JPH0735478A - Air knife device - Google Patents

Air knife device

Info

Publication number
JPH0735478A
JPH0735478A JP19991093A JP19991093A JPH0735478A JP H0735478 A JPH0735478 A JP H0735478A JP 19991093 A JP19991093 A JP 19991093A JP 19991093 A JP19991093 A JP 19991093A JP H0735478 A JPH0735478 A JP H0735478A
Authority
JP
Japan
Prior art keywords
air knife
dried
air
substance
mist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19991093A
Other languages
Japanese (ja)
Inventor
Toshiharu Ikeda
敏治 池田
Yasuyuki Ochiai
保之 落合
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SPC Electronics Corp
Original Assignee
SPC Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SPC Electronics Corp filed Critical SPC Electronics Corp
Priority to JP19991093A priority Critical patent/JPH0735478A/en
Publication of JPH0735478A publication Critical patent/JPH0735478A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE:To prevent re-adhesion of mist and to prevent occurrence of a water mark by a method wherein an air knife opened to the opposite side to conveyance is installed in a state to be inclined based on a substance to be dried and suction ducts to effect suction are installed on the opposite side to conveyance in parallel to the air knife. CONSTITUTION:An air knife 2 communicated with a gas piping 5 is installed above a substance 1 to be dried in a state to be inclined based on the conveyance direction of the substance 1 to be dried. The air knife 2 has slits 8 for gas injection formed at intervals of a microdistance in a direction opposite to a conveyance direction and air ducts 3 and 9 having suction ports 10 and 11, respectively, opened to the air knife 2 side are arranged above the substance 1 to be dried in parallel to the air knife 2 and in the vicinity of the air knife 2 at a front and in the rear in a conveyance direction. Since rapid drying is practicable by blowing off water drops by means of jet gas, this constitution performs reliable drying through suction of mist.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、エアーナイフ装置に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air knife device.

【0002】[0002]

【従来の技術】従来の此種装置は図4に示すように液晶
用基板等の被乾燥物1の上方に傾斜させたエアーナイフ
2を設置し、噴射気体の方向に位置した被乾燥物1の側
面に、吸気ダクト3を設置して、被乾燥物1に付着して
いる水滴4等を噴射気体で吹き飛ばし急速乾燥させる。
この時発生したミストを吸気ダクト3で吸気して排気さ
せていた。尚、図中5は気体配管、6は排気配管で排風
機7と連通させている。
2. Description of the Related Art In a conventional device of this type, an inclined air knife 2 is installed above an object to be dried 1 such as a liquid crystal substrate as shown in FIG. An air intake duct 3 is installed on the side surface of the device to blow off the water droplets 4 and the like adhering to the article to be dried 1 with a jet gas for rapid drying.
The mist generated at this time was taken in by the intake duct 3 and exhausted. In the figure, 5 is a gas pipe, and 6 is an exhaust pipe, which communicates with the exhaust fan 7.

【0003】[0003]

【発明が解決しようとする課題】前記従来の装置にあっ
ては、吸気ダクト3が被乾燥物1の搬送方向における側
面に設置されているため、エアーナイフから比較的、距
離をおいて配設されているため、ミストの吸気を十分に
行うことができず、被乾燥物に再付着し、ウォータマー
クが発生するという欠点があった。そこで、本発明はエ
アーナイフの近傍に吸気ダクトを設置してミストを確実
に吸引して排出させることができる装置を提供しようと
するものである。
In the above-mentioned conventional apparatus, since the intake duct 3 is installed on the side surface of the article to be dried 1 in the conveying direction, it is arranged relatively distant from the air knife. Therefore, there is a drawback in that the mist cannot be sufficiently sucked, and the mist is redeposited on the material to be dried and a watermark is generated. Therefore, the present invention is intended to provide an apparatus in which an intake duct is installed in the vicinity of an air knife to reliably suck and discharge mist.

【0004】[0004]

【課題を解決するための手段】本発明は前記課題を解決
するために、被乾燥物に対して傾斜した状態で反搬送側
に開口したエアーナイフを設置し、エアーナイフの反搬
送側に吸気を行う吸気ダクトをエアーナイフと平行して
設け、更にエアーナイフの搬送側に吸気を行う吸気ダク
トをエアーナイフと平行して設けたエアーナイフ装置。
In order to solve the above-mentioned problems, the present invention installs an air knife open to the side opposite to the conveying side in a state of being inclined with respect to the material to be dried, and sucking air from the side opposite to the conveying side of the air knife. An air knife device in which an air intake duct for performing air intake is provided in parallel with the air knife, and an air intake duct for performing air intake on the transport side of the air knife is provided in parallel with the air knife.

【0005】[0005]

【作用】本発明は前記のように構成したもので、エアー
ナイフから噴射した噴射気体で被乾燥物上の水滴を吹き
飛ばして急速乾燥させる。この時発生したミストを反搬
送側の吸気ダクトで吸引し、更にエアーナイフ通過後は
搬送側の吸気ダクトで吸引してミスト再付着を防止す
る。
The present invention is configured as described above and blows off water droplets on the material to be dried by the jetting gas jetted from the air knife for rapid drying. The mist generated at this time is sucked by the air duct on the side opposite to the conveying side, and after passing through the air knife, it is sucked by the suction duct on the side for conveying to prevent reattachment of the mist.

【0006】[0006]

【実施例】本発明の第1実施例を図1,2に基いて詳細
に説明する。被乾燥物1の搬送方向に対して傾斜させた
状態で気体配管5と連通したエアーナイフ2を被乾燥物
1の上方に設置する。このエアーナイフ2は反搬送方向
に微小の間隔を有する噴射用スリット8を設け、エアー
ナイフ2と平行して搬送方向側の前後でエアーナイフ2
の近傍に吸気ダスト3,9を被乾燥物1の上方に設置し
ている。吸気ダクト3,9は夫々エアーナイフ2側に吸
気口10,11を開口している。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described in detail with reference to FIGS. An air knife 2 communicating with the gas pipe 5 in a state of being inclined with respect to the conveyance direction of the material to be dried 1 is installed above the material to be dried 1. This air knife 2 is provided with a jetting slit 8 having a minute gap in the anti-conveyance direction, and the air knife 2 is provided in parallel with the air knife 2 before and after the conveyance direction side.
Intake dusts 3, 9 are installed above the article to be dried 1 in the vicinity of. The intake ducts 3 and 9 open intake ports 10 and 11 on the air knife 2 side, respectively.

【0007】そして、エアーナイフ2及び吸気ダクト
3,9の両側を各々取付金具12,12に固定して。配
置関係を保持するようになっている。又、吸気ダクト3
は排気配管6を介して排風機7に、吸気ダクト9は排気
配管13を介して排風機14に接続している。
Then, both sides of the air knife 2 and the intake ducts 3 and 9 are fixed to the fittings 12 and 12, respectively. It is designed to hold the positional relationship. Also, the intake duct 3
Is connected to the exhaust fan 7 via the exhaust pipe 6, and the intake duct 9 is connected to the exhaust fan 14 via the exhaust pipe 13.

【0008】第1実施例は前記のように構成したもの
で、エアーナイフ2の噴射用スリット8からエアー又は
窒素ガス等の噴射気体を矢印方向に噴射させ、被乾燥物
1上の水滴4を吹き飛ばし、急速乾燥させる。一方、両
側の吸気ダクト3、9は各々排風機7,14によって吸
気口10,11から吸気を行っている。したがって、吸
気ダクト3の吸気口10からミストを吸気するが吸気口
10の近傍は負圧となり、エアーナイフ2からの噴射用
スリット78より噴射する噴射気体の圧力は減圧された
状態での効果と同じとなり、噴射する気体量の減量とな
り、気体に対する約5%のコストの削減を行うことがで
きる。
The first embodiment is constructed as described above, and a jet gas such as air or nitrogen gas is jetted in the arrow direction from the jet slit 8 of the air knife 2 so that the water droplets 4 on the article to be dried 1 are ejected. Blow off and dry quickly. On the other hand, the intake ducts 3 and 9 on both sides intake air from the intake ports 10 and 11 by the blowers 7 and 14, respectively. Therefore, the mist is sucked from the intake port 10 of the intake duct 3, but a negative pressure is generated in the vicinity of the intake port 10, and the pressure of the injection gas injected from the injection slit 78 from the air knife 2 is reduced. In the same manner, the amount of gas to be injected is reduced, and the cost can be reduced by about 5% with respect to the gas.

【0009】又、エアーナイフ通過後の被乾燥物1の表
面上に、吸気洩れの極く僅かのミストの再付着を吸気ダ
クト9で吸気すると共に、被乾燥物1の表面上を負圧に
して乾燥の促進を計る。
Further, a slight amount of reattachment of mist due to intake air leakage is sucked into the surface of the material to be dried 1 after passing through the air knife by the intake duct 9, and the surface of the material to be dried 1 is made to have a negative pressure. To accelerate drying.

【0010】次に、第2実施例を図3に基いて説明する
と、本実施例は被乾燥部1の幅が広い場合で、エアーナ
イフ2をV字型に形成し、吸気ダクト3,9も同様にV
字型に形成したものである。他は全て第1実施例と同様
なので、同一符号を付し説明を省略する。
Next, the second embodiment will be described with reference to FIG. 3. In this embodiment, the air knife 2 is formed in a V shape when the portion 1 to be dried has a wide width, and the intake ducts 3, 9 are formed. Also V
It is shaped like a letter. Since all others are the same as in the first embodiment, the same reference numerals are given and the description thereof is omitted.

【0011】[0011]

【発明の効果】本発明は前記のように構成、作用を有す
るもので、噴射気体で水滴を飛ばし、急速乾燥させる。
この時発生するミストを近傍に開口した吸気ダクトで吸
気するので、ミストの再付着を防止し、ウォータマーク
が発生するようなことがない。又、エアーナイフを通過
した後にも吸気を行ってミストを吸引するので乾燥を確
実に行うことができる。
The present invention has the constitution and operation as described above, and sprays water droplets to rapidly dry it.
Since the mist generated at this time is taken in by the intake duct which is opened in the vicinity, re-adhesion of the mist is prevented and no watermark is generated. Further, even after passing through the air knife, the suction is performed to suck the mist, so that the drying can be surely performed.

【0012】[0012]

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1実施例の平面図FIG. 1 is a plan view of a first embodiment of the present invention.

【図2】その縦断面図。FIG. 2 is a vertical sectional view thereof.

【図3】第2実施例の平面図。FIG. 3 is a plan view of the second embodiment.

【図4】従来装置の平面図。FIG. 4 is a plan view of a conventional device.

【符号の説明】[Explanation of symbols]

1 被乾燥物 2 エアーナイフ 3 吸気ダクト 4 水滴 5 気体配管 6 排気配管 7 排風機 8 噴射用スリット 9 吸気ダクト 10 吸気口 11 吸気口 12 取付金具 1 Dried Material 2 Air Knife 3 Intake Duct 4 Water Drop 5 Gas Pipe 6 Exhaust Pipe 7 Blower 8 Injecting Slit 9 Intake Duct 10 Inlet 11 Intake 12 Mounting Bracket

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 被乾燥物に対して傾斜した状態で反搬送
側に開口したエアーナイフを設置し、エアーナイフの反
搬送側に吸気を行う吸気ダクトをエアーナイフと平行し
て設けたことを特徴とするエアーナイフ装置。
1. An air knife opened to the side opposite to the conveying side in a state of being inclined with respect to the material to be dried, and an air intake duct for inhaling air on the side opposite to the conveying side of the air knife is provided in parallel with the air knife. A characteristic air knife device.
【請求項2】 エアーナイフの搬送側に吸気を行う吸気
ダクトをエアーナイフと平行して設けた請求項1記載の
エアーナイフ装置。
2. The air knife device according to claim 1, wherein an air intake duct for inhaling air is provided on the carrying side of the air knife in parallel with the air knife.
JP19991093A 1993-07-20 1993-07-20 Air knife device Pending JPH0735478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19991093A JPH0735478A (en) 1993-07-20 1993-07-20 Air knife device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19991093A JPH0735478A (en) 1993-07-20 1993-07-20 Air knife device

Publications (1)

Publication Number Publication Date
JPH0735478A true JPH0735478A (en) 1995-02-07

Family

ID=16415642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19991093A Pending JPH0735478A (en) 1993-07-20 1993-07-20 Air knife device

Country Status (1)

Country Link
JP (1) JPH0735478A (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003017463A (en) * 2001-06-29 2003-01-17 Shibaura Mechatronics Corp Substrate dryer
KR100452803B1 (en) * 2001-11-27 2004-10-14 알프스 덴키 가부시키가이샤 Substrate drying device and substrate drying method using the same
KR100547909B1 (en) * 2003-07-03 2006-01-31 주식회사 디엠에스 Substrate Drying Equipment for Flat Panel Display Panel
JP2006247541A (en) * 2005-03-11 2006-09-21 Toray Ind Inc Liquid removing device
JP2008029950A (en) * 2006-07-28 2008-02-14 Toppan Printing Co Ltd Method and device for removing liquid, and web treatment apparatus
CN100412486C (en) * 2003-06-27 2008-08-20 东京応化工业株式会社 Substrate drying apparatus and substrate drying method
JP2010181761A (en) * 2009-02-09 2010-08-19 Hitachi High-Technologies Corp Apparatus for drying substrate, method of drying substrate and method of manufacturing display panel substrate
CN104534854A (en) * 2015-01-16 2015-04-22 镇江奥美机电设备有限公司 Air knife groove capable of reducing drying box working energy consumption
CN105154943A (en) * 2015-09-23 2015-12-16 昆山硕凯自动化电镀设备有限公司 Blowing jig
WO2016167074A1 (en) * 2015-04-16 2016-10-20 日本電気硝子株式会社 Method for manufacturing glass film
CN106734011A (en) * 2016-11-24 2017-05-31 湖南亿泰启智能电子科技有限公司 A kind of automatic production line for capacitive touch screen sensor glass cleaning
CN113424005A (en) * 2018-10-04 2021-09-21 伊利诺斯工具制品有限公司 Method and apparatus for a dryer system

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003017463A (en) * 2001-06-29 2003-01-17 Shibaura Mechatronics Corp Substrate dryer
JP4663919B2 (en) * 2001-06-29 2011-04-06 芝浦メカトロニクス株式会社 Substrate dryer
KR100452803B1 (en) * 2001-11-27 2004-10-14 알프스 덴키 가부시키가이샤 Substrate drying device and substrate drying method using the same
CN100412486C (en) * 2003-06-27 2008-08-20 东京応化工业株式会社 Substrate drying apparatus and substrate drying method
KR100547909B1 (en) * 2003-07-03 2006-01-31 주식회사 디엠에스 Substrate Drying Equipment for Flat Panel Display Panel
JP2006247541A (en) * 2005-03-11 2006-09-21 Toray Ind Inc Liquid removing device
JP2008029950A (en) * 2006-07-28 2008-02-14 Toppan Printing Co Ltd Method and device for removing liquid, and web treatment apparatus
JP2010181761A (en) * 2009-02-09 2010-08-19 Hitachi High-Technologies Corp Apparatus for drying substrate, method of drying substrate and method of manufacturing display panel substrate
CN104534854A (en) * 2015-01-16 2015-04-22 镇江奥美机电设备有限公司 Air knife groove capable of reducing drying box working energy consumption
WO2016167074A1 (en) * 2015-04-16 2016-10-20 日本電気硝子株式会社 Method for manufacturing glass film
JP2016203049A (en) * 2015-04-16 2016-12-08 日本電気硝子株式会社 Method for manufacturing glass film
CN107107129A (en) * 2015-04-16 2017-08-29 日本电气硝子株式会社 The manufacture method of glass film
KR20170137694A (en) * 2015-04-16 2017-12-13 니폰 덴키 가라스 가부시키가이샤 Method for manufacturing glass film
CN107107129B (en) * 2015-04-16 2019-10-22 日本电气硝子株式会社 The manufacturing method of glass film
CN105154943A (en) * 2015-09-23 2015-12-16 昆山硕凯自动化电镀设备有限公司 Blowing jig
CN106734011A (en) * 2016-11-24 2017-05-31 湖南亿泰启智能电子科技有限公司 A kind of automatic production line for capacitive touch screen sensor glass cleaning
CN113424005A (en) * 2018-10-04 2021-09-21 伊利诺斯工具制品有限公司 Method and apparatus for a dryer system

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