JP2009113157A - Inclined stage - Google Patents

Inclined stage Download PDF

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JP2009113157A
JP2009113157A JP2007289453A JP2007289453A JP2009113157A JP 2009113157 A JP2009113157 A JP 2009113157A JP 2007289453 A JP2007289453 A JP 2007289453A JP 2007289453 A JP2007289453 A JP 2007289453A JP 2009113157 A JP2009113157 A JP 2009113157A
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wall portion
bearing
guide groove
ball screw
inclined member
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JP4994193B2 (en
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Katsuaki Oishi
石 勝 昭 大
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Suruga Seiki Co Ltd
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Suruga Seiki Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an inclined stage which can ensure the accuracy thereof. <P>SOLUTION: The inclined stage has: a base 1 having a curved surface guide portion; an inclined member 2 moving along the curved surface guide portion of the base; a ball screw 11 rotatably supported by the base, and being rotatable forward/backward; a rotating means for rotatably driving the ball screw forward/backward; a female screw body 21 mounted in the inclined member 2, for being screwed onto the ball screw; a female screw body limiting means for limiting rotation of the female screw body; and a space 22S secured in the inclined member 2 and having opposed wall portions consisting of a first wall portion and a second wall portion formed in a direction orthogonal to a lengthwise direction of the ball screw. The inclined stage further has: a first bearing which is located in the space, and mounted on the inclined member 2 via a rod member 23 such that a peripheral portion abuts on the first wall portion but does not abut on the second wall portion; and a second bearing which is located in the space, and mounted on the inclined member 2 via the rod member 23 such that a peripheral portion thereof does not abut on the first wall portion but abuts on the second wall portion. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、傾斜ステージに係り、特に、精度を保つことができる傾斜ステージに関する。     The present invention relates to a tilt stage, and more particularly to a tilt stage capable of maintaining accuracy.

従来、駆動機構として、ウォームとウォームホイールを用いて、傾斜する傾斜ステージがある（例えば、特許文献１参照）。
この機構は、ウォームの軸が１回転することで、ウォームホイールに刻まれた歯が１つ分移動するようにしたものである。 Conventionally, there is a tilt stage that tilts using a worm and a worm wheel as a drive mechanism (see, for example, Patent Document 1).
This mechanism is such that one tooth engraved on the worm wheel moves by one rotation of the worm shaft.

特開平６−３０９０３５号公報JP-A-6-309035

しかしながら、上述の傾斜ステージの駆動にあっては、ウォームとウォームホイールによるため、歯面間の遊び、所謂「バックラッシュ」が必要なため、傾斜ステージの位置決めをする際、精度が出ないという問題点があり、この問題点を除去するために、「バックラッシュ」を抑えるよう、接触面のギャップをほぼ０に抑えようとすれば、軸の振れ、ウォームホイールの歯の状態により組立調整が困難であるという問題点が生じた。     However, since the tilt stage is driven by the worm and the worm wheel, play between the tooth surfaces, so-called “backlash”, is required, so that there is no accuracy when positioning the tilt stage. In order to eliminate this problem, it is difficult to adjust the assembly due to shaft runout and worm wheel teeth if the gap between the contact surfaces is reduced to almost 0 to reduce backlash. The problem that it is.

本発明は、上記の点を考慮してなされた傾斜ステージを提供することを目的とする。     An object of the present invention is to provide an inclined stage made in consideration of the above points.

本発明の傾斜ステージは、曲面案内部を有するベースと、このベースの前記曲面案内部に沿って移動する傾斜部材と、前記ベースに回転自在に支持された正逆に回転するボールネジと、このボールネジを正逆に回転駆動させる回転手段と 、前記傾斜部材に取り付けられると共に、前記ボールネジに螺合する雌ネジ体と、この雌ネジ体の回転の動きを規制する雌ネジ体規制手段と、前記傾斜部材内に対向壁部を有する空所を備え、前記対向壁部は、前記ボールネジの長手方向に直交する方向に設けた第１の壁部及び第２の壁部とを有し、前記空所内に位置し 、外周が前記第１の壁部に当接、前記第２の壁部に非当接するように前記傾斜部材に棒状部材を介して取り付けられた第１のベアリングと、前記空所内に位置し、外周が前記第１の壁部に非当接、前記第２の壁部に当接するように前記傾斜部材に前記棒状部材を介して取り付けられた第２のベアリングと、前記第１のベアリング及び前記第２のベアリングの前記傾斜部材への取り付は、前記棒状部材の外周に前記第１のベアリングの内輪、前記第２のベアリングの内輪をそれぞれ当接し、前記棒状部材の先端を前記傾斜部材にネジ止めしたものである。     The tilt stage according to the present invention includes a base having a curved surface guide portion, a tilt member that moves along the curved surface guide portion of the base, a ball screw that rotates in the forward and reverse directions supported rotatably on the base, and the ball screw. A rotating means for rotating the screw forward and backward, a female screw body that is attached to the inclined member and screwed into the ball screw, a female screw body regulating means that regulates the rotational movement of the female screw body, and the tilt A cavity having an opposing wall in the member, the opposing wall having a first wall and a second wall provided in a direction orthogonal to a longitudinal direction of the ball screw, A first bearing attached to the inclined member via a rod-like member so that an outer periphery thereof is in contact with the first wall portion and is not in contact with the second wall portion; Located and the outer periphery is the first wall A second bearing attached to the inclined member via the rod-shaped member so as to be in non-contact with the second wall, and the inclined member of the first bearing and the second bearing In the mounting, the inner ring of the first bearing and the inner ring of the second bearing are brought into contact with the outer periphery of the rod-shaped member, respectively, and the tip of the rod-shaped member is screwed to the inclined member.

また、請求項２記載の傾斜ステージは、請求項１記載の傾斜ステージにおいて、曲面案内部は、曲面案内溝であり、傾斜部材の前記曲面案内溝に対向する部位は、対向曲面案内溝であり、この対向曲面案内溝と前記曲面案内溝との間に位置し、前記対向曲面案内溝が前記曲面案内溝に沿って移動する動きを許容し、前記対向曲面案内溝が前記曲面案内溝から離脱するのを規制する規制部材とを備えているものである。     The tilt stage according to claim 2 is the tilt stage according to claim 1, wherein the curved surface guide portion is a curved surface guide groove, and a portion of the tilt member facing the curved surface guide groove is an opposed curved surface guide groove. , Located between the opposed curved guide groove and the curved guide groove, allowing the opposed curved guide groove to move along the curved guide groove, and separating the opposed curved guide groove from the curved guide groove. And a regulating member that regulates the operation.

請求項１記載の傾斜ステージによれば、ベースの曲面案内部に沿って移動する傾斜部材は、該傾斜部材に取り付けられた雌ネジ体に螺合する正逆に回転するボールネジにより駆動されるため、従来のウォームとウォームホイールによるものに比較し、摩耗が少なく、精度を保つことができ、しかも、傾斜部材内に対向壁部を有する空所を有し、前記対向壁部は、前記ボールネジの長手方向に直交する方向に設けた第１の壁部及び第２の壁部とを備え、前記空所内に位置し、外周が前記第１の壁部に当接、前記第２の壁部に非当接するように前記傾斜部材に棒状部材を介して取り付けられた第１のベアリングを用いて、傾斜部材を一方の方向へ傾斜させ、傾斜部材を逆の他方の方向へ傾斜させたい場合には 、前記空所内に位置し、外周が前記第１の壁部に非当接、前記第２の壁部に当接するように前記傾斜部材に前記棒状部材を介して取り付けられた第２のベアリングを用いて行うため、雌ネジ体の直線運動を傾斜部材の傾斜方向へとスムーズに伝達することができると共に、これら棒状部材、第１のベアリング、第２のベアリングは、傾斜部材の空所内に配置され、平面視、傾斜部材より外側に張り出さない分、平面視、コンパクトな傾斜ステージを得ることができる。     According to the tilting stage of the first aspect, the tilting member that moves along the curved surface guide portion of the base is driven by a ball screw that rotates in the forward and reverse directions that is screwed into the female screw body attached to the tilting member. Compared to the conventional worm and worm wheel, the wear is less, the accuracy can be maintained, and the inclined member has a space having an opposing wall, and the opposing wall is formed by the ball screw. A first wall portion and a second wall portion provided in a direction perpendicular to the longitudinal direction, located in the space, an outer periphery abutting against the first wall portion, and the second wall portion When it is desired to incline the inclined member in one direction and incline the inclined member in the other opposite direction by using the first bearing attached to the inclined member via the rod-like member so as not to contact. , Located in the void, the outer periphery is Since the second bearing is attached to the inclined member via the rod-shaped member so as not to come into contact with the wall portion of 1 and to come into contact with the second wall portion, linear movement of the female screw body is performed. The rod-shaped member, the first bearing, and the second bearing can be smoothly transmitted in the tilt direction of the tilt member, and are disposed in the space of the tilt member and project outside the tilt member in plan view. Therefore, it is possible to obtain a compact tilt stage in plan view.

本発明の傾斜ステージの一実施例を図面を参照して説明する。
図１乃至図１０において、Ｋは傾斜ステージで、傾斜ステージ（ゴニオステージ）Ｋは、曲面案内部（例えば、曲面案内溝）１Ａ、１Ａを有するベース１と 、このベース１の曲面案内部（例えば、曲面案内溝）１Ａ、１Ａに沿って移動する傾斜部材２とから概略的に構成され、傾斜部材２の上方に回転中心Ｏ（図４参照）があり、Ｏを支点として傾斜部材２の面が回動するものである。 An embodiment of the tilt stage of the present invention will be described with reference to the drawings.
1 to 10, K is an inclination stage, and an inclination stage (gonio stage) K includes a base 1 having curved surface guide portions (for example, curved surface guide grooves) 1A and 1A, and a curved surface guide portion (for example, a curved surface guide portion). , Curved guide grooves) 1A, 1A, and a slanting member 2 that moves along 1A. The slanting member 2 has a rotation center O (see FIG. 4) above the slanting member 2, and the surface of the slanting member 2 with O as a fulcrum. Will rotate.

１１は、ベース１に回転自在に支持された正逆に回転するボールネジである。このボールネジ１１は、回転手段（図示せず）により正逆に回転駆動されるようになっている。
回転手段（図示しないが、例えば、正逆に回転するモーターで、４０は、モーターの回転軸である。）は、カップリングＣを介して、ボールネジ１１に回転を伝達するようになっている。ボールネジ１１は、第１、第２の軸受け３１、３２で支持され、ボールネジ１１の一方の側に第１の部材１２が、ボールネジ１１の他方の側に第２の部材１３が、それぞれ取り付けられている。
第１の部材１２は第１の軸受け３１に支持されるベアリング３１ａの内輪に当接し、ベアリング３１ａの外輪に非当接し、また、第２の部材１３はベアリング３２ａの内輪に当接し、ベアリング３２ａの外輪に非当接となって、ボールネジ１１の回転を支持するようになっている。 Reference numeral 11 denotes a ball screw that is rotatably supported by the base 1 and rotates in the forward and reverse directions. The ball screw 11 is driven to rotate forward and backward by a rotating means (not shown).
A rotating means (not shown, for example, a motor that rotates in the forward and reverse directions, 40 is a rotating shaft of the motor) transmits rotation to the ball screw 11 via the coupling C. The ball screw 11 is supported by first and second bearings 31 and 32, and a first member 12 is attached to one side of the ball screw 11, and a second member 13 is attached to the other side of the ball screw 11. Yes.
The first member 12 contacts the inner ring of the bearing 31a supported by the first bearing 31, and does not contact the outer ring of the bearing 31a. The second member 13 contacts the inner ring of the bearing 32a, and the bearing 32a. The outer ring is not in contact with the outer ring and supports the rotation of the ball screw 11.

また、図５、図８、図１０及び図１１に示す２１は、傾斜部材２に取り付けられると共に、ボールネジ１１に螺合する雌ネジ体で、この雌ネジ体２１は、ボールネジ１１の正逆の回転により、直線方向に移動するように、雌ネジ体規制手段１０により雌ネジ体２１の回転の動きを規制される。
雌ネジ体規制手段１０は、例えば、雌ネジ体２１とベース１の対向する面のそれぞれにあって、雌ネジ体２１の移動方向に設けられた雌ネジ体２１の側の案内溝２１Ａと、ベース１の側の案内溝１Ａ’と、この案内溝２１Ａと案内溝１Ａ’の間に位置し、雌ネジ体２１がボールネジ１１上を移動する動きを許容し、雌ネジ体２１が回転するのを規制する規制部材１０Ａとにより、構成される。また 、規制部材１０Ａは、例えば、案内溝２１Ａと案内溝１Ａ’とに亘って転動する転動体１０Ａ１を保持する保持器１０Ａ２である（特開２００６−４６４４４号公報記載の第１の保持器４参照）。雌ネジ体規制手段１０は、これに限らず、案内溝２１Ａ内を摺動する摺動部材（図示せず）をベース１の側に設けても良く、また、逆に、案内溝１Ａ’を摺動する摺動部材（図示せず）を雌ネジ体２１の側に設けても良い。 5, 8, 10, and 11 is a female screw body that is attached to the inclined member 2 and screwed into the ball screw 11, and this female screw body 21 is the reverse of the ball screw 11. The rotational movement of the female screw body 21 is restricted by the female screw body regulating means 10 so as to move in the linear direction by the rotation.
The female screw body regulating means 10 includes, for example, a guide groove 21A on the side of the female screw body 21 provided in the moving direction of the female screw body 21 on each of the opposing surfaces of the female screw body 21 and the base 1; Positioned between the guide groove 1A ′ on the base 1 side and between the guide groove 21A and the guide groove 1A ′, the movement of the female screw body 21 on the ball screw 11 is allowed, and the female screw body 21 rotates. And a regulating member 10A that regulates the above. The restricting member 10A is, for example, a retainer 10A2 that retains a rolling element 10A1 that rolls over the guide groove 21A and the guide groove 1A ′ (a first retainer described in JP-A-2006-46444). 4). The female screw body regulating means 10 is not limited to this, and a sliding member (not shown) that slides in the guide groove 21A may be provided on the base 1 side, and conversely, the guide groove 1A ′ is provided. A sliding member (not shown) that slides may be provided on the female screw body 21 side.

また、図５、図９及び図１０に示す２２Ｓは、傾斜部材２内に対向壁部を有する空所で、上記対向壁部は、ボールネジ１１の長手方向に直交する方向に設けた第１の壁部２２Ａ及び第２の壁部２２Ｂとを有している。
また、２４は、傾斜部材２に棒状部材２３を介して取り付けられた第１のベアリングで、第１のベアリング２４は、空所２２Ｓ内に位置し、第１のベアリング２４の外周が第１の壁部２２Ａに当接、第２の壁部２２Ｂとの間に隙間Ｄ1が形成され、第１のベアリング２４の外周が第２の壁部２２Ｂに非当接するようになっている（図８参照）。
また、２５は、棒状部材２３を介して取り付けられた第２のベアリングで、第２のベアリング２５は、空所２２Ｓ内に位置し、第１の壁部２２Ａとの間に隙間Ｄ2が形成され、第２のベアリング２５の外周が第１の壁部２２Ａに非当接、 第２のベアリング２５の外周が第２の壁部２２Ｂに当接するようになっている（図７参照）。
第１の壁部２２Ａ及び第２の壁部２２Ｂを有する部材は、コ字状部材２２であり、Ｓ1は、隣接する第１のベアリング２４、第２のベアリング２５が接触を避けるためのスペーサーであり、Ｓ2は、第２のベアリング２５とＬ字状部材２６ とが接触を避けるためのスペーサーである。
第１のベアリング２４及び第２のベアリング２５の傾斜部材２への取り付は 、棒状部材２３の外周に第１のベアリング２４の内輪、第２のベアリング２５の内輪をそれぞれ当接し、棒状部材２３の先端を傾斜部材２にネジ止めするようにしている。
コ字状部材２２は、ボルトＢ1 により雌ネジ体２１と結合して一体化される 。 Further, 22S shown in FIGS. 5, 9, and 10 is a space having an opposing wall portion in the inclined member 2, and the opposing wall portion is provided in a direction orthogonal to the longitudinal direction of the ball screw 11. It has a wall portion 22A and a second wall portion 22B.
Reference numeral 24 denotes a first bearing attached to the inclined member 2 via a rod-like member 23. The first bearing 24 is located in the cavity 22S, and the outer periphery of the first bearing 24 is the first bearing. It abuts the wall portion 22A, the gap D 1 is formed between the second wall portion 22B, the outer periphery of the first bearing 24 is adapted to noncontact with the second wall portion 22B (FIG. 8 reference).
Further, 25 is a second bearing mounted via a rod-shaped member 23, the second bearing 25 is located within the cavity 22S, the gap D 2 between the first wall portion 22A is formed The outer periphery of the second bearing 25 is not in contact with the first wall portion 22A, and the outer periphery of the second bearing 25 is in contact with the second wall portion 22B (see FIG. 7).
The member having a first wall portion 22A and the second wall portion 22B, a U-shaped member 22, S 1 is a spacer for the first bearing 24 adjacent the second bearing 25 avoid contact S 2 is a spacer for avoiding contact between the second bearing 25 and the L-shaped member 26.
The first bearing 24 and the second bearing 25 are attached to the inclined member 2 by bringing the inner ring of the first bearing 24 and the inner ring of the second bearing 25 into contact with the outer periphery of the rod-shaped member 23, respectively. The tip of each is screwed to the inclined member 2.
The U-shaped member 22 is integrated with the female screw body 21 by a bolt B 1 .

また、図６及び図７に示すように、傾斜部材２の曲面案内溝１Ａ、１Ａに対向する部位は、対向曲面案内溝２Ａ、２Ａであり、この曲面案内溝１Ａ、１Ａに沿って移動する対向曲面案内溝２Ａ、２Ａとは、規制部材２０Ａにより、対向曲面案内溝２Ａ、２Ａが曲面案内溝１Ａ、１Ａから離脱するのを規制するようになっている。
規制手段２０Ａは、例えば、曲面案内溝１Ａと対向曲面案内溝２Ａとの間に位置し、対向曲面案内溝２Ａが曲面案内溝１Ａに沿って移動する動きを許容し、対向曲面案内溝２Ａが曲面案内溝１Ａから離脱するのを規制するものである。
この規制部材２０Ａは、例えば、曲面案内溝１Ａと対向曲面案内溝２Ａとに亘って転動する転動体２０Ａ１と、この転動体２０Ａ１を保持する保持器２０Ａ２とで構成される（特開２００６−４６４４４号公報記載の第１の保持器４参照）。この規制手段２０Ａは、これに限らず、曲面案内溝１Ａ内を摺動する摺動部材（図示せず）を傾斜部材２の側に設けても良く、また、逆に、対向曲面案内溝２Ａを摺動する摺動部材（図示せず）をベース１の側に設けても良い。 As shown in FIGS. 6 and 7, the portions of the inclined member 2 that face the curved guide grooves 1A and 1A are opposed curved guide grooves 2A and 2A, which move along the curved guide grooves 1A and 1A. The opposed curved guide grooves 2A and 2A are configured to regulate the opposed curved guide grooves 2A and 2A from being separated from the curved guide grooves 1A and 1A by the regulating member 20A.
The restricting means 20A is located, for example, between the curved guide groove 1A and the opposing curved guide groove 2A, allows the opposing curved guide groove 2A to move along the curved guide groove 1A, and the opposing curved guide groove 2A The separation from the curved guide groove 1A is restricted.
The restriction member 20A includes, for example, a rolling element 20A1 that rolls over the curved guide groove 1A and the opposed curved guide groove 2A, and a holder 20A2 that holds the rolling element 20A1 (Japanese Patent Laid-Open No. 2006-2006). (Refer to the first cage 4 described in Japanese Patent No. 46444). The restricting means 20A is not limited to this, and a sliding member (not shown) that slides in the curved guide groove 1A may be provided on the inclined member 2 side, and conversely, the opposed curved guide groove 2A. A sliding member (not shown) may be provided on the base 1 side.

従って、上述した傾斜ステージＫによれば、ベース１の曲面案内部１Ａに沿って移動する傾斜部材２は、該傾斜部材２に取り付けられた雌ネジ体２１に螺合する正逆に回転するボールネジ１１により駆動されるため、従来のウォームとウォームホイールによるものに比較し、摩耗が少なく、精度を保つことができ、しかも、傾斜部材２内に対向壁部を有する空所２２Ｓを有し、前記対向壁部は、ボールネジ１１の長手方向に直交する方向に設けた第１の壁部２２Ａ及び第２の壁部２２Ｂとを備え、空所２２Ｓ内に位置し、外周が第１の壁部２２Ａに当接、第２の壁部２２Ｂに非当接するように傾斜部材２に棒状部材２３を介して取り付けられた第１のベアリング２４を用いて、傾斜部材２を一方の方向へ傾斜させ（図１０参照）、傾斜部材２を逆の他方の方向へ傾斜させたい場合には、空所２２Ｓ内に位置し、外周が第１の壁部２２Ａに非当接、第２の壁部２２Ｂに当接するように傾斜部材２に棒状部材２３を介して取り付けられた第２のベアリング２５を用いて行うため（図１１参照）、雌ネジ体２１の直線運動を傾斜部材２の傾斜方向へとスムーズに伝達することができると共に、これら棒状部材２３、第１のベアリング２４、第２のベアリング２５は、傾斜部材２の空所２２Ｓ内に配置され、平面視、傾斜部材２より外側に張り出さない分、平面視、コンパクトな傾斜ステージＫを得ることができる（図１乃至図３参照）。     Therefore, according to the tilt stage K described above, the tilt member 2 that moves along the curved surface guide portion 1A of the base 1 is a ball screw that rotates in the reverse direction that is screwed into the female screw body 21 attached to the tilt member 2. 11, the wear is less than that of the conventional worm and worm wheel, and the accuracy can be maintained. Moreover, the inclined member 2 has a cavity 22S having an opposing wall portion, The opposing wall portion includes a first wall portion 22A and a second wall portion 22B provided in a direction orthogonal to the longitudinal direction of the ball screw 11, is located in the space 22S, and has an outer periphery of the first wall portion 22A. The inclined member 2 is inclined in one direction by using the first bearing 24 attached to the inclined member 2 via the rod-like member 23 so as to be in contact with the second wall portion 22B (see FIG. 10), inclined member 2 When it is desired to incline in the other direction, the inclined member 2 is rod-shaped so that the outer periphery is located in the space 22S and the outer periphery is not in contact with the first wall portion 22A and is in contact with the second wall portion 22B. Since the second bearing 25 attached via the member 23 is used (see FIG. 11), the linear motion of the female screw body 21 can be smoothly transmitted to the tilt direction of the tilt member 2, and these The rod-shaped member 23, the first bearing 24, and the second bearing 25 are disposed in the space 22S of the inclined member 2, and are a plan view and a compact tilt stage that does not protrude outward from the tilt member 2 in plan view. K can be obtained (see FIGS. 1 to 3).

図１は、本発明の一実施例の傾斜ステージの概略的斜視図である。FIG. 1 is a schematic perspective view of a tilt stage according to an embodiment of the present invention. 図２は、図１の一部を切り欠いて示す概略的一部切り欠き平面図である。FIG. 2 is a schematic partially cutaway plan view showing a part of FIG. 図３は、図２とは異なる図１の一部を切り欠いて示す概略的一部切り欠き平面図である。FIG. 3 is a schematic partially cutaway plan view showing a part of FIG. 1 that is different from FIG. 図４は、図３の４−４線による概略的断面図である。4 is a schematic cross-sectional view taken along line 4-4 of FIG. 図５は、図３の５−５線による概略的断面図である。FIG. 5 is a schematic cross-sectional view taken along line 5-5 of FIG. 図６は、図３の６−６線による概略的断面図である。6 is a schematic cross-sectional view taken along line 6-6 of FIG. 図７は、図６の一部を拡大して示す概略的一部拡大図である。FIG. 7 is a schematic partially enlarged view showing a part of FIG. 6 in an enlarged manner. 図８は、図３の一部を拡大して示す概略的一部拡大図である。FIG. 8 is a schematic partially enlarged view showing a part of FIG. 3 in an enlarged manner. 図９は、図８の部材の一部を分解して示す概略的一部分解斜視図である。FIG. 9 is a schematic partially exploded perspective view showing a part of the member of FIG. 8 in an exploded manner. 図１０は、図５の摺動部材が右側に移動した状態を示す概略的断面図である。FIG. 10 is a schematic cross-sectional view showing a state where the sliding member of FIG. 5 has moved to the right side. 図１１は、図５の摺動部材が左側に移動した状態を示す概略的断面図である。FIG. 11 is a schematic cross-sectional view showing a state in which the sliding member of FIG. 5 has moved to the left side.

符号の説明Explanation of symbols

Ｋ 傾斜ステージ
１ ベース
１Ａ 曲面案内部
２ 傾斜部材
１０ 雌ネジ体規制手段
１１ ボールネジ
２１ 雌ネジ体
２２Ａ 第１の壁部
２２Ｂ 第２の壁部
２２Ｓ 空所
２３ 棒状部材
２４ 第１のベアリング
２５ 第２のベアリング K Inclined stage 1 Base 1A Curved surface guide 2 Inclined member 10 Female screw body restricting means 11 Ball screw 21 Female screw body 22A First wall portion 22B Second wall portion 22S Empty space 23 Rod-shaped member
24 First bearing 25 Second bearing

Claims (2)

曲面案内部を有するベースと、
このベースの前記曲面案内部に沿って移動する傾斜部材と、
前記ベースに回転自在に支持された正逆に回転するボールネジと、
このボールネジを正逆に回転駆動させる回転手段と、
前記傾斜部材に取り付けられると共に、前記ボールネジに螺合する雌ネジ体と、
この雌ネジ体の回転の動きを規制する雌ネジ体規制手段と、
前記傾斜部材内に対向壁部を有する空所を備え、前記対向壁部は、前記ボールネジの長手方向に直交する方向に設けた第１の壁部及び第２の壁部とを有し、
前記空所内に位置し、外周が前記第１の壁部に当接、前記第２の壁部に非当接するように前記傾斜部材に棒状部材を介して取り付けられた第１のベアリングと、
前記空所内に位置し、外周が前記第１の壁部に非当接、前記第２の壁部に当接するように前記傾斜部材に前記棒状部材を介して取り付けられた第２のベアリングと、
前記第１のベアリング及び前記第２のベアリングの前記傾斜部材への取り付は、前記棒状部材の外周に前記第１のベアリングの内輪、前記第２のベアリングの内輪をそれぞれ当接し、前記棒状部材の先端を前記傾斜部材にネジ止めしたものである
ことを特徴とする傾斜ステージ。 A base having a curved guide,
An inclined member that moves along the curved surface guide portion of the base;
A forward and reverse rotating ball screw rotatably supported by the base;
Rotating means for rotating the ball screw forward and backward,
A female screw body attached to the inclined member and screwed into the ball screw;
Female screw body regulating means for regulating the rotational movement of the female screw body;
The inclined member includes a space having an opposing wall portion, and the opposing wall portion includes a first wall portion and a second wall portion provided in a direction orthogonal to a longitudinal direction of the ball screw,
A first bearing located in the void and attached to the inclined member via a rod-shaped member so that an outer periphery abuts on the first wall portion and does not abut on the second wall portion;
A second bearing located in the void and attached to the inclined member via the rod-shaped member so that an outer periphery thereof is not in contact with the first wall portion and is in contact with the second wall portion;
The first bearing and the second bearing are attached to the inclined member by bringing the inner ring of the first bearing and the inner ring of the second bearing into contact with the outer periphery of the rod-shaped member, respectively. A tilt stage characterized in that the tip of is tilted to the tilt member. 曲面案内部は、曲面案内溝であり
傾斜部材の前記曲面案内溝に対向する部位は、対向曲面案内溝であり、
この対向曲面案内溝と前記曲面案内溝との間に位置し、前記対向曲面案内溝が前記曲面案内溝に沿って移動する動きを許容し、前記対向曲面案内溝が前記曲面案内溝から離脱するのを規制する規制部材と、
を備えていることを特徴とする 請求項１記載の傾斜ステージ。 The curved surface guide portion is a curved surface guide groove, and the portion of the inclined member that faces the curved surface guide groove is an opposed curved surface guide groove,
Located between the opposed curved guide groove and the curved guide groove, the opposed curved guide groove is allowed to move along the curved guide groove, and the opposed curved guide groove is separated from the curved guide groove. A regulating member that regulates,
The tilt stage according to claim 1, comprising:
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KR101234346B1 (en) * 2012-05-22 2013-03-15 주식회사 재원 Superprecision gonio-stage
KR101259346B1 (en) 2011-11-18 2013-04-30 사단법인 전북대학교자동차부품금형기술혁신센터 A section defect testing apparatus
CN103084974A (en) * 2013-01-20 2013-05-08 台州市黄岩西诺模具有限公司 Grinding method of die workpiece with adjustable angle
JP2016078162A (en) * 2014-10-16 2016-05-16 中央精機株式会社 Stage attitude adjusting device
TWI602638B (en) * 2016-06-04 2017-10-21 高明鐵企業股份有限公司 Slide table having a function of adjusting angle
CN107511803A (en) * 2016-06-16 2017-12-26 高明铁企业股份有限公司 Has the accurate slide unit of angle regulation function
KR102110689B1 (en) * 2018-11-23 2020-05-14 (주)에이치엠웍스 Goniometer stage
KR20200097414A (en) * 2019-02-08 2020-08-19 (주)마이크로모션텍 Gonio Stage and Curved Guide Unit
CN111960251A (en) * 2020-08-28 2020-11-20 江苏银环新材料科技有限公司 Steel bar truss hoisting method and steel bar truss hoisting tool thereof

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012000721A (en) * 2010-06-17 2012-01-05 Honda Motor Co Ltd Workpiece rest
CN102294601A (en) * 2011-08-03 2011-12-28 湖北三环锻压设备有限公司 Numerically controlled slight angle inclining workbench
KR101184424B1 (en) * 2011-10-11 2012-09-20 주식회사 재원 Goniostage
KR101259346B1 (en) 2011-11-18 2013-04-30 사단법인 전북대학교자동차부품금형기술혁신센터 A section defect testing apparatus
KR101184423B1 (en) 2012-05-22 2012-09-20 주식회사 재원 Automatic gonio-stage
KR101234346B1 (en) * 2012-05-22 2013-03-15 주식회사 재원 Superprecision gonio-stage
CN103084974A (en) * 2013-01-20 2013-05-08 台州市黄岩西诺模具有限公司 Grinding method of die workpiece with adjustable angle
JP2016078162A (en) * 2014-10-16 2016-05-16 中央精機株式会社 Stage attitude adjusting device
TWI602638B (en) * 2016-06-04 2017-10-21 高明鐵企業股份有限公司 Slide table having a function of adjusting angle
CN107511803A (en) * 2016-06-16 2017-12-26 高明铁企业股份有限公司 Has the accurate slide unit of angle regulation function
KR102110689B1 (en) * 2018-11-23 2020-05-14 (주)에이치엠웍스 Goniometer stage
KR20200097414A (en) * 2019-02-08 2020-08-19 (주)마이크로모션텍 Gonio Stage and Curved Guide Unit
KR102181611B1 (en) * 2019-02-08 2020-11-23 (주)마이크로모션텍 Gonio Stage and Curved Guide Unit
CN111960251A (en) * 2020-08-28 2020-11-20 江苏银环新材料科技有限公司 Steel bar truss hoisting method and steel bar truss hoisting tool thereof
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