CN103714865A - Large-stroke two-translation one-rotation precision positioning platform - Google Patents
Large-stroke two-translation one-rotation precision positioning platform Download PDFInfo
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- CN103714865A CN103714865A CN201410008229.XA CN201410008229A CN103714865A CN 103714865 A CN103714865 A CN 103714865A CN 201410008229 A CN201410008229 A CN 201410008229A CN 103714865 A CN103714865 A CN 103714865A
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Abstract
The invention discloses a large-stroke two-translation one-rotation precision positioning platform which comprises a base and a movable platform body arranged in the platform. The base is connected with the movable platform body through three hinge amplification mechanisms evenly distributed in the circumferential direction of the movable platform body and three composite parallel plate flexible guide mechanisms. One end of each hinge amplification mechanism is flexibly connected with the base, the other end of each hinge amplification mechanism is flexibly connected with the movable platform body, an input end is arranged in the middle of each hinge amplification mechanism, and the input ends are connected with piezoelectric ceramic actuators. Each composite parallel plate flexible guide mechanism comprises eight parallel flexible plates and four rigid blocks distributed in the circumferential direction of the movable platform body. The three composite parallel plate flexible guide mechanisms and the three piezoelectric ceramic actuators are evenly distributed in the circumferential direction of the movable platform body at intervals. The large-stroke two-translation one-rotation precision positioning platform is simple and compact in structure, large in output displacement, high in axial rigidity and capable of being used as an auxiliary positioning platform of a nano microoperation system for achieving microscale feeding and precision positioning.
Description
Technical field
The invention belongs to nanometer technique field, be specially a kind of two translations one that can be applicable to micro OS and rotate three-degree of freedom flexible precision positioning workbench.
Background technology
Along with scientific and technological development, in fields such as ultraprecise processing, microelectronic engineering, bioengineering, nanometer technologies all in the urgent need to the even nano level precision positioning technology of submicron order.Most typical application is the manufacture production of nano-device.Nano-device comprises nano electron device and nano photoelectric device, can be widely used in electronics, optics, micro-mechanical device, novel computer etc., being research field the most dynamic in current new material and new unit research field, is also components and parts miniaturization, intellectuality, highly integrated etc. mainstream development direction.Nano-device is worth owing to having potential great market and national defence, makes the method, approach, technique etc. of its Design and manufacture become the focus of numerous scientists, government and large enterprise's research and investment.So greatly develop precision positioning technology, being trend of the times, is the progressive imbody of Creative Science and Technology Co. Ltd.
But micro/nano level precisely locating platform is mainly in the majority with two-freedom translation at present, even if the three freedom precision positioning platform of design also has the defects such as complex structure, stroke is little, axial carrying capacity is lower, be difficult to meet the demand of practical application.
Summary of the invention
The present invention provides a kind of a kind of large stroke two translations one simple and compact for structure, that stroke is large, axial carrying capacity is higher to rotate precisely locating platform for solving the technical matters existing in known technology.
The technical scheme that the present invention takes for the technical matters existing in solution known technology is: precisely locating platforms are rotated in a kind of large stroke two translations one, comprise pedestal and the moving platform of portion of setting within it, described pedestal and described moving platform are connected with three compound parallel-plate flexible guiding mechanisms by three circumferential uniform hinge enlargers along described moving platform, described in each, one end of hinge enlarger and described pedestal flexibly connect, the other end and described moving platform flexibly connect, middle part is provided with an input end, the input end of hinge enlarger is connected with piezoelectric ceramic actuator with ball joint by flexible hinge, described piezoelectric ceramic actuator is arranged on described pedestal, described piezoelectric ceramic actuator is along the radially setting of described moving platform, on the output terminal of described piezoelectric ceramic actuator, be connected with described ball joint, described ball joint contacts with described flexible hinge is tangent, described flexible hinge is fixed on the input end of described hinge enlarger, described in each, compound parallel-plate flexible guiding mechanism comprises 8 flexible boards being parallel to each other and along 4 rigid body pieces of moving platform circumferential arrangement, 4 described rigid body pieces are comprised of the first rigid body piece, the second rigid body piece, the 3rd rigid body piece and the 4th rigid body piece, wherein said the 3rd rigid body piece and the described moving platform of described the 4th rigid body piece distance are nearest, and the two is positioned on same circumference, farthest, described the second rigid body piece is between described the first rigid body piece and described the 3rd rigid body piece and described the 4th rigid body for the described moving platform of described the first rigid body piece distance, 8 described flexible boards take described moving platform radially as axis of symmetry is arranged symmetrically with, 8 described flexible boards comprise 2 intermediate plates and 2 blocks of side plates, between the described intermediate plate of axis of symmetry homonymy and described side plate, be provided with 2 described flexible boards, one is the second side plate near described side plate, another piece is the first side plate near described intermediate plate, the inner of 2 described intermediate plates is all connected with described moving platform, the outer end of 2 described intermediate plates is all connected with described the second rigid body piece, the inner of described the first side plate and described the second side plate is connected by described the 3rd rigid body piece, the outer end of described the first side plate is connected with described the second rigid body piece, the outer end of described the second side plate is connected with described the first rigid body piece, the inner of described side plate is connected with described pedestal, the outer end of described side plate is connected with described the first rigid body piece, three described compound parallel-plate flexible guiding mechanisms and three described piezoelectric ceramic actuators make progress in the week of described moving platform uniformly at intervals.
Described moving platform is disc.
On described pedestal, be provided with pilot hole.
Advantage and good effect that the present invention has are: by adopting, disc moving platform is arranged on to base interior, and three hinge enlargers that the two is evenly arranged by interval and three compound parallel-plate flexible guiding mechanisms link together, and the structure of input end is set on hinge enlarger, realize two translation one rotations, simple and compact for structure; Utilize hinge enlarger to carry out the transmission of displacement amplification and power, make compound parallel-plate flexible guiding mechanism that elastic deformation occur, thereby drive moving platform motion, realize the output of micro-nano displacement, output displacement is larger, and axial rigidity is higher; The auxiliary positioning platform that can be used as nanometer micro OS is realized microfeed and precision positioning.For the manufacture of nano-device, produce effective supplementary means is provided, there is very important application value.
Accompanying drawing explanation
Fig. 1 is front view of the present invention;
Fig. 2 is stereographic map of the present invention;
Fig. 3 is compound parallel-plate flexible guiding structural scheme of mechanism of the present invention.
In figure: 1-pretension bolt, 2-piezoelectric ceramic actuator, 3-ball joint, 4-flexible hinge, 5-hinge enlarger, 6-pilot hole, 7-moving platform, 8-compound parallel-plate flexible guiding mechanism, 8-1, the first rigid body piece, 8-2, the second rigid body piece, 8-3, the 3rd rigid body piece, 8-4, the 4th rigid body piece, 8-5, intermediate plate, 8-6, the first side plate, 8-7, the second side plate, 8-8, side plate, 9-pedestal.
Embodiment
For further understanding summary of the invention of the present invention, Characteristic, hereby exemplify following examples, and coordinate accompanying drawing to be described in detail as follows:
Refer to Fig. 1～Fig. 3, precisely locating platform is rotated in a kind of large stroke two translations one, comprise pedestal 9 and the moving platform 7 of the portion that sets within it, described pedestal 9 and described moving platform 7 are connected with three compound parallel-plate flexible guiding mechanisms 8 by three circumferential uniform hinge enlargers 5 along described moving platform.
Described in each, one end of hinge enlarger 5 and described pedestal 5 flexibly connect, the other end and described moving platform 7 flexibly connect, middle part is provided with an input end, the input end of hinge enlarger is connected with piezoelectric ceramic actuator 2 with ball joint 3 by flexible hinge 4, described piezoelectric ceramic actuator 2 is arranged on described pedestal 9, described piezoelectric ceramic actuator 2 is along the radially setting of described moving platform 7, on the output terminal of described piezoelectric ceramic actuator 2, be connected with described ball joint 3, described ball joint 3 and tangent contact of described flexible hinge 4, described flexible hinge 4 is fixed on the input end of described hinge enlarger 5.
Described in each, compound parallel-plate flexible guiding mechanism 8 comprises 8 flexible boards being parallel to each other and along 4 rigid body pieces of moving platform 7 circumferential arrangement, 4 described rigid body pieces are by the first rigid body piece 8-1, the second rigid body piece 8-2, the 3rd rigid body piece 8-3 and the 4th rigid body piece 8-4 form, wherein said the 3rd rigid body piece 8-3 and the described moving platform 7 of described the 4th rigid body piece 8-4 distance are nearest, and described the 3rd rigid body piece 8-3 and described the 4th rigid body piece 8-4 are positioned on same circumference, the described moving platform 7 of described the first rigid body piece 8-1 distance farthest, described the second rigid body piece 8-2 is between described the first rigid body piece 8-1 and described the 3rd rigid body piece 8-3 and described the 4th rigid body 8-4, 8 described flexible boards take described moving platform 7 radially as axis of symmetry is arranged symmetrically with, 8 described flexible boards comprise 2 intermediate plate 8-5 and 2 side plate 8-8, between the described intermediate plate 8-5 of axis of symmetry homonymy and described side plate 8-8, be provided with 2 described flexible boards, one is the second side plate 8-7 near described side plate 8-8, another piece is the first side plate 8-6 near described intermediate plate 8-5, the inner of 2 described intermediate plate 8-5 is all connected with described moving platform 7, the outer end of 2 described intermediate plate 8-5 is all connected with described the second rigid body piece 8-2, the inner of described the first side plate 8-6 and described the second side plate 8-7 is connected by described the 3rd rigid body piece 8-3, the outer end of described the first side plate 8-6 is connected with described the second rigid body piece 8-2, the outer end of described the second side plate 8-7 is connected with described the first rigid body piece 8-1, the inner of described side plate 8-8 is connected with described pedestal 9, the outer end of described side plate 8-8 is connected with described the first rigid body piece 8-1.
Three described compound parallel-plate flexible guiding mechanisms 8 and three described piezoelectric ceramic actuators 2 make progress in the week of described moving platform 7 uniformly at intervals.
In order to make structure compacter, described moving platform 7 preferably adopts discoidal.
In the present embodiment, on described pedestal 9, be provided with pilot hole 6.On described pedestal 9, take on the same circumference that the center of moving platform 7 is the center of circle three grooves are set, and angle is respectively 120 ° between two.Three piezoelectric ceramic actuators 1 are arranged on respectively in three grooves, piezoelectric ceramic actuator 1 is provided with pretension bolt 3, pretension bolt 3 is arranged on pedestal 9, be used for guaranteeing that piezoelectric ceramic actuator 1 is not separated with hinge enlarger 5 with pedestal 9, the output terminal of piezoelectric ceramic actuator 1 is threaded connection globe joint 2, globe joint withstands on flexible hinge 4 curved walls, and the two is tangent, to realize a hertz contact.Hinge enlarger 5 is according to lever amplification principle design, and two ends are realized and being flexibly connected with pedestal 9 and moving platform 7 respectively.On hinge enlarger, be designed with flexible hinge 4, contact with the globe joint 2 being connected on piezoelectric ceramic actuator 1 output terminal, realize transition and the buffer action of transmitting input displacement and power.
Three compound parallel flexible guiding mechanisms 8 are arranged in take on the same circumference that the center of moving platform 7 is the center of circle, and angle is 120 ° between two, and with the angle of piezoelectric ceramic actuator 2 be 60 °.Moving platform 7 is connected with pedestal 9 realizations with three compound parallel-plate flexible guiding mechanisms 8 by three hinge enlargers 5, has improved moving platform 7 axial carrying capacities.
The course of work that the present invention realizes: by the control voltage signal of computer export, order about piezoelectric ceramic actuator 2 and produce stretching motion according to the movement locus of appointment, transition and buffering through flexible hinge 4, act on hinge enlarger 5, making to input displacement is amplified, by overcoming the elastic force of compound parallel-plate flexible guiding mechanism 6, reach moving platform 7 and produce the effect of displacements output.By controlling the elongation of three piezoelectric ceramic actuators 2, can realize the control of moving platform 7 different positions and poses, realize along the translation of plane both direction with around the rotation of Z-axis; When the elongation of three piezoelectric ceramic actuators 2 is identical, realize the pure rotation of moving platform 7.
Although by reference to the accompanying drawings the preferred embodiments of the present invention are described above; but the present invention is not limited to above-mentioned embodiment; above-mentioned embodiment is only schematic; be not restrictive; those of ordinary skill in the art is under enlightenment of the present invention; not departing from the scope situation that aim of the present invention and claim protect, can also make a lot of forms, within these all belong to protection scope of the present invention.
Claims (3)
1. precisely locating platform is rotated in large stroke two translations one, it is characterized in that, comprise pedestal and the moving platform of portion of setting within it, described pedestal and described moving platform are connected with three compound parallel-plate flexible guiding mechanisms by three circumferential uniform hinge enlargers along described moving platform;
Described in each, one end of hinge enlarger and described pedestal flexibly connect, the other end and described moving platform flexibly connect, middle part is provided with an input end, the input end of hinge enlarger is connected with piezoelectric ceramic actuator with ball joint by flexible hinge, described piezoelectric ceramic actuator is arranged on described pedestal, described piezoelectric ceramic actuator is along the radially setting of described moving platform, on the output terminal of described piezoelectric ceramic actuator, be connected with described ball joint, described ball joint contacts with described flexible hinge is tangent, described flexible hinge is fixed on the input end of described hinge enlarger,
Described in each, compound parallel-plate flexible guiding mechanism comprises 8 flexible boards being parallel to each other and along 4 rigid body pieces of moving platform circumferential arrangement, 4 described rigid body pieces are comprised of the first rigid body piece, the second rigid body piece, the 3rd rigid body piece and the 4th rigid body piece, wherein said the 3rd rigid body piece and the described moving platform of described the 4th rigid body piece distance are nearest, and the two is positioned on same circumference, farthest, described the second rigid body piece is between described the first rigid body piece and described the 3rd rigid body piece and described the 4th rigid body for the described moving platform of described the first rigid body piece distance, 8 described flexible boards take described moving platform radially as axis of symmetry is arranged symmetrically with, 8 described flexible boards comprise 2 intermediate plates and 2 blocks of side plates, between the described intermediate plate of axis of symmetry homonymy and described side plate, be provided with 2 described flexible boards, one is the second side plate near described side plate, another piece is the first side plate near described intermediate plate, the inner of 2 described intermediate plates is all connected with described moving platform, the outer end of 2 described intermediate plates is all connected with described the second rigid body piece, the inner of described the first side plate and described the second side plate is connected by described the 3rd rigid body piece, the outer end of described the first side plate is connected with described the second rigid body piece, the outer end of described the second side plate is connected with described the first rigid body piece, the inner of described side plate is connected with described pedestal, the outer end of described side plate is connected with described the first rigid body piece,
Three described compound parallel-plate flexible guiding mechanisms and three described piezoelectric ceramic actuators make progress in the week of described moving platform uniformly at intervals.
2. precisely locating platform is rotated in large stroke two translations one according to claim 1, it is characterized in that, described moving platform is disc.
3. three freedom precision positioning platform according to claim 1, is characterized in that, on described pedestal, is provided with pilot hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201410008229.XA CN103714865B (en) | 2014-01-03 | 2014-01-03 | Precisely locating platform is rotated in a kind of Long Distances two translation one |
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| CN201410008229.XA CN103714865B (en) | 2014-01-03 | 2014-01-03 | Precisely locating platform is rotated in a kind of Long Distances two translation one |
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| CN103714865A true CN103714865A (en) | 2014-04-09 |
| CN103714865B CN103714865B (en) | 2015-11-18 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104269191A (en) * | 2014-09-19 | 2015-01-07 | 南京工程学院 | Parallel mechanism driven by hydraulic servo system and piezoelectric ceramic actuators |
| CN104599722A (en) * | 2014-11-27 | 2015-05-06 | 天津三英精密仪器有限公司 | Flexible hinge based flexible dynamic coupling connection fixing mechanism |
| CN106003138A (en) * | 2016-06-14 | 2016-10-12 | 东莞市联洲知识产权运营管理有限公司 | Flexible guiding device applied to lifting shaft of robot |
| CN106128512A (en) * | 2016-07-04 | 2016-11-16 | 北京航空航天大学 | Spherical three-degree-of-freedom pivoting flexible mechanism |
| CN106514631A (en) * | 2017-01-12 | 2017-03-22 | 广东工业大学 | Flexible hinge-guided plane X Y theta three-degree-of-freedom precision compensator |
| CN106710637A (en) * | 2016-11-30 | 2017-05-24 | 南京航空航天大学 | Micrometric displacement positioning mechanism based on piezoelectric stack |
| CN106838566A (en) * | 2016-11-23 | 2017-06-13 | 南京航空航天大学 | The two-dimensional parallel precision positioning mechanism that a kind of three-way piezoelectric drives |
| CN108972302A (en) * | 2018-10-01 | 2018-12-11 | 长春工业大学 | A kind of disresonance type vibration auxiliary polishing device and method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1645518A (en) * | 2004-12-28 | 2005-07-27 | 华南理工大学 | Planar three freedom meek precisively positioning platform |
| WO2006059457A1 (en) * | 2004-11-30 | 2006-06-08 | Kabushiki Kaisha Yaskawa Denki | Alignment device |
| CN1921026A (en) * | 2005-09-08 | 2007-02-28 | 北京慧摩森电子系统技术有限公司 | Micromotion platform with X-Y-theta three degree of freedom |
| CN101710229A (en) * | 2009-12-07 | 2010-05-19 | 天津大学 | Two-translation and one-rotation precision positioning workbench for nanoimprint lithography system |
| CN203689921U (en) * | 2014-01-03 | 2014-07-02 | 天津大学 | Large-stroke two-translation and one-rotation precision positioning platform |
-
2014
- 2014-01-03 CN CN201410008229.XA patent/CN103714865B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006059457A1 (en) * | 2004-11-30 | 2006-06-08 | Kabushiki Kaisha Yaskawa Denki | Alignment device |
| CN1645518A (en) * | 2004-12-28 | 2005-07-27 | 华南理工大学 | Planar three freedom meek precisively positioning platform |
| CN1921026A (en) * | 2005-09-08 | 2007-02-28 | 北京慧摩森电子系统技术有限公司 | Micromotion platform with X-Y-theta three degree of freedom |
| CN101710229A (en) * | 2009-12-07 | 2010-05-19 | 天津大学 | Two-translation and one-rotation precision positioning workbench for nanoimprint lithography system |
| CN203689921U (en) * | 2014-01-03 | 2014-07-02 | 天津大学 | Large-stroke two-translation and one-rotation precision positioning platform |
Non-Patent Citations (1)
| Title |
|---|
| 贾晓辉,张大卫: "三自由度精密定位工作台的设计与运动学分析", 《天津大学学报》 * |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104269191A (en) * | 2014-09-19 | 2015-01-07 | 南京工程学院 | Parallel mechanism driven by hydraulic servo system and piezoelectric ceramic actuators |
| CN104599722B (en) * | 2014-11-27 | 2017-12-26 | 须颖 | It is a kind of to be connected mechanism based on flexible hinge chain flexibility Dynamic Coupling |
| CN104599722A (en) * | 2014-11-27 | 2015-05-06 | 天津三英精密仪器有限公司 | Flexible hinge based flexible dynamic coupling connection fixing mechanism |
| CN106003138A (en) * | 2016-06-14 | 2016-10-12 | 东莞市联洲知识产权运营管理有限公司 | Flexible guiding device applied to lifting shaft of robot |
| CN106003138B (en) * | 2016-06-14 | 2018-08-17 | 东莞市联洲知识产权运营管理有限公司 | A kind of flexible guiding device applied on robot lifting shaft |
| CN106128512A (en) * | 2016-07-04 | 2016-11-16 | 北京航空航天大学 | Spherical three-degree-of-freedom pivoting flexible mechanism |
| CN106128512B (en) * | 2016-07-04 | 2020-06-09 | 北京航空航天大学 | Spherical three-freedom-degree rotation flexible mechanism |
| CN106838566A (en) * | 2016-11-23 | 2017-06-13 | 南京航空航天大学 | The two-dimensional parallel precision positioning mechanism that a kind of three-way piezoelectric drives |
| CN106710637A (en) * | 2016-11-30 | 2017-05-24 | 南京航空航天大学 | Micrometric displacement positioning mechanism based on piezoelectric stack |
| CN106514631B (en) * | 2017-01-12 | 2018-01-16 | 广东工业大学 | The plane XY θ Three Degree Of Freedom accuracy compensation devices that a kind of flexible hinge is oriented to |
| CN106514631A (en) * | 2017-01-12 | 2017-03-22 | 广东工业大学 | Flexible hinge-guided plane X Y theta three-degree-of-freedom precision compensator |
| CN108972302A (en) * | 2018-10-01 | 2018-12-11 | 长春工业大学 | A kind of disresonance type vibration auxiliary polishing device and method |
| CN108972302B (en) * | 2018-10-01 | 2024-01-23 | 长春工业大学 | Non-resonant vibration auxiliary polishing device and method |
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