JP2006242679A5 - - Google Patents

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JP2006242679A5
JP2006242679A5 JP2005057071A JP2005057071A JP2006242679A5 JP 2006242679 A5 JP2006242679 A5 JP 2006242679A5 JP 2005057071 A JP2005057071 A JP 2005057071A JP 2005057071 A JP2005057071 A JP 2005057071A JP 2006242679 A5 JP2006242679 A5 JP 2006242679A5
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Japan
Prior art keywords
base
substrate
base portion
inspection
positioning
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JP2005057071A
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Japanese (ja)
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JP2006242679A (en
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Priority to JP2005057071A priority Critical patent/JP2006242679A/en
Priority claimed from JP2005057071A external-priority patent/JP2006242679A/en
Publication of JP2006242679A publication Critical patent/JP2006242679A/en
Publication of JP2006242679A5 publication Critical patent/JP2006242679A5/ja
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Claims (9)

基板の裏面に気体を吹き付けて前記基板を浮上させる浮上ステージと、前記基板の端部を保持して前記浮上ステージ上で搬送する基板搬送部と、前記浮上ステージの搬送方向に直行して架設され前記基板を検査する検査部とをベースに支持した基板検査装置において、
前記基板搬送部を支持し、前記浮上ステージの側縁に沿って配置され前記浮上ステージの搬送長さに略等しい長さを有する角柱状の第１ベース部と、
前記第１ベース部に対して分解可能に固定され前記検査部を支持する第２ベース部と、
前記第１ベース部と前記第２ベース部との間の位置決めを行う第１位置決め手段と、
前記第１ベース部と前記第２ベース部とを組み付けた状態で両ベース部に架設される門型フレームを備えた検査部と、
前記門型フレームを構成する両側の支柱と前記第１ベース部及び第２ベース部との間の位置決めを行う第２の位置決め手段とを備え、
車両による運送時に前記第１ベース部と前記第２ベース部と前記検査部と前記浮上ステージをそれぞれ独立したユニットに分割して輸送することを特徴とする基板検査装置。 A levitation stage that levitates the substrate by blowing gas onto the back surface of the substrate, a substrate conveyance portion that holds the edge of the substrate and conveys the substrate on the levitation stage, and is constructed to run straight in the conveyance direction of the levitation stage. In the substrate inspection apparatus supported on the basis of the inspection unit for inspecting the substrate,
A prismatic first base portion that supports the substrate transport portion and is disposed along a side edge of the levitation stage and has a length substantially equal to the transport length of the levitation stage ;
A second base part that is fixed to the first base part so as to be disassembled and supports the inspection part ;
First positioning means for positioning between the first base portion and the second base portion;
An inspection section comprising a gate-type frame constructed on both base sections in a state where the first base section and the second base section are assembled;
A second positioning means for positioning between the struts on both sides constituting the portal frame and the first base portion and the second base portion;
A substrate inspection apparatus , wherein the first base part, the second base part, the inspection part, and the floating stage are divided into independent units and transported during transportation by a vehicle. 前記第１位置決め手段は、前記第１ベース部と前記第２ベース部の対向するそれぞれの側面に当て付け面の基準となる当接部を設けたことを特徴とする請求項１記載の基板検査装置。The substrate inspection according to claim 1, wherein the first positioning means includes a contact portion serving as a reference surface of a contact surface on each of the opposing side surfaces of the first base portion and the second base portion. apparatus. 前記第１位置決め手段は、前記第１ベース部と前記第２ベース部の対向するそれぞれの側面に当て付け面の基準となる当接部を前記搬送方向に２つ設け、これらの当接部に前記第１ベース部と第２ベース部の取り付け位置の基準となる嵌合用突部と嵌合穴を設けたことを特徴とする請求項１The first positioning means is provided with two contact portions serving as a reference for the abutting surface on each of the opposing side surfaces of the first base portion and the second base portion in the transport direction. 2. A fitting protrusion and a fitting hole, which serve as a reference for mounting positions of the first base portion and the second base portion, are provided. 前記第１位置決め手段は、前記第１ベース部に前記第２ベース部を水平方向及び垂直方向の取り付け位置の基準となる当て付け部材を設けたことを特徴とする請求項１記載の基板検査装置。The substrate inspection apparatus according to claim 1, wherein the first positioning unit includes an abutting member serving as a reference for a horizontal and vertical mounting position of the second base portion on the first base portion. . 前記第２位置決め手段は、前記第１ベース部と前記門形フレームの両支柱と対向するそれぞれの側面に当て付け面の基準となる突出部を設けたことを特徴とする請求項１記載の基板検査装置。2. The substrate according to claim 1, wherein the second positioning means is provided with a projecting portion serving as a reference for an abutting surface on each side surface of the first base portion and the two columns of the portal frame facing each other. Inspection device. 前記第２ベース部は、前記第１ベース部に平行に組み付けられる側部を有する矩形の枠に形成されることを特徴とする請求項１記載の基板検査装置。 The substrate inspection apparatus according to claim 1, wherein the second base part is formed in a rectangular frame having side parts assembled in parallel to the first base part. 前記第２ベース部は、前記第１ベース部に平行に組み付けられる側部を有するＴ字形に形成されることを特徴とする請求項１記載の基板検査装置。 The substrate inspection apparatus according to claim 1, wherein the second base part is formed in a T shape having a side part assembled in parallel with the first base part. 前記第２ベース部は、前記第１ベース部に平行に組み付けられる側部を有するＬ字形に形成されることを特徴とする請求項１記載の基板検査装置。The substrate inspection apparatus according to claim 1, wherein the second base part is formed in an L shape having a side part assembled in parallel with the first base part. 基板の裏面に気体を吹き付けて前記基板を浮上させる浮上ステージと、前記基板の端部を保持して前記浮上ステージ上で搬送する基板搬送部と、前記浮上ステージの搬送方向に直行して架設され前記基板を検査する検査部とをベースに支持した基板検査装置の組み立て方法であって、A levitation stage that floats the substrate by blowing gas onto the back surface of the substrate, a substrate conveyance portion that holds the edge of the substrate and conveys the substrate on the levitation stage, and is installed in a direction perpendicular to the conveyance direction of the levitation stage. A method for assembling a substrate inspection apparatus that supports an inspection unit for inspecting the substrate on a base,
前記基板搬送部を支持し、前記浮上ステージの側縁に沿って配置され前記浮上ステージの搬送長さに略等しい長さを有する角柱状の第１ベース部と、A prismatic first base portion that supports the substrate transport portion and is disposed along a side edge of the levitation stage and has a length substantially equal to the transport length of the levitation stage;
前記第１ベース部に対して分解可能に固定され前記検査部を支持する第２ベース部と、A second base part fixed to the first base part so as to be disassembled and supporting the inspection part;
前記第１ベース部と前記第２ベース部との間の位置決めを行う第１位置決め手段と、First positioning means for positioning between the first base portion and the second base portion;
前記第１ベース部と前記第２ベース部とを組み付けた状態で両ベース部に架設される門型フレームを備えた検査部と、An inspection unit including a gate-type frame constructed on both base units in a state where the first base unit and the second base unit are assembled;
前記門型フレームを構成する両側の支柱と前記第１ベース部及び第２ベース部との間の位置決めを行う第２位置決め手段とを備え、A second positioning means for positioning between the struts on both sides constituting the portal frame and the first base portion and the second base portion;
前記第１ベース部と前記第２ベース部と前記検査部と前記浮上ステージをそれぞれ独立したユニットに分割し、組み立ての際に前記第１ベース部に前記第２ベースを当て付けて前記第１位置決め手段により位置決めして固定し、前記第１ベースと前記第２ベースに前記検査部を架け渡して前記第２位置決め手段により位置決めして固定し、前記第１ベースと前記第２ベースに前記浮上ステージを固定することを特徴とする基板検査装置の組み立て方法。The first base portion, the second base portion, the inspection portion, and the levitation stage are each divided into independent units, and the second base is applied to the first base portion during assembly to perform the first positioning. Positioning and fixing by means, spanning the inspection section between the first base and the second base, positioning and fixing by the second positioning means, and the levitation stage on the first base and the second base A method of assembling a substrate inspection apparatus, characterized by fixing the substrate.
JP2005057071A 2005-03-02 2005-03-02 Substrate inspection device and assembling method of same Pending JP2006242679A (en)

Priority Applications (1)

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JP2005057071A JP2006242679A (en) 2005-03-02 2005-03-02 Substrate inspection device and assembling method of same

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Application Number Priority Date Filing Date Title
JP2005057071A JP2006242679A (en) 2005-03-02 2005-03-02 Substrate inspection device and assembling method of same

Publications (2)

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JP2006242679A JP2006242679A (en) 2006-09-14
JP2006242679A5 true JP2006242679A5 (en) 2008-04-17

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JP4519705B2 (en) * 2005-04-26 2010-08-04 株式会社堀場製作所 Panel member inspection apparatus and position information correction program applied thereto
TW200821247A (en) * 2006-09-22 2008-05-16 Olympus Corp Substrate inspecting apparatus
JP5121199B2 (en) * 2006-09-25 2013-01-16 オリンパス株式会社 Substrate inspection apparatus and substrate inspection method
JP5319063B2 (en) * 2006-11-30 2013-10-16 株式会社日立国際電気 Line width measuring device
JP5044332B2 (en) * 2007-09-04 2012-10-10 大日本スクリーン製造株式会社 Processing equipment
JP2009085865A (en) * 2007-10-02 2009-04-23 Olympus Corp Substrate inspection device
JP5325406B2 (en) * 2007-10-10 2013-10-23 オリンパス株式会社 Board inspection equipment
JP2010091628A (en) * 2008-10-03 2010-04-22 Hitachi High-Technologies Corp Exposure apparatus and exposure method for display panel, and method of assembling or adjusting the exposure apparatus for display panel
JP5380225B2 (en) * 2009-09-24 2014-01-08 株式会社日立ハイテクノロジーズ Glass substrate inspection equipment
JP6150242B2 (en) * 2012-12-04 2017-06-21 国立研究開発法人産業技術総合研究所 Unit for constructing production line and its assembly method
TWI577624B (en) * 2016-09-30 2017-04-11 均豪精密工業股份有限公司 Warpage plate transporting logistics system
CN107879109B (en) * 2016-09-30 2020-03-10 均豪精密工业股份有限公司 Warp panel conveying logistics system

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JPH0519007Y2 (en) * 1989-11-28 1993-05-19
JPH08140789A (en) * 1994-11-16 1996-06-04 Fuji Electric Co Ltd Jig for assembling show case and its assemblage
JP4307872B2 (en) * 2003-03-18 2009-08-05 オリンパス株式会社 Board inspection equipment

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