In addition, this invention is not limited to the said 1st and 2nd embodiment, In the implementation stage, it can change variously in the range which does not deviate from the summary.
[0081]
Furthermore, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent requirements. For example, even if some constituent elements are deleted from all the constituent elements shown in the embodiment, the problem described in the column of the problem to be solved by the invention can be solved, and is described in the column of the effect of the invention. If the effect is obtained, a configuration from which this configuration requirement is deleted can be extracted as an invention.
[0082]
For example, as a means for maintaining the planar state of the observation part of the glass substrate 28 with high stability, an air blowing part or both an air blowing part and a suction part are provided on the objective lens 12 side. You may make it hold | maintain the surface and back surface of 28 observation parts with air. The air blowing section and the suction section may be formed by arranging a plurality of tubes.
[0083]
【The invention's effect】
As described above in detail, according to the present invention, it is possible to provide a substrate inspection apparatus capable of performing accurate substrate inspection while suppressing bending and vibration of a glass substrate.
[Brief description of the drawings]
FIG. 1 is an external configuration diagram showing a first embodiment of a substrate inspection apparatus according to the present invention.
FIG. 2 is a partial configuration diagram showing a base and a microscope arm in the first embodiment of the substrate inspection apparatus according to the present invention.
FIG. 3 is a partial configuration diagram showing a glass stage base in the first embodiment of the substrate inspection apparatus according to the present invention.
FIG. 4 is a configuration diagram showing each ridge line portion of each plane floating block in the first embodiment of the substrate inspection apparatus according to the present invention.
FIG. 5 is a configuration diagram showing a modification of each ridge line portion of each plane floating block in the first embodiment of the substrate inspection apparatus according to the present invention.
FIG. 6 is a configuration diagram showing a modification of each ridge line portion of each plane floating block in the first embodiment of the substrate inspection apparatus according to the present invention.
FIG. 7 is a configuration diagram showing a modification of each ridge line portion of each plane floating block in the first embodiment of the substrate inspection apparatus according to the present invention.
FIG. 8 is a configuration diagram showing a modification of each ridge line portion of each plane floating block in the first embodiment of the substrate inspection apparatus according to the present invention.
FIG. 9 is a view showing an air blowing action from each ridge line portion of each plane floating block in the first embodiment of the board inspection apparatus according to the present invention.
FIG. 10 is a peripheral configuration diagram of an objective lens and a transmission illumination unit in the first embodiment of the substrate inspection apparatus according to the present invention.
FIG. 11 is a view showing a modification of the air ejection direction in the first embodiment of the substrate inspection apparatus according to the present invention.
FIG. 12 is a configuration diagram in which a floating hole is provided in the lens barrel in the first embodiment of the substrate inspection apparatus according to the present invention.
FIG. 13 is a configuration diagram in which air supply tubes are provided on the outer peripheral side of the lens barrel in the first embodiment of the substrate inspection apparatus according to the present invention.
FIG. 14 is a view showing air conveyance of the glass substrate in the first embodiment of the substrate inspection apparatus according to the present invention.
FIG. 15 is a diagram showing air conveyance in the observation unit in the first embodiment of the substrate inspection apparatus according to the present invention.
FIG. 16 is an external configuration diagram showing a second embodiment of a substrate inspection apparatus according to the present invention.
[Explanation of symbols]
1: vibration isolator, 2: base, 2a: legs, 3: microscope frame, 4-7: linear guide, 9: space, 10: microscope unit, 11: revolver, 12: objective lens, 13: CCD camera, 14: Transmitting illumination unit, 15: Lamp house, 16: Mirror, 17: Condenser lens, 17a: Lens tube, 20: Glass stage base, 21: Stage top plate, 22, 23: Leg plate, 22a: Hole, 24 , 25: stage guide, 26, 27: glass driving stage, 26a: pressing pin, 28: glass substrate, 29, 30: substrate suction hole, 27a, 27b: positioning reference pin, 31, 32: plane floating block, 33, 34, 38, 40: floating hole, 31a, 32a: inclined surface, 35, 36: porous body, 37: cylindrical body, 39: inclined surface, 41, 42: air supply tube, 50: Column, 51: eyepiece barrel unit, 52: swing type extension optical unit 53: optical arm.

Claims (15)

A levitating block for levitating the glass substrate;
A substrate transport unit that holds the side edge of the glass substrate that floated on the floating block and transports the glass substrate in one direction ;
An opening formed in the floating block so as to intersect the transport direction of the substrate transport unit;
A microscope objective lens movably provided along the longitudinal direction of the opening;
A transmission illumination unit provided so as to be movable along the opening in opposition to the microscope objective lens;
Air holding means provided around the observation area by the microscope objective lens , and blowing air to the glass substrate to hold the glass substrate horizontally;
A substrate inspection apparatus comprising: The substrate inspection apparatus according to claim 1, wherein the air holding unit blows air toward a back surface of the glass substrate. The substrate inspection apparatus according to claim 1, wherein the air holding unit blows air to the back surface of the glass substrate and sucks the air. 4. The substrate inspection apparatus according to claim 2, wherein the air holding unit blows air toward the surface of the glass substrate and sandwiches the surface and the back surface of the glass substrate with air. 4. The substrate inspection apparatus according to claim 2, wherein the air holding means blows air to the surface of the glass substrate and sucks the air so as to sandwich the surface and the back surface of the glass substrate with air. . The air holding means includes a lens barrel having a condenser lens that emits the transmitted illumination light of the transmitted illumination section toward the objective lens, and an air flow hole is provided in the lens barrel. Item 4. The substrate inspection apparatus according to items 1 to 3. The air holding means includes a lens barrel provided with a condenser lens that emits the transmitted illumination light of the transmitted illumination section toward the objective lens, and a cylindrical body provided on the outer peripheral side of the lens barrel via a gap. 4. The substrate inspection apparatus according to claim 1, wherein a plurality of air circulation holes are provided in a circular shape in at least one of the lens barrel or the cylindrical body. The air holding means includes a lens barrel provided with a condenser lens that emits the transmitted illumination light of the transmitted illumination section toward the objective lens, and a cylindrical body provided on the outer peripheral side of the lens barrel via a gap. 4. The substrate inspection apparatus according to claim 1, wherein an air flow hole is provided in the lens barrel, and an air flow passage is formed in a gap between the lens barrel and the cylindrical body. The air holding means includes a lens barrel provided with a condenser lens that emits the transmitted illumination light of the transmitted illumination section toward the objective lens, and a plurality of air supply tubes arranged concentrically on the outer peripheral side of the lens barrel. 4. The substrate inspection apparatus according to claim 1, wherein an air supply path is formed by each of the air supply cylinders. 6. The substrate inspection apparatus according to claim 1, wherein the air holding unit blows air from the periphery of the observation area centered on the optical axes on the microscope objective lens side and the transmission illumination unit side. 6. The substrate inspection apparatus according to claim 1, wherein the air holding means is provided with air circulation holes along opposite sides in the longitudinal direction of the opening. The substrate inspection apparatus according to claim 1, wherein the opening is formed in a gap in which a condenser lens of the transmission illumination unit facing the microscope objective lens is movable. The said board | substrate conveyance part is formed in the length substantially the same as the length of the side edge part of the said glass substrate, The some adsorption | suction part which adsorbs and holds the said side edge part is arrange | positioned. Board inspection equipment. The substrate inspection apparatus according to claim 1, wherein the floating block includes a plurality of air circulation holes for blowing air on a surface on which the glass substrate is placed. 2. The substrate according to claim 1, wherein the floating block has air circulation holes for blowing air and air circulation holes for sucking air alternately arranged at a predetermined ratio on a surface on which the glass substrate is placed. Inspection device.

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