JPH0899243A - Vertical/horizontal moving and turning table mechanism - Google Patents

Abstract

PURPOSE: To simplify a mechanism which permits a table to be moved in the vertical and horizontal directions and turned by attaining the mechanism without stacking stages provided with various functions. CONSTITUTION: A supporting unit U is constituted by rotatably-jointing respective traveling members of a pair of direct-acting guide bearings consisting of guide members 1a, 1b and traveling members 2a, 2b. At least three supporting units are disposed between a base 5 and a table 6. With the traveling members of the respective supporting units orthogonal to each other, the guide members are fixed onto the base 5 and the table 6 respectively. The base guide members of at least two supporting units are made to face each other and disposed in parallel. The base guide member of at least the other supporting unit is disposed at a right angle to the base guide member, and a straight feed mechanism is formed between the traveling members of at least two base guide members disposed in parallel and the base, and between the traveling member of at least one base guide member disposed at a right angle to those and the base.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vertical / horizontal moving rotary table mechanism applicable to a positioning stage or the like in a precision measuring instrument, a precision processing machine, a precision assembling apparatus or the like.

[0002]

2. Description of the Related Art In a conventional mechanism of a table capable of vertical and horizontal movement and rotation, a so-called XYθ table, stages of respective movement mechanisms in three axial directions of X, Y and θ are stacked from a base to support the table on the upper side. Is common.

[0003]

The above-mentioned conventional structure has the following problems. There are many parts. The stacking increases the height from the base to the table, which is unstable, and the upper stage is sequentially affected by the accuracy of the lower stage. It is difficult to ensure the assembly accuracy when combining the three axes. It is difficult to detect the absolute position of the table. Since it is necessary to configure a drive mechanism between each stage and the cable or the like is dragged when the upper stage is driven, a failure due to damage to the cable or the like is likely to occur. Therefore, the present invention aims to solve such a problem.

[0004]

In order to solve the above-mentioned problems, according to the present invention, first of all, each moving member of a pair of linear guide bearings consisting of a guide member and a moving member is rotatable. To form a support unit, at least three support units are arranged between the base and the table, and the guide members are fixed to the base and the table in a state where the moving members of the respective support units are orthogonal to each other. At this time, the base-side guide members of at least two support units are arranged to face each other in parallel, and the base-side guide members of at least one other support unit are arranged in a direction perpendicular to the base-side guide members. A linear feed mechanism is provided between the moving members and the bases of at least two base-side guide members that are arranged in parallel, and between the moving members and the bases of at least one base-side guide member that are arranged at a right angle thereto. Structure It is intended to propose a the vertical and horizontal movement turning table mechanism.

According to the present invention, in the above-mentioned first structure, the support unit arranged between the base and the table is a set of two support units in which base-side guide members are arranged in parallel, and a pair of these support units. It is proposed to configure the guide member and one support unit in which the base-side guide member is arranged at right angles, and to form a linear feed mechanism between the base-side moving member and the base of each support unit.

Further, according to the present invention, in the above first configuration,
The support unit arranged between the base and the table is a set of two support units in which the base guide members are arranged in parallel, and two sets in which the base guide members are arranged at right angles to these base guide members. It is proposed that a linear feed mechanism is configured between a base-side moving member and a base of at least three support units selected from the set of support units.

Furthermore, the present invention is based on the above first structure.
It is proposed that the table side guide members of the two support units in which the base side guide members are arranged in parallel are integrally configured.

Next, according to the present invention, as a second structure, a moving unit of a pair of linear motion guide bearings, each of which is composed of a guide member and a moving member, is rotatably coupled to form a supporting unit.
In a state where the three support units are arranged between the base and the table, and the moving members of the respective support units are orthogonal to each other,
The guide members are fixed to the base and the table, respectively. At this time, the base-side guide members of the respective support units are arranged in a tangential direction of a circle centered on the turning center of the table, and the base-side guide members are arranged. We propose a vertical / horizontal moving swivel table mechanism with a linear feed mechanism between the moving member and the base.

According to the present invention, in the above first and second configurations, the moving member is movably supported by a bearing across the guide member, and each moving member of the pair of linear motion guide bearings is provided respectively. It is proposed that the support unit be rotatably coupled on the side opposite to the guide member to form a support unit, or that the moving member be fitted on the outside of the guide member and movably supported by a bearing.

Next, in the present invention, as a third structure, the moving member of the linear guide bearing including the guide member and the moving member and the moving member of the linear feed mechanism including the drive shaft and the moving member are rotatable. The support unit is coupled to form three support units, the three support units are arranged between the base and the table, and the guide members are fixed to the table and the drive shaft is provided on the base while the moving members of the respective support units are orthogonal to each other. Fixed to
In this case, a vertical and horizontal movement swivel table mechanism is proposed in which the drive shafts of the two support units are opposed to each other and arranged in parallel, and the drive shafts of the other support units are arranged in a direction perpendicular to the drive shafts.

The present invention proposes that, in the above-mentioned third structure, the guide members on the table side of the two support units in which the drive shafts are arranged in parallel are integrally formed.

Further, according to the present invention, as a fourth structure, a moving member of the linear guide bearing including a guide member and a moving member,
A moving member of a linear feed mechanism composed of a drive shaft and a moving member is rotatably coupled to form a supporting unit, and three supporting units are arranged between a base and a table. It is proposed to fix the guide members to the base and the table, respectively, in the orthogonal state, and arrange the drive shafts of the respective support units in the tangential direction of a circle around the turning center of the table at this time.

In the present invention, in the third and fourth constructions, the moving member is movably supported by the bearing across the guide member, and each moving member of the pair of linear motion guide bearings is provided respectively. It is proposed that the support unit be rotatably coupled on the side opposite to the guide member to form a support unit, or that the moving member be fitted on the outside of the guide member and movably supported by a bearing.

Further, in the present invention, in the above-mentioned first to fourth structures, the linear feed mechanism is constituted by a ball screw and a nut, or a round bar and a roller pressed against the round bar are supported as the linear friction feed mechanism. It is proposed that it is composed of a cylindrical body.

[0015]

In the initial state of the first construction, when the respective base-side moving members of the supporting unit in which the base-side guiding members are arranged in parallel are moved equidistantly by the linear feed mechanism, the base-side moving members are moved. The table is driven in the above direction via the table side moving member rotatably coupled to the member and the table side guide member.

When the table is driven in this direction, the table side guide member of the support unit with the base side moving member oriented at a right angle to this direction is driven together with the table. Because it is suitable for
Even if the table-side moving member is fixed to the base via the base-side moving member and the base-side guiding member, the movement is not hindered, and therefore the table moves smoothly in the driving direction.

On the contrary, when the base side moving member of the latter support unit is driven by the linear feed mechanism in the direction perpendicular to the driving direction, this time, the base unit side guide member of the support unit is arranged in parallel. Since each of the table side guide members faces the driving direction, the table moves smoothly in the driving direction even when the table side moving member is fixed to the base. In this way, by the above operation, the table can be moved in the vertical and horizontal directions, that is, the XY directions.

Next, when the base-side moving members of the supporting unit in which the base-side guiding members are arranged in parallel are moved in opposite directions by the linear feed mechanism, the base-side moving members and the table-side moving members are moved to each other. Since the straight line connecting the parts gradually turns, the table side guide member also turns, and the table turns. The tilt of the table-side guide member is absorbed by the relative rotation of the table-side moving member and the base-side moving member, and the expansion of the distance between the moving members due to the tilt causes the table-side moving member and the table-side guiding member to expand. Can be absorbed by relative motion with. In this way the table turns,
That is, it can move in the θ direction.

In the second structure, the base side moving member of any one of the supporting units is moved by the linear feed mechanism to move the table in this direction, and at the same time, the other two supporting members accompanying the movement of the table are moved. By following the movement of the table side guide member of the unit and moving the base side movement member of these two support units by the linear feed mechanism, the table can be smoothly moved in the above-mentioned direction. On the contrary, by simultaneously moving the base-side moving members of the latter two supporting units, the table can be moved in a direction perpendicular to the moving direction of the base-side moving member of the one supporting unit. At this time, since the table-side guide member of the support unit faces the moving direction, the movement of the table is not hindered even if the base-side moving member is not moved.

Next, the table can be turned by simultaneously moving the base side moving members of the three supporting units in the tangential direction of the same rotation direction. In this case, the rotating members of the respective supporting units are rotated. By the movement and the relative movement of the table-side guide member and the moving member, it is possible to absorb a change in the positional relationship between the members due to the turning. In this way, by the above operation, the table can be moved in the XYθ directions.

In the third and fourth configurations, the first and second configurations
The linear feed mechanism composed of the drive shaft and the moving member performs the functions of the linear feed mechanism and the linear motion bearing in the above construction, and the table is operated in the same manner as in the first and second constructions.
Can be moved in any direction.

[0022]

Embodiments of the present invention will now be described with reference to the drawings. 1 and 2 are perspective views showing an embodiment of a support unit which is a constituent element of a vertical and horizontal movement turning table mechanism of the present invention,
FIG. Reference numeral U indicates a support unit, which is composed of a pair of linear motion guide bearings a and b. The linear motion guide bearings a and b are the guide members 1
And a moving member 2 movably supported by bearings along the guide member 1. (Each member of each linear motion guide bearing is attached with subscripts a and b depending on necessity of distinction.) In this embodiment, the moving member 2 is movably supported by the bearing across the guide member 1. Since such a linear motion guide bearing has a well-known configuration, detailed description and illustration of the bearing and the like are omitted. In addition to this, as the linear guide bearing, a structure in which a moving member is fitted to the outside of the guide member and movably supported by the bearing can be applied.

The support unit U shown in FIG. 1 is constructed by connecting the moving members 2a, 2b of the pair of linear motion guide bearings a, b rotatably on the opposite side to the guide members 1a, 1b, respectively. are doing. In the structure shown in FIG. 2, the moving member 2a
Side to the moving member 2b side, the stepped bolt 3 is tightened and the bearing 4 is mounted between the stepped bolt 3 and the moving member 2a, whereby the moving members 2a and 2b are rotatably coupled. .

In the present invention, such a supporting unit U
By arranging at least three of them between the base 5 and the table 6, a vertical and horizontal movement turning mechanism of the table 6 with respect to the base 5 is configured. That is, in the present invention, at least three support units U are arranged as described later, and in the state where the moving members 2a and 2b are orthogonal to each other, the guide member 1a of the lower linear motion guide bearing a in the drawing is used as a base. 5
And the guide member 1 of the upper linear motion guide bearing b.
Fix b to table 6. Therefore, hereinafter, reference numeral a indicates the base side, and b indicates the table side.

3 to 5 show the first arrangement of the supporting unit U.
In this embodiment, three support units Uc, Ud and Ue are arranged to form a table mechanism. That is, in this embodiment, two support units U
c and Ud are arranged in parallel with the respective base-side guide members 1a facing each other with a predetermined distance therebetween, and the base-side guide members 1a of the other one support unit Ue are the same as those of the support units Uc and Ud. It is arranged so as to be in a direction perpendicular to the base side guide member 1a, and is arranged so as to be positioned on three sides of a substantially square shape. Therefore, the table side guide member 1b of the support unit Ue is arranged in a direction parallel to the base side guide member 1a of the other support units Uc and Ud, and similarly, the table side guide member 1b of the support units Uc and Ud is arranged. The support unit Ue is arranged in a direction parallel to the base side guide member 1a. In such an arrangement, as described above, the base-side guide member 1a is fixed to the base 5, and the table-side guide member 1b is fixed to the table 6. 3 to 5, the table side guide member 1b and the table 6 are indicated by a two-dot chain line. Further, as shown in these figures, in this embodiment, the table side guide members 1b of the support units Uc and Ud are integrally formed. Of course, these table side guide members 1b can be constructed separately.

The base 5 has respective support units Uc, U
A ball screw 7 is installed side by side on the base side guide member 1a of d and Ue, and a motor 8 for driving the ball screw 7 to rotate.
And a nut 9 screwed onto the ball screw 7 is connected to the base-side moving member 2a by a connecting member 10, which form a linear feed mechanism between the base-side moving member 2a and the base 5. I am configuring. See also FIG. 2 for this configuration.

FIG. 3 shows the initial state of the table 6, and the position of this state is represented by a symbol. In this state, the motors 8 of the supporting units Uc and Ud are operated in the same manner to move the nut 9 at the equal distance A as shown by the solid line in FIG.
When it is moved forward, the base side moving member 2a moves forward along the base side guiding member 1a, and at the same time, the table side moving member 2b also moves forward. At this time, since the table side guide member 1b fixed to the table 6 is in the direction orthogonal to the forward direction, it moves forward together with the table side moving member 2b, and therefore the table 6 also moves forward. When the table 6 moves forward, the table side guide member 1b of the support unit Ue also moves forward together with it, but since the table side guide member 1b is in the forward direction, the table side moving member 2b is fixed to the base 5. Even in a state, it does not hinder the progress. Therefore, the table 6 can be smoothly moved in the forward direction by feeding the base-side moving member 2a of the support units Uc and Ud by the linear feed mechanism at equal distances. The position in the advanced state is represented by a symbol. The table can be smoothly moved in the backward direction by the reverse operation.

Next, in a state where the table 6 is advanced by a predetermined distance A, the operation of the linear feed mechanism relating to the support units Uc and Ud is stopped, and the linear feed mechanism of the support unit Ue is operated to move to the base side. When the member 2a is moved along the base side guide member 1a in the left direction in the figure by a distance B, the table side moving member 2b drives the table side guide member 1a to move the table 6 in the left direction in the figure.
The position represented by the code is reached. When the table 6 moves to the left, the table-side guide members 1b of the support units Uc and Ud also move to the left along with it, but since these table-side guide members 1b are in the left direction, the table-side moving member Even if 2b is fixed to the base 5, it does not hinder the movement in this direction. Therefore, by feeding the base-side moving member 2a of the support unit Ue to the left by the distance B by the linear feed mechanism, the table 6 can be smoothly moved to the left, and the reverse operation causes the table to move backward. It can be moved smoothly.

Next, as shown by the solid line in FIG. 5 in the state of FIG. 3, the above-described linear feed mechanism of the supporting units Uc and Ud advances the base side moving member 2a on the right side in the figure by the distance A, and The base side moving member 2a on the left side has a distance A
Just retreat. By such an operation, the table side guide member 1b of the support units Uc and Ud is rotated counterclockwise by the angle a from the initial state as shown in FIG. 5, and the table 6 is rotated together therewith. The position of the table 6 in the turned state is shown by a symbol. When the table-side guide member 1b of the support units Uc and Ud rotates in this way, the distance between these table-side moving members 2b becomes longer than the initial distance L, and with respect to the base-side guide member 1a. Of the table side moving member 2b and the guide member 1b, and the change of the angle can be absorbed by the relative rotation of the base side and table side moving members 2a and 2b. it can. Further, the table side of the support unit Ue and the base side guide member 1 accompanying the turning of the table 6
The change in the angle of b and 1a is absorbed by the relative rotation of the table-side and base-side moving members 2b and 2a, and when the distance changes, the relative movement of the table-side moving member 2b and the guide member 1b. Can be absorbed by.

As described above, in the embodiment shown in FIGS. 3 to 5, the table can be moved in the vertical and horizontal directions, that is, the XY directions and the turning direction, that is, the θ direction by the three support units.

FIG. 6 shows a second embodiment of the arrangement of the support unit U. In this embodiment, a third support unit Uc, Ud, Ue similar to the embodiment of FIGS. In addition to the supporting units Uf of No. 3, these supporting units are arranged so as to be located on each side of the rectangle. The fourth support unit Uf does not form a linear feed mechanism, but is configured as a means for uniformly supporting the load of the table 6. Then, the fourth support unit Uf
Is the relative movement between the moving members 2a, 2b and the guide members 1a, 1b, and the moving member, which is the change in the distance and angle when the other three supporting units Uc, Ud, Ue move in the XYθ directions. It can be absorbed by the mutual rotation of 2a and 2b.

7 to 9 show a third arrangement of the supporting unit U.
In this embodiment, three support units Uc, Ud, Ue are arranged to form a table mechanism as in the first embodiment. That is, in this embodiment, the respective base side guide members 1a of the respective support units Uc, Ud, Ue are arranged on the respective sides of the triangle in the tangential direction of the circle R centering on the turning center O of the table 6. In addition, a linear feed mechanism is configured between each base-side moving member 2a and the base 5 corresponding to each support unit Uc, Ud, Ue. The linear feed mechanism may be a ball screw and a nut as in the embodiment shown in FIGS.

The solid line in FIG. 7 shows the positional relationship of the support units when the table 6 is in the initial state, and the position of the table 6 in this state is represented by a symbol.
In this state, when the base-side moving member 2a of the support unit Ue is moved rightward in the figure by the linear feed mechanism as shown by the chain double-dashed line in FIG. 7, the table-side guide member 1b moves rightward in the figure as described above. By moving, this part of the table 6 is moved to the right in the figure. At the same time, as indicated by the chain double-dashed line, the base-side moving member 2a of each of the support units Uc and Ud is moved along the base-side guide member 1a by the linear feed mechanism in the lower right direction and the upper right direction in the figure, respectively. When moved, each of the table side guide members 1b moves to the right in the figure in the tilted state. If the moving distance per time is adjusted by the linear feed mechanism, the table 6 can move in parallel to the right. Can be reached, and the position shown on behalf of is reached. The table 6 can be moved leftward by the reverse operation.
The displacement of the positional relationship between the table 6 and the base-side moving member 2a of each support unit Uc, Ud during such movement is absorbed by the relative movement of the table-side guide member 1b and the moving member 2b.

Similar to FIG. 7, the solid line in FIG. 8 shows the positional relationship of the supporting units when the table 6 is in the initial state. In this state, the supporting units Uc and Ud are indicated by two-dot chain lines. When each base side moving member 2a is moved along the base side guide member 1a by the linear feed mechanism in the lower right direction and the lower left direction in the figure by adjusting the moving distance per unit time, the respective table side is moved. The guide member 1b moves downward in the drawing in the inclined state, and the table 6 can be moved in parallel downward by adjusting the moving distance per unit time by the linear feed mechanism. Reach the position shown. The table 6 can be moved upward by the reverse operation. The displacement of the positional relationship between the table 6 and the base-side moving member 2a of the support unit Ue during such movement is absorbed by the relative movement of the table-side guiding member 1b and the table-side moving member 2b facing in the moving direction. To be done.

Further, the solid line in FIG. 8 shows the positional relationship of the supporting units when the table 6 is in the initial state as in FIG. 7, and in this state, as shown by the two-dot chain line, all supporting units Uc , Ud, and Ue of the base-side moving member 2a are adjusted by the linear feed mechanism along the base-side guide member 1a in the leftward direction, the lower rightward direction, and the rightward direction in the figure, respectively. When moved, these base-side guide members 1a are arranged in the tangential direction of a circle centered on the desired center of rotation of the table 6, and therefore the table-side guide member 1b is arranged in the radial direction passing through the center of the circle. Therefore, the table 6 turns around the center of the circle together with the table side guide member 1b. The change in the angle formed by the base side guide member 1a and the table side guide member 1b due to the turning is absorbed by the mutual rotation of the moving members 2a and 2b.

As described above, in the embodiment shown in FIGS. 7 to 9, the table is rotated by the three support units in the vertical and horizontal directions, that is, in the XY directions, similarly to the embodiment shown in FIGS. It is possible to move in the direction, that is, the θ direction.

Next, FIGS. 10 and 11 show an embodiment in which the vertical / horizontal moving and turning table mechanism of the present invention is constituted by a supporting unit having a structure different from that of the supporting unit shown in FIG. In this embodiment, first, the support unit V is similar to one of the constituent elements of the support unit U described above, the moving member 2 of the linear guide bearing a including the guide member 1 and the moving member 2, and the drive shaft 11. The moving member 12 of the linear feed mechanism g composed of the moving member 12 and the moving member 12 is rotatably coupled to form a support unit V. The linear feed mechanism g may have the above-described configuration. In the configuration shown in FIG. 11, the bearing 15 is mounted on the embedded bolt 13 protruding from the moving member 2 to the moving member 12 side via the collar 14 and the nut 16 is tightened from the moving member 12 side to move the moving member 2. 12 are rotatably connected.

In the embodiment shown in FIG. 10, at least three supporting units V having the above-mentioned structure are provided between the base 5 and the table 6.
And the moving members 2 and 12 are orthogonal to each other, the lower drive shaft 11 in the drawing is fixed to the base 5, and the upper guide member 1 is fixed to the table 6 to move vertically and horizontally. Configure the mechanism. At this time, the support unit V
As for the arrangement method, the same arrangement method as described above when the support unit U is used can be applied.

That is, FIG. 10 shows an embodiment in which the support unit V is arranged in the same manner as the support unit U in the embodiment shown in FIGS. In this embodiment, the moving member 12 and the drive shaft 11 guiding and moving the moving member 12 directly constitute a linear feed mechanism, and therefore the moving member 12 is directly moved by the drive shaft 11. The vertical and horizontal movements and the turning operation are the same as those in the above-described embodiments of FIGS. 3 to 5, except for the way of moving the moving member 12 as described above, and a description thereof will be omitted.

As described above, the support unit V can be arranged in the same manner as the above-mentioned arrangement when the support unit U is used. Similar to FIGS. 7 to 9, the drive shaft 11 may be arranged on each side of the triangle in the tangential direction of a circle centered on the turning center O of the table 6.

[0041]

Since the present invention is as described above, there are the following effects by solving the problems of the conventional techniques described above. The number of parts from the base to the table is small. Since the stages with vertical and horizontal movement and turning functions are not stacked individually, the height from the base to the table is lowered, the operation is stable, and the accuracy of the upper stage affects the accuracy of the lower stage. There is no such thing as receiving. It is easy to ensure the assembly accuracy when combining XYθ. It is easy to detect the absolute position of the table. Since the linear feed mechanism as the drive mechanism is configured only on the base side, the cable or the like is not dragged during the movement of the table, and therefore the failure due to the damage of the cable or the like is unlikely to occur.

[Brief description of drawings]

FIG. 1 is a perspective view showing a first embodiment of a support unit which is a constituent element of a vertical / horizontal movement turning table mechanism of the present invention.

FIG. 2 is a cross-sectional view showing a state in which the support unit of FIG. 1 is fixed to a base and a table.

FIG. 3 is an explanatory plan view showing a first embodiment of the arrangement of support units for constituting the vertical and horizontal movement swivel table mechanism of the present invention.

FIG. 4 is an explanatory plan view showing an example of a state in which the table is moved from the state of FIG.

5 is an explanatory plan view showing another example of a state in which the table is moved from the state of FIG.

FIG. 6 is an explanatory plan view showing a second embodiment of the arrangement of support units for constituting the vertical and horizontal movement turning table mechanism of the present invention.

FIG. 7 is an explanatory plan view showing a third embodiment of the arrangement of the support units for constituting the vertical and horizontal movement turning table mechanism of the present invention and an example of the operation thereof.

FIG. 8 is an explanatory plan view showing another example of the operation in the arrangement of FIG.

9 is an explanatory plan view showing still another example of the operation in the arrangement of FIG.

10 is an explanatory plan view showing an embodiment in which the vertical and horizontal movement swivel table mechanism of the present invention is configured by a support unit having a configuration different from that of the support unit shown in FIG. 1. FIG.

11 is a cross-sectional view of the main part of FIG.

[Explanation of symbols]

 1 guide member 2 moving member 3 stepped bolt 4 bearing 5 base 6 table 7 ball screw 8 motor 9 nut 10 connecting member 11 drive shaft 12 moving member 13 embedded bolt 14 collar 15 bearing 16 nut U, V support unit a base Table side b Table side O Turning center

Claims (14)

[Claims] 1. A support unit is configured by rotatably coupling respective moving members of a pair of linear motion guide bearings each including a guide member and a moving member, and at least three support units are provided between a base and a table. The guide members are fixed to the base and the table, respectively, in a state where the moving members of the respective support units are orthogonal to each other, and at this time, the base side guide members of at least two support units are opposed to each other and arranged in parallel. In addition, the base-side guide member of at least one other support unit is arranged in a direction perpendicular to the base-side guide member, and between the moving member and the base of at least two base-side guide members arranged in parallel. And a linear feed mechanism between the moving member of at least one base-side guide member and the base arranged at right angles thereto, and a vertical-horizontal moving swivel table mechanism. 2. A support unit arranged between the base and the table is a set of two support units in which base-side guide members are arranged in parallel, and a base-side guide member perpendicular to these base-side guide members. 2. A vertical / horizontal moving swivel table mechanism according to claim 1, wherein said supporting unit is provided with a linear feed mechanism between the base-side moving member and the base of each supporting unit. 3. A support unit arranged between a base and a table is a set of two support units in which base-side guide members are arranged in parallel, and a base-side guide member perpendicular to these base-side guide members. 2. A linear feed mechanism is configured between a base-side moving member and a base of at least three support units selected from the above. Vertical and horizontal movement swivel table mechanism described 4. The vertical / horizontal moving swivel table mechanism according to claim 1, wherein the table side guide members of the two support units in which the base side guide members are arranged in parallel are integrally formed. 5. A support unit is formed by rotatably coupling respective moving members of a pair of linear motion guide bearings each including a guide member and a moving member, and three supporting units are arranged between a base and a table. Then, the guide members are fixed to the base and the table in a state where the moving members of the respective support units are orthogonal to each other, and at this time, the base side guide members of the respective support units are centered around the turning center of the table. A vertical / horizontal moving swivel table mechanism, which is arranged in a tangential direction of a circle and has a linear feed mechanism between the moving members of the respective guide members on the base side and the bases. 6. The moving member is configured to be movably supported by a bearing across the guide member, and the moving members of the pair of linear motion guide bearings are rotatably coupled on the opposite side of the guide members. 6. A vertical / horizontal moving swivel table mechanism according to claim 1, wherein the supporting unit is configured by 7. The vertical / horizontal moving swivel table mechanism according to claim 1, wherein the moving member is fitted to the outside of the guide member and movably supported by a bearing. 8. A support unit is configured by rotatably coupling a moving member of a linear guide bearing including a guide member and a moving member and a moving member of a linear feed mechanism including a drive shaft and a moving member, The three support units are arranged between the base and the table, and the guide members are fixed to the table and the drive shaft is fixed to the base while the moving members of the respective support units are orthogonal to each other. The drive shafts of the support units are opposed to each other and arranged in parallel, and the drive shafts of the other support units are arranged in a direction perpendicular to the drive shafts. 9. A vertical / horizontal moving swivel table mechanism according to claim 8, wherein the table-side guide members of the two support units in which the drive shafts are arranged in parallel are integrally formed. 10. A support unit is configured by rotatably coupling a moving member of a linear motion guide bearing including a guide member and a moving member and a moving member of a linear feed mechanism including a drive shaft and a moving member, The three support units are arranged between the base and the table, and the guide members are respectively fixed to the base and the table in a state where the moving members of the respective support units are orthogonal to each other, and at this time, the drive shafts of the respective support units are fixed. The vertical and horizontal movement swivel table mechanism is characterized in that the table is arranged in a tangential direction of a circle centered on the swivel center of the table. 11. The moving member of the linear motion bearing is movably supported by the bearing across the guide member, and is rotatably connected to the moving member of the linear feed mechanism on the side opposite to the guide member so as to be rotatably supported. The vertical / horizontal movement turning table mechanism according to claim 8, wherein 12. The vertical / horizontal moving swivel table mechanism according to claim 8, wherein the moving member of the linear motion bearing is fitted to the outside of the guide member and movably supported by the bearing. 13. The vertical / horizontal moving swivel table mechanism according to claim 1, wherein the linear feed mechanism is constituted by a ball screw and a nut. 14. The vertical / horizontal moving swivel according to claim 1, wherein the linear feed mechanism is composed of a round bar as a linear friction feed mechanism and a cylindrical body supporting a roller pressed against the round bar. Table mechanism