KR102110499B1 - Gonio-stage - Google Patents

Abstract

A gonio-stage of the present invention comprises: a housing; a moving stage arranged on an upper surface of the housing and performing a circular movement in a first direction and a second direction; a driving motor installed at one side of the housing to generate a driving force; a driving force conversion unit installed between the driving motor and the moving stage to convert a rotational movement of the driving motor into a linear reciprocating movement; and a circular movement conversion unit installed between the housing and the moving stage to convert the linear reciprocating movement of the driving force conversion unit into a circular movement, wherein the circular movement conversion unit consists of support members mounted to both side surfaces of the moving stage respectively, a slide rail unit formed to protrude with a predetermined radius of curvature on both sides of an upper surface of the housing, first and second cam followers mounted to the support members to be able to rotate and coming in contact with a lower surface of the slide rail unit to be rolled, and a third cam follower mounted to the support members to be able to rotate and coming in contact with an upper surface of the slide rail unit to be rolled. Therefore, the radius of curvature of the slide rail unit can be freely manufactured, and manufacturing time and cost can be reduced.

Description

Gonio Stage {GONIO-STAGE}

The present invention relates to a gonio stage capable of freely setting a radius of curvature, shortening a production time, and enabling precision motion.

In general, a stage device for positioning is used in equipment used in manufacturing processes such as semiconductors, optical products, and electronic products to accurately perform positioning at the micro or nano level.

These positioning stages have been used as essential equipment in recent high-tech fields such as object positioning in an electron scanning microscope, cell manipulation, micromachining and assembly, positioning and orientation of optical devices, and wafer alignment.

The Gonio stage refers to a circular drive stage having a center of rotation on a vertical line in the center of the table surface.It is used for determining the position of a fine angle in an optical pickup adjustment and inspection device, or for correcting the attachment state of parts in a process such as assembly or mounting, and a camera It can be used for attaching lenses or liquid crystal panels, and is widely used in production and inspection lines of various parts.

Registered Patent Publication 10-1901822 (September 18, 2018) Registered Patent Publication 10-1234346 (February 07, 2013)

Accordingly, an object of the present invention is to provide a gonio stage in which a slide rail portion is integrally formed in a housing to freely manufacture a curved surface R value and to reduce production time and cost.

Another object of the present invention is to provide a gonio stage capable of preventing a malfunction due to long friction and no malfunction since the cam follower rolls in the slide rail portion.

Another object of the present invention is to provide a gonio stage capable of precise motion since the first preload block and the second preload block press and move the first pressing cam follower and the second pressing cam follower in the first direction and the second direction, respectively. Is to do.

Another object of the present invention is to provide a gonio stage that can easily and conveniently adjust the sensor position by adjusting the sensor position from the outside.

In order to achieve the above object, the gonio stage of the present invention is disposed on the upper surface of the housing, the moving stage moving in an arc motion in the first direction and the second direction, and installed on one side of the housing to generate driving force The driving motor is installed between the driving motor and the moving stage, and a driving force converting unit for converting the rotational motion of the driving motor into a linear reciprocating motion, and is provided between the housing and the moving stage to circularly move the linear reciprocating motion of the driving power converting unit. It includes a circular motion conversion unit for converting, the circular motion conversion unit is a support member mounted on both sides of the moving stage, and a slide rail portion formed to protrude with a constant curvature radius on both sides of the upper surface of the housing, It is rotatably mounted on the support member and is in contact with the lower surface of the slide rail. Is rotatably mounted on the first and second cam follower movement, the support member contacts the top surface of the slide rail portion includes a third cam follower that is rolling.

The housing has a slide rail portion protruding outwardly on both side upper surfaces, and guide plate portions formed with curved surfaces having a predetermined curvature half on both side surfaces protruding, and the slide rail portion and the guide plate portion are integral to the housing. Can be formed.

The lower surface of the slide rail portion may be formed of a curved surface having a constant radius of curvature, and the guide plate portion may be formed such that an upper surface on which the lower surface of the slide rail portion is located has the same radius of curvature as the slide rail portion.

The driving force converting unit is connected to a driving motor, the screw bar being rotated together, a screw block screwed to the screw bar to rotate linearly when the screw bar is rotated, a pressurized cam follower mounted on the lower surface of the moving stage, and the nut block. It may include a preload block that is mounted on the upper surface and presses the pressing cam follower so that the moving stage moves in the first direction and the second direction.

The pressurized cam follower may include a first pressurized cam follower rotatably mounted on one side of the body portion mounted on the lower surface of the moving stage, and a second pressurized cam follower rotatably mounted on the other side of the body portion.

The preload block is mounted on one side edge of the upper surface of the nut block and is disposed to contact the first pressurized cam follower, and the first preload block presses the first pressurized cam follower when the nut block moves in the first direction, and the first preload block The second preload block may include a second preload block that is mounted at a diagonal edge and is disposed in contact with the second pressurized cam follower to press the second pressurized cam follower when the nut block is moved in the second direction.

On one side of the housing, a sensor unit for detecting a moving position of a moving stage is installed, and the sensor unit includes a sensor rail fixed to a side of the housing, a plurality of sensors slidably mounted on the sensor rail, and the movement A sensor dog that is mounted on the side of the stage to allow a plurality of sensors to sense the position of the moving stage, and a sensor cover that is mounted to surround the plurality of sensors and is provided with sensor position adjustment holes to adjust the positions of the plurality of sensors from the outside. It may include.

The plurality of sensors includes a first limit sensor detecting a limit position when the moving stage is moved in a first direction, a second limit sensor detecting a limit position when the moving stage is moved in a second direction, and the second sensor. It may include a home sensor is disposed between the limit sensor and the second limit sensor to detect the movement position of the moving stage.

As described above, in the Gonio stage of the present invention, the slide rail part is integrally formed in the housing to freely manufacture the radius of curvature and reduce manufacturing time and cost.

In addition, since the cam follower is rolled in the slide rail portion, there is no friction, so the life is long and malfunction can be prevented.

In addition, another object of the present invention is that the first preload block and the second preload block press and move the first pressurized cam follower and the second pressurized cam follower in the first direction and the second direction, respectively, so that the gonio stage capable of precise motion Is to provide

Another object of the present invention is to provide a gonio stage that can easily and conveniently adjust the sensor position by adjusting the sensor position from the outside.

1 is a perspective view of a Gonio stage according to an embodiment of the present invention.
2 is a cross-sectional view of a gonio stage according to an embodiment of the present invention.
3 is a perspective view of the cover of the Gonio stage according to an embodiment of the present invention.
4 is an exploded perspective view of a gonio stage according to an embodiment of the present invention.
5 is a perspective view of a circular motion conversion unit of a rotating stage according to an embodiment of the present invention.
6 is a partial perspective view of a circular motion conversion unit of a rotating stage according to an embodiment of the present invention.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings. In this process, the size or shape of components shown in the drawings may be exaggerated for clarity and convenience of description. In addition, terms specifically defined in consideration of the configuration and operation of the present invention may vary depending on the intention or custom of the user or operator. Definitions of these terms should be made based on the contents throughout this specification.

1 is a perspective view of a gonio stage according to an embodiment of the present invention, FIG. 2 is a cross-sectional view of a gonio stage according to an embodiment of the present invention, and FIG. 3 is a gonio stage according to an embodiment of the present invention The cover is an open perspective view, Figure 4 is an exploded perspective view of the gonio stage according to an embodiment of the present invention.

Referring to FIGS. 1 to 4, the gonio stage according to an embodiment includes a housing 10 and a moving stage 12 disposed on an upper surface of the housing 10 and circularly moved in the first direction and the second direction. With the drive motor 14 installed on one side of the housing 10 to generate driving force, and installed between the drive motor 14 and the moving stage 12, the rotational motion of the drive motor 14 is linearly reciprocated. It includes a driving force conversion unit 20 for converting, and a circular motion conversion unit 18 installed between the housing 16 and the moving stage 12 to convert the linear reciprocating motion of the driving force conversion unit 20 into circular motion. .

The housing 10 is formed with a slide rail portion 20 having a predetermined radius of curvature protruding outwardly on both sides of the upper surface, and a guide plate portion 22 on which the upper surface is formed with an arcuate curved surface is projected on both sides thereof. Is formed.

The front cover 24 is mounted on the front surface of the housing 10, and a connection joint 26 that transmits power by connecting the drive motor 14 and the screw bar 30 is mounted on the rear surface of the housing 10. .

Since the slide rail part 20 can be manufactured like the housing 10, there is no need to manufacture the slide rail part 20, thus shortening the production time and reducing cost.

In addition, since the radius of curvature of the slide rail portion 20 is set and integrally formed when the housing 10 is manufactured, the radius of curvature of the slide rail portion 20 can be freely set.

The driving force converting unit 16 is connected to the driving motor 14 and is rotated together with a screw bar 30 and a screw block screwed to the screw bar 30, and the nut block 32 which is linearly reciprocated when the screw bar 30 is rotated ), The pressurized cam followers 36 and 38 mounted on the lower surface of the moving stage 12, and mounted on the upper surface of the nut block 32 and pressurizing the pressurized cam followers 36 and 38 to move the moving stage 12 It includes a preload block (40,42) to be moved in the first direction and the second direction.

The screw bar 30 is disposed centrally inside the housing 10, one end of which is rotatably supported on the front cover 24, the other end of which is rotatably supported on the rear side of the housing 10, and the connecting joint ( 26) It is connected to the drive motor 14 by coupling, and when the drive motor 14 is rotated, it is rotated together.

The pressurized cam followers 36 and 38 are first pressurized cam followers 36 rotatably mounted on one side of the body portion 34 mounted on the lower surface of the moving stage 12 and the other of the body portion 34. And a second pressing cam follower 38 rotatably mounted on the side.

The preload blocks 40 and 42 are mounted on one edge of the upper surface of the nut block 32 and disposed to be in contact with the first pressing cam follower 36 so that when the nut block 32 moves in the first direction, the first pressing cam follower The first preload block 40 for pressing (36), the first preload block 40 and the diagonal block is mounted on the corner and is disposed to be in contact with the second pressing cam follower 38, the nut block 32 is second And a second preload block 42 for urging the second pressing cam follower 38 when moved in the direction.

The first pressing cam follower 36 is in contact with the first preload block 40, and the second pressing cam follower 38 is in contact with the second preload block 42 so that the first preload block 40 is first pressurized. When the cam follower 40 is pressed, the moving stage 12 moves in the first direction, and when the second preload block 42 presses the second pressing cam follower 38, the moving stage 12 moves in the second direction. Is moved.

The first pressing cam follower 36 is in contact with the side surface of the first preloading block 40 and is rolled on the surface of the first preloading block 40, and the second pressing cam follower 38 has a second preloading block 42 ), So that it is rolling on the surface of the second preload block 42, thereby minimizing friction.

And the first pressing cam follower 36 is in contact with a certain pressure on the side of the first preload block 40, the second pressing cam follower 38 is in contact with a certain pressure on the side of the second preload block 42 The movement of the moving stage 12 in the first direction and the second direction can be made precisely.

As shown in FIG. 5, the circular motion converting unit 18 protrudes with a support member 50 mounted on both sides of the moving stage 12 and a constant radius of curvature on both sides of the upper surface of the housing 10. The slide rail portion 20 and the first and second cam followers 52 and 54 which are rotatably mounted on the support member 50 and are in rolling motion on the lower surface of the slide rail portion 20, It includes a third cam follower 56 that is rotatably mounted on the support member 50 and is in rolling motion in contact with the upper surface of the slide rail part 20.

The support member 50 is formed in a flat surface so that the upper surface is fixed to the lower portion of the side of the moving stage 12, the lower surface is guide plate portion 22 so as to be located on the guide plate portion 22 formed on both sides of the lower surface of the housing 10 It is formed of a curved surface having a radius of curvature equal to the radius of curvature of.

The inner surface of the support member 50 is formed to protrude a curved portion 58 having the same radius of curvature as the slide rail portion 20 to prevent interference when the slide rail portion 20 is circularly moved, and the first cam follower (52) and the second cam follower (54) are mounted at regular intervals below the inner surface of the support member (50), and the third cam follower (56) is the first cam follower (52) and the second cam follower (54) ) And is mounted on the inner surface of the support member 50.

As shown in FIG. 6, the slide rail part 20 is a circular arc because the first cam follower and the second cam follower are in contact with the lower surface and the third cam follower is in contact with the upper surface for sliding motion. It is possible to prevent shaking during exercise and precise movement is possible.

A sensor unit 60 is installed on one side of the housing 10 to sense the moving position of the moving stage 12 and apply the signal to the control unit.

The sensor unit 60 includes a sensor rail 68 fixed to the side surface of the guide plate unit 22, a plurality of sensors 70, 72, 74 mounted slidably on the sensor rail 68, and a moving stage ( 12) is mounted on the side of the sensor dog 62 to allow the plurality of sensors (70,72,74) to detect the position of the moving stage (12) and the plurality of sensors (70,72,74) It includes a sensor cover 64 in which the sensor position adjustment hole 66 is formed so as to be able to adjust the positions of the plurality of sensors 70, 72 and 74 from the outside.

The plurality of sensors 70, 72, and 74 includes a first limit sensor 70 that senses a limit position when the moving stage 12 is moved in the first direction, and a moving stage 70 to be moved in the second direction. When the second limit sensor 74 for detecting the limit position, and the first limit sensor 70 and the second limit sensor 74 is disposed between the home sensor 72 to detect the movement position of the moving stage 12 It includes.

The sensor cover 64 is formed with a slot-shaped sensor position adjustment hole 66 in the longitudinal direction to insert a tool or the like into the sensor position adjustment hole 66 to adjust the positions of the plurality of sensors 70, 72 and 74. have.

In addition, an angle display scale capable of confirming a moving position of the moving stage 12 is formed on a side opposite to a side on which the sensor cover 64 of the housing 10 is mounted.

As described above, the sensor unit 60 according to the present embodiment is provided with a sensor position adjustment hole 66 formed in the sensor cover 64, so that the sensor positions of the plurality of sensors 70, 72, and 74 can be adjusted from the outside. This is easy and convenient.

As described above, the operation of the gonio stage according to the exemplary embodiment of the present invention will be described below.

When the driving motor 14 is driven in one direction, the screw bar 30 connected to the driving motor 14 is rotated in one direction, and the nut block 32 screwed to the screw bar 30 is moved in the first direction. Then, the first preload block 40 mounted on the nut block 32 presses the first pressing cam follower 36, and accordingly, the moving stage 12 is moved in the first direction.

At this time, if the first cam follower 52, the second cam follower 54, and the third cam follower 56 mounted on the moving stage 12 are moved along the slide rail portion 20 having a constant radius of curvature, The moving stage 12 moves in the first direction while performing an arc motion.

And when the driving motor 14 is driven in the other direction, the screw bar 30 connected to the driving motor 12 is rotated in the other direction, and the nut block 32 screwed to the screw bar 30 is moved in the second direction. Is moved. Then, the second preload block 42 mounted on the nut block 32 presses the second pressing cam follower 38, and accordingly the moving stage 12 is moved in the second direction.

At this time, if the first cam follower 52, the second cam follower 54, and the third cam follower 56 mounted on the moving stage 12 are moved along the slide rail portion 20 having a constant radius of curvature, The moving stage 12 moves in the second direction while performing an arc motion.

In the above, the present invention has been shown and described with reference to specific preferred embodiments, for example, but the present invention is not limited to the above-described embodiments, and is within the scope of the present invention without departing from the spirit of the present invention. Various changes and modifications will be possible by those who have.

10: housing 12: moving stage
14: driving motor 16: driving force conversion unit
18: circular motion conversion unit 20: slide rail unit
30: screw bar 32: nut block
34: body portion 36: first pressing cam follower
38: second pressure cam follower 40: first preload block
42: second preload block 50: support member
52: 1st Cam Followers 54: 2nd Cam Followers
56: third cam follower 60: sensor unit

Claims (8)

housing;
A moving stage disposed on an upper surface of the housing and performing circular arc motion in a first direction and a second direction;
A driving motor installed on one side of the housing to generate driving force;
A driving force converter installed between the driving motor and the moving stage to convert rotational motion of the driving motor into a linear reciprocating motion; And
It is installed between the housing and the moving stage includes a circular motion conversion unit for converting the linear reciprocating motion of the driving force conversion unit to circular motion,
The circular motion conversion unit is supported on each side of the moving stage support member;
A slide rail part formed to protrude with a certain radius of curvature on both sides of the upper surface of the housing;
First and second cam followers that are rotatably mounted on the support member and are brought into contact with the lower surface of the slide rail part to perform rolling motion; And
A gonio stage including a third cam follower that is rotatably mounted on the support member and is in contact with the upper surface of the slide rail portion to perform rolling motion. According to claim 1,
The housing has a slide rail portion protruding outwardly on both side upper surfaces, and guide plate portions formed with curved surfaces having a constant curvature on both side surfaces protrude, and the slide rail portion and the guide plate portion are integrally formed with the housing. Gonio stage formed. According to claim 2,
The slide rail portion has a lower surface formed of a curved surface having a constant radius of curvature, and the guide plate portion is a gonio stage in which an upper surface on which the lower surface of the slide rail portion is positioned has the same radius of curvature as the slide rail portion. According to claim 1,
The drive force conversion unit is connected to the drive motor screw bar is rotated together;
A nut block that is screwed to the screw bar and is reciprocated linearly when the screw bar is rotated;
A bearing mounted on a lower surface of the moving stage; And
A gonio stage including a preload block mounted on the upper surface of the nut block and pressing the bearing to move the moving stage in the first direction and the second direction. The method of claim 4,
The bearing includes a first pressing cam follower rotatably mounted on one side of a body part mounted on a lower surface of the moving stage; And
A gonio stage including a second pressing cam follower rotatably mounted to the other side of the body portion. The method of claim 5,
The preload block is mounted on one side edge of the upper surface of the nut block and is disposed to be in contact with the first pressing cam follower, the first preloading block for pressing the first pressing cam follower when the nut block is moved in the first direction; And
A gonio stage comprising a second preload block mounted on the first preload block and a diagonal edge and disposed to contact a second pressurized cam follower to press the second pressurized cam follower when the nut block is moved in the second direction. According to claim 1,
A sensor unit for detecting a moving position of the moving stage is installed on one side of the housing,
The sensor unit is a sensor rail fixed to the side of the housing;
A plurality of sensors slidably mounted on the sensor rail;
A sensor dog mounted on a side of the moving stage to allow a plurality of sensors to sense the location of the moving stage; And
A gonio stage including a sensor cover mounted around the plurality of sensors and having a sensor position adjustment hole to adjust positions of the plurality of sensors from the outside. The method of claim 7,
The plurality of sensors includes a first limit sensor that senses a limit position when the moving stage is moved in the first direction,
A second limit sensor detecting a limit position when the moving stage is moved in a second direction,
A goni stage including a home sensor disposed between the first limit sensor and the second limit sensor to detect a moving position of the moving stage.

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