JP4826149B2 - Long-stroke movable alignment stage - Google Patents

Description

  The present invention is capable of long stroke movement by moving a table, positioning an object on the table at a predetermined position, and moving a long stroke table by an exposure apparatus such as a semiconductor device, a printed circuit board, and a liquid crystal display element. It relates to an alignment stage.

A conventional stage apparatus incorporating a linear motor, which is a first example of the prior art, is capable of minute angular positioning using a linear motor, and is small and thin (see, for example, Patent Document 1).
Further, the conventional 2-axis parallel / single-axis turning motion guide mechanism and the 2-axis parallel / single-axis turning table device using the same can be easily assembled to the table and supported with high accuracy. There is also a table device using a two-axis parallel / one-axis turning motion guide mechanism (for example, see Patent Document 2).
JP 2002-328191 A (FIGS. 1 and 2) Japanese Patent Laid-Open No. 11-245128 (FIGS. 2, 4, and 5)

A stage apparatus incorporating the linear motor of Patent Document 1 as a conventional first example will be described.
FIG. 16 shows an embodiment of a stage device incorporating the linear motor of Patent Document 1, and is a front view seen from the X direction, which is one direction, and FIG. 17 is a plan view showing the stage device shown in FIG. .
In both figures, a stage device incorporating a linear motor is one in which a linear motor 13 for rotation is incorporated as a driving device for moving in a minute rotational direction between the rotary stage 103 and the second stage 102, In consideration of a small amount of angular positioning of the rotary stage 103, a movable magnet type linear motor is applied as the rotary linear motor 13, and the rotary linear motor 13 and the rotary stage 103, which is the rotation direction portion, are only a small amount. The rotary stage device moves in the rotational direction (that is, the θ direction) and angularly positions parts such as a workpiece.
A rotary stage 103 (that is, θ) is formed by an XY stage apparatus constituted by a first stage 101 that reciprocates in the X direction, which is one linear direction, and a second stage 102 that reciprocates in the Y direction orthogonal to the X direction. (Stage device) is built in, and it is configured as a compound stage device of XY-θ stage device, and it is structured so that parts such as workpieces are positioned on the plane in the X direction, Y direction and rotation direction (θ direction). ing.
As described above, the stage device incorporating the conventional linear motor is positioned in the XYθ direction by being small and thin.

Next, the biaxial parallel / uniaxial turning motion guide mechanism of Patent Document 2 and the biaxial parallel / uniaxial turning table device using the same will be described. 18 is a partially broken exploded perspective view of the two-axis parallel / one-axis turning motion guide mechanism of Patent Document 2. FIG. 19 is a two-axis parallel / one-axis turning motion guide mechanism shown in FIG. FIG. 20A is a plan view showing the shaft turning table device by omitting the table and indicated by a two-dot chain line, FIG. 20B is a front view, and FIG. 20 is a plan view of the table shown in FIG. 18 to 20, a two-axis parallel / one-axis turning motion guide mechanism 201 (FIG. 18) includes a two-axis parallel motion guide unit 270 and a turning motion guide unit 280 assembled to the two-axis parallel motion guide unit 270. , Is composed of.
Further, a two-axis parallel / single-spinning motion guide mechanism 201 using a two-axis parallel / single-axis turning motion guide mechanism 201 includes four two-axis parallel / single-axis turning motion guide mechanisms 201A, 201B, The table 233 is supported so as to be movable in two axial directions that are orthogonal to each other in parallel to the base 234 via 201C and 201D, and can turn around the turning axis C0 located at the center of the table 233. Yes.
Of the four, three 2-axis parallel / single-axis turning motion guide mechanisms 201A, 201B, and 201D are each driven to extend and contract in a linear direction, and the rotational motion of the rotational motor 238 is converted into linear motion. Linear drive mechanisms 237A, 237B, and 237D configured by a feed screw mechanism 239 are operatively connected. The two-axis parallel / one-axis turning movement guide mechanism 201C can freely move.
When the table 233 is moved in parallel, the two linear drive mechanisms 237A and 237B or the linear drive mechanism 237C are driven.
When the table 233 is swung with respect to the swivel axis C0, the linear drive mechanisms 237A and 237B are driven in the opposite directions by the same amount + ΔX, −ΔX, while the linear drive mechanism 237D is driven in the Y axis direction by a predetermined amount ΔY. Drive.
Thus, the conventional biaxial parallel / single axis turning motion guide mechanism and the biaxial parallel / single axis turning table apparatus using the same perform the positioning by moving the table in parallel or turning.

However, the stage apparatus incorporating the linear motor of Patent Document 1 has an apparatus configuration in which the respective axes in the three directions of XYθ are overlapped. When the object to be positioned is enlarged, the stage apparatus becomes physically high. There was a problem. In recent years, liquid crystal materials have become larger year by year, and in order to reciprocate and rotate the table, that is, the stage, there has been a disadvantage that the linear motor and the stage device have to be enlarged as they are.
In addition, since the apparatus has a configuration in which the three axes of XYθ are overlapped, if the stage is enlarged, the position of the center of gravity is shifted when the XY moves. Since the load concentrates on the part and a large moment load is generated on the stage, there is a problem that the smooth movement of the stage is hindered or an unintended rotational movement occurs and the positioning accuracy is lowered.

Further, the two-axis parallel / one-axis turning motion guide mechanism and the two-axis parallel / one-axis turning table device using the same in Patent Document 2 are configured in a three-axis configuration using three two-axis parallel / one-axis turning motion guide mechanisms. When driving with only one axis, the capacity of the motor is insufficient and the same operation as in the 2-axis driving direction cannot be performed, so it takes time to move and position, resulting in efficiency / There was a problem that productivity deteriorated.
Furthermore, the two-axis parallel / one-axis turning motion guide mechanism of Patent Document 2 and the two-axis parallel / one-axis turning table device using the same perform a position movement within a minute plane, so that the stage moves for a long stroke. In order to achieve this, the two-axis parallel / one-axis turning motion guide mechanism and the two-axis parallel / one-axis turning table device using the same are moved on the table, and other drive mechanisms are added to make the mechanism Complicated and expensive.
The present invention has been made in view of such problems. Even when the table is enlarged, the load due to the table and the object is distributed and supported in a well-balanced manner, and the position is moved within a minute plane. It is an object of the present invention to provide an alignment stage that can be moved by a long stroke by using a drive unit of the alignment stage so that the electric motor is shared so that it can move by a long stroke, and the mechanism is simplified and the cost is reduced.

In order to solve the above problem, the present invention is configured as follows.
The invention according to claim 1 is an alignment stage capable of positioning a table on which an object is mounted at a predetermined position via a drive mechanism arranged in the machine base part, wherein the machine base part is parallel to the same direction. And at least three linear motion guides capable of moving over a long stroke, wherein the drive mechanism includes two translational degrees of freedom having translational degrees of freedom, one rotational degree of freedom having rotational degrees of freedom, and an electric motor. And an electric motor control device comprising: a detecting means for detecting an operation amount of the mechanism portion to be detected; and a controller for receiving the signal from the detecting means and controlling the electric motor based on a command signal; At least three sets of one-axis drive translation / rotation mechanisms, each of which includes at least three sets of one-axis drive translation / rotation mechanisms, each of which has a linear motion guide block for moving the linear motion guide, on the machine side or the table. And at least one of the three sets of one-axis drive translational rotation mechanisms is a first one-axis drive translational rotation mechanism unit whose motor drives in the long stroke movement direction. The remaining one-axis drive translational rotation mechanism is a second one-axis drive translational rotation mechanism that the electric motor drives in a direction at a predetermined angle with respect to the long stroke movement direction, and the first one-axis drive The translational rotation mechanism unit includes a linear motor in the translational freedom portion on the machine base side, the second single-axis drive translational rotation mechanism unit includes a linear motor in the translational freedom unit on the table side, and The first one-axis drive translational rotation mechanism is arranged in the linear guide that is movable in the long stroke, and the second one-axis drive translational rotation mechanism is a guide for the first one-axis drive translational rotation mechanism. Between the linear motion guides By being, it is characterized in that it has a translatable or pivotal movement comprises a long stroke movement in one direction to the table.

According to a second aspect of the present invention, in the alignment stage capable of long stroke movement according to the first aspect, the remaining one-axis drive translational rotation mechanism is driven in a direction orthogonal to the long stroke movement direction. This is a second uniaxial drive translational rotation mechanism .
According to a third aspect of the present invention, in the alignment stage capable of long stroke movement according to the first or second aspect, the translation stage has two translational degrees of freedom having no degree of translation and has a degree of freedom of rotation. It further has a three-degree-of-freedom mechanism composed of one rotational degree of freedom part .
According to a fourth aspect of the present invention, in the alignment stage capable of long stroke movement according to the first or second aspect, the drive mechanism includes a first translational degree of freedom portion provided on the machine base portion, The rotation degree of freedom part provided on the first degree of freedom part of translation and a second degree of freedom part of translation provided on the part of freedom degree of rotation are characterized by the above.
Further, the invention according to claim 5 is the alignment stage capable of long stroke movement according to claim 1 or 2, wherein the drive mechanism includes a first translational degree-of-freedom portion provided on the machine base portion, It is characterized by comprising a second translational freedom part provided on the first translational freedom part and a rotational freedom part provided on the second translational freedom part. .

According to the present invention, it is possible to realize a table that performs a fine positioning operation in three directions of XYθ, and can support the table and the load of the object in a well-balanced manner, and further, the driving force for moving the table can be balanced. Since it can output in a distributed manner, each linear motor operates in any direction in translation and rotation of the table and operates without being biased from the center of gravity, so it can be operated with high accuracy and efficiency with uniform performance. Can do.
Furthermore, since the table can be moved with a long stroke, in addition to the fine positioning operation in the three directions of XYθ, it can also be used for a long stroke conveyance application.
Moreover, the load on the table can be further supported by a three-degree-of-freedom mechanism that does not hinder the operation, and an alignment stage that can move for a long stroke while suppressing the deflection of the table can be realized.
And since the angle of attachment of the two translational degrees-of-freedom portions is fixed, the amount of movement required for moving the table can be calculated relatively easily.
In addition, the rotary drive unit can be placed across the linear motion guides of the two translational drive units and can be supported continuously from the table to the machine base, so the drive mechanism suppresses deformation against other loads on the table. Can be supported.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a top view of a long-stroke movable alignment stage showing a first embodiment of the present invention and a schematic diagram showing the arrangement of a single-axis drive translational rotation mechanism, and FIG. 2 is a long view showing a first embodiment of the present invention. FIG. 3 is a schematic side view of an alignment stage capable of stroke movement, and FIG. 3 is a diagram showing a control block diagram of the alignment stage capable of long stroke movement according to the first embodiment of the present invention and an outline of the degree of freedom of translation and rotation of the drive mechanism. .
In the figure, 1 (1a to 1d in FIGS. 2 and 3) is an electric motor (linear motor), 2 (2a to 2d in FIG. 3) is an operation amount detecting means, 3 (3a to 3d in FIG. 3) is a controller, 4 (FIGS. 1 to 3) is a table, 5 (FIG. 3) is an object, 6 (6a to 6d in FIGS. 1 to 3) is a first uniaxial drive translational rotation mechanism, and 7 (FIGS. 1 and 3). 2) is a machine base, 8 (FIG. 3) is command means, and 16 (16a and 16b in FIGS. 2, 1 and 3) is a second uniaxial drive translational rotation mechanism. 11 (11a and 11b in FIG. 2) is a translation drive unit, 12 (12a to 12d in FIG. 3) is a translational freedom unit, 13 (13a to 13d in FIG. 3) is a rotational freedom unit, and 21 ( 1 and 2) are linear motion guides, 22 (FIGS. 1 and 2) are linear motion guide blocks, and 23 (FIGS. 1 and 2) are rotational bearings.

The first embodiment of the present invention is basically different from Patent Documents 1 and 2 that are prior arts in that the first uniaxial drive translational rotation mechanism 6 and the second uniaxial drive translational rotation mechanism 16. This is a part that realizes long stroke movement and alignment movement by the same mechanism.
Specifically, between the machine base unit 7 and the table 4, as shown in FIGS. 1 and 2, each of the first uniaxial drive translational rotation mechanism unit 6 and the second uniaxial drive translational rotation mechanism unit 16 is set to 2 respectively. As shown in FIG. 3, the first uniaxial drive translational rotation mechanism unit 6 and the second uniaxial drive translational rotation mechanism unit 16 are provided with linear motors 1 on the machine unit 7 side and the table 4 side, respectively. As shown in FIG. 1, the machine base unit 7 has three linear motion guides 21 in the same Y direction (vertical direction in the figure), and the linear drive unit 11 of the first one-axis drive translational rotation mechanism unit 6 The movement guide block 22 and the linear movement guide block 22 of the translational freedom portion 12 of the second uniaxial drive translation rotation mechanism unit 16 are configured to be movable in the Y direction.
On the translation drive unit 11 of the first one-axis drive translation / rotation mechanism unit 6, there is a rotation degree of freedom part 13 having a bearing 23 for rotation, and further has a translation degree of freedom part 12 thereon.
On the translation degree-of-freedom portion 12 of the second one-axis drive translation / rotation mechanism portion 16 is a rotation degree-of-freedom portion 13 having a rotation bearing 23, and further has the translation drive portion 11 thereon.
Each translational drive unit 11 and translational freedom unit 12 are configured such that a linear motion guide block 22 moves through a linear motion guide 21, and a rotational bearing 23 is disposed in the rotational freedom unit 13. In other words, the first uniaxial drive translational rotation mechanism unit 6 and the second uniaxial drive translational rotation mechanism unit 16 have a configuration in which the order of translational drive, rotational freedom degree, and translational freedom degree mechanisms are arranged in reverse order. ing.
In addition, the linear motor 1 which comprises each translation drive part 11 is connected to the four controllers 3 (3a-3d of FIG. 3), respectively. The controller 3 receives an operation command from the command means 8 and operates the linear motor 1. The movement amount detection means 2 detects the movement amount of the part to which the linear motor 1 or the linear motion guide block 22 driven by the linear motor 1 is attached, and the movement amount makes the difference from the movement command of the instruction means 8 zero. Thus, the controller 3 controls the operation.

Next, the operation of the alignment stage capable of moving with a long stroke will be described.
FIG. 4 is a view showing the θ-turning movement of the table of the alignment stage capable of long stroke movement according to the first embodiment of the present invention.
In FIG. 4, O is the center and rotation center of the table, R is the radius of rotation, θ is the turning amount of the table, δAY, δBY, δCX, and δDX are the movement amounts of the linear motor 1.
The table is turned by operating the linear motors 1a and 1b (FIG. 3) of the first single-axis drive translational rotation mechanisms 6a (A) and 6b (B) in the opposite directions in the Y direction, respectively. This can be realized by operating the linear motors 1c and 1d (FIG. 3) of the drive translation / rotation mechanisms 16a (C) and 16b (D) in the opposite directions in the X direction.
As shown in FIG. 4, the linear motor 1a of the first uniaxial drive translational rotation mechanism 6a (FIG. 3) is δAY, the linear motor 1b of the first uniaxial drive translational rotation mechanism 6b (FIG. 3) is δBY, If the linear motor 1c of the second one-axis drive translation / rotation mechanism 16a (FIG. 3) is operated by δCX and the linear motor 1d of the second one-axis drive translation / rotation mechanism 16b (FIG. 3) is operated by δDX, the first The rotational degree of freedom 13 of the single-axis drive translational rotation mechanism 6a is rotated and the translational degree of freedom 12 is moved by δAX, and the translational degree of freedom 13 of the first single-axis drive translational rotation mechanism 6b is rotated and translated. The degree of freedom 12 moves by δBX, the degree of freedom 13 of rotation of the second one-axis drive translational rotation mechanism unit 16a rotates, and the degree of freedom of translation 12 moves by δCY, and the second one-axis drive translational rotation mechanism unit 16b also moves. Rotation degree of freedom 13 rotates and translation degree of freedom 12 moves δCY Therefore, the table turns by θ.
As described above, turning of the table and movement of each linear motor 1, each rotational degree of freedom 13, and each degree of translational freedom 12 of the first one-axis drive translational rotation mechanism unit 16 and the second one-axis drive translational rotation mechanism unit 16 are performed. The quantity is determined geometrically.

FIG. 5 is a diagram showing X translational movement of the table of the alignment stage capable of long stroke movement according to the first embodiment of the present invention.
In FIG. 5, δCX and δDX are the movement amounts of the linear motor 1. If the linear motor 1 of the first one-axis drive translational rotation mechanism unit 6 is not operated and the linear motors 1a, 1b of the second one-axis drive translational rotation mechanism units 16a, 16b are moved by δCX, δDX, the table 4 Moves in the X direction (left and right in the figure).

FIG. 6 is a diagram showing Y translational movement of the table of the alignment stage capable of long stroke movement according to the first embodiment of the present invention.
In FIG. 6, δAY and δBY are movement amounts of the linear motor 1. If the linear motor 1 of the second one-axis drive translation / rotation mechanism unit 16 is not operated and the linear motors 1a, 1b of the first one-axis drive translation / rotation mechanism units 6a, 6b are moved by δAY, δBY, the table 4 Moves in the Y direction.
Note that the X direction and the Y direction may be operated simultaneously, and the translational movement direction can be adjusted by adjusting the amounts of δAY, δBY, δCX, and δDX.
In FIG. 4, the center of the table 4 is the rotation center. However, the first one-axis drive translational rotation mechanism unit 6 and the second one-axis drive translational rotation mechanism are geometrically arranged at any position as the rotation center. Each drive amount of the unit 16 is determined.
Since the first embodiment of the present invention has the above-described configuration, alignment positioning by minute operation of XYθ is possible as shown in FIGS. 4, 5, and 6, and a long stroke is possible as shown in FIG.

FIG. 7 is a top view of a long-stroke movable alignment stage showing a second embodiment of the present invention and a schematic view showing the arrangement of a single-axis drive translational rotation mechanism and a three-degree-of-freedom mechanism, and FIG. 8 is a second embodiment of the present invention. It is the figure which shows the outline of the translation stage rotation degree of the alignment stage control which can move the long stroke which shows an example, and a drive mechanism. The components of the second embodiment are the same as those of the first embodiment.
The second embodiment is different from the first embodiment in that the arrangement position of the first uniaxial drive translational rotation mechanism unit 6 is different and two three-degree-of-freedom mechanisms 18a and 18b are added. Since the arrangement position of the linear motor 1 is different from that of the first embodiment, the relationship between the turning of the table 4 and the movement amount of the linear motor 1 is different from that of the first embodiment, but the geometrically determined point is not changed. . Specific examples will be described later separately.
Further, since the translational movement can be realized in the same manner as in the first embodiment, it is not shown here. Even when the table 4 is translated, the translation operation amount and direction of the table 4 and the operations of the linear motor 1 of the first uniaxial drive translational rotation mechanism unit 6 and the second uniaxial drive translational rotation mechanism unit 16 are also described. The quantity can be determined geometrically.
As described above, even if the arrangement position of the first single-axis drive translational rotation mechanism unit 6 is changed and the three-degree-of-freedom mechanism 18 is added, the series of operations of the second embodiment of the present invention is the same as that of the first embodiment. It is.

FIG. 9 is a top view of a long-stroke movable alignment stage showing a third embodiment of the present invention and a schematic diagram showing the arrangement of a single-axis drive translational rotation mechanism, and FIG. 10 is a long stroke showing a third embodiment of the present invention. It is a control block diagram of a movable alignment stage.
The third embodiment is different from the first embodiment in that the number and arrangement positions of the first uniaxial drive translational rotation mechanism units 6 are different. The three-degree-of-freedom mechanisms 18a and 18b added in the second embodiment have a configuration in which the first single-axis drive translation / rotation mechanism 6 is arranged.
Since the arrangement position of the linear motor 1 is the arrangement position of the first one-axis drive translational rotation mechanism unit 6 and the three-degree-of-freedom mechanism 18 of the second embodiment, as in the second embodiment, There is no change in the geometrical relationship of the linear motor 1.
Further, since the translational movement can be realized in the same manner as in the first embodiment, it is not shown here.
The turning movement of the table 4 will be described later.

FIG. 11 is a top view of a long-stroke movable alignment stage showing a fourth embodiment of the present invention and a schematic view showing the arrangement of a single-axis drive translational rotation mechanism and a three-degree-of-freedom mechanism, and FIG. 12 shows the fourth embodiment of the present invention. It is a control block diagram of the alignment stage which can move a long stroke which shows an example, and a figure which shows the outline of the translation and rotation freedom of a drive mechanism and a 3 freedom degree mechanism.
The fourth embodiment has a configuration in which a three-degree-of-freedom mechanism 18 is further added to FIG. 7 of the second embodiment. Here, the newly added three-degree-of-freedom mechanism 18c has a configuration in which it is arranged in the linear motion guide 21 in the same Y direction as that of the second single-axis drive translational rotation mechanism unit 6.
FIG. 13 is a view showing the θ rotation movement of the table of the alignment stage capable of long stroke movement according to the fourth embodiment and the second and third embodiments of the present invention. The arrangement position of the linear motor 1 is the same as in the second embodiment. In FIG. 13, O is the center and rotation center of the table, R is the radius of rotation, θ is the turning amount of the table, δAY, δBY, δCX, and δDX are the movement amounts of the linear motor 1.
In the case of the third embodiment, the three-degree-of-freedom mechanism 18 indicated by EF in the drawing may be replaced with the first one-axis drive translational rotation mechanism unit 6, and δEY and δFY are the operation amounts of the linear motor 1. do it.
The table is swung by operating the linear motors 1a and 1b of the first single-axis drive translational rotation mechanism units 6a (A) and 6b (B) in the opposite directions in the Y direction, respectively, thereby providing a second single-axis drive translational rotation mechanism. This can be realized by operating the linear motors 1c and 1d of the parts 16a (C) and 16b (D) in the opposite directions in the X direction.
As shown in FIG. 13, the linear motor 1a of the first one-axis drive translational rotation mechanism 6a is δAY, the linear motor 1b of the first one-axis drive translational rotation mechanism 6b is δBY, and the second one-axis drive translational rotation. If the linear motor 1c of the mechanism unit 16a is operated by δCX and the linear motor 1d of the second one-axis drive translational rotation mechanism unit 16b is operated by δDX, the rotational degree of freedom 13 of the first one-axis drive translational rotation mechanism unit 6a rotates. In addition, the translational degree of freedom 12 moves by δAX, the rotational degree of freedom 13 of the first one-axis driving translational rotation mechanism 6b rotates, and the translational degree of freedom 12 moves by δBX, and the second one-axis driving translational rotation. The rotational degree of freedom 13 of the mechanism unit 16a rotates and the translational degree of freedom 12 moves by δCY, and the second single-axis drive translational rotation mechanism unit 16b also rotates by the degree of freedom of rotation 13 and the translational degree of freedom 12 moves by δCY. So the table turns θ
As described above, turning of the table, each linear motor 1 of each of the first one-axis drive translational rotation mechanism unit 6 and the second one-axis drive translational rotation mechanism unit 16, each degree of freedom of rotation 13, and each of the degrees of freedom of translation 12 The amount of movement is determined geometrically.

FIG. 14 is a control block diagram of an alignment stage that can be moved by a long stroke according to a fifth embodiment of the present invention, and an outline of translation / rotation freedom of the drive mechanism.
This embodiment differs from the first to fourth embodiments in the configuration of the first uniaxial drive translational rotation mechanism unit 6 and the second uniaxial drive translational rotation mechanism unit 16.
The fifth embodiment is different from the first to fourth embodiments in that the first uniaxial drive translational rotation mechanism unit 6 and the second uniaxial drive translational rotation mechanism unit 16 have a degree of freedom in translation and a degree of rotation. It is the composition. As shown in FIG. 14, the first uniaxial drive translational rotation mechanism unit 6 and the second uniaxial drive translational rotation mechanism unit 16 have a translational degree of freedom that goes straight above the translational degree of freedom, and are free to rotate thereon. Have a degree. The first one-axis drive translational rotation mechanism unit 6 and the second one-axis drive translational rotation mechanism unit 16 of the first to fourth embodiments have a degree of freedom of rotation above the degree of freedom of translation. It had translational freedom. In other words, the first uniaxial drive translational rotation mechanism unit 6 of this embodiment includes a rotation degree of freedom part 13 on the translational drive part 11 and a translation degree of freedom part 12 thereon. The second uniaxial drive translational rotation mechanism unit 16 includes a rotation degree of freedom part on the translation degree of freedom 12 and a translational drive part 11 thereon.

Next, the operation of the alignment stage capable of moving with a long stroke will be described.
The relationship between the movement amount of the table 4 of this embodiment and each linear motor 1 is that the first single-axis drive translational rotation mechanism unit 6 has a rotational degree of freedom 13 that is changed on the translational drive unit 11, so The academic relationship is different.
FIG. 15 is a view showing the θ rotation movement of the table of the alignment stage capable of long stroke movement in the fifth embodiment, the second embodiment, and the third embodiment. O is the center and rotation center of the table, R is the radius of rotation, θ is the turning amount of the table, δAY, δBY, δCX, and δDX are the movement amounts of the linear motor 1.
The table is swung by operating the linear motors 1a and 1b of the first single-axis drive translational rotation mechanism units 6a (A) and 6b (B) in the opposite directions in the Y direction, respectively, thereby providing a second single-axis drive translational rotation mechanism. This can be realized by operating the linear motors 1c and 1d of the parts 16a (C) and 16b (D) in the opposite directions in the X direction.
As shown in FIG. 15, the linear motor 1a of the first uniaxial drive translational rotation mechanism 6a is δAY, the linear motor 1b of the first uniaxial drive translational rotation mechanism 6b is δBY, and the second uniaxial drive translational rotation is performed. If the linear motor 1c of the mechanism unit 16a is operated by δCX and the linear motor 1d of the second one-axis drive translational rotation mechanism unit 16b is operated by δDX, the rotational degree of freedom 13 of the first one-axis drive translational rotation mechanism unit 6a rotates. In addition, the translational degree of freedom 12 moves by δAX, the rotational degree of freedom 13 of the first one-axis driving translational rotation mechanism 6b rotates, and the translational degree of freedom 12 moves by δBX, and the second one-axis driving translational rotation. The rotational degree of freedom 13 of the mechanism unit 16a rotates and the translational degree of freedom 12 moves by δCY, and the second single-axis drive translational rotation mechanism unit 16b also rotates by the degree of freedom of rotation 13 and the translational degree of freedom 12 moves by δCY. So the table turns θ
As described above, although the relationship is different from the first to fourth embodiments, the table 4 is turned, the first uniaxial drive translational rotation mechanism unit 6, and the second uniaxial drive translational rotation mechanism unit 16. The amount of movement of each linear motor 1, each rotational degree of freedom 13, and translational degree of freedom 12 is determined geometrically.
Further, since the translational movement can be performed in the same manner as in the first embodiment, it is not shown here.
In this embodiment, in the arrangement of FIG. 1 of the first embodiment, the translational freedom degree and rotational freedom degree of the first uniaxial drive translational rotation mechanism part 6 and the second uniaxial drive translational rotation mechanism part 16 are improved. Although the configuration has been changed, in the arrangements of the second to fourth embodiments, the degree of freedom of translation and the degree of freedom of rotation of the first uniaxial drive translational rotation mechanism unit 6 and the second uniaxial drive translational rotation mechanism unit 16 The degree configuration may be changed. Further, the configurations of the first uniaxial drive translational rotation mechanism unit 6 and the second uniaxial drive translational rotation mechanism unit 16 of the first to fourth embodiments, and the first uniaxial drive of the fifth example. The configurations of the translational rotation mechanism unit 6 and the second uniaxial drive translational rotation mechanism unit 16 may be mixed.

Even if the table is increased in size by distributing a plurality of first uniaxial drive translational rotation mechanism units and second uniaxial drive translational rotation mechanism units or a three-degree-of-freedom mechanism, the load is distributed. Applicable to supporting applications.
In addition, even if the device becomes larger, it can be configured by using multiple standard linear motors without using special large linear motors, so that the driving force can be distributed. There is also an advantage that it can be procured easily compared to special products.

It is the schematic which shows the top view of the alignment stage which can move a long stroke which shows 1st Example of this invention, and arrangement | positioning of a 1 axis drive translation rotation mechanism. It is the side schematic diagram of the alignment stage which can move a long stroke which shows the 1st example of the present invention. It is a control block diagram of the alignment stage which can move a long stroke which shows 1st Example of this invention, and the figure which shows the outline of the translation and rotation freedom degree of a drive mechanism. It is a figure which shows (theta) turning movement of the table of the alignment stage which can move a long stroke which shows 1st Example of this invention. It is a figure which shows X translational movement of the table of the alignment stage which can move a long stroke which shows 1st Example of this invention. It is a figure which shows the Y translational movement of the table of the alignment stage which can move a long stroke which shows 1st Example of this invention. It is the top view of the alignment stage which can move a long stroke which shows 2nd Example of this invention, and the schematic which shows arrangement | positioning of a 1 axis | shaft drive translation rotation mechanism and a 3 degree-of-freedom mechanism. It is the alignment stage control block diagram which can move a long stroke which shows 2nd Example of this invention, and the figure which shows the outline of the translation and rotation freedom degree of a drive mechanism. It is the schematic which shows the top view of the alignment stage which can move a long stroke which shows 3rd Example of this invention, and arrangement | positioning of a 1 axis drive translation rotation mechanism. It is a control block diagram of the alignment stage which can move a long stroke which shows 3rd Example of this invention. It is the top view of the alignment stage which can move a long stroke which shows 4th Example of this invention, and the schematic which shows arrangement | positioning of a 1 axis | shaft drive translation rotation mechanism and a 3 degree-of-freedom mechanism. It is a control block diagram of the alignment stage which can move a long stroke which shows 4th Example of this invention, and the figure which shows the outline of the translation and rotation freedom degree of a drive mechanism and a 3 freedom degree mechanism. It is a figure which shows (theta) turning movement of the table of the alignment stage which can move long stroke of 4th Example of this invention, and 2nd, 3rd Example. It is a control block diagram of the alignment stage which can move a long stroke which shows 5th Example of this invention, and the figure which shows the outline of the translation and rotation freedom degree of a drive mechanism. It is a figure which shows (theta) rotation movement of the table of the alignment stage which can move a long stroke of 5th Example and 2nd, 3rd Example. It is the front view seen from the X direction which is one direction which shows one Example of the stage apparatus incorporating the linear motor of patent document 1. FIG. It is a top view which shows the stage apparatus shown in FIG. 10 is a partially broken exploded perspective view of a biaxial parallel / uniaxial turning motion guide mechanism of Patent Document 2. FIG. FIG. 18 is a two-axis parallel / one-axis turning table device using the two-axis parallel / one-axis turning movement guide mechanism shown in FIG. 18, in which FIG. (B) is a front view. FIG. 20 is a plan view of the table shown in FIG. 19.

Explanation of symbols

1 Electric motor (linear motor)
2 Motion amount detection means 3 Controller 4 Table 5 Object 6 First uniaxial drive translation rotation mechanism part 7 Machine base part 8 Command means 11 Translation drive part 12 Translation freedom part 13 Rotation degree of freedom part 16 Second 1 Shaft drive translational rotation mechanism 18 3 degrees of freedom mechanism 21 Linear motion guide 22 Linear motion guide block 23 Rotating bearing

Claims (5)

In an alignment stage capable of positioning a table for mounting an object on a predetermined position via a drive mechanism arranged on a machine base unit,
The machine base portion includes at least three linear motion guides that are arranged in parallel in the same direction and are movable over a long stroke,
The drive mechanism includes two translational degrees of freedom units having translational degrees of freedom, one rotational degree of freedom unit having rotational degrees of freedom, an electric motor, and detection means for detecting an operation amount of the mechanism unit to be detected. And a motor controller comprising a controller that receives the signal from the detection means and controls the motor based on a command signal, and comprises at least three sets of one-axis drive translational rotation mechanisms,
The at least three sets of one-axis drive translational rotation mechanisms each include a linear motion guide block for moving the linear motion guide on the machine base side or the table side,
And at least one set of the single-axis drive translational rotation mechanisms among the at least three sets of single-axis drive translational rotation mechanisms is a first single-axis drive translational rotation mechanism that the electric motor drives in the long stroke movement direction. The remaining one-axis drive translational rotation mechanism is a second one-axis drive translational rotation mechanism unit whose motor is driven in a direction at a predetermined angle with respect to the long stroke movement direction, and the first one-axis drive translational rotation mechanism. The translation motor is provided with a linear motor in the translation degree of freedom on the machine base side, the second single-axis drive translation rotation mechanism is provided with a linear motor in the translation degree of freedom on the table side, and the first A single-axis drive translational rotation mechanism is disposed in the linear motion guide that is movable in the long stroke, and the second single-axis drive translational rotation mechanism is configured to guide the first single-axis drive translational rotation mechanism. To be placed between By,
An alignment stage capable of long stroke movement, wherein the table is capable of translational movement or turning movement including long stroke movement in one direction. 2. The length of claim 1, wherein the remaining one-axis drive translational rotation mechanism is a second one-axis drive translational rotation mechanism unit that drives the motor in a direction orthogonal to the long stroke movement direction. Stroke-alignable alignment stage. 3. The three-degree-of-freedom mechanism comprising two translational degree-of-freedom parts having translational degrees of freedom without mounting the electric motor and one rotational degree-of-freedom part having rotational degrees of freedom . An alignment stage capable of long stroke movement. The drive mechanism is provided on a first translation degree of freedom part provided on the machine base part, a rotational degree of freedom part provided on the first translation degree of freedom part, and on the rotational degree of freedom part. 3. The alignment stage capable of long stroke movement according to claim 1 or 2, further comprising a second translational degree of freedom section. The drive mechanism includes a first translation degree of freedom portion provided on the machine base portion, a second translation degree of freedom portion provided on the first translation degree of freedom portion, and the second translation freedom portion. 3. An alignment stage capable of long stroke movement according to claim 1, wherein the alignment stage comprises a rotational degree of freedom portion provided on the degree portion .