JP2015218055A - Transportation rail and float transportation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To highly accurately stabilize a flotation amount of an object to be transported on a virtual high accuracy floating line.SOLUTION: A floating transportation device 1 comprises a transportation rail 2, which transports an object to be transported in a transportation direction X in a non-contact manner. The transportation rail 2 includes a transportation surface 20 which is provided with multiple hole arrays 21 arranged in the transportation direction X. In the hole array 21, gas supply holes 22 ejecting gas, and vacuum holes 23 sucking gas are arranged alternately at a predetermined interval in a direction perpendicular to the transportation direction X. A virtual high accuracy floating line L is configured to be in a direction perpendicular to the transportation direction X; positioned above a space between neighboring predetermined hole arrays 21a and 21b of the hole arrays 21 aligned in the transportation direction X. In addition, at least, the gas supply holes 22 and the vacuum holes 23 respectively constituting the hole arrays 21a and 21b, are arranged line-symmetrically with respect to the virtual high accuracy floating line L.

Description

  The present invention relates to a levitating conveyance technique for levitating a conveyance object and conveying it in a non-contact manner.

  In a production line or the like, a levitation conveyance device that levitates an object to be conveyed from a conveyance surface of a conveyance rail and conveys the object without contact is known. For example, in Patent Document 1, as a transfer device used for optical inspection of a glass substrate used in a flat display panel such as a liquid crystal display panel, a plasma display panel, or an organic EL panel, a transfer rail (floating stage) that floats the glass substrate is used. And a floating mechanism that conveys a glass substrate that has floated on a rail for conveyance. The transport rail of the levitation transport apparatus has staggered, that is, a direction perpendicular to the transport direction and the transport direction, that is, air supply holes (spout holes) for ejecting gas and vacuum holes (suction holes) for sucking gas. In each, they are alternately arranged at regular intervals. In this way, the air supply holes and the vacuum holes are evenly arranged, and the ejection height of the object to be conveyed from the conveyance surface of the conveyance rail can be increased by simultaneously ejecting and sucking gas from the conveyance surface of the conveyance rail. Can be kept constant.

JP 2010-281651 A

  In a predetermined line set along the direction perpendicular to the conveyance direction of the object to be conveyed, such as the optical inspection position of the optical inspection apparatus and the resist coating position of the resist coating apparatus, the conveyance object There is a case where high accuracy is required for the flying height from the conveyance rail (hereinafter, such a line is referred to as a virtual high-accuracy flying line). However, with the conventional transfer rail in which the air supply holes and the vacuum holes are uniformly arranged in a staggered manner, it is difficult to stabilize the floating amount of the transfer object in the virtual high-precision floating line with high accuracy.

  That is, when a virtual high-precision levitation line is set on air supply holes and vacuum holes (hereinafter referred to as a hole array) alternately arranged at regular intervals in a direction perpendicular to the conveyance direction of the conveyance object, When the object passes through the virtual high precision levitation line, it is affected by the compressed gas ejected from the air supply holes of the hole array located directly below the virtual high precision levitation line and the gas sucked into the vacuum holes of this hole array, The flying height of the transport object from the transport rail cannot be maintained and stabilized with high accuracy.

  In addition, when a virtual high-accuracy levitation line is set between adjacent hole arrays, the arrangement order of the air supply holes and the vacuum holes of each adjacent hole array across the virtual high-accuracy levitation line is different. The gas flow received immediately before the object enters the virtual high precision levitation line is different from the gas flow received immediately after the object to be transported from the virtual high precision levitation line. Thereby, similarly to the case where the virtual high-accuracy levitation line is set on the hole array, the levitation amount of the conveyance object from the conveyance rail cannot be maintained and stabilized with high accuracy.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide a conveyance rail and a levitation conveyance apparatus that can maintain and stabilize the flying height of a conveyance object in a virtual high-precision levitation line with high accuracy. There is to do.

  In order to solve the above-described problem, in the present invention, a virtual high-precision levitation line is set above a predetermined adjacent hole array and the hole array, and at least a hole array adjacent to each other with the virtual high-precision levitation line interposed therebetween The arrangement order of the air supply holes and the vacuum holes was set so that the air supply holes and the vacuum holes face each other across the virtual high-accuracy levitation line.

For example, the transport rail of the present invention is a transport rail that floats a transport object using gas and transports it in the transport direction in a non-contact manner.
A plurality of hole arrays in which the air supply holes for ejecting the gas and the vacuum holes for sucking the gas are alternately arranged at regular intervals along the direction perpendicular to the transport direction are provided as a transport surface arranged in the transport direction. Prepared,
Among the hole arrays in which a plurality of virtual high precision levitation lines set along a direction perpendicular to the transport direction are arranged in the transport direction, a predetermined hole array adjacent to the transport direction and the hole array And at least an air supply hole constituting one of the adjacent predetermined hole arrays is opposed to an air supply hole constituting the other across the virtual high-accuracy levitation line, and the adjacent predetermined A vacuum hole constituting one of the hole arrays is disposed at a position facing the vacuum hole constituting the other across the virtual high-precision levitation line.

  Here, the air supply holes and the vacuum holes that constitute each of the adjacent predetermined hole arrays may be arranged at positions that are line-symmetric with respect to the virtual high-precision levitation line. A plurality of hole arrays disposed upstream of the virtual high-accuracy levitation line in the transport direction; and a plurality of hole arrays disposed downstream of the virtual high-accuracy levitation line in the transport direction. The air supply holes and the vacuum holes constituting each hole array may be alternately arranged at regular intervals in the transport direction.

Further, for example, the levitation conveyance device of the present invention is a levitation conveyance device that levitates an object to be conveyed using gas and conveys the object in a conveyance direction in a non-contact manner,
The transport rail;
An air supply pump for supplying compressed gas ejected from the air supply holes of the transfer surface of the transfer rail;
A suction pump for sucking gas into the vacuum hole of the transfer surface of the transfer rail.

  In the present invention, since the virtual high precision levitation line is located above between the adjacent hole array, when the transport object passes through the virtual high precision levitation line, this virtual high precision levitation line There is no hole array below, so that it is not affected by the compressed gas ejected from the air supply holes and the gas sucked into the vacuum holes. Further, the arrangement order of the air supply holes and the vacuum holes constituting each of the adjacent hole arrays with at least the virtual high precision levitation line interposed therebetween is the order in which the air supply holes and the vacuum holes face each other with the virtual high precision levitation line interposed therebetween. Therefore, the gas flow received immediately before entering the virtual high precision levitation line is the same as the gas flow received immediately after leaving the virtual high precision levitation line. For this reason, since the fluctuation | variation of the gas flow in a virtual high precision levitation line can be made small, the floating amount of the conveyance target object in a virtual high precision levitation line can be maintained with high precision, and can be stabilized.

FIG. 1 is a schematic configuration diagram of a levitation transport apparatus 1 according to an embodiment of the present invention. FIG. 2 is an enlarged view of a portion A of the levitation transport apparatus 1 shown in FIG. FIG. 3A is a diagram for explaining a state when the conveyance object 7 passes through the point B in the virtual high precision levitation line L, and FIG. 3B is a diagram in which the conveyance object 7 is virtual. It is a figure for demonstrating the state at the time of passing the C point in the high precision levitation line L. FIG. FIG. 4A shows a state in which the conveyance object 7 passes through a point D in the line M set on the hole array 21 other than the adjacent hole arrays 21a and 21b with the virtual high-precision levitation line L interposed therebetween. 4B is a diagram for explaining the relationship between the hole array 21 and the hole array 21 other than the hole arrays 21a and 21b adjacent to each other with the transport object 7 sandwiching the virtual high-precision levitation line L. It is a figure for demonstrating the state at the time of passing the E point in the line N set on the upper side. FIG. 5 is a diagram illustrating a measurement result of the floating amount of the conveyance object 7 from the conveyance surface 20 of the conveyance rail 2 in the levitation conveyance apparatus 1 according to the embodiment of the present invention.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic configuration diagram of a levitation transport apparatus 1 according to the present embodiment. FIG. 2 is an enlarged view of part A of the levitation transport apparatus 1 shown in FIG.

  As shown in the figure, the levitation transport device 1 according to the present embodiment is configured to transport a transport object 7 (see FIG. 3) such as a glass substrate used in a flat display panel such as a liquid crystal display panel, a plasma display panel, or an organic EL panel. Supply rail 2 having a transfer surface 20 for non-contact transfer, an air supply pump 3, and an air supply for connecting the air supply pump 3 to an air supply pump connection port (not shown) of the transfer rail 2. Hose 4, suction pump 5, and suction hose 6 for connecting suction pump 5 to a suction pump connection port (not shown) of conveyance rail 2.

  On the transport surface 20 of the transport rail 2, a hole array 21 arranged at a constant interval P <b> 1 in the transport direction X of the transport object 7 is formed. In each hole array 21, air supply holes 22 for ejecting compressed gas and vacuum holes 23 for sucking the gas are alternately arranged at a constant interval P2 (for example, P2 = P1) along a direction Y perpendicular to the conveyance direction X. Configured. For simplification of the drawing, only some of the air supply holes 22 and the vacuum holes 23 are denoted by reference numerals.

  Among the plurality of hole arrays 21 arranged in the transport direction X, a virtual high-precision levitation line L is formed above a predetermined adjacent hole array 21a, 21b along a direction Y perpendicular to the transport direction X. Is set. The virtual high-accuracy levitation line L is a line indicating a position where high accuracy is required for the flying height of the conveyance object 7 from the conveyance rail 2, such as an optical inspection position of an optical inspection apparatus, a resist coating position of a resist coating apparatus, and the like. Is applicable.

  The adjacent hole arrays 21a and 21b sandwiching the virtual high-accuracy levitation line L with respect to the transport direction X are the air supply holes 22 and the vacuum holes 23 constituting the hole arrays 21a and 21b, respectively. Are arranged so as to be line symmetrical. Further, the air supply holes 22 and the vacuum holes 23 constituting the plurality of hole arrays 21 arranged on the upstream side 24a in the transport direction X with respect to the virtual high-precision levitation line L are alternately arranged at a constant interval P1 in the transport direction X. Has been. Similarly, the air supply holes 22 and the vacuum holes 23 constituting the plurality of hole arrays 21 arranged on the downstream side 24b in the transport direction X with respect to the virtual high precision levitation line L are also alternately arranged at a constant interval P1 in the transport direction X. Has been placed.

  Inside the transport rail 2, an air supply passage (not shown) that connects the supply pump connection port to the supply hole 22 of each hole array 21, and a suction pump connection port is connected to the vacuum hole 23 of each hole array 21. A vacuum air passage (not shown) is formed.

  FIG. 3A is a diagram for explaining a state when the conveyance object 7 passes through a point B (see FIG. 2) in the virtual high precision levitation line L, and FIG. It is a figure for demonstrating the state at the time of the target object 7 passing C point (refer FIG. 2) in the virtual high precision levitation line L shown in FIG. 4A shows a point D in the line M set on the hole array 21 other than the hole arrays 21a and 21b adjacent to the conveyance object 7 with the virtual high-precision levitation line L interposed therebetween (see FIG. 2). 4B is a diagram for explaining the state when passing through, and FIG. 4B is an adjacent hole array other than the adjacent hole arrays 21a and 21b with the transport target 7 sandwiching the virtual high-precision levitation line L therebetween. It is a figure for demonstrating the state at the time of passing through the E point (refer FIG. 2) in the line N set up between 21 and the hole array 21. FIG.

  As shown in FIG. 4 (A), when the conveyance object 7 notifies the line M set on the hole array 21 other than the hole arrays 21a and 21b, the hole array 21 positioned immediately below the virtual high-precision levitation line. Under the influence of the compressed gas ejected from the air supply holes 22 and the gas sucked into the vacuum holes 23 of the hole array 21, the flying height of the conveyance object 7 on the line M from the conveyance rail 2 is maintained with high accuracy. Can not be stabilized.

  Further, as shown in FIG. 4B, when the transport object 7 passes through the line N set between the adjacent hole array 21 and the hole array 21 other than the hole arrays 21a and 21b, Since the arrangement order of the air supply holes 22 and the vacuum holes 23 of each of the adjacent hole arrays 21 across the line N is different from each other, the flow of the gas received immediately before the transfer object 7 enters the line N and the transfer object 7 are The gas flow received immediately after separation from N is different. Specifically, the flow of compressed gas in which one of the gas flow received immediately before the conveyance object 7 enters the line N and the gas flow received immediately after the conveyance object 7 leaves the line N is ejected from the air supply hole 22. The other becomes a gas flow sucked into the vacuum hole 23. For this reason, the flying height of the transfer object 7 on the line N from the transfer rail 2 cannot be maintained with high accuracy and stabilized.

  However, in the levitation transport apparatus 1 according to the present embodiment, the virtual high-accuracy levitation line L is set between the adjacent hole array 21a and the hole array 21b, so FIG. 3 (A) and FIG. As shown in (B), when the conveyance object 7 passes through the virtual high precision levitation line L, the air supply hole 22 and the vacuum hole 23 do not exist immediately below the virtual high precision levitation line L, and therefore the air supply hole. It is not affected by the compressed gas ejected from the gas and the gas sucked into the vacuum hole.

  Further, the air supply holes 22 and the vacuum holes 23 constituting the hole arrays 21a and 21b adjacent to each other with the virtual high-accuracy levitation line L interposed therebetween are arranged so as to be symmetrical with respect to the virtual high-accuracy levitation line L. Therefore, the gas flow that the transport object 7 receives immediately before entering the virtual high precision levitation line L is the same as the gas flow that the transport object 7 receives immediately after leaving the virtual high precision levitation line L. Specifically, as shown in FIG. 3 (A), both are compressed gas flows ejected from the air supply holes 22, or both are sucked into the vacuum holes 23 as shown in FIG. 3 (B). Gas flow. For this reason, since the fluctuation | variation of the gas flow in the virtual high precision levitation line L can be made small, the floating amount of the conveyance target object 7 in the virtual high precision levitation line L can be maintained and stabilized with high precision.

  FIG. 5 is a diagram illustrating a measurement result of the floating amount of the conveyance target 7 from the conveyance surface 20 of the conveyance rail 2 in the levitation conveyance apparatus 1 according to the present embodiment.

  Here, the solid line graph 80 is a graph showing the measurement result at the point B in the virtual high precision levitation line L shown in FIG. 2, and the dotted line graph 81 is the measurement result at the point D of the line M shown in FIG. A one-dot chain line graph 82 is a graph showing a measurement result at point E in the line N shown in FIG.

  Further, the vertical axis indicates the flying height (μm) of the transport object 7 from the transport surface 20, and the horizontal axis indicates each measurement point in the transport direction X of the front end portion of the transport object 7 (the graph 80 indicates B point, graph 81 shows the moving distance (mm) from point D, and graph 82 shows point E). Note that a glass substrate having a length of 200 mm was used for the conveyance object 7.

  As shown in the graph 81, when the transport object 7 passes through the line M set on the hole array 21 other than the hole arrays 21 a and 21 b, when the tip of the transport object 7 enters the line M (area) F) and at the time of separation from the line M of the rear end portion of the conveyance target portion 7 (region G), the flying height greatly fluctuates. Further, as shown in the graph 82, the transport object 7 also passes when the transport object 7 passes through the line N set between the adjacent hole array 21 and the hole array 21 other than the hole arrays 21a and 21b. The flying height greatly fluctuates when the leading end portion 7 enters the line N (region F) and when the trailing end portion of the conveyance target portion 7 leaves the line N (region G).

  On the other hand, as shown in the graph 80, when the transport object 7 passes through the virtual high precision levitation line L, the tip of the transport object 7 enters the virtual high precision levitation line L (area F) and the transport target. When the transport object 7 passes through the line M (graph 81) when the rear end of the section 7 leaves the virtual high-precision levitation line L (region G), the transport object 7 is a line. It is proved that it is smaller than the case of passing through N (graph 82), and it is possible to maintain and stabilize the flying height of the conveyance object 7 in the virtual high-precision floating line L with high accuracy.

  In addition, this invention is not limited to said embodiment, Many deformation | transformation are possible within the range of the summary.

  For example, in the above-described embodiment, each of the air supply holes 22 and the vacuum holes 23 constituting the hole arrays 21a and 21b adjacent to each other with the virtual high-precision levitation line L sandwiched in the transport direction X is replaced with the virtual high-precision levitation line. They are arranged at positions that are line-symmetric with respect to L. However, the present invention is not limited to this. The air supply holes 22 and the vacuum holes 23 constituting the hole arrays 21a and 21b may be arranged at least at positions where the air supply holes 22 and the vacuum holes 23 face each other with the virtual high-precision levitation line L interposed therebetween. Even in this case, the same effect as the above-described embodiment can be expected.

  In the levitation transport apparatus 1 according to the above-described embodiment, a plurality of transport rails may be arranged in the transport direction X of the transport object 7. In this case, the above-described transfer rail 2 is used only for the transfer rail for which the virtual high-accuracy levitation line L is set, and the conventional transfer rail, that is, the supply rail is used for the transfer rail to which the virtual high-accuracy levitation line L is not set. A transport rail in which air holes and vacuum holes are alternately arranged at regular intervals in the transport direction X and the direction Y perpendicular to the transport direction may be used.

  In the above-described embodiment, the case where the object to be transported 7 such as a glass substrate used in a flat display panel such as a liquid crystal display panel or a plasma display panel is taken as an example of transport is described as an example. The present invention can be widely applied to a levitation conveyance apparatus that levitates and conveys an easy sheet-like conveyance object.

DESCRIPTION OF SYMBOLS 1: Levitation conveyance apparatus, 2: Rail for conveyance, 3: Air supply pump, 4: Hose for air supply, 5: Suction pump, 6: Hose for suction, 7: Object to be conveyed, 20: Conveyance surface, 21, 21a 21b: hole array, 22: air supply hole, 23: vacuum hole

Claims (4)

A transportation rail that floats an object to be transported using gas and transports the object in the transport direction in a non-contact manner,
A plurality of hole arrays in which the air supply holes for ejecting the gas and the vacuum holes for sucking the gas are alternately arranged at regular intervals along the direction perpendicular to the transport direction are provided as a transport surface arranged in the transport direction. Prepared,
Among the hole arrays in which a plurality of virtual high precision levitation lines set along a direction perpendicular to the transport direction are arranged in the transport direction, a predetermined hole array adjacent to the transport direction and the hole array And at least an air supply hole constituting one of the adjacent predetermined hole arrays is opposed to an air supply hole constituting the other across the virtual high-accuracy levitation line, and the adjacent predetermined A conveying rail, wherein a vacuum hole constituting one of the hole arrays is disposed at a position facing a vacuum hole constituting the other across the virtual high-precision levitation line. The conveyance rail according to claim 1,
An air supply hole and a vacuum hole constituting each of the adjacent predetermined hole arrays are arranged at positions that are line-symmetric with respect to the virtual high-precision levitation line. It is a rail for conveyance according to claim 1 or 2,
A plurality of hole arrays arranged on the upstream side in the transport direction with respect to the virtual high-precision levitation line, and a plurality of hole arrays arranged on the downstream side in the transport direction with respect to the virtual high-precision levitation line, Each of the air supply holes and the vacuum holes constituting each hole array is alternately arranged at regular intervals in the transport direction. A levitation transport device that levitates an object to be transported using gas and transports the object in a non-contact manner in the transport direction,
The conveyance rail according to any one of claims 1 to 3,
An air supply pump for supplying compressed gas ejected from the air supply holes of the transfer surface of the transfer rail;
And a suction pump for sucking gas into the vacuum hole of the transport surface of the transport rail.

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