CN1921026A - Micromotion platform with X-Y-theta three degree of freedom - Google Patents
Micromotion platform with X-Y-theta three degree of freedom Download PDFInfo
- Publication number
- CN1921026A CN1921026A CN 200510098315 CN200510098315A CN1921026A CN 1921026 A CN1921026 A CN 1921026A CN 200510098315 CN200510098315 CN 200510098315 CN 200510098315 A CN200510098315 A CN 200510098315A CN 1921026 A CN1921026 A CN 1921026A
- Authority
- CN
- China
- Prior art keywords
- motion
- freedom
- platform
- degree
- motion platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention relates to a high-accuracy three-freedom motion platform, with X,Y and theta, small motion range and high accuracy, wherein the motion ranges X and Y are lower than 3mm; theta is lower than 5 degrees; and resolution is higher than 20nanometer; said platform via two-layer structure realizes three-freedom motion, uses flexible support to drive the motor; four grating sensors feedback motion signal, to control the system closed.
Description
Technical field the present invention waits upon clothes control platform for a kind of Three Degree Of Freedom, is applied to integrated circuit manufacturing equipment and precision measurement industry, also can be applicable to bioengineering equipment.
Background technology is to satisfy the requirement that integrated circuit is made the micro/nano level precision, and the production and the test of processing of brilliant unit and packaging technology have all reached nano-scale.Precision on the market is waitd upon the clothes motion platform and is mostly adopted linear bearing arrangement of rigidity or pressure-feed air bearing now.For the motion platform of 20 nanometer resolutions and 150 nanometer repeatability precisions, the domestic shaped article of not finding has the product that adopts pressure-feed air bearing on the international market.Adopt the platform of air bearing structure, cost an arm and a leg, volume and weight is all very big, is not suitable for being applied in the occasion in little space.Especially needed X-Y-θ Three Degree Of Freedom mask plate positioning system on brilliant first lithographic equipment of part and the photoelectronic device, the impulse stroke of requirement is below 3 millimeters, and rotational angle is less than 5 °, and the installing space that is provided only has 20～40 millimeters thick.Adopt pressure-feed air bearing structurally to be difficult to realize the requirement of the inaccessible again 150 nanometer repeatability precisions of linear roller bearing.
The purpose of the utility model design is small size, travel incognito journey and the high-precision motion platform bottleneck that runs in the integrated device electronics development, uses simple elastic support structure, realizes compact dimensions, reaches the physical construction of 150 nanometer repeatable accuracy indexs.
Summary of the invention formation of the present invention is required movement travel and the rotational angle of little distortion generation with resiliency supported, realizes three-degree-of-freedom motion with two-stage physical construction.It is detected, controls and driven by the closed-loop control system of being formed between stop position detecting sensor and the driving mechanism, to realize accurate resetting.
Physical construction is made of three parts: basis (4), external frame (5), inside panel (6).System is driven by three linear electric motors (1) (2) (3), and the stationary part of all motors all is fixed on the basis (4), has significantly reduced movement load.Directions X is installed two motors (1) (2), and mover is fixed on the same one side or the relative direction of external frame (5) symmetrically, requires the driving force direction of motor (1) (2) can not pass through same axis; Y is to installing a motor (3), and mover is fixed on the inside panel (6) by the through hole on the external frame, and the unique design that X and Y pass through Y motor (3) mover to the decoupling zero of motion realizes.Inside panel (6) is connected with external frame (5) by four resiliency supported (8), moves along the Y direction with respect to external frame (5) under the driving of Y motor (3).External frame (5) is connected with basis (4) by four resiliency supported (9), moves along directions X with respect to basis (4) under the driving of X motor (1) (2).The employed bullet supporting construction of this structure (8) (9) can adopt four supports, also can adopt two to support and six supports, and requirement is to be symmetrically distributed.
This system uses quadruplet striated pattern scrambler (7) (10) (11) (12).Wherein the read head of two cover sensors (11) (12) is installed on the basis (4), and its grating chi is installed on the external frame (5) and reads X to signal; The read head of other two cover sensors (7) (10) is installed on the external frame, and its grating chi is installed on the inside panel (6) and reads Y to signal.X measures external frame (5) with respect to the motion change of basis (4) at directions X to sensor (11) (12), can calculate external frame (5) rotational angle theta on basis (4) relatively simultaneously
xY measures inside panel (6) with respect to the motion change of external frame (5) in the Y direction to sensor (7) (10), can calculate the rotational angle theta of the relative external frame (5) of inside panel (6) simultaneously
y
Because X is parallel to each other to sensor (11) (12), between distance be Lx; Y also is parallel to each other to sensor (7) (10), between distance be Ly, utilize the reading of four sensors to calculate
Directions X moving displacement: X=(sensor 11+ sensor 12)/2
Y direction moving displacement: Y=(sensor 7+ sensor 10)/2
Directions X relative angle: θ
x=arctan (sensor 11-sensor 12)/Lx
Y direction relative angle: θ
y=arctan (sensor 7-sensor 10)/Ly
Therefore, inside panel can calculate with following formula with respect to the corner on basis:
θ＝θ
x+θ
y
For the measuring error that causes because of resiliency supported (8) (9) distortion,, can compensate by the method for software compensation, to reach the requirement of bearing accuracy owing to be measurable and repeatably.
Physical construction of the present invention and control device possess effect and advantage:
1, movable information directly feeds back.The median error that does not have mechanical connection to bring
2, adopt symmetrical structure, insensitive to the error that the variation (as the variation of conditions such as temperature, humidity) of physical construction brings
3, elastic support structure: simple secondary facility realizes three-shaft linkage, does not have friction and wear, need not lubricate; The rigidity of resiliency supported vertical direction is much larger than direction of motion, when guaranteeing platform motion the fluctuation of Z direction very little, reach very high precision.
4, adopt direct linear electric motor and motor stator to be fixed on and do not participate in motion on the platform: movement load is very little, not wearing and tearing
5, there is not the bearing transmission link, simple in structure, be easy to process and assemble, low cost of manufacture
6, symmetrical structure, the temperature effect influence is low.For the caused variation of thermal expansion the self compensation function is arranged, do not need control compensation
7, under resilient force, possess good repeatable accuracy, long-term structural stability guarantees that the simulation accuracy and the offset data of system is permanently effective, can significantly reduce non-measuring error
Description of drawings Fig. 1, Three Degree Of Freedom micromotion platform structural representation
Fig. 2, A-A cut-open view shown in Figure 1
Embodiment further specifies structure of the present invention and principle of work below in conjunction with design example and accompanying drawing.This is designed to the mask plate plummer on brilliant first litho machine, and the stroke of X and Y direction is not more than ± 1.5mm, and the setting range of angle direction is less than 40mrad.
After the target location that host computer provided is determined, the numerical value instruction action that the motor (1) (2) (3) of X and Y direction provides according to control system, driving external frame (5) and inside panel (6) move to and need the position; According to the feedback information of sensor (7) (10) (11) (12), the physical location of system-computed inside panel (6) reaches the error with the target location, and motor (1) (2) (3) is accepted instruction back fine positioning; Closed-loop control system duplicate detection and action reach the requirement of 150nm and 2.5 μ rad until bearing accuracy.
External frame (5) and inside panel (6) directly drive by linear electric motors (1) (2) (3), and without any middle transmission link, reaction velocity is fast, has eliminated machine error, has reduced the control difficulty, realizes precision positioning easily.Under the coordinative role of three motors (1) (2) (3), realize the motion of Three Degree Of Freedom by external frame (5) and inside panel (6).Owing to adopted resiliency supported (8) and (9), system is flexiblesystem in X-Y plane, and very high in the vertical direction Z of X-Y plane rigidity, the error in the Z direction when having guaranteed platform motion is very little, can be controlled in the 0.5 μ m.
This platform as the fiber alignment platform, can also be applied to biomedical engineering field through transforming the sealed in unit that can be used in optoelectronic component, carries out cell grade test and treatment as precisely locating platform.
Claims (5)
1. a motion platform to be obeyed has secondary physical construction to realize three-degree-of-freedom motion and control, uses resiliency supported, three linear motor driving, and four grating sensor feedback signals are also passed through the calculation control three-shaft linkage.
2. according to the described motion platform of claim 1, it is characterized in that realizing the version of three-degree-of-freedom motion by two layers of physical construction.
3. according to the described motion platform of claim 1, it is characterized in that using resiliency supported physical construction to realize the version of three-shaft linkage.
4. according to the described motion platform of claim 1, it is characterized in that using three linear motor driving, two motor-driven power of directions X are not passed through same axis, two-stage resiliency supported transmitting movement, the closed loop moving control system of precise grating sensor feedback position signalling.
5. according to the described motion platform of claim 4, it is characterized in that the stator of linear electric motors is fixed on the version that does not participate in any direction motion on the pedestal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510098315 CN1921026A (en) | 2005-09-08 | 2005-09-08 | Micromotion platform with X-Y-theta three degree of freedom |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510098315 CN1921026A (en) | 2005-09-08 | 2005-09-08 | Micromotion platform with X-Y-theta three degree of freedom |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1921026A true CN1921026A (en) | 2007-02-28 |
Family
ID=37778709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200510098315 Pending CN1921026A (en) | 2005-09-08 | 2005-09-08 | Micromotion platform with X-Y-theta three degree of freedom |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1921026A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100486413C (en) * | 2007-10-26 | 2009-05-06 | 华南理工大学 | Positioning platform for fully automatic lead-free tin oil imprinter based on flexible machine |
| CN101290808B (en) * | 2008-06-06 | 2010-04-14 | 华中科技大学 | 3 freedom degrees ultra-precise micro displacement workbench |
| CN103523744A (en) * | 2013-09-22 | 2014-01-22 | 广东工业大学 | Two-stage grating positioning method of high-speed precise motion platform |
| CN103714865A (en) * | 2014-01-03 | 2014-04-09 | 天津大学 | Large-stroke two-translation one-rotation precision positioning platform |
| TWI455789B (en) * | 2011-11-22 | 2014-10-11 | ||
| WO2015161740A1 (en) * | 2014-04-23 | 2015-10-29 | 中国科学院物理研究所 | Precision actuating device |
| CN105157560A (en) * | 2015-05-29 | 2015-12-16 | 山东大学 | Three-DOF (degree of freedom) precision laser detection device |
| CN107740812A (en) * | 2017-09-14 | 2018-02-27 | 西安工业大学 | One-dimensional precise translation mechanism |
| CN109406813A (en) * | 2018-12-14 | 2019-03-01 | 贵州大学 | A kind of microfluidic control device for high-throughput droplet array microfluid point sample |
| CN109613295A (en) * | 2018-12-14 | 2019-04-12 | 贵州大学 | A kind of high throughput droplet array microfluid point sample control device |
| CN110057392A (en) * | 2019-05-31 | 2019-07-26 | 中国航发湖南动力机械研究所 | Calibration system for current vortex sensor |
-
2005
- 2005-09-08 CN CN 200510098315 patent/CN1921026A/en active Pending
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100486413C (en) * | 2007-10-26 | 2009-05-06 | 华南理工大学 | Positioning platform for fully automatic lead-free tin oil imprinter based on flexible machine |
| CN101290808B (en) * | 2008-06-06 | 2010-04-14 | 华中科技大学 | 3 freedom degrees ultra-precise micro displacement workbench |
| TWI455789B (en) * | 2011-11-22 | 2014-10-11 | ||
| CN103523744A (en) * | 2013-09-22 | 2014-01-22 | 广东工业大学 | Two-stage grating positioning method of high-speed precise motion platform |
| CN103523744B (en) * | 2013-09-22 | 2016-05-11 | 广东工业大学 | The two-stage grating positioning method of high speed and precision motion platform |
| CN103714865A (en) * | 2014-01-03 | 2014-04-09 | 天津大学 | Large-stroke two-translation one-rotation precision positioning platform |
| CN103714865B (en) * | 2014-01-03 | 2015-11-18 | 天津大学 | Precisely locating platform is rotated in a kind of Long Distances two translation one |
| JP2017524941A (en) * | 2014-04-23 | 2017-08-31 | 中国科学院物理研究所 | Precision drive device |
| WO2015161740A1 (en) * | 2014-04-23 | 2015-10-29 | 中国科学院物理研究所 | Precision actuating device |
| CN105094147A (en) * | 2014-04-23 | 2015-11-25 | 中国科学院物理研究所 | Precise actuating device |
| CN105157560A (en) * | 2015-05-29 | 2015-12-16 | 山东大学 | Three-DOF (degree of freedom) precision laser detection device |
| CN105157560B (en) * | 2015-05-29 | 2018-02-02 | 山东大学 | A kind of three-freedom degree precision laser detector |
| CN107740812A (en) * | 2017-09-14 | 2018-02-27 | 西安工业大学 | One-dimensional precise translation mechanism |
| CN107740812B (en) * | 2017-09-14 | 2023-11-28 | 西安工业大学 | One-dimensional precise translation mechanism |
| CN109406813A (en) * | 2018-12-14 | 2019-03-01 | 贵州大学 | A kind of microfluidic control device for high-throughput droplet array microfluid point sample |
| CN109613295A (en) * | 2018-12-14 | 2019-04-12 | 贵州大学 | A kind of high throughput droplet array microfluid point sample control device |
| CN110057392A (en) * | 2019-05-31 | 2019-07-26 | 中国航发湖南动力机械研究所 | Calibration system for current vortex sensor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1921026A (en) | Micromotion platform with X-Y-theta three degree of freedom | |
| CN101197197B (en) | Large moving range macro-micro dual drive locating platform | |
| CN103021473B (en) | Direct drive type motion decoupling high-accuracy servo platform | |
| CN101118377B (en) | Air pressure semi-suspending two freedom degree common basal surface movement workstation | |
| US10507560B2 (en) | Apparatus movable by a coordinate measuring machine for positioning a measuring instrument with respect to a workpiece | |
| CN103021472B (en) | Plane parallel type three-freedom-degree precise positioning work table | |
| CN102880013B (en) | Reticle stage worktable | |
| CN100350213C (en) | Probe for high speed scanning | |
| CN108827571B (en) | Device and method for detecting and controlling vibration of two-degree-of-freedom flexible arm | |
| CN101290808B (en) | 3 freedom degrees ultra-precise micro displacement workbench | |
| CN102317737A (en) | Coordinate measuring machine (cmm) and method of compensating errors in a cmm | |
| CN1716456A (en) | Nano grade positioning precision one dimension displacement work table | |
| KR940020524A (en) | WAFER STAGE WITH REFERENCE SURFACE | |
| CN1932439A (en) | Shedding profilogram measuring apparatus | |
| CN101567223A (en) | Pneumatic semi-suspension two-freedom co-baseplane motion workbench with high speed and large stroke | |
| CN108592839A (en) | A kind of three coordinate test platform of ultraprecise | |
| US11408554B2 (en) | Gantry-type positioning device | |
| WO2018156662A1 (en) | Dual-axis linear motion system | |
| CN1219240C (en) | Magnetic suspension precise work bench of integrated circuit photolithography equipment | |
| CN211425797U (en) | Magnetic bearing rigidity testing arrangement | |
| CN206105844U (en) | Grand little integrated motion high accuracy parallel mechanism device | |
| CN201000769Y (en) | Precision positioning flat base based on plane electric motor and ultra-magnetostriction driver | |
| CN210400292U (en) | Detection apparatus for arm brushless motor positioning accuracy | |
| CN114123851A (en) | Six-degree-of-freedom posture adjusting platform | |
| CN208992704U (en) | A kind of plane parallel mechanism device of double five-rod drivings |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C57 | Notification of unclear or unknown address | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhang Yao Document name: Notification of Passing Examination on Formalities |
|
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20070228 |