TWI602757B - Transfer device - Google Patents

Description

Conveyor

The present invention relates to a transfer device, and more particularly to a substrate transfer device.

Liquid crystal display devices have been used in a wide variety of electronic products due to their low power consumption, low heat generation, light weight, and non-radiation, and have gradually replaced conventional cathode ray tube display devices. In general, a liquid crystal display device includes a liquid crystal panel and a backlight module. The liquid crystal panel mainly has two substrates and a liquid crystal layer sandwiched between the two substrates, and the material of the substrate is usually glass, and the backlight module can evenly distribute the light of the light source so that the light is used as a backlight of the liquid crystal panel module. Generally, in the process of manufacturing a liquid crystal display device, it is necessary to transfer a glass substrate between different stations for various processes.

AOI (Automated Optical Inspection) equipment is widely used in the process of glass substrate. Its main operating principle is to use computer program to drive and scan the object with the photographic lens to collect images and data in the detector. Compare and analyze the qualified parameters to find the defects on the test object. The advantage of AOI is high-speed and high-precision optical image detection system, which can perform repeated and accurate detection. And the use of machine vision as a test standard technology, and the improvement of the traditional use of optical instruments for human detection.

In the prior art, the glass substrate is transferred between different stations by the transfer roller. Therefore, when the glass substrate is tested, it is often faced how to smoothly transfer the glass substrate between the stations, and how to make the glass substrate The transmission at a stable speed does not affect the detection effect of the AOI. In the current practice, the conveying roller is usually in a dynamic state or a free state by the action of raising or lowering the conveying roller, so as to distinguish different states of the conveying glass substrate, but this requires the glass substrate to wait for the switching action of the aforementioned conveying wheel. It takes time and does not benefit the process efficiency of the glass substrate.

The present invention provides a transfer device that allows a transfer wheel to be in a power state and a free state, respectively, by switching components to smoothly transfer a substrate.

The present invention provides a transfer apparatus adapted to be disposed in at least one station in a substrate process to transfer a substrate to or from a station. The transfer device includes a plurality of transfer wheels, at least one power source, and a switching assembly. The switching assembly is disposed between the at least one power source and the transfer wheel. When the substrate is in the incoming station, the switching assembly connects the power source and the transfer wheel to cause the power source to drive the transfer wheel to rotate to transfer the substrate. When the substrate is completely moved into the station, the switching assembly disconnects the transfer wheel from the power source, leaving the transfer wheel in a free state.

In an embodiment of the invention, the transport wheel is divided into multiple transmissions The wheel set, each of the transfer wheel sets further has a wheel shaft connected to the plurality of transfer wheels for synchronous rotation with the transfer wheel, and the switch assembly comprises a plurality of first magnetic members, a drive module and a plurality of second magnetic members. The first magnetic members are respectively disposed on the axle. The drive module can be controlled to be placed next to the axle. The second magnetic member is coupled to the power source and disposed on a side of the driving module facing the first magnetic member. The driving module drives the second magnetic member to move closer to or away from the first magnetic member. When the second magnetic member moves closer to the first magnetic member, the power source drives the second magnetic member to rotate, so that the second magnetic member rotates the transfer wheel by magnetically driving the first magnetic member and rotating the axle.

In an embodiment of the invention, the driving module includes a platform and a driving component. The power source and the second magnetic member are disposed on the platform, and the driving member drives the platform to move closer to or away from the axle.

In an embodiment of the invention, the first magnetic member and the second magnetic member are respectively magnetic rings that are coupled to each other. The power source and the second magnetic member are disposed on the platform. The drive member drives the platform closer to or away from the axle.

In an embodiment of the invention, the transfer wheel is divided into a plurality of transfer wheel sets. Each of the transfer wheel sets further has an axle coupled to the plurality of transfer wheels for synchronous rotation with the transfer wheel. The switching assembly includes a plurality of driving members and a plurality of clamping members, and the driving members are controllably disposed beside the axles, the clamping members are coupled to the power source and respectively disposed on the driving members. The drive member drives the clamp member to abut or be removed from the axle. When the clamping members respectively abut against the axle, the power source drives the clamping member to rotate to synchronously rotate the axle and the transmitting wheel.

In an embodiment of the invention, the station further includes a processing device, The base of the conveyor is divided into a feeding zone, a processing zone and a discharge zone. The treatment zone is located between the feed zone and the discharge zone. The processing device is disposed in the processing area. The conveyor further includes a carry-on module movably disposed on the base and controlled to move back and forth between the feed zone, the process zone, and the discharge zone.

In an embodiment of the invention, when the substrate completely enters the feeding zone, and the switching component breaks the connection between the transmitting wheel and the power source to make the conveying wheel in a free state, the carrying module is clamped and The substrate is transferred to move the substrate from the feed zone into the processing zone. When the carrying module moves the substrate from the processing area into the discharge area, the switching assembly connects the power source and the transfer wheel to cause the power source to drive the transfer wheel to rotate and transfer the substrate from the discharge area to the transfer device.

In an embodiment of the invention, the substrate is a glass substrate, and the processing device is an automated optical inspection (AOI) device.

Based on the above, the transfer device can switch between the power state and the free state by switching the components, so that it is not necessary to provide a set of transfer wheels for the two states, so that the manufacture of the transfer device can be effectively reduced. Cost, and at the same time, increase process efficiency.

The above described features and advantages of the invention will be apparent from the following description.

20‧‧‧Substrate

100‧‧‧Transfer device

110‧‧‧Base

120‧‧‧Control Module

130, 343b‧‧‧ power source

132, 134, 136, 138‧‧‧ transmission parts

140‧‧‧Switching components

141‧‧‧First magnetic parts

142‧‧‧Second magnetic parts

143‧‧‧Drive Module

143a‧‧ platform

143b‧‧‧ drive parts

150‧‧‧ Carrying Module

151‧‧‧ Track

153‧‧‧ Vehicles

155, 343a‧‧‧ clamping parts

157‧‧‧Fixed parts

157a‧‧‧ Opening

160‧‧‧Transport wheel set

161‧‧‧Transport wheel

163‧‧·Axle

163a‧‧‧End

200‧‧‧Processing device

N, S‧‧‧ magnetic pole

S1‧‧‧ feeding area

S2‧‧‧ treatment area

S3‧‧‧Drawing area

W1, W2, W3‧‧‧ stations

X-Y-Z‧‧‧right angle coordinates

FIG. 1 is a schematic diagram showing the configuration of a transmitting apparatus according to an embodiment of the present invention.

2 is a schematic diagram showing the electrical relationship of the transmitting device of FIG. 1.

FIG. 3 and FIG. 4 are schematic diagrams showing different driving states of the conveying device.

FIG. 5 is a partial schematic view of the conveying device of FIG. 3. FIG.

6 is a partial schematic view of a conveying device according to another embodiment of the present invention.

FIG. 1 is a schematic diagram showing the configuration of a transmitting apparatus according to an embodiment of the present invention. 2 is a schematic diagram showing the electrical relationship of the transmitting device of FIG. 1. At the same time, the right angle coordinate X-Y-Z is provided to facilitate the description of the relevant components. Referring to FIG. 1 and FIG. 2 simultaneously, the transmitting device 100 is adapted to be disposed in at least one station in the substrate manufacturing process. In the embodiment, only the stations W1, W2 and W3 are shown, and the stations W1 and W3 are represented by arrows. The transmission device 100 is disposed at the station W2 as an example. Further, the substrate process is, for example, a liquid crystal panel process, the substrate 20 is, for example, a glass substrate, and the station W2 is provided with a processing device 200 for performing a corresponding process process on the substrate 20 entering the station W2.

In the present embodiment, the processing device 200 is, for example, an Automated Optical Inspection (AOI) device, so that the substrate 20 can be transferred to the station W2 for optical processing after the station W1 completes the relevant pre-process. The detection is transmitted to the station W3 after the detection is completed. However, the present invention is not limited thereto, and any related process, inspection station needs to carry the substrate 20, and regardless of whether the process arrangement is a cluster arrangement or other various types of arrangement, Suitable for performing the counter substrate by the transfer device 100 20 transfer action.

In this embodiment, the transmitting device 100 includes a base 110, a control module 120, a power source 130, a switching component 140, a carrying module 150, and a plurality of transmitting wheel sets 160. The control module 120 and the power source 130 The switching module 140 is disposed in the base 110, and the carrying module 150 and the transmitting wheel set 160 are disposed on the base 110. The control module 120 is electrically connected to the power source 130, the switching component 140 and the carrying module. 150, in order to control the three to perform mutual matching to achieve the effect of the transfer substrate 20. At the same time, the control module 120 is electrically connected to the processing device 200 to control the substrate 200 to perform related processing operations when the substrate 20 is moved into the station W2.

As shown in FIG. 1, it is disposed in the conveying device 100 of the station W2, and the base 110 is divided into a feeding area S1, a processing area S2 and a discharging area S3, wherein the feeding area S1 is used to connect the previous station W1. In order to transfer the substrate 20 from the station W1 to the station W2, the discharge area S3 is connected to the next station W3, so that the processed substrate 20 can be transferred into the station W3 for the next process.

FIG. 3 and FIG. 4 are schematic diagrams showing different driving states of the conveying device. Referring to FIG. 1 , FIG. 3 and FIG. 4 simultaneously, the plurality of transfer wheel sets 160 of the present embodiment are arranged on the susceptor 110 along the Y axis, and each of the transfer wheel sets 160 includes a plurality of transfer wheels 161 arranged along the X axis. And an axle 163 extending along the X-axis, wherein the axle 163 is connected to the plurality of transfer wheels 161 so that the axle 163 can rotate in synchronization with the transfer wheel 161. In addition, the carrying modules 150 disposed above the base 110 are substantially located on opposite sides of the transfer wheel set 160. The carrying module 150 includes a pair of rails 151, a pair of carriers 153, a plurality of clamping members 155, and a plurality of fixing members 157, wherein the carrier 153 is movably disposed On the track 151. The holder 155 is movably disposed on the carrier 153 along the X-axis. As shown in FIG. 1, the holding members 155 on opposite sides of the substrate 20 achieve the effect of clamping by abutting the sides of the substrate 20. The fixing member 157 is disposed on the carrier 153, which abuts on the edge of the main surface of the substrate 20, where the fixing member 157 has a plurality of openings 157a connected to the vacuum adsorption unit (not shown) to allow the substrate 20 is secured to the fixture 157 by vacuum suction and across the transfer wheel set 160. However, in this embodiment, the method for fixing the substrate 20 is not limited. In another embodiment not shown, the vacuum absorbing member 157 may be omitted, or the structure may be clamped. The effect of fixing the substrate 20 to the carrying module 150 is the same as in the previous embodiment.

Based on the above, as shown in FIG. 1, the substrate 20 entering the transfer device 100 will be substantially driven by the power from the carrying module 150 and the transfer wheel set 160. The following will further explain how the substrate 20 is carried by respectively. The row module 150 and the transfer wheel set 160 are in a state of being moved in the feed zone S1, the process zone S2, and the discharge zone S3.

FIG. 5 is a partial schematic view of the conveying device of FIG. 3. FIG. Referring to FIG. 3 to FIG. 5 simultaneously, in the embodiment, the switching component 140 includes a first magnetic member 141, a driving module 143, and a plurality of second magnetic members 142. The first magnetic members 141 are respectively disposed at one end of the axle 163. It rotates in synchronization with the transfer wheel 161 and the axle 163. The driving module 143 is electrically connected to the control module 120 and disposed beside the axle 163. The driving module 143 includes a platform 143a and a driving component 143b. The power source 130 and the second magnetic component 142 are disposed on the platform 143a, and the second magnetic component is disposed. The piece 142 is connected to the power source 130 and is set The drive module 143 faces the side of the first magnetic member 141. It should be noted that, in FIG. 3 and FIG. 4 , only one of the transfer wheel sets 160 is illustrated. Therefore, only one magnetic member 141 and one second magnetic member 142 are taken as an example for description.

In the present embodiment, the power source 130 is, for example, a motor that outputs power to the second magnetic member 142 by the transmission members 132, 134, 136, 138, wherein the transmission member 134 is, for example, a transmission belt, and the transmission member 132, 136 is, for example, a pulley, and the transmission member 138 is a shaft structure that is substantially coaxial (same as the Y-axis) with the transmission member (pulley) 136, and the second magnetic member 142 is also disposed at the transmission member 138 with the (Y) axis. on. Accordingly, the second magnetic member 142 can be driven to generate the Y-axis rotation by the power source 130 and the transmission members 132, 134, 136, and 138. However, the present invention does not limit the form of the transmission member, and any one known to transmit power and allow the second magnetic member to rotate can be applied thereto. Further, the driving member 143b is, for example, a pneumatic cylinder having a telescopic structure, and the platform 143a is disposed substantially at the moving end of the driving member 143b, so that the moving end can be moved back and forth along the Y-axis, and the first portion disposed on the platform 143a The two magnetic members 142 are moved closer to or away from the first magnetic member 141.

Further, as shown in FIG. 5, the first magnetic member 141 and the second magnetic member 142 are respectively magnetic rings coupled to each other, which are respectively staggered by a plurality of magnetic poles N and S, so When the two are close to each other and the second magnetic member 142 is rotated, the first magnetic member 141 can be influenced by the magnetic force to generate a corresponding synchronous rotational motion. Accordingly, when the power source 130 drives the second magnetic member 142 to rotate via the transmission members 132 to 138, the first magnetic member 141 and the axle 146 and the transfer wheel 161 can also be driven to rotate (ie, the first magnetic member 141 and axle 146. The transfer wheel 161 is in a power state), thereby achieving the effect of a non-contact power transmission. Once the moving end of the driving member 143b is reset to the state of FIG. 4, since the first magnetic member 141 and the second magnetic member 142 are away from each other, the influence of the magnetic force is lost, and the first magnetic member 141 and the axle 163 and the conveying wheel 161 are no longer lost. Driven by power, it is free.

Referring again to FIG. 1, FIG. 3 and FIG. 4, the relationship between the transfer wheel set 160 and the switching assembly 140 has been described above, and the transfer process of the substrate 20 of the present embodiment will be further described later. First, during the transfer of the substrate 20 from the station W1 to the station W2, the switching assembly 140 of the conveyor 100 connects the power source 130 and the transfer wheel 161 of the transfer wheel set 160 to enable the power source 130 to drive the transfer wheel. The substrate 161 is rotated to transfer the substrate 20 into the feeding zone S1 of the conveying device 100. In other words, the conveying device 100 at this time is in the state shown in FIG. 3, that is, the first magnetic member 141 and the second magnetic member 142 are in the magnetic influence range of each other, so that the power source 130 can transmit power to the transmission. The wheel 161 is placed with the transfer wheel 161 in a powered state to drive and transport the substrate 20.

Then, after the substrate 20 has been completely transferred to the feeding zone S1, the control module 120 drives the switching component 140 to move the second magnetic component 142 away from the first magnetic component 141 (ie, the magnetic forces of the two are no longer mutually Influence), and let the transfer wheel 161 be in a free state. At the same time, the control module 120 activates the carrying module 150 to change the substrate 20 to be clamped and fixed by the carrying module 150, so that the substrate 20 can be driven by the carrying module 150 from the feeding area. S1 is transferred to the processing area S2. Then, after the substrate 20 is moved into the processing area S2, the control module 120 drives the processing device 200 to the substrate 20 The related processing or detection is performed, and after completion, the control module 120 drives the carrying module 150 to further transfer the substrate 20 from the processing area S2 to the discharge area S3.

Finally, after the substrate 20 completely enters the discharge area S3, the control module 120 drives the carrying module 150 to release the clamping and fixing of the substrate 20, and simultaneously drives the switching component 140 and the power source 130 to be as shown in FIG. The state thus allows the substrate 20 to be driven again by the transfer wheel 161 to be transmitted from the station W2 (and to the station W3). At this time, the substrate 20 completes the transfer behavior at the station W2 by the transport device 100.

6 is a partial schematic view of a conveying device according to another embodiment of the present invention. Referring to FIG. 6, different from the foregoing embodiment, the switching assembly of the present embodiment includes a clamping member 343a and a driving member 143b, wherein the power source 343b is disposed on the driving member 143b for controlling the clamping member 343a. The X axis performs a rotary motion. When the aforementioned substrate 20 is to be transported by the transfer wheel 161, the driving member 143b drives the holding member 343a and the power source 343b to move toward the axle 163 along the X-axis, and the clamping member 343a and the end portion 163a of the axle 163. After the interference is fixed to each other, the clamp 343a is driven to rotate by the power source 343b, so that the rotation of the axle 163 and the transfer wheel 161 to receive the power can be achieved. Correspondingly, when the transfer wheel 161 is to be converted into a free state, the effect can be achieved by having the clamp member 343a away from the end portion 163a. 3 and FIG. 4, only one set of transfer wheel sets 160 is shown here, so only one clamp member 343a and one drive member 143b will be described as an example.

In summary, in the above embodiment of the present invention, the transmitting device can make a power connection or a power removal between the transmission wheel and the power source according to the required situation by switching the components, that is, Said that the transfer wheel can be switched by the component Switch between the power state and the free state. In this way, as the structure of the transfer substrate, it is not necessary to simultaneously provide two sets of transfer wheels to achieve the desired power state and the free state, respectively, and the substrate can be smoothly transferred by switching only with one set of transfer wheels, Can effectively reduce process time and manufacturing costs.

Furthermore, in one embodiment, the switching component is matched with each other by the magnetic member and the driving member, so that the mutually coupled magnetic rings can be moved closer to or away from each other by the driving member, thereby thereby achieving the magnetic ring The non-contact power transmission effect allows the transmission wheel to receive or remove power from the power source.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

20‧‧‧Substrate

100‧‧‧Transfer device

110‧‧‧Base

150‧‧‧ Carrying Module

151‧‧‧ Track

153‧‧‧ Vehicles

155‧‧‧Clamping parts

157‧‧‧Fixed parts

157a‧‧‧ Opening

160‧‧‧Transport wheel set

161‧‧‧Transport wheel

163‧‧·Axle

200‧‧‧Processing device

S1‧‧‧ feeding area

S2‧‧‧ treatment area

S3‧‧‧Drawing area

W1, W2, W3‧‧‧ stations

X-Y-Z‧‧‧right angle coordinates

Claims (8)

A transfer device adapted to be disposed in at least one station in a substrate process to transfer a substrate to or from the station, the transfer device comprising: a base; a plurality of transfer wheels; a power source; a switching component disposed between the at least one power source and the transmitting wheels, the switching component connecting the power source and the transmitting wheels when the substrate is introduced into the station, to The power source drives the transmission wheels to rotate to transmit the substrate. When the substrate is completely moved into the station, the switching assembly breaks the connection between the transmission wheels and the power source, and the transmission wheels are in a free state. And the substrate is carried on the transfer wheel; and a carrying module is configured to clamp the substrate, and the carrying module is movably disposed on the base, and the substrate is driven on the base The seat slides back and forth to perform the processing of the substrate. The conveying device of claim 1, wherein the conveying wheels are divided into a plurality of conveying wheel sets, each of the conveying wheel sets further having a wheel shaft connected to the plurality of conveying wheels for synchronizing with the conveying wheels Rotating, and the switching assembly includes: a plurality of first magnetic members respectively disposed on the axles; a driving module rotatably disposed beside the axles; and a plurality of second magnetic members connecting the power sources And the driving module drives the second magnetic members to move closer to or away from the first magnetic members, and the second magnetic members move closer to the side of the first magnetic member. Some of the first magnetic parts, The power source drives the second magnetic members to rotate, so that the second magnetic members rotate the plurality of transfer wheels by magnetically driving the first magnetic members and rotating the axles. The transfer device of claim 2, wherein the first magnetic members and the second magnetic members are magnetic rings that are coupled to each other. The transmission device of claim 2, wherein the driving module comprises: a platform, the power source and the second magnetic members are disposed on the platform; and a driving member driving the platform to move closer or Stay away from the axles. The conveying device of claim 1, wherein the conveying wheels are divided into a plurality of conveying wheel sets, each of the conveying wheel sets further having a wheel shaft connected to the plurality of conveying wheels for synchronizing with the conveying wheels Rotating, and the switching assembly comprises: a plurality of driving members, controllably disposed beside the axles; and a plurality of clamping members connected to the power source and respectively correspondingly disposed on the driving members, the driving The driving member abuts against or is removed from the axles. When the clamping members respectively abut the axles, the power source drives the clamping members to rotate to synchronously rotate. The axles and the transfer wheels. The conveying device of claim 1, wherein the station further comprises a processing device, and the base of the conveying device is divided into a feeding zone, a processing zone and a discharging zone, the processing zone Located between the feeding zone and the discharge zone, the processing device is disposed in the processing zone, and the carrying module is controlled to move back and forth between the feeding zone, the processing zone and the discharging zone. The conveying device of claim 6, wherein the substrate completely enters the feeding zone, and the switching assembly disconnects the connecting wheels from the power source to make the conveying wheels free. The carrying module clamps and transports the substrate to move the substrate from the feeding area into the processing area, and the switching module moves the substrate from the processing area into the discharging area. The assembly connects the power source to the transfer wheels such that the power source drives the transfer wheels to rotate to transfer the substrate from the discharge zone to the transfer device. The transfer device of claim 6, wherein the substrate is a glass substrate, and the processing device is an Automated Optical Inspection (AOI) device.