WO2016095855A1

WO2016095855A1 - Microscope and drive device thereof

Info

Publication number: WO2016095855A1
Application number: PCT/CN2015/097889
Authority: WO
Inventors: 丁建文; 危加胜
Original assignee: 爱威科技股份有限公司
Priority date: 2014-12-19
Filing date: 2015-12-18
Publication date: 2016-06-23
Also published as: CN104503073A; CN104503073B

Abstract

A microscope drive device (50), for driving a movement of a stage device (30), the drive device (50) comprising a fixed base (51), an actuator and a linkage mechanism (55); the linkage mechanism (55) is connected between the actuator and the stage device (30); the actuator is disposed on the fixed base (51) to drive the rotation of a joint of the linkage mechanism (55) and the actuator to move a joint of the linkage mechanism (55) and the stage device (30), thereby driving a displacement of the stage device (30). The drive device (50) utilizes a quadrilateral linkage mechanism coupled to the actuator to drive a movement of a drive platform (340), so as to realize the location movement of a stage (35) in a plane of an X-Y axis along a first direction guide rail (330) and a second direction guide rail (336); the drive device has a simple structure, a convenient operation and a high precision.

Description

Microscope and its driving device

Technical field

The invention relates to a microscope and a driving device therefor.

Background technique

Existing microscopes typically include a stage for placing the sample and a drive for driving the stage to move the sample into the imaging area of the objective. However, the driving device of the existing microscope usually adopts a gear meshing or a screw rod method, and the driving structure thereof is complicated and the adjustment precision is not accurate.

Summary of the invention

Based on this, it is necessary to provide a microscope with a simple structure and high precision.

It is also necessary to provide a microscope driving device.

a microscope driving device, wherein the driving device is configured to drive a movement of a stage device, the driving device comprising a fixing seat, a driving member and a link mechanism, wherein the link mechanism is coupled to the driving member and the Between the stage devices, the driving member is disposed on the fixing base for driving the connection between the link mechanism and the driving member to rotate to make the link mechanism and the stage The connection of the device moves to cause a change in position of the stage device.

In one embodiment, the link mechanism includes a first driving arm, a second driving arm, a first driven arm, and a second driven arm; the first driving arm is coupled to the driving member and the Between one ends of the first slave arm, the second driving arm is connected between the driving member and one end of the second slave arm; the first slave arm and the second slave arm The other end of the driving member is connected to each other and connected to the stage device at the same time; the driving member is configured to drive the first driving arm and the second driving arm to perform a swing arm movement, the first Driving the first slave arm and the second slave arm to rotate the driving arm and the second driving arm away from the driving member to respectively rotate the first slave arm and the second slave arm The joint of the boom moves to drive the stage device to be displaced.

In one embodiment, the driving member includes the first driving arm and the first a first driving member and a second driving member connected to the second driving arm, the first driving member and the second driving member respectively comprise a first driving shaft and a second driving shaft; the first driving shaft and the first driving shaft The two driving shafts are oppositely and coaxially disposed in the first driving arm and the second driving arm for driving the first driving arm and the second driving arm to perform swing arm movement.

In one embodiment, a torsion spring is disposed between the first driving arm and the second driving arm and the two ends of the first driving member and the second driving member; the first driving shaft And the second driving shaft is coaxially received in the torsion spring through the first driving arm and the second driving arm; opposite ends of the torsion spring abut against the first driving Between the arm and the second drive arm.

In one embodiment, a coaxial positioning ring is disposed in the torsion spring, the coaxial positioning ring is axially disposed with a shaft hole; the first driving shaft and the second driving shaft are received in the The ends of the torsion spring are coaxially disposed in the shaft hole of the coaxial positioning ring.

In one embodiment, the driving device further includes an initial position piece and a detecting piece, the initial position piece is convexly disposed on the link mechanism, and the detecting piece is disposed on the fixing seat.

In one embodiment, the first driving arm, the second driving arm, the first driven arm and the second driven arm are connected to form a quadrilateral, the link mechanism and the driving member and the driving table The connection locations are respectively located at opposite ends of the same diagonal line in the quadrilateral.

The microscope includes a support base, a stage device and a driving device respectively disposed on the support base, the driving device being connected to the stage device for driving the stage device to move; the stage device The platform includes a platform base, a moving component, and a stage, the moving component includes a first direction rail, a first direction slider, a connecting plate, a second direction rail, a second direction slider, and a driving table; the first direction rail Provided on the platform base along the Y-axis direction, the connecting plate is slidably coupled to the first direction rail in the Y-axis direction by the first direction slider; the second direction rail along the X The shaft direction is disposed on a surface of the connecting plate facing away from the first direction rail, and the driving table surface is slidably disposed on the second direction rail in the X-axis direction by the second direction slider; One ends of the first follower arm and the second follower arm are connected to the driving table, the stage is disposed on the driving table and the first slave arm and the second slave are The boom is driven by the driving table Moving in the Y-axis direction and the X-axis direction with respect to the platform base The driving device is the above-mentioned driving device.

In one embodiment, the stage device further includes an adjusting member and an elastic member disposed between the stage and the driving table, the adjusting member driving the stage and the driving A table movable connection for adjusting the flatness of the stage; the elastic member is for providing a preload.

In one embodiment, the platform base is disposed at a side of the first direction rail to define a limit flange for limiting displacement of the first direction slider in the Y-axis direction; The moving component includes a limiting block, and the second direction slider is slidably disposed at two ends of the second directional rail and located at two sides of the limiting block to limit the second directional slider in the The displacement in the X-axis direction.

The invention adopts the cooperation of the quadrilateral link mechanism and the driving member to drive the driving table to move, so as to realize the movement of the stage along the first direction guide rail and the second direction guide rail in the XY axis plane, the structure is simple, the operation is convenient and the accuracy is accurate. high.

DRAWINGS

Figure 1 is a partial schematic view of a microscope in the present invention;

2 is a schematic structural view of a stage device in the microscope shown in FIG. 1;

3 is a schematic structural view of a driving device in the microscope shown in FIG. 1;

Figure 4 is a schematic view of the stage of Figure 1 moving under the action of a driving device.

detailed description

In order to facilitate the understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. Preferred embodiments of the invention are shown in the drawings. However, the invention may be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the understanding of the present disclosure will be more fully understood.

It should be noted that all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the invention belongs, unless otherwise defined. The terminology used herein in the description of the present invention is for the purpose of describing particular embodiments and is not intended to this invention. The term "and/or" used herein includes any and all combinations of one or more of the associated listed items.

As shown in FIG. 1, the microscope of the present invention includes a support base 10, a stage device 30, and a driving device 50. For the sake of simplicity, only a partial structure of the support base 10 is shown in FIG. The stage device 30 and the driving device 50 are respectively mounted on the two surfaces opposite to the support base 10. The stage device 30 is used to place a sample (not shown). The drive device 50 is used to power the movement of the stage device 30.

Referring to FIG. 2, the stage device 30 includes a platform base 31, a moving assembly 33, and a stage 35. The platform base 31 is fixedly coupled to the support base 10. The moving assembly 33 is disposed on the platform base 31 and between the platform base 31 and the stage 35. The driving device 50 is coupled to the moving assembly 33 for driving the moving assembly 33 to move the stage 35 relative to the platform base 31 in a first direction and a second direction perpendicular to the first direction. The first direction is the Y-axis direction and the second direction is the X-axis direction.

The platform base 31 is generally in an inverted L shape and includes a mounting portion 310 and a fixing portion 312. The mounting portion 310 is used to carry and support the moving assembly 33 and the stage 35. The fixing portion 312 is formed by vertically extending from one side of the mounting portion 310 for fixedly supporting the entire platform base 31 on the support base 10.

The moving component 33 is mounted on the mounting portion 310 and includes two first direction rails 330, two first direction sliders 332, a connecting plate 334, a second direction rail 336, two second direction sliders 338, and a driving table 340. And a limit block 342.

The two first direction guide rails 330 are disposed on the platform base 31 in parallel along the Y-axis direction. The two first direction sliders 332 are spaced apart from the surface of the connecting plate 334 facing the first direction rail 330 such that the connecting plate 334 is slidably coupled to the two first directions in the Y-axis direction by the two first-direction sliders 332. On the guide rail 330. The second direction guide rail 336 is disposed on the surface of the connecting plate 334 facing away from the first direction rail 330 in the X-axis direction. The driving table 340 is slidably disposed on the second direction guide 336 in the X-axis direction by the two second-direction sliders 338. The stage 35 is disposed on the surface of the driving table surface 340 facing away from the second direction rail 336 and is movable in the Y-axis direction and the X-axis direction with respect to the platform base 31 with the driving table surface 340 under the driving of the driving device 50.

The platform base 31 is located on one side of the first direction rail 330 and is provided with a limit flange 314 for restricting the displacement of the first direction slider 332 in the Y-axis direction. The limiting block 342 is disposed on the second direction guide 336 and between the two second direction sliders 338 to limit the displacement of the two second direction sliders 338 in the X-axis direction.

With continued reference to FIG. 2, in one embodiment, the microscope stage assembly 30 further includes an adjustment member 37 and an elastic member 39. The adjusting member 37 movably connects the stage 35 with the driving table 340 for adjusting the level of the stage 35. The elastic member 39 is disposed between the stage 35 and the driving table 340 for providing an upward preload.

In this embodiment, the adjusting member 37 is screwed between the adjusting stage 35 and the driving table 340. The elastic member 39 is sleeved outside the screw and abuts between the stage 35 and the driving table 340. spring. It can be understood that in other embodiments, the adjusting member 37 and the elastic member 39 can be separately disposed between the stage 35 and the driving table 340.

Referring to FIG. 3, the driving device 50 includes a fixing base 51, a driving member, and a link mechanism 55. The driving member is mounted on the fixing base 51 for powering the link mechanism 55. The link mechanism 55 is coupled between the drive member and the stage device 30 for driving the stage device 30 to move in the X-Y plane under the drive of the drive member.

The link mechanism 55 includes a first drive arm 550, a second drive arm 552, a first follower arm 554, and a second follower arm 556. The first driving arm 550, the second driving arm 552, the first driven arm 554, and the second driven arm 556 are respectively provided with connecting holes 557 at opposite ends thereof.

The first driving arm 550 is connected between the driving member and one end of the first driven arm 554, and the second driving arm 552 is connected between the driving member and one end of the second driven arm 556; the first driven arm 554 and the The second slave arm 556 is connected to the other end of the drive member via the arm pin 558 and is simultaneously coupled to one side of the drive table 340 by the arm pin 558. The driving member drives the first driving arm 550 and the second driving arm 552 to perform a swing arm movement, and the first driving arm 550 and the second driving arm 552 are driven away from the driving member to drive the first driven arm 554 and the second driven arm 556 respectively. The rotation of the arm reversing pin 558 causes the position of the driving table 340 to change, thereby realizing the change of the position of the stage 35.

Specifically, the number of the fixing bases 51 is two, and is respectively mounted on the support base 10. Drive components include Corresponding to the first driving member 530 and the second driving member 532 which are respectively mounted on the two fixing bases 51 and are respectively connected to the first driving arm 550 and the second driving arm 552. The first driving member 530 and the second driving member 532 respectively include a first driving shaft 5301 connected to the first driving arm 550 and a second driving shaft 5321 connected to the second driving arm 552. The two ends of the first driving arm 550 and the second driving arm 552 away from the first driving member 530 and the second driving member 532 are rotatably connected to the first driven arm 554 and the second driven arm 556 via the arm rotating pin 558, respectively. In this embodiment, the first driving member 530 and the second driving member 532 are both planetary deceleration stepping motors. In other embodiments, the first driving member 530 and the second driving member 532 may also be other driving members that can swing the first driving arm 550 and the second driving arm 552 around the first connection.

In operation, the first driving shaft 5301 and the second driving shaft 5321 respectively drive the first driving arm 550 and the second driving arm 552 to swing the arm, so that the first driving arm 550 and the second driving arm 552 are away from the first driving. The two ends of the member 530 and the second driving member 532 respectively drive the first slave arm 554 and the second slave arm 556 to rotate around the arm pin 558 by the arm pin 558, so that the first slave arm 554 and the second slave The displacement of the boom 556 at the mutual connection causes a change in the position of the drive table 340. The mounting positions of the first driving member 530 and the second driving member 532 may be determined according to requirements. For example, the first driving member 530 and the second driving member 532 are disposed vertically downward; and, the first driving member 530 is further disposed. And the second driving member 532 can also be disposed in the horizontal direction; at the same time, the swinging angles of the first driving arm 550 and the second driving arm 552 are realized by the rotation direction and the rotation angle of the first driving shaft 5301 and the second driving shaft 5321, and The rotation direction and the rotation angle of the first drive shaft 5301 and the second drive shaft 5321 can be set to be the same or different depending on the positional change of the stage 35 from the initial position to the target position, which is not limited herein.

Referring to FIG. 3, in the embodiment, the two fixing bases 51 are symmetrically mounted on the support base 10 in a direction perpendicular to the stage 35. The first driving member 530 and the second driving member 532 are respectively disposed on the two fixing bases 51. The first driving shaft 5301 and the second driving shaft 5321 are respectively opposite to the corresponding driving holes 557 and coaxially penetrate the first driving arm. The 550 and the second driving arm 552 form a quadrilateral link mechanism 55 formed by the first driving arm 550, the second driving arm 552, the first driven arm 554, and the second driven arm 556. Wherein, the link mechanism 55 and the driving member and the driving table 340 The connection positions are respectively located at the opposite ends of the same diagonal line in the quadrilateral. It can be understood that the first driving shaft 5301 and the second driving shaft 5321 can also be disposed on different axes, and the correspondingly formed link mechanism 55 is not a quadrilateral link mechanism, but can also be in the first driving member 530 and the second driving member 532. The drive table 340 is moved in a plane.

A torsion spring 57 is disposed between both ends of the first driving arm 550 and the second driving arm 552 connected to the first driving member 530 and the second driving member 532. The first driving shaft 5301 and the second driving shaft 5321 are respectively inserted into the connecting holes 557 of the first driving arm 550 and the second driving arm 552 and are coaxially received in the torsion spring 57. The opposite ends of the torsion spring 57 abut against the first driving arm 550 and the second driving arm 552 for respectively applying a torsion force to the first driving arm 550 and the second driving arm 552 to eliminate the first driving member 530 and The backlash of the second drive member 532 ensures the accuracy of the position of the drive table 340.

In order to mount the first drive shaft 5301 and the second drive shaft 5321 in a coaxial position, a coaxial positioning ring 59 is disposed in the torsion spring 57. The coaxial positioning ring 59 is provided with a shaft hole 590 in the axial direction. The ends of the first drive shaft 5301 and the second drive shaft 5321 that are received in the torsion spring 57 are coaxially disposed in the shaft hole 590 of the coaxial positioning ring 59.

Referring to FIG. 4, point C is the connection position between the first driving arm 550 and the second driving arm 552 and the first driving shaft 5301 and the second driving shaft 5321, that is, the center point position; the coordinate (x, y) is the first The initial position of the slave arm 554 and the second slave arm 556 is the initial position of the stage 35; the coordinates (a, b) are the first slave arm 554 and the second slave arm 556. The target position after the movement, that is, the target position of the stage 35; the first driving member 530 and the second driving member 532 rotate coaxially counterclockwise as an example for description.

When the first driving member 530 and the second driving member 532 drive the first driving arm 550 and the second driving arm 552 to move coaxially and in the same direction, the first driving arm 550 pushes the first driven arm 554 around the arm. When the pin 558 rotates, the second driving arm 552 pulls the second driven arm 556 to rotate around the arm rotating pin 558, so that the connecting position of the first driven arm 554 and the second driven arm 556 is displaced relative to the center point C by The initial position (x, y) is moved to the target position (a, b), thereby moving the stage 35 relative to the platform base 31 in the XY axis.

With continued reference to FIG. 3, in the present embodiment, in order to reduce the arm reversing pin 558 and the first driving arm 550 The friction between the second driving arm 552 and the connecting hole 557 of the first driving arm 550 connected to the arm rotating pin 558 and the connecting hole 557 of the second driving arm 552 and the arm rotating pin 558 are respectively provided with a bearing 559.

The driving device 50 further includes an initial stop piece 52 and a detecting member 54. The initial stop 52 protrudes from the surface of the first drive arm 550 or the second drive arm 552 facing away from the drive table 340. In the present embodiment, the detecting member 54 is a photoelectric switch which is disposed on one of the fixing bases 51. When the initial stop 52 rotates with the first drive arm 550 or the second drive arm 552 and passes through the photoelectric switch, the detecting member 54 is used to detect the initial position of the first drive arm 550 or the second drive arm 552. It can be understood that, in other embodiments, the position of the detecting member 54 and the initial blocking piece 52 can be determined according to requirements. For example, the detecting member 54 can also be disposed on the first driven arm 554 of the link mechanism 55 and the first The initial position of the second follower arm 554 or the second follower arm 556 is also not limited herein.

In the present invention, the stage 35 is supported on the driving table 340, and can be moved in the XY axis plane along the first direction rail 330 and the second direction rail 336 by the driving device 50, so that the stage 35 is The movement adjustment process remains stable to ensure the accuracy of the position of the stage 35. At the same time, the present invention adopts the cooperation of the quadrilateral link mechanism 55 and the driving member to drive the driving table 340 to move, so as to realize the movement of the stage 35 along the first direction rail 330 and the second direction rail 336 in the XY plane. Simple, easy to operate and highly accurate.

The above-mentioned embodiments are merely illustrative of several embodiments of the present invention, and the description thereof is more specific and detailed, but is not to be construed as limiting the scope of the invention. It should be noted that a number of variations and modifications may be made by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of the invention should be determined by the appended claims.

Claims

a microscope driving device, wherein the driving device is configured to drive a movement of a stage device, the driving device comprising a fixing seat, a driving member and a link mechanism, wherein the link mechanism is coupled to the driving member and the Between the stage devices, the driving member is disposed on the fixing base for driving the connection between the link mechanism and the driving member to rotate to make the link mechanism and the stage The connection of the device moves to cause a change in position of the stage device.
The microscope driving apparatus according to claim 1, wherein said link mechanism comprises a first driving arm, a second driving arm, a first driven arm, and a second driven arm; said first driving arm is connected Between the driving member and one end of the first driven arm, the second driving arm is connected between the driving member and one end of the second driven arm; the first driven arm And the second driven arm is connected to the other end of the driving member and connected to the stage device at the same time; the driving member is configured to drive the first driving arm and the second driving arm The swinging arm moves, the first driving arm and the second driving arm are away from the driving member, respectively, and the first driven arm and the second driven arm are respectively rotated to make the first slave The joint of the boom and the second follower arm moves to drive the stage device to be displaced.
The microscope driving device according to claim 2, wherein said driving member comprises a first driving member and a second driving member respectively connected to said first driving arm and said second driving arm, said a driving member and the second driving member respectively include a first driving shaft and a second driving shaft; the first driving shaft is opposite to the second driving shaft and coaxially penetrates the first driving arm and the The second driving arm is configured to drive the first driving arm and the second driving arm to perform a swing arm movement.
The microscope driving device according to claim 3, wherein the first driving arm and the second driving arm are twisted between the two ends of the first driving member and the second driving member a first drive shaft and the second drive shaft face through the first drive arm and the second drive arm and are coaxially received in the torsion spring; opposite ends of the torsion spring Abutting between the first driving arm and the second driving arm.
The microscope driving device according to claim 4, wherein said torsion spring is provided with a coaxial positioning ring, said coaxial positioning ring being axially provided with a shaft hole; said first drive shaft and said The ends of the second drive shaft received in the torsion spring are coaxially disposed in the shaft hole of the coaxial positioning ring.
The microscope driving device according to claim 1, wherein the driving device further comprises an initial position stop and a detecting member, wherein the initial position piece is convexly disposed on the link mechanism, and the detecting member It is disposed on the fixing base.
The microscope driving device according to claim 2, wherein said first driving arm, said second driving arm, said first driven arm and said second driven arm are connected to form a quadrilateral, said link mechanism and said The connecting positions of the driving member and the driving table are respectively located at two ends of the same diagonal line in the quadrilateral.
a microscope, comprising: a support base, a stage device and a driving device respectively disposed on the support base, wherein the driving device is connected to the stage device for driving the stage device to move; The stage device includes a platform base, a moving component, and a stage, the moving component includes a first direction rail, a first direction slider, a connecting plate, a second direction rail, a second direction slider, and a driving table; The first direction rail is disposed on the platform base along the Y-axis direction, and the connecting plate is slidably coupled to the first direction rail in the Y-axis direction by the first direction slider; the second The directional guide rail is disposed on a surface of the connecting plate facing away from the first directional guide rail along the X-axis direction, and the driving table surface is slidably disposed in the second direction by the second direction slider along the X-axis direction One end of the first follower arm and the second follower arm is connected to the driving table, the stage is disposed on the driving table and can be on the first slave arm and The second slave arm is driven The driving device is moved in the Y-axis direction and the X-axis direction with respect to the platform base; the driving device is the driving device according to any one of claims 1-7.
The microscope according to claim 8, wherein said stage device further comprises an adjusting member and an elastic member disposed between said stage and said driving table, said adjusting member said said load The object table is movably connected to the driving table.
The novel microscope according to claim 8, wherein the platform base is provided with a limit flange on a side of the first direction rail for limiting the first direction slider Displacement in the Y-axis direction; the moving component includes a limiting block, the second direction slider is slidably disposed at two ends of the second directional rail and located at two sides of the limiting block, The displacement of the second direction slider in the X-axis direction is restricted.