KR101184423B1 - Automatic gonio-stage - Google Patents
Automatic gonio-stage Download PDFInfo
- Publication number
- KR101184423B1 KR101184423B1 KR1020120054434A KR20120054434A KR101184423B1 KR 101184423 B1 KR101184423 B1 KR 101184423B1 KR 1020120054434 A KR1020120054434 A KR 1020120054434A KR 20120054434 A KR20120054434 A KR 20120054434A KR 101184423 B1 KR101184423 B1 KR 101184423B1
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- South Korea
- Prior art keywords
- stage
- moving
- curved
- rail
- guide
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Details Of Measuring And Other Instruments (AREA)
Abstract
Description
The present invention relates to an automatic gonio stage. More specifically, by rotating the operating rod through the operation of the drive motor through the power supply to configure the curved movement stage, the movement stage can be moved in an automated manner instead of the user's manual operation, and a separate control unit Through precise control of the operating state of the drive motor, the curved moving distance of the moving stage can be adjusted more precisely.The moving stage moves through the rolling movement of the rotating roller while the moving stage is in linear contact with the rail block through the rotating roller. In this way, the curved movement resistance of the moving stage can be reduced to move the moving stage more smoothly and precisely, and the capacity of the drive motor can be reduced, thereby achieving cost reduction and compact structure. It's about the auto gonio stage.
In recent years, researches in all fields such as semiconductor devices have been progressing in the direction of high integration and high performance of semiconductor substrates in order to process more data in a short time. The gap between them continues to decrease, and if it is impossible to form a microstructure that includes a pattern with accurate dimensions on a semiconductor substrate, it may affect not only the defect of the microstructure itself but also subsequent processes, thereby increasing the overall defect rate of the semiconductor device. Since problems arise, it is very important to form microstructures with accurate dimensions on semiconductor substrates.
For this reason, the microstructure measurement process for determining whether the microstructures are formed with the correct dimensions before and after each process for forming the microstructures is also necessary. Accordingly, the gonio stage for determining the microstructure measurement process is required. It is developed and used.
The Goni stage is separated into a base stage and a moving stage, and the moving stage is configured to be curved on the upper surface of the base stage to form an arc. An optical component such as a camera or a laser is mounted on the upper surface of the moving stage and precisely moved along a curved path.
At this time, the operation structure for the curved movement of the moving stage is generally made through a power transmission structure such as a screw and a V-groove, the moving stage is seated in the form of surface contact with the curved rail portion of the base stage is curved along the curved rail portion It is constructed in a moving manner.
Therefore, it is difficult to precisely move the moving stage due to backlash or assembly tolerance, which occurs due to the power transmission structure of the screw and the V-groove, and because the moving stage moves in surface contact with the base stage, the frictional force increases to move the moving stage. There was a problem that the power required to move is relatively increased. In addition, there is a problem that the accuracy of the moving distance of the moving stage is lowered because the user moves the moving stage by moving the screw by manually operating the screw or the like.
The present invention has been invented to solve the problems of the prior art, the object of the present invention is to rotate the operating rod through the operation of the drive motor through the power supply is configured in a way to curve the moving stage, the user's manual work Instead, it provides an automatic gonio stage that can move the moving stage in an automated manner, and more precisely adjust the curved moving distance of the moving stage by precisely controlling the operating state of the drive motor through a separate control unit. .
Another object of the present invention is configured in such a way that the moving stage moves through the rolling movement of the rotating roller in the state of linear contact with the rail block through the rotating roller, the curved movement resistance of the moving stage is reduced to make the moving stage more smooth and It is possible to precisely move and at the same time reduce the capacity of the drive motor to provide an automatic gonio stage that can achieve cost reduction and compact structure.
Still another object of the present invention is to construct a power transmission structure for transmitting power to a moving stage by a locking pin and a pin holder bracket that is in line contact with each other and to support a relatively high load according to their line contact structure, thereby providing durability Not only can this be improved, but also the allowable load value of the optical component mounted on the moving stage can be set higher, and an automatic gonio stage capable of preventing the precision of the moving distance due to backlash or assembly tolerance can be prevented.
It is still another object of the present invention to provide an automatic gonio stage by mounting a side guide roller at the bottom of the moving stage, thereby preventing displacement in a direction perpendicular to the curved moving direction of the moving stage, thereby enabling more precise curved movement of the moving stage. To provide.
The present invention, the base stage; A rail block coupled to both sides of an upper surface of the base stage and having curved rail portions curved downwardly convex on opposite surfaces thereof; A moving block coupled to a center portion of the upper surface of the base stage so as to be linearly movable and having a locking pin mounted in a direction perpendicular to the moving direction; A lower stage, a pin holder guide is mounted downwardly to be engaged with the locking pin, and a plurality of rotating rollers are mounted at both sides of the lower rail so as to be inserted into the curved rail, respectively; And a driving module coupled to the base stage and supplied with power to automatically linearly move the movable block, wherein the movable stage is interlocked with the linear movement of the movable block through the engaging pin and the pin holder guide. It provides an automatic gonio stage characterized by moving the curve.
In addition, the locking pin is formed in a cylindrical shape, the pin holder guide may be spaced apart along the moving direction of the moving stage may be configured to engage in line contact or point contact with the outer peripheral surface of the locking pin.
In addition, side guide rollers each having an outer circumferential surface in contact with mutually opposite inner surfaces of the rail block may be mounted at both sides of the lower end of the moving stage to guide the moving path of the moving stage.
In addition, a guide rail portion may be formed at the center of the upper surface of the base stage to guide the linear movement path of the moving block.
In addition, the drive module has a thread formed on the outer circumferential surface penetrates the moving block and screwed with the moving block; And a driving motor for rotationally driving the working rod, wherein the moving block may be configured to linearly move along the guide rail by rotation of the working rod.
In addition, the motor shaft of the drive motor and the operating rod may be connected through a flexible coupling.
According to the present invention, by rotating the operating rod through the operation of the drive motor through the power supply to configure the moving stage in a curved manner, it is possible to move the moving stage in an automated manner instead of the user's manual, separate control unit Through precise control of the operating state of the drive motor has the effect that can be adjusted more precisely the curved moving distance of the moving stage.
In addition, the moving stage is configured in such a manner that the moving stage moves by rolling movement of the rotating roller while in linear contact with the rail block through the rotating roller, thereby reducing the curved movement resistance of the moving stage, thereby smoothly and accurately moving the moving stage. In addition, since the capacity of the drive motor can be reduced, cost reduction and compact structure can be achieved.
In addition, the power transmission structure for transmitting power to the moving stage is composed of a locking pin and a pin holder bracket that is in line contact with each other and can support a relatively high load according to their line contact structure, thereby improving durability The allowable load value of the optical component mounted on the moving stage can be set higher, and the accuracy of the moving distance due to the backlash or the assembly tolerance can be prevented.
In addition, by attaching the side guide roller to the lower portion of the moving stage, there is an effect of preventing the displacement in the perpendicular direction to the curved moving direction of the moving stage to enable more precise curved movement of the moving stage.
1 is a perspective view schematically showing the external appearance of an automatic gonio stage according to an embodiment of the present invention;
2 is a partially exploded perspective view schematically showing an assembly structure of an automatic Gonio stage according to an embodiment of the present invention;
Figure 3 is an exploded perspective view schematically showing the configuration of the automatic gonio stage according to an embodiment of the present invention,
4 and 5 are a longitudinal cross-sectional view and a cross-sectional view schematically showing the internal structure of the automatic gonio stage according to an embodiment of the present invention;
6 is an operating state diagram schematically showing an operating state of an automatic gonio stage according to an embodiment of the present invention.
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used to designate the same or similar components throughout the drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.
1 is a perspective view schematically showing the external appearance of the automatic gonio stage according to an embodiment of the present invention, and FIG. 2 is a partial exploded view schematically showing an assembly structure of the automatic gonio stage according to an embodiment of the present invention. 3 is an exploded perspective view schematically illustrating a configuration of an automatic gonio stage according to an embodiment of the present invention, and FIGS. 4 and 5 are internal structures of the automatic gonio stage according to an embodiment of the present invention. Is a longitudinal sectional view and a cross sectional view schematically.
The automatic gonio stage according to an embodiment of the present invention is a device capable of automatically moving a moving stage by a separate driving module instead of a manual operation by a user. The
The
The
The moving
The moving
In this case,
In addition, the
At this time, the locking
The
2 to 4, the
On the other hand, the
According to this configuration, the automatic gonio stage according to the embodiment of the present invention rotates the
At this time, the
In particular, in this case, as shown in the enlarged view of FIG. 4, the
Therefore, since the automatic Gonio stage according to an embodiment of the present invention requires a relatively small power required for curved movement of the moving
In addition, the automatic gonio stage according to an embodiment of the present invention is engaged in a state in which the
In addition, the lower side of the moving
6 is an operating state diagram schematically showing an operating state of an automatic gonio stage according to an embodiment of the present invention.
The automatic gonio stage according to one embodiment of the present invention operates to change the rotational direction of the
As shown in FIG. 6A, when the upper surface of the moving
That is, when the operating
In the same way, when the operating
As such, the Gonio stage according to the exemplary embodiment of the present invention linearly moves the moving
Since the
The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and variations without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be construed according to the following claims, and all technical ideas falling within the scope of the same shall be construed as falling within the scope of the present invention.
100: base stage 110: guide rail portion
200: rail block 210: curved rail portion
300: moving stage 320: rotating roller
330: pin holder guide 340: side guide turning
400: drive module 410: operating rod
420: drive motor 430: flexible coupling
500: moving block 510: locking pin
Claims (6)
A rail block coupled to both sides of an upper surface of the base stage and having curved rail portions curved downwardly convex on opposite surfaces thereof;
A moving block coupled to a center portion of the upper surface of the base stage so as to be linearly movable and having a locking pin mounted in a direction perpendicular to the moving direction;
A lower stage, a pin holder guide is mounted downwardly to be engaged with the locking pin, and a plurality of rotating rollers are mounted at both sides of the lower rail so as to be inserted into the curved rail, respectively;
A driving module coupled to the base stage and operated by being supplied with power to automatically move the moving block linearly
Includes, The moving stage is an automatic gonio stage, characterized in that the curved movement in conjunction with the linear movement of the moving block through the locking pin and the pin holder guide.
The locking pin is formed in a cylindrical shape, the pin holder guide is spaced apart along the moving direction of the movable stage is an automatic gonio stage, characterized in that the line contact or point contact with the outer peripheral surface of the locking pin.
Both side surfaces of the lower end of the movable stage is equipped with side guide rollers, the outer circumferential surface of the rail block in contact with the mutually opposite inner surface so as to guide the movement path of the movable stage.
Automatic gonio stage, characterized in that the guide rail portion is formed in the center of the upper surface of the base stage to guide the linear movement path of the moving block.
The drive module
An actuating rod having a thread formed on an outer circumferential surface thereof and penetrating the moving block and screwed with the moving block; And
A drive motor for rotationally driving the working rod
And the moving block moves linearly along the guide rail part by the rotation of the operating rod.
And an actuating rod connected to the motor shaft of the drive motor through a flexible coupling.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020120054434A KR101184423B1 (en) | 2012-05-22 | 2012-05-22 | Automatic gonio-stage |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020120054434A KR101184423B1 (en) | 2012-05-22 | 2012-05-22 | Automatic gonio-stage |
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Publication Number | Publication Date |
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KR101184423B1 true KR101184423B1 (en) | 2012-09-20 |
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ID=47113854
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020120054434A KR101184423B1 (en) | 2012-05-22 | 2012-05-22 | Automatic gonio-stage |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101396405B1 (en) | 2013-02-26 | 2014-05-19 | 애니모션텍 주식회사 | Stage tilting appratus |
TWI602638B (en) * | 2016-06-04 | 2017-10-21 | 高明鐵企業股份有限公司 | Slide table having a function of adjusting angle |
CN107511803A (en) * | 2016-06-16 | 2017-12-26 | 高明铁企业股份有限公司 | Has the accurate slide unit of angle regulation function |
KR101901822B1 (en) * | 2018-04-20 | 2018-09-27 | 삼승테크(주) | Goniometer Stage |
KR102110499B1 (en) * | 2019-07-04 | 2020-05-13 | 퀸시스(주) | Gonio-stage |
KR102110689B1 (en) * | 2018-11-23 | 2020-05-14 | (주)에이치엠웍스 | Goniometer stage |
KR102204907B1 (en) * | 2019-10-23 | 2021-01-19 | 티아이에스 주식회사 | Camera module inspection angle control apparatus |
KR102384501B1 (en) * | 2021-09-15 | 2022-04-12 | (주)에이이엠테크 | Connector Pin Bending Apparatus |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100393186B1 (en) | 1997-09-12 | 2003-09-19 | 삼성전자주식회사 | Optical goniometer transfer device |
KR100824795B1 (en) | 2008-01-02 | 2008-04-23 | 이대봉 | The goniometer of the focus constancy |
KR100881373B1 (en) | 2007-08-23 | 2009-02-02 | 주식회사 에스엠 엔터테인먼트 | Camera support using goniometer |
JP2009113157A (en) | 2007-11-07 | 2009-05-28 | Suruga Seiki Kk | Inclined stage |
-
2012
- 2012-05-22 KR KR1020120054434A patent/KR101184423B1/en active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100393186B1 (en) | 1997-09-12 | 2003-09-19 | 삼성전자주식회사 | Optical goniometer transfer device |
KR100881373B1 (en) | 2007-08-23 | 2009-02-02 | 주식회사 에스엠 엔터테인먼트 | Camera support using goniometer |
JP2009113157A (en) | 2007-11-07 | 2009-05-28 | Suruga Seiki Kk | Inclined stage |
KR100824795B1 (en) | 2008-01-02 | 2008-04-23 | 이대봉 | The goniometer of the focus constancy |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101396405B1 (en) | 2013-02-26 | 2014-05-19 | 애니모션텍 주식회사 | Stage tilting appratus |
TWI602638B (en) * | 2016-06-04 | 2017-10-21 | 高明鐵企業股份有限公司 | Slide table having a function of adjusting angle |
CN107511803A (en) * | 2016-06-16 | 2017-12-26 | 高明铁企业股份有限公司 | Has the accurate slide unit of angle regulation function |
KR101901822B1 (en) * | 2018-04-20 | 2018-09-27 | 삼승테크(주) | Goniometer Stage |
KR102110689B1 (en) * | 2018-11-23 | 2020-05-14 | (주)에이치엠웍스 | Goniometer stage |
KR102110499B1 (en) * | 2019-07-04 | 2020-05-13 | 퀸시스(주) | Gonio-stage |
KR102204907B1 (en) * | 2019-10-23 | 2021-01-19 | 티아이에스 주식회사 | Camera module inspection angle control apparatus |
KR102384501B1 (en) * | 2021-09-15 | 2022-04-12 | (주)에이이엠테크 | Connector Pin Bending Apparatus |
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