1302723 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於以半導體裝置或印刷基板、液晶顯示元 件等的曝光裝置等，移動工作台，將工作台上的對象定位 於所定位置，且可移動工作台長衝程的Y方向並進與旋轉 0的並進旋轉2自由度平台裝置、或是在該並進旋轉2自 由度平台裝置增加X方向並進驅動機構的3自由度平台裝 • 置。 【先前技術】 習知的第1例的平台裝置是包括：可移動地軸支具有 可動工作台的平台的一端部與另一端的可動支持機構，及 控制可動平台與可動支持機構的位置控制部，不僅直進方 向，在旋轉方向的移動，也可正確地定位平台，而且應答 性高又可高速地移動平台（例如，參照專利文獻1 )。 • 又，習知的第2例的2軸平行· 1軸旋轉運動引導機 構及使用它的2軸平行· 1軸旋轉工作台裝置，是作爲對 於工作台的裝配使用簡單且高精度地可引導支持的2軸平 行· 1軸旋轉運動引導機構的工作台裝置（例如，參照專 利文獻2 )。 專利文獻1:日本特開2〇03-31644〇號公報（第1圖 、第3圖、第4圖、第5圖、第7圖） 專利文獻2 :日本特開平28號公報（第2圖 、第4圖、第5圖） -4- (2) 1302723 說明習知第1例的專利文獻1的平台裝置。 第23圖是表示專利文獻1的平台裝置的外觀圖。 在第23圖中，1100、1200、1 300是直進平台，1110 、1210、1310 是可動工作台，1112 與 1114、1212 與 1214 、1312 與 1314 是腳部，1120、1220、1320 是底部，1122 與 1124、 1222 與 1224、 1322 與 1324 是導軌，1130、 1230、1 330是線性馬達定子，1120、1220、1 320是底部 φ ，1 350是第一端部，1360是第二端部。三個直進平台 1100、1200、1 300是具有相同構造，藉由線性馬達另外地 被驅動的可移動的可動工作台1110、1210、1310移動在 直進平台1100、1200、1 300上。直進平台1300的底部 1 3 20的第一端部1 350，是轉動自如地被支持在直進平台 1100的可動工作台1110上，而直進平台1300的底部 1 3 20的第二端部1 360，是轉動自如地被支持在直進平台 1200的可動工作台1210上。 • 第24圖是表不專利文獻1的平台裝置的直進平台 1 3 00的軸支部的態樣的立體圖。在第24圖中，1400、 1 5 0 0是軸支構件，1 4 1 0、1 5 1 0是外側圓筒部，1 4 2 0、 1 5 2 0是內側圓筒部、1 5 3 0是板簧部，板簧部} 5 3 〇是設在 內側圓筒部1 520，經由支持構件彼固定在底部132〇的下 面。 第2 5圖是表示專利文獻1的平台裝置的軸支構件 1 4 0 0與軸支構件1 5 0 0的詳細圖；第2 5 ( a )圖是表示從 底部1320的第一端部1 350側觀看軸支構件ι4〇〇時的斷 (3) 1302723 面圖；第25(b)圖是表示從底部1320的第二端部1360 側觀看軸支構件1 500時的斷面圖。 表示於第25 ( a)圖的內側圓筒部1420是對於外側圓 筒部14 10相對性圓滑地轉動。在表示於第45 ( b)圖的內 側圓筒部1520，沿著內側圓筒部1 520的半徑方向設有板 簧 1530 。 第26圖是表示從上方觀看專利文獻1的平台裝置的 內側圓筒部1520的圖式。 在第26圖中，1 522是小內徑部，1524是大內徑部， 1 526是境界側面，1 560是螺絲。板簧1 530是長形狀，而 在板簧1 530的兩端部，有圓形貫通孔，長圓形貫通孔的 長徑方向，是與板簧1 530的長度方向大約相同方向。板 簧1 530的兩端部，是經由該貫通孔而藉由螺絲1 560，設 於內側圓筒部1 520的境界側面1 526。板簧1 530是板簧 1 530的長度方向，作成與內側圓筒部1520的直徑方向大 約相同。 如圖示朝白箭號方向撓曲板簧1 530時，板簧1 530的 兩端部是沿著長圓形貫通孔可微動。在板簧1 530的中央 部，藉由螺絲1 5 8 0固定著支持構件1 5 7 0。支持構件1 5 7 0 是T形狀，而支持構件1570的上部，是藉由螺絲1 590被 固定於直進平台1 300的底部1 320的下面。藉由設置旋轉 軸承1 540與滾輪1 550，內側圓筒部1520是對於外側圓筒 部1 5 1 0相對性可圓滑地轉動。 又’直進平台1300是藉由撓曲板簧1530，作成對於 (4) 1302723 內側圓筒部1 520可移動。由直進平台1 300構成「平台」 ，而由可動工作台1310構成「可動工作台」。 又，由軸支構件1400構成「第一可動支持機構」， 又，由軸支構件1 500構成「第二可動支持機構」。又， 由第一端部1 350形成「一端部」，由第二端部1 360形成 「另一端部」。還有由板簧部1 530構成「彈性構件」。 第27圖是表示進行專利文獻1的平台裝置的工作台 的定位的具體性態樣。 表示於第27 ( a )圖至第27 ( c )圖的例子，是槪略 表示三個直進平台1100、1200及1 300，及可動平台11〇〇 、1 2 1 0、1 3 1 0的俯視圖。 第27 (a)圖是表示可動工作台1110位於直進平台 1 100的X方向中央，可動工作台1210位於直進平台1200 的X方向的中央，可動工作台1310位於直進平台1300的 Y方向的中央者，而將可動工作台1110、1210、1310位 於該位置時作爲基準位置。 第27 ( b )圖是表示將直進平台1 1〇〇的可動工作台 1 1 10、及直進平台1200的可動工作台1210的雙方，從基 準位置朝正方向僅移動距離Y1，而將直進平台1 300的可 動工作台1 3 1 0，從基準位置朝正方向僅移動距離X 1時的 狀態。如此地，藉由將可動工作台1 1 10與可動工作台 1210朝相同方向僅移動相同距離，而朝γ方向與移動整 體直進平台1 300。構成如此，可將可動工作台1310對位 在作爲X-Y方向所期望的位置。 -7- (5) 1302723 第27(c)圖是表不將直進平台1100的可動工作台 1 1 1 0，從基準位置朝負方向僅移動距離Y2，而將直進平 台1 200的可動工作台，從基準位置朝正方向僅移動距離 Y2。構成如此，可將整體直進平台1300的方向對位於僅 旋轉0的位置。如此地，藉由將可動工作台1 1 10與可動 工作台1 2 1 0相對性地對位於不相同的位置，可將整體直 進平台13〇〇對位於僅旋轉所期望再度的位置，並可將可 | 動工作台1 3 1 0對位於僅旋轉所期望再度的位置。 如第27 ( c)圖，當直進平台1 300旋轉時，支持上述 直進平台1300的底部1 320的支持構件1 570是成爲移動 狀態。當支持構件1 570移動時，被固定在支持構件1570 的板簧部1 530是成爲撓曲狀態。 第28圖是表示專利文獻1的平台裝置的板簧部1530 撓曲時的樣子的圖式。支持構件1 5 7 0是表示朝圖式左方 向移動者。藉由該支持構件1570的移動，板簧部1530是 | 在以符號Μ所示的部位撓曲。 如此，在直進平台1 300的底部1 320的第一端部1350 藉由作成僅軸支直進平台1300的構成，以第一端部1350 的旋轉中心作爲基準，可算出沿著直進平台i 300的長度 方向的可動工作台1310的位置。又，在直進平台13〇〇的 底部1320的第二端部1360，藉由作成軸支直進平台1300 之同時’作成朝直進平台1300的長度方向可移動的構成 ，而可將直進平台1 300的旋轉動作作成圓滑者。 以下，說明習知的第2例的專利文獻2的2軸平行· -8 - (6) 1302723 1軸旋轉動引導機構及使用它的2軸平行· 1軸旋轉工作 台裝置。第29圖是表不專利文獻2的2軸平行· 1軸旋轉 運動引導機構的局部切剖分解立體圖；第30圖是表示使 用表示於第29圖的2軸平行· 1軸旋轉運動引導機構的2 軸平行· 1軸旋轉工作台裝置；在同圖（a )是省略工作台 而以兩點鏈線表示的俯視圖；同圖（b )是前視圖；第3 1 圖是表示圖示於第30圖的工作台的俯視圖。 φ 在第29圖至第31圖中，2軸平行· 1軸旋轉引導機 構’是由2軸平行運動引導部270，及被組裝於該2軸平 行運動引導部270的旋轉運動引導部280所構成。 又’如弟29圖及第30圖所示地，使用2軸平行·1 軸&Ε轉運動的2軸平行•旋轉工作台裝置，是經由4個2 軸平行· 1軸旋轉運動引導機構201A，201Β，201C， 201D ’將工作台233移動自如地支持於對於基台234平行 地互相正父的2軸方向’而以位於工作台2 3 3中央部的旋 # 轉軸C0爲中心成爲可旋轉。 在4個中的3個2軸平行.1軸旋轉運動引導機構 201A，2〇lB，201D，被作動連結有分別朝直線方向被伸 縮驅動的旋轉馬達2 3 8，及將該旋轉馬達2 3 8的旋轉動變 換成直線運動的進給螺絲機構239所構成的直線驅動機構 237A，23 7B，23 7D。2軸平行· 1軸旋轉運動引導機構 201C是可自由地運動。 欲平行移動工作台23 3時，則驅動兩個直線驅動機構 237A’ 237B或是直線驅動機構237c。 (7) 1302723 欲將工作台23 3對於旋轉軸CO進行旋轉時，則互相 朝反方向僅以同一量+AX，-ΔΧ驅動直線驅動機構237A， 23 7B，另一方面，朝Y軸方向僅以所定量AY驅動直線驅 動機構237D。 如此地，習知的2軸平行· 1軸旋轉運動機構及使用 它的2軸平行· 1軸旋轉工作台裝置，是平行移動或旋轉 工作台，而進行定位。 【發明內容】 然而，專利文獻1的平台裝置，是利用彈性構件，而 以彈性構件會撓曲以得到自由度，惟必須考慮彈性構件的 撓曲變位來定位。亦即，藉由使用於板簧的彈性特性的遲 滯性或是彈性構件的螺旋彈簧或空氣彈簧等的復原力與變 位的非線形性，有無法精密地進行定位的問題。 又，配置如驅動系的板簧的彈性構件時，也有板簧要 • 素作爲主要原因的共振對定位精度給與影響的問題。 又，專利文獻2的2軸平行· 1軸旋轉運動引導機構 及使用它的2軸平行· 1軸旋轉工作台裝置，是僅以微小 χγ 0的定位作爲目的，在搬運用途必須使用另一驅動機 構。因此，也有機械構造成爲複雜化，或是費用成本的問 題。 本發明是鑑於此種問題點而創作者，其目的是在於提 供Υ Θ的微小定位之同時，可長衝程移動搬運用途的並進 旋轉2自由度平台裝置，及使用該並進旋轉2自由度平台 -10- (8) (8)1302723 裝置，可進行包含長衝程移動的ΧΥ Θ移動的3自由度平 台裝置。 爲了解決上述問題，本發明是如下地所構成。 申請專利範圍第1項所述的發明，是屬於將經由配置 於機台部的驅動機構搭載對象物的工作台定位在所定位置 的並進旋轉2自由度平台裝置，其特徵爲： 上述驅動機構是由：具有並進自由度的兩個並進自由 度部，及具有旋轉自由度的一個旋轉自由度部所構成的第 一機構部，及 設於上述第一機構部的兩個上述並進自由度部中的一 個的電動機，及檢測成爲被檢測體的該機構部的動作量的 動作量檢測器，及接收指令訊號來控制上述電動機的控制 器所構成的電動機控制裝置， 所構成的1軸驅動並進旋轉機構； 至少具備兩組上述驅動機構的上述1軸驅動並進旋轉 機構， 又具備於上述工作台的旋轉移動中心具有一個上述旋 轉自由度部與一個上述並進自由度部的第二機構部； 上述1軸驅動並進旋轉機構是具備將動作指令給與上 述控制器的指令裝置，而且藉由朝並進方向動作上述電動 機，而將上述工作台朝一方向並進移動或旋轉移動。 又，申請專利範圍第2項所述的發明，是申請專利範 圍第1項所述的並進旋轉2自由度平台裝置，又具有未具 上述電動機的上述第一機構部的3自由度機構，爲其特徵 -11 - 1302723 ⑼ 者。 又，申請專利範圍第3項所述發明，是申請專利範圍 第1項所述的並進旋轉2自由度平台裝置，於上述第二機 構部具有：具備驅動上述並進自由度部的上述電動機與上 述動作量檢測器及上述控制器所構成的上述電動機控制裝 置的第二驅動機構，爲其特徵者。 申請專利範圍第4項所述發明，是申請專利範圍第i 項所述的並進旋轉2自由度平台裝置，上述第一機構部是 由：設於上述機台部上的第一並進自由度部，及設於上述 第一並進自由度部上的第二並進自由度部，及設於上述第 二並進自由度部上的旋轉自由度部所構成，爲其特徵者。 申請專利範圍第5項所述的發明，是申請專利範圍第 1項所述的並進旋轉2自由度平台裝置，上述第一機構部 是由：設於上述機台部上的第一並進自由度部，及設於上 述第一並進自由度部上的旋轉自由度部，及設於上述旋轉 自由度部上的第二並進自由度部所構成，爲其特徵者。 申請專利範圍第6項所述的發明，是申請專利範圍第 1項所述的並進旋轉2自由度平台裝置，具備用以把握上 述工作台或上述工作台上的對象物的位置的二維位置感測 器，及畫像處理藉由上述二維位置感測器所捕捉的對象物 畫像，演算用以修正上述對象物的位置的修正量的修正量 算出部；依據藉由上述修正算出部所得到的修正量，將上 述電動機予以動作進行修正上述工作台或上述工作台上的 上述對象物的位置，爲其特徵者。 -12- (10) 1302723 申請專利範圍第7項所述的發明，是申請專利範圍第 6項所述的並進旋轉2自由度平台裝置，具有複數上述二 維位置感測器，爲其特徵者。 申請專利範圍第8項所述的發明，是使用並進旋轉2 自由度平台裝置的3自由度平台裝置，其特徵爲··於申請 專利範圍第1項至第7項中任一項所述的並進旋轉2自由 度平台裝置的工作台的上部或下部具有朝並進方向以電動 機驅動工作台的1軸並進驅動機構。 申請專利範圍第9項所述的發明，是使用並進旋轉2 自由度平台裝置的3自由度平台裝置，其特徵爲：於圍繞 申5P3專利軔0弟1項至弟7項中任一'項所述的並進旋轉2 自由度平台裝置的門型構造具有朝並進方向以電動機驅動 工作台的1軸並進驅動機構。 申請專利範圍第1 0項所述的發明，是使用並進旋轉2 自由度平台裝置的3自由度平台裝置，其特徵爲：具有爲 了朝並進方向驅動申請專利範圍第1項至第7項中任一項 所述的並進旋轉2自由度平台裝置，朝並進方向以電動機 驅動工作台的1軸並進驅動機構。 發明的效果 依照申請專利範圍第1項所述的發明，可進行工作台 對於1方向的長衝程並進移動與旋轉移動。 又，依照申請專利範圍第2項所述的發明，除了第一 機構部與第二機構部之外還以3自由度機構可支持工作台 -13- (11) 1302723 ，而可抑制工作台的撓曲。 依照申請專利範圍第3項所述的發明，可支撐複數點 ，並可將工作台或對象物的荷重，優異地平衡分散並進行 驅動。 依照申請專利範圍第4項所述的發明，因兩個並進自 由度部的安裝角度成爲固定，因此較簡單地可演算工作台 移動之際所必需的動作量。 依照申請專利範圍第5項所述的發明，因隔著兩個並 進驅動部的直動引導可設置旋轉驅動部，而從工作台至機 台能連續地支持，因此對於工作台的其他荷重，驅動機構 能抑制變形而加以支持。 依照申請專利範圍第6項所述的發明，將工作台或工 作台上的對象物的配置狀況使用二維位置感測器來算出位 置的修正値，可迅速地進行工作台移動動作。 依照申請專利範圍第7項所述的發明，在一個二維位 置感測器，即使無法把握所有對象物時，也可分割複數二 維位置感測器而把握對象物，就可把握對象物的配置。又 ，可使用於複數種類的把握對象。 依照申請專利範圍第8項至第1 〇項所述的發明，可 進行工作台對於1方向的長衝程並進移動與旋轉移動，又 因具有1軸並進驅動機構，因此可具有XY並進與0旋轉 的3自由度。 【實施方式】 -14- (12) 1302723 以下，參照圖式說明本發明的實施形 實施例1 第1圖是表示本發明的第1實施例0 由度平台裝置的1軸驅動並進旋轉機構與 的配置的俯視槪略圖與側面槪略圖；第2 的第1實施例的並進旋轉2自由度平台裝 及表示1軸驅動並進旋轉機構與第二機構 由度的槪略圖。 在圖中，1是電動機（線性馬達）， 器，3是控制器，4是工作台，5是對象物 並進旋轉機構，7是機台部，8是指令部 部，12是並進自由度部，13是旋轉自由Β 機構部，25是電動機驅動裝置。又，1軸 構6是由機台部7側於上面依並進驅動部 度部1 3及並進自由度部1 2之順序所構成 由機台部7側於上面依並進自由度部1 2 之順序所構成。 本發明與專利文獻1不相同的部分， 並進旋轉機構6與第二機構部1 6的部分。 轉機構6具有藉由電動機1被驅動的並進 轉自由度部1 3之處是與專利文獻1同樣 旋轉自由度部1 3沒有如板簧的彈性體， 軸驅動並進旋轉機構6，設有在專利文獻 〇 1勺並進旋轉2自 表示第二機構部 圖是表示本發明 置的控制方塊圖 部的並進旋轉自 2是動作量檢測 ，6是1軸驅動 ’ 1 1是並進驅動 髮部，16是第二 驅動並進旋轉機 ;11與旋轉自由 ，第二驅動部是 與旋轉自由度部 是具備1軸驅動 1軸驅動並進旋 h驅動部11與旋 ，惟在本發明的 而在本發明的1 1所沒有的並進 -15- (13) 1302723 自由度部12。又，以旋轉自由度部13與並進自由度部12 支持工作台4的第二機構部1 6也在專利文獻1所沒有。 本發明與專利文獻2不相同之部分，是工作台4僅朝 並進1方向動作之處。但是，本發明是能長衝程的並進移 動地，1軸驅動並進旋轉機構6的並進驅動部1 1與第二機 構部1 6的並進自由度部1 2朝相同方向所構成。 專利文獻2的2軸平行· i軸旋轉運動引導機構270 φ ，與1軸驅動並進旋轉機構6的並進驅動部1 1，並進自由 度部12，旋轉自由度部13的構成是類似，惟第二機構部 1 6是在專利文獻2所沒有。 1軸驅動並進旋轉機構6是沿著機台部7的兩側（A ，B)的直動導件2 1移動方式所配置，第二機構部丨6是 配置在工作台4的旋轉中心部（c )。 又，構成各並進驅動部1 1的線性馬達1，是分別連接 有兩個控制器3。控制器3是從指令部8接收動作命令， ® 使線性馬達1進行動作。動作量檢測器2是檢測線性馬達 1或線性馬達1所驅動的直動引導塊22等所附屬部位的移 動量’而使該移動量與指令部8的動作命令之相差成爲〇 的方式，控制器3是控制動作。 以下’針對於並進旋轉2自由度平台裝置的動作加以 說明。 第3圖是表示圖示本發明的第1實施例的並進旋轉2 自由度平台裝置的工作台的Θ旋轉移動的圖式。 如第2圖所示地，該動作是當將a、b點兩個1軸驅 -16 - (14) 1302723 動並進旋轉機構6的並進驅動部1 1的線性馬達1分別朝 相反側動作，則以C點的第二機構部1 6爲中心可旋轉工 作台4。當將1軸驅動並進旋轉機構6 a施以（5 Y1動作， 並將1軸驅動並進旋轉機構6 b施以（5 Y 2動作，則1軸驅 動並進旋轉機構6a、6b的旋轉自由度部13是進行0動作 而並進自由度部12是進行（5X1、5X2移動之故，因而工 作台4是進行0旋轉。亦即，作用著第二機構部16的旋 轉自由度部13，而使工作台4進行0旋轉。 如上述地工作台的旋轉，及1軸驅動並進旋轉機構6 與第二機構部1 6的各線性馬達1，各旋轉自由度部1 3， 並進自由度部1 2的移動量，是幾何學地被決定。 第4圖是表示圖示本發明的第1實施例的並進旋轉2 自由度平台裝置的工作台的Y並進移動的圖式。 在第4圖中，5 Y是附屬於1軸驅動並進旋轉機構的 線性馬達1的移動量。若僅動作A，B雙方的線性馬達1 a 、1 b相同量，則可並進移動工作台4。 又，並進移動是以第3圖所表示的旋轉0後的姿勢並 進移動也可以。本發明的第1實施例是作成上述構成之故 因而成爲可進行包含旋轉0與長衝程的並進γ方向移動的 並進旋轉2自由度平台裝置。 實施例2 第5圖是表示圖示本發明的第2實施例的並進旋轉2 自由度平台裝置的1軸驅動並進旋轉機構與第二機構部的 -17- (15) 1302723 配置的俯視槪略圖與側面槪略圖；第6圖是表示圖示本發 明的第2實施例的並進旋轉2自由度平台裝置的控制方塊 圖及1軸驅動並進旋轉機構與第二機構部的並進，旋轉自 由度的槪略圖。 又，第2實施例的基本性構成要素是與第1實施例相 同。 第2實施例與第1實施例不相同之處，是1軸驅動並 % 進旋轉機構的構成。1軸驅動並進旋轉機構6是由機台部 7側於上面依並進驅動部1 1及並進自由度部1 2及旋轉自 由度部1 3之順序所構成。1軸驅動並進旋轉機構6與第二 機構部1 6的配置也與第1實施例相同。 又，本發明與專利文獻1，專利文獻2不相同的部分 ，是與第1實施例相同。 本發明的第2實施例與第1實施例不相同，爲具備二 維位置感測器9與修正量算出部1 5的部分。 ® 第7圖是表示依圖示本發明的第2實施例的並進旋轉 2自由度平台裝置的二維位置感測器的對象物的位置修正 方法的圖式。二維位置感測器9是檢測工作台4或是工作 台4上的對象物5，藉由修正量算出部1 5可把握其偏離量 。若可把握偏離量，如第7圖所示地成爲可修正並進γ方 向與旋轉0方向。 在本貫施例中，未能修正並進X方向的修正，惟在其 他實施例中予以後述，可進行並進X方向的修正。 第8圖是表示圖示本發明的第2實施例的並進旋轉 2 -18- (16) 1302723 自由度平台裝置的工作台的0旋轉移動的圖式。 與第1實施例同樣地，如第8圖所示，當將A，B點 兩個1軸驅動並進旋轉機構6的並進驅動部i1的線性馬 達1分別朝相反側動作，則以C點的第二機構部1 6爲中 心可旋轉工作台4。當將1軸驅動並進旋轉機構6 a施以 5 Y1動作，並將1軸驅動並進旋轉機構6b施以5 Y2動 作’則1軸驅動並進旋轉機構6a，6b的旋轉自由度部13 是進行0動作，而並進自由度部12是進行5X1、5X2移 動之故，因而工作台4是進行0旋轉。亦即，作用著第二 機構部16的旋轉自由度部13，而使工作台4進行0旋轉 〇 與第1實施例，1軸驅動並進旋轉機構6a，6b的構成 不相同之故，因而將工作台4進行Θ旋轉之際的線性馬達 la，lb的移動量5Y1，5 Y2，並進自由度12的移動量 5 X1、（5 X2不相同，惟工作台4的旋轉，及1軸驅動並 進旋轉機構6與第二機構部1 6的各線性馬達1，各旋轉自 由度部13，並進自由度部12的移動量，是幾何學的被決 定之處相同。 又，並進Y方向的工作台4的移動’是與第1實施例 作成同樣地可實施。 實施例3 第9圖是表示圖示本發明的第3實施例的並進旋轉2 自由度平台裝置的1軸驅動並進旋轉機構與第二機構部的 -19- (17) 1302723 配置的俯視槪略圖；第1 〇圖是表示圖示本發明的第3實 施例的並進旋轉2自由度平台裝置的控制方塊圖及1軸驅 動並進旋轉機構與第二機構部的並進，旋轉自由度的槪略 圖。 第3實施例的基本性的構成要素是與第1實施例，第 2實施例相同。與第1實施例，第2實施例不同處，爲又 設置未具有線性馬達1的自由度機構i 8。又，與第i實施 例’爲1軸驅動並進旋轉機構6 a，6b的配置位置不相同 。又’省略記載二維位置感測器9與修正量算出部1 5。 又，如第1 0圖所示地，1軸驅動並進旋轉機構6的構 成是與第1實施例同樣地由機台部7側於上面依並進驅動 部1 1與旋轉自由度1 3及並進自由度部12之順序。3自 由度機構1 8的構成，也由機台部7側依並進自由度部1 2 ’旋轉自由度部1 3，並進自由度部i 2的構成。 又’本發明與專利文獻i、專利文獻2不相同的部分 是與第1實施例相同。 第1 1圖是表示圖示本發明的第3實施例的並進旋轉2 自由度平台裝置的工作台的0旋轉移動的圖式。 與第1實施例同樣地，如第1 1圖所示，當將A，B點 兩個1軸驅動並進旋轉機構6的並進驅動部丨i的線性馬 達1分別朝相反側動，則以C點的第二機構部1 6爲中心 可旋轉工作台4。當將1軸驅動並進旋轉機構6a施以 5 Y1動作，並將1軸驅動並進旋轉機構6b施以5 Y2動 作，則1軸驅動並進旋轉機構6a，6b的旋轉自由度部13 20- (18) 1302723 是進行0動作，而並進自由度部12是進行（5X1、6X2移 動，3自由度機構1 8的並進自由度部1 2也進行δ Y3、 5 Υ4、5 Χ3、5 Χ4移動，且作用著第二機構部16的旋轉 自由度部1 3，而使工作台4進行0旋轉。 與第1實施例，1軸驅動並進旋轉機構6a，6b的構成 不相同之故，因而線性馬達1 a，1 b的動作量是不相同， 惟工作台4的旋轉，及1軸驅動並進旋轉機構6與第二機 構部1 6的各線性馬達1，各旋轉自由度部1 3，並進自由 度部12的移動量，是幾何學的被決定之處相同。又，並 進Y方向的工作台4的移動，是與第1實施例作成同樣地 可實施。 實施例4 第1 2圖是表示圖示本發明的第4實施例的並進旋轉2 自由度平台裝置的1軸驅動並進旋轉機構與第二機構部的 配置的俯視槪略圖；第1 3圖是表示圖示本發明的第4實 施例的並進旋轉2自由度平台裝置的控制方塊圖及1軸驅 動並進旋轉機構與第二機構部的並進，旋轉自由度的槪略 圖。 第4實施例的基本性的構成要素是與第1實施例相同 。第4實施例與第1實施例不相同之處，是如第13圖所 示地，在第二機構部1 6也配置線性馬達1，作爲第二驅動 機構19，又具備控制器3，及動作量檢測器2之處。 第一機構部6a，6b的構成與配置是與第1實施例相 -21 · (19) 1302723 同。又，二維位置感測器9與修正量算出部 載。 又，本發明與專利文獻1、專利文獻2 是與第1實施例相同。 因作成如上的構成，因此工作台4的0 第3圖同樣地可實現。並進Y方向移動也與 樣地可實現。在本實施例中，因第二驅動機 線性馬達1 c，因此也可增大對Y方向的推 施分散各線性馬達的容量而能作出推力的電 定。 實施例5 第14圖是表示圖示本發明的第5實施例 自由度平台裝置的1軸驅動並進旋轉機構與 第二驅動機構的配置的俯視槪略圖；第1 5 本發明的第5實施例的並進旋轉2自由度平 方塊圖及1軸驅動並進旋轉機構與第二機構 轉自由度的槪略圖。 又’第5實施例的基本性的構成要素是 相同。又，1軸驅動並進旋轉機構6與第二| 置，是將第3實施例的3自由度機構18置 並進旋轉機構6的配置。亦即，與第3實施 性馬達1之處不相同。又，二維位置感測器 出部1 5是省略記載。1軸驅動並進旋轉機構 1 5是省略記 不相同的部分 旋轉移動是與 第1實施例同 構 19也具備 進力量，可實 動機的容量選 丨的並進旋轉2 第二機構部， 圖是表示圖示 台裝置的控制 部的並進，旋 與第1實施例 藥構部1 6的配 換於1軸驅動 例，再增加線 9與補正量算 6的構成是與 -22- (20) 1302723 第1實施例相同，爲並進，旋轉，並進的順序。又，本發 明與專利文獻1、專利文獻2不相同的部分是與第1實施 例相同。 因作成如上的構成，因此工作台4的0旋轉移動是與 第3實施例的第1 1圖同樣地可實現。並進γ方向移動也 與第1實施例同樣地可實現。在本實施例中，因具備4個 1軸驅動並進旋轉機構之故，因此也可增大對Y方向的推 進力量，可實施分散各線性馬達的容量而能作出推力的電 動機的容量選定。 實施例6 第16圖是表示使用圖示本發明的第6實施例的並進 旋轉2自由度平台裝置的使用3自由度平台裝置的丨軸驅 動並進旋轉機構與第二機構部的配置的俯視槪略圖與側面 槪略圖；第1 7圖是表示使用圖示本發明的第6實施例的 並進旋轉2自由度平台裝置的3自由度平台裝置的控制方 塊圖與1軸驅動並進旋轉機構及第二機構部的並進，旋轉 自由度的槪略圖。 在圖中，並進旋轉2自由度平台裝置30是以第1實 施例所表示的構成。於並進旋轉2自由度平台裝置3 〇白勺 工作台4上面配置1軸並進驅動機構24，而實現並進χ 方向的動作。 因作成如上的構成，因此如第1實施例地並進旋轉2 自由度平台裝置30是將工作台4進行並進Υ方向的動作 -23- (21) 1302723 ，及旋轉0的動作，因工作台4上面的1軸並進驅動機構 24進行並進X方向的動作，因此成爲進行ΧΥΘ的3自由 度動作的3自由度平台裝置。 實施例7 第18圖是表示使用圖示本發明的第7實施例的並進 方定轉2自由度平台裝置的使用3自由度平台裝置的1軸驅 動並進旋轉機構與第二機構部的配置的俯視槪略圖與側面 槪略圖；第1 9圖是表示使用圖示本發明的第7實施例的 並進旋轉2自由度平台裝置的3自由度平台裝置的控制方 塊圖與1軸驅動並進旋轉機構及第二機構部的並進’旋轉 自由度的槪略圖。 在圖中，並進旋轉2自由度平台裝置30是以第1實 施例所表示的構成。 並進旋轉2自由度平台裝置30是將兩具線性馬達配 置在1軸並進驅動機構24上。 因作成如上的構成，因此如第1實施例地並進旋轉2 自由度平台裝置30是將工作台4進行並進Y方向的動作 ，及旋轉0的動作；將並進旋轉2自由度平台裝置3 0的 機台部4以1軸並進驅動機構24進行並進X方向的動作 ，而成爲進行ΧΥ0的3自由度動作的3自由度平台裝置 實施例8 -24 - (22) 1302723 第20圖是表示使用圖示本發明的第8實施例的並進 旋轉2自由度平台裝置的使用3自由度平台裝置的1軸驅 動並進旋轉機構與第二機構部的配置的俯視槪略圖與側面 槪略圖；第2 1圖是表示使用圖示本發明的第8實施例的 並進旋轉2自由度平台裝置的3自由度平台裝置的控制方 塊圖與1軸驅動並進旋轉機構及第二機構部的並進，旋轉 自由度的槪略圖。在本實施例中，具有兩具二維位置感測 φ 器9，成爲由二維位置感測器9所檢測的畫像在修正量算 出部1 5，可把握工作台4上的對象物5的偏離量。使用二 維位置感測器9與修正量算出部15之處，與第2實施例 相同，惟使用兩具二維位置感測器9，在二維位置感測器 9的數量不相同。 在圖中，並進旋轉2自由度平台裝置30是以第1實 施例所表示的構成。 圍繞並進旋轉2自由度平台裝置30的方式構成著門 φ 型構造28，於該上面配設有1軸並進驅動機構24，而可 朝並進X方向動X軸工作台24。 因作成如上的構成，因此如第1實施例地並進旋轉2 自由度平台裝置30是將工作台4進行並進Y方向的動作 ，及旋轉0的動作，因具門型構造28的1軸並進驅動機 構24進行並進X方向的動作，因此成爲進行χγ 0的3自 由度動作的3自由度平台裝置。 第22圖是表示使用本發明的第8實施例的並進旋轉2 自由度平台裝置的3自由度平台裝置的動作例的槪略圖。 -25- (23) 1302723 在第22圖中，以（丨）所表示的線，是3自由度平台 進行加工或檢查的工程所必需的動作的基本性的軌跡，位 置。以（2 )所表示的線，是由基本性的軌跡，位置僅偏 離5 X、6 Y的軌跡、位置。以（3 )所表示的線，是對象 物5放在工作台4之際所偏離的軌跡、位置。以（4 )所 表示的線’是將（3 )的軌跡、位置的偏離朝Y方向與0 方向修正的軌跡、位置。 當對象物5放在工作台上，則對象物5是如（3 )所 示地隨伴著偏離量。如此，並進旋轉2自由度平台裝置3 0 朝並進Y方向可移動，令位在對象物5上的指標包括在二 維位置感測器9的晝角中的方式進行移動工作台4。 二維位置感測器9是檢測指標，而與第2實施例的第 7圖所表示者同樣地，以修正量算出部1 5把握對象物5的 XY的偏離量。因並進旋轉2自由度平台裝置30是可進行 並進Y方向與旋轉0，因此朝γ方向與0方向修正如（3 )的偏離，而作成如（4 )的軌跡、位置。在進行加工或 檢查的工程所必需的動作的基本性的軌跡、位置是（i ) ，惟1軸並進驅動機構24僅移動5 X而將此改爲新的基 準’則可將對象物5的加工或檢查沿著正確軌跡、位置進 行。 如上所述，藉由並進旋轉2自由度平台裝置30與1 軸並進驅動機構24來驅動χγ 0的3自由度而可作業的3 自由度平台裝置。 又’在第1實施例及第3至第7實施例中，1軸驅動 -26- (24) 1302723 並進旋轉機構6是由機台部7側於上面依並進驅動部1 1 與旋轉自由度部1 3及並進自由度部1 2之順序所構成，第 二驅動部是由機台部7側於上面依並進自由度部1 2與旋 轉自由度部之順序所構成，而在第2實施例中，1軸驅動 並進旋轉機構6是由機台部7側於上面依並進驅動部1 1 及並進自由度部1 2及旋轉自由度部1 3之順序所構成，惟 混有此些也可以。針對於3自由度機構1 8也同樣。 產業上的利用可能性 藉由使用複數1軸驅動並進旋轉機構或3自由度機構 或第二驅動機構，即使工作台大型化，也可適用於荷重被 分散而被支持的工作母機的二維定位裝置等。利用該機構 ，可將工作台作成薄型。 又，即使裝置作成大型化，也不必使用特殊大型電動 機，而可利用複數標準的電動機，分散驅動力般地可構成 φ 之故，因而，在裝置零件的交貨期或成本方面，與特殊品 比較，也具有容易供應的優點。 【圖式簡單說明】 第1圖是表示本發明的第1實施例的並進旋轉2自由 度平台裝置的1軸驅動並進旋轉機構與表示第二機構部的 配置的俯視槪略圖與側面槪略圖。 第2圖是表示本發明的第丨實施例的並進旋轉2自由 度平台裝置的控制方塊圖及表示1軸驅動並進旋轉機構與 -27- (25) 1302723 第二機構部的並進旋轉自由度的槪略圖。 第3圖是表示圖示本發明的第1實施例的並進旋轉2 自由度平台裝置的工作台的0旋轉移動的圖式。 第4圖是表示圖示本發明的第1實施例的並進旋轉2 自由度平台裝置的工作台的Y並進移動的圖式。 第5圖是表示圖示本發明的第2實施例的並進旋轉2 自由度平台裝置的1軸驅動並進旋轉機構與第二機構部的 配置的俯視槪略圖與側面槪略圖。 第6圖是表示圖示本發明的第2實施例的並進旋轉2 自由度平台裝置的控制方塊圖及1軸驅動並進旋轉機構與 第二機構部的並進，旋轉自由度的槪略圖。 第7圖是表示依圖示本發明的第2實施例的並進旋轉 2自由度平台裝置的二維位置感測器的對象物的位置修正 方法的圖式。 第8圖是表示圖示本發明的第2實施例的並進旋轉2 自由度平台裝置的工作台的0旋轉移動的圖式。 第9圖是表示圖示本發明的第3實施例的並進旋轉2 自由度平台裝置的1軸驅動並進旋轉機構與第二機構部的 配置的俯視槪略圖。 第1 〇圖是表示圖示本發明的第3實施例的並進旋轉2 自由度平台裝置的控制方塊圖及1軸驅動並進旋轉機構與 第二機構部的並進，旋轉自由度的槪略圖。 第1 1圖是表示圖示本發明的第3實施例的並進旋轉2 自由度平台裝置的工作台的0旋轉移動的圖式。 -28- (26) 1302723 第1 2圖是表示圖示本發明的第4實施例的並進旋轉2 自由度平台裝置的1軸驅動並進旋轉機構與第二機構部的 配置的俯視槪略圖。 第13圖是表示圖示本發明的第4實施例的並進旋轉2 自由度平台裝置的控制方塊圖及1軸驅動並進旋轉機構與 第二機構部的並進，旋轉自由度的槪略圖。 第14圖是表示圖示本發明的第5實施例的並進旋轉2 自由度平台裝置的1軸驅動並進旋轉機構與第二機構部， 第二驅動機構的配置的俯視槪略圖。 第15圖是表示圖示本發明的第5實施例的並進旋轉2 自由度平台裝置的控制方塊圖及1軸驅動並進旋轉機構與 第二機構部的並進，旋轉自由度的槪略圖。 第16圖是表示使用圖示本發明的第6實施例的並進 旋轉2自由度平台裝置的使用3自由度平台裝置的1軸驅 動並進旋轉機構與第二機構部的配置的俯視槪略圖與側面 槪略圖。 第17圖是表示使用圖示本發明的第6實施例的並進 旋轉2自由度平台裝置的3自由度平台裝置的控制方塊圖 與1軸驅動並進旋轉機構及第二機構部的並進，旋轉自由 度的槪略圖。 第1 8圖是表示使用圖示本發明的第7實施例的並進 旋轉2自由度平台裝置的使用3自由度平台裝置的1軸驅 動並進旋轉機構與第二機構部的配置的俯視槪略圖與側面 槪略圖。 -29 ~ (27) 1302723 第19圖是表示使用圖示本發明的第7實施例的並進 旋轉2自由度平台裝置的3自由度平台裝置的控制方塊圖 與1軸驅動並進旋轉機構及第二機構部的並進，旋轉自由 度的槪略圖。 第20圖是表示使用圖示本發明的第8實施例的並進 旋轉2自由度平台裝置的使用3自由度平台裝置的1軸驅 動並進旋轉機構與第二機構部的配置的俯視槪略圖與側面 _ 槪略圖。 第21圖是表示使用圖示本發明的第8實施例的並進 旋轉2自由度平台裝置的3自由度平台裝置的控制方塊圖 與1軸驅動並進旋轉機構及第二機構部的並進，旋轉自由 度的槪略圖。 第2 2圖是表示使用本發明的第8實施例的並進旋轉2 自由度平台裝置的3自由度平台裝置的動作例的槪略圖。 第23圖是表示專利文獻1的平台裝置的外觀圖。 ^ 第24圖是表示專利文獻1的平台裝置的直進平台 1 3 00的軸支部的態樣的立體圖。 第25 ( a)圖至第25 ( b)圖是表示專利文獻〗的平 台裝置的軸支撐件1400與軸支構件1 500的詳細圖。 第26圖是表示從上方觀看專利文獻1的平台裝置的 內側圓筒部1 5 2 0的圖式。 第27 ( a )圖至第27 ( c )圖是表示進行專利文獻i 的平台裝置的工作台的定位的具體性態樣的立體圖。 第28圖是表示專利文獻1的平台裝置的板簧部1530 -30- (28) 1302723 撓曲時的樣子的圖式。 第29圖是表示專利文獻2的2軸平行· 1軸旋轉運動 引導機構的局部切剖分解立體圖。 第30圖是表示使用表示於第29圖的2軸平行· 1軸 旋轉運動引導機構的2軸平行· 1軸旋轉工作台裝置；同 圖（a )是以省略工作台而以2點鏈線表示的俯視圖；同 圖（b )是俯視圖。 第3 1圖是表示圖示於第28圖的工作台的俯視圖。 【主要元件之符號說明】 1 :電動機（線性馬達） 2 :動作量檢測器 3 :控制器 4 :工作台 5 :對象物 6 : 1軸驅動並進旋轉機構 7 :機台部 8 :指令部 9 :二維位置感測器 1 1 :並進驅動部 1 2 :並進自由度部 13 :旋轉自由度部 1 5 :修正量算出部 1 6 :第二機構部 -31 - (29) (29)1302723 1 8 : 3自由度機構 1 9 :第二驅動機構 2 1 :直動導件 22 :直動導塊 23 :旋轉用軸承 24 : 1軸驅動並進驅動機構 25 :電動機控制裝置 27 : X軸底部 28 :門型構造 29 : X軸工作台 30:並進旋轉2自由度平台裝置[Technical Field] The present invention relates to a semiconductor device, a printing substrate, an exposure apparatus such as a liquid crystal display element, or the like, which moves a table to position an object on a table at a predetermined position. The movable table can be moved in the Y direction of the long stroke of the long stroke and the 2 degree of freedom platform device of the rotary 0 rotation, or the 3 degree of freedom platform device of the X direction and the drive mechanism can be added in the parallel rotation 2 degree of freedom platform device. [Prior Art] The platform device of the first example of the prior art includes: a movable support mechanism that movably supports one end portion and the other end of the platform having the movable table, and a position control portion that controls the movable platform and the movable support mechanism, The platform can be correctly positioned not only in the straight direction but also in the direction of rotation, and the platform can be moved at high speed with high responsiveness (for example, refer to Patent Document 1). • The two-axis parallel/one-axis rotary motion guide mechanism of the second example and the two-axis parallel/one-axis rotary table device using the same are simple and highly steerable for assembly on the table. A two-axis parallel one-axis rotary motion guiding mechanism table device (for example, refer to Patent Document 2). Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. 2, No. 3, No. 3, No. 5, and No. 7 (Patent Document No. 2) 4 and 5) -4- (2) 1302723 A platform device of Patent Document 1 of the first example will be described. Fig. 23 is an external view showing the platform device of Patent Document 1. In Fig. 23, 1100, 1200, and 1 300 are straight-forward platforms, 1110, 1210, and 1310 are movable tables, 1112 and 1114, 1212 and 1214, 1312 and 1314 are feet, and 1120, 1220, and 1320 are bottoms, 1122. And 1124, 1222 and 1224, 1322 and 1324 are rails, 1130, 1230, 1 330 are linear motor stators, 1120, 1220, 1 320 are bottom φ, 1 350 is the first end, and 1360 is the second end. The three rectilinear platforms 1100, 1200, 1 300 are of the same configuration, and the movable movable tables 1110, 1210, 1310 additionally driven by the linear motor are moved on the straight-in platforms 1100, 1200, 1 300. The first end 1 350 of the bottom 1 3 20 of the rectilinear platform 1300 is rotatably supported on the movable table 1110 of the rectilinear platform 1100, and the second end 1 360 of the bottom 1 3 20 of the straight platform 1300, It is rotatably supported on the movable table 1210 of the straight-moving platform 1200. Fig. 24 is a perspective view showing an aspect of a shaft branch portion of the linear platform 1 300 of the platform device of Patent Document 1. In Fig. 24, 1400 and 1 500 are shaft members, 1 4 1 0 and 1 5 1 0 are outer cylindrical portions, and 1 4 2 0 and 1 5 2 0 are inner cylindrical portions, and 1 5 3 0 is a leaf spring portion, and a leaf spring portion 5 3 〇 is provided on the inner cylindrical portion 1 520, and is fixed to the lower surface of the bottom portion 132〇 via a support member. Fig. 25 is a detailed view showing the shaft support member 1400 of the platform apparatus of Patent Document 1 and the shaft support member 1500; and Fig. 25(a) is a view showing the first end portion 1 from the bottom portion 1320. The 350 side view of the shaft support member ι4 的 is broken (3) 1302723, and the 25th (b) view is a cross-sectional view when the shaft support member 1500 is viewed from the second end portion 1360 side of the bottom portion 1320. The inner cylindrical portion 1420 shown in Fig. 25(a) is relatively smoothly rotated about the outer cylindrical portion 1410. In the inner cylindrical portion 1520 shown in Fig. 45 (b), a leaf spring 1530 is provided along the radial direction of the inner cylindrical portion 1 520. Fig. 26 is a view showing the inner cylindrical portion 1520 of the stage device of Patent Document 1 as viewed from above. In Fig. 26, 1 522 is a small inner diameter portion, 1524 is a large inner diameter portion, 1 526 is a boundary side surface, and 1 560 is a screw. The leaf spring 1 530 has a long shape, and has circular through holes at both end portions of the leaf spring 1 530, and the long diameter direction of the oblong through hole is approximately the same direction as the longitudinal direction of the leaf spring 1 530. Both end portions of the leaf spring 1 530 are provided on the boundary side surface 1 526 of the inner cylindrical portion 1 520 via the through hole through the screw 1 560. The leaf spring 1 530 is the longitudinal direction of the leaf spring 1 530 and is formed to be approximately the same as the diameter direction of the inner cylindrical portion 1520. When the leaf spring 1 530 is deflected toward the white arrow as shown in the figure, both ends of the leaf spring 1 530 are slightly movable along the long circular through hole. At the center of the leaf spring 1 530, the support member 1 5 70 is fixed by a screw 1 580. The support member 1 5 7 0 is T-shaped, and the upper portion of the support member 1570 is fixed to the underside of the bottom portion 1 320 of the rectilinear platform 1 300 by screws 1 590. By providing the rotary bearing 1 540 and the roller 1 550, the inner cylindrical portion 1520 is relatively rotatable relative to the outer cylindrical portion 1 5 1 0. Further, the straight-moving platform 1300 is made movable by the flexure leaf spring 1530 for the (4) 1302723 inner cylindrical portion 1 520. The "platform" is constituted by the straight-forward platform 1300, and the "movable workbench" is constituted by the movable table 1310. Further, the shaft support member 1400 constitutes a "first movable support mechanism", and the shaft support member 1500 constitutes a "second movable support mechanism". Further, the "one end portion" is formed by the first end portion 1350, and the "other end portion" is formed by the second end portion 1360. Further, the leaf spring portion 1 530 constitutes an "elastic member". Fig. 27 is a view showing a specific aspect of positioning of the table of the platform apparatus of Patent Document 1. The examples shown in Figures 27(a) through 27(c) are schematic representations of three straight-in platforms 1100, 1200 and 1 300, and movable platforms 11〇〇, 1 2 1 0, 1 3 1 0 Top view. Fig. 27(a) is a view showing that the movable table 1110 is located at the center in the X direction of the linear platform 1100, the movable table 1210 is located at the center of the X direction of the straight table 1200, and the movable table 1310 is located at the center of the Y direction of the straight table 1300. And when the movable table 1110, 1210, 1310 is located at this position, it is used as a reference position. Fig. 27(b) is a view showing both the movable table 1 1 10 of the straight-moving stage 1 1〇〇 and the movable table 1210 of the straight-moving stage 1200, and only the distance Y1 is moved from the reference position in the forward direction, and the straight-forward platform is The movable table 1 3 1 0 of 1 300 moves from the reference position to the positive direction by only the distance X 1 . Thus, by moving the movable table 1 1 10 and the movable table 1210 by the same distance in the same direction, the platform 1 300 is moved straight toward the γ direction. In this configuration, the movable table 1310 can be aligned in a position desired as the X-Y direction. -7- (5) 1302723 Figure 27(c) is a movable table that does not move the movable table 1 1 1 0 of the straight-moving platform 1100 from the reference position to the negative direction by only the distance Y2, but will straighten into the platform 1 200 , moving only the distance Y2 from the reference position in the positive direction. In this configuration, the direction of the integral straight-in platform 1300 can be located at a position where only 0 is rotated. In this way, by positioning the movable table 1 1 10 and the movable table 1 2 1 0 in opposite positions, the integral straight platform 13 can be positioned to rotate only the desired re-position, and The movable table 1 3 1 0 pair is located at the position where only the desired re-ordination is rotated. As shown in Fig. 27(c), when the rectilinear platform 1300 is rotated, the support member 1 570 supporting the bottom portion 1 320 of the above-described rectilinear platform 1300 is in a moving state. When the support member 1 570 moves, the leaf spring portion 1 530 fixed to the support member 1570 is in a deflected state. Fig. 28 is a view showing a state in which the leaf spring portion 1530 of the table device of Patent Document 1 is deflected. The support member 1 570 is a person who moves toward the left in the drawing. By the movement of the support member 1570, the leaf spring portion 1530 is | deflected at a portion indicated by the symbol Μ. Thus, at the first end portion 1350 of the bottom portion 1 320 of the straight-moving platform 1 300, by making the configuration of only the shaft-supporting platform 1300, with the center of rotation of the first end portion 1350 as a reference, the calculation along the linear platform i 300 can be calculated. The position of the movable table 1310 in the longitudinal direction. Further, at the second end portion 1360 of the bottom portion 1320 of the straight-moving platform 13 ,, while making the shaft-straightening platform 1300 while making a configuration that is movable toward the longitudinal direction of the straight-moving platform 1300, the straight-moving platform 1 300 can be The rotation action makes a smoother. In the following, a two-axis parallel -8 - (6) 1302723 one-axis rotational motion guiding mechanism and a two-axis parallel one-axis rotary table device using the same are described in Patent Document 2 of the second example. 29 is a partially cutaway exploded perspective view of the 2-axis parallel and 1-axis rotational motion guiding mechanism of Patent Document 2; and FIG. 30 is a view showing the use of the 2-axis parallel 1-axis rotational motion guiding mechanism shown in FIG. 2 axis parallel · 1 axis rotary table device; in the same figure (a) is a top view showing the two-point chain line omitted from the table; the same figure (b) is the front view; the third figure is shown in the figure Top view of the 30 table workbench. φ In the 29th to 31st drawings, the 2-axis parallel/1-axis rotation guiding mechanism ′ is composed of the 2-axis parallel motion guiding unit 270 and the rotational motion guiding unit 280 assembled to the 2-axis parallel motion guiding unit 270. Composition. In addition, as shown in Fig. 29 and Fig. 30, the 2-axis parallel/rotary table device using 2-axis parallel 1-axis & twirling motion is a 4-axis 2-parallel 1-axis rotary motion guiding mechanism. 201A, 201A, 201C, 201D 'The table 233 is movably supported in the two-axis direction 'the bases 234 are parallel to each other in the parent's direction, and is centered on the rotation # axis C0 located at the center of the table 233. Rotate. 3 of the 4 are parallel to the 2 axes. 1-axis rotary motion guiding mechanism 201A, 2〇lB, 201D, The motor is coupled to a rotary motor 2 3 8 that is respectively driven to be linearly driven. And a linear drive mechanism 237A formed by the feed screw mechanism 239 that converts the rotational motion of the rotary motor 238 into a linear motion, 23 7B, 23 7D. The 2-axis parallel·1-axis rotary motion guiding mechanism 201C is freely movable. When you want to move the workbench 23 3 in parallel, Then, two linear drive mechanisms 237A' 237B or a linear drive mechanism 237c are driven. (7) 1302723 When the table 23 3 is to be rotated about the rotating shaft CO, Then in the opposite direction, only the same amount + AX, -ΔΧ drives the linear drive mechanism 237A, 23 7B, on the other hand, The linear drive mechanism 237D is driven only by the amount of AY in the Y-axis direction. So, A conventional 2-axis parallel 1-axis rotary motion mechanism and a 2-axis parallel 1-axis rotary table device using the same Is to move or rotate the table in parallel, And to locate. SUMMARY OF THE INVENTION However, The platform device of Patent Document 1, Using elastic members, And the elastic member will flex to obtain the degree of freedom, However, the deflection of the elastic member must be considered for positioning. that is, By the hysteresis of the elastic property of the leaf spring or the resilience of the coil spring or the air spring of the elastic member and the nonlinearity of the displacement, There is a problem that positioning cannot be performed precisely. also, When configuring an elastic member such as a leaf spring of a drive train, There is also the problem that the refraction of the leaf spring is the main cause of the influence on the positioning accuracy. also, 2-axis parallel/1-axis rotary motion guiding mechanism of Patent Document 2 and a 2-axis parallel/1-axis rotary table device using the same It is only for the purpose of positioning the tiny χγ 0. Another drive mechanism must be used for handling purposes. therefore, There are also mechanical structures that become complicated. Or the cost of the problem. The present invention has been made in view of such a problem, Its purpose is to provide a small positioning of the Υ ,, Rotating 2-DOF platform unit for long-stroke mobile handling applications, And using the parallel rotation 2 degree of freedom platform -10- (8) (8) 1302723 device, A 3-DOF platform unit that includes a long-stroke movement of ΧΥ Θ can be performed. In order to solve the above problems, The present invention is constructed as follows. Applying for the invention described in item 1 of the patent scope, It is a progressive two-degree-of-freedom platform device that is positioned at a predetermined position by a table on which an object to be mounted by a drive mechanism disposed in the machine unit is positioned. Its characteristics are: The above drive mechanism is made up of: Two parallel degrees of freedom with parallel degrees of freedom, And a first mechanism portion formed by a rotational degree of freedom portion having a degree of freedom of rotation, And an electric motor provided in one of the two parallel degree of freedom portions of the first mechanism portion, And an operation amount detector that detects an amount of operation of the mechanism portion of the object to be detected, And a motor control device comprising a controller for receiving the command signal to control the motor, The formed 1-axis drive parallel rotation mechanism; The above-described one-axis drive parallel rotation mechanism having at least two sets of the above-described drive mechanisms, Further provided is a second mechanism portion having a rotation degree of freedom portion and one of the above-described degrees of freedom of the rotation in the center of the rotation movement of the table; The one-axis drive parallel rotation mechanism is provided with a command device for giving an operation command to the controller. And by operating the above motor in the direction of the parallel direction, The table is moved or rotated in one direction. also, Applying for the invention described in item 2 of the patent scope, It is a parallel rotation 2 degree of freedom platform device as described in item 1 of the patent application. Further, a three-degree-of-freedom mechanism having the first mechanism portion of the motor is not provided, It is characterized by -11 - 1302723 (9). also, Applying for the invention described in item 3 of the patent scope, It is a parallel rotation 2 degree of freedom platform device as described in item 1 of the patent application. In the above second mechanism, there are: a motor including a motor for driving the parallel-moving portion, a second drive mechanism for the motor control device including the above-described operation amount detector and the controller, Characterized by it. Applying for the invention described in item 4 of the patent scope, Is a parallel rotation 2 degree of freedom platform device as described in item i of the patent application scope, The first mechanism department mentioned above is: a first parallel degree of freedom provided on the machine part, And a second parallel degree of freedom portion provided on the first parallel degree of freedom portion, And a rotational degree of freedom portion provided on the second parallel degree of freedom portion, Characterized by it. Applying for the invention described in item 5 of the patent scope, It is a parallel rotation 2 degree of freedom platform device as described in item 1 of the patent application scope. The first mechanism department mentioned above is: a first parallel degree of freedom provided on the machine part, And a rotational freedom portion provided on the first parallel degree of freedom portion, And a second parallel freedom portion provided on the rotation degree portion, Characterized by it. Applying for the invention described in item 6 of the patent scope, It is a parallel rotation 2 degree of freedom platform device as described in item 1 of the patent application scope. A two-dimensional position sensor for grasping the position of the object on the workbench or the workbench, And image processing, by the object image captured by the above two-dimensional position sensor, a correction amount calculation unit for correcting a correction amount of the position of the object; According to the correction amount obtained by the correction calculation unit, Operating the motor to correct the position of the object on the table or the table, Characterized by it. -12- (10) 1302723 The invention described in claim 7 of the patent scope, It is a parallel rotary 2 degree of freedom platform device as described in item 6 of the patent application scope. Having a plurality of the above two-dimensional position sensors, Characterized by it. Applying for the invention described in item 8 of the patent scope, Is a 3-DOF platform unit that uses a 2-degree-of-freedom platform unit. The upper or lower portion of the table of the parallel rotary two-degree-of-freedom platform device according to any one of the first to seventh aspects of the present invention has the one-axis advancement of the table driven by the motor in the parallel direction. Drive mechanism. Applying for the invention described in item 9 of the patent scope, Is a 3-DOF platform unit that uses a 2-degree-of-freedom platform unit. Its characteristics are: The door type structure of the parallel-rotating 2-degree-of-freedom platform device described in any one of the claims 5 to 3, which has a one-axis drive mechanism for driving the table with a motor in the parallel direction. Applying for the invention described in item 10 of the patent scope, Is a 3-DOF platform unit that uses a 2-degree-of-freedom platform unit. Its characteristics are: There is provided a parallel-rotation two-degree-of-freedom platform device as described in any one of claims 1 to 7 for driving in a forward direction, In the direction of the parallel drive, drive the 1 axis of the table into the drive mechanism. Advantageous Effects of Invention According to the invention described in claim 1, Worktable can be moved for long strokes in 1 direction. also, According to the invention described in claim 2, In addition to the first mechanism part and the second mechanism part, the table can be supported by a 3-DOF mechanism -13- (11) 1302723, It can suppress the deflection of the workbench. According to the invention described in claim 3 of the patent application, Can support multiple points, And can load the workbench or object, Excellent balance of dispersion and drive. According to the invention described in claim 4 of the patent application, Since the installation angle of the two parallel freedom parts is fixed, Therefore, it is relatively simple to calculate the amount of motion necessary for the workbench to move. According to the invention described in claim 5, The rotary drive unit can be provided by the linear motion guide between the two parallel drive portions. From the workbench to the machine, it can be continuously supported. So for other loads on the workbench, The drive mechanism can support deformation by suppressing deformation. According to the invention described in claim 6 of the patent application, The position of the object on the workbench or the workbench is corrected using a two-dimensional position sensor. The table movement can be performed quickly. According to the invention described in claim 7 of the patent application, In a two-dimensional position sensor, Even if you can't grasp all the objects, It is also possible to divide the complex two-dimensional position sensor and grasp the object. You can grasp the configuration of the object. Again, Can be used for a variety of grasp objects. According to the invention described in the eighth to the first paragraph of the patent application, The table can be moved in a long stroke in 1 direction and moved in and out. And because it has a 1-axis parallel drive mechanism, Therefore, it can have 3 degrees of freedom of XY and 0 rotation. [Embodiment] -14- (12) 1302723 or less, Embodiment 1 of the present invention is a schematic plan view and a side elevational view showing an arrangement of a 1-axis drive parallel rotation mechanism and a first embodiment of the present invention. The parallel rotation two-degree-of-freedom platform of the second embodiment of the second embodiment is a schematic diagram showing the degree of rotation of the first-axis driving parallel mechanism and the second mechanism. In the picture, 1 is an electric motor (linear motor), , 3 is the controller, 4 is the workbench, 5 is the object and enters the rotating mechanism, 7 is the machine department, 8 is the command department, 12 is the Department of Freedom, 13 is the rotating free 机构 mechanism department, 25 is a motor drive device. also, The one-axis structure 6 is formed in the order of the machine-side unit side 7 and the parallel-introducing degree unit 1 in the order of the machine-side unit 1 side and the parallel-introducing degree unit 1 2 . Composition. The portion of the present invention that is different from Patent Document 1, The portion of the rotating mechanism 6 and the second mechanism portion 16 is advanced. The rotation mechanism 6 has the rotation degree of freedom portion 13 driven by the motor 1, and the rotation degree portion 13 has no elastic body such as a leaf spring as in Patent Document 1. The shaft drives the parallel rotation mechanism 6, It is provided in the patent document 〇 1 scoop and the rotation 2 is the second mechanism. The figure shows the parallel rotation of the control block of the present invention. 6 is a 1-axis drive ’ 1 1 is a parallel drive unit, 16 is the second drive and enters the rotary machine; 11 with freedom of rotation, The second driving portion and the rotational degree of freedom portion are provided with a 1-axis drive, a 1-axis drive, and a rotary drive portion 11 and a rotary drive. However, in the present invention, the -15-(13) 1302723 degree of freedom portion 12 is not included in the present invention. also, The second mechanism portion 16 that supports the table 4 by the rotational degree of freedom portion 13 and the degree of freedom portion 12 is also not disclosed in Patent Document 1. The present invention is different from the patent document 2, It is the place where the table 4 moves only in the direction of one direction. but, The invention is a long-stroke parallel moving movement, The parallel drive unit 1 1 of the one-axis drive parallel rotation mechanism 6 and the parallel freedom portion 12 of the second mechanism unit 16 are formed in the same direction. The 2-axis parallel/i-axis rotary motion guiding mechanism 270 φ of Patent Document 2, a parallel drive unit 1 1 that drives the rotary mechanism 6 with a 1-axis drive Entering the degree of freedom 12, The configuration of the rotational degree of freedom portion 13 is similar, However, the second mechanism unit 16 is not included in Patent Document 2. The 1-axis drive-in parallel rotation mechanism 6 is along both sides of the machine table portion 7 (A, B) The linear motion guide 2 1 is configured to move, The second mechanism portion 6 is disposed at the rotation center portion (c) of the table 4. also, The linear motor 1 constituting each of the driving portions 1 1 is formed, There are two controllers 3 connected separately. The controller 3 receives an action command from the command unit 8, ® Operates the linear motor 1 . The movement amount detector 2 is a method of detecting the movement amount ' of the attachment portion of the linear motion guide 1 or the linear motion control unit 22 driven by the linear motor 1 and causing the difference between the movement amount and the operation command of the command unit 8 to become 〇. The controller 3 is a control action. The following is described with respect to the operation of the two-degree-of-freedom platform device. Fig. 3 is a view showing a twisting movement of a table of the parallel rotation two-degree-of-freedom platform apparatus according to the first embodiment of the present invention. As shown in Figure 2, The action is when a, b point two 1-axis drive -16 - (14) 1302723 The linear motor 1 of the parallel drive unit 1 of the rotary mechanism 6 is moved to the opposite side, Then, the second mechanism portion 16 at point C is used to rotate the table 4. When the 1 axis is driven and the rotation mechanism 6 a is applied (5 Y1 action, And the 1 axis drive and the rotation mechanism 6 b is applied (5 Y 2 action, Then the 1 axis drives the rotary mechanism 6a, The rotation degree of freedom portion 13 of 6b is 0, and the degree of freedom 12 is performed (5X1). 5X2 mobile, Therefore, the table 4 is rotated by 0. that is, The rotation degree of freedom portion 13 of the second mechanism portion 16 is acted upon, The table 4 is rotated by 0. Rotation of the table as described above, And the linear motor 1 that drives the rotary mechanism 6 and the second mechanism portion 16 in one axis, Each rotation degree of freedom portion 1 3, The amount of movement of the degree of freedom unit 12, It is geometrically decided. Fig. 4 is a view showing the Y movement of the table of the parallel rotation two-degree-of-freedom platform apparatus according to the first embodiment of the present invention. In Figure 4, 5 Y is the amount of movement of the linear motor 1 attached to the one-axis drive parallel rotation mechanism. If only action A, Linear motor 1 a of both sides, 1 b the same amount, Then you can move into the workbench 4. also, The parallel movement can be moved in the same manner as the rotation 0 shown in Fig. 3. According to the first embodiment of the present invention, the above-described configuration is achieved, so that the two-degree-of-freedom platform device can be moved in the gamma direction including the rotation 0 and the long stroke. (Embodiment 2) FIG. 5 is a plan view showing a -17-(15) 1302723 arrangement of a 1-axis drive parallel rotation mechanism and a second mechanism unit of a parallel rotation two-degree-of-freedom platform device according to a second embodiment of the present invention. a sketch with the side; Figure 6 is a block diagram showing the control block diagram of the parallel-rotation two-degree-of-freedom platform device of the second embodiment of the present invention, and the parallelism of the one-axis drive parallel rotation mechanism and the second mechanism portion. A thumbnail of the rotation freedom. also, The basic constituent elements of the second embodiment are the same as those of the first embodiment. The second embodiment is different from the first embodiment, It is a 1-axis drive and a %-increase mechanism. The one-axis drive parallel rotation mechanism 6 is constituted by the order of the machine-side portion 7 on the upper side of the drive unit 1 1 and the parallel-degree-of-freedom portion 1 2 and the rotational freedom portion 13 . The arrangement of the one-axis drive parallel rotation mechanism 6 and the second mechanism portion 16 is also the same as that of the first embodiment. also, The present invention and Patent Document 1, Patent Document 2 is not the same part, It is the same as the first embodiment. The second embodiment of the present invention is different from the first embodiment. It is a portion including the two-dimensional position sensor 9 and the correction amount calculation unit 15. Fig. 7 is a view showing a method of correcting the position of an object of the two-dimensional position sensor of the parallel rotation two-degree-of-freedom stage device according to the second embodiment of the present invention. The two-dimensional position sensor 9 detects the object 5 on the table 4 or the table 4, The amount of deviation can be grasped by the correction amount calculating unit 15. If you can grasp the amount of deviation, As shown in Fig. 7, the γ direction and the rotation 0 direction can be corrected. In this example, Failed to correct and correct the X direction. However, it will be described later in other embodiments. It is possible to make corrections in the X direction. Fig. 8 is a view showing a 0-rotation movement of a table of the progressive rotation 2-18-(16) 1302723 degree-of-freedom platform apparatus according to the second embodiment of the present invention. As in the first embodiment, As shown in Figure 8, When will be A, Point B, the two linear motors 1 of the parallel drive unit i1 of the one-axis drive parallel rotation mechanism 6 are respectively moved to the opposite side, Then, the second mechanism portion 16 at point C is the center rotatable table 4. When the 1 axis is driven into the rotating mechanism 6 a, the 5 Y1 action is applied. And the one-axis drive parallel rotation mechanism 6b is subjected to 5 Y2 action', then the one-axis drive and the rotation mechanism 6a is driven. The rotation degree of freedom portion 13 of 6b is 0, The parallel degree of freedom section 12 is performed 5X1. 5X2 movement, Therefore, the table 4 is rotated by 0. that is, The rotation degree of freedom portion 13 of the second mechanism portion 16 is acted upon, And the table 4 is rotated by 0. 〇 With the first embodiment, 1 axis drives the rotary mechanism 6a, The composition of 6b is different, Therefore, the linear motor la when the table 4 is rotated, The movement of lb is 5Y1, 5 Y2, The amount of movement of the degree of freedom 12 is 5 X1. (5 X2 is not the same, Only the rotation of the table 4, And a linear motor 1 that drives the rotary mechanism 6 and the second mechanism portion 16 in one axis, Each rotation degree portion 13, The amount of movement of the degree of freedom portion 12, It is the same as that of geometry. also, The movement of the table 4 in the Y direction can be carried out in the same manner as in the first embodiment. (Embodiment 3) FIG. 9 is a plan view showing a configuration of a -19-(17) 1302723 arrangement of a 1-axis drive parallel rotation mechanism and a second mechanism portion of a parallel-rotation two-degree-of-freedom platform device according to a third embodiment of the present invention. ; BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a control block diagram showing a parallel rotation two-degree-of-freedom platform device according to a third embodiment of the present invention, and a parallel operation of a 1-axis drive parallel rotation mechanism and a second mechanism portion. A sketch of the degree of freedom of rotation. The basic constituent elements of the third embodiment are the same as the first embodiment. The second embodiment is the same. With the first embodiment, Different in the second embodiment, To further, a degree of freedom mechanism i 8 that does not have the linear motor 1 is provided. also, And the i-th embodiment is a one-axis drive parallel rotation mechanism 6a, The configuration location of 6b is not the same. Further, the two-dimensional position sensor 9 and the correction amount calculation unit 15 are omitted. also, As shown in Figure 10, The configuration of the one-axis drive parallel rotation mechanism 6 is the same as that of the first embodiment, in which the machine unit 7 side is moved in parallel with the drive unit 1 1 , the rotational degree of freedom 1 3 , and the parallel degree of freedom unit 12 . 3 the composition of the degree of freedom mechanism 18 The degree of freedom of the 1⁄2 rotation degree portion 1 3 is also controlled by the machine unit 7 side. The configuration of the degree of freedom part i 2 . Further, the present invention and patent document i, The portions different from Patent Document 2 are the same as those in the first embodiment. Fig. 1 is a view showing a 0-rotation movement of a table of the parallel-rotation two-degree-of-freedom platform device according to the third embodiment of the present invention. As in the first embodiment, As shown in Figure 11, When will be A, Point B, two linear motors 1 of the parallel drive unit 丨i of the one-axis drive parallel rotation mechanism 6 are respectively moved to the opposite side, Then, the table 4 can be rotated around the second mechanism portion 16 at point C. When the 1 axis is driven and the rotation mechanism 6a is subjected to 5 Y1 action, And the 1 axis drive parallel rotation mechanism 6b is applied with 5 Y2 action. Then the 1 axis drives the parallel rotation mechanism 6a, 6b rotation degree of freedom part 13 20- (18) 1302723 is performing 0 action, And the degree of freedom degree 12 is performed (5X1) 6X2 movement, The degree of freedom degree 1 2 of the 3 degree of freedom mechanism 1 8 also performs δ Y3, 5 Υ 4, 5 Χ3, 5 Χ 4 moves, And acting on the rotation degree of freedom portion 13 of the second mechanism portion 16, The table 4 is rotated by 0. With the first embodiment, 1 axis drives the rotary mechanism 6a, The composition of 6b is different, Thus linear motor 1 a, The amount of action of 1 b is different. Only the rotation of the table 4, And the linear motor 1 that drives the rotary mechanism 6 and the second mechanism portion 16 in one axis, Each rotation degree of freedom portion 1 3, The amount of movement of the degree of freedom portion 12, It is the same as the decision of geometry. also, And move in the Y direction of the table 4, This can be carried out in the same manner as in the first embodiment. (Embodiment 4) FIG. 1 is a plan view schematically showing an arrangement of a one-axis drive parallel rotation mechanism and a second mechanism portion of a parallel rotation two-degree-of-freedom platform device according to a fourth embodiment of the present invention; Fig. 1 is a control block diagram showing a parallel rotary two-degree-of-freedom platform device according to a fourth embodiment of the present invention, and a parallel operation of the one-axis drive parallel rotation mechanism and the second mechanism portion. A sketch of the degree of freedom of rotation. The basic constituent elements of the fourth embodiment are the same as those of the first embodiment. The fourth embodiment is different from the first embodiment, As shown in Figure 13, The linear motor 1 is also disposed in the second mechanism portion 16. As the second driving mechanism 19, Also has a controller 3, And the action detector 2. First mechanism portion 6a, The configuration and arrangement of 6b are the same as those of the first embodiment -21 · (19) 1302723. also, The two-dimensional position sensor 9 and the correction amount calculation unit are provided. also, The invention and patent document 1, Patent Document 2 is the same as the first embodiment. Because of the above composition, Therefore, the third drawing of the table 4 is similarly achievable. Moving in the Y direction is also possible with the sample. In this embodiment, Because of the second drive motor linear motor 1 c, Therefore, it is also possible to increase the capacity of each linear motor by pushing in the Y direction and to determine the thrust. (Embodiment 5) FIG. 14 is a plan view schematically showing an arrangement of a 1-axis drive parallel rotation mechanism and a second drive mechanism of a fifth degree of freedom of the freedom platform device; A fifth embodiment of the fifth embodiment of the present invention is a parallel rotation two-degree-of-freedom block diagram and a one-axis drive parallel rotation mechanism and a second mechanism rotational degree of freedom. Further, the basic constituent elements of the fifth embodiment are the same. also, 1 axis drive parallel rotation mechanism 6 and second | set, The arrangement of the three-degree-of-freedom mechanism 18 of the third embodiment is placed in the rotating mechanism 6. that is, It is different from the third embodiment of the motor 1. also, The two-dimensional position sensor head portion 15 is omitted. The one-axis drive-in parallel rotation mechanism 1 5 is an omitting portion which is different from the first embodiment. The rotational movement is the same as that of the first embodiment. The capacity of the real motor can be selected and rotated in parallel. 2 The second mechanism department, The figure shows the progress of the control unit of the illustrated station device. The first embodiment of the medicinal structure portion 16 is replaced by a one-axis driving example. The addition of the line 9 and the correction amount calculation 6 is the same as that of the -22-(20) 1302723 first embodiment. To go hand in hand, Rotate, The order of advancement. also, The present invention and patent documents 1. The portions different from Patent Document 2 are the same as those in the first embodiment. Because of the above composition, Therefore, the 0 rotational movement of the table 4 can be realized in the same manner as in the first embodiment of the third embodiment. The parallel movement in the γ direction can also be realized in the same manner as in the first embodiment. In this embodiment, Because it has four 1-axis drive and parallel rotation mechanism, Therefore, it is also possible to increase the pushing force in the Y direction. The capacity of the motor capable of making the thrust can be selected by dispersing the capacity of each linear motor. (Embodiment 6) Fig. 16 is a plan view showing the arrangement of a boring-axis driving parallel rotation mechanism and a second mechanism portion using a three-degree-of-freedom platform device using a parallel-rotation two-degree-of-freedom platform device according to a sixth embodiment of the present invention. Sketch and side sketches; Fig. 17 is a view showing the control block diagram of the three-degree-of-freedom platform device using the parallel-rotation two-degree-of-freedom platform device of the sixth embodiment of the present invention, and the parallelism of the one-axis drive parallel rotation mechanism and the second mechanism portion. A sketch of the degree of freedom of rotation. In the picture, The parallel rotation two-degree-of-freedom platform device 30 is constructed as shown in the first embodiment. The two-degree-of-freedom platform device 3 is inserted in parallel, and the one-axis parallel drive mechanism 24 is arranged on the table 4, And the action of achieving the direction of the direction. Because of the above composition, Therefore, the two-degree-of-freedom platform device 30 is rotated in parallel with the table 4 as in the first embodiment. -23- (21) 1302723 And the action of rotating 0, Since the one-axis advancement drive mechanism 24 on the table 4 advances in the X direction, Therefore, it is a three-degree-of-freedom platform device that performs a three-degree-of-freedom operation of cymbal (Embodiment 7) FIG. 18 is a view showing the arrangement of a 1-axis drive parallel rotation mechanism and a second mechanism portion using a three-degree-of-freedom platform device using a parallel two-degree-of-freedom platform device according to a seventh embodiment of the present invention. Looking down at the sketch and side sketches; Figure 19 is a control block diagram showing a three-degree-of-freedom platform device using a parallel-rotation two-degree-of-freedom platform device according to a seventh embodiment of the present invention, and a parallel rotation of the one-axis drive parallel rotation mechanism and the second mechanism portion. A sketch of the degree of freedom. In the picture, The parallel rotation two-degree-of-freedom platform device 30 is constructed as shown in the first embodiment. The parallel rotation two-degree-of-freedom platform unit 30 is configured to arrange two linear motors on the one-axis parallel drive mechanism 24. Because of the above composition, Therefore, the two-degree-of-freedom platform device 30 is rotated in the Y direction as in the first embodiment. And the action of rotating 0; The machine unit 4 that rotates the two-degree-of-freedom platform device 30 in parallel is moved in the X direction by the one-axis parallel drive mechanism 24, A three-degree-of-freedom platform device that performs a three-degree-of-freedom operation of ΧΥ0 is an 8- to 8-second (22) 1302723. FIG. 20 is a view showing the use of a parallel-rotation two-degree-of-freedom platform device according to an eighth embodiment of the present invention. A schematic diagram of a top view and a side view of the arrangement of the one-axis drive parallel rotation mechanism and the second mechanism portion of the three-degree-of-freedom platform device; Fig. 2 is a view showing a control block diagram of a three-degree-of-freedom platform device using a parallel-rotation two-degree-of-freedom platform device according to an eighth embodiment of the present invention, and a parallel operation of a one-axis drive parallel rotation mechanism and a second mechanism portion. A sketch of the degree of freedom of rotation. In this embodiment, Has two two-dimensional position sensing φ device 9, The image detected by the two-dimensional position sensor 9 is in the correction amount calculation unit 15 . The amount of deviation of the object 5 on the table 4 can be grasped. Where the two-dimensional position sensor 9 and the correction amount calculating unit 15 are used, The same as the second embodiment, Only two two-dimensional position sensors 9 are used, The number of sensors 9 in the two-dimensional position is different. In the picture, The parallel rotation two-degree-of-freedom platform device 30 is constructed as shown in the first embodiment. The door φ-type configuration 28 is constructed in such a manner that the two-degree-of-freedom platform device 30 is rotated in parallel. A 1-axis parallel drive mechanism 24 is disposed on the upper surface. Instead, the X-axis table 24 can be moved in the X direction. Because of the above composition, Therefore, the two-degree-of-freedom platform device 30 is rotated in the Y direction as in the first embodiment. And the action of rotating 0, Since the one-axis parallel drive mechanism 24 having the door type structure 28 performs the parallel movement in the X direction, Therefore, it becomes a three-degree-of-freedom platform device that performs the three-degree operation of χγ 0. Fig. 22 is a schematic diagram showing an operation example of a three-degree-of-freedom platform apparatus using a parallel-rotation two-degree-of-freedom platform apparatus according to an eighth embodiment of the present invention. -25- (23) 1302723 In Figure 22, The line indicated by (丨), It is the basic trajectory of the action necessary for the process of processing or inspection of the 3 degree of freedom platform. Location. The line indicated by (2), Is made up of basic trajectories, The location is only 5 X away from 6 Y trajectory, position. The line indicated by (3), Is the trajectory of the object 5 deviated on the table 4, position. The line ' represented by (4) is the trajectory of (3), The deviation of the position is corrected in the Y direction and the 0 direction, position. When the object 5 is placed on the workbench, Then, the object 5 is accompanied by the amount of deviation as shown in (3). in this way, Parallel rotation 2 degree of freedom platform device 3 0 can move in the Y direction, The moving table 4 is moved in such a manner that the index on the object 5 is included in the corner of the two-dimensional position sensor 9. The two-dimensional position sensor 9 is a detection index. Similarly to the one shown in Fig. 7 of the second embodiment, The correction amount calculation unit 15 grasps the amount of deviation of the XY of the object 5. Because the parallel rotation 2 degree of freedom platform device 30 can perform the Y direction and the rotation 0, Therefore, the deviation of (3) is corrected in the γ direction and the 0 direction, And make a trajectory like (4), position. The trajectory of the basics of the actions necessary for the process of processing or inspection, The location is (i) However, the 1 axis parallel drive mechanism 24 only moves 5 X and this is changed to a new reference ', so that the processing or inspection of the object 5 can be along the correct trajectory, The location is in progress. As mentioned above, A three-degree-of-freedom platform device that can be operated by a parallel rotation of a two-degree-of-freedom platform device 30 and a 1-axis parallel drive mechanism 24 to drive three degrees of freedom of χγ0. Further, in the first embodiment and the third to seventh embodiments, One-axis drive -26- (24) 1302723 The parallel rotation mechanism 6 is constituted by the order of the machine-side unit 7 on the upper side of the drive unit 1 1 , the rotational degree of freedom unit 13 and the parallel-degree-of-freedom unit 1 2 . The second driving unit is constituted by the order in which the machine unit portion 7 is on the upper side of the degree of freedom unit 12 and the degree of freedom of rotation. In the second embodiment, The one-axis drive parallel rotation mechanism 6 is constituted by the order of the machine-side portion 7 on the upper side of the drive unit 1 1 and the parallel-degree-of-freedom portion 1 2 and the rotational degree of freedom portion 13 . Only mixed with this can be. The same applies to the 3DOF mechanism 18. Industrial Applicability By using a plurality of 1-axis drive parallel rotation mechanism or 3 degree of freedom mechanism or second drive mechanism, Even if the workbench is large, It is also applicable to a two-dimensional positioning device such as a working machine whose load is dispersed and supported. Use the institution, The workbench can be made thin. also, Even if the device is made large, It is also unnecessary to use a special large motor. And can use a plurality of standard motors, Decentralized driving force can constitute φ, thus, In terms of delivery time or cost of the device parts, Compared with special products, It also has the advantage of being easy to supply. [Brief Description of the Drawings] Fig. 1 is a schematic plan view and a side elevational view showing the arrangement of the one-axis drive parallel rotation mechanism and the arrangement of the second mechanism portion of the parallel-rotation two-degree-of-freedom platform device according to the first embodiment of the present invention. Figure 2 is a control block diagram showing a parallel rotation two-degree-of-freedom platform device according to a third embodiment of the present invention, and a parallel rotation degree of the first-axis driving parallel rotation mechanism and the second mechanism portion of the -27-(25) 1302723槪 thumbnail. Fig. 3 is a view showing a 0-rotation movement of a table of the parallel-rotation two-degree-of-freedom platform device according to the first embodiment of the present invention. Fig. 4 is a view showing the Y movement of the table of the parallel rotation two-degree-of-freedom platform apparatus according to the first embodiment of the present invention. Fig. 5 is a schematic plan and side elevational view showing the arrangement of the one-axis drive parallel rotation mechanism and the second mechanism portion of the parallel-rotation two-degree-of-freedom platform device according to the second embodiment of the present invention. Figure 6 is a control block diagram showing a parallel-rotation two-degree-of-freedom platform device according to a second embodiment of the present invention, and a parallel operation of the one-axis drive parallel rotation mechanism and the second mechanism portion. A sketch of the degree of freedom of rotation. Fig. 7 is a view showing a method of correcting the position of an object of the two-dimensional position sensor of the parallel rotation two-degree-of-freedom stage device according to the second embodiment of the present invention. Fig. 8 is a view showing a 0-rotation movement of a table of the parallel-rotation two-degree-of-freedom platform device according to the second embodiment of the present invention. Fig. 9 is a plan view schematically showing the arrangement of the one-axis drive parallel rotation mechanism and the second mechanism portion of the parallel-rotation two-degree-of-freedom platform device according to the third embodiment of the present invention. 1 is a control block diagram showing a parallel-rotation two-degree-of-freedom platform device according to a third embodiment of the present invention, and a parallel movement of a 1-axis drive parallel rotation mechanism and a second mechanism portion. A sketch of the degree of freedom of rotation. Fig. 1 is a view showing a 0-rotation movement of a table of the parallel-rotation two-degree-of-freedom platform device according to the third embodiment of the present invention. -28- (26) 1302723 Fig. 1 is a plan view schematically showing the arrangement of the one-axis drive parallel rotation mechanism and the second mechanism portion of the parallel-rotation two-degree-of-freedom platform device according to the fourth embodiment of the present invention. Figure 13 is a control block diagram showing a parallel-rotation two-degree-of-freedom platform device according to a fourth embodiment of the present invention, and a parallel operation of the one-axis drive parallel rotation mechanism and the second mechanism portion. A sketch of the degree of freedom of rotation. Figure 14 is a view showing a one-axis drive parallel rotation mechanism and a second mechanism portion of the parallel rotation two-degree-of-freedom platform device according to the fifth embodiment of the present invention; A top view of the configuration of the second drive mechanism. Figure 15 is a control block diagram showing a parallel-rotation two-degree-of-freedom platform device according to a fifth embodiment of the present invention, and a parallel operation of the one-axis drive parallel rotation mechanism and the second mechanism portion. A sketch of the degree of freedom of rotation. Figure 16 is a plan view and a side view showing the arrangement of the one-axis drive parallel rotation mechanism and the second mechanism portion using the three-degree-of-freedom platform device of the parallel rotation two-degree-of-freedom platform device according to the sixth embodiment of the present invention.槪 thumbnail. Figure 17 is a block diagram showing the control block diagram of a three-degree-of-freedom platform device using a parallel-rotation two-degree-of-freedom platform device according to a sixth embodiment of the present invention, and the parallelism of the one-axis drive parallel rotation mechanism and the second mechanism portion. A thumbnail of the degree of freedom of rotation. FIG. 18 is a plan view showing the arrangement of the one-axis drive parallel rotation mechanism and the second mechanism portion using the three-degree-of-freedom platform device using the parallel-rotation two-degree-of-freedom platform device according to the seventh embodiment of the present invention. Side profile. -29 ~ (27) 1302723 Fig. 19 is a control block diagram showing a three-degree-of-freedom platform device using a parallel-rotation two-degree-of-freedom platform device according to a seventh embodiment of the present invention, and a 1-axis drive parallel rotation mechanism and a second Advancement of the agency department, A thumbnail of the degree of freedom of rotation. Figure 20 is a plan view and a side view showing the arrangement of the one-axis drive parallel rotation mechanism and the second mechanism portion using the three-degree-of-freedom platform device of the parallel-rotation two-degree-of-freedom platform device according to the eighth embodiment of the present invention. _ 槪 thumbnail. Figure 21 is a block diagram showing the control block diagram of a three-degree-of-freedom platform device using the parallel-rotation two-degree-of-freedom platform device of the eighth embodiment of the present invention, and the parallelism of the one-axis drive parallel rotation mechanism and the second mechanism portion. A thumbnail of the degree of freedom of rotation. Fig. 2 is a schematic diagram showing an operation example of a three-degree-of-freedom platform device using the parallel-rotation two-degree-of-freedom platform device of the eighth embodiment of the present invention. Fig. 23 is an external view showing the platform device of Patent Document 1. [ Fig. 24] Fig. 24 is a perspective view showing an aspect of a shaft branch portion of the linear platform 1 300 of the platform device of Patent Document 1. Figs. 25(a) to 25(b) are detailed views showing the shaft support member 1400 and the shaft support member 1500 of the platform apparatus of the patent document. Fig. 26 is a view showing the inner cylindrical portion 1 5 2 0 of the table device of Patent Document 1 viewed from above. Figs. 27(a) to 27(c) are perspective views showing specific aspects of positioning of the stage of the stage device of Patent Document i. Fig. 28 is a view showing a state in which the leaf spring portion 1530 -30-(28) 1302723 of the table device of Patent Document 1 is deflected. Fig. 29 is a partially cutaway exploded perspective view showing the two-axis parallel and one-axis rotational motion guiding mechanism of Patent Document 2. Figure 30 is a diagram showing a 2-axis parallel/1-axis rotary table apparatus using a 2-axis parallel 1-axis rotary motion guiding mechanism shown in Figure 29; Figure (a) is a plan view showing a 2-point chain line with the workbench omitted; Figure (b) is a top view. Fig. 3 is a plan view showing the table shown in Fig. 28. [Symbol description of main components] 1 : Motor (linear motor) 2 : Motion detector 3 : Controller 4: Workbench 5: Object 6 : 1 axis drive parallel rotation mechanism 7 : Machine Department 8 : Command Department 9 : Two-dimensional position sensor 1 1 : Parallel drive unit 1 2 : Parallel Freedom Department 13 : Rotational freedom part 1 5 : Correction amount calculation unit 1 6 : Second Institutional Department -31 - (29) (29)1302723 1 8 : 3 degrees of freedom mechanism 1 9 : Second drive mechanism 2 1 : Direct acting guide 22 : Direct motion guide block 23: Rotating bearing 24 : 1-axis drive parallel drive mechanism 25 : Motor control unit 27 : Bottom of the X axis 28 : Portal structure 29 : X-axis workbench 30: Parallel rotation 2 degree of freedom platform device
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