JP5349881B2 - Scribe device and substrate cutting system - Google Patents

Scribe device and substrate cutting system Download PDF

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JP5349881B2
JP5349881B2 JP2008245014A JP2008245014A JP5349881B2 JP 5349881 B2 JP5349881 B2 JP 5349881B2 JP 2008245014 A JP2008245014 A JP 2008245014A JP 2008245014 A JP2008245014 A JP 2008245014A JP 5349881 B2 JP5349881 B2 JP 5349881B2
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substrate
belt
scribe
scribing
liquid crystal
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JP2010076957A (en
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彰 江島谷
剛 沖田
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三星ダイヤモンド工業株式会社
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a scribing device, wherein the need of separately using a carrying mechanism for the carrying-in and carrying-out of a brittle substrate such as a liquid crystal panel substrate to the device is eliminated, even in the case a liquid crystal panel substrate is scribed on a belt conveyer, without depending on the positional relation between the position of the vent holes in a table at the lower side of a belt in the belt conveyer and the position of the vent holes in the belt, the liquid crystal panel substrate can be sucked or floated up on the table via the belt. <P>SOLUTION: There is disclosed the scribing device for scribing the liquid crystal panel substrate W, on a table serving also as a belt conveyer, wherein a ventilation layer is formed on the back face of a conveyer belt 245, and a liquid crystal panel substrate W arranged on the belt is floated up or sucked and fixed on the table by an air flow generated at the vent holes 241a of the surface in the body 241 of the table, without depending on the positional relation between the vent holes 245a1 of the belt 245 and the vent holes 241a in the surface of the table. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a scribing apparatus and a substrate cutting system, and more particularly to a scribing apparatus that forms a scribing line on a brittle material substrate on a belt conveyor that transports the brittle material substrate, and such a scribing apparatus. The present invention relates to a substrate cutting system provided.

  Conventionally, when cutting a brittle substrate such as a plate glass, generally, a scratch (scribe) is made on one side along a line to be cut, and the plate glass is folded along a line (scribe line) with the scratch. Is done.

  By the way, a panel substrate constituting a liquid crystal panel of a liquid crystal display device has a structure in which two glass plates are bonded together. For this reason, such a panel substrate is bonded to two glass plates. When cutting out from the bonding material substrate to be formed, it is necessary to form scribe lines on both the front and back surfaces of the bonding material substrate.

  Conventionally, a process for forming a scribe line on each side is performed on such a bonded substrate material.

  For example, FIG. 11 is a block diagram showing a conventional liquid crystal panel dividing line 1.

  The liquid crystal panel dividing line 1 is provided on the downstream side of the loader 10 and a loader 10 for supplying the liquid crystal panel substrate W, which is a brittle material substrate, from the stock portion (not shown) to the liquid crystal panel dividing line 1. A first scribe device 20 that forms a scribe line on the surface of the liquid crystal panel substrate W, and a liquid crystal panel substrate W that is provided on the downstream side of the first scribe device 20 and has a scribe line formed on the surface thereof is reversed. A reversing device 30 to be formed, a second scribing device 40 provided on the downstream side of the reversing device 30 and forming a scribe line on the back surface of the reversed liquid crystal panel substrate W, and a downstream side of the second scribing device 40 And a divided carry-out mechanism 50 for dividing the liquid crystal panel substrate W into individual panel substrates and carrying them out.

  Here, the loader 10 includes a conveyor 12 that conveys the liquid crystal panel substrate W from its stock portion to the vicinity of the first scribing device 20, and a conveyor support base 11 that supports the conveyor 12. . Between the loader 10 and the first scribing device 20, a first transport mechanism 70 for transporting the liquid crystal panel substrate W from the conveyor terminal portion of the loader 10 to the carry-in portion 20 a of the scribing device 20 is provided.

  FIG. 12 is a perspective view illustrating the first transport mechanism 70.

  As shown in FIG. 12, the first transport mechanism 70 has a support arm 72 that sucks and supports the liquid crystal panel substrate W, and moves the support arm 72 between the conveyor terminal portion and the carry-in area 20a of the scribe device 20. The suction arm 73 is attached to the tip of the support arm 72 so that the liquid crystal panel substrate W is sucked up and down. The base side end of the support arm 72 is The support groove 71a formed in the guide 71 is slidably fitted. Here, the suction pad 73 is moved up and down by a cylinder 74 attached to the tip of the support arm 72.

  The first scribing device 20 includes a movable table 24 on which the liquid crystal panel substrate W is placed. The movable table 24 includes a loading area 20a into which the liquid crystal panel substrate W is loaded, and the liquid crystal panel substrate. The position adjustment region 20b for adjusting the position of W on the scribe base 21 and the scribe region 20c for forming a scribe line on the liquid crystal panel substrate W are moved to each region. A pair of guide rails 21a and 21b are mounted on the upper surface of the scribe base 21 of the scribing device 20 so as to straddle the respective regions, and the movable table 24 is slidably mounted on the guide rails 21a and 21b. It has been. A support frame 22 is provided in the position adjustment region 20 b of the scribe base 21, and the position of the liquid crystal panel substrate W placed on the movable table 24 is set on the support frame 22 on the movable table 24. An actuator (not shown) for adjusting with respect to is attached. A scribing mechanism 23 for forming a scribe line on the liquid crystal mother panel W placed on the table 24 is provided in the scribe area 20 c of the scribe base 21.

  FIG. 13 is a view for explaining a scribe mechanism 23 provided on the scribe base 21.

  The scribe mechanism 23 includes a pair of support posts 23a and 23b attached to both sides of the table support base 21, and a guide bar 23c attached between the support posts 23a and 23b. A plurality of scribing heads 23 d are slidably attached so as to cross the scribing base 21. In such a scribe mechanism 23, a plurality of scribe heads 23d attached to the guide bar 23c are arranged at regular intervals, and the lower side of the guide bar 23c passes through the movable table 24 on which the liquid crystal panel substrate W is placed. By doing so, a cutter chip (not shown) attached to the tip of the scribe head 23d comes into contact with the surface of the liquid crystal panel substrate W, and a scribe line is formed on the liquid crystal mother panel W.

  Further, the movable table 24 is configured to be rotatable about the center in a horizontal plane, and the movable table 24 has a first scribe line along the first direction on the surface of the liquid crystal mother panel. After that, the movable table 24 is rotated by 90 degrees and passed under the scribe head, whereby a second scribe line in a direction perpendicular to the first scribe line can be formed. .

  A reversing device 30 for reversing the liquid crystal panel substrate W on which vertical and horizontal scribe lines are formed is disposed on the downstream side of the first scribing device 20, and further on the downstream side of the reversing device 30, A second scribe device 40 for forming a scribe line is disposed on the back side of the liquid crystal panel substrate W.

  Here, the reversing device 30 includes a pair of support columns 31a and 31b, a substrate holder 33 that is disposed between the support columns, and accommodates the liquid crystal panel substrate W, and the support columns 31a and 31b that can rotate the substrate holder 33. And a support shaft 32 that supports the support shaft 32. Note that the reversing device 30 is schematically shown in FIGS. 11 and 14, and may have any configuration as long as the liquid crystal panel substrate W conveyed from the upstream side can be reversed.

  The second scribing device 40 has the same configuration as the first scribing device 20, that is, the carry-in area 40a, the position adjustment area 40b, and the scribing area 40c on the scribe base 41. Is set, and the movable table 41 can be moved to each region of the scribe base 41. A support frame 42 is attached to the position adjustment region 40 b of the scribe base 41 of the scribe device 40, and the position of the liquid crystal panel substrate W placed on the movable table 44 is adjusted to the support frame 42. An actuator (not shown) is attached.

  The scribe area 40 c of the scribe base 41 is provided with a scribe mechanism 43 for forming a scribe line on the liquid crystal panel substrate W placed on the movable table 44. The scribe mechanism 43 has the same configuration as the scribe mechanism 23 of the first scribe device 20.

  Moreover, the 2nd conveyance mechanism 80 is provided ranging over the 1st scribe apparatus 20, the inversion apparatus 30, and the 2nd scribe apparatus 40, This 2nd conveyance mechanism 80 is the 1st scribe apparatus. The liquid crystal panel substrate W on which the scribe line is formed is transported to the reversing device 30, and the liquid crystal panel substrate W reversed in front and back by the reversing device 30 is transported to the second scribe device 40. The second transport mechanism 80 also has the same configuration as the first transport mechanism 70 shown in FIG. That is, a suction pad 83 for sucking the liquid crystal mother panel, a support arm 82 for supporting the suction pad 83, an arm guide 81 for supporting the support arm 82 movably, and a cylinder for moving the suction pad 83 up and down (see FIG. Not shown).

  Further, on the downstream side of the second scribing device 40, there is provided a dividing / unloading device 50 for dividing and unloading the liquid crystal panel substrate W in which vertical and horizontal scribe lines are formed on the front and back surfaces, respectively.

  The divided carry-out base 51 of the divided carry-out device 50 is provided with a carry-in area 50a, a divided area 50b, and a carry-out area 50c. The carry-in area 50a of the divided carry-out base 51 has a second upstream side. Liquid crystal panel substrate W is carried in from the scribe device 40. Further, in the divided area 50b of the divided carry-in base 51, steam is applied to the scribe line of the liquid crystal panel substrate W carried into the carry-in area 50a, and the thermal strain caused by the rapid temperature rise is utilized. A steam dividing section (not shown) for dividing the substrate W into individual liquid crystal panels DW is provided. Here, the transport of the liquid crystal panel substrate W to the carry-in area 50a and the steam dividing area 50b is performed by the conveyor 52, and the carry-out areas 50c are provided with carry-out conveyors 53a and 53b for the liquid crystal panel.

  A third transport mechanism 90 is provided along the scribe region 40 c of the second scribe device 40 and the carry-in portion 50 a of the divided carry-out portion 50. This third transport mechanism 90 transports the liquid crystal panel substrate W on the movable table 44 located in the scribe region 40c of the scribe device 40 to the carry-in region 50a of the divided carry-out device 50, and is shown in FIG. The first transport mechanism 70 has the same configuration. That is, the transport mechanism 90 includes a suction pad 93 that sucks the liquid crystal panel substrate W, a support arm 92 that supports the suction pad 93, an arm guide 91 that supports the support arm movably, and a suction pad 93. And a cylinder (not shown) for moving up and down.

  Next, the operation will be described.

  FIG. 14 is a diagram for explaining the operation of the conventional substrate cutting system (processing system) 1 and shows a state in which the liquid crystal panel substrate W in FIG. 11 has been moved downstream by the respective transport mechanisms.

  First, the liquid crystal panel substrate W stored in a stock unit (not shown) is transported by the loader 10 to the vicinity of the first scribing device 20. Specifically, the liquid crystal panel substrate W is conveyed on the loader base 11 of the loader 10 by the conveyor 12 and reaches the downstream end of the loader base 11.

  Next, the liquid crystal panel substrate W is transferred from the loader 10 to the first scribing device 20 by the first transport mechanism 70. Specifically, the liquid crystal mother panel W that has been transported to the downstream end of the loader substrate 11 is sucked by the suction pad 73 of the first transport mechanism 70, and the suction pad 73 is raised by the contraction operation of the cylinder 74. As a result, it floats from the loader substrate 11. In this state, as shown in FIG. 14, the support arm 72 of the first transport mechanism 70 moves downstream along the arm guide 71, so that the liquid crystal panel substrate W becomes a scribe base of the first scribe device 20. 21 to the carry-in area 20a. Thereafter, the suction pad 73 is lowered by the extension operation of the cylinder 74, and the liquid crystal panel substrate W is placed on the movable table 24 located in the carry-in area 20a of the scribe base 21 (see FIG. 12).

  Next, in the first scribing device 20, the movable table 24 moves from the carry-in area 20 a of the scribe base 21 to the position adjustment area 20 b, and here, the liquid crystal panel placed thereon with respect to the movable table 24. The position of the substrate W is adjusted. Specifically, the movable table 24 temporarily stops at the position adjustment region 20b of the scribe base 21, and the liquid crystal panel substrate W on the movable table 24 is moved by an actuator (not shown) attached to the support frame 22. The position of the movable table 24 is adjusted.

  When this position adjustment is completed, the movable table 24 moves to the scribe area 20c, whereby the liquid crystal panel substrate W arranged on the movable table 24 is scribed by the scribe mechanism 23 arranged in the scribe area 20c. The

  Specifically, before the movable table 24 moves to the scribe area 20c, a plurality of scribe heads 23d are arranged at predetermined intervals on the guide bar 23c, and in this state, attached to the lower end of the scribe head 23d. The cutter tip is lowered to a scribe position, that is, a position in contact with the surface of the liquid crystal panel substrate W placed on the movable table. In this state, when the movable table 24 passes below the scribe head 23d, the surface of the liquid crystal panel substrate W placed on the movable table 24 is fixed to the surface by the cutter chip of each scribe head 23d. A plurality of first scribe lines are formed at intervals. Thereafter, the cutter tip of the scribe head 23d rises to a non-scribe position, that is, a position that does not contact the surface of the liquid crystal panel substrate W on the movable table 24. In this state, the movable table 24 once returns to the position adjustment region 20b, The movable table 24 rotates 90 degrees. Thereafter, the position of the liquid crystal panel substrate W on the movable table 24 is adjusted as necessary, and the arrangement intervals of the plurality of scribe heads 23d are set, and the movable table 24 passes again below the scribe heads 23d. Thus, a second scribe line orthogonal to the first scribe line is formed on the surface of the liquid crystal panel substrate W placed on the movable table 24 by the cutter chip of each scribe head 23d. .

  Next, the liquid crystal panel substrate W is transported to the reversing device 30 from the movable table 24 positioned in the scribe region 20 c of the scribe base 21 by the second transport mechanism 80. The transfer of the liquid crystal panel substrate W by the second transfer mechanism 80 is performed by adsorbing the liquid crystal panel substrate W by the suction pad 83 of the second transfer mechanism 80 in the same manner as the transfer by the first transfer mechanism 70. When the support arm 82 moves to the downstream side along the arm guide 81 in the state of being lifted from the liquid crystal panel substrate W, the liquid crystal panel substrate W is conveyed to the reversing device 30 as shown in FIG.

  Next, in the reversing device 30, when the liquid crystal panel substrate WW transported by the second transport mechanism 80 is accommodated in the panel holder 33 held in a horizontal state, the panel holder 33 is supported by the support device 33. By rotating 180 degrees about the shaft 32 as a rotation axis, the liquid crystal panel substrate W in the panel holder is turned upside down. Thereafter, the liquid crystal panel substrate W is further transported from the panel boulder 32 of the reversing device 30 to the second scribing device 40 by the second transport mechanism 80. The transport of the liquid crystal panel substrate W by the second transport mechanism 80 to the second scribe device is the same as the transport of the first transport mechanism 70 to the first scribe device by the suction of the second transport mechanism 80. With the liquid crystal panel substrate W adsorbed by the pad 83, the support arm 82 moves downstream along the arm guide 81, so that the liquid crystal panel substrate W is attached to the second scribing device 40 as shown in FIG. The scribe base 41 moves to the carry-in area 40a. Thereafter, the suction pad 83 is lowered by an extension operation of a cylinder (not shown), and the liquid crystal panel substrate W is placed on the movable table 44 located in the carry-in area 40a of the scribe base 41 (see FIG. 14). .

  Next, in the second scribe device 40, the movable table 44 moves from the carry-in area 40 a of the scribe base 41 to the position adjustment area 40 b, and here, the liquid crystal panel placed thereon with respect to the movable table 44. The position of the substrate W is adjusted. Specifically, the movable table 44 temporarily stops in the position adjustment region 40b of the scribe base 41, and the liquid crystal panel substrate W on the movable table 44 is moved by an actuator (not shown) attached to the support frame 42. The position of the movable table 44 is adjusted.

  When this position adjustment is completed, the movable table 44 moves to the scribe area 40c, so that the liquid crystal panel substrate W arranged on the movable table 44 is scribed by the scribe mechanism 43 arranged in the scribe area 40c. The In the second scribe device 40, except that the scribe line is formed on the back surface of the liquid crystal panel substrate W, exactly the same as the scribe line is formed on the liquid crystal panel substrate W by the first scribe device 20, The liquid crystal panel substrate W is scribed, and a plurality of first scribe lines and second scribe lines orthogonal thereto are formed on the back surface side of the liquid crystal panel substrate W.

  Next, the liquid crystal mother panel W is transferred from the movable table 44 located in the scribe area 40 c of the scribe base 41 to the panel dividing / unloading device 50 by the third transport mechanism 90. The liquid crystal mother panel W is transported by the third transport mechanism 90 by the suction pad 93 of the third transport mechanism 90 in the same manner as the transport by the first and second transport mechanisms 70 and 80. In a state in which the liquid crystal panel substrate W is lifted from the movable table 44 and the support arm 92 moves downstream along the arm guide 91, the liquid crystal panel substrate W is attached to the panel dividing / unloading device 50 as shown in FIG. It is conveyed to the carry-in area 50a.

  In the panel cutting and unloading device 50, when the liquid crystal panel substrate W is loaded into the loading area 50a, the liquid crystal panel substrate W is transferred to the dividing area 50b by the conveyor 52. Here, beam-like steam is applied to the portion of the liquid crystal panel substrate W where the scribe line is formed, and the liquid crystal mother panel W is scribed by thermal distortion due to a rapid temperature rise in the portion where the steam is applied. It is divided into a plurality of liquid crystal panels DW along the line. Thereafter, the liquid crystal panel DW obtained by dividing the liquid crystal panel substrate W is unloaded from the substrate cutting system 1 by a transport mechanism such as the pair of conveyors 53a and 53b.

  The substrate cutting system described with reference to FIGS. 11 to 14 forms a scribe line on each side of the front and back surfaces of the liquid crystal panel substrate W bonded with two glass substrates, and then divides the liquid crystal mother panel. However, Patent Document 1 discloses a liquid crystal mother that inverts the liquid crystal mother panel and scribes and breaks on each side when the liquid crystal mother panel is bonded to two glass substrates. A panel cutting line is disclosed. In the liquid crystal mother panel dividing line described in this document, after the front side substrate of the liquid crystal mother panel is cut by the cutting device, the liquid crystal mother panel is scribed on the back surface of the liquid crystal mother panel from the cutting device by the transport mechanism. To be transported.

  By the way, some conventional glass plate processing apparatuses scribe the glass plate on a belt conveyor that conveys the glass plate (for example, Patent Document 2). It can be used as the scribing device described in 1.

In this glass plate processing apparatus, the belt of the belt conveyor is disposed so as to run on the surface of a box-shaped member as a table on which the glass plate is placed. The belt has a large number of ventilation holes, and a plurality of suction holes are formed in the ceiling plate portion of the box-shaped member (table) according to the arrangement of the large number of ventilation holes formed in the belt. . Thereby, the glass plate on the belt is fixed to the table by vacuum suction.
International Publication No. WO2002 / 057192 Pamphlet Japanese Patent Laid-Open No. 10-291829

  However, in the above-mentioned conventional processing line, the suction and transfer device is used for loading and unloading the liquid crystal panel substrate W into and from the scribe device, so that the liquid crystal panel substrate W is loaded into and unloaded from the scribe device. A mechanism is required separately, and it is necessary to open the upper side of the carry-in part and the carry-out part of the scribing device. As a result, there is a problem that the installation area of the processing line becomes wide.

  In addition, recently, the thinning of the liquid crystal panel substrate W has been progressed by etching, and there is a problem that it may develop into defects such as display unevenness due to local support by the suction pad.

  In addition, in the glass plate processing apparatus disclosed in Patent Document 2, in order to suck and fix the glass plate disposed on the table via a belt to the table, the position of the suction hole of the table below the belt and It is necessary to match the position of the vent hole of the belt, and the stop position of the belt that determines the positional relationship is defined by the position of the vent hole. Therefore, the glass plate must be placed on the belt at a predetermined position with respect to the air vent of the belt, and depending on the stop position of the belt, the position of the suction hole of the table and the passage of the belt. If the positions of the pores are shifted, there is a problem that ventilation from the suction hole of the table to the ventilation hole of the belt cannot be ensured and the glass plate cannot be fixed by suction on the table.

  The present invention has been made in order to solve the above-described conventional problems, and it is not necessary to use a separate transport mechanism for carrying in and out of the scribe device, reducing the arrangement space of the transport mechanism, and a liquid crystal panel substrate It is possible to eliminate the cause of the occurrence of defects such as display unevenness by avoiding local support of the glass plate during conveyance, and even when the glass plate is scribed on a belt conveyor that conveys the glass plate. A scribing device capable of adsorbing or floating a glass plate via a belt on the table regardless of the positional relationship between the position of the suction hole of the table below the belt and the position of the vent hole of the belt, and the scribing device It aims at providing the board | substrate cutting system using this.

  A scribing apparatus according to the present invention includes a table on which a brittle substrate is placed, and a scribing mechanism having a scribing head for forming a scribing line on the brittle substrate, and by relative movement between the table and the scribing head, A scribing device for forming a scribe line on the surface of a brittle substrate placed on the table, the table being attached to a belt conveyor for transporting the brittle substrate so that the belt runs on the surface of the table Ventilation holes are formed on the surface of the table, and ventilation holes are formed in the belt so as to penetrate the belt. The ventilation holes on the surface of the table and the passage of the belt are formed on the back surface of the belt. An air-permeable layer that allows air to pass through the pores is formed, thereby achieving the above object.

  The present invention is the scribing apparatus, wherein the brittle substrate is a bonded material substrate having a structure in which two substrates are bonded together, and the scribe mechanism is a first region of a base disposed on an installation surface. And a scribe head for forming a scribe line on the bonding material substrate, wherein the table includes the first region on the base and a second region adjacent thereto. A movable table that has a belt conveyor that is movably provided between the substrate and conveys the bonded substrate, and places the bonded material substrate on the belt conveyor, and the scribe line includes the bonded material With the substrate placed on the belt of the belt conveyor, the movable table is moved from the second region to the first region, and is formed on the surface of the bonding material substrate by the scribe mechanism. It is preferable.

  In the scribing apparatus according to the present invention, the movable table includes a substrate placement plate on which the bonding material substrate is placed, a rotation support mechanism that rotatably supports the substrate placement plate in a horizontal plane, and the rotation A support mechanism is attached, and a movable block is movably attached to the base, and is attached to the substrate placement plate so that the belt of the belt conveyor can run on the placement surface. The bonding material substrate is preferably placed on the placement surface via the belt.

  The present invention provides the scribing apparatus, wherein the substrate mounting plate has a plurality of ventilation holes formed on a surface thereof, and the belt of the belt conveyor has a plurality of ventilation holes formed so as to pass through the ventilation holes. And the back surface of the belt contacting the substrate mounting plate has a corrugated shape, and the air flow generated in the vent hole of the substrate mounting plate causes the suction air flow or the ejection air flow to flow into the vent hole of the belt. It is preferable that it is comprised so that may generate | occur | produce.

The present invention, in the scribing apparatus, the belt of the belt conveyor, and a surface-side layer for placing the lamination material substrate, it is preferable that a two-layer structure with the rear surface side of the fabric layer.

  The present invention provides the scribing apparatus, wherein the second region of the base is a rectangular position adjusting region for adjusting the position of the bonding material substrate placed on the substrate placing plate of the movable table. A plurality of position adjusting devices are provided on each side of the position adjusting region, and the plurality of position adjusting devices press the side surface of the bonding material substrate to position the bonding material substrate. Is preferably adjusted with respect to the substrate mounting plate of the movable table.

In the scribing apparatus, when the position of the bonding material substrate placed on the substrate mounting plate of the movable table is adjusted in the second region, the bonding material substrate is It is preferable to float on the substrate mounting plate of the movable table by the air flow generated in the vent holes of the belt of the belt conveyor .

In the scribing apparatus, when the movable table is moved from the second region to the first region to form a scribe line on the surface of the bonding material substrate by the scribe mechanism, It is preferable that the laminated material substrate is fixed to the substrate mounting plate of the movable table by a suction air flow generated in a vent hole of the belt of the belt conveyor .

  A substrate cutting system according to the present invention is a substrate cutting system for creating a panel substrate to be a product part by cutting a bonding material substrate having a structure in which a brittle substrate is bonded to the surface of the bonding material substrate. A first scribing device for forming a line, a reversing device for reversing the bonding material substrate with the scribe line formed on the front surface, and a scribe line on the back surface of the bonding material substrate reversed by the reversing device A second scribing device, and a substrate cutting device for cutting a bonding material substrate on which both scribe lines are formed by the first and second scribing devices, each of the scribing devices being brittle A table on which the substrate is placed, and a scribe mechanism having a scribe head for forming a scribe line on the brittle substrate, A scribe line is formed on the surface of the brittle substrate placed on the table by relative movement of the table and the scribe head, and the table includes a belt conveyor that conveys the brittle substrate, and the belt includes the belt. It is attached so as to run on the surface of the table, and vent holes are formed on the surface of the table, and vent holes are formed in the belt so as to penetrate the belt. A ventilation layer is formed to ventilate the ventilation holes of the table surface and the ventilation holes of the belt, thereby achieving the above object.

  The operation of the present invention will be described below.

  In the present invention, in a scribing apparatus for scribing a brittle substrate on a table that also serves as a belt conveyor, a ventilation layer is formed on the back surface of the belt to ventilate the ventilation holes of the table surface and the ventilation holes of the belt. Therefore, even if the belt stop position is a position where the position of the vent hole in the table under the belt and the position of the vent hole in the belt do not match, the passage of the table under the belt through the back surface of the belt. The ventilation from the air hole to the air hole of the belt is secured. For this reason, the brittle substrate can always be floated or sucked on the conveyor belt regardless of the stop position of the belt. In other words, the brittle substrate placed on the belt floats on the table due to the air flow generated in the vent on the table surface regardless of the positional relationship between the vent on the belt and the vent on the table surface. Or it will be adsorbed and fixed.

  Moreover, in this invention, it has a scribe mechanism which has a scribe head for forming a scribe line in a bonding board | substrate, and a belt conveyor which conveys a brittle board | substrate, The table which mounts this brittle board | substrate on this belt conveyor The scribe line is formed on the surface of the brittle substrate by the scribe mechanism by relative movement of the scribe mechanism and the table, so that the scribe device is carried into and out of the scribe device without using a separate transfer mechanism. As a result, it is possible to reduce the arrangement space of the transport mechanism, and to avoid the local support during the transport of the liquid crystal panel substrate to eliminate the cause of defects such as display unevenness. it can.

  In addition, when the liquid crystal panel substrate is transported to or from the scribe device by the belt conveyor, the entire liquid crystal panel substrate is supported by the belt conveyor, and the thinned liquid crystal panel substrate is transported. It is possible to eliminate the problem of developing into a defect such as display unevenness due to local support by the suction pad.

  Further, since the conveyor belt mounted on the table member of the movable table is made of a cloth material having a rough back surface, a ventilation layer can be formed with a simple structure on the back surface of the conveyor belt. As described above, even if the vent holes of the table member and the vent holes formed in the belt do not coincide with each other, the cloth formed on the back surface of the conveyor belt can be used to form the vent holes of the table under the belt and the vent holes formed in the belt. Ventilation is ensured between the pores, and the liquid crystal panel substrate can be floated and sucked on the table member.

  Further, in the present invention, in the substrate cutting system in which scribe lines are formed on the front and back surfaces of the liquid crystal panel substrate and the liquid crystal panel substrate is divided along the scribe line, the liquid crystal panel substrate in the scribe device is placed. Since the table has a structure in which the liquid crystal panel substrate is transported on a conveyor table having a conveyor belt attached to the table main body, a belt conveyor is used as a transport mechanism for the liquid crystal panel substrate in the upstream and downstream processing devices of the scribe device. This eliminates the need to use a separate transport mechanism for carrying the liquid crystal panel substrate between the upstream and downstream processing devices of the scribing device. Further, in the scribing apparatus, it is not necessary to open the upstream carry-in area and the downstream carry-out area, and the area occupied by the scribing apparatus on the processing line can be reduced. As a result, the processing space can be reduced.

  In addition, since a ventilation layer is formed on the back surface of the belt to ventilate the ventilation holes of the table surface and the ventilation holes of the belt, the stop position of the belt is the position of the ventilation holes of the table under the belt. Even if the position of the vent hole of the belt does not coincide with the position of the belt, the ventilation from the vent hole of the table under the belt to the vent hole of the belt is ensured through the back surface of the belt. For this reason, the brittle substrate can always be floated or sucked on the conveyor belt regardless of the stop position of the belt. In other words, the brittle substrate placed on the belt floats on the table due to the air flow generated in the vent on the table surface regardless of the positional relationship between the vent on the belt and the vent on the table surface. Or it will be adsorbed and fixed.

  As described above, according to the present invention, it is not necessary to use a separate transport mechanism for carrying in and out of the scribe device, the space for disposing the transport mechanism is reduced, and the liquid crystal mother panel is locally disposed during transport of the liquid crystal panel substrate. In addition to avoiding general support and eliminating the cause of defects such as display unevenness, there is no need to use a separate transport mechanism for carrying in and out of the scribe device, reducing the arrangement space of the transport mechanism, In addition, there is an effect that it is possible to eliminate the cause of defects such as display unevenness by avoiding local support of the brittle substrate during transportation, and further, on the belt conveyor that transports the brittle substrate. Even when the brittle substrate is scribed, the position of the air vents on the table below the belt of the belt conveyor and the position of the air vents on the belt is not affected by the position on the table. There is an effect that can be adsorbed or float the brittle substrate via a belt.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
FIGS. 1-10 is a figure explaining the board | substrate cutting system by Embodiment 1 of this invention, FIG. 1 is a top view which shows typically the process line which comprises the board | substrate cutting system of this Embodiment 1. FIG. .

  The substrate cutting system 1000 according to the first embodiment includes a loader 100 that supplies a liquid crystal panel substrate W, which is a brittle material substrate, from a stock portion (not shown) to a processing line of the substrate cutting system 1000, and a downstream of the loader 100. The first scribe device 200 that is provided on the surface and forms a scribe line on the surface of the liquid crystal panel substrate W, and the liquid crystal panel that is provided on the downstream side of the first scribe device 200 and has a scribe line formed on the surface A reversing device 300 for reversing the substrate W, a second scribing device 400 provided downstream of the reversing device 300 and forming a scribe line on the upper surface (back surface) of the reversed liquid crystal panel substrate W; Provided on the downstream side of the second scribing device 400, the liquid crystal panel substrate W being divided into individual liquid crystal panels DW and carried out And a carry-out device 500.

  Here, the loader 100 includes a loader base 110 and a conveyor 120 that is attached to the loader base 110 and conveys the liquid crystal panel substrate W from its stock portion to the vicinity of the first scribe device 200. And has the same configuration as the loader 10 in the conventional substrate cutting system 1.

  The first scribing device 200 includes a scribing base 210 fixed to the installation surface, a movable table 240 slidably provided on the scribing base 210, and position adjustment of the scribing base 210. A position adjusting device 260 (see FIG. 5) for adjusting the position of the liquid crystal panel substrate W mounted on the frame member 220 fixed to the region 200a and placed on the movable table 240; and the scribe base A scribing mechanism 230 is provided in the scribing area 200b of the table 210 and forms a scribe line on the surface of the liquid crystal panel substrate W placed on the movable table 240.

  Hereinafter, the first scribing apparatus 200 will be described in detail first.

  2 and 3 are perspective views for explaining the first scribing device 200 arranged on the downstream side of the loader. FIG. 2 schematically shows the configuration of the position adjustment region 200a of the first scribing device. FIG. 3 schematically shows the configuration of the scribe region 200b of the first scribe device. 5 and 6 are a plan view and a side view for explaining the configuration of the position adjustment region and the scribe region of the scribing apparatus. FIG. 7A is a cross-sectional view showing the structure of the movable table mounted on the scribe device and the conveyor belt mounted thereon, and FIG. 7B shows the structure of the surface of the movable table. It is a top view. Further, FIG. 8 shows a liquid crystal panel substrate W on which a scribe line is formed by the scribe device of the system. For convenience of explanation, the scribe mechanism is omitted in FIG. 2, and the position adjustment mechanism is omitted in FIG.

  On the scribe base 210 of the first scribing apparatus 200, a pair of opposing rails 210a and 210b are arranged in parallel with the direction in which the liquid crystal panel substrate W is conveyed on the processing line. A movable block 243 is slidably attached to the pair of guide rails 210a and 210b, and a rotation support mechanism 242 is attached to the movable block 243. As shown in FIG. 6, the rotation support mechanism 242 has a rotation support shaft 242a that rotatably supports a table fixture 246 that fixes the conveyor table 240a, and driving means (see FIG. 6) inside the rotation support mechanism 242. The rotation support shaft 242a is rotated by a rotation of the conveyor table 240a attached to the table fixture 246.

  In addition, a pair of upper and lower roller members 242a and 242b and a pair of roller members 243a and 243b are provided on opposite side portions of the substrate mounting plate (table body) 241 constituting the substantially square square conveyor table 240a. The roller belts 242a, 242b, 243a, and 243b are hung on the roller belts 242a, 242b, 243a, and 243b so as to cover the table main body 241. Here, as shown in FIG. 7B, the table body 241 has air holes (vent holes) 241a for ejecting or sucking an air flow on the surface of a metal plate-like member such as aluminum at regular intervals. It is formed by. Further, as shown in FIG. 7A, the conveyor belt 245 includes a urethane layer 245a on the front surface side and a fabric layer 245b on the back surface side, and the lower surface side of the fabric layer 245b has a corrugated plate shape. . Here, the fabric layer 245b and the urethane layer 245a are integrated at a joint portion between the front surface side urethane layer 245a and the back surface side fabric layer 245b. Here, the fabric layer 245b is preferably made of a coarse cloth material. Similarly to the table main body 241, the conveyor belt 245 has air circulation holes (vent holes) 245a1 formed at a predetermined pitch along the belt running direction and a direction perpendicular thereto. However, the pitch of the air holes 245a1 formed in the conveyor belt 245 and the pitch of the air holes 241a formed in the surface of the table main body 241 do not have to be the same. In the conveyor belt 245 having such a structure, an air hole (vent hole) 241a on the table surface and a circulation hole (through hole) of the belt are formed on the back surface of the conveyor belt due to the corrugated shape on the lower surface side of the fabric layer 245b. Air holes) 245a1 is formed, and the air flow generated in the air holes 241a on the table surface causes the air flow generated in the air holes 241a on the table surface to be irrespective of the positional relationship between the air holes 245a1 on the conveyor belt and the air holes 241a on the table surface. The brittle substrate placed on the belt is levitated or fixed by suction on the table. In addition, air is sent to the air holes 241a or air flows from the air holes 241a to the table main body 241 so that an air flow from the air holes 241a or an intake air flow to the air holes 241a is generated. An air flow generator (not shown) for sucking the air is provided.

  Further, a component mounting stay 247 is fixed to the table mounting tool 246, and a rotational drive shaft 247d such as a rotating shaft of a motor is rotatably mounted on the component mounting stay 247. Further, the conveyor A driving roller 247e for running the belt 245 is rotatably attached. Here, the rotation drive shaft 247d and the drive roller 247e are connected by a belt member 247c. The table body 241 has a pair of tension guide rollers 247a and 247b for guiding the conveyor belt 245 to the driving roller 247e and applying a certain tension to the conveyor belt 245 via bearing members (not shown). It is attached by a lever mounting stay 247.

  The movable block 243 is movable between the position adjustment area 200a and the scribe area 200b, and is driven by a driving means such as a linear motor (not shown) arranged along the guide rails 210a and 210b. It is what is done. The movable table 240 includes the movable block 243, the rotation support mechanism 242, and a conveyor table 240a.

  In addition, a pair of opposite side U-shaped frames 220a and 220b are attached to the position adjustment region 200a of the scribe base 210 so as to straddle the pair of guide rails 210a and 210b. A pair of opposing reinforcing frames 220c and 220d that reinforce them are attached between the frames 220a and 220b. Then, two position adjusting devices 260 are attached to each of these frames at regular intervals so as to be located within a square region formed by these frames.

  As shown in FIGS. 5 and 6, the position adjusting device 260 includes a lifting cylinder 261 fixed to the inner surface of the frame by a mounting flange 265, and a horizontal cylinder 262 fixed to the lower end of the cylinder rod of the lifting cylinder. A component mounting bracket 263 fixed to the inner end of the cylinder rod of the horizontal cylinder 262, a curved arm 264 mounted on the lower surface of the component mounting bracket 263, and a liquid crystal mounted on both ends of the curved arm 264. And a contact disk 264a for moving the panel in contact with the side end surface of the panel substrate W.

  A scribing mechanism 230 is provided in the scribing area 200 b of the scribing base 210. The scribing mechanism 230 is attached to the two struts so as to straddle the pair of fixed struts 230a and 230b arranged to face each other with the pair of guide rails 210a and 210b interposed therebetween. It has a horizontal support 230c and a plurality of scribe heads 250a to 250d that are slidably attached to a guide member 232 fixed to the side of the horizontal support 230c. Here, the horizontal strut 230c incorporates a coil 231 that constitutes a linear motor, and the scribe heads 250a to 250d according to the size of the liquid crystal panel DW cut out from the liquid crystal panel substrate W by the linear motor. , And can be moved to a predetermined position in the direction along the horizontal support 230c.

  For example, as shown in FIG. 6, the scribe head 250 b includes a slide block 252 that is slidably attached to the guide member 232, an actuator 251 that is attached to the slide block 252 and moves the cutter tip 253 up and down, And a positioning camera 256 attached to the housing of the actuator. The scribing heads 250a to 250d all have the same configuration.

  Further, on the downstream side of the first scribing device 200, a reversing device 300 for reversing the front and back of the liquid crystal panel substrate W scribed by the scribing device 200 is provided.

  FIG. 4 is a perspective view for explaining the reversing device 300 and the second scribing device 400 provided on the downstream side of the reversing device 300, and shows the upstream portion of the reversing device 300 and the second scribing device 400. .

  The reversing device 300 includes a reversing device base 310 fixed to the installation surface, a pair of support columns 310a fixed on the base 310 so as to sandwich the transport path of the liquid crystal panel substrate W, and 310b, a pair of upper and lower transport conveyors 320b and 320a, which are arranged close to each other between the support columns 310a and 310b, and the pair of transport conveyors 320a and 320b are arranged in a relative manner. And a support shaft 320 that holds and supports the support columns 310a and 310b in a rotatable manner. Further, both of the conveyors 320a and 320b have the same configuration as the conveyor table 240a that constitutes the movable table 240. That is, the transfer conveyors 320a and 320b are similar to the substrate mounting plate (table main body), in which a metal plate member having air holes formed on the front surface portion is formed with air holes and the back surface is corrugated. A belt is attached so as to be able to travel, and, similar to the conveyor table 240a, intake air flow and jet air flow are supplied to driving means for traveling the conveyor belt and air holes on the surface of the table body 241. An air flow generating device is provided. Further, on the downstream side of the reversing device 300, a second scribing device 400 for forming a scribe line on the back surface of the liquid crystal panel substrate W that is reversed by the reversing device 300 is provided.

  The second scribing device 400 has the same configuration as the first scribing device 200. Briefly, as shown in FIGS. 1 and 4, the second scribe device 400 includes a scribe base 410 fixed to the installation surface, and a movable slidably provided on the scribe base 410. Position adjustment for adjusting the position of the liquid crystal panel substrate W mounted on the table 440 and the frame member 420 fixed to the position adjustment region 400a of the scribe base 410 and mounted on the movable table 440 And a scribe mechanism 430 that is provided in the scribe region 400b of the scribe base 410 and forms a scribe line on the surface of the liquid crystal panel substrate W placed on the movable table 440.

  Further, a dividing / unloading device 500 is provided on the downstream side of the second scribing device 400, and the dividing / unloading base 510 is provided with a loading / unloading area 500a and an unloading area 500b. The liquid crystal panel substrate W is carried into the carry-in division area 500a of the carry-out base 501 from the second scribing device 400 on the upstream side, and steam is applied to the scribe line of the liquid crystal panel substrate W carried into the carry-in division area 500a. Thus, the liquid crystal panel substrate W is divided into individual liquid crystal panels DW by utilizing thermal strain caused by a rapid temperature rise. Further, unloading mechanisms 520, 530a and 530b for unloading the divided liquid crystal panel DW are formed in the unloading area 500b of the divided unloading base 510. Note that conveyors are used for these carry-out mechanisms.

  Next, the operation will be described.

  9 and 10 are diagrams for explaining the operation of the substrate cutting system according to the first embodiment. FIG. 9 shows a state where the liquid crystal mother panel in FIG. 1 has moved to the downstream side, and FIG. 10 shows a scribing apparatus. It is a top view which shows a mode that a movable table rotates in this position adjustment area | region.

  First, in the loader 100, the liquid crystal panel substrate W stored in the stock unit (not shown) is conveyed to the vicinity of the first scribing device 200 by the conveyor 120 attached to the loader base 11 (see FIG. 1). At this time, in the first scribing device 200, the movable table 240 is located in the position adjustment region 200a on the upstream side of the scribing base 210. In the conveyor table 240a of the movable table 240, the conveyor belt 245 is The loader 100 runs in the same direction at the same speed as the conveyor belt. For this reason, the liquid crystal panel substrate W conveyed to the vicinity of the first scribing device 200 by the conveyor of the loader 100 is moved from the conveyor 120 of the loader 100 onto the movable table 240 of the first scribing device 200 as it is. (See FIG. 9).

  When the liquid crystal panel substrate W completely moves on the movable table 240 of the first scribing device 200 in this way, the conveyor belt of the movable table 240 stops traveling, and then the movable table 240 is placed on the movable table 240. The liquid crystal panel substrate W is moved so as to be positioned at the center of the region surrounded by the U-shaped frames 220a and 220b and the reinforcing frames 220c and 220d (see FIGS. 5 and 6).

  Thereafter, the position adjustment device 260 attached to each frame adjusts the position of the liquid crystal panel substrate W with respect to the conveyor table 240a of the movable table 240.

  Specifically, in the movable table 240, the liquid crystal panel substrate W is slightly floated on the conveyor table 240a by the flow of air ejected from the air holes 241a of the table body 241. Thereafter, the horizontal cylinder 263 descends to a position where the side surface of the contact disk 264 a faces the end surface of the liquid crystal panel substrate W due to the extension of the elevating cylinder 261. Further, as the horizontal cylinder 263 extends, the bending arm 264 moves so that the contact disk 264a presses the side surface of the liquid crystal panel substrate W. Thereby, the position of the liquid crystal panel substrate W on the conveyor table 240a is finely adjusted.

  In this way, when the position adjustment of the liquid crystal panel substrate W on the conveyor table 240a is completed, the liquid crystal panel substrate W is moved to the conveyor table 240a by the intake air flow from the air holes 241a of the table body 241 in the movable table 240. Make it adsorbed.

  In the conveyor table 240a of the movable table 240, a conveyor belt 245 is attached to the table body 241, and the air holes 241a formed in the table body 241 and the air holes 245a1 formed in the conveyor belt 245 are identical. Although not done, the conveyor belt 245 has a two-layer structure of a urethane layer 245a on the front surface side and a fabric layer 245b on the back surface side, and the lower surface of the back surface side fabric layer 245b in contact with the surface of the table body 241 is Since it has a corrugated shape, ventilation from the air holes 241a of the table body 241 under the conveyor belt to the air holes 245a1 of the conveyor belt 245 is ensured through the back surface of the conveyor belt. For this reason, the liquid crystal panel substrate W is floated or adsorbed on the table body 241 by the air holes 245a1 of the conveyor belt 245 by the air flow or the suction air flow from the air holes 241a of the table body 241. Therefore, a sufficient jet air flow or intake air flow is generated on the surface of the conveyor belt 245. In addition, the back surface side material of this conveyor belt should just be a porous material which has not only a cloth material but flexibility.

  The movable table 240 slides on the scribe base 210 and moves to the scribe area 200b, so that the liquid crystal panel substrate W placed on the conveyor table 240a of the movable table 240 is disposed in the scribe area 200b. The scribing mechanism 230 is scribed.

  Specifically, before the movable table 240 moves to the scribe area 200b of the scribe base 210, in the scribe mechanism 230, a plurality of scribe heads 250a to 250d are placed on the guide bar 232 attached to the side surface of the horizontal support 230c. In this state, the cutter tips 253 attached to the lower ends of the scribe heads 250a to 250d are lowered to the scribe position by the actuator 251.

  In this state, when the movable table 240 passes under the scribe heads 250a to 250d, the scribe heads 250a are placed on the surface of the liquid crystal panel substrate W placed on the conveyor table 240a of the movable table 240. A plurality of first scribe lines S1 are formed at regular intervals by the cutter tips 253 of ~ 250d (see FIG. 8). Thereafter, the cutter chip 253 of each scribe head rises to a position (non-scribe position) where it does not contact the surface of the liquid crystal panel substrate W on the conveyor table 240a of the movable table 240. In this state, the movable table 240 is temporarily adjusted in position. Returning to the region 200a, the conveyor table 240a of the movable table 240 is rotated so that the liquid crystal panel substrate W is rotated 90 degrees as shown in FIG.

  Thereafter, the position of the liquid crystal panel substrate W is adjusted on the conveyor table 240a of the movable table 240 as necessary, and the arrangement intervals of the plurality of scribe heads 250a to 250d are further set. In this state, when the movable table 240 passes again below the scribe heads 250a to 250d, each of the scribes is placed on the surface of the liquid crystal panel substrate W placed on the conveyor table 240a of the movable table 240. A plurality of second scribe lines S2 perpendicular to the first scribe line S1 are formed by the cutter chips 253 of the heads 250a to 250d (see FIG. 8).

  Thereafter, the movable table 240 moves to the downstream end of the scribe base 210 of the first scribing apparatus 200, and in this state, the conveyor belt 245 of the conveyor table 240a is caused to travel. At this time, in the reversing device 300 arranged on the downstream side of the first scribing device 200, the conveyor belts (not shown) of the upper and lower conveyors 320a and 320b are the conveyor belts of the conveyor table 240a of the movable table 240. The liquid crystal panel substrate W inserted between the two conveyors 320a and 320b travels at the same traveling speed as H.245 so as to be transported downstream. When the transfer of the liquid crystal panel substrate W from the first scribing device 200 to the reversing device 300 is completed, in the reversing device 300, the pair of upper and lower conveyor tables 320a and 320b adsorb the liquid crystal panel substrate W between them. While being held, the liquid crystal panel substrate W is rotated 180 degrees around the rotation support shaft 320 so that the front and back of the liquid crystal panel substrate W are reversed.

  After the liquid crystal panel substrate W is turned upside down in this way, the movable table 440 of the second scribe device 400 arranged on the downstream side of the reversing device 300 is moved to the upstream end side of the scribe base 410. The conveyor belts of the pair of upper and lower conveyor tables 320a and 320b of the reversing device 300 are run, and at the same time, the conveyor belt of the movable table 440 of the second scribing device 400 is run. As a result, as shown in FIG. 9, the liquid crystal panel substrate W is transported on the movable table 440 of the second scribing device 400 from between the pair of upper and lower transport conveyors 320 a and 320 b of the reversing device 300.

  Next, in the second scribing device 400, the movable table 440 is a position adjustment area 400 a that also serves as a carry-in area of the scribe base 410, and the liquid crystal panel substrate placed on the conveyor table of the movable table 440. W is adjusted in position. Specifically, similarly to the position adjustment of the liquid crystal panel substrate W in the first scribing apparatus 200, the movable table 440 is a position attached to the frame member 420 in the position adjustment region 400a of the scribe base 410. The position of the liquid crystal panel substrate W is adjusted with respect to the conveyor table of the movable table 440 by an adjusting device (not shown).

  When this position adjustment is completed, the movable table 440 moves to the scribe area 400b, so that the liquid crystal panel substrate W arranged on the movable table 440 is scribed by the scribe mechanism 430 arranged in the scribe area 400b. The In the second scribe device 400, except that a scribe line is formed on the back surface of the liquid crystal panel substrate W, exactly the same as the scribe line is formed on the liquid crystal panel substrate W in the first scribe device 200, The liquid crystal panel substrate W is scribed, and a plurality of first scribe lines S1 and a plurality of second scribe lines S perpendicular to the first scribe lines S1 are formed on the back side of the liquid crystal panel substrate W (see FIG. 8). ).

  In this manner, after the scribe line is formed on the back surface of the liquid crystal panel substrate W by the second scribe device 400, the movable table 440 is moved to the downstream end of the second scribe device 400, and then the second scribe device 400 is moved. The conveyor belt of the movable table of the scribing device 400 is run, and at the same time, the conveyor belt of the conveyor 520 of the cutting and unloading device 500 located on the downstream side of the second scribing device 400 is run. As a result, as shown in FIG. 9, the liquid crystal panel substrate W is transferred from the movable table 440 of the second scribing device 400 to the dividing region 500 a that also serves as the loading region of the dividing and unloading device 500.

  In the panel dividing / unloading device 500, like the dividing / unloading device 50 in the conventional processing system 1, in the dividing region 500a, beam-like steam is applied to the portion of the liquid crystal panel substrate W where the scribe line is formed, The liquid crystal panel substrate W is divided into a plurality of liquid crystal panel substrates DW along the scribe lines due to thermal distortion due to a rapid temperature rise in the portion where the steam is applied. Thereafter, the liquid crystal panel DW obtained by dividing the liquid crystal mother panel is carried out from the substrate cutting system (substrate cutting line) 1000 by a transport mechanism such as the pair of conveyors 530a and 530b.

  Thus, in the first embodiment, in the substrate cutting system 1000 that forms scribe lines on the front and back surfaces of the liquid crystal panel substrate W and divides the liquid crystal panel substrate W along the scribe lines, the liquid crystal panel in the scribe device Since the movable table 240 on which the substrate W is placed has a structure in which the conveyor belt 245 is attached to the substrate placement surface of the table body 241 and the liquid crystal panel substrate W is transported on the movable table, the upstream side of the scribe device In addition, by using a belt conveyor as a transport mechanism for the liquid crystal panel substrate W in the processing device on the downstream side and the like, the liquid crystal panel substrate W is separately carried between the upstream and downstream processing devices of the scribe device. There is no need to use a transport mechanism. Further, in the scribing apparatus, it is not necessary to open the upstream carry-in area and the downstream carry-out area, and the area occupied by the scribing apparatus on the processing line can be reduced. As a result, the processing space can be reduced.

  In addition, since the carry-in or carry-out to the scribe device is performed by a belt conveyor, when the liquid crystal panel substrate W is conveyed, the entire liquid crystal panel substrate is supported by the conveyor, and the thinned liquid crystal panel substrate It is also possible to eliminate the problem of developing into a defect such as display unevenness due to local support by the suction pad of W.

  Further, the conveyor belt 245 mounted on the table body 241 of the movable table 240 is configured by a cloth material having a rough back surface, and the surface of the rough cloth material contacting the upper surface of the table body is corrugated. Therefore, even if the vent hole (air hole) 241a of the table main body 241 and the vent hole (air hole) 245a1 formed in the belt 245 do not coincide with each other, the vent hole of the table main body under the belt and the belt Ventilation is ensured between the air holes formed in the first and second liquid crystal panels, and the liquid crystal panel substrate W can be floated and sucked on the conveyor table 240a of the movable table 240. In other words, even if the stop position of the conveyor belt is a position where the position of the air hole of the table body under the conveyor belt and the position of the air hole of the conveyor belt do not coincide, Thus, ventilation from the vent hole 241a of the table main body 241 under the conveyor belt to the vent hole 245a1 of the conveyor belt 245 is ensured. For this reason, the liquid crystal panel substrate W can always be floated or sucked on the conveyor belt regardless of the stop position of the conveyor belt.

  Further, in the scribe heads 250a to 250d, by using a linear servo head as an actuator for moving the cutter chip up and down, the followability of the cutter chip with respect to the unevenness of the substrate can be improved.

  In the above embodiment, as a scribing apparatus, a movable table on which a bonding material (for example, a liquid crystal panel substrate) on which two brittle substrates are bonded is moved with respect to the scribe head, and the movable table is placed on the movable table. Although the apparatus for scribing the mounted liquid crystal panel substrate is shown, the scribing apparatus has a fixed table for mounting the liquid crystal panel substrate and fixed to the base, and includes the scribing head or the scribing head. The scribing mechanism may be moved with respect to the fixed table to scribe the liquid crystal panel substrate placed on the fixed table. For scribing the table on which the liquid crystal panel substrate is placed and the liquid crystal panel substrate The liquid crystal panel substrate placed on the table is scribed by relative movement with the scribe head. Bayoi.

  Moreover, in the said embodiment, although the bonded substrate material (for example, liquid crystal panel substrate) which bonded two glass plates was mentioned as a brittle board | substrate, this single brittle board | substrate etc. may be sufficient as this brittle board | substrate. .

  In the above embodiment, the scribing device has a scribing mechanism having a plurality of scribing heads, but the scribing device may have a scribing mechanism having only a single scribing head.

  As mentioned above, although this invention has been illustrated using preferable embodiment of this invention, this invention should not be limited and limited to this embodiment. It is understood that the scope of the present invention should be construed only by the claims. It is understood that those skilled in the art can implement an equivalent range based on the description of the present invention and the common general technical knowledge from the description of specific preferred embodiments of the present invention. It is understood that the patent documents cited in the present specification should be incorporated by reference into the present specification in the same manner as the content itself is specifically described in the present specification.

  The present invention relates to a scribing apparatus for scribing (scribing) a brittle substrate material on a conveyor that conveys the brittle material substrate, and to a scribing apparatus in the field of a substrate cutting system equipped with such a scribing apparatus. Can be carried in and out without using a separate transport mechanism, which can reduce the space for disposing the transport mechanism and avoid local support of the liquid crystal mother panel when transporting the liquid crystal mother panel. The occurrence of defects such as display unevenness can be eliminated, and even when the brittle material substrate is scribed on a belt conveyor that conveys the brittle material substrate, the position of the vent holes in the table below the belt Regardless of the positional relationship with the position of the vent hole of the belt, the brittle material substrate is sucked or floated on the table via the belt. One in which it is bet.

FIG. 1 is a plan view for explaining a substrate cutting system according to Embodiment 1 of the present invention, and schematically shows processing lines constituting the substrate cutting system of Embodiment 1. FIG. FIG. 2 is a perspective view for explaining the substrate cutting system according to the first embodiment, and schematically shows a part of a scribe device (first scribe device) installed in the processing line. FIG. 3 is a perspective view for explaining the substrate cutting system according to the first embodiment, and schematically shows the configuration of the position adjustment region of the scribe device (first scribe device). FIG. 4 is a perspective view for explaining the substrate cutting system according to the first embodiment. The substrate reversing device installed in the processing line and the scribing device (second scribing device) arranged downstream thereof. The structure of the area is schematically shown. FIG. 5 is a plan view for explaining the substrate cutting system according to the first embodiment, showing a position adjustment region of the first scribe device and a part of the scribe region adjacent thereto. FIG. 6 is a side view for explaining the substrate cutting system according to the first embodiment, and shows a position adjustment region of the first scribe device and a part of the scribe region adjacent thereto. FIG. 7 is a cross-sectional view for explaining the substrate cutting system according to the first embodiment. FIG. 7A shows a structure of a movable table mounted on the scribe device and a conveyor belt mounted on the movable table. FIG. 7B shows the structure of the surface of the movable table mounted on the scribe device of the system. FIG. 8 is a cross-sectional view illustrating the substrate cutting system according to the first embodiment, and shows a liquid crystal panel substrate W on which a scribe line is formed by a scribe device of the system. FIG. 9 is a plan view for explaining the operation of the substrate cutting system according to Embodiment 1, and shows a state in which the liquid crystal mother panel in FIG. 1 has moved to the downstream side. FIG. 10 is a plan view for explaining the operation of the substrate cutting system according to the first embodiment, and shows how the movable table rotates in the position adjustment region of the scribe device. FIG. 11 is a block diagram showing a conventional substrate cutting system 1. FIG. 12 is a perspective view for explaining a first transport mechanism 70 constituting the conventional substrate cutting system 1. FIG. 13 is a perspective view for explaining a scribe mechanism 23 constituting the conventional substrate cutting system 1. FIG. 14 is a plan view for explaining the operation of the conventional substrate cutting line, and shows a state in which the liquid crystal panel substrate which is the substrate to be processed in FIG. 11 has moved to the downstream side.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Loader 110 Loader base 200 First scribing device 200a Position adjustment area 200b Scribing area 210, 410 Scribe base 210a, 210b Guide rail 220a, 220b Side-shaped frame 220c, 220d Reinforcement frame 230, 430 Scribing mechanism 240, 440 Movable table 240a Conveyor table 241 Table body 242 Rotation support mechanism 243 Movable block 245 Conveyor belt 245a Urethane layer 245b Fabric layer 246 Table mounting tool 247 Component mounting stay 247a, 247b Tension roller 247d Rotation drive shaft 247e Drive roller 250a-250d Scribe head 251 Actuator 252 Slide block 253 Cutter chip 256 Positioning camera 260 Position adjustment device 261 Elevating cylinder 262 Horizontal cylinder 263 Parts mounting bracket 264 Curved arm 264a Contact disk 300 Inversion device 320a, 320b Conveyor 400 Second scribing device 500 Dividing and unloading device 500a Loading dividing area 500b Unloading area 510 Dividing Unloading base 520, 530a, 530b Unloading mechanism 1000 Substrate cutting system

Claims (9)

  1. A brittle substrate placed on the table by a relative movement between the table and the scribe head, comprising a table for placing the brittle substrate and a scribe mechanism having a scribe head for forming a scribe line on the brittle substrate. A scribing device for forming a scribe line on the surface of a substrate,
    The table is a belt conveyor that conveys the brittle substrate, and is attached so that the belt runs on the surface of the table.
    A vent is formed on the surface of the table,
    The belt is formed with air holes so as to penetrate the belt.
    A scribing device in which a ventilation layer is formed on the back surface of the belt to ventilate the ventilation holes of the table surface and the ventilation holes of the belt.
  2. The brittle substrate is a bonding material substrate having a structure in which two substrates are bonded together,
    The scribe mechanism is provided on a first region of a base disposed on an installation surface, and has a scribe head for forming a scribe line on the bonding material substrate,
    The table is provided on the base so as to be movable between the first region and a second region adjacent thereto, and has a belt conveyor for transporting the bonded substrate, and the bonding material A movable table for placing a substrate on the belt conveyor;
    The scribe line is moved by the scribe mechanism by the movement of the movable table from the second area to the first area in a state where the bonding material substrate is placed on the belt of the belt conveyor. The scribing device according to claim 1, wherein the scribing device is formed on a surface of the laminated material substrate.
  3. The movable table is
    A substrate mounting plate for mounting the bonding material substrate;
    A rotation support mechanism for rotatably supporting the substrate mounting plate in a horizontal plane;
    The rotation support mechanism is attached, and has a movable block movably attached to the base,
    The substrate mounting plate is attached so that a belt of the belt conveyor can run on the mounting surface, and the bonding material substrate is mounted on the mounting surface via the belt. Item 3. The scribing device according to Item 2.
  4. The substrate mounting plate has a plurality of air holes formed on the surface thereof,
    The belt of the belt conveyor has a plurality of air holes formed so as to penetrate the belt, and the back surface of the belt contacting the substrate mounting plate has a corrugated shape. The scribing device according to claim 3 , wherein an intake air flow or a jet air flow is generated in the air vent of the belt by the air flow generated in the belt.
  5. The scribing apparatus according to claim 4, wherein the belt of the belt conveyor has a two-layer structure of a surface side layer on which the bonding material substrate is placed and a fabric layer on the back side.
  6. The second region of the base is a rectangular position adjustment region for adjusting the position of the bonding material substrate placed on the substrate placement plate of the movable table, and each of the position adjustment regions A plurality of position adjustment devices are provided on the side,
    The scribing device according to claim 4, wherein the plurality of position adjusting devices press a side surface of the bonding material substrate to adjust the position of the bonding material substrate with respect to the substrate mounting plate of the movable table.
  7. When the position of the bonding material substrate placed on the substrate mounting plate of the movable table is adjusted in the second region, the bonding material substrate is generated in the vent hole of the belt of the belt conveyor. The scribing apparatus according to claim 6, wherein the scribing apparatus floats on the substrate mounting plate of the movable table by the jetted air flow.
  8. Said second region to move the movable table to said first region, when forming a scribe line on a surface of the lamination material substrate by the scribing mechanism,該貼combined material substrate, said belt conveyor The scribing device according to claim 6, wherein the scribing device is fixed to the substrate mounting plate of the movable table by an intake air flow generated in a vent hole of the belt.
  9. A substrate cutting system for creating a panel substrate to be a product part by cutting a bonding material substrate having a structure in which a brittle substrate is bonded,
    A first scribe device for forming a scribe line on the surface of the bonding material substrate;
    A reversing device for reversing the front and back of the bonding material substrate having a scribe line formed on the surface;
    A second scribing device that forms a scribe line on the back surface of the bonding material substrate that has been turned upside down by the reversing device;
    A substrate cutting device for cutting a bonding material substrate on which both scribe lines are formed by the first and second scribe devices;
    Each scribe device is
    A table on which the brittle substrate is placed and a scribe mechanism having a scribe head for forming a scribe line on the brittle substrate, and placed on the table by relative movement of the table and the scribe head. A scribe line is formed on the surface of the brittle substrate,
    The table is a belt conveyor that conveys the brittle substrate, and is attached so that the belt runs on the surface of the table.
    A vent is formed on the surface of the table,
    The belt is formed with air holes so as to penetrate the belt.
    A substrate cutting system in which a ventilation layer is formed on the back surface of the belt to ventilate the ventilation holes of the table surface and the ventilation holes of the belt.
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JP5349550B2 (en) * 2011-07-20 2013-11-20 三星ダイヤモンド工業株式会社 Scribing equipment
JP5353978B2 (en) * 2011-09-05 2013-11-27 三星ダイヤモンド工業株式会社 Cutting device
JP6126396B2 (en) * 2013-02-07 2017-05-10 三星ダイヤモンド工業株式会社 Substrate processing equipment
JP6064684B2 (en) 2013-03-05 2017-01-25 三星ダイヤモンド工業株式会社 Substrate processing system and substrate inversion apparatus
JP6059565B2 (en) * 2013-03-13 2017-01-11 三星ダイヤモンド工業株式会社 Adsorption reversing device
JP6259891B2 (en) * 2016-11-09 2018-01-10 三星ダイヤモンド工業株式会社 Substrate processing equipment
JP6227098B2 (en) * 2016-11-22 2017-11-08 三星ダイヤモンド工業株式会社 Substrate processing equipment

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JP4027700B2 (en) * 2002-03-26 2007-12-26 中村留精密工業株式会社 Scribe and break device
CN100572004C (en) * 2004-03-15 2009-12-23 三星钻石工业株式会社 Substrate dividing system, substrate manufacturing equipment, substrate scribing method and substrate cutting method
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