CN102446563A - Three-degree-of-freedom microoperation orthogonal parallel operating platform used for ultraprecise location - Google Patents
Three-degree-of-freedom microoperation orthogonal parallel operating platform used for ultraprecise location Download PDFInfo
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- CN102446563A CN102446563A CN2011102872010A CN201110287201A CN102446563A CN 102446563 A CN102446563 A CN 102446563A CN 2011102872010 A CN2011102872010 A CN 2011102872010A CN 201110287201 A CN201110287201 A CN 201110287201A CN 102446563 A CN102446563 A CN 102446563A
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Abstract
The invention discloses a three-degree-of-freedom microoperation orthogonal parallel operating platform used for ultraprecise location, which realizes space three-dimensional translation ultraprecise location. The three-degree-of-freedom microoperation orthogonal parallel operating platform is provided with a static platform and a movable platform, wherein a piezoelectric ceramic driver is fixedly vertically arranged on each panel of the static platform, a drive of each piezoelectric ceramic driver is connected with the top end of a branched chain, the tail end of each branched chain is vertically connected with the movable platform, three branched chains are formed by sequentially serially connecting a flexible movable pair, a parallelogram structure, a first rotating pair and a second rotating pair according to position relationships of vertical, vertical and parallel among axial lines, the top end of each branched chain is a movable pair, the tail end of each branched chain is a second rotating pair, the three movable pairs are mutually orthogonal, and the three second rotating pairs are mutually orthogonal. According to the invention, the advantages of a parallel mechanism and a flexible movement pair are combined, a movement is generated by depending self elastic deformation, and output reaches high precision of micro level even nano level.
Description
Technical field
What the present invention relates to is the parallel running platform that parallel institution combines with the compliant motion parafacies, but implementation space three-dimensional translating ultraprecise location.
Background technology
Along with modern mechanical develops to microminiaturized, high precision int direction, the locator meams that the Traditional use stepper motor adds precision lead screw can not satisfy the requirement of superhigh precision.At present; Many engineerings have reached micron, sub-micron even nanoscale with experiment field permissible accuracy, like fields such as the micrometering amount among the microelectromechanical systems MEMS, microposition, bioengineering cell manipulation, little assembling and microsurgery, fiber alignment, error fine compensation, fine motion excitings.And traditional mechanical is because the manufacturing and the defectives such as rigging error, friction of pair clearance, member make the realistic accuracy of member be difficult to satisfy high-precision requirement.
Summary of the invention
Can not reach the high-precision location requirement in order to overcome above-mentioned traditional locator meams, propose a kind of full flexibility
ThreeDegree of freedom microoperation quadrature parallel running platform, but implementation space three-dimensional translating ultraprecise location, terminal output can reach micron even nano level high precision.
The foregoing invention purpose is realized by following technical scheme: have silent flatform and moving platform; Silent flatform is made up of the panel of three quadratures; On every panel of silent flatform, all vertically set firmly a piezoelectric ceramic actuator; The driving of each piezoelectric ceramic actuator all connects the top of a side chain, each side chain end all vertically connect moving platform; Article three, said side chain is connected together in series according to position relation vertical, vertical, parallel between the axis by moving sets, parallelogram sturcutre, first revolute pair and second revolute pair of flexibility; The top of each side chain all is moving sets, and the end of each side chain all is second revolute pairs, and three said moving sets are mutually orthogonal, and three said second revolute pairs are mutually orthogonal.
The parallelogram composite structure that the revolute pair that said parallelogram sturcutre is parallel to each other by 4 axis joins end to end and forms.
Said revolute pair is that a cross section is the flexible beam column of rectangle, on the top and bottom in the middle of the flexible beam column, respectively is provided with the groove of symmetry.
The invention has the beneficial effects as follows:
1, the present invention does main body mechanism with the parallel institution of good stress performance; It is big that parallel institution has rigidity; But advantages such as the continuous multi-dimensional movement in implementation space, compliant motion pair have no gap, no rubbing wear, can integral body process, avoid advantages such as assembling, and the present invention has combined parallel institution and the secondary advantage of compliant motion; Rely on the elastic deformation of self to produce motion; Do driving with piezoelectric ceramics and realize the ultraprecise location, terminal output can reach micron even nano level high precision, therefore makes it can be widely used in above-mentioned fine operation field.
2, the present invention has solved the orientation problem of the continuous translation of space three-dimensional well; And because arrangement of mechanism symmetry; Each joint stress performance is better, and for realizing that with microdeformation the mechanism of motion is highly profitable, the three-dimensional that makes moving platform can be implemented in the spatial dimension steadily moves continuously.
3, the present invention has that compact conformation, relative rigidity are big, structure stress property is good, bearing accuracy is high, the position is counter separates advantages such as simple, that processing and manufacturing is with low cost.
Description of drawings
Fig. 1 structural representation of the present invention;
Fig. 2 is the structural drawing of first side chain 3 among Fig. 1;
Fig. 3 is the structural drawing of second side chain 5 among Fig. 1;
Fig. 4 is the structural drawing of the 3rd side chain 7 among Fig. 1;
Fig. 5 is the structure enlarged diagram of revolute pair among Fig. 2-4;
Among the figure: 1. silent flatform; 4. moving platform; 2,6,8. piezoelectric ceramic actuator; 3,5,7. first, second, third side chain; 9. groove; P1, P2, P3. moving sets; 4R1,4R4,4R7. parallelogram sturcutre; R2, R5, R8. first revolute pair; R3, R6, R9. second revolute pair.
Embodiment
As shown in Figure 1, the present invention is made up of three parts, and the one, connect the moving platform 4 of terminal operating parts, it can the implementation space D translation; The 2nd, the silent flatform 1 of piezoelectric ceramic actuator 2,6,8 is installed, its effect provides the needed input of whole device; The 3rd, first, second, third side chain 3,5,7 of three flexibilities of connection moving platform 4 and silent flatform 1; The top of each side chain and silent flatform 1 are connected in driving place of three piezoelectric ceramics 2,6,8; Each side chain end all vertically connect moving platform, it is connected with the form of moving platform 4 with quadrature.
Shown in Fig. 2-4; Article three, the version of side chain 3,5,7 is identical; Be P ⊥ P (4R) ⊥ R ∥ R structure, P, R represent moving sets and revolute pair respectively, and ⊥ representes that the spatial relation between the kinematic pair axis is vertical; ∥ representes parallel; 4R representes the parallelogram composite structure that revolute pair that 4 axis are parallel to each other joins end to end and forms, and it is equivalent to the vertical with it moving sets of an axis on kinematics, and P ⊥ P (4R) ⊥ R ∥ R representes by P, P (4R), R, these 4 kinematic pairs of R according to vertical, vertical, parallel position relation series connection successively.
Form 3-P ⊥ P (4R) ⊥ R ∥ R parallel institution by three side chains 3,5,7, what 3-P ⊥ P (4R) ⊥ R ∥ R represented is the side chain that this parallel institution has 3 identical P ⊥ P (4R) ⊥ R ∥ R.Its whole characteristics are: the terminal revolute pair R3 of three side chains, R6, R9 all link to each other with moving platform 4; And three the axis of side chain is orthogonal in the space; Orthogonal thereto distribution; Be R3 ⊥ R6 ⊥ R9, the other end moving sets P1 of three side chains, P2, P3 link to each other with silent flatform 1, and three moving sets also orthogonal thereto distributions in the space.
Referring to the specific constructive form of first side chain 3 shown in Figure 2, first side chain 3 is connected together in series according to position relation vertical, vertical, parallel between the axis by the moving sets P1 of flexibility, flexible parallelogram sturcutre 4R1, the first revolute pair R2 of flexibility and the second flexible revolute pair R3; The top of first side chain 3 is that moving sets P1, end are the second revolute pair R3, and the second revolute pair R3 directly links to each other with moving platform 4, and the driving of the piezoelectric ceramic actuator 2 on moving sets P1 and the silent flatform 1 links to each other.
Referring to the specific constructive form of second side chain 5 shown in Figure 3, second side chain 5 is connected together in series according to vertical, vertical, parallel position relation with the second flexible revolute pair R6 by the moving sets P2 of flexibility, flexible parallelogram sturcutre 4R4, the first flexible revolute pair R5; The top of second side chain 5 is moving sets P2; End is the second moving sets R6; The second moving sets R6 links to each other with moving platform 4, and perpendicular with the end second revolute pair R3 in first side chain 3, and the driving of the piezoelectric ceramic actuator 6 on moving sets P2 and the silent flatform 1 links to each other.
Referring to the specific constructive form of the 3rd side chain 7 shown in Figure 4, the 3rd side chain 7 is connected together in series according to vertical, vertical, parallel position relation with the second flexible revolute pair R9 by the moving sets P3 of flexibility, flexible parallelogram sturcutre 4R7, the first flexible revolute pair R8; The top of the 3rd side chain 7 is that moving sets P3, end are the second revolute pair R9; The second revolute pair R9 links to each other with moving platform 4; And vertical with the end second revolute pair R3, R6 in first side chain 3, second side chain 5, the driving of the piezoelectric ceramic actuator 6 on moving sets P3 and the silent flatform 1 links to each other.
Referring to shown in Figure 5 be the specific constructive form of the revolute pair among the present invention; Revolute pair is that a cross section is the flexible beam column of rectangle; On the upper and lower surface in the middle of this flexibility beam column, respectively establish the groove 9 of a symmetry, the groove 9 of symmetry can adopt the method for removing the part material to realize; Like this, receive moment of flexure to do the time spent in revolute pair, the weak link in the middle of the flexible beam column produces the rotation around similar traditional revolute pair of its structure centre of form because the rigidity young pathbreaker at first deforms, thereby makes the beam column two ends that relatively rotating of certain angle taken place.
Parameters such as acceleration when the size of above-mentioned all revolute pairs and moving sets and rigidity thereof should be according to the weight of test specimen and end-effector work are done concrete adjustment; Parallel institution is being satisfied under the situation of rigidity requirement, and revolute pair and moving sets have good deformation property.
When the present invention works; Set up O-XYZ cartesian coordinate system as shown in fig. 1 in first side chain 3 and the joining of silent flatform 1; The end-effector of needs being carried out precision positioning is fixed on the moving platform 4 through being threaded; By the position coordinates that position and the end-effector of moving platform 4 in current coordinate system need arrive, can confirm that each axially needs distance of moving to moving platform 4 in O-XYZ coordinate system lower edge, calculate the displacement that each piezoelectric ceramic actuator input end as initiatively input need move by counter the separating in the position of parallel institution; The displacement that will instead solve at last is as the input of piezoelectric ceramic actuator; Like this, moving platform 4 can be implemented to the location of assigned address, reaches the purpose of ultraprecise location.
Claims (3)
1. one kind is used for the three-freedom microoperation quadrature parallel running platform that ultraprecise is located; Have silent flatform and moving platform; Silent flatform is made up of the panel of three quadratures; It is characterized in that: on every panel of silent flatform, all vertically set firmly a piezoelectric ceramic actuator, the driving of each piezoelectric ceramic actuator all connects the top of a side chain, each side chain end all vertically connect moving platform; Article three, said side chain is connected together in series according to position relation vertical, vertical, parallel between the axis by moving sets, parallelogram sturcutre, first revolute pair and second revolute pair of flexibility; The top of each side chain all is moving sets, and the end of each side chain all is second revolute pairs, and three said moving sets are mutually orthogonal, and three said second revolute pairs are mutually orthogonal.
2. a kind of three-freedom microoperation quadrature parallel running platform that is used for the ultraprecise location according to claim 1 is characterized in that: the parallelogram composite structure that the revolute pair that said parallelogram sturcutre is parallel to each other by 4 axis joins end to end and forms.
3. a kind of three-freedom microoperation quadrature parallel running platform that is used for the ultraprecise location according to claim 1; It is characterized in that: said revolute pair is that a cross section is the flexible beam column of rectangle, on the top and bottom in the middle of the flexible beam column, respectively is provided with the groove of a symmetry.
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Cited By (17)
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| CN103137216A (en) * | 2013-01-30 | 2013-06-05 | 西安交通大学 | Double-axis flexible binding structure for micro-angle displacement platform |
| CN103357894A (en) * | 2013-06-26 | 2013-10-23 | 吉林大学 | Long-strake three degree-of-freedom linear type quick cutter servo device |
| CN104440817A (en) * | 2014-12-04 | 2015-03-25 | 山东大学 | Spatial three-dimensional micro-displacement precise positioning device |
| CN105006255A (en) * | 2015-07-28 | 2015-10-28 | 昆明理工大学 | Three-degree-of-freedom micro-positioning workbench |
| CN105931675A (en) * | 2016-04-13 | 2016-09-07 | 天津大学 | Parallel xyz three-freedom-degree micro-positioning platform |
| CN106082116A (en) * | 2016-08-24 | 2016-11-09 | 广东工业大学 | Micro-nano technology equipment and process operation device thereof |
| WO2017198047A1 (en) * | 2016-05-17 | 2017-11-23 | 西安交通大学 | Piezoelectric ceramic driven three-freedom-degree angle adjustment apparatus and adjustment method |
| CN107555399A (en) * | 2017-08-29 | 2018-01-09 | 山东大学 | A kind of structure of the three-dimensional micro- servo platform of parallel piezoelectric |
| CN109256175A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision large-stroke space translation mini positioning platform |
| CN109256174A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision spatial translation mini positioning platform |
| CN109795981A (en) * | 2019-01-18 | 2019-05-24 | 宁波大学 | The parallel micromotion platform of multistage linking output |
| CN110501811A (en) * | 2019-07-05 | 2019-11-26 | 江苏大学 | A kind of Piezoelectric Driving three-dimensional mini positioning platform |
| WO2020107612A1 (en) * | 2018-11-26 | 2020-06-04 | 中国科学院光电技术研究所 | Flexible hinge structure |
| CN112757262A (en) * | 2021-01-16 | 2021-05-07 | 北京工业大学 | Micro-motion 3-UPU compliant parallel mechanism with pure movement |
| CN113726217A (en) * | 2021-09-07 | 2021-11-30 | 河南理工大学 | Two-dimensional large-stroke high-load decoupling deflection device |
| CN115148637A (en) * | 2022-07-05 | 2022-10-04 | 北京派和科技股份有限公司 | Orthogonal-driving rigid-flexible coupling high-speed crystal-pricking mechanism |
| CN115224975A (en) * | 2022-07-22 | 2022-10-21 | 山东大学 | Orthogonal decoupling three-axis nano micro-motion platform applied to inverted load |
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Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103137216A (en) * | 2013-01-30 | 2013-06-05 | 西安交通大学 | Double-axis flexible binding structure for micro-angle displacement platform |
| CN103137216B (en) * | 2013-01-30 | 2014-07-02 | 西安交通大学 | Double-axis flexible binding structure for micro-angle displacement platform |
| CN103357894A (en) * | 2013-06-26 | 2013-10-23 | 吉林大学 | Long-strake three degree-of-freedom linear type quick cutter servo device |
| CN104440817A (en) * | 2014-12-04 | 2015-03-25 | 山东大学 | Spatial three-dimensional micro-displacement precise positioning device |
| CN105006255A (en) * | 2015-07-28 | 2015-10-28 | 昆明理工大学 | Three-degree-of-freedom micro-positioning workbench |
| CN105931675A (en) * | 2016-04-13 | 2016-09-07 | 天津大学 | Parallel xyz three-freedom-degree micro-positioning platform |
| CN105931675B (en) * | 2016-04-13 | 2018-04-03 | 天津大学 | A kind of parallel xyz Three Degree Of Freedoms mini positioning platform |
| WO2017198047A1 (en) * | 2016-05-17 | 2017-11-23 | 西安交通大学 | Piezoelectric ceramic driven three-freedom-degree angle adjustment apparatus and adjustment method |
| CN106082116A (en) * | 2016-08-24 | 2016-11-09 | 广东工业大学 | Micro-nano technology equipment and process operation device thereof |
| CN107555399A (en) * | 2017-08-29 | 2018-01-09 | 山东大学 | A kind of structure of the three-dimensional micro- servo platform of parallel piezoelectric |
| CN109256175A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision large-stroke space translation mini positioning platform |
| CN109256174A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision spatial translation mini positioning platform |
| WO2020107612A1 (en) * | 2018-11-26 | 2020-06-04 | 中国科学院光电技术研究所 | Flexible hinge structure |
| CN109795981A (en) * | 2019-01-18 | 2019-05-24 | 宁波大学 | The parallel micromotion platform of multistage linking output |
| CN109795981B (en) * | 2019-01-18 | 2020-12-25 | 宁波大学 | Multi-stage linkage output parallel micro-motion platform |
| CN110501811A (en) * | 2019-07-05 | 2019-11-26 | 江苏大学 | A kind of Piezoelectric Driving three-dimensional mini positioning platform |
| CN110501811B (en) * | 2019-07-05 | 2021-07-20 | 江苏大学 | Piezoelectric driving three-dimensional micro-positioning platform |
| CN112757262A (en) * | 2021-01-16 | 2021-05-07 | 北京工业大学 | Micro-motion 3-UPU compliant parallel mechanism with pure movement |
| CN113726217A (en) * | 2021-09-07 | 2021-11-30 | 河南理工大学 | Two-dimensional large-stroke high-load decoupling deflection device |
| CN113726217B (en) * | 2021-09-07 | 2024-04-19 | 河南理工大学 | Two-dimensional large-stroke high-load decoupling deflection device |
| CN115148637A (en) * | 2022-07-05 | 2022-10-04 | 北京派和科技股份有限公司 | Orthogonal-driving rigid-flexible coupling high-speed crystal-pricking mechanism |
| CN115224975A (en) * | 2022-07-22 | 2022-10-21 | 山东大学 | Orthogonal decoupling three-axis nano micro-motion platform applied to inverted load |
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Application publication date: 20120509 |