KR101184423B1 - Automatic gonio-stage - Google Patents

Automatic gonio-stage Download PDF

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Publication number
KR101184423B1
KR101184423B1 KR1020120054434A KR20120054434A KR101184423B1 KR 101184423 B1 KR101184423 B1 KR 101184423B1 KR 1020120054434 A KR1020120054434 A KR 1020120054434A KR 20120054434 A KR20120054434 A KR 20120054434A KR 101184423 B1 KR101184423 B1 KR 101184423B1
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KR
South Korea
Prior art keywords
stage
moving
curved
rail
guide
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KR1020120054434A
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Korean (ko)
Inventor
신정욱
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주식회사 재원
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Priority to KR1020120054434A priority Critical patent/KR101184423B1/en
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Publication of KR101184423B1 publication Critical patent/KR101184423B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Abstract

PURPOSE: An automatic gonio stage is provided to prevent placement at a right angle direction with respect to a curved line moving direction of a moving stage by including a side guide roller in a lower portion of the moving stage. CONSTITUTION: A base stage(100) supports an entire device. A rail block(200) is respectively combined with both top sides of the base stage. A moving block(500) is combined with a top center portion of the base stage to be movable in a straight line. A moving stage(300) can move in a curved line along a curved path of a curved rail portion(210). A driving module(400) can make the moving block move in the straight line.

Description

Automatic Gonio-Stage}

The present invention relates to an automatic gonio stage. More specifically, by rotating the operating rod through the operation of the drive motor through the power supply to configure the curved movement stage, the movement stage can be moved in an automated manner instead of the user's manual operation, and a separate control unit Through precise control of the operating state of the drive motor, the curved moving distance of the moving stage can be adjusted more precisely.The moving stage moves through the rolling movement of the rotating roller while the moving stage is in linear contact with the rail block through the rotating roller. In this way, the curved movement resistance of the moving stage can be reduced to move the moving stage more smoothly and precisely, and the capacity of the drive motor can be reduced, thereby achieving cost reduction and compact structure. It's about the auto gonio stage.

In recent years, researches in all fields such as semiconductor devices have been progressing in the direction of high integration and high performance of semiconductor substrates in order to process more data in a short time. The gap between them continues to decrease, and if it is impossible to form a microstructure that includes a pattern with accurate dimensions on a semiconductor substrate, it may affect not only the defect of the microstructure itself but also subsequent processes, thereby increasing the overall defect rate of the semiconductor device. Since problems arise, it is very important to form microstructures with accurate dimensions on semiconductor substrates.

For this reason, the microstructure measurement process for determining whether the microstructures are formed with the correct dimensions before and after each process for forming the microstructures is also necessary. Accordingly, the gonio stage for determining the microstructure measurement process is required. It is developed and used.

The Goni stage is separated into a base stage and a moving stage, and the moving stage is configured to be curved on the upper surface of the base stage to form an arc. An optical component such as a camera or a laser is mounted on the upper surface of the moving stage and precisely moved along a curved path.

At this time, the operation structure for the curved movement of the moving stage is generally made through a power transmission structure such as a screw and a V-groove, the moving stage is seated in the form of surface contact with the curved rail portion of the base stage is curved along the curved rail portion It is constructed in a moving manner.

Therefore, it is difficult to precisely move the moving stage due to backlash or assembly tolerance, which occurs due to the power transmission structure of the screw and the V-groove, and because the moving stage moves in surface contact with the base stage, the frictional force increases to move the moving stage. There was a problem that the power required to move is relatively increased. In addition, there is a problem that the accuracy of the moving distance of the moving stage is lowered because the user moves the moving stage by moving the screw by manually operating the screw or the like.

The present invention has been invented to solve the problems of the prior art, the object of the present invention is to rotate the operating rod through the operation of the drive motor through the power supply is configured in a way to curve the moving stage, the user's manual work Instead, it provides an automatic gonio stage that can move the moving stage in an automated manner, and more precisely adjust the curved moving distance of the moving stage by precisely controlling the operating state of the drive motor through a separate control unit. .

Another object of the present invention is configured in such a way that the moving stage moves through the rolling movement of the rotating roller in the state of linear contact with the rail block through the rotating roller, the curved movement resistance of the moving stage is reduced to make the moving stage more smooth and It is possible to precisely move and at the same time reduce the capacity of the drive motor to provide an automatic gonio stage that can achieve cost reduction and compact structure.

Still another object of the present invention is to construct a power transmission structure for transmitting power to a moving stage by a locking pin and a pin holder bracket that is in line contact with each other and to support a relatively high load according to their line contact structure, thereby providing durability Not only can this be improved, but also the allowable load value of the optical component mounted on the moving stage can be set higher, and an automatic gonio stage capable of preventing the precision of the moving distance due to backlash or assembly tolerance can be prevented.

It is still another object of the present invention to provide an automatic gonio stage by mounting a side guide roller at the bottom of the moving stage, thereby preventing displacement in a direction perpendicular to the curved moving direction of the moving stage, thereby enabling more precise curved movement of the moving stage. To provide.

The present invention, the base stage; A rail block coupled to both sides of an upper surface of the base stage and having curved rail portions curved downwardly convex on opposite surfaces thereof; A moving block coupled to a center portion of the upper surface of the base stage so as to be linearly movable and having a locking pin mounted in a direction perpendicular to the moving direction; A lower stage, a pin holder guide is mounted downwardly to be engaged with the locking pin, and a plurality of rotating rollers are mounted at both sides of the lower rail so as to be inserted into the curved rail, respectively; And a driving module coupled to the base stage and supplied with power to automatically linearly move the movable block, wherein the movable stage is interlocked with the linear movement of the movable block through the engaging pin and the pin holder guide. It provides an automatic gonio stage characterized by moving the curve.

In addition, the locking pin is formed in a cylindrical shape, the pin holder guide may be spaced apart along the moving direction of the moving stage may be configured to engage in line contact or point contact with the outer peripheral surface of the locking pin.

In addition, side guide rollers each having an outer circumferential surface in contact with mutually opposite inner surfaces of the rail block may be mounted at both sides of the lower end of the moving stage to guide the moving path of the moving stage.

In addition, a guide rail portion may be formed at the center of the upper surface of the base stage to guide the linear movement path of the moving block.

In addition, the drive module has a thread formed on the outer circumferential surface penetrates the moving block and screwed with the moving block; And a driving motor for rotationally driving the working rod, wherein the moving block may be configured to linearly move along the guide rail by rotation of the working rod.

In addition, the motor shaft of the drive motor and the operating rod may be connected through a flexible coupling.

According to the present invention, by rotating the operating rod through the operation of the drive motor through the power supply to configure the moving stage in a curved manner, it is possible to move the moving stage in an automated manner instead of the user's manual, separate control unit Through precise control of the operating state of the drive motor has the effect that can be adjusted more precisely the curved moving distance of the moving stage.

In addition, the moving stage is configured in such a manner that the moving stage moves by rolling movement of the rotating roller while in linear contact with the rail block through the rotating roller, thereby reducing the curved movement resistance of the moving stage, thereby smoothly and accurately moving the moving stage. In addition, since the capacity of the drive motor can be reduced, cost reduction and compact structure can be achieved.

In addition, the power transmission structure for transmitting power to the moving stage is composed of a locking pin and a pin holder bracket that is in line contact with each other and can support a relatively high load according to their line contact structure, thereby improving durability The allowable load value of the optical component mounted on the moving stage can be set higher, and the accuracy of the moving distance due to the backlash or the assembly tolerance can be prevented.

In addition, by attaching the side guide roller to the lower portion of the moving stage, there is an effect of preventing the displacement in the perpendicular direction to the curved moving direction of the moving stage to enable more precise curved movement of the moving stage.

1 is a perspective view schematically showing the external appearance of an automatic gonio stage according to an embodiment of the present invention;
2 is a partially exploded perspective view schematically showing an assembly structure of an automatic Gonio stage according to an embodiment of the present invention;
Figure 3 is an exploded perspective view schematically showing the configuration of the automatic gonio stage according to an embodiment of the present invention,
4 and 5 are a longitudinal cross-sectional view and a cross-sectional view schematically showing the internal structure of the automatic gonio stage according to an embodiment of the present invention;
6 is an operating state diagram schematically showing an operating state of an automatic gonio stage according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used to designate the same or similar components throughout the drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

1 is a perspective view schematically showing the external appearance of the automatic gonio stage according to an embodiment of the present invention, and FIG. 2 is a partial exploded view schematically showing an assembly structure of the automatic gonio stage according to an embodiment of the present invention. 3 is an exploded perspective view schematically illustrating a configuration of an automatic gonio stage according to an embodiment of the present invention, and FIGS. 4 and 5 are internal structures of the automatic gonio stage according to an embodiment of the present invention. Is a longitudinal sectional view and a cross sectional view schematically.

The automatic gonio stage according to an embodiment of the present invention is a device capable of automatically moving a moving stage by a separate driving module instead of a manual operation by a user. The base stage 100 and a rail block ( 200, a moving block 500, a moving stage 300, and a driving module 400.

The base stage 100 is configured to support the entire device, the drive module 400 for linearly moving the moving block 500 is coupled to one side, the rail block 200 is seated and coupled to the upper portion, The guide rail unit 110 may be formed to guide the linear movement path of the moving block 500.

The rail block 200 is coupled to both sides of the upper surface of the base stage 100, respectively, and curved rail portions 210 are formed in a convex downwardly curved shape on opposite surfaces.

The moving block 500 is coupled to the center of the upper surface of the base stage 100 so as to be linearly movable, and the locking pin 510 is mounted in a direction perpendicular to the moving direction. That is, as shown in FIGS. 2 to 4, the moving block 500 is linearly reciprocated in one direction by the driving module 400. In this case, the locking pin 510 is in a horizontal state and moves block 500. Is arranged in a direction perpendicular to the linear movement direction of. A through hole 501 is formed in the center portion of the moving block 500 along a moving direction, and a screw coupling part that is screwed with the operating rod 410 of the driving module 400 to be described later on the inner circumferential surface of the through hole 501 ( 502 may be formed.

The moving stage 300 is formed in a flat shape so that an upper surface thereof can be mounted with an optical component such as a camera or a laser, and the lower surface of the moving stage 300 draws the same arc curve as that of the curved rail portion 210 as shown in FIGS. 2 and 3. Is formed in a circumferential surface, disposed on the rail block 200 is configured to move along the curved path of the curved rail portion 210. That is, a plurality of rotating rollers 320 are mounted on both sides of the lower end of the moving stage 300 so as to be inserted into the curved rails 210, and the plurality of rotating rollers 320 are curved along the curved rails 210. The moving stage 300 is configured to move in a curved manner in a moving manner.

In this case, separate coupling blocks 310 are coupled to protrude downward from both sides of the lower end of the moving stage 300, and the plurality of rotating rollers 320 may be rotatably coupled to the outer surfaces of the coupling blocks 310, respectively. have. In addition, a separate side guide roller 340 may be mounted at a lower end of the coupling block 310 so as to be rotatable about a vertical axis, and the side guide roller 340 may have mutually opposing inner surfaces of the rail block 200. And rotate in contact with each other, and guide the movement path of the movement stage 300 so that the movement stage 300 does not cause displacement in a direction perpendicular to the movement path.

In addition, the pin holder guide 330 is mounted to protrude downward from the lower center portion of the moving stage 300 so as to be engaged with the locking pin 510 of the moving block 500. The curve moves in conjunction with the linear motion of). In this case, two locking pins 510 are mounted to be spaced apart in the linear moving direction of the moving block 500 as shown in FIGS. 2 and 3, and based on these, the locking pins 510 are perpendicular to the linear moving direction of the moving block 500. Each one may be mounted further apart in the direction.

At this time, the locking pin 510 is formed in a cylindrical shape may be configured such that its outer peripheral surface is in line contact or point contact with the plurality of pin holder guides 330, respectively.

The driving module 400 is configured to penetrate through the side of the base stage 100 to linearly move the moving block 500. According to an embodiment of the present invention, the driving module 500 may automatically linearly move the moving block 500. It is configured to be powered and operated.

2 to 4, the driving module 400 has a thread formed on the outer circumferential surface thereof, penetrating through the moving block 500, and a driving rod 410 screwed to the moving block 500, and an operating rod ( It may be configured to include a drive motor 420 for driving the rotation 410. At this time, the operation rod 410 is configured to be screwed with the screw engaging portion 502 formed on the inner peripheral surface of the through-hole 501 of the moving block 500. When the driving motor 420 rotates the driving rod 410 according to the configuration, the moving block 500 moves linearly along the longitudinal direction of the driving rod 410. At this time, the guide rail portion 110 is formed on the upper surface of the base stage 100 to guide the linear movement path of the movement block 500, the movement block 500 is guided along the guide rail portion 110 and linear movement Done.

On the other hand, the motor shaft 421 and the operating rod 410 of the drive motor 420 may be directly connected, but is preferably configured to be connected to each other through a separate flexible coupling 430 according to an embodiment of the present invention. Do. The flexible coupling 430 is a coupling that stably transmits the rotational force of the driving shaft to the driven shaft even when the driving shaft and the driven shaft are arranged to be displaced from each other by vibration. Rotational driving of the actuating rod 410 may be performed.

According to this configuration, the automatic gonio stage according to the embodiment of the present invention rotates the operation rod 410 through the operation of the drive motor 420 through the power supply, thereby linearly moving the moving block 500. At the same time it works in such a way to move the movement stage 300 in conjunction with this curve. Therefore, by precisely controlling the operating state of the drive motor 420 through a separate controller (not shown), it is possible to more precisely adjust the curved movement distance of the movement stage 300.

At this time, the movement stage 300 does not move in a state where the bottom surface 301 of the movement stage 300 is in surface contact with the top surface 201 of the rail block 200, but the rotating roller 320 of the movement stage 300 is moved. Since the rotating roller 320 moves in a rolling manner in a line contact with the curved rail portion 210 of the rail block 200, it can be more smoothly and accurately moved.

In particular, in this case, as shown in the enlarged view of FIG. 4, the lower surface 301 of the moving stage 300 and the upper surface 201 of the rail block 200 are spaced apart by ΔX distance by the rotating roller 320. It is preferable to be configured to be in a state, through which it is possible to significantly reduce the curved movement resistance of the movement stage 300 according to the surface contact.

Therefore, since the automatic Gonio stage according to an embodiment of the present invention requires a relatively small power required for curved movement of the moving stage 300, a small drive motor 420 having a small rated capacity may be applied. Thus, cost reduction and compact structure can be achieved.

In addition, the automatic gonio stage according to an embodiment of the present invention is engaged in a state in which the pin holder guide 330 of the moving stage 300 and the engaging pin 510 of the moving block 500 are in line contact with each other. As the moving block 500 moves in the state, the locking pin 510 and the pin holder guide 330 slide to each other, and the moving stage 300 moves in a curved manner. Since it is not adopted, it is possible to prevent the accuracy of the moving distance due to backlash, wear, or assembly tolerance.

In addition, the lower side of the moving stage 300, as described above, the side guide rollers 340, respectively, which are in contact with the inner surface of the rail block 200 is mounted, through which the right angle to the curved moving direction of the moving stage 300 Since displacement in the direction can be prevented, more precise movement of the moving stage 300 is possible.

6 is an operating state diagram schematically showing an operating state of an automatic gonio stage according to an embodiment of the present invention.

The automatic gonio stage according to one embodiment of the present invention operates to change the rotational direction of the actuating rod 410 through the drive motor 420, so that the movement stage 300 moves reciprocally in both directions.

As shown in FIG. 6A, when the upper surface of the moving stage 300 forms a horizontal plane as a reference state, in this reference state, the operating rod 410 is bidirectionally driven by the drive motor 420. As it rotates, as shown in FIGS. 6B and 6C, the moving stage 300 is curved in a left or right direction.

That is, when the operating rod 410 is rotated counterclockwise, for example, as shown in FIG. 6 (b) in the reference state shown in FIG. Since it is screwed with the 410, it is guided along the guide rail portion 110 and is linearly moved to the left along the longitudinal direction of the operating rod 410. When the moving block 500 moves to the left side, the locking pin 510 is also moved to the left side at the same time. At this time, the moving force in the left direction acts on the pin holder guide 330 engaged with the locking pin 510. Done. Accordingly, the pin holder guide 330 slides with the locking pin 510 while being engaged with the locking pin 510 in a line contact state, and at the same time, the movement stage 300 is curved in the rail block 200. The curve is moved along the rail portion 210 in the left direction.

In the same way, when the operating rod 410 is rotated clockwise by the drive motor 420 as shown in FIG. 6C in the reference state shown in FIG. 6A, the moving block 500 ) Is moved to the right, the locking pin 510 and the pin holder guide 330 slides with each other, and the movement stage 300 is curved in the right direction along the curved rail portion 210.

As such, the Gonio stage according to the exemplary embodiment of the present invention linearly moves the moving block 500 through the driving module 400 operated by receiving power, thereby engaging the locking pin 510 of the moving block 500. The curved movement stage 300 is configured to move in a horizontal direction. At this time, while the movement stage 300 is curved movement, the configuration for transmitting the movement force of the drive module 400 to the movement stage 300 is a locking pin 510 of the movement block 500 and the movement stage engaged with it It is composed of a pin holder guide 330 of (300).

Since the locking pin 510 and the pin holder guide 330 are configured to engage with each other and slide in a line contact manner instead of a point contact manner as described above, they can support a relatively high load, thereby improving durability. In addition, the allowable load value for the optical component mounted on the moving stage 300 may be set higher. Therefore, more various optical components can be mounted and used, and more stable and accurate movement is possible. In addition, structurally more stable as the allowable load is increased, and thus the base stage 100 may be attached to a wall to be used in a variety of arrangements.

The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and variations without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be construed according to the following claims, and all technical ideas falling within the scope of the same shall be construed as falling within the scope of the present invention.

100: base stage 110: guide rail portion
200: rail block 210: curved rail portion
300: moving stage 320: rotating roller
330: pin holder guide 340: side guide turning
400: drive module 410: operating rod
420: drive motor 430: flexible coupling
500: moving block 510: locking pin

Claims (6)

A base stage;
A rail block coupled to both sides of an upper surface of the base stage and having curved rail portions curved downwardly convex on opposite surfaces thereof;
A moving block coupled to a center portion of the upper surface of the base stage so as to be linearly movable and having a locking pin mounted in a direction perpendicular to the moving direction;
A lower stage, a pin holder guide is mounted downwardly to be engaged with the locking pin, and a plurality of rotating rollers are mounted at both sides of the lower rail so as to be inserted into the curved rail, respectively;
A driving module coupled to the base stage and operated by being supplied with power to automatically move the moving block linearly
Includes, The moving stage is an automatic gonio stage, characterized in that the curved movement in conjunction with the linear movement of the moving block through the locking pin and the pin holder guide.
The method of claim 1,
The locking pin is formed in a cylindrical shape, the pin holder guide is spaced apart along the moving direction of the movable stage is an automatic gonio stage, characterized in that the line contact or point contact with the outer peripheral surface of the locking pin.
The method of claim 1,
Both side surfaces of the lower end of the movable stage is equipped with side guide rollers, the outer circumferential surface of the rail block in contact with the mutually opposite inner surface so as to guide the movement path of the movable stage.
The method according to any one of claims 1 to 3,
Automatic gonio stage, characterized in that the guide rail portion is formed in the center of the upper surface of the base stage to guide the linear movement path of the moving block.
The method of claim 4, wherein
The drive module
An actuating rod having a thread formed on an outer circumferential surface thereof and penetrating the moving block and screwed with the moving block; And
A drive motor for rotationally driving the working rod
And the moving block moves linearly along the guide rail part by the rotation of the operating rod.
The method of claim 5, wherein
And an actuating rod connected to the motor shaft of the drive motor through a flexible coupling.

KR1020120054434A 2012-05-22 2012-05-22 Automatic gonio-stage KR101184423B1 (en)

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101396405B1 (en) 2013-02-26 2014-05-19 애니모션텍 주식회사 Stage tilting appratus
TWI602638B (en) * 2016-06-04 2017-10-21 高明鐵企業股份有限公司 Slide table having a function of adjusting angle
CN107511803A (en) * 2016-06-16 2017-12-26 高明铁企业股份有限公司 Has the accurate slide unit of angle regulation function
KR101901822B1 (en) * 2018-04-20 2018-09-27 삼승테크(주) Goniometer Stage
KR102110499B1 (en) * 2019-07-04 2020-05-13 퀸시스(주) Gonio-stage
KR102110689B1 (en) * 2018-11-23 2020-05-14 (주)에이치엠웍스 Goniometer stage
KR102204907B1 (en) * 2019-10-23 2021-01-19 티아이에스 주식회사 Camera module inspection angle control apparatus
KR102384501B1 (en) * 2021-09-15 2022-04-12 (주)에이이엠테크 Connector Pin Bending Apparatus

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100393186B1 (en) 1997-09-12 2003-09-19 삼성전자주식회사 Optical goniometer transfer device
KR100824795B1 (en) 2008-01-02 2008-04-23 이대봉 The goniometer of the focus constancy
KR100881373B1 (en) 2007-08-23 2009-02-02 주식회사 에스엠 엔터테인먼트 Camera support using goniometer
JP2009113157A (en) 2007-11-07 2009-05-28 Suruga Seiki Kk Inclined stage

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100393186B1 (en) 1997-09-12 2003-09-19 삼성전자주식회사 Optical goniometer transfer device
KR100881373B1 (en) 2007-08-23 2009-02-02 주식회사 에스엠 엔터테인먼트 Camera support using goniometer
JP2009113157A (en) 2007-11-07 2009-05-28 Suruga Seiki Kk Inclined stage
KR100824795B1 (en) 2008-01-02 2008-04-23 이대봉 The goniometer of the focus constancy

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101396405B1 (en) 2013-02-26 2014-05-19 애니모션텍 주식회사 Stage tilting appratus
TWI602638B (en) * 2016-06-04 2017-10-21 高明鐵企業股份有限公司 Slide table having a function of adjusting angle
CN107511803A (en) * 2016-06-16 2017-12-26 高明铁企业股份有限公司 Has the accurate slide unit of angle regulation function
KR101901822B1 (en) * 2018-04-20 2018-09-27 삼승테크(주) Goniometer Stage
KR102110689B1 (en) * 2018-11-23 2020-05-14 (주)에이치엠웍스 Goniometer stage
KR102110499B1 (en) * 2019-07-04 2020-05-13 퀸시스(주) Gonio-stage
KR102204907B1 (en) * 2019-10-23 2021-01-19 티아이에스 주식회사 Camera module inspection angle control apparatus
KR102384501B1 (en) * 2021-09-15 2022-04-12 (주)에이이엠테크 Connector Pin Bending Apparatus

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