JP2006317484A - Method for manufacturing electro-optic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an electro-optic device for reliably fixing a substrate for an electro-optic device and for improving the work efficiency while preventing damages on the substrate in a working process while the substrate for an electro-optic device is fixed. <P>SOLUTION: The method for manufacturing an electro-optic device comprising a substrate for an electro-optic device and an electro-optic material held by the substrate for an electro-optic device is carried out by mounting the substrate on an air permeable sheet placed on a fixed base and sucking and fixing the substrate for an electro-optic device through the air permeable sheet. As the air permeable sheet has conductivity, semiconducting property or the like, the work efficiency can be further improved. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method for manufacturing an electro-optical device. In particular, the present invention relates to a method of manufacturing an electro-optical device that can be securely fixed and operated without damaging the electro-optical device substrate in a process of fixing and operating the electro-optical device substrate.

Conventionally, a liquid crystal panel used in a liquid crystal device which is an aspect of an electro-optical device forms a cell structure by bonding an element substrate and a counter substrate with a sealing material, and encloses a liquid crystal material inside the cell structure. Configured.
When manufacturing such a liquid crystal panel, in order to increase manufacturing efficiency, after forming a large panel by bonding the first mother substrate and the second mother substrate including a plurality of cell regions with a sealing material, By dividing the large format panel, a large number of liquid crystal panels are manufactured at the same time.
More specifically, first, a large format panel is formed by bonding first and second mother substrates including a plurality of cell regions. Next, a first scribe line is formed on the first and second mother substrates along a first division line for dividing the large panel into a strip-shaped intermediate panel, and then along the scribe line. By dividing, a strip-shaped intermediate panel is formed. Next, a second scribe line is formed on the first and second intermediate substrates constituting the intermediate panel along a second division line for dividing the intermediate panel into a single liquid crystal panel. A plurality of liquid crystal panels are manufactured by dividing along a line.

Here, during the process of manufacturing the liquid crystal device, the panel and the substrate are placed on the fixed base, such as the step of forming the scribe line and the step of dividing the substrate along the scribe line. A process is included. In these processes, if a panel or board is placed directly on a fixed base made of a metal material such as stainless steel or aluminum, cracks may occur in the board due to impact during the work. In some cases, the substrate may be scratched.
In addition, when static electricity is generated during work and the substrate or panel is charged, elements on the substrate may be destroyed by static electricity or cause a defect in a manufactured liquid crystal device.

In view of this, there has been proposed a manufacturing apparatus in which a conductive sheet having a buffering effect is disposed on a fixed base, and a panel or a substrate is placed on the sheet to perform work. More specifically, as shown in FIGS. 12A to 12B, the mounting surface 662 on which the liquid crystal cell LC is placed is a supporting substrate for the first jig 651 as a manufacturing apparatus in which the conductive sheet is placed. A buffer material 671 disposed on the buffer material 661, a conductive sheet 672 disposed on the buffer material 671 and on which the liquid crystal cell LC is placed, and an adhesive 673 for bonding the buffer material 671 and the conductive sheet 672 to each other. A single-wafer sealing apparatus configured to be provided is disclosed (for example, see Patent Document 1).
In addition, as a conductive sheet that can be used in such a device, a heat-resistant fiber cloth is impregnated with a dispersion containing conductive powder such as fluororesin and carbon or metal powder to make it conductive or semiconductive, thereby cushioning There is a dustproof and heat-resistant cushion that covers the body. (For example, refer to Patent Document 2).
JP 2004-233841 A (Claims FIGS. 3 and 7) Japanese Patent Laying-Open No. 2005-53999 (Claims)

  However, although the conductive sheet used in Patent Document 1 and the dust-proof and heat-resistant cushion disclosed in Patent Document 2 can prevent charging to the panel and the substrate or prevent adhesion of dust, The mounted panel or substrate cannot be fixed. That is, since each conductive sheet and dust-proof and heat-resistant cushion do not have air permeability, for example, when used in a device for sucking and fixing a mounted substrate or the like from the lower side of the fixing base, the suction is performed. There is a problem in that the substrate cannot be fixed depending on the means. Therefore, another stopper or adhesive tape has to be used, and the work efficiency has been reduced. In particular, when an adhesive tape is used, when the adhesive tape is peeled off after work, the adhesive may remain on the substrate, resulting in a defective product or time and effort to remove. there were.

Thus, the inventors of the present invention have made diligent efforts and found that such a problem can be solved by using a breathable sheet as a sheet to be placed on a fixed base, and have completed the present invention.
That is, according to the present invention, in the process of fixing and working the electro-optical device substrate, the electro-optical device substrate can be securely fixed without damaging the electro-optical device substrate, thereby improving the working efficiency. Another object of the present invention is to provide a method for manufacturing an electro-optical device.

According to the present invention, there is provided a method for manufacturing an electro-optical device including an electro-optical device substrate and an electro-optical material held on the electro-optical device substrate, wherein the electro-optical device substrate is placed on a fixed base. The electro-optical device manufacturing method is characterized in that the electro-optical device substrate is placed on the air-permeable sheet disposed on the substrate and the electro-optical device substrate is sucked and fixed through the air-permeable sheet. Can be solved.
That is, since the sheet placed on the fixed base and on which the electro-optical device is placed is a breathable sheet, the electro-optical device substrate can be sucked through the sheet, and The optical device substrate can be securely fixed. Therefore, the work can be performed efficiently without causing a positional shift or the like.

In carrying out the method for manufacturing the electro-optical device of the present invention, the breathable sheet is preferably a conductive or semiconductive sheet.
By carrying out in this way, it is possible to prevent static electricity from being charged on the electro-optical device substrate even when static electricity is generated during the work.

In carrying out the method for manufacturing the electro-optical device of the present invention, it is preferable to set the tensile strength of the breathable sheet to a value within the range of 0.0150 to 0.03 M · Pa.
By carrying out in this way, the breathable sheet can exhibit cushioning properties, and the damage to the electro-optical device substrate can be further suppressed, while the electro-optical device substrate is prevented from sinking into the sheet and work accuracy is improved. Can be improved.
In addition, the tensile strength of a breathable sheet means the value of the tensile strength measured according to ASTM D882.

In carrying out the method for manufacturing the electro-optical device of the present invention, it is preferable that the breathable sheet is subjected to a water repellent treatment.
By carrying out in this way, even when a step of using water is included during work, even if the breathable sheet is touched with a wet hand, it is difficult to deteriorate.

In carrying out the method of manufacturing the electro-optical device of the present invention, it is preferable that the air permeability of the air permeable sheet is set to a value within the range of ¹ to 10 cm ³ / cm ² · sec.
By carrying out in this way, the electro-optical device substrate can be reliably sucked and fixed while preventing the electro-optical device substrate from sinking into the sheet and reducing the working accuracy.
In addition, the air flow rate of the air permeable sheet refers to the value of the air flow rate measured according to the measurement method A defined in JIS L1096.

In carrying out the method of manufacturing the electro-optical device of the present invention, it is preferable to use a sheet obtained by coating the surface of the glass cloth with a fluororesin-containing material mixed with conductive carbon as the breathable sheet.
By implementing in this way, it can be set as the air permeable sheet excellent in electroconductivity, buffer property, and water resistance, respectively, and can improve working efficiency over a long period of time.

In carrying out the method for manufacturing the electro-optical device of the present invention, it is preferable to dispose a polyethylene terephthalate (PET) film between the breathable sheet and the fixing base.
By carrying out in this way, when the electro-optical device substrate is placed on the air-permeable sheet, a buffering effect can be provided, for example, a crack or the like occurs in the electro-optical device substrate. Can be prevented.
The PET film may be matted.

In carrying out the method for manufacturing the electro-optical device of the present invention, it is preferable to dispose a urethane sheet between the breathable sheet and the fixing base.
By carrying out in this way, a buffering effect can be further provided without impairing the air permeability.

In carrying out the method of manufacturing an electro-optical device according to the present invention, it is preferable to include a step of forming a cutting line for dividing the substrate for an electro-optical device, and to perform suction fixation in this step.
By carrying out in this way, work can be performed on the substrate for an electro-optical device that is securely fixed, so that a scribe line can be accurately formed along the planned fracture line.

In carrying out the method of manufacturing the electro-optical device of the present invention, it is preferable to include a step of dividing the electro-optical device substrate along the cutting line, and to perform suction fixation in this step.
By carrying out in this way, the work can be performed on the electro-optical device substrate that is securely fixed, so that the electro-optical device substrate can be accurately divided along the scribe line.

Embodiments relating to a method of manufacturing an electro-optical device according to the invention will be specifically described below with reference to the drawings.
However, this embodiment shows one aspect of the present invention and does not limit the present invention, and can be arbitrarily changed within the scope of the present invention.

As shown in FIG. 1, this embodiment is a method for manufacturing an electro-optical device including an electro-optical device substrate and an electro-optical material held on the electro-optical device substrate. The electro-optical device manufacturing method is characterized in that the electro-optical device substrate is placed on a breathable sheet placed on a fixing base and the electro-optic device substrate is sucked and fixed through the breathable sheet.
In addition, the method for manufacturing the electro-optical device according to the present embodiment will be described taking as an example a method for manufacturing a liquid crystal device including an element substrate and a color filter substrate as substrates for the electro-optical device. In the following description, the cell structure means a state in which the element substrate and the color filter substrate are bonded together with a sealing material, and the liquid crystal material is not yet injected. The liquid crystal panel means a liquid crystal material in the cell structure. The liquid crystal device means a state in which electronic components, a circuit board, a backlight, and the like are electrically connected to the liquid crystal panel.

1. Breathable Sheet (1) Basic Configuration First, the breathable sheet used in the method for manufacturing an electro-optical device of the present invention will be described.
As shown in FIG. 1A, the air permeable sheet is a sheet 13 having air permeability disposed on the fixing base 11 of the electro-optical device substrate. In other words, the electro-optic device substrate is not placed directly on a fixed base made of a metal material such as aluminum or stainless steel, but is placed on a breathable sheet so that scratches caused by direct contact, It is possible to prevent cracks and the like due to impact when the optical device substrate is processed. In addition, since the air-permeable sheet has air permeability, when the electro-optical device substrate is sucked from the lower side of the fixing base, the electro-optical device substrate is securely sucked and fixed through the air-permeable sheet. I can keep it.
In addition, as will be described later, as shown in FIG. 1B, in addition to the breathable sheet 13, for example, a urethane sheet 14 that can exhibit buffering properties is disposed on the fixed base 11. It is also possible to implement.

(2) Airflow rate The airflow rate of such a breathable sheet is preferably set to a value in the range of ¹ to 10 cm ³ / cm ² · sec. This is because if the air permeability of the air permeable sheet is less than 1 cm ³ / cm ² · sec, the force for sucking the electro-optical device substrate may be weakened and may not be securely fixed. is there. On the other hand, if the air flow rate of the air permeable sheet exceeds 10 cm ³ / cm ² · sec, the strength of the air permeable sheet decreases, and the electro-optical device substrate easily sinks into the sheet, resulting in a decrease in work efficiency. Because there is.
Therefore, it is more preferable to set the air flow rate of the air permeable sheet to a value in the range of 1.2 to 8 cm ³ / cm ² · sec, and to a value in the range of 1.5 to 5 cm ³ / cm ² · sec. More preferably.
In addition, the air flow rate of the air permeable sheet refers to the value of the air flow rate measured according to the measurement method A defined in JIS L1096.

(3) Breathable density Moreover, it is preferable that the breathable density of this breathable sheet is uniform over the whole sheet. This is because when the electro-optical device substrate is sucked, if the air permeability density varies, one side of the electro-optical device substrate sinks into the sheet, and the working accuracy may be lowered. is there.
For example, as shown in FIG. 2, when the scribe line 16 is formed on the electro-optical device substrate 15 and the electro-optical device substrate 15 sinks into the air-permeable sheet 13 and is inclined, the scribe line is formed. Variations in the depth of the line 16 may occur, and when dividing later, the dividing may not be performed with high accuracy.
Here, when the breathable sheet is composed of a sheet of glass cloth coated with a fluororesin-containing material, which will be described later, for example, by changing the thickness of each fiber of the glass cloth and the density of weaving, the breathable density can be increased. Can be adjusted. Further, when the breathable sheet is made of conductive rubber described later, for example, the breathable density can be adjusted by changing the diameter and number of through holes to be formed.

(4) Conductivity or semiconductivity Moreover, it is preferable that a breathable sheet is provided with electroconductivity or semiconductivity. The reason for this is to prevent static electricity from being generated depending on the work content, such as the step of dividing the substrate for the electro-optical device, and to prevent the electro-optical device substrate from being charged and damaged.
In this case, the generated static electricity can be quickly removed to prevent the electro-optical device substrate from being charged, while the external static electricity is not easily transmitted to the electro-optical device substrate. The surface resistivity of the conductive sheet is set to a value in the range of 0.1 × 10 ⁶ to 10 × 10 ⁶ Ω, and the volume resistivity is set to a value in the range of 1 × 10 ⁶ to 10 × 10 ⁶ Ω / cm. Is preferred.

(5) Tensile strength The tensile strength of the breathable sheet is preferably set to a value in the range of 0.015 to 0.03 M · Pa. This is because when the tensile strength of the breathable sheet is less than 0.015 M · Pa, the substrate for the electro-optical device easily sinks into the sheet, and the working efficiency may be lowered. For example, in the step of forming the scribe line on the substrate, as already described as the case where the air permeability density is different, there is a case where it cannot be divided with high accuracy. On the other hand, if the tensile strength of the air-permeable sheet exceeds 0.03 M · Pa, the electro-optical device substrate may be damaged by the air-permeable sheet, or cracks may be generated by impact.
Accordingly, the tensile strength of the breathable sheet is more preferably set to a value within the range of 0.018 to 0.029 M · Pa, and further preferably set to a value within the range of 0.02 to 0.028 M · Pa. .
In addition, the tensile strength of a breathable sheet means the value of the tensile strength measured according to ASTM D882.

(6) Water repellent treatment Moreover, it is preferable that the breathable sheet is subjected to water repellent treatment. This is because, for example, when removing the end material after dividing the electro-optical device substrate, the work may be performed in pure water for the purpose of eliminating the influence of static electricity. This is because the breathable sheet is not deteriorated even when the breathable sheet is touched after the operation.
Therefore, it can endure long-term use and the number of replacements can be reduced.

(7) Material As the breathable sheet having the properties as described above, for example, it is preferable to use a sheet in which a glass cloth surface is coated with a fluororesin-containing material mixed with conductive carbon. For example, as shown in FIG. 3A, a sheet 28 in which a woven glass cloth 26 is coated with a tetrafluoroethylene resin 27 mixed with conductive carbon, and the tetrafluoroethylene resin is cured. In this case, a sheet 28 having a plurality of holes for providing air permeability can be used.
With such a sheet, the substrate for the electro-optical device can be securely fixed, and an effect excellent in water resistance, conductivity, and buffering properties can be exhibited. Efficiency can be significantly improved. In addition, since the breathable sheet is coated with a fluororesin, workability can be further improved without sticking to the electro-optical device substrate. Furthermore, since such a breathable sheet is also excellent in heat resistance, it can be used for a long period of time under both environmental conditions such as a low temperature environment and a high temperature environment, for example, in a temperature range of −100 to 260 ° C. Can be used across.

As another example of such a breathable sheet, as shown in FIG. 3B, a sheet 29 made of conductive rubber mixed with conductive carbon and provided with a plurality of through holes 29a may be used. preferable.
Such a sheet is excellent in water resistance, electrical conductivity, and buffering properties, and is more durable than the above-described sheet based on glass cloth, and can be manufactured relatively easily and at low cost. .

Here, the durability of the breathable sheet shown in FIG. 3A described above, in which a fluororesin-containing material in which conductive carbon is mixed on the surface of the glass cloth, is coated will be described in detail. FIG. 4 shows the transition of the value of the surface pressing strength (kgf) indicating the suction force of the breathable sheet when the second division step described later is performed over 8 months using the breathable sheet. It is a figure. In FIG. 4, the dotted line A indicates the maximum value of the surface pressing strength, the broken line B indicates the minimum value of the surface pressing strength, and the solid line C indicates the average value of the surface pressing strength. Further, the surface pressing strength is obtained by sucking and fixing a glass piece having a thickness of 0.5 mm and a diagonal length of 2 inches on a breathable sheet and holding it for 100 seconds, while maintaining the strength (suction force) therebetween. It was measured. Furthermore, the breathable sheet to be used is data measured by exchanging with a new sheet every 3 months from the start of use.
As can be understood from FIG. 4, within the period in which the same breathable sheet is used, the surface pressing strength is stably changed without decreasing. In addition, there is no change in the surface pressing strength before and after replacement with a new sheet after 3 months, and there is almost no difference in surface pressing strength between the breathable sheet after use and the new breathable sheet. It is understood that there is no.
Thus, by using the air-permeable sheet having the above-described configuration, the mounted electro-optical device substrate can be reliably sucked and fixed without deterioration even when used for a long period of time. Work efficiency can be remarkably improved.

2. Manufacturing of Liquid Crystal Device Next, a manufacturing method of a liquid crystal device including a step of performing work by sucking and fixing the electro-optical device substrate using the above-described breathable sheet will be described.

(1) Manufacture of a large panel First, a large panel including a plurality of cell regions is manufactured by bonding a first mother substrate and a second mother substrate together with a sealing material. The first mother substrate and the second mother substrate are, for example, a first mother substrate including a plurality of cell region element substrates and a second mother substrate including a plurality of cell region color filter substrates. Can do.

When the first mother substrate is used as a mother substrate constituting the element substrate, basically, each cell region on the glass substrate as a substrate having transparency is shown in FIG. As described above, the switching element 69, the pixel electrode 63, the alignment film 85, and the like can be sequentially stacked. In the liquid crystal device, in order to enable reflection display, for example, a light reflection film made of an aluminum film or the like is provided between the glass substrate and the pixel electrode.
Here, the switching element is exemplified by a typical non-linear element such as a TFT element or a TFD element. For example, the TFT element is a three-terminal switching element 69 in which a gate electrode 71, a source electrode 73, and a drain electrode 66 are formed on a thin film semiconductor 70 such as polysilicon as shown in FIG. In such a TFT element, the source electrode and the drain electrode are interrupted when the voltage applied to the gate electrode is off. On the other hand, when a voltage is applied to the gate electrode, it is an active element in which electrons pass through the semiconductor in the direction from the source electrode to the drain electrode, or in the opposite direction, and current flows.
Further, the pixel electrode is an electrode constituting each pixel made of, for example, ITO (indium tin oxide), and is electrically connected to the drain electrode. The liquid crystal can be driven when a driving voltage is applied between the planar electrodes on the color filter substrate facing each other.
The alignment film on the pixel electrode is made of, for example, a polyimide resin and is a film for defining the alignment direction of the liquid crystal material.

Further, when the second mother substrate is a mother substrate constituting the color filter substrate, basically, each cell region on the glass substrate as a substrate having transparency is shown in FIG. ), The colored layers 37r, 37g, and 37b, the light shielding film 39, the planar electrode 33, the alignment film 45, and the like can be stacked.
Here, the colored layer usually has a predetermined color tone by dispersing a coloring material such as a pigment or a dye in a transparent resin. An example of the color tone of the colored layer is a primary color filter composed of a combination of three colors R (red), G (green), and B (blue), but is not limited to this. ), M (magenta), C (cyan), etc., and other various color tones.

As shown in FIG. 5B, the light shielding film 39 is formed in an inter-pixel region between the colored layers 37r, 37g, and 37b formed for each pixel. As this light-shielding film, for example, a colorant such as a black pigment or dye dispersed in a resin or other base material, or a colorant of three colors R (red), G (green), and B (blue) Both of which are dispersed in a resin or other base material can be used.
As shown in FIG. 5B, a planar electrode 33 made of a transparent conductor such as ITO (indium tin oxide) is formed on the colored layers 37r, 37g, 37b and the light shielding film 39. Yes.
Further, an alignment film 45 made of polyimide resin or the like is formed on the planar electrode 33.
In this embodiment, the colored layer is provided on the glass substrate on the first mother substrate side. However, the colored layer may be provided on the glass substrate on the second mother substrate side.

Next, the first mother substrate and the second mother substrate are bonded to each other with a sealant so that the surfaces on which the electrodes are formed face each other.
Here, the sealing material to be used is preferably a sealing material containing a thermosetting resin because it can be easily cured with a simple apparatus and is cheaper. Therefore, for example, a sealing material mainly composed of silicone resin, epoxy resin, phenol resin, or the like can be used.

Specifically, first, as shown in FIGS. 6A and 6B, for example, on the first mother substrate 60A, the sealing material 23 is surrounded by the screen printing or dispenser so as to surround each cell region. It is formed by patterning.
Next, the first mother substrate on which the sealing material patterned into a predetermined shape is formed is subjected to low-temperature processing (pre-baking) to evaporate the solvent in the sealing material. At this time, pre-baking can be performed under reduced pressure under a temperature condition lower than the curing temperature of the sealing material. For example, it is preferable to carry out under a temperature condition of about 35 to 70 ° C. and a pressure condition of 50 to 90 kPa. This is because by performing the pre-baking step under such conditions, the solvent remaining in the sealing material can be efficiently evaporated and the sealing material can be sufficiently degassed. Therefore, after manufacturing the liquid crystal device, display unevenness due to bubbles in the sealing material, disconnection, and the like can be effectively prevented.
Next, as shown in FIG. 6C, the large-sized panel 20A is formed by stacking and bonding the second mother substrate 30A.
In this embodiment, the sealing material is formed on the first mother board, but may be formed on the second mother board.

(2) First Dividing Step Next, as shown in FIGS. 7A to 8C, the first mother board 60A or the second mother board 30A constituting the large panel 20A is cut, A plurality of intermediate panels 20a are formed by dividing into one intermediate substrate 60a and second intermediate substrate 30a. That is, by cutting the first mother board and the second mother board only in a certain parallel direction, for example, the X direction in FIG. The strip-shaped intermediate panel 20a including the cell region is formed.

  More specifically, as shown in FIG. 7A, first, after placing the large panel 20A on the fixing base 11 on which the breathable sheet 13 in the apparatus for forming a scribe line is placed, The large panel 20 </ b> A is sucked through the breathable sheet 13 to be fixed on the fixing base 11. As a result, it is possible to reliably fix the adhesive without using another fixing tool or an adhesive such as a tape, and the working efficiency can be remarkably improved. That is, by sucking with a suction device from the lower side of the fixed base, the breathable sheet is sucked through the holes of the fixed base, and further, the breathable sheet has air permeability. The panel can be fixed by suction.

In addition, when the air-permeable sheet has the above-described predetermined tensile strength, the use of the air-permeable sheet alone can exhibit buffering properties that do not damage the first and second mother boards. it can.
On the other hand, when such tensile strength is not provided, for example, a matted PET film or urethane sheet 14 is provided between the breathable sheet 13 and the fixing base 11 as shown in FIG. Is preferably arranged. Thereby, desired buffering properties can be exhibited and damage to the electro-optical device substrate can be prevented. In this case, since these PET films, urethane sheets, and the like have air permeability, the suction fixing of the substrate for the electro-optical device is not hindered. For example, when a PET film is used, it is preferable to provide a vent hole with a needle or a safety pin.

Next, when the substrate on the upper side of the large-sized panel fixed on the fixing base, for example, as shown in FIG. As shown in FIG. 7B, the first scribe line 17a is formed along the first planned fracture line in the second mother substrate 30A. At this time, as means for forming the scribe line, for example, the rotary blade 22 shown in FIG. 7B, a laser cutter, a cutter blade, or the like can be used to form the scribe line on the surface of the substrate.
Here, when the scribe line is formed, it is preferably formed along the side where the liquid crystal injection port exists in the sealing material of each cell region. This is because liquid crystal can be efficiently injected into each substrate in the next step by carrying out in this way.

  Next, as shown in FIG. 7C, the breathable sheet 13 is disposed again with the large panel 20A turned upside down, that is, in the above example, with the first mother board 60A facing up. After being placed on the fixed base 11, the scribe lines 17b are formed on the first mother board 60A as shown in FIG. 7D in the same manner as described above.

  Next, as shown in FIG. 8 (a), the large panel 20A in which the scribe lines 17a and 17b are formed on the first mother board 60A and the second mother board 30A, respectively, is ventilated in the apparatus for dividing the panel. After mounting on the fixed base 11 on which the adhesive sheet 13 is disposed, the large panel 20 </ b> A is sucked through the breathable sheet 13 to be fixed on the fixed base 11. Thereafter, as shown in FIG. 8B, for example, by applying a force to the portion where the scribe line 17a is formed from above the large panel 20A using a shearing member 24 made of urethane or the like. As shown in FIG. 8C, the large panel 20A is divided to form a strip-shaped intermediate panel 20a. At this time, if the breathable sheet has a predetermined tensile strength value, the panel can be uniformly pressed and can be divided with high accuracy.

(3) Liquid crystal material injection step Next, in the formed intermediate panel, after injecting the liquid crystal material through the opening into the inner part of the sealing material in each cell region, a sealing material (not shown) Seal with. That is, as shown in FIG. 9, when the first mother substrate 60A and the second mother substrate 30A are cut so that the liquid crystal material injection port 23a in each cell region is in contact with the outside, Since the liquid crystal material injection ports 23a corresponding to the cell regions in the intermediate panel 20a are arranged in a line, the liquid crystal material 21 can be injected efficiently.

(4) Second Dividing Step Next, as shown in FIGS. 10A to 10D, the first intermediate substrate 60a and the second intermediate substrate 30a constituting the intermediate panel 20a are cut to form a plurality of elements. By dividing into a substrate 60 and a color filter substrate 30, the liquid crystal panel 20 as a single product is formed. That is, the single liquid crystal panel 20 is cut out and formed from a strip-shaped intermediate panel 20a including a plurality of cell regions.
Since a specific cutting method can be carried out in the same manner as described in the first division step, the description here is omitted, but also in this step, the intermediate panel is inserted through the breathable sheet. Since the work is performed with suction and fixing, the scribe line forming position and the dividing position can be accurately performed.

In the second dividing step, the outer shape of the color filter substrate is cut out smaller than the element substrate at the same time to form the substrate overhanging portion. In this region, the wiring pattern formed on the element substrate is Exposed. Accordingly, since the generation of static electricity greatly affects the wiring pattern, it is necessary to quickly remove the static electricity. Therefore, it is possible to effectively prevent the panel from being charged by using a breathable sheet having conductivity. However, in this case, when a urethane sheet or a PET film is disposed under the air permeable sheet, it is necessary to connect the ground to the air permeable sheet to easily release static electricity.
Further, when removing the end material cut out to form the substrate overhanging portion, it is preferable to work in pure water in order to prevent generation of static electricity. At this time, water will adhere to the hands of the operator, but even if the intermediate panel on the cutting device is handled as it is, if the breathable sheet is water resistant, the durability may be reduced by water. This is a preferred embodiment because it is not present.

(5) Assembling Step Next, with respect to the liquid crystal panel 20, as shown in a schematic sectional view in FIG. 11, a retardation plate (¼ wavelength plate) 47 and a predetermined position on the outer surface of the color filter substrate 30 are provided. In addition to the polarizing plate 49, a retardation plate (¼ wavelength plate) 87 and a polarizing plate 89 are also arranged on the outer surface of the element substrate 60.
Further, electronic components such as the semiconductor element 91 and the flexible circuit board 93 are connected to the liquid crystal panel 20, and a lighting device such as a backlight and a front light, a case body (not shown), and the like are provided as necessary. Thus, the liquid crystal device 10 can be manufactured by appropriately attaching.
At this time, even in the connection process of the electronic component and the flexible circuit board, the liquid crystal panel is placed on the fixing base on which the air-permeable sheet according to the present invention is arranged, and the work is performed by sucking and fixing, thereby securely securing the panel. It can be fixed and work efficiently. Further, in the case of a breathable sheet having conductivity, it is possible to prevent the liquid crystal panel from being charged with static electricity generated during work.

As described above, according to the method for manufacturing an electro-optical device of the present invention, in the process of fixing and operating the electro-optical device substrate, the electro-optical device substrate is placed on the breathable sheet. By performing the steps, the substrate can be securely fixed while preventing the substrate from being damaged, and the working efficiency can be remarkably improved. Therefore, the present invention is not limited to the above-described panel dividing step and flexible substrate connecting step, and can be applied to any step.
In addition, the liquid crystal device as an electro-optical device has been described as an example. However, the present invention is not limited to this, and an electroluminescence device, a plasma display device, and a device including an electron-emitting device (FED: Field Emission Display or SCEED It can be applied to manufacturing methods such as Surface-Conduction Electron-Emitter Display).

(A) And (b) is a figure which shows the state which carried out the suction fixation of the board | substrate for electro-optical devices, respectively using the air permeable sheet. It is a figure provided in order to demonstrate the operation defect when the board | substrate for electro-optical apparatuses inclines. (A)-(b) is a figure which shows the example of the air permeable sheet used for the manufacturing method of the electro-optical apparatus of this invention, respectively. It is a figure which shows the relationship between the use time of a breathable sheet used for this invention, and surface pressing strength. (A) And (b) is a figure provided in order to demonstrate the structure of an element substrate and a color filter substrate, respectively. (A)-(c) is a figure provided in order to demonstrate the process of bonding a 1st mother board | substrate and a 2nd mother board | substrate, and forming a large format panel. (A)-(d) is a figure provided in order to demonstrate the process of forming a scribe line in the 1st mother board and the 2nd mother board. (A)-(c) is a figure provided in order to demonstrate the process of parting a large format panel and forming an intermediate | middle panel. It is a figure provided in order to demonstrate the process of inject | pouring liquid-crystal material into each cell structure of an intermediate | middle panel. (A)-(d) is a figure provided in order to demonstrate the process of parting an intermediate | middle panel and forming a single-piece | unit liquid crystal panel. It is a schematic sectional drawing of the liquid crystal device manufactured by embodiment of this invention. It is a figure provided in order to demonstrate the fixing stand provided with the electroconductive sheet used with the manufacturing method of the conventional liquid crystal device.

Explanation of symbols

10: liquid crystal device (electro-optical device), 11: fixing base, 13: breathable sheet, 15: substrate for electro-optical device, 16: scribe line, 17a, 17b, 18a: scribe line, 20: liquid crystal panel, 20A: Large panel, 20a: Intermediate panel, 22: Rotary blade, 23: Seal material, 23a: Injection port, 24: Shear member, 26: Glass cloth, 27: Coating material containing fluororesin, 28/29: Breathable sheet, 30 : Color filter substrate, 30A: First mother substrate, 30a: First intermediate substrate, 31: Glass substrate, 33: Planar electrode, 37r, 37g, 37b: Colored layer, 39: Light shielding layer, 45: Alignment film , 60: element substrate, 60A: second mother substrate, 60a: second intermediate substrate, 61: glass substrate, 63: pixel electrode, 69: switching element (TFT element)

Claims (10)

In a method for manufacturing an electro-optical device, comprising: an electro-optical device substrate; and an electro-optical material held on the electro-optical device substrate.
The electro-optic device substrate is placed on a breathable sheet disposed on a fixed base, and the electro-optic device substrate is sucked and fixed through the breathable sheet. Manufacturing method of optical device.   The method of manufacturing an electro-optical device according to claim 1, wherein the breathable sheet is a conductive or semiconductive sheet.   3. The method of manufacturing an electro-optical device according to claim 1, wherein a tensile strength of the breathable sheet is set to a value within a range of 0.015 to 0.03 M · Pa.   The method for manufacturing an electro-optical device according to claim 1, wherein the breathable sheet is subjected to a water repellent treatment. 5. The method for manufacturing an electro-optical device according to claim 1, wherein an air flow rate of the air-permeable sheet is set to a value in a range of ¹ to 10 cm ³ / cm ² · sec.   The electro-optical device according to claim 1, wherein the breathable sheet is a sheet in which a glass cloth surface is coated with a fluororesin-containing material mixed with conductive carbon. Manufacturing method.   The method for manufacturing an electro-optical device according to claim 1, wherein a polyethylene terephthalate film is disposed between the breathable sheet and the fixing base.   The method for manufacturing an electro-optical device according to claim 1, wherein a urethane sheet is disposed between the breathable sheet and the fixing base.   The electro-optical device according to claim 1, further comprising: forming a cutting line for dividing the substrate for the electro-optical device, and performing the suction fixing in the step. Device manufacturing method.   The electro-optical device according to claim 1, further comprising a step of dividing the electro-optical device substrate along the cutting line, and the suction fixing is performed in the step. Manufacturing method.

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