TWM445176U - Detection device using multi-axis robot arm - Google Patents
Detection device using multi-axis robot arm Download PDFInfo
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- TWM445176U TWM445176U TW101216343U TW101216343U TWM445176U TW M445176 U TWM445176 U TW M445176U TW 101216343 U TW101216343 U TW 101216343U TW 101216343 U TW101216343 U TW 101216343U TW M445176 U TWM445176 U TW M445176U
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Description
本創作係有關於一種運用多軸機械臂之檢測裝置，尤指一種藉由多軸機械臂對一待測物品進行多面檢測的檢測裝置。The present invention relates to a detecting device using a multi-axis mechanical arm, and more particularly to a detecting device for multi-face detecting an object to be tested by a multi-axis mechanical arm.
精密檢測，係為自動化控制中極為重要之一環。觀之自動控制技術的發展，係可由量產之概念說起。量產係為大量生產(Mass Production)的縮寫，其概念很早即出現於人類的社會，具有低成本、高效率的優點。但量產的實行係受制於規格化的先決條件。在規格化尚未能達成之前，量產的對象僅限於低技術，低精密度之產業，如磚塊等簡單產品。隨著規格化之普及，分工越細，量產所能處理的對象也同時增多。然而隨之精密工業所帶來的高規格之需求，對於產品之品質亦需經過嚴密之檢測始可符合一般供應鏈之標準。是以，如何對產品進行高精密度之檢測，以提供高品質的產料輸出係為製程廠商之一大課題。Precision testing is one of the most important aspects of automation control. The development of Guanzhi's automatic control technology can be said from the concept of mass production. The mass production system is an abbreviation of Mass Production, and its concept appeared in human society very early, with the advantages of low cost and high efficiency. However, the implementation of mass production is subject to the prerequisites for normalization. Before the standardization has been achieved, the mass production target is limited to low-tech, low-precision industries, such as simple products such as bricks. With the popularization of standardization, the finer the division of labor, the more objects that can be handled by mass production. However, with the high specification requirements brought by the precision industry, the quality of the products must be closely tested to meet the standards of the general supply chain. Therefore, how to carry out high-precision testing of products to provide high-quality output system is one of the major issues for process manufacturers.
精密檢測通常適用於須具備高精密度、低容錯率的產品，通常係配合一自動化控制產線設置，並配設於供應鏈之末端位置，以對製造之成品進行表面汙損、磨損、漏銅等瑕疵之檢測。其通常包含有一光學儀器(例如：線掃描攝影機、面掃描攝影機等)用以對待測物品的表面取像，再以電腦影像處理技術來檢出異物或圖案異常等瑕疵。於習知技術中通常係藉由一輸送 帶將待測物送至上述光學儀器之景深範圍內進行取像，然而，大多數的檢測裝置僅具備有對待測物品之單一視覺平面進行取像之功效，並不能配合多面體之產品進行多維度之表面檢測。如中華民國第I230255號專利，係揭露一種自動光學檢查機，包含有一直立平台及複數個電荷耦合元件(charge coupled device，CCD)。該電荷耦合元件係用以對玻璃基板進行光學檢查。該自動光學檢查機另包括一多軸向之機械手臂，用以載入及卸載該玻璃基板於一平台上。然而該裝置係僅只能用於平面基板之檢測，並不能適用於針對多面體進行多維度取像之情況。Precision testing is generally suitable for products that require high precision and low fault tolerance. They are usually equipped with an automated control line setting and are placed at the end of the supply chain to surface stain, wear and leak the finished product. Detection of copper and other defects. It usually includes an optical instrument (for example, a line scan camera, a surface scan camera, etc.) for taking images of the surface of the object to be tested, and then using computer image processing technology to detect foreign matter or pattern anomalies. In the prior art, usually by a transport The tape takes the object to be tested to the depth of field of the above optical instrument for image capturing. However, most of the detecting devices only have the effect of taking a single visual plane of the object to be tested, and cannot be multi-dimensional with the product of the polyhedron. Surface inspection. For example, the Patent No. I230255 of the Republic of China discloses an automatic optical inspection machine comprising an upright platform and a plurality of charge coupled devices (CCDs). The charge coupled device is used for optical inspection of a glass substrate. The automated optical inspection machine further includes a multi-axis robotic arm for loading and unloading the glass substrate on a platform. However, the device can only be used for the detection of planar substrates, and is not suitable for multi-dimensional imaging of polyhedrons.
針對多面體的檢測，於實務上通常係使用一XY θ載台以調整待測物的位置、角度，使待測物之取像面正對光學儀器的景深範圍內，然而透過XY θ載台移動多面體的技術係須單一向量之維度到達定位時，始可進行另一向量方向之位移，是以受限於操作之速率，該裝置用於大量檢測的效果並不甚理想。For the detection of polyhedrons, an XY θ stage is usually used in practice to adjust the position and angle of the object to be tested, so that the image taking surface of the object to be tested faces the depth of field of the optical instrument, but moves through the XY θ stage. When the polyhedral technology requires a single vector dimension to arrive at the positioning, the other vector direction can be shifted. The rate is limited by the operation rate. The device is not ideal for large-scale detection.
本創作之主要目的在於提供一種運用多軸機械臂對一多面體之待測物進行多面檢測的檢測裝置。The main purpose of the present invention is to provide a detecting device for multi-faceted detection of a polyhedron object to be tested using a multi-axis robot arm.
為達上述目的，本創作係提供一種運用多軸機械臂之檢測裝置，係用於對一待測物品之複數可視平面為表面瑕疵之檢測，該檢測裝置係包含有一第一影像掃描裝置，以及一對應該第一影像掃描裝置設置的多軸機械臂。該第一影像掃描裝置係設置於一第一待測區域一 側，該第一待測區域係相對位於該第一影像掃描裝置之景深區域範圍內。該多軸機械臂包含有一固定上述待測物品之拾取部，以及一連結該拾取部以移動上述待測物品之機臂，該機臂係移動上述待測物品至上述第一待測區域並旋轉該待測物品以藉由該第一影像掃描裝置擷取上述待測物品複數個可視平面之影像。In order to achieve the above object, the present invention provides a detecting device using a multi-axis robot arm for detecting a plurality of visible planes of an object to be tested as a surface flaw, the detecting device comprising a first image scanning device, and A pair of multi-axis robot arms that should be placed by the first image scanning device. The first image scanning device is disposed in a first area to be tested The first area to be tested is located in a range of depth of field of the first image scanning device. The multi-axis mechanical arm includes a picking portion for fixing the object to be tested, and a robot arm connecting the picking portion to move the object to be tested, and the arm moves the object to be tested to the first area to be tested and rotates The object to be tested captures images of the plurality of visible planes of the object to be tested by the first image scanning device.
進一步地，該檢測裝置包含有一第二影像掃描裝置，一設置於該第二影像掃描裝置景深範圍內的第二待測區域，以及一載置上述待測物品至該第二待測區域以便於第二影像掃描裝置該對該待測物品之一可視平面進行影像擷取的載台。Further, the detecting device includes a second image scanning device, a second area to be tested disposed in the depth of field of the second image scanning device, and a loading of the object to be tested to the second area to be tested. The second image scanning device is configured to perform image capturing on a visible plane of the object to be tested.
進一步地，該載台包含有一第一載具以及一第二載具，該第二載具係包含有一由起始位置軸旋至該第一載具上方並吸附該待測物品一面之第一狀態，以及一復歸至起始位置以將該待測物品相對該一面之另一面向上曝露以便供第二影像掃描裝置進行取像的第二狀態。Further, the stage includes a first carrier and a second carrier, the second carrier includes a first one that is pivoted from the initial position to the first carrier and adsorbs one side of the object to be tested. a state, and a second state of returning to the starting position to expose the article to be tested relative to the other side of the face for imaging by the second image scanning device.
進一步地，該第二影像掃描裝置係為一線掃描攝影機(Line Scan Camera)。Further, the second image scanning device is a line scan camera.
進一步地，該第二影像掃描裝置係為一面掃描攝影機(Area Scan Camera)。Further, the second image scanning device is a side scan camera.
進一步地，該檢測裝置包含有一對該待測物品進行補光之補光燈具。Further, the detecting device comprises a fill light fixture for filling the object to be tested.
進一步地，該拾取部係為一真空吸附裝置。Further, the picking unit is a vacuum suction device.
進一步地，該第一影像掃描裝置係為一面掃描攝影機(Area Scan Camera)。Further, the first image scanning device is a side scan camera.
進一步地，該第一影像掃描裝置係為一線掃描攝影 機(Line Scan Camera)。Further, the first image scanning device is a line scan Line Scan Camera.
因此，本創作比起習知技術係具有以下幾項優點：Therefore, this creation has several advantages over the prior art system:
1.本創作比起習知技術更具備多視角之檢測功能，可拍攝取得多面體待測物各角度之可視平面，進而對待測物之每一可視平面進行瑕疵檢測。1. This creation has more multi-view detection function than the conventional technology, and can capture the visible plane of each angle of the polyhedron object to be tested, and then perform detection on each visible plane of the object to be tested.
2.由於本創作之多軸機臂係可以同時進行多軸之移動，比起習知技術之XY θ載台，不僅移動速度更快，更由於多軸機臂係操作於三度空間，其可供使用之空間裕度更廣，可更靈活的與所述之檢測裝置相互配置。2. Since the multi-axis arm system of the present invention can simultaneously move multiple axes, compared with the XY θ stage of the prior art, not only the moving speed is faster, but also because the multi-axis arm system operates in the three-dimensional space, The space available for use is more extensive and can be more flexibly configured with the detection device described above.
有關本創作之詳細說明及技術內容，現就配合圖式說明如下。再者，本創作中之圖式，為說明方便，其比例未必按實際比例繪製，而有誇大之情況，該等圖式及其比例非用以限制本創作之範圍。The detailed description and technical content of this creation are described below with reference to the drawings. Furthermore, the drawings in this creation are for convenience of description, and the proportions thereof are not necessarily drawn to actual scales, and in the case of exaggeration, the drawings and their proportions are not intended to limit the scope of the present invention.
有關於本創作運用多軸機械臂之檢測裝置，請參閱『圖1』，係本創作檢測裝置之外觀示意圖，如圖所示：本創作之檢測裝置100，主要係用於對一待測物品200之複數可視平面進行表面瑕疵之檢測，該待測物品200係可為一多面體之結構，並具有複數個可視平面。更具體而言，本創作係可用於對晶片、晶圓表面、電子封裝零件、電子零組件、電子裝置外殼或其他具備複數個可視平面之產品進行多個視角之檢測。於本實施態樣中，本創作主要係包含有一可對單一平面進行取像的第一影像掃描裝置10，以及一以規則方式移動、轉動該待測物 品200使該第一影像掃描裝置10得以分別取得該待測物品200複數可視平面之多軸機械臂30。為便於對該待測物品200進行取像，該第一影像掃描裝置10係設置於一第一待測區域11之一側，該第一待測區域11係相對位於該第一影像掃描裝置10之景深區域範圍內，並於該第一影像掃描裝置10之一側係設置有一對該第一待測區域11上之待測物品200進行補光以便於該第一影像掃描裝置10取像之補光燈具12。有關於所述之景深區域範圍，係指上述第一影像掃描裝置10可清晰辨識待測物品200表面的合理範圍內。有關於所述之第一影像掃描裝置10係較佳為一面掃描攝影機(Area Scan Camera)，以便於對待測物品200之各可視角度分別取像，另外該第一影像掃描裝置10亦可依配置上之需求選擇線掃描攝影機(Line Scan Camera)。For the detection device using the multi-axis robot arm in this creation, please refer to Figure 1 for the appearance of the creation detection device. As shown in the figure, the detection device 100 of the present invention is mainly used for an object to be tested. The plurality of visible planes of 200 detect the surface flaws, and the object to be tested 200 can be a polyhedral structure and has a plurality of visible planes. More specifically, the present invention can be used to perform multiple viewing angles on wafers, wafer surfaces, electronic package parts, electronic components, electronics housings, or other products having multiple viewing planes. In this embodiment, the present invention mainly includes a first image scanning device 10 that can image a single plane, and a moving and rotating the object to be tested in a regular manner. The article 200 enables the first image scanning device 10 to acquire the multi-axis robot arm 30 of the plurality of visible planes of the article to be tested 200, respectively. The first image scanning device 10 is disposed on one side of a first to-be-tested area 11 , and the first to-be-tested area 11 is relatively located in the first image scanning device 10 . A side of the first image scanning device 10 is disposed on the side of the first image scanning device 10 to fill the object to be tested 200 on the first to-be-tested area 11 to facilitate image capturing by the first image scanning device 10 Fill light fixture 12. Regarding the range of the depth of field described above, it means that the first image scanning device 10 can clearly recognize the surface of the object to be tested 200 within a reasonable range. The first image scanning device 10 is preferably an area scanning camera (Area Scan Camera) for taking images of the viewing angles of the object to be tested 200, and the first image scanning device 10 can also be configured. On the demand, select the Line Scan Camera.
上述之多軸機械臂30，係包含有一固定上述待測物品200之拾取部31，以及一連結該拾取部31以移動上述待測物品200之機臂32。於本實施態樣中，該拾取部31係為可吸附待測物品200之真空吸嘴，於實務上操作時，該拾取部31亦可為藉由馬達驅動用以夾持待測物品200之夾臂，於本創作中並不予以限制其實施型態。The multi-axis robot arm 30 includes a picking portion 31 for fixing the object to be tested 200, and a robot arm 32 connecting the picking portion 31 to move the object to be tested 200. In this embodiment, the picking portion 31 is a vacuum nozzle that can adsorb the object to be tested 200. When the operation is performed, the picking portion 31 can also be driven by a motor to hold the object to be tested 200. The clip arm is not limited in its implementation in this creation.
由於藉由多軸機械臂30檢測待測物品200時必會有至少一面因機臂32上之拾取部31遮蔽而導致取像不全，是以，本創作更配置有一第二影像掃描裝置20，一設置於該第二影像掃描裝置20的景深範圍內的第二待測區域21，以及一對應於該第二影像掃描裝置20之載台40。該載台40係用以承載上述待測物品200沿一檢 測路徑移動並經過上述之第二待測區域21，以藉由該第二影像掃描裝置20取得該待測物品200之平面影像，並於該第二影像掃描裝置20之一側係設置有一對該第二待測區域21之待測物品200進行補光之補光燈具22。所述之第二影像掃描裝置20較佳為一線掃描攝影機(Line Scan Camera)，以便於檢測的程序連續進行。然而，該第二影像掃描裝置20亦可依配置上之需求選擇面掃描攝影機(Area Scan Camera)。Since the object to be tested 200 is detected by the multi-axis robot arm 30, at least one side of the arm 32 is obscured by the pickup portion 31, so that the image capturing device 20 is further disposed. a second area to be tested 21 disposed in the depth of field of the second image scanning device 20, and a stage 40 corresponding to the second image scanning device 20. The stage 40 is used to carry the above-mentioned items to be tested 200 along a check The measurement path moves and passes through the second to-be-tested area 21 to obtain a planar image of the object to be tested 200 by the second image scanning device 20, and a pair is disposed on one side of the second image scanning device 20 The article to be tested 200 of the second to-be-tested area 21 performs a fill light fixture 22 . The second image scanning device 20 is preferably a line scan camera, so that the detection process is continuously performed. However, the second image scanning device 20 can also select an area scan camera according to the configuration requirements.
較佳的是，本創作之載台40係具有一第一載具41，及一設置於該第一載具41一側之第二載具42，該第二載具42係包含有一第一狀態以及一第二狀態。於第二影像掃描裝置20取得上述待測物品200之一正面影像後，該第二載具42係操作於第一狀態。於第一狀態時，該第二載具42係由一起始位置相對該第一載具41軸旋並翻轉至該第一載具41之上方，以藉由該第二載具42上的真空吸附裝置吸附該待測物品200之正面。於第二狀態時，該第二載具42係復歸至起始位置，使該待測物品200之背面朝上以藉由該第二影像掃描裝置20進一步取得背面影像。有關於所述之正面及背面係指相應於上述真空吸嘴吸附的位置而言，亦即正面及背面係可分別代表該待測物品200受遮蔽位置的一平面，及相對該平面之另一面。Preferably, the stage 40 of the present invention has a first carrier 41 and a second carrier 42 disposed on a side of the first carrier 41. The second carrier 42 includes a first carrier. State and a second state. After the second image scanning device 20 acquires a front image of the object to be tested 200, the second carrier 42 operates in the first state. In the first state, the second carrier 42 is pivoted from the initial position relative to the first carrier 41 and flipped over the first carrier 41 to be vacuumed by the second carrier 42. The adsorption device adsorbs the front side of the article to be tested 200. In the second state, the second carrier 42 is returned to the starting position, so that the back side of the object to be tested 200 faces upward to further obtain the back image by the second image scanning device 20. With respect to the front and back sides, the positions corresponding to the suction of the vacuum nozzles, that is, the front and back sides respectively represent a plane of the shielded position of the object to be tested 200, and the other side of the plane .
有關於本創作之相關作動細節，請一併參閱『圖2-1』至『圖2-5』，以下係揭露本創作之一種多面體之檢測方法，其中該待測物品200包含有複數個側面、一正面、以及一背面。為達成以下之操作，本創作之機械 臂至少須包含有四軸始能完成操作，在此將其四軸分別定義為X軸、Y軸、Z軸、以及θ軸，該X軸、Y軸、Z軸係用於操作該待測物品200於一三維空間內移動，該θ軸係用於定點操作該待測物品200軸旋，其操作順序如下：於待測物品200(多面體)移動至操作平台時，上述之多軸機械臂30係藉由該真空吸嘴拾取該待測物品200之一正面(背面)，並藉由上述X軸、Y軸、Z軸進行X軸向、Y軸向、以及Z軸向之移動(所述X軸、Y軸、Z軸並不一定要分別對應三維空間之X、Y、Z軸方向設置，本創作並不排除任何可運用三軸於三維空間內移動待測物品200的實施態樣)，將該待測物品200移至上述第一影像掃描裝置10之景深範圍內(亦即上述之待測區域)。接續請參閱『圖2-1』所示，該多軸機械臂30係移動該待測物品200，使其側面正對該第一影像掃描裝置10之鏡頭，並藉由上述之θ軸使該待測物品200相對應該第一影像掃描裝置10之鏡頭旋轉，使該第一影像掃描裝置10取得該待測物品200每一側面之影像。進一步，請參閱『圖2-2』所示，為便於擷取該待測物品200之正面及背面之影像，該多軸機械臂30係將該待測物品200移載至上述之第一載具41上，該第一載具41並具有一真空吸附裝置，用以吸附上述待測物品200。接續，如『圖2-3』所示，於該載台40感應到該待測物品200置放於該第一載具41上時，該載台40係承載該待測物品200朝該第二影像掃描裝置20之景深範圍移動，於該待測物品200經過第二影像掃描裝置20時，該掃描裝置上的線性排列之電荷耦合元件(charge coupled device，CCD)取得該待測物品200正面之影像。進一步，請參閱『圖2-4』所示，於該掃描裝置取得該待測物品200正面之影像後，設置於該第一載具41一側之第二載具42係朝該第一載具41的位置翻轉，並藉由該第二載具42上的真空吸附裝置吸附該待測物品200，並迴轉至起始位置，使該待測物品200之背面朝上。此時，如『圖2-5』所示，該載台40係沿原檢測路徑移回至起始位置，使該第二影像掃描裝置20取得該待測物品200之背面影像。最後，經由移載裝置將待測物品200移載至輸送平台完成所有的檢測。For details on the related actions of this creation, please refer to "Figure 2-1" to "Figure 2-5". The following is a method for detecting a polyhedron of the present invention, wherein the object to be tested 200 includes a plurality of sides. , a front, and a back. In order to achieve the following operations, the machine of this creation The arm must include at least four axes to complete the operation, where the four axes are defined as the X axis, the Y axis, the Z axis, and the θ axis, respectively, and the X axis, the Y axis, and the Z axis are used to operate the test. The article 200 moves in a three-dimensional space, and the θ-axis is used for the fixed-point operation of the object to be tested 200, and the operation sequence is as follows: when the object to be tested 200 (polyhedron) moves to the operation platform, the multi-axis robot arm described above The 30 series picks up the front side (back side) of the object to be tested 200 by the vacuum nozzle, and performs X-axis, Y-axis, and Z-axis movement by the X-axis, the Y-axis, and the Z-axis. The X-axis, the Y-axis, and the Z-axis do not necessarily correspond to the X, Y, and Z-axis directions of the three-dimensional space, and the creation does not exclude any implementation that can move the object to be tested 200 in three-dimensional space by using three axes. The object to be tested 200 is moved to the depth of field of the first image scanning device 10 (that is, the above-mentioned area to be tested). For the connection, as shown in FIG. 2-1, the multi-axis robot arm 30 moves the object to be tested 200 so that the side faces the lens of the first image scanning device 10, and the θ axis is used to make the The object to be tested 200 rotates relative to the lens of the first image scanning device 10, so that the first image scanning device 10 obtains an image of each side of the object to be tested 200. Further, as shown in FIG. 2-2, in order to facilitate capturing the image of the front and back of the object to be tested 200, the multi-axis robot arm 30 transfers the object to be tested 200 to the first load described above. The first carrier 41 has a vacuum adsorption device for adsorbing the object to be tested 200. Continuing, as shown in FIG. 2-3, when the stage 40 senses that the object to be tested 200 is placed on the first carrier 41, the stage 40 carries the object to be tested 200 toward the first The depth of field range of the image scanning device 20 is moved. When the object to be tested 200 passes through the second image scanning device 20, the linearly coupled charge coupled device (charge coupled) on the scanning device Device, CCD) Obtain an image of the front side of the object to be tested 200. Further, as shown in FIG. 2-4, after the scanning device obtains the image of the front side of the object to be tested 200, the second carrier 42 disposed on the side of the first carrier 41 is directed to the first carrier. The position of the device 41 is reversed, and the object to be tested 200 is adsorbed by the vacuum suction device on the second carrier 42, and is rotated to the starting position, so that the back side of the article to be tested 200 faces upward. At this time, as shown in FIG. 2-5, the stage 40 is moved back to the initial position along the original detection path, so that the second image scanning device 20 acquires the back image of the object to be tested 200. Finally, the test article 200 is transferred to the transport platform via the transfer device to complete all the tests.
綜上所述，本創作比起習知技術更具備多視角之檢測功能，可拍攝取得多面體待測物各角度之可視平面，進而對待測物之每一可視平面進行瑕疵檢測。創作此外，由於本創作之多軸機臂係可以同時進行多軸之移動，比起習知技術之XY θ載台，不僅移動速度更快，更由於多軸機臂係操作於三度空間，其可供使用之空間裕度更廣，可更靈活的與所述之檢測裝置相互配置。In summary, the present invention has a multi-view detection function than the conventional technology, and can capture the visible plane of each angle of the polyhedron object to be tested, and then perform detection on each visible plane of the object to be tested. In addition, because the multi-axis arm system of this creation can simultaneously move multiple axes, compared with the XY θ stage of the prior art, not only the moving speed is faster, but also because the multi-axis arm system operates in the three-dimensional space. The space available for use is wider and can be more flexibly configured with the detection device.
以上已將本創作做一詳細說明，惟以上所述者，僅為本創作之一較佳實施例而已，當不能以此限定本創作實施之範圍，即凡依本創作申請專利範圍所作之均等變化與修飾，皆應仍屬本創作之專利涵蓋範圍內。The above description has been made in detail, but the above is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the creation of the creation, that is, the equality of the patent application scope according to the present creation. Changes and modifications are still covered by the patents of this creation.
100‧‧‧檢測裝置100‧‧‧Detection device
10‧‧‧第一影像掃描裝置10‧‧‧First image scanning device
11‧‧‧第一待測區域11‧‧‧First area to be tested
12‧‧‧補光燈具12‧‧‧Complementary light fixtures
20‧‧‧第二影像掃描裝置20‧‧‧Second image scanning device
21‧‧‧第二待測區域21‧‧‧Second area to be tested
22‧‧‧補光燈具22‧‧‧Complementary light fixtures
30‧‧‧多軸機械臂30‧‧‧Multi-axis manipulator
31‧‧‧拾取部31‧‧‧ Pickup Department
32‧‧‧機臂32‧‧‧ arm
40‧‧‧載台40‧‧‧ stage
41‧‧‧第一載具41‧‧‧First Vehicle
42‧‧‧第一載具42‧‧‧First Vehicle
200‧‧‧待測物品200‧‧‧ Items to be tested
圖1，係本創作檢測裝置之外觀示意圖。Figure 1 is a schematic view showing the appearance of the present invention.
圖2-1，係本創作檢測裝置之操作示意圖。Figure 2-1 is a schematic diagram of the operation of the present invention.
圖2-2，係本創作檢測裝置之操作示意圖。Figure 2-2 shows the operation of the creation detection device.
圖2-3，係本創作檢測裝置之操作示意圖。Figure 2-3 is a schematic diagram of the operation of the present invention.
圖2-4，係本創作檢測裝置之操作示意圖。Figure 2-4 is a schematic diagram of the operation of the present invention.
圖2-5，係本創作檢測裝置之操作示意圖。Figure 2-5 shows the operation of the creation detection device.
100‧‧‧檢測裝置100‧‧‧Detection device
200‧‧‧待測物品200‧‧‧ Items to be tested
10‧‧‧第一影像掃描裝置10‧‧‧First image scanning device
12‧‧‧補光燈具12‧‧‧Complementary light fixtures
20‧‧‧第二影像掃描裝置20‧‧‧Second image scanning device
22‧‧‧補光燈具22‧‧‧Complementary light fixtures
30‧‧‧多軸機械臂30‧‧‧Multi-axis manipulator
31‧‧‧拾取部31‧‧‧ Pickup Department
32‧‧‧機臂32‧‧‧ arm
40‧‧‧載台40‧‧‧ stage
Claims (9)
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| TW101216343U TWM445176U (en) | 2012-08-24 | 2012-08-24 | Detection device using multi-axis robot arm |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI588469B (en) * | 2016-04-26 | 2017-06-21 | 住華科技股份有限公司 | Auto inspection system and auto inspection method using the same |
| CN108459030A (en) * | 2018-02-08 | 2018-08-28 | 东华大学 | One kind being applied to non-planar plastic smooth surface flaw on-line measuring device and method |
| CN108593681A (en) * | 2018-03-28 | 2018-09-28 | 中车唐山机车车辆有限公司 | Vehicle body side wall glass defect detection system and detection method |
| CN111716362A (en) * | 2019-03-22 | 2020-09-29 | 由田新技股份有限公司 | Turnover type multi-shaft mechanical arm device and optical detection equipment |
-
2012
- 2012-08-24 TW TW101216343U patent/TWM445176U/en not_active IP Right Cessation
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI588469B (en) * | 2016-04-26 | 2017-06-21 | 住華科技股份有限公司 | Auto inspection system and auto inspection method using the same |
| CN108459030A (en) * | 2018-02-08 | 2018-08-28 | 东华大学 | One kind being applied to non-planar plastic smooth surface flaw on-line measuring device and method |
| CN108593681A (en) * | 2018-03-28 | 2018-09-28 | 中车唐山机车车辆有限公司 | Vehicle body side wall glass defect detection system and detection method |
| CN111716362A (en) * | 2019-03-22 | 2020-09-29 | 由田新技股份有限公司 | Turnover type multi-shaft mechanical arm device and optical detection equipment |
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