CN101959814B - Glass substrate suction table, and method for processing of glass substrate - Google Patents
Glass substrate suction table, and method for processing of glass substrate Download PDFInfo
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- CN101959814B CN101959814B CN200980106707.8A CN200980106707A CN101959814B CN 101959814 B CN101959814 B CN 101959814B CN 200980106707 A CN200980106707 A CN 200980106707A CN 101959814 B CN101959814 B CN 101959814B
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- glass substrate
- sheet material
- absorptive table
- edging
- glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/068—Table-like supports for panels, sheets or the like
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Disclosed is a sheet material (18) which is intended to be adhered to a glass substrate suction table for a glass substrate-processing machine. The sheet material (18) has a hardness of 90 to 95 degrees in accordance with JIS K6253 or JIS K7215, a thickness of 0.7 mm or less, and a coefficient of kinetic friction of 0.3 or less. Preferably, the sheet material (18) has a multi-layered structure composed of at least a urethane sheet material (32) and an olefin sheet material (or a nitflon sheet material) (34), and has a total thickness of 0.7 mm or less.
Description
Technical field
The present invention relates to glass substrate absorptive table and glass base processing method, relate to the glass substrate absorptive table and the glass base processing method that the glass substrate absorption of wanting edging processing are kept via sheet material.
Background technology
For the FPD(Flat such as liquid-crystal display, plasma display Panel Display: flat-panel monitor) with glass substrate, by the cutting operation that fractures, sheet glass cutting is fractureed and is processed as predetermined rectangular shape size, by edging operation, its edge part is carried out to edging processing, manufacture thus the glass substrate of product design size.Then, this glass substrate is through being arranged on the matting of edging operation back segment and checking operation and be shifted into surface finish operation, makes the glass substrate of product thickness at this.
In the manufacturing process of such glass substrate, sheet glass hi-precision cutting is broken into predetermined size or the glass substrate after cut fractureing is carried out to edging accurately and add man-hour, after glass substrate being positioned on glass substrate absorptive table, by glass substrate securely vacuum suck keep be important.Particularly in edging processing, end surface shape processing request high precision and high-quality, therefore improve adsorptive power and glass substrate absorption remained on glass substrate absorptive table.
But, if the foreign material such as foreign matter, glass cullet of equipment are clipped between glass substrate absorptive table and glass substrate,, because this adsorptive power height can make to be adsorbed in glass substrate on glass substrate absorptive table on the contrary because these foreign material produce cut, produce the problem that the quality of glass substrate is declined.In addition, while discovery on the glass substrate of this cut after the polishing process of operation back segment finishes, exist until multiple glass substrates of producing before finding become the problem of substandard products.Therefore, generally speaking, on glass substrate absorptive table, paste sheet material and implement.
In patent documentation 1, the glass substrate absorptive table of edging device is disclosed.After loading glass substrate on this glass substrate absorptive table and being positioned on glass substrate absorptive table by position block, kept by the absorption of glass substrate absorptive table, utilize afterwards edging grinding stone to carry out edging processing.
Paste the general sheet material on glass substrate absorptive table, as shown in Figure 3, use and on glass fibre sheet 1, be coated with Teflon (TEFLON; Registered trademark) and the sheet material 3 that obtains.By means of the character of this Teflon (registered trademark) 2, glass substrate G improves with respect to the sliding of sheet material 3, on sheet material 3, the location of the glass substrate G on glass substrate absorptive table can be carried out smoothly.In addition, the label 4 of Fig. 3 is the tackiness agent of the glass substrate adsorption plane side for sheet material 3 being pasted to glass substrate absorptive table or the tackiness agent of subsidiary interleaving paper.In addition, on sheet material 3, be formed with multiple adsorption holes for vacuum suck glass substrate G, and be formed with multiple support for glass substrate is floated on glass substrate absorptive table and position blow hole.
Patent documentation 1: TOHKEMY 2003-11043 communique
Summary of the invention
But, although the sheet material shown in Fig. 3 utilizes Teflon (registered trademark) 2 and has good sliding, but can not fully suppress that the foreign material such as glass or metal-powder are clipped between sheet material 3 and glass substrate G and produce the cut of glass substrate, therefore, tackle by operations such as careful cleanings.
The present invention makes in view of such problem, its object is to provide a kind of glass substrate absorptive table and glass base processing method, when it can maintain the location of glass substrate, desired sliding and glass substrate be with respect to the confining force of absorptive table, and restrain adsorption while keeping glass substrate glass substrate produce cut.
The present invention provides a kind of glass substrate absorptive table to achieve these goals, be arranged on glass substrate processing machine, it is characterized in that, paste glass substrate adsorption plane one side of described glass substrate absorptive table sheet material according to JIS K6253(2006) or JIS K7215(1986) hardness be 90～95 degree, and thickness is below 0.7mm, kinetic friction coefficient is below 0.3, described sheet material is multilayered structure, described sheet material at least comprises urethane resin sheet material, and olefin resin sheet material, NITOFLON sheet material or Teflon (registered trademark) sheet material, described olefin resin sheet material, described NITOFLON sheet material or described Teflon (registered trademark) sheet material are the sheet material contacting with glass substrate.
The present invention provides a kind of glass base processing method to achieve these goals, it is characterized in that, glass substrate absorption is remained on and at least comprises urethane resin sheet material, and olefin resin sheet material, the described olefin resin sheet material contacting with described glass substrate of the sheet material of NITOFLON sheet material or Teflon (registered trademark) sheet material, on described NITOFLON sheet material or described Teflon (registered trademark) sheet material, and use glass substrate processing machine to process this glass substrate, described sheet attaching is to glass substrate absorptive table, described sheet material according to JIS K6253(2006) or JIS K7215(1986) hardness be 90～95 degree, and thickness is below 0.7mm, kinetic friction coefficient is below 0.3.
In addition, in glass base processing method of the present invention, the processing machine of preferred described glass substrate utilizes edging grinding stone to carry out edging to the edge part of the glass substrate that is adsorbed maintenance.
On the glass substrate absorptive table of the cutting breaking device of the last process configurations of edging device, can apply glass substrate absorptive table of the present invention, in addition, if absorption keeps the structure of glass substrate, no matter be the glass substrate absorptive table that is configured in which operation, can apply glass substrate absorptive table of the present invention, in the edge polisher of processing at the edging of the working accuracy of having relatively high expectations, be applicable to.
According to glass substrate absorptive table of the present invention and glass base processing method, by the hardness of sheet material being defined as to 90～95 degree, thickness piece is decided to be below 0.7mm, and kinetic friction coefficient is defined as below 0.3, can keep glass substrate desired sliding of when location and the glass substrate confining force with respect to absorptive table, and restrain adsorption while keeping glass substrate glass substrate produce cut.
Accompanying drawing explanation
(A) of Fig. 1 is the vertical view of the glass substrate absorptive table of embodiment, (B) be at the explanatory view of the enterprising oozy glass plate of the glass substrate absorptive table location of (A), (C) be the explanatory view that the glass substrate that on the glass substrate absorptive table at (A), absorption keeps is carried out to edging processing.
Fig. 2 is the sectional view that represents the structure of the sheet material of embodiments of the present invention.
Fig. 3 is the sectional view that represents existing sheet material.
Label declaration
10 glass substrate absorptive tables
12
18 sheet materials
20 locating pads
22 adsorption holes
24 blow hole
30 edging grinding stones
32 urethane resin sheet materials
34 olefin resin sheet materials (or NITOFLON sheet material)
36 tackiness agent
38 tackiness agent or interleaving paper
Embodiment
Below, with reference to the accompanying drawings the preferred implementation of glass substrate absorptive table of the present invention and glass base processing method is described.
Fig. 1 (A)～(C) is the explanatory view of the formation of the glass substrate absorptive table 10 of the glass substrate processing machine that represents that embodiment relates to, (A)～left figure (C) represents respectively the vertical view of glass substrate absorptive table 10, and right figure represents respectively the sectional side view of glass substrate absorptive table 10.This glass substrate absorptive table 10 is arranged on the platform on the edge polisher of glass substrate, in Fig. 1, is divided into three platforms 12,14,16 that long rectangular shape forms, and entirety is configured to the planar rectangular shape corresponding with the shape of glass substrate G.In addition, the Segmentation Number of glass substrate absorptive table 10 is not limited to three platforms, can be also two more than platform.In addition, also can not cut apart and only be formed by a platform.
These 12,14,16 arrange across predetermined interval, and the glass substrate adsorption plane side of platform 12,14,16 is pasted with respectively sheet material 18 of the present invention.In addition, the surrounding of glass substrate absorptive table 10 is provided with the align member of glass substrate being located on glass substrate absorptive table 10, for example registration roller 20,20 ... arrange respectively two corresponding to each limit.
For the each sheet material 18,18,18 sticking on platform 12,14,16, be formed with adsorption hole 22,22 at preposition ... with blow hole 24,24 ...These adsorption holes 22,22 ... can form at an arbitrary position the position of fixing glass substrate reliably man-hour as long as adding at glass substrate, also can on glass substrate absorptive table 10, be provided for improving the adsorption tank of adsorption area and with adsorption hole 22,22 ... connect.In addition, for blowing hole 24,24 ..., as long as can make glass substrate float on glass substrate absorptive table 10 in the time carrying out the location of glass substrate and move smoothly, can form in any way at an arbitrary position.
Below, the order of utilizing glass substrate absorptive table 10 to carry out glass substrate location is described.
First, from each 12,14, the 18 multiple holes 24,24 of blowing that form at glass substrate absorptive table 10 ... the air of winding-up predetermined pressure.Then, as shown in Fig. 1 (B), take out cut fractureing from cutting breaker (not shown) and be processed as the glass substrate G of rectangular shape, and loaded on glass substrate absorptive table 10.Thus, glass substrate G is supported on glass substrate absorptive table 10 by floating.In addition, this floating supports state that not entirety of glass substrate G fully float with respect to glass substrate absorptive table 10, and refers to a part to float and other parts contact with the sheet material 18 of glass substrate absorptive table 10, the state being free to slide.
Then, under the state supporting in floating, as shown in Fig. 1 (B), make registration roller 20,20 ... advance towards each limit of glass substrate G mobile and with each limit butt, glass substrate G is slided on sheet material 18 and glass substrate G is positioned to the position (edging position) of formal provision.
After finish location, stop blowing hole 24,24 from glass substrate absorptive table 10 ... spray air.And, afterwards immediately from adsorption hole 22,22 ... suction air, remains on glass substrate G absorption on glass substrate absorptive table 10 via sheet material 18,18,18, or locating pad 20,20 afterwards ... from glass substrate, G retreats.Thus, the glass substrate G behind location is adsorbed reliably and remained on glass substrate absorptive table 10.
Then,, as shown in Fig. 1 (C), make edging grinding stone 30,30 move to implement the edging processing on relative both sides along the relative both sides of glass substrate G.After the edging process finishing on these both sides, utilize glass substrate absorptive table 10 to make glass substrate G 90-degree rotation, implement to remain the edging processing on both sides by the action of edging grinding stone 30,30.In addition, edge polisher also can arrange edging unit at two positions and utilize the edging unit in downstream to remain the edging processing on both sides.Now, glass substrate G is being adsorbed under the state being held on glass substrate absorptive table 10, is transported to the edging unit in downstream by glass substrate absorptive table 10.In addition, edging processing as long as edging grinding stone with by the relative action of the glass substrate of edging, which side action can.
Below, the structure that pastes the sheet material 18 on glass substrate absorptive table 10 is described.
During utilizing of implementing before the edging processing location of glass substrate G that locating pad 20 carries out and the absorption of glass substrate absorptive table 10 keep, though sheet material 18 require sliding for making the positioning smooth of glass substrate G on glass substrate absorptive table 10 and carrying out, between sheet material 18 and glass substrate G, exist the such foreign material of glass or metal powder also can on glass substrate G, not produce the flexibility of the cut causing because of these foreign material and meet glass substrate add man-hour glass substrate can be with respect to the hardness of the rigidity of glass substrate absorptive table maintenance relative position.
At this, for the sheet material 18 of embodiment,, be by according to JIS K6253(2006) or JIS K7215(1986) the hardness of standard be that 90～95 degree and thickness are that 0.7mm is following, kinetic friction coefficient is that sheet material 18 below 0.3 pastes on glass substrate absorptive table 10.,, when hardness is spent lower than 90, sheet material 18 is too soft, therefore working accuracy variation.For example, be the edge polisher shown in Fig. 1 (C) at glass substrate processing machine, sheet material 18 softnesses, therefore sheet material 18 is out of shape because of the tonnage of edging grinding stone 30, due to this distortion, glass substrate G moves with respect to the glass substrate absorptive table 10 after locating, therefore edging deterioration in accuracy.In edge polisher, the approach (Zhui Write amount based on edging grinding stone 30 to glass substrate G) control edging amount, when therefore sheet material 18 deforms as mentioned above, approach becomes and adds this deflection, or becomes the machining shape inhomogeneous along limit.Therefore, can not carry out high precision processing.On the other hand, the hardness of sheet material 18 exceedes 95 while spending, because sheet material 18 becomes really up to the mark, therefore can not eliminate the existing issue that produces cut on glass substrate G causing because of described foreign material.
In addition, about thickness, in the time that thickness exceedes 0.7mm, absorption glass substrate G and glass substrate G is carried out to edging add man-hour, due to this tonnage, glass substrate G is moved, therefore processed glass substrate G accurately with respect to glass substrate absorptive table 10.
Therefore, be the sheet material 18 below 0.7mm by being set as thering are 90～95 hardness, the thickness of spending, can meet and add man-hour glass substrate G at glass substrate and can keep with respect to glass substrate absorptive table 10 rigidity of relative position, high-precision edging processing can be realized, and the cut problem causing because clipping described foreign material can be eliminated simultaneously.In addition, the measurement of hardness machine (GS-719G) that the hardness of sheet material 18 utilizes get Le Co., Ltd. (TECLOCK) to manufacture is measured.
And then, be below 0.3 from the viewpoint of guaranteeing that glass substrate G needs kinetic friction coefficient with respect to the sliding of sheet material 18.Kinetic friction coefficient exceedes at 0.3 o'clock, and sliding has problems, and glass substrate G is difficult on glass substrate absorptive table 10 location smoothly, produces the bad and situation such as edging not of edging processing.
Therefore, according to the glass substrate absorptive table 10 of the edge polisher of embodiment, the hardness of sheet material 18 is defined as to 90～95 degree, kinetic friction coefficient is defined as below 0.3, thickness piece is decided to be below 0.7mm, therefore can maintain glass substrate G when location desired sliding and glass substrate with respect to the confining force of absorptive table, and restrain adsorption while keeping glass substrate G glass substrate G produce cut.In addition, use in the method for glass substrate edging processing of this glass substrate absorptive table 10, can carry out edging processing to glass substrate G accurately.
At this, the measuring method of the kinetic friction coefficient to sheet material 18 describes.
As determinator, use the superficiality measuring machine (trade(brand)name: HEIDON, model: 14DR) of new eastern scientific company manufacture, under following test conditions, implement the mensuration of kinetic friction coefficient.
Test conditions
Test load: 1000g
Sliding velocity: 100mm/ minute
Sliding distance: 30mm
Slip number of times: n3
Temperature: room temperature
Test conditions: dry, wet (dripping pure water 2cc)
Subject material: olefin resin sheet material, NITOFLON sheet material, velour (ス ウ ェ ー De) sheet material
Test-results
Olefin resin sheet material: 0.202(dry method is average), 0.159(wet method is average)
NITOFLON sheet material: 0.080(dry method is average), 0.058(wet method is average)
Velour sheet material: 0.498(dry method is average), 0.486(wet method is average)
The kinetic friction coefficient of above-mentioned olefin resin sheet material, NITOFLON sheet material is below 0.3, and on the glass substrate absorptive table 10 that is pasted with these materials, glass substrate G slides smoothly, and glass substrate G is always positioned in the position of formal provision.
On the other hand, the kinetic friction coefficient of velour sheet material exceedes 0.3, produces the bad situation in location of glass substrate G on the glass substrate absorptive table 10 that is pasted with this material.
On the other hand, sheet material 18 is preferably the bilayer structure that comprises urethane resin sheet material 32 and olefin resin sheet material (or NITOFLON sheet material) 34 as shown in Figure 2, and total thickness is below 0.7mm.Olefin resin sheet material (or NITOFLON sheet material) the 34th, the sheet material contacting with glass substrate G.In addition, urethane resin sheet material also comprises foaming polyurethane resin sheet material.In Fig. 2, label 36 is tackiness agent of gluing urethane resin sheet material 32 and olefin resin sheet material (or NITOFLON sheet material) 34, and label 38 is the tackiness agent of the glass substrate adsorption plane side for sheet material 18 being pasted to glass substrate absorptive table 10 or the interleaving paper with tackiness agent.
According to preferred embodiment, can guarantee the hardness of 90～95 degree by urethane resin sheet material 32, can guarantee that by olefin resin sheet material (or NITOFLON sheet material) 34 kinetic friction coefficient of glass substrate contact surface is below 0.3.About total thickness, in the time that the hardness of these materials exceedes 0.7mm, at absorption glass substrate G and glass substrate G is carried out to edging add man-hour, because making glass substrate G, moves with respect to glass substrate absorptive table 10 this tonnage, therefore can not carry out edging processing to glass substrate G accurately.Therefore, the total thickness of sheet material 18 is set as below 0.7mm.
In addition, the lower value of total thickness also can be set as 0.2mm according to the manufacture limit of two sheet materials 32,34, but is preferably set to 0.5mm for the lower value that realizes fully object of the present invention.In addition, as long as can obtain Flatness and durability degree, can be a kind of single layer structure of material, can be also the multilayered structure of two or more materials, can be by olefine kind resin etc. be applied on urethane resin sheet material and manufactures sheet material.In addition, multilayered structure also comprises such coating.And then, in embodiment, the glass substrate absorptive table 10 being applicable in edging device is illustrated, but is not limited to this, also the glass substrate absorptive table 10 of embodiment can be applied to the glass substrate absorptive table of cutting breaking device, the glass substrate absorptive table of boring device.In addition, as long as absorption keeps the structure of glass substrate G, no matter be the glass substrate absorptive table 10 that the glass substrate absorptive table that configures can application implementation mode in operation arbitrarily.
In present embodiment, to utilizing tackiness agent that the gluing two sheets forming of urethane resin sheet material of the olefin resin sheet material of thickness 0.2mm (in the situation of NITOFLON sheet material, thickness is 0.13mm) and thickness 0.3mm is illustrated, also can apply by tackiness agent the gluing two sheets obtaining of urethane resin sheet material of the Teflon of 0.13mm (registered trademark) sheet material and 0.2mm～0.3mm etc.In addition, the material of sheet material, sheet thickness are not limited to above-mentioned situation.
With reference to specific embodiment, the present invention is had been described in detail, still, it will be apparent to one skilled in the art that and can carry out without departing from the spirit and scope of the present invention various changes or modification.The Japanese patent application (Japanese Patent Application 2008-049618) that the application proposed based on February 29th, 2008, the content of this application is incorporated herein as a reference.
Claims (5)
1. a glass substrate absorptive table, is arranged on glass substrate processing machine, it is characterized in that,
Paste glass substrate adsorption plane one side of described glass substrate absorptive table sheet material according to JIS K6253(2006) or JIS K7215(1986) hardness be 90～95 degree, and thickness is below 0.7mm, kinetic friction coefficient is below 0.3,
Described sheet material is multilayered structure,
Described sheet material at least comprises urethane resin sheet material and olefin resin sheet material, NITOFLON sheet material or Teflon (registered trademark) sheet material, and described olefin resin sheet material, described NITOFLON sheet material or described Teflon (registered trademark) sheet material are the sheet material contacting with glass substrate.
2. glass substrate absorptive table as claimed in claim 1, wherein, the lower value of the thickness of described sheet material is 0.5mm.
3. glass substrate absorptive table as claimed in claim 1 or 2, wherein, described glass substrate processing machine utilizes edging grinding stone to carry out edging to the edge part of the glass substrate that is adsorbed maintenance.
4. a glass base processing method, is characterized in that,
Glass substrate absorption is remained on sheet material, and uses glass substrate processing machine to process this glass substrate,
Described sheet attaching to glass substrate absorptive table, described sheet material according to JIS K6253(2006) or JIS K7215(1986) hardness be 90～95 degree, and thickness is below 0.7mm, kinetic friction coefficient is below 0.3,
Described sheet material at least comprises urethane resin sheet material and olefin resin sheet material, NITOFLON sheet material or Teflon (registered trademark) sheet material, and described olefin resin sheet material, described NITOFLON sheet material or described Teflon (registered trademark) sheet material are the sheet material contacting with described glass substrate.
5. glass base processing method as claimed in claim 4, wherein, described glass substrate processing machine utilizes edging grinding stone to carry out edging to the edge part of the glass substrate that is adsorbed maintenance.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008049618A JP5246583B2 (en) | 2008-02-29 | 2008-02-29 | Glass substrate adsorption table and glass substrate processing method |
| JP2008-049618 | 2008-02-29 | ||
| PCT/JP2009/053460 WO2009107685A1 (en) | 2008-02-29 | 2009-02-25 | Glass substrate suction table, and method for processing of glass substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101959814A CN101959814A (en) | 2011-01-26 |
| CN101959814B true CN101959814B (en) | 2014-05-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200980106707.8A Active CN101959814B (en) | 2008-02-29 | 2009-02-25 | Glass substrate suction table, and method for processing of glass substrate |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5246583B2 (en) |
| KR (1) | KR101442884B1 (en) |
| CN (1) | CN101959814B (en) |
| TW (1) | TWI462209B (en) |
| WO (1) | WO2009107685A1 (en) |
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| WO2012060158A1 (en) * | 2010-11-01 | 2012-05-10 | 旭硝子株式会社 | Chamfering apparatus and chamfering method |
| JP2016102048A (en) * | 2014-11-13 | 2016-06-02 | 三星ダイヤモンド工業株式会社 | Scribe method and scribe device |
| JP2018522810A (en) * | 2015-07-21 | 2018-08-16 | コーニング インコーポレイテッド | Method and apparatus for edge finishing glass substrates |
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| JPH07237929A (en) * | 1994-02-28 | 1995-09-12 | Central Glass Co Ltd | Bending and breaking of thin plate glass and apparatus therefor |
| US7141300B2 (en) * | 2001-06-27 | 2006-11-28 | Nitto Denko Corporation | Adhesive sheet for dicing |
| JP4884811B2 (en) * | 2006-03-20 | 2012-02-29 | 三菱重工業株式会社 | Glass substrate electrostatic adsorption device and adsorption / desorption method thereof |
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2008
- 2008-02-29 JP JP2008049618A patent/JP5246583B2/en active Active
-
2009
- 2009-02-25 WO PCT/JP2009/053460 patent/WO2009107685A1/en active Application Filing
- 2009-02-25 KR KR1020107019084A patent/KR101442884B1/en active IP Right Grant
- 2009-02-25 CN CN200980106707.8A patent/CN101959814B/en active Active
- 2009-02-27 TW TW098106568A patent/TWI462209B/en active
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| JP2002144180A (en) * | 2000-11-09 | 2002-05-21 | Nippon Electric Glass Co Ltd | Device and method for suction-holding glass plate |
| JP2003261346A (en) * | 2002-03-06 | 2003-09-16 | Toray Ind Inc | Method for cutting glass substrate |
| CN1750917A (en) * | 2003-02-21 | 2006-03-22 | 三星钻石工业股份有限公司 | Substrate-processing table and substrate processing device |
| JP2006117480A (en) * | 2004-10-22 | 2006-05-11 | Citizen Seimitsu Co Ltd | Work table for glass breaker, method of manufacturing the same and automatic glass breaker provided with the same |
| JP2006317484A (en) * | 2005-05-10 | 2006-11-24 | Sanyo Epson Imaging Devices Corp | Method for manufacturing electro-optic device |
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| Publication number | Publication date |
|---|---|
| CN101959814A (en) | 2011-01-26 |
| KR20100136968A (en) | 2010-12-29 |
| TWI462209B (en) | 2014-11-21 |
| JP2009203141A (en) | 2009-09-10 |
| WO2009107685A1 (en) | 2009-09-03 |
| TW200945478A (en) | 2009-11-01 |
| KR101442884B1 (en) | 2014-09-22 |
| JP5246583B2 (en) | 2013-07-24 |
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