WO2007055339A1

WO2007055339A1 - Three-dimensional positioning table

Info

Publication number: WO2007055339A1
Application number: PCT/JP2006/322504
Authority: WO
Inventors: Masaaki Yamada
Original assignee: Hephaist Seiko Co., Ltd.
Priority date: 2005-11-11
Filing date: 2006-11-10
Publication date: 2007-05-18
Also published as: JPWO2007055339A1

Abstract

A three-dimensional positioning table which has a thin and simple structure and can make a high-precision positioning, and which comprises a base table (11), an elevating device installed on the base table, a support plate fixed to the upper part of the elevating device, a table plate (14) disposed on the support plate, and at least three direct-acting drive devices (17a, 17b, 17c) disposed around the elevating device on the base table and provided with drive shafts respectively connected with the table plate via connectors (15a, 15b, 15c), wherein each of the above connectors comprises, linked in an arbitrary sequence, a first linear bearing (18) consisting of a rail and a slider disposed vertically to the table plate, a second linear bearing (19) consisting of a rail and a slider disposed in a direction perpendicular to the rail of the first bearing, and a swinging unit (20) provided with a movable unit capable of swinging with a direction vertical to the table plate as an axis, wherein the rails of the second linear bearings of at least two connectors out of the above three connectors are disposed to be coaxial or parallel with each other, and are disposed in a direction perpendicular to the rail of the second linear bearing of the remaining connector.

Description

Specification

3D positioning table

Technical field

[0001] The present invention relates to positioning of a sample when observing with a microscope, positioning of a workpiece or tool when performing precision machining, or glass when bonding two glass substrates constituting a liquid crystal cell. The present invention relates to a three-dimensional positioning table that can be advantageously used for positioning a substrate.

Background art

[0002] A positioning table is used for positioning a sample when observing with a microscope, positioning a workpiece or tool when performing precision machining, or glass when bonding two glass substrates constituting a liquid crystal cell. Used for substrate positioning.

[0003] Patent Document 1 discloses a positioning stage (two-dimensional positioning table) having a configuration in which a plurality of support units are attached between a support base (base) and a stage (table plate). . Each of the above support units includes an inner support plate and two outer support plates joined together with the inner support plate interposed therebetween. A ball held by a holding member is disposed between the inner support plate and each outer support plate. Thereby, the inner support plate and the outer support plate of the support unit can be relatively freely moved on a plane. Then, by fixing one of the inner support plate and the outer support plate of each support unit to the support base and the other to the stage, the stage can be moved and rotated vertically and horizontally.

[0004] Patent Document 2 discloses a six-degree-of-freedom fine movement stage (three-dimensional) including a stage (table plate) and a predetermined number of feed mechanisms that finely move the stage in each of the X, Y, and Z directions. Positioning table) is disclosed. In this six-degree-of-freedom fine movement stage, three-dimensional positioning is performed by controlling the fine movement of the stage in the X-axis, Y-axis, and z-axis directions and fine rotation around each axis by the above-mentioned feed mechanism. For example, a floating pad (air bearing) is used for each of the X feed mechanism that finely moves the stage in the X direction and the Y feed mechanism that moves the stage in the Y direction. And the side of the stage is attached to the stage The panel is pressed against the floating pad.

Patent Document 1: Japanese Patent Laid-Open No. 9-155666

Patent Document 2: Japanese Patent Laid-Open No. 2-9550

Disclosure of the invention

Problems to be solved by the invention

[0005] The two-dimensional positioning table of Patent Document 1 can position a positioning object in two dimensions with high accuracy. If further vertical positioning is required, the positioning tape for positioning in the vertical direction needs to be stacked on the table plate. When positioning tables are stacked, unnecessary vibrations are likely to occur on the table plate due to the height of the device, and high accuracy in three dimensions due to the effect of assembly accuracy when stacking positioning tables. It is difficult to position.

[0006] The three-dimensional positioning table of Patent Document 2 requires a floating pad, a device that sends air to the floating pad, and a panel that presses the side of the table plate against the floating pad. is there. In addition, for example, when the table plate is moved only in the X direction by the X feed mechanism, the panel that presses the side surface of the table plate against the floating pad of the Y feed mechanism is arranged obliquely with respect to the Y axis. Apply a driving force in the X direction to the table plate. Similarly, when the table plate is moved only in the Y direction by the Y feed mechanism, the panel that presses the side of the table plate against the floating pad of the X feed mechanism is placed obliquely with respect to the X axis. Apply Y direction driving force to the plate. In other words, since the X-feed mechanism and Y-feed mechanism interact with each other, it is difficult to increase the positioning accuracy beyond a certain level.

An object of the present invention is to provide a three-dimensional positioning table that has a thin and simple configuration and can perform positioning with high accuracy.

Means for solving the problem

[0008] The present invention relates to a base, a lifting device installed on the base, a support plate fixed to the top of the lifting device, a table plate slidably disposed on the support plate, and a base It is arranged around the lifting device and is connected to the table plate via each connecting tool. At least three linear motion drive units with drive shafts, each of which is provided with a rail disposed in a direction perpendicular to the surface of the table plate, and the rail along the length direction thereof. The first linear bearing consisting of a slider mounted in a movable manner, a rail arranged in a direction perpendicular to the rail of the first reel bearing, and the rail moving along its length A second linear bearing composed of a slider that is operatively mounted, and a swinging tool having a movable part swingable about a direction perpendicular to the surface of the table plate in an arbitrary order; and Of the above three connectors, the rails of the second linear bearings of the two connectors are arranged coaxially or parallel to each other and arranged in a direction perpendicular to the rails of the second linear bearings of the remaining connectors. 3D positioning In the table.

[0009] Preferred embodiments of the three-dimensional positioning table of the present invention are as follows.

(1) A slide plate that is slidably arranged on a base, a linear drive device that has a drive shaft installed on the base and connected to the slide plate, and a slide plate The slide member has a slope inclined with respect to the surface of the table plate, and the top surface is fixed to the lower surface of the support plate and is slidably opposed to the slope of the slide member. It also has an elevating member.

(2) The table plate is slidably disposed on the support plate via small balls arranged along the surface of the support plate.

(3) A holding plate having a thickness smaller than the diameter of the small sphere and having a plurality of through holes formed along the surface is disposed between the table plate and the support plate. However, one is accommodated and held in each of the many through holes of the holding plate.

(4) Each of the table plate and the support plate has an opening at the center thereof.

The invention's effect

[0010] The three-dimensional positioning table of the present invention can be configured to be thin without stacking a plurality of positioning tables. The three-dimensional positioning table of the present invention has a devised connection method between the table plate and the linear drive device, so that the positioning object placed on the surface of the table plate can be moved while having a simple configuration. It can be positioned with high accuracy in three dimensions. BEST MODE FOR CARRYING OUT THE INVENTION

[0011] A three-dimensional positioning table of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a diagram showing a configuration example of a three-dimensional positioning table of the present invention. However, in FIG. 1, the description of the lifting device (FIG. 4:12) provided in the positioning table 10 is omitted. FIG. 2 is a view of the positioning table 10 shown in FIG. 1 as viewed from above. FIG. 3 is a diagram showing a configuration of the lifting device provided in the positioning table 10 shown in FIG. FIG. 4 is a view of the positioning table 10 shown in FIG. 2 as viewed from the lower side of the figure. However, in FIG. 4, the description of the linear motion drive devices 17a, 17b, and 17c included in the positioning table 10 and the connectors 15a, 15b, and 15c is omitted.

A three-dimensional positioning table 10 shown in FIGS. 1 to 4 includes a base 11, a lifting device 12 installed on the base 11, a support plate 13 fixed to the top of the lifting device 12, and a support The table plate 14 is slidably disposed on the plate 13, and the table 15 is disposed around the lifting device 12 on the base 11. It is composed of three linear motion drive devices 17a, 17b, 17c and the like having drive shafts 16, 16, 16 connected to the bull plate 14. Each of the connecting tools 15a, 15b, 15c includes a rail 18a disposed in a direction perpendicular to the surface of the table plate 14, and a slider 18b attached to the rail 18a so as to be movable along the length direction thereof. A first linear bearing 18 composed of a rail 19a arranged in a direction perpendicular to the rail 18a of the first linear bearing 18, and a slider 19b attached to the rail 19a so as to be movable along its length direction. The second linear bearing 19 and the swinging tool 20 having a movable part 20a swingable about a direction perpendicular to the surface of the table plate 14 are connected in this order. Furthermore, the second linear bearings 19a, 15b of the two connectors 15a, 15b, 15b out of the above three connectors 15a, 15b, 15c are placed in parallel with each other and the remaining connections. The second linear bearing 19 of the tool 15c is arranged in a direction orthogonal to the rail 19a.

[0013] On the table plate 14 of the positioning table 10, for example, a positioning object such as a sample to be observed with a microscope is arranged. As will be described later, the table plate 14 is moved in, for example, the X direction, the Y direction, the Θ direction indicated by arrows in FIG. 2, and the Z direction indicated by arrows in FIG. Positioning pair placed on 14 The figurine can be positioned in three dimensions.

FIG. 5 is an enlarged view of the table plate 14 and the support plate 13 of the positioning table 10 shown in FIG. As shown in FIG. 5, the table plate 14 is preferably slidably disposed on the support plate 13 via a small ball group 26 disposed along the surface of the support plate 13. As a result, the table plate 14 can be smoothly moved (slided) along the surface of the support plate 13 in each of the X direction, the Y direction, and the Θ direction. The small ball group 26 is composed of a plurality of small balls 26 a disposed along the surface of the support plate 13. For example, the small ball group 26 is annularly arranged along the surface of the support plate 13.

[0015] Between the table plate 14 and the support plate 13, a holding plate 27 having a thickness smaller than the diameter of the small sphere 26a and having many through holes formed along the surface is disposed. It is further preferable that each of the small spheres 26a is housed and held in each of the many through holes of the holding plate 27. By using the holding plate 27, it is possible to prevent the small sphere 26a from dropping downward from the inner peripheral edge or the outer peripheral edge of the support plate 13. When the holding plate 27 is not used, for example, a groove shallower than the diameter of the small sphere 26a is formed on the surface of the support plate 13, and the small sphere group 26 is disposed inside the groove. The above-mentioned small ball 26a can be prevented from falling

As shown in FIG. 5, a small ball group 28 and, for example, a disk-shaped plate material 29 are arranged below the support plate 13. The support plate 13 is preferably in a state of being previously pressurized by the table plate 14 and the plate material 29 via the small ball group 26 and the small ball group 28. Accordingly, the table plate 14 can be moved (slid) along the surface of the support plate 13 while maintaining the parallelism with the support plate 13 in a good state.

The small ball group 28 is composed of a plurality of small balls 28 a arranged along the surface of the plate material 29. The small ball group 28 is arranged in an annular shape along the surface of the plate material 29, for example. Between the support plate 13 and the plate material 29, a holding plate 30 having a thickness smaller than the diameter of the small sphere 28a and having many through holes formed along the surface is disposed. Each of the force holding plates 30 is preferably housed and held in each of a large number of through holes. As a result, the small balls 28a can be prevented from falling downward from the outer peripheral edge of the plate 29.

Next, a drive device for the table plate 14 of the positioning table 10 will be described. First Next, the lifting device 12 that lifts and lowers the table plate 14 (moves in the Z direction) will be described. The lifting device 12 is installed on the base 11. The support plate 13 is fixed to the upper part of the lifting device 12.

As shown in FIG. 3 and FIG. 4, the lifting device 12 of the positioning table 10 is installed on the slide plate 21 slidably disposed on the base 11 and the base 11, and the slide plate A linear motion drive device 23 having a drive shaft 22 connected to 21, a slide member 24 fixed on the slide plate 21 and having an inclined surface 24 a inclined with respect to the surface of the table plate 14, and supported by the top surface Preferably, the plate 13 is composed of an elevating member 25 having a slope 25a fixed to the lower surface of the plate 13 and slidably opposed to the slope 24a of the slide member 24.

[0020] The slide plate 21 of the lifting device 12 is disposed in non-contact with the base 11 via, for example, a pair of linear bearings 31a and 3 lb disposed in parallel to each other. Each of the linear bearings 31a and 31b has a configuration in which a pair of rails 32a and 32b are slidably opposed to each other along the length direction via a plurality of small balls. Each linear bearing rail 32 a is fixed to the base 11, and the rail 32 b is fixed to the slide plate 21. The linear bearings 31a and 31b allow the slide plate 21 to slide along the length direction of the rail 32a of the linear bearing 31a (in the X direction).

The linear drive device 23 includes a rotation drive device 33 and a ball screw 35 provided on the rotation shaft 34 of the rotation drive device 33. As the drive shaft of the linear drive device 23, a nut 22 fitted to the screw shaft 36 of the ball screw 35 is used. The drive shaft (nut) 22 is fixed to the slide plate 21. Therefore, by driving the rotational drive device 33 of the linear drive device 23, the slide plate 21 can be moved back and forth along the length direction of the rail 32a of the linear bearing 31a. As the linear drive device, a combination of a rotary drive device such as a stepping motor or a servo motor and a ball screw, or a known linear drive device represented by an ultrasonic linear motor can be used.

[0022] The elevating device 12 is provided with, for example, four combinations of the slide member 24 and the elevating member 25. Between each pair of the slide member 24 and the lift member 25, for example, a rail 37a fixed to the inclined surface 25a of the lift member 25 and a slider 3 fixed to the inclined surface 24a of the slide member 24 A linear bearing 37 consisting of 7b is provided. The linear bearing 37 enables the elevating member 25 to move smoothly along the slope 24a of the slide member 24.

[0023] Each of the two elevating members arranged side by side on the right side of FIG. 3 is based on a linear bearing different from the above and is movable only in the Z direction. Mounted on stand 11. For example, the elevating member 25 arranged on the right side of FIG. 4 has a rail 38a fixed to the right side surface thereof and a rail 38a fitted to the rail 38a and fixed to the base 11, and also has a force with the slider 38b. The linear bearing 38 can be moved only in the Z direction. Accordingly, by driving the linear drive device 23 and moving the slide plate 21 shown in FIG. 4 together with the slide member 24, for example, to the right in the figure, the elevating member 25 is raised, and the support plate 13, Then, the table plate 14 can be moved upward.

[0024] It should be noted that the lifting device 12 described above can be preferably used in the positioning table of the present invention because of its low height and high rigidity. In addition, there is no restriction | limiting in particular in the structure of a raising / lowering apparatus. For example, it is possible to use a lifting device having a configuration in which a driving device and a link device or a cam device are combined.

Next, three linear drive devices 17a, 17b used to move the table plate 14 of the positioning table 10 shown in FIG. 2 in, for example, the X direction, the Y direction, and the Θ direction, respectively. 17c and the connecting tools 15a, 15b and 15c used to connect each of the linear drive devices to the table plate will be described.

As shown in FIG. 3, the three linear drive devices 17 a, 17 b, 17 c are arranged around the lifting device 12 on the base 11. The linear drive devices 17a, 17b, and 17c include drive shafts 16, 16, and 16 that are connected to the table plate 14 via connecting members 15a, 15b, and 15c, respectively.

As shown in FIGS. 1 and 2, the linear drive device 17a includes a rotational drive device 39 and a ball provided on the rotary shaft 40 of the rotary drive device 39 in the same manner as the linear motion drive device 23 described above. It consists of screws 41. A nut 16 fitted to the screw shaft 42 of the ball screw 41 is used as the drive shaft of the linear drive device 17a. The drive shaft (nut) 16 is connected to the table plate 14 via a connector 15a. Each configuration of the linear drive devices 17b and 17c is the same as that of the linear drive device 17a. Note that each linear drive device For example, a combination of a rotary drive device such as a stepping motor or a servo motor and a ball screw, or a known linear motion drive device typified by an ultrasonic linear motor can be used. Use these linear motion drive units with different configurations.

[0028] The connecting tool 15a also has a rail 18a arranged in a direction perpendicular to the surface of the table plate 14 and a slider 18b attached to the rail 18a so as to be movable along the length direction. The first linear bearing 18 and the first linear bearing 18 have a rail 19a arranged in a direction perpendicular to the rail 18a and a slider 19b attached to the rail 19a so as to be movable along the length direction. It has a configuration in which a second linear bearing 19 and a swinging tool 20 having a movable part 20a swingable around a direction perpendicular to the surface of the table plate 14 are connected in this order. The configuration of each of the connection tools 15b and 15c is the same as that of the connection tool 15a. The order of connecting the first linear bearing, the second linear bearing, and the swinging tool of each connecting tool is not particularly limited. Further, as these connecting tools, those having different structures (for example, those in which the order of connecting the first linear bearing, the second linear bearing and the swinging tool is different from each other! /) Are used. Moyo!

[0029] In the case of the positioning table 10, the slider 18b of the first linear bearing 18 of the connector 15a is fixed to the slider support member 44 whose upper part is fixed to the side surface of the table plate 14 and extends downward of the table plate. The rail 18a is fixed to the rail support 45. The rail support 45 has an inverted T-shape when viewed from the right side of FIG. 1, and its lower part extends in the Y direction. The rail 19a of the second linear bearing 19 is fixed to the lower part of the rail support member 45 along the Y direction, and the slider 19b is fixed to the movable tool 20a. The

[0030] As the first linear bearing 18 and the second linear bearing 19 of the positioning table 10, linear bearings having a configuration in which a slider is fitted to a rail via a plurality of small balls are used. The linear bearing having such a configuration is generally called a linear guide. A known linear bearing such as a cross roller guide may be used instead of the linear guide. It is also possible to use a shaft attached with a bush (particularly a ball bush) as the rail described above and the bush as the slider described above. [0031] As the swinging tool 20 of the positioning table 10, a hinge including a movable part 20a that can swing about a direction perpendicular to the surface of the table plate 14 is used. Instead of the hinge, a known sliding bearing formed in an annular shape or a roller bearing can be used with its inner ring or outer ring as the movable part. Further, a linear bearing having a rail curved in the shape of an arc can be used as the movable part.

[0032] The second linear bearings 19 and 19 of the two connecting members 15a and 15b out of the three connecting members are placed in parallel with each other, and the remaining connecting members 15c The second linear bearing 19 is arranged in a direction orthogonal to the rail 19a. It should be noted that the second linear bearings 19a and 19b of the two connecting tools 15a and 15b may be placed on the same axis.

[0033] In this way, by connecting each of the three linear drive devices 17a, 17b, and 17c to the table plate 14 via the connection tools 15a, 15b, and 15c, the linear drive device 17a, Using the 17b, 17c and the lifting device 12, the table plate 14 is moved, for example, in each of the X direction, the Y direction, the Θ direction, and the Z direction, and the object placed on the surface is moved with high accuracy. Can be positioned. Hereinafter, an example of a method for moving the table plate 14 of the positioning table 10 will be described.

FIG. 6 is a diagram showing a state in which the table plate 14 of the positioning table 10 shown in FIG. 2 is moved in the X direction. However, in FIG. 6, in order to clarify the moving direction of the table plate 14, the position of the table plate before the movement is indicated by a two-dot chain line, and the table plate 14 is moved greatly beyond its movable distance. The support plate (Fig. 1: 13) is not shown (the same applies to Fig. 7 and Fig. 8 below). As shown in FIG. 5, for example, the movable distance in the X direction (left and right directions in the figure) of the table plate 14 is the distance D in the left direction and the distance D in the right direction.

1 2

As shown in FIG. 6, for example, the drive shaft 16 of the linear drive device 17a is on the side opposite to the connection tool 15a side, and the drive shaft 16 of the linear drive device 17b is on the connection tool 15b side. The table plate 14 can be moved in the X direction by being driven by the same amount. At this time, the table plate 14 moves smoothly along the surface of the support plate (FIG. 1: 13) because the rail 19a of the second linear bearing 19 of the connector 15c moves in the X direction with respect to the slider 19b. To move Can do. In other words, the linear drive device 17c connected to the table plate 14 via the connector 15c or the lifting device connected to the support plate (Fig. 4: 12) may prevent the table plate from moving. Absent. Therefore, the positioning table 10 precisely moves the table plate 14 in the X direction (or the direction opposite to the X direction), and positions the positioning object placed on the surface in the X direction with high accuracy. be able to.

FIG. 7 is a diagram showing a state in which the table plate 14 of the positioning table 10 shown in FIG. 2 is moved in the Y direction. As shown in FIG. 7, for example, the table plate 14 can be moved in the Y direction by driving the drive shaft 16 of the linear drive device 17c toward the connector 15c. At this time, the table plate 14 moves smoothly along the surface of the support plate because the rail 19a of the second linear bearing 19 of each of the connectors 15a and 15b moves in the Y direction with respect to the slider 19b. can do. That is, the linear motion drive devices 17a and 17b connected to the table plate 14 via the connection tools 15a and 15b or the lifting device connected to the support plate does not hinder the movement of the table plate. Therefore, the positioning table 10 precisely moves the table plate 14 in the Y direction (or the direction opposite to the Y direction), and positions the positioning object placed on the surface in the Y direction with high accuracy. be able to.

FIG. 8 is a view showing a state in which the table plate 14 of the positioning table 10 shown in FIG. 2 is rotationally moved in the Θ direction. As shown in FIG. 8, for example, by driving the drive shafts 16 of the linear drive devices 17a, 17b, and 17c on the opposite side to the sides of the connection tools 15a, 15b, and 15c by the same amount as each other. The table plate 14 can be rotated in the Θ direction around the center position of the surface. At this time, the table plate 14 supports the support plate because the movable portions 20a of the swinging tools 20 of the connecting tools 15a, 15b, and 15c swing with respect to the linear drive devices 17a, 17b, and 17c, respectively. Can smoothly rotate and move along the surface. In other words, the linear drive devices 17a, 17b, 17c connected to the table plate 14 via connecting members, or the lifting device connected to the support plate may prevent the table plate from rotating. Absent. For this reason, the positioning table 10 precisely rotates and moves the table plate 14 in the Θ direction (or the direction opposite to the Θ direction), and positions the positioning object placed on the surface in the Θ direction with high accuracy. be able to.

[0038] Note that the positioning table 10 includes the drive shafts 16 of the linear drive devices 17a, 17b, and 17c. By adjusting the driving direction and driving amount, the table plate 14 can be rotated and moved in the Θ direction (or the direction opposite to the Θ direction) around an arbitrary position on the surface.

FIG. 9 is a diagram showing a state in which the table plate 14 of the positioning table 10 shown in FIG. 4 is moved in the Z direction. As shown in FIG. 9, for example, by driving the drive shaft 22 of the linear drive device 23 provided in the lifting device 12 in the right direction in the figure, the slide plate 21 together with the slide member 24 is in the right direction in the figure. At the same time, the elevating member 25 ascends together with the support plate 13, so that the table plate 14 can be moved (raised) in the Z direction. At this time, the table plate 14 rises smoothly because the slider 18b of the first linear bearing 18 of each of the connectors 15a, 15b, and 15b shown in FIG. 2 moves in the Z direction with respect to the rail 18a. can do. That is, the linear motion drive devices 17a, 17b, and 17c connected to the table plate 14 via the connection tools 15a, 15b, and 15c do not hinder the movement of the table plate. For this reason, the positioning table 10 precisely moves the table plate 14 in the Z direction (or the opposite direction to the Z direction) and positions the positioning object placed on the surface with high accuracy in the Z direction. be able to.

[0040] The movement of the table plate in the X direction, the Y direction, the 0 direction, and the Z direction can be performed simultaneously by selecting any two to four directions.

[0041] The three-dimensional positioning table of the present invention is arranged around the lifting device on the base, and is connected to the table plate via another connector having the same configuration as the above-described connector. Another linear motion drive device having a moving shaft may be provided. For example, in the case of the positioning table 10 shown in FIG. 2, the other linear drive device is connected to the right side surface of the table plate 14 through the other connection tool. In this case, it is preferable that the rail 19a of the second linear bearing 19 of the connector 15c and the rail of the second linear bearing of the other connector are arranged coaxially or parallel to each other. ,. Using these two linear motion drive units, the table plate is moved in the Y direction in the same manner as when moving the table plate in the X direction described above, thereby improving the straightness when the table plate is moved in the Y direction. It is done. This further increases the positioning accuracy of the positioning table.

[0042] The three-dimensional positioning table of the present invention stacks a plurality of positioning tables. Therefore, the height of the apparatus can be reduced, and the structure of the apparatus is simple. Furthermore, in the positioning table of the present invention, since the connection method between the table plate and the linear motion drive device is devised as described above, each linear motion drive device or lifting device can move the table plate smoothly. Will not be disturbed. Therefore, by using the positioning table of the present invention, the positioning object placed on the table plate can be positioned with high accuracy in three dimensions.

[0043] The positioning table 10 is set, for example, to the length of the table plate 14 (Fig. 2: L) force ¾50mm, and repeated positioning accuracy force ± 0.5 / ζ πι in the X direction, in the Y direction Positioning can be performed with high accuracy of ± 0.5 μm, ± 0.6 seconds in the 0 direction, and ± 1 m in the Z direction.

FIG. 10 is a plan view showing another configuration example of the three-dimensional positioning table of the present invention.

FIG. 11 is a side view of the table plate 54 and the support plate 53 of the positioning table 50 of FIG. FIG. 12 is a cross-sectional view of the table 54 plate and the support plate 53 cut along the cutting line II line entered in FIG. FIG. 13 is a plan view of the positioning table 50 shown in FIG. 10 to the linear motion drive devices 17a, 17b, and 17c, the connectors 15a, 15b, and 15c, the table plate 54, and a pair of support posts on the lower surface of the table plate 54 (FIG. 12: FIG. 12 is a plan view showing a state in which two plate members (FIG. 12: 59c, 59d) fixed by 51, 51) are removed. FIG. 14 is a diagram illustrating the shape of the holding plate 57a shown in FIG. FIG. 15 is a plan view showing a state where the holding plates 57a, 57b, 57c, and 57d shown in FIG.

[0045] The configuration of the three-dimensional positioning table 50 is the same as the three-dimensional positioning table described above except that the table plate 54 has an opening 54a in the center and the support plate 53 has an opening 53a in the center. Same as 10. That is, by driving the elevating device 12, the support plate 53 supported by the four elevating members 25 provided in the elevating device 12 is moved up and down together with the table plate 54 disposed thereon as shown in FIG. be able to.

As described above, when the opening is provided at the center of each of the table plate and the support plate of the three-dimensional positioning table, for example, a CCD (Charge Coupled) is formed inside or below the opening of the table plate. Device) An imaging device represented by a camera can be arranged. As a result, the object to be positioned arranged above the opening of the table plate can be moved. The position can be positioned with high accuracy while the position is detected by the imaging device.

[0047] For example, when two glass substrates constituting a liquid crystal cell are bonded to each other via an adhesive, the arrangement of each glass substrate is detected by the imaging device (for example, on each glass substrate). The one glass substrate placed on the table plate 54 so as to cover the opening 54a is placed on the table plate 54 with a slight gap between them. After being positioned at a predetermined position with respect to the other glass substrate, it is raised. By such an operation, both glass substrates can be bonded together in a state of being positioned with high accuracy. Note that the glass substrate placed on the table plate can also be arranged above the region inside the opening of the table plate in a state where the glass substrate is supported by an appropriate jig at the peripheral edge thereof.

[0048] In the case of the positioning table 50, as shown in FIGS. 11 to 13, the table plate 54 passes through small ball groups 56a, 56b, 56c, and 56d disposed along the surface of the support plate 53. The support plate 53 is slidably disposed. In addition, between the table plate 54 and the support plate 53, four holding plates 57a each having a thickness smaller than the diameter of the small sphere and having a large number of through holes formed along the surface thereof. 57b, 57c and 57d are arranged. Each of the small spheres is housed and held in each of the through holes of the holding plates.

[0049] As the holding plates 57a, 57b, 57c, and 57d, those having the same shape are used. For example, the holding plate 57a holds a small ball group 56a as shown in FIG. A pair of openings 52, 52 are provided on each end side in the length direction of the holding plate 57a. As shown in FIGS. 11 and 14, a holding plate regulating pin 61 provided in a state in which the surface force of the supporting plate 53 protrudes is inserted inside each opening 52 of the holding plate 57a. . When the table plate 54 is repeatedly moved, the holding plate regulating pin 61 prevents the holding plate 57a from protruding greatly from the inner or outer peripheral edge of the support plate 53, that is, the through hole of the holding plate 57a is supported. The movement of the holding plate is restricted so as not to be arranged inside or outside the plate 53, and the small balls of the through hole cap of the holding plate 57a are prevented from falling.

[0050] As shown in FIGS. 11 and 12, a plate material 59c is disposed below the support plate 53 and below the holding plate 57c via a small ball group 58c held by the holding plate 60c. ing. Similarly, the holding plate 60d holds the lower side of the support plate 53 and below the holding plate 57d. A plate material 59d is arranged through a small ball group 58d. Each of these plate materials 59c, 59d is fixed to the lower surface of the table plate 54 via a pair of support columns 51, 51. Thereby, the support plate 53 is pre-pressurized by the table plate 54 and the plate material 59c through the small ball groups 56c and 58c. Similarly, the support plate 53 is previously pressurized by the table plate 54 and the plate material 59d through the small ball groups 56d and 58d. Accordingly, the positioning device 50 shown in FIG. 10 can also move (slide) the table plate 54 along the surface of the support plate 53 while maintaining the parallelism with the support plate 53 in a good state. .

[0051] As in the positioning device 50 of FIG. 10, each of the table plate 54 and the support plate 53 is provided with an opening, and when the imaging device is used for positioning as described above, a support is provided. The configuration of the holding plate arranged on the plate 53 is not particularly limited as long as it does not prevent the detection of the arrangement of the positioning object by the imaging device. For example, as the holding plate disposed on the support plate 53, a holding plate having a shape corresponding to the support plate 53 (rectangular shape having an opening at the center) can be used. Similarly, the configuration of the holding plate disposed under the support plate 53 is not particularly limited as long as it does not prevent detection of the positioning object by the imaging device, but as shown in FIG. It is necessary to dispose the holding plate in the surface region supported by the lifting member 25 of the lifting device 12 on the lower surface of 53.

[0052] As in the case of the positioning table 10 described above, the three-dimensional positioning table 50 can also be configured without stacking a plurality of positioning tables, so that the height of the apparatus can be reduced. The positioning object placed above the opening 54a can be positioned with high accuracy in three dimensions while detecting the placement by an imaging device placed inside or below the opening of the table plate, for example. . Brief Description of Drawings

FIG. 1 is a diagram showing a configuration example of a three-dimensional positioning table of the present invention. However, the lifting device (Fig. 4:12) provided in the positioning table is omitted.

FIG. 2 is a view of the positioning table 10 shown in FIG.

3 is a diagram showing a configuration of a lifting device provided in the positioning table 10 shown in FIG.

FIG. 4 is a view of the positioning table 10 shown in FIG. However, the description of the linear motion drive devices 17a, 17b, 17c and the connectors 15a, 15b, 15c is omitted. FIG. 5 is an enlarged view of the table plate 14 and the support plate 13 of the positioning table 10 shown in FIG. However, each of the small spheres 26a and 28a is not shown as a cross section.

6 is a view showing a state in which the table plate 14 of the positioning table 10 shown in FIG. 2 is moved in the X direction. However, the description of the support plate (Fig. 1: 13) is omitted.

7 is a view showing a state in which the table plate 14 of the positioning table 10 shown in FIG. 2 is moved in the Y direction. However, the description of the support plate (Fig. 1: 13) is omitted.

FIG. 8 is a view showing a state in which the table plate 14 of the positioning table 10 shown in FIG. 2 is rotationally moved in the Θ direction. However, the description of the support plate (Fig. 1: 13) is omitted.

FIG. 9 is a view showing a state where the table plate 14 of the positioning table 10 shown in FIG. 4 is moved in the Z direction.

FIG. 11 is a side view of the table plate 54 and the support plate 53 of the positioning table 50 of FIG. 10 viewed from the right side of the drawing.

FIG. 12 is a cross-sectional view of the table plate 54 and the support plate 53 cut along the cutting line I-I entered in FIG. However, each of the small spheres is not filled in as a cross section.

[FIG. 13] From the positioning table 50 of FIG. 10, linear motion drive devices 17a, 17b, 17c, connecting tools 15a, 15b, 15c, table plate 54, and a pair of support columns (FIG. 12) FIG. 12 is a plan view showing a state in which two plate members (FIG. 12: 59c, 59d) fixed by 51, 51) are removed.

FIG. 14 is a diagram illustrating the shape of the holding plate 57a shown in FIG.

15 is a plan view showing a state in which the holding plates 57a, 57b, 57c, 57d shown in FIG. 13 are removed from the support plate 53. FIG.

Explanation of symbols

10 3D positioning table

11 base

12 Lifting device

13 Support plate

14 Table board a ゝ 15b ゝ 15c Connector Drive shaft

a, 17b, 17c Linear motion drive 1st linear bearing a Lenore

b Slider

Second linear bearing a Lenore

b Slider

Swing tool

a Moving parts

Slide plate

Drive shaft

Linear drive

Slide member

a slope

Elevating member

a slope

Small ball group

a small ball

Holding plate

Small ball group

a small ball

Board

Holding plate

a, 31b Linear bearing a, 32b Rail

Rotation drive Axis of rotation

Bonore screw

Screw shaft

Linear bearing

a Lenore

b Slider

Linear bearing

a Lenore

b Slider

Rotation drive device Rotating shaft

Ball screw

Screw shaft

Slider support material Rail support material

3D positioning table

Aperture

Support plate

a Opening

Table board

a Opening

a, 56b, 56c, 56d Balls a, 57b, 57c, 57d Holding plate c, 58d Balls

c, 59d board

c, 60d holding plate

Pin for holding plate regulation

Claims

The scope of the claims

[1] Base, lifting device installed on the base, support plate fixed to the top of the lifting device, table plate slidably disposed on the support plate, and lifting device on the base Including at least three linear motion drive devices each having a drive shaft connected to the table plate via a connection tool, each of the connection tools being connected to the table plate. A first linear bearing consisting of a rail arranged in a direction perpendicular to the surface and a slider movably attached to the rail along its length direction. A second linear bearing consisting of a rail arranged in an orthogonal direction and a slider attached to the rail so as to be movable along its length, and a direction perpendicular to the surface of the table plate as an axis A swinging tool with a swingable movable part is connected in any order. And the rails of the second linear bearings of two of the above three connectors are arranged coaxially or parallel to each other and the rails of the second linear bearings of the remaining connectors. A three-dimensional positioning table placed in a direction perpendicular to the

[2] A slide plate that is slidably disposed on a base, a linear drive device having a drive shaft installed on the base and connected to the slide plate, on the slide plate A slide member having a slope inclined with respect to the surface of the table plate, and a top surface fixed to the lower surface of the support plate, and slidably opposed to the slope of the slide member. The three-dimensional positioning table according to claim 1, which has a lifting member force.

[3] The three-dimensional positioning table according to [1], wherein the table plate is slidably disposed on the support plate via a group of small balls disposed along the surface of the support plate.

[4] A holding plate having a thickness smaller than the diameter of the small sphere and having a plurality of through holes formed along the surface is disposed between the table plate and the support plate. 4. The three-dimensional positioning table according to claim 3, wherein one is accommodated and held in each of the plurality of through holes of the holding plate.

5. The three-dimensional positioning table according to claim 1, wherein each of the table plate and the support plate has an opening at the center thereof.