JPH10206574A - 6 degree-of-freedom stage mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a 6 degree-of-freedom stage mechanism by moving a plurality of carriages along a plurality of straight track members being arranged in parallel and connecting both edges of a plurality of links to the carriages and a stage at the upper part of the straight track member. SOLUTION: Straight members 2 and 3 are arranged in parallel on a substrate 1, a plurality of carriages 4a-4d are mounted to each so that they can travel, and the configuration of a direct straight track member support is applied. The carriages 4a and 4b are connected to one edge side of links 6a and 6b via a connection member 5. The links 6a and 6b form a 2 degree-of-freedom pair, thus rotating the links 6a and 6b around X axis in addition to the direction of rotation. The other edge side of the links 6a and 6b is mounted to a shaft, a connection member 7 for forming a 3 degree-of-freedom pair with a spherical surface bearing part is provided, and connection is made to one side of a stage 8 via it. With this structure, no pile-up method is required, each kind of motor for drive is provided at the substrate 1, thus obtaining a stage mechanism with 6 degree-of-freedom while minimizing a required drive power.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is applicable to an automatic welding robot, a care chair, an optical axis alignment device, an amusement device using virtual reality, and the like, in addition to a precision measuring instrument, a precision processing machine, a precision positioning device, and the like. The present invention relates to a six-degree-of-freedom stage mechanism that can be used, in particular, a six-degree-of-freedom stage mechanism that rationally utilizes a linear motion linear track member receiving mechanism.

[0002]

2. Description of the Related Art Heretofore, the concept of receiving a linear motion linear track member has been limited to the idea that the stage is simply moved in one desired direction. A plurality of linear motion linear track member receivers are stacked on each other, that is, a stage mechanism having a so-called serial structure. For example, in a so-called XY stage in which the stage is configured to be movable in the vertical and horizontal directions with respect to the support, that is, in a first axis direction and a second axis direction orthogonal to each other, a pair of left and right linear motion linear track members is used. The above-described movement is configured by combining two sets of uniaxial movement mechanisms configured to be movable in one direction by two feed screw mechanisms so that the movement directions are orthogonal to each other.

[0003] In addition to such vertical and horizontal movements, an XYZ moving table capable of moving in a third axis direction orthogonal to the first axis and the second axis, that is, in a height direction, The uniaxial motion mechanism is also overlapped and combined in the third axis direction. When the rotation is enabled, the θ-axis motion mechanism is combined. To enable the tilt of the stage, such a motion mechanism is combined. .

[0004]

However, in such a stage mechanism having a serial structure, a. The required driving force is large, b. Error accumulation occurs, c. Due to problems such as high cost, a multi-degree-of-freedom stage mechanism that does not employ the stacking method, that is, a stage mechanism having a so-called parallel structure, has recently been proposed. In view of the above, the present invention provides a 6-degree-of-freedom stage mechanism in a so-called parallel structure by rationally using a linear motion linear track member receiver, thereby providing a conventional serial structure stage mechanism. It is intended to solve the problem.

[0005]

In order to solve the above-mentioned problems, according to the present invention, first, first and second linear track members arranged in parallel, and first and second linear track members are arranged along the first and second linear track members. A plurality of carriages movably mounted and a drive mechanism for moving each carriage along a linear track member;
A plurality of links having one end connected to each carriage;
A stage configured above the first and second linear track members and connected to and supported by the other end of each link;
The carriage includes first and second carriages provided on both the first and second linear track members, a third carriage provided on at least one side of the first and second linear track members, and a first carriage. And a fourth carriage provided on one side of the second linear track member. One end of each of the first and second links having the same length is connected to the first and second carriages. ,
The other ends of the first and second links are axially attached to each other,
The third carriage is connected to each side of the stage located above the second linear track member, and the third carriage has the same length as the link,
One end of the third link in the same direction as one side is connected, and the other end is on the side of the stage that is horizontally separated from the first and second link connection positions toward the third carriage. And the fourth carriage is connected to one end of the fourth link, and the other end is connected to an intermediate portion between the sides of the stage. Each of the carriages and the links is connected via a two-degree-of-freedom pair connecting member configured to be rotatable about an axis parallel to the linear track member, while being connected via the configured three-degree-of-freedom pair connecting member. We propose a 6-DOF stage mechanism.

According to the present invention, in the above structure, the position of the stage connecting the other end of the fourth link is set at an intermediate portion on a straight line connecting the connecting positions of the first and second links. suggest.

According to the present invention, in the above configuration, the driving mechanism for moving each carriage along the linear track member is a linear actuator such as a feed screw mechanism having a screw shaft installed along the linear track member as an element. It is proposed to configure by

Further, according to the present invention, in the above configuration, 3
The connecting member having a pair of degrees of freedom includes a first member having a spherical body provided at the tip of a rod, a second member having a spherical concave portion larger than the outer diameter of the spherical body, and a spherical surface of the first member. It is proposed that the body is constituted by a third member holding a large number of balls interposed in a gap formed when the body is fitted in the spherical concave portion of the second member.

In the above-mentioned present invention, a right-handed coordinate system in which the direction of the linear track member is the X-axis direction, the depth direction of the stage is the Y-axis direction, and the height direction of the stage is the Z-axis direction is considered. In this state, when all the carriages of both the linear track members are first moved by the same distance in one direction of the linear track members, the stage can be moved in the X-axis direction without changing the posture. The stage is moved by moving the first and second carriages of both linear track members in the direction approaching or moving away from each other by the same distance, and simultaneously moving the third and fourth carriages appropriately to adjust the position. It can move in the Z-axis direction. By making the movement of the first and second carriages in the Z-axis direction different for each of the linear track members, the stage can be rotated around the X-axis and tilted. By moving the third carriage and adjusting the position of the fourth carriage as needed, the stage can be rotated around the Y axis and tilted. The first and second carriages are moved by the same distance in the opposite direction with respect to each linear track member,
By appropriately moving the third carriage and adjusting the position, the stage can be turned around the Z axis. By moving the fourth carriage and adjusting the positions of the first, second and third carriages, the stage can be moved in the Y-axis direction. By the above operation, the stage performs the motion with six degrees of freedom, and the positioning can be performed.

[0010]

Embodiments of the present invention will be described below with reference to the accompanying drawings. First, FIGS. 1 to 4 show the first embodiment in a basic posture of a stage.
Reference numeral 1 denotes a base on which first and second linear track members 2 and 3 are arranged in parallel. These first and second
A plurality of carriages 4 (4
a, 4b, 4c, 4d) are movably mounted, and these can apply the configuration of the linear motion linear track member receiver. In this configuration, as shown in each figure, the direction of the linear track members 2 and 3 is the X axis, the horizontal direction perpendicular to the linear track members 2 and 3, and the depth direction of the stage described later is the Y axis. A right-handed coordinate system with the height direction of the stage as the Z axis will be described below.

FIG. 2 is a sectional view taken along the line AA of FIG. 1 and shows the direction of the carriage on the first linear track member 2 side.
Reference numerals a and 4b denote first and second carriages, respectively. One end sides of the first and second links 6a, 6b are connected to the first and second carriages 4a, 4b via first connecting members 5a, 5b. These connecting members 6a, 6b are 2
The configuration is such that a pair of degrees of freedom is formed, that is, in addition to the rotation directions of the links 6a and 6b, the rotation in the axial direction indicated by the one-dot chain line in the drawing, that is, the rotation about the X axis is possible. The other end sides of the first and second links 6a and 6b are mounted on a shaft, and a second connecting member 7 is installed here.
The other ends of the second links 6a and 6b are connected to one side of the stage 8, that is, to the first linear track member 2 side. The second connecting member 7 has a three-degree-of-freedom pair, and a specific configuration example thereof will be described later. In the drawing, the second link 6b is constituted by a pair of link members sandwiching the first link 6a, and the first and second connecting members 5, 7 also correspond to such a configuration. Make up. Reference numeral 4c denotes a third carriage movable on the right side of the second carriage in the drawing, and the third carriage 4c is connected to the third carriage 4c via the first connecting member 5 having the same two degrees of freedom as described above. One end of a third link 6c having the same length in the same direction as the second link 6b is connected, and the other end of the third link 6c has the same degree of freedom as the above described second connection. Through a member 7, it is connected to one side of the stage 8 which is appropriately separated in the X-axis direction from the second connecting member 7 on the first and second other ends.

FIG. 3 is a sectional view taken along the line BB of FIG.
The third carriage 4c on the first linear track member 2 side is also shown in FIG. The third carriage 4c
Can also be configured on the second linear track member 3 side. Reference numerals 4a and 4b shown in FIG. 3 are carriages of the second linear track member 3, and these carriages 4a and 4b
b and the links 6a and 6b connected thereto have the same configuration as the first linear track member 2 side, and have the same position on the X-axis, and the first and second links 6a and 6b, respectively. A straight line L connecting between the connecting members 7 on the other end side of the line coincides with the Y-axis direction. In addition to the first and second carriages 4a and 4b, a fourth carriage 4 movable on the left side of the first carriage 4a in FIG.
d is provided. A fourth link 6d is connected to the fourth carriage 4d via a first connecting member 5 having a pair of two degrees of freedom similar to the above, and the other end of the fourth link 6d is connected to the above. The stage 8 is connected to the stage 8 via a second connecting member 7 having the same three degrees of freedom. This connection position P
It is not at the side of the stage 8 but at an intermediate portion between the sides. This connection position P can be set at an appropriate position in the intermediate portion between the sides, but is not the position shown in FIGS.
As shown in FIG. 5, when the center position is on the straight line L, the control of the position of the stage 8 becomes easier.

The above carriages 4a, 4b, 4c, 4
The drive mechanism d is configured to be independently movable. In this embodiment, as shown in FIGS. 1, 4 and 5, the driving mechanism is constituted by a feed screw mechanism having a screw shaft 9 installed in parallel along the linear track members 2, 3. doing. That is, on the first linear track member 2 side, the first, second, and third carriages 4a, 4b,
4c, first, second and third screw shafts 9a,
9b and 9c, and the second linear track member 3
The first, second and fourth carriages 4a, 4
b, 4d, the first, second, and fourth screw shafts 9
a, 9b and 9d are installed. Driving motors (not shown) are provided at the ends of the screw shafts 9a, 9b, 9c, 9d. In addition, the drive mechanism can be configured by an appropriate linear actuator.

FIGS. 6 and 7 show a specific example of the second connecting member 7 having three degrees of freedom and an even number.
Is a first member 1 provided with a spherical body 11 at the tip of a rod 10.
2 and a spherical recess 13 larger than the outer diameter of the spherical body 11
And the spherical member 1 of the first member 12
The third member 16 holds a large number of balls 15 interposed in a gap formed when the first member 1 is fitted in the spherical concave portion 13 of the second member 14. In this configuration, since the relative rotation about the axis shown by the dashed line in FIG. 6 is possible and the relative rotation shown in FIG. 7 is possible, the connecting member has three degrees of freedom. Such a second
The connecting member 7 is formed by, for example, fixing the rod 10 of the first member 12 to each link 6 and fixing the second member 14 to a support piece 15 protruding from the stage 8. 6 and various parts of the stage 8 can be connected.
Needless to say, the fixing method can be reversed.

In the above configuration, the movement in each axial direction and around the axis will be described with the position and posture of the stage 8 shown in FIGS. 1 to 4 (or FIG. 5) as an initial state. First, in the initial state, both the straight track members 2, 3
4a, 4b, 4c; 4a, 4b, 4
When d is moved in one direction of the linear track members 2 and 3 by the same distance, the connection position between the stage 8 and each of the links 6a, 6b, 6c and 6d does not change at all. In the positive and negative directions. The moving distance in the X-axis direction can be increased by increasing the length of the linear track members 2 and 3, and an appropriate stroke can be obtained without much restriction.

Next, in the initial state, as shown in FIG. 8, when the first and second carriages 4a and 4b of the two linear track members 2 and 3 are moved by the same distance in the direction away from each other,
The stage 8 connecting the first and second links 6a and 6b is lowered. The third carriage 4c is moved to the second carriage 4b so that the stage 8 can be lowered.
When the third link 6c moves the same distance in the same direction as
Therefore, the stage 8 is lowered in the Z-axis direction while being kept horizontal by the respective links 6a, 6b, 6c. At this time, the fourth carriage 4d
Is the fourth link 6d that changes as the stage 8 descends
By moving in the direction of the arrow in the figure to match the predetermined three-dimensional posture, there is no mechanical interference. The stage 8 can be raised in the Z-axis direction by the reverse operation. The movement of each carriage 4 for causing these stages 8 to move can be controlled as a target value using the position of each carriage 4 calculated from a desired stage position and posture, including the operation described later. it can.

Next, in the initial state, the first and second carriages 4a and 4b are left as they are, and the third carriage 4
When c is moved rightward in the figure, the connection position between the third link 6c and the stage 8 is lowered as shown in FIG. 9, so that the stage 8 is connected to the first and second links 6a and 6b and the stage 8
With the connection position with the fulcrum as a fulcrum, it is inclined rightward in the figure. That is, the stage 8 moves around the Y axis. At this time, the fourth
When the connection position P between the link 6d and the stage 8 is as shown in FIGS. 1 and 4, the position is raised, and the fourth carriage 4d is moved rightward to compensate. However, as shown in FIG. 5, when the connection position P is a position on the straight line L, such compensation is unnecessary.

Next, in the initial state, when the first and second carriages 4a and 4b are moved by the same distance in the opposite direction on the respective linear track members 2 and 3 without changing the relative position for convenience, as shown in FIG. Thus, the stage 8 can be turned around the Z axis. In this movement, the first and second links 6a and 6b rotate around the X axis as shown in the figure,
Because the connection position between them and the stage 8 is slightly lowered,
By lowering the distance between the first and second carriages 4a and 4b by an appropriate amount, the lowering can be compensated. Third link 6 associated with the turning of stage 8
Changes in the three-dimensional positions of c and the fourth link 6d can be compensated by moving the third and fourth carriages 4c and 4d, respectively. FIG. 10 corresponds to the configuration of FIG. 5. If the connecting position P is the center position on the straight line L as described above, the connecting position becomes the position of the turning axis. No compensation for the fourth carriage 4d is required.

Next, referring to FIG.
Stage 8 in movement of second carriages 4a, 4b
The movement in the Z-axis direction is made different for each of the linear track members 2 and 3, for example, as shown in FIG. 11, the first and second links 6a and 6b and the stage 8 on the second linear track member 3 side. Is lower than the height of the connection position between the first, second, and third links 6a, 6b, 6c on the first linear track member 2 side and the stage 8, the stage 8 is moved to the second position. The second track member 3 moves about the X axis so that the side of the track member 3 becomes lower. Even in this movement, compensation can be performed by moving the fourth carriage 4d so as to correspond to a predetermined three-dimensional position of the fourth link 6d.

Next, in the initial state, the other carriage 4
When the fourth carriage 4d is moved while leaving a, 4b, and 4c for convenience, for example, in FIGS. 3 and 4 (or FIG. 5), when the fourth carriage 4d is moved leftward in the figure,
The stage 8 is moved rightward in FIG. 12 at a position where the stage 8 is connected to the fourth link 6d. Therefore, the stage 8 uses the first, second, and third links 6a, 6b, and 6c as a parallel link mechanism and X-axis. , While rotating clockwise in the figure, moves rightward in a horizontal state, that is, moves in the Y-axis direction. The movement of the stage 8 in the Y-axis direction is performed along the rotation trajectory of each link. However, if the movement in the Z-axis direction is combined, the movement of the stage 8 in the Z-axis direction due to the rotation trajectory is compensated. , The movement in the Y-axis direction can be performed literally.

As described above, according to the present invention, a stage mechanism having six degrees of freedom can be constructed without using the stacking method. In the present invention, the position and posture of the stage are determined by the positions of the carriages and their intervals, and in order to move the stage to the desired position and posture, the position and posture of each carriage are determined from the desired position and posture. Can be easily controlled by calculating.

[0022]

As described above, the present invention has the following advantages. Compared to the conventional six-degree-of-freedom table mechanism having a serial structure,
The following effects are obtained. a. No stacking method is required. b. Since the drive motors and the like for each axis can be installed on the base side, the required driving force is reduced. c. Errors do not accumulate. d. The mechanism is simplified. e. Due to the straightness of the linear motion guide bearing, the ability to transmit force in the direction perpendicular to the shaft is high. f. The movement stroke of the stage in the direction of the linear motion guide bearing can be lengthened.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of an example of a stage mechanism of the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is a sectional view taken along line BB of FIG. 1;

FIG. 4 is a plan view of an example of the stage mechanism of the present invention.

FIG. 5 is a plan view of another example of the stage mechanism of the present invention.

FIG. 6 is a longitudinal sectional view showing an example of a second connecting member.

FIG. 7 is a longitudinal sectional view showing an example of a second connecting member.

FIG. 8 shows the operation of the stage mechanism of the present invention along BB in FIG. 1;
It is the figure represented in the line sectional drawing.

9 shows another operation of the stage mechanism of the present invention in FIG.
It is the figure represented in the -B line sectional drawing.

FIG. 10 is a plan view illustrating another operation of the stage mechanism of the present invention.

FIG. 11 is a view showing another operation of the stage mechanism of the present invention in a cross-sectional view similar to FIG. 1;

FIG. 12 is a cross-sectional view illustrating another operation of the stage mechanism of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Base 2 1st linear track member 3 2nd linear track member 4a 1st carriage 4b 2nd carriage 4c 3rd carriage 4d 4th carriage 5 1st connection member 6a 1st link 6b 1st 2nd link 6c 3rd link 6d 4th link 7 2nd connecting member 8 Stage 9a 1st screw shaft 9b 2nd screw shaft 9c 3rd screw shaft 9d 4th screw shaft 10 Rod body 11 spherical surface Body 12 First member 13 Spherical recess 14 Second member 15 Ball 16 Third member

──────────────────────────────────────────────────続 き Continued on front page (51) Int.Cl. ⁶ Identification code FI // A61H 1/00 311 B23Q 1/14 C

Claims (4)

[Claims] 1. A first and a second linear track member arranged in parallel, a plurality of carriages movably mounted along the first and the second linear track members, and a linear track member for each carriage. , A plurality of links each having one end connected to each of the carriages,
And a stage connected to and supported by the other end of each link. The carriage is provided on both the first and second linear track members. A second carriage, a third carriage provided on at least one side of the first and second linear track members, and a fourth carriage provided on one side of the first and second linear track members. , The first and second carriages have first and second equal lengths.
Link one end of each of the first and second links.
The other ends of the links are axially attached to each other and connected to each side of the stage located above the first and second linear track members,
The third carriage is connected to one end of a third link, which is the same length as the link and is in the same direction as the one side, and the other end is connected horizontally from the first and second link connection positions. One end of the fourth link is connected to the fourth carriage, and one end of the fourth link is connected to the fourth carriage, and the other end is connected to an intermediate portion between the sides of the stage. Each of the links and the stage are connected via a pair of connecting members having three degrees of freedom forming a spherical bearing portion, and each carriage and the link are rotatable about an axis parallel to the linear track member. A six-degree-of-freedom stage mechanism, wherein the two-degree-of-freedom paired connecting members are connected via a connecting member. 2. The stage according to claim 1, wherein the position of the stage connecting the other end of the fourth link is an intermediate portion on a straight line connecting the connection positions of the first and second links. 6 DOF stage mechanism 3. A drive mechanism for moving each carriage along a linear track member is constituted by a linear actuator such as a feed screw mechanism having a screw shaft installed along the linear track member as an element. Claim 1
6-DOF stage mechanism described 4. A connecting member having a three-degree-of-freedom pair includes a first member provided with a spherical body at the tip of a rod, a second member provided with a spherical concave portion larger than the outer diameter of the spherical body, 3. A third member holding a large number of balls interposed in a gap formed when the spherical member of the first member is fitted in the spherical concave portion of the second member. Description 6
Degree of freedom stage mechanism