CN103714865B - Precisely locating platform is rotated in a kind of Long Distances two translation one - Google Patents
Precisely locating platform is rotated in a kind of Long Distances two translation one Download PDFInfo
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- CN103714865B CN103714865B CN201410008229.XA CN201410008229A CN103714865B CN 103714865 B CN103714865 B CN 103714865B CN 201410008229 A CN201410008229 A CN 201410008229A CN 103714865 B CN103714865 B CN 103714865B
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Abstract
The invention discloses a kind of Long Distances two translation one and rotate precisely locating platform, the moving platform comprising pedestal and be provided at its inner portion, described pedestal is connected along the hinge enlarger that the circumference of described moving platform is uniform with three compound parallel-plate flexible guiding mechanisms by three with described moving platform; One end and the pedestal of each hinge enlarger flexibly connect, and the other end and moving platform flexibly connect, and middle part is provided with an input end, and input end is connected with piezoelectric ceramic actuator; Each described compound parallel-plate flexible guiding mechanism comprises 8 pieces of flexible boards being parallel to each other and along moving platform 4 pieces of rigid body blocks circumferentially; Three described compound parallel-plate flexible guiding mechanisms and three described piezoelectric ceramic actuators are uniformly at intervals in the circumference of described moving platform.The present invention is simple and compact for structure; Output displacement is comparatively large, and axial rigidity is higher; The auxiliary positioning platform that can be used as nanometer micro OS realizes microfeed and precision positioning.
Description
Technical field
The invention belongs to nanometer technique field, be specially a kind of two translations one that can be applicable to micro OS and rotate three-degree of freedom flexible precision positioning workbench.
Background technology
Along with the development of science and technology, in fields such as Ultra-precision Turning, microelectronic engineering, bioengineering, nanometer technologies all in the urgent need to the even nano level precision positioning technology of submicron order.Most typical application is that the manufacture of nano-device is produced.Nano-device comprises nano electron device and nano photoelectric device, electronics, optics, micro-mechanical device, novel computer etc. can be widely used in, being research field the most dynamic in current new material and new unit research field, is also components and parts miniaturization, intellectuality, highly integrated etc. mainstream development direction.Nano-device, owing to having potential great market and national defence value, makes the focus that the method for its Design and manufacture, approach, technique etc. become numerous scientist, government and large enterprise's research and invests.So greatly developing precision positioning technology is trend of the times, it is the imbody of Creative Science and Technology Co. Ltd's progress.
But current micro/nano level precisely locating platform is mainly in the majority with two-freedom translation, even if the three freedom precision positioning platform of design, also there is the defects such as complex structure, stroke is little, axial carrying capacity is lower, be difficult to the demand meeting practical application.
Summary of the invention
The present invention provides a kind of simple and compact for structure, comparatively large, that axial carrying capacity is higher a kind of Long Distances two translation one of stroke to rotate precisely locating platform for solving in known technology the technical matters that exists.
The technical scheme that the present invention takes for the technical matters existed in solution known technology is: precisely locating platform is rotated in a kind of Long Distances two translation one, the moving platform comprising pedestal and be provided at its inner portion, described pedestal is connected along the hinge enlarger that the circumference of described moving platform is uniform with three compound parallel-plate flexible guiding mechanisms by three with described moving platform, one end and the described pedestal of each described hinge enlarger flexibly connect, the other end and described moving platform flexibly connect, middle part is provided with an input end, the input end of hinge enlarger is connected with piezoelectric ceramic actuator with ball joint by flexible hinge, described piezoelectric ceramic actuator is arranged on described pedestal, described piezoelectric ceramic actuator is arranged along the radial direction of described moving platform, the output terminal of described piezoelectric ceramic actuator is connected with described ball joint, described ball joint contacts with described flexible hinge is tangent, described flexible hinge is fixed on the input end of described hinge enlarger, each described compound parallel-plate flexible guiding mechanism comprises 8 pieces of flexible boards being parallel to each other and along moving platform 4 pieces of rigid body blocks circumferentially, 4 pieces of described rigid body blocks are made up of the first rigid body block, the second rigid body block, the 3rd rigid body block and the 4th rigid body block, wherein said 3rd rigid body block and described 4th rigid body block nearest apart from described moving platform, and the two is positioned at circumferentially same, apart from described moving platform farthest, described second rigid body block is at described first rigid body block and between described 3rd rigid body block and described 4th rigid body for described first rigid body block, 8 pieces of described flexible boards with the radial direction of described moving platform for axis of symmetry is arranged symmetrically with, 8 pieces of described flexible boards comprise 2 pieces of intermediate plates and 2 blocks of side plates, 2 pieces of described flexible boards are provided with between the described intermediate plate and described side plate of axis of symmetry homonymy, one piece is the second side plate near described side plate, another block is the first side plate near described intermediate plate, the inner of 2 pieces of described intermediate plates is all connected with described moving platform, the outer end of 2 pieces of described intermediate plates is all connected with described second rigid body block, described first side plate is connected by described 3rd rigid body block with the inner of described second side plate, the outer end of described first side plate is connected with described second rigid body block, the outer end of described second side plate is connected with described first rigid body block, the inner of described side plate is connected with described pedestal, the outer end of described side plate is connected with described first rigid body block, three described compound parallel-plate flexible guiding mechanisms and three described piezoelectric ceramic actuators are uniformly at intervals in the circumference of described moving platform.
Described moving platform is disc.
Described pedestal is provided with pilot hole.
The advantage that the present invention has and good effect are: by adopting, disc moving platform is arranged on base interior, and three the hinge enlargers the two evenly arranged by interval and three compound parallel-plate flexible guiding mechanisms are linked together, and the structure of input end is set on hinge enlarger, realize two translation one rotations, simple and compact for structure; Utilize hinge enlarger to carry out the transmission of displacement equations and power, make compound parallel-plate flexible guiding mechanism that elastic deformation occur, thus drive moving platform motion, realize the output of micro-nano displacement, output displacement is comparatively large, and axial rigidity is higher; The auxiliary positioning platform that can be used as nanometer micro OS realizes microfeed and precision positioning.Manufacture for nano-device is produced and is provided effective supplementary means, has very important application value.
Accompanying drawing explanation
Fig. 1 is front view of the present invention;
Fig. 2 is stereographic map of the present invention;
Fig. 3 is compound parallel-plate flexible guiding structural scheme of mechanism of the present invention.
In figure: 1-pretension bolt, 2-piezoelectric ceramic actuator, 3-ball joint, 4-flexible hinge, 5-hinge enlarger, 6-pilot hole, 7-moving platform, 8-compound parallel-plate flexible guiding mechanism, 8-1, the first rigid body block, 8-2, the second rigid body block, 8-3, the 3rd rigid body block, 8-4, the 4th rigid body block, 8-5, intermediate plate, 8-6, the first side plate, 8-7, the second side plate, 8-8, side plate, 9-pedestal.
Embodiment
For summary of the invention of the present invention, Characteristic can be understood further, hereby exemplify following examples, and coordinate accompanying drawing to be described in detail as follows:
Refer to Fig. 1 ~ Fig. 3, precisely locating platform is rotated in a kind of Long Distances two translation one, the moving platform 7 comprising pedestal 9 and be provided at its inner portion, described pedestal 9 is connected along the hinge enlarger 5 that the circumference of described moving platform is uniform with three compound parallel-plate flexible guiding mechanisms 8 by three with described moving platform 7.
One end and the described pedestal 5 of each described hinge enlarger 5 flexibly connect, the other end and described moving platform 7 flexibly connect, middle part is provided with an input end, the input end of hinge enlarger is connected with piezoelectric ceramic actuator 2 with ball joint 3 by flexible hinge 4, described piezoelectric ceramic actuator 2 is arranged on described pedestal 9, described piezoelectric ceramic actuator 2 is arranged along the radial direction of described moving platform 7, the output terminal of described piezoelectric ceramic actuator 2 is connected with described ball joint 3, described ball joint 3 contacts with described flexible hinge 4 is tangent, described flexible hinge 4 is fixed on the input end of described hinge enlarger 5.
Each described compound parallel-plate flexible guiding mechanism 8 comprises 8 pieces of flexible boards being parallel to each other and along moving platform 74 pieces of rigid body blocks circumferentially, 4 pieces of described rigid body blocks are by the first rigid body block 8-1, second rigid body block 8-2, 3rd rigid body block 8-3 and the 4th rigid body block 8-4 forms, wherein said 3rd rigid body block 8-3 and described 4th rigid body block 8-4 is nearest apart from described moving platform 7, and described 3rd rigid body block 8-3 and described 4th rigid body block 8-4 is positioned at circumferentially same, described first rigid body block 8-1 apart from described moving platform 7 farthest, described second rigid body block 8-2 is at described first rigid body block 8-1 and between described 3rd rigid body block 8-3 and described 4th rigid body 8-4, 8 pieces of described flexible boards with the radial direction of described moving platform 7 for axis of symmetry is arranged symmetrically with, 8 pieces of described flexible boards comprise 2 pieces of intermediate plate 8-5 and 2 piece side plate 8-8, 2 pieces of described flexible boards are provided with between the described intermediate plate 8-5 and described side plate 8-8 of axis of symmetry homonymy, one piece is the second side plate 8-7 near described side plate 8-8, another block is the first side plate 8-6 near described intermediate plate 8-5, the inner of 2 pieces of described intermediate plate 8-5 is all connected with described moving platform 7, the outer end of 2 pieces of described intermediate plate 8-5 is all connected with described second rigid body block 8-2, described first side plate 8-6 is connected by described 3rd rigid body block 8-3 with the inner of described second side plate 8-7, the outer end of described first side plate 8-6 is connected with described second rigid body block 8-2, the outer end of described second side plate 8-7 is connected with described first rigid body block 8-1, the inner of described side plate 8-8 is connected with described pedestal 9, the outer end of described side plate 8-8 is connected with described first rigid body block 8-1.
Three described compound parallel-plate flexible guiding mechanisms 8 and three described piezoelectric ceramic actuators 2 are uniformly at intervals in the circumference of described moving platform 7.
In order to make structure compacter, described moving platform 7 preferably adopts discoidal.
In the present embodiment, described pedestal 9 is provided with pilot hole 6.Described pedestal 9 circumferentially arranges three grooves to be the center of circle same at the center of moving platform 7, and angle is respectively 120 ° between two.Three piezoelectric ceramic actuators 1 are arranged in three grooves respectively, piezoelectric ceramic actuator 1 is provided with pretension bolt 3, pretension bolt 3 is arranged on pedestal 9, for ensureing that piezoelectric ceramic actuator 1 is not separated with hinge enlarger 5 with pedestal 9, the output terminal of piezoelectric ceramic actuator 1 is threaded connection globe joint 2, globe joint withstands on flexible hinge 4 curved wall, and the two is tangent, to realize Hertz contact.Hinge enlarger 5 is according to lever amplification principle design, and two ends realize flexibly connecting with pedestal 9 and moving platform 7 respectively.Hinge enlarger is designed with flexible hinge 4, contacts with the globe joint 2 be connected on piezoelectric ceramic actuator 1 output terminal, realize transition and the buffer action of transmitting input displacement and power.
Three compound parallel flexible guiding mechanisms 8 are arranged in the center of moving platform 7, and to be the center of circle circumferentially same, and angle is 120 ° between two, and is 60 ° with the angle of piezoelectric ceramic actuator 2.Moving platform 7 realizes being connected with pedestal 9 with three compound parallel-plate flexible guiding mechanisms 8 by three hinge enlargers 5, improves moving platform 7 axial carrying capacity.
The course of work that the present invention realizes: by the control voltage signal of computer export, order about piezoelectric ceramic actuator 2 and produce stretching motion according to the movement locus of specifying, through transition and the buffering of flexible hinge 4, act on hinge enlarger 5, input displacement is amplified, by overcoming the elastic force of compound parallel-plate flexible guiding mechanism 6, reach the effect that moving platform 7 produces displacement output.By controlling the elongation of three piezoelectric ceramic actuators 2, the control of moving platform 7 different positions and pose can be realized, realizing the translation along plane both direction and the rotation around Z-axis; When the elongation of three piezoelectric ceramic actuators 2 is identical, realize the pure rotation of moving platform 7.
Although be described the preferred embodiments of the present invention by reference to the accompanying drawings above; but the present invention is not limited to above-mentioned embodiment; above-mentioned embodiment is only schematic; be not restrictive; those of ordinary skill in the art is under enlightenment of the present invention; do not departing under the ambit that present inventive concept and claim protect, can also make a lot of form, these all belong within protection scope of the present invention.
Claims (3)
1. precisely locating platform is rotated in a Long Distances two translation one, it is characterized in that, the moving platform comprising pedestal and be provided at its inner portion, described pedestal is connected along the hinge enlarger that the circumference of described moving platform is uniform with three compound parallel-plate flexible guiding mechanisms by three with described moving platform;
One end and the described pedestal of each described hinge enlarger flexibly connect, the other end and described moving platform flexibly connect, middle part is provided with an input end, the input end of hinge enlarger is connected with piezoelectric ceramic actuator with ball joint by flexible hinge, described piezoelectric ceramic actuator is arranged on described pedestal, described piezoelectric ceramic actuator is arranged along the radial direction of described moving platform, the output terminal of described piezoelectric ceramic actuator is connected with described ball joint, described ball joint contacts with described flexible hinge is tangent, described flexible hinge is fixed on the input end of described hinge enlarger,
Each described compound parallel-plate flexible guiding mechanism comprises 8 pieces of flexible boards being parallel to each other and along moving platform 4 pieces of rigid body blocks circumferentially, 4 pieces of described rigid body blocks are made up of the first rigid body block, the second rigid body block, the 3rd rigid body block and the 4th rigid body block, wherein said 3rd rigid body block and described 4th rigid body block nearest apart from described moving platform, and the two is positioned at circumferentially same, apart from described moving platform farthest, described second rigid body block is at described first rigid body block and between described 3rd rigid body block and described 4th rigid body for described first rigid body block, 8 pieces of described flexible boards with the radial direction of described moving platform for axis of symmetry is arranged symmetrically with, 8 pieces of described flexible boards comprise 2 pieces of intermediate plates and 2 blocks of side plates, 2 pieces of described flexible boards are provided with between the described intermediate plate and described side plate of axis of symmetry homonymy, one piece is the second side plate near described side plate, another block is the first side plate near described intermediate plate, the inner of 2 pieces of described intermediate plates is all connected with described moving platform, the outer end of 2 pieces of described intermediate plates is all connected with described second rigid body block, described first side plate is connected by described 3rd rigid body block with the inner of described second side plate, the outer end of described first side plate is connected with described second rigid body block, the outer end of described second side plate is connected with described first rigid body block, the inner of described side plate is connected with described pedestal, the outer end of described side plate is connected with described first rigid body block,
Three described compound parallel-plate flexible guiding mechanisms and three described piezoelectric ceramic actuators are uniformly at intervals in the circumference of described moving platform.
2. precisely locating platform is rotated in Long Distances two according to claim 1 translation one, it is characterized in that, described moving platform is disc.
3. precisely locating platform is rotated in Long Distances two according to claim 1 translation one, it is characterized in that, described pedestal is provided with pilot hole.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410008229.XA CN103714865B (en) | 2014-01-03 | 2014-01-03 | Precisely locating platform is rotated in a kind of Long Distances two translation one |
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| CN201410008229.XA CN103714865B (en) | 2014-01-03 | 2014-01-03 | Precisely locating platform is rotated in a kind of Long Distances two translation one |
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| CN103714865A CN103714865A (en) | 2014-04-09 |
| CN103714865B true CN103714865B (en) | 2015-11-18 |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104269191B (en) * | 2014-09-19 | 2016-03-23 | 南京工程学院 | The parallel institution that Hydrauservo System and piezoelectric ceramic actuator drive jointly |
| CN104599722B (en) * | 2014-11-27 | 2017-12-26 | 须颖 | It is a kind of to be connected mechanism based on flexible hinge chain flexibility Dynamic Coupling |
| CN106003138B (en) * | 2016-06-14 | 2018-08-17 | 东莞市联洲知识产权运营管理有限公司 | A kind of flexible guiding device applied on robot lifting shaft |
| CN106128512B (en) * | 2016-07-04 | 2020-06-09 | 北京航空航天大学 | Spherical three-freedom-degree rotation flexible mechanism |
| CN106838566A (en) * | 2016-11-23 | 2017-06-13 | 南京航空航天大学 | The two-dimensional parallel precision positioning mechanism that a kind of three-way piezoelectric drives |
| CN106710637A (en) * | 2016-11-30 | 2017-05-24 | 南京航空航天大学 | Micrometric displacement positioning mechanism based on piezoelectric stack |
| CN106514631B (en) * | 2017-01-12 | 2018-01-16 | 广东工业大学 | The plane XY θ Three Degree Of Freedom accuracy compensation devices that a kind of flexible hinge is oriented to |
| CN108972302B (en) * | 2018-10-01 | 2024-01-23 | 长春工业大学 | Non-resonant vibration auxiliary polishing device and method |
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| WO2006059457A1 (en) * | 2004-11-30 | 2006-06-08 | Kabushiki Kaisha Yaskawa Denki | Alignment device |
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