JP4742663B2 - Alignment device - Google Patents

Description

  The present invention relates to an alignment apparatus that drives a motor, moves a table, and positions an object on the table at a predetermined position in an exposure apparatus such as a semiconductor device, a printed board, and a liquid crystal display element.

In the conventional alignment apparatus, two apparatuses have been proposed.
A conventional stage apparatus incorporating a linear motor, which is a first example of the prior art, is capable of minute angular positioning using a linear motor, and is small and thin (see, for example, Patent Document 1).
Further, the conventional two-axis parallel / one-axis turning motion guide mechanism and the two-axis parallel / one-axis turning table device using the same can be easily assembled to the table and can be guided and supported with high accuracy. There is also a table device using an axis parallel / single axis turning motion guide mechanism (for example, see Patent Document 2).

A stage apparatus incorporating the linear motor of the first conventional example will be described.
FIG. 52 is a front view showing one embodiment of a stage apparatus incorporating the linear motor according to the first conventional example, as viewed from one direction, the X direction.
FIG. 53 is a plan view showing the stage apparatus of FIG. 52 according to the first conventional example.
A stage device incorporating a linear motor incorporates a rotation linear motor 113 as a drive device that moves in a minute rotation direction between the rotation stage 103 and the second stage 102, and in particular, a minute amount of angular position of the rotation stage 103. In consideration of the texture, a movable magnet type linear motor is applied as the rotation linear motor 113, and the rotation linear motor 113 and the rotation stage 103 which is the rotation direction portion are moved in the rotation direction (that is, the θ direction) by a minute amount. This is a rotary stage device that positions parts such as workpieces at an angle.
A rotary stage 103 (that is, θ) is formed by an XY stage apparatus constituted by a first stage 101 that reciprocates in the X direction, which is one linear direction, and a second stage 102 that reciprocates in the Y direction orthogonal to the X direction. (Stage device) is built in, and it is configured as a compound stage device of an XY-θ stage device, and a structure that positions parts such as workpieces on the plane in the X direction, Y direction, and rotation direction (θ direction) is configured. ing.

  As described above, the stage device incorporating the conventional linear motor is positioned in the XYθ direction by being small and thin.

Next, a second conventional example of a two-axis parallel / one-axis turning motion guide mechanism and a two-axis parallel / one-axis turning table apparatus using the same will be described.
FIG. 54 is a partially broken exploded perspective view of a conventional biaxial / uniaxial turning motion guide mechanism according to a second example.
FIG. 55 is a two-axis parallel / one-axis turning table device using a two-axis parallel / one-axis turning movement guide mechanism according to a second conventional example. FIG. 55 (a) is a two-dot chain line with the table omitted. The top view shown and the figure (b) are front views.
FIG. 56 is a plan view of a table according to a second conventional example.
As shown in FIG. 54, the two-axis parallel / one-axis turning motion guide mechanism 201 is composed of a two-axis parallel motion guide portion 270 and a turning motion guide portion 280 assembled to the two-axis parallel motion guide portion 270. Yes.
Moreover, the two-axis parallel / single-spinning motion guide mechanism 201 using the two-axis parallel / single-spinning movement guide mechanism 201 includes four two-axis parallel / single-axis turning motion guide mechanisms 201A, 201B, as shown in FIGS. The table 233 is supported through 201C and 201D so as to be movable in two axial directions parallel to the base 234 and orthogonal to each other, and can be turned around a turning axis C0 located at the center of the table 233. Yes.
Of the four, three 2-axis parallel / single-axis turning motion guide mechanisms 201A, 201B, and 201D are each driven to extend and contract in a linear direction, and the rotational motion of the rotational motor 238 is converted into linear motion. Linear drive mechanisms 237A, 237B, and 237D configured by a feed screw mechanism 239 are operatively connected. The two-axis parallel / one-axis turning movement guide mechanism 201C can freely move.

When the table 233 is moved in parallel, the two linear drive mechanisms 237A and 237B or the linear drive mechanism 237C are driven.
When the table 233 is swung with respect to the swivel axis C0, the linear drive mechanisms 237A and 237B are driven in the opposite directions by the same amounts + ΔX and −ΔX, while the linear drive mechanism 237D is driven by a predetermined amount ΔY in the Y-axis direction. Drive.

  Thus, the conventional biaxial parallel / single axis turning motion guide mechanism and the biaxial parallel / single axis turning table apparatus using the same perform the positioning by moving the table in parallel or turning.

JP 2002-328191 A (FIGS. 1 and 2) Japanese Patent Laid-Open No. 11-245128 (FIGS. 2, 4, and 5)

However, the conventional stage apparatus incorporating the linear motor of the first example has an apparatus configuration in which the respective axes in the three directions of XYθ overlap. When the object to be positioned is enlarged, the stage apparatus is physically There was a problem of becoming higher.
In recent years, liquid crystal materials have become larger year by year, and in order to reciprocate and rotate the table, that is, the stage, there has been a disadvantage that the linear motor and the stage device have to be enlarged as they are.
In addition, since the three XYθ axes overlap each other, if the stage is enlarged, the position of the center of gravity will be shifted if the XY moves. Since the load concentrates on the part and a large moment load is generated on the stage, there is a problem that the smooth movement of the stage is hindered or an unintended rotational movement occurs, resulting in a decrease in positioning accuracy.

Further, the conventional 2-axis parallel / single-axis turning motion guide mechanism and the 2-axis parallel / single-axis turning table apparatus using the conventional second example have an external force applied when an object on the table is processed. When applied, there are translational degrees of freedom and rotational degrees of freedom that are not held by the control system, so that there is a problem that the posture cannot be held and the table moves in a broken posture according to external force.
In addition, there is also a problem that the table position cannot be corrected since there is no means for grasping the movement of the table or the object due to external force.

  Furthermore, since the 2-axis parallel / single-axis turning motion guide mechanism is arranged in three of the four corners of the table and has a three-axis configuration, there is a direction to drive with only one axis, so the capacity of the motor is low. Because it is uniform, it cannot exhibit the same performance as the direction of driving two axes, and in the direction of driving with only one axis, it takes time to move and position, resulting in poor efficiency and productivity. There was a problem.

  The present invention has been made in view of such problems. Even when the table is enlarged, the load due to the table and the object is distributed and supported in a well-balanced manner, and even if an external force is applied to the table, the table An object of the present invention is to provide an alignment apparatus that can hold the position and can correct the table again even if the table moves.

In order to solve the above problem, the present invention is configured as follows.
The invention according to claim 1 relates to an alignment apparatus, and in an alignment apparatus that moves a table on which an object is placed to position the object at a predetermined position, an electric motor for driving and an object to be detected A detecting means for detecting an operation amount of the mechanism section, a motor control device having a controller for receiving the command signal and controlling the motor, a command means for giving an operation command to the controller, and a degree of translational freedom. Comprising at least two translational rotation mechanisms having two translational degree of freedom parts and one rotational degree of freedom part of rotational freedom, and a machine base part on which the translational rotation mechanism is arranged. A one-axis drive translational rotation mechanism with one electric motor, a two-axis drive translational rotation mechanism with two electric motors, or a three-axis drive translational rotation mechanism with three electric motors, The translation and rotation mechanism includes a translation drive unit for driving the translation direction by the electric motor, at least one the two-axis drive translation and rotation mechanism or the three-axis driving translation of said at least two comprises a translation and rotation mechanism It is a rotation mechanism, and the total of the motor control devices is at least three, and the table is translated and rotated.

According to a second aspect of the present invention, there is provided an alignment apparatus that moves a table on which an object is placed and positions the object at a predetermined position. An electric motor control device having a detecting means for detecting an operation amount of a mechanism section serving as a detection body; a controller for controlling the electric motor in response to a command signal; a command means for giving an operation command to the controller; At least two translational rotation mechanisms having two translational degree of freedom portions having degrees and one rotational degree of freedom portion having rotational degrees of freedom, and a machine base unit on which the translational rotation mechanism is arranged, the translational rotation The mechanism is a one-axis drive translational rotation mechanism with one electric motor, a two-axis drive translational rotation mechanism with two electric motors, or a three-axis drive translational rotation mechanism with three electric motors. I, the translation and rotation mechanism includes translation drive unit for driving the translation direction by the electric motor or have any of the rotational driving unit for driving the rotational direction by the electric motor, said at least two with translational At least one of the rotation mechanisms is the two-axis drive translational rotation mechanism or the three-axis drive translational rotation mechanism, at least one of the translational rotation mechanisms has at least one of the rotation drive units, and the motor control device The sum total is at least three, and the table is translated and rotated.

According to a third aspect of the present invention, in the alignment apparatus according to the first or second aspect, the translational rotation mechanism includes the translational degree of freedom part on the translational degree of freedom part. Further, the rotation degree of freedom part is further provided.

According to a fourth aspect of the present invention, in the alignment apparatus according to the first or second aspect, the translational rotation mechanism includes the rotational degree of freedom part on the translational degree of freedom part. It is further characterized in that the translational degree of freedom part is further provided.

According to a fifth aspect of the present invention, in the alignment apparatus according to the first or second aspect, the translational rotation mechanism includes the translational degree of freedom part on the rotational degree of freedom part. It is further characterized in that the translational degree of freedom part is further provided.

According to a sixth aspect of the present invention, in the alignment apparatus according to the first or second aspect, the translational rotation mechanism is a planar degree of freedom translational rotation mechanism that does not have the electric motor, and the planar degree of freedom translational rotation mechanism. The alignment apparatus according to claim 1, further comprising:

According to a seventh aspect of the present invention, in the alignment apparatus according to the first or second aspect, a two-dimensional position sensor that takes in an arrangement of an object placed on the table portion, and the two-dimensional position sensor placed on the table portion. A correction amount calculating means for calculating a correction amount for correcting the arrangement of the target object, and grasping the arrangement of the target object placed on the table unit captured by the two-dimensional position sensor, It is characterized in that the position of the object is corrected by driving an electric motor and performing translation or rotation in two directions of the table portion.

According to an eighth aspect of the present invention, in the alignment apparatus according to the seventh aspect , a plurality of the two-dimensional position sensors are provided, and the arrangement of the object is captured by the plurality of two-dimensional position sensors.

  According to the first aspect of the invention, a table that operates in three directions of XYθ can be realized, and the load of the table and the object can be distributed and supported in a well-balanced manner.

  In addition, according to the second aspect of the invention, a table that operates in three directions of XYθ can be realized, and the load of the table and the object can be distributed and supported in a well-balanced manner.

  According to the fifth aspect of the present invention, since the angle of attachment of the two translational degrees-of-freedom portions is fixed, the amount of operation required for moving the table can be calculated relatively easily.

  In addition, according to the invention of claim 6, the rotational degree of freedom part can be placed across the two translational degree of freedom parts and can be continuously supported from the table to the machine base. The deformation of the translational rotation mechanism can be suppressed and supported.

  According to the seventh aspect of the present invention, since the angle of attachment of the two translational degrees-of-freedom portions is fixed, the amount of movement required for moving the table can be calculated relatively easily.

  According to the ninth aspect of the present invention, the load on the table or the object can be distributed and supported without suppressing the translation / rotation movement of the table.

  According to the tenth aspect of the present invention, the table moving operation can be quickly performed by calculating the position correction value for the arrangement state of the object on the table using the two-dimensional position sensor.

  According to the invention described in claim 11, even when the table is enlarged and one two-dimensional position sensor cannot grasp all the objects, the plurality of two-dimensional position sensors can divide and grasp the objects. Thus, the arrangement of the object can be grasped.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic view of an alignment apparatus showing a first embodiment of the present invention.
FIG. 2 is a block diagram of the alignment apparatus showing the first embodiment of the present invention.
FIG. 3 is a schematic view of a single-axis drive translation rotation mechanism having one translation drive unit used in the alignment apparatus showing the first embodiment of the present invention.
FIG. 4 is a schematic view of a single-axis drive translational rotation mechanism having one rotation drive unit used in the alignment apparatus showing the first embodiment of the present invention.
FIG. 5 is a top view of the alignment apparatus showing the first embodiment of the present invention and a diagram showing the arrangement of the translational rotation mechanism.
1 and 2, reference numeral 1 denotes an electric motor (linear motor 1L and rotary motor 1R in FIG. 2), 2 denotes an operation amount detection means (FIG. 2), 3 denotes a controller (FIG. 2), 4 denotes a table, 5 denotes An object, 6 is a translational rotation mechanism, 7 is a machine base, and 8 is command means (FIG. 2).
As shown in FIG. 1, the alignment apparatus is composed of two translational rotation drive mechanisms 6 arranged on the lower surface of the table, and command means 8 (FIG. 2).
The translational rotation mechanism 6 uses two single-axis drive translational rotation mechanisms 15A shown in FIG. 3 and one single-axis drive translational rotation mechanism 15B shown in FIG. 4, and the single-axis drive translational rotation mechanism 15A includes translational drive. The single-axis drive translational rotation mechanism 15 </ b> B has one rotation drive unit 12.
As shown in FIG. 3, the single-axis drive translational rotation mechanism 15 </ b> A includes a translational freedom unit 13 and a rotational freedom unit 14 that are orthogonal to each other on the translational drive unit 11.
As shown in FIG. 4, the uniaxial drive translational rotation mechanism 15 </ b> B has two orthogonal translational freedom units 13 on the rotation drive unit 12.
The translation drive unit 11 is mounted with a linear motor 1L, and is provided with a linear motion guide block 22 that can move the linear motion guide 21 so that the translational motion is supported freely. A rotation type motor 1R is mounted on the rotation drive unit 12 (FIG. 4), and a rotation bearing 23 is provided so as to be freely supported for rotation.
The translational rotation drive mechanism 6 (FIGS. 1 and 2) has a total of three uniaxial drive translational rotation mechanisms 15A (FIG. 3) and 15B (FIG. 4), and outputs a command which is an output of the command means 8 (FIG. 2). When input to the controller 3 (FIG. 2), the electric motor 1 (linear motor 1L and rotary motor 1R (FIG. 2)) is driven to translate or rotate the table 4 and the object 5 on the table 4.
As shown in FIG. 5, the first translation / rotation mechanism 6a is a single-axis drive / translation / rotation mechanism 15A, and is arranged such that the linear motor 1L (FIG. 3) is driven in the X direction, and the second translation / rotation mechanism 6b. Is a single-axis drive translational rotation mechanism 15A, and is arranged so that the linear motor 1L is driven in the Y direction, and the third translational rotation mechanism 6c is a single-axis drive translational rotation mechanism 15B (FIG. 4). Drive in the direction of rotation.

  The present invention is different from Patent Document 1 in that the linear motor is overlapped and the table movement in the XYθ direction is not realized, but the table is moved in the XYθ direction with three translational rotation mechanisms. is there.

  The present invention is different from Patent Document 2 in that the translation rotation mechanism 6 having two translation drive units 11 (FIG. 3) and the translation rotation mechanism 6 having one rotation drive unit 12 (FIG. 4) (FIG. 1, FIG. 1). FIG. 2) is a portion in which the table is moved in the XYθ direction.

The relationship between the operation of the table 4 and the operation of the electric motor 1 of the translational rotation drive mechanism 6 is as follows.
FIG. 6 is a view showing the rotational movement of the table of the alignment apparatus showing the first embodiment of the present invention. Oo is the center of the table, R is the radius of rotation, δZ _ij is the amount of movement of the translation drive unit 11 (FIG. 3) or the translational freedom unit 13 (FIGS. 3 and 4), and δZ _i θ is the rotational freedom unit 14 (FIG. 3) or the rotation amount of the rotation drive unit 12 (FIG. 4), Δθ is the rotation angle of the table, and a, b, and c are initial positions.
In order to rotate the table 4 (FIGS. 1 and 2) about Δθ and the table center Oo as the rotation center, the linear motor 1L of the first translational rotation mechanism 6a (one-axis drive translational rotation mechanism 15A (FIG. 5)). (FIG. 3) is moved in the drive axis direction by δZ _1x , and the linear motor 1 of the second translational rotation mechanism 6b (single-axis drive translational rotation mechanism 15A (FIG. 5)) is moved in the drive axis direction by δZ ₂ y. When the rotary motor 1R of the third translational rotation mechanism 6c (single-axis drive translational rotation mechanism 15B (FIG. 5)) is moved in the drive axis direction by δZ ₃ θ clockwise as viewed from above,
First translating rotation mechanism 6a of the linear motors 1L no translational degrees of freedom 13 .delta.Z _1y, rotary motor 1R without rotational freedom unit 14 moves DerutaZ1shita, the linear motor 1L of the second translation and rotation mechanism 6b no translational degrees of freedom 13 DerutaZ2x, rotary motor 1R without rotational freedom 14, .delta.Z ₂ theta moves, third two no linear motors 1L of translation and rotation mechanism 6c translational degrees of freedom 13, Move by δZ ^3x and δZ ^3y .
Thus, the movement amount of the table 4 and each movement amount of the translational rotation mechanism 6 are geometrically determined, and the table 4 is rotated about the table center by the movement of the translational drive unit 11 and the rotary drive unit 12.
Here, the center Oo of the table 4 is used as a reference, but an arbitrary position may be set as the rotation center, and each movement amount of the translational rotation mechanism 6 is obtained geometrically, so that the rotational movement is performed at an arbitrary place as the rotation center. To do.

FIG. 7 is a view showing translation of the table of the alignment apparatus showing the first embodiment of the present invention.
L is translational movement of the table 4, the angle α is formed by the translational movement direction of the table 4, .delta.Z _ij is the amount of movement of the translation drive portion of the translation and rotation mechanism 6.
The table 4 is positioned by commanding a predetermined amount of movement to the translation drive unit 11 disposed below the first and second translational rotation mechanisms 6a and 6b.
The linear motor 1L of the first translational rotation mechanism 6a (one-axis drive translational rotation mechanism 15A) is moved in the drive axis direction by δZ _1x, and the linear motor of the second translational rotation mechanism 6b (one-axis drive translational rotation mechanism 15A). If 1 is moved in the drive axis direction by δZ _2y , the table 4 moves L in the direction of α.
A command 0 is given to the rotation drive unit 12 (FIG. 4) of the third translational rotation mechanism 6c (FIG. 5), and the table 4 is held so as not to rotate.
Thus, the movement amount of the table 4 and each movement amount of the translational rotation mechanism 6 are geometrically determined, and the table 4 moves in translation by the movement of the translation drive unit 11 (FIG. 3).

In the translational movement only in the X direction, a predetermined amount of movement is commanded and positioned to the translational drive unit 11 of the first translational rotation mechanism 6a, and command 0 is given to the second and third translational rotation mechanisms 6b and 6c. Thus, the table 4 is held so as not to move in the Y direction and rotate.
In translational movement only in the Y direction, a predetermined amount of movement is commanded and positioned to the translational drive unit 11 of the second translational rotation mechanism 6b, and command 0 is given to the first and third translational rotation mechanisms 6a and 6c. Thus, the table 4 is held so as not to move and rotate in the X direction.

  In this embodiment, the table 4 is rotated at the table center Oo. However, even if an arbitrary rotation center is used, the movement amount of the table 4 and each movement amount of the translational rotation mechanism 6 are determined geometrically. Any rotation center may be selected and operated.

  In addition, the present embodiment shows the minimum required translational rotation mechanism 6, but if the translational rotation mechanism 6 is increased to drive the center of gravity of the table, the load is distributed and supported in a well-balanced manner. In addition, the driving force can be applied in a balanced manner, and the table positioning can be performed with high accuracy.

As described above, the table 4 (FIG. 1, FIG. 1) has three translational rotation mechanisms and has a total of two translational drive units 11 (FIG. 3) and one rotational drive unit 12 (FIG. 4). 2) and the object 5 can be rotated and translated.
If the rotation and translation of the table 4 are designated, the command means 8 (FIG. 2) outputs a command to the controller 3 for the movement amount of each electric motor 1 determined geometrically, and the table 4 can be moved arbitrarily. It is.

FIG. 8 is a schematic view of an alignment apparatus showing a second embodiment of the present invention.
FIG. 9 is a block diagram of an alignment apparatus showing a second embodiment of the present invention.
FIG. 10 is a schematic view of a single-axis drive translational rotation mechanism having one translational drive unit used in the alignment apparatus showing the second embodiment of the present invention.
8 and 9, 1 is an electric motor (linear motor 1L and rotary motor 1R (FIG. 2)), 2 is an operation amount detecting means, 3 is a controller, 4 is a table, 5 is an object, and 6 is translational rotation. A mechanism, 7 is a machine base (FIG. 8), 8 is a command means, 9 is a two-dimensional position sensor, and 10 is a correction amount calculation means.
The first embodiment is different from the first embodiment in that a two-dimensional position sensor 9 and a correction amount calculating means 10 are added, and the configurations of the translational rotation mechanisms 6a and 6b (FIG. 11).
As shown in FIG. 9, the number of controllers 3 and the total number of translation rotation mechanisms 6, that is, the total number of translation drive units 11 and the total number of rotation drive units 12 are the same as in the first embodiment.
As shown in FIG. 10, the translational rotation mechanisms 6a and 6b are uniaxial drive translational rotation mechanisms 15C. The translational rotation mechanisms 6a and 6b have a rotation degree of freedom part 14 on the translational drive part 11, and the translation degree of freedom part 13 thereon. Therefore, when the table 4 rotates, the two translational degrees of freedom of the translational rotation mechanisms 6a and 6b are not orthogonal.

  The part in which the present invention differs from Patent Document 1 is that the linear motor is overlapped and the table movement in the XYθ direction is not realized, but the table is moved in the XYθ direction with three translational rotation mechanisms. is there.

  The part in which the present invention is different from Patent Document 2 includes a translational rotation mechanism 6 including two translational drive units 11 and a translational rotation mechanism 6 including one rotational drive unit 12, and moves the table in the XYθ direction. Part.

FIG. 11 is a view showing the rotational movement of the table of the alignment apparatus showing the second embodiment of the present invention.
Although the rotational movement amount of the table 4 and each movement amount of the translational rotation mechanism 6 are geometrically determined, the configuration of the translational rotation mechanisms 6a and 6b is different from the first embodiment, and the two translations are not orthogonal to each other. Thus, the movement amount of the linear motor 1L (FIG. 10) is different from that of the first embodiment shown in FIG. However, as in the first embodiment, the table 4 can be obtained by driving the translation drive unit 11 of the first and second translational rotation mechanisms 6a and 6b and driving the rotation drive unit 12 of the third translational rotation mechanism 6c. Moves rotationally.
The translational movement of the table 4 is geometrically determined by the amount of movement of the translational rotation mechanism 6 as in the first embodiment.

Next, a series of operations including the two-dimensional position sensor 9 and the correction amount calculation means 10 will be described.
FIG. 12 is a view showing a method for correcting the position of an object by a two-dimensional position sensor of the alignment apparatus showing the second embodiment.
The position of the object 5 placed on the table 4 (FIGS. 8 and 9) is recognized as an image by the two-dimensional position sensor 9. The correction amount calculation means 10 detects a mark written in advance on the object 5 and a feature of the object 5 (indicated by + in the figure), and the rotation angle from the rotation center and the translational operation amount from the inclination angle are detected. Desired.
The correction angle Ф and the operation amount L are calculated by the correction amount calculation means 10, and the operation amount of each drive unit of the translational rotation drive mechanism 6 is obtained geometrically from the position of the table 4. The operation amount δZ _ij is commanded to the device 3, the table 4 is positioned, and the position of the object 5 is corrected.

  As described above, the table 4 and the object 5 can be rotated and translated as long as it has three translational rotation mechanisms and has a total of three translational drive units 11 and one rotational drive unit 12. If the two-dimensional sensor 9 recognizes the arrangement of the table 4 and the object 5 and can automatically grasp the correction amount, the command means 8 instructs the controller 3 on the movement amount of each motor 1 determined geometrically. The table 4 and the object 5 can be aligned by outputting and rotating and translating the table 4.

FIG. 13 is a schematic view of an alignment apparatus showing a third embodiment of the present invention.
FIG. 14 is a block diagram of an alignment apparatus showing a third embodiment of the present invention.
FIG. 15 is a schematic view of a biaxial drive translation rotation mechanism having two translation drive units used in an alignment apparatus showing a third embodiment of the present invention.
13 to 15, 1 is an electric motor (linear motor 1L (FIG. 14)), 2 is an operation amount detecting means, 3 is a controller, 4 is a table, 5 is an object, 6 is a translational rotation mechanism, and 7 is a machine. A base part, 8 is a command means, 9 is a two-dimensional position sensor, and 10 is a correction amount calculation means.
The second embodiment is different from the first embodiment in that a two-dimensional position sensor 9 and a correction amount calculating means 10 are added. The second embodiment is different from the second embodiment in that two two-dimensional position sensors 9 are provided.
Further, there are two translational rotation mechanisms 6, and the first translational rotation mechanism 6a is a biaxial translational rotation mechanism 16A having two translational drive units 11 shown in FIG. 15, and the first translational rotation mechanism 6b. These are the 1 axis | shaft translation rotation mechanisms 15A which have the one translation drive part 11 used for 1st Example.
The two-axis translation / rotation mechanism 16A and the one-axis translation / rotation mechanism 15A have the same translational and rotational configuration.

  The portion where the present invention is different from Patent Document 1 is a portion in which two translational rotation mechanisms 6 are provided on the lower surface of the table 4 and the table is moved in the XYθ directions.

  The present invention differs from Patent Document 2 in that it includes two translational rotation mechanisms 6, one translational rotation mechanism 6 has two translational drive units 11, and the other translational rotation mechanism 6 has one translational drive unit. 11.

FIG. 16 is a view showing the rotational movement of the table of the alignment apparatus showing the third embodiment of the present invention.
The rotational movement amount of the table 4 and each movement amount of the translational rotation mechanism 6 are determined geometrically.
A total of two translational rotation mechanisms 6 including a two-axis translational rotation mechanism 16A and a single-axis translational rotation mechanism 15A are used. As shown in FIG. 16, the first translational rotation mechanism 6a (two-axis translational rotation mechanism 16A) is δZ. _If the second translation rotation mechanism 6b (one-axis translation rotation mechanism 15A) is driven by δZ _{2y by} driving only _1x and δZ _1y , the table 4 rotates by Δθ.
To move the table 4 in the translation direction, the translation drive unit 11 of the two translation rotation mechanisms 6 may move only by a necessary component.

Next, a series of operations including the two two-dimensional position sensors 9 will be described.
FIG. 17 is a diagram showing a position correction method for an object by two two-dimensional position sensors of the alignment apparatus showing the third embodiment of the present invention.
Similar to the second embodiment, the position of the object 5 placed on the table 4 (FIGS. 13 and 14) is recognized as an image by the two-dimensional position sensor 9. In this embodiment, two two-dimensional position sensors 9 are used. However, as shown in FIG. 17, even if two images are used, the positional relationship between the two two-dimensional position sensors 9 is known in advance, so the table 4 Further, a mark written in advance on the object 5 and the characteristics of the object 5 are detected, and the rotation angle from the rotation center and the translational operation amount are obtained from the inclination angle.
As in the second embodiment, the correction angle Ф and the operation amount L are calculated by the correction amount calculation means 10, and the operation amount of each drive unit of the translational rotation drive mechanism 6 is obtained geometrically from the position of the table 4. Then, the command means 8 commands each controller 3 for the operation amount δZ _ij , the table 4 is positioned, and the position of the object 5 is corrected.

  In the present embodiment, two two-dimensional position sensors 9 are used. However, the number is not limited to two, and three, four, or more two-dimensional position sensors 9 may be used.

  As described above, the table 4 and the object 5 can be rotated and translated as long as it has two translational rotation mechanisms and a total of three translational drive units 11. If the arrangement of the table 4 and the object 5 is recognized by a plurality of two-dimensional sensors 9 and the correction amount can be automatically grasped, the command means 8 sends the movement amount of each motor 1 determined geometrically to the controller 3. By outputting a command, the table 4 and the object 5 can be aligned by rotating and translating the table 4.

FIG. 18 is a schematic view of an alignment apparatus showing a fourth embodiment of the present invention.
FIG. 19 is a block diagram of an alignment apparatus showing a fourth embodiment of the present invention.
18 and 19, the translational rotation mechanism 6a (FIG. 20) is the biaxial translational rotation mechanism 16A (FIG. 15) used in the third embodiment, and the translational rotation mechanism 6b (FIG. 20) is the first and second It is the uniaxial translation rotation mechanism 15B (FIG. 4) used for 2 Example. One two-dimensional position sensor 9 is used as in the second embodiment.

  The portion where the present invention is different from Patent Document 1 is a portion in which two translational rotation mechanisms 6 are provided on the lower surface of the table 4 and the table is moved in the XYθ directions.

  The part in which the present invention is different from Patent Document 2 includes two translational rotation mechanisms 6, one translational rotation mechanism 6 having two translational drive units 11, and another translational rotation mechanism 6 having one rotational drive unit. 12.

FIG. 20 is a view showing the rotational movement of the table of the alignment apparatus showing the fourth embodiment of the present invention.
The rotational movement amount of the table 4 and each movement amount of the translational rotation mechanism 6 are determined geometrically. Although the number of translational rotation mechanisms 6 is different from that of the first example, the biaxial translational rotation mechanism 16A, which is the first translational rotation mechanism 6a of the present example, is different from the uniaxial translational rotation mechanism 15A of the first example. As shown in FIG. 3 and FIG. 15, the number of translation drive units 11 is different, but the relationship between translation and rotational freedom is the same, so that the table 4 can be similarly rotated.
The translational movement of the table 4 is performed by driving the translational drive unit 11 of the biaxial translational rotation mechanism 16A. The rotation drive unit 12 of the single-axis translational rotation mechanism 15A holds the command 4 so that the table 4 does not rotate.
A series of operations using the two-dimensional position sensor 9 is the same as in the second embodiment.

  As described above, the table 4 and the object 5 can be rotated and translated as long as it has two translational rotation mechanisms and a total of three translational drive units 11. If the arrangement of the table 4 and the object 5 is recognized by a plurality of two-dimensional sensors 9 and the correction amount can be automatically grasped, the command means 8 sends the movement amount of each motor 1 determined geometrically to the controller 3. By outputting a command, the table 4 and the object 5 can be aligned by rotating and translating the table 4.

FIG. 21 is a block diagram of an alignment apparatus showing a fifth embodiment of the present invention.
FIG. 22 is a schematic view of a biaxial drive translation rotation mechanism having one translation drive unit and one rotation drive unit used in the alignment apparatus showing the fifth embodiment of the present invention.
21 and 22, the first translational rotation mechanism 6 a (FIG. 23) is a biaxial translational rotation mechanism 16 </ b> B having a translational drive unit 11 and a rotational drive unit 12. As shown in FIG. 22, the biaxial translation / rotation mechanism 16B has the same translational and rotational degree of freedom as in FIGS. 3 and 15, but the number of linear motors 1L and rotary motors 1R and their installation positions are different. The second translational rotation mechanism 6b is the uniaxial translational rotation mechanism 15A shown in FIG.

  The portion where the present invention is different from Patent Document 1 is a portion in which two translational rotation mechanisms 6 are provided on the lower surface of the table 4 and the table is moved in the XYθ directions.

  The part in which the present invention is different from Patent Document 2 includes two translational rotation mechanisms 6, one translational rotation mechanism 6, one translational drive unit 11 and one rotational drive unit 12, and another translational rotation mechanism. 6 is a portion having one translational drive unit 11.

FIG. 23 is a view showing the rotational movement of the table of the alignment apparatus showing the fifth embodiment of the invention.
The rotational movement amount of the table 4 and each movement amount of the translational rotation mechanism 6 are determined geometrically. The first translation and rotation mechanism 6a is different in the type and position of the electric motor 1 and operates in the translation drive unit 11 and the rotation drive unit 12, but has the same shape as the fourth embodiment, and the second translation rotation. The mechanism 6b may be considered in the same manner as in the first and second embodiments.
The translational movement of the table 4 may be performed by moving the translational drive unit 11 of the translational rotation mechanisms 6a and 6b, and the rotational drive unit 12 of the biaxial translational rotation mechanism 16B holds the command 4 so that the table 4 does not rotate. .
A series of operations using the two-dimensional position sensor 9 is the same as in the second embodiment.

  As described above, the table 4 and the object 5 can be rotated and translated if the two translational rotation mechanisms are provided and the two translational drive units 11 and the single rotation drive unit 12 are provided. If the arrangement of the table 4 and the object 5 is recognized by a plurality of two-dimensional sensors 9 and the correction amount can be automatically grasped, the command means 8 sends the movement amount of each motor 1 determined geometrically to the controller 3. By outputting a command, the table 4 and the object 5 can be aligned by rotating and translating the table 4.

FIG. 24 is a block diagram of an alignment apparatus showing a sixth embodiment of the present invention.
FIG. 25 is a schematic view of a biaxial drive translational rotation mechanism having one translational drive unit and one rotational drive unit used in the alignment apparatus showing the sixth embodiment of the present invention.
The first translational rotation mechanism 6a (FIG. 26) is a biaxial drive translational rotation mechanism 16C shown in FIG. 25, and includes a linear motor 1L and a rotary motor 1R.
The second translational rotation mechanism 6b (FIG. 26) is the uniaxial translational rotation mechanism 15C shown in FIG. Both translational rotation mechanisms 6 have the same configuration of freedom of rotation and translation, and the number of motors 1 is different.

  The portion where the present invention is different from Patent Document 1 is a portion in which two translational rotation mechanisms 6 are provided on the lower surface of the table 4 and the table is moved in the XYθ directions.

  The part in which the present invention is different from Patent Document 2 includes two translational rotation mechanisms 6, one translational rotation mechanism 6, one translational drive unit 11 and one rotational drive unit 12, and another translational rotation mechanism. 6 is a portion having one translational drive unit 11.

FIG. 26 is a view showing the rotational movement of the table of the alignment apparatus showing the sixth embodiment of the present invention. The rotational movement amount of the table 4 and each movement amount of the translational rotation mechanism 6 are determined geometrically.
If the biaxial translational rotation mechanism 16C and the uniaxial translational rotation mechanism 15C are operated as shown in FIG. 26, the table 4 rotates by Δθ.
To move the table 4 in the translation direction, the translation drive unit 11 needs to move only a necessary component.
The rotation drive unit 12 of the biaxial translational rotation mechanism 16C holds the command 4 so as not to rotate in the table 4 as a command 0.
A series of operations using the two-dimensional position sensor 9 is the same as in the second embodiment.

FIG. 27 is a block diagram of an alignment apparatus showing a seventh embodiment of the present invention.
FIG. 28 is a schematic view of a biaxial drive translation rotation mechanism having two translation drive units used in an alignment apparatus showing a seventh embodiment of the present invention.
The first translational rotation mechanism 6a (FIG. 29) is the biaxial drive translational rotation mechanism 16D shown in FIG. 28, and has two linear motors 1L. The second translational rotation mechanism 6b (FIG. 29) is the uniaxial translational rotation mechanism 15C shown in FIG. Both translational rotation mechanisms 6 have the same configuration of freedom of rotation and translation, and the number of motors 1 is different.

  The portion where the present invention is different from Patent Document 1 is a portion in which two translational rotation mechanisms 6 are provided on the lower surface of the table 4 and the table is moved in the XYθ directions.

  The present invention differs from Patent Document 2 in that it includes two translational rotation mechanisms 6, one translational rotation mechanism 6 has two translational drive units 11, and the other translational rotation mechanism 6 has one translational drive unit. 11.

FIG. 29 is a diagram showing the rotational movement of the table of the alignment apparatus showing the seventh embodiment of the present invention. The rotational movement amount of the table 4 and each movement amount of the translational rotation mechanism 6 are determined geometrically.
If the two-axis drive translation / rotation mechanism 16D and the one-axis translation / rotation mechanism 15C are operated as shown in FIG. 29, the table 4 rotates by Δθ.
To move the table 4 in the translation direction, the translation drive unit 11 needs to move only a necessary component.
The rotation drive unit 12 of the biaxial translational rotation mechanism 16D holds the command 4 so that the table 4 does not rotate.
A series of operations using the two-dimensional position sensor 9 is the same as in the second embodiment.

FIG. 30 is a block diagram of an alignment apparatus showing an eighth embodiment of the present invention.
In the figure, the first translational rotation mechanism 6a (FIG. 31) is the biaxial drive translational rotation mechanism 16D shown in FIG. 28 of the seventh embodiment, and has two linear motors 1L. The second translational rotation mechanism 6b is the uniaxial translational rotation mechanism 15B shown in FIG. 4 of the first embodiment.

  The portion where the present invention is different from Patent Document 1 is a portion in which two translational rotation mechanisms 6 are provided on the lower surface of the table 4 and the table is moved in the XYθ directions.

  The part in which the present invention is different from Patent Document 2 includes two translational rotation mechanisms 6, one translational rotation mechanism 6 having two translational drive units 11, and another translational rotation mechanism 6 having one rotational drive unit. 12.

FIG. 31 is a view showing the rotational movement of the table of the alignment apparatus showing the eighth embodiment of the present invention. The rotational movement amount of the table 4 and each movement amount of the translational rotation mechanism 6 are determined geometrically.
If the two-axis drive translation / rotation mechanism 16D and the one-axis translation / rotation mechanism 15B are operated as shown in FIG. 31, the table 4 rotates by Δθ.
To move the table 4 in the translation direction, the translation drive unit 11 needs to move only a necessary component.
The rotation drive unit 12 of the biaxial translational rotation mechanism 16D holds the command 4 so that the table 4 does not rotate.
A series of operations using the two-dimensional position sensor 9 is the same as in the second embodiment.

FIG. 32 is a block diagram of an alignment apparatus showing a ninth embodiment of the present invention.
FIG. 33 is a schematic view of a three-axis drive translation rotation mechanism having two translation drive units and one rotation drive unit used in the alignment apparatus showing the ninth embodiment of the present invention.
FIG. 34 is a schematic view of a plane-degree-of-freedom translational rotation mechanism used in an alignment apparatus showing a ninth embodiment of the invention.
In the figure, the first translational rotation mechanism 6a (FIG. 35) is a three-axis translational rotation mechanism 17A having two linear motors 1L and one rotary motor 1R shown in FIG. The second translational rotation mechanism 6b is a planar degree of freedom translational rotation mechanism 18A that does not have the electric motor 1 shown in FIG.

  The portion where the present invention is different from Patent Document 1 is a portion in which two translational rotation mechanisms 6 are provided on the lower surface of the table 4 and the table is moved in the XYθ directions.

  The present invention differs from Patent Document 2 in that it includes two translational rotation mechanisms 6, one translational rotation mechanism 6 having three electric motors 1, and another translational rotation mechanism 6.

FIG. 35 is a view showing the rotational movement of the table of the alignment apparatus showing the ninth embodiment of the invention. The rotational movement amount of the table 4 and each movement amount of the translational rotation mechanism 6 are determined geometrically.
If the triaxial translational rotation mechanism 17A operates as shown in FIG. 35, the planar degree of freedom translational rotation mechanism 18A moves in accordance with the triaxial translational rotation mechanism 17A, so that the table 4 rotates by Δθ.
To move the table 4 in the translation direction, the translation drive unit 11 needs to move only a necessary component.
The rotation drive unit 12 of the three-axis translational rotation mechanism 17A holds the command 4 so that the table 4 does not rotate.
A series of operations using the two-dimensional position sensor 9 is the same as in the second embodiment.

In addition, although the planar freedom degree translation rotation mechanism of a present Example was made into the structure shown in FIG. 34, it does not stick to this.
FIG. 36 is another example 1 of the schematic diagram of the planar degree-of-freedom translational rotation mechanism used in the alignment apparatus showing the ninth embodiment of the invention.
FIG. 37 is another example 2 of the schematic diagram of the planar degree of freedom translational rotation mechanism used in the alignment apparatus showing the ninth embodiment of the invention.
FIG. 36 and FIG. 37 also show the planar degree-of-freedom translational rotation mechanisms 18B and 18C that do not have the electric motor 1, and may be used in the same manner as 18A used in this embodiment.

In the present embodiment, the three-axis translational rotation mechanism 17A and the planar degree-of-freedom translational rotation mechanism 18A without the electric motor 1 are used, but the translational rotation mechanism 6 having the electric motor 1 may be used together with the three-axis translational rotation mechanism 17. good.
FIG. 38 is another example 1 of the configuration diagram of the alignment apparatus showing the ninth embodiment of the invention.
The first translational rotation mechanism 6a is the same three-axis translational rotation mechanism 17A as in the present embodiment, and the second translational rotation mechanism 6b is the table 4 even if the one-axis translational rotation mechanism 15A shown in FIG. Can be rotated and translated.
FIG. 39 is another example 2 of the configuration diagram of the alignment apparatus showing the ninth embodiment of the invention. The first translational rotation mechanism 6a is the same three-axis translational rotation mechanism 17A as in the present embodiment, and the second translational rotation mechanism 6b is the table 4 even if the one-axis translational rotation mechanism 15B shown in FIG. Can be rotated and translated.
FIG. 40 is another example 3 of the configuration diagram of the alignment apparatus showing the ninth embodiment of the invention.
The first translation / rotation mechanism 6a is a three-axis drive translation / rotation mechanism 17A similar to that of the present embodiment, and the second translation / rotation mechanism 6b is a biaxial drive / translation / rotation mechanism 16A shown in FIG. The table 4 can be rotated and translated.

FIG. 41 is a block diagram of an alignment apparatus showing a tenth embodiment of the present invention.
FIG. 42 is a schematic view of a three-axis drive translation rotation mechanism having two translation drive units and one rotation drive unit used in the alignment apparatus showing the tenth embodiment of the present invention.
41 and 42, the first translational rotation mechanism 6a (FIG. 43) is the three-axis drive translational rotation mechanism 17B shown in FIG. 42, and the second translational rotation mechanism 6b is the uniaxial drive shown in FIG. This is a translational rotation mechanism 15C.

  The portion where the present invention is different from Patent Document 1 is a portion in which two translational rotation mechanisms 6 are provided on the lower surface of the table 4 and the table is moved in the XYθ directions.

  The present invention differs from Patent Document 2 in that it includes two translational rotation mechanisms 6, one translational rotation mechanism 6 having three electric motors 1, and another translational rotation mechanism 6.

FIG. 43 is a view showing the rotational movement of the table of the alignment apparatus showing the tenth embodiment of the present invention. The rotational movement amount of the table 4 and each movement amount of the translational rotation mechanism 6 are determined geometrically.
If the three-axis drive translational rotation mechanism 17B and the one-axis drive translational rotation mechanism 15C operate as shown in FIG. 43, the table 4 rotates by Δθ.
To move the table 4 in the translation direction, the translation drive unit 11 needs to move only a necessary component.
The rotation driving unit 12 of the three-axis translational rotation mechanism 17B holds the command 4 so that the table 4 does not rotate.
A series of operations using the two-dimensional position sensor 9 is the same as in the second embodiment.

In the present embodiment, the configuration shown in FIG. 41 is used. However, the configuration is not particularly limited.
FIG. 44 is another example 1 of the configuration diagram of the alignment apparatus showing the tenth embodiment of the invention.
FIG. 44 shows an example in which the three-axis drive translation / rotation mechanism 17B and the one-axis drive translation / rotation mechanism 15B shown in FIG. 4 are used. If a plurality of translation rotation mechanisms 6 can be used to support the table 4 and other loads in a distributed manner, the total number of the electric motors 1 is three or more, and the translation rotation mechanism 6 is arranged so that XY translation and rotation are possible. good.

Further, the triaxial drive translational rotation mechanism 17 may place the rotation drive unit 12 at the lowermost part.
FIG. 45 is another example of a schematic diagram of a three-axis drive translation rotation mechanism having two translation drive units and one rotation drive unit used in the alignment apparatus showing the tenth embodiment of the present invention. An example placed at the bottom is shown.

Furthermore, a mechanism that is not taken up in the above embodiments may be used for the plurality of translational rotation mechanisms 6.
FIG. 46 is another example 1 of the schematic diagram of the single-axis drive translational rotation mechanism used in the alignment apparatus showing the tenth embodiment of the invention. The single-axis drive translational rotation mechanism 15D has a translational freedom unit 13 and a translational drive unit 11 orthogonal to the translational freedom unit 13 on the rotational freedom unit 14 as shown in the figure.
FIG. 47 is another example 2 of the schematic diagram of the single-axis drive translational rotation mechanism used in the alignment apparatus showing the tenth embodiment of the invention.
This single-axis drive translational rotation mechanism 15E has two orthogonal translational freedom units 13 on the rotation drive unit 12 as shown in the figure.
This single-axis drive translation rotation mechanism 15E has a rotation drive unit 12 on two orthogonal translational freedom degree units 13 as shown in the figure.
For the uniaxial driving, the uniaxial driving translation / rotation mechanism 15D of FIG. 46 or the uniaxial driving translation / rotation mechanism 15E of FIG. 47 may be used. The same applies to the case of two or more axes.
Further, the biaxial translational drive may be substituted by a plane motor, and any one that freely moves in the plane may be used. If the operating range of the rotational movement is sufficient, the rotational movement may be entrusted with a planar motor.

In this embodiment, two translational rotation mechanisms 6 are used. However, as in the first and second embodiments, three translational rotation mechanisms 6 may be used, and four or more translational rotation mechanisms 6 may be used. May be used.
FIG. 48 is a top view of an alignment apparatus showing a tenth embodiment of the present invention and a diagram showing another example 1 of the arrangement of the translational rotation mechanism.
As shown in the figure, the first translation rotation mechanism 61 to the fourth translation rotation mechanism 64 are arranged at the center of each side of the table 4 so that the opposing translation rotation mechanisms are driven in the same direction.
FIG. 49 is a top view of an alignment apparatus showing a tenth embodiment of the present invention and a second example of the arrangement of the translational rotation mechanism.
As shown in the figure, the first translation rotation mechanism 61 to the fourth translation rotation mechanism 64 are arranged at each corner of the table 4 so that the opposing translation rotation mechanisms are driven in the same direction.
FIG. 50 is a top view of an alignment apparatus showing a tenth embodiment of the present invention and a third example of the arrangement of the translational rotation mechanism.
As shown in the figure, the first translation rotation mechanism 61 to the fourth translation rotation mechanism 64 are arranged at each corner of the table 4 so that the opposite translation rotation mechanisms are driven in the same direction, and the fifth The translation / rotation mechanism 65 is arranged at the center of the table 4.
FIG. 51 is a top view of an alignment apparatus showing a tenth embodiment of the present invention and a fourth example of the arrangement of the translational rotation mechanism.
As shown in the figure, the first translation rotation mechanism 61 to the fourth translation rotation mechanism 64 are arranged at each corner of the table 4 so that the opposite translation rotation mechanisms are driven in the same direction, and the fifth And the 6th translation rotation mechanism 65 and 66 is arrange | positioned in the center of the opposing edge of the table 4, respectively.
As each translation rotation mechanism in the above example, a plurality of translation rotation mechanisms 6 having two or more translation drive units 11 and one or more rotation drive units 12 may be used, or three or more translation drive units 11 may be used. You may use the some translation rotation mechanism 6 which has.
A plurality of translation rotation mechanisms 6 may be arranged so that the table 4 can be translated in two independent XY directions and the table 4 can be rotated.

  As described above, even when the table 4 becomes large and becomes heavy, the load is dispersedly supported by the plurality of translational rotation drive mechanisms 6, and the position is maintained even when an external force acts on the table 4. Thus, the table 4 is accurately positioned at an arbitrary position.

Even if the table is enlarged, the translational rotation mechanism can be distributed and supported to support the load, so the table can be configured with a reduced height, so it can be applied to applications such as reducing the device height. .
In addition, even if the device becomes larger, it can be configured by using multiple standard linear motors without using special large linear motors, so that the driving force can be distributed. There is also an advantage that it can be procured easily compared to special products.

1 is a schematic view of an alignment apparatus showing a first embodiment of the present invention. It is a block diagram of the alignment apparatus which shows 1st Example of this invention. It is the schematic of the uniaxial drive translation rotation mechanism which has one translation drive part used for the alignment apparatus which shows 1st Example of this invention. It is the schematic of the uniaxial drive translation rotation mechanism which has one rotation drive part used for the alignment apparatus which shows 1st Example of this invention. It is a top view of the alignment apparatus which shows 1st Example of this invention, and a figure which shows arrangement | positioning of a translation rotation mechanism. It is a figure which shows the rotational movement of the table of the alignment apparatus which shows 1st Example of this invention. It is a figure which shows the translational movement of the table of the alignment apparatus which shows 1st Example of this invention. It is the schematic of the alignment apparatus which shows 2nd Example of this invention. It is a block diagram of the alignment apparatus which shows 2nd Example of this invention. It is the schematic of the uniaxial drive translation rotation mechanism which has one translation drive part used for the alignment apparatus which shows 2nd Example of this invention. It is a figure which shows the rotational movement of the table of the alignment apparatus which shows 2nd Example of this invention. It is a figure which shows the position correction method of the target object by the two-dimensional position sensor of the alignment apparatus which shows 2nd Example of this invention. It is the schematic of the alignment apparatus which shows 3rd Example of this invention. It is a block diagram of the alignment apparatus which shows 3rd Example of this invention. It is the schematic of the biaxial drive translation rotation mechanism which has two translation drive parts used for the alignment apparatus which shows 3rd Example of this invention. It is a figure which shows the rotational movement of the table of the alignment apparatus which shows 3rd Example of this invention. It is a figure which shows the position correction method of the target object by two two-dimensional position sensors of the alignment apparatus which shows 3rd Example of this invention. It is the schematic of the alignment apparatus which shows 4th Example of this invention. It is a block diagram of the alignment apparatus which shows 4th Example of this invention. It is a figure which shows the rotational movement of the table of the alignment apparatus which shows 4th Example of this invention. It is a block diagram of the alignment apparatus which shows 5th Example of this invention. It is the schematic of the biaxial drive translation rotation mechanism which has one translation drive part and one rotation drive part which are used for the alignment apparatus which shows 5th Example of this invention. It is a figure which shows the rotational movement of the table of the alignment apparatus which shows 5th Example of this invention. It is a block diagram of the alignment apparatus which shows 6th Example of this invention. It is the schematic of the biaxial drive translation rotation mechanism which has one translation drive part and one rotation drive part which are used for the alignment apparatus which shows 6th Example of this invention. It is a figure which shows the rotational movement of the table of the alignment apparatus which shows 6th Example of this invention. It is a block diagram of the alignment apparatus which shows 7th Example of this invention. It is the schematic of the biaxial drive translation rotation mechanism which has two translation drive parts used for the alignment apparatus which shows 7th Example of this invention. It is a figure which shows the rotational movement of the table of the alignment apparatus which shows 7th Example of this invention. It is a block diagram of the alignment apparatus which shows 8th Example of this invention. It is a figure which shows the rotational movement of the table of the alignment apparatus which shows 8th Example of this invention. It is a block diagram of the alignment apparatus which shows 9th Example of this invention. It is the schematic of the three-axis drive translation rotation mechanism which has two translation drive parts and one rotation drive part used for the alignment apparatus which shows 9th Example of this invention. It is the schematic of the planar freedom degree translation rotation mechanism used for the alignment apparatus which shows 9th Example of invention. It is a figure which shows the rotational movement of the table of the alignment apparatus which shows 9th Example of this invention. It is the other example 1 of the schematic of the planar freedom degree translation rotation mechanism used for the alignment apparatus which shows 9th Example of this invention. It is the other example 2 of the schematic of the planar freedom degree translation rotation mechanism used for the alignment apparatus which shows 9th Example of this invention. It is the other example 1 of the block diagram of the alignment apparatus which shows 9th Example of this invention. It is the other example 2 of the block diagram of the alignment apparatus which shows 9th Example of this invention. It is the other example 3 of the block diagram of the alignment apparatus which shows 9th Example of this invention. It is a block diagram of the alignment apparatus which shows 10th Example of this invention. It is the schematic of the three-axis drive translation rotation mechanism which has two translation drive parts and one rotation drive part used for the alignment apparatus which shows 10th Example of this invention. It is a figure which shows the rotational movement of the table of the alignment apparatus which shows 10th Example of this invention. It is the other example 1 of the block diagram of the alignment apparatus which shows 10th Example of this invention. It is the other example of the schematic of the three axis drive translation rotation mechanism which has two translation drive parts and one rotation drive part used for the alignment apparatus which shows 10th Example of this invention. It is the other example 1 of the schematic of the uniaxial drive translation rotation mechanism used for the alignment apparatus which shows 10th Example of this invention. It is the other example 2 of the schematic of the uniaxial drive translation rotation mechanism used for the alignment apparatus which shows 10th Example of this invention. It is a top view of the alignment apparatus which shows 10th Example of this invention, and the figure which shows the other example 1 of arrangement | positioning of a translation rotation mechanism. It is a top view of the alignment apparatus which shows 10th Example of this invention, and the figure which shows the other example 2 of arrangement | positioning of a translation rotation mechanism. It is a top view of the alignment apparatus which shows 10th Example of this invention, and the figure which shows the other Example 3 of arrangement | positioning of a translation rotation mechanism. It is a top view of the alignment apparatus which shows 10th Example of this invention, and the figure which shows the other example 4 of arrangement | positioning of a translation rotation mechanism. It is the front view which showed one Example of the stage apparatus incorporating the linear motor by the 1st example of the conventional apparatus, and was seen from the X direction which is one direction. It is a top view which shows the stage apparatus of FIG. 50 by the 1st example of a conventional apparatus. It is a partially broken exploded perspective view of the biaxial parallel / uniaxial turning motion guide mechanism according to the second example of the conventional device. A two-axis parallel / one-axis turning table device using a two-axis parallel / one-axis turning movement guide mechanism according to a second example of the conventional device. FIG. 4A is a plan view showing a table omitted by a two-dot chain line, and FIG. 4B is a front view. It is a top view of the table by the 2nd example of the conventional apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Electric motor 1L Linear motor 1R Rotary type motor 2 Operation amount detection means 3 Controller 4 Table 5 Object 6 Translation rotation mechanism 7 Machine base part 8 Command means 9 Two-dimensional position sensor 10 Correction amount calculation means 11 Translation drive part 12 Rotation drive Part 13 Translation degree of freedom part 14 Rotation degree of freedom part 15 1 axis drive translation rotation mechanism (15A, 15B, 15C), (15D, 15E)
16 2-axis drive translational rotation mechanism (16A, 16B, 16C, 16D)
17 3-axis drive translational rotation mechanism (17A, 17B, 17C)
18 Planar degree of freedom translational rotation mechanism (18A, 18B, 18C)
21 linear motion guide 22 linear motion guide block 23 bearing 61 to 66 for rotation 1st translation rotation mechanism-6th translation rotation mechanism
(IKO conventional)
101 First stage 102 Second stage 103 Rotating stage 104 Base 105, 106 Linear guide unit 107 Track rail 108 Slider 109 Stopper 110, 114, 115 Code 111 First linear motor 112 Second linear motor 113 Linear motor 117 for rotation Sensor 118, Linear scale 119, 121, 122, 125 Protruding portion 120, Table 126 Screw hole 128 for mounting, Bed 134 Primary side of third linear motor 141 Mounting hole 139 Secondary side of third linear motor (conventional THK)
201 2-axis parallel / single-axis turning motion guide mechanism 202 first track rail 204 moving block 205 ball (rolling element)
206 Second track rail 210 First recess 211 Second recess 212 Ball rolling groove (first track rail)
213 Ball rolling groove (first recess)
214 Ball escape passage 215 Direction change path 216 Side cover 217 Ball rolling groove (second track rail)
218 Ball rolling groove (second recess)
219 Ball escape passage 220 Direction change path 221 Side cover 233 Table (second member)
234 Base (first member)
237 Linear drive mechanism 238 Rotating motor 239 Feed screw mechanism 241 Nut 242 Screw shaft 243 Bearing (Double row angular contact type)
244 Bearing support 247 Joint member 249 Brake mechanism 270 Two-axis parallel motion guide 280 Rotating motion guide 206 Rotation motor

Claims (8)

In an alignment apparatus that moves a table on which an object is placed and positions the object at a predetermined position,
An electric motor control device having an electric motor for driving, a detecting means for detecting an operation amount of a mechanism part to be detected, and a controller for controlling the electric motor in response to a command signal;
Command means for giving an operation command to the controller;
At least two translational rotation mechanisms having two translational degrees of freedom with translational degrees of freedom and one rotational degree of freedom with rotational degrees of freedom;
A machine base portion on which the translational rotation mechanism is disposed,
The translation rotation mechanism is a one-axis drive translation rotation mechanism provided with one electric motor, a two-axis drive translation rotation mechanism provided with two electric motors, or a three-axis drive translation rotation mechanism provided with three electric motors. There,
The translation rotation mechanism has a translation drive unit that is driven in the translation direction by the electric motor,
At least one of the at least two translational rotation mechanisms is the two-axis drive translational rotation mechanism or the three-axis drive translational rotation mechanism, and the sum total of the electric motor control device is at least three,
An alignment apparatus for translating and rotating the table. In an alignment apparatus that moves a table on which an object is placed and positions the object at a predetermined position,
An electric motor control device having an electric motor for driving, a detecting means for detecting an operation amount of a mechanism part to be detected, and a controller for controlling the electric motor in response to a command signal;
Command means for giving an operation command to the controller;
At least two translational rotation mechanisms having two translational degrees of freedom with translational degrees of freedom and one rotational degree of freedom with rotational degrees of freedom;
A machine base portion on which the translational rotation mechanism is disposed,
The translation rotation mechanism is a one-axis drive translation rotation mechanism provided with one electric motor, a two-axis drive translation rotation mechanism provided with two electric motors, or a three-axis drive translation rotation mechanism provided with three electric motors. There,
The translation rotation mechanism has either a translation drive unit that drives in the translation direction with the electric motor or a rotation drive unit that drives in the rotation direction with the electric motor,
At least one of the at least two translational rotation mechanisms is the two-axis drive translational rotation mechanism or the three-axis drive translational rotation mechanism,
At least one of the translational rotation mechanisms has at least one of the rotation driving units, and the total number of the motor control devices is at least three,
An alignment apparatus for translating and rotating the table. The translational rotation mechanism includes the translational degree of freedom part on the translational degree of freedom part, and further includes the rotational degree of freedom part on the translational degree of freedom part. The alignment apparatus described. 3. The translation rotation mechanism includes the rotation degree of freedom part on the translation degree of freedom part, and further includes the translation degree of freedom part on the rotation degree of freedom part. The alignment apparatus described. The translational rotation mechanism includes the translational degree of freedom part on the rotational degree of freedom part, and further includes the translational degree of freedom part on the translational degree of freedom part. The alignment apparatus described. The translational rotation mechanism is a planar degree-of-freedom translational rotation mechanism without the electric motor,
The alignment apparatus according to claim 1 , further comprising a translational rotation mechanism having a planar degree of freedom . A two-dimensional position sensor that captures an arrangement of an object placed on the table unit;
Correction amount calculation means for calculating a correction amount for correcting the arrangement of the object placed on the table unit,
By grasping the arrangement of the object placed on the table unit captured by the two-dimensional position sensor, the motor is driven, and the table unit is translated or rotated in two directions. The alignment apparatus according to claim 1 , wherein the position is corrected . The alignment apparatus according to claim 7, wherein a plurality of the two-dimensional position sensors are provided, and the arrangement of the object is captured by the plurality of two-dimensional position sensors .

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