JPH0811068A - Direct acting rotary stage device - Google Patents

Abstract

PURPOSE:To precisely and finely rotate a rotary stage by arranging plural rollers, which are brought into contact with a passive plate projecting to a direct acting member and having parallel both faces while clamping the parallel both faces in the X direction, in the direct acting member. CONSTITUTION:A direct acting member 7 is linearly moved in the X direction by means of a driving shaft 3. Subsequently, in a rotary member P, a passive plate 8 is rotated because of flexure by means of plural rollers 10 so that its both parallel faces are always directed in the X direction, and the linear movement in the X direction of the driving shaft 3 presses the passive plate 8. As a result, the rotary member P is moved in the circumference direction of a rotary stage 2. In other words, the rotary stage 2 is rotated smoothly and finely. An angle of rotation of the rotary stage 2 is precisely read by means of a micrometer rotation indicating scale indicating the rotation and the movement in the X direction of a grip part 5 in the driving shaft 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention provides a table (hereinafter referred to as a rotary stage) on which an inspection object, a workpiece, etc. (hereinafter referred to as a work) is placed or fixed, in a forward or reverse direction with respect to a fixed base. The present invention relates to a direct-acting rotary stage device that performs angular rotary movement (hereinafter referred to as rotation).

[0002]

2. Description of the Related Art Conventional rotation used in an observation device such as a microscope, an inspection device, or a machine tool (hereinafter, referred to as a device to be used) for rotating a work with respect to a predetermined plane and setting it at a predetermined position. As shown in the perspective view of FIG. 6, the stage device includes a fixed base 1 and a rotary stage 2 rotatable with respect to the fixed base 1.

Then, the passive projection 2f is provided on the side surface of the rotary stage 2 so as to project, and by rotating the drive handle 5 screwed to the fixed base 1, the tip end of the drive shaft 3 advances and the passive projection 2f. Is pressed to compress and retract the spring pressing shaft 3b, which is in contact with the opposite surface of the passive protrusion 2f, to rotate the rotary stage 2 in the positive direction within a predetermined angle range.
Further, the drive handle 5 is rotated in the reverse direction to retract the tip portion 3a, and the rotary stage 2 is rotated in the reverse direction within a predetermined angle range by pressing the reverse surface of the passive projection 2f by the spring pressing shaft 3b. Has become. The rotatable angular range was about 5 degrees in each of the forward and reverse directions from the predetermined center position.

In place of the spring pressing shaft 3b, a drive handle screwed to the fixed base 1 is provided on the opposite surface side of the passive protrusion 2f, and the rotary stage 2 is moved forward by rotating both drive handles. -There is also a rotary stage device configured to rotate in opposite directions.

[0005]

However, in the conventional rotary stage device described above, the rotary stage can be reliably operated unless the pressing force applied to the opposite surface of the passive projection 2f by the spring pressing shaft 3b is sufficiently strong.・ It is difficult to move precisely. However, the strong reverse surface pressing force applied to the passive protrusion 2f makes the turning operation by the drive handle heavy and difficult. In addition, there is a restriction on the weight of the work placed on the rotary stage in order to utilize the pressing force on the opposite surface of the passive protrusion 2f.

On the other hand, in the structure in which the drive handles are provided on both sides of the passive protrusion 2f, manual operation with both hands is troublesome,
As a result, it has been difficult to move the rotary stage accurately and easily.

The present invention has been made to solve the above-mentioned problems of the prior art, and the operation of the drive shaft is easy,
An object of the present invention is to provide a direct-acting rotary stage device capable of accurately and precisely rotating the rotary stage.

[0008]

Therefore, a linear motion rotary stage device according to the present invention is provided with a rotary stage, a fixed base for rotatably holding the rotary stage, and a screwed guide to the fixed base. And a drive shaft that moves in the X-axis direction that is parallel to the rotation surface of the rotary stage and that does not intersect the axis of the rotary stage, and rotation means that converts the X-direction movement of the drive shaft into rotation drive of the rotary stage. A direct-acting rotary stage device comprising: a rotation of a grip portion of the drive shaft and a rotation display scale indicating a movement in the X direction, wherein the rotation means engages with the movement of the drive shaft and guides the fixed base. A linear motion member that moves in the X direction without being rotated, and a rotary member that is provided on the rotary stage and has a rotary shaft that is parallel to the rotary shaft of the rotary stage,
The rotary member is provided with a passive plate that projects toward the linear motion member and has parallel parallel surfaces, and a plurality of rollers that are provided on the linear motion member and sandwich and abut both parallel parallel surfaces of the passive plate in the X direction. The above-mentioned object is to be achieved by the constitution characterized by the above.

Alternatively, the rotating means is a linear member that engages with the movement of the drive shaft and is guided by the fixed base to move in the X direction without rotating, and a rotating shaft of the rotating stage provided on the rotating stage. A rotating member having a rotating shaft parallel to the driving member, a drive plate provided on the linearly moving member and having parallel parallel surfaces facing in the direction of the rotary stage and facing in the X direction, and a drive plate provided on the rotating member. A structure in which a plurality of rollers sandwiching and abutting parallel both sides are provided, or a linear motion member which is engaged with the movement of the drive shaft and is guided by the fixed base to move in the X direction without rotating; A rotary member provided on the linearly moving member, the rotary member having an axis parallel to the rotary shaft of the rotary stage, a drive plate provided on the rotary member and having parallel parallel surfaces protruding toward the rotary stage, and provided on the rotary stage Orient both parallel sides of the drive plate in the direction of rotation Or a linear motion member that is engaged with the movement of the drive shaft and moves in the X direction without being rotated by being guided by the fixed base. A rotating member provided on the moving member and having a shaft center parallel to the rotating shaft of the rotating stage, and a passive plate provided on the rotating stage having both parallel surfaces facing in the rotating direction and projecting toward the rotating member. And a configuration in which the rotary member is provided with a plurality of rollers that sandwich and contact the parallel both sides of the passive plate, and the object is achieved.

[0010]

With the above construction, the drive shaft provided in the fixed base can be rotated to move the drive shaft in the X direction, and the rotating stage rotates the rotary stage with respect to the fixed base.

The rotating means includes a linear moving member that engages with the movement of the drive shaft and is guided by the fixed base to move in the X direction without rotating, and a rotating member provided on the rotary stage to drive the drive plate. The passive plate has two parallel surfaces that project toward each other, and a plurality of rollers that are provided on the direct-acting member and contact the parallel surface of the passive plate in the X direction. When linearly moved, the rotary member is rotated so that both parallel surfaces of the passive plate are always oriented in the X direction due to being sandwiched by the plurality of rollers, and the linear movement of the drive shaft in the X direction is performed by pressing the passive plate. The member can be moved in the circumferential direction of the rotary stage, that is, the rotary stage can be smoothly rotated.

The rotary member is provided on the linear moving member instead of being provided on the rotary stage, and the plate having parallel parallel surfaces is provided on the linear moving member side instead of being provided on the rotary stage side to form the passive plate. The drive plate is configured to be sandwiched by a plurality of rollers provided on the rotary stage side, and the drive shaft is linearly moved in the X direction, so that the parallel both surfaces are brought into contact with the plurality of rollers as described above. In the contact state, the normal contact state is maintained without rattling, and the rotary stage can be reliably and finely rotated.

It should be noted that there is no structure that hinders the movement of the drive shaft, such as the reverse surface pressing of the passive projection portion by the spring pressing shaft of the conventional device, the operation by the drive shaft is easy, and the rotation angle range of the rotary stage is large. Can be extended.

Then, the rotation angle of the rotary stage can be accurately read from the rotary display scale indicating the rotation of the handle portion of the drive shaft and the movement in the X direction, so that the workpiece can be reliably and precisely rotated by the predetermined angle. be able to.

[0015]

EXAMPLES A linear motion rotary stage device according to the present invention will be described below with reference to examples.

FIG. 1 is a perspective view showing the outline of the configuration of one embodiment, and the same or corresponding portions as those of the conventional example are designated by the same reference numerals. 2 is a horizontal sectional view of the embodiment, and FIG.
Is a vertical sectional view.

Reference numeral 1 denotes a fixed base on which the working apparatus is mounted or fixed, and 2 is a rotary stage on which a work (not shown) is mounted and mounted. The rotary stage 2 is a fixed base 1.
It is configured so that it can be smoothly rotated in both forward and reverse directions by being engaged and guided by.

As shown in the figure, the fixed base 1 has a drive shaft mounting member 1a attached integrally to the opening of the wall surface, and a guide cylinder 1b for holding the drive shaft 3 is mounted in the end opening thereof. It is fixed. A female screw portion 1c is formed on the inner surface of the guide cylinder 1b.

The drive shaft 3 inserted into the guide cylinder 1b and screwed into the female screw portion 1c is parallel to the rotation surface of the rotary stage 2 (horizontal direction in the illustrated example), and the rotational axis of the rotary stage 2 is the same. The drive shaft 3 is configured so as to be directed toward an intermediate portion with the inner wall of the circumference (hereinafter, referred to as X direction), and the drive shaft 3 is moved in the X direction by rotating the handle portion 5 attached to the outer end portion of the drive shaft 3.
It is configured to move in the direction.

The end surface portion of the handle portion 5 of the drive shaft 3 which contacts the outer peripheral surface of the guide cylinder 1b of the fixed base 1 and the outer peripheral surface thereof shows the rotation and movement of the handle portion 5 of the drive shaft 3 in the X direction. Micrometer-like rotary display scales 6a and 6b are engraved. In order to improve the precision of screwing, it is possible to add an auxiliary mechanism such as providing a slit in the female screw portion 1c and tightening the outer peripheral surface portion.

A linear member 7 is attached to the other end of the drive shaft 3 via a thrust bearing. The linear motion member 7 is guided by the fixed base 1 and does not rotate to drive the drive shaft 3
It is disposed inside the fixed base 1 via a guide mechanism that can be smoothly moved in the X direction by the movement in the X direction.

When the rotary stage 2 is in the reference position with respect to the fixed base, the linear moving member 7 is positioned so as to be closest to the rotary shaft of the rotary stage 2, and the rotary stage facing the linear moving member 7 is positioned. A passive plate 8 having two parallel vertical surfaces is rotatably protruded and attached to the lower surface of 2.

That is, the surface of the passive plate 8 is rectangular and smooth, and both surfaces are formed parallel to each other. The cylindrical shaft 8a provided at the upper end of the rectangular shape is provided on the rotary stage above the axis of the drive shaft 3. It is vertically attached to the lower surface via a rotating member 9 such as a bearing.

A plurality of rollers 10 sandwiching and contacting both parallel surfaces of the passive plate 8 are provided on the linear motion member 7 so that both parallel surfaces of the passive plate 8 face in the X direction. In this embodiment, the plurality of rollers 10 sandwiching and abutting the parallel both sides abut each two rollers 10 on each surface of the parallel both sides, that is, sandwiching the parallel both sides in a rectangular shape and abutting the parallel both sides in the X direction. It is composed of four rollers 10 driven toward each other.

Then, two rollers 10 contacting one side of the parallel plates of the passive plate 8 or a total of four rollers 10 on both sides.
Has an eccentric shaft end portion which is inserted and fixed in a mounting hole of the linear motion member 7, and has an eccentricity adjusting shaft configuration in which the interval between the rollers 10 sandwiching both parallel surfaces of the passive plate 8 can be adjusted. 8 is configured so that it can be driven by appropriately sandwiching and abutting and holding 8 without a gap.

A structure for smoothly guiding the rotation of the rotary stage 2, a structure for smoothly guiding the movement of the linear motion member 7 in the X direction, and a rotation member 9 attached to the base portion of the passive plate 8 for the passive plate 8. The specific configuration for smoothly guiding the rotation and rotation of the is as follows: a stepped portion for smoothly guiding the movement and rotation without rattling, a configuration with a streak-shaped guide groove, and other conventional configurations. Various configurations can be selected and used. In addition to the configuration that allows smooth sliding and movement / rotation with the interposition of lubricating oil, input for movement is provided by the configuration in which small balls or small rollers are interposed as shown in the example of the embodiment. It is also possible to reduce the gap and prevent looseness in the gap.

FIG. 4 shows the handle portion 5 of the drive shaft 3 of the above embodiment.
FIG. 6 is an explanatory diagram schematically showing the main points of a configuration in which the drive shaft 3 is moved in the X direction by rotating the and the rotary stage 2 is rotated.

That is, a plurality of parallel surfaces of the passive plate 8 attached to the rotating member 9 of the rotating stage 2 are provided on the linear moving member 7 which is engaged with the movement of the drive shaft 3 and moves in the X direction without rotating. With the configuration in which the rollers 10 are sandwiched and brought into contact with each other, the rotary stage 2 can be rotated smoothly and precisely while the parallel both surfaces of the passive plate 8 are oriented in the X direction by the movement of the drive shaft 3 in the X direction.

By virtue of the construction in which the plurality of rollers 10 are brought into contact with both sides of the passive plate 8, a reverse drive mechanism by a spring is unnecessary, and the work can be moved more easily and reliably than in the conventional device. Further, the rotation angle of the rotary stage 2 can be accurately read by the micrometer-shaped rotary display scales 6a and 6b indicating the rotation of the grip portion 5 of the drive shaft 3 and the movement in the X direction.

(Other Embodiments) In the above embodiment, the drive shaft 3 is used.
As shown in FIG. 4, the pivotal member 9 is provided on the rotary stage to move the rotary shaft parallel to the rotary shaft of the rotary stage. Also, the passive plate 8 is provided on the rotating member 9 and protrudes toward the linear motion member 7 and has parallel parallel surfaces. A plurality of rollers 10 are provided on the linear motion member 7 and both parallel surfaces of the passive plate 8 are X-shaped. It is configured so as to sandwich and contact in the direction. In the other embodiments, the structure of this portion is different, and therefore the description will be made with reference to the schematic explanatory view of FIG.

In the embodiment shown in FIG. 5A, the rotary member 9 is provided on the rotary stage and has a rotary shaft parallel to the rotary shaft of the rotary stage 2, and the drive plate 11 is a linear member. 7 has parallel parallel surfaces that project toward the rotary stage 2 and that face in the X direction. A plurality of rollers 10 are provided on the rotary member 9 of the rotary stage 2 and are arranged so as to sandwich and abut both parallel surfaces of the drive plate 11.

In the embodiment shown in FIG. 5B, the rotary member 9a has a rotary shaft provided on the linear member 7 and parallel to the rotary shaft of the rotary stage 2, and the drive plate 11 is connected to the linear member. 7 rotation member 9
It is provided at a and projects toward the rotary stage 2 and has parallel parallel surfaces. The plurality of rollers 10 are provided on the rotary stage 2 and are arranged so as to sandwich and abut both parallel surfaces of the drive plate 11 in the rotating direction.

In the embodiment shown in FIG. 5C, the rotary member 9a has a rotary shaft provided on the linear member 7 and parallel to the rotary shaft of the rotary stage 2, and the passive plate 8 is the rotary stage 2. Has parallel parallel surfaces oriented in the rotation direction and protrudes in the direction of the rotation member 9a. The plurality of rollers 10 are provided in the rotating member 9a and sandwich the both parallel surfaces of the passive plate 8 to abut.

With each of the above structures, a plurality of rollers 10 are provided.
Can appropriately abut the drive plate 11 or the passive plate 8 and, by the movement of the drive shaft 3 in the X direction, can exert the effect of rotating the rotary stage reliably, precisely and easily as in the above-described embodiment.

Further, in the above embodiment, a plurality of rollers 10 that sandwich and abut both the parallel surfaces of the passive plate 8 or the drive plate 11 are provided.
Is composed of four rollers sandwiching the parallel both sides in a rectangular shape, the plurality of rollers 10 contacting the parallel both sides of the passive plate 8 or the drive plate 11 are two rollers contacting one side of the parallel both sides. 10 and one roller 10 contacting the other surface of the intermediate portion of the two rollers 10 are arranged in a triangular shape, and both parallel surfaces are sandwiched and contacted to each other. The effect of can be exhibited.

In the above description of the embodiment, the bottom surface of the fixed base 1 is a horizontal plane, the upper surface of the rotary stage 2 is a horizontal plane, and the X direction is a horizontal direction. However, the drive shaft 3 moves. The X direction to be performed may be a direction that is parallel to the rotation surface of the rotary stage 2 and does not intersect the rotation axis of the rotation stage 2.

That is, the fixed base 1 is not limited to a shape having a horizontal bottom surface, but a shape corresponding to the installation conditions,
The rotary shaft of the rotary stage 2 is not limited to the vertical direction, but various operations can be performed according to another embodiment having a configuration in which the fixed base 1 is provided with a guide mechanism that can rotate in a direction required for position setting and rotary movement of the work. It is possible to provide an example corresponding to the request.

Further, the rotary stage 2 may be provided with an intake hole connected to a negative pressure mechanism on the surface of the rotary stage 2 so that the workpiece can be attracted and fixed easily and easily to be removed. it can.

[0039]

As described above, according to the present invention,
By rotating the drive shaft provided on the fixed base, the drive shaft can be moved in the X direction, and the rotary stage can be rotated with respect to the fixed base.

Then, the linear member which is engaged with the movement of the drive shaft and is guided by the fixed base to move in the X direction without rotating, and the passive plate or the drive plate having the parallel both sides, or the passive plate or the parallel to the drive plate. Multiple rollers that sandwich both sides and contact
The drive shaft is linearly moved in the X direction by a rotating means in combination with a passive plate, a drive plate, or a rotating member that rotates the installed state of a plurality of rollers, so that a plurality of parallel surfaces and a plurality of parallel surfaces can be obtained. The contact state with the roller can be maintained in a normal contact state without rattling, and the rotary stage can be reliably and precisely rotated.

It should be noted that there is no structure that hinders the movement of the drive shaft, such as the reverse surface pressing of the passive protrusion portion by the spring pressing shaft of the conventional device, the operation by the drive shaft is easy, and the rotation angle range of the rotary stage is easy. Can be extended.

Then, the rotation angle of the rotary stage can be accurately read from the rotary display scale indicating the rotation of the handle portion of the drive shaft and the movement in the X direction, and the workpiece can be rotated reliably and precisely at the predetermined angle. be able to.

[Brief description of drawings]

FIG. 1 is a perspective view of an embodiment.

FIG. 2 is a horizontal sectional view of one embodiment.

FIG. 3 is a vertical sectional view of one embodiment.

FIG. 4 is an explanatory diagram schematically showing the main points of the configuration of one embodiment.

FIG. 5 is an explanatory diagram schematically showing the main points of the configuration of another embodiment.

FIG. 6 is a perspective view of a conventional rotary stage device.

[Explanation of symbols]

 1 Fixed Base 1a Drive Shaft Mounting Member 1b Guide Tube 2 Rotating Stage 3 Drive Shaft 5 Drive Shaft Handle 6a, 6b Rotation Display Scale 7 Direct Acting Member 8 Passive Plate 9, 9a Rotating Member 10 Roller 11 Drive Plate

Claims (6)

[Claims] 1. A rotary stage, a fixed base for rotatably holding the rotary stage, and a threaded guide to the fixed base that is parallel to the rotary surface of the rotary stage and does not intersect the axis of the rotary stage. A drive shaft that moves in the X-axis direction,
A direct-acting rotary stage device provided with a rotating means for converting the movement of the drive shaft in the X direction into a rotational drive of the rotary stage, and a rotary display scale indicating the rotation of the handle portion of the drive shaft and the X direction movement. The rotating means includes a linear moving member that engages with the movement of the drive shaft and is guided by the fixed base to move in the X direction without rotating, and is parallel to the rotating shaft of the rotating stage provided on the rotating stage. A rotary member having a rotary shaft, a passive plate provided on the rotary member and projecting toward the linear motion member and having parallel parallel surfaces, and a parallel surface of the passive plate provided on the linear motion member facing the X direction. A direct-acting rotary stage device comprising a plurality of rollers that are in contact with each other. 2. A rotary stage, a fixed base for rotatably holding the rotary stage, and a screwed guide to the fixed base that is parallel to the rotary surface of the rotary stage and does not intersect the axis of the rotary stage. A drive shaft that moves in the X-axis direction,
A direct-acting rotary stage device provided with a rotating means for converting the movement of the drive shaft in the X direction into a rotational drive of the rotary stage, and a rotary display scale indicating the rotation of the handle portion of the drive shaft and the X direction movement. The rotating means includes a linear moving member that engages with the movement of the drive shaft and is guided by the fixed base to move in the X direction without rotating, and is parallel to the rotating shaft of the rotating stage provided on the rotating stage. Member having a rotating shaft, a drive plate having parallel parallel surfaces provided in the linear motion member and projecting toward the rotary stage and oriented in the X direction, and parallel surfaces of the drive plate provided in the rotation member. A direct-acting rotary stage device comprising a plurality of rollers that sandwich and abut. 3. A rotary stage, a fixed base that holds the rotary stage rotatably, and a screwed guide to the fixed base that is parallel to the rotary surface of the rotary stage and does not intersect the axis of the rotary stage. A drive shaft that moves in the X-axis direction,
A direct-acting rotary stage device provided with a rotating means for converting the movement of the drive shaft in the X direction into a rotational drive of the rotary stage, and a rotary display scale indicating the rotation of the handle portion of the drive shaft and the X direction movement. The rotating means is a linear movement member that is engaged with the movement of the drive shaft and is guided by the fixed base to move in the X direction without rotating, and the rotation stage provided on the linear movement member. A rotary member having an axis parallel to the axis, a drive plate provided on the rotary member and protruding toward the rotary stage and having parallel parallel surfaces, and a parallel plate of the drive plate provided on the rotary stage sandwiched in the rotary direction. A direct-acting rotary stage device comprising: a plurality of rollers that come into contact with each other. 4. A rotary stage, a fixed base for rotatably holding the rotary stage, and a screwed guide to the fixed base that is parallel to the rotary surface of the rotary stage and does not intersect the axis of the rotary stage. A drive shaft that moves in the X-axis direction,
A direct-acting rotary stage device provided with a rotating means for converting the movement of the drive shaft in the X direction into a rotational drive of the rotary stage, and a rotary display scale indicating the rotation of the handle portion of the drive shaft and the X direction movement. The rotating means is a linear movement member that is engaged with the movement of the drive shaft and is guided by the fixed base to move in the X direction without rotating, and the rotation stage provided on the linear movement member. A rotating member having an axis parallel to the axis, a passive plate having parallel parallel surfaces oriented in the rotating direction and provided on the rotary stage so as to project toward the rotating member, and sandwiching both parallel surfaces of the passive plate. A direct-acting rotary stage device comprising a plurality of rollers that come into contact with the rotary member. 5. A plurality of rollers sandwiching and abutting both parallel surfaces of the passive plate or the driving plate are arranged to sandwich the parallel both surfaces in a rectangular shape.
The linear motion rotary stage device according to any one of claims 1 to 4, wherein the linear motion rotary stage device is a book roller. 6. A plurality of rollers abutting on both parallel surfaces of the passive plate or the drive plate abut on two rollers abutting on one surface of the two parallel surfaces and on another surface of an intermediate portion of the two rollers. 5. The linear motion rotary stage device according to claim 1, wherein the linear motion rotary stage device is one roller.