KR20210156027A - Apparatus for processing ultra thin glass and method for processing ultra thin glass - Google Patents

Abstract

The present invention relates to an apparatus for treating ultra-thin glass and a method for treating ultra-thin glass and, more specifically, to an apparatus for treating ultra-thin glass laminating a plurality of ultra-thin glass sheets and a method for treating ultra-thin glass. The apparatus for treating ultra-thin glass according to one embodiment of the present invention comprises: a stage supporting ultra-thin glass; an adhesive provision unit providing an adhesive on the ultra-thin glass supported by the stage; and a non-contact pressing unit that includes a porous plate having a plurality of pores, and provides a pressing force on a plurality of ultra-thin glass sheets that are laminated with the adhesive interposed therebetween by injecting gas through some of the plurality of pores.

Description

Ultra-thin glass processing apparatus and ultra-thin glass processing method {Apparatus for processing ultra thin glass and method for processing ultra thin glass}

The present invention relates to an ultra-thin glass processing apparatus and an ultra-thin glass processing method, and more particularly, to an ultra-thin glass processing apparatus and an ultra-thin glass processing method for laminating a plurality of ultra-thin glasses.

Recently, display products have achieved rapid technological development through continuous change and innovation. The use of functions has been diversified and the shape of the product has continued to evolve, so we have continued to develop products that are easy to carry and convenient. Future product changes will be constantly developed by reflecting these multi-functions and the simplicity and convenience of product shape, and the goal is to be bendable, foldable, and rollable (rollable). It will continue to develop into a rollable display product.

In order to realize flexible display products such as bendable, foldable, and rollable displays, display parts that can be bent while maintaining product performance are required. come. However, the high-strength film product can only be used up to 100,000 times or less in the bending test, and the transmittance is 96% or less. Accordingly, recently, they have been concentrating on the development of ultra-thin glass (UTG) that is very thin, can be folded and unfolded more than 100,000 times, and has a transmittance of 98% or more.

Such ultra-thin glass (UTG) is too thin at 150 μm or less, so it is difficult to handle, and breaks easily, such as when cutting or edge processing to cut into a predetermined size or shape. There is this.

Accordingly, there is a need for a method and an apparatus for processing ultra-thin glass that can stably manufacture such ultra-thin glass according to various product sizes and uses without cracking defects.

Korean Patent Publication No. 10-1334406

The present invention relates to an ultra-thin glass processing apparatus and an ultra-thin glass processing method for bonding a plurality of ultra-thin glasses in a non-contact manner.

Ultra-thin glass processing apparatus according to an embodiment of the present invention is a stage for supporting the ultra-thin glass; Adhesive providing unit for providing an adhesive on the ultra-thin glass supported on the stage; and a non-contact pressing unit comprising a porous plate having a plurality of pores, and spraying a gas through at least some of the plurality of pores to provide a pressing force on a plurality of ultra-thin glass laminated with the adhesive interposed therebetween; have.

It may further include; a height measuring unit for measuring at least one of the height of the adhesive and the height of the ultra-thin glass laminated on the adhesive.

It may further include; a control unit for selectively controlling the internal pressure of the pores for each region of the porous plate.

Further comprising; a pressure variable distribution storage unit for storing the distribution of the relative pressure variable for each area of the porous plate for surface pressure, wherein the control unit is stored in the distribution of the relative pressure variable for each area of the porous plate stored in the pressure variable distribution storage unit. Accordingly, it is possible to selectively control the internal pressure of the pores for each region of the porous plate.

The porous plate may be formed of a plurality of unit plates each having pores.

The non-contact pressurizing unit may include: a gas supply source connected to the porous plate and providing a gas to the at least a portion of the pores; And it may further include at least one of a vacuum pump connected to the porous plate and forming a negative pressure in the pores of the remaining part of the plurality of pores.

The planar area of the porous plate may be greater than or equal to the planar area of the ultra-thin glass.

The non-contact pressing unit may provide the pressing force to the entire surface of the ultra-thin glass at the same time.

It may further include a; processing unit for processing the ultra-thin glass laminate in which the plurality of ultra-thin glasses are laminated.

Ultra-thin glass processing method according to another embodiment of the present invention is the process of supporting a first ultra-thin glass on a stage; providing an adhesive on the first ultra-thin glass supported on the stage; providing a second ultra-thin glass on the adhesive; and spraying a gas through at least some of the plurality of pores of the porous plate to provide a pressing force on the second ultra-thin glass.

measuring the height of the adhesive; and determining the pressing force by the porous plate.

The process of determining the distribution of relative pressure variables for each area of the porous plate for face pressure; may further include.

The process of selectively controlling the internal pressure of the pores for each region of the porous plate; may further include.

The porous plate may include a plurality of unit plates each having pores, and the process of selectively controlling the internal pressure of the pores may be performed by independently controlling each of the plurality of unit plates.

The process of determining the distribution of the relative pressure variable for each region, the process of providing a preliminary ultra-thin glass on the porous plate; The process of flotation of the preliminary ultra-thin glass by injecting a gas through at least some of the pores of the plurality of pores; The process of measuring the flatness of the floated preliminary ultra-thin glass; and controlling the internal pressure of the pores for each area of the porous plate according to the measured flatness of the preliminary ultra-thin glass to planarize the levitated preliminary ultra-thin glass.

The process of planarizing the levitated preliminary ultra-thin glass may include a process of forming an internal pressure different from that of other pores in some of the plurality of pores.

measuring the height of the second ultra-thin glass; and controlling the internal pressure of the pores for each area of the porous plate according to the measured height of the second ultra-thin glass.

The process of processing the ultra-thin glass laminate in which the first ultra-thin glass and the second ultra-thin glass are laminated; may further include.

Ultra-thin glass processing apparatus according to an embodiment of the present invention by spraying a gas through a porous plate to provide a pressing force for bonding a plurality of ultra-thin glass (UTG) in a non-contact manner, contamination of the surface of the ultra-thin glass and breakage (or damage) can be prevented. In addition, by providing a pressing force to the entire pressing surface (or surface) of the ultra-thin glass at the same time in a full-face bonding method, a plurality of ultra-thin glasses are bonded to each other, so that bonding is better than the case of sequentially pressing some surfaces using a roller or the like. It is also possible to shorten the tact time for

And by measuring the height of the applied adhesive and/or the surface height of the laminated ultra-thin glass through the height measurement unit to control (or correct) the internal pressure of the pores for each area of the porous plate, the pressing force (or gas pressure) for each area of the ultra-thin glass ) can be adjusted differently, and the flatness of the ultra-thin glass laminate can be maintained at a certain level.

In addition, by applying the distribution of relative pressure variables for each area of the porous plate to a plurality of pores of the porous plate, a uniform pressing force is provided on the entire surface of the ultra-thin glass according to the state of the porous plate (for example, factors related to characteristics). can

And by configuring the porous plate with a plurality of unit plates to independently control each unit plate, it can be easy to control the internal pressure of the pores for each region of the porous plate.

On the other hand, a vacuum pump is connected to the porous plate to control (or adjust) the internal pressure of the pores for each area of the porous plate, and negative pressure may be formed in some pores, and thus more effectively a uniform pressing force on the entire surface of the ultra-thin glass can be provided, and a plurality of ultra-thin glasses can be flattened without inclination.

1 is a schematic cross-sectional view showing an ultra-thin glass processing apparatus according to an embodiment of the present invention.
Figure 2 is a conceptual diagram for explaining the adhesive provision of the adhesive providing unit according to an embodiment of the present invention.
Figure 3 is a perspective view showing a porous plate made of a plurality of unit plates according to an embodiment of the present invention.
Figure 4 is a conceptual diagram for explaining the cutting processing by the processing unit according to an embodiment of the present invention.
Figure 5 is a flow chart showing an ultra-thin glass processing method according to another embodiment of the present invention.
6 is a conceptual diagram for explaining the determination of a pressing force according to another embodiment of the present invention.
7 is a diagram showing a process of determining the distribution of relative pressure variables for each area of the porous plate according to another embodiment of the present invention.
8 is a conceptual view for explaining the control of the internal pressure of the pores for each area of the porous plate according to the height of the second ultra-thin glass according to another embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in a variety of different forms, only these embodiments allow the disclosure of the present invention to be complete, and the scope of the invention to those of ordinary skill in the art completely It is provided to inform you. In the description, the same reference numerals are assigned to the same components, and the sizes of the drawings may be partially exaggerated in order to accurately describe the embodiments of the present invention, and the same reference numerals refer to the same elements in the drawings.

1 is a schematic cross-sectional view showing an ultra-thin glass processing apparatus according to an embodiment of the present invention.

1, the ultra-thin glass processing apparatus 100 according to an embodiment of the present invention includes a stage 110 for supporting the ultra-thin glass 10; Adhesive providing unit 120 for providing an adhesive 20 on the ultra-thin glass 10 supported on the stage 110; and a porous plate 131 having a plurality of pores 131a, and a plurality of ultra-thin glass 10 laminated with the adhesive 20 interposed therebetween by spraying a gas through at least some of the plurality of pores 131a ) may include a; non-contact pressing unit 130 for providing a pressing force on the.

The stage 110 can support an ultra-thin glass (UTG, 10), and an ultra-thin glass (UTG) laminate (UTG) with an adhesive 20 interposed between a plurality of ultra-thin glasses (UTG, 10) 50) can be fixed so that the ultra-thin glass 10 of the lowest layer does not move while forming. For example, the stage 110 may be fixed by adsorption by supporting the ultra-thin glass 10 on a porous surface. At this time, the width (or diameter) of the pores is the thickness (Thickness) of the ultra-thin glass 10 so that a part is sucked into the pores by the adsorption force to adsorb the ultra-thin glass 10 so that the ultra-thin glass 10 is not bent or bent. ; T) or less. Here, when the size of the pore(s) is not constant, the width of the largest pore may be less than or equal to the thickness of the ultra-thin glass 10 .

Here, the ultra-thin glass 10 may be transported on the stage 110 through a transport unit (not shown), and the transport unit (not shown) supports and transports any one of opposite surfaces of the ultra-thin glass 10 . can do. For example, the transfer unit (not shown) may support and transfer the ultra-thin glass 10 in an adsorption fixing method, and may be configured as a transfer robot. In this case, it may have a width (or diameter) less than the thickness of the ultra-thin glass 10 like the porosity stage 110 of the transfer unit (not shown) for adsorption fixing. Here, the transfer unit (not shown) may transfer (or provide) the ultra-thin glass 10 of the lowest layer in contact with the stage 110, and the ultra-thin glass 10 on the adhesive 20 provided on the ultra-thin glass 10. may be provided, and it is sufficient if the ultra-thin glass 10 can be transferred on the stage 110 so that the surface facing the stage 110 is exposed. On the other hand, the ultra-thin glass 10 of the lowest layer may be supported on the stage 110 by a device other than a transfer unit (not shown) and provided to a process position by movement of the stage 110 .

Figure 2 is a conceptual diagram for explaining the provision of the adhesive provided by the adhesive according to an embodiment of the present invention, Figure 2 (a) shows the provision of the first adhesive, Figure 2 (b) shows the provision of the second adhesive .

Referring to FIG. 2 , the adhesive providing unit 120 may provide the adhesive 20 on the ultra-thin glass 10 supported on the stage 110 , and the ultra-thin glass 10 exposed thereon on the stage 110 . ) in contact with the adhesive 20 may be provided, and a plurality of ultra-thin glasses 10 may be adhered through the adhesive 20 . At this time, the adhesive providing unit 120 may be provided by applying a liquid adhesive 20 having viscosity on the ultra-thin glass 10 , and applying a liquid adhesive 20 such as resin to the ultra-thin glass 10 . You can print on it. Here, the adhesive 20 may be photo-cured by light such as Ultra-Violet (UV), and when cured, adhesive force may be improved.

For example, the adhesive 20 may be rapidly cured when light of a predetermined wavelength is irradiated, and the light of the predetermined wavelength may be ultraviolet (UV) or visible light in a specific wavelength band. At this time, the adhesive 20 may be a photo-curable adhesive (Light Cure Adhesive) or UV adhesive (Ultra-Violet Ray Adhesive) that is cured by ultraviolet rays in a 254 nm or 365 nm wavelength band, and a photoinitiator ( Photoinitiator) may be included.

Here, the adhesive providing unit 120 may provide the first adhesive 21 to the edge portion of the ultra-thin glass 10, and a second adhesive different from the first adhesive 21 to the central portion of the ultra-thin glass 10 ( 22) can be provided. Here, the first adhesive 21 and the second adhesive 22 may differ in at least one of viscosity, material (or composition), density, and material state (eg, liquid, gel, solid). For example, the first adhesive 21 and the second adhesive 22 may have different viscosities, which may result in different materials and/or different densities. In addition, the first adhesive 21 may be cured by light of a first wavelength, and the second adhesive 22 may be cured by a second wavelength different from the first wavelength.

The adhesive providing unit 120 may provide the adhesive 20 by dividing the edge and the central portion of the ultra-thin glass 10, and the adhesive 20 is disposed on the edge of the ultra-thin glass 10 (that is, the second Adhesive and / or the first adhesive) may form a dam portion or seal portion for suppressing or preventing leakage out of the ultra-thin glass 10, and in the central portion of the ultra-thin glass 10, the It is possible to provide an adhesive 20 (ie, the second adhesive) that is diffused in the space surrounding the dam part or the seal part and stably adheres between the plurality of ultra-thin glasses 10 . Here, the first adhesive 21 may be the adhesive 20 forming the dam part or the seal part, and may be applied on the edge of the ultra-thin glass 10 made of a viscous liquid and effectively the dam part or An adhesive 20 having high viscosity may be used to form the seal part. And the second adhesive 22 may be an adhesive 20 that is diffused in the space surrounding the dam part or the seal part by the pressure by the non-contact pressing part 130, and is made of a viscous liquid and ultra-thin glass (10). Can be applied on the central portion of the, and can be effectively spread between the plurality of ultra-thin glass 10, the adhesive 20 having a lower viscosity than the first adhesive 21 can be used.

For example, the first adhesive 21 and the second adhesive 22 may be provided by being printed on the ultra-thin glass 10 , and the first adhesive 21 may be provided by the first adhesive discharging unit 121 . may be printed along (or around) the edge of the ultra-thin glass 10 through can be printed on the central part of ultra-thin glass).

The non-contact pressing unit 130 may provide a pressing force in a non-contact manner on a plurality of ultra-thin glass 10 stacked with an adhesive 20 interposed therebetween by spraying a gas, and a plurality of opposing (or contacting) By approaching the ultra-thin glass 10 of the adhesive 20 can be uniformly diffused between the plurality of ultra-thin glass (10). For example, the non-contact pressing unit 130 may be provided on the stage 110 , and the liquid adhesive 20 is formed by gradually pressing the upper ultra-thin glass 10 exposed on the stage 110 as a whole. It can be uniformly diffused between the ultra-thin glass 10 of

Here, the non-contact pressurizing unit 130 may include a porous plate 131 having a plurality of pores 131a, and to inject a gas (eg, air) through at least some of the plurality of pores 131a. can Here, the pores 131a may be irregularly formed pores, or may include regularly arranged through holes forming a path. In this case, when the pores 131a are irregularly formed, two or more hole(s) may communicate to form a channel through which gas may flow. For example, the two or more pores 131a communicate with each other, thereby forming a channel connecting (or communicating) the first and second surfaces of the porous plate 131 that face each other.

By injecting a gas through at least a portion of the plurality of pores (131a) to provide a pressing force on the plurality of ultra-thin glasses (10), a plurality of ultra-thin glasses (10) can be bonded in a non-contact manner, and ultra-thin glass (10) Contamination and damage (or damage) of the surface can be prevented.

Here, the non-contact pressing unit 130 may simultaneously provide a pressing force to the entire surface (or the front surface) of the ultra-thin glass 10, and may simultaneously press the entire pressing surface (or surface) of the ultra-thin glass 10, and the ultra-thin A plurality of ultra-thin glasses 10 may be bonded by a full surface bonding method of bonding the plurality of ultra-thin glasses 10 by simultaneously pressing the entire glass 10 . Accordingly, it is possible to shorten a process time (tact time) for bonding a plurality of ultra-thin glass 10 compared to the case of sequentially pressing some surfaces of the ultra-thin glass 10 using a roller or the like.

In this case, the planar area of the porous plate 131 may be greater than or equal to the planar area of the ultra-thin glass 10 . The porous plate 131 may have a planar area equal to or greater than that of the ultra-thin glass 10, and may pressurize the ultra-thin glass 10 by providing a pressing force (ie, gas pressure) to the entire surface of the ultra-thin glass 10, A plurality of ultra-thin glasses 10 may be cemented in a front bonding method. For example, the gas may be sprayed on the entire surface of the ultra-thin glass 10 by making the distribution area of the plurality of pores 131a in the entire planar area of the porous plate 131 equal to the planar area of the ultra-thin glass 10 . Through this, it is possible to provide gas pressure (or atmospheric pressure) to the entire surface of the ultra-thin glass 10 , and pressurize the ultra-thin glass 10 . On the other hand, in the case of adjusting the gas pressure distribution by the pores 131a for each area of the porous plate 131 by selectively controlling the internal pressure of the plurality of pores 131a, some of the plurality of pores 131a have air (or A negative pressure (陰壓) that provides a suction force to suck in gas) may be formed.

Since the ultra-thin glass 10 is very thin at about 150 μm or less, when processing such as cutting processing to cut into a predetermined size or shape or edge processing to trim the edge surface of the ultra-thin glass 10 Since it was difficult to handle, the left/right shaking had to be severe, which made precise processing difficult, and breakage of the ultra-thin glass 10 such as easily broken occurred.

Accordingly, in the present invention, by laminating a plurality of ultra-thin glass 10 through an adhesive 20 to form an ultra-thin glass laminate 50, the thickness is increased to a thickness exceeding 150 μm, such as cutting or edge processing. Gripping can be facilitated during processing, and stable gripping is made to enable precise processing, and it is possible to prevent the ultra-thin glass 10 from being damaged during processing. In addition, a plurality of ultra-thin glass 10 can be processed at a time, and accordingly, processing of the ultra-thin glass 10 excellent in processing uniformity such as size can be made, and the number of cutting processes is reduced to make ultra-thin The processing time for the treatment of the glass 10 may be shortened.

Ultra-thin glass processing apparatus 100 according to the present invention is a height measuring unit 140 for measuring at least any one of the height of the adhesive 20 and the height of the ultra-thin glass 10 laminated on the adhesive 20; may include

The height measuring unit 140 may measure the height of the adhesive 20 and/or the height of the ultra-thin glass 10 laminated on the adhesive 20, and the height of the adhesive 20 and/or the height of the adhesive 20 at a plurality of points. The height of the ultra-thin glass 10 laminated on the adhesive 20 may be measured. The height measuring unit 140 may measure the height of the adhesive 20 provided (or applied) on the ultra-thin glass 10, and the height of the adhesive 20 before and after left and right at at least two or more points. can be measured, and it is possible to measure the height of the adhesive 20 in front, back, left and right at four or more points. At this time, it is possible to determine the pressing force provided on the plurality of ultra-thin glass 10 through the non-contact pressing unit 130 using the measured height (eg, average height) of the adhesive 20, the adhesive 20 It is possible to determine an appropriate pressing force that can be uniformly diffused among the plurality of ultra-thin glasses 10 . In addition, the flatness (or horizontality) of the adhesive 20 provided on the ultra-thin glass 10 can be measured using the height of the adhesive 20 measured at two or more points, and the measured adhesive 20 The internal pressure of the pores 131a for each region of the porous plate 131 may be adjusted according to the flatness of the porous plate 131 , and the pressing force (or gas pressure) may be different for each region of the ultra-thin glass 10 . For example, by selectively controlling the internal pressure of the pores 131a for each region of the porous plate 131, the gas pressure (or pressing force) by the pores 131a provided for each region of the ultra-thin glass 10 can be adjusted. In addition, a relatively high gas pressure may be provided to a region where the height of the adhesive 20 is relatively high, and a relatively low gas pressure may be provided to a region where the height of the adhesive 20 is relatively low.

And the height measuring unit 140 can measure the height of the ultra-thin glass 10 at a plurality of points, and can measure the height of the (most) upper ultra-thin glass 10 laminated on the adhesive 20. . Here, by using the height of the ultra-thin glass 10 measured at two or more points, the left and right flatness and/or the front and rear flatness of the ultra-thin glass 10 can be measured, and the flatness of both front and rear left and right is measured (or The height of the ultra-thin glass 10 can be measured at four or more points to be able to measure). According to the measured flatness of the ultra-thin glass 10, the gas pressure due to the pores 131a can be adjusted for each area of the ultra-thin glass 10, and the internal pressure of the pores 131a can be selectively selected for each area of the porous plate 131. By controlling as, it is possible to adjust the gas pressure due to the pores (131a) provided for each area of the ultra-thin glass (10). For example, a relatively high gas pressure may be provided to a point (or region) where the height of the ultra-thin glass 10 is relatively high, and a relatively low gas pressure to a point where the height of the ultra-thin glass 10 is relatively low. can provide Through this, it is possible to maintain the flatness of the ultra-thin glass laminate 50 in which a plurality of ultra-thin glasses 10 are bonded to each other at a certain level.

At this time, the height measuring unit 140 may measure the height of the ultra-thin glass 10 just put on the adhesive 20, and among the plurality of ultra-thin glass 10 that are pressed and bonded together, the (top) ultra-thin The height of the glass 10 may also be measured. When measuring the height of the ultra-thin glass 10 just put on the adhesive 20, control the gas pressure by the pores 131a provided for each area of the ultra-thin glass 10 and put it on the adhesive 20 It is possible to provide a gas pressure (distribution) or pressing force for the placed ultra-thin glass 10, and when measuring the height of the upper ultra-thin glass 10 among the plurality of ultra-thin glass 10 that is pressed and cemented, the ultra-thin glass By controlling the gas pressure by the pores (131a) provided for each region of (10), it is possible to provide a gas pressure or a pressing force for the ultra-thin glass 10 to be laminated next.

On the other hand, the height measuring unit 140 can also be used in the process (S50) of determining the distribution of the relative pressure variable for each area of the porous plate 131 using the preliminary ultra-thin glass 10a, for a detailed description of this, the relative pressure variable The process of determining the distribution ( S50 ) will be described in detail.

And by measuring the height of the adhesive 20 and/or the height of the ultra-thin glass 10 laminated on the adhesive 20 through the height measurement unit 140 to determine the pressing force to be provided on the plurality of ultra-thin glass 10 Can be, using the measured height of the adhesive 20 and / or the height of the ultra-thin glass 10 laminated on the adhesive 20, the measured flatness of the adhesive 20 and / or of the ultra-thin glass 10 Depending on the flatness, the pressing force provided for each region of the ultra-thin glass 10 may be varied. Here, the ultra-thin glass processing apparatus 100 of the present invention measures at least one of the height of the adhesive 20 measured by the height measuring unit 140 and the height of the ultra-thin glass 10 laminated on the adhesive 20 . It may further include; a pressing force storage unit (not shown) for storing the pressing force (distribution) determined by using. By providing a pressing force on the plurality of ultra-thin glass 10 according to the pressing force (distribution) stored in the pressing force storage unit (not shown), it is possible to press the (most) upper ultra-thin glass 10, and a plurality of ultra-thin glass 10 ) can be combined.

The ultra-thin glass processing apparatus 100 according to the present invention may further include a controller 150 for selectively controlling the internal pressure of the pores 131a for each region of the porous plate 131 .

The control unit 150 may selectively control the internal pressure of the pores 131a for each region of the porous plate 131, thereby adjusting the internal pressure distribution of the pores 131a for each region of the porous plate 131 (or can be adjusted), and the gas pressure by the pores 131a provided for each area of the ultra-thin glass 10 can be adjusted. Accordingly, the gas pressure distribution (or pressing force) by the pores 131a according to the height of the applied adhesive 20 and/or the surface height of the laminated ultra-thin glass 10 measured using the height measuring unit 140 . can be controlled and/or calibrated.

Here, the control unit 150 may independently control the internal pressure for each of the plurality of pores 131a, and group the plurality of pores 131a by two or more to independently control the internal pressure for each group. You can also control it. For example, the control unit 150 is connected to a plurality of pores 131a and is connected to a gas valve 132b and/or a plurality of pores 131a respectively provided in a gas supply pipe 132a for supplying gas. To selectively control the internal pressure of the pores (131a) for each area of the porous plate (131) by controlling the vacuum valves (133b) respectively provided in the vacuum tube path (133a) for forming a vacuum (pressure) in the pores (131a) of the can At this time, when the internal pressure is independently controlled for each of the plurality of pores 131a, the plurality of gas supply pipe lines 132a and/or the plurality of vacuum pipe paths 133a are respectively connected to the plurality of pores 131a and each A gas valve 132b and/or a vacuum valve 133b may be provided for each gas supply pipe 132a and/or the vacuum pipe 133a, and a plurality of pores 131a are grouped by two or more. A plurality of gas supply pipelines 132a and/or a plurality of vacuum pipelines 133a respectively connected to the pores 131a of A gas valve 132b and/or a vacuum valve 133b may be provided for each group of the plurality of vacuum tube paths 133a.

Ultra-thin glass processing apparatus 100 according to the present invention may further include;

The pressure variable distribution storage unit 155 may store the relative pressure variable distribution for each area of the porous plate 131 for face-pressing the ultra-thin glass 10 through the porous plate 131 , and the stored porous plate 131 . By controlling the internal pressure of the pores 131a for each region of the porous plate 131 according to the relative pressure variable distribution for each region of can provide Here, the pressure variable distribution storage unit 155 may store the relative pressure variable distribution for each area of the porous plate 131 that can provide a uniform pressing force to the entire surface of the ultra-thin glass 10, and the height measurement unit ( 140) of the porous plate 131 so as to flatten the ultra-thin glass laminate 50 according to the height of the adhesive 20 and/or the height of the ultra-thin glass 10 laminated on the adhesive 20. The relative pressure variable distribution of the pores 131a for each region of the porous plate 131 in which the relative pressure variable of the pores 131a is corrected (or controlled) for each region may be renewed and stored.

For example, the pressure variable distribution storage unit 155 may store the relative pressure variable distribution for each area of the porous plate 131 as a table or a map. The internal pressure of the pores 131a may be formed for each region of the porous plate 131 by reflecting the relative pressure variable in each region or each pore 131a according to a table or map.

And the control unit 150 selectively controls the internal pressure of the pores (131a) for each area of the porous plate (131) according to the relative pressure variable distribution for each area of the porous plate (131) stored in the pressure variable distribution storage unit (155). can do. That is, the control unit 150 selectively controls the internal pressure of the pores (131a) for each region of the porous plate (131) according to the distribution of the relative pressure variable for each region of the porous plate (131), so that the entire surface of the ultra-thin glass (10) is A uniform pressing force may be provided on the surface, and when the adhesive 20 and/or the ultra-thin glass 10 laminated on the adhesive 20 is not flat and inclined, a different pressing force for each area of the ultra-thin glass 10 may be provided so that the ultra-thin glass laminate 50 is planarized.

3 is a perspective view showing a porous plate made of a plurality of unit plates according to an embodiment of the present invention.

Referring to FIG. 3 , the porous plate 131 may include a plurality of unit plates 131b in which pores 131a are respectively formed, and one pore 131a may be formed in each unit plate 131b. , a plurality of pores 131a may be formed. When one pore 131a is formed in each unit plate 131b, one gas supply pipe 132a and/or a vacuum pipe 133a is connected for each unit plate 131b to facilitate each pore 131a. ) can be independently controlled, and when a plurality of pores 131a are formed in each unit plate 131b, the plurality of pores 131a may be grouped for each unit plate 131b, and each By connecting the gas supply pipe path 132a and/or the vacuum pipe path 133a for each unit plate 131b, the internal pressure of the grouped pores 131a can be easily controlled for each group. Through this, it is possible to control the internal pressure of the pores 131a for each unit plate 131b, and accordingly, it is possible to easily control (or adjust) the internal pressure of the pores 131a for each area of the porous plate 131. .

Here, the controller 150 may independently control the internal pressure of the pores 131a for each of the plurality of unit plates 131b, and by independently controlling each of the unit plates 131b, each unit plate 131b ), when one pore 131a is formed, the internal pressure of each pore 131a can be independently controlled, and when a plurality of pores 131a are formed for each unit plate 131b, each unit plate 131b ) grouped pores (131a) (s) can be controlled for each group. In this case, the number of the plurality of unit plates 131b may be equal to or greater than the number of the plurality of points measuring the height of the adhesive 20 and/or the height of the ultra-thin glass 10 . Through this, it is possible to determine the internal pressure of the pores 131a of each unit plate 131b according to the height difference at the plurality of points, and maintain the flatness of the ultra-thin glass laminate 50 at a certain level while maintaining the plurality of ultra-thin The glass 10 may be laminated and adhered.

The non-contact pressing unit 130 is connected to the porous plate 131, the gas supply source 132 for providing a gas to the at least some of the pores (131a); And connected to the porous plate 131, it may further include at least one of the vacuum pump 133 for forming a negative pressure in the remaining part of the pores (131a) of the plurality of pores (131a). The gas supply source 132 may be connected to the porous plate 131 , and may provide gas to the at least some of the pores 131a through the gas supply pipe 132a. Here, the gas supply pipe 132a may be connected to all the plurality of pores 131a, and the gas valve 132b provided in each gas supply pipe 132a is controlled by the control unit 150, respectively, and a plurality of pores ( Gas may be selectively provided to 131a), and gas may be provided to at least some of the pores 131a among the plurality of pores 131a. At this time, the gas valve 132b may adjust the amount of gas (or gas amount) supplied to the pores 131a, and the internal pressure (or injection pressure) of the pores 131a may be adjusted according to the amount of gas supplied to the pores 131a. can be decided.

The vacuum pump 133 may be connected to the porous plate 131 and the vacuum tube path 133a, and sucks (or sucks) air (or gas) from the plurality of pores 131a. It is possible to form a negative pressure (or vacuum pressure) in the. Here, the vacuum tube path 133a may be connected to all of the plurality of pores 131a, and when gas injection (ie, positive pressure) is required into all the plurality of pores 131a, negative pressure is applied to all the plurality of pores 131a. may not be formed. That is, the vacuum valves 133b provided in each vacuum tube path 133a are controlled by the controller 150, respectively, so that negative pressure can be selectively formed in the plurality of pores 131a, and the rest of the plurality of pores 131a A negative pressure may be formed in some of the pores 131a. At this time, since it is necessary to provide a pressing force by gas injection on the plurality of ultra-thin glass 10, the pores 131a in which the negative pressure is formed among the plurality of pores 131a do not need to be, but the gas is injected among the plurality of pores 131a. The pore (131a) is not without, it is absolutely necessary. Meanwhile, the vacuum valve 133b may adjust the strength of the vacuum pressure (or negative pressure) formed in the pores 131a, and the internal pressure (or suction force) of the pores 131a according to the vacuum pressure formed in the pores 131a. This can be determined.

In order to flatten the ultra-thin glass 10 provided on the adhesive 20 by being flattened and pressurized without being tilted while maintaining a flattened state, or in order for the ultra-thin glass 10 stacked at an angle to be flattened by pressurization (that is, The distribution of relative pressure variables for each area of the porous plate) is important. At this time, when the distribution of gas pressure is controlled only with the intensity (ie, positive pressure) at which the gas is injected from the pores 131a, the injection pressure of the pores 131a located in some parts (or partial regions) is lowered, or the partial Even if the gas supply to the pore (131a) located in the portion is blocked (or stopped), it is affected by the injection pressure of the gas injected from the surrounding (or surrounding) pores (131a) (s) and is ultra-thin corresponding to the partial portion A pressing force is also provided to a (partial) portion of the glass 10 . Due to this, a certain part of the ultra-thin glass 10 is pressed and pressed, and any other part of the ultra-thin glass 10 cannot be sucked (or sucked) pulled, thus maintaining the flattening of the ultra-thin glass 10 While pressing the ultra-thin glass 10, while flattening the inclined ultra-thin glass 10, it is also impossible to press the ultra-thin glass 10.

However, when a negative pressure is formed in the pores 131a located in the partial portions through the vacuum pump 133, the effect of the injection pressure (ie, positive pressure) of the gas injected from the surrounding pores 131a(s) By offsetting the negative pressure, a suction force may be provided to suck the (part) portion of the ultra-thin glass 10 corresponding to the partial portion, and through this, any portion of the ultra-thin glass 10 (that is, the partial portion) A portion of the corresponding ultra-thin glass and a different part) is pressed and pressed, and any other part of the ultra-thin glass 10 (ie, a portion of the ultra-thin glass corresponding to the partial portion) can be sucked. Accordingly, it is possible to pressurize the ultra-thin glass 10 while maintaining the flattening of the ultra-thin glass 10 by adjusting the pressing force and the suction force in each part of the ultra-thin glass 10, and flattening the inclined ultra-thin glass 10 while flattening the ultra-thin The glass 10 can be pressed.

Figure 4 is a conceptual diagram for explaining the cutting process by the processing unit according to an embodiment of the present invention, Figure 4 (a) shows the cutting of the ultra-thin glass laminate using a cutting wheel, Figure 4 (b) is a constant Shows an ultra-thin glass laminate separated into a laminate unit of size.

Referring to FIG. 4 , the ultra-thin glass processing apparatus 100 according to the present invention may further include a processing unit for processing the ultra-thin glass laminate 50 in which a plurality of ultra-thin glasses 10 are laminated.

The processing unit may process the ultra-thin glass laminate 50 in which a plurality of ultra-thin glasses 10 are laminated, and perform processing such as cutting processing to cut to a predetermined size or shape and/or edge processing to trim the edge surface. can Here, in the cutting process, the ultra-thin glass laminate 50 may be cut to a required predetermined size and separated (or divided) into a laminate unit 5 . For example, the processing unit may include a cutting wheel (cutting wheel, 161), and in the cutting processing, a computer numerical control (CNC) cutter equipped with a cutting wheel 161 made of diamond abrasive is used. Thus, it can be cut (or separated) into the laminate unit 5 of a certain size. Meanwhile, the processing unit may cut the ultra-thin glass laminate 50 by a laser cutting method using a laser.

And the edge processing may remove chipping on the edge surface of the ultra-thin glass laminate 50 and/or the laminate unit 5 . For example, fine chipping present on the edge surface of the ultra-thin glass laminate 50 and/or the shape-processed laminate unit 5 may be removed by using a polishing wheel. In this case, a fine and durable cloth may be used as the surface material of the polishing wheel. The edge face of each of the plurality of ultra-thin glasses 10 of the ultra-thin glass laminate 50 and/or the laminate unit 5 may be subjected to chemical edge polishing to form a rounded C angle in the shape of a “C” have. After firmly mounting the ultra-thin glass laminate 50 and/or the laminate unit 5 to the chemical edge healing equipment, position it to be sufficiently immersed in the edge healing water tank filled with the chemical polishing liquid, and the ultra-thin glass laminate 50 ) and/or while rotating the laminate unit 5 slowly, chemical polishing may be performed so that the entire edge surface can be healed evenly. Through this, the ultra-thin glass 10 may have excellent edge strength, and the flexural strength of the ultra-thin glass 10 may be improved, and a plurality of ultra-thin glass laminates 50 and/or laminate units 5 may be separated from each other. Separation of each of the glasses 10 may be facilitated.

In the present invention, by laminating a plurality of ultra-thin glass 10 through an adhesive 20 to form an ultra-thin glass laminate 50, after increasing the thickness to a thickness exceeding 150 μm, processing such as cutting or edge processing It can be easily gripped at the time, and stable gripping is made to enable precise processing, and it is possible to prevent the ultra-thin glass 10 from being damaged during processing. In addition, a plurality of ultra-thin glass 10 can be processed at a time, and accordingly, processing of the ultra-thin glass 10 excellent in processing uniformity such as size can be made, and the number of cutting processes is reduced to make ultra-thin The processing time for the treatment of the glass 10 may be shortened.

Meanwhile, the ultra-thin glass 10 may have a thickness of 10 to 150 μm, and the ultra-thin glass laminate 50 may be formed by laminating 2 to 50 sheets of ultra-thin glass 10 . Glass generally has brittleness, and when its thickness exceeds 150 μm and has hardness, it is not bent well and breaks when bent forcibly, and is bent while maintaining product performance. Since it cannot be carried out, it cannot be applied to a flexible display. Accordingly, by etching the plate glass having a thickness of 400 μm or more with an etchant and etching it, the ultra-thin glass 10 having a thickness of 10 to 150 μm can be manufactured (or prepared) by reducing the thickness, and the ultra-thin glass ( 10) may have a thickness of 10 to 150 μm.

Recently, an ultra-thin glass 10 having a bend radius R of 1 to 10 mm is required to be applicable to a foldable display, and the ultra-thin glass 10 of the present invention has a bending radius of 1 to 10 mm. Here, the flexibility of the ultra-thin glass 10 can be characterized by a bending radius, and the bending radius R can be measured as the inner curvature at the bending position of the ultra-thin glass 10, and the ultra-thin It may be determined by the thickness T, Young's modulus, and bending strength of the glass 10 . At this time, the very thin thickness, low Young's modulus, and high bending strength of the ultra-thin glass 10 contribute to the low bending radius and excellent flexibility of the ultra-thin glass 10 . At a thickness of 150 μm or less, the ultra-thin glass 10 may have flexibility, but the ultra-thin glass 10 having a thickness of 100 to 150 μm is only capable of bending at a bendable level, and can be folded It is impossible to bend at the foldable level with a bending radius (R) of 1 to 10 mm. Accordingly, preferably, the ultra-thin glass 10 may have a thickness of 10 to 100 μm so that the foldable level of bending is possible.

The ultra-thin glass 10 may be an ultra-thin glass 10 that has been chemically strengthened to have a high flexural strength and/or a low Young's modulus. Here, the chemical strengthening may be performed by coating the surface and/or the edge of the ultra-thin glass 10 . For example, in the chemical strengthening, the surface of the ultra-thin glass 10 may be strengthened by forming a compressive stress layer on the surface of the ultra-thin glass 10 . That is, the ultra-thin glass 10 may include the compressive stress layer on the surface, and may be the ultra-thin glass 10 in which the compressive stress layer is formed on the surface by the chemical strengthening. The compressive stress layer may be formed on the surface of the ultra-thin glass 10 by ion exchange on the surface of the ultra-thin glass 10, and the compressive stress may correspond to the tensile stress when the ultra-thin glass 10 is bent. . Accordingly, the bending strength of the ultra-thin glass 10 may be improved, handling and processing for the ultra-thin glass 10 may be facilitated, and the bending radius of the ultra-thin glass 10 may be reduced, and the ultra-thin glass 10 ) can be improved.

At this time, the ultra-thin glass 10 having a composition containing alkali (eg, Li, Na, K, etc.) and/or aluminum (Al) can obtain high mechanical strength at a specific thickness (eg, about 100 μm or less). Not only that, but also excellent flexibility and bendability can be obtained. Sodium (Na) and lithium (Li) and Na ⁺ /Li ⁺ present in ultra-thin glass 10 using alkali metal oxides (eg, K ₂ O, Na ₂ O and Li _{2 O) as glass processing modifiers} , Na ⁺ /K ⁺ and Li ⁺ /K ⁺ by generating ion exchange, the compressive stress layer can be formed, and the ultra-thin glass 10 can be chemically strengthened.

For example, the chemical strengthening may be performed by dipping the ultra-thin glass 10 into a salt bath containing monovalent ions for exchange with alkali ions in the ultra-thin glass 10, The diameter of the monovalent ions in the ultra-thin glass 10 may be larger than the diameter of the alkali metal ions in the ultra-thin glass 10 , thereby generating a compressive stress acting on the surface of the ultra-thin glass 10 after ion exchange. Through this, the bending strength and flexibility of the ultra-thin glass 10 may be improved, and the compressive stress (CS) induced by the chemical strengthening increases the scratch resistance of the ultra-thin glass 10 to increase the ultra-thin The glass 10 can not be easily scratched, and the depth of the ion-exchange layer (DoL) increases scratch tolerance so that the ultra-thin glass 10 is less brittle even when scratched. can make it

The most commonly used salts for chemical strengthening are Na ⁺ containing molten salts or K ⁺ containing molten salts or mixtures thereof. Commonly used salts may include NaNO ₃ , KNO ₃ , NaCl, KCl, K ₂ SO ₄ , Na ₂ SO ₄ and Na ₂ CO ₃ , such as NaOH, KOH and other sodium salts or potassium salts or cesium salts. Additives may be used for better control of the ion exchange rate for the chemical strengthening.

On the other hand, the ultra-thin glass 10 _{may be a soda-lime glass containing sodium carbonate (Na 2} CO ₃ ), and a portion of the sodium ions (Na ⁺ ) on the surface of the ultra-thin glass 10 has a glass transition temperature Above (or softening point), potassium ions with larger ionic radii (K ⁺ ) and the like can be replaced. That is, in the structure of the ultra-thin glass 10, by putting ^{large K +} into the inner space of the ultra-thin glass 10 containing ^{Na + in the structure of the ultra-thin glass 10 to fill the small space containing Na +} , the surface of the ultra-thin glass 10 It can be compressed more strongly to have excellent elasticity, and can be resistant to surface scratches. Potassium ions (K ⁺ ) take up more space because the particles are larger than sodium ions (Na ^{+ ).} It is formed on the surface of the ultra-thin glass 10 and can have durability to prevent scratches and scratches. And the ultra-thin glass 10 is an alkali-containing glass (eg, alkali silicate glass, alkali borosilicate glass, alkali aluminoborosilicate glass, alkali boron glass, alkali germanate glass, alkali borogermanate glass and these combination), and may contain alkali to enable ion exchange and chemical strengthening.

The ultra-thin glass laminate 50 may be formed by laminating 2 to 50 sheets of ultra-thin glass 10 . Glass with a thickness exceeding 150 ㎛ (0.15 mm) can be processed such as edge processing using physical polishing in units of one sheet, and a rounded “C” shape is formed on the edge of the glass However, in the ultra-thin glass 10 having a thickness of 150 μm or less, 100% breakage, so the physical polishing method cannot be applied in units of one sheet. In order to prevent 100% breakage due to processing the ultra-thin glass 10 one by one, 2 to 50 sheets of ultra-thin glass 10 are laminated to form an ultra-thin glass laminate 50 having a thickness exceeding 150 μm, and then cut Machining, edge processing, etc. can be performed. In the case of processing a plurality of ultra-thin glass 10 at once after forming the ultra-thin glass laminate 50, it has a thickness exceeding 150 μm, so that it can be easily gripped during processing such as cutting or edge processing. , stable gripping is made, so that precise processing is possible, and it is possible to prevent the ultra-thin glass 10 from being damaged during processing. In addition, by processing a plurality of ultra-thin glass 10 at a time, the processing of the ultra-thin glass 10 excellent in processing uniformity such as size can be made, and the number of processing such as cutting is reduced, so that the ultra-thin glass 10 is The processing time for treatment may be shortened.

5 is a flowchart illustrating an ultra-thin glass processing method according to another embodiment of the present invention.

5, an ultra-thin glass processing method according to another embodiment of the present invention will be described in more detail with reference to FIG. 5, but matters overlapping with those described above in relation to the ultra-thin glass processing apparatus according to an embodiment of the present invention will be omitted. .

Ultra-thin glass processing method according to another embodiment of the present invention includes the process of supporting the first ultra-thin glass 11 on the stage 110 (S100); providing an adhesive 20 on the first ultra-thin glass 11 supported on the stage 110 (S200); The process of providing a second ultra-thin glass 12 on the adhesive 20 (S300); and spraying a gas through at least some of the plurality of pores 131a of the porous plate 131 to provide a pressing force on the second ultra-thin glass 12 (S400).

First, the first ultra-thin glass 11 is supported on the stage 110 (S100). The first ultra-thin glass 11 can be supported on the stage 110 , and the ultra-thin glass laminate 50 by laminating the second ultra-thin glass 12 on the first ultra-thin glass 11 through the adhesive 20 . ) can be fixed so that the first ultra-thin glass 10 does not move while forming. For example, the stage 110 may be fixed by adsorption by supporting the first ultra-thin glass 11 on a porous surface.

Next, an adhesive 20 is provided on the first ultra-thin glass 11 supported on the stage 110 (S200). An adhesive 20 may be provided on the first ultra-thin glass 11 supported on the stage 110 , and the first ultra-thin glass 11 and the second ultra-thin glass 12 may be bonded through the adhesive 20 . can In this case, the adhesive providing unit 120 may be used, and the liquid adhesive 20 having viscosity may be applied and provided on the first ultra-thin glass 11, and the liquid adhesive 20 such as resin. may be printed on the first ultra-thin glass 11 . Here, the adhesive 20 may be photocured by light such as ultraviolet (UV) light, and when cured, adhesive strength may be improved.

Then, a second ultra-thin glass 12 is provided on the adhesive 20 (S300). By providing the second ultra-thin glass 12 on the adhesive 20 , the first ultra-thin glass 11 and the second ultra-thin glass 12 can be adhered through the adhesive 20 . Here, the first ultra-thin glass 11 and the second ultra-thin glass 12 may be the same ultra-thin glass 10, and may be divided according to the lamination order.

And a gas (eg, air) is sprayed through at least some of the plurality of pores 131a of the porous plate 131 to provide a pressing force on the second ultra-thin glass 12 (S400). It is possible to provide a pressing force on the second ultra-thin glass 12, and the first ultra-thin glass 11 and the second ultra-thin glass 12 facing each other are brought close to the adhesive 20 so that the first ultra-thin glass 11 and It can be uniformly diffused between the second ultra-thin glass 12 . For example, by gradually pressing the second ultra-thin glass 12 exposed on the stage 110 , the liquid adhesive 20 is uniformly diffused between the first ultra-thin glass 11 and the second ultra-thin glass 12 . can make it happen Here, the porous plate 131 may have a plurality of pores 131a, and the pores 131a may be irregularly formed pores, or regularly arranged through holes forming a path. ) may be included. In this case, the porous plate 131 may inject gas through at least some of the plurality of pores 131a. By injecting a gas through at least some of the plurality of pores 131a to provide a pressing force on the (topmost) ultra-thin glass 10, a plurality of ultra-thin glasses 10 can be cemented in a non-contact manner, (the most ) It is possible to prevent contamination and damage to the surface of the upper ultra-thin glass 10.

That is, by spraying a gas through the porous plate 131 to provide a pressing force on the second ultra-thin glass 12 in a non-contact manner, while preventing contamination and breakage of the surface of the second ultra-thin glass 12, the first ultra-thin glass ( 11) and the second ultra-thin glass 12 may be bonded.

The first ultra-thin glass 11 and the second ultra-thin glass 12 may be laminated by an adhesive 20 to form an ultra-thin glass laminate 50, and 2 to 50 sheets of ultra-thin glass 10 are laminated. A thin glass laminate 50 can be formed. Glass with a thickness of more than 150 μm (0.15 mm) can be processed such as edge processing by using physical polishing in units of one sheet, and it is also possible to form a rounded C-shape in the shape of a “C” on the edge of the glass. , since 100% breakage in the first ultra-thin glass 11 or the second ultra-thin glass 12 having a thickness of 150 μm or less, the physical polishing method cannot be applied in units of one sheet. In order to prevent 100% breakage due to processing the first ultra-thin glass 11 or the second ultra-thin glass 12 one by one, 1 to 49 second sheets on the first ultra-thin glass 11 to a thickness of more than 150 μm After laminating the ultra-thin glass 12 to form the ultra-thin glass laminate 50, cutting processing, edge processing, etc. may be performed. In the case of processing the first ultra-thin glass 11 and the second ultra-thin glass 12 at once after forming the ultra-thin glass laminate 50, it has a thickness exceeding 150 μm, so processing such as cutting or edge processing It can be easily gripped at the time, and stable gripping is made so that precise processing is possible, and it is possible to prevent the first ultra-thin glass 11 or the second ultra-thin glass 12 from being damaged during processing. In addition, since the first ultra-thin glass 11 and the second ultra-thin glass 12 (ie, a plurality of ultra-thin glasses) are processed at once, the processing of the ultra-thin glass 10 excellent in processing uniformity, such as size, can be achieved. The number of times of processing, such as cutting, may be reduced, so that the processing time for the processing of the plurality of ultra-thin glass 10 may be shortened.

Here, the ultra-thin glass laminate 50 in which three or more sheets of ultra-thin glass 10 are laminated may be formed, and in order to form an ultra-thin glass laminate 50 in which three sheets of ultra-thin glass 10 are laminated, the second ultra-thin A third ultra-thin glass 13 may be further laminated on the glass 12, and on the second ultra-thin glass 12 to form an ultra-thin glass laminate 50 in which n sheets of ultra-thin glass 10 are laminated. Up to the n-th ultra-thin glass 10n, n-2 sheets of ultra-thin glass 10 may be further laminated. At this time, while providing the adhesive 20 to the surface (for example, the surface of the second ultra-thin glass) of the ultra-thin glass 10 exposed to the (most) upper part, n-2 sheets of ultra-thin glass 10 are further added can be laminated. The first ultra-thin glass 11, the second ultra-thin glass 12, and the third ultra-thin glass 13 may be classified according to the number of layers of the ultra-thin glass 10, and the n-th layer of the ultra-thin glass 10 is the nth It may be an ultra-thin glass 10n.

6 is a conceptual diagram for explaining the determination of a pressing force according to another embodiment of the present invention, FIG. 6 (a) is a gas pressure distribution for each area of the non-uniform porous plate by the determination of the pressing force according to the non-uniform height of the adhesive. , FIG. 6(b) shows the first ultra-thin glass and the second ultra-thin glass that are flatly cemented through the gas pressure distribution for each region of the non-uniform porous plate.

6, the ultra-thin glass processing method according to the present invention is the process of measuring the height of the adhesive 20 (S250); and determining the pressing force by the porous plate 131 (S260).

The height of the adhesive 20 can be measured (S250). The height of the adhesive 20 provided on the ultra-thin glass 10 (eg, on the first ultra-thin glass) can be measured using the height measuring unit 140, and the adhesive 20 at a plurality of points. It is possible to measure the height of the, at least two or more points to measure the height of the left and right and / or the adhesive 20 before and after, it is also possible to measure the height of the adhesive 20 of the front and rear left and right at four or more points have.

And the pressing force by the porous plate 131 can be determined (S260). Using the measured height (eg, average height) of the adhesive 20 (eg, on the second ultra-thin glass) on the (most) upper ultra-thin glass 10 through the non-contact pressing part 130 It is possible to determine the pressing force by the porous plate 131 provided to, and the adhesive 20 is uniform between the plurality of ultra-thin glass 10 (eg, between the first ultra-thin glass and the second ultra-thin glass) It is possible to determine an appropriate pressing force that can be spread evenly. For example, when the amount of the adhesive 20 is large because the height of the adhesive 20 is high, the adhesive 20 does not overflow and leak on the ultra-thin glass 10 (eg, on the first ultra-thin glass). It is possible to provide a low pressing force so as not to, and when the amount of the adhesive 20 is small because the height of the adhesive 20 is low, the adhesive 20 is on the ultra-thin glass 10 (for example, on the first ultra-thin glass) It is possible to provide a low pressing force so that it can be evenly spread on the At this time, when the amount of the adhesive 20 is not large and there is no concern that the adhesive 20 overflows and leaks on the ultra-thin glass 10, by providing the pressing force in proportion to the height of the adhesive 20, a plurality of ultra-thin glass The gap between (10) can be reduced as much as possible. That is, when the height of the adhesive 20 is high, a high pressing force is provided, and when the height of the adhesive 20 is low, a low pressing force is provided, thereby reducing the gap between the plurality of ultra-thin glass 10 .

And it is possible to measure the flatness of the adhesive 20 provided on the ultra-thin glass 10 using the height of the adhesive 20 measured at two or more points, and according to the measured flatness of the adhesive 20, the ultra-thin The gas pressure due to the pores 131a may be adjusted for each area of the glass 10 (eg, of the second ultra-thin glass). For example, as shown in Figure 6 (a), by selectively controlling the internal pressure of the pores (131a) for each area of the porous plate (131), the gas by the pores (131a) provided for each area of the ultra-thin glass (10) The pressure can be adjusted, and a relatively high gas pressure can be provided to a region where the height of the adhesive 20 is relatively high, and a relatively low gas pressure can be provided to a region where the height of the adhesive 20 is relatively low. have.

In this way, the pressing force by the porous plate 131 can be determined by measuring the height of the adhesive 20 at the plurality of points, and a plurality of ultra-thin glass 10 can be stably bonded according to the determined pressing force. And, by pressing the (top) upper ultra-thin glass 10, the flatness of the ultra-thin glass laminate 50 can be maintained at a certain level.

The ultra-thin glass processing method according to the present invention may further include a process (S50) of determining the distribution of relative pressure variables for each area of the porous plate 131 for surface pressure.

It is possible to determine the distribution of the relative pressure variable for each area of the porous plate 131 for the face pressure (S50). The porous plate 131 has pores 131a irregularly formed so that the density of pores 131a for each region of the porous plate 131 may vary, and each region (or portion) of the (top) upper ultra-thin glass 10 . The applied pressure may vary. And since each pore 131a of the porous plate 131 is formed to be spaced apart from each other, a portion in which the pore 131a is not formed occurs between each pore 131a, and due to this part, the (top) ultra-thin The distance from the nearest pore 131a varies depending on the portion (or point) of the glass 10 , so that the applied pressing force may vary depending on the portion of the (most) uppermost ultra-thin glass 10 . In addition, since a size error occurs between the plurality of pores 131a, the pressing force applied to each part of the (topmost) ultra-thin glass 10 may vary according to the size error. Even if the density of the pores 131a for each area of the porous plate 131 is different, or the same internal pressure is provided to all the plurality of pores 131a due to the spacing (distance) or size error between the plurality of pores 131a ( It may be impossible to provide a uniform pressing force on the uppermost ultra-thin glass 10 as a whole, and by pressing the (most) upper ultra-thin glass 10 with the same gas pressure (distribution) in this way, a plurality of ultra-thin glass 10 ), the flatness of the ultra-thin glass laminate 50 may be reduced when the pressure is applied. Accordingly, it is possible to determine the distribution of the relative pressure variable for each area of the porous plate 131 so as to provide a uniform pressing force as a whole on the (top) upper ultra-thin glass 10 . On the other hand, the relative pressure variable distribution for each area of the porous plate 131 so that the flatness of the ultra-thin glass laminate 50 is maintained at a certain level according to the measured height of the adhesive 20 and/or the height of the ultra-thin glass 10 may decide For example, a high gas pressure is provided to a high portion (or region) of the measured height of the adhesive 20 and/or of the ultra-thin glass 10, the measured height of the adhesive 20 and/or the ultra-thin glass The distribution of the relative pressure variable for each area of the porous plate 131 may be determined so that a low gas pressure is provided to the portion with a low height (10).

The ultra-thin glass processing method according to the present invention may further include a process (S60) of selectively controlling the internal pressure of the pores (131a) for each region of the porous plate (131).

And it is possible to selectively control the internal pressure of the pores (131a) for each region of the porous plate (131) (S60). In addition to making the internal pressure the same in all of the plurality of pores 131a, the internal pressure of the pores 131a is selectively selected for each region of the porous plate 131 according to the distribution of the relative pressure variable for each region of the porous plate 131 controllable, and the internal pressure of the pores 131a may be different (or different) for each region in which the pores 131a are located. At this time, the internal pressure of the pores 131a can be selectively controlled for each region of the porous plate 131 according to the distribution of the relative pressure variable for each region of the porous plate 131 , and the relative pressure for each region of the porous plate 131 can be selectively controlled. The variable distribution may be the determined distribution of the relative pressure variable for each area of the porous plate 131 , or the distribution of the relative pressure variable for each area of the corrected (or updated) porous plate 131 .

For example, the internal pressure of the pores 131a for each region of the porous plate 131 may be selectively controlled through the control unit 150 , and accordingly, the internal pressure of the pores 131a for each region of the porous plate 131 . The distribution can be controlled (or adjusted), and the gas pressure by the pores 131a provided for each area of the (top) upper ultra-thin glass 10 can be adjusted. Accordingly, according to the height of the applied adhesive 20 measured using the height measuring unit 140 and/or the surface height of the laminated ultra-thin glass 10, the gas pressure distribution by the pores 131a is controlled and/or can be corrected

Here, the internal pressure may be independently controlled for each of the plurality of pores 131a, or the internal pressure may be independently controlled for each group by grouping two or more of the plurality of pores 131a. For example, it is connected to a plurality of pores 131a and is connected to a gas valve 132b and/or a plurality of pores 131a respectively provided in a gas supply pipe 132a for supplying gas to the plurality of pores 131a. It is possible to selectively control the internal pressure of the pores (131a) for each region of the porous plate (131) by controlling the vacuum valve (133b) respectively provided in the vacuum tube path (133a) for forming a vacuum (pressure) in the. At this time, when the internal pressure is independently controlled for each of the plurality of pores 131a, the plurality of gas supply pipe lines 132a and/or the plurality of vacuum pipe paths 133a are respectively connected to the plurality of pores 131a and each A gas valve 132b and/or a vacuum valve 133b may be provided for each gas supply pipe 132a and/or the vacuum pipe 133a, and a plurality of pores 131a are grouped by two or more. A plurality of gas supply pipelines 132a and/or a plurality of vacuum pipelines 133a respectively connected to the pores 131a of A gas valve 132b and/or a vacuum valve 133b may be provided for each group of the plurality of vacuum tube paths 133a.

In addition, the porous plate 131 may be formed of a plurality of unit plates 131b in which pores 131a are respectively formed, and one pore 131a may be formed in each unit plate 131b, and a plurality of pores ( 131a) may be formed. When one pore 131a is formed in each unit plate 131b, one gas supply pipe 132a and/or a vacuum pipe 133a is connected for each unit plate 131b to facilitate each pore 131a. ) can be independently controlled, and when a plurality of pores 131a are formed in each unit plate 131b, the plurality of pores 131a may be grouped for each unit plate 131b, and each By connecting the gas supply pipe path 132a and/or the vacuum pipe path 133a for each unit plate 131b, the internal pressure of the grouped pores 131a can be easily controlled for each group. Through this, it is possible to control the internal pressure of the pores 131a for each unit plate 131b, and accordingly, it is possible to easily control (or adjust) the internal pressure of the pores 131a for each area of the porous plate 131. .

The process (S60) of selectively controlling the internal pressure of the pores 131a may be performed by independently controlling each of the plurality of unit plates 131b. For each of the plurality of unit plates 131b, the internal pressure of the pores 131a can be independently controlled, and by independently controlling each unit plate 131b, one pore 131a for each unit plate 131b ) is formed, the internal pressure of each pore 131a can be independently controlled, and when a plurality of pores 131a are formed for each unit plate 131b, the pores 131a grouped by each unit plate 131b )(s) can be controlled by group. In this case, the number of the plurality of unit plates 131b may be equal to or greater than the number of the plurality of points measuring the height of the adhesive 20 and/or the height of the ultra-thin glass 10 . Through this, it is possible to determine the internal pressure of the pores 131a of each unit plate 131b according to the height difference at the plurality of points, and maintain the flatness of the ultra-thin glass laminate 50 at a certain level while maintaining the plurality of ultra-thin The glass 10 may be laminated and adhered.

7 is a diagram showing a process for determining the distribution of relative pressure variables by area of a porous plate according to another embodiment of the present invention, FIG. Shows the provided state, Figure 7 (b) shows a state in which the preliminary ultra-thin glass is floated by spraying gas from all of the plurality of pores, Figure 7 (c) is a preliminary ultra-thin levitated preliminary ultra-thin glass by forming a negative pressure in some of the plurality of pores It shows the state which flattened the glass.

Referring to Figure 7, the process of determining the distribution of the relative pressure variable for each region (S50) is the process of providing a preliminary ultra-thin glass (10a) on the porous plate (131) (S51); The process of blowing a gas through at least some of the pores (131a) of the plurality of pores (131a) to float the preliminary ultra-thin glass (10a) (S52); The process of measuring the flatness of the floating preliminary ultra-thin glass (10a) (S53); And controlling the internal pressure of the pores (131a) for each area of the porous plate (131) according to the measured flatness of the preliminary ultra-thin glass (10a) to planarize the levitated preliminary ultra-thin glass (10a) (S54) can do.

In the process of determining the distribution of the relative pressure variable for each region (S50), as shown in FIG. 7(a), a preliminary ultra-thin glass 10a may be provided on the porous plate 131 (S51). At this time, the porous plate 131 may be arranged so that the pores (131a) face upward, and the pores (131a) are arranged to face the upper part to provide a preliminary ultra-thin glass (10a) on the plurality of pores (131a). It is possible to determine the distribution of the relative pressure variable for each area of the porous plate 131 while floating the preliminary ultra-thin glass 10a. After disposing the porous plate 131 so that the pores (131a) face upward, the gas is sprayed onto the preliminary ultra-thin glass 10a through the pores (131a) on the plurality of pores (131a) of the porous plate (131). An ultra-thin glass 10a may be provided.

And the preliminary ultra-thin glass 10a may be floated by spraying gas through at least some of the pores 131a among the plurality of pores 131a ( S52 ). The preliminary ultra-thin glass 10a may be floated by spraying gas through at least some of the plurality of pores 131a, and internal pressure may be formed in the plurality of pores 131a, and each of the pores 131a is a porous plate The internal pressure distribution of the pores 131a for each area of 131 may be achieved. At this time, in the initial stage when the distribution of the relative pressure variable for each region of the porous plate 131 is never determined, the gas may be injected through all the plurality of pores 131a.

Here, the flatness of the floating preliminary ultra-thin glass 10a may be measured in order to check whether a uniform pressing force is provided to the preliminary ultra-thin glass 10a (S53). Measuring (or measuring) the flatness of the floating preliminary ultra-thin glass (10a) by measuring the height of the preliminary ultra-thin glass (10a) floating through the height measuring unit 140 at least two or more of the plurality of points can At this time, as shown in Fig. 7 (b), the levitated preliminary ultra-thin glass 10a may not be flat, and when the levitated preliminary ultra-thin glass 10a is not flat, the overall uniform pressing force on the preliminary ultra-thin glass 10a This may mean that it is not provided, and in this case, it may be necessary to flatten the floating preliminary ultra-thin glass 10a so as to provide a uniform pressing force to the preliminary ultra-thin glass 10a as a whole.

Then, according to the measured flatness of the preliminary ultra-thin glass 10a, the internal pressure of the pores 131a for each area of the porous plate 131 may be controlled to flatten the levitated preliminary ultra-thin glass 10a (S54). . It is possible to control the internal pressure of the pores (131a) for each area of the porous plate 131, thereby correcting the flatness of the levitated preliminary ultra-thin glass (10a) to level the levitated preliminary ultra-thin glass (10a). can be flattened. In this way, it is possible to determine the distribution of relative pressure variables for each area of the porous plate 131 according to the internal pressure distribution of the pores 131a for each area of the porous plate 131 in which the levitated preliminary ultra-thin glass 10a is flattened.

Here, the process of planarizing the floating preliminary ultra-thin glass 10a (S54) may include a process (S5) of forming an internal pressure different from that of other pores in some of the plurality of pores 131a.

While planarizing the floating preliminary ultra-thin glass 10a, it is possible to form an internal pressure different from the other pores in some of the plurality of pores (131a) (S5). At this time, as shown in FIG. 7C , a negative pressure may be formed in some of the plurality of pores 131a. For example, by forming a negative pressure in the pores (131a) (s) corresponding to the relatively high part of the levitated preliminary ultra-thin glass 10a and pulling the relatively high part, the levitated preliminary ultra-thin The glass 10a can be made flat, and the flatness of the levitated preliminary ultra-thin glass 10a can be corrected. Here, a negative pressure may be formed in some of the plurality of pores 131a through the vacuum pump 133 connected to the porous plate 131 .

In a state in which the levitated preliminary ultra-thin glass 10a is tilted, even if the injection pressure is lowered to the pores (131a)(s) corresponding to the relatively elevated portions, or the gas supply is stopped, the surrounding pores (131a)(s) ), the relatively high portion under the influence of the injection pressure of the gas injected from the levitated preliminary ultra-thin glass (10a) cannot be lowered to a height enough to be flat. That is, when only positive pressure is formed in the plurality of pores 131a of the porous plate 131, even if the strength of the positive pressure in some pores 131a is lowered, the force to offset the positive pressure so that the relatively high portion can be lowered. Since this is not provided, it is impossible to pull the relatively high part.

However, when a negative pressure is formed in some of the plurality of pores 131a through the vacuum pump 133, the influence of the injection pressure (ie, positive pressure) of the gas injected from the surrounding pores 131a(s) is not affected. By offsetting the negative pressure, the relatively high portion can be pulled with a suction force, and accordingly, the positive pressure and negative pressure in each of the plurality of pores 131a are harmonized to levitate the levitation force in each portion of the preliminary ultra-thin glass 10a ( Or pressing force) and by adjusting the suction force, it is possible to flatten the inclined (or not flat) the levitated preliminary ultra-thin glass (10a).

8 is a conceptual view for explaining the control of the internal pressure of the pores for each area of the porous plate according to the height of the second ultra-thin glass according to another embodiment of the present invention, Figure 8 (a) is the flatness correction of the ultra-thin glass laminate shows the control of the internal pressure of the pores for each region of the porous plate, and FIG. 8 (b) shows the ultra-thin glass laminate planarized through the internal pressure control of the pores for each region of the porous plate.

Referring to Figure 8, the ultra-thin glass processing method according to the present invention is the process of measuring the height of the second ultra-thin glass 12 (S450); and controlling the internal pressure of the pores 131a for each area of the porous plate 131 according to the measured height of the second ultra-thin glass 12 (S460); may further include.

The height of the second ultra-thin glass 12 may be measured (S450). The height of the second ultra-thin glass 12 can be measured at a plurality of points through the height measurement unit 140, and the second ultra-thin glass using the height of the second ultra-thin glass 12 measured at two or more points. It is possible to measure the left and right flatness and/or the front and rear flatness of (12), and it is also possible to measure the height of the second ultra-thin glass 12 at four or more points so as to measure the flatness of both the front and rear left and right sides. Here, the number of the plurality of points for measuring the height of the second ultra-thin glass 12 may be the same as the number of the plurality of points for measuring the height of the adhesive 20 .

And it is possible to control the internal pressure of the pores (131a) for each area of the porous plate 131 according to the measured height of the second ultra-thin glass 12 (S460). The flatness of the second ultra-thin glass 12 can be measured according to the measured height of the second ultra-thin glass 12 at the plurality of points, and the porosity according to the measured flatness of the second ultra-thin glass 12 It is possible to control (or adjust) the internal pressure of the pores 131a for each region of the plate 131 , and the relative pressure variable for each region of the porous plate 131 corrected by reflecting the flatness of the second ultra-thin glass 12 . According to the distribution, it is possible to control the internal pressure of the pores (131a) for each area of the porous plate (131). For example, the corrected distribution of the relative pressure variable for each area of the porous plate 131 can be applied while stacking the third ultra-thin glass 13 as shown in FIG. 8, and the height of the second ultra-thin glass 12 is relatively high. A point (or region) can provide a relatively high gas pressure on the third ultra-thin glass 13, and at a point where the height of the second ultra-thin glass 12 is relatively low, on the third ultra-thin glass 13 A relatively low gas pressure can be provided. Through this, a plurality of ultra-thin glass 10 (for example, the first ultra-thin glass, the second ultra-thin glass, and the third ultra-thin glass) are bonded to each other to set the flatness of the laminated ultra-thin glass laminate 50 to a certain level. level can be maintained.

The ultra-thin glass processing method according to the present invention may further include a process (S500) of processing the ultra-thin glass laminate 50 in which the first ultra-thin glass 11 and the second ultra-thin glass 12 are laminated (S500).

In addition, the first ultra-thin glass 11 and the second ultra-thin glass 12 may be laminated to process the ultra-thin glass laminate 50 (S500). The ultra-thin glass laminate 50 in which the first ultra-thin glass 11 and the second ultra-thin glass 12 are laminated can be processed, and cutting processing for cutting to a predetermined size or shape and/or edge processing for trimming the edge surface, etc. processing can be performed.

That is, the process of processing the ultra-thin glass laminate 50 (S500) is the process of cutting the ultra-thin glass laminate 50 to a predetermined size (S510); and polishing the edge surface of the ultra-thin glass laminate 50 ( S520 ).

The ultra-thin glass laminate 50 may be cut to a predetermined size (S510). The ultra-thin glass laminate 50 may be cut to a required predetermined size to be divided (or separated) into laminate units 5 . For example, a computer numerically controlled cutter equipped with a cutting wheel 171 made of diamond abrasive may be used to cut (or separate) the laminate unit 5 of a certain size. Meanwhile, the ultra-thin glass laminate 50 may be cut by a laser cutting method using a laser.

And the edge surface of the ultra-thin glass laminate 50 may be polished (S520). Edge processing of grinding the edge surface of the ultra-thin glass laminate 50 may be performed, and chipping may be removed from the edge surface of the ultra-thin glass laminate 50 and/or the laminate unit 5 . . For example, fine chipping present on the edge surface of the ultra-thin glass laminate 50 and/or the shape-processed laminate unit 5 may be removed by using a polishing wheel. In this case, a fine and durable cloth may be used as the surface material of the polishing wheel. On the other hand, chemical edge polishing can also be performed to form a rounded C angle in the shape of a “C” for superior edge strength.

The ultra-thin glass processing method of the present invention may further include a process (S550) of separating the first ultra-thin glass 11 and the second ultra-thin glass 12 from the processed laminate unit 5, respectively.

In the processed laminate unit 5, the first ultra-thin glass 11 and the second ultra-thin glass 12 may be separated from each other (S550). In the processed laminate unit 5, the first ultra-thin glass 11 and the second ultra-thin glass 12 can be separated into sheets, respectively, and a special chemical (eg, acetone-based chemical or alkaline washing solution) or After dissolving and removing the adhesive 20 by solution treatment with deIonized water (DI water), etc., the first ultra-thin glass 11 and the second ultra-thin glass 12 (that is, a plurality of ultra-thin glasses) are separated one by one by hand. can do.

As such, in the present invention, by spraying a gas through the porous plate to provide a pressing force for bonding a plurality of ultra-thin glasses in a non-contact manner, contamination and damage to the surface of the ultra-thin glass can be prevented. In addition, by attaching a plurality of ultra-thin glasses by simultaneously providing a pressing force to the entire pressing surface of the ultra-thin glass in a full-face bonding method, the process time for bonding may be shortened compared to the case of sequentially pressing some surfaces using a roller or the like. And by measuring the height of the applied adhesive and/or the surface height of the laminated ultra-thin glass through the height measurement unit to control the internal pressure of the pores for each area of the porous plate, the pressing force can be adjusted differently for each area of the ultra-thin glass, and the ultra-thin glass The flatness of the laminate may be maintained at a certain level. In addition, by applying the distribution of the relative pressure variable for each region of the porous plate to the plurality of pores of the porous plate, it is possible to provide a uniform pressing force on the entire surface of the ultra-thin glass according to the state of the porous plate. And by configuring the porous plate with a plurality of unit plates to independently control each unit plate, it is possible to easily control the internal pressure of the pores for each region of the porous plate. On the other hand, a vacuum pump is connected to the porous plate to form a negative pressure in some pores while controlling the internal pressure of the pores for each area of the porous plate, thereby more effectively providing a uniform pressing force over the entire surface of the ultra-thin glass. and a plurality of ultra-thin glasses can be flattened without inclination.

The meaning of “on” used in the above description includes cases in direct contact and cases in which direct contact is not made but is located opposite to the upper or lower surface, and not only partially faces the upper surface or the lower surface but also partially It is also possible to be positioned to face each other, and it is used to mean that they face away from each other or directly contact the upper surface or the lower surface. Therefore, “on the stage” may be the surface (top surface or bottom surface) of the stage, or it may be on the surface of the ultra-thin glass provided on the surface of the stage.

Although preferred embodiments of the present invention have been illustrated and described above, the present invention is not limited to the above-described embodiments, and common knowledge in the field to which the present invention pertains without departing from the gist of the present invention as claimed in the claims It will be understood by those having the above that various modifications and equivalent other embodiments are possible therefrom. Accordingly, the technical protection scope of the present invention should be defined by the following claims.

5: laminated body unit 10: ultra-thin glass
10a: preliminary ultra-thin glass 11: first ultra-thin glass
12: 2nd ultra-thin glass 13: 3rd ultra-thin glass
20: adhesive 20a: cured adhesive
21: first adhesive 22: second adhesive
50: ultra-thin glass laminate 100: ultra-thin glass processing device
110: stage 120: adhesive supply unit
121: first adhesive discharge unit 122: second adhesive discharge unit
130: non-contact pressing unit 131: porous plate
131a: pore 131b: unit plate
132: gas supply source 132a: gas supply pipe
132b: gas valve 133: vacuum pump
133a: vacuum tube path 133b: vacuum valve
140: height measurement unit 150: control unit
155: pressure variable distribution storage unit 161: cutting wheel

Claims (18)

Stage for supporting ultra-thin glass;
Adhesive providing unit for providing an adhesive on the ultra-thin glass supported on the stage; and
Ultra-thin glass comprising a; including a porous plate having a plurality of pores, and spraying a gas through at least some of the plurality of pores to provide a pressing force on a plurality of ultra-thin glass laminated with the adhesive interposed therebetween processing unit. The method according to claim 1,
Ultra-thin glass processing apparatus further comprising a; height measuring unit for measuring at least one of the height of the adhesive and the height of the ultra-thin glass laminated on the adhesive. The method according to claim 1,
Ultra-thin glass processing apparatus further comprising a; a control unit for selectively controlling the internal pressure of the pores for each region of the porous plate. 4. The method according to claim 3,
It further comprises;
The control unit is an ultra-thin glass processing device for selectively controlling the internal pressure of the pores for each region of the porous plate according to the relative pressure variable distribution for each region of the porous plate stored in the pressure variable distribution storage unit. The method according to claim 1,
The porous plate is an ultra-thin glass processing device comprising a plurality of unit plates each having pores. The method according to claim 1,
The non-contact pressing unit,
a gas supply source connected to the porous plate and providing a gas to the at least some pores; and
It is connected to the porous plate, the ultra-thin glass processing apparatus further comprising at least one of the vacuum pump for forming a negative pressure in the pores of the remaining part of the plurality of pores. The method according to claim 1,
The planar area of the porous plate is more than the planar area of the ultra-thin glass processing apparatus. 8. The method of claim 7,
The non-contact pressing unit is an ultra-thin glass processing device for simultaneously providing the pressing force to the entire surface of the ultra-thin glass. The method according to claim 1,
Ultra-thin glass processing apparatus further comprising a; processing unit for processing the ultra-thin glass laminate in which the plurality of ultra-thin glasses are laminated. The process of supporting the first ultra-thin glass on the stage;
providing an adhesive on the first ultra-thin glass supported on the stage;
providing a second ultra-thin glass on the adhesive; and
The process of providing a pressing force on the second ultra-thin glass by spraying a gas through at least some of the plurality of pores of the porous plate; 11. The method of claim 10,
measuring the height of the adhesive; and
The process of determining the pressing force by the porous plate; Ultra-thin glass processing method further comprising. 11. The method of claim 10,
The process of determining the distribution of relative pressure variables for each area of the porous plate for face pressure; Ultra-thin glass processing method further comprising a. 11. The method of claim 10,
The process of selectively controlling the internal pressure of the pores for each area of the porous plate; Ultra-thin glass processing method further comprising a. 14. The method of claim 13,
The porous plate consists of a plurality of unit plates each having pores,
The process of selectively controlling the internal pressure of the pores is an ultra-thin glass processing method performed by independently controlling each of the plurality of unit plates. 13. The method of claim 12,
The process of determining the distribution of the relative pressure variable for each area is
providing a preliminary ultra-thin glass on the porous plate;
The process of flotation of the preliminary ultra-thin glass by injecting a gas through at least some of the pores of the plurality of pores;
The process of measuring the flatness of the floated preliminary ultra-thin glass; and
Controlling the internal pressure of the pores for each area of the porous plate according to the measured flatness of the preliminary ultra-thin glass, comprising the step of planarizing the levitated preliminary ultra-thin glass. 16. The method of claim 15,
The process of flattening the floating preliminary ultra-thin glass is an ultra-thin glass processing method comprising the process of forming an internal pressure different from other pores in some of the plurality of pores. 13. The method of claim 12,
measuring the height of the second ultra-thin glass; and
The process of controlling the internal pressure of the pores for each area of the porous plate according to the measured height of the second ultra-thin glass; Ultra-thin glass processing method further comprising. 11. The method of claim 10,
The process of processing the ultra-thin glass laminate in which the first ultra-thin glass and the second ultra-thin glass are laminated; Ultra-thin glass processing method further comprising.

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