KR102435298B1 - Substrate support device - Google Patents

Abstract

The present invention relates to a substrate support apparatus, comprising: a stage on which a substrate is mounted; a lift bar module installed to pass through the stage in a vertical direction and having a lift bar for loading or unloading the substrate onto the stage; a guide part installed in a state of being in contact with a side surface of the lift bar at the lower part of the stage with the lift bar interposed therebetween, the guide part having a guide part supporting the lift bar; And it provides a substrate support device including a lift driving unit for raising and lowering the lifting frame supporting the plurality of lift bar modules.

Description

Substrate support device {SUBSTRATE SUPPORT DEVICE}

The present invention relates to a substrate support apparatus, and more particularly, to a substrate support apparatus capable of uniformly supporting a lower portion of a substrate through a plurality of lift bars so as to stably support the substrate on a stage.

In general, as a method for crystallizing a substrate or a thin film, there is a method of seating the substrate or thin film on a stage inside a chamber and annealing at a high temperature or depositing the thin film on the substrate at a high temperature. Such annealing of the substrate or thin film and the deposition of the thin film at a high temperature are collectively referred to as an 'annealing' process, and the thin film deposited on the substrate or substrate is referred to as a 'substrate' for convenience.

However, such annealing at a high temperature has a disadvantage in that the inside of the chamber is contaminated by a thermochemical reaction in a high temperature atmosphere, or an unnecessary compound is generated in the chamber, thereby causing contamination of the substrate.

In addition, the heat treatment uniformity is not constant due to the non-uniform temperature gradient, so that mura is formed on the substrate or thin film, or it takes a lot of time for the composition of a high-temperature atmosphere, so that the process cost is high, and the productivity is low.

Recently, a heat treatment method using a laser has been studied according to the trend of larger substrates and thinner plates. In particular, in the heat treatment method using an excimer laser, an excimer laser is irradiated on a substrate or thin film, and the substrate or thin film is instantaneously heated to crystallize. a way to induce

This laser heat treatment method has excellent annealing uniformity for the entire substrate or thin film, so it is easy to apply to a large-area substrate. In order to improve the stability of mass production, recent research is active.

In general, an apparatus for a laser heat treatment method includes a process chamber, a support device disposed inside the process chamber and on which a substrate is seated, a laser generator disposed outside the process chamber to generate a laser beam, and formed on one side of the process chamber A window that transmits the laser beam into the process chamber, and an optical system that is formed on the path of the laser beam from the outside of the process chamber and guides the laser beam into the process chamber through the window and irradiates it onto a substrate or thin film. do.

Here, the substrate support apparatus for supporting the substrate in the process chamber includes a stage on which the substrate is supported, and a plurality of lift bar modules that are provided to vertically penetrate the slits formed on the stage and ascend and descend. The lift bar of the lift bar module is installed so as to be able to elevate at the lower part of the stage, so that the lower part of the substrate can be uniformly supported.

On the other hand, when the entire area of the stage of the substrate support device comes into contact with the substrate without an empty space, the mura phenomenon due to hardware can be eliminated, but the lift bar of the substrate support device is formed to ascend and descend on the stage. Due to the slit, the mura phenomenon continues to occur.

Therefore, in order to remove the mura phenomenon in the lift bar receiving hole, there was a need to minimize the size of the lift bar receiving hole and also to minimize the thickness of the lift bar that goes up and down through the lift bar receiving hole.

For this reason, in the prior art, when the thickness of the lift bar is made thin, the lift bar is bent or broken and damaged by the load or external force caused by the board during the operation of elevating the board using the lift bar. There is a problem in that interference occurs due to contact with the ball, so it is inconvenient to periodically replace the lift bar.

Republic of Korea Patent Publication No. 2017-0104040 (2017.09.14)

Accordingly, the present invention has been devised to solve the above problems, and an object of the present invention is to prevent damage to a lift bar for loading or unloading a substrate, and to provide a substrate support device capable of extending the lifespan there is

In order to achieve the above object, the present invention provides a stage on which a substrate is mounted; a lift bar module installed to pass through the stage in a vertical direction and having a lift bar for loading or unloading the substrate onto the stage; a guide part installed in a state of being in contact with a side surface of the lift bar at the lower part of the stage with the lift bar interposed therebetween, the guide part having a guide part supporting the lift bar; And it provides a substrate support device including a lift driving unit for raising and lowering the lifting frame supporting the plurality of lift bar modules.

According to an embodiment of the present invention, the guide unit may include: a pair of rotating rollers installed to face each other with the lift bar interposed therebetween and rotating forward or reverse according to the movement of the lift bar while supporting the lift bar; and first and second fixing members installed on the bottom surface of the stage and to which the respective rotary rollers are axis-fixed.

According to an embodiment of the present invention, the elevating driving unit may include: a linear moving unit moving linearly by the power of the driving unit; and a plurality of elevating units for elevating and lowering the elevating frame while interlocking with the linear moving unit.

According to an embodiment of the present invention, the linear movement unit is made of a ball screw that converts a rotational motion into a linear motion by the power of the driving unit, and both ends are rotatably supported by the support unit.

According to an embodiment of the present invention, the lifting unit, the moving plate connected to the linear moving unit and the connecting body by a linear movable plate along the rail; an inclined plane disposed on the moving plate, having an inclined rail on an inclined surface, and linearly moving together with the moving plate; a movable body provided to be movable upward and downward along the inclined rail of the inclined plane; and a support body fixed to the movable body and moving up and down together with the movable body to support the elevating frame on an upper surface.

According to an embodiment of the present invention, a plurality of the lifting units are arranged in a line on both sides of a single linear moving unit under the stage, and each of the lifting units interlocked by the operation of the linear moving unit is interlocked through a connecting member. connected to be possible.

According to an embodiment of the present invention, the connecting member is linked to the moving plate of each of the lifting units to be interlocked with each other.

According to the substrate support apparatus according to the present invention having the configuration as described above, it is possible to prevent bending or breaking of the lift bar, and there is an effect of preventing interference caused by contact with the lift bar receiving hole while the lift bar is bent. .

In addition, there is an effect of preventing a failure in loading the lift bar with respect to the substrate by providing a single lifting driving unit for integrally raising and lowering the plurality of lift bars so that the plurality of lift bars can be simultaneously raised and lowered to the same height.

1 is a perspective view showing a substrate support apparatus according to the present invention.
2 is a view showing the main configuration of the lower stage of the substrate support apparatus according to the present invention.
3 is a cross-sectional view illustrating a guide unit installed on a lift bar of a substrate support apparatus according to the present invention.
4 is a perspective view showing a lift driving unit of the substrate support device according to the present invention.
FIG. 5 is a view showing an operation structure of the lift driving unit of FIG. 4 .

Since the present invention may have various changes and may have various forms, embodiments will be described in detail in the text. However, this is not intended to limit the present invention to a specific disclosed form, it should be understood to include all modifications, equivalents and substitutes included in the spirit and scope of the present invention. In describing each figure, like reference numerals have been used for like elements.

The above terms are used only for the purpose of distinguishing one component from another. The terms used in the present application are only used to describe specific embodiments, and are not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly dictates otherwise.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing a substrate support apparatus according to the present invention, Figure 2 is a view showing the main configuration of the lower stage of the substrate support apparatus according to the present invention, Figure 3 is installed on the lift bar of the substrate support apparatus according to the present invention It is sectional drawing which shows a guide part.

The substrate support apparatus 100 according to the present invention is installed on the box-shaped body 110 and is installed to penetrate the stage 120 on which the substrate 10 is seated, and the stage 120 in the vertical direction to penetrate the substrate 10 . ) includes a lift bar module 130 for loading or unloading, and a lift driving unit 150 for elevating the lift bar module 130 .

The substrate 10 is seated on the stage 120 in a state in which the substrate 10 to be annealed is accommodated in the process chamber. ) to raise the lift bar module 130 to protrude upwards of the stage 120 , so that the substrate 10 is seated on the lift bar module 130 .

Then, when the substrate 10 is seated on the lift bar module 130 , the lift bar module 130 is lowered by using the lift driving unit 150 to move the lift bar 131 to the stage ( 120) By being accommodated in the lower portion, the substrate 10 can be seated on the stage 120 .

As shown in FIG. 1 , the stage 120 is formed in a plate shape, and the stage 120 minimizes warp of the substrate 10 seated thereon and prevents air pockets. A certain pattern is provided on the upper part.

The predetermined pattern formed on the upper portion of the stage 120 includes a straight air vent channel (not shown) and a vacuum suction channel (not shown).

The air vent channel is formed to penetrate at least a part of the stage 120 in the vertical direction, and serves as a passage so that the gas remaining between the substrate 10 and the stage 120 can escape, and the vacuum suction channel is the stage ( 120) is formed to penetrate in the vertical direction, and serves to support the substrate 10 by a vacuum suction force.

In addition, a stage support 135 for supporting the front surface of the stage 120 along the circumference of the stage 120 may be installed.

In addition, a plurality of lift bar accommodating holes 121 are formed in the stage 120 so that the lift bar 131 of the lift bar module 130 penetrates in the vertical direction.

The lift bar module 130 serves to support the substrate 10 on the stage 120 , and includes a lift bar 131 formed to penetrate the lift bar receiving hole 121 of the stage 120 in the vertical direction; It includes a support unit 132 fixed to the elevating frame 160 to be described later while supporting the bar 131 .

The lift bar module 130 is provided over the entire area of the stage 120 , for example, a plurality of first lift bar modules 130a arranged in two rows facing each other in a straight direction at the edge of the stage 120 ; It may include a plurality of second lift bar modules 130b disposed in three rows in a straight line from the central portion of 120 . The arrangement position of the lift bar module 130 disposed on the stage 120 is not limited by the present invention, and various modifications may be made.

When the substrate 10 to be annealed to the substrate support apparatus 100 configured as described above is transported onto the stage 120 using a transport device, for example, a robot arm, the central portion of the substrate 10 sags by its own weight. In order to compensate for this, vacuum suction is sequentially performed from the central portion of the stage 120 through the vacuum suction channel, so that the generation of air pockets is reduced while in contact with the stage 120 from the center of the substrate 10 . The seating of the missing substrate 10 is completed.

On the other hand, the lift bar module 130 is installed to penetrate the stage 120 in the vertical direction through the lift bar receiving hole 121 to load or unload the substrate 10 onto the stage 120 , The lifting operation is carried out by the lifting driving unit 150 located at the lower portion of the lifting frame 160 supporting the bar module 120 .

In the present invention, in the lift bar module 130 , the height of the lift bar 131 at the center of the stage 120 is the height of the lift bar 131 at the edge of the stage 120 so that bending of the substrate 10 is induced. It may be formed relatively lower than the height. This is because the center of the substrate 10 sags due to its own weight in the case of the substrate 10 , particularly the large-area substrate 10 , and by adjusting the length of the lift bar 131 by reflecting the drooping phenomenon of the substrate 10 , , when the substrate 10 is seated on the stage 120 , while minimizing the warping phenomenon of the substrate 10 , the lift bar 131 descends and is seated on the stage 120 from the center of the substrate 10 . ) and the air between the stage 120 is to sequentially escape to the edge of the stage 120 to prevent the occurrence of air pockets.

When the substrate 10 is seated on the lift bar module 130 , the lift bar module 130 is lowered using the lift driving unit 150 to lower the lift bar 131 to the lower part of the stage 120 in the main body 110 . ) can be fully accepted.

As shown in FIG. 3 , the lift bar module 130 is installed to face each other with the lift bar 131 of the lift bar module 130 interposed therebetween in the main body 110 , and the lift bar 131 is mounted therebetween. and a guide unit 140 having a pair of rotating rollers 141 that rotate while being supported.

In the guide unit 140 , each rotating roller 141 is shaft-fixed to the first and second fixing members 142a and 142b installed on the bottom surface of the stage 120 , and each of the rotating rollers 141 is lifted. In contact with one side and the other side of the bar 131 , the rotary roller 141 rotates in a clockwise or counterclockwise direction by a rising or falling operation of the lift bar 131 . The rotating roller 141 may be a bearing including rollers, but is not limited thereto, and various means rotatable while in contact with one side and the other side of the lift bar 131 may be used.

The guide unit 140 provides a force or impact in the left and right directions of the lift bar 131 by a load or an external force from the substrate 10 while the lift bar module 130 is raised and lowered by the elevating driving unit 150 . When this is applied, since the rotary roller 141 comes into contact with one side and the other side of the lift bar 131 , the impact transmitted to the lift bar 131 can be alleviated, and the lift bar 131 is bent or broken and damaged can be prevented from becoming In addition to this, it is possible to prevent interference caused by contact with the lift bar receiving hole 121 while the lift bar 131 is bent.

Meanwhile, as shown in FIG. 2 , the lift bar module 130 ascending and descending through the lift bar receiving hole 121 of the stage 120 is supported on the lifting frame 160 under the stage 120 . In this state, it is possible to elevate by the elevating operation of the elevating driving unit 150 .

FIG. 4 is a perspective view showing an elevating driving unit of the substrate supporting apparatus according to the present invention, and FIG. 5 is a view showing an operating structure of the elevating driving unit of FIG. 4 .

4 and 5 , the lifting driving unit 150 includes a driving unit 151 , a linear moving unit 152 , a lifting unit 154 , and a connecting member 155 .

The driving unit 151 is configured as a driving source for generating power.

The linear movement unit 152 is configured to convert a rotational motion into a linear motion by the power of the driving unit 151 . That is, the driving unit 151 provides a rotational force so that the ball screw 152a can rotate. Here, the driving unit 151 is connected to a control unit (not shown).

In addition, both ends of the ball screw 152a are rotatably supported by the support unit 152b.

A connection body 153 that is connected on the ball screw 152a and is movable along the ball screw 152a is provided. This connection body 153 rotates the ball screw 152a in the longitudinal direction of the driving unit 151. Power may be transmitted to the lifting units 154 while moving along a straight line.

One lifting unit 154 is connected to the connecting body 153 of the linear moving unit 152 to raise and lower the lifting frame 160 .

The lifting unit 154 is connected to the connecting body 153 and includes a moving plate 154a that is linearly movable along the rail 154a-1.

In addition, the lifting unit 154 is disposed on the moving plate 154a, and includes an inclined surface body 154b having an inclined surface 154b-1 formed on one side thereof, and the inclined surface body 154b is a moving plate 154a and Together, they move together in a straight line, and the moving body 154c is provided with an inclined rail 154b-2 on the inclined surface 154b-1 so that the moving body 154c can move up and down.

And it is fixed to one side of the moving body (154c) and moves up and down together with the moving body (154c), the support body (154d) for supporting the lifting frame 160 on the upper surface is configured.

The movable body 154c and the support body 154d are configured to repeat the rising and falling motions in place.

A plurality of lifting units 154 configured as described above are arranged in a line on both sides of one linear moving unit 152 under the stage 120 .

The elevating unit 154 moves the moving plate 154a of the elevating unit 154 along the connecting body 153 interlocking by the operation of the linear moving unit 152 in a straight line while moving the moving body 154c to the inclined surface body 154b. ) by moving upward and downward along the inclined rail 154b-2, the support body 154d connected to the movable body 154c also repeats the upward and downward movement.

Each of the lifting units 154 configured as described above is connected to each other so as to be interlocked with each other through the connecting member 155 , thereby easily raising and lowering the plate-shaped lifting frame 160 supported by the support body 154d. In this case, the connecting member 155 may be linked to each other by the moving plates 154a so that the moving plates 154a of the lifting unit 154 can be smoothly interlocked.

The lifting driving unit 150 may raise and lower the lifting frame 160 to raise and lower the plurality of lift bar modules 130 supported on the lifting frame 160 to the same height. In this case, the driving unit 151 is a servo motor capable of multi-stage operation, and it is possible to precisely adjust the position, thereby preventing a failure in loading the lift bar 131 with respect to the substrate 10 .

Therefore, according to the present invention, by providing the guide portions 140 for supporting the lift bar 131 on both sides, it is possible to prevent damage such as bending or breaking of the lift bar 131 supporting the substrate 10 . , to prevent the interference phenomenon due to contact with the lift bar receiving hole 121 while the lift bar 131 is bent.

In addition, according to the present invention, a plurality of lift bars 131 are simultaneously provided with one lift driving unit 150 for elevating and lowering the lift frame 160 on which the plurality of lift bars 131 are supported, so that the plurality of lift bars 131 are simultaneously raised to the same height. By making it possible to elevate, it is possible to prevent deterioration of the quality of the substrate 10 due to a failure in loading of the lift bar 131 with respect to the substrate 10 .

The above description of the present invention is for illustration, and those of ordinary skill in the art to which the present invention pertains can understand that it can be easily modified into other specific forms without changing the technical spirit or essential features of the present invention. will be. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive. The scope of the present invention is indicated by the following claims, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included in the scope of the present invention.

10: substrate 100: substrate support device
110: body 120: stage
130: lift bar module 131: lift bar
132: support unit 140: guide part
141: rotary roller 142a: first fixing member
142b: second fixing member 150: elevating drive unit
151: driving unit 152: linear moving unit
153: connection body 154: elevating part
155: connecting member

Claims (7)

a stage on which the substrate is mounted;
a lift bar module installed to penetrate the stage in a vertical direction and having a lift bar for loading or unloading the substrate onto the stage;
a guide part installed in a state of being in contact with a side surface of the lift bar at the lower part of the stage with the lift bar interposed therebetween, the guide part having a guide part supporting the lift bar; and
Comprising an elevating driving unit for raising and lowering the elevating frame supporting the plurality of lift bar modules,
The elevating drive unit,
a linear moving unit that moves in a straight line by the power of the driving unit; and
A plurality of elevating units for raising and lowering the elevating frame while interlocking with the linear moving unit,
A plurality of the lifting units are arranged in a line on both sides of the one linear moving unit in the lower part of the stage,
Each of the elevating parts interlocked by the operation of the linear moving part is a substrate support device, characterized in that it is connected to be interlocked through a connecting member.
According to claim 1,
The guide part,
a pair of rotating rollers that are spaced apart to face each other with the lift bar interposed therebetween and rotate forward or reverse according to the movement of the lift bar while supporting the lift bar; and
and first and second fixing members installed on the bottom surface of the stage and to which the respective rotation rollers are axis-fixed.
delete According to claim 1,
The linear moving part converts a rotational motion into a linear motion by the power of the driving part, and comprises a ball screw having both ends rotatably supported by the support unit.
5. The method of claim 4,
The lifting unit,
a moving plate connected by the linear moving part and the connecting body and capable of moving in a straight line along the rail;
an inclined plane disposed on the moving plate, having an inclined rail on an inclined surface, and linearly moving together with the moving plate;
a movable body provided to be movable upward and downward along the inclined rail of the inclined plane; and
and a support body fixed to the movable body, moving up and down together with the movable body, and supporting the elevating frame on an upper surface.
delete According to claim 1,
The connecting member is a substrate support device, characterized in that the linkage is connected to the moving plate of each of the lifting units to be interlocked with each other.

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