CN103137532B - Coplanar three-axis positioning device - Google Patents
Coplanar three-axis positioning device Download PDFInfo
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- CN103137532B CN103137532B CN201110451213.2A CN201110451213A CN103137532B CN 103137532 B CN103137532 B CN 103137532B CN 201110451213 A CN201110451213 A CN 201110451213A CN 103137532 B CN103137532 B CN 103137532B
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- 230000005465 channeling Effects 0.000 claims description 36
- 230000000740 bleeding effect Effects 0.000 claims description 14
- 230000007246 mechanism Effects 0.000 claims description 13
- 238000005259 measurement Methods 0.000 claims description 10
- 238000010521 absorption reaction Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
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Abstract
The invention relates to a coplanar three-axis positioning device, which comprises a fixed platform, a first driving module, two second driving modules and a positioning module, wherein the positioning module comprises a positioning platform, a first driving shaft and two second driving shafts. The first driving module and the two second driving modules drive the first driving shaft and the two second driving shafts to drive the positioning platform bearing a workpiece to move in a first direction, a second direction or a third direction on the same plane so as to position the position of the workpiece. The coplanar triaxial positioning device has the advantages of simple structure, small volume and easy modularization, and the positioning precision of the coplanar triaxial positioning device reaches the submicron level.
Description
Technical field
The present invention relates to a kind of positioner, referred to that one can make in same plane the sub-micron grade positioner that first direction (X-axis), second direction (Y-axis) or third direction (θ axle) move especially.
Background technology
How the research and development of rice science and technology is quite remarkable in recent years, and many high-tech industries are as technical fields such as semiconductor, information, electronics, communication, photoelectricity, and its processing and manufacturing technology are towards the future development of ultraminiaturization and precise treatment.Therefore, the precision positioning device demand for micron or even how meter level also significantly increases, and the precision of the aligning of precision positioning device location could reach standard, is also that the success or failure of related industry processing procedure quality are crucial.
For this reason, aforementioned high-tech industry, in the procedure for producing carrying out accurate encapsulation technology, for the precision and yield making its product meets standard, can utilize a precisely locating platform to carry out precision positioning to the workpiece for processing usually.And precisely locating platform mainly has X, Y direction straight line location at present, and θ direction of principal axis rotates positioning function, so as to reaching the effect of workpiece being carried out to the high-accuracy adjustment location of Three Degree Of Freedom, and be widely used in the precision positioning purposes of high-tech industry procedure for producing.
Above-mentioned precisely locating platform is as No. 201102273rd, TaiWan, China " alignment tool ", and this alignment tool has: base; Be configured in the roof platform being used for keeping having the workpiece that moving load is applied to it of the top position of said base; The requisite number object supporter with X, Y, θ three degree of freedom be made up of the guiding element that can slide in two orthogonal directions and the swivel bearing be located on aforementioned guiding element; And at least three driver elements being equipped with an axial straight-line motion mechanism at this supporter and forming; Wherein, aforementioned supporter and aforementioned driver element are provided between said base and aforementioned roof platform with the stagger configuration of shape of reporting to the leadship after accomplishing a task of the moving direction along aforementioned moving load, and the driving direction that the straight-line motion mechanism of two driver elements among aforementioned each driver element is driven, the driving direction that drives with the straight-line motion mechanism of remaining driver element are orthogonal in X-Y plane.Allow workpiece in X, Y, θ tri-direction of principal axis displacement carry out precision positioning, the complex structure of this patent though this patent can reach, it needs the slide rail using multilayer to combine, and cause processing cost to promote, overall volume becomes greatly, and easily produces accumulated error.Moreover the structure of this patent there is no real rotating shaft, interference must be produced by the asymmetric movement of three axles, then be caused by interference in rotary moving, cause overall mechanical resistance larger.
Another in " stage apparatus and the exposure device " of No. I247201st, TaiWan, China, this stage apparatus is that one have under discontiguous situation can in the stage apparatus of a fixed disk movable part of movement on the surface, it is characterized by this fixed disk and comprise the body part be made up of stone material and the surface element having pottery due to surperficial meltallizing, this movable part has one first movable part and one second movable part, and this first movable part is be formed with a ceramic part separately with part relative with this surface element in this second movable part.The shortcoming of this patent is that this stage apparatus does not have spinfunction, if need spinfunction must install a rotating shaft again on this stage apparatus.Then the X-axis displacement platform of this patent is arranged on Y-axis displacement platform, when carrying the heavier-weight of workpiece, can produce the impact of inertia inertia under the state of locating at a high speed.
In order to solve the above problems, the invention provides a kind of copline three axle positioner, it can do the axial motion of X, Y, θ tri-on same plane, and its positioning precision reaches sub-micron grade.And the simple and easy modularization of structure of copline three axle positioner, the driver module of each direction of motion can not storehouse mutually, makes overall volume slimming, and has larger displacement range.
Summary of the invention
Object of the present invention, be to provide a kind of copline three axle positioner, it can do the motion of a first direction (X-axis), a second direction (Y-axis) or a third direction (θ axle) in same plane, to locate the position of a workpiece, the positioning precision of this copline three axle positioner can reach sub-micron grade.
Object of the present invention, is to provide a kind of copline three axle positioner, the simple and easy modularization of its structure, and the driver module of each direction of motion can not storehouse mutually, makes overall volume slimming, and has larger displacement range.
Technical scheme of the present invention: a kind of copline three axle positioner, it comprises:
One fixed platform, there are a first side and two second sides, this two second side is corresponding, and it is adjacent with the two ends of this first side and orthogonal respectively, this fixed platform is provided with one first driver module and 2 second driver modules, this first drive module setting is in this first side, and this two driver module is arranged at this two second side respectively; And
One locating module comprises:
One locating platform, is positioned in this fixed platform, and has one first side and 2 second sides, and this first side is to should this first side of fixed platform, and this 2 second side is to should this two second side of fixed platform;
One first driving shaft, its one end is arranged at this first side of this locating platform, and its other end is slidedly arranged on this first driver module; And
2 second driving shafts, its one end is arranged at this 2 second side of this locating platform respectively, and its other end is slidedly arranged on this second driver module respectively, and this 2 second driving shaft is mutually vertical with this first driving shaft;
Wherein this locating platform is carrying one workpiece, this first driver module and this 2 second driver module drive this first driving shaft and this 2 second driving shaft, drive this locating platform on same plane, do the motion of a first direction, a second direction or a third direction, to locate this workpiece.
In the present invention, wherein this first driver module comprises:
One slide rail, is arranged at this first side of this fixed platform;
One sliding part, is slidedly arranged on this slide rail;
One bearing, is arranged at this sliding part, and establishes for this first driving shaft is sliding; And
One drive unit, drives this sliding part to slide on this slide rail, and drives this first driving shaft, and this first driving shaft slides on this bearing and/or drives this bearing rotary in this sliding part.
In the present invention, wherein this second driver module comprises:
One slide rail, is arranged at this second side of this fixed platform;
One sliding part, is slidedly arranged on this slide rail;
One bearing, is arranged at this sliding part, and establishes for this second driving shaft is sliding; And
One drive unit, drives this sliding part to slide on this slide rail, and drives this second driving shaft, and this second driving shaft slides on this bearing and/or drives this bearing rotary in this sliding part.
In the present invention, wherein this drive unit is a motor or a piezoelectric.
In the present invention, more comprise:
One measurement mechanism, is arranged at the side of this slide rail, and to measure the position of this sliding part, wherein this measurement mechanism is an optical ruler.
In the present invention, more comprise:
One rotating shaft, is arranged between this sliding part and this bearing; And
One swivel bearing, arranges this rotating shaft, and between this sliding part and this bearing.
In the present invention, wherein this locating platform is more provided with:
Plural number channeling, is arranged at the surface of this locating platform and this absorption surface and to downward-extension, and does not pass the surface that contacts with this fixed platform of this locating platform; And
At least one bleeding point, is arranged at a side of this locating platform, and is communicated with those channelings, and the gas in those channelings is discharged from this bleeding point, and this workpiece is adsorbed on this locating platform.
In the present invention, wherein this locating platform is more provided with:
Plural number channeling, is arranged at the surface that this locating platform contact with this fixed platform and also upwards extends, and do not pass the surface of this locating platform and this absorption surface; And
At least one air inlet, is arranged at a side of this locating platform, and is communicated with those channelings, and this air inlet provides a gas to those channelings, and this locating platform is floated on above this fixed platform.
In the present invention, wherein this locating platform is more provided with:
Plural number the first channeling, is arranged at the surface of this locating platform and this absorption surface and to downward-extension, and does not pass the surface that contacts with this fixed platform of this locating platform;
At least one bleeding point, is arranged at a side of this locating platform, and is communicated with those first channelings, and one first gas in those first channelings is discharged from this bleeding point, and this workpiece is adsorbed on this locating platform;
Plural number the second channeling, is arranged at surperficial that this locating platform contact with this fixed platform and also upwards extends, not through the surface of this locating platform and this absorption surface; And
At least one air inlet, is arranged at a side of this locating platform, and is communicated with those second channelings, and this air inlet provides one second gas to those the second channelings, and this locating platform is floated on above this fixed platform.
In the present invention, more comprise:
One reinforced structure, comprises two connecting rods, and this two connecting rod is connected between this first driving shaft and this 2 second driving shaft.
In the present invention, wherein this reinforced structure more comprises:
Three contiguous blocks, be arranged at this first driving shaft and this 2 second drivings the tip of the axis respectively, this connecting rod connects this adjacent two contiguous block.
The beneficial effect that the present invention has: the invention provides a kind of copline three axle positioner, copline three axle positioner utilizes the first driving shaft and 2 second driving shafts to drive locating platform to move, locating platform can do the motion of first direction, second direction or third direction in same plane, the positioning precision of copline three axle positioner can reach sub-micron grade.Then the structure of copline three axle positioner of the present invention simple and easily assembling and modularization, the driver module of each direction of motion can not storehouse mutually, makes the volume slimming of entirety, and has larger displacement range.
Accompanying drawing explanation
Fig. 1 is the stereogram of the first embodiment of the present invention;
Fig. 2 is the first using state figure of the first embodiment of the present invention;
Fig. 3 is the second using state figure of the first embodiment of the present invention;
Fig. 4 is the 3rd using state figure of the first embodiment of the present invention;
Fig. 5 is sliding part and the bearing constitutional diagram of the first embodiment of the present invention;
Fig. 6 is the schematic diagram of the locating platform of the second embodiment of the present invention;
Fig. 7 is the schematic diagram of the locating platform of the third embodiment of the present invention; And
Fig. 8 is the stereogram of the fourth embodiment of the present invention.
[figure number is to as directed]
1 copline three axle positioner 10 fixed platform
101 second side, first sides 102
12 first driver module 121 slide rails
122 sliding part 123 bearings
125 measurement mechanism 126 rotating shafts
127 swivel bearing 14 second driver modules
141 slide rail 142 sliding parts
143 bearing 145 measurement mechanisms
16 locating module 161 locating platforms
1611 first side, sides 1,612 second
1613 first surface 16,131 first channelings
16132 bleeding point 1614 second surfaces
16141 second channeling 16142 air inlets
162 first driving shaft 163 second driving shafts
18 reinforced structure 181 contiguous blocks
182 connecting rods
Embodiment
For making to have a better understanding and awareness architectural feature of the present invention and effect of reaching, coordinating detailed description in order to preferred embodiment and accompanying drawing, being described as follows:
Refer to Fig. 1, it is the stereogram of first embodiment of the invention; As shown in the figure, the present embodiment is to provide a kind of copline three axle positioner 1, it mainly can do the motion of a first direction (moving along X-axis), a second direction (moving along y-axis shift) or a third direction (rotating centered by Z axis) on same plane, and then the precision of copline three axle positioner 1 reaches sub-micron grade.Copline three axle positioner 1 comprises fixed platform 10,1 first driver module 12,2 second driver module 14 and a locating module 16.Fixed platform 10 has first side 101 and two second sides 102, and first side 101 is positioned at the side of fixed platform 10, and the both sides that two second sides 102 lay respectively at fixed platform 10 are also mutually corresponding.Two second sides 102 are adjacent with the two ends of first side 101 respectively, and are positioned at the homonymy of first side 101, and orthogonal with first side 101 respectively.
First driver module 12 is arranged at first side 101, and 2 second driver modules 14 are arranged at corresponding second side 102 respectively.Then locating module 16 is connected with the first driver module 12 and 2 second driver modules 14, and is positioned at the top of fixed platform 10.Locating module 16 comprises locating platform 161,1 first driving shaft 162 and 2 second driving shafts 163, locating platform 161 comprises one first side 1611 and 2 second sides 1612, the first side 101 of the first corresponding fixed platform 10 in side 1611, two second sides 102 of the 2 second corresponding fixed platforms 10 in side 1612.One end of first driving shaft 162 is arranged at the first side 1611 of locating platform 161, and its other end is slidedly arranged on the first driver module 12.One end of second driving shaft 163 is arranged at the second side 1612 of locating platform 161, and its other end is slidedly arranged on the second driver module 14.Wherein the first driving shaft 162 is mutually vertical with 2 second driving shafts 163.
The copline three axle positioner 1 of the present embodiment can be used for the position of location one workpiece, first by work-piece on locating platform 161, first drive unit 12 and 2 second drive units 14 drive the first driving shaft 162 and 2 second driving shafts 163, first driving shaft 162 and 2 second driving shafts 163 drive locating platform 161 to do the motion of first direction, second direction or third direction, workpiece moves through locating platform 161, and then the position of positioning workpieces.See also Fig. 2, when only having the first driver module 12 to drive the first driving shaft 162, the first driving shaft 162 drives locating platform 161 to do the motion of first direction (along X-direction).Separately consult Fig. 3, when only having 2 second driver modules 14 to drive 2 second driving shafts 163,2 second driver modules 14 drive the displacement of 2 second driving shafts 163 identical, and 2 second driving shafts 163 drive locating platform 161 to do the motion of second direction (along Y direction); Consult Fig. 4 again, when the first driver module 12 and 2 second driver modules 14 drive the first driving shaft 162 and 2 second driving shafts 163 simultaneously, and 2 second driver modules 14 are when driving the displacement of 2 second driving shafts 163 different, the first driving shaft 162 and 2 second driving shafts 163 drive locating platform 161 to do the motion of third direction (rotating along Z-direction).
From the above, the copline three axle positioner 1 of the present embodiment can do the motion of first direction, second direction or third direction on same plane.And the structure of the copline three axle positioner 1 of the present embodiment is simple and easily assembling and modularization, the driver module of each direction of motion can not storehouse mutually, makes the volume slimming of entirety, and has larger displacement range.In addition, the copline three axle positioner 1 of the present embodiment carries out third direction (along Z-direction) when rotating, and its pivot is not limited to the central point of its locating platform, thus increases the convenience of Workpiece fixing.
Hold above-mentioned, consult Fig. 1 again, first driver module 12 and 2 second driver modules 14 drive the first driving shaft 162 and 2 second driving shaft 163, first driving shafts 162 and 2 second driving shafts 163 to drive locating platform 161 to do the motion of first direction, second direction or third direction.First driver module 12 and the second driver module 14 comprise a slide rail 121,141, sliding part 122,142, bearing 123, a 143 and drive unit (not illustrating) respectively.The structure of the first driver module 12 is identical with the structure of the second driver module 14, only explains with the first driver module 12 in this.The slide rail 121 of the first driver module 12 is arranged at the first side 101 of fixed platform 10, sliding part 122 is slidedly arranged on slide rail 121, bearing 123 is articulated in sliding part 122, bearing 123 rotates on sliding part 122, first driving shaft 162 is slidedly arranged on bearing 123, and the first driving shaft 162 slides in bearing 123.Drive unit connects sliding part 122, and drives sliding part 122 to slide on slide rail 121, and also driving bearing 123 moves along slide rail 121 simultaneously, and then drives the first driving shaft 162, first driving shaft 162 being slidedly arranged on bearing 123 to drive locating platform 161.First driving shaft 162 in moving process slidably in bearing 123, or band dynamic bearing 123 rotate on sliding part 122.
Consult Fig. 2 again, when only having sliding part 122 driven device of the first driver module 12 drive and move to the left, sliding part 122 drives the first driving shaft 162 being slidedly arranged on bearing 123 to move to the left, first driving shaft 162 drives locating platform 161 also to move to the left, 2 second driving shafts 163 being positioned at locating platform 161 both sides are driven by locating platform 161 and move to the left, and 2 second driving shafts 163 slide in corresponding bearing 143.Consult Fig. 3 again, when only having sliding part 142 driven device of each the second driver module 14 drive and move up, two sliding parts 142 drive 2 second driving shafts 163 being articulated in two bearings 143 to move up, the amount of movement of two sliding parts 142 of the present embodiment is identical, thus 2 second driving shafts 163 in moving process be level.2 second driving shafts 163 drive locating platform 161 also to move up, and the first driving shaft 162 being positioned at locating platform 161 side is driven by locating platform 161 and moves up, and namely the first driving shaft 162 slides in corresponding bearing 123.
Consult Fig. 4 again, this figure discloses the motion driving locating platform 161 to do third direction (rotating along Z-direction), sliding part 122 driven device of the first driver module 12 drives and is moved to the left, sliding part 122 drives the first driving shaft 162 being slidedly arranged on bearing 123 to be moved to the left, and the first driving shaft 162 drives locating platform 161 to be moved to the left.Side by side, sliding part 142 driven device of 2 second driver modules 14 drives and moves down, the amount of movement of two sliding parts 142 of the present embodiment is different, the amount of movement being positioned at the sliding part 142 on the left of locating platform 161 is less than the amount of movement of the sliding part 142 be positioned on the right side of locating platform 161, two sliding parts 142 drive the second corresponding driving shaft 163 respectively, 2 second driving shafts 163 must be a straight line in moving process, so 2 second driving shafts 163 drive corresponding bearing 143 to rotate respectively, and then locating platform 161 is turned clockwise.Then the first driving shaft 162 must be mutually vertical with 2 second driving shafts 163, when locating platform 161 to be driven by 2 second driving shafts 163 and makes third direction motion (namely rotating along Z-direction), first driving shaft 162 drives corresponding bearing 123 to rotate, to remain mutually vertical with 2 second driving shafts 163.
The drive unit of the present embodiment uses linear motor, so utilize the characteristic of linear motor, such as: the characteristic of high accuracy, high acceleration, high servo response, reaches sub-micron grade to make the positioning precision of copline three axle positioner 1.Certain drive unit can use motor or the piezoelectric of other kinds, and the demand of its Main Basis user is replaced, and repeats no more in this.First driver module 12 and 2 second driver modules 14 comprise a measurement mechanism 125,145 more respectively, measurement mechanism 125,145 is positioned at the side of slide rail, to measure the position of sliding part 122,142, the measurement mechanism 125,145 of the present embodiment is an optical ruler, also can use other measurement mechanisms, repeat no more in this.
The bearing 123,143 of the present embodiment uses linear air bearing, make the first driving shaft 162 and 2 second driving shafts 163 can linear slide in the bearing 123,143 of correspondence, and use gas thrust bearing can make the first driving shaft 162 and 2 second driving shafts 163 are high-speed and high precision movement, the positioning precision of effective lifting copline three axle positioner 1, then the loss of gas thrust bearing is little compared with general bearing, so reduce the maintenance cost of copline three axle positioner 1.See also Fig. 5, the present embodiment is for the first driver module 12, and more arranges a rotating shaft 126 between sliding part 122 and bearing 123, and sliding part 122 is fixed in rotating shaft 126 one end, its other end is articulated in bearing 123, and bearing 123 can be rotated on sliding part 122.In order to make bearing 123 rotate on sliding part 122 swimmingly, can more arrange a swivel bearing 127 on rotating shaft 126, swivel bearing 127, between sliding part 122 and bearing 123, can rotate in sliding part 122 swimmingly to make bearing 123.Certain second driver module 14 also can comprise rotating shaft and swivel bearing, repeats no more in this.
Referring to Fig. 6, is the schematic diagram of the locating platform of the second embodiment of the present invention.As shown in the figure, the locating platform 161 of the present embodiment has first surface 1613 and a second surface 1614, and first surface 1613 is corresponding with second surface 1614, and first surface 1613 is carrying workpiece.The first surface 1613 of locating platform 161 is provided with plural first channeling 16131, and those first channelings 16131 extend from first surface 1613 to second surface 1614, but not through second surface 1614.Then be provided with a bleeding point 16132 in the side of locating platform 161, bleeding point 16132 is communicated with those first channelings 16131.Bleeding point 16132 can connect an air extractor (not illustrating), one first gas between workpiece and first surface 1613 is extracted out from bleeding point 16132, make workpiece be adsorbed on the first surface 1613 of locating platform 161 completely, so effectively fixation workpiece is on locating platform 161.
Refer to Fig. 1, Fig. 7, hold above-mentioned, the present embodiment more arranges plural second channeling 16141 on the second surface 1614 of locating platform 161, and those second channelings 16141 extend from second surface 1614 to first surface 1613, but not through first surface 1613.The side of locating platform 161 is more provided with an air inlet 16142, and air inlet 16142 is communicated with those second channelings 16141.Air inlet 16142 connects an inlet duct, those the second channelings 16141 are entered to from air inlet 16142 to provide one second gas, the second gas exerts discharged from those second channelings 16141 produces reaction force in fixed platform 10, locating platform 161 is made to form an air floating platform, and float in fixed platform 10, to reduce the frictional force between locating platform 161 and fixed platform 10, and increase the translational speed of locating platform 161, and then promote the service speed of copline three axle positioner.The locating platform 161 of the present embodiment can omit the setting of those first channelings and bleeding point, repeats no more in this.In addition, the present embodiment only provides a kind of mode reducing frictional force between locating platform and fixed platform, also other modes are had, for example, channeling and air inlet can be arranged at fixed platform, or lubricating oil can be coated with between fixed platform and locating platform 161, also can reach above-mentioned effect, repeat no more in this.
Referring to Fig. 8, is the stereogram of the fourth embodiment of the present invention.As shown in the figure, the present embodiment is different from above-described embodiment to be, the copline three axle positioner 1 of the present embodiment more comprises a reinforced structure 18, reinforced structure 18 comprises three contiguous block 181 and two connecting rods 182, the end of the first driving shaft 162 and 2 second driving shafts 163 is respectively equipped with contiguous block 181, one connecting rod 182 connects the contiguous block 181 be positioned on the left of locating platform 161 and the contiguous block 181 being positioned at the first driving shaft 162 end, another connecting rod 182 connects the contiguous block 181 be positioned on the right side of locating platform 161 and the contiguous block 181 being positioned at the first driving shaft 162 end.And reinforced structure 18 mainly dispersibles the stress of the first driving shaft 162 or the second driving shaft 163 and locating platform 161 junction, and drive locating platform 161 displacement swimmingly, for example, first driver module 12 drives the first driving shaft 162, first driving shaft 162 moves to make locating platform 161, so the first driving shaft 162 increases with the stress of locating platform 161 junction, reinforced structure 18 disperses the stress of the first driving shaft and locating platform 161 junction, and drive 2 second driving shafts 163 to move, and then locating platform 161 is driven to move.
In sum, the invention provides a kind of copline three axle positioner, copline three axle positioner utilizes the first driving shaft and 2 second driving shafts to drive locating platform to move, locating platform can do the motion of first direction, second direction or third direction in same plane, the positioning precision of copline three axle positioner can reach sub-micron grade.Then the structure of copline three axle positioner of the present invention simple and easily assembling and modularization, the driver module of each direction of motion can not storehouse mutually, makes the volume slimming of entirety, and has larger displacement range.
In sum, be only preferred embodiment of the present invention, not be used for limiting scope of the invention process, all equalizations of doing according to shape, structure, feature and the spirit described in the claims in the present invention scope change and modify, and all should be included in right of the present invention.
Claims (10)
1. a copline three axle positioner, is characterized in that, it comprises:
One fixed platform, there are a first side and two second sides, this two second side is corresponding, and it is adjacent with the two ends of this first side and orthogonal respectively, this fixed platform is provided with one first driver module and 2 second driver modules, this first drive module setting is in this first side, and this two driver module is arranged at this two second side respectively; And
One locating module comprises:
One locating platform, is positioned in this fixed platform, and has one first side and 2 second sides, and this first side is to should this first side of fixed platform, and this 2 second side is to should this two second side of fixed platform;
One first driving shaft, its one end is arranged at this first side of this locating platform, and its other end is slidedly arranged on this first driver module; And
2 second driving shafts, its one end is arranged at this 2 second side of this locating platform respectively, and its other end is slidedly arranged on this 2 second driver module respectively, and this 2 second driving shaft is mutually vertical with this first driving shaft;
Wherein this locating platform is carrying one workpiece, this first driver module and this 2 second driver module drive this first driving shaft and this 2 second driving shaft, drive this locating platform on same plane, do the motion of a first direction, a second direction or a third direction, to locate this workpiece;
This copline three axle positioner more comprises:
One reinforced structure, comprises two connecting rods, and this two connecting rod is connected between this first driving shaft and this 2 second driving shaft.
2. copline three axle positioner as claimed in claim 1, it is characterized in that, wherein this first driver module comprises:
One slide rail, is arranged at this first side of this fixed platform;
One sliding part, is slidedly arranged on this slide rail;
One bearing, is arranged at this sliding part, and establishes for this first driving shaft is sliding; And
One drive unit, drives this sliding part to slide on this slide rail, and drives this first driving shaft, and this first driving shaft slides on this bearing and/or drives this bearing rotary in this sliding part.
3. copline three axle positioner as claimed in claim 1, it is characterized in that, wherein this second driver module comprises:
One slide rail, is arranged at this second side of this fixed platform;
One sliding part, is slidedly arranged on this slide rail;
One bearing, is arranged at this sliding part, and establishes for this second driving shaft is sliding; And
One drive unit, drives this sliding part to slide on this slide rail, and drives this second driving shaft, and this second driving shaft slides on this bearing and/or drives this bearing rotary in this sliding part.
4. copline three axle positioner as claimed in claim 2 or claim 3, it is characterized in that, wherein this drive unit is a motor or a piezoelectric.
5. copline three axle positioner as claimed in claim 2 or claim 3, is characterized in that, more comprise:
One measurement mechanism, is arranged at the side of this slide rail, and to measure the position of this sliding part, wherein this measurement mechanism is an optical ruler.
6. copline three axle positioner as claimed in claim 2 or claim 3, is characterized in that, more comprise:
One rotating shaft, is arranged between this sliding part and this bearing; And
One swivel bearing, arranges this rotating shaft, and between this sliding part and this bearing.
7. copline three axle positioner as claimed in claim 1, it is characterized in that, wherein this locating platform is more provided with:
Plural number channeling, is arranged at the surface of this locating platform and this absorption surface and to downward-extension, and does not pass the surface that contacts with this fixed platform of this locating platform; And
At least one bleeding point, is arranged at a side of this locating platform, and is communicated with those channelings, and the gas in those channelings is discharged from this bleeding point, and this workpiece is adsorbed on this locating platform.
8. copline three axle positioner as claimed in claim 1, it is characterized in that, wherein this locating platform is more provided with:
Plural number channeling, is arranged at the surface that this locating platform contact with this fixed platform and also upwards extends, and do not pass the surface of this locating platform and this absorption surface; And
At least one air inlet, is arranged at a side of this locating platform, and is communicated with those channelings, and this air inlet provides a gas to those channelings, and this locating platform is floated on above this fixed platform.
9. copline three axle positioner as claimed in claim 1, it is characterized in that, wherein this locating platform is more provided with:
Plural number the first channeling, is arranged at the surface of this locating platform and this absorption surface and to downward-extension, and does not pass the surface that contacts with this fixed platform of this locating platform;
At least one bleeding point, is arranged at a side of this locating platform, and is communicated with those first channelings, and one first gas in those first channelings is discharged from this bleeding point, and this workpiece is adsorbed on this locating platform:
Plural number the second channeling, is arranged at surperficial that this locating platform contact with this fixed platform and also upwards extends, not through the surface of this locating platform and this absorption surface; And
At least one air inlet, is arranged at a side of this locating platform, and is communicated with those second channelings, and this air inlet provides one second gas to those the second channelings, and this locating platform is floated on above this fixed platform.
10. copline three axle positioner as claimed in claim 1, it is characterized in that, wherein this reinforced structure more comprises:
Three contiguous blocks, be arranged at this first driving shaft and this 2 second drivings the tip of the axis respectively, this connecting rod connects this adjacent two contiguous block.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100142664A TW201321120A (en) | 2011-11-22 | 2011-11-22 | Coplanar tri-axial positioning device |
| TW100142664 | 2011-11-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
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| CN201110451213.2A Active CN103137532B (en) | 2011-11-22 | 2011-12-23 | Coplanar three-axis positioning device |
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| TW201509587A (en) * | 2013-09-05 | 2015-03-16 | yuan-long Lai | Multi-axis machining |
| TWI487593B (en) * | 2013-12-30 | 2015-06-11 | 中原大學 | Three axis on one surface designed oblique-driven platform |
| TWI725500B (en) * | 2019-07-31 | 2021-04-21 | 和碩聯合科技股份有限公司 | Torque testing equipment and positioning seat provided therein |
| CN113691098B (en) * | 2021-08-09 | 2023-01-24 | 中南大学 | Coplanar motion device driven by single-side linear motor for packaging optoelectronic device |
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| CN101296778A (en) * | 2005-10-26 | 2008-10-29 | 岩崎系统股份有限公司 | Position control device of worktable |
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| US5163651A (en) * | 1990-03-13 | 1992-11-17 | Ntn Corporation | Movable table |
| JP2700050B2 (en) * | 1994-10-04 | 1998-01-19 | ヒーハイスト精工株式会社 | Vertical and horizontal swing table mechanism |
| JP3481540B2 (en) * | 2000-02-21 | 2003-12-22 | シャープ株式会社 | Stage equipment |
| JP4480960B2 (en) * | 2003-06-27 | 2010-06-16 | 東北パイオニア株式会社 | Support unit and moving table device and linear motion guide device using the support unit |
| CN1921026A (en) * | 2005-09-08 | 2007-02-28 | 北京慧摩森电子系统技术有限公司 | Micromotion platform with X-Y-theta three degree of freedom |
| WO2007055339A1 (en) * | 2005-11-11 | 2007-05-18 | Hephaist Seiko Co., Ltd. | Three-dimensional positioning table |
| JP4782710B2 (en) * | 2006-03-02 | 2011-09-28 | 住友重機械工業株式会社 | Stage equipment |
| TW200734112A (en) * | 2006-03-10 | 2007-09-16 | Icf Technology Co Ltd | Rotation module, sliding rotation module and double housing apparatus |
| TW201129987A (en) * | 2007-01-17 | 2011-09-01 | Qiu Ren You | Rotation unit for 4-driving alignment mechanism |
| TWM408100U (en) * | 2007-01-17 | 2011-07-21 | Qiu Ren You | Four-drive alignment mechanism |
| TWM324557U (en) * | 2007-06-08 | 2008-01-01 | Smart Chain Entpr Co Ltd | Linear moving apparatus of positioning theta angle of main axis |
| CN201530059U (en) * | 2009-04-30 | 2010-07-21 | 苏州德龙激光有限公司 | X-Y-theta moving platform applied to LED laser cutting equipment |
| JP2010274429A (en) * | 2009-05-26 | 2010-12-09 | Ihi Corp | Alignment stage |
| TWM400904U (en) * | 2009-12-11 | 2011-04-01 | mao-xiang Wu | Alignment stage |
| CN201954205U (en) * | 2011-01-05 | 2011-08-31 | 河南科技大学 | Precision air-flotation worktable |
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| CN101296778A (en) * | 2005-10-26 | 2008-10-29 | 岩崎系统股份有限公司 | Position control device of worktable |
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| TWI455789B (en) | 2014-10-11 |
| TW201321120A (en) | 2013-06-01 |
| CN103137532A (en) | 2013-06-05 |
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