JP2012178502A

JP2012178502A - Stage system

Info

Publication number: JP2012178502A
Application number: JP2011041390A
Authority: JP
Inventors: Seiichi Sato; 誠一佐藤
Original assignee: Ulvac Inc
Current assignee: Ulvac Inc
Priority date: 2011-02-28
Filing date: 2011-02-28
Publication date: 2012-09-13

Abstract

PROBLEM TO BE SOLVED: To provide a stage system which can be enlarged at lower costs than the prior arts.SOLUTION: A stage system includes a pedestal, first to third drive sections provided on the pedestal, and movable members provided in the first to third drive sections. In the stage system, main guides of first and second auxiliary drive sections are confronted in parallel with each other, a main guide of a third auxiliary drive section is turned in a direction forming a predetermined angle with respect to the main guides of the first and second auxiliary drive sections, and the pedestal includes first to third motive force sections for transferring motive forces in parallel with the main guides of the first to third auxiliary drive sections to the main sliders of the first to third auxiliary drive sections. The movable member has a plurality of auxiliary movable members, the pedestal has a plurality of auxiliary pedestals, the first auxiliary drive section is provided between one of the auxiliary movable members and one of the auxiliary pedestals, and any one of or both the second and third auxiliary drive sections are provided between the other auxiliary movable member and the other auxiliary pedestal.

Description

本発明は、ステージ装置に関する。 The present invention relates to a stage apparatus.

有機ＥＬ素子は、発光効率が高く、薄い発光装置を組み立てることができることから、近年では、表示装置や照明機器の用途に注目されており、大面積の基板に所定のパターン形状の有機薄膜を精密に成膜する技術が求められている。 Since organic EL elements have high luminous efficiency and can assemble thin light-emitting devices, in recent years, attention has been focused on the use of display devices and lighting equipment, and organic thin films with a predetermined pattern shape are precisely applied to large-area substrates. Therefore, a technique for forming a film is required.

図１２は有機薄膜の成膜に用いられる従来の成膜装置の内部構成図である。
成膜装置１００は、真空槽１３１を有している。真空槽１３１の天井側の外壁面にはステージ装置１１０が設けられている。
ステージ装置１１０は、台座１１１と、台座１１１に設けられた駆動部１１２と、駆動部１１２に設けられた可動部材１１３とを有しており、駆動部１１２は可動部材１１３を水平面に平行で互いに直角な二方向にそれぞれ移動させ、かつ鉛直な回転軸線を中心に回転させるように構成されている。 FIG. 12 is an internal configuration diagram of a conventional film forming apparatus used for forming an organic thin film.
The film forming apparatus 100 has a vacuum chamber 131. A stage device 110 is provided on the outer wall surface on the ceiling side of the vacuum chamber 131.
The stage device 110 includes a pedestal 111, a drive unit 112 provided on the pedestal 111, and a movable member 113 provided on the drive unit 112. The drive unit 112 causes the movable member 113 to be parallel to a horizontal plane and to each other. It is configured to move in two perpendicular directions and rotate around a vertical rotation axis.

真空槽１３１内には蒸発源１３３が配置され、蒸発源１３３の放出口１３４と対面する位置には基板１３６が配置されている。
基板１３６と放出口１３４との間にはマスク板１３５がマスク保持部１３７に保持されて配置されている。マスク保持部１３７の一端は、真空槽１３１の壁面に一端が密着されたベローズ１３８の内側に挿通され、真空槽１３１の気密性を維持しながら真空槽１３１の外側まで延ばされ、ステージ装置１１０の可動部材１１３に固定されている。 An evaporation source 133 is disposed in the vacuum chamber 131, and a substrate 136 is disposed at a position facing the discharge port 134 of the evaporation source 133.
Between the substrate 136 and the discharge port 134, a mask plate 135 is held by a mask holding portion 137 and disposed. One end of the mask holding portion 137 is inserted into the inside of the bellows 138 whose one end is in close contact with the wall surface of the vacuum chamber 131, and is extended to the outside of the vacuum chamber 131 while maintaining the airtightness of the vacuum chamber 131. The movable member 113 is fixed.

駆動部１１２から可動部材１１３に動力を伝達して、マスク板１３５をマスク保持部１３７と一緒に水平方向に移動させ、又は鉛直な回転軸線を中心に回転させ、マスク板１３５に設けられた開口から基板１３６の成膜面を部分的に露出させる。
真空排気部１３２により真空槽１３１内を真空排気し、蒸発源１３３の放出口１３４から有機薄膜材料の蒸気を放出させると、有機薄膜材料はマスク板１３５の開口を通過して、開口から露出する部分の基板１３６の成膜面に到達して付着し、その部分に開口と同じ形状の有機薄膜が形成される。 Power is transmitted from the driving unit 112 to the movable member 113 to move the mask plate 135 in the horizontal direction together with the mask holding unit 137, or to rotate about the vertical rotation axis, thereby opening the mask plate 135. The film formation surface of the substrate 136 is partially exposed.
When the inside of the vacuum chamber 131 is evacuated by the evacuation unit 132 and the vapor of the organic thin film material is discharged from the discharge port 134 of the evaporation source 133, the organic thin film material passes through the opening of the mask plate 135 and is exposed from the opening. An organic thin film having the same shape as the opening is formed in the portion of the substrate 136 that reaches and adheres to the film formation surface.

従来のステージ装置１１０では、基板１３６及びマスク板１３５の大型化に対応させるためには、駆動部１１２を搭載する台座１１１自体を大型化する必要があり、可動部材１１３もそれにあわせて大型化する必要があった。
しかしながら、そのようにしてステージ装置１１０全体を大型化すると、ステージ装置１１０を組み立てる場合には広いスペースが必要となり、また組み立てたステージ装置１１０を搬送する際も大型の輸送手段が必要になるという不都合があった。
さらに、ステージ装置１１０の各構成部材も大型になるため、各構成部材の制作費、輸送費もコスト高となるという問題があった。 In the conventional stage apparatus 110, in order to cope with the increase in size of the substrate 136 and the mask plate 135, it is necessary to increase the size of the pedestal 111 itself on which the driving unit 112 is mounted, and the movable member 113 is also increased in size accordingly. There was a need.
However, if the entire stage apparatus 110 is enlarged in this way, a large space is required when assembling the stage apparatus 110, and a large transportation means is also required when the assembled stage apparatus 110 is transported. was there.
Furthermore, since each component of the stage apparatus 110 is large, there is a problem that the production cost and the transportation cost of each component are high.

特開２００１−３２６１５５号公報JP 2001-326155 A

本発明は上記従来技術の不都合を解決するために創作されたものであり、その目的は、従来より低コストで大型化できるステージ装置を提供することにある。 The present invention has been created to solve the above-described disadvantages of the prior art, and an object of the present invention is to provide a stage apparatus that can be enlarged at a lower cost than in the prior art.

上記課題を解決するために本発明は、台座と、前記台座に設けられた駆動部と、前記駆動部に設けられた可動部材とを有し、前記駆動部は、前記可動部材を一の平面に平行で互いに所定角度を成す二方向にそれぞれ移動させ、かつ前記一の平面に対して直角な回転軸線を中心に回転させるように構成されたステージ装置であって、前記駆動部は第一〜第三の補助駆動部を有し、前記第一〜第三の補助駆動部は、直線状の主ガイドと、前記主ガイドに沿って移動できるように前記主ガイドに取り付けられた主スライダと、直線状の副ガイドと、前記副ガイドに沿って移動できるように前記副ガイドに取り付けられた副スライダと、互いに中心軸線が一致され、前記中心軸線を中心に互いに回転できるように構成された第一、第二の回転部材と、をそれぞれ有し、前記副ガイドと前記副スライダのうちのいずれか一方と、前記第一、第二の回転部材のうちのいずれか一方とが互いに固定され、前記副ガイドと前記副スライダのうちの他方が第一の取付部とされ、前記第一、第二の回転部材のうちの他方が第二の取付部とされて取付部材が構成され、前記主ガイドが前記一の平面と平行にされた状態で、前記主ガイドと前記主スライダのうちの一方は前記台座に設けられ、他方は主取付部とされ、前記副ガイドが前記一の平面と平行で前記主ガイドに対して前記所定角度を成し、前記第一、第二の回転部材の前記中心軸線が前記一の平面に対して直角にされた状態で、前記取付部材の前記第一、第二の取付部の一方は前記主取付部に固定され、他方は前記可動部材に固定され、前記第一、第二の補助駆動部の前記主ガイドは互いに平行にされて対面され、前記第三の補助駆動部の前記主ガイドは前記第一、第二の補助駆動部の前記主ガイドに対して前記所定角度を成す向きに向けられ、前記台座には、前記第一〜第三の補助駆動部の前記主取付部に、前記第一〜第三の補助駆動部の前記主ガイドと平行な向きの動力を伝達する第一〜第三の動力部が設けられたステージ装置であって、前記可動部材は複数の補助可動部材を有し、前記台座は複数の補助台座を有し、前記第一の補助駆動部は一の前記補助可動部材と一の前記補助台座との間に設けられ、前記第二、第三の補助駆動部のいずれか一方又は両方は他の前記補助可動部材と他の前記補助台座との間に設けられたステージ装置である。
本発明はステージ装置であって、前記第一〜第三の補助駆動部と同じ構造の第四の補助駆動部を有し、前記第三、第四の補助駆動部の前記主ガイドは互いに平行にされて対面され、前記台座には、前記第四の補助駆動部の前記主取付部に、前記第四の補助駆動部の前記主ガイドと平行な向きの動力を伝達する第四の動力部が設けられたステージ装置である。
本発明はステージ装置であって、前記可動部材は可動部材接続部材を有し、前記台座は台座接続部材を有し、隣り合う二つの前記補助可動部材には同一の前記可動部材取付部材が設けられて、隣り合う二つの前記補助可動部材は互いに固定され、隣り合う二つの前記補助台座には同一の前記台座接続部材が設けられて、隣り合う二つの前記補助台座は互いに固定されたステージ装置である。 In order to solve the above-described problems, the present invention includes a pedestal, a drive unit provided on the pedestal, and a movable member provided on the drive unit, and the drive unit includes the movable member on a plane. The stage unit is configured to move in two directions that are parallel to each other and form a predetermined angle with respect to each other, and to rotate about a rotation axis that is perpendicular to the one plane. A third auxiliary drive unit, wherein the first to third auxiliary drive units are linear main guides, and a main slider attached to the main guides so as to be movable along the main guides; A linear sub-guide, a sub-slider attached to the sub-guide so as to move along the sub-guide, and a center axis coincide with each other, and are configured to be able to rotate around the center axis. A second rotating member; One of the sub guide and the sub slider and one of the first and second rotating members are fixed to each other, and the sub guide and the sub slider The other is the first mounting portion, the other of the first and second rotating members is the second mounting portion to form the mounting member, and the main guide is parallel to the one plane. In this state, one of the main guide and the main slider is provided on the pedestal, the other is a main attachment portion, and the sub guide is parallel to the one plane and the predetermined angle with respect to the main guide. And the first and second mounting portions of the mounting member are arranged in a state where the central axes of the first and second rotating members are perpendicular to the one plane. Fixed to the mounting portion, the other is fixed to the movable member, the first, The main guides of the second auxiliary drive units are parallel to each other and face each other, and the main guide of the third auxiliary drive unit is at the predetermined angle with respect to the main guides of the first and second auxiliary drive units The pedestal is provided with power in a direction parallel to the main guides of the first to third auxiliary drive units, to the main mounting portions of the first to third auxiliary drive units. A stage apparatus provided with first to third power units for transmitting, wherein the movable member has a plurality of auxiliary movable members, the pedestal has a plurality of auxiliary pedestals, and the first auxiliary drive A portion is provided between the one auxiliary movable member and the one auxiliary pedestal, and either one or both of the second and third auxiliary driving portions are the other auxiliary movable member and the other auxiliary pedestal. Is a stage device provided between the two.
The present invention is a stage apparatus, and includes a fourth auxiliary drive unit having the same structure as the first to third auxiliary drive units, and the main guides of the third and fourth auxiliary drive units are parallel to each other. A fourth power section that is faced and transmits power in a direction parallel to the main guide of the fourth auxiliary drive section to the main mounting section of the fourth auxiliary drive section. Is a stage apparatus.
The present invention is a stage device, wherein the movable member has a movable member connecting member, the pedestal has a pedestal connecting member, and the two adjacent movable movable members are provided with the same movable member mounting member. The two adjacent movable movable members are fixed to each other, and the two adjacent auxiliary pedestals are provided with the same pedestal connecting member, and the two adjacent auxiliary pedestals are fixed to each other. It is.

部材の内部に発生する応力について説明する。
図１１（ａ）を参照し、一個の部材２００の互いに異なる二点Ａ、Ｂに、二点Ａ、Ｂを結ぶ線分に対して垂直な方向の外力Ｆ_A、Ｆ_Bを加えると、二点Ａ、Ｂを結ぶ線分に平行な応力は部材２００の内部に発生しない。
一方、図１１（ｂ）を参照し、一個の部材２００の互いに異なる二点Ａ、Ｂに、二点Ａ、Ｂを結ぶ線分に対して９０°より小さい所定角度を成す方向の外力Ｆ_A、Ｆ_Bを加えると、二点Ａ、Ｂを結ぶ線分に平行な応力（図１１（ｂ）では線分ＡＢが縮む方向の応力ｆ_A、ｆ_B）が部材２００の内部に発生する。 The stress generated inside the member will be described.
Referring to FIG. 11A, when external forces F _A and F _B in a direction perpendicular to a line segment connecting two points A and B are applied to two different points A and B of one member 200, A stress parallel to the line segment connecting the points A and B is not generated inside the member 200.
On the other hand, referring to FIG. 11B, the external force F _{A in} a direction that forms a predetermined angle smaller than 90 ° with respect to the line segment connecting the two points A and B at two different points A and B of one member 200. , F _B is applied, stresses parallel to the line connecting the two points A and B (stresses f _A and f _{B in the} direction in which the line AB contracts in FIG. 11B) are generated inside the member 200.

ステージ装置の各構成部材は従来よりも小型になり、各構成部材の制作費や輸送費が低コストになる。一組の補助台座と補助可動部材からなるステージユニットは、従来より狭い作業スペースで製作することができ、従来より小型の輸送手段で設置場所まで搬送することができる。設置場所では各ステージユニットを寄せ集めて固定することで、大型のステージ装置を容易に組み立てることができる。 Each component of the stage apparatus is smaller than before, and the production cost and transportation cost of each component are reduced. A stage unit composed of a set of auxiliary pedestals and auxiliary movable members can be manufactured in a narrower working space than in the prior art, and can be transported to an installation location by means of a smaller transport means than in the past. A large stage apparatus can be easily assembled by gathering and fixing each stage unit at the installation location.

本発明の第一例のステージ装置の平面図The top view of the stage apparatus of the 1st example of this invention 第一の補助駆動部の内部側面図Internal side view of the first auxiliary drive 自在ガイド部の内部側面図Internal side view of the universal guide 第一例のステージ装置の別構成を説明するため図The figure for demonstrating another structure of the stage apparatus of a 1st example. 可動部材をＸ方向に平行移動させる工程を説明するための図The figure for demonstrating the process of translating a movable member to a X direction. 可動部材をＹ方向に平行移動させる工程を説明するための図The figure for demonstrating the process of translating a movable member to a Y direction. 可動部材を所定角度回転させる工程を説明するための図The figure for demonstrating the process of rotating a movable member a predetermined angle. 本発明の第二例のステージ装置の平面図The top view of the stage apparatus of the 2nd example of this invention 本発明の第三例のステージ装置の平面図The top view of the stage apparatus of the 3rd example of this invention 本発明の第四例のステージ装置の平面図The top view of the stage apparatus of the 4th example of this invention （ａ）、（ｂ）：部材の内部に発生する応力について説明するための模式図(A), (b): Schematic diagram for explaining the stress generated inside the member 従来の成膜装置の内部構成図Internal configuration diagram of conventional film deposition system

＜第一例のステージ装置の構造＞
本発明の第一例のステージ装置の構造を説明する。
図１は第一例のステージ装置１０ａの平面図である。 <Structure of stage device of first example>
The structure of the stage apparatus of the first example of the present invention will be described.
FIG. 1 is a plan view of the stage apparatus 10a of the first example.

ステージ装置１０ａは、台座１１と、台座１１に設けられた駆動部と、駆動部に設けられた可動部材１３とを有している。
台座１１は一の平面内に位置する複数の台座取付部を有し、可動部材１３は一の平面内に位置する複数の可動部材取付部を有している。
駆動部は第一〜第三の補助駆動部１２₁〜１２₃を有している。
第一〜第三の補助駆動部１２₁〜１２₃の構造は互いに同じであり、第一の補助駆動部１２₁で代表して説明する。 The stage apparatus 10a includes a pedestal 11, a drive unit provided on the pedestal 11, and a movable member 13 provided on the drive unit.
The pedestal 11 has a plurality of pedestal mounting portions located in one plane, and the movable member 13 has a plurality of movable member mounting portions located in one plane.
The drive unit has first to third auxiliary drive units 12 _{1 to} 12 ₃ .
The first to third auxiliary driving units 12 _{1 to} 12 ₃ have the same structure, and the first auxiliary driving unit 12 ₁ will be described as a representative.

図２は第一の補助駆動部１２₁の内部側面図を示している。
第一の補助駆動部１２₁は、直線状の主ガイド２１₁と、主ガイド２１₁に沿って移動できるように主ガイド２１₁に取り付けられた主スライダ２２₁と、直線状の副ガイド２３₁と、副ガイド２３₁に沿って移動できるように副ガイド２３₁に取り付けられた副スライダ２４₁と、互いに中心軸線が一致され、中心軸線を中心に互いに回転できるように構成された第一、第二の回転部材２５₁、２６₁とを有している。 Figure 2 shows an internal side view of a first auxiliary drive unit 12 _1.
First auxiliary drive unit 12 ₁ includes a main guide 21 ₁ straight, the main slider 22 ₁ attached to the main guide 21 ₁ so as to be movable along a main guide 21 _1, straight auxiliary guide 23 _1, the sub slider 24 ₁ attached to the auxiliary guide 23 ₁ so as to be movable along the auxiliary guide 23 _1, is coincident central axis each other, a first that is configured to rotate together about the axis And second rotating members 25 ₁ , 26 ₁ .

本実施例では、主ガイド２１₁は直線状の二本のレールであり、互いに平行にされ対面されている。主スライダ２２₁は主ガイド２１₁の二本のレールと対面する位置に配置され、二本のレールと対面する部分にはそれぞれ断面が凹形状の溝がレールと平行に形成され、溝の内側にレールが挿し込まれ、溝の内側側面とレールの側面とが互いに接触され、主スライダ２２₁は主ガイド２１₁のレールの延びる方向に移動でき、他の方向には移動できないようになっている。 In this embodiment, the main guide 21 ₁ is a linear two rails are facing are parallel to each other. The main slider 22 ₁ is disposed at a position facing the two rails of the main guide 21 ₁ , and a groove having a concave cross section is formed in parallel with the rail at each of the portions facing the two rails. The rail is inserted into the groove, the inner side surface of the groove and the side surface of the rail come into contact with each other, and the main slider 22 ₁ can move in the direction in which the rail of the main guide 21 ₁ extends, but cannot move in the other direction. Yes.

なお、主スライダ２２₁が主ガイド２１₁のレールの延びる方向に移動でき、他の方向には移動できないようになっているならば、主ガイド２１₁のレールの数は二本に限定されず、一本でもよいし、三本以上でもよい。
また、主ガイド２１₁が直線状の溝であり、主スライダ２２₁のうち主ガイド２１₁の溝と対面する部分に断面が凸形状のレールが溝と平行に形成され、溝の内側にレールが挿し込まれ、溝の内側側面とレールの側面とが互いに接触され、主スライダ２２₁は主ガイド２１₁の溝の延びる方向に移動でき、他の方向には移動できないようになっていてもよい。
副ガイド２３₁と副スライダ２４₁の構造は、主ガイド２１₁と主スライダ２２₁の構造と同様であり、説明を省略する。 The number of rails of the main guide 21 ₁ is not limited to two as long as the main slider 22 ₁ can move in the direction in which the rail of the main guide 21 ₁ extends and cannot move in the other direction. , One or three or more.
Further, the main guide 21 ₁ is a straight groove, and a rail having a convex section is formed in parallel with the groove on the portion of the main slider 22 ₁ facing the groove of the main guide 21 _1. Is inserted, the inner side surface of the groove and the side surface of the rail are in contact with each other, and the main slider 22 ₁ can move in the direction in which the groove of the main guide 21 ₁ extends and cannot move in the other direction. Good.
The structures of the sub-guide 23 ₁ and the sub-slider 24 ₁ are the same as the structures of the main guide 21 ₁ and the main slider 22 ₁ , and a description thereof will be omitted.

本実施例では、第二の回転部材２６₁は、リング状の回転部２９ａと、棒状の軸部２９ｂとを有している。軸部２９ｂと回転部２９ａとは互いに中心軸線が一致された状態で、軸部２９ｂの一端は回転部２９ａに固定されている。
第一の回転部材２５₁の中心軸線上には回転部２９ａの外周の直径より直径が大きい開口が設けられ、回転部２９ａは第一の回転部材２５₁の開口の内側に同心状に配置されている。回転部２９ａの外周側面と第一の回転部材２５₁の内周側面との間の隙間には互いに同形状の複数の球が配置され、各球は回転部２９ａと第一の回転部材２５₁とにそれぞれ点で接触している。 In this embodiment, the second rotary member 26 ₁ has a ring-shaped rotating portion 29a, a shaft portion 29b of the rod-shaped. The shaft portion 29b and the rotating portion 29a are in a state in which the central axes coincide with each other, and one end of the shaft portion 29b is fixed to the rotating portion 29a.
The first central axis of the rotary member 25 ₁ is provided an opening larger in diameter than the diameter of the outer circumference of the rotating portion 29a, the rotation unit 29a is arranged concentrically inside the first rotary member 25 ₁ of the opening ing. A plurality of balls each other having the same shape in the gap between the outer side surface and the first inner circumferential surface of the rotary member 25 ₁ of the rotating portion 29a, each sphere is rotating portion 29a and the first rotary member 25 ₁ And are in contact with each other at points.

従って、第一、第二の回転部材２５₁、２６₁は、互いに中心軸線が一致された状態を維持しながら、中心軸線を中心に互いに回転できるようになっており、このとき各球は回転部２９ａと第一の回転部材２５₁とに接触しながら自転することにより、第一、第二の回転部材２５₁、２６₁の間に摩擦がかからないようになっている。 Accordingly, the first and second rotating members 25 ₁ , 26 ₁ can rotate around the central axis while maintaining the state where the central axes coincide with each other. At this time, each sphere rotates. by rotating while contacting the parts 29a and the first rotary member 25 _1, the first, which is the second rotary member 25 _1, 26 ₁ of the friction is not applied between.

副ガイド２３₁と副スライダ２４₁のうちのいずれか一方と、第一、第二の回転部材２５₁、２６₁のうちのいずれか一方とが互いに固定され、副ガイド２３₁と副スライダ２４₁のうちの他方が第一の取付部２７ａとされ、第一、第二の回転部材２５₁、２６₁のうちの他方が第二の取付部２７ｂとされて取付部材２７が構成されている。 One of the sub guide 23 ₁ and the sub slider 24 ₁ and one of the first and second rotating members 25 ₁ and 26 ₁ are fixed to each other, and the sub guide 23 ₁ and the sub slider 24 are fixed. other of ₁ is the first mounting portion 27a, first, second rotary member 25 _1, 26 other is a second mounting portion 27b attaching member 27 of the _one is configured .

本実施例では取付部材２７は、副スライダ２４₁と第一の回転部材２５₁とが互いに固定され、副ガイド２３₁が第一の取付部２７ａとされ、第二の回転部材２６₁の軸部２９ｂが第二の取付部２７ｂとされて構成されている。
そして、主ガイド２１₁が一の平面と平行にされた状態で、主ガイド２１₁と主スライダ２２₁のうちの一方は台座１１の一の台座取付部に固定され、他方は主取付部２８とされ、副ガイド２３₁が前記一の平面と平行で主ガイド２１₁に対して所定角度を成し、第一、第二の回転部材２５₁、２６₁の中心軸線が前記一の平面に対して直角にされた状態で、取付部材２７の第一、第二の取付部２７ａ、２７ｂの一方は主取付部２８に固定され、他方は可動部材１３の一の可動部材取付部に固定されている。 In this embodiment, the mounting member 27 includes a sub-slider 24 ₁ and a first rotating member 25 ₁ fixed to each other, a sub-guide 23 _{1 serving} as a first mounting portion 27a, and a shaft of the second rotating member 26 ₁ . The portion 29b is configured as a second attachment portion 27b.
Then, the main guide 21 ₁ in a state of being parallel to the one plane, the main guide 21 ₁ and one of the main slider 22 ₁ is fixed to one of the base attachment portion of the base 11, while the main mounting portion 28 The sub guide 23 ₁ is parallel to the one plane and forms a predetermined angle with respect to the main guide 21 ₁ , and the central axes of the first and second rotating members 25 ₁ , 26 ₁ are in the one plane. One of the first and second attachment portions 27 a and 27 b of the attachment member 27 is fixed to the main attachment portion 28 and the other is fixed to one movable member attachment portion of the movable member 13 in a state of being perpendicular to the attachment member 27. ing.

本実施例では、主ガイド２１₁が一の平面（以下、基準面と呼ぶ）と平行にされた状態で台座１１の一の台座取付部に固定され、主スライダ２２₁が主取付部２８とされ、副ガイド２３₁が基準面と平行で主ガイド２１₁に対して所定角度（ここでは９０°）を成し、第一、第二の回転部材２５₁、２６₁の中心軸線が基準面に対して直角にされた状態で、取付部材２７の第一の取付部２７ａ（すなわち副ガイド２３₁）は主取付部２８に固定され、第二の取付部２７ｂ（すなわち第二の回転部材２６₁の軸部２９ｂ）は可動部材１３の一の可動部材取付部に固定されている。 In this embodiment, the main guide 21 ₁ in the one plane (hereinafter, a reference plane referred to) is fixed to one of the base attachment portion of the base 11 in a state of being parallel to the, main slider 22 ₁ main mounting portion 28 The sub guide 23 ₁ is parallel to the reference plane and forms a predetermined angle (90 ° here) with respect to the main guide 21 ₁ , and the central axes of the first and second rotating members 25 ₁ , 26 ₁ are the reference plane. The first mounting portion 27a (that is, the sub guide 23 ₁ ) of the mounting member 27 is fixed to the main mounting portion 28 and the second mounting portion 27b (that is, the second rotating member 26). _One shaft portion 29 b) is fixed to one movable member mounting portion of the movable member 13.

ここでは具体的には第二の回転部材２６₁の軸部２９ｂはネジであり、符号５１ａ、５１ｂはナットであり、二つのナット５１ａ、５１ｂの間に可動部材１３が挟み込まれることにより、第二の回転部材２６₁の軸部２９ｂは可動部材１３に固定されている。 Here is specifically the second shaft portion 29b is screw of the rotating member 26 _1, reference numerals 51a, 51b are nuts, two nuts 51a, the movable member 13 is sandwiched between the 51b, the biaxial portion 29b of the rotary member 26 ₁ is fixed to the movable member 13.

図１を参照し、台座１１には、第一〜第三の補助駆動部１２₁〜１２₃の主取付部２８（本実施例では主スライダ２２₁〜２２₃）に、第一〜第三の補助駆動部１２₁〜１２₃の主ガイド２１₁〜２１₃と平行な向きの動力を伝達する第一〜第三の動力部１４₁〜１４₃が設けられている。ここでは第一〜第三の動力部１４₁〜１４₃はモーターであり、第一〜第三の主スライダ２２₁〜２２₃にそれぞれ接続されている。 Referring to FIG. 1, a pedestal 11 has first to third auxiliary mounting portions 28 ( _first sliders 22 _{1 to} 22 _{3 in} this embodiment) of first to third auxiliary driving portions 12 _{1 to} 12 ₃ . the main guide 21 ₁ to 21 ₃ and the first to third transmitting a parallel orientation of the power of the power unit 14 ₁ to 14 ₃ are provided in the auxiliary drive unit 12 ₁ to 12 _3. Here, the first to third power units 14 _{1 to} 14 ₃ are motors, and are connected to the first to third main sliders 22 _{1 to} 22 ₃ , respectively.

本発明のステージ装置１０ａでは、台座１１は複数の補助台座を有し、可動部材１３は複数の補助可動部材を有している。
本実施例では、台座１１は第一、第二の補助台座１１ａ、１１ｂを有し、可動部材１３は第一、第二の補助可動部材１３ａ、１３ｂを有している。 In the stage apparatus 10a of the present invention, the pedestal 11 has a plurality of auxiliary pedestals, and the movable member 13 has a plurality of auxiliary movable members.
In this embodiment, the pedestal 11 has first and second auxiliary pedestals 11a and 11b, and the movable member 13 has first and second auxiliary movable members 13a and 13b.

台座１１の有する複数の台座取付部のうち一部の台座取付部は第一の補助台座１１ａの一部で構成され、他の台座取付部は第二の補助台座１１ｂの一部で構成されている。また、可動部材１３の有する複数の可動部材取付部のうち一部の可動部材取付部は第一の補助可動部材１３ａの一部で構成され、他の可動部材取付部は第二の補助可動部材１３ｂの一部で構成されている。 Among the plurality of pedestal mounting portions of the pedestal 11, some of the pedestal mounting portions are configured by a part of the first auxiliary pedestal 11a, and the other pedestal mounting portions are configured by a part of the second auxiliary pedestal 11b. Yes. In addition, some of the movable member mounting portions of the movable member 13 are configured by a part of the first auxiliary movable member 13a, and the other movable member mounting portions are the second auxiliary movable member. It consists of a part of 13b.

第一の補助駆動部１２₁は一の補助可動部材と一の補助台座との間に設けられ、第二、第三の補助駆動部１２₂、１２₃のいずれか一方又は両方は他の補助可動部材と他の補助台座との間に設けられている。 First auxiliary drive unit 12 ₁ is provided between one of the auxiliary movable member and one supplementary base, second, one or both of the third auxiliary driving unit 12 _2, 12 ₃ other auxiliary It is provided between the movable member and another auxiliary base.

本実施例では、第一、第二の補助駆動部１２₁、１２₂が第一の補助可動部材１３ａと第一の補助台座１１ａとの間に設けられて第一のステージユニットが構成され、第三の補助駆動部１２₃が第二の補助可動部材１３ｂと第二の補助台座１１ｂとの間に設けられて第二のステージユニットが構成されている。 In the present embodiment, the first and second auxiliary driving units 12 ₁ and 12 ₂ are provided between the first auxiliary movable member 13a and the first auxiliary pedestal 11a to constitute the first stage unit, third auxiliary driving portion 12 ₃ is the second stage unit is provided between the second auxiliary movable member 13b and the second auxiliary base 11b is formed.

第一のステージユニットでは、第一、第二の補助駆動部１２₁、１２₂の主ガイド２１₁、２１₂は、互いに平行にされて対面された状態で、第一の補助台座１１ａの二つの台座取付部にそれぞれ固定され、第一、第二の補助駆動部１２₁、１２₂の第二の回転部材２６₁、２６₂は、第一の補助可動部材１３ａの二つの可動部材取付部にそれぞれ固定されている。 In the first stage unit, the main guides 21 ₁ , 21 ₂ of the first and second auxiliary driving units 12 ₁ , 12 ₂ are arranged in parallel with each other and face each other. The second rotating members 26 ₁ , 26 ₂ of the first and second auxiliary driving units 12 ₁ , 12 ₂ are fixed to two pedestal mounting portions, respectively, and the two movable member mounting portions of the first auxiliary movable member 13a. It is fixed to each.

第二のステージユニットでは、第三の補助駆動部１２₃の主ガイド２１₃は、第二の補助台座１１ｂの一の台座取付部に固定され、第二の回転部材２６₃は、第二の補助可動部材１３ｂの一の可動部材取付部に固定されている。
ここでは、台座１１は台座接続部材１７を有し、可動部材１３は可動部材接続部材１６を有している。 In the second stage unit, the main guide 21 ₃ of the third auxiliary drive part 12 ₃ is fixed to one base mounting part of the second auxiliary base 11b, and the second rotating member 26 ₃ It is fixed to one movable member mounting portion of the auxiliary movable member 13b.
Here, the pedestal 11 has a pedestal connection member 17, and the movable member 13 has a movable member connection member 16.

第一、第二のステージユニットは、第一、第二の補助台座１１ａ、１１ｂの各台座取付部が同一の平面内に位置し、第一、第二の補助可動部材１３ａ、１３ｂの各可動部材取付部が同一の平面内に位置するように配置され、第三の補助駆動部１２₃の主ガイド２１₃が、第一、第二の補助駆動部１２₁、１２₂の主ガイド２１₁、２１₂に対して所定角度（ここでは９０°）を成す向きに向けられた状態で、隣り合う第一、第二の補助可動部材１３ａ、１３ｂには同一の可動部材接続部材１６がネジ止めされて、第一、第二の補助可動部材１３ａ、１３ｂは互いに固定され、隣り合う第一、第二の補助台座１１ａ、１１ｂには同一の台座接続部材１７がネジ止めされて、第一、第二の補助可動部材１３ａ、１３ｂは互いに固定され、第一例のステージ装置１０ａが構成されている。 In the first and second stage units, the base mounting portions of the first and second auxiliary bases 11a and 11b are positioned in the same plane, and the first and second auxiliary movable members 13a and 13b are movable. member mounting portion is arranged so as to be located in the same plane, the main guide 21 ₃ of the third auxiliary drive unit 12 _3, first, second auxiliary drive unit 12 _1, 12 ₂ of the main guide 21 ₁ , 21 ₂ , the same movable member connecting member 16 is screwed to the adjacent first and second auxiliary movable members 13 a, 13 b in a state of being oriented at a predetermined angle (90 ° here). The first and second auxiliary movable members 13a and 13b are fixed to each other, and the same base connecting member 17 is screwed to the adjacent first and second auxiliary bases 11a and 11b. The second auxiliary movable members 13a and 13b are fixed to each other, and the step of the first example is performed. The charging device 10a is configured.

各ステージユニットはステージ装置全体よりも小型であり、ステージ装置を一体として製作する場合よりも狭い作業スペースで各ステージユニットをそれぞれ製作することができる。また、ステージ装置を一体として製作する場合のステージ装置の構成部材よりも各ステージユニットの構成部材は小型であり、構成部材の制作費や輸送費も低コストになる。
そして、各ステージユニットは、ステージ装置全体を一体として搬送する場合よりも小型の輸送手段で設置場所まで搬送することができ、設置場所では可動部材接続部材１６と台座接続部材１７を用いてステージ装置を容易に組み立てることができる。 Each stage unit is smaller than the entire stage device, and each stage unit can be manufactured in a narrower working space than when the stage device is manufactured as a unit. Further, the constituent members of each stage unit are smaller than the constituent members of the stage device when the stage device is manufactured as a single unit, and the production costs and transportation costs of the constituent members are also low.
Each stage unit can be transported to the installation location by a smaller transport means than the case where the entire stage device is transported as a unit, and the stage device using the movable member connecting member 16 and the pedestal connecting member 17 at the installation location. Can be assembled easily.

本実施例では、台座１１と可動部材１３との間には一個又は複数の自在ガイド部１５がそれぞれ設けられている。
図３は自在ガイド部１５の内部側面図を示している。自在ガイド部１５は、直線状の主ガイド２１と、主ガイド２１に沿って移動できるように主ガイド２１に取り付けられた主スライダ２２と、直線状の副ガイド２３と、副ガイド２３に沿って移動できるように副ガイド２３に取り付けられた副スライダ２４と、互いに中心軸線が一致され、中心軸線を中心に互いに回転できるように構成された第一、第二の回転部材２５、２６とを有している。 In the present embodiment, one or a plurality of free guide portions 15 are provided between the base 11 and the movable member 13.
FIG. 3 shows an internal side view of the universal guide portion 15. The universal guide portion 15 includes a linear main guide 21, a main slider 22 attached to the main guide 21 so as to move along the main guide 21, a linear sub guide 23, and the sub guide 23. A sub-slider 24 attached to the sub-guide 23 so as to be movable, and first and second rotating members 25 and 26 that are configured such that their center axes coincide with each other and can rotate around the center axis. is doing.

自在ガイド部１５の構造は、第一〜第三の補助駆動部１２₁〜１２₃から第一〜第三の動力部１４₁〜１４₃が取り除かれた構造と同じであり、説明を省略する。
本実施例では自在ガイド部１５の主ガイド２１が台座１１に固定され、第二の回転部材２６が可動部材１３に固定されている。従って自在ガイド部１５は、基準面に平行で互いに所定角度を成す二方向にそれぞれ移動でき、かつ基準面に対して直角な回転軸線を中心に回転できるようになっている。 The structure of the universal guide portion 15 is the same as the structure in which the first to third power units 14 _{1 to} 14 ₃ are removed from the first to _third auxiliary drive units 12 _{1 to} 12 ₃ , and the description thereof is omitted. .
In this embodiment, the main guide 21 of the universal guide portion 15 is fixed to the base 11, and the second rotating member 26 is fixed to the movable member 13. Accordingly, the universal guide portion 15 can be moved in two directions parallel to the reference plane and forming a predetermined angle with each other, and can be rotated about a rotation axis perpendicular to the reference plane.

図１を参照し、可動部材１３が台座１１の上方に配置される場合には、可動部材１３の重みは第一〜第三の補助駆動部１２₁〜１２₃と自在ガイド部１５とにそれぞれ分散され、可動部材１３の重みにより第一〜第三の補助駆動部１２₁〜１２₃が損傷することを防止できる。
また、可動部材１３が大型化して隣り合う二つの可動部材取付部の間隔が広がっても、可動部材１３が自在ガイド部１５によって支持されることで、可動部材１３に重力によるひずみが生じることを防止できる。 Referring to FIG. 1, when the movable member 13 is disposed above the pedestal 11, the weight of the movable member 13 is assigned to the first to third auxiliary driving units 12 _{1 to} 12 ₃ and the universal guide unit 15, respectively. It is dispersed, by the weight of the movable member 13 first to third auxiliary driving unit 12 ₁ to 12 ₃ can be prevented from being damaged.
Further, even when the movable member 13 is enlarged and the interval between two adjacent movable member mounting portions is widened, the movable member 13 is supported by the universal guide portion 15, so that the movable member 13 is distorted by gravity. Can be prevented.

なお、図４を参照し、第一、第三の補助駆動部１２₁、１２₃が第一の補助可動部材１３ａと第一の補助台座１１ａとの間に設けられて第一のステージユニットが構成され、第二の補助駆動部１２₂が第二の補助可動部材１３ｂと第二の補助台座１１ｂとの間に設けられて第二のステージユニットが構成され、第一、第二の補助駆動部１２₁、１２₂の主ガイド２１₁、２１₂が互いに平行にされて対面され、第三の補助駆動部１２₃の主ガイド２１₃は第一、第二の補助駆動部１２₁、１２₂の主ガイド２１₁、２１₂に対して所定角度を成す向きに向けられた状態で、第一、第二の補助台座１１ａ、１１ｂが台座接続部材１７を介して固定され、第一、第二の補助可動部材１３ａ、１３ｂが可動部材接続部材１６を介して固定された構造も本発明に含まれる。 Referring to FIG. 4, the first and third auxiliary driving units 12 ₁ and 12 ₃ are provided between the first auxiliary movable member 13a and the first auxiliary base 11a, and the first stage unit is is configured, the second auxiliary drive unit 12 ₂ is the second stage unit is configured provided between the second auxiliary movable member 13b and the second auxiliary base 11b, the first and second auxiliary drive The main guides 21 ₁ , 21 _{2 of the} parts 12 ₁ , 12 ₂ are made to face each other in parallel, and the main guide 21 ₃ of the _third auxiliary drive part 12 ₃ is the first and second auxiliary drive parts 12 ₁ , 12. The first and second auxiliary pedestals 11a and 11b are fixed via the pedestal connecting member 17 in a state in which the _two main guides 21 ₁ and 21 ₂ are oriented in a predetermined angle. A structure in which the two auxiliary movable members 13a and 13b are fixed via the movable member connecting member 16 is also disclosed. Included in the light.

＜第一例のステージ装置の使用方法＞
第一例のステージ装置１０ａの使用方法を説明する。
図１を参照し、以下では、第一、第二の補助駆動部１２₁、１２₂の主ガイド２１₁、２１₂と平行な方向をＸ方向５、第三の補助駆動部１２₃の主ガイド２１₃と平行な方向をＹ方向６と呼ぶ。第一、第二の補助駆動部１２₁、１２₂の副ガイド２３₁、２３₂はＹ方向６と平行であり、第三の補助駆動部１２₃の副ガイド２３₃はＸ方向５と平行である。 <How to use the stage device of the first example>
A method of using the stage device 10a of the first example will be described.
With reference to FIG. 1, in the following, the direction parallel to the main guides 21 ₁ , 21 _{2 of} the first and second auxiliary drive units 12 ₁ , 12 ₂ is the X direction 5, and the main of the third auxiliary drive unit 12 ₃ is A direction parallel to the guide 21 ₃ is referred to as a Y direction 6. The auxiliary guides 23 ₁ and 23 ₂ of the first and second auxiliary driving units 12 ₁ and 12 ₂ are parallel to the Y direction 6, and the auxiliary guide 23 ₃ of the third auxiliary driving unit 12 ₃ is parallel to the X direction 5. It is.

図５を参照し、第三の動力部１４₃を停止させ、第一、第二の動力部１４₁、１４₂から第一、第二の補助駆動部１２₁、１２₂の主スライダ２２₁、２２₂にＸ方向５に平行な同一方向に同一量の動力を伝達させる。
すると、第一、第二の補助駆動部１２₁、１２₂の主スライダ２２₁、２２₂は主ガイド２１₁、２１₂に沿ってＸ方向５に平行な同一方向に同一距離移動し、第三の補助駆動部１２₃の副スライダ２４₃は副ガイド２３₃に沿って第一、第二の補助駆動部１２₁、１２₂の主スライダ２２₁、２２₂と同じ方向に同じ距離移動して、可動部材１３全体としてＸ方向５に平行移動する。 Referring to FIG. 5, the third power unit 14 ₃ is stopped, and the first and second power units 14 ₁ and 14 ₂ to the first and second auxiliary drive units 12 ₁ and 12 ₂ main sliders 22 _1. , 22 ₂ , the same amount of power is transmitted in the same direction parallel to the X direction 5.
Then, the main sliders 22 ₁ , 22 ₂ of the first and second auxiliary driving units 12 ₁ , 12 ₂ move along the main guides 21 ₁ , 21 ₂ by the same distance in the same direction parallel to the X direction 5. The auxiliary slider 24 _{3 of the} _third auxiliary driving unit 12 ₃ moves along the auxiliary guide 23 ₃ in the same direction as the main sliders 22 ₁ and 22 _{2 of} the first and second auxiliary driving units 12 ₁ and 12 _2. Thus, the entire movable member 13 is translated in the X direction 5.

また、図６を参照し、第一、第二の動力部１４₁、１４₂を停止させ、第三の動力部１４₃から第三の補助駆動部１２₃の主スライダ２２₃にＹ方向６に平行な動力を伝達させる。
すると、第三の補助駆動部１２₃の主スライダ２２₃は主ガイド２１₃に沿ってＹ方向６に平行に移動し、第一、第二の補助駆動部１２₁、１２₂の副スライダ２４₁、２４₂は副ガイド２３₁、２３₂に沿って第三の補助駆動部１２₃の主スライダ２２₃と同じ方向に同じ距離移動して、可動部材１３全体としてＹ方向６に平行移動する。 Further, referring to FIG. 6, the first, second power unit 14 _1, 14 ₂ is stopped, Y-direction 6 from the third power section 14 ₃ on the main slider 22 ₃ of the third auxiliary drive unit 12 ₃ The power parallel to is transmitted.
Then, the main slider 22 ₃ of the third auxiliary driving unit 12 ₃ moves in parallel to the Y direction 6 along the main guide 21 _3, and the sub sliders 24 of the first and second auxiliary driving units 12 ₁ and 12 _2. ₁ and 24 ₂ move along the sub guides 23 ₁ and 23 ₂ in the same direction as the main slider 22 _{3 of} the third auxiliary drive unit 12 ₃ , and move in parallel in the Y direction 6 as the entire movable member 13. .

また、図７を参照し、第一〜第三の動力部１４₁〜１４₃の動力の向きが基準面（すなわち、ＸＹ平面）に対して直角な回転軸線を中心に時計回り又は反時計回りを成すように、第一、第二の動力部１４₁、１４₂から第一、第二の補助駆動部１２₁、１２₂の主スライダ２２₁、２２₂にＸ方向５に平行で互いに逆方向の動力を伝達させ、第三の動力部１４₃から第三の補助駆動部１２₃の主スライダ２２₃にＹ方向６に平行で所定方向の動力を伝達させる。 Referring to FIG. 7, the power direction of the first to third power units 14 _{1 to} 14 ₃ is clockwise or counterclockwise about a rotation axis perpendicular to the reference plane (that is, the XY plane). The first and second power units 14 ₁ , 14 ₂ to the main sliders 22 ₁ , 22 ₂ of the first and second auxiliary drive units 12 ₁ , 12 ₂ are parallel to the X direction 5 and opposite to each other. Power in the direction is transmitted, and power in a predetermined direction is transmitted from the third power unit 14 ₃ to the main slider 22 ₃ of the third auxiliary drive unit 12 ₃ in parallel with the Y direction 6.

ここでは、第一の補助駆動部１２₁の主スライダ２２₁に正のＸ方向の動力を与え、第二の補助駆動部１２₂の主スライダ２２₂に負のＸ方向の動力を与え、第三の補助駆動部１２₃の主スライダ２２₃に正のＹ方向の動力を与える。
すると、第一〜第三の補助駆動部１２₁〜１２₃の主スライダ２２₁〜２２₃は主ガイド２１₁〜２１₃に沿ってそれぞれ移動し、副スライダ２４₁〜２４₃は副ガイド２３₁〜２３₃に沿ってそれぞれ移動し、第一、第二の回転部材２５₁〜２５₃、２６₁〜２６₃はそれぞれ共通の中心軸線を中心に互いに回転して、可動部材１３全体としては基準面（ＸＹ平面）に対して直角な回転軸線を中心に所定角度回転する。 Here, positive X direction power is applied to the main slider 22 ₁ of the first auxiliary drive unit 12 ₁ , negative X direction power is applied to the main slider 22 ₂ of the second auxiliary drive unit 12 ₂ , and Power in the positive Y direction is applied to the main slider 22 _{3 of the} _three auxiliary driving units 12 ₃ .
Then, the main sliders 22 _{1 to} 22 ₃ of the first to third auxiliary driving units 12 _{1 to} 12 ₃ move along the main guides 21 _{1 to} 21 ₃ , respectively, and the sub sliders 24 _{1 to} 24 ₃ are moved to the sub guide 23. ₁ to 2 ₃ , and the first and second rotating members 25 _{1 to} 25 ₃ and 26 _{1 to} 26 ₃ rotate with respect to each other about a common central axis so that the movable member 13 as a whole A predetermined angle is rotated about a rotation axis perpendicular to the reference plane (XY plane).

このようにして、第一〜第三の補助駆動部１２₁〜１２₃を有する駆動部は、可動部材１３を一の平面に平行で互いに所定角度を成す二方向（Ｘ方向５とＹ方向６）にそれぞれ移動させ、かつ前記一の平面（ＸＹ平面）に対して直角な回転軸線を中心に回転させることができる。 Thus, the drive unit having first to third auxiliary driving unit 12 ₁ to 12 _3, two directions (X direction 5 and Y direction forming the predetermined angle to each other parallel to the movable member 13 in one plane 6 ) And can be rotated around a rotation axis perpendicular to the one plane (XY plane).

本発明では、上述したように、第一の補助駆動部１２₁の主ガイド２１₁と第二の補助駆動部１２₂の主ガイド２１₂は互いに平行にされて対面されている。
従って、第一、第二の動力部１４₁、１４₂から第一、第二の補助駆動部１２₁、１２₂の主スライダ２２₁、２２₂に動力が伝達された場合には、可動部材１３のうち第一、第二の補助駆動部１２₁、１２₂が固定された二つの可動部材取付部には、基準面に平行で当該二つの可動部材取付部を結ぶ線分に対して直角な方向に力がかかり、基準面に平行で当該二つの可動部材取付部を結ぶ線分に平行な方向の応力は可動部材１３の内部に発生しない。そのため、可動部材１３の内部の応力により、可動部材接続部材１６のネジがゆるんだり、可動部材接続部材１６にひずみが生じて、第一、第二の補助可動部材１３ａ、１３ｂの相対位置が変化することを防止できる。 In the present invention, as described above, the main guide 21 ₂ of the first auxiliary drive unit 12 ₁ of the main guide 21 ₁ and the second auxiliary drive unit 12 ₂ is facing is parallel to each other.
Therefore, when power is transmitted from the first and _second power units 14 ₁ and 14 ₂ to the main sliders 22 ₁ and 22 ₂ of the first and second auxiliary drive units 12 ₁ and 12 ₂ , the movable member 13, the first and second auxiliary drive portions 12 ₁ , 12 ₂ are fixed to the two movable member mounting portions at right angles to a line segment that is parallel to the reference plane and connects the two movable member mounting portions. Force is applied in any direction, and no stress is generated in the movable member 13 in the direction parallel to the reference plane and parallel to the line segment connecting the two movable member mounting portions. Therefore, due to the stress inside the movable member 13, the screw of the movable member connecting member 16 is loosened or the movable member connecting member 16 is distorted, and the relative positions of the first and second auxiliary movable members 13a and 13b change. Can be prevented.

また、第一、第二の動力部１４₁、１４₂から第一、第二の補助駆動部１２₁、１２₂の主スライダ２２₁、２２₂に動力が伝達されると、主スライダ２２₁、２２₂から第一、第二の動力部１４₁、１４₂に反作用の力がかかるが、台座１１のうち第一、第二の動力部１４₁、１４₂が固定された二つの固定箇所には、基準面に平行で当該二つの固定箇所を結ぶ線分に対して直角な方向に力がかかり、基準面に平行で当該二つの固定箇所を結ぶ線分に平行な方向の応力は台座１１の内部に発生しない。そのため、台座１１の内部の応力により、台座接続部材１７のネジがゆるんだり、台座接続部材１７にひずみが生じて、第一、第二の補助台座１１ａ、１１ｂの相対位置が変化することを防止できる。 When power is transmitted from the first and _second power units 14 ₁ and 14 ₂ to the main sliders 22 ₁ and 22 ₂ of the first and second auxiliary drive units 12 ₁ and 12 ₂ , the main slider 22 ₁ , 22 ₂ from the first, second power section 14 _1, 14 ₂ to the force of the reaction is such, first, the two fixing points of the second power unit 14 _1, 14 ₂ is fixed within the seat 11 Force is applied in the direction parallel to the reference plane and perpendicular to the line connecting the two fixed locations, and the stress in the direction parallel to the reference plane and parallel to the line connecting the two fixed locations is the pedestal. 11 does not occur inside. Therefore, it is possible to prevent the relative positions of the first and second auxiliary pedestals 11a and 11b from changing due to the internal stress of the pedestal 11 causing the screws of the pedestal connection member 17 to loosen or the pedestal connection member 17 to be distorted. it can.

＜第二例のステージ装置の構造＞
本発明の第二例のステージ装置の構造を説明する。
図８は第二例のステージ装置１０ｂの平面図である。第二例のステージ装置１０ｂのうち、第一例のステージ装置１０ａと同じ構造の部分には同じ符号を付して、説明を省略する。 <Structure of stage device of second example>
The structure of the stage device of the second example of the present invention will be described.
FIG. 8 is a plan view of the stage device 10b of the second example. Of the stage device 10b of the second example, parts having the same structure as the stage device 10a of the first example are denoted by the same reference numerals and description thereof is omitted.

第二例のステージ装置１０ｂの駆動部は第一〜第四の補助駆動部１２₁〜１２₄を有している。すなわち、第二例のステージ装置１０ｂでは、第一例のステージ装置１０ａに比べて、第四の補助駆動部１２₄が追加されている。
第四の補助駆動部１２₄の構造は第一〜第三の補助駆動部１２₁〜１２₃と同じであり、説明を省略する。
台座１１には、第四の補助駆動部１２₄の主取付部２８（本実施例では主スライダ２２₄）に、第四の補助駆動部１２₄の主ガイド２１₄と平行な向きの動力を伝達する第四の動力部１４₄が設けられている。 Driver of the second example of the stage device 10b has a first to fourth auxiliary driving unit 12 ₁ to 12 _4. That is, in the second example of the stage device 10b, as compared with the first example of the stage apparatus 10a, the fourth auxiliary driving unit 12 ₄ is added.
The structure of the fourth auxiliary driving unit 12 ₄ is the same as that of the first to third auxiliary driving units 12 _{1 to} 12 ₃ , and a description thereof will be omitted.
The pedestal 11 receives power in a direction parallel to the main guide 21 _{4 of} the fourth auxiliary drive unit 12 _{4 to} the main mounting portion 28 (main slider 22 ₄ in this embodiment) of the fourth auxiliary drive unit 12 _4. fourth power unit 14 ₄ is provided for transmitting.

本実施例では、第一、第二の補助駆動部１２₁、１２₂と第四の補助駆動部１２₄が第一の補助可動部材１３ａと第一の補助台座１１ａとの間に設けられて第一のステージユニットが構成され、第三の補助駆動部１２₃が第二の補助可動部材１３ｂと第二の補助台座１１ｂとの間に設けられて第二のステージユニットが構成されている。 In this embodiment, the first and second auxiliary driving units 12 ₁ and 12 ₂ and the fourth auxiliary driving unit 12 ₄ are provided between the first auxiliary movable member 13a and the first auxiliary base 11a. It consists first stage unit, the third auxiliary drive unit 12 ₃ is the second stage unit is provided between the second auxiliary movable member 13b and the second auxiliary base 11b is formed.

第一のステージユニットでは、第一、第二の補助駆動部１２₁、１２₂の主ガイド２１₁、２１₂は、互いに平行にされて対面された状態で、第一の補助台座１１ａの二つの台座取付部にそれぞれ固定され、第四の補助駆動部１２₄の主ガイド２１₄は、第一、第二の補助駆動部１２₁、１２₂の主ガイド２１₁、２１₂に対して所定角度（ここでは９０°）を成す向きに向けられた状態で、第一の補助台座１１ａの他の台座取付部に固定されている。 In the first stage unit, the main guides 21 ₁ , 21 ₂ of the first and second auxiliary driving units 12 ₁ , 12 ₂ are arranged in parallel with each other and face each other. The main guides 21 ₄ of the fourth auxiliary driving unit 12 ₄ are fixed to the two base mounting parts, respectively, and are predetermined with respect to the main guides 21 ₁ and 21 _{2 of} the first and second auxiliary driving units 12 ₁ and 12 _2. It is fixed to another pedestal mounting portion of the first auxiliary pedestal 11a in a state of being oriented in an angle (90 ° here).

第一、第二の補助駆動部１２₁、１２₂の第二の回転部材２６₁、２６₂と第四の補助駆動部１２₄の第二の回転部材２６₄は、第一の補助可動部材１３ａの三つの台座取付部にそれぞれ固定されている。
第二のステージユニットでは、第三の補助駆動部１２₃の主ガイド２１₃は、第二の補助台座１１ｂの一の台座取付部に固定され、第二の回転部材２６₃は、第二の補助可動部材１３ｂの一の可動部材取付部に固定されている。 First and second rotary members 26 ₄ of the second auxiliary drive unit 12 _1, 12 second rotating member 26 of the ₂ _1, 26 ₂ and the fourth auxiliary drive unit 12 _4, the first auxiliary movable member It is being fixed to three pedestal attaching parts of 13a, respectively.
In the second stage unit, the main guide 21 ₃ of the third auxiliary drive part 12 ₃ is fixed to one base mounting part of the second auxiliary base 11b, and the second rotating member 26 ₃ It is fixed to one movable member mounting portion of the auxiliary movable member 13b.

第一、第二のステージユニットは、第一、第二の補助台座１１ａ、１１ｂの台座取付部が同一の平面内に位置し、第一、第二の補助可動部材１３ａ、１３ｂの可動部材取付部が同一の平面内に位置するように配置され、第三、第四の補助駆動部１２₃、１２₄の主ガイド２１₃、２１₄が互いに平行にされて対面された状態で、隣り合う第一、第二の補助可動部材１３ａ、１３ｂには同一の可動部材接続部材１６がネジ止めされて、第一、第二の補助可動部材１３ａ、１３ｂは互いに固定され、隣り合う第一、第二の補助台座１１ａ、１１ｂには同一の台座接続部材１７がネジ止めされて、第一、第二の補助台座１１ａ、１１ｂは互いに固定され、第二例のステージ装置１０ｂが構成されている。
このとき、第三の補助駆動部１２₃の主ガイド２１₃は、第一、第二の補助駆動部１２₁、１２₂の主ガイド２１₁、２１₂に対して所定角度（ここでは９０°）を成す向きに向けられている。 In the first and second stage units, the base mounting portions of the first and second auxiliary bases 11a and 11b are located in the same plane, and the first and second auxiliary movable members 13a and 13b are attached to the movable members. Are arranged in the same plane, and adjacent to each other in a state where the main guides 21 ₃ and 21 _{4 of} the third and fourth auxiliary driving units 12 ₃ and 12 ₄ are parallel to each other and face each other. The same movable member connecting member 16 is screwed to the first and second auxiliary movable members 13a and 13b, and the first and second auxiliary movable members 13a and 13b are fixed to each other and are adjacent to each other. The same pedestal connecting member 17 is screwed to the two auxiliary pedestals 11a and 11b, and the first and second auxiliary pedestals 11a and 11b are fixed to each other to constitute a stage device 10b of the second example.
At this time, the main guide 21 ₃ of the third auxiliary driving unit 12 ₃ is at a predetermined angle (90 ° here) with respect to the main guides 21 ₁ and 21 _{2 of} the first and second auxiliary driving units 12 ₁ and 12 ₂ . ).

＜第二例のステージ装置の使用方法＞
第二例のステージ装置１０ｂの使用方法を説明する。
以下では、第一、第二の補助駆動部１２₁、１２₂の主ガイド２１₁、２１₂と平行な方向をＸ方向５、第三、第四の補助駆動部１２₃、１２₄の主ガイド２１₃、２１₄と平行な方向をＹ方向６と呼ぶ。第一、第二の補助駆動部１２₁、１２₂の副ガイド２３₁、２３₂はＹ方向６と平行であり、第三、第四の補助駆動部１２₃、１２₄の副ガイド２３₃、２３₄はＸ方向５と平行である。 <How to use the stage device of the second example>
A method of using the stage apparatus 10b of the second example will be described.
In the following, the direction parallel to the main guides 21 ₁ , 21 _{2 of} the first and second auxiliary drive units 12 ₁ , 12 ₂ is the X direction 5, and the main of the third and fourth auxiliary drive units 12 ₃ , 12 _{4 is} the same. A direction parallel to the guides 21 ₃ and 21 ₄ is referred to as a Y direction 6. The auxiliary guides 23 ₁ and 23 ₂ of the first and second auxiliary driving units 12 ₁ and 12 ₂ are parallel to the Y direction 6, and the auxiliary guides 23 _{3 of} the third and fourth auxiliary driving units 12 ₃ and 12 ₄ are arranged. , 23 ₄ are parallel to the X direction 5.

まず、第三、第四の動力部１４₃、１４₄を停止させ、第一、第二の動力部１４₁、１４₂から第一、第二の補助駆動部１２₁、１２₂の主スライダ２２₁、２２₂にＸ方向５に平行な同一方向に同一量の動力を伝達させる。
すると、第一、第二の補助駆動部１２₁、１２₂の主スライダ２２₁、２２₂は主ガイド２１₁、２１₂に沿ってＸ方向５に平行な同一方向に同一距離移動し、第三、第四の補助駆動部１２₃、１２₄の副スライダ２４₃、２４₄は副ガイド２３₃、２３₄に沿って第一、第二の補助駆動部１２₁、１２₂の主スライダ２２₁、２２₂と同じ方向に同じ距離移動して、可動部材１３全体としてはＸ方向５に平行移動する。 First, the third and fourth power units 14 ₃ and 14 ₄ are stopped, and the main sliders of the first and second auxiliary drive units 12 ₁ and 12 ₂ are changed from the first and _second power units 14 ₁ and 14 ₂ . The same amount of power is transmitted to 22 ₁ and 22 ₂ in the same direction parallel to the X direction 5.
Then, the main sliders 22 ₁ , 22 ₂ of the first and second auxiliary driving units 12 ₁ , 12 ₂ move along the main guides 21 ₁ , 21 ₂ by the same distance in the same direction parallel to the X direction 5. The auxiliary sliders 24 ₃ , 24 ₄ of the third and fourth auxiliary driving units 12 ₃ , 12 ₄ are arranged along the auxiliary guides 23 ₃ , 23 ₄ to the main slider 22 of the first and second auxiliary driving units 12 ₁ , 12 _2. _The movable member 13 as a whole moves in parallel in the X direction 5 by moving the same distance in the same direction as ₁ and 22 ₂ .

また、第一、第二の動力部１４₁、１４₂を停止させ、第三、第四の動力部１４₃、１４₄から第三、第四の補助駆動部１２₃、１２₄の主スライダ２２₃、２２₄にＹ方向６に平行な同一方向に同一量の動力を伝達させる。
すると、第三、第四の補助駆動部１２₃、１２₄の主スライダ２２₃、２２₄は主ガイド２１₃、２１₄に沿ってＹ方向６に平行な同一方向に同一距離移動し、第一、第二の補助駆動部１２₁、１２₂の副スライダ２４₁、２４₂は副ガイド２３₁、２３₂に沿って第三、第四の補助駆動部１２₃、１２₄の主スライダ２２₃、２２₄と同じ方向に同じ距離移動して、可動部材１３全体としてはＹ方向６に平行移動する。 Further, the first and second power units 14 ₁ and 14 ₂ are stopped, and the main sliders of the third and fourth power units 14 ₃ and 14 ₄ to the third and fourth auxiliary drive units 12 ₃ and 12 ₄ are stopped. The same amount of power is transmitted to 22 ₃ and 22 ₄ in the same direction parallel to the Y direction 6.
Then, the main sliders 22 ₃ and 22 ₄ of the third and fourth auxiliary driving units 12 ₃ and 12 ₄ move along the main guides 21 ₃ and 21 ₄ by the same distance in the same direction parallel to the Y direction 6, The auxiliary sliders 24 ₁ and 24 ₂ of the first and second auxiliary driving units 12 ₁ and 12 ₂ are arranged along the auxiliary guides 23 ₁ and 23 ₂ to the main sliders 22 of the third and fourth auxiliary driving units 12 ₃ and 12 _4. ₃ and 22 ₄ are moved by the same distance in the same direction, and the entire movable member 13 is translated in the Y direction 6.

また、第一〜第四の動力部１４₁〜１４₄の動力の向きが基準面（ＸＹ平面）に対して直角な回転軸線を中心に時計回り又は反時計回りを成すように、第一、第二の動力部１４₁、１４₂から第一、第二の補助駆動部１２₁、１２₂の主スライダ２２₁、２２₂にＸ方向５に平行で互いに逆方向の動力を伝達させ、第三、第四の動力部１４₃、１４₄から第三、第四の補助駆動部１２₃、１２₄の主スライダ２２₃、２２₄にＹ方向６に平行で互いに逆方向の動力を伝達させる。 In addition, the first, fourth, and fourth power units 14 _{1 to} 14 ₄ are configured so that the power direction is clockwise or counterclockwise about a rotation axis perpendicular to the reference plane (XY plane). The second power units 14 ₁ , 14 ₂ transmit powers in parallel to the X direction 5 to the main sliders 22 ₁ , 22 ₂ of the first and second auxiliary drive units 12 ₁ , 12 ₂ in opposite directions. The third and fourth power units 14 ₃ and 14 ₄ transmit the powers in the third and fourth auxiliary drive units 12 ₃ and 12 _{4 to} the main sliders 22 ₃ and 22 ₄ in parallel to the Y direction 6 and in opposite directions. .

ここでは、第一の補助駆動部１２₁の主スライダ２２₁に正のＸ方向の動力を与え、第二の補助駆動部１２₂の主スライダ２２₂に負のＸ方向の動力を与え、第三の補助駆動部１２₃の主スライダ２２₃に正のＹ方向の動力を与え、第四の補助駆動部１２₄の主スライダ２２₄に負のＹ方向の動力を与える。 Here, positive X direction power is applied to the main slider 22 ₁ of the first auxiliary drive unit 12 ₁ , negative X direction power is applied to the main slider 22 ₂ of the second auxiliary drive unit 12 ₂ , and Power in the positive Y direction is applied to the main slider 22 _{3 of the} _third auxiliary drive unit 12 ₃ , and power in the negative Y direction is applied to the main slider 22 ₄ of the fourth auxiliary drive unit 12 ₄ .

すると、第一〜第四の補助駆動部１２₁〜１２₄の主スライダ２２₁〜２２₄は主ガイド２１₁〜２１₄に沿ってそれぞれ移動し、副スライダ２４₁〜２４₄は副ガイド２３₁〜２３₄に沿ってそれぞれ移動し、第一、第二の回転部材２５₁〜２５₄、２６₁〜２６₄はそれぞれ共通の中心軸線を中心に互いに回転して、可動部材１３全体としては基準面（ＸＹ平面）に対して直角な回転軸線を中心に所定角度回転する。 Then, first to fourth main slider 22 _1-22 ₄ auxiliary drive unit 12 ₁ to 12 ₄ are moved respectively along the main guide 21 ₁ to 21 _4, the sub-slider 24 _1-24 ₄ sub-guide 23 _1-23 respectively move along the _4, first, second rotary member 25 ₁ to 25 _4, 26 ₁ to 26 ₄ to rotate together about a common center axis, respectively, as a whole the movable member 13 A predetermined angle is rotated about a rotation axis perpendicular to the reference plane (XY plane).

このようにして、第一〜第四の補助駆動部１２₁〜１２₄を有する駆動部は、可動部材１３を一の平面に平行で互いに所定角度を成す二方向（Ｘ方向５とＹ方向６）にそれぞれ移動させ、かつ前記一の平面（ＸＹ平面）に対して直角な回転軸線を中心に回転させることができる。 In this way, the drive unit having the first to fourth auxiliary drive units 12 _{1 to} 12 ₄ has two directions (X direction 5 and Y direction 6) that make the movable member 13 parallel to one plane and form a predetermined angle with each other. ) And can be rotated around a rotation axis perpendicular to the one plane (XY plane).

本発明では、上述したように、第一の補助駆動部１２₁の主ガイド２１₁と第二の補助駆動部１２₂の主ガイド２１₂は互いに平行にされて対面され、第三の補助駆動部１２₃の主ガイド２１₃と第四の補助駆動部１２₄の主ガイド２１₄は互いに平行にされて対面されている。 In the present invention, as described above, the first auxiliary drive unit 12 ₁ of the main guide 21 ₁ and the main guide 21 ₂ of the second auxiliary drive unit 12 ₂ is facing is in parallel with each other, the third auxiliary drive main guide 21 ₃ and the main guide 21 ₄ of the fourth auxiliary drive unit 12 ₄ parts 12 ₃ are facing are parallel to each other.

従って、第一〜第四の動力部１４₁〜１４₄から第一〜第四の補助駆動部１２₁〜１２₄の主スライダ２２₁〜２２₄に動力が伝達された場合には、可動部材１３のうち第一、第二の補助駆動部１２₁、１２₂が固定された二つの可動部材取付部には、基準面に平行で当該二つの可動部材取付部を結ぶ線分に対して直角な方向に力がかかり、基準面に平行で当該二つの可動部材取付部を結ぶ線分に平行な方向の応力は可動部材１３の内部に発生しない。また、可動部材１３のうち第三、第四の補助駆動部１２₃、１２₄が固定された他の二つの可動部材取付部には、基準面に平行で当該他の二つの可動部材取付部を結ぶ線分に対して直角な方向に力がかかり、基準面に平行で当該他の二つの可動部材取付部を結ぶ線分に平行な方向の応力は可動部材１３の内部に発生しない。そのため、可動部材１３の内部の応力により、可動部材接続部材１６のネジがゆるんだり、可動部材接続部材１６にひずみが生じて、第一、第二の補助可動部材１３ａ、１３ｂの相対位置が変化することを防止できる。 Therefore, when the power is transmitted from the first to fourth power section 14 _1-14 ₄ in the main slider 22 _1-22 ₄ of the first to fourth auxiliary driving unit 12 ₁ to 12 _4, the movable member 13, the first and second auxiliary drive portions 12 ₁ , 12 ₂ are fixed to the two movable member mounting portions at right angles to a line segment that is parallel to the reference plane and connects the two movable member mounting portions. Force is applied in any direction, and no stress is generated in the movable member 13 in the direction parallel to the reference plane and parallel to the line segment connecting the two movable member mounting portions. The other two movable member mounting portions to which the third and fourth auxiliary driving portions 12 ₃ , 12 ₄ are fixed out of the movable member 13 are parallel to the reference plane and the other two movable member mounting portions. A force is applied in a direction perpendicular to the line connecting the two, and no stress is generated in the movable member 13 in a direction parallel to the reference plane and parallel to the line connecting the other two movable member mounting portions. Therefore, due to the stress inside the movable member 13, the screw of the movable member connecting member 16 is loosened or the movable member connecting member 16 is distorted, and the relative positions of the first and second auxiliary movable members 13a and 13b change. Can be prevented.

また、第一〜第四の動力部１４₁〜１４₄から第一〜第四の補助駆動部１２₁〜１２₄の主スライダ２２₁、２２₂に動力が伝達されると、主スライダ２２₁〜２２₄から第一〜第四の動力部１４₁〜１４₄に反作用の力がかかるが、台座１１のうち第一、第二の動力部１４₁、１４₂が固定された二つの固定箇所には、基準面に平行で当該二つの固定箇所を結ぶ線分に対して直角な方向に力がかかり、基準面に平行で当該二つの固定箇所を結ぶ線分に平行な方向の応力は台座１１の内部に発生しない。また、台座１１のうち第三、第四の動力部１４₃、１４₄が固定された他の二つの固定箇所には、基準面に平行で当該他の二つの固定箇所を結ぶ線分に対して直角な方向に力がかかり、基準面に平行で当該他の二つの固定箇所を結ぶ線分に平行な方向の応力は台座１１の内部に発生しない。そのため、台座１１の内部の応力により、台座接続部材１７のネジがゆるんだり、台座接続部材１７にひずみが生じて、第一、第二の補助台座１１ａ、１１ｂの相対位置が変化することを防止できる。 When power is transmitted from the first to fourth power units 14 _{1 to} 14 ₄ to the main sliders 22 ₁ and 22 ₂ of the first to fourth auxiliary drive units 12 _{1 to} 12 ₄ , the main slider 22 _1. to 22 _4, but the first to fourth reaction force to the power unit 14 ₁ to 14 ₄ is applied, first, two fixing portions where the second power unit 14 _1, 14 ₂ is fixed within the seat 11 Force is applied in the direction parallel to the reference plane and perpendicular to the line connecting the two fixed locations, and the stress in the direction parallel to the reference plane and parallel to the line connecting the two fixed locations is the pedestal. 11 does not occur inside. Further, in the other two fixing points where the third and fourth power units 14 ₃ and 14 ₄ are fixed in the pedestal 11, the line segment connecting the other two fixing points in parallel to the reference plane is used. Force is applied in a perpendicular direction, and no stress is generated in the pedestal 11 in the direction parallel to the reference plane and parallel to the line segment connecting the other two fixing points. Therefore, it is possible to prevent the relative positions of the first and second auxiliary pedestals 11a and 11b from changing due to the internal stress of the pedestal 11 causing the screws of the pedestal connection member 17 to loosen or the pedestal connection member 17 to be distorted. it can.

＜第三例のステージ装置の構造＞
本発明の第三例のステージ装置の構造を説明する。
図９は第三例のステージ装置の平面図である。第三例のステージ装置１０ｃのうち、第一例のステージ装置１０ｃと同じ構造の部分には同じ符号を付して、説明を省略する。 <Structure of stage device of third example>
The structure of the stage device of the third example of the present invention will be described.
FIG. 9 is a plan view of the stage device of the third example. Of the stage device 10c of the third example, parts having the same structure as the stage device 10c of the first example are denoted by the same reference numerals and description thereof is omitted.

台座１１は第一〜第三の補助台座１１ａ〜１１ｃを有し、可動部材１３は第一〜第三の補助可動部材１３ａ〜１３ｃを有している。すなわち、第二例のステージ装置１０ｂに比べて、第三の補助台座１１ｃと第三の補助可動部材１３ｃが追加されている。 The pedestal 11 has first to third auxiliary pedestals 11a to 11c, and the movable member 13 has first to third auxiliary movable members 13a to 13c. That is, a third auxiliary pedestal 11c and a third auxiliary movable member 13c are added as compared with the stage device 10b of the second example.

台座１１の台座取付部のうち一部の台座取付部は第一の補助台座１１ａの一部で構成され、他の一部の台座取付部は第二の補助台座１１ｂの一部で構成され、他の台座取付部は第三の補助台座１１ｃの一部で構成されている。また、可動部材１３の可動部材取付部のうち一部の可動部材取付部は第一の補助可動部材１３ａの一部で構成され、他の一部の可動部材取付部は第二の補助可動部材１３ｂの一部で構成され、他の可動部材取付部は第三の補助可動部材１３ｃの一部で構成されている。 Of the pedestal mounting portion of the pedestal 11, a part of the pedestal mounting portion is constituted by a part of the first auxiliary pedestal 11a, and the other part of the pedestal mounting portion is constituted by a part of the second auxiliary pedestal 11b. The other pedestal mounting part is constituted by a part of the third auxiliary pedestal 11c. Further, some of the movable member mounting portions of the movable member 13 are configured by a part of the first auxiliary movable member 13a, and the other part of the movable member mounting portion is the second auxiliary movable member. 13b, and the other movable member mounting portion is a part of the third auxiliary movable member 13c.

本実施例では、第一の補助駆動部１２₁は第一の補助可動部材１３ａと第一の補助台座１１ａとの間に設けられて第一のステージユニットが構成され、第二の補助駆動部１２₂は第二の補助可動部材１３ｂと第二の補助台座１１ｂとの間に設けられて第二のステージユニットが構成され、第三の補助駆動部１２₃は第三の補助可動部材１３ｃと第二の補助台座１１ｃとの間に設けられて第三のステージユニットが構成されている。 In this embodiment, the first auxiliary drive unit 12 ₁ is first stage unit disposed between the first auxiliary movable member 13a and the first auxiliary seat 11a is formed, the second auxiliary drive unit 12 ₂ and the second auxiliary movable member 13b and the second stage unit is provided between the second auxiliary seat 11b is formed, the third auxiliary drive unit 12 ₃ third auxiliary movable member 13c A third stage unit is configured between the second auxiliary base 11c.

第一のステージユニットでは、第一の補助駆動部１２₁の主ガイドは第一の補助台座１１ａの一の台座取付部に固定され、第二の回転部材は第一の補助可動部材１３ａの一の可動部材取付部に固定されている。
第二のステージユニットでは、第二の補助駆動部１２₂の主ガイドは第二の補助台座１１ｂの一の台座取付部に固定され、第二の回転部材は第二の補助可動部材１３ｂの一の可動部材取付部に固定されている。
第三のステージユニットでは、第三の補助駆動部１２₃の主ガイドは第三の補助台座１１ｃの一の台座取付部に固定され、第二の回転部材は第三の補助可動部材１３ｃの一の可動部材取付部に固定されている。 In the first stage unit, the first auxiliary drive unit 12 ₁ of the main guide is fixed to one of the base attachment portion of the first auxiliary seat 11a, the second rotation member of the first auxiliary movable member 13a one The movable member mounting portion is fixed.
In the second stage unit, the main guide of the second auxiliary drive unit 12 ₂ is fixed to one of the base attachment portion of the second auxiliary base 11b, a second rotary member one second auxiliary movable member 13b The movable member mounting portion is fixed.
In a third stage unit, the main guide of the third auxiliary drive unit 12 ₃ is fixed to one of the base attachment portion of the third auxiliary seat 11c, the second rotary member one third auxiliary movable member 13c The movable member mounting portion is fixed.

第一〜第三のステージユニットは、第一〜第三の補助台座１１ａ〜１１ｃの台座取付部が同一の平面内に位置し、第一〜第三の補助可動部材１３ａ〜１３ｃの可動部材取付部が同一の平面内に位置するように配置され、第一、第二の補助駆動部１２₁、１２₂の主ガイドが互いに平行にされて対面され、第三の補助駆動部１２₃の主ガイドは第一、第二の補助駆動部１２₁、１２₂の主ガイドに対して所定角度（ここでは９０°）を成す向きに向けられた状態で、隣り合う第一〜第三の補助可動部材１３ａ〜１３ｃには同一の第一の可動部材接続部材１６₁がネジ止めされて、第一〜第三の補助可動部材１３ａ〜１３ｃは互いに固定され、隣り合う第一〜第三の補助台座１１ａ〜１１ｃには同一の第一の台座接続部材１７₁がネジ止めされて、第一〜第三の補助台座１１ａ〜１１ｃは互いに固定され、第三例のステージ装置１０ｃが構成されている。 In the first to third stage units, the base mounting portions of the first to third auxiliary bases 11a to 11c are located in the same plane, and the first to third auxiliary movable members 13a to 13c are attached to the movable members. Are arranged in the same plane, the main guides of the first and second auxiliary drive units 12 ₁ and 12 ₂ are faced parallel to each other, and the main guide of the third auxiliary drive unit 12 ₃ Adjacent first to third auxiliary movable members are oriented in a direction that forms a predetermined angle (90 ° in this case) with respect to the main guides of the first and second auxiliary driving units 12 ₁ and 12 _2. the member 13a~13c with the first movable member connecting member 16 ₁ same is screwed, the first to third auxiliary movable member 13a~13c are fixed to each other, first to neighboring third auxiliary base the 11a~11c first seat connecting member 17 ₁ same is screwed first To third auxiliary seat 11a~11c are fixed to each other, the stage device 10c of the third example is configured.

なお、本実施例では、補助台座接続部材１９ａが第一の台座接続部材１７₁にネジ止めされて固定され、補助可動部材接続部材１９ｂが第一の可動部材接続部材１６₁にネジ止めされて固定されている。 In this embodiment, the auxiliary base connection member 19a is fixedly screwed to the first base connecting member 17 _1, the auxiliary movable member connecting member 19b is screwed to the first movable member connecting member 16 ₁ It is fixed.

さらに、第一の補助可動部材１３ａと補助台座接続部材１９ａには同一の第二の可動部材接続部材１６₂がネジ止めされて、第一の補助可動部材１３ａと補助台座接続部材１９ａは互いに固定され、第一の補助台座１１ａと補助可動部材接続部材１９ｂには同一の第二の台座接続部材１７₂がネジ止めされて、第一の補助台座１１ａと補助可動部材接続部材１９ｂは互いに固定されている。また、隣り合う第二、第三の補助可動部材１３ｂ、１３ｃには同一の第三の可動部材接続部材１６₃がネジ止めされて、第二、第三の補助可動部材１３ｂ、１３ｃは互いに固定され、隣り合う第二、第三の補助台座１１ｂ、１１ｃには同一の第三の台座接続部材１７₃がネジ止めされて、第二、第三の補助台座１１ｂ、１１ｃは互いに固定されている。そのために、第一の可動部材接続部材１６₁と第一の台座接続部材１７₁だけを用いて固定された場合よりも、第一〜第三の補助可動部材１３₁〜１３₃を互いに固定する力と、第一〜第三の補助台座１１₁〜１１₃を互いに固定する力はそれぞれ強くなっている。 Furthermore, the first auxiliary movable member 13a and the auxiliary seat connection member 19a is identical second is screwed movable member connecting member 16 _2, the first auxiliary movable member 13a and the auxiliary seat connection member 19a is fixed to each other is, the first auxiliary seat 11a and the auxiliary movable member connecting member 19b ₂ the same second seat connection member 17 is screwed first auxiliary seat 11a and the auxiliary movable member connecting member 19b are fixed to each other ing. Further, the same third movable member connecting member 16 ₃ is screwed to the adjacent second and third auxiliary movable members 13b and 13c, and the second and third auxiliary movable members 13b and 13c are fixed to each other. is, the second adjacent third auxiliary base 11b, a third pedestal connecting member 17 ₃ identical to 11c are screwed, second and third auxiliary seat 11b, 11c are fixed to each other . Therefore, the first movable member connecting member 16 ₁ than when it is fixed with only _one first seat connection member 17, to fix the first to third auxiliary movable member _131-134 ₃ mutually The force and the force for fixing the first to third auxiliary pedestals 11 _{1 to} 11 ₃ to each other are stronger.

第三例のステージ装置１０ｃでは、全体の大きさが第一例のステージ装置１０ｂ全体の大きさと同じ場合には、第一〜第三のステージユニットは、第一例のステージ装置１０ａの第一、第二のステージユニットよりも小型に製作でき、より制作費や輸送費を低コストにできる。
第三例のステージ装置１０ｃの使用方法は第一例のステージ装置１０ａの使用方法と同様であり、説明を省略する。 In the stage device 10c of the third example, when the overall size is the same as the overall size of the stage device 10b of the first example, the first to third stage units are the first of the stage device 10a of the first example. It can be made smaller than the second stage unit, and production costs and transportation costs can be reduced.
The method of using the third example stage apparatus 10c is the same as the method of using the first example stage apparatus 10a, and a description thereof will be omitted.

第三例のステージ装置１０ｃでは、第一例のステージ装置１０ａと同様に、第一の補助駆動部１２₁の主ガイドと第二の補助駆動部１２₂の主ガイドは互いに平行にされて対面されている。
そのため、第一、第二の動力部１４₁、１４₂から第一、第二の補助駆動部１２₁、１２₂の主スライダに動力が伝達されても、基準面に平行で第一、第二の補助駆動部１２₁、１２₂が固定された二つの可動部材取付部を結ぶ線分に平行な方向の応力は可動部材１３の内部に発生せず、第一〜第三の可動部材接続部材１６₁〜１６₃のネジがゆるんだり、ひずみが生じたりしない。 In the stage device 10c of the third example, the main guide of the _first auxiliary drive unit 121 and the main guide of the second auxiliary drive unit 12 ₂ face each other in the same manner as the stage device 10a of the first example. Has been.
Therefore, even if power is transmitted from the first and _second power units 14 ₁ and 14 ₂ to the main sliders of the first and second auxiliary drive units 12 ₁ and 12 ₂ , the first and second power units 14 ₁ and 14 ₂ are parallel to the reference plane. The stress in the direction parallel to the line segment connecting the two movable member mounting portions to which the two auxiliary driving portions 12 ₁ and 12 ₂ are fixed is not generated in the movable member 13, and the first to third movable member connections are made. The screws of the members 16 _{1 to} 16 ₃ are not loosened or distorted.

また、基準面に平行で第一、第二の動力部１４₁、１４₂が固定された二つの固定箇所を結ぶ線分に平行な方向の応力は台座１１の内部に発生せず、第一〜第三の台座接続部材１１₁〜１１₃のネジがゆるんだり、ひずみが生じたりしない。 Further, the stress in the direction parallel to the line segment connecting the two fixed portions where the first and second power units 14 ₁ and 14 ₂ are fixed parallel to the reference plane is not generated in the pedestal 11, and the first -Screws of the third pedestal connecting members 11 _{1 to} 11 ₃ are not loosened or distorted.

＜第四例のステージ装置の構造＞
本発明の第四例のステージ装置の構造を説明する。
図１０は第四例のステージ装置の平面図である。第四例のステージ装置１０ｄのうち、第三例のステージ装置１０ｃと同じ構造の部分には同じ符号を付して、説明を省略する。 <Structure of Stage Device of Fourth Example>
The structure of the stage device of the fourth example of the present invention will be described.
FIG. 10 is a plan view of the stage device of the fourth example. Of the stage device 10d of the fourth example, parts having the same structure as the stage device 10c of the third example are denoted by the same reference numerals and description thereof is omitted.

第四例のステージ装置１０ｄの駆動部は第一〜第四の補助駆動部１２₁〜１２₄を有している。すなわち、第四例のステージ装置１０ｄでは、第三例のステージ装置１０ｃに比べて、第四の補助駆動部１２₄が追加されている。
台座１１は第一〜第三の補助台座１１ａ〜１１ｃを有し、可動部材１３は第一〜第三の補助可動部材１３ａ〜１３ｃを有している。すなわち、第二例のステージ装置１０ｂに比べて、第三の補助台座１１ｃと第三の補助可動部材１３ｃが追加されている。 Driver of the fourth example of the stage device 10d has a first to fourth auxiliary driving unit 12 ₁ to 12 _4. That is, in the fourth example of the stage receiver 10d, the compared to the third example of the stage apparatus 10c, a fourth auxiliary driving unit 12 ₄ is added.
The pedestal 11 has first to third auxiliary pedestals 11a to 11c, and the movable member 13 has first to third auxiliary movable members 13a to 13c. That is, a third auxiliary pedestal 11c and a third auxiliary movable member 13c are added as compared with the stage device 10b of the second example.

第四の補助駆動部１２₄の構造は第一〜第三の補助駆動部１２₁〜１２₃と同じであり、説明を省略する。
台座１１には、第四の補助駆動部１２₄の主取付部２８（本実施例では主スライダ）に、第四の補助駆動部１２₄の主ガイドと平行な向きの動力を伝達する第四の動力部１４₄が設けられている。 The structure of the fourth auxiliary driving unit 12 ₄ is the same as that of the first to third auxiliary driving units 12 _{1 to} 12 ₃ , and a description thereof will be omitted.
A fourth power is transmitted to the base 11 to transmit power in a direction parallel to the main guide of the fourth auxiliary drive portion 12 _{4 to} the main mounting portion 28 (main slider in this embodiment) of the fourth auxiliary drive portion 12 ₄ . The power unit 14 ₄ is provided.

本実施例では、第一の補助駆動部１２₁が第一の補助可動部材１３ａと第一の補助台座１１ａとの間に設けられて第一のステージユニットが構成され、第二、第四の補助駆動部１２₂、１２₄が第二の補助可動部材１３ｂと第二の補助台座１１ｂとの間に設けられて第二のステージユニットが構成され、第三の補助駆動部１２₃が第三の補助可動部材１３ｃと第三の補助台座１１ｃとの間に設けられて第三のステージユニットが構成されている。 In this embodiment, the first stage unit first auxiliary drive unit 12 ₁ is provided between the first auxiliary movable member 13a and the first auxiliary seat 11a is formed, the second, the fourth Auxiliary driving units 12 ₂ and 12 ₄ are provided between the second auxiliary movable member 13b and the second auxiliary pedestal 11b to constitute a second stage unit, and the third auxiliary driving unit 12 ₃ is the third one. A third stage unit is provided between the auxiliary movable member 13c and the third auxiliary base 11c.

第一、第三のステージユニットの構成は、第三例のステージ装置１０ｃの第一、第三のステージユニットの構成と同様であり、説明を省略する。
第二のステージユニットでは、第二の補助駆動部１２₂の主ガイドと第四の補助駆動部１２₄の主ガイドが、互いに所定角度（ここでは９０°）を成す向きに向けられた状態で、第二の補助台座１１ｂの二つの台座取付部にそれぞれ固定されている。また、第二の補助駆動部１２₂の第二の回転部材と第四の補助駆動部１２₄の第二の回転部材は、第二の補助可動部材１３ｂの二つの可動部材取付部にそれぞれ固定されている。 The configuration of the first and third stage units is the same as the configuration of the first and third stage units of the stage device 10c of the third example, and a description thereof will be omitted.
While in the second stage unit, the main guide of the second auxiliary drive unit 12 ₂ of the main guide and the fourth auxiliary drive unit 12 _4, directed in a direction from each other forming a predetermined angle (90 ° in this case) The second auxiliary base 11b is fixed to the two base mounting portions. The second second auxiliary drive unit 12 ₂ of the rotary member and the fourth of the second rotary member of the auxiliary drive unit 12 _4, respectively fixed to the two movable member mounting portion of the second auxiliary movable member 13b Has been.

第一〜第三のステージユニットは、第一〜第三の補助台座１１ａ〜１１ｃの台座取付部が同一の平面内に位置し、第一〜第三の補助可動部材１３ａ〜１３ｃの可動部材取付部が同一の平面内に位置するように配置され、第一、第二の補助駆動部１２₁、１２₂の主ガイドが互いに平行にされて対面され、第三、第四の補助駆動部１２₃、１２₄の主ガイドが互いに平行にされて対面された状態で、隣り合う第一〜第三の補助可動部材１３ａ〜１３ｃには同一の第一の可動部材接続部材１６₁がネジ止めされて、第一〜第三の補助可動部材１３ａ〜１３ｃは互いに固定され、隣り合う第一〜第三の補助台座１１ａ〜１１ｃには同一の第一の台座接続部材１７₁がネジ止めされて、第一〜第三の補助台座１１ａ〜１１ｃは互いに固定され、第四例のステージ装置１０ｄが構成されている。 In the first to third stage units, the base mounting portions of the first to third auxiliary bases 11a to 11c are located in the same plane, and the first to third auxiliary movable members 13a to 13c are attached to the movable members. Are arranged in the same plane, the main guides of the first and second auxiliary driving units 12 ₁ and 12 ₂ are faced in parallel with each other, and the third and fourth auxiliary driving units 12 _3, 12 in a state in which the main guide is facing are parallel to each other of _4, are first to third identical first is screwed movable member connecting member 16 ₁ to the auxiliary movable member 13a~13c adjacent The first to third auxiliary movable members 13a to 13c are fixed to each other, and the same first pedestal connecting member 17 ₁ is screwed to the adjacent first to third auxiliary pedestals 11a to 11c, The first to third auxiliary bases 11a to 11c are fixed to each other, and the fourth example Stage device 10d is constituted.

このとき、第三、第四の補助駆動部１２₃、１２₄の主ガイドは第一、第二の補助駆動部１２₁、１２₂の主ガイドに対して所定角度（ここでは９０°）を成す向きに向けられている。
第四例のステージ装置１０ｄの使用方法は第二例のステージ装置１０ｂの使用方法と同様であり、説明を省略する。 At this time, the main guides of the third and fourth auxiliary driving units 12 ₃ and 12 _{4 make} a predetermined angle (90 ° here) with respect to the main guides of the first and second auxiliary driving units 12 ₁ and 12 _2. It is directed in the direction it is made.
The method of using the stage device 10d of the fourth example is the same as the method of using the stage device 10b of the second example, and a description thereof will be omitted.

第四例のステージ装置１０ｄでは、第二例のステージ装置１０ｂと同様に、第一の補助駆動部１２₁の主ガイドと第二の補助駆動部１２₂の主ガイドは互いに平行にされて対面され、第三の補助駆動部１２₃の主ガイドと第四の補助駆動部１２₄の主ガイドは互いに平行にされて対面されている。 In the fourth example of the stage receiver 10d, the similar to the second example of the stage device 10b, and the first auxiliary drive unit 12 ₁ of the main guide and the second main guide auxiliary drive unit 12 ₂ are parallel to each other face-to-face is the main guide of the third auxiliary driving portion 12 ₃ of the main guide and the fourth auxiliary drive unit 12 ₄ is facing are parallel to each other.

そのため、第一〜第四の動力部１４₁〜１４₄から第一〜第四の補助駆動部１２₁〜１２₄の主スライダに動力が伝達されても、基準面に平行で第一、第二の補助駆動部１２₁、１２₂が固定された二つの可動部材取付部を結ぶ線分に平行な方向の応力、又は基準面に平行で第三、第四の補助駆動部１２₃、１３₄が固定された他の二つの可動部材取付部を結ぶ線分に平行な方向の応力は可動部材１３の内部に発生せず、第一〜第三の可動部材接続部材１６₁〜１６₃のネジがゆるんだり、ひずみが生じたりしない。 Therefore, even if power is transmitted from the first to fourth power units 14 _{1 to} 14 ₄ to the main sliders of the first to fourth auxiliary drive units 12 _{1 to} 12 ₄ , the first and fourth power units are parallel to the reference plane. Stress in a direction parallel to the line segment connecting the two movable member mounting portions to which the two auxiliary drive portions 12 ₁ and 12 ₂ are fixed, or third and fourth auxiliary drive portions 12 ₃ and 13 parallel to the reference plane. Stress in a direction parallel to the line segment connecting the other two movable member mounting portions to which ₄ is fixed is not generated in the movable member 13, and the first to third movable member connecting members 16 _{1 to} 16 ₃ Screws are not loosened or distorted.

また、基準面に平行で第一、第二の動力部１４₁、１４₂が固定された二つの固定箇所を結ぶ線分に平行な方向の応力、又は基準面に平行で第三、第四の動力部１４₃、１４₄が固定された二つの固定箇所を結ぶ線分に平行な方向の応力は台座１１の内部に発生せず、第一〜第三の台座接続部材１１₁〜１１₃のネジがゆるんだり、ひずみが生じたりしない。 In addition, the stress in the direction parallel to the line segment connecting the two fixed portions where the first and second power units 14 ₁ and 14 ₂ are fixed parallel to the reference plane, or the third and fourth parallel to the reference plane. The stress in the direction parallel to the line segment connecting the two fixed portions to which the power parts 14 ₃ and 14 ₄ are fixed is not generated in the pedestal 11, and the first to third pedestal connection members 11 _{1 to} 11 _{3 are} not generated. The screws will not loosen or become distorted.

１０ａ、１０ｂ、１０ｃ、１０ｄ……ステージ装置
１１……台座
１１ａ〜１１ｄ……補助台座（第一〜第四の補助台座）
１２₁〜１２₄……第一〜第四の補助駆動部
１３……可動部材
１３ａ〜１３ｄ……補助可動部材（第一〜第四の補助可動部材）
１４₁〜１４₄……第一〜第四の動力部
２１₁〜２１₄……主ガイド
２２₁〜２２₄……主スライダ
２３₁〜２３₄……副ガイド
２４₁〜２４₄……副スライダ
２５₁〜２５₄……第一の回転部材
２６₁〜２６₄……第二の回転部材
２７……取付部材
２７ａ……第一の取付部
２７ｂ……第二の取付部
２８……主取付部
10a, 10b, 10c, 10d ... Stage device 11 ... Pedestal 11a-11d ... Auxiliary pedestal (first to fourth auxiliary pedestal)
12 _{1 to} 12 ₄ ... First to fourth auxiliary drive units 13... Movable members 13 a to 13 d... Auxiliary movable members (first to fourth auxiliary movable members)
14 _{1 to} 14 ₄ ...... First to fourth power units 21 _{1 to} 21 ₄ ...... Main guide 22 _{1 to} 22 ₄ ...... Main slider 23 ₁ to 23 ₄ ...... Sub guide 24 _{1 to} 24 ₄ ...... Sub Slider 25 _{1 to} 25 ₄ ...... First rotating member 261 _{1 to} 26 ₄ ...... Second rotating member 27 ...... Mounting member 27 a ...... First mounting portion 27 b ...... Second mounting portion 28 ...... Main Mounting part

Claims

A pedestal,
A drive unit provided on the pedestal;
A movable member provided in the drive unit,
The drive unit is configured to move the movable member in two directions parallel to one plane and at a predetermined angle, and to rotate about a rotation axis perpendicular to the one plane. A device,
The drive unit has first to third auxiliary drive units,
The first to third auxiliary drive units are
A linear main guide, and a main slider attached to the main guide so as to be movable along the main guide;
A linear sub-guide, and a sub-slider attached to the sub-guide so as to be movable along the sub-guide;
First and second rotating members configured such that their center axes coincide with each other and can rotate with respect to each other about the center axis;
Each with
One of the sub guide and the sub slider and one of the first and second rotating members are fixed to each other, and the other of the sub guide and the sub slider is the first. And the other of the first and second rotating members is the second mounting portion to constitute the mounting member,
In a state where the main guide is parallel to the one plane, one of the main guide and the main slider is provided on the pedestal, and the other is a main mounting portion.
The sub guide is parallel to the one plane and forms the predetermined angle with respect to the main guide, and the central axes of the first and second rotating members are perpendicular to the one plane. Then, one of the first and second mounting portions of the mounting member is fixed to the main mounting portion, the other is fixed to the movable member,
The main guides of the first and second auxiliary drive units are parallel to each other and face each other, and the main guide of the third auxiliary drive unit is the main guide of the first and second auxiliary drive units. Directed toward the predetermined angle,
The pedestal transmits first to third powers in a direction parallel to the main guides of the first to third auxiliary drive units to the main attachment portions of the first to third auxiliary drive units. A stage device provided with a power section of
The movable member has a plurality of auxiliary movable members, and the pedestal has a plurality of auxiliary pedestals,
The first auxiliary driving unit is provided between one auxiliary movable member and one auxiliary base, and one or both of the second and third auxiliary driving units are the other auxiliary movable members. And a stage device provided between the other auxiliary base.

A fourth auxiliary drive unit having the same structure as the first to third auxiliary drive units;
The main guides of the third and fourth auxiliary driving parts are parallel to each other and face each other,
The fourth power unit that transmits power in a direction parallel to the main guide of the fourth auxiliary driving unit to the main mounting portion of the fourth auxiliary driving unit is provided on the base. The stage apparatus according to 1.

The movable member has a movable member connecting member, the pedestal has a pedestal connecting member,
Two adjacent auxiliary movable members are provided with the same movable member mounting member, and the two adjacent auxiliary movable members are fixed to each other,
The stage apparatus according to claim 1, wherein the two adjacent auxiliary bases are provided with the same base connecting member, and the two adjacent auxiliary bases are fixed to each other.