JP5490650B2 - Positioning table - Google Patents

Description

  The present invention relates to a positioning table used for positioning various articles.

  The positioning table is used for positioning various articles (hereinafter also referred to as “positioning objects”), for example, positioning of a processing object when performing machining, or glass for bonding two glass substrates constituting a liquid crystal cell. Used for substrate positioning.

  The positioning table has a configuration in which a table plate on which a positioning object is placed is supported above the base. The table plate is moved in the X-axis direction, in the Y-axis direction, in the Z-axis direction, and tilted (rotated) about each axis (or an axis parallel to each axis). It is supported above the base via a plurality of supporting units. In the following, each of the movement in the X-axis direction, the movement in the Y-axis direction, the movement in the Z-axis direction, and the tilt movement around each axis (or an axis parallel to each axis) is possible. Positioning using the formed table plate is called positioning with multiple degrees of freedom.

  In the positioning table, when a large load is applied to an article (positioning target object) positioned on the table plate, the table plate may move slightly.

  For example, in order to cut a workpiece to be positioned on the table plate along the surface thereof, when a cutting tool is pressed against the workpiece, the workpiece is substantially parallel to the surface of the table plate. Large loads may be applied along various directions. Further, for example, in order to drill a workpiece to be positioned on the table plate, when a drill is pressed against the workpiece, the circumferential direction of the drill (an axis perpendicular to the surface of the table plate) A large load may be applied along the circumferential direction of a circle centered at. For example, when the other glass substrate is pressed onto one glass substrate of the liquid crystal cell positioned on the table plate, a large load is applied to the glass substrate along a direction substantially perpendicular to the surface of the table plate. May be granted. For this reason, a table board may receive the said load and may move slightly.

  When the table plate moves slightly as described above, the object to be processed is machined with high accuracy (for example, cutting or drilling as described above), or the two glass substrates of the liquid crystal cell are highly accurate. This causes a problem that it becomes difficult to bond them together.

  In Patent Document 1, a table plate is supported above a base via a total of six wedge mechanisms and a 5-degree-of-freedom bearing (spherical bearing), thereby enabling positioning with multiple degrees of freedom. A positioning table is disclosed. Each of the wedge mechanisms is installed on a base and includes a wedge that can move linearly, a feed screw mechanism that drives the wedge, and a rotary actuator. Each of the five-degree-of-freedom bearings is fixed to the table plate in a slidably disposed state on the surface of the wedge of the wedge mechanism (the surface on the table plate side). The table plate is pressed against the surface of the wedge together with the 5-degree-of-freedom bearing (to prevent the wedge mechanism wedge supporting the table plate and the spherical bearing from being separated from each other) in total. It is fixed to the base via five biasing means (typical example, spring).

  In the positioning table disclosed in FIGS. 1 to 3 of the same document, when the table plate 52 is moved in the X-axis direction together with the 5-degree-of-freedom bearings 53 and 55 by operating the wedge mechanisms 70 and 90, The remaining wedge mechanisms, e.g. five-degree-of-freedom bearings 56, 57, 58 arranged on the wedge surface (surface on the side of the table plate) of each of the wedge mechanisms 100, 110, 120 are respectively on the surface of the wedge. Slide in the X-axis direction. On the other hand, when the table plate 52 is moved in the Y-axis direction together with the five-degree-of-freedom bearing 54 by operating the wedge mechanism 80, the remaining wedge mechanisms, for example, the wedge mechanisms 100, 110, 120 of each wedge The 5-degree-of-freedom bearings 56, 57, and 58 disposed on the surface (the surface on the table plate side) slide in the Y-axis direction on the surface of the wedge. As described above, the five-degree-of-freedom bearings 56, 57, and 58 arranged on the surface of each wedge of the wedge mechanisms 100, 110, and 120 are respectively arranged in the X-axis direction and the Y-axis direction on the wedge surface. Slidable in the dimension direction).

  For the same reason, the five-degree-of-freedom bearings 53 and 55 arranged on the surfaces of the wedges of the wedge mechanisms 70 and 90 are respectively in the Y-axis direction and the Z-axis direction (two-dimensional direction) on the wedge surface. ) The five-degree-of-freedom bearings 54 that are slidable and arranged on the surface of the wedge of the wedge mechanism 80 are slidable in the X-axis direction and the Z-axis direction (two-dimensional direction) on the surface of the wedge, respectively. Has been.

JP-A-64-71640 (FIGS. 1 to 3)

  In the positioning table of Patent Document 1, when a load is applied to an article positioned on a table plate along a direction other than a direction perpendicular to the surface of the table plate, the table plate is placed via a 5-degree-of-freedom bearing. There is a possibility that the urging means (typically, a spring) pressed against the surface of the wedge of the wedge mechanism is extended and the table plate is moved slightly.

  In addition, in order to achieve positioning with high accuracy by using the positioning table of the same document, each of the above five-degree-of-freedom bearings can smoothly slide in the two-dimensional direction along the surface of the wedge of the wedge mechanism. Needed. Therefore, for each of the six wedge mechanisms in total, the surface of the wedge of the wedge mechanism and the surface of the five-degree-of-freedom bearing facing the surface are precisely machined so as to be smooth surfaces in two dimensions. It is necessary to process (eg, polishing). Further, each of the six wedge mechanisms in total is arranged so that the surface of the wedge is arranged at a predetermined angle (for example, the surface of the wedge of the wedge mechanism 100 is arranged parallel to the XY plane). ) It needs to be installed precisely on the base.

  An object of the present invention is to provide a positioning table that is easy to assemble and that can maintain the table plate in an accurate position even when a load is applied to an article positioned on the table plate.

The present invention resides in a positioning table including a base and a table plate supported above the base via three or more support units that satisfy the following conditions (1) to (3).
(1) Each support unit includes an elevating device installed on the surface of the base so as to be slidable along the surface of the base, and a connector for connecting the elevating device and the table plate to each other.
(2) The lifting device according to the above (1) includes a rail extending along the surface of the base, a first slide member slidably supported by the rail, and a second slide member having a slope on the top surface, The bottom surface has a slope facing the slope of the second slide member, and is supported above the slope of the second slide member via a first linear guide that is disposed along the slope. A lifting member connected to the side surface of the first sliding member via a second linear guide so as to be movable up and down, and a sliding member driving means for sliding and holding each sliding member to a predetermined position on the rail Consists of.
(3) The connector according to (1) above includes a spherical bearing and a third linear guide that slidably holds the spherical bearing, and one of the spherical bearing and the third linear guide moves up and down. The member and the other are fixed to the table plate.

Preferred embodiments of the positioning table of the present invention are as follows.
(A) The slide member driving means includes a first rotation driving device and a second rotation driving device each having a rotation shaft arranged in parallel with the rail of the lifting device, and the first rotation driving device includes: Installed on one of the first slide member and the second slide member, the rotation shaft of which is connected to the other slide member via the first feed screw, and the second rotational drive The apparatus is installed on a base, and the rotation shaft thereof is connected to the first slide member or the second slide member via a second feed screw.
(B) The slide member driving means includes a first rotation driving device and a second rotation driving device each having a rotation shaft arranged in parallel with the rail of the lifting device installed on the base, The rotary shaft of one rotary drive device is connected to the first slide member via a first feed screw, and the rotary shaft of the second rotary drive device is connected to the second slide member via a second feed screw It is connected to the.

  In the positioning table of the present invention, each support unit that supports the table plate includes an elevating device that is slidably installed on the base, and a spherical bearing and a linear guide that connect the elevating device to the table plate. It is not necessary to use an inactivating means (typical example, spring) for pressing the table plate against each support unit. Therefore, the positioning table of the present invention can maintain the table plate in an accurate position by firmly supporting the table plate by the respective support units even when a load is applied to the article positioned on the table plate.

  The positioning table of the present invention has a minimum of three support units, that is, a minimum of three wedge mechanisms (corresponding to the second slide member and the lifting member) in order to realize positioning with multiple degrees of freedom. It is not necessary to precisely machine the surface of the wedge plate of each wedge mechanism (corresponding to the above-described lifting member) on the side of the table plate, and each wedge mechanism has a predetermined angle on the surface of the wedge. Since it is not necessary to install precisely so as to be arranged in, it can be easily assembled.

It is a top view which shows the structural example of the positioning table of this invention. However, only the outer shape of the table plate 15 of the positioning table 10 is indicated by a two-dot chain line. It is sectional drawing of the positioning table 10 cut | disconnected along the cutting line II-II line entered in FIG. However, the second rotary drive device 42 of the lifting device 11a shown in FIG. 1 is not shown. It is a figure which shows the positioning table 10 shown in FIG. 2 in the state which moved the table board 15 to the X-axis direction, and was positioned. It is a figure which shows the positioning table 10 shown in FIG. 3 in the state which moved the table board 15 to the Z-axis direction, and was positioned. FIG. 5 is a diagram showing the positioning table 10 shown in FIG. 4 in a state in which the table plate 15 is positioned by being tilted and moved about an axis parallel to the Y axis. It is a top view which shows another structural example of the positioning table of this invention. However, only the outer shape of the table plate 65 of the positioning table 60 is indicated by a two-dot chain line. It is a top view which shows another structural example of the positioning table of this invention. However, only the outer shape of the table plate 15 of the positioning table 70 is indicated by a two-dot chain line.

  The positioning table of the present invention will be described with reference to the accompanying drawings.

  FIG. 1 is a plan view showing a configuration example of a positioning table of the present invention. However, only the outer shape of the table plate 15 of the positioning table 10 is indicated by a two-dot chain line. 2 is a cross-sectional view of the positioning table 10 cut along the cutting line II-II entered in FIG. However, the second rotary drive device 42 of the lifting device 11a shown in FIG. 1 is not shown.

  A positioning table 10 shown in FIGS. 1 and 2 includes a base 14 and a table plate 15 supported above the base 14 via three support units 11, 12, and 13.

  The three support units 11, 12, and 13 included in the positioning table 10 have the same configuration. Below, the structure of the support unit 11 is mainly demonstrated, and the detailed description about the structure of the remaining support units 12 and 13 is not performed.

  The support unit 11 is configured to satisfy the following conditions (1) to (3).

  (1) The support unit 11 includes a lifting device 11a installed on the surface of the base 14 so as to be slidable along the surface of the base, and a connector 11b that connects the lifting device 11a and the table plate 15 to each other. Has been.

  (2) The elevating device 11a described in (1) above has a rail 24 extending along the surface of the base 14, a first slide member 21 slidably supported by the rail 24, and a slope 22a on the top surface. The second slide member 22 has a slope 23a opposite to the slope 22a of the second slide member 22 on the bottom surface, and is inclined above the slope 22a of the second slide member 22 along the slope 22a. The lifting member 23 supported by the first linear guide 31 and connected to the side surface of the first slide member 21 through the second linear guide 32 so as to be movable up and down, and each slide member as a rail. The slide member driving means 25 is slid and held to a predetermined position above the 24.

  (3) The connection tool 11b described in (1) above includes a spherical bearing 34 and a third linear guide 33 that holds the spherical bearing 34 in a slidable manner. Three linear guides 33 are fixed to the table plate 15.

  In the positioning table 10 shown in FIGS. 1 and 2, the table plate 15 is supported above the base 14 via a total of three support units 11, 12, and 13, thereby positioning with multiple degrees of freedom. It is possible.

  As described above, the support unit 11 includes the lifting device 11a and the connection tool 11b. Similarly, the support unit 12 is composed of a lifting device 12a and a connection tool 12b, and the support unit 13 is composed of a lifting device 13a and a connection tool 13b.

  The number of support units that support the table plate 15 is not particularly limited, but if the number of support units is too large, the configuration of the apparatus becomes complicated. Therefore, the number of support units is preferably in the range of 3 to 6, more preferably 3 or 4, and particularly preferably 3.

  As shown in FIGS. 1 and 2, the rail 24 of the lifting device 11a of the support unit 11 includes a first slide member 21 and a second slide member 22 having a slope 22a on the top surface (upper surface). Each is slidably supported.

  The first slide member 21 includes a slider 26 a that can slide along the rail 24 on the bottom surface. Similarly, the second slide member 22 includes a slider 26 b that can slide along the rail 24 on the bottom surface thereof. Each slide member slides along the rail 24 together with a slider provided on the bottom surface thereof. Each slide member is slid and held to a predetermined position on the rail 24 by a slide member driving means 25 described later.

  On the other hand, the elevating member 23 of the elevating device 11a has an inclined surface 23a facing the inclined surface 22a of the second slide member 22 on the bottom surface (lower surface). The elevating member 23 is supported above the inclined surface 22a of the second slide member 22 via a first linear guide 31 that is inclined along the inclined surface 22a, and the first slide member 21 is supported. The second side guide 32 is connected to the side surface of the first side guide 32 so as to be movable up and down.

  The first linear guide 31 includes a rail 31a and a slider 31b that is slidably mounted on the rail 31a. The rail 31 a of the first linear guide 31 is fixed to the inclined surface 23 a of the elevating member 23, and the slider 31 b is fixed to the inclined surface 22 a of the second slide member 22. Note that the rail of the first linear guide can be fixed to the inclined surface 22 a of the second slide member 22, and the slider can be fixed to the inclined surface 23 a of the elevating member 23.

  The second linear guide 32 includes a rail 32a and a slider 32b that is slidably mounted on the rail 32a. The rail 32 a of the second linear guide 32 is fixed to the side surface of the first slide member 21, and the slider 32 b is fixed to the side surface of the elevating member 23. It is also possible to fix the rail of the second linear guide to the side surface of the elevating member and fix the slider to the side surface of the first slide member.

  The elevating member 23 of the elevating device 11a slides the first slide member 21 and the second slide member 22 along the rail 24 in the same direction, thereby along the rail (in the X-axis direction). ) It is possible to move. Similarly, the elevating member 23 of the elevating device 12a is movable in the X axis direction, and the elevating member 23 of the elevating device 13a is movable in the Y axis direction. That is, the elevating devices 11a, 12a, and 13a are slidable along the surface of the base 14, respectively.

  On the other hand, for example, one or both of the first slide member 21 and the second slide member 22 are slid along the rail 24 to bring the slide members closer to each other (the interval between the slide members is reduced). Thereby, the raising / lowering member 23 of each raising / lowering apparatus can be raised.

  For example, when the second slide member 22 is slid along the rail 24 and brought close to the first slide member 21, the rail 31a and the slider 31b of the first linear guide 31 slide while moving in opposite directions. . Thereby, the rail 31a fixed to the raising / lowering member 23 is supported by the 2nd slide member 22 via the slider 31b slid to the lower end side of the rail 31a. For this reason, the elevating member 23 slides and rises along the rail 32a together with the slider 32b of the second linear guide 32.

  On the contrary, for example, one or both of the first slide member 21 and the second slide member 22 are moved along the rail 24, and both slide members are moved away from each other (the interval between the two slide members is increased). By doing so, the elevating member 23 of each elevating device can be lowered.

  For example, when the second slide member 22 is slid along the rail 24 and moved away from the first slide member 21, the rail 31a and the slider 31b of the first linear guide 31 slide while moving in opposite directions. . Thereby, the rail 31a fixed to the raising / lowering member 23 is supported by the 2nd slide member 22 via the slider 31b slid to the upper end side of the rail 31a. For this reason, the elevating member 23 slides along the rail 32 a together with the slider 32 b of the second linear guide 32 and descends.

  The elevating devices 11a, 12a, and 13a are connected to the table plate 15 via connecting tools 11b, 12b, and 13b, respectively.

  For example, the connector 11b includes a spherical bearing 34 and a third linear guide 33 that holds the spherical bearing 34 in a slidable manner. The spherical bearing 34 of the connector 11b is fixed to the elevating member 23, and the third linear guide 33 is fixed to the table plate 15. Note that the third linear guide of the connector can be fixed to the elevating member 23 and the spherical bearing can be fixed to the table plate 15.

  A known spherical bearing is used as the spherical bearing 34. The spherical bearing 34 includes a housing 34a in which a spherical accommodating portion having an opening is formed, a sphere (not shown) accommodated in the housing, and is fixed to the sphere so as to be outside the housing 34a. And a rod 34b extending.

  The rod 34b of the spherical bearing 34 and the housing 34a are inclined and moved in an arbitrary direction around the sphere by sliding of the sphere inside the housing 34a within a range where they do not contact each other, or They can be rotated relative to each other around any direction passing through the center of the sphere.

  The rod 34 b of the spherical bearing 34 is fixed to the elevating member 23, and the housing 34 a is fixed to the third linear guide 33. Therefore, the third linear guide 33 fixed to the housing 34a of the spherical bearing 34 is also inclined and moved in an arbitrary direction around the sphere accommodated in the housing 34a, or an arbitrary one passing through the center of the sphere. It can be rotated around the direction of. It is also possible to fix the spherical bearing housing to the lifting member 23 and the rod to the third linear guide 33.

  The third linear guide 33 includes a rail 33a and a slider 33b that is slidably mounted on the rail 33a. The slide 33 b of the third linear guide 33 is fixed to the spherical bearing 34, and the rail 33 a is fixed to the table plate 15. The rail of the third linear guide can be fixed to the spherical bearing 34 and the slider can be fixed to the table plate 15.

  Next, the slide member drive means 25 with which each raising / lowering apparatus of the positioning table 10 shown in FIG.1 and FIG.2 is provided is demonstrated.

  The sliding member driving means 25 provided in each lifting device, for example, the lifting device 11a, includes a first rotation driving device 41 and a second rotation driving device 42 each having a rotation shaft arranged in parallel with the rail 24 of the lifting device 11a. And. The first rotation drive device 41 is installed on the first slide member 21, and the rotation shaft 41 a is connected to the second slide member 22 via the first feed screw 51. The second rotation drive device 42 is installed on the base 14, and its rotation shaft (not shown) is connected to the first slide member 21 via the second feed screw 52. Yes.

  As described above, the first rotation drive device 41 is installed on the first slide member 21, and the rotation shaft 41 a is connected to the second slide member 22 via the first feed screw 51. Yes. The rotating shaft 41a is accommodated in a through hole formed in the first slide member 21 in a state of being arranged in parallel with the rail 24 of the elevating device 11a. In addition, a 1st rotation drive device can be installed in the 2nd slide member 22, and the rotating shaft can also be connected to the 1st slide member 21 via a feed screw.

  The first feed screw 51 includes a screw shaft 51a and a nut 51b fitted to the screw shaft 51a. The screw shaft 51 a is connected to the rotation shaft 41 a of the first rotation drive device 41 via the coupling 44. The nut 51 b is housed and fixed in a through hole formed in the second slide member 22. As the first feed screw (and second feed screw to be described later), for example, a ball screw having a configuration in which a screw shaft and a nut are fitted to each other via a plurality of rolling elements arranged in a thread groove. It can also be used.

  By operating the first rotation drive device 41 and rotating the rotation shaft 41a together with the screw shaft 51a of the first feed screw 51 (forward rotation or reverse rotation), the nut 51b fitted to the screw shaft 51a is turned into a nut. It can be slid along the rail 24 together with the second slide member 22 fixed to 51b. Thereby, the space | interval of the 1st slide member 21 and the 2nd slide member 22 can be adjusted, Therefore The height of the raising / lowering member 23 supported above the 2nd slide member 22 can be adjusted. it can.

  And when the raising / lowering member 23 is arrange | positioned at predetermined | prescribed height, the 1st slide member 21 and the 2nd slide member 22 are stopped by stopping rotation of the rotating shaft 41a of the 1st rotation drive device 41. The first rotary drive device 41 and the first feed screw 51 respectively hold the two slide members while maintaining the distance between them. Therefore, the elevating member 23 can be maintained at a predetermined height.

  The second rotation drive device 42 is installed on the base 14, and its rotation shaft (not shown) is connected to the first slide member 21 via the second feed screw 52. . The rotation shaft of the second rotation drive device 42 is formed on a support member 43 that supports and fixes the rotation drive device 42 on the base 14 in a state of being arranged in parallel with the rail 24 of the elevating device 11a. The inside of the through hole is accommodated. In addition, a 2nd rotational drive apparatus can be installed on the base 14, and the rotating shaft can also be connected to the 2nd slide member 22 via a feed screw.

  The second feed screw 52 includes a screw shaft 52a and a nut 52b fitted to the screw shaft 52a. Inside the through hole of the support member 43, the screw shaft 52 a is connected to the rotation shaft of the second rotation drive device 42 through a coupling. The nut 52 b is accommodated and fixed in a through hole formed in the protruding portion 21 a of the first slide member 21.

  By operating the second rotation drive device 42 and rotating the rotation shaft together with the screw shaft 52a of the second feed screw 52, the nut 52b fitted to the screw shaft 52a is fixed to the nut 52b. The slide member 21 can be slid along the rail 24. As a result, the first slide member 21 and the second slide member 22 held by the first rotation drive device 41 and the first feed screw 51 at a predetermined interval are separated by the distance between the slide members. In a state where the above is maintained, it slides along the rail 24. Therefore, the elevating member 23 can be moved along the rail 24 (X-axis direction) while maintaining the height thereof.

  And when the raising / lowering member 23 is arrange | positioned in the predetermined position of a X-axis direction, rotation of the rotating shaft of the 2nd rotation drive device 42 is stopped. Thereby, the first slide member 21 and the second slide member 22 held at a predetermined interval by the first rotation drive device 41 and the first feed screw 51 are connected to the second rotation drive device 42. The second feed screw 52 holds the rail 24 at a predetermined position. Therefore, the elevating member 23 can be maintained at a predetermined position in the X-axis direction.

  The slide member drive means 25 is in a state in which the first slide member 21 and the second slide member 22 are arranged at a predetermined interval from each other by the first rotation drive device 41 and the first feed screw 51. The above-mentioned slide members are held at predetermined positions on the rail 24 by the second rotary drive device 42 and the second feed screw 52. That is, the slide member driving means 25 has a function of sliding and holding the first slide member 21 and the second slide member 22 to predetermined positions on the rail 24, respectively.

  The slide member driving means 25 adjusts the distance between the first slide member 21 and the second slide member 22, that is, the height of the elevating member 23, by a single rotary drive device (first rotary drive device 41). Therefore, the elevating member 23 can be raised and lowered with high accuracy.

  The positioning table 10 of the present invention shown in FIG. 1 and FIG. 2 is a table plate by operating the slide member driving means 25 provided in each of the elevating devices 11a, 12a, 13a of the three support units 11, 12, 13. 15 (that is, a positioning object placed on the table plate 15) is moved in the X-axis direction, the Y-axis direction, or the Z-axis direction, or tilted about each axis (or an axis parallel to each axis). It can be moved and positioned.

  FIG. 3 is a diagram showing the positioning table 10 shown in FIG. 2 in a state where the table plate 15 is moved in the X-axis direction and positioned.

  When the table plate 15 is moved and positioned in the X-axis direction, the slide member driving means 25 provided in each of the elevating devices 11a, 12a, 13a of the support units 11, 12, 13 shown in FIGS. The operation is as follows.

  In a state where the second slide drive unit 42 of the slide member drive means 25 of the lifting device 11a of the support unit 11 is operated, and the first slide member 21 and the second slide member 22 are maintained at a distance from each other. It slides along the rail 24, and both slide members are moved to a X-axis direction with the raising / lowering member 23 and the connection tool 11b.

  At the same time, the second rotation drive device 42 of the slide member drive means 25 of the lifting device 12a of the support unit 12 is operated to maintain the distance between the first slide member and the second slide member. The two slide members are moved in the X-axis direction together with the elevating member 23 and the connector 12b. At this time, the movement distance in the X-axis direction of the first slide member 21 and the second slide member 22 of the lifting device 12 a of the support unit 12 is the same as that of the first slide member 21 and the second slide member 21 of the lifting device 11 a of the support unit 11. The distance of movement of the second slide member 22 in the X-axis direction is made equal.

  By such an operation, the table plate 15 moves in the X-axis direction together with the third linear guide 33 of the connection tool 11b of the support unit 11 and the third linear guide 33 of the connection tool 12b of the support unit 12. At this time, the rail 33a of the third linear guide 33 provided in the connection tool 13b of the support unit 13 moves in the X-axis direction together with the table plate 15 while being supported by the slider 33b.

  When the table plate 15 is moved and positioned in the Y-axis direction, the second rotary drive device 42 of the slide member drive means 25 of the elevating device 13a of the support unit 13 is actuated to operate the first slide member. And the second slide member are slid along the rail 24 while maintaining a distance from each other, and both the slide members are moved in the Y-axis direction together with the elevating member 23 and the connection tool 13b.

  By such an operation, the table plate 15 moves in the Y-axis direction together with the connection tool 13 b of the support unit 13. At this time, the rail 33a of the third linear guide 33 provided in the connector 11b of the support unit 11 moves in the Y-axis direction together with the table plate 15 while being supported by the slider 33b. And the rail of the 3rd linear guide 33 with which the connection tool 12b of the support unit 12 is also moved to the Y-axis direction with the table board 15 in the state supported by the slider.

  FIG. 4 is a view showing the positioning table 10 shown in FIG. 3 in a state in which the table plate 15 is positioned by moving (raising) the Z-axis direction.

  When the table plate 15 is moved (raised) in the Z-axis direction and positioned, the slide member drive provided in each of the elevating devices 11a, 12a, 13a of the support units 11, 12, 13 shown in FIGS. The means 25 is operated as follows.

  The first slide drive unit 41 of the slide member drive means 25 of each lifting and lowering device of each of the support units 11, 12, and 13 is operated to slide the second slide member 22 along the rail 24 to perform the first slide. Approach the member 21. Thereby, each raising / lowering member 23 of the raising / lowering apparatus 11a, 12a, 13a of the support units 11, 12, 13 is raised with the connection tools 11b, 12b, 13b, respectively.

  By such an operation, the table plate 15 moves (rises) in the Z-axis direction together with the connectors 11b, 12b, and 13b of the support units 11, 12, and 13.

  FIG. 5 is a diagram showing the positioning table 10 shown in FIG. 4 in a state in which the table plate 15 is positioned by being tilted and moved about an axis parallel to the Y axis.

  When positioning the table plate 15 by tilting it about an axis parallel to the Y axis, each of the elevating devices 11a, 12a, 13a of the support units 11, 12, 13 shown in FIGS. The slide member driving means 25 is operated as follows.

  The first rotation drive device 41 of the slide member drive means 25 of each lifting and lowering device of each of the support units 11 and 12 is operated to slide the second slide member 22 along the rail 24 to thereby move the first slide member 21. Keep away from. Thereby, each raising / lowering member 23 of the raising / lowering apparatuses 11a and 12a of the support units 11 and 12 is lowered | hung with the connection tools 11b and 12b, respectively.

  By such an operation, the housing of the spherical bearing 34 of each of the connecting tools 11b and 12b is tilted, and the housing 34a of the spherical bearing 34 of the connecting tool 13b is tilted and the slider 33b fixing the housing 34a. At the same time, it slides slightly along the rail 33a. As a result, the table plate 15 tilts (rotates) about an axis parallel to the Y axis.

  Although not described in detail, by operating the slide member driving means 25 of each of the elevating devices 11a, 12a, and 13a, and placing each of the connecting tools 11b, 12b, and 13b at a predetermined height, the table The plate can be tilted (rotated) about the Y axis or any axis parallel to the Y axis, or can be tilted (rotated) about the X axis or any axis parallel to the X axis. .

  Further, when positioning the table plate 15 by rotating (tilting) it about the Z axis, each of the elevating devices 11a, 12a, 13a of the support units 11, 12, 13 shown in FIGS. The slide member driving means 25 included in is operated as follows.

  In a state where the second slide drive unit 42 of the slide member drive means 25 of the lifting device 11a of the support unit 11 is operated, and the first slide member 21 and the second slide member 22 are maintained at a distance from each other. It slides along the rail 24, and both slide members are moved to a X-axis direction with the raising / lowering member 23 and the connection tool 11b.

  At the same time, the second rotary drive device 42 of the slide member drive means 25 of the elevating device 12a of the support unit 12 is operated, and the first slide member 21 and the second slide member 22 are maintained at a distance from each other. The two slide members are moved in the direction opposite to the X-axis direction together with the elevating member 23 and the connector 12b.

  At the same time, the second rotary drive device 42 of the slide member drive means 25 of the lifting device 13a of the support unit 13 is operated to maintain the distance between the first slide member 21 and the second slide member 22. In this state, it is slid along the rail 24, and both slide members are moved in the direction opposite to the Y-axis direction together with the elevating member 23 and the connection tool 13b.

  By such an operation, the housing 34a of the spherical bearing 34 of each of the connectors 11b, 12b, and 13b is moved to the rod 34b (the rod 34b extends along a straight line passing through the center of the sphere accommodated in the housing). As a center, it is rotationally moved (tilted) with the third linear guide 33. At the same time, the rail 33a of the third linear guide 33 slides slightly while being supported by the slider 33b. As a result, the table plate 15 is rotationally moved (tilted) about the Z axis.

  Although not described in detail, the table plate is centered on the Z axis or an arbitrary axis parallel to the Z axis by adjusting the direction and distance of movement of each of the above-described connectors 11b, 12b, 13b. It can be rotated (tilted).

  As described above, the positioning table 10 of the present invention has a minimum of three support units, that is, a minimum of three wedge mechanisms (second slide member 22 and elevating member 23) in order to realize positioning with multiple degrees of freedom. It is not necessary to precisely machine the surface of the wedge plate of each wedge mechanism (corresponding to the elevating member 23) on the side of the table plate 15, and each wedge mechanism is connected to the wedge mechanism. Since it is not necessary to install precisely so that the surface is arranged at a predetermined angle, it can be easily assembled.

  In the positioning table 10 of the present invention, each support unit that supports the table plate 15 includes a lifting device that is slidably installed on a base, and a spherical bearing 34 that connects the lifting device to the table plate. And a connecting tool made up of the third linear guide 33, and it is not necessary to use a biasing means (typical example, spring) for pressing the table plate against each support unit. Therefore, the positioning table 10 of the present invention firmly supports the table plate 15 by the respective support units even when a load is applied to the article placed and positioned on the table plate 15. Can be maintained.

  In the positioning table of the present invention, it is preferable that each connection tool of the three or more support units is connected to the bottom surface of the table plate. As a result, if the table plate is precisely machined (eg, polished) so that the bottom surface becomes a smooth surface, each support unit is accurately placed at a predetermined position on the bottom surface of the table plate. Can be positioned with high accuracy. Similarly to the positioning table of Patent Document 1, for example, when the bottom surface and the three side surfaces of the table plate are supported by six support units, the bottom surface of the table plate is used to position the table plate with high accuracy. Must be precisely machined and each of the three side surfaces of the table plate must be precisely machined to be exactly perpendicular to the bottom surface.

  In the positioning table of the present invention, the third linear guide of each connecting tool of at least three support units has a straight line projected on the base surface (horizontal plane) that is a straight line extending in the length direction. It is preferable that the rails are arranged in such a direction as to intersect (preferably orthogonal) a straight line extending in the length direction of the rail.

  The support unit that satisfies the above-described conditions is obtained when the first slide member and the second slide member are slid along the rail together with the lift member by the slide member driving means included in the lift device. The driving force of the member driving means is transmitted to the table plate via the connection tool.

  If the positioning table includes four or more support units, the remaining supports are provided if the third linear guides of the connectors of each of the at least three support units are arranged so as to satisfy the above conditions. The third linear guide of the unit connector can be arranged so as to satisfy the above conditions, and the straight line projected on the surface of the base is the length direction of the rail of the lifting device. It is also possible to arrange them in a direction that coincides with (or is parallel to) a straight line extending in the direction.

  Furthermore, in the positioning table of the present invention, the third linear guides of the connection tools of the at least two support units intersect with each other by straight lines projected on the base surface (horizontal plane) extending in the length direction. It is preferable to arrange in such a direction. With the above-mentioned at least two support units satisfying this condition, the table plate moves in any direction within a plane including a straight line extending in the length direction of two or more third linear guides included in these support units. Supported where possible.

  In the positioning table 10 shown in FIGS. 1 and 2, the elevating member 23 is supported above the inclined surface 22 a of the second slide member 22 via the first linear guide 31. The first linear guide 31 is fixed to each of the slope 22 a of the second slide member 22 and the slope 23 a of the elevating member 23. The first linear guide is not particularly limited in its fixing position. For example, the first linear guide has a side surface close to the slope of each of the second slide member 22 and the elevating member 23 (a front side surface or a back side surface in FIG. 2). It can also be fixed to each.

  The distance by which the elevating member 23 moves up and down when the distance between the first slide member 21 and the second slide member 22 is adjusted is determined by the inclination angle of the first linear guide 31. Therefore, for example, when the first linear guide 31 is fixed to the side surfaces close to the inclined surfaces of the second slide member 22 and the lifting member 23 as described above, the inclination angle of the first linear guide 31 is It is not necessary to coincide with the inclination angle of the inclined surface 22a of the second slide member 22 or the inclined surface 23a of the elevating member 23.

  Furthermore, as each of the first rotation drive device 41 and the second rotation drive device 42 of the slide member drive means 25, a known rotation drive device (representative example, stepping motor) can be used. The first rotation drive device 41 and the first feed screw 51 of the slide member drive means 25, and the second rotation drive device 42 and the second feed screw 52 function as a linear drive device, respectively. Therefore, instead of the first rotation drive device 41 and the first feed screw 51, and the second rotation drive device 42 and the second feed screw 52, a known linear motion drive device (eg, linear motor) is used. It can also be used.

  FIG. 6 is a plan view showing another configuration example of the positioning table of the present invention. However, only the outer shape of the table plate 65 of the positioning table 60 is indicated by a two-dot chain line.

  The configuration of the positioning table 60 in FIG. 6 is that the shape of each of the base 64 and the table plate 65 is different, an opening 65a is formed at the center of the table plate 65, and the arrangement of the support units 11, 12, and 13 Is the same as the positioning table 10 shown in FIG. 1 and FIG.

  As described above, when the support units 11, 12, and 13 installed on the base 64 are arranged side by side around the opening of the table plate 65, for example, the table plate is disposed below the opening of the table plate 65. An apparatus for performing various inspections of articles placed on 65 can be arranged.

  The positioning table 60 is also centered on the movement of the table plate 65 in the X-axis direction, the movement in the Y-axis direction, the movement in the Z-axis direction, and each axis (or an axis parallel to each axis). Each tilting movement is possible.

  FIG. 7 is a plan view showing still another configuration example of the positioning table of the present invention. However, only the outer shape of the table plate 15 of the positioning table 70 is indicated by a two-dot chain line.

  The configuration of the positioning table 70 in FIG. 7 is the same as that of the positioning table 10 in FIG. 1 except that the configuration of the slide member driving means 75 provided in each lifting device of the support units 71, 72, 73 is different.

  The slide member drive means 75 includes a first rotary drive device 81 and a second rotary drive device 82 each having a rotary shaft arranged in parallel with the rail 24 of the lifting device installed on the base 14. Yes. The rotation shaft of the first rotation drive device 81 is connected to the first slide member 21 via the first feed screw 91. The rotation shaft of the second rotation drive device 82 is connected to a second slide member (located below the elevating member 23) via a second feed screw 92. Note that the tip ends of the screw shafts of the first feed screw 91 and the second feed screw 92 are rotatably supported by a rotary bearing 93.

  By operating the first rotation drive device 81 of the slide member drive means 75, the first slide member 21 connected to the first rotation drive device 81 via the feed screw 91 is moved to the rail 24. A second slide which can be slid and held up to a predetermined position and is connected to the second rotary drive device 82 via a feed screw 92 by operating the second rotary drive device 82 The member can be slid and held on the rail 24 to a predetermined position.

  Therefore, each of the first slide member 21 and the second slide member is slid along the rail 24 using the first rotation drive device 81 and the second rotation drive device 82, and the distance between the slide members is determined. By adjusting this, the elevating member 23 supported above the second slide member can be raised and lowered.

  On the other hand, using the first rotary drive device 81 and the second rotary drive device 82, the first slide member 21 and the second slide member are moved along the rail 24 while maintaining the distance between the slide members. By sliding, the elevating member 23 can be moved along the rail 24 while maintaining a predetermined height.

  Thus, the function of the slide member driving means 75 provided in the positioning table 70 of FIG. 7 is the same as that of the slide member driving means 25 provided in the positioning table 10 of FIG.

  The slide member driving means 75 is connected to each rotation driving device because each of the first rotation driving device 81 and the second rotation driving device 82 is installed on the base 14 and does not move. The arrangement of various cables (typical example, power cable) can be fixed.

DESCRIPTION OF SYMBOLS 10 Positioning table 11, 12, 13 Support unit 11a, 12a, 13a Lifting device 11b, 12b, 13b Connecting tool 14 Base 15 Table board 21 First slide member 21a Protruding part 22 Second slide member 22a Slope 23 Lifting member 23a Slope 24 Rail 25 Slide member drive means 26a, 26b Slider 31 First linear guide 31a Rail 31b Slider 32 Second linear guide 32a Rail 32b Slider 33 Third linear guide 33a Rail 33b Slider 34 Spherical bearing 34a Housing 34b Rod 41 First Rotation Drive Device 41a Rotation Shaft 42 Second Rotation Drive Device 43 Support Member 44 Coupling 51 First Feed Screw 51a Screw Shaft 51b Nut 52 Second Feed Screw 52a Screw Shaft 52 Nut 60 Positioning table 64 Base 65 Table plate 65a Opening 70 Positioning table 71, 72, 73 Support unit 75 Slide member driving means 81 First rotary driving device 81a Rotary shaft 82 Second rotary driving device 82a Rotary shaft 91 First Feed screw 92 Second feed screw 93 Rotary bearing

Claims (3)

A positioning table including a base and a table plate supported above the base via three or more support units that satisfy the following conditions (1) to (3):
(1) Each support unit includes an elevating device installed on the surface of the base so as to be slidable along the surface, and a connector for connecting the elevating device and the table plate to each other;
(2) The lifting device according to the above (1) is a rail extending along the surface of the base, a first slide member slidably supported by the rail, and a second slide member having a slope on the top surface, The bottom surface has a slope facing the slope of the second slide member, and is supported above the slope of the second slide member via a first linear guide that is disposed along the slope. A lifting member connected to the side surface of the first sliding member via a second linear guide so as to be movable up and down, and a sliding member driving means for sliding and holding each sliding member to a predetermined position on the rail And (3) the connection device according to (1) includes a spherical bearing and a third linear guide that slidably holds the spherical bearing, and one of the spherical bearing and the third linear guide. But The lifting member and the other are fixed to the table plate.   The slide member driving means includes a first rotation driving device and a second rotation driving device each having a rotation shaft arranged in parallel with the rail of the lifting device, and the first rotation driving device is a first rotation driving device. It is installed on one of the slide member and the second slide member, its rotation shaft is connected to the other slide member via the first feed screw, and the second rotation drive device is based on The positioning table according to claim 1, wherein the positioning table is installed on a table, and the rotation shaft thereof is connected to the first slide member or the second slide member via a second feed screw.   The sliding member driving means includes a first rotation driving device and a second rotation driving device each having a rotation shaft arranged in parallel with the rail of the lifting device installed on the base, and the first rotation The rotary shaft of the drive device is connected to the first slide member via the first feed screw, and the rotary shaft of the second rotary drive device is connected to the second slide member via the second feed screw. The positioning table according to claim 1.

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