JP2006242679A - Substrate inspection device and assembling method of same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily assemble a substrate inspection device while securing positional accuracy in assembly when the base of the device is given a dividable structure. <P>SOLUTION: The base 3 for inspection of this substrate inspection device comprises first and second base parts 15 and 16. The second base part 16 includes two abutment parts 46 and 47, and includes fixation members 56 and 57 so as to put the abutment parts 46 and 47 between them, and fixation members 52 and 53 so as to be put between the abutment parts 46 and 47. The first base part 15 includes abutment parts and bolt holes, respectively, at positions corresponding thereto. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a substrate inspection apparatus for inspecting a substrate and a method for assembling the substrate inspection apparatus.

As a substrate inspection device for large substrates for flat panel displays (FPDs) manufactured on the photolithographic process line, the substrate is transported in the transport axis direction while the substrate is air levitated on the floating stage. And what is observed with the microscope provided above the floating stage is known. In this type of substrate inspection apparatus, a substrate transport mechanism that holds the end of a floating substrate on a strong inspection base and forcibly transports it in the transport direction, a levitation stage, and a microscope orthogonal to the transport direction A portal frame that is movably provided in a moving direction is placed. The inspection base is made of stone, casting, etc., and has an integrated structure.
By the way, in recent years, since the substrate for FPD (mother glass) has increased in size to exceed 2 m, the substrate inspection apparatus has been increased in size accordingly. When the board width is 2 m, the width of the inspection base will be about 3 m if a space for attaching a portal frame provided across the board is added. Substrates for FPDs tend to be further enlarged, and 2.5 m and 3 m substrates have appeared, and inspection bases corresponding to such large substrates tend to be further enlarged. Such a large casting or can frame inspecting base makes it difficult to perform machining or heat treatment, and a stone inspection base makes it difficult to obtain stone materials. In addition, when the substrate inspection apparatus is enlarged, a large special truck or a special carrying-in apparatus for carrying a large board inspection apparatus into the truck or the FPD manufacturing factory must be used. The point becomes prominent when the substrate inspection apparatus is further enlarged in the future, and there is a possibility that the substrate inspection apparatus cannot be transported.

In order to solve such a problem, it is assumed that the inspection base of the substrate inspection apparatus can be divided. Here, in a general machine tool, there is a machine tool mounted on each of two beds divided into left and right, and a loader rail laid on a separate portal frame (for example, , See Patent Document 1). In this machine tool, the portal frame is connected to the left and right beds with a frame support jig during transport, and the frame support jig is separated from the portal frame after machine installation, and the left and right beds are separated from the portal frame. By making it independent, transportation is facilitated.
JP 2002-370130 A

However, since the substrate inspection apparatus is required to detect minute defects and accurately specify the position coordinates of such defects, on the same inspection base, a substrate transport mechanism, a floating stage, It is required to mount an inspection part (a portal frame with a microscope) and to incorporate the positional relationship between these parts with high accuracy. In such a substrate inspection apparatus, it has been impossible to divide the inspection base as in Patent Document 2 or use the conveyance mechanism and the inspection unit independently from the inspection base.
Also, when the base is divided, the inspection base must be easily assembled, and the positional accuracy of each part must be ensured during the assembly.
The present invention has been made in order to solve a problem that is particularly problematic in such a substrate inspection apparatus, and the object of the present invention is to assemble when the base of the substrate inspection apparatus is structured to be separable. Sometimes it is easy to assemble while ensuring positional accuracy.

  The present invention that solves the above-described problems is a levitation stage that levitates the substrate by blowing a gas onto the back surface of the substrate, a conveyance unit that conveys the substrate on the levitation stage, and a substrate that is conveyed along the levitation stage. In the substrate inspection apparatus in which the imaging unit for observing the substrate is supported and fixed to a base, the base holds the transport unit and extends along the transport direction of the substrate, and a first base A substrate inspection apparatus comprising a second base portion that can be positioned and fixed in a horizontal direction and a vertical direction with respect to the portion and that holds the floating stage.

  In this substrate inspection apparatus, the base can be divided into at least two parts, a first base part and a second base part, a transport part is fixed to the first base part, and the second base part has The levitation stage is fixed. That is, since the transfer unit and the floating stage are each fixed to the base portion having an integral structure, positioning of the transfer unit and the floating stage and the base portion is easily performed regardless of the divided structure. Even if the transport unit and the levitation stage are positioned for each base unit, if the relative positioning is not performed, the substrate cannot be accurately transported. However, the second base unit is the first base unit. Since the positioning is fixed in the horizontal direction and the vertical direction, the position of the levitation stage and the transport unit is adjusted by fixing both base portions.

Further, the present invention observes the floating stage that blows gas onto the back surface of the substrate to float the substrate, the transport unit that transports the substrate on the floating stage, and the substrate that is transported along the floating stage. A substrate inspection apparatus in which an imaging unit is supported and fixed to a base, wherein the second base unit is fixed by positioning the base in a horizontal direction and a vertical direction with respect to the first base unit. After the formation, the transport unit is fixed to the first base unit, the levitation stage is fixed to the second base unit, and the imaging unit is extended over the first base unit and the second base unit. The assembly method for the substrate inspection apparatus is characterized by fixing.
In this method of assembling the substrate inspection apparatus, a floating stage or the like is fixed after assembling a base divided into two base portions. When the substrate inspection apparatus is transported, it is only necessary to transport each of the divided base parts, so that the transportation becomes easier as compared with the conventional integrated base part. At this time, since both the base portions are positioned and fixed in the horizontal direction and the vertical direction, the levitation stage or the like can be fixed at a relatively correct position.

  According to the present invention, since the base is divided, the components of the substrate inspection apparatus can be reduced in size compared with the case where the base is integrated. Therefore, it is possible to reduce the size of the manufacturing apparatus, the space necessary for transportation, and the transportation equipment, and improve workability during production, transportation, and assembly. Furthermore, since the base portion is divided into a first base portion for fixing the transport portion and a second base portion for supporting the levitation stage, and each base portion has an integrated structure, positional accuracy between the transport portion and the first base portion. In addition, the positional accuracy between the levitation stage and the second base portion is easily ensured. Furthermore, by fixing the base portions while aligning them, the relative position between the levitation stage and the transport portion can be easily adjusted. Therefore, even when the base is divided, the positional accuracy can be ensured. .

The best mode for carrying out the invention will be described in detail with reference to the drawings.
FIG. 1 shows a schematic configuration of the substrate inspection apparatus according to the first embodiment.
The substrate inspection apparatus 1 has an inspection base 3 mounted on a vibration isolation device 2 installed on a floor surface, and an FPD glass substrate (hereinafter referred to as a glass substrate) is provided on the inspection base 3. Is mounted on one side of the levitation stage 4 so as to convey the substrate along the longitudinal direction (conveyance direction C) of the levitation stage 4 while adsorbing and holding the substrate. The suction conveyance unit 5 and the guide rail 6 are installed. Further, an inspection unit 7 is installed on the upper part of the inspection base unit 3 so as to be orthogonal to the longitudinal direction of the levitation stage 4. The inspection unit 7 includes a portal frame 8 and the portal frame 8. The microscope 9 is movable along the guide rail 63 laid on the beam 64a. Further, a transmission illumination device (light source) 10 is provided below the microscope 9 with the levitation stage 4 interposed therebetween, and the transmission illumination device 10 is laid in parallel with the movement locus of the objective lens of the microscope 9. The illumination unit 12 is configured together with the illumination base 11 having the rail 11a, and the illumination unit 12 moves on the guide rail 11a in synchronization with the microscope 9.

The inspection base 3 includes a prism-shaped first base portion 15 having a rectangular cross section and a rectangular frame-shaped second base portion 16 in plan view.
The first base portion 15 has a length substantially equal to the longitudinal direction of the levitation stage 4 from the base end portion 15a to the tip end portion 15b, and a leg portion 17a to which the vibration isolation device 2 is fixed on the lower surface thereof. To 17d. As shown in FIG. 2, four leg portions 17 a to 17 d are provided so as to protrude in the longitudinal direction of the first base portion 15. Further, in the longitudinal direction of the outer surface 18 of the first base portion 15, the protruding portions 19 a and 19 b serving as a reference for the contact surface with the columns 64 b and 64 b of the portal frame 8 are outside in the width direction of the first base portion 15. Two are provided so as to bulge out. Two of these projecting portions 19a and 19b are provided at positions corresponding to the two central leg portions 17b and 17c, and one end portion of the portal frame 8 shown in FIG. 1 is fixed to one projecting portion 19a. The Further, as shown in FIG. 3, two contact portions 21 and 22 serving as a reference for the contact surface with the second base portion 16 are provided on the inner surface 20 facing the second base portion 16 in the first base portion 15. Are provided at positions corresponding to the two projecting portions 19a and 19b closer to the center.

Of the two contact portions 21 and 22, the contact portion 21 on the base end portion 15a side is fixed to the inner surface 20 by welding or the like, and is fixed to the flat surface 24 of the plate 23 with bolts 25. 2 It consists of the cylindrical pin 26 which is a protrusion for fitting used as the reference | standard of an attachment position with the base part 16. As shown in FIG. The flat surface 24 of the plate 23 and the tip end surface 27 of the pin 26 are arranged in parallel to the inner surface 20, and the diameter of the pin 26 is smaller than one side of the flat surface 24 of the plate 23. Furthermore, six bolt holes 28 are arranged at equal intervals on the proximal end portion 15a side with respect to the contact portion 21. These bolt holes 28 are provided in a row along the height direction from the lower end of the inner surface 20 to the height corresponding to the upper end of the contact portion 21. Further, two bolt holes 29 are arranged at a predetermined interval closer to the center of the first base portion 15 than the contact portion 21. These bolt holes 29 are provided in a line along the horizontal direction from the lower end of the inner side surface 20 to the height corresponding to the lower end of the contact portion 21.
Further, the contact portion 22 on the distal end portion 15 b side of the first base portion 15 has the same configuration as the contact portion 21. Furthermore, six bolt holes 30 are arranged at positions symmetrical to the bolt holes 28 with respect to the center in the longitudinal direction of the inner side surface 20. Similarly, two bolt holes 31 are arranged at positions symmetrical to the two bolt holes 29 with respect to the longitudinal center of the inner surface 20.

  As shown in FIGS. 2 and 3, the second base portion 16 includes a first side portion 40 fixed to the first base portion 15, a second side portion 41 parallel to the first side portion 40, and both side portions. A pair of girders 42 and 43 that connect the end portions of 40 and 41 and a connecting portion 44 that connects the centers in the length direction of the girders 42 and 43 are integrally provided. On the side surface 45 facing the first base portion 15 in the first side portion 40, two contact portions 46 and 47 serving as a reference for the mounting position of the first base portion 15 are contact portions on the first base portion 15 side. It is attached by welding or the like at positions corresponding to 21 and 22, respectively. The abutting portion 46 corresponds to the abutting portion 21, and the flat surface 49 facing the first base portion 15 in the plate 48 is parallel to the side surface 45 of the first side portion 40, and the size thereof is the abutting portion. It is approximately equal to the size of 21 plates 23. A circular fitting hole 50 is formed at the center of the plate 48, and the diameter of the fitting hole 50 is substantially equal to the diameter of the pin 26 of the abutting portion 21, and the length of the fitting hole 50 is as follows. Is approximately equal to the length of 26. The contact portion 47 has the same configuration as the contact portion 46.

Furthermore, as shown in FIG.2 and FIG.4, the 1st side part 40 is notched from the lower side leaving the corner part of each girder part 42 and 43 and the center part of a longitudinal direction. Fixing members 52 and 53 are attached to the notched portions 51 with bolts 54, respectively. A part of the fixing members 52 and 53 protrudes from the side surface 45 of the first side portion 40 by a predetermined length. The predetermined length is substantially equal to the thickness dimension of the contact portions 21 and 22 and the contact portions 46 and 47 combined. Each of the fixing members 52 and 53 is provided with two through holes 55 extending in parallel through the fixing members 52 and 53 in parallel. Each through hole 55 is provided at a position corresponding to each bolt hole 29, 31 of the first base portion 15, and a bolt (not shown) is inserted into each of the through holes 55.
A fixing member 56 that is a fastening portion is attached to the girder portion 42, and a fixing member 57 that is a fastening portion is attached to the girder portion 43 with bolts 58 so as to sandwich the two contact portions 46 and 47. Yes. The fixing members 56 and 57 protrude from the side surface 45 of the first side portion 40 by the same length as the fixing members 52 and 53. Further, six through holes 59 that horizontally penetrate the fixing members 56 and 57 are provided at positions corresponding to the bolt holes 28 and 30 of the first base portion 15, respectively.

  As shown in FIGS. 2 and 3, in the second base portion 16, the vibration isolation device 2 (see FIG. 1) is provided on the bottom surface of each corner portion of the second side portion 41 and each girder portion 42, 43. ) Is fixed. These leg portions 60 are provided at positions corresponding to the leg portions 17b and 17c on the first base portion 15 side. When the inspection base 3 is formed, the leg portions 17a to 17d and 60 are parallel to each other. Placed in. In addition, protrusions 62 a to 62 d that serve as a reference for the contact surface with the columns 64 b and 64 b of the portal frame 8 protrude from the upper surface and the side surface of the corner portion on the second side portion 41 side. Furthermore, on the upper surface of the second base portion 16, convex portions 61 a to 61 g for positioning the levitation stage 4 shown in FIG. 1 and the illumination base 11 of the transmission illumination device 10 are formed.

Here, the other structure of the board | substrate inspection apparatus 1 shown in FIG. 1 is demonstrated.
In the inspection unit 7, two rails 63 are laid horizontally on a beam 64 a constituting the portal frame 8, and the microscope 9 is slidably attached to these rails 63. The support column 64b constituting the portal frame 8 is formed by cutting out a part of the lower end portion thereof, and the support column 64b is formed by projecting portions 19a and 19b of the first base portion 15 and the second base portion 16 respectively. A reference position is obtained by abutting against the protrusions 62a and 62b.
The levitation stage 4 has a large number of air blowing holes regularly arranged on the upper surface thereof. A gap 65 is formed along the width direction at a portion of the levitation stage 4 corresponding to the position immediately below the microscope 9. A roller 66 is rotatably attached to the edge of the gap 65 so as to protrude from the upper surface of the floating stage 4 by the same dimension as the flying height of the board so that the board does not get caught in the gap 65. is there. A gap is provided between the rollers 66 facing the upstream side and the downstream side so that the transmitted illumination by the illumination unit 12 can pass through.
The transmitted illumination device 10 is configured such that the optical axis coincides with the objective lens of the microscope 9 through the gap 65 of the floating stage 4.
Further, the guide rail 6 constituting the transport unit is laid on the upper surface of the first base unit 15 in parallel with the length direction, and the suction transport unit 5 sucks one side of the substrate that has floated on the levitation stage 4. It is held and reciprocated along the guide rail 6 by a linear motor. The suction conveyance unit 5 preferably includes a substrate positioning mechanism and a suction mechanism for sucking the substrate.

Next, the operation of this embodiment will be described.
First, assembly work of the substrate inspection apparatus 1 will be described. The substrate inspection apparatus 1 includes a first base unit 15, a second base unit 16, a floating stage 4, a suction conveyance unit 5 and a guide rail 6 that are conveyance units, an inspection unit 7, and an illumination unit 12. Each unit is manufactured as an independent unit. This is because the substrate inspection apparatus 1 is installed and transported to the substrate manufacturing factory to be used from the apparatus manufacturing factory of the substrate inspection apparatus 1 so that it is easier to transport. Therefore, the board inspection apparatus 1 is assembled in the board manufacturing factory.

  When assembling, the inspection base 3 is first assembled. Since the first base portion 15 and the second base portion 16 are machined and painted in advance, both may be fixed as they are. That is, the pins 26 of the contact portions 21 and 22 of the first base portion 15 are fitted into the fitting holes 50 of the corresponding contact portions 46 and 47 of the second base portion 16, so that the contact portions 21 and 22 and The contact portions 46 and 47 are engaged. At this time, the two sets of plates 23 and 48 come into contact with each other, so that the second base portion 16 is parallel to the first base portion 15, and the vertical direction is obtained by fitting the pin 26 and the fitting hole 50. And alignment in the transport direction (longitudinal direction of the first base portion 15) is performed. At this time, since the positions of the through holes 55 of the fixing members 52 and 53 and the positions of the bolt holes 29 and 31 coincide with each other, a bolt is screwed in from the fixing members 52 and 53 side, and both the base portions 15 and 16 are fastened. To do. Similarly, since the positions of the through holes 59 of the fixing members 56 and 57 and the positions of the bolt holes 28 and 30 coincide with each other, a bolt is screwed in from the fixing members 56 and 57 side, and both the base portions 15 and 16 are fastened. To do. Thereby, both base parts 15 and 17 are positioned and fixed, and the assembly of the inspection base 3 is completed.

  Next, after fixing the illuminating unit 12 to the upper surface of the second base portion 16, the levitation stage 4 is attached to positioning convex portions 61 d to 61 f formed on the upper surface of the second base portion 16. Further, the guide rail 6 is fixed to the upper surface of the first base portion 15, and the suction conveyance unit 5 is slidably attached to the guide rail 6. Further, a portal frame is provided between the protrusion 19 on the base end 15 a side of the outer surface 18 of the first base portion 15 and the protrusion 62 a on the base end side of the second side 41 of the second base portion 16. As shown in FIG. 8, the inspection unit 7 is engaged so that the position is adjusted, and the position is adjusted and then fixed. Thereby, the assembly of the substrate inspection apparatus 1 is completed. The parts 4, 5, 6, 7, and 12 are fixed using bolts. Moreover, the test | inspection part 7 can also be fixed between the protrusion parts 19 and 62 which are not used in FIG.

  When the substrate inspection is performed by the substrate inspection apparatus 1, the substrate is carried into the base end portion 4 a on the carry-in side of the levitation stage 4 while air is blown out from the levitation stage 4. After the substrate is positioned, the substrate is sucked and held by the suction transport unit 5. Further, the suction conveyance unit 5 is moved toward the tip portion 15 b side of the first base portion 15, and the substrate is moved on the floating stage 4. When the substrate reaches the lower side of the inspection unit 7, the microscope 9 and the transmission illumination device 10 slide in synchronization to inspect the substrate surface for defects. When the inspection of the substrate surface is completed, the suction of the suction conveyance unit 5 is released on the tip portion 4a side of the levitation stage 4, and the substrate is carried out.

According to this embodiment, the floating stage 4, the inspection unit 7, and the like are placed, and the inspection base 3 that serves as a reference for the mutual positional relationship between the two base units 15 and 16 can be divided and assembled. Even if it is a board | substrate inspection apparatus corresponding to a large sized board, if each part is isolate | separated, it can be easily transported. Furthermore, since the base portions 15 and 16 at the time of division are smaller than the inspection base 3, processing at the time of manufacture is facilitated, so that a large manufacturing apparatus is not required and processing accuracy can be improved. it can.
Further, in assembling the inspection base 3, the two plates 23 and 48 serving as reference positions for assembly are brought into surface contact with each other and the cylindrical pins 26 are fitted. Positioning in the parallelism (verticality), horizontality, and vertical direction with the second base portion 16 is facilitated. Therefore, the reproducibility of the assembly is good and the mechanical accuracy is easily obtained. Since the pin 26 and the fitting hole 50 serve as positioning marks for the base portions 15 and 16, assembly work is facilitated.

  The inspection base 3 includes a first base portion 15 where a suction conveyance unit 5 for conveying a substrate is installed and a second base portion 16 where a portal frame 8 of the inspection portion 7 is installed as a separate body. As a result of the connection, the distortion caused by welding is reduced as compared with the conventional case joined by welding. Abutting surfaces for joining the members, for example, the plates 24 and 48 constituting the abutting surfaces of the base portions 15 and 16 and the projecting portions 19a, 19b and 62a constituting the abutting surfaces of the columns 64b of the portal frame 8 are provided. ˜62d is projected from the surface of each base portion 15 and 16, and the joining surfaces of the plates 24 and 48 and the projecting portions 19a to 19d and 62a to 62d are processed with high surface accuracy, thereby reducing high-precision surface processing. The processing man-hours can be reduced.

Further, by providing bolt holes 28, 29, 30, 31 around the pin 26 that serves as a positioning reference for assembly, the fitting hole 50 of the second base portion 16 is fitted to the pin 26 of the first base portion 15. Assembling can be easily performed only by combining them, and the bolt holes 28, 29, 30, 31 can be screwed with the through holes 55, 59 of the fixing members 52, 53 being aligned with each other, Both base portions 15 and 16 can be firmly fixed.
In this manner, the positional accuracy of the microscope 9 can be increased by providing the inspection frame 3 with the projecting portions 19a, 19b, 62a to 62d that serve as a reference for mounting on the portal frame 8 that requires high assembly accuracy. Can be improved.

  If further mechanical accuracy is required, machining may be performed after the assembly operation, or the assembly accuracy may be increased by inserting a shim or the like into the attachment portion 64 of the inspection unit 7 and adjusting the assembly. good.

Next, a second embodiment of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same component as 1st Embodiment. In addition, overlapping description is omitted.
As shown in FIGS. 5 and 6, the inspection base 70 includes a first base portion 71 and a second base portion 72.
The first base portion 71 extends from the base end portion 71 a toward the distal end portion 71 b, and the inner surface 20 facing the second base portion 72 in the first base portion 71 is a reference for the contact surface of the second base portion 72. Two contact portions 73 and 74 made of the plate 23 are provided between the leg portions 17 near the center. The plate 23 has a flat surface 24 parallel to the inner surface 20. An abutting member 75 serving as a reference for the attachment position with the second base portion 72 is attached to the base end portion 71a side of the abutting portion 73 perpendicularly to the inner side surface 20 by welding or the like. The abutting member 75 is a plate material extending in the vertical direction, and a plurality of through-holes 76 penetrating from the surface toward the base end portion 71a to the surface toward the distal end portion 71b are formed at equal intervals. Further, below the contact portion 73, an abutting member 77 serving as a reference for the attachment position with the second base portion 72 is attached to the leg portion 17 by welding or the like so as to protrude horizontally from the inner side surface 20. Yes. The abutting member 77 has a width substantially equal to the length of the leg portion 17, and a plurality of through holes 78 penetrating from the upper surface to the lower surface are formed at equal intervals. Furthermore, both the abutting members 75 and 77 are in contact with each other, and the contact portions are welded.
In addition, a plurality of bolt holes 30 are provided on the distal end portion 71 b side with respect to the contact portion 74. Below the contact portion 73, an abutting member 79 is attached to the leg portion 17 by welding or the like. The abutting member 79 has the same configuration as the abutting member 77, and a plurality of through holes 80 are formed.

As shown in FIG. 7, the second base portion 72 is positioned on the side surface 45 of the first side portion 40, and the two contact portions 81 and 82 correspond to the contact portions 73 and 74 of the first base portion 71. Each contact portion 81, 82 has a plate 48, and the plate 48 has a plane 49 parallel to the first side portion 40. As shown in FIG. 8, a plurality of bolt holes 83 are disposed on the side of the spar portion 42 a of the corner portion 72 a on the base end side so as to fit the through hole 76 of the abutting member 75. Further, as shown in FIG. 6, a plurality of bolt holes 84 are also arranged on the lower surface of the same corner 72 a so as to fit the through hole 78 of the abutting member 77.
Further, a plurality of bolt holes 85 are disposed on the lower surface of the corner 72 b on the front end side so as to fit the through hole 80 of the abutting member 79. A fixing member 57 is fixed by a bolt 58 on the side of the same corner 72 b of the beam 43.

A procedure for assembling such an inspection base 70 will be described.
First, the flat surface 24 of the contact portions 73 and 74 is brought into contact with the flat surface 49 of the contact portions 81 and 82 corresponding thereto. In this state, the abutting member 75 on the base end portion 71a side is abutted against the girder portion 42, and the position of the through hole 76 and the position of the bolt hole 83 coincide with each other. Conclude. Thereby, both base parts 71 and 72 become parallel. Further, since the abutting member 77 is abutted against the lower surface of the second base portion 72, both are fastened with bolts 87 (see FIG. 6). On the other hand, since the abutting member 79 is abutted against the lower surface of the second base portion 72 on the distal end portion 71b side, both are fastened with bolts 88 (see FIG. 6). The second base portion 72 is positioned at the reference position of the first base portion 71 by these abutting members 75, 77, and 79. Further, since the position of the through hole 59 of the fixing member 57 and the position of the bolt hole 30 of the first base portion 15 coincide with each other, both of them are fastened with a bolt 89 (see FIG. 6). Accordingly, the first base portion 15 and the second base portion 16 are positioned and fixed in the horizontal direction (vertical method) and the height direction.
As in the first embodiment, the floating stage 4 and the like are fixed to the inspection base 70 assembled in this way, and the substrate inspection apparatus is assembled. The operation and effect of this substrate inspection apparatus are the same as described above.

  In this embodiment, the second base portion 16 is abutted against the first base portion 15, the abutting portions 73 and 73, the abutting portions 81 and 82, and the abutting members 75, 77, and 79 that are abutting portions, By positioning with the second base portion 72 and fixing with the bolts 86, 87, 88, 89, the inspection base 70 can be assembled with high accuracy, and the reproducibility is also improved. Since both the base portions 71 and 72 do not use fitting as in the first embodiment, even when the first base portion 71 has a slight warp, the base portions 71 and 72 are reliably combined. It becomes possible. Here, since movement in a minute range is allowed by the play between the bolts 86, 87, 88, 89 and the through holes 59, 76, 78, 80, positioning is ensured even if there is a minute warp. Can be combined. Other effects are the same as those of the first embodiment.

The present invention is not limited to the above embodiments and can be widely applied.
For example, the contact parts 21, 22, 46, 47, 73, 74, 81, 82, the fixing members 52, 53, 56, 57, and the abutting members 75, 77, 79 are the first base parts 15, 71, The two base portions 16 and 72 may be integrally manufactured. Further, the abutting portions 21, 22, 46, 47, 73, 74, 81, 82 may be provided only on one of the first base portions 15, 71 and the second base portions 16, 72.
The second base portions 16 and 72 may be substantially T-shaped or substantially L-shaped in plan view. In these cases, the abutting portions 46, 47, 81, 82 are provided on the surfaces that are assembled in parallel to the first base portions 15, 71, and the fixing members 52, 53, 56, 57, bolts corresponding to these are provided. Holes 83, 84, 85 are provided.
Further, the substrate inspection apparatus may include two first base portions 15 and 71, and the suction conveyance unit 5 may be disposed in each of the first base portions 15 and 71. In this case, the contact portions 46, 47, 81, 82 are also provided on the second side portions 41 of the second base portions 16, 72, and the fixing members 52, 53, 56, 57, bolts corresponding to these are provided. Holes 83, 84, and 85 are provided, and the first base portions 15 and 71 are assembled to the first side portion 40 and the second side portion 41 of the second base portions 16 and 72, respectively. In such a substrate inspection apparatus, since the substrate is sucked and held at two locations so as to sandwich the floating stage 4, the substrate can be positioned and transported with higher accuracy.
A conveyance base (not shown) may be fixed on the first base portions 15 and 71, and the guide rail 6 may be fixed to the conveyance base.

It is a perspective view of the board | substrate inspection apparatus in embodiment of this invention. It is a perspective view which shows the 1st base part and 2nd base part which comprise the base for a test | inspection. It is a figure which shows the contact part by the side of a 1st base part. It is a figure which shows the contact part and fixing member by the side of a 2nd base part. It is a perspective view which shows a 1st base part and a 2nd base part. It is a perspective view which shows a 1st base part and a 2nd base part. It is a perspective view which shows a 1st base part and a 2nd base part. It is a perspective view which shows a 1st base part and a 2nd base part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Board | substrate inspection apparatus 3 Inspection base 4 Floating stage 5 Suction holding stage (conveyance part)
6 Conveying shaft (conveying unit)
7 Imaging part 15 1st base part 16 2nd base part 21,22,46,47,73,74,81,82 Contact part 24,49 Plane 26 pin (projection part for fitting)
50 Fitting holes 56, 57 Fixing member (fastening part)
75, 77, 79 Abutting member (abutting part)

Claims (2)

Based on a levitation stage that blows gas onto the back surface of the substrate to levitate the substrate, a conveyance unit that conveys the substrate on the levitation stage, and an imaging unit that observes the substrate conveyed along the levitation stage In the substrate inspection device fixed and supported by
The base holds the transport unit, and can be fixed by positioning in a horizontal direction and a vertical direction with respect to the first base unit and a first base unit extending along the transport direction of the substrate. A substrate inspection apparatus comprising: a second base portion to hold. Based on a levitation stage that blows gas onto the back surface of the substrate to levitate the substrate, a conveyance unit that conveys the substrate on the levitation stage, and an imaging unit that observes the substrate conveyed along the levitation stage An assembly method of a substrate inspection apparatus supported and fixed to
After forming the base by fixing the second base portion by positioning in the horizontal direction and the vertical direction with respect to the first base portion, the transport portion is fixed to the first base portion, and the second base portion A method for assembling a substrate inspection apparatus, wherein the floating stage is fixed to the first base portion and the imaging portion is fixed so as to straddle the first base portion and the second base portion.

Images