JP2002144180A - Device and method for suction-holding glass plate - Google Patents
Device and method for suction-holding glass plateInfo
- Publication number
- JP2002144180A JP2002144180A JP2000341879A JP2000341879A JP2002144180A JP 2002144180 A JP2002144180 A JP 2002144180A JP 2000341879 A JP2000341879 A JP 2000341879A JP 2000341879 A JP2000341879 A JP 2000341879A JP 2002144180 A JP2002144180 A JP 2002144180A
- Authority
- JP
- Japan
- Prior art keywords
- glass plate
- suction
- holding
- liquid
- liquid supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ガラス板の外周部
の面取り加工を行う面取り装置等に使用するガラス板の
吸着保持装置及び吸着保持方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and method for holding and holding a glass sheet used in a chamfering apparatus for chamfering an outer peripheral portion of a glass sheet.
【０００２】[0002]
【従来の技術】従来から、ガラス板の面取り装置等に使
用する種々のガラス板の吸着保持装置が案出されて出願
されている（例えば、特開平８−４３８０７、特開２０
００−７３６２等）。一例として、図２に、吸着保持装
置１を示す。この吸着保持装置１は、ガラス板を保持定
盤２の載置面３に載置して位置決めし、載置面３に配設
した吸引孔４から吸引することにより、ガラス板を載置
面３に吸着保持するように構成されている。なお、ガラ
ス板の吸着保持は、図２に示すように、排気ポンプ５を
作動させ、空気を吸引経路７からマニホールド６を介し
て排気ポンプ５へ吸引することによって行われる。2. Description of the Related Art Conventionally, various suction and holding devices for a glass plate used in a glass plate chamfering device and the like have been devised and filed (for example, Japanese Patent Application Laid-Open Nos. 8-43807 and 20-43807).
00-7362). As an example, FIG. 2 shows the suction holding device 1. The suction holding device 1 places the glass plate on the mounting surface 3 of the holding platen 2, positions the glass plate, and sucks the glass plate through a suction hole 4 provided on the mounting surface 3, thereby holding the glass plate on the mounting surface 3. 3 to be held by suction. The suction holding of the glass plate is performed by operating the exhaust pump 5 and sucking air from the suction path 7 to the exhaust pump 5 through the manifold 6 as shown in FIG.
【０００３】[0003]
【発明が解決しようとする課題】しかし、このような吸
着保持装置１によれば、ガラス板を載置面３に載置して
位置決めする場合に、ガラス板と保持定盤２との間に摩
擦力が作用するため、位置決めが困難であるだけでな
く、ガラス板に擦れ傷が発生する要因となっている。ま
た、吸着保持装置１によれば、ガラス板に付着させてい
た水分が吸引孔４に吸引されて、ガラス板が乾燥し、水
分に含まれるミネラル分や不純物が析出してガラス板の
表面に表れる汚れ、いわゆるウォーターマークが発生す
ることがある。また、吸着保持装置１によれば、ガラス
板を保持定盤２から離隔させる場合に、排気手段へ高圧
空気を送ることによってガラス板を保持定盤２から解除
させていたが、高圧空気がガラス板に付着させていた水
分を剥離させ、ガラス板が乾燥してウォーターマークが
発生することもある。However, according to such a suction holding device 1, when the glass plate is placed on the mounting surface 3 and positioned, the gap between the glass plate and the holding platen 2 is required. Because of the frictional force, not only is it difficult to position, but also causes abrasion on the glass plate. In addition, according to the adsorption holding device 1, the water adhered to the glass plate is sucked into the suction holes 4, and the glass plate is dried, and the minerals and impurities contained in the water are precipitated to form on the surface of the glass plate. Appearing stains, so-called watermarks, may occur. Further, according to the suction holding device 1, when the glass plate is separated from the holding platen 2, the glass plate is released from the holding platen 2 by sending high-pressure air to the exhaust means. In some cases, moisture adhering to the plate is peeled off, and the glass plate is dried to form a watermark.
【０００４】本発明の目的は、ガラス板を保持定盤上に
載置して容易に位置決めが可能であり、ガラス板に擦れ
傷が発生せず、ガラス板が乾燥してウォーターマークが
発生することのないガラス板の吸着保持装置及び吸着保
持方法を提供することにある。An object of the present invention is to enable easy positioning by placing a glass plate on a holding platen, without causing scratches on the glass plate, and drying the glass plate to generate a watermark. It is an object of the present invention to provide an apparatus and method for holding and holding a glass plate without any problem.
【０００５】[0005]
【課題を解決するための手段】本発明のガラス板の吸着
保持装置は、ガラス板を載置する載置面に液体供給孔及
び複数の吸引孔を配設した保持定盤と、該液体供給孔に
通じて液体を載置面に流出させる液体供給手段と、該吸
引孔に通じる排気手段とを備えてなることを特徴とす
る。According to the present invention, there is provided a glass plate suction holding device, comprising: a holding plate having a liquid supply hole and a plurality of suction holes disposed on a mounting surface on which a glass plate is mounted; It is characterized by comprising a liquid supply means for flowing the liquid to the mounting surface through the hole, and an exhaust means to the suction hole.
【０００６】上記において、液体とは、水、水溶性溶
液、又はその他のガラス板の乾燥を防止できる液体を言
う。また、液体供給手段とは、液体配管をマニホールド
により複数本のホースに分岐させた液体供給手段、吸入
孔へ流入した液体をドレン及び水圧ポンプ等を介して巡
回させて液体供給孔から供給する液体供給手段、又は液
体配管のみから成る液体供給手段等を言う。また、排気
手段とは、シリンダの往復運動又は羽根車の回転運動等
により吸引孔内の圧力を保持定盤の外部の圧力より小さ
く減圧する手段を言う。In the above description, the liquid refers to water, a water-soluble solution, or any other liquid capable of preventing the glass plate from drying. The liquid supply means is a liquid supply means in which a liquid pipe is branched into a plurality of hoses by a manifold, and a liquid supplied to the liquid supply hole by circulating the liquid flowing into the suction hole through a drain and a hydraulic pump. It refers to a supply unit or a liquid supply unit including only a liquid pipe. The exhaust means means a means for reducing the pressure in the suction hole to be smaller than the pressure outside the holding platen by the reciprocating motion of the cylinder or the rotating motion of the impeller.
【０００７】上記本発明のガラス板の吸着保持装置によ
れば、載置面に液体供給孔が配設されており、載置面に
液体を供給することができる。このため、ガラス板を載
置面に位置決めする時に、ガラス板を載置面に沿って円
滑に摺動させることができるので、ガラス板の表面に擦
れ傷が発生することを防止できる。また、ガラス板の吸
着保持時に、所定流量の液体を載置面の液体供給孔から
流出させるため、ガラス板の表面が乾燥せず、ウォータ
ーマークが発生することを防止できる。また、吸入孔の
開口部周辺を液体によりシールすることができるので、
開口部周辺でのガラス板と載置面との密閉度を高めて、
ガラス板を載置面に強固に吸着保持できる。According to the apparatus for holding and holding a glass plate of the present invention, the liquid supply hole is provided on the mounting surface, and the liquid can be supplied to the mounting surface. For this reason, when positioning the glass plate on the mounting surface, the glass plate can be smoothly slid along the mounting surface, so that abrasion on the surface of the glass plate can be prevented. In addition, since a predetermined amount of liquid is caused to flow out of the liquid supply holes on the mounting surface when the glass plate is held by suction, the surface of the glass plate does not dry, thereby preventing generation of a watermark. Also, since the periphery of the opening of the suction hole can be sealed with liquid,
Increase the degree of sealing between the glass plate and the mounting surface around the opening,
The glass plate can be firmly sucked and held on the mounting surface.
【０００８】また、本発明のガラス板の吸着保持装置
は、前記載置面に溝が設けられており、該溝内に前記液
体供給孔が開口していることを特徴とする。Further, in the suction holding device for a glass plate according to the present invention, a groove is provided on the placement surface, and the liquid supply hole is opened in the groove.
【０００９】このような本発明のガラス板の吸着保持装
置によれば、液体供給孔から流出した液体を溝に流して
載置面に吸着保持されたガラス板と載置面との略全界面
に液体を分配して供給することができるので、ガラス板
の乾燥を防止するだけでなく、液体の分配によってガラ
ス板の洗浄度を維持することができる。また、均等にガ
ラス板に液体を供給できるため、ガラス板の表面にウォ
ーターマークが発生することを防止するという効果が顕
著になる。また、液体供給孔から流出する液体が直接ガ
ラス板に当たらず溝を介して載置面に吸着保持している
ガラス板に当たるので、液体の膜が薄くなり液体の押圧
力が分散されて、ガラス板を載置面に強固に吸着保持で
き、吸着保持によるガラス板のクラック発生を防止する
ことができる。According to the apparatus for holding and holding a glass plate of the present invention, the liquid flowing out of the liquid supply hole flows into the groove and substantially the entire interface between the glass plate and the mounting surface which is sucked and held on the mounting surface. The liquid can be distributed and supplied, so that not only the drying of the glass plate can be prevented, but also the degree of cleaning of the glass plate can be maintained by distributing the liquid. In addition, since the liquid can be evenly supplied to the glass plate, the effect of preventing generation of a watermark on the surface of the glass plate becomes remarkable. In addition, the liquid flowing out of the liquid supply hole does not directly hit the glass plate, but hits the glass plate that is sucked and held on the mounting surface via the groove. The plate can be firmly suction-held on the mounting surface, and the occurrence of cracks in the glass plate due to the suction-holding can be prevented.
【００１０】また、本発明のガラス板の吸着保持方法
は、ガラス板を載置する載置面に液体供給孔及び複数の
吸引孔を配設した保持定盤を備えておき、該液体供給孔
から液体を流出させて載置面に液体を供給し、該載置面
にガラス板を載置し、該液体供給孔から液体を流出させ
ながら吸引孔から吸引してガラス板を吸着保持し、所定
時間経過後に該吸引を停止してガラス板の吸着保持を解
除することを特徴とする。Further, according to the method for holding a glass plate by suction of the present invention, a holding surface plate provided with a liquid supply hole and a plurality of suction holes is provided on a mounting surface on which the glass plate is mounted. The liquid is supplied to the mounting surface by flowing the liquid from the liquid, the glass plate is mounted on the mounting surface, and the liquid is sucked from the suction hole while the liquid is flowing out from the liquid supply hole to suck and hold the glass plate, After a lapse of a predetermined time, the suction is stopped to release the suction holding of the glass plate.
【００１１】上記において、吸引孔からの吸引により吸
引力を負荷されるのは、ガラス板、液体及び空気であ
り、ガラス板は吸引力により載置面に吸着保持され、液
体及び空気は吸引力により吸引孔へ流入する。また、所
定時間とは、面取り加工等に要する時間を言う。In the above, it is the glass plate, the liquid and the air that are subjected to the suction force by the suction from the suction hole. The glass plate is sucked and held on the mounting surface by the suction force, and the liquid and the air are sucked by the suction force. Flows into the suction hole. The predetermined time refers to a time required for chamfering or the like.
【００１２】このようなガラス板の吸着保持方法によれ
ば、吸引を停止してガラス板の吸着保持を解除するの
で、ガラス板と載置面との間に常に液体を介在させるこ
とにより、ガラス板が円滑に摺動可能となり、ガラス板
の表面に擦れ傷が発生することを防止できる。また、ガ
ラス板の吸着保持時及び解除時に液体供給孔から流出し
た液体が吸引孔へ完全に流入することを防止して、ガラ
ス板の乾燥を防止できる。According to such a method of holding and holding a glass plate, the suction is stopped and the suction and holding of the glass plate is released. Therefore, the liquid is always interposed between the glass plate and the mounting surface, so that the glass is held. The plate can be slid smoothly, and the surface of the glass plate can be prevented from being scratched. Further, it is possible to prevent the liquid flowing out of the liquid supply hole from completely flowing into the suction hole at the time of holding and releasing the glass plate by suction, and to prevent the glass plate from drying.
【００１３】また、本発明のガラス板の吸着保持方法
は、前記ガラス板の吸着保持を解除するときに、前記液
体供給孔からの液体の流出流量を増大させることを特徴
とする。Further, in the method of holding a glass plate by suction according to the present invention, the flow rate of liquid flowing out from the liquid supply hole is increased when the suction holding of the glass plate is released.
【００１４】上記において、流出流量とは、液体が液体
供給孔から載置面へ単位時間当たりに流出する質量又は
体積を言い、流量の単位は、ｋｇ／ｓｅｃ等である。ま
た、流出流量を制御する流量制御手段は、止め弁若しく
は絞り弁等の流量制御弁、手動切換弁若しくは電磁切換
弁等の切換弁、又は水圧ポンプ等、特に限定されない。
また、電磁切換弁又は水圧ポンプ等の制御を行う制御手
段は、シーケンサー、ＣＰＵを使用した専用機、汎用コ
ンピューター等、特に限定されない。In the above description, the outflow flow rate refers to the mass or volume of the liquid flowing out of the liquid supply hole to the mounting surface per unit time, and the unit of the flow rate is kg / sec or the like. The flow control means for controlling the outflow flow rate is not particularly limited, such as a flow control valve such as a stop valve or a throttle valve, a switching valve such as a manual switching valve or an electromagnetic switching valve, or a hydraulic pump.
The control means for controlling the electromagnetic switching valve or the hydraulic pump is not particularly limited to a sequencer, a dedicated machine using a CPU, a general-purpose computer, or the like.
【００１５】このような本発明のガラス板の吸着保持方
法によれば、液体供給孔から流出させる液体の流出流量
を増大させることによりガラス板を保持定盤の載置面か
ら解除することができるので、従来のように、高圧空気
を送ることによってガラス板を保持定盤から解除する方
法と異なり、高圧空気がガラス板に付着させていた水分
を剥離させることがなく、ガラス板の表面が乾燥せず、
ウォーターマークが発生することを防止できる。また、
ガラス板と載置面との界面に十分な液体が供給されるの
で、ガラス板の表面に擦れ傷が生じることなく迅速な離
隔が可能となる。According to such a method of holding and holding a glass plate of the present invention, the glass plate can be released from the mounting surface of the holding platen by increasing the flow rate of the liquid flowing out from the liquid supply hole. Unlike the conventional method of releasing the glass plate from the surface plate by sending high-pressure air, unlike the conventional method, the high-pressure air does not remove the moisture adhering to the glass plate, and the surface of the glass plate is dried. Without
The generation of a watermark can be prevented. Also,
Since a sufficient amount of liquid is supplied to the interface between the glass plate and the mounting surface, rapid separation can be achieved without causing scratches on the surface of the glass plate.
【００１６】[0016]
【発明の実施の形態】次に、本発明に係るガラス板の吸
着保持装置及び吸着保持方法について、図面に基づいて
詳しく説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an apparatus and method for holding and holding a glass sheet according to the present invention will be described in detail with reference to the drawings.
【００１７】図１において、符号１０は、本発明のガラ
ス板の吸着保持装置である。この吸着保持装置１０は、
例えば、面取り装置等によってガラス板１２の外周部の
面取り加工を行うために使用する装置であり、ガラス板
１２を載置する載置面１６に液体供給孔２０及び複数の
吸引孔１８を配設した保持定盤１４と、液体供給孔２０
に通じて水（液体）を載置面１６に流出させる液体供給
手段４２と、吸引孔１８に通じる排気手段４０とを備え
た吸着保持装置である。In FIG. 1, reference numeral 10 denotes a glass plate suction holding device of the present invention. This suction holding device 10
For example, it is a device used for chamfering the outer peripheral portion of the glass plate 12 by a chamfering device or the like. A liquid supply hole 20 and a plurality of suction holes 18 are provided on a mounting surface 16 on which the glass plate 12 is mounted. Holding platen 14 and liquid supply hole 20
This is a suction holding device including a liquid supply means 42 for causing water (liquid) to flow out to the mounting surface 16 through the flow path, and an exhaust means 40 for communicating with the suction hole 18.
【００１８】載置面１６には溝２６が設けられ、溝２６
内に液体供給孔２０が開口しており、液体供給孔２０か
ら流出させた水を溝２６を介して載置面１６に供給する
ことにより、載置面１６に吸着保持されるガラス板１２
に水を供給するように構成されている。The mounting surface 16 is provided with a groove 26,
A liquid supply hole 20 is opened in the inside, and by supplying water flowing out of the liquid supply hole 20 to the mounting surface 16 through the groove 26, the glass plate 12 sucked and held on the mounting surface 16 is provided.
It is configured to supply water to.
【００１９】また、吸引孔１８は、排気ポンプ２８を作
動させることにより、空気を、吸引孔１８から、保持定
盤１４内の吸入経路４６、複数のホース３０、一のマニ
ホールド３２、及びドレン３４を介して排気ポンプ２８
まで吸引することにより、載置面１６に載置したガラス
板１２を吸着保持するように構成されている。また、排
気ポンプ２８を作動させた場合、液体供給孔２０から流
出させた水が吸引孔１８から配管へ流入するが、その流
入した水をドレン３４において空気と分離して止め弁３
６を介して外部へ排出するように構成されている。ま
た、排気ポンプ２８は吸引孔１８に流入する空気及び水
の混合流体の流量を制御することが可能であり、排気ポ
ンプ２８は、吸引孔１８へ流入する水の流入流量を制御
する流入流量制御手段としての機能を有している。な
お、図１に示すように、保持定盤１４内の供給経路４４
及び吸入経路４６は、互いに導通しないように配置され
ている。By operating the exhaust pump 28, air is drawn from the suction hole 18 through the suction hole 18 into the suction passage 46 in the holding platen 14, the plurality of hoses 30, the one manifold 32, and the drain 34. Through the exhaust pump 28
The glass plate 12 placed on the placement surface 16 is sucked and held by sucking up to the maximum. When the exhaust pump 28 is operated, water flowing out of the liquid supply hole 20 flows into the pipe through the suction hole 18, but the flowed water is separated from the air in the drain 34 and is stopped by the stop valve 3.
6 to the outside. The exhaust pump 28 can control the flow rate of the mixed fluid of air and water flowing into the suction hole 18. The exhaust pump 28 controls the flow rate of the water flowing into the suction hole 18. It has a function as a means. In addition, as shown in FIG.
And the suction path 46 are arranged so as not to conduct with each other.
【００２０】このような吸着保持装置１０を使用した本
発明の吸着保持方法について、以下に説明する。The suction holding method of the present invention using such a suction holding device 10 will be described below.
【００２１】ガラス板１２の外周の面取りを行うため
に、本発明の吸着保持装置１０によってガラス板１２を
保持定盤１４に位置決めして吸着保持する場合には、ま
ず、水供給源から送られた微量の水をマニホールド２２
を介して液体供給孔２０から流出させて溝２６内を流
し、載置面１６の全表面に十分な水を供給する。次に、
ガラス板１２を載置面１６に載置して位置決めする。次
に、排気ポンプ２８を作動させることにより、吸引孔１
８から吸引してガラス板１２を載置面１６に吸着保持す
る。次に、吸引力を損なわずかつ表面の乾燥を防止可能
な流量の水をガラス板１２に供給しつつ吸着保持して、
面取り装置によるガラス板１２の面取り加工を行う。な
お、保持定盤１４の載置面１６を複数の孔を有するシー
トや布等で被覆し、このシート上にガラス板１２を載置
して吸着保持することが望ましい。本発明者が実際に試
験を行った結果、シートの外周辺に沿って水が行き渡る
こと及びクラック防止や傷防止の効果があることが確認
されたからである。When the glass plate 12 is positioned and held on the holding platen 14 by the suction holding device 10 of the present invention in order to chamfer the outer periphery of the glass plate 12, first, the glass plate 12 is sent from a water supply source. A small amount of water
And flows through the groove 26 through the liquid supply hole 20 to supply sufficient water to the entire surface of the mounting surface 16. next,
The glass plate 12 is mounted on the mounting surface 16 and positioned. Next, by operating the exhaust pump 28, the suction holes 1
Then, the glass plate 12 is sucked and held on the mounting surface 16 by suction. Next, water is supplied to the glass plate 12 at a flow rate capable of preventing a slight drying of the surface that impairs the suction force and is sucked and held,
The glass plate 12 is chamfered by a chamfering device. It is desirable that the mounting surface 16 of the holding platen 14 is covered with a sheet or cloth having a plurality of holes, and the glass plate 12 is mounted on the sheet and held by suction. This is because the present inventor actually conducted a test, and as a result, it was confirmed that water was distributed along the outer periphery of the sheet and that cracks and scratches were prevented.
【００２２】なお、排気ポンプ２８を作動させているた
め、液体供給孔２０から流出した水は吸引孔１８へ流入
していく。液体供給孔２０から流出した水が吸引孔１８
へ流入していくため、水が溝２６から吸引孔１８へ絶え
ず流れており、ガラス板１２の乾燥を防止できるととも
に、ガラス板１２全体に渡って水を供給できる。Since the exhaust pump 28 is operated, the water flowing out of the liquid supply hole 20 flows into the suction hole 18. The water flowing out of the liquid supply hole 20 is supplied to the suction hole 18.
Since the water flows into the suction hole 18, the water is constantly flowing from the groove 26 to prevent the glass plate 12 from drying, and water can be supplied to the entire glass plate 12.
【００２３】次に、面取り加工を終了して、ガラス板１
２の保持定盤１４への吸着保持を解除する場合には、流
量制御弁等によって液体供給孔２０から流出する水の流
量を増大させるとともに、流入流量制御手段によって排
気手段４０を閉鎖する。これにより、溝２６内の水の量
が増大してガラス板１２と載置面１６との間に水が浸入
し、ガラス板１２の保持定盤１４への吸着保持が解除さ
れる。Next, after finishing the chamfering, the glass plate 1
In order to release the suction holding of the second holding plate 14, the flow rate of the water flowing out of the liquid supply hole 20 is increased by a flow control valve or the like, and the exhaust means 40 is closed by the inflow flow control means. As a result, the amount of water in the groove 26 increases, so that water enters between the glass plate 12 and the mounting surface 16, and the suction holding of the glass plate 12 to the holding platen 14 is released.
【００２４】このような吸着保持装置１０及び吸着保持
方法によれば、ガラス板１２に水を供給しながらガラス
板１２の面取り加工を行うため、吸引孔１８への水の吸
引によってガラス板１２が乾燥することがないので、ガ
ラス板１２が乾燥してガラス板１２の表面にウォーター
マークが発生することを防止できる。また、供給経路４
４から吸入経路４６へ水を循環させることにより保持定
盤１４を略一定の温度に維持できるため、面取り加工を
安定した環境下で行うことができる。According to the suction holding device 10 and the suction holding method, the glass plate 12 is chamfered while supplying water to the glass plate 12. Since there is no drying, it is possible to prevent the glass plate 12 from drying and generating a watermark on the surface of the glass plate 12. In addition, supply route 4
By circulating water from the suction path 4 to the suction path 46, the holding platen 14 can be maintained at a substantially constant temperature, so that chamfering can be performed in a stable environment.
【００２５】以上、本発明の一実施形態について説明し
たが、本発明の吸着保持装置及び吸着保持方法は、その
他の形態でも実施し得るものである。また、本発明の技
術的範囲には、その趣旨を逸脱しない範囲で当業者の知
識に基づき種々なる改良，修正，変形を加えた態様も含
まれる。また、発明の本質的特徴部分を変更せず同一の
作用又は効果が生じる範囲内で、いずれかの発明特定事
項を他の技術に置換した態様で実施してもよい。また、
一体に構成されている発明特定事項を複数の部材から構
成して実施しても、複数の部材から構成されている発明
特定事項を一体に構成して実施してもよい。Although the embodiment of the present invention has been described above, the suction holding apparatus and the suction holding method of the present invention can be implemented in other forms. Further, the technical scope of the present invention includes embodiments in which various improvements, corrections, and modifications are made based on the knowledge of those skilled in the art without departing from the spirit of the present invention. Further, within a range in which the same operation or effect is produced without changing the essential characteristic part of the invention, any of the invention specific matters may be replaced with another technology. Also,
The invention-specific matter integrally configured may be implemented by a plurality of members, or the invention-specific matter constituted by a plurality of members may be integrally implemented.
【００２６】[0026]
【発明の効果】以上のように本発明のガラス板の吸着保
持装置及び吸着保持方法によれば、載置面に液体供給孔
が配設されているため、ガラス板の保持定盤への位置決
め時に、ガラス板を載置面に沿って円滑に摺動させて位
置決めできるとともに、ガラス板に擦れ傷が発生するこ
とを防止できる。また、ガラス板の面取り加工時に、ガ
ラス板が乾燥してガラス板の表面にウォーターマークが
発生することを防止できる。As described above, according to the apparatus and method for holding and holding a glass plate of the present invention, since the liquid supply holes are provided on the mounting surface, the glass plate is positioned on the holding platen. Sometimes, the glass plate can be smoothly slid along the mounting surface for positioning, and the glass plate can be prevented from being scratched. In addition, during the chamfering of the glass plate, it is possible to prevent the glass plate from drying and generating a watermark on the surface of the glass plate.
【図１】本発明の吸着保持装置を示す斜視図である。FIG. 1 is a perspective view showing a suction holding device of the present invention.
【図２】従来の吸着保持装置を示す平面図である。FIG. 2 is a plan view showing a conventional suction holding device.
１０ 吸着保持装置 １２ ガラス板 １４ 保持定盤 １６ 載置面 １８ 吸引孔 ２０ 液体供給孔 ２６ 溝 ４０ 排気手段 DESCRIPTION OF SYMBOLS 10 Suction holding apparatus 12 Glass plate 14 Holding surface plate 16 Mounting surface 18 Suction hole 20 Liquid supply hole 26 Groove 40 Exhaust means
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 3C016 BA02 CE05 DA02 3C034 AA13 BB73 DD08 3C049 AA02 AB04 CA06 CB06 5F031 CA05 HA13 HA32 PA23 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3C016 BA02 CE05 DA02 3C034 AA13 BB73 DD08 3C049 AA02 AB04 CA06 CB06 5F031 CA05 HA13 HA32 PA23
Claims (4)
及び複数の吸引孔を配設した保持定盤と、該液体供給孔
に通じて液体を載置面に流出させる液体供給手段と、該
吸引孔に通じる排気手段とを備えてなることを特徴とす
るガラス板の吸着保持装置。1. A holding surface plate having a liquid supply hole and a plurality of suction holes disposed on a mounting surface on which a glass plate is mounted, and a liquid supply means for flowing the liquid to the mounting surface through the liquid supply hole. And an exhaust means communicating with the suction hole.
内に前記液体供給孔が開口していることを特徴とする請
求項１に記載するガラス板の吸着保持装置。2. The apparatus according to claim 1, wherein a groove is provided in the mounting surface, and the liquid supply hole is opened in the groove.
及び複数の吸引孔を配設した保持定盤を備えておき、該
液体供給孔から液体を流出させて載置面に液体を供給
し、該載置面にガラス板を載置し、該液体供給孔から液
体を流出させながら吸引孔から吸引してガラス板を吸着
保持し、所定時間経過後に該吸引を停止してガラス板の
吸着保持を解除することを特徴とするガラス板の吸着保
持方法。3. A holding surface plate provided with a liquid supply hole and a plurality of suction holes is provided on a mounting surface on which a glass plate is mounted, and the liquid is caused to flow out of the liquid supply hole and the liquid is supplied to the mounting surface. Is supplied, the glass plate is placed on the placement surface, the liquid is sucked from the suction hole while the liquid is flowing out from the liquid supply hole, and the glass plate is sucked and held. A method for sucking and holding a glass plate, comprising releasing the sucking and holding of the plate.
に、前記液体供給孔からの液体の流出流量を増大させる
ことを特徴とする請求項３に記載するガラス板の吸着保
持方法。4. The method for adsorbing and holding a glass sheet according to claim 3, wherein when releasing the suction and holding of the glass sheet, the flow rate of the liquid flowing out from the liquid supply hole is increased.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000341879A JP4756295B2 (en) | 2000-11-09 | 2000-11-09 | Adsorption holding device and adsorption holding method for glass plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000341879A JP4756295B2 (en) | 2000-11-09 | 2000-11-09 | Adsorption holding device and adsorption holding method for glass plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002144180A true JP2002144180A (en) | 2002-05-21 |
| JP4756295B2 JP4756295B2 (en) | 2011-08-24 |
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ID=18816537
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000341879A Expired - Fee Related JP4756295B2 (en) | 2000-11-09 | 2000-11-09 | Adsorption holding device and adsorption holding method for glass plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4756295B2 (en) |
Cited By (10)
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|---|---|---|---|---|
| JP2008074565A (en) * | 2006-09-21 | 2008-04-03 | Nippon Electric Glass Co Ltd | Suction-holding method and suction-holding pad for plate-like object |
| WO2009107685A1 (en) * | 2008-02-29 | 2009-09-03 | 旭硝子株式会社 | Glass substrate suction table, and method for processing of glass substrate |
| JP2014086485A (en) * | 2012-10-22 | 2014-05-12 | Disco Abrasive Syst Ltd | Carrying method |
| JP2015098151A (en) * | 2013-11-20 | 2015-05-28 | 株式会社リコー | Sheet material placement device and image formation device |
| JP2016022552A (en) * | 2014-07-18 | 2016-02-08 | 株式会社ディスコ | Processing device |
| JP2016215314A (en) * | 2015-05-20 | 2016-12-22 | 株式会社ディスコ | Cutting device |
| JPWO2015083613A1 (en) * | 2013-12-03 | 2017-03-16 | 株式会社ハーモテック | Holding device |
| WO2018194022A1 (en) * | 2017-04-20 | 2018-10-25 | 日本電気硝子株式会社 | Glass plate production method and production apparatus |
| WO2019054127A1 (en) * | 2017-09-15 | 2019-03-21 | 日本電気硝子株式会社 | Method and apparatus for producing glass plate |
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|---|---|---|---|---|
| JP2008074565A (en) * | 2006-09-21 | 2008-04-03 | Nippon Electric Glass Co Ltd | Suction-holding method and suction-holding pad for plate-like object |
| WO2009107685A1 (en) * | 2008-02-29 | 2009-09-03 | 旭硝子株式会社 | Glass substrate suction table, and method for processing of glass substrate |
| JP2009203141A (en) * | 2008-02-29 | 2009-09-10 | Asahi Glass Co Ltd | Glass substrate suction table and glass substrate processing method |
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| CN101959814B (en) * | 2008-02-29 | 2014-05-14 | 旭硝子株式会社 | Glass substrate suction table, and method for processing of glass substrate |
| JP2014086485A (en) * | 2012-10-22 | 2014-05-12 | Disco Abrasive Syst Ltd | Carrying method |
| JP2015098151A (en) * | 2013-11-20 | 2015-05-28 | 株式会社リコー | Sheet material placement device and image formation device |
| JPWO2015083613A1 (en) * | 2013-12-03 | 2017-03-16 | 株式会社ハーモテック | Holding device |
| JP2016022552A (en) * | 2014-07-18 | 2016-02-08 | 株式会社ディスコ | Processing device |
| JP2016215314A (en) * | 2015-05-20 | 2016-12-22 | 株式会社ディスコ | Cutting device |
| WO2018194022A1 (en) * | 2017-04-20 | 2018-10-25 | 日本電気硝子株式会社 | Glass plate production method and production apparatus |
| CN110430971A (en) * | 2017-04-20 | 2019-11-08 | 日本电气硝子株式会社 | The manufacturing method and manufacturing device of glass plate |
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| JP7046319B2 (en) | 2017-04-20 | 2022-04-04 | 日本電気硝子株式会社 | Glass plate manufacturing method and manufacturing equipment |
| TWI762620B (en) * | 2017-04-20 | 2022-05-01 | 日商日本電氣硝子股份有限公司 | Manufacturing method and manufacturing apparatus of glass plate |
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