200821247 九、發明說明： 明所屬技領域3 發明領域 本發明係有關於可檢查如玻璃基板的片狀基板之基板 5 檢查裝置。 【先前技術3 發明背景 過去，在以光刻製程線所製造的用於平面直角顯示器 (FPD)之大型玻璃基板為對象之基板檢查裝置方面，已知有 10 於玻璃基板氣浮在懸浮台上之狀態下，沿著搬運方向搬運 玻璃基板，並藉由跨越懸浮台而設置的台架上所安裝之檢 查頭來檢查玻璃基板表面的缺陷者。此種基板檢查裝置係 可使玻璃基板懸浮在強固的檢查用底座上之懸浮台、可維 持住懸浮的玻璃基板並沿著搬運方向強制搬運之基板搬運 15 機構、及設置可使檢查頭在與搬運方向直交的方向移動之 門型台架組裝為一體者。檢查用底座為大小與兩片大型玻 璃基板同等之花岗岩、或將鋼框架焊接為細長的矩形框架 之構造。 近年來，FPD用的玻璃基板(母玻璃）呈現大型化，且出 20 現超過2.5m、3m之基板。當玻璃基板的寬度尺寸超過2m 時’ 一旦使玻璃基板的寬度尺寸2m包含安裝台架之空間的 話’會造成與台架組裝為一體之檢查裝置的寬度尺寸超過 2-5m ’然而，可不需許可而通行之車輛的車寬係在道路法 等法律方面限制為2.5m，因此，在運送寬度超過2.5m之檢 5 200821247 查裝置時，必須要處理特殊車翻以得到通行許可，並在得 到該通打許可的通行時間、通行路徑運送，故，會產生無 法自由運送及運送費大幅提高等問題。 ， 如此，當基板檢查裝置伴隨著玻璃基板的大型化而大 5型化時，就會需要可在FPD製造卫廠運送的特殊車輛、或 用以搬入工廠内的特殊搬運裝置。可檢查尺寸加的玻璃基 板之基板檢查裝置係跨越懸浮台地安裝台架，因此，會產 生其寬度尺寸超過4m、即使是特殊卡車也無法運送等新問 題。 10 可解決此種問題之基板檢查裝置有如揭示於專利文獻 1者。 在欲檢查的玻璃基板尺寸變大時，會具有用以精準度 良好地將玻璃基板支撐為平坦的水平狀態之花崗岩底板的 大型化、重量增加、搬運不便或成本上升等問題，故，該 15基板檢查裝置設有可儘可能縮小花岗岩底板之構造。又， 該基板檢查裝置係將3個鋼框架、設有花岗岩底座之台架· 次組件、及設有真空接觸器之2個Y軸線性伺服馬達·組件， 分割成2個氣動工作台，並運送至搬運目的地的FpD製造工 廠，且在當地的安裝場所進行組裝。 2〇 【專利文獻1】日本專利公開公報第2005-62819號 【發明内容】 發明概要 然而，揭示於專利文獻1之基板檢查裝置，係於花崗岩 底板上搭載組入真空噴嘴之吸附墊陣列或氣動夾頭，且藉 6 200821247 t加壓空减玻縣板在搬運中途_，並在檢查時藉由 真空氣體而固定，故’必須在每次檢查時重複吸附、懸浮 玻璃基板之動作，而難以縮短檢查時間。再者，轴線 性伺服馬達•組件係隔著台架•次組件而配置故，在檢 查中途交付玻璃基板之際_基板可能會產生偏移，且可 能由於吸附維持玻璃基板的前端部及後端部而使得玻璃基 板以該吸_持部分為中錢旋轉。特別是在推壓方向上 搬運玻璃基板時，玻璃基板的重心容易移動，造成玻璃基 板的搬運姿勢變的不穩定。 1〇 又’由於從中央鋼框架分割台架•次組件，再從上部 鋼框架及下部鋼框架分割轴線性伺服馬達•组件並在 現場組裝，故，2個γ軸線_服馬達•組件之基準軸( 難魏合台架•次組件之基準轴(X軸)形成為直角。即，在 以焊接使分割成3個的鋼框架—體化時，—旦台架·次組件 μ及2個m線性伺服馬達•組件之絲位置偏^話，即必 須在現場重新娜2個跟紐健馬達·轉的直線度、 或各個Y轴、線性飼服馬達•組件相對於台架·次組件的直角 度，使得組Μ的繁雜。又，由於2俯軸線性舰馬達· 組件係隔著台架·次組件而配置，故，必須同時配合各個Υ 2〇軸線性词服馬達•組件相對於台架•次組件之直角度、及2 個Υ軸線性伺服馬達•組件之直線度兩者，此外亦必須使3 =鋼框*之位置配合，故，會產生在現場的調整作業變的 繁雜等問題。 本發明係有ϋ於前述問題而製作者，且其目的在於提 7 200821247 供一種可輕易地運送及在現場組裝，並且可減低成本之基 板檢查裝置。 用以達成前述目的，本發明係提供以下之方式。 本發明之其中一型態係一種基板檢查裝置，包含有： 5檢查單元，係將可檢查與基板的搬運方向直交之檢查線之 檢查頭、可支撐該檢查頭之台架、可使前述基板懸浮一定 高度之檢查用懸浮台部，與檢查底座組裝為一體者；及搬 運單兀，係可裝#地安裝於前述台架_部與前述檢查用 懸浮台部之間的前述檢查底座，並沿著搬運前述基板之搬 10運路徑的一侧緣地相對於前述檢查單元配置成τ字型，且可 維持河述基板在所述搬運方向上移動者，又，在藉由車輛 運送之際，可將前述搬運單元與前述檢查單元分解為單元 單位並且運送。 15 l 20 心 稭由相互組裝檢查單元及搬運單元而 構成，且可在搬運時及組料單元單位來進行。結果， U用Γ檢查大型基板之大型基板檢查裝置分解為單元單 位並且輕易地運送。 邙夺-首檢查單元係由可支撐基板懸浮之檢查用懸浮台 一組 _ ㈣ 查用懸浮台部水平安置具有相對於檢 頭的檢錢安裝成直角之基準面之婦構件及相對於檢查 此k，可藉由使搬 。一 更搬運早讀設置於檢翻底座上之抵 200821247 接構件抵接’來精準度良好地組裝檢查單元與搬運單元。 在前述型態中，亦可將檢查用懸浮台部設成可懸浮支 撐基板於不妨礙檢查的平坦度之寬度尺寸。 此時，可設定使檢查用懸浮台部的搬運方向之寬度尺 5寸縮短至基板的數分之一，藉由使檢查單元的搬運方向之 寬度方向設在車輛的車寬以内，可單獨運送檢查單元。 在前述型態中，亦可於檢查單元組裝延長懸浮台單元 或延長滾輪台單元。 此時，可藉由延長懸浮台單元或延長滾輪台單元來擴 10大支撐大型基板之搬運路徑，以穩定地搬運大型基板。再 者，藉由於檢查單元的檢查用懸浮台部及延長懸浮台單元 之一端側組裝搬運單元，可維持以檢查用懸浮台部及延長 懸浮台單元支撐之基板，且可使基板在與檢查頭的移動方 向直父之方向上移動。藉此，可遍及基板全體地進行2次元 15 檢查。 此時’精由於檢查單元組裝延長懸浮台單元，基板全 面可藉由檢查用懸浮台部或延長懸浮台單元支撐為懸浮之 狀態以進行檢查及搬運，故，基板不會在搬運時因摩擦而 損傷，可維持健全的狀態。此外，由於不會在搬運時產生 20摩擦，因此可提高搬運速度並提高處理量。 在前述型態中，亦可在與基板搬運方向直交之方向上 隔有間隔地排列細長的懸浮單元以構成延長懸浮台部。 此時，延長懸浮台單元係與檢查單元之懸浮台部不 同’並未支撐基板之檢查領域，故並未如此要求延長懸浮 200821247 台單元所支_基板之平坦度。因此，可藉由隔有間隔地 配置細長的懸浮單元’來省略間隔部份的m浮單元以達到 輕量化，結果’可防止降低延長懸浮台單元的搬運方向之 剛性。 在前述型態中，亦可在檢查用懸浮台部與延長縣浮台 單元之接合部分設置用以跨越搬運面的高度差之滾輪。再 者’亦可在沿著檢查用懸浮台部的搬運方向㈣之檢查用 底座上設置該滾輪。 單元組入檢查單元，且 此時，可簡單地將延長懸浮台 Π)不需調整搬運面之高度。藉由配置於檢查用懸浮台部的檢 查領域兩側之滾輪，可限制基板之懸浮高度以維持良好的 基板平坦度。 再者，在前述型態中，亦可於搬運單元的搬運底座下 面设置搬運用轴承。 15 ㈣，可使做為重量物之搬運單元-邊細微地移動- 邊正確地與檢查用底座對位，且可藉由使用空氣轴承而在 定位之«Τ高鮮度地使搬運顧心嫌用底座。 根據本發明，即使基板大型化亦可藉由車輛運送且可 輕易地在運送目的地組裝，並且，可發揮減低運送費用之 20 效果。 圖式簡單說明 第1圖係顯示關於本發明其中一實施型態之基板檢查 裝置之平面圖。 第2圖係第1圖之基板檢查裝置之側視圖。 10 200821247 第3圖係第1圖之基板檢查裝置之正視圖。 第4圖係顯示第1圖的基板檢查裝置之A_A截面之縱截 面圖。 第5圖係顯示第1圖的基板檢查裝置之檢查單元之正視 5 圖。 第6圖係第5圖的檢查單元之側視圖。 第7圖係第5圖的檢查單元之平面圖。 弟8圖係顯示第1圖的基板檢查裝置之延長懸浮台單元 之平面圖。 10 第9圖係顯示第8圖的延長懸浮台單元之側視圖。 第10圖係顯示第1圖的基板檢查裝置之另一延長懸浮 台單元之平面圖。 第11圖係顯示第1〇圖的延長懸浮台單元之側視圖。 第12圖係顯示第1圖的基板檢查裝置之搬運單元之側 15 視圖。 第13圖係顯示第12圖的搬運單元之平面圖。 第14圖係第8圖及第1〇圖的延長懸浮台單元及第13圖 的搬運單元組裝於第5圖的檢查單元之前的狀態之平面圖。 第15圖係第8圖及第10圖的延長懸浮台單元組裝於第5 20 圖的檢查單元之前的狀態之側視圖。 第16圖係顯示第8圖的延長懸浮台單元之變化例之正 視圖。 第17圖係顯示締結第16圖的延長懸浮台單元之懸浮台 單元部之抵接面的構造例之縱截面圖。 11 200821247 第18圖係顯示第8圖的延長懸浮台單 之正視圖。 第19圖係顯示第1圖的基板檢查裝置 平面圖。 第20圖係顯示第19圖的基板檢查裝置 截面圖。 元之另一變化例 之另一變化例之 之A-A截面之縱 之檢查單元之變 第21圖係顯示第1圖的基板檢查裝置 化例的側視圖。 第22圖係顯示第21圖的檢查單元之平面圖。 1〇 帛23圖係顯示第181的基板檢查農置之變化例之平面 圖。 C實施方式】 較佳實施例之詳細說明 以下，參照第〜第23圖來說明本發明第1實施型態之 15 基板檢查裝置1。 〜 如第1圖〜第4圖所示，本實施型態之基板檢查裝置⑽、 用以檢查光刻製程線所製造的多數平面直角顯示器（FpD) 之母玻璃等片狀基板之裝置，且包含有檢查單元2、延長懸 浮台單元3、4及搬運單元5。在檢查單元2的其中_單側: 20可維持矩形玻璃基板的一側緣部並搬運之搬運單元5係配 置相對於檢查單元2的檢查軸(X軸)形成直角。 如第5圖〜第7圖所示，檢查單元2包含有：載置於除震 台6之檢查用底座7;固定於該檢查用底座7之門型台架8· 可精準度良好地使基板懸浮預定高度之檢查用懸浮么部 12 200821247 9,没有架設在台架8的水平樑8a之導軌l〇a之檢查頭移動機 構10，藉由檢查頭移動機構1〇而跨越檢查用懸浮台部9地直 線移動之顯微鏡(檢查頭）n ;在檢查用懸浮台部9下方與顯 微鏡11的物鏡相向配置之透射照明光源12 ;及與顯微鏡11 5同步移動使前述透射照明光源12直線移動之照明移動機構 13 〇 檢查頭係除了安裝有多數倍率不同的物鏡之顯微鏡之 外，只要為可在預定角度下對基板照射線性照明光，並藉 由線性感測照相機拍攝來自基板的反射光之顯微檢查頭、 1〇或於顯微鏡組入修理裝置之雷射加工頭等可檢查與基板搬 運方向直交的檢查線者即可。採用顯微檢查頭時，由於可 拍攝檢查線之線性感測照相機與線性照明光源係以預定的 角度關係固定於台架8上，故並不需要檢查頭移動機構10及 照明移動機構13。 15 檢查用懸浮台部9係於搬運方向（γ方向）前後平行配置 精饴懸浮台部9A、9B，並於檢查線上打開可透射過透射照 明光源12的照明光之縫狀微小間隙14。該精密懸浮台部 9A、9B係相對於檢查線兩側構成預定寬度的檢查領域，並 遍及該檢查領域全面地具有可大致均等地排出空氣之多數 2〇空氣孔，且基板上面可相對於精密懸浮台部9A、9B上面精 準度良好且平坦地懸浮預定高度。精密懸浮台部9A、9B可 在使如板厚〇.7mm的玻璃基板懸浮0.2min時，高精準度地限 制使破璃基板之上面高度相對於精密懸浮台部9A、9β上面 形成為0.9mm之高度。 13 200821247 該等/精後、懸浮台部9A、9B係除了可排出空氣之空氣孔 外’亦可設置可吸引空氣之空氣孔，並藉由同時進行空氣 的排出與吸弓丨來高精準度地限制基板之懸浮高度。 又’檢查S員採用顯微檢查頭時，最好使精密懸浮台部 5 9A、9B構成為一片，並沿著檢查線設置用以防止來自台部 表面的反射光之縫溝。 輔助檢查用懸浮台部9C係比起精密懸浮台部9A、9B更 配置接近於上游側，且為用以使基板穩定地搬入檢查領域 者。"亥輔助檢查用懸浮台部9C係多數細長的懸浮單元15在 1〇寬度方向隔有間隙地水平配置於檢查用底座7上面。輔助檢 查用懸洋台部9C可與精㈣浮台部9A、9B相同，或為空氣 孔密度比起精密懸浮台部9A、9B小之懸浮精準度低者。 又，可藉由精密懸浮台部9A、9B來限制使基板平坦時，亦 可省略該懸浮台部9C。 構成者。顯微鏡 且顯微鏡11係藉 檢查頭移動機構10係由如線性馬達所構成者 係又置可/口著導軌10a、導執移動，且 由檢查頭移動機構10的動作而可相對於檢查用懸浮台部9 、 平移動。透射照明光源12係藉由照明移動機構13 …、員微鏡11之移動同步地水平移動。透射照明光源η之照BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate 5 inspection apparatus which can inspect a sheet substrate such as a glass substrate. [Prior Art 3] In the past, in the case of a substrate inspection apparatus for a large-sized glass substrate for a planar right-angle display (FPD) manufactured by a lithography process line, it is known that 10 glass substrates are floated on a floating stage. In this state, the glass substrate is conveyed in the conveyance direction, and the defect on the surface of the glass substrate is inspected by the inspection head mounted on the gantry provided across the suspension stage. The substrate inspection device is a suspension table in which a glass substrate is suspended on a strong inspection base, a substrate conveyance mechanism 15 capable of holding a suspended glass substrate and being forcibly transported along the conveyance direction, and an arrangement for allowing the inspection head to be The door type gantry that moves in the direction in which the conveying direction is orthogonal is integrated. The inspection base is constructed of a granite having the same size as two large glass substrates, or a steel frame welded into an elongated rectangular frame. In recent years, the glass substrate (parent glass) for FPD has been enlarged, and the substrate of more than 2.5 m and 3 m has been produced. When the width dimension of the glass substrate exceeds 2 m, 'when the width dimension of the glass substrate is 2 m, including the space for mounting the gantry', the inspection device integrated with the gantry has a width of more than 2-5 m. However, no license is required. The width of the passing vehicle is limited to 2.5m in the legal aspects of the road law. Therefore, when the inspection width exceeds 2.5m, the inspection of the device must be handled by the special vehicle to obtain the permission. The transit time and the transit route of the license are transported, so there are problems such as the inability to freely transport and the substantial increase in the transportation fee. In this way, when the substrate inspection apparatus is greatly enlarged in accordance with the increase in the size of the glass substrate, a special vehicle that can be transported at the FPD manufacturing plant or a special transportation device that is carried into the factory is required. The substrate inspection device that can inspect the size of the glass substrate is mounted on the suspension table. Therefore, new problems such as a width of more than 4 m and a special truck cannot be transported. A substrate inspecting apparatus which can solve such a problem is disclosed in Patent Document 1. When the size of the glass substrate to be inspected is increased, there is a problem that the size, weight increase, inconvenience in transportation, or cost increase of the granite base plate in a horizontal state in which the glass substrate is supported in a flat state with high precision is provided. The substrate inspection device is provided with a structure that minimizes the granite floor. Further, the substrate inspection apparatus divides three steel frames, a gantry/sub-assembly having a granite base, and two Y-axis servomotors and components provided with a vacuum contactor into two pneumatic tables, and It is transported to the FpD manufacturing facility of the destination and assembled at the local installation site. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2005-62819 SUMMARY OF INVENTION Technical Summary However, the substrate inspection device disclosed in Patent Document 1 is provided with an adsorption pad array or a pneumatic device in which a vacuum nozzle is incorporated on a granite base plate. Chuck, and by 6 200821247 t pressurized airborne glass plate in the middle of transportation _, and fixed by vacuum gas during inspection, so 'must repeatedly repeat the adsorption and suspension of the glass substrate action, it is difficult Reduce inspection time. In addition, the linear servo motor and the module are disposed via the gantry and the sub-assembly. When the glass substrate is delivered in the middle of the inspection, the substrate may be displaced, and the front end and the rear end of the glass substrate may be maintained by the adsorption. The glass substrate is rotated by the suction-holding portion. In particular, when the glass substrate is conveyed in the pressing direction, the center of gravity of the glass substrate is easily moved, and the conveyance posture of the glass substrate becomes unstable. 1 〇 'Because the gantry and sub-assembly are divided from the central steel frame, and the linear servo motor components are assembled from the upper steel frame and the lower steel frame and assembled on site, the basis of the two γ-axis _ motor/components The axis (the reference axis of the hard-wound gantry and sub-assembly (X-axis) is formed at a right angle. That is, when the steel frame is divided into three by welding, the gantry/sub-assembly μ and 2 m linear The position of the servo motor and the component wire is different, that is, the straightness of the two motors with the Newkin motor, or the straight angle of each Y-axis, linear feeding motor and component relative to the gantry and sub-assembly must be re-centered on site. In addition, since the two-axis linear ship motor and components are arranged via the gantry and sub-assembly, it is necessary to cooperate with each Υ 2 〇 axis vocabulary motor and components relative to the gantry. Both the straight angle of the sub-assembly and the straightness of the two Υ-axis servo motors and components must also match the position of 3 = steel frame*, so that the adjustment work at the site becomes complicated. The present invention is produced in response to the aforementioned problems And the purpose of the present invention is to provide a substrate inspection device that can be easily transported and assembled on site, and which can reduce the cost. To achieve the foregoing object, the present invention provides the following aspects. A substrate inspection device comprising: 5 inspection unit, an inspection head that can inspect an inspection line that is perpendicular to a conveyance direction of a substrate, a gantry that can support the inspection head, and an inspection floating table that can suspend the substrate at a certain height And the transporting unit is integrally assembled with the inspection base; One side of the transport path is arranged in a zigzag shape with respect to the inspection unit, and the river substrate can be moved in the transport direction, and the transport unit can be transported by the vehicle. The inspection unit is disassembled into unit units and transported. 15 l 20 The heart straw consists of a mutual assembly inspection unit and a handling unit, and can be transported and assembled. As a result, the U large-scale substrate inspection device for inspecting large substrates is decomposed into unit units and easily transported. The smash-first inspection unit is a set of inspection floating stages that can support the substrate suspension _ (4) The platform is horizontally placed with respect to the checker's money to be installed at a right angle to the reference surface of the female component and relative to the inspection of the k, which can be moved by moving the early reading and setting on the inspection base to the 200821247 connection member The inspection unit and the transport unit are assembled with high precision. In the above-described type, the inspection floating table portion may be configured to suspend the support substrate in a width dimension that does not hinder the flatness of the inspection. It is set such that the width of the inspection floating table portion is shortened by 5 inches to one of the number of the substrates, and the inspection unit is separately transported by setting the width direction of the inspection unit in the conveyance direction within the vehicle width of the vehicle. In the foregoing type, the extension unit or the extension roller unit may also be assembled in the inspection unit. In this case, the transport path of the large-sized substrate can be expanded by extending the suspension unit or the extension roller unit to stably transport the large substrate. Furthermore, the substrate supported by the inspection floating table portion and the extended floating table unit can be maintained by the inspection floating unit of the inspection unit and the end side assembly transport unit of the extended suspension unit, and the substrate can be placed on the inspection head. The direction of movement moves straight in the direction of the father. Thereby, the 2-dimensional 15 inspection can be performed over the entire substrate. At this time, because the inspection unit is assembled to extend the suspension unit, the substrate can be inspected and transported by the inspection suspension unit or the extended suspension unit to be in a suspended state, so that the substrate is not rubbed during transportation. Damage can maintain a healthy state. Further, since the friction is not generated during transportation, the conveyance speed can be increased and the amount of processing can be increased. In the above aspect, the elongated suspension unit may be arranged at intervals in a direction orthogonal to the substrate conveyance direction to constitute the extended suspension portion. At this time, the extension of the suspension unit is different from that of the inspection unit, which does not support the inspection field of the substrate. Therefore, it is not required to extend the flatness of the substrate to be suspended in the 200821247 unit. Therefore, the m-floating unit of the space portion can be omitted by arranging the elongated floating unit ′ at intervals, thereby achieving a reduction in rigidity in the direction in which the suspension unit is extended. In the above aspect, a roller for crossing the height difference of the conveying surface may be provided at a joint portion between the inspection floating table portion and the extension county floating table unit. Further, the roller may be provided on the inspection base along the conveyance direction (4) of the inspection floating table portion. The unit is incorporated into the inspection unit, and at this point, it is easy to extend the suspension table Π) without adjusting the height of the conveying surface. By arranging the rollers on both sides of the inspection area of the inspection floating table portion, the suspension height of the substrate can be restricted to maintain good substrate flatness. Further, in the above-described configuration, a carrier for transport may be provided below the transport base of the transport unit. 15 (4), it can be used as a handling unit for weights - it moves finely - it is correctly aligned with the inspection base, and it can be positioned by the use of air bearings. Base. According to the present invention, even if the substrate is enlarged, it can be transported by the vehicle and can be easily assembled at the transportation destination, and the effect of reducing the transportation cost can be exerted. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a substrate inspecting apparatus according to an embodiment of the present invention. Fig. 2 is a side view of the substrate inspection apparatus of Fig. 1. 10 200821247 Figure 3 is a front elevational view of the substrate inspection apparatus of Figure 1. Fig. 4 is a longitudinal cross-sectional view showing the A_A cross section of the substrate inspection apparatus of Fig. 1. Fig. 5 is a front elevational view showing the inspection unit of the substrate inspection apparatus of Fig. 1. Figure 6 is a side view of the inspection unit of Figure 5. Figure 7 is a plan view of the inspection unit of Figure 5. Fig. 8 is a plan view showing the extended suspension unit of the substrate inspection apparatus of Fig. 1. 10 Fig. 9 is a side view showing the extended suspension unit of Fig. 8. Fig. 10 is a plan view showing another extended suspension unit of the substrate inspection apparatus of Fig. 1. Figure 11 is a side view showing the extended suspension unit of the first drawing. Fig. 12 is a side view showing the side of the transport unit of the substrate inspection apparatus of Fig. 1. Figure 13 is a plan view showing the handling unit of Figure 12. Fig. 14 is a plan view showing a state before the extended suspension unit of Fig. 8 and Fig. 1 and the transport unit of Fig. 13 are assembled before the inspection unit of Fig. 5. Fig. 15 is a side view showing a state in which the extended suspension unit of Figs. 8 and 10 is assembled before the inspection unit of Fig. 520. Fig. 16 is a front elevational view showing a variation of the extended suspension unit of Fig. 8. Fig. 17 is a longitudinal cross-sectional view showing a structural example of the abutting surface of the suspension unit unit of the extended suspension unit of Fig. 16. 11 200821247 Figure 18 is a front elevational view showing the extended suspension table of Figure 8. Fig. 19 is a plan view showing the substrate inspection apparatus of Fig. 1. Fig. 20 is a cross-sectional view showing the substrate inspection apparatus of Fig. 19. Another variation of another variation of the element is a change in the inspection unit of the vertical section A-A. Fig. 21 is a side view showing the example of the substrate inspection apparatus of Fig. 1. Fig. 22 is a plan view showing the inspection unit of Fig. 21. Fig. 1 is a plan view showing a variation of the substrate inspection of the 181st. C. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a substrate inspection apparatus 1 according to a first embodiment of the present invention will be described with reference to Figs. ~ As shown in Fig. 1 to Fig. 4, the substrate inspection apparatus (10) of the present embodiment, the apparatus for inspecting a sheet substrate such as a mother glass of a plurality of planar right angle displays (FpD) manufactured by a lithography process line, and The inspection unit 2, the extended suspension unit 3, 4 and the transport unit 5 are included. The transport unit 5 in which the one side of the inspection unit 2 can maintain one side edge of the rectangular glass substrate and is transported is formed at a right angle with respect to the inspection axis (X-axis) of the inspection unit 2. As shown in FIGS. 5 to 7 , the inspection unit 2 includes an inspection base 7 placed on the seismic isolation mount 6 and a portal gantry 8 fixed to the inspection base 7 . The inspection suspension portion 12 of the substrate suspension predetermined height 200821247, the inspection head moving mechanism 10 without the guide rail 10a of the horizontal beam 8a of the gantry 8 is spanned by the inspection head moving mechanism 1 a microscope (inspecting head) n that moves linearly in the portion 9; a transmission illumination source 12 disposed opposite to the objective lens of the microscope 11 under the inspection floating table portion 9; and a linear movement of the transmission illumination source 12 in synchronization with the microscope 11 5 The illumination moving mechanism 13 〇 inspection head system is not only a microscope equipped with a plurality of objective lenses having different magnifications, but also a linear illumination light that can be irradiated to the substrate at a predetermined angle, and the reflected light from the substrate is captured by the line-sensing camera. The micro-inspection head, the laser processing head of the microscope set into the repair device, etc., can inspect the inspection line that is orthogonal to the substrate transport direction. When the microscopic head is used, since the line-detecting camera and the linear illumination source capable of taking the inspection line are fixed to the stage 8 in a predetermined angular relationship, the head moving mechanism 10 and the illumination moving mechanism 13 are not required. The inspection floating table portion 9 is arranged in parallel with the fine suspension stage portions 9A and 9B in the conveyance direction (γ direction), and opens the slit-like minute gap 14 through which the illumination light of the transmission illumination source 12 can be transmitted. The precision floating table portions 9A and 9B form an inspection area having a predetermined width with respect to both sides of the inspection line, and have a plurality of 2 〇 air holes which can discharge air substantially uniformly throughout the inspection field, and the substrate surface can be relatively precise. The floating table portions 9A, 9B have a high degree of accuracy and are suspended in a predetermined height. The precision floating table portions 9A and 9B can limit the height of the upper surface of the glass substrate to 0.9 mm above the precision floating table portions 9A and 9β with high precision when the glass substrate such as a plate thickness of 77 mm is suspended for 0.2 minutes. The height. 13 200821247 These / fine, floating table sections 9A, 9B are in addition to the air holes that can be exhausted from the air. They can also be provided with air holes that can attract air, and high precision by simultaneously discharging and sucking the air. Ground limits the suspension height of the substrate. Further, when the inspection member employs the microscopic inspection head, it is preferable to form the precision suspension table portions 59A and 9B as one piece, and to provide a slit for preventing the reflected light from the surface of the table portion along the inspection line. The auxiliary inspection floating table portion 9C is disposed closer to the upstream side than the precision floating table portions 9A and 9B, and is used to stably carry the substrate into the inspection field. "Hai auxiliary inspection floating table portion 9C is a plurality of elongated suspension units 15 which are horizontally arranged on the upper surface of the inspection base 7 with a gap therebetween in the width direction. The auxiliary inspection submersible portion 9C may be the same as the fine (four) floating table portions 9A and 9B, or may have a lower air hole density than the precision suspension table portions 9A and 9B. Further, when the substrate is made flat by the precision floating table portions 9A and 9B, the floating table portion 9C can be omitted. Constitute. The microscope and the microscope 11 are moved by the inspection head moving mechanism 10 by the linear motor, and the guide rail 10a and the guide rail 10a are moved, and the inspection head moving mechanism 10 can be operated relative to the inspection floating table. Department 9, flat move. The transmissive illumination source 12 is horizontally moved in synchronization by the movement of the illumination moving mechanism 13 and the micromirror 11. Transmission illumination source η
之寬度尺寸即 14 200821247 可。在平坦地懸浮基板之狀態下，藉由檢查頭移動機構1〇 及照明移動機構13之動作，可使顯微鏡nA透射照明光源 12在與搬運方向(γ方向）直交之寬度方向(X方向）上直線移 動，藉此，可針對沿著基板寬度方向之預定直線形的檢查 5線進行檢查。藉由使該基板在懸浮之狀態下沿著搬運方向 (Y方向)移動’可在該基板懸浮之狀態下檢查基板全面。利 用顯微鏡11檢查基板表面之缺陷時，係藉由搬運單元5使基 板沿著搬運方向移動，並停止在無陷處的γ座標相當之位 置，接著，再藉由檢查頭移動機構1〇使顯微鏡丨丨移動至與 10缺陷處的X座標相當之位置，即可觀察基板表面之缺陷。 又，檢查頭採用顯微檢查頭時，可藉由使基板在檢查用懸 洋台部9上懸浮的同時以一定速度沿著搬運方向方向）搬 運，並藉由多數線性感測照相機拍攝基板全面。 檢查單元2可相對於檢查用底座7調整精密懸浮台部 15 9Α、9Β或台架8之高度，使顯微鏡u可相對於水平懸浮於 精密懸浮台部9A、9B上的基板表面水平移動。又，檢查單 元2可使台架8或精密懸浮台部9A、9B旋轉微小角度並且調 整，使導執10a亦可相對於精密懸浮台部9A、妞的檢查用 微小間隙呈現平行。 20 該檢查單元2係組入有精密懸浮台部9A、9B、顯微鏡 11之台架8、透射照明光源12業經高精準度地調整之後再與 檢查用底座7組裝為一體，以構成丨次元的檢查裝置。該檢 查單元2係檢查用底座7的短邊側尺寸設定比車輛車箱的寬 度尺寸小，以可單獨藉由不受到道路限制之寬度25m的一 15 200821247 般車輛進行運送。檢查用底座7之搬運方向的短邊側尺寸只 要至少為台架8的腳部安裝於檢查用底座7的長度即可。例 如，以車寬規定為2.5m之大型卡車運送時，可設定使檢查 用底座7之短邊側尺寸大於台架8與檢查用懸浮台部9相加 5後的最大尺寸且長度短於車寬2.5m。此外，檢查用懸浮台 部9的短邊侧寬度尺寸亦可設定為短於車寬的基板尺寸之 數分之一，例如，相對於尺寸3111的玻璃基板設為1/5〜1/2之 0.6m〜1.5m。此處係將檢查單元2的短邊側尺寸設定為2m。 又，在檢查單元2的檢查用底座7上，隔有預定間隔地 10設有一對具有水平安裝後述搬運單元5的基準面16a之抵接 構件16、具有相對於台架8的檢查軸安裝成直角的基準面 100a之抵接構件100。此外，在檢查用底座7的搬運方向（γ 方向）兩端部，設有安裝後述延長懸浮台單元3、4之抵接面 17 、 18 〇 15 如第4圖所示，前述延長懸浮台單元3、4係在前述檢查 單元2的檢查用懸浮台部9上連續往搬運方向的兩側延長地 安裝於2處。 各延長懸浮台單元3、4具有固定於設在檢查用底座7的 抵接面Π、18之架台19、20。抵接面17、18係採用如蟻臍 20等使凹凸欣合之構造，故，可藉由將形成於架台19、20之 凸部嵌入形成於檢查用底座7之凹部來簡單地安裝。在架台 19、20的上面，沿著搬運方向延伸的細長懸浮單元21、22 係多數個排列且固定於與搬運方向直交之寬度方向上。延 長懸浮台單元3、4並不需要如精密懸浮台部9Α、9Β般使基 200821247 板高精準度地懸浮，故可將各懸浮單元21、22分開g己置 藉由隔有預定間隔地配置該懸浮單元21、22，可達到延長 懸浮台單元3、4的輕量化，且可廉價地製造。 各懸浮單元21、22係與輔助檢查用懸浮台部9C同樣地 5於其上面具有多數空氣孔。如第8圖〜第11圖所示，在懸浮 單元21、22的上面，沿著搬運方向形成有2條用以將空氣孔 排出的空氣釋放到大氣中的溝21a、22a。在懸浮單元21、 22的寬度較小時，即使因空氣會從間隙部分漏出而並未設 置溝21a、22a亦可穩定地使基板懸浮。 10 又，在各延長懸浮台單元3、4之架台19、20上設有後 述用以固定於搬運單元5之締結構件23、24。 如第12圖及第13圖所示，搬運單元5設有長型的搬運底 座25、線性馬達等之直線移動機構26、滑動器27、裝卸機 構28，其中，該搬運底座25具有固定於設在檢查單元2的檢 15 查用底座7之抵接構件16、100之抵接面5a、101a，該直線 移動機構26設有架設在該搬運底座25的上面之導軌26a、導 軌26a，該滑動器27係設置可沿著導執26a、導執26a移動， 該裝卸機構2 8係安裝於該滑動器2 7且可藉由如吸附等來裝 卸基板。 20 為了沿著搬運方向（Y方向）移動基板，搬運底座25係略 長於2片的基板長度。例如，基板尺寸為3m時，搬運底座25 之長度係長於2片基板的6m為6.5m。該搬運底座25係往檢 查單元2的檢查用底座7之抵接構件16的基準面16a與抵接 構件100的基準面100a兩者推壓並藉由螺栓固定，藉此，可 17 200821247 簡單地使其相對於檢查單元2的檢查軸(χ軸）之直角度與相 對於精密懸浮台部9A、9B之水平度配合。 該搬運單元5係相對於檢查單元2安裝成T字型，例如， 玻璃基板尺寸為3m時，搬運單元5與檢查單元2組裝為一體 5時的設置面之X方向與Y方向尺寸，係檢查單元2的X方向之 長度設為4m、搬運單元5的γ方向之長度設為6 5111。在搬運 單元5與檢查單元2組裝為一體之狀態下，由於短邊的χ方向 之寬度亦有4m，因而無法搭載於道路通行法所規定的可通 行於一般道路之車寬2.5m以内的大型卡車（車輛）。 10 職運單元5作成可以單元為單位從檢查單元2分解之 結構，並將檢查單元2的短邊側尺寸設定為2m，藉此，可單 獨以車寬2.5m的大型卡車運送2111><4111大小之檢查單元2。 又，作為-次元檢查裝置的機能之檢查單元2係在維持高度 調整組裝後的狀態下搭載於大型卡車並且輸送，藉此χ 15要另外安裝輸送的搬運單元5即不需進行麻煩的調整 單的組裝。 間 藉由相對於檢查單元2將搬運單元5組裝成T字型，可 為二次元檢查裝置發揮機能。藉由在檢查單元2的^ 兩侧安裝延《浮台單元3、4，可沿著基板搬運路二 侧緣遍及全長地配置搬運單元^。 、 搬連底座25必須要支撐遍及長距離 之直線雜機構26«不使其彎曲，因；^置 尺:來發揮作為強度構件之機能。本實施型態C: 格扣的角射而構成，可提高強度且達_量化。” 20 200821247 又，搬運底座25上設有安裝延長懸浮台單元3、4的架 台19、2〇之締結構件23、24之抵接面29。藉由使延長懸浮 台單元3、4支撐於搬運底座25，可輔助延長懸浮台單元3、 4使其不彎曲。 5 說明關於如此構成的本實施型態之基板檢查裝置 作用。 如第14圖或第15圖所示，本實施型態之基板檢查裝置1 係由1個檢查單元2、2個延長懸浮台單元3、4及搬運單元5 等4個單元所構成，且分別以單元2〜5為單位馳裝並且可 1〇分解。因此，在藉由車輛運送時，具有可按照單元2〜5來分 解以輕易地運送之優點。又，在運送目的地組裝時，只要 分別將以單元2〜5為單位之調整者相互組裝，即可在搬運目 的地現場輕易地組裝可精準度良好地檢查大型基板之基板 檢查裝置1。 15 肖別是檢查單兀2係以高精準度組人顯微鏡11的檢查 頭之台架8、精密懸浮台部9A、9B、透射照明光源12與檢 查用底座7組裝成-體者，且單獨調整為】次元的檢查裝 置，故，只要再組裝其他單元3〜5，即可在高精準度下進行 基板檢查，且不需進行之後的調整作業。 2〇 *然後’藉由使延長懸浮台單元3、4分別固定於設在檢 查用底座7的搬運方向兩端之抵接面17、18，構成可搭載大 型基板且維持於平坦狀態之大型懸浮台。 再者，藉由裝上搬運單元5，可沿著搬運方向（γ方向） 搬運以吸附脫離機構維持因懸浮台而支撐為懸浮狀態之基 19 200821247 板的一邊側。藉此，可—邊使基板隨著搬運單元5的動作於 搬運方向（Y方向）上移動，—邊使顯微鏡u隨著檢查頭移動 機構10於與搬運方向直交之方向(χ方向）上移動，故，可遍 及基板全面地進行2次元檢查。 5在檢查單元2的檢查用底座7上，隔有預定間隔地設有 —對具有水平安鎌運單元5的基準面16a之抵接構件16、 具有相對於台架8的檢查轴安裝成直角的基準面100a之抵 接構件100。 將搬運單元5組入檢查單元2並調整直角度、水平产之 10後，可藉由使長型搬運單元5與檢查單元2分離，來分^利 用大型卡車分開運送。 特別是檢查單元2係相對於習知檢查用懸浮台的在基 板全面承接之方式，採用使對應於可使基板維持水平的檢 查領域之基板的-部份懸浮之精密懸浮台部9a、9B，藉 15此，可使檢查單元2的基板搬運方向（γ方向）之寬度尺寸縮 小至基板的數分之-。結果，可使檢查單元2的基板搬運方 向之寬度尺寸小於-般卡車的車寬尺寸，且只要取下長型 搬運單元5,即可以不受到道路運行法的限制之一般大型卡 車自由運送，且不會像要得到特別許可的特殊大型卡車般 2〇受到交通限制。與受到交通限制的特殊大型卡車相比，可 大幅減低一般大型卡車的運送成本。 又，在搬運單元5的搬運底座25上，抵接面化、1〇1&係 分別設置於2處。只要將該搬運單元5與檢查單元2分開運 送，並在現場推壓使搬運底座25的抵接面5a、101a與檢查 20 200821247 單凡2的抵接構件16之基準面16&及抵接構件⑽之基準面 1〇〇卜致，即可確保相對於搬運方向(Y方向）之水平度、及 相對於檢查單元2的檢查軸(χ軸)之直角度。 根據本實施型態之基板檢查裝置i，即使基板存在於搬 運方向的任一位置上，基板全面亦可藉由檢查用懸浮台部9 或=長懸浮台單元3、4支撐為之狀態，因此，即使基 板k著搬運單元5的動作而在搬運方向上移動，基板裏面亦 不會摩擦到搬運路徑，可防止摩擦所造成的損傷於未然。 又，藉由檢查單元2的檢查用懸浮台部9，可維持基板 1〇於平坦，並藉由檢查頭移動機構10使顯微鏡11移動以沿著 榀查線精準度良好地檢查基板面，然後，使大型且具有重 里的破璃基板懸浮並且強制搬運，藉此，可增加搬運速度， 且不用如從前需將基板載置於檢查台上而可直接在懸浮的 狀悲下檢查’結果，具有可提高檢查的處理量之優點。 15 又’延長懸浮台單元3、4係隔開懸浮單元21、22的間 隔而達成輕量化，藉此，可抑制在安裝於檢查單元2的搬運 方向兩端面之狀態下沿著搬運方向彎曲，並且可輕易地運 送及在現場組裝。 再者’藉由延長懸浮台單元3、4固定於搬運單元5的搬 運底座25，具有可提高延長懸浮台單元3、4的剛性、及減 低彎曲及振動之優點。 又，本實施型態之基板檢查裝置1係於檢查單元2的檢 查用底座7下部設置除震台6，但亦可設置設有高度調整機 構之調整器來代替。配置於光刻製程線的線上(in-line)時， 21 200821247 要設置用以配合前後配置的滾輪式輸送機之搬運線高度之 調整器。配置於線上時，亦可使延長懸浮台單元3、4與檢 查單元2的檢查用底座7分離，並於各延長懸浮台單元3、4 安裝調整器且直接設置於地上。 5 如第16圖及第17圖所示，在延長懸浮台單元3、4為大 型者時，亦可分割為具有多數個懸浮單元22之2個懸浮單元 部30、31，並分別固定於單一的架台19、2〇上。此時，如 第17圖所示，多數懸浮單元部3〇、31宜藉由螺拾从來締結 設在寬度方向及厚度方向上之抵接面32、33使其密接，以 10 精準度良好地組裝為一體。 又，如第18圖所示，在架台19、20為大型者時，亦可 分副架台19、20，並固定於組裝為一體之懸浮單元部、 31上。 又，如第19圖及第20圖所示，亦可於檢查單元2的檢查 15用底座7組入延長滾輪台單元40、41來代替延長懸浮台單元 3、4。該等延長滾輪台單元4〇、41亦可將於同樣的架台丨9、 20上搭載有以多數滾輪42a、43a支撐基板裏面的滾輪台部 42、43之延長滾輪台單元，組入檢查單元2的檢查用底座7。 此時，各滾輪係由接觸到基板裏面且可自由旋轉之自由滾 20輪式輸送機所構成，並使與基板裏面接觸的各滾輪42a、43a 之頂點與檢查單元2的檢查用懸浮台部9上之基板懸浮高度 位於同等鬲度。例如，藉由精密懸浮台部9A、9B使基板懸 浮〇.2mm時’使各滾輪台部42、43的各滾輪42a、43a之頂點 高度’相對於精密懸浮台部9A、9B的上面為基板懸浮高度 22 200821247 的 0.2mm 〇 又，亦可於檢查單元2的檢查用懸浮台部9與各延長懸 浮台單元3、4之接合部份，配置如第21圖及第22圖所示之 跨越滾輪機構44。該跨越滾輪機構44係安裝於凹型的缺口 5部21b、22b，且缺口部21b、22b形成於可支撐延長懸浮台 單元3、4的懸浮單元21、22之單元維持構件21a、22a。跨 越滾輪機構44係軸44b固定於U字型的支撐構件44a，並透過 軸承44c、44c支撐滾輪44d於該軸44b上自由旋轉。該滾輪 44d係由 PEEK(P〇ly Ether Ether Ketone;聚醚醚 _)樹脂等比 1〇起玻璃基板柔軟且具有耐磨耗性之樹脂所構成。該跨越滾 輪機構44係配置於延長懸浮台單元3、4的各懸浮單元、 22之各個間隙。該等跨越滾輪機構44之各滾輪44d的高度係 相對於各懸浮單元21、22的上面與基板的懸浮高度同等， 例如設置突出大致〇.2mm。 15 在檢查單元2的搬運方向兩端側安裝延長懸浮台單元 3、4時，即使檢查用懸浮台部9與延長懸浮台單元3、4的捧 浮高度相比產生些微差距，玻璃基板前端亦可接觸到滾輪 44d並穩定地跨過高度差。 藉由使該跨越用的滾輪44d設置在延長懸浮台單元3、4 2〇與檢查用懸浮台部9之接合部份，可簡單地將延長懸浮台單 tl3、4組入檢查單元2，且不需調整搬運面的高度。 又’跨越滾輪機構44亦可沿著作為檢查單元2的檢查領 域之檢查用懸浮台部9兩側設置於檢查用底座7。藉由該跨 越滾輪機構44安褒於檢查用底座7,可相對於精密^浮台^ 23 200821247 9A、9B高精準度地設定滾輪術之突^度。結果，搬入 檢查單元2的薄玻璃基板係藉由沿著檢查領域兩側地配置 於多數處之各跨越滾輪機構44，—㈣精㈣浮台部 M、9B的懸浮高度，故可良好地維持破璃基板之懸浮高度 5 與平坦度。 再者’如第23圖所示，亦可於搬運單元5的搬運底座^ 下面，設置作為可使成為重量的搬運單元5自由旋轉地移動 之搬運用軸承之傾斜滾輪45。搬運單元5係載置於台車仏 上，並如第14圖所示地相對於檢查單元2的台架8内側插入 10前端部分以搭載於檢查用底座7上。該台車46設有升降機 構。搬運單元5係送出至搬運底座25的抵接面允、1〇la與檢 查用底座7的抵接構件16、1〇〇大略一致之位置，並藉由升 降機構使搬運單元5下降而搭載於檢查用底座7上，此時， 搬運底座25係在從檢查用底座7懸浮之狀態下由傾斜滾輪 15 45支撐可自由旋轉，故，可使搬運單元5—邊細微地移動一 邊正確地使搬運底座25之抵接面5a、101 a與檢查用底座7的 抵接構件16、100之各基準面16a、100a—致。 在搬運用承軸方面，代替傾斜滾輪45，可使構成搬運 底座25之最下面的角鋼管兩端密封以構成儲存高壓氣體之 20 氣槽，並藉由於下面形成可喷出多數氣體之氣體噴出孔而 具有空氣承軸之機能。使用空氣承軸時，係在定位後的狀 態下打開氣槽内的大氣，使搬運底座25的抵接面5a與檢查 用底座7的抵接構件16之基準面16a密接，故，可高精準度 地進行定位。 24 200821247 【圖式簡單說明3 第1圖係顯示關於本發明其中一實施型態之基板檢查 裝置之平面圖。 第2圖係第1圖之基板檢查裝置之側視圖。 5 第3圖係第1圖之基板檢查裝置之正視圖。 第4圖係顯示第1圖的基板檢查裝置之A-A截面之縱截 面圖。 第5圖係顯示第1圖的基板檢查裝置之檢查單元之正視 圖。 10 第6圖係第5圖的檢查單元之側視圖。 第7圖係第5圖的檢查單元之平面圖。 第8圖係顯示第1圖的基板檢查裝置之延長懸浮台單元 之平面圖。 第9圖係顯示第8圖的延長懸浮台單元之側視圖。 15 第10圖係顯示第1圖的基板檢查裝置之另一延長懸浮 台單元之平面圖。 第11圖係顯示第10圖的延長懸浮台單元之側視圖。 第12圖係顯示第1圖的基板檢查裝置之搬運單元之側 視圖。 20 第13圖係顯示第12圖的搬運單元之平面圖。 第14圖係第8圖及第10圖的延長懸浮台單元及第13圖 的搬運單元組裝於第5圖的檢查單元之前的狀態之平面圖。 第15圖係第8圖及第10圖的延長懸浮台單元組裝於第5 圖的檢查單元之前的狀態之側視圖。 25 200821247 第16圖係顯示第8圖的延長懸浮台單元之變化例之正 視圖。 第17圖係顯示締結第16圖的延長懸浮台單元之懸浮台 單元部之抵接面的構造例之縱截面圖。 5 第18圖係顯示第8圖的延長懸浮台單元之另一變化例 之正視圖。 第19圖係顯示第1圖的基板檢查裝置之另一變化例之 平面圖。 第20圖係顯示第19圖的基板檢查裝置之A-A截面之縱 10 截面圖。 第21圖係顯示第1圖的基板檢查裝置之檢查單元之變 化例的側視圖。 第22圖係顯示第21圖的檢查單元之平面圖。 第2 3圖係顯示第1圖的基板檢查裝置之變化例之平面 15 圖。 【主要元件符號說明】 1.. .基板檢查裝置 2…檢查單元 3、4··.延長懸浮台單元 5.. .搬運單元 5a、101a ···抵接面 6.. .除震台 7.. .檢查用底座 8.. .台架 8a·"水平樑 9.. .檢查用懸浮台部 9A、9B...精密懸浮台部 9C...輔助檢查用懸浮台部 10.. .檢查頭移動機構(頭部搬運 機構） 26 200821247 10a···導執 26…直線移動機構(軌道、驅動 11···顯微鏡(檢查頭） 機構） 12...透射照明光源 26a···導 13…照明移動機構 27...滑動器 14...微:小間隙 28…裝卸機構 15…懸浮單元 34…螺拴 16、100···抵接餅 40、41…延長滾輪台單元 16a、100a···基準面 42、43…滾輪台部 17、18、29、32、33···抵接面 42a、43a · · · >衰^^ 19、20…架台 44…跨越滾輪機構 21、22、30、31…懸浮單元 44a…支撐構件 21a、22a ···溝 44b···軸 21a、22a··.單元維持構件 44c...轴承 21b、22b···缺口部 44d···滾輪 23、24…締結構件 45…傾斜滾輪 25···搬運底座(底座） 46…台車 27The width dimension is 14 200821247. By the operation of the inspection head moving mechanism 1〇 and the illumination moving mechanism 13 in a state where the substrate is suspended in a flat state, the microscope nA can transmit the illumination light source 12 in the width direction (X direction) orthogonal to the conveyance direction (γ direction). The linear movement is performed, whereby the inspection can be performed for the inspection line 5 of a predetermined straight line along the width direction of the substrate. By moving the substrate in the suspended state in the transport direction (Y direction), the substrate can be inspected in a state in which the substrate is suspended. When the defect of the surface of the substrate is inspected by the microscope 11, the substrate is moved in the conveyance direction by the transport unit 5, and the position corresponding to the gamma coordinate of the non-trapped portion is stopped, and then the microscope is moved by the inspection head moving mechanism 1丨丨 Move to the position corresponding to the X coordinate of the 10 defect, and observe the defect on the surface of the substrate. Further, when the inspection head is a micro inspection head, the substrate can be transported at a constant speed in the conveyance direction while being suspended on the inspection suspension portion 9, and the substrate is fully photographed by a majority of the line-sensing camera. . The inspection unit 2 can adjust the height of the precision floating table portion 15 9 Α, 9 Β or the gantry 8 with respect to the inspection base 7, so that the microscope u can be horizontally moved with respect to the surface of the substrate suspended horizontally on the precision floating table portions 9A, 9B. Further, the inspection unit 2 can rotate the gantry 8 or the precision suspension table portions 9A and 9B by a slight angle and adjust the guide 10a so as to be parallel with respect to the fine floating table portion 9A and the small gap for inspection of the girl. 20 The inspection unit 2 is assembled with the precision suspension table portions 9A, 9B, the gantry 8 of the microscope 11, and the transmission illumination source 12, which are adjusted with high precision and then assembled with the inspection base 7 to form a 丨 dimension. Check the device. The inspection unit 2 is configured such that the short side dimension of the inspection base 7 is smaller than the width of the vehicle compartment, so that it can be transported by a vehicle of 15 200821247 which is not limited by the road width. The short side dimension of the conveyance direction of the inspection base 7 may be at least the length at which the leg portion of the gantry 8 is attached to the inspection base 7. For example, when transporting a large truck with a vehicle width of 2.5 m, the short side dimension of the inspection base 7 can be set to be larger than the maximum size of the gantry 8 and the inspection floating platform 9 after adding 5, and the length is shorter than the vehicle. 2.5m wide. Further, the width of the short side of the inspection floating table portion 9 may be set to a fraction of the substrate size shorter than the vehicle width, for example, the glass substrate with respect to the size 3111 is set to 1/5 to 1/2. 0.6m~1.5m. Here, the short side dimension of the inspection unit 2 is set to 2 m. Further, on the inspection base 7 of the inspection unit 2, a pair of abutting members 16 having a reference surface 16a to which the transport unit 5 described later is horizontally mounted is provided at a predetermined interval 10, and the inspection shaft with respect to the gantry 8 is attached. The abutment member 100 of the right angle reference surface 100a. Further, at both end portions of the inspection base 7 in the conveyance direction (γ direction), abutting surfaces 17 and 18 which are attached to the extended suspension unit 3 and 4 to be described later are provided, as shown in Fig. 4, the extended suspension unit 3 and 4 are attached to the inspection floating table portion 9 of the inspection unit 2 continuously at two sides in the conveyance direction. Each of the extended suspension unit units 3, 4 has gantry 19, 20 fixed to the abutment faces Π, 18 provided in the inspection base 7. Since the abutting surfaces 17 and 18 have a structure in which the concave and convex portions are brought together, such as the ant umbilical 20, the convex portions formed on the gantry 19 and 20 can be easily attached by fitting the concave portions formed in the inspection base 7. On the upper surfaces of the gantry 19, 20, the elongated suspension units 21, 22 extending in the conveying direction are arranged in a plurality of rows and fixed in the width direction orthogonal to the conveying direction. The extension of the suspension unit 3, 4 does not require the high-precision suspension of the base 200821247 plate as in the case of the precision suspension table 9Α, 9Β, so that the suspension units 21, 22 can be separated by a predetermined interval. The suspension units 21 and 22 can achieve weight reduction of the extended suspension unit units 3 and 4, and can be manufactured at low cost. Each of the suspension units 21 and 22 has a plurality of air holes on the upper surface of the auxiliary inspection floating table portion 9C. As shown in Figs. 8 to 11 , on the upper surfaces of the suspension units 21 and 22, two grooves 21a and 22a for releasing air discharged from the air holes into the atmosphere are formed along the conveyance direction. When the width of the suspension units 21, 22 is small, the substrate 21a, 22a can be stably suspended even if air is leaked from the gap portion without providing the grooves 21a, 22a. Further, the framing members 19 and 20 for extending the suspension unit units 3 and 4 are provided with the structural members 23 and 24 for fixing to the transport unit 5, which will be described later. As shown in FIGS. 12 and 13, the transport unit 5 is provided with a long transport base 25, a linear movement mechanism 26 such as a linear motor, a slider 27, and a loading and unloading mechanism 28, wherein the transport base 25 is fixed to the transport base 25 In the inspection unit 2, the abutment surfaces 5a, 101a of the abutment members 16, 100 of the base 7 are provided, and the linear movement mechanism 26 is provided with a guide rail 26a and a guide rail 26a which are mounted on the upper surface of the transport base 25, and the slide The device 27 is disposed to be movable along the guide 26a and the guide 26a. The attaching and detaching mechanism 28 is attached to the slider 27 and can be attached or detached by, for example, suction or the like. 20 In order to move the substrate in the transport direction (Y direction), the transport base 25 is slightly longer than the length of the two substrates. For example, when the substrate size is 3 m, the length of the transport base 25 is 6.5 m longer than 6 m of the two substrates. The conveyance base 25 is pressed against both the reference surface 16a of the abutment member 16 of the inspection base 7 of the inspection unit 2 and the reference surface 100a of the contact member 100, and is fixed by bolts, whereby 17 200821247 simply The straight angle with respect to the inspection axis (χ axis) of the inspection unit 2 is matched with the horizontal degree with respect to the precision suspension table portions 9A, 9B. The transport unit 5 is attached to the inspection unit 2 in a T-shape. For example, when the glass substrate size is 3 m, the X-direction and the Y-direction dimension of the installation surface when the transport unit 5 and the inspection unit 2 are integrally assembled 5 are inspected. The length of the unit 2 in the X direction is set to 4 m, and the length of the transport unit 5 in the γ direction is set to 6 5111. In the state in which the transport unit 5 and the inspection unit 2 are integrally assembled, since the width of the short side in the χ direction is also 4 m, it is not possible to be mounted on a large vehicle having a width of 2.5 m or less that can pass through a general road as defined by the road traffic method. Truck (vehicle). 10 The job unit 5 is configured to be decomposed from the inspection unit 2 in units of units, and the size of the short side of the inspection unit 2 is set to 2 m, whereby the large truck can be transported 2111 with a width of 2.5 m; < 4111 size inspection unit 2. In addition, the inspection unit 2, which is a function of the -dimensional inspection device, is mounted on a large truck and transported while maintaining the height adjustment and assembly, whereby the conveyance unit 5 is separately attached, that is, the troublesome adjustment sheet is not required. Assembly. By assembling the transport unit 5 into a T-shape with respect to the inspection unit 2, it is possible to function as a secondary element inspection device. By mounting the "floating table units 3, 4" on both sides of the inspection unit 2, the transport unit can be disposed over the entire length of the substrate transport path. The splicing base 25 must support the linear miscellaneous mechanism 26« that does not bend over a long distance, because the caliper is used to function as a strength member. In this embodiment, C: the angle of the buckle is formed, and the strength can be increased and the amount of quantization can be increased. 20 200821247 Further, the transport base 25 is provided with abutment surfaces 29 for attaching the structural members 23 and 24 of the gantry 19 and the rafters 19 and 2 of the extended suspension unit 3, 4. By supporting the extended suspension unit 3, 4 for carrying The base 25 can assist in extending the suspension table units 3 and 4 so as not to bend. 5 The operation of the substrate inspection apparatus of the present embodiment configured as described above is explained. As shown in Fig. 14 or Fig. 15, the substrate of this embodiment is shown. The inspection apparatus 1 is composed of four units such as one inspection unit 2, two extension suspension unit units 3 and 4, and a conveyance unit 5, and is detached in units of units 2 to 5, respectively, and can be disassembled. When transported by a vehicle, it has the advantage that it can be easily disassembled according to the units 2 to 5. Further, when assembling the transport destination, the adjusters in units of units 2 to 5 can be assembled with each other. It is easy to assemble the substrate inspection device 1 that can inspect large substrates with high precision at the destination of the handling destination. 15 Xiaobie is a single 兀 2 series gantry 8 with high precision for the inspection head of the microscope 11 and a precision suspension table. Department 9A, 9B, transmission lighting Since the source 12 and the inspection base 7 are assembled into a body, and the inspection device is individually adjusted as a dimension, the substrate inspection can be performed with high precision by simply assembling the other units 3 to 5, and it is not necessary to perform the inspection. 2〇* Then, by fixing the extended suspension units 3 and 4 to the abutting surfaces 17 and 18 provided at both ends of the inspection base 7 in the conveyance direction, it is possible to mount a large substrate and maintain it flat. In addition, by attaching the transport unit 5, the transporting and detaching mechanism can be transported in the transport direction (γ direction) to maintain the side of the base 19 200821247 board which is suspended by the floating stage. Therefore, the substrate can be moved in the transport direction (Y direction) in accordance with the operation of the transport unit 5, and the microscope u can be moved in the direction orthogonal to the transport direction (χ direction) with the inspection head moving mechanism 10, Therefore, the two-dimensional inspection can be performed over the entire substrate. 5 The inspection base 7 of the inspection unit 2 is provided with a predetermined interval therebetween, the abutment member 16 having the reference surface 16a of the horizontal ambulance unit 5,The abutting member 100 having the reference surface 100a mounted at right angles to the inspection shaft of the gantry 8. After the transport unit 5 is assembled into the inspection unit 2 and the straight angle is adjusted, the horizontal production is 10, and the long transport unit can be 5 is separated from the inspection unit 2, and is separately transported by a large truck. In particular, the inspection unit 2 is used to fully support the substrate for maintaining the level of the substrate relative to the conventional inspection suspension table. The precision suspension stage portions 9a and 9B of the substrate-partial suspension are used, whereby the width of the substrate conveyance direction (γ direction) of the inspection unit 2 can be reduced to a number of the substrate - as a result, the inspection can be performed. The width dimension of the unit 2 in the substrate transport direction is smaller than that of the general truck, and as long as the long transport unit 5 is removed, the general large truck can be freely transported without being restricted by the road operation method, and does not have to be obtained. Specially licensed special large trucks are subject to traffic restrictions. Compared to special large trucks that are subject to traffic restrictions, the cost of shipping large general trucks can be significantly reduced. Moreover, in the conveyance base 25 of the conveyance unit 5, the contact surface area and the 1〇1& are respectively provided in two places. The transport unit 5 and the inspection unit 2 are transported separately, and the abutting surfaces 5a and 101a of the transport base 25 and the reference surface 16& and the abutting member of the abutting member 16 of the inspection 20 200821247 are pressed on the site. The reference plane 1 of (10) ensures the horizontalness with respect to the conveyance direction (Y direction) and the straight angle with respect to the inspection axis (χ axis) of the inspection unit 2. According to the substrate inspection apparatus i of the present embodiment, even if the substrate is present at any position in the conveyance direction, the substrate can be supported by the inspection floating stage unit 9 or the = long suspension unit 3, 4 as a whole. Even if the substrate moves in the transport direction by the operation of the transport unit 5, the inside of the substrate does not rub against the transport path, and damage due to friction can be prevented. Further, by the inspection floating table portion 9 of the inspection unit 2, the substrate 1 can be kept flat, and the microscope 11 can be moved by the inspection head moving mechanism 10 to inspect the substrate surface accurately along the inspection line, and then The large and heavy-grained glass substrate is suspended and forcedly transported, thereby increasing the handling speed, and without having to carry the substrate on the inspection table as before, the result can be directly checked under the suspended condition. The advantage of the throughput of inspection can be improved. In addition, it is possible to reduce the distance between the suspension units 21 and 22 by the distance between the suspension units 21 and 22, thereby suppressing bending in the conveyance direction while being attached to both end faces of the inspection unit 2 in the conveyance direction. It can be easily transported and assembled on site. Further, by extending the suspension base units 3, 4 to the transport base 25 of the transport unit 5, it is possible to increase the rigidity of the suspension unit units 3, 4 and to reduce bending and vibration. Further, in the substrate inspection apparatus 1 of the present embodiment, the deismometer 6 is provided in the lower portion of the inspection base 7 of the inspection unit 2, but an adjuster provided with a height adjustment mechanism may be provided instead. When it is placed on the line of the lithography process line (in-line), 21 200821247 It is necessary to set the adjuster for the height of the line of the roller conveyor to match the front and rear configuration. When being placed on the line, the extended suspension unit 3, 4 can be separated from the inspection base 7 of the inspection unit 2, and the adjuster can be attached to each of the extended suspension units 3, 4 and placed directly on the ground. 5 As shown in Fig. 16 and Fig. 17, when the extended suspension unit units 3 and 4 are large, they may be divided into two suspension unit portions 30 and 31 having a plurality of suspension units 22, and are respectively fixed to a single unit. The gantry 19, 2 〇. At this time, as shown in Fig. 17, the plurality of suspension unit portions 3, 31 are preferably adhered to each other by the abutting surfaces 32, 33 provided in the width direction and the thickness direction by the screw pick-up, and the accuracy is good with 10 The ground is assembled into one. Further, as shown in Fig. 18, when the gantry 19, 20 is a large one, the sub-frames 19 and 20 may be divided and fixed to the unitary suspension unit 31 and 31. Further, as shown in Figs. 19 and 20, the extension roller unit units 40, 41 may be incorporated in the inspection unit 15 for the inspection unit 2 instead of the extension suspension unit units 3, 4. The extension roller table units 4A and 41 can also mount the extension roller table unit of the roller table portions 42, 43 supporting the inside of the substrate by the plurality of rollers 42a and 43a on the same gantry ports 9 and 20, and can be incorporated into the inspection unit. 2 inspection base 7. At this time, each of the rollers is constituted by a free-rolling 20 wheel conveyor that is in contact with the inside of the substrate and is rotatable, and the apex of each of the rollers 42a and 43a that is in contact with the inside of the substrate and the inspection floating table of the inspection unit 2 are provided. The substrate suspension height on the 9 is at the same degree. For example, when the substrate is suspended by the precision floating table portions 9A and 9B, the height of the apex of each of the rollers 42a and 43a of each of the roller table portions 42 and 43 is set as the substrate with respect to the upper surface of the precision floating table portions 9A and 9B. 0.2 mm of the levitation height 22 200821247 〇 , , , 检查 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 Roller mechanism 44. The crossing roller mechanism 44 is attached to the concave cutout portions 5b, 22b, and the cutout portions 21b, 22b are formed in the unit holding members 21a, 22a which can support the suspension units 21, 22 of the extended suspension unit 3, 4. The traverse roller mechanism 44 is fixed to the U-shaped support member 44a by the shaft 44b, and is rotatably supported on the shaft 44b via the bearings 44c and 44c. The roller 44d is made of a PEEK (P〇ly Ether Ether Ketone) resin or the like which is softer than the glass substrate and has abrasion resistance. The spanning roller mechanism 44 is disposed in each of the gaps of the respective suspension units 22 of the suspension unit units 3, 4. The height of each of the rollers 44d across the roller mechanism 44 is equal to the levitation height of the upper surface of each of the suspension units 21, 22 and the substrate, for example, a projection of approximately 〇2 mm. 15 When the extended suspension unit 3 and 4 are attached to both end sides of the inspection unit 2 in the conveyance direction, even if the inspection suspension unit 9 and the extended suspension unit 3 and 4 are slightly different in height, the front end of the glass substrate is also The roller 44d can be accessed and stably across the height difference. By arranging the traversing roller 44d in the joint portion of the extended suspension unit 3, 42 2 and the inspection floating table portion 9, the extended suspension table tl3, 4 can be simply incorporated into the inspection unit 2, and There is no need to adjust the height of the handling surface. Further, the crossing roller mechanism 44 may be provided on the inspection base 7 on both sides of the inspection floating table portion 9 which is the inspection area of the inspection unit 2. By the accommodating base 7 being mounted by the traverse roller mechanism 44, the degree of the roller technique can be set with high precision with respect to the precision turrets 23 23 21 21 21 9A, 9B. As a result, the thin glass substrate carried into the inspection unit 2 is well maintained by the trajectory heights of the respective traversing roller mechanisms 44, (4) fine (four) pontoon portions M, 9B disposed along a plurality of sides of the inspection area. The suspension height of the glass substrate is 5 and flatness. Further, as shown in Fig. 23, an inclined roller 45 as a transport bearing that can freely rotate the transport unit 5 that can be used as a weight can be provided under the transport base of the transport unit 5. The transport unit 5 is placed on the carriage yoke, and is inserted into the front end portion of the gantry 8 of the inspection unit 2 as shown in Fig. 14 to be mounted on the inspection base 7. The trolley 46 is provided with a lifting mechanism. The conveyance unit 5 is fed to the conveyance surface of the conveyance base 25, and the position of the contact member 16 and the inspection member 7 is substantially aligned with each other, and the conveyance unit 5 is lowered by the elevating mechanism. In the inspection base 7, at this time, the conveyance base 25 is rotatably supported by the inclined roller 15 45 in a state of being suspended from the inspection base 7, so that the conveyance unit 5 can be moved while being finely moved. The abutting faces 5a, 101a of the base 25 coincide with the reference faces 16a, 100a of the abutting members 16, 100 of the test base 7. In the transfer bearing shaft, instead of the inclined roller 45, both ends of the corner steel pipe constituting the lowermost conveying base 25 may be sealed to constitute a 20-slot for storing high-pressure gas, and a gas which can eject a large amount of gas is ejected by the lower surface. The hole has the function of an air bearing shaft. When the air bearing shaft is used, the atmosphere in the air tank is opened in the state after positioning, and the abutting surface 5a of the transport base 25 is in close contact with the reference surface 16a of the abutting member 16 of the inspection base 7, so that high precision can be achieved. Positioning is done. 24 200821247 [Simple description of the drawings 3] Fig. 1 is a plan view showing a substrate inspection apparatus relating to one embodiment of the present invention. Fig. 2 is a side view of the substrate inspection apparatus of Fig. 1. 5 Fig. 3 is a front view of the substrate inspection apparatus of Fig. 1. Fig. 4 is a longitudinal cross-sectional view showing the A-A cross section of the substrate inspection apparatus of Fig. 1. Fig. 5 is a front elevational view showing the inspection unit of the substrate inspection apparatus of Fig. 1. 10 Fig. 6 is a side view of the inspection unit of Fig. 5. Figure 7 is a plan view of the inspection unit of Figure 5. Fig. 8 is a plan view showing the extended suspension unit of the substrate inspection apparatus of Fig. 1. Figure 9 is a side elevational view showing the extended suspension unit of Figure 8. 15 Fig. 10 is a plan view showing another extended suspension unit of the substrate inspection apparatus of Fig. 1. Figure 11 is a side elevational view showing the extended suspension unit of Figure 10. Fig. 12 is a side view showing the conveying unit of the substrate inspection apparatus of Fig. 1. 20 Fig. 13 is a plan view showing the transport unit of Fig. 12. Fig. 14 is a plan view showing a state before the extended suspension unit of Figs. 8 and 10 and the transport unit of Fig. 13 are assembled to the inspection unit of Fig. 5. Fig. 15 is a side view showing a state before the extended suspension unit of Figs. 8 and 10 is assembled to the inspection unit of Fig. 5. 25 200821247 Figure 16 is a front elevational view showing a variation of the extended suspension unit of Figure 8. Fig. 17 is a longitudinal cross-sectional view showing a structural example of the abutting surface of the suspension unit unit of the extended suspension unit of Fig. 16. 5 Fig. 18 is a front elevational view showing another variation of the extended suspension unit of Fig. 8. Fig. 19 is a plan view showing another modification of the substrate inspecting apparatus of Fig. 1. Fig. 20 is a longitudinal sectional view showing the A-A section of the substrate inspection apparatus of Fig. 19. Fig. 21 is a side view showing a modification of the inspection unit of the substrate inspection apparatus of Fig. 1. Fig. 22 is a plan view showing the inspection unit of Fig. 21. Fig. 2 is a plan view showing a modification of the substrate inspecting apparatus of Fig. 1. [Description of main component symbols] 1.. Substrate inspection device 2... Inspection unit 3, 4··. Extended suspension unit 5. Portion unit 5a, 101a ··· Abutment surface 6.. .. . Inspection base 8.. gantry 8a·"horizontal beam 9... Inspection suspension table 9A, 9B...Precision suspension table 9C...Auxiliary inspection suspension table 10... .Inspection head moving mechanism (head transport mechanism) 26 200821247 10a···Guide 26...Linear moving mechanism (track, drive 11···microscope (inspector head) mechanism 12...Transmission illumination source 26a··· Guide 13... Illumination moving mechanism 27... Slider 14... Micro: Small clearance 28... Loading and unloading mechanism 15... Suspension unit 34... Screws 16, 100... Abutting cakes 40, 41... Extended roller table unit 16a 100a···reference planes 42, 43... roller table parts 17, 18, 29, 32, 33··· abutting surfaces 42a, 43a · · · > fading 19, 20... gantry 44... across the roller mechanism 21, 22, 30, 31...suspension unit 44a...support members 21a and 22a···ditch 44b···shaft 21a, 22a··. unit maintenance member 44c...bearings 21b, 22b···notch 44d· ·· Roller 23, 24...construction member 45...inclined roller 25···handling base (base) 46...tray 27