JP2010153644A - Elevating table - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an elevating table in which the inclination and movement of surface of a table panel is inhibited. <P>SOLUTION: The elevating table includes: a base mount (11); an elevating apparatus (12) which is installed on the base mount; a shaft body (14) in which a lower end is fixed to the elevating apparatus through a movable connection tool (41), and which supports a table panel (13) at an upper end; and a direct acting bearing (17) which is supported by a support (15) erected around the elevating apparatus on the base mount and has an outer case (16) which accommodates the shaft body so that it moves up and down. The movable connection tool consists of: a slide unit which has a support plate fixed to the elevating apparatus and a movable plate supported so as to be slidable on the support plate through a plurality of spheres; and a spherical bearing which has a housing which is fixed to the movable plate and has a spherical cavity which opens in upper part, a solid sphere accommodated in the cavity, and a support shaft which is provided in a top of the sphere and is fixed to the lower end of the shaft body through the opening of the housing. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a lifting table that can be used particularly advantageously for positioning an inspection object that requires a precise visual inspection.

  The lift table is widely used for positioning an inspection object that requires a precise visual inspection, such as an integrated circuit board having a fine electric wiring pattern formed on the surface thereof.

  The appearance inspection of the inspection object is performed based on an image obtained by imaging the surface of the inspection object with an inspection device such as a CCD (charge coupled device) camera.

  In order to obtain a clear image of the surface of the inspection object, it is necessary to precisely match the focus of the CCD camera of the inspection apparatus with the surface of the inspection object. For this reason, the inspection object is placed on the surface of the table plate included in the lifting table and is precisely moved up and down (lifted) together with the table plate.

For example, in Patent Document 1, a slide member having a slope on the top surface and a slide member on the bottom surface, which is slidably disposed on a base (base) via a linear guide device (linear guide). Elevating table (moving stage) comprising a table plate (table) having a slanted face opposed to a slanted surface via a linear motion guide device, and a linear motion drive device (micrometer head) connected to the slide member ) Is disclosed.
JP 2000-343357 (FIG. 7)

  The lifting table requires that the table plate be lifted and lowered precisely without tilting the surface of the table plate. When the surface of the table plate is tilted during elevation, the surface of the inspection object placed on the surface of the table plate is simultaneously tilted and moved. For this reason, the focus of the CCD camera of the inspection apparatus cannot be precisely matched with the surface of the inspection object, and the appearance of the inspection object cannot be inspected with sufficiently high accuracy.

  In recent years, the pattern of electrical wiring on an integrated circuit board has been set to an extremely fine width. For this reason, the lifting table used for the appearance inspection of such an inspection object indicates that the angle of the inclination movement of the surface of the table plate when the table plate is raised or lowered shows a very small value, for example, a table plate In the case of raising, it is required that an angle formed by the surface of the table plate before and after the elevation (hereinafter referred to as an inclination movement angle of the table plate) is an angle of several μ radians or less.

  The lifting table of the above-mentioned patent document 1 has an accuracy of manufacturing each component such as a slide member, a drive shaft (micrometer head) of a linear motion drive device and a straight advanceability of each linear motion guide device, and mounting when assembling them. It is easily affected by the accuracy of the position, and therefore it is difficult to set the angle of the tilt movement of the table plate to such an extremely small value as described above.

  The subject of this invention is providing the raising / lowering table in which the inclination movement of the surface of a table board was suppressed.

  The present invention relates to a base, a lifting device installed on the base, a shaft having a lower end fixed to the lifting device via a movable connector, and supporting a table plate at the upper end, on the base Including a linear motion bearing having an outer cylinder that is supported by a support column provided upright around the lifting and lowering device and that accommodates the shaft body so as to be movable up and down, and the movable connector is fixed to the lifting and lowering device. A slide unit having a support plate and a movable plate slidably supported on the support plate via a plurality of spheres, and a housing having a spherical cavity opening upward and fixed to the movable plate And an elevating table comprising a spherical bearing having a spherical body accommodated in the hollow portion and a support shaft which is provided at the top of the spherical body and which is fixed to the lower end portion of the shaft body through the opening of the housing. It is in.

  In this manner, a spherical bearing connected to the lower end of the shaft body is hereinafter referred to as a spherical bearing support type lifting table.

Preferred embodiments of the lifting table (spherical bearing support type) of the present invention are as follows.
(1) A cylindrical shape in which a plurality of columnar rolling elements are rotatably held between an outer cylinder and a shaft body with each rolling element partially protruding to the inner peripheral surface side and the outer peripheral surface side. And three or more linear grooves accommodating the respective rolling elements protruding toward the inner peripheral surface of the cage are formed on the outer peripheral surface of the shaft body so as to be axially symmetrical with each other. Has been.
(2) The spherical body of the spherical bearing is accommodated in the hollow portion of the housing via a plurality of small spheres arranged along the surface.
(3) The movable plate of the slide unit is integrally formed on the periphery of the upper end portion of the housing of the spherical bearing.
(4) The lifting device is slidably disposed on the base, has a slide member having a slope inclined with respect to the surface of the table plate on the top surface, and is installed on the base and connected to the slide member And a lift member having a top surface fixed to the support plate of the slide unit and a bottom surface slidably disposed on the bottom surface of the slide member so as to be slidable.

  The present invention also provides a base, an elevating device installed on the base, a shaft body having a lower end fixed to the elevating device via a movable connector, and supporting a table plate at the upper end, and the base Including a linear motion bearing having an outer cylinder which is supported by a support column installed around the upper lifting device and movably accommodates the shaft body, and the movable connector is fixed to the lifting device A spherical bearing having a support shaft, a sphere provided on an upper portion of the support shaft, a housing having a spherical cavity opening downward and accommodating the support shaft and the sphere, and fixed to the housing There is also an elevating table comprising a slide unit having a support plate and a movable plate fixed to the lower end portion of the shaft body, which is slidably supported on the support plate via a plurality of spheres.

  In this way, the slide unit connected to the lower end of the shaft body is hereinafter referred to as a slide unit support type lifting table.

The preferable aspect of the raising / lowering table (slide unit support type) of this invention is as follows.
(1) A cylindrical shape in which a plurality of columnar rolling elements are rotatably held between an outer cylinder and a shaft body with each rolling element partially protruding to the inner peripheral surface side and the outer peripheral surface side. And three or more linear grooves accommodating the respective rolling elements protruding toward the inner peripheral surface of the cage are formed on the outer peripheral surface of the shaft body so as to be axially symmetrical with each other. Has been.
(2) The spherical body of the spherical bearing is accommodated in the hollow portion of the housing via a plurality of small spheres arranged along the surface.
(3) The support plate of the slide unit is integrally formed on the periphery of the lower end portion of the spherical bearing housing.
(4) The lifting device is slidably disposed on the base, has a slide member having a slope inclined with respect to the surface of the table plate on the top surface, and is installed on the base and connected to the slide member And a lifting member having a top surface fixed to the support shaft of the spherical bearing and having a slope on the bottom surface slidably opposed to the slope of the slide member.

  In the lifting table of the present invention, the shaft body that supports the table plate is tightly supported inside the outer cylinder of the linear motion bearing, and the shaft body is moved up and down by a lifting device connected via a predetermined movable connector. Therefore, the table plate is moved up and down with extremely high accuracy, and the tilt movement of the surface of the table plate is suppressed.

  The lifting table of the present invention will be described with reference to the accompanying drawings.

  FIG. 1 is a front view showing a configuration example of a lifting table according to the present invention. FIG. 2 is a cross-sectional view showing the configuration of the movable connector 41 shown in FIG. FIG. 3 is a plan view of the lifting table 10 of FIG. FIG. 4 is a view showing a state where the table plate 13 of the lifting table 10 of FIG. 1 is raised. 5 is a cross-sectional view of the linear motion bearing 17 and the shaft body 14 cut along the cutting line VV entered in FIG.

  1 to 5, a lifting table (spherical bearing support type) 10 includes a base 11, a lifting device 12 installed on the base 11, and a lower end fixed to the lifting device 12 via a movable connector 41. The shaft body is supported by the shaft body 14 supporting the table plate 13 at the upper end, and the support columns 15, 15, which are erected around the lifting device 12 on the base 11. The linear movement bearing 17 etc. which have the outer cylinder 16 which accommodates 14 so that 14 can be moved up and down are comprised.

  The movable connector 41 of the lift table 10 includes a support plate 42 fixed to the lift device 12, and a movable plate 44 slidably supported on the support plate 42 via a plurality of spheres 43, 43,. A housing 46 having a spherical cavity 46 a that opens upward, fixed to the movable plate 44, a sphere 47 accommodated in the cavity 46 a, and a top of the sphere 47. A spherical bearing 49 having a support shaft 48 fixed to the lower end portion of the shaft body 14 through the opening 46b of the housing 46 is provided.

  The support plate 42 of the slide unit 45 is fixed to the elevating member 20 of the elevating device 12 via a cylindrical connection member 51. On the other hand, the movable plate 44 can be slid in any direction along the surface (horizontal plane) of the support plate 42 by rolling of a plurality of spheres 43, 43 arranged on the support plate 42.

  When the plurality of spheres 43, 43, ... contact (collision) with each other, the rolling of the sphere 43 stops and the smooth movement of the movable plate 44 is prevented. For this reason, between the support plate 42 and the movable plate 44, a sphere holder 52 including a plurality of through holes 52a, 52a,... That individually accommodate and hold a plurality of spheres 43, 43,. It is preferable. Each spherical body 43 is accommodated and held in each through hole 52a of the spherical body holder 52 in a rotatable state. The spherical body holder 52 is not fixed to the support plate 42. Accordingly, when the plurality of spheres 43, 43,... Roll, they move on the support plate 42 together with these rolling bodies.

  Further, on the side opposite to the movable plate 44 side of the support plate 42, an auxiliary plate 54 connected and fixed to the movable plate 44 is provided via a plurality of spheres 53, 53,. Preferably it is. By tightening and fixing the auxiliary plate 54 to the movable plate 44 with the bolt 55, the movable plate 44 is tightly supported in a slidable state on the support plate 42 via the plurality of spheres 43, 43,. . Thereby, since the inclination movement of the movable plate 44 is suppressed, it becomes possible to move very precisely along the surface (horizontal plane) of the support plate 42. It is more preferable that a sphere holder 57 having a plurality of through holes for individually accommodating and holding the spheres 53, 53,... Is disposed between the support plate 42 and the auxiliary plate 54.

  A spherical bearing 49 is fixed to the movable plate 44 of the slide unit 45. Therefore, the spherical bearing 49 is also slidable in any direction along the surface (horizontal plane) of the support plate 42.

  The spherical bearing 49 includes a housing 46 fixed to the movable plate 44, a sphere 47 accommodated in a spherical cavity 46 a of the housing 46, and a support shaft 48 provided on the top of the sphere 47.

  The support shaft 48 is fixed to the lower end portion of the shaft body 14 through the opening 46 b of the housing 46. The support shaft 48 can swing together with the sphere 47.

  The spherical body 47 of the spherical bearing 49 is preferably accommodated in the hollow portion 46a of the housing 46 through a plurality of small balls 56, 56,. As a result, the sphere 47 is tightly accommodated and supported in the hollow portion 46a of the housing 46 via the plurality of small spheres 56, 56,..., So that the support shaft 48 provided in the sphere 47 swings precisely. (Unstable swinging of the support shaft 48 due to the fine movement of the sphere 47 inside the hollow portion 46a is suppressed).

  In addition, the movable plate 44 of the slide unit 45 is preferably formed integrally with the periphery of the upper end portion of the housing 46 of the spherical bearing 49. Thereby, the height (namely, raising / lowering table 10) of the movable connection tool 41 can be made low.

  As described above, when the shaft body 14 accommodated and supported by the outer cylinder 16 of the linear motion bearing 17 is moved up and down (lifted / lowered) using the lifting / lowering device 12 connected via the movable connector 41, this shaft The body 14 moves up and down with extremely high accuracy, and the tilt movement of the table plate 13 supported by the shaft body 14 is suppressed. The reason is understood as follows.

  As represented by the lifting table of Patent Document 1, in the conventional lifting table, the lifting device is directly connected and fixed to the table plate. For this reason, the movement accuracy of the lifting device in the vertical direction or the vibration during the operation of the lifting device immediately affects the lifting accuracy of the table plate. Therefore, it is difficult to raise and lower the table plate with extremely high accuracy, that is, to suppress a minute tilt movement of the surface of the table plate, unless an elevator device with extremely high accuracy and low vibration is used.

  On the other hand, in the lifting table 10 of the present invention, the shaft body 14 and the lifting device 12 are flexibly connected via the movable connector 41.

  The connection tool 41 is affected by the upper surface of the elevating member 20 of the elevating device 12 being affected by, for example, the accuracy of the vertical movement of the elevating member 20 of the elevating device 12 or the vibration during the operation of the linear drive device 19. In response to the fine movement (or fine vibration) in the horizontal direction or the tilt movement (or swing vibration), the fine movement (or fine vibration) in the horizontal direction is applied to the movable plate 44 of the slide unit 45. Absorbed by the movement, and inclined movement (or swing vibration) is absorbed by the swing of the support shaft 48 of the spherical bearing 49. That is, the connection tool 41 selectively transmits only the driving force in the vertical direction of the lifting device 12 to the shaft body 14. For this reason, the shaft body 14 moves up and down (up and down) with extremely high accuracy in a state in which the shaft body 14 is tightly supported inside the outer cylinder 16 of the linear motion bearing 17. At the same time, the table plate 13 also moves up and down with extremely high accuracy, so that the inclined movement of the surface of the table plate 13 is extremely reduced.

  More specifically, even if the shaft body that supports the table plate is closely supported inside the outer cylinder of the linear motion bearing as described above, the shaft body can be lifted and lowered without using a movable connector. When driven, it is difficult to raise the accuracy of raising and lowering the table plate to some extent. This is because the vertical movement of the lifting member of the lifting device as described above (hereinafter referred to as the lifting accuracy of the lifting device) or the vibration during the operation of the linear drive device is caused through the shaft body. In addition to affecting the accuracy of raising and lowering the table plate, stress is generated in the shaft body that is tightly housed and supported inside the outer cylinder of the linear motion bearing. This is because the shaft body is not sufficiently supported by the dynamic bearing, that is, the high performance inherent in the linear bearing (the ability to move the shaft straight ahead with high accuracy) cannot be fully exhibited.

  In the lifting table 10 of the present invention, the lifting / lowering accuracy of the lifting / lowering device 12 is driven by driving the shaft body 14 supporting the table plate 13 by the lifting / lowering device 12 flexibly connected to the shaft body 14 via the movable connector 41. Or it suppresses that the vibration at the time of the action | operation of the linear motion drive device 19 influences the raising / lowering precision of the table board 13, and suppresses generation | occurrence | production of the bending of the shaft body 14 with this, and the linear motion bearing 17 has high originally By fully exhibiting the performance, the table plate 13 can be moved up and down with extremely high accuracy, that is, the tilt movement of the surface of the table plate 13 can be suppressed.

  For example, in the elevating table 10 of FIG. 1, the arrangement of the surface of the table board 13 at the reference position and the arrangement of the surface of the table board 13 (at the ascending position) when the table board is raised by a distance of 30 mm, respectively. The measurement was performed using a laser-side length gauge, and the angle formed by the former surface and the latter surface (angle of inclination movement) was calculated to be about 3 μradians. This means that a portion located 150 mm from the center position of the table plate 13 moves only 0.4 μm in the vertical direction. Thus, the lifting table 10 of the present invention can lift and lower the table plate 13 with extremely high accuracy, and can extremely reduce the tilt movement of the surface of the table plate 13.

  Below, the structure of the raising / lowering table 10 of this invention is demonstrated in detail.

  The lifting and lowering device 12 is slidably disposed on the base 11, and is installed on the base 11, the slide member 18 having a slope 18 a inclined to the surface of the table plate 13 on the top surface, The linear drive device 19 connected to the slide member 18 and the top surface are fixed to the support plate 42 of the slide unit 45, and the inclined surface 20a is slidably disposed on the bottom surface of the slide member 18 so as to be slidable. It is comprised from the raising / lowering member 20 which has.

  The slide member 18 is slidable along the surface of the base 11 by a linear guide device 21 installed on the base 11. The linear motion guide device 21 includes a rail 21a and a slider 21b mounted on the rail 21a so as to be slidable in the length direction. The slider 21 b is fixed to the bottom surface of the slide member 18.

  The inclined surface 20 a of the elevating member 20 can be slid along the inclined surface 18 a by a linear motion guide device 22 fixed to the inclined surface 18 a of the slide member 18. The linear motion guide device 22 includes a rail 22a and a slider 22b that is slidably mounted on the rail 22a in the length direction. The rail 22 a is fixed to the inclined surface 20 a of the elevating member 20, and the slider 22 b is fixed to the inclined surface 18 a of the slide member 18.

  The elevating member 20 can be moved up and down (moved up and down) by a linear motion guide device 23 provided on an upper portion of a frame 11 a installed on the base 11. The linear motion guide device 23 includes a rail 23a and a slider 23b mounted on the rail 23a so as to be slidable in the length direction. The rail 23a is fixed to the side surface of the elevating member 20, and the slider 23b is fixed to the side surface of the frame 11b.

  The linear drive device 19 includes a rotation drive device 24 and a feed screw 25 connected to the rotation shaft 24 a of the rotation drive device 24. The feed screw 25 includes a screw shaft 25a connected to the rotation shaft 24a of the rotary drive device 24, and a nut 25b fitted around the screw shaft 25a.

  The nut 25 b of the feed screw 25 is fixed to the side surface of the slide member 18, and the screw shaft 25 a is accommodated in the through hole 18 b of the slide member 18. The diameter of the through hole 18b is set to be larger than the diameter of the screw shaft 25a.

  And the raising / lowering member 20 of the raising / lowering apparatus 12 can be raised (moved upward) as follows, for example.

  First, the rotary drive device 24 of the elevating table 10 shown in FIG. 1 is operated, and the rotary shaft 24a is rotated together with the screw shaft 25a of the feed screw 25, whereby the nut 25b is moved backward together with the slide member 18 (right side in the figure). Move in the direction). By this movement of the slide member 18, the elevating member 20 moves (rises) upward along the length direction of the rail 23a of the linear guide device 23 as shown in FIG. On the contrary, if the slide member 18 is moved forward (moved in the left direction in the figure), the elevating member 20 can be moved downward (lowered).

  The elevating device 12 shown in FIG. 1 is a ratio of the moving amount of the elevating member 20 in the vertical direction to the driving amount of the rotating shaft 24a of the rotation driving device 24 (that is, the moving amount of the nut 25b in the length direction of the screw shaft 25a). Can be set to a small value by setting the angle of the inclined surface 18a of the slide member 18. For this reason, the elevating member 20 can be moved up and down (positioned) together with the shaft body 14 and the table plate 13 with high resolution. In addition, since each of the rotation drive device 24 and the feed screw 25 is disposed sideways, the height of the lifting table 10 can be reduced.

  In the lifting table of the present invention, a known lifting device can be used instead of the lifting device 12 of FIG. For example, a linear drive device having the same configuration as that of the linear drive device 19, that is, a rotary drive device and a feed screw are installed vertically on a base, and a nut of the feed screw is attached using an appropriate connector. This linear drive device can also be used as a lifting device by being fixed to the shaft body via a movable connector.

  In the lifting table 10 of FIG. 1, the shaft member 14 connected to the lifting device 12 via the movable connector 41 can be lifted and lowered together with the table plate 13 by lifting the lifting member 20 of the lifting device 12. it can.

  The shaft body 14 is accommodated and supported by the outer cylinder 16 of the linear motion bearing 17 in a state in which the shaft body 14 can move up and down (up and down). The shaft body 14 is formed of, for example, a metal material typified by aluminum or steel (eg, stainless steel).

  Between the outer cylinder 16 and the shaft body 14 of the linear motion bearing 17, a plurality of columnar rolling elements 26 can be rotated in a state where each rolling element 26 is partially protruded to the inner peripheral surface side and the outer peripheral surface side. A cylindrical rolling element holder 27 is provided on the outer peripheral surface of the shaft body 14, and each rolling element 26 protruding toward the inner peripheral surface side of the holder 27 is accommodated in the outer peripheral surface of the shaft body 3. More than (for example, nine) linear grooves 14a, 14a, 14a,...

  When such a linear motion bearing 17 and the shaft body 14 are used, each columnar rolling element 26 rolls along the length direction of the groove 14a, so that the shaft body 14 (that is, the table plate 13) is moved in the vertical direction. The movement accuracy becomes extremely high, and at the same time, rotation in the circumferential direction is prevented. Further, since the contact area between each columnar rolling element 26 and the outer cylinder 16 or the shaft body 14 becomes larger than when a spherical rolling element is used, the load resistance of the lifting table 10 is improved. Then, as described above, the shaft body 14 is driven by the elevating device 12 via the movable connector 41, so that the high performance inherent in the linear bearing 17 (the ability to straighten the shaft body 14 with high accuracy). Therefore, the shaft body 14 can be moved up and down with the table plate 13 with extremely high accuracy, that is, the tilt movement of the table plate 13 can be effectively suppressed.

  In order to stably support the shaft body 14 with the outer cylinder 16, at least three linear grooves 14 a, 14 a, 14 a,. As the number of the linear grooves 14a increases, the shaft body 14 is supported by the outer cylinder 16 via a larger number of rolling elements 26, so that the load resistance of the elevating table 10 is improved. It takes time to grind the linear groove 14 a of the body 14 and to drill a through hole that accommodates the rolling element 26 of the rolling element holder 27. Therefore, although the number of the linear grooves 14a depends on the magnitude of the load applied to the lifting table 10, it is usually set within a range of 3 to 30.

  On the outer peripheral surface of the shaft body 14, it is preferable that odd (for example, nine) linear grooves 14a, 14a,. As a result, the plurality of linear grooves 14 a, 14 a ˜ of the shaft body 14 are arranged in a positional relationship in which any two of the grooves do not face each other in the diameter direction of the shaft body 14. With the arrangement of the linear grooves 14a, 14a,..., The movement accuracy (straightness) in the length direction of the shaft body 14 is further improved. The reason is understood as follows.

  When manufacturing the lifting table 10, it is difficult to machine the inner peripheral surface of the outer cylinder 16 of the linear motion bearing 17 or the linear groove 14a of the shaft body 14 into a precise shape. In particular, it is extremely difficult to precisely machine the linear groove 14a. Accordingly, fine irregularities are formed on each of the inner peripheral surface of the outer cylinder 16 and the bottom surface of the linear groove 14a. Due to such fine irregularities, the inner peripheral surface of the outer cylinder 16 and the bottom surface of the linear groove 14a. (Hereinafter referred to as the distance between the outer cylinder and the linear groove) slightly varies.

  For example, if two linear grooves are arranged so as to face each other in the diametrical direction of the shaft body, when the distance between the outer cylinder and one linear groove becomes narrower, Since the rolling element of the groove is strongly sandwiched between the outer cylinder and the linear groove, and at the same time, the shaft body slightly moves toward the other linear groove, the rolling element of the other linear groove is also connected to the outer cylinder. Strongly sandwiched between straight grooves. When the rolling element of the one linear groove is strongly sandwiched between the outer cylinder and the shaft at a position different from the center position in the length direction, the rolling element of the other linear groove is simultaneously Further, it is strongly sandwiched between the outer cylinder and the shaft at a position corresponding to the position. When the shaft body moves in this state, each columnar rolling element is arranged in a slightly inclined state inside the through hole of the rolling element cage, and both rolling elements are inclined with respect to the length direction of the shaft body. Since it tries to roll in the direction, the straightness of the shaft body tends to decrease.

  On the other hand, when the two linear grooves 14a, 14a are arranged in a positional relationship that does not oppose each other in the diameter direction of the shaft body 14, the distance between the outer cylinder 16 and the linear groove 14a is reduced. Even when the rolling element 26 is narrowed and sandwiched between the outer cylinder 16 and the groove 14a, the shaft body 14 moves to the side opposite to the side of the rolling element 26 (to the surface side where the rolling element does not exist). Therefore, the force with which the outer cylinder 16 and the groove 14a sandwich the rolling element 26 is reduced. For this reason, the inclination movement within the through-hole of the holder | retainer 27 of the rolling element 26 is suppressed. For this reason, the straight traveling property of the shaft body 14 is further improved.

  In each linear groove 14a, a plurality of columnar rolling elements 26 are disposed along the length direction thereof. The columnar rolling element 26 is made of, for example, a metal material typified by aluminum or steel (eg, stainless steel) or a ceramic material.

  As the number of columnar rolling elements 26 arranged in each linear groove 14a increases, the load resistance of the lifting table 10 improves, but on the other hand, a through hole for accommodating the rolling elements 26 of the rolling element holder 27 is formed. It takes time for processing. Therefore, the number of the columnar rolling elements 26 arranged in each linear groove 14a is usually set within a range of 3 to 30.

  It is preferable that the outer peripheral surface of the columnar rolling element 26 bulges so that the diameter at the center in the length direction of the rolling element 26 is maximized. Thus, the columnar rolling element 26 whose outer peripheral surface bulges is stabilized in an arrangement in which the central axis is orthogonal to the length direction of the linear groove 14a, and thus the straightness of the shaft body 14 is further improved.

  The rolling element holder 27 prevents the columnar rolling elements adjacent to each other in the length direction of the groove 14a of the shaft body 14 from contacting (collising) with each other. When the columnar rolling elements come into contact with each other, the rolling of the columnar rolling elements is stopped, so that the shaft body 14 is prevented from smoothly moving in the length direction.

  In order to cause each columnar rolling element 26 to partially protrude toward the inner peripheral surface side and the outer peripheral surface side of the rolling element holder 27, the inner diameter of the holder 27 is set to a value larger than the diameter of the shaft body 14. The outer diameter is set to a value smaller than the inner diameter of the outer cylinder 16.

  The rolling element holder 27 is made of, for example, a metal material or a resin material. As the metal material, it is preferable to use a metal material that can be easily machined, for example, brass or stainless steel. As the resin material, it is preferable to use a resin material having high mechanical strength, for example, a polyacetal resin, a polyphenylene sulfide (PPS) resin, or a polyether ether ketone (PEEK) resin.

  The outer cylinder 16 is fitted around the rolling element holder 27 so as to be in contact with each rolling element 26 protruding toward the outer peripheral surface of the holder 27. The outer cylinder 16 is formed from, for example, a metal material typified by aluminum or steel (eg, stainless steel).

  In addition, as a linear motion bearing used for the raising / lowering table of this invention, the well-known linear motion bearing provided with the outer cylinder which accommodates the shaft body which supports a table board so that a movement up and down can be used. As described above, in the lifting table of the present invention, since the shaft body is driven by the lifting device via the movable connector, the high performance inherent in the linear bearing used (the ability to move the shaft straight with high accuracy) is achieved. It can be fully demonstrated. For this reason, it becomes possible to raise / lower the shaft body supported by the linear motion bearing with the table plate with extremely high accuracy, that is, to extremely reduce the tilt movement of the table plate.

  FIG. 6 is a cross-sectional view showing another configuration example of the movable connector.

  6 has a support plate 62 fixed to the lifting device 12 and a movable plate 64 supported on the support plate 62 through a plurality of spheres 43, 43,... A housing 66 having a spherical cavity 66 a that opens upward, fixed to the slide unit 65 and the movable plate 64, a sphere 47 accommodated in the cavity 66 a, and a top of the sphere 47 are provided. And a spherical bearing 69 having a support shaft 48 fixed to the lower end portion of the shaft body 14 through the opening 66b of the housing 66.

  The configuration of the movable connector 61 in FIG. 6 is the same as that of the movable connector 41 in FIG. 2 except that the slide unit 65 and the spherical bearing 69 are configured as independent components stacked one above the other.

  FIG. 7 is a cross-sectional view showing still another configuration example of the movable connector.

  7 has a support plate 72 fixed to the lifting device 12 and a movable plate 74 supported on the support plate 72 through a plurality of spheres 43, 43,... A slide unit 75 and a housing 66 having a spherical cavity 66a that opens upward, fixed to the movable plate 74, a sphere 47 accommodated in the cavity 66a, and a top of the sphere 47 are provided. And a spherical bearing 69 having a support shaft 48 fixed to the lower end portion of the shaft body 14 through the opening 66b of the housing 66.

  The configuration of the movable connector 71 in FIG. 7 is the same as that of the movable connector 61 in FIG. 6 except that the configuration of the slide unit 75 is different.

  The support plate 72 of the slide unit 75 is fixed to the lifting device 12 via a support column 79. On the opposite side of the support plate 72 from the movable plate 74 side, an auxiliary plate 54 connected and fixed to the movable plate 74 is provided via a plurality of spheres 53, 53. .

  FIG. 8 is a cross-sectional view showing still another configuration example of the movable connector.

  8 includes a support plate 82 fixed to the lifting device 12 and a movable plate 84 supported on the support plate 82 through a plurality of spheres 43, 43,... A housing 86 having a spherical cavity 86a that opens upward, fixed to the slide unit 85 and the movable plate 84, a sphere 87 accommodated in the cavity 86a, and a top of the sphere 87 are provided. And a spherical bearing 89 having a support shaft 48 fixed to the lower end portion of the shaft body 14 through the opening 86b of the housing 86.

  In the configuration of the movable connector 81 in FIG. 8, the slide unit 85 is not provided with an auxiliary plate, and the spherical body 87 of the spherical bearing 89 is accommodated in the cavity 86 a of the housing 86 without interposing a small ball. Except for this, it is the same as the movable connector 61 of FIG. The housing 86 includes a main body 88a and a lid 88b that are separable from each other in order to accommodate the sphere 87 in the cavity 86a.

  Similarly to the movable connector 41 of FIG. 2, the movable connectors 61, 71, 81 shown in FIGS. 6 to 8 also selectively apply only the driving force in the vertical direction of the lifting device 12 to the shaft body 14. Can communicate.

  Next, another configuration example of the lifting table of the present invention will be described.

  FIG. 9 is a cross-sectional view of an essential part showing a configuration example of a lifting table (slide unit support type) according to the present invention. In FIG. 9, the site | part of the vicinity of the movable connector 91 of the raising / lowering table 90 is shown.

  The configuration of the lifting table 90 in FIG. 9 is the same as that of the lifting table 10 in FIG. 1 except that the configuration of the movable connector 91 is different.

  The movable connection 91 of the lifting table 90 includes a support shaft 48 fixed to the lifting device 12, a sphere 47 provided on the upper portion of the support shaft 48, and the support shaft 48 and the sphere 47. A spherical bearing 49 having a housing 46 having a spherical cavity 46a that opens, a support plate 42 fixed to the housing 46, and a plurality of spherical bodies 43, 43,. And a slide unit 45 having a movable plate 44 fixed to the lower end portion of the shaft body 14 and the like.

  The movable plate 44 of the slide unit 45 is fixed to the shaft body 14 via a cylindrical connecting member 51. Further, the support plate 42 of the slide unit 45 is formed integrally with the peripheral edge of the lower end portion of the housing 46 of the spherical bearing 49 in order to reduce the height of the movable connector 91 (that is, the height of the lifting table 90).

  As the movable connector 91 of the lifting table 90 of FIG. 9, the movable connector 41 of the lifting table 10 of FIG. 2 is used with its vertical direction being reversed.

  The movable connector 91 can also selectively transmit only the driving force in the vertical direction of the lifting device 12 to the shaft body 14.

  Thus, for example, the movable connector 41 in FIG. 2, the movable connector 61 in FIG. 6, the movable connector 71 in FIG. 7, or the movable connector 81 in FIG. By arranging and using, the elevating table (slide unit support type) of the present invention can be configured.

  Since the operation and preferred mode of the slide unit support type lifting table are the same as those of the spherical bearing support type lifting table, further explanation is omitted.

It is a front view which shows the structural example of the raising / lowering table of this invention. It is sectional drawing which shows the structure of the movable connector 41 shown in FIG. It is a top view of the raising / lowering table 10 of FIG. It is a figure which shows the state which raised the table board 13 of the raising / lowering table 10 of FIG. It is sectional drawing of the linear bearing 17 and the shaft body 14 cut | disconnected along the cutting line VV line entered in FIG. It is sectional drawing which shows another structural example of a movable connection tool. It is sectional drawing which shows another example of a structure of a movable connection tool. It is sectional drawing which shows another example of a structure of a movable connection tool. It is principal part sectional drawing which shows another structural example of the raising / lowering table of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Lifting table 11 Base 11a Frame 12 Lifting device 13 Table board 14 Shaft body 14a Linear groove 15 Support | pillar 16 Outer cylinder 17 Linear motion bearing 18 Slide member 18a Slope 18b Through-hole 19 Linear motion drive device 20 Elevating member 20a Slope 21, 22, 23 Linear motion guide device 21a, 22a, 23a Rail 21b, 22b, 23b Slider 24 Rotation drive device 24a Rotating shaft 25 Feed screw 25a Screw shaft 25b Nut 26 Column rolling element 27 Rolling element holder 41 Movable connector 42 Support plate 43 spherical body 44 movable plate 45 slide unit 46 housing 46a hollow portion 46b opening 47 spherical body 48 support shaft 49 spherical bearing 51 connection member 52 spherical body holder 52a through hole 53 spherical body 54 auxiliary plate 55 bolt 56 small ball 57 spherical body holder 61 movable connection Tool 62 Support 64 movable plate 65 slide unit 66 housing 66a hollow portion 66b opening 69 spherical bearing 71 movable connector 72 support plate 74 movable plate 75 slide unit 79 support column 81 movable connector 82 support plate 84 movable plate 85 slide unit 86 housing 86a hollow portion 86b Opening 87 Sphere 88a Main body 88b Lid 89 Spherical bearing 90 Lifting table 91 Movable connector

Claims (10)

A base, a lifting device installed on the base, a lower end fixed to the lifting device via a movable connector, and a shaft body supporting the table plate at the upper end, a lifting device on the base Including a linear motion bearing having an outer cylinder that is supported by a support column that is erected around the shaft and that movably accommodates the shaft body;
The movable connector is fixed to the movable plate, a slide unit having a support plate fixed to the lifting device, a movable plate slidably supported on the support plate via a plurality of spheres, and the movable plate. A housing having a spherical cavity that opens upward, a sphere accommodated in the cavity, and fixed to the lower end of the shaft through the opening of the housing provided at the top of the sphere Lifting table comprising a spherical bearing having a supported shaft.   A cylindrical rolling element that holds a plurality of columnar rolling elements rotatably between the outer cylinder and the shaft body in a state in which each rolling element partially protrudes from the inner peripheral surface side and the outer peripheral surface side. A cage is provided, and three or more linear grooves are formed on the outer peripheral surface of the shaft body so as to be axially symmetrical with each other and accommodate each rolling element protruding toward the inner peripheral surface side of the cage. The lifting table according to claim 1.   The elevating table according to claim 1 or 2, wherein a spherical body of the spherical bearing is accommodated in a hollow portion of the housing via a plurality of small spheres arranged along a surface thereof.   The elevating table according to any one of claims 1 to 3, wherein the movable plate of the slide unit is integrally formed on the periphery of the upper end portion of the housing of the spherical bearing.   A lifting device is slidably disposed on the base, and a slide member having a slope inclined with respect to the surface of the table plate on the top surface is installed on the base and connected to the slide member The linear motion drive device and a lifting member having a top surface fixed to the support plate of the slide unit and having a slope on the bottom surface slidably opposed to the slope of the slide member. The lifting table according to any one of the items. A base, a lifting device installed on the base, a lower end fixed to the lifting device via a movable connector, and a shaft body supporting the table plate at the upper end, a lifting device on the base Including a linear motion bearing having an outer cylinder that is supported by a support column that is erected around the shaft and that movably accommodates the shaft body;
The movable connecting device includes a support shaft fixed to the elevating device, a sphere provided on an upper portion of the support shaft, and a housing having a spherical cavity opening downward, which accommodates the support shaft and the sphere. And a slide plate having a support plate fixed to the housing and a movable plate fixed to the lower end of the shaft body, which is slidably supported on the support plate via a plurality of spheres. Lifting table consisting of units.   A cylindrical rolling element that holds a plurality of columnar rolling elements rotatably between the outer cylinder and the shaft body in a state in which each rolling element partially protrudes from the inner peripheral surface side and the outer peripheral surface side. A cage is provided, and three or more linear grooves are formed on the outer peripheral surface of the shaft body so as to be axially symmetrical with each other and accommodate each rolling element protruding toward the inner peripheral surface side of the cage. The lifting table according to claim 6.   The elevating table according to claim 6 or 7, wherein a spherical body of the spherical bearing is accommodated in a hollow portion of the housing via a plurality of small spheres arranged along the surface thereof.   The lifting table according to any one of claims 6 to 8, wherein a support plate of the slide unit is integrally formed on a peripheral edge of a lower end portion of the housing of the spherical bearing.   A lifting device is slidably disposed on the base, and a slide member having a slope inclined with respect to the surface of the table plate on the top surface is installed on the base and connected to the slide member The linear motion drive device and a lifting member having a top surface fixed to the support shaft of the spherical bearing and having a slope on the bottom surface slidably opposed to the slope of the slide member. The lifting table according to any one of the items.

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