JP4826584B2 - Translational and two-degree-of-freedom stage device and three-degree-of-freedom stage device using the same - Google Patents
Translational and two-degree-of-freedom stage device and three-degree-of-freedom stage device using the same Download PDFInfo
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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- Machine Tool Sensing Apparatuses (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
本発明は、半導体装置やプリント基板、液晶表示素子等の露光装置などで、テーブルを移動して、テーブル上の対象を所定の位置に位置決め、かつ、長ストロークをテーブル移動するＹ方向並進とθ旋回可能な並進旋回２自由度ステージ装置もしくは、この並進旋回２自由度ステージ装置にＸ方向並進駆動機構を加えた３自由度ステージ装置に関する。 The present invention is a semiconductor device, a printed circuit board, an exposure apparatus such as a liquid crystal display element, etc., which moves a table, positions an object on the table at a predetermined position, and moves the long stroke to the table in the Y direction and θ The present invention relates to a translational and turnable two-degree-of-freedom stage device capable of turning or a three-degree-of-freedom stage device in which an X-direction translation drive mechanism is added to this translational and turnable two-degree-of-freedom stage device.
従来の第１例であるステージ装置は、可動テーブルを有するステージの一の端部と他の端部とを移動可能に軸支する可動支持機構と、可動テーブルと可動支持機構とを制御する位置制御部と、を含めて、直進方向のみならず、回転方向の移動においても、ステージを的確に位置決めをすることができるとともに、応答性を高くして高速にステージを移動させることができるようにしている（例えば、特許文献１参照）。
また、従来の第２例である２軸平行・１軸旋回運動案内機構およびこれを用いた２軸平行・１軸旋回テーブル装置は、テーブルへの組み付けが簡単でかつ高精度に案内支持できる２軸平行・１軸旋回運動案内機構を用いたテーブル装置としているものもある（例えば、特許文献２参照）。
A stage apparatus as a first conventional example includes a movable support mechanism that pivotally supports one end and another end of a stage having a movable table, and a position that controls the movable table and the movable support mechanism. In addition to the controller, the stage can be accurately positioned not only in the straight direction but also in the rotational direction, and the stage can be moved at high speed with high responsiveness. (For example, refer to Patent Document 1).
Further, the conventional two-axis parallel / one-axis turning motion guide mechanism and the two-axis parallel / one-axis turning table device using the same can be easily assembled to the table and can be guided and supported with high accuracy. There is also a table device using an axis parallel / single axis turning motion guide mechanism (for example, see Patent Document 2).
従来の第１例である特許文献１のステージ装置を説明する。
図２３は特許文献１のステージ装置の外観図である。
図２３において、１１００、１２００、１３００は直進ステージ、１１１０、１２１０、１３１０は可動テーブル、１１１２と１１１４、１２１２と１２１４、１３１２と１３１４は脚部、１２２０、１３２０はベース部、１２２２と１２２４はガイドレール、１１３０、１２３０、１３３０はリニアモータ固定子、１３５０は第１端部、１３６０は第２端部である。３つの直進ステージ１１００、１２００及び１３００は、同じ構造を有し、リニアモータにより別個に駆動される移動可能な可動テーブル１１１０、１２１０及び１３１０ステージ１１００、１２００および１３００上を移動する。直進ステージ１３００のベース部１３２０の第１端部１３５０は、直進ステージ１１００の可動テーブル１１１０上に回動自在に支持され、直進ステージ１３００のベース部１３２０の第２端部１３６０は、直進ステージ１２００の可動テーブル１２１０上に回動自在に支持されている。
図２４は特許文献１のステージ装置の直進ステージ１３００の軸支部の態様を示す斜視図である。図２４において、１４００、１５００は軸支部材、１４１０、１５１０は外側円筒部、１４２０、１５２０は内側円筒部、１５３０は板ばね部、である。板ばね部１５３０は、内側円筒部１５２０に設けられ、支持部材を介してベース部１３２０の下面に固定されている。
図２５は特許文献１のステージ装置の軸支部材１４００と軸支部材１５００との詳細を示す図である。図２５（ａ）は、軸支部材１４００をベース部１３２０の第１端部１３５０側から見たときの断面を示し、図２５（ｂ）は、軸支部材１５００をベース部１３２０の第２端部１３６０側から見たときの断面を示すものである。
図２５（ａ）に示す内側円筒部１４２０は、外側円筒部１４１０に対して相対的に円滑に回動する。図２５（ｂ）に示す内側円筒部１５２０には、内側円筒部１５２０の半径方向に沿って板ばね１５３０が設けられている。
The stage apparatus of patent document 1 which is a conventional 1st example is demonstrated.
FIG. 23 is an external view of the stage apparatus of Patent Document 1.
In FIG. 23, 1100, 1200, 1300 are linear stages, 1110, 1210, 1310 are movable tables, 1112 and 1114, 1212 and 1214, 1312 and 1314 are legs, 1220 and 1320 are base parts, and 1222 and 1224 are guide rails. Reference numerals 1130, 1230, and 1330 denote linear motor stators, 1350 denotes a first end, and 1360 denotes a second end. The three rectilinear stages 1100, 1200, and 1300 have the same structure and move on movable movable tables 1110, 1210, and 1310 stages 1100, 1200, and 1300 that are separately driven by a linear motor. The first end 1350 of the base portion 1320 of the rectilinear stage 1300 is rotatably supported on the movable table 1110 of the rectilinear stage 1100, and the second end 1360 of the base portion 1320 of the rectilinear stage 1300 is supported by the rectilinear stage 1200. A movable table 1210 is rotatably supported.
FIG. 24 is a perspective view showing an aspect of a shaft support portion of a straight stage 1300 of the stage device of Patent Document 1. In FIG. 24, 1400 and 1500 are axial support members, 1410 and 1510 are outer cylindrical portions, 1420 and 1520 are inner cylindrical portions , and 1530 is a leaf spring portion. The leaf spring portion 1530 is provided on the inner cylindrical portion 1520 and is fixed to the lower surface of the base portion 1320 via a support member.
FIG. 25 is a diagram showing details of the shaft support member 1400 and the shaft support member 1500 of the stage device of Patent Document 1. FIG. 25A shows a cross section of the shaft support member 1400 when viewed from the first end 1350 side of the base portion 1320, and FIG. 25B shows the shaft support member 1500 at the second end of the base portion 1320. The cross section when it sees from the part 1360 side is shown.
The inner cylindrical portion 1420 shown in FIG. 25A rotates relatively smoothly with respect to the outer cylindrical portion 1410. A leaf spring 1530 is provided on the inner cylindrical portion 1520 shown in FIG. 25B along the radial direction of the inner cylindrical portion 1520.
図２６は特許文献１のステージ装置の内側円筒部１５２０を上方からみた図である。
図２６において、１５２２は小内径部、１５２４は大内径部、１５２６は境界側面、１５６０はネジ、である。板ばね１５３０は、長尺な形状であり、板ばね１５３０の両端部には、長円形の貫通孔があり、長円形の貫通孔の長径の方向は、板ばね１５３０の長手方向と略同じ方向である。板ばね１５３０の両端部は、この貫通孔を介してネジ１５６０により、内側円筒部１５２０の境界側面１５２６に設けられている。板ばね１５３０は、板ばね１５３０の長手方向が、内側円筒部１５２０の直径方向と略同一となるようになされている。
図に示す如き白い矢印の方向に板ばね１５３０が撓んだときには、板ばね１５３０の両端部は、長円形の貫通孔に沿って微動することができる。板ばね１５３０の中央部には、支持部材１５７０がネジ１５８０により固定されている。支持部材１５７０はＴ字形状であり、支持部材１５７０の上部は、ネジ１５９０により直進ステージ１３００のベース部１３２０の下面に固定されている。回転ベアリング１５４０とローラ１５５０とを設けたことにより、内側円筒部１５２０は、外側円筒部１５１０に対して相対的に円滑に回動することができるのである。
また、直進ステージ１３００は、板ばね１５３０が撓むことにより、内側円筒部１５２０に対して移動することができるのである。直進ステージ１３００から「ステージ」が構成され、可動テーブル１３１０から「可動テーブル」が構成される。
また、軸支部材１４００から「第１可動支持機構」を構成し、軸支部材１５００から「第２可動支持機構」を構成する。更に、第１端部１３５０から「一の端部」をなし、第２端部１３６０から「他の端部」をなす。さらにまた、板ばね部１５３０から「弾性部材」が構成される。
FIG. 26 is a view of the inner cylindrical portion 1520 of the stage device of Patent Document 1 as viewed from above.
In FIG. 26, 1522 is a small inner diameter portion, 1524 is a large inner diameter portion, 1526 is a boundary side surface, and 1560 is a screw. The leaf spring 1530 has a long shape, and both ends of the leaf spring 1530 have an oval through hole. It is. Both end portions of the leaf spring 1530 are provided on the boundary side surface 1526 of the inner cylindrical portion 1520 by screws 1560 through the through holes. The leaf spring 1530 is configured such that the longitudinal direction of the leaf spring 1530 is substantially the same as the diameter direction of the inner cylindrical portion 1520.
When the leaf spring 1530 is bent in the direction of the white arrow as shown in the figure, both end portions of the leaf spring 1530 can be finely moved along the oval through hole. A support member 1570 is fixed to the center portion of the leaf spring 1530 with a screw 1580. The support member 1570 has a T-shape, and the upper portion of the support member 1570 is fixed to the lower surface of the base portion 1320 of the rectilinear stage 1300 with a screw 1590. By providing the rotary bearing 1540 and the roller 1550, the inner cylindrical portion 1520 can rotate relatively smoothly with respect to the outer cylindrical portion 1510.
Further, the rectilinear stage 1300 can move with respect to the inner cylindrical portion 1520 as the leaf spring 1530 bends. A straight stage 1300 constitutes a “stage”, and a movable table 1310 constitutes a “movable table”.
Further, the shaft support member 1400 constitutes a “first movable support mechanism”, and the shaft support member 1500 constitutes a “second movable support mechanism”. Further, the “first end” is formed from the first end portion 1350, and the “other end” is formed from the second end portion 1360. Furthermore, an “elastic member” is configured from the leaf spring portion 1530.
図２７は特許文献１のステージ装置のテーブルの位置決めを行う具体的な態様である。
図２７（ａ）〜（ｃ）に示した例は、３つの直進ステージ１１００、１２００及び１３００と、可動テーブル１１１０、１２１０及び１３１０との概略を示す平面図である。
図２７（ａ）は、直進ステージ１１００のＹ方向の中央に可動テーブル１１１０が位置し、直進ステージ１２００のＹ方向の中央に可動テーブル１２１０が位置し、直進ステージ１３００のＸ方向の中央に可動テーブル１３１０が位置するときのものを示すもので、この位置に可動テーブル１１１０、１２１０及び１３１０が位置するときを基準位置とする。
図２７（ｂ）は、直進ステージ１１００の可動テーブル１１１０と、直進ステージ１２００の可動テーブル１２１０との双方を、基準位置から距離Ｙ１だけ正方向に移動させ、直進ステージ１３００の可動テーブル１３１０を、基準位置から距離Ｘ１だけ正方向に移動させたときの状態を示す。このように可動テーブル１１１０と可動テーブル１２１０とを同じ方向に同じ距離だけ移動することにより、直進ステージ１３００の全体をＹ方向に移動することができる。このようにすることにより、可動テーブル１３１０をＸ−Ｙ方向の所望とする位置に位置付けることができる。
図２７（ｃ）は、直進ステージ１１００の可動テーブル１１１０を基準位置から距離Ｙ２だけ負方向に移動させ、直進ステージ１２００の可動テーブル１２１０を基準位置から距離Ｙ２だけ正方向に移動させる。このようにすることにより、直進ステージ１３００の全体の向きをθだけ回転した位置に位置付けることができる。このように可動テーブル１１１０と可動テーブル１２１０とを相対的に異なる位置に位置付けることにより、直進ステージ１３００の全体を所望の角度だけ回転した位置に位置付けることができ、可動テーブル１３１０を所望の角度だけ回転した位置に位置付けることができるのである。
図２７（ｃ）の如く、直進ステージ１３００が回転したときには、上述した直進ステージ１３００のベース部１３２０を支持する支持部材１５７０は移動することとなる。支持部材１５７０が移動したときには、支持部材１５７０に固定されている板ばね部１５３０は、撓むこととなる。
FIG. 27 shows a specific mode for positioning the table of the stage apparatus of Patent Document 1.
The examples shown in FIGS. 27A to 27C are plan views schematically showing the three rectilinear stages 1100, 1200, and 1300 and the movable tables 1110, 1210, and 1310. FIG.
In FIG. 27A, the movable table 1110 is positioned at the center of the linear stage 1100 in the Y direction, the movable table 1210 is positioned at the center of the linear stage 1200 in the Y direction, and the movable table is positioned at the center of the linear stage 1300 in the X direction. This indicates the position when 1310 is located, and the reference position is when the movable tables 1110, 1210 and 1310 are located at this position.
In FIG. 27B, both the movable table 1110 of the rectilinear stage 1100 and the movable table 1210 of the rectilinear stage 1200 are moved in the positive direction by a distance Y1 from the reference position, and the movable table 1310 of the rectilinear stage 1300 is moved to the reference position. A state when moving in the positive direction by a distance X1 from the position is shown. Thus, by moving the movable table 1110 and the movable table 1210 by the same distance in the same direction, the entire linear stage 1300 can be moved in the Y direction. In this way, the movable table 1310 can be positioned at a desired position in the XY direction.
In FIG. 27C, the movable table 1110 of the linear stage 1100 is moved in the negative direction from the reference position by the distance Y2, and the movable table 1210 of the linear stage 1200 is moved in the positive direction from the reference position by the distance Y2. In this way, the overall direction of the straight traveling stage 1300 can be positioned at a position rotated by θ. Thus, by positioning the movable table 1110 and the movable table 1210 at relatively different positions, the entire linear stage 1300 can be positioned at a position rotated by a desired angle, and the movable table 1310 can be rotated by a desired angle. It can be positioned at the position.
As shown in FIG. 27C, when the rectilinear stage 1300 rotates, the support member 1570 that supports the base portion 1320 of the rectilinear stage 1300 described above moves. When the support member 1570 moves, the leaf spring portion 1530 fixed to the support member 1570 is bent.
図２８は、特許文献１のステージ装置の板ばね部１５３０が撓んだときの様子を示す図である。支持部材１５７０は図面の左方向に移動したときのものを示すものである。この支持部材１５７０の移動により、板ばね部１５３０は、符号Ｍで示す箇所で撓むのである。
このように、直進ステージ１３００のベース部１３２０の第１端部１３５０においては、直進ステージ１３００を軸支するだけの構成としたことにより、第１端部１３５０における回動中心を基準にして、直進ステージ１３００の長手方向に沿った可動テーブル１３１０の位置を算出することができる。また、直進ステージ１３００のベース部１３２０の第２端部１３６０においては、直進ステージ１３００を軸支するとともに直進ステージ１３００の長手方向に移動可能にする構成としたことにより、直進ステージ１３００の回動動作を円滑なものにすることができるのである。
FIG. 28 is a diagram showing a state when the leaf spring portion 1530 of the stage device of Patent Document 1 is bent. The support member 1570 is shown when moved to the left in the drawing. Due to the movement of the support member 1570, the leaf spring portion 1530 bends at the location indicated by the symbol M.
As described above, the first end portion 1350 of the base portion 1320 of the rectilinear stage 1300 is configured to only support the rectilinear stage 1300, so that the rectilinear motion is based on the rotation center at the first end portion 1350. The position of the movable table 1310 along the longitudinal direction of the stage 1300 can be calculated. Further, at the second end 1360 of the base portion 1320 of the rectilinear stage 1300, the rectilinear stage 1300 is pivotally supported and moved in the longitudinal direction of the rectilinear stage 1300. Can be made smooth.
次に、従来の第２例である特許文献２の２軸平行・１軸旋回運動案内機構およびこれを用いた２軸平行・１軸旋回テーブル装置を説明する。図２９は特許文献２の２軸平行・１軸旋回運動案内機構の一部破断分解斜視図、図３０は図２９に示す２軸平行・１軸旋回運動案内機構を用いた２軸平行・１軸旋回テーブル装置であり、同図（ａ）はテーブルを省略して２点鎖線で示す平面図、同図（ｂ）は正面図、図３１は、図３０に示すテーブルの平面図である。
図２９〜図３１において、２軸平行・１軸旋回運動案内機構は、２軸平行運動案内部２７０と、この２軸平行運動案内部２７０に組み付けられる旋回運動案内部２８０と、から構成されている。
また、２軸平行・１軸旋回運動案内機構を用いた２軸平行・１軸旋回テーブル装置は、図２９、図３０のように、４つの２軸平行・１軸旋回運動案内機構２０１Ａ，２０１Ｂ，２０１Ｃ，２０１Ｄを介して、テーブル２３３を基台２３４に対して平行に互いに直交する２軸方向に移動自在に支持し、テーブル２３３中央部に位置する旋回軸Ｃ０を中心にして旋回可能となっている。
４つのうち３つの２軸平行・１軸旋回運動案内機構２０１Ａ，２０１Ｂ，２０１Ｄには、それぞれ直線方向に伸縮駆動される、回転モータ２３８と、この回転モータ２３８の回転運動を直線運動に変換する送りねじ機構２３９から構成される直線駆動機構２３７Ａ，２３７Ｂ，２３７Ｄが作動連結されている。２軸平行・１軸旋回運動案内機構２０１Ｃは自由に運動できる。
テーブル２３３を平行移動させる場合は、２つの直線駆動機構２３７Ａ，２３７Ｂもしくは、直線駆動機構２３７Ｄを駆動する。
テーブル２３３を旋回軸Ｃ０に対して旋回させる場合、直線駆動機構２３７Ａ，２３７Ｂとを互いに逆方向に同一量＋ΔＸ，−ΔＸだけ駆動させ、一方、直線駆動機構２３７ＤをＹ軸方向に所定量ΔＹだけ駆動させる。
このように、従来の２軸平行・１軸旋回運動案内機構およびこれを用いた２軸平行・１軸旋回テーブル装置は、テーブルを平行移動または旋回させ、位置決めを行うのである。
Next, a biaxial parallel / uniaxial turning motion guide mechanism and a biaxial parallel / uniaxial turning table device using the same of Patent Document 2 as a second conventional example will be described. 29 is a partially broken exploded perspective view of the two-axis parallel / one-axis turning motion guide mechanism disclosed in Patent Document 2. FIG. 30 is a two-axis parallel / one-axis turning motion guide mechanism shown in FIG. FIG. 3A is a plan view of the shaft turning table device shown by a two-dot chain line with the table omitted, FIG. 3B is a front view, and FIG. 31 is a plan view of the table shown in FIG.
29 to 31, the two-axis parallel / one-axis turning motion guide mechanism is composed of a two-axis parallel motion guide portion 270 and a turning motion guide portion 280 assembled to the two-axis parallel motion guide portion 270. Yes.
In addition, the two-axis parallel / one-axis turning table device using the two-axis parallel / one-axis turning movement guide mechanism includes four two-axis parallel / one-axis turning movement guide mechanisms 201A and 201B as shown in FIGS. , 201C, 201D, the table 233 is supported so as to be movable in two axial directions parallel to the base 234 and orthogonal to each other, and can be turned around a turning axis C0 located at the center of the table 233. ing.
Of the four, three 2-axis parallel / single-axis turning motion guide mechanisms 201A, 201B, and 201D are each driven to extend and contract in a linear direction, and the rotational motion of the rotational motor 238 is converted into linear motion. Linear drive mechanisms 237A, 237B, and 237D configured by a feed screw mechanism 239 are operatively connected. The two-axis parallel / one-axis turning movement guide mechanism 201C can freely move.
If translating the table 233, two linear drive mechanisms 237A, 237B or to drive the linear drive mechanism 237 D.
When the table 233 is swung with respect to the swivel axis C0, the linear drive mechanisms 237A and 237B are driven in the opposite directions by the same amount + ΔX, −ΔX, while the linear drive mechanism 237D is driven in the Y axis direction by a predetermined amount ΔY. Drive.
Thus, the conventional biaxial parallel / single axis turning motion guide mechanism and the biaxial parallel / single axis turning table apparatus using the same perform the positioning by moving the table in parallel or turning.
しかしながら、特許文献１のステージ装置は、弾性部材を利用し、弾性部材が撓むことで自由度を得ているが、弾性部材の撓変位を考慮して位置決めしなければ成らない。つまり、板ばねの弾性特性のヒステリシス、もしくは弾性部材に用いるコイルばねや空気ばね等の復元力と変位の非線形性により、精密に位置決めすることができなという問題があった。
また、駆動系の板バネのような弾性部材を配した場合は、板バネ要素が要因となる共振が位置決め精度に影響を与えるというような問題もあった。
また、特許文献２の２軸平行・１軸旋回運動案内機構およびこれを用いた２軸平行・１軸旋回テーブル装置は、微小のＸＹθの位置決めのみを目的としており、搬送用途には別途駆動機構を用いる必要があった。よって、機械構造が複雑化したり、コストが掛かるといった問題もあった。
本発明はこのような問題点に鑑みてなされたものであり、Yθの微小な位置決めすると
ともに、搬送用途の長ストローク移動できる並進回転２自由度ステージ装置および、該並進回転２自由度ステージ装置を用いて、長ストローク移動を含むＸＹθ移動できる３自由度ステージ装置を提供することを目的とする。
However, although the stage apparatus of Patent Document 1 uses an elastic member and obtains a degree of freedom by bending the elastic member, it must be positioned in consideration of the bending displacement of the elastic member. That is, there is a problem that the positioning cannot be performed accurately due to the hysteresis of the elastic characteristics of the leaf spring, or the non-linearity of the restoring force and displacement of the coil spring or air spring used for the elastic member.
In addition, when an elastic member such as a leaf spring of the drive system is provided, there is a problem that the resonance caused by the leaf spring element affects the positioning accuracy.
In addition, the biaxial parallel / single axis turning motion guide mechanism of Patent Document 2 and the biaxial parallel / single axis turning table device using the same are only for positioning of a minute XYθ, and are separately provided with a driving mechanism for conveying applications. It was necessary to use. Accordingly, there are problems that the mechanical structure becomes complicated and costs increase.
The present invention has been made in view of such problems, and includes a translational rotation two-degree-of-freedom stage device that can position Yθ minutely and can move for a long stroke for use in transportation, and the translational rotation two-degree-of-freedom stage device. It is an object of the present invention to provide a three-degree-of-freedom stage apparatus that can move by XYθ including long stroke movement.
上記問題を解決するため、本発明は、次のように構成したのである。
請求項１記載の発明は、並進旋回２自由度ステージ装置に係り、機台部に配置された駆動機構を介して対象物を搭載するテーブルを所定の位置に位置決めする並進旋回２自由度ステージ装置において、
前記機台部は、同一方向に平行に配置された少なくとも３本の長ストローク移動可能な直動案内を備え、かつ少なくとも３箇所の直動案内ブロックが前記少なくとも３本の長ストローク移動可能な直動案内の上に移動可能にそれぞれ載置され、前記駆動機構は、並進自由度を持つ２つの並進自由度部と、回転自由度を持つ１つの回転自由度部よりなる第１の機構部と、
前記第１の機構部の２つの前記並進自由度部のうちの一つに設けられた電動機と、被検出体となる該機構部の動作量を検出する動作量検出器と、指令信号を受けて前記電動機を制御する制御器とよりなる電動機制御装置と、
から構成される１軸駆動並進回転機構であって、
前記駆動機構である前記１軸駆動並進回転機構を少なくも２組備え、
さらに前記テーブルの旋回移動中心に１つの前記回転自由度部と１つの前記並進自由度部を持つ第２の機構部と、を備え、
前記２組の１軸駆動並進回転機構と前記第２の機構部とをそれぞれ前記少なくとも３箇所の直動案内ブロックの上に載置し、
前記１軸駆動並進回転機構は、前記制御器に動作指令を与える指令装置を備えると共に、前記電動機を並進方向に動作させることにより、前記テーブルを１方向の並進移動もしくは旋回移動させるようにしたこと。
In order to solve the above problem, the present invention is configured as follows.
The invention according to claim 1 relates to a translation / swivel two-degree-of-freedom stage device, and a translation / swivel two-degree-of-freedom stage device for positioning a table on which an object is mounted at a predetermined position via a drive mechanism disposed in a machine base. In
The machine base unit includes at least three linear motion guides arranged in parallel in the same direction and capable of moving with a long stroke, and at least three linear motion guide blocks are linearly movable with at least three long strokes. Each of the drive mechanisms is movably mounted on a motion guide, and the drive mechanism includes a first mechanism unit including two translational freedom units having translational degrees of freedom and one rotational freedom unit having rotational degrees of freedom. ,
An electric motor provided in one of the two translational freedom units of the first mechanism unit, an operation amount detector for detecting an operation amount of the mechanism unit to be detected, and a command signal An electric motor control device comprising a controller for controlling the electric motor;
A one-axis drive translational rotation mechanism comprising:
Including at least two sets of the single-axis drive translational rotation mechanism as the drive mechanism;
And a second mechanism portion having one rotational freedom portion and one translational freedom portion at the rotational movement center of the table,
The two sets of one-axis drive translational rotation mechanism and the second mechanism part are respectively placed on the at least three linear motion guide blocks,
The single-axis drive translational rotation mechanism includes a command device for giving an operation command to the controller, and the table is moved in one direction in translation or swivel by operating the motor in a translation direction. .
また、請求項２記載の発明は、請求項１記載の並進旋回２自由度ステージ装置において、前記テーブルもしくは前記テーブル上の対象物の位置を把握するための２次元位置センサと、前記２次元位置センサによって捕らえた対象物の画像を画像処理して、前記対象物の位置を補正するための補正量を演算する補正量算出部とを備え、前記補正量算出部によって得た補正量に基づいて前記電動機を動作させ前記テーブルもしくは前記テーブル上の前記対象物の位置を補正すること。
請求項３記載の発明は、請求項２記載の並進旋回２自由度ステージ装置において、前記２次元位置センサを複数有すること。
請求項４記載の発明は、並進旋回２自由度ステージ装置を用いた３自由度ステージ装置において、請求項１から３のいずれか記載の並進旋回２自由度ステージ装置のテーブルの上部もしくは下部に並進方向に電動機にてテーブルを駆動する１軸並進駆動機構を有すること。
請求項５記載の発明は、並進旋回２自由度ステージ装置を用いた３自由度ステージ装置に係り、請求項１から４のいずれか１項記載の並進旋回２自由度ステージ装置を囲む門型構造に並進方向に電動機にてテーブルを駆動する１軸並進駆動機構を有すること。
請求項６記載の発明は、請求項１から５のいずれかに記載の並進旋回２自由度ステージ装置を並進方向に駆動するために、並進方向に電動機にてテーブルを駆動する１軸並進駆動機構を有すること。
The invention according to claim 2 is the translational swivel two-degree-of-freedom stage device according to claim 1, wherein the two-dimensional position sensor for grasping the position of the table or the object on the table, and the two-dimensional position A correction amount calculation unit that performs image processing on an image of the object captured by the sensor and calculates a correction amount for correcting the position of the object, and based on the correction amount obtained by the correction amount calculation unit Operating the electric motor to correct the position of the table or the object on the table;
According to a third aspect of the present invention, in the translational turn two-degree-of-freedom stage device according to the second aspect , a plurality of the two-dimensional position sensors are provided.
Invention of claim 4, the translation in three degrees of freedom stage device using a translational pivot two degrees of freedom stage device, the top or bottom of the table translational pivot two degrees of freedom stage device according to any one of claims 1 to 3 Having a uniaxial translational drive mechanism that drives the table in the direction with an electric motor.
The invention according to claim 5 relates to a three-degree-of-freedom stage device using a translation-turning two-degree-of-freedom stage device, and a portal structure surrounding the translation-turning two-degree-of-freedom stage device according to any one of claims 1 to 4. And a single-axis translation drive mechanism for driving the table with an electric motor in the translation direction.
A sixth aspect of the invention is a uniaxial translation drive mechanism for driving a table with an electric motor in the translation direction in order to drive the translational swivel two-degree-of-freedom stage device according to any one of the first to fifth aspects in the translation direction. Having
請求項１記載の発明によると、テーブルの１方向への長ストローク並進移動と、旋回移動を行うことができる。
また、請求項２記載の発明によると、テーブルもしくはテーブル上の対象物の配置状況を２次元位置センサを用いて位置の補正値を算出することで、テーブル移動動作を迅速に行うことができる。
請求項３記載の発明によると、１つの２次元位置センサでは、対象物がすべて把握できない場合でも、複数の２次元位置センサが分割して対象物を把握することで、対象物の配置を把握することができる。また、複数の種類の把握対象に使用できる。
請求項４〜６記載の発明によると、テーブルの１方向への長ストローク並進移動と、旋回移動を行うことができ、さらに１軸並進駆動機構を有するので、ＸＹ並進とθ旋回の３自由度を持つことができる。
According to the first aspect of the present invention, the long stroke translational movement and the turning movement of the table in one direction can be performed.
According to the second aspect of the present invention, the table moving operation can be quickly performed by calculating the position correction value of the arrangement state of the table or the object on the table using the two-dimensional position sensor.
According to the third aspect of the present invention, even when a single two-dimensional position sensor cannot grasp all the objects, a plurality of two-dimensional position sensors divide and grasp the objects to grasp the arrangement of the objects. can do. Moreover, it can be used for a plurality of types of grasping objects.
According to the fourth to sixth aspects of the present invention, the long stroke translational movement and the turning movement of the table in one direction can be performed, and further, since the single-axis translational drive mechanism is provided, three degrees of freedom of the XY translation and the θ rotation are provided. Can have.
以下、本発明の実施の形態について図を参照して説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
図１は、本発明の第１実施例を示す並進旋回２自由度ステージ装置の１軸駆動並進回転機構と第２の機構部の配置を示す平面概略図と側面概略図、図２は本発明の第１実施例を示す並進旋回２自由度ステージ装置の制御ブロック図と１軸駆動並進回転機構と第２の機構部の並進・回転自由度の概略を示す図である。
図において、１は電動機(リニアモータ)、２は動作量検出器、３は制御器、４はテーブル、５は対象物、６は１軸駆動並進回転機構、７は機台部、８は指令部、１１は並進駆動部、１２は並進自由度部、１３は回転自由度部、１６は第２の機構部、２５は電動機制御装置となっている。また、１軸駆動並進回転機構６は、機台部７側から上に並進駆動部１１と回転自由度部１３と並進自由度部１２の順に構成され、第２の機構部は、機台部７側から上に並進自由度部１２と回転自由度部の順に構成されている。
FIG. 1 is a schematic plan view and a schematic side view showing the arrangement of a single-axis drive translational rotation mechanism and a second mechanism part of a translational swivel two-degree-of-freedom stage device according to a first embodiment of the present invention. FIG. FIG. 3 is a control block diagram of the translational swivel two-degree-of-freedom stage device showing the first embodiment of the present invention, and an outline of translation / rotation degrees of freedom of the single-axis drive translation / rotation mechanism and the second mechanism unit.
In the figure, 1 is an electric motor (linear motor), 2 is an operation amount detector, 3 is a controller, 4 is a table, 5 is an object, 6 is a single-axis drive translational rotation mechanism, 7 is a machine base, and 8 is a command. , 11 is a translation drive unit, 12 is a translational freedom unit, 13 is a rotational freedom unit, 16 is a second mechanism unit, and 25 is an electric motor control device. The uniaxial drive translational rotation mechanism 6 includes a translational drive unit 11, a rotation degree of freedom unit 13, and a translational degree of freedom unit 12 in this order from the machine base part 7 side, and the second mechanism part is a machine base part. The translational freedom portion 12 and the rotational freedom portion are arranged in this order from the 7 side.
本発明が特許文献１と異なる部分は、１軸駆動並進回転機構６と第２の機構部１６を備えた部分である。１軸駆動並進回転機構６が電動機１によって駆動される並進駆動部１１と回転自由度部１３を有する点は特許文献１と同様だが、本発明の回転自由度部１３には板バネのような弾性体は無く、本発明の１軸駆動並進回転機構６には、特許文献１には無い並進自由度部１２が設けられている。また、テーブル４を回転自由度部１３と並進自由度部１２で支持する第２の機構部１６も特許文献１には無い。
本発明が特許文献２と異なる部分は、テーブル４が並進１方向にのみ動作する点である。但し、本発明は長ストロークの並進移動ができるように、１軸駆動並進回転機構６の並進駆動部１１と第２の機構部１６の並進自由度１２が同方向に成っている。
特許文献２の２軸平行・１軸旋回運動案内機構２７０と、１軸駆動並進回転機構６の並進駆動部１１、並進自由度部１２、回転自由度部１３の構成は類似しているが、第２の機構部１６は特許文献２には無い。
The part where the present invention is different from Patent Document 1 is a part provided with a uniaxial drive translational rotation mechanism 6 and a second mechanism part 16. Although the point which has the translation drive part 11 and the rotation freedom degree part 13 which the single axis drive translation rotation mechanism 6 drives with the electric motor 1 is the same as that of patent document 1, in the rotation freedom degree part 13 of this invention, it is like a leaf | plate spring. There is no elastic body, and the single-axis drive translational rotation mechanism 6 of the present invention is provided with a translational degree-of-freedom portion 12 that is not found in Patent Document 1. Further, Patent Document 1 does not have a second mechanism portion 16 that supports the table 4 with the rotational freedom portion 13 and the translational freedom portion 12.
The present invention is different from Patent Document 2 in that the table 4 operates only in one translational direction. However, in the present invention, the translational drive unit 11 of the uniaxial drive translational rotation mechanism 6 and the translational freedom degree 12 of the second mechanism unit 16 are in the same direction so that a long stroke translational movement is possible.
Although the configuration of the translational drive unit 11, translational degree of freedom unit 12, and rotational degree of freedom unit 13 of the biaxial parallel / uniaxial turning motion guide mechanism 270 of Patent Document 2 and the monoaxial drive translational rotation mechanism 6 is similar, The second mechanism portion 16 is not disclosed in Patent Document 2.
１軸駆動並進回転機構６は、機台部７の両側（Ａ,Ｂ）の直動案内２１に沿って移動で
きるように配置され、第２の機構部１６は、テーブル４の旋回中心部（Ｃ）に配置されている。
なお、各並進駆動部１１を構成するリニアモータ１は、それぞれ２つの制御器３が接続されている。制御器３は指令部８から動作命令を受け取り、リニアモータ１を動作させる。動作量検出器２はリニアモータ１もしくはリニアモータ１が駆動する直動案内ブロック２２ほかが付随する部位の移動量を検出し、その移動量が指令部８の動作命令との差を０にするように制御器３が動作を制御する。
The single-axis drive translational rotation mechanism 6 is arranged so as to be movable along the linear motion guides 21 on both sides (A, B) of the machine base part 7, and the second mechanism part 16 is a turning center part ( C).
In addition, the linear motor 1 which comprises each translation drive part 11 is connected to the two controllers 3, respectively. The controller 3 receives an operation command from the command unit 8 and operates the linear motor 1. The movement amount detector 2 detects the movement amount of the part to which the linear motor 1 or the linear motion guide block 22 driven by the linear motor 1 is attached, and the movement amount sets the difference from the operation command of the command unit 8 to zero. Thus, the controller 3 controls the operation.
次に、並進旋回２自由度ステージ装置の動作について説明する。
図３は本発明の第１実施例を示す並進旋回２自由度ステージ装置のテーブルのθ旋回移動を示す図である。
その動作は、図２に示すように、Ａ，Ｂ点２つの１軸駆動並進回転機構６の並進駆動部１１のリニアモータ１をそれぞれ反対側に動作させると、Ｃ点の第２の機構部１６を中心としてテーブル４を旋回させることができる。１軸駆動並進回転機構６ａをδＹ１、１軸駆動並進回転機構６ｂをδＹ２動作させれば、１軸駆動並進回転機構６ａ、６ｂの回転自由度部１３はθ動作し、並進自由度部１２はδＸ１、δＸ２移動するので、テーブル４はθ旋回する。つまり、第２の機構部１６の回転自由度部１３が作用し、テーブル４がθ旋回する。
以上のようにテーブルの旋回と、１軸駆動並進回転機構６と第２の機構部１６の各リニアモータ１、各回転自由度１３、並進自由度１２の移動量は、幾何学的に決定する。
Next, the operation of the translational swivel two-degree-of-freedom stage device will be described.
FIG. 3 is a view showing the θ turning movement of the table of the translation turning 2 degree-of-freedom stage apparatus according to the first embodiment of the present invention.
As shown in FIG. 2, when the linear motor 1 of the translation drive unit 11 of the two single-axis drive translation / rotation mechanism 6 having two points A and B is operated to the opposite side, as shown in FIG. The table 4 can be turned around 16. If the one-axis drive translational rotation mechanism 6a is operated by δY1 and the one-axis drive translational rotation mechanism 6b is operated by δY2, the rotation degree of freedom part 13 of the one-axis drive translational rotation mechanism 6a, 6b operates θ, and the translation degree of freedom part 12 becomes Since δX1 and δX2 move, the table 4 turns by θ. That is, the rotational degree of freedom part 13 of the second mechanism part 16 acts, and the table 4 rotates θ.
As described above, the amount of movement of the table rotation, the linear motor 1 of each of the single-axis drive translational rotation mechanism 6 and the second mechanism unit 16, the degree of freedom of rotation 13, and the degree of freedom of translation 12 is determined geometrically. .
図４は本発明の第１実施例を示す並進旋回２自由度ステージ装置のテーブルのＹ並進移動を示す図である。
図４において、δＹは１軸駆動並進回転機構に付属するリニアモータ１の移動量である。Ａ，Ｂ両方のリニアモータ１ａ,１ｂを同じ量だけ動作させれば、テーブル４を並進移
動できる。
なお、並進移動は、図３で示した旋回θ後の姿勢で並進移動させても良い。
本発明の第１実施例は上記構成にしたので、旋回θと長ストロークを含む並進Ｙ方向移動ができる並進旋回２自由度ステージ装置となる。
FIG. 4 is a diagram showing the Y translational movement of the table of the translational swivel two-degree-of-freedom stage device according to the first embodiment of the present invention.
In FIG. 4, δY is the amount of movement of the linear motor 1 attached to the single-axis drive translational rotation mechanism. If both the linear motors 1a and 1b are operated by the same amount, the table 4 can be translated.
Note that the translational movement may be performed in the posture after the turn θ shown in FIG.
Since the first embodiment of the present invention has the above-described configuration, it becomes a translational swivel two-degree-of-freedom stage device capable of translational Y-direction movement including swirl θ and a long stroke.
図５は本発明の第２実施例を示す並進旋回２自由度ステージ装置の１軸駆動並進回転機構と第２の機構部の配置を示す平面概略図と側面概略図、図６は本発明の第２実施例を示す並進旋回２自由度ステージ装置の制御ブロック図と１軸駆動並進回転機構と第２の機構部の並進・回転自由度の概略を示す図である。
なお、第２実施例の基本的な構成要素は第１実施例と同じである。
第２実施例が第１実施例と異なる点は、１軸駆動並進回転機構の構成である。１軸駆動並進回転機構６は、機台部７側から上に並進駆動部１１と並進自由度部１２と回転自由度部１３順に構成されている。１軸駆動並進回転機構６と第２の機構部１６の配置も第１実施例と同じである。
また、本発明が特許文献１、特許文献２と異なる部分は、第１実施例と同じである。
FIG. 5 is a schematic plan view and a schematic side view showing the arrangement of a single-axis drive translational rotation mechanism and a second mechanism part of a translational swivel two-degree-of-freedom stage device according to a second embodiment of the present invention. FIG. It is a control block diagram of the translation rotation 2 freedom degree stage apparatus which shows 2nd Example, and the figure which shows the outline of the translation and rotation freedom degree of a 1 axis drive translation rotation mechanism and a 2nd mechanism part.
The basic components of the second embodiment are the same as those of the first embodiment.
The second embodiment is different from the first embodiment in the configuration of the uniaxial drive translational rotation mechanism. The uniaxial drive translational rotation mechanism 6 is composed of a translational drive unit 11, a translational degree of freedom unit 12, and a rotational degree of freedom unit 13 in this order from the machine base unit 7 side. The arrangement of the single-axis drive translational rotation mechanism 6 and the second mechanism portion 16 is also the same as in the first embodiment.
Further, the difference between the present invention and Patent Document 1 and Patent Document 2 is the same as that of the first embodiment.
本発明の第２実施例が第１実施例と異なるのは、２次元位置センサ９と補正量算出部１５を備えた部分である。
図７は本発明の第２実施例を示す並進旋回２自由度ステージ装置の２次元位置センサによる対象物の位置補正方法を示す図である。２次元位置センサ９は、テーブル４もしくはテーブル４上の対象物５を検出し、そのズレ量を補正量算出部１５によって把握できる。ズレ量が把握できたならば、図７のように並進Ｙ方向と旋回θ方向の修正が可能となる。
本実施例では、並進Ｘ方向の修正が出来ないが、別途実施例で後述するが、並進Ｘ方向の修正を行うことができる。
The second embodiment of the present invention is different from the first embodiment in a portion including a two-dimensional position sensor 9 and a correction amount calculation unit 15.
FIG. 7 is a diagram showing a position correction method for an object using a two-dimensional position sensor of a translational swivel two-degree-of-freedom stage device according to a second embodiment of the present invention. The two-dimensional position sensor 9 detects the table 4 or the object 5 on the table 4 and can grasp the deviation amount by the correction amount calculation unit 15. If the amount of deviation can be grasped, the translation Y direction and the turning θ direction can be corrected as shown in FIG.
In this embodiment, the translation X direction cannot be corrected. However, as will be described later in another embodiment, the translation X direction can be corrected.
図８は本発明の第２実施例を示す並進旋回２自由度ステージ装置のテーブルのθ旋回移動を示す図である。
第１実施例と同様に、図８のようにＡ，Ｂ点２つの１軸駆動並進回転機構６の並進駆動部１１のリニアモータ１をそれぞれ反対側に動作させると、Ｃ点の第２の機構部１６を中心としてテーブル４を旋回させることができる。１軸駆動並進回転機構６ａをδＹ１、１軸駆動並進回転機構６ｂをδＹ２動作させれば、１軸駆動並進回転機構６ａ、６ｂの回転自由度部１３はθ動作し、並進自由度部１２はδＸ１、δＸ２移動するので、テーブル４はθ旋回する。つまり、第２の機構部１６の回転自由度部１３が作用し、テーブル４がθ旋回する。
第１実施例とは、１軸駆動並進回転機構６ａ、６ｂの構成が異なるので、テーブル４をθ旋回する際のリニアモータ１ａ,１ｂの移動量δＹ１、δＹ２、並進自由度部１２の移
動量δＸ１、δＸ２が異なるが、テーブル４の旋回と、１軸駆動並進回転機構６と第２の機構部１６の各リニアモータ１、各回転自由度１３、並進自由度１２の移動量は、幾何学的に決定できる点は同じである。
なお、並進Ｙ方向のテーブル４の移動は、第１実施例と同様にして実施できる。
FIG. 8 is a view showing the θ turning movement of the table of the translational turning two-degree-of-freedom stage device according to the second embodiment of the present invention.
Similarly to the first embodiment, when the linear motor 1 of the translation drive unit 11 of the two-axis uniaxial drive translation rotation mechanism 6 having two points A and B is operated to the opposite side as shown in FIG. The table 4 can be turned around the mechanism portion 16. If the one-axis drive translational rotation mechanism 6a is operated by δY1 and the one-axis drive translational rotation mechanism 6b is operated by δY2, the rotation degree of freedom part 13 of the one-axis drive translational rotation mechanism 6a, 6b operates θ, and the translation degree of freedom part 12 becomes Since δX1 and δX2 move, the table 4 turns by θ. That is, the rotational degree of freedom part 13 of the second mechanism part 16 acts, and the table 4 rotates θ.
Since the configurations of the single-axis drive translational rotation mechanisms 6a and 6b are different from those of the first embodiment, the movement amounts δY1 and δY2 of the linear motors 1a and 1b and the movement amount of the translational degree-of-freedom portion 12 when the table 4 is turned by θ. Although δX1 and δX2 are different, the amount of movement of the turning of the table 4, the linear motor 1 of each of the one-axis drive translational rotation mechanism 6 and the second mechanism unit 16, the degree of freedom of rotation 13, and the degree of freedom of translation 12 is geometric. The points that can be determined automatically are the same.
The movement of the table 4 in the translation Y direction can be performed in the same manner as in the first embodiment.
図９は本発明の第３実施例を示す並進旋回２自由度ステージ装置の１軸駆動並進回転機構と第２の機構部の配置を示す平面概略図、図１０は本発明の第３実施例を示す並進旋回２自由度ステージ装置の制御ブロック図と１軸駆動並進回転機構と第２の機構部の並進・回転自由度の概略を示す図である。
第３実施例の基本的な構成要素は第１実施例、第２実施例と同じである。第１実施例、第２実施例と異なるのは、リニアモータ１を持たない３自由度機構１８をさらに加えた点である。また、第１実施例とは、１軸駆動並進回転機構６ａ、６ｂの配置位置が異なる。さらに、２次元位置センサ９と補正量算出部１５は記載を省略している。
なお、図１０のように、１軸駆動並進回転機構６の構成は、第１実施例と同様に、機台部７側から上に並進駆動部１１と回転自由度部１３と並進自由度部１２の順である。３自由度機構１８の構成も、機台部７側から並進自由度部１２、回転自由度部１３、並進自由度部１２の構成である。
また、本発明が特許文献１、特許文献２と異なる部分は、第１実施例と同じである。
FIG. 9 is a schematic plan view showing the arrangement of the single-axis drive translational rotation mechanism and the second mechanism part of the translational swivel two-degree-of-freedom stage device according to the third embodiment of the present invention, and FIG. 10 shows the third embodiment of the present invention. FIG. 6 is a control block diagram of a translational swivel two-degree-of-freedom stage device showing the outline of translation / rotation degrees of freedom of a single-axis drive translational rotation mechanism and a second mechanism unit.
The basic components of the third embodiment are the same as those of the first and second embodiments. The difference from the first and second embodiments is that a three-degree-of-freedom mechanism 18 having no linear motor 1 is further added. Further, the arrangement positions of the uniaxial drive translational rotation mechanisms 6a and 6b are different from those of the first embodiment. Further, the two-dimensional position sensor 9 and the correction amount calculation unit 15 are not shown.
As shown in FIG. 10, the configuration of the single-axis drive translational rotation mechanism 6 is similar to the first embodiment in that the translational drive unit 11, the rotational freedom unit 13, and the translational freedom unit are arranged upward from the machine base unit 7 side. The order is twelve. The configuration of the three-degree-of-freedom mechanism 18 is also the configuration of the translational degree-of-freedom part 12, the rotational degree-of-freedom part 13, and the translational degree-of-freedom part 12 from the machine base part 7 side.
Further, the difference between the present invention and Patent Document 1 and Patent Document 2 is the same as that of the first embodiment.
図１１は本発明の第３実施例を示す並進旋回２自由度ステージ装置のテーブルのθ旋回移動を示す図である。
第１実施例と同様に、図１１のようにＡ，Ｂ点２つの１軸駆動並進回転機構６の並進駆動部１１のリニアモータ１をそれぞれ反対側に動作させると、Ｃ点の第２の機構部１６を中心としてテーブル４を旋回させることができる。１軸駆動並進回転機構６ａをδＹ１、１軸駆動並進回転機構６ｂをδＹ２動作させれば、１軸駆動並進回転機構６ａ、６ｂの回転自由度部１３はθ動作し、並進自由度部１２はδＸ１、δＸ２移動し、３自由度機構１８の並進自由度部１２もδＹ３、δＹ４、δＸ３、δＸ４移動し、かつ、第２の機構部１６の回転自由度部１３が作用し、テーブル４がθ旋回する。
第１実施例とは、１軸駆動並進回転機構６ａ、６ｂの配置位置が異なるので、リニアモータ１ａ,１ｂの動作量は異なるが、テーブル４の旋回と、１軸駆動並進回転機構６と第
２の機構部１６の各リニアモータ１、各回転自由度１３、並進自由度１２の移動量は、幾何学的に決定できる点は同じである。なお、並進Ｙ方向のテーブル４の移動は、第１実施例と同様にして実施できる。
FIG. 11 is a diagram showing the θ-turn movement of the table of the translation turn 2 degree-of-freedom stage apparatus according to the third embodiment of the present invention.
As in the first embodiment, when the linear motor 1 of the translation drive unit 11 of the two-axis uniaxial drive translation rotation mechanism 6 having two points A and B is operated on the opposite side as shown in FIG. The table 4 can be turned around the mechanism portion 16. If the one-axis drive translational rotation mechanism 6a is operated by δY1 and the one-axis drive translational rotation mechanism 6b is operated by δY2, the rotation degree of freedom part 13 of the one-axis drive translational rotation mechanism 6a, 6b operates θ, and the translation degree of freedom part 12 becomes δX1 and δX2 move, the translational degree of freedom portion 12 of the three-degree-of-freedom mechanism 18 also moves δY3, δY4, δX3, and δX4, the rotational degree-of-freedom portion 13 of the second mechanism portion 16 acts, and the table 4 Turn.
Since the arrangement positions of the single-axis drive translational rotation mechanisms 6a and 6b are different from those in the first embodiment, the operation amounts of the linear motors 1a and 1b are different. The movement amounts of the linear motors 1, the rotational degrees of freedom 13 and the translational degrees of freedom 12 of the two mechanisms 16 are the same in that they can be determined geometrically. The movement of the table 4 in the translation Y direction can be performed in the same manner as in the first embodiment.
図１２は本発明の第４実施例を示す並進旋回２自由度ステージ装置の１軸駆動並進回転機構と第２の機構部の配置を示す平面概略図、図１３は本発明の第４実施例を示す並進旋回２自由度ステージ装置の制御ブロック図と１軸駆動並進回転機構と第２の機構部の並進・回転自由度の概略を示す図である。
なお、第４実施例の基本的な構成要素は第１実施例と同じである。第４実施例が第１実施例と異なる点は、図１３のように、第２の機構部１６にもリニアモータ１を配して、第２駆動機構１９とし、制御器３、動作量検出器２を備えている点である。
第１の機構部６ａ、６ｂの構成と配置は第１実施例と同じである。さらに、２次元位置センサ９と補正量算出部１５は記載を省略している。
また、本発明が特許文献１、特許文献２と異なる部分は、第１実施例と同じである。
以上のような構成をしているので、テーブル４のθ旋回移動は、第1実施例の図３と同
様に実現できる。並進Ｙ方向移動も第1実施例と同様にできる。本実施例では、第２駆動
機構１９にもリニアモータ１ｃを備えているので、Ｙ方向への推進力を増大も可能であるし、各リニアモータの容量を分散して推力を出すような電動機の容量選定が実施できる。
FIG. 12 is a schematic plan view showing the arrangement of the single-axis drive translational rotation mechanism and the second mechanism part of the translational swivel two-degree-of-freedom stage device according to the fourth embodiment of the present invention, and FIG. 13 shows the fourth embodiment of the present invention. FIG. 6 is a control block diagram of a translational swivel two-degree-of-freedom stage device showing the outline of translation / rotation degrees of freedom of a single-axis drive translational rotation mechanism and a second mechanism unit.
The basic components of the fourth embodiment are the same as those of the first embodiment. The fourth embodiment is different from the first embodiment in that, as shown in FIG. 13, the linear motor 1 is also arranged in the second mechanism portion 16 to form the second drive mechanism 19, and the controller 3, the operation amount detection. It is the point provided with the vessel 2.
The configuration and arrangement of the first mechanism portions 6a and 6b are the same as those in the first embodiment. Further, the two-dimensional position sensor 9 and the correction amount calculation unit 15 are not shown.
Further, the difference between the present invention and Patent Document 1 and Patent Document 2 is the same as that of the first embodiment.
Since it is configured as described above, the θ turning movement of the table 4 can be realized in the same manner as in FIG. 3 of the first embodiment. The translational Y-direction movement can be performed in the same manner as in the first embodiment. In this embodiment, since the second drive mechanism 19 is also provided with the linear motor 1c, the propulsive force in the Y direction can be increased, and an electric motor that produces thrust by dispersing the capacity of each linear motor. Can be selected.
図１４は、本発明の第５実施例を示す並進旋回２自由度ステージ装置の１軸駆動並進回転機構と第２の機構部、第２駆動機構の配置を示す平面概略図、図１５は本発明の第５実施例を示す並進旋回２自由度ステージ装置の制御ブロック図と１軸駆動並進回転機構と第２の機構部の並進・回転自由度の概略を示す図である。
なお、第５実施例の基本的な構成要素は第１実施例と同じである。また、１軸駆動並進回転機構６と第２の機構部１６の配置は、第３実施例の３自由度機構１８を１軸駆動並進回転機構６に置き換えた配置である。つまり、第３実施例とは、さらにリニアモータ１を加えた点が異なる。なお、２次元位置センサ９と補正量算出部１５は記載を省略している。１軸駆動並進回転機構６の構成は、第１実施例と同じ、並進・回転・並進の順である。また、本発明が特許文献１、特許文献２と異なる部分は、第１実施例と同じである。
以上のような構成をしているので、テーブル４のθ旋回移動は、第３実施例の図１１と同様に実現できる。並進Ｙ方向移動も第1実施例と同様にできる。本実施例では、１軸駆
動並進回転機構６を４つ備えているので、Ｙ方向への推進力増大も可能であるし、各リニアモータの容量を分散して推力を出すような電動機の容量選定が実施できる。
FIG. 14 is a schematic plan view showing the arrangement of a single-axis drive translation / rotation mechanism, a second mechanism part, and a second drive mechanism of a translation / swivel two-degree-of-freedom stage device according to a fifth embodiment of the present invention. FIG. It is a control block diagram of the translation rotation 2 degree-of-freedom stage apparatus which shows 5th Example of invention, and the figure which shows the outline of the translation and rotation freedom degree of a 1 axis drive translation rotation mechanism and a 2nd mechanism part.
The basic components of the fifth embodiment are the same as those of the first embodiment. The arrangement of the uniaxially driven translational rotation mechanism 6 and the second mechanism unit 16 is an arrangement in which the three-degree-of-freedom mechanism 18 of the third embodiment is replaced with the uniaxially driven translational rotation mechanism 6. That is, the third embodiment is different from the third embodiment in that a linear motor 1 is further added. The two-dimensional position sensor 9 and the correction amount calculation unit 15 are not shown. The configuration of the single-axis drive translation / rotation mechanism 6 is the same as the first embodiment in the order of translation / rotation / translation. Further, the difference between the present invention and Patent Document 1 and Patent Document 2 is the same as that of the first embodiment.
Since it is configured as described above, the θ turning movement of the table 4 can be realized in the same manner as in FIG. 11 of the third embodiment. The translational Y-direction movement can be performed in the same manner as in the first embodiment. In the present embodiment, four uniaxial drive translational rotation mechanisms 6 are provided, so that it is possible to increase the propulsive force in the Y direction, and the capacity of the motor that produces thrust by distributing the capacity of each linear motor. Selection can be carried out.
図１６は本発明の第６実施例を示す並進旋回２自由度ステージ装置を用いた３自由度ステージ装置を用いた１軸駆動並進回転機構と第２の機構部の配置を示す平面概略図と側面概略図、図１７は本発明の第６実施例を示す並進旋回２自由度ステージ装置を用いた３自由度ステージ装置の制御ブロック図と１軸駆動並進回転機構と第２の機構部の並進・回転自由度の概略を示す図である。
図において、並進旋回２自由度ステージ装置３０は、第１実施例で示した構成である。並進旋回２自由度ステージ装置３０のテーブル４の上に１軸並進駆動機構２４を配置して、並進Ｘ方向の動作を実現している。
以上のような構成にしているので、第１実施例のように並進旋回２自由度ステージ装置３０がテーブル４を並進Ｙ方向の動作と、旋回θの動作を行い、テーブル４上の１軸並進駆動機構２４が並進Ｘ方向の動作を行うので、ＸＹθの３自由度の動作を行う３自由度ステージ装置となるのである。
FIG. 16 is a schematic plan view showing the arrangement of a uniaxially driven translational rotation mechanism and a second mechanism portion using a three-degree-of-freedom stage device using a translational swivel two-degree-of-freedom stage device showing a sixth embodiment of the present invention; FIG. 17 is a schematic side view, and FIG. 17 is a control block diagram of a three-degree-of-freedom stage device using a translational swivel two-degree-of-freedom stage device showing a sixth embodiment of the present invention, and a translation of a single-axis drive translational rotation mechanism and a second mechanism unit. -It is a figure which shows the outline of a rotation freedom degree.
In the figure, the translational swivel two-degree-of-freedom stage device 30 has the configuration shown in the first embodiment. The single-axis translation drive mechanism 24 is arranged on the table 4 of the translation / swivel two-degree-of-freedom stage device 30 to realize the translation X-direction operation.
Since it is configured as described above, the translation / swivel two-degree-of-freedom stage device 30 performs the translation Y-direction operation and the rotation θ operation on the table 4 as in the first embodiment, and uniaxial translation on the table 4. Since the drive mechanism 24 operates in the translational X direction, it becomes a three-degree-of-freedom stage device that performs an operation of three degrees of freedom of XYθ.
図１８は本発明の第７実施例を示す並進旋回２自由度ステージ装置を用いた３自由度ステージ装置を用いた１軸駆動並進回転機構と第２の機構部の配置を示す平面概略図と側面概略図、図１９は本発明の第７実施例を示す並進旋回２自由度ステージ装置を用いた３自由度ステージ装置の制御ブロック図と１軸駆動並進回転機構と第２の機構部の並進・回転自由度の概略を示す図である。
図において、並進旋回２自由度ステージ装置３０は、第１実施例で示した構成である。
並進旋回２自由度ステージ装置３０は、リニアモータを２つ配した１軸並進駆動機構２４の上に配置されている。
以上のような構成にしているので、第１実施例のように並進旋回２自由度ステージ装置３０がテーブル４を並進Ｙ方向の動作と、旋回θの動作を行い、並進旋回２自由度ステージ装置３０の機台部７を１軸並進駆動機構２４が並進Ｘ方向の動作を行うことで、ＸＹθの３自由度の動作を行う３自由度ステージ装置となるのである。
FIG. 18 is a schematic plan view showing the arrangement of a single-axis drive translational rotation mechanism and a second mechanism unit using a three-degree-of-freedom stage device using a translational swivel two-degree-of-freedom stage device showing a seventh embodiment of the present invention; FIG. 19 is a schematic side view, and FIG. 19 is a control block diagram of a three-degree-of-freedom stage device using a translational swivel two-degree-of-freedom stage device showing a seventh embodiment of the present invention, and a translation of a one-axis drive translational rotation mechanism and a second mechanism unit. -It is a figure which shows the outline of a rotation freedom degree.
In the figure, the translational swivel two-degree-of-freedom stage device 30 has the configuration shown in the first embodiment.
The translational swivel two-degree-of-freedom stage device 30 is disposed on a uniaxial translational drive mechanism 24 provided with two linear motors.
Since it is configured as described above, the translational swivel two-degree-of-freedom stage device 30 performs the translational Y-direction operation and the swivel θ operation on the table 4 as in the first embodiment, and the translational swivel two-degree-of-freedom stage device. 30 machine units 7 are operated in the X direction by the single-axis translation drive mechanism 24, so that a three-degree-of-freedom stage device that performs three degrees of freedom of XYθ is obtained.
図２０は本発明の第８実施例を示す並進旋回２自由度ステージ装置を用いた３自由度ステージ装置を用いた１軸駆動並進回転機構と第２の機構部の配置を示す平面概略図と側面概略図、図２１は本発明の第８実施例を示す並進旋回２自由度ステージ装置を用いた３自由度ステージ装置の制御ブロック図と１軸駆動並進回転機構と第２の機構部の並進・回転自由度の概略を示す図である。本実施例では、２次元位置センサ９を２つ有し、２次元位置センサ９が検出した画像から補正量算出部１５にて、テーブル４上の対象物５のズレ量を把握できるようになっている。２次元位置センサ９と補正量算出部１５を用いたところは、第２実施例と同じであるが、２つの２次元位置センサ９を用いており、２次元位置センサ９の数量が異なる。
図において、並進旋回２自由度ステージ装置３０は、第１実施例で示した構成である。
並進旋回２自由度ステージ装置３０を取り囲むように門型構造２８が構成され、この上に１軸並進駆動機構２４が配され、Ｘ軸テーブル２９を並進Ｘ方向に移動できる。
以上のような構成にしているので、第１実施例のように並進旋回２自由度ステージ装置３０がテーブル４を並進Ｙ方向の動作と、旋回θの動作を行い、門型構造２８にある１軸並進駆動機構２４がＸ軸テーブル２９を並進Ｘ方向の動作を行うことで、ＸＹθの３自由度の動作を行う３自由度ステージ装置となるのである。
FIG. 20 is a schematic plan view showing the arrangement of a single-axis drive translational rotation mechanism and a second mechanism part using a three-degree-of-freedom stage device using a translational swivel two-degree-of-freedom stage device showing an eighth embodiment of the present invention. FIG. 21 is a schematic side view, and FIG. 21 is a control block diagram of a three-degree-of-freedom stage device using a translational swivel two-degree-of-freedom stage device showing an eighth embodiment of the present invention, and a translation of a single-axis drive translational rotation mechanism and a second mechanism unit. -It is a figure which shows the outline of a rotation freedom degree. In the present embodiment, two two-dimensional position sensors 9 are provided, and the amount of deviation of the object 5 on the table 4 can be grasped by the correction amount calculation unit 15 from the image detected by the two-dimensional position sensor 9. ing. The use of the two-dimensional position sensor 9 and the correction amount calculation unit 15 is the same as in the second embodiment. However, two two-dimensional position sensors 9 are used, and the number of the two-dimensional position sensors 9 is different.
In the figure, the translational swivel two-degree-of-freedom stage device 30 has the configuration shown in the first embodiment.
A portal structure 28 is configured so as to surround the stage device 30 with two degrees of freedom of translation and rotation, and a uniaxial translation drive mechanism 24 is disposed thereon, and the X axis table 29 can be moved in the translation X direction.
Since it is configured as described above, the translation / swivel two-degree-of-freedom stage device 30 performs the translation Y-direction operation and the rotation θ operation on the table 4 as in the first embodiment. The shaft translation drive mechanism 24 moves the X-axis table 29 in the translational X direction, thereby providing a three-degree-of-freedom stage device that performs three-degree-of-freedom operations of XYθ.
図２２は本発明の第８実施例を示す並進旋回２自由度ステージ装置を用いた３自由度ステージ装置の動作例を示す概略図である。
図２２において、（１）と示した線は、３自由度ステージ装置が加工や検査を行う工程で必要な動作の基本的な軌跡・位置である。（２）と示した線は、基本的な軌跡・位置からδＸ，δＹだけズレた軌跡・位置である。（３）と示した線は、対象物５がテーブル４に置かれた際のズレた軌跡・位置である。（４）と示した線は、（３）の軌跡・位置のズレをＹ方向とθ方向に修正した軌跡・位置である。
対象物５がテーブル上に置かれると、対象物５は（３）のようにズレ量を伴う。そこで、並進旋回２自由度ステージ装置３０が並進Ｙ方向に可動して、対象物５上にあるマーカを２次元位置センサ９の画角の中に含まれるようにテーブル４を移動させる。
２次元位置センサ９はマーカを検出し、第２実施例の図７で示したのと同様に、対象物５のＸＹθのズレ量を、補正量算出部１５にて把握する。並進旋回２自由度ステージ装置３０は並進Ｙ方向と旋回θができるので、（３）のようなズレをＹ方向とθ方向に修正し、（４）のような軌跡・位置にする。加工や検査を行う工程で必要な動作の基本的な軌跡・位置は（１）であるが、１軸並進駆動機構２４がδＸだけ移動してここを新たな基準と改めることで、対象物５の加工や検査を正しい軌跡・位置に沿って行うことが可能となる。
以上のように、並進旋回２自由度ステージ装置３０と１軸並進駆動機構２４によってＸＹθの３自由度を駆動して作業できる３自由度ステージ装置となるのである。
FIG. 22 is a schematic diagram showing an operation example of a three-degree-of-freedom stage device using a translational swivel two-degree-of-freedom stage device showing an eighth embodiment of the present invention.
In FIG. 22, a line indicated by (1) is a basic trajectory / position of an operation required in a process in which the three-degree-of-freedom stage device performs processing or inspection. A line indicated by (2) is a trajectory / position shifted by δX, δY from the basic trajectory / position. A line indicated by (3) is a shifted locus / position when the object 5 is placed on the table 4. A line indicated by (4) is a locus / position obtained by correcting the deviation of the locus / position of (3) in the Y direction and the θ direction.
When the object 5 is placed on the table, the object 5 is accompanied by a shift amount as shown in (3). Therefore, the translational swivel two-degree-of-freedom stage device 30 moves in the translational Y direction and moves the table 4 so that the marker on the object 5 is included in the angle of view of the two-dimensional position sensor 9.
The two-dimensional position sensor 9 detects the marker, and the correction amount calculation unit 15 grasps the amount of deviation of XYθ of the target object 5 as shown in FIG. 7 of the second embodiment. Since the translational swivel two-degree-of-freedom stage device 30 can perform the translation Y direction and the rotation θ, the deviation as shown in (3) is corrected to the Y direction and the θ direction to obtain a locus / position as shown in (4). The basic trajectory / position of the operation required in the process of performing processing and inspection is (1). However, the uniaxial translational drive mechanism 24 moves by δX, and this is changed to a new reference, so that the object 5 Can be processed and inspected along the correct trajectory / position.
As described above, the three-degree-of-freedom stage device can be operated by driving the three-degree-of-freedom of XYθ by the translation-turning two-degree-of-freedom stage device 30 and the uniaxial translation drive mechanism 24.
なお、第１実施例および第３〜第７実施例では、１軸駆動並進回転機構６は、機台部７側から上に並進駆動部１１と回転自由度部１３と並進自由度部１２の順に構成され、第２の機構部は、機台部７側から上に並進自由度部１２と回転自由度部の順に構成し、第２実施例では、１軸駆動並進回転機構６は、機台部７側から上に並進駆動部１１と並進自由度部１２と回転自由度部１３順に構成したが、これらが混在しても良い。３自由度機構１８についても同様である。 In the first embodiment and the third to seventh embodiments, the uniaxial drive translation rotation mechanism 6 includes the translation drive unit 11, the rotation degree of freedom unit 13, and the translation degree of freedom unit 12. The second mechanism unit is configured in the order of the translational freedom unit 12 and the rotational freedom unit from the machine unit 7 side up. In the second embodiment, the single-axis drive translational rotation mechanism 6 Although it comprised in order from the base part 7 side at the translation drive part 11, the translation freedom part 12, and the rotation freedom part 13, these may be mixed. The same applies to the three-degree-of-freedom mechanism 18.
１軸駆動並進回転機構や３自由度機構や第２駆動機構を複数用いることによって、テーブルが大型化しても、荷重が分散されて支持される工作機械の２次元位置決め装置などにも適用できる。この機構により、テーブルを薄型にできる。
さらに、装置が大型化しても、特殊な大型電動機を使用せず、標準的な電動機を複数利用して、駆動力を分散するように構成できるので、装置部品の納期やコストの面で、特殊品に比べて安易に調達できるという利点もある。
By using a plurality of single-axis drive translational rotation mechanisms, three-degree-of-freedom mechanisms, and second drive mechanisms, even if the table is enlarged, it can be applied to a two-dimensional positioning device for a machine tool that is supported by distributed loads. With this mechanism, the table can be made thin.
Furthermore, even if the equipment becomes larger, it can be configured to distribute the driving force by using multiple standard motors without using special large motors. There is also an advantage that it can be procured easily compared to products.
１ 電動機 (リニアモータ)
２ 動作量検出器
３ 制御器
４ テーブル
５ 対象物
６ １軸駆動並進回転機構
７ 機台部
８ 指令部
９ ２次元位置センサ
１１ 並進駆動部
１２ 並進自由度部
１３ 回転自由度部
１５ 補正量算出部
１６ 第２の機構部
１８ ３自由度機構
１９ 第２駆動機構
２１ 直動案内
２２ 直動案内ブロック
２３ 回転用軸受
２４ １軸並進駆動機構
２５ 電動機制御装置
２７ Ｘ軸ベース
２８ 門型構造
２９ Ｘ軸テーブル
３０ 並進旋回２自由度ステージ装置
1 Electric motor (linear motor)
2 Motion amount detector 3 Controller 4 Table 5 Object 6 1-axis drive translational rotation mechanism 7 Machine base part 8 Command part 9 Two-dimensional position sensor 11 Translation drive part 12 Translational freedom part 13 Rotation degree of freedom part 15 Correction amount calculation Part 16 Second mechanism part 18 Three-degree-of-freedom mechanism 19 Second drive mechanism 21 Linear motion guide 22 Linear motion guide block 23 Rotating bearing 24 Single-axis translational drive mechanism 25 Motor controller 27 X-axis base 28 Portal structure 29 X Axis table 30 Translational swivel 2 degrees of freedom stage device
Claims (6)
前記機台部は、同一方向に平行に配置された少なくとも３本の長ストローク移動可能な直動案内を備え、かつ少なくとも３箇所の直動案内ブロックが前記少なくとも３本の長ストローク移動可能な直動案内の上に移動可能にそれぞれ載置され、
前記駆動機構は、並進自由度を持つ２つの並進自由度部と、回転自由度を持つ１つの回転自由度部よりなる第１の機構部と、
前記第１の機構部の２つの前記並進自由度部のうちの一つに設けられた電動機と、被検出体となる該機構部の動作量を検出する動作量検出器と、指令信号を受けて前記電動機を制御する制御器とよりなる電動機制御装置と、
から構成される１軸駆動並進回転機構であって、
前記駆動機構である前記１軸駆動並進回転機構を少なくも２組備え、
さらに前記テーブルの旋回移動中心に１つの前記回転自由度部と１つの前記並進自由度部を持つ第２の機構部と、を備え、
前記２組の１軸駆動並進回転機構と前記第２の機構部とをそれぞれ前記少なくとも３箇所の直動案内ブロックの上に載置し、
前記１軸駆動並進回転機構は、前記制御器に動作指令を与える指令装置を備えると共に、前記電動機を並進方向に動作させることにより、前記テーブルを１方向の並進移動もしくは旋回移動させるようにしたことを特徴とする並進旋回２自由度ステージ装置。In a translational swivel two-degree-of-freedom stage device that positions a table on which an object is mounted at a predetermined position via a drive mechanism disposed in a machine base unit,
The machine base unit includes at least three linear motion guides arranged in parallel in the same direction and capable of moving with a long stroke, and at least three linear motion guide blocks are linearly movable with at least three long strokes. It is placed movably on the movement guide,
The drive mechanism includes two translational degrees of freedom parts having translational degrees of freedom, and a first mechanism part comprising one rotational degree of freedom parts having rotational degrees of freedom;
An electric motor provided in one of the two translational freedom units of the first mechanism unit, an operation amount detector for detecting an operation amount of the mechanism unit to be detected, and a command signal An electric motor control device comprising a controller for controlling the electric motor;
A one-axis drive translational rotation mechanism comprising:
Including at least two sets of the single-axis drive translational rotation mechanism as the drive mechanism;
And a second mechanism portion having one rotational freedom portion and one translational freedom portion at the rotational movement center of the table,
The two sets of one-axis drive translational rotation mechanism and the second mechanism part are respectively placed on the at least three linear motion guide blocks,
The single-axis drive translational rotation mechanism includes a command device for giving an operation command to the controller, and the table is moved in one direction in translation or swivel by operating the motor in a translation direction. A translational swivel two-degree-of-freedom stage device.
前記補正量算出部によって得た補正量に基づいて前記電動機を動作させ前記テーブルもしくは前記テーブル上の前記対象物の位置を補正することを特徴とする請求項１記載の並進旋回２自由度ステージ装置。A two-dimensional position sensor for grasping the position of the table or the object on the table, and an image of the object captured by the two-dimensional position sensor, and correcting the position of the object A correction amount calculation unit for calculating the correction amount,
2. The translational turn two-degree-of-freedom stage device according to claim 1, wherein the electric motor is operated based on a correction amount obtained by the correction amount calculation unit to correct the position of the object on the table or the table. .
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| JP2007523400A JP4826584B2 (en) | 2005-06-30 | 2006-06-19 | Translational and two-degree-of-freedom stage device and three-degree-of-freedom stage device using the same |
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| JP2007523400A JP4826584B2 (en) | 2005-06-30 | 2006-06-19 | Translational and two-degree-of-freedom stage device and three-degree-of-freedom stage device using the same |
| PCT/JP2006/312230 WO2007004413A1 (en) | 2005-06-30 | 2006-06-19 | Translating/turning 2-degree-of-freedom stage device and 3-degree-of-freedom stage device using the same |
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| GB2465450A (en) * | 2008-07-16 | 2010-05-26 | Univ Beihang | A translation and rotation feeding component of asymmetric and linear driving |
| CN101750885B (en) * | 2010-01-06 | 2011-12-14 | 天津大学 | Two-degree of freedom precise positioning work table |
| CN101770166B (en) * | 2010-01-06 | 2011-12-28 | 天津大学 | Two-translational-motion precision positioning working table for nano-imprint photoetching system |
| CN102998899B (en) * | 2012-12-05 | 2014-09-17 | 天津大学 | Two-degree-of-freedom nanometer positioning platform |
| KR102052135B1 (en) * | 2018-04-09 | 2019-12-04 | 주식회사 에이치비테크놀러지 | AOI inspection equipment that can adjust θ axis alignment of side dual gripper drive system |
| CN112193371A (en) * | 2020-10-09 | 2021-01-08 | 九江精密测试技术研究所 | Three-degree-of-freedom displacement platform for ship |
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- 2006-06-19 KR KR1020077024407A patent/KR20080002864A/en active Search and Examination
- 2006-06-19 JP JP2007523400A patent/JP4826584B2/en not_active Expired - Fee Related
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| TW200707622A (en) | 2007-02-16 |
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| JPWO2007004413A1 (en) | 2009-01-22 |
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