GB1365416A - Highprecision horizontal xy position ranging table - Google Patents

Highprecision horizontal xy position ranging table

Info

Publication number
GB1365416A
GB1365416A GB1740872A GB1740872A GB1365416A GB 1365416 A GB1365416 A GB 1365416A GB 1740872 A GB1740872 A GB 1740872A GB 1740872 A GB1740872 A GB 1740872A GB 1365416 A GB1365416 A GB 1365416A
Authority
GB
United Kingdom
Prior art keywords
highprecision
horizontal
position ranging
ranging table
ranging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1740872A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societe Europeenne de Semi Conducteurs de Microelectronique SA SESCOSEM
Original Assignee
Societe Europeenne de Semi Conducteurs de Microelectronique SA SESCOSEM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societe Europeenne de Semi Conducteurs de Microelectronique SA SESCOSEM filed Critical Societe Europeenne de Semi Conducteurs de Microelectronique SA SESCOSEM
Publication of GB1365416A publication Critical patent/GB1365416A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q23/00—Arrangements for compensating for irregularities or wear, e.g. of ways, of setting mechanisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/14—Control of position or direction using feedback using an analogue comparing device
GB1740872A 1971-04-16 1972-04-14 Highprecision horizontal xy position ranging table Expired GB1365416A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7113520A FR2133319A5 (en) 1971-04-16 1971-04-16

Publications (1)

Publication Number Publication Date
GB1365416A true GB1365416A (en) 1974-09-04

Family

ID=9075396

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1740872A Expired GB1365416A (en) 1971-04-16 1972-04-14 Highprecision horizontal xy position ranging table

Country Status (4)

Country Link
CH (1) CH553617A (en)
DE (1) DE2218164B2 (en)
FR (1) FR2133319A5 (en)
GB (1) GB1365416A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2122376A (en) * 1982-06-18 1984-01-11 Coulter Electronics Optical microscope stage assembly
US4508435A (en) * 1982-06-18 1985-04-02 Coulter Electronics, Inc. Air vacuum chuck for a microscope
WO2016095855A1 (en) * 2014-12-19 2016-06-23 爱威科技股份有限公司 Microscope and drive device thereof

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE420131B (en) * 1980-01-22 1981-09-14 Leon Carlson MOVEMENT FOR MOVING A TABLE IN TWO APPROPRIATE DIRECTIONS IN ONE AND SAME PLAN
DE3127584A1 (en) * 1980-07-31 1982-07-08 Ateliers des Charmilles, S.A., 1203 Genève Machine tool with a movable table
FR2583327A1 (en) * 1985-06-13 1986-12-19 Primat Didier Device for guiding and two-directional driving of a plate (platen), with respect to a machine bed, along two axes of movements parallel to the bed
FR2595062B1 (en) * 1986-03-03 1993-01-29 Renault Automation FLEXIBILITY TABLE, ESPECIALLY FOR ROBOT?
FR2616366A1 (en) * 1987-06-15 1988-12-16 Peyrusson Jean Machine tool accessory device particularly for a sensitive drill, in order to enhance the safety thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2122376A (en) * 1982-06-18 1984-01-11 Coulter Electronics Optical microscope stage assembly
US4508435A (en) * 1982-06-18 1985-04-02 Coulter Electronics, Inc. Air vacuum chuck for a microscope
US4538885A (en) * 1982-06-18 1985-09-03 Coulter Electronics, Inc. Optical microscope system
WO2016095855A1 (en) * 2014-12-19 2016-06-23 爱威科技股份有限公司 Microscope and drive device thereof

Also Published As

Publication number Publication date
CH553617A (en) 1974-09-13
DE2218164A1 (en) 1972-11-02
DE2218164B2 (en) 1977-08-18
FR2133319A5 (en) 1972-11-24

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee