CN110450112B - Five-freedom-degree mechanical micro-motion platform - Google Patents
Five-freedom-degree mechanical micro-motion platform Download PDFInfo
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- CN110450112B CN110450112B CN201910801796.3A CN201910801796A CN110450112B CN 110450112 B CN110450112 B CN 110450112B CN 201910801796 A CN201910801796 A CN 201910801796A CN 110450112 B CN110450112 B CN 110450112B
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- platform
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- displacement platform
- linear displacement
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
Abstract
The invention relates to a five-degree-of-freedom mechanical micro-motion platform, wherein a base is sequentially connected with an X-direction linear displacement platform and a Y-direction linear displacement platform, bearing platforms of the X-direction linear displacement platform and the Y-direction linear displacement platform are respectively connected with a micrometer, a Z-axis rotary displacement platform is fixedly connected onto the bearing platform of the Y-direction linear displacement platform, a pair of worm gear and worm gear pairs are arranged in the Z-axis rotary displacement platform, a support ring bearing platform is fixedly connected onto a worm gear, the worm gear is connected with the micrometer through a worm, the Z-direction linear displacement platform is fixedly connected onto the support ring bearing platform, a pair of conical gears is arranged in the Z-direction linear displacement platform, a driven conical gear is fixedly connected with a grinding lead screw, the grinding lead screw is connected with a bearing platform through a lead screw nut and a connecting rod, a driving conical gear is connected with the micrometer, the Y-axis rotary displacement platform is fixedly connected onto the bearing platform, a worm gear pair is arranged in the Y-axis rotary displacement platform, one end of the worm is connected with the micrometer, the worm is matched and connected with a part of the worm gear and a bearing working platform is fixedly connected with a bearing working platform arranged on a chute.
Description
Technical Field
The invention relates to a micro-sample precision testing device in a micro-electro-mechanical system, in particular to a five-freedom-degree mechanical micro-motion platform capable of carrying out precision positioning and multi-dimensional adjustment on a micro-operation sample.
Background
The precision testing technology is widely applied to various fields such as precision manufacturing, micro-electro-mechanical systems, micro-manipulation and the like. In a sample micro experiment in a micro electro mechanical system, the size of a sample is small, the sample needs to be subjected to linear, rotary and other movements in a micro tensile test, and the movement has the characteristics of high precision, small displacement, multiple movement dimensions and the like due to the experimental characteristics, so that the micro-motion platform is required to have the micro displacement capability in the dimensions as much as possible. In summary, it is necessary to design a platform capable of performing multi-directional, multi-angle, and micro-displacement on a micro sample to realize micro-operation experiments on the micro sample.
The method adopted in the current micro-nano positioning mainly adopts a motor reducer to drive a multi-dimensional workbench, and the method has the defects of complex structure, larger volume, large positioning error, poor servo rigidity and the like caused by insufficient transmission precision of a multi-stage gear, and is suitable for being used under the condition of large displacement; in many cases, the mechanism used in the mechanical multi-dimensional jogging device is large in size, but the precision of the adjustment displacement is poor, and it is difficult to satisfy the fine displacement movement in the jogging operation.
The disclosed mechanical micro-motion platform, such as a multi-dimensional displacement platform (application number: 201510112074.9), can realize the adjustment of three-dimensional translation and two-dimensional rotation, but has large volume, can perform five-dimensional adjustment of large displacement, adopts an adjusting screw to control the inclination degree of the platform, has small adjustable rotation range and poor adjustable rotation precision, and therefore cannot meet the requirement of micro-displacement required by micro-operation.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a five-degree-of-freedom mechanical micro-motion platform aiming at the precision test of a micro sample in a micro-mechanical system so as to at least solve the problems of precision positioning and multi-dimensional adjustment in the prior art.
In order to achieve the purpose, the technical scheme of the invention is as follows: a five-degree-of-freedom mechanical micro-motion platform is provided with a base for mounting a micro-motion platform, wherein the base is sequentially connected with an X-direction linear displacement platform and a Y-direction linear displacement platform, carrying platforms of the X-direction linear displacement platform and the Y-direction linear displacement platform are respectively connected with a micrometer and are respectively and precisely controlled to translate along the X direction and the Y direction through respective micrometer, the displacement stroke is 15mm, and the reading precision reaches 0.01mm; a Z-axis rotary displacement platform is fixedly connected to the upper surface of the carrying platform of the Y-direction linear displacement platform, a pair of worm gear and worm pairs is arranged in the Z-axis rotary displacement platform, wherein a worm gear is connected with the Z-axis rotary displacement platform through a thrust ball bearing, a support ring carrying platform is fixedly connected to the upper surface of the worm gear, the worm gear is connected with a micrometer through a worm, the micrometer is used for accurately controlling input torque to drive the worm, the worm drives the worm gear to rotate, and therefore the support ring carrying platform is driven to rotate around the Z-axis direction; the Z-direction linear displacement platform is fixedly connected to the upper surface of the support ring carrying platform, a pair of conical gears is arranged in the Z-direction linear displacement platform, a driven conical gear is fixedly connected with a grinding lead screw, the grinding lead screw is connected with the bearing platform through a lead screw nut and a connecting rod, a driving conical gear is connected with a micrometer, and the driving conical gear drives the driven conical gear and the grinding lead screw to rotate by controlling the input torque of the micrometer, so that the lead screw nut is driven to drive the bearing platform to move along the Z-axis direction; the bearing platform is fixedly connected with a Y-axis rotary displacement platform, a worm and worm gear pair is installed in the Y-axis rotary displacement platform, one end of a worm is connected with a micrometer caliper, the worm is matched and connected with part of worm gears, part of worm gears are fixedly connected with the bearing working platform, the bearing working platform is installed on a sliding chute, the micrometer caliper is used for accurately controlling input torque to drive the worm, the worm drives part of worm gears to drive the bearing working platform to rotate around the Y axis in a certain range along the sliding chute, the angular displacement stroke of the bearing working platform reaches 10 degrees, and the reading precision reaches 0.1 degree.
Further, a rolling linear guide rail and a sliding block are respectively arranged between the X-direction linear displacement platform and the base, and between the X-direction linear displacement platform and the Y-direction linear displacement platform.
Further, the grinding screw rod is a self-locking screw rod.
Further, the sliding groove is a dovetail annular guide rail.
Further, the centimeter is 15mm centimeter.
Furthermore, a plurality of mounting holes are formed in the bearing working platform.
The invention has the beneficial effects that:
according to the invention, the working platform can be precisely controlled to move horizontally along the X direction, the Y direction and the Z direction through the micrometer calipers of the first linear displacement platform and the second linear displacement platform, the rolling linear guide rail and the grinding lead screw of the third linear displacement platform, the displacement stroke is 15mm, the reading precision reaches 0.01mm, the working platform can be driven to rotate around the Z axis through the worm gear and worm pair of the first orbiting displacement platform, the worm and partial worm pair structure on the second rotary displacement platform can drive the working platform to orbit around the Y axis in a certain range, the angular displacement stroke reaches 10 degrees, the reading precision reaches 0.1 degree, the circular arc guide rail of the annular dovetail guide rail can enable the platform to orbit more stably and can bear the weight of 5kg, the technical problems of few adjustable dimensions, low adjustable displacement precision and large mechanical mechanism of micro-operation experiments in the related technology are solved, and the technical effect of multi-dimensional precise movement is achieved.
Drawings
FIG. 1 is a schematic structural diagram of a five-degree-of-freedom mechanical micro-motion platform of the present invention;
FIG. 2 is a front view of a first rotary displacement platform;
FIG. 3 is a front view of a third linear displacement platform;
fig. 4 is a front view of the second rotary displacement platform.
In the figure: 1. the device comprises a base, 2. A first micrometer, 3. A miniature linear guide rail, 4. A miniature linear guide rail slide block, 5. A first linear displacement platform (X-direction translation), 6. A slotted pan head screw, 7. A second linear displacement platform (Y-direction translation), 8. A first rotary displacement platform (Z-axis rotation), 9. A thrust ball bearing, 10. A worm wheel, 11. A flange end cover, 12. A third linear displacement platform (Z-direction translation), 13. An angular contact ball bearing, 14. A conical gear, 15. A grinding screw rod, 16. A connecting rod, 17. A bearing platform, 18. A second rotary displacement platform (Y-axis rotation), 19. A hole-opening end cover flange, 20. A fourth micrometer, 21. An angular contact ball bearing, 22. A dovetail sliding groove, 23. A worm, 24. A bearing workbench, 25. A worm, 26. A flat key, 27. A nut, 28. A partial worm wheel, 29. A mounting hole, 30. A carrier support ring.
Detailed Description
In this embodiment, a five-degree-of-freedom mechanical micro-motion platform is further provided, where the device is used to implement the foregoing embodiment 1 and the preferred embodiments thereof, and for terms or implementation manners that are not described in detail in this embodiment, reference may be made to relevant descriptions in embodiment 1, and descriptions that have already been given are omitted.
As shown in fig. 1 to 4, a five-degree-of-freedom mechanical micro-motion platform includes: the device comprises a base 1, a first linear displacement platform 5 (X-direction translation), a second linear displacement platform 7 (Y-direction translation), a first rotary displacement platform 8 (Z-axis rotation), a third linear displacement platform 12 (Z-direction translation), a second rotary displacement platform 18 (Y-axis rotation) and a bearing workbench 24.
A through hole is formed in one side of the base 1 and is provided with a first micrometer 2, the first micrometer 2 is connected with a second linear displacement platform 5, the first linear displacement platform 5 is connected with a guide rail 3 and a sliding block 4 which are arranged in a groove of the base 1, the first micrometer 2 is connected with the sliding block 4, a carrier platform of the first linear displacement platform 5 is controlled to translate towards the X direction by inputting an accurate displacement value through the first micrometer 2, the second linear displacement platform 7 is fixed on the first linear displacement platform 5 through screws, the second linear displacement platform 7 is connected with the carrier platform in the first linear displacement platform 5 through the guide rail and the sliding block, and the carrier platform of the second linear displacement platform 7 is driven to translate along the Y direction through a second micrometer arranged on the rear end face of the first linear displacement platform 5; the first rotary displacement platform 8 (Z-axis rotation) is fixedly connected to the carrying platform of the second linear displacement platform 7, a pair of worm gear and worm pairs is arranged in the first rotary displacement platform, a worm gear 10 is connected with the first rotary displacement platform 8 through a thrust ball bearing 9, the upper surface of the worm gear 10 is fixedly connected with a support ring carrying platform 30, the worm gear 10 is connected with a third micrometer through a worm 25, the worm is driven by utilizing the input torque of the third micrometer, and the worm drives the worm gear to rotate, so that the support ring carrying platform is driven to rotate around the Z-axis direction; the third linear displacement platform 12 is connected with the first rotary displacement platform 5 through a support ring carrying platform 30, the third linear displacement platform 12 is provided with a through hole, an angular contact bearing 13 is installed in the through hole, the angular contact ball bearing 13 is connected and fixed through an end cover flange 11 and used for supporting a grinding lead screw 15, the grinding lead screw 15 is connected with a conical gear 14 through a flat key 26, the upper end of the grinding lead screw 15 is connected with a nut 27 in a matched mode, a connecting rod 16 is installed on the nut 27, the connecting rod 16 is connected with a bearing platform 17, the upper surface of the bearing platform 17 is fixedly connected with a second rotary displacement platform 18, a bearing hole is formed in the side surface of the second rotary displacement platform 18, an angular contact ball bearing 21 is installed in the bearing hole, the angular contact ball bearing 21 supports a worm 23, the worm 23 is connected with a fourth centimeter 20, the worm 23 is connected with a part of the worm wheel 28 in a matched mode, a part of the worm wheel 28 is fixedly connected with a bearing working platform 24, the bearing working platform 24 is installed on the dovetail chute 22, torque is input by the fourth centimeter 20 to drive the worm 23, the dovetail worm wheel 23 drives the dovetail worm wheel 28 to drive part of the bearing working platform 24 to drive the dovetail wheel 24 to rotate around a Y axis in a certain range along the bearing working platform 24.
In order to make the whole mechanism structure more light, a hollow carrier structure is preferably adopted.
To maintain the Z-axis translation, a self-locking fixture of the grinding lead screw is used.
The above-described embodiments are merely preferred embodiments provided for fully explaining the present application, and the scope of the present application is not limited thereto. The equivalent substitution or change made by the person skilled in the art on the basis of the present application is within the protection scope of the present application. The protection scope of this application is subject to the claims.
Claims (6)
1. A five-freedom-degree mechanical micro-motion platform is provided with a base for mounting the micro-motion platform, and is characterized in that: the base is sequentially connected with an X-direction linear displacement platform and a Y-direction linear displacement platform, bearing platforms of the X-direction linear displacement platform and the Y-direction linear displacement platform are respectively connected with a micrometer and are respectively and precisely controlled to translate along the X direction and the Y direction through the respective micrometer, the displacement stroke is 15mm, and the reading precision reaches 0.01mm; the Y-direction linear displacement platform is fixedly connected with a Z-axis rotary displacement platform, a pair of worm gear and worm pairs are arranged in the Z-axis rotary displacement platform, a worm gear is connected with the Z-axis rotary displacement platform through a thrust ball bearing, a support ring platform is fixedly connected to the worm gear, the worm gear is connected with a micrometer through a worm, the micrometer is used for accurately controlling input torque to drive the worm, and the worm drives the worm gear to rotate, so that the support ring platform is driven to rotate around the Z-axis direction; the Z-direction linear displacement platform is fixedly connected to the upper surface of the support ring carrying platform, a pair of conical gears is arranged in the Z-direction linear displacement platform, a driven conical gear is fixedly connected with a grinding lead screw, the grinding lead screw is connected with the bearing platform through a lead screw nut and a connecting rod, a driving conical gear is connected with a micrometer, and input torque is controlled through the micrometer, so that the driving conical gear drives the driven conical gear and the grinding lead screw to rotate, and the lead screw nut is driven to drive the bearing platform to move along the Z-axis direction; the bearing platform is fixedly connected with a Y-axis rotary displacement platform, a worm and worm gear pair is installed in the Y-axis rotary displacement platform, one end of a worm is connected with a micrometer caliper, the worm is matched and connected with part of worm gears, part of worm gears are fixedly connected with the bearing working platform, the bearing working platform is installed on a sliding chute, the micrometer caliper is used for accurately controlling input torque to drive the worm, the worm drives part of worm gears to drive the bearing working platform to rotate around the Y axis in a certain range along the sliding chute, the angular displacement stroke of the bearing working platform reaches 10 degrees, and the reading precision reaches 0.1 degree.
2. The five-degree-of-freedom mechanical micro-motion platform according to claim 1, characterized in that: and a rolling linear guide rail and a sliding block are respectively arranged between the X-direction linear displacement platform and the base and between the X-direction linear displacement platform and the Y-direction linear displacement platform.
3. The five-degree-of-freedom mechanical micro-motion platform according to claim 1, characterized in that: the grinding lead screw is a self-locking lead screw.
4. The five-degree-of-freedom mechanical micro-motion platform according to claim 1, characterized in that: the sliding groove is a dovetail annular guide rail.
5. The five-degree-of-freedom mechanical micro-motion platform according to claim 1, characterized in that: the centimeter is 15mm centimeter.
6. The five-degree-of-freedom mechanical micro-motion platform according to claim 1, characterized in that: and a plurality of mounting holes are formed in the bearing working platform.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910801796.3A CN110450112B (en) | 2019-08-28 | 2019-08-28 | Five-freedom-degree mechanical micro-motion platform |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910801796.3A CN110450112B (en) | 2019-08-28 | 2019-08-28 | Five-freedom-degree mechanical micro-motion platform |
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| CN110450112A CN110450112A (en) | 2019-11-15 |
| CN110450112B true CN110450112B (en) | 2022-11-04 |
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| CN111470313A (en) * | 2020-04-13 | 2020-07-31 | 中南大学 | Feeding mechanism for coupling of multi-channel single-mode COB (chip on Board) module lens |
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| CN109318188A (en) * | 2018-10-23 | 2019-02-12 | 北京国华恒源科技开发有限公司 | A kind of heavily loaded trolley docking platform of space five-freedom movement |
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2019
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|---|---|---|---|---|
| CN101140157A (en) * | 2007-09-28 | 2008-03-12 | 淮阴工学院 | Three-dimensional working table contact pin type three-dimensional roughness measurement instrument |
| CN201093994Y (en) * | 2007-09-28 | 2008-07-30 | 淮阴工学院 | Three-dimensional work table of sensing pin type three-dimensional roughness measurement instrument |
| JP2010173038A (en) * | 2009-01-30 | 2010-08-12 | Noboru Nishimura | Lift type stand device |
| CN204097568U (en) * | 2014-09-15 | 2015-01-14 | 苏州大学 | A kind of multi-degree-of-freedom workbench |
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