JP2012112715A - Slide table - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a slide table of which the size of a support unit of a table board is comparatively small and the table board can be rotated and moved at a large angle.SOLUTION: A slide table includes a table board 13 which is slidably supported via a support device on a base 11, in which the support device consists of: a main support unit 21 arranged at the center of the lower surface of the table board, which has a support board 22 fixed to the base and with an opening at the center, an upper movable board 24 and a lower movable board arranged by contact on the respective upper and lower surfaces of the support board 22 via a plurality of balls 23 and joined to each other via a column passing through the opening, and a ball holding board 47 which holds the plurality of balls 23; and a plurality of sub-support units 41 arranged in the surroundings of the main support unit 21, each of which has a support board 42 fixed to the base, a movable board 44 arranged by contact on the upper surface of the support board via the plurality of balls 43, the ball holding board 47 which holds the plurality of balls 43, and means 48 for restricting movement distance of the ball holding board.

Description

  The present invention relates to a sliding table used as a part of a positioning table.

  The positioning table includes a sliding table having a slidable table plate and a driving device for the table plate.

  The positioning table is used, for example, when positioning two glass substrates constituting the liquid crystal cell. One glass substrate of the liquid crystal cell is placed on the table plate, the other glass substrate is supported above the glass substrate, and the driving device is operated to straighten the table plate in the X-axis direction or the Y-axis direction. By moving or rotating about the Z axis (axis perpendicular to the table plate), the two glass substrates can be positioned relative to each other.

  The sliding table includes a base and a table plate that is slidably supported on the base via a support device. The support device is, for example, a support plate having an opening at the center fixed to the base, and a support column arranged in contact with the upper and lower surfaces of the support plate via a plurality of spheres and passing through the opening of the support plate. One or a plurality of support units each including a pair of movable plates connected to each other via a pin.

  In order to stably support the table plate, when a single support unit is used, the table plate is supported by a single support unit disposed at the center of the lower surface (a position below the center of gravity of the table plate). When a plurality of support units are used, the table plate is supported by a plurality of support units arranged around the center of the lower surface.

  In the above support unit, the pair of movable plates slide in a state in which the support plates are tightly sandwiched via a plurality of spheres, so that the tilt movement of the table plate supported by the movable plates can be suppressed. In order to smooth the rolling of the plurality of spheres when the movable plate slides, the opposing surfaces of the support plate and the movable plate are polished extremely smoothly.

  Patent Document 1 discloses a sliding table in which a table plate is slidably supported by a single support unit. The support unit includes a support plate (a plate member having an upward support surface 15u and a downward support surface 151) provided with a support fixed to the base (support base 3), and a plurality of spheres on each surface of the support plate. And a movable member (supporting member 14) having a configuration in which a pair of movable plates arranged via each other are connected and integrated with each other. In the center of the movable plate arranged on the support column side, an opening through which the column passes is provided. The table plate (table 1) supported and fixed to the movable plate can move linearly until the opening of the movable plate contacts the support column.

  Patent Document 2 discloses a sliding table in which a table plate is slidably supported by a plurality of (for example, four) support units. Each support unit (sliding table 40) is disposed at a corner of the base (large support base 77). The support unit is fixed through a support plate having an opening in the center fixed to the base and a support column that is arranged on each surface of the support plate via a plurality of spheres and that passes through the opening of the support plate. And a pair of movable plates. The table plate (large table plate 75) supported and fixed to the movable plate can move linearly until the support column contacts the opening of the support plate.

Japanese Patent Laid-Open No. 1-242989 (FIG. 2) JP 2009-190123 A (FIGS. 7-8)

  In recent years, along with the increase in size of positioning objects (for example, glass substrates of liquid crystal cells), the size of slide tables has been increasing.

  In the sliding table of Patent Document 1, when the size of the table plate is increased, it is necessary to increase the size of the support unit that supports the table plate, that is, the size of the support plate and the movable member. For this reason, the complicated process of grind | polishing the opposing surface of a support plate and a movable member very smoothly using a large sized polishing apparatus is needed.

  In the sliding table of Patent Document 2, a plurality of support units support the corners of the table plate (positions away from the center of rotation of the table plate). For this reason, when the movable plate of each support unit rotates and moves the table plate, the rotation direction of the table plate compared to the movable member of the support unit arranged at the center of the lower surface of the table plate of Patent Document 1 described above. Move over long distances. On the other hand, the movable plate of each support unit is movable until the support column that fixes the pair of movable plates to each other contacts the opening of the support plate. Therefore, when the size of the table plate is increased (for example, the length of each side of the table plate is about 500 mm or more), when the table plate is rotated, the movable plate of each support unit is rotated. Since the table moves further in the direction, the column comes into contact with the opening of the support plate even if the angle of the rotational movement of the table plate is small. Accordingly, the table plate cannot be rotated at a large angle.

  The problem of the present invention is that the size of the support unit for the table plate is relatively small, the tilt movement of the table plate is suppressed, and the table plate can be The object is to provide a sliding table that can be rotated.

The present invention resides in a sliding table including a base and a table plate slidably supported on the base via a support device that satisfies the following conditions (1) to (3).
(1) The support device includes a main support unit disposed at the center of the lower surface of the table plate and a plurality of sub support units disposed around the main support unit.
(2) (a) The main support unit is disposed in contact with a support plate having an opening in the center fixed to a base or a table plate, and a plurality of spheres on the upper and lower surfaces of the support plate. And the upper movable plate and the lower movable plate that are connected to each other via a support column that passes through the opening of the support plate, and a sphere holder that rotatably holds a plurality of spheres between the support plate and each movable plate. (B) The main support unit described above is provided on the surface of the support plate on the side of the support plate with the support plate having a support fixed to the base or the table plate at the center of one of the upper and lower surfaces. A first movable plate that is disposed in contact with a plurality of spheres and that has an opening through which the column passes in the center; and a second movable plate that is disposed in contact with the opposite surface of the support plate via the plurality of spheres. And the first movable plate and the second movable plate around each other around the support plate. A connecting member for connecting and consists of a support plate and the ball holding plate for rotatably holding the plurality of balls between the respective movable plate.
(3) Each of the sub-support units includes a support plate fixed to the base, a movable plate disposed in contact with the upper surface of the support plate via a plurality of spheres, and a space between the support plate and the movable plate. The sphere holding plate that rotatably holds the spheres and means for limiting the moving distance of the sphere holding plate.

Preferred embodiments of the sliding table of the present invention are as follows.
(I) An opening is provided in the center of the sphere holding plate of each sub-support unit, and means for limiting the moving distance of the sphere holding plate is provided in the opening of the sphere holding plate provided on the upper surface of the support plate. It is a protrusion which engages.
(II) The main support unit satisfies the above condition (2) (a), the support plate of the main support unit is fixed to the base, and the lower movable plate of the main support unit on the base Is provided with an opening for receiving the.
(III) The main support unit satisfies the above condition (2) (A), the support plate of the main support unit is fixed to the base, and the fixing of the support plate and the base is It is made through a spacer so that the lower movable plate does not contact the table.

  In the present specification, the above-mentioned “center of the lower surface of the table plate” means a position within the lower surface of the table plate and below the center of gravity of the table plate.

  In the sliding table of the present invention, since the table plate is supported by the main support unit and the plurality of sub support units, the size of each support unit is relatively small. Therefore, it is not necessary to use a large polishing apparatus for polishing the support plate and the movable plate of each support unit. For this reason, a sliding table can be manufactured easily. Further, in the sliding table of the present invention, the upper movable plate and the lower movable plate of the main support unit slide in a state where the support plate is tightly sandwiched via a plurality of spheres, so that the table plate is inclined and moved. It is suppressed. Each sub-support unit that supports the periphery of the center of the lower surface of the table plate (the part that moves greatly when the table rotates) is a movable plate that can slide over a longer distance than the main support unit. (Mechanical parts that support the table plate). For this reason, the sliding table of the present invention can rotate the table plate at a large angle even when the size of the table plate is large.

It is a partially notched top view which shows the structural example of the sliding table of this invention. However, FIG. 1 shows the driving devices 60a, 60b, and 60c of the table plate 13. FIG. 2 is a partially cutaway plan view showing an enlarged main support unit 21 shown in FIG. 1. It is sectional drawing of the main support unit 21 cut | disconnected along the cutting line III-III line entered in FIG. However, the base 11 and the table plate 13 are shown in FIG. FIG. 2 is a partially cutaway plan view showing an enlarged sub-support unit 41 arranged at the upper right corner of the base 11 shown in FIG. 1. It is sectional drawing of the sub-support unit 41 cut | disconnected along the cutting line VV entered in FIG. However, the base 11 and the table plate 13 are shown in FIG. It is an enlarged view of the site | part of the vicinity of the drive device 60a shown in FIG. It is the figure which looked at the site | part of the vicinity of the drive device 60a of FIG. 6 from the lower side of the figure. It is sectional drawing which shows another structural example of a main support unit. However, the base 51 and the table plate 13 are shown in FIG. It is sectional drawing which shows another structural example of a main support unit. However, the base 51 and the table plate 13 are shown in FIG. It is a partially notched top view which shows another structural example of the sliding table of this invention. However, FIG. 10 shows the driving devices 60a, 60b and 60c of the table plate 103.

  The cutting device of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a partially cutaway plan view showing a configuration example of a sliding table of the present invention. FIG. 2 is a partially cutaway plan view showing the main support unit 21 shown in FIG. 1 in an enlarged manner, and FIG. 3 is a main support unit cut along the cutting line III-III shown in FIG. FIG. FIG. 4 is a partially cutaway plan view showing the sub-support unit 41 arranged at the upper right corner of the base 11 shown in FIG. 1 in an enlarged manner, and FIG. 5 shows a cutting line V--written in FIG. It is sectional drawing of the subsupport unit 41 cut | disconnected along V line.

  The sliding table 10 of the present invention shown in FIGS. 1 to 5 is a table that is slidably supported on a base 11 and a base 11 via a support device that satisfies the conditions (1) to (3). And a plate 13.

  The support device includes a main support unit 21 disposed in the center of the lower surface of the table plate 13 and a plurality of (for example, a total of four) sub-support units 41 disposed around the main support unit 21. Yes.

  As described above, when the table plate 13 is supported by the main support unit 21 and the plurality of sub support units 41, the size of each support unit is reduced as compared with the case where the table plate is supported by one support unit. be able to. Therefore, it is not necessary to polish the surfaces of the support plate and the movable plate of each support unit using a large polishing apparatus. For this reason, the sliding table 10 can be manufactured easily.

  The main support unit 21 shown in FIGS. 2 and 3 satisfies the above condition (2) (A), the support plate 22 having an opening 22a in the center fixed to the base 11, and The upper movable plate 24 and the lower movable plate 25 are arranged in contact with each of the upper and lower surfaces of the support plate 22 via a plurality of spheres 23 and connected to each other via a column 26 passing through the opening 22a of the support plate 22. And a sphere holding plate 27 that rotatably holds a plurality of spheres 23 between the support plate 22 and each movable plate.

  Since the upper movable plate 24 and the lower movable plate 25 of the main support unit 21 slide in a state where the support plate 22 is tightly sandwiched via a plurality of spheres 23, the upper movable plate 24 is supported and fixed to the upper movable plate 24. Further, the inclined movement of the table plate 13 is suppressed. Thereby, for example, when a large load is applied to the end portion of the table plate 13, the tilting movement of the table plate 13 caused by the opposite end portion floating is suppressed.

  The support plate 22 of the main support unit 21 in FIG. 3 is fixed to the base 11 as described above, and the base 11 is provided with an opening 11b for accommodating the lower movable plate 25. Thus, by accommodating the lower movable plate 25 in the opening 11b of the base 11, the height of the sliding table can be lowered.

  The support plate of the main support unit can also be fixed to the table plate. In this case, the height of the sliding table can be reduced by forming an opening for accommodating the upper movable plate in the table plate.

  The upper movable plate 24 of the main support unit 21 in FIG. 3 can be linearly moved, for example, in the right direction in the drawing until the lower movable plate 25 contacts the base 11.

Therefore, the movable distance of the table plate 13 supported and fixed to the upper movable plate 24 is equal to the distance D ₁ between the end surface of the lower support plate 25 and the inner surface of the opening 11 b of the base 11. Incidentally, than the distance D _1, the smaller the better the distance D ₂ between the outer peripheral surface and the inner surface of the opening 22a of the support plate 22 of the strut 26, the movement distance of the table plate 13 is equal to the distance D _2.

  On the other hand, when the upper movable plate 24 of the main support unit 21 is rotated about the column 26, the lower movable plate 25 and the base 11 are in contact with each other, or the column 26 and the support plate 22 are in contact with each other. There is nothing. Therefore, the main support unit 21 does not hinder the rotational movement around the column 26 of the table plate 13.

  4 and 5 includes a support plate 42 fixed to the base 11, a movable plate 44 disposed in contact with the upper surface of the support plate 42 via a plurality of spheres 43, and a support plate. Sphere holding plate 47 for rotatably holding a plurality of spheres 43 between 42 and movable plate 44, and means for limiting the movement distance of sphere holding plate 47 (hereinafter referred to as "sphere holding plate movement distance limiting means") 48).

  The sphere holding plate moving distance limiting means limits the moving distance of the sphere holding plate to a range where the sphere does not fall from the peripheral edge of the upper surface of the support plate when the sphere holding plate moves along with the sphere along the upper surface of the support plate. Has the function of The spherical body holding plate moving distance limiting means is not particularly limited in its configuration as long as it has the above function.

  As the spherical body holding plate movement distance limiting means, it is preferable to use a protrusion that engages with the spherical body holding plate provided on the support plate. For example, a plurality of protrusions formed on the surface of the support plate and arranged so as to surround the periphery of the spherical body holding plate, or an annular protrusion may be used.

  In the sub-support unit 41 shown in FIGS. 4 and 5, an opening 47 a is provided at the center of the sphere holding plate 47, and the sphere provided on the upper surface of the support plate 42 as the sphere holding plate moving distance limiting means 48. A protrusion that engages with the opening 47a of the holding plate 47 is used. By forming the opening 47 a in the sphere holding plate 47, it is possible to use a sphere holding plate moving distance limiting means (one protrusion) 48 having a simple configuration.

  For example, when the movable plate 44 of the sub-support unit 41 in FIG. 5 is linearly moved in the right direction in the drawing, a plurality of spheres 43 roll to hold the spheres 43. 47 and move in the right direction in the figure.

The spherical body holding plate 47 can move linearly until the inner surface of the opening 47 a comes into contact with the protrusion 48 (that is, the spherical body holding plate moving distance limiting means) 48 of the support plate 42. Accordingly, the movable distance of the sphere holding plate 47 is equal to the distance D ₃ between the inner surface of the opening 47 a of the sphere holding plate 47 and the outer peripheral surface of the protrusion 48. Accordingly, the moving distance of the spherical body 43 held by the ball holding plate 47 is also equal to the distance D _3. On the other hand, the movable plate 44 linearly moves at a distance twice as long as the moving distance of the sphere 43 while being supported by the rolling spheres 43. Accordingly, the moving distance of the movable plate 44 is equal to twice the distance of the distance D _3.

Thus, since the sub-support unit 41 does not include the lower movable plate or the support column, the movable plate 44 can be linearly moved over a longer distance than the upper movable plate of the main support unit. For example, the movable distance (2 × D ₃ ) of the movable plate 44 of the sub-support unit 41 in FIG. 5 is approximately 2.7 times the movable distance D ₁ of the upper movable plate 24 of the main support unit 21 in FIG. Also become.

However, since the table plate 13 is supported by the main support unit 21 at the bottom center as shown in FIG. 1, the movable distance when the table plate 13 is linearly moved is the distance D ₁ (or the distance) as described above. D ₂ ).

On the other hand, as described above, the main support unit 21 does not hinder the rotational movement around the column 26 of the table plate 13. Therefore, when the table plate 13 is rotated, for example, the movable plate 44 of the sub-support unit 41 (disposed in the upper right corner of the base 11 in FIG. 1) shown in FIG. 4 and FIG. moves along the arrow 47b in which the plate 47 is filled in Figure 4, to the inner surface of the opening 47a is in contact with the protrusion (ball holding plate moving distance limiting means) 48, at a long distance (to the distance D ₃ Can be swiveled (at approximately equal distances). For this reason, the table board 13 can be rotationally moved at a large angle.

  Thus, in the sliding table 10 of this invention shown in FIGS. 1-5, each sub-support which supports the circumference | surroundings of the center of the lower surface of the table board 13 (part which moves largely when the table board 13 rotates). The unit 41 includes a movable plate 44 that can slide over a longer distance than the main support unit 21. For this reason, the sliding table 10 can rotate the table plate 13 at a large angle even when the size of the table plate 13 is large.

  The driving method of the table plate of the sliding table of the present invention is the same as that of a known sliding table, for example, the sliding table of each of the above-mentioned patent documents. In the following, the method for driving the table plate 13 of the sliding table 10 of FIG. 1 will be described using the driving devices 60a to 60c shown in FIGS. 1, 6, and 7 as representative examples.

  For example, a total of three driving devices 60a, 60b, and 60c are connected to the sliding table 10 shown in FIG. The configurations of the driving devices 60a, 60b, 60c are the same. Below, the structure of the drive device 60a is demonstrated.

  6 is an enlarged view of the vicinity of the drive device 60a shown in FIG. 1, and FIG. 7 is a view of the vicinity of the drive device 60a of FIG.

  The driving device 60 a is installed on the auxiliary table 11 a fixed to the side surface of the base 11 of the sliding table 10.

  The drive device 60a is fitted around the screw shaft 63a with a rotation drive device (typical example, a stepping motor) 61, a screw shaft 63a connected to the rotation shaft 61a of the rotation drive device 61 via a coupling 62, and the screw shaft 63a. A feed screw 63 including a nut 63b is provided.

  The screw shaft 63a of the feed screw 63 is rotatably supported by rotary bearings 64a and 64b installed on the auxiliary base 11a. On the other hand, two rods 65 are connected to the nut 63 b of the feed screw 63. Each rod 65 is supported by a linear motion bearing 66 installed on the auxiliary base 11a so as to be slidable in the length direction.

  A shaft body 68 is rotatably supported at the tips of the two rods 65 via a pair of rotary bearings 67. A linear guide 69 including a rail 69a and a slider 69b is supported on the shaft body 68 so as to be swingable. The rail 69 a of the linear guide 69 is fixed to the table plate 13 via the connection member 71.

  For example, the rotation shaft 61a of the rotation drive device 61 is rotated together with the screw shaft 63a of the feed screw 63, and the nut 63b fitted to the screw shaft 63a is moved in the X-axis direction (right side in the drawing), thereby The connecting member 71 connected to 63b via the rod 65 can be moved in the X-axis direction. By rotating the rotation shaft 61a of the rotation drive device 61 in the direction opposite to the rotation direction, the connection member 71 can be moved in the direction opposite to the X-axis direction (the left direction in the drawing).

  Then, the table plate 13 can be moved in the X-axis direction by moving the connecting members 71 of the driving devices 60a and 60b shown in FIG. 1 at the same distance in the X-axis direction. At this time, the rail 69a of the linear guide 69 fixed to the connecting member 71 of the driving device 60c moves in the X-axis direction while being supported by the slider 69b. For this reason, the drive device 60c does not hinder the movement of the table plate 13 in the X-axis direction.

  Further, the table plate 13 can be moved in the Y-axis direction by moving the connecting member 71 of the driving device 60c in the Y-axis direction. At this time, the rail 69a of the linear guide 69 fixed to each connecting member 71 of the driving devices 60a and 60b moves in the Y-axis direction while being supported by the slider 69b. For this reason, the drive devices 60a and 60b do not hinder the movement of the table plate 13 in the Y-axis direction.

  Furthermore, by moving the connecting member 71 of the driving device 60a in the direction opposite to the X-axis direction and the connecting member 71 of the driving device 60b in the X-axis direction at an equal distance from each other, the table plate 13 is moved to FIG. It can be rotated in the written θ direction. At this time, the linear guide 69 fixed to the connecting member 71 of the driving device 60c is centered on the shaft provided between the linear guide 69 and the rod 65 in accordance with the rotational movement angle of the table plate 13. Swing as. For this reason, the drive device 60c does not hinder the rotational movement of the table plate 13 in the θ direction.

  As described above, the sliding table 10 supports the periphery of the center of the lower surface of the table plate 13 (the portion that moves greatly when the table plate 13 rotates), and each sub-support unit 41 includes the main support unit 21. Since the movable plate 44 is slidable at a longer distance than the table plate 13, the table plate 13 can be rotated at a large angle even when the size of the table plate 13 is large.

  FIG. 8 is a cross-sectional view showing another configuration example of the main support unit.

  The main support unit 81 shown in FIG. 8 is configured such that the support plate 22 and the base 51 are fixed via the spacer 28 so that the lower movable plate 25 does not contact the base 51. Is the same as the main support unit 21 of FIG.

  When the main support unit 81 is used, it is not necessary to form an opening for accommodating the lower movable plate 25 in the base 51.

  FIG. 9 is a cross-sectional view showing still another configuration example of the main support unit. However, the base 51 and the table plate 13 are shown in FIG.

  The main support unit 91 shown in FIG. 9 satisfies the above-mentioned conditions (2) and (b), and includes a support plate 32 having a support 36 fixed to the base 51 at the center of the lower surface, and a support plate. A first movable plate 34 having an opening 34a that is arranged in contact with the surface of the support column 36 through a plurality of spheres 23 and through which the support column 36 passes in the center, and a plurality of surfaces on the opposite surface of the support plate 32. A second movable plate 35 disposed in contact with each other through the spheres 23, a connection member 38 that connects the first movable plate 34 and the second movable plate 35 around the support plate 32, and the support plate 32. And a sphere holding plate 37 that rotatably holds a plurality of spheres 23 between the movable plates.

  The main support unit 91 also slides with the first movable plate 34 and the second movable plate 35 in a state where the support plate 32 is tightly sandwiched via the plurality of spheres 23, so the second movable plate 35. Inclination movement of the table plate 13 supported and fixed to is suppressed.

  For example, the main support unit 91 connects the peripheral portions of the first movable plate 34 and the second movable plate 35 via the connection member 38 without gaps, thereby allowing dust between the support plate 32 and each movable plate. Intrusion of dust and dust can be suppressed.

  The second movable plate 35 of the main support unit 91 of FIG. 9 can be linearly moved, for example, in the right direction in the drawing until the connection member 38 contacts the support plate 32.

Therefore, the movable distance of the table plate 13 supported and fixed to the second movable plate 35 is equal to the distance D ₄ between the inner surface of the connection member 38 and the end surface of the support plate 32. Incidentally, than the distance D _4, the smaller the better the distance D ₅ between the outer peripheral surface of the inner surface and the post 36 of the opening 34a of the first movable plate 34, the moving distance of the table plate 13 is equal to the distance D ₅ .

  On the other hand, when the second movable plate 35 of the main support unit 91 is rotated about the support column 36, the connection member 38 and the support plate 32 are in contact with each other, or the first movable plate 34 and the support column 36 are in contact with each other. Never do. Therefore, the main support unit 91 does not hinder the rotational movement around the column 36 of the table plate 13.

  In addition, the support | pillar of the main support unit which satisfies the conditions of said (2) (b) can also be fixed to a table board.

  FIG. 10 is a partially cutaway plan view showing another configuration example of the sliding table of the present invention.

  The configuration of the sliding table 100 of FIG. 10 is the same as that of the sliding table 10 of FIG. 1 except that the shapes of the base 101 and the table plate 103 are different and the number of sub-support units is two.

  The number of sub-support units of the sliding table of the present invention is preferably in the range of 2 to 10, more preferably in the range of 2 to 4.

DESCRIPTION OF SYMBOLS 10 Sliding table 11 Base 11a Auxiliary base 11b Opening part 13 Table board 21 Main support unit 22 Support plate 22a Opening part 23 Sphere 24 Upper movable plate 25 Lower movable plate 26 Column 27 Sphere holding plate 28 Spacer 31 Main support unit 32 Support Plate 34 First movable plate 34a Opening portion 35 Second movable plate 36 Support column 37 Sphere holding plate 38 Connection member 41 Sub support unit 42 Support plate 43 Sphere 44 Movable plate 47 Sphere holding plate 47a Opening portion 47b Movement direction of sphere holding plate 47 48 indicating the movement distance limiting means (protrusion) of the spherical body holding plate
51 Base 60a, 60b, 60c Drive device 61 Rotation drive device 61a Rotating shaft 62 Coupling 63 Feed screw 63a Screw shaft 63b Nut 64a, 64b Rotating bearing 65 Rod 66 Linear motion bearing 67 Rotating bearing 68 Shaft body 69 Linear guide 69a Rail 69b Slider 71 Connecting member 81, 91 Main support unit 100 Sliding table 101 Base 103 Table plate

Claims (4)

A sliding table including a base and a table plate slidably supported on the base via a support device that satisfies the following conditions (1) to (3):
(1) The support device includes a main support unit arranged at the center of the lower surface of the table plate and a plurality of sub support units arranged around the main support unit;
(2) (a) The main support unit is in contact with a support plate having an opening at the center fixed to a base or a table plate, and a plurality of spheres on the upper and lower surfaces of the support plate. An upper movable plate and a lower movable plate that are arranged and connected to each other via a support post that passes through the opening of the support plate, and a plurality of spheres between the support plate and each movable plate are rotatably held. (B) The main support unit includes a support plate having a support fixed to a base or a table plate at the center of one of the upper and lower surfaces, and the support plate side of the support plate. A first movable plate having an opening through which the support column passes in the center and a surface opposite to the support plate via a plurality of spheres. The second movable plate, the first movable plate and the second movable plate around the support plate A connecting member connected to each other, and a sphere holding plate that rotatably holds a plurality of spheres between the support plate and each movable plate; and (3) each of the sub-supporting units is a base A support plate fixed to the support plate, a movable plate disposed in contact with the upper surface of the support plate via a plurality of spheres, and a sphere holder for rotatably holding a plurality of spheres between the support plate and the movable plate And a means for limiting the moving distance of the spherical body holding plate.   An opening is provided in the center of the sphere holding plate of each sub-support unit, and means for limiting the movement distance of the sphere holding plate is associated with the opening of the sphere holding plate provided on the upper surface of the support plate. The sliding table according to claim 1, wherein the sliding table is a mating projection.   The main support unit satisfies the above conditions (2) (b), the support plate of the main support unit is fixed to the base, and the lower movable plate of the main support unit is accommodated in the base The sliding table according to claim 1, further comprising an opening that is configured to be opened.   The main support unit satisfies the above condition (2) (a), the support plate of the main support unit is fixed to the base, and the support plate and the base are fixed to the base. The sliding table according to claim 1 or 2, wherein the sliding table is formed through a spacer so that the lower movable plate does not come into contact with the lower movable plate.

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