JPH04128130U - moving table - Google Patents

Abstract

(57) [Summary] [Purpose] To reduce the weight of moving tables such as XY tables. [Structure] In a moving table in which a stage 9 provided on a base 1 is moved in two perpendicular directions on one plane, at least the stage 9 of the base 1 and the stage 9 is moved in the shape of a nest. A laminate having a core 28 is molded.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This idea is a portable device used in manufacturing equipment and inspection equipment for semiconductors, liquid crystal panels, etc. It is related to dynamic tables.

0002

[Conventional technology]

As a moving table, the stage that supports the workpiece is placed at right angles on one plane. An XY table that moves in two directions, or a rotational motion that is added to the stage. An XYθ table has been known in the past.

0003 The above moving table may warp or change the stage or the base that supports the stage. If the shape occurs, the positional accuracy of the workpiece supported on the stage will be distorted, and the workpiece will be However, high-precision processing and inspection cannot be performed. Therefore, on the moving table , the stage and base are made of thick steel to prevent deformation.

0004

[Problem that the idea aims to solve]

By the way, with a movable table whose stage and base are made of thick steel, Due to the heavy weight and large inertia when the stage is stopped, it is difficult to maintain high accuracy. There is an inconvenience that it takes time to set the position.

[0005] This idea reduces the weight of the moving table and shortens the stage positioning time. The technical challenge is to achieve this goal.

[0006]

[Means to solve the problem]

In order to solve the above problem, this invention has a base and a The stage is tilted at a right angle on a plane parallel to the top surface of the base. In the movable table, the movable table is provided with a drive device that moves in two directions. Among the stages, at least the stage is provided with a nest-shaped core between two steel plates. We adopted a structure formed from a laminate made of

[0007]

[Effect]

With the above configuration, the stage forming the stage has a nest-shaped core. Because of this, a lightweight stage can be obtained and the weight of the moving table can be reduced. can be achieved. In addition, by making the stage lightweight, the stage Since the inertial force can be kept small, the above stage can be positioned in a short time. be able to.

[0008]

【Example】

1 and 2 show an example of a moving table according to this invention. This moving table The bull has a base 1 in which a circular hole 2 is formed. Also, Legs 3 are provided on the lower surface of the base 1.

[0009] A flange member 4 is inserted into the circular hole 2 of the base 1. A flange 5 provided at the lower end faces the lower surface of the base 1, and a retainer 6 is installed between the opposing parts. A large number of held balls 7 are incorporated.

0010 A protruding shaft 8 is provided on the upper surface of the flange member 4, and the protruding shaft 8 is provided on the base 1. It is inserted into the hole 10 of the stage 9.

[0011] A large number of balls 12 held by a cage 11 are located between the stage 9 and the base 1. is incorporated. This stage 9 includes a tightening bolt 1 screwed into the flange member 4. 3, each ball 7, A preload is applied to 12. This preload amount is between the flange member 4 and the stage 9. The built-in spacer 14 has a predetermined size, and the spacers have different thicknesses. By replacing it, the amount of preload can be adjusted.

0012 One bracket 15 is attached to one side of the outer periphery of the base 1; Two brackets 16 and 17 are attached to the other side perpendicular to the side, and each bracket 15, 16, and 17 are provided with a first drive device 18 to a third drive device 20 for moving the stage. Supported.

[0013] Each drive 18, 19, 20 has an axially moved rod 21, the rod 21 being moved in the axial direction. The tip of the pad 21 is connected to the stage 9 via a joint 22.

[0014] Here, both ends of the joint 22 are supported by support pieces 23 attached to the stage 9. The guide pin 24 is provided so as to be slidable along the guide pin 24. The rod 21 of the drive devices 18, 19, 20 is a slider 25. It is connected to the holder 25 by a pin 26.

[0015] In addition, as a drive device, the nut is rotated by the drive of the motor, and the nut is threaded. Japanese Patent Application No. 1-7036, in which rods that engage in the same manner are moved in the axial direction The ball screw shaft device described in , etc. can be used.

[0016] The moving table having the above configuration supports a workpiece on stage 9, or The workpiece is supported by the table T installed on the stage 9, and the table T installed on the stage 9 is Therefore, appropriate processing or inspection is performed on the workpiece.

[0017] Now, the second and third drive devices 19 and 20 arranged in parallel are stopped, and the first drive device By moving the rod 21 of 18 in the driving direction, the stage 9 is moved in the X-axis direction. move it.

[0018] Also, the first drive device 18 is stopped, and the rods 2 of the second and third drive devices 19 and 20 are 1 in the axial direction by the same amount, the stage 9 can be moved in the Y-axis direction. I can do that.

[0019] Further, the second drive device 19 is stopped, and the rod 21 of the first drive device 18 is moved forward or backward. by moving the rod 21 of the third drive device 20 backward or forward. Stage 9 can be rotated.

[0020] This idea was designed to reduce the weight of the moving table as described above. As shown in Fig. 2, it is formed of a laminate in which a nest-like core 28 is provided between two steel plates 27. That's what I did. Here, the steel plate 27 is a bearing steel for rolling and guiding the ball 12. A hard material such as die steel or stainless steel is used. The steel plate 27 and core 28 are integrated by gluing.

[0021] 3 and 4 show examples of the core 28. The core 28 shown in FIG. 3 is made of aluminum alloy. Shows a grid-shaped product formed by casting. This core 28 has the same size as stage 9. They may be molded to a certain size, or multiple pieces may be arranged vertically and horizontally to form stage 9. You can make them the same size.

[0022] The core 28 shown in FIG. 4 is made of aluminum alloy, stainless steel pipe material, or synthetic wood. It is made by cutting extruded fat material to a certain length and arranging the cut pieces vertically and horizontally. In this case, side plates 29 made of metal plates are attached to each side of the two steel plates 27, and the drive device 18, 19, and 20 can be connected.

[0023] As described above, the stage 9 can be formed of a laminate having a nest-shaped core 28. This makes it possible to obtain a lightweight and highly rigid stage, reducing the weight of the moving table. can be achieved.

[0024] In addition, since the stage 9 is lightweight, the inertia force is small, and the drive devices 18, 19, When stage 20 stops operating, stage 9 immediately stops, allowing high-precision positioning to be performed in a short time. It can be done with

[0025] In the example, only the stage 9 was formed of a laminate, but the base 1 was also formed of a laminate. You may.

[0026] Note that the moving table is not limited to the one shown in the figure, and the stage 9 can be moved in the X-axis direction and It may also be possible to move only in the Y-axis direction.

[0027]

[Effect of the idea]

As mentioned above, in this invention, at least the stage The table is made of a laminate with a nest-like core, which reduces the weight of the moving table. In addition, since the inertia of the stage is small, the positioning of the stage can be easily can be performed accurately in a short period of time.

[Brief explanation of drawings]

[Fig. 1] A partially cutaway plan view showing an embodiment of a moving table according to this invention.

[Figure 2] Cross-sectional view taken along line II-II in Figure 1

[Figure 3] Partially cutaway perspective view of the stage shown above

[Fig. 4] A partially cutaway perspective view showing another example of the same stage as above.

[Explanation of symbols]

1 base 9 stage 18, 19, 20 Drive device

Claims (1)

[Scope of utility model registration request] 1. A moving table comprising a base, a stage provided above the base, and a drive device for moving the stage in two perpendicular directions on one plane parallel to the upper surface of the base, wherein the base and the stage are A movable table characterized in that at least the stage is formed of a laminate in which a nest-shaped core is provided between two steel plates.