CN109872767B - Multi-source driven flexible parallel micromanipulator - Google Patents
Multi-source driven flexible parallel micromanipulator Download PDFInfo
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- CN109872767B CN109872767B CN201910049326.6A CN201910049326A CN109872767B CN 109872767 B CN109872767 B CN 109872767B CN 201910049326 A CN201910049326 A CN 201910049326A CN 109872767 B CN109872767 B CN 109872767B
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Abstract
A multi-source driven flexible parallel micromanipulator relates to a micromanipulator, which comprises a working platform, an amplifying mechanism and a base; the base is fixedly connected with an amplifying mechanism, and the working platform is supported on the amplifying mechanism; each amplifying mechanism unit comprises a supporting rod, a first piezoelectric stacking driver, a second piezoelectric stacking driver, a first guide amplifying rod, a second guide amplifying rod, a third guide amplifying rod and a supporting frame; the first guide amplification rod and the supporting rod are connected through a single-shaft circular cross section double-notch flexible hinge, the first guide amplification rod and the second guide amplification rod are connected through a single-shaft circular cross section double-notch flexible hinge, a first piezoelectric stacking driver capable of driving the first guide amplification rod to move is fixedly connected to the supporting disk, a second piezoelectric stacking driver capable of driving the second guide amplification rod to move is fixedly connected to the supporting frame between the supporting rod and the supporting rod, the spherical hinge is connected with the working platform in a detachable mode, and the supporting frame is connected with the base in a detachable mode. The invention has convenient operation and improves the displacement of the working platform.
Description
Technical Field
The invention relates to a micro-manipulator, in particular to a multi-source driven flexible parallel micro-manipulator.
Background
The multi-drive flexible parallel micromanipulator integrates multidisciplinary cross technologies such as mechanical structure analysis, control and the like, and has wide development prospect.
Rigid structures are now necessary in many mechanical design systems, but many devices are designed to be both flexible and rigid in order to obtain advantages such as increased component life and reduced assembly, and thus the use of flexible joints is one way to obtain certain advantages in mechanical design by taking advantage of flexibility. On the other hand, the parallel mechanism is widely used in the field of high rigidity, high precision or large load without requiring a large working space because it has a plurality of mechanisms and fixed drive.
With the increasingly important application of the compliant parallel mechanism in the fields of microelectronics, micromachines and ultra-precision machining, the compliant parallel mechanism is one of the key technologies for realizing precision positioning and micro-displacement, the high-performance compliant parallel mechanism can provide precise positioning and precise movement, and the precision positioning technology has attracted attention of many countries in the world.
The existing piezoelectric material has the advantages of high response speed, strong output force, high reliability and the like, and is widely applied to many fields. However, the output displacement of the conventional single-piezoelectric stack actuator is small, and an amplification mechanism is required to be combined, so that the conventional single-piezoelectric stack actuator can be better applied to practice. At present, the micro-motion platform commonly used in commerce only adopts a primary or secondary amplification mechanism, and the displacement amplification is small. At present, most of multi-element driving compliant platforms driven by piezoelectricity only have three degrees of freedom, and have great limitation when working in space. Therefore, the design of the micromanipulator with higher displacement and more degrees of freedom has great significance for practical application.
Disclosure of Invention
The invention provides a multi-source driven flexible parallel micromanipulator for overcoming the defects of the prior art, wherein the micromanipulator is driven by a piezoelectric accumulation driver to drive an amplifying mechanism, so that the multi-source driven flexible parallel micromanipulator has larger amplification times, and the working displacement of a micro-motion platform is improved; meanwhile, the spherical hinge is used for connecting the micro-motion platform, so that the pressure from different surfaces can be flexibly borne.
The technical scheme of the invention is as follows:
the multi-source driven flexible parallel micromanipulator comprises a working platform, an amplifying mechanism and a base;
the base is fixedly connected with an amplifying mechanism, and the working platform is supported on the amplifying mechanism;
the amplifying mechanism comprises a supporting disk and N amplifying mechanism units which are uniformly distributed along the circumferential direction of the supporting disk and have the same structure; wherein N is more than or equal to 4 and is an even number;
each amplifying mechanism unit comprises a supporting rod, a first piezoelectric stacking driver, a second piezoelectric stacking driver, a first guide amplifying rod, a second guide amplifying rod, a third guide amplifying rod and a supporting frame;
one side of the supporting frame is connected with the supporting disc, the other side of the supporting frame extends to form a vertical supporting rod, and a vertical supporting rod is fixedly connected to the supporting frame between the supporting disc and the supporting rod; the guide amplification rod I is connected with the support rod through a single-shaft circular cross section double-notch flexible hinge, the guide amplification rod I is connected with the guide amplification rod II through a single-shaft circular cross section double-notch flexible hinge, the guide amplification rod II is connected with the guide amplification rod III through a single-shaft circular cross section double-notch flexible hinge, the guide amplification rod III is connected with the support rod through a single-shaft circular cross section double-notch flexible hinge, a first piezoelectric stacking driver capable of driving the guide amplification rod to move is fixedly connected to the support plate, a second piezoelectric stacking driver capable of driving the guide amplification rod II to move is fixedly connected to the support frame between the support rod and the support rod, three end portions of the guide amplification rod are fixedly connected with a spherical hinge, the spherical hinge is connected with the working platform in a detachable mode, and the support.
Further, the single-shaft circular-section double-notch flexible hinge is a straight-circular-type double-notch flexible hinge.
Compared with the prior art, the invention has the beneficial effects that:
1. the parallel flexible micromotion platform has five degrees of freedom, can realize displacement output in the z-axis direction, and rotates around the x-axis and the y-axis or parallel lines thereof in a positive and negative way respectively;
2. the multi-drive flexible parallel micromanipulator combines a secondary amplification mechanism and a tertiary amplification mechanism, and increases the stroke and output displacement amplification times of the working platform; the stroke of the micro-motion platform can reach hundreds of micrometers and even centimeters under the condition of nano-scale resolution, and the output displacement magnification can reach dozens of times.
3. The mechanism is formed by adopting a flexible hinge and processing through wire cutting, and the whole flexible hinge amplifying mechanism is an integral body and has the advantages of small volume, no mechanical friction, high guiding precision, easy guarantee of processing precision and no need of assembly;
4. the working platform is a large-area disc, so that the working area is greatly increased.
5. Light weight, convenient operation, and is suitable for micro-operation robot system and micro-electromechanical system.
Drawings
FIG. 1 is a schematic view of a multi-source driven compliant parallel micromanipulator of the present invention viewed in one direction;
FIG. 2 is a schematic view of the multi-source driven compliant parallel micromanipulator of the present invention viewed from another direction;
FIG. 3 is a schematic diagram of a split structure of a multi-source driven compliant parallel micromanipulator of the present invention;
FIG. 4 is a schematic perspective view of a multi-source driven compliant parallel micromanipulator amplification mechanism of the present invention;
FIG. 5 is a schematic plan view of a multi-source driven compliant parallel micromanipulator amplification mechanism of the present invention;
FIG. 6 is a schematic view of a multi-source driven compliant parallel micromanipulator base of the present invention;
FIG. 7 is a schematic view of multiple degrees of freedom movement of a working platform according to an embodiment of the present invention;
fig. 8 is a schematic view of the driving of the amplifying mechanism in the embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the embodiments described below are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-5, the multi-source driven compliant parallel micromanipulator comprises a working platform 1, an amplification mechanism 2 and a base 3;
the base 3 is fixedly connected with an amplifying mechanism 2, and the working platform 1 is supported on the amplifying mechanism 2;
the amplifying mechanism 2 comprises a supporting plate 208 and N amplifying mechanism units which are uniformly distributed along the circumference of the supporting plate 208 and have the same structure; wherein N is more than or equal to 4 and is an even number;
each amplification mechanism unit comprises a support rod 204, a first piezoelectric stacking driver 205, a second piezoelectric stacking driver 206, a first guide amplification rod 201, a second guide amplification rod 202, a third guide amplification rod 203 and a support frame 207;
one side of the supporting frame 207 is connected with the supporting plate 208, the other side of the supporting frame 207 extends to form a vertical supporting rod 2070, and a vertical supporting rod 204 is fixedly connected to the supporting frame 207 between the supporting plate 208 and the supporting rod 2070; the first guide amplification rod 201 is connected with the support rod 204 through a single-shaft circular cross section double-notch flexible hinge 2011, the first guide amplification rod 201 is connected with the second guide amplification rod 202 through a single-shaft circular cross section double-notch flexible hinge 2011, the second guide amplification rod 202 is connected with the third guide amplification rod 203 through a single-shaft circular cross section double-notch flexible hinge 2011, the third guide amplification rod 203 is connected with the support rod 2070 through a single-shaft circular cross section double-notch flexible hinge 2011, a first piezoelectric stacking driver 205 capable of driving the first guide amplification rod 201 to move is fixedly connected to the support plate 208, a second piezoelectric stacking driver 206 capable of driving the second guide amplification rod 202 to move is fixedly connected to the support frame 207 between the support rod 204 and the support rod 2070, a spherical hinge A is fixedly connected to the end portion of the third guide amplification rod 203, the spherical hinge A is detachably connected with the working platform 1, and the support frame 207 is detachably connected with.
In the above embodiment, a plurality of amplification mechanism units form a multistage amplification mechanism, and the gap of the amplification mechanism 2 is obtained by wire cutting, wherein the region surrounded by the first guide amplification rod 201, the support frame 207, and the single-axis circular-section double-slit flexible hinge 2011 connecting the first guide amplification rod 201 and the support frame 207 is the first cut gap, i.e., the region where the first piezoelectric stacking actuator 205 is located; an area surrounded by the first guide amplification rod 201, the second guide amplification rod 202, the support frame 207, the third guide amplification rod 203 and the four single-axis circular-section double-notch flexible hinges 2011 connecting the first guide amplification rod 201, the second guide amplification rod 202 and the third guide amplification rod 203 and corresponding four single-axis circular-section double-notch flexible hinges 2011 is a second cutting slit, namely an area where the second piezoelectric stacking driver 206 is located; the square area enclosed by the center of the support plate 208 in the support frame 207 is a third cutting slit. Whereby a multistage amplifying mechanism 2 can be obtained by warp cutting.
Referring to fig. 5, in order to realize sensitivity and high resolution of the transmission, the single-axis circular-section double-slit flexible hinge 2011 is a straight-circular-section double-slit flexible hinge. Referring to fig. 4, the support plate 208 is a hollow disc for weight reduction and increased flexibility. Referring to fig. 1 to 3, in order to increase the working area, the working platform 1 is a circular platform whose cross section can cover the enlarging mechanism 2. The support rod 207 is connected with the base 3 by screws. The base 3 is provided with four cylindrical supporting legs and screw holes, and the base 3 is connected with the supporting frame 207 of the amplifying mechanism 2 through screws.
Principle of operation
When a single unit works, as shown in fig. 5 and fig. 7, for convenience of explanation, one amplification mechanism unit is taken as an example for explanation, and as for its amplification effect, the amplification mechanism unit can be regarded as a combination of a three-stage amplification mechanism and a two-stage amplification mechanism, wherein a support rod 204, a first piezoelectric stacking driver 205, a second piezoelectric stacking driver 206, a first guide amplification rod 201, a second guide amplification rod 202, a third guide amplification rod 203, a support frame 207, and four single-axis circular cross-section double-slit flexible hinges 2011 connecting the support rod, the first support rod 207, the support rod 204, and the second piezoelectric stacking driver 206 are used for support, the first piezoelectric stacking driver 205 is used for driving, the first piezoelectric stacking driver 205 is used for electric deformation and elongation, the first guide amplification rod 201 is driven to rotate around the first single-axis circular cross-section double-slit flexible hinge 2011, first-order amplification is realized, and a first uniaxial circular cross-section double-notch flexible hinge 2011, a second uniaxial circular cross-section double-notch flexible hinge 2011, a third uniaxial circular cross-section double-notch flexible hinge 2011 and a fourth uniaxial circular cross-section double-notch flexible hinge 2011 are shown from left to right (along the direction from the support plate 208 to the strut 2070) in fig. 5; then, the support rod 204 plays a supporting role, and the first guide amplification rod 201 drives the second guide amplification rod 202 to rotate around the third single-shaft circular-section double-notch flexible hinge 2011 so as to realize secondary amplification; and finally, the second piezoelectric stacking driver 206 plays a supporting role, and the second guide amplification rod 202 drives the third guide amplification rod 203 to rotate around the fourth single-axis circular-section double-notch flexible hinge 2011, so that three-level amplification is completed. In addition, a two-stage amplification mechanism is formed by the second piezoelectric actuator 206, the first guide amplification rod 201, the second guide amplification rod 202, the third guide amplification rod 203, the support rod 204, and the second, third, and fourth uniaxial circular-section double-slit flexible hinges 2011 connecting them. The first guide amplification rod 201 and the support rod 204 play a supporting role, are fixed, the second piezoelectric driver 206 is electrified to deform and extend, and then the second guide amplification rod 202 rotates around a second single-shaft circular-section double-notch flexible hinge 2011 which connects the first guide amplification rod 201 and the second guide amplification rod 202, so that primary amplification is realized; then the supporting rod 204 plays a supporting role, and the second guide amplifying rod 202 drives the third guide amplifying rod 203 to rotate around the fourth single-shaft circular-section double-notch flexible hinge 2011 so as to realize secondary amplification; when the amplification mechanism unit moves, the first piezoelectric driver 205 and the second piezoelectric driver 206 work cooperatively, the first piezoelectric stacking driver 205 is electrified to deform and extend, the first guide amplification rod 201 is driven to rotate around the first single-shaft circular-section double-notch flexible hinge 2011, meanwhile, the second piezoelectric driver 206 is electrified to deform and extend, then the second guide amplification rod 202 rotates around the second single-shaft circular-section double-notch flexible hinge 2011 which is connected with the first guide amplification rod 201 and the second guide amplification rod 202, so that the second guide amplification rod 202 simultaneously bears upward thrust of the second piezoelectric driver 206 and downward pressure at the right end of the first guide amplification rod 201, namely, the three-stage amplification mechanism and the two-stage amplification mechanism work cooperatively, the amplification factor is greatly improved, a working platform 1 obtains a larger stroke, and the working displacement is improved.
The working platform moves as follows
Referring to fig. 5, 7, and 8, for convenience of explanation, 4 amplification mechanism units are taken as an example, four amplification mechanism units are respectively a first amplification mechanism unit 20, a second amplification mechanism unit 21, a third amplification mechanism unit 22, and a third amplification mechanism unit 23 having the same structure, and four spherical hinges a are respectively a spherical hinge a1, a spherical hinge a2, a spherical hinge A3, and a spherical hinge a 4.
During translational motion, taking motion along the z axis as an example (a vertical axis perpendicular to the center of the working platform 1), the first piezoelectric driver 205 and the second piezoelectric driver 206 of the first amplification mechanism unit 20, the second amplification mechanism unit 21, the third amplification mechanism unit 22 and the third amplification mechanism unit 23 are electrified, deformed and elongated, and output displacement is transmitted to the working platform 1 through the spherical hinge a1, the spherical hinge a2, the spherical hinge A3 and the spherical hinge a4 by virtue of the amplification mechanisms, namely the four amplification mechanism units move simultaneously, so that translational output of the working platform 1 along the z axis is ensured.
In fig. 7, a coordinate system is established, defining: the vertex 04 of the working platform 1 corresponding to the spherical hinge A4 is taken as an origin, the connecting line of the spherical hinges A3 and A4 (namely the connecting line of the vertexes 03 and 04) is taken as an x axis, and the connecting line of the spherical hinges A1 and A4 (namely the connecting line of the vertexes 01 and 04) is taken as a y axis. In the case of rotation around the x-axis, for example, when the first amplification mechanism unit 20 and the second amplification mechanism unit 21 or the third amplification mechanism unit 22 and the fourth amplification mechanism unit 23 operate simultaneously, the output displacement can be transmitted to the working platform 1 through the ball hinges A3, a4 or the ball hinges a1, a2, so that the working platform 1 can rotate positively and negatively around the connecting line of the vertices 01, 02 corresponding to the ball hinges a1, a2 or the connecting line of the vertices 03, 04 corresponding to the ball hinges A3, a4, that is, around the x-axis or the parallel line to the z-axis.
Similarly, when rotating around the y axis, the second amplification mechanism unit 21 and the third amplification mechanism unit 22 or the first amplification mechanism unit 20 and the fourth amplification mechanism unit 23 operate simultaneously, and the output displacement can be transmitted to the working platform 1 through the spherical hinges a1, a4 or the spherical hinges a2, A3, so that the working platform 1 can rotate forward and backward around the connecting line of the vertices 02, 03 corresponding to the spherical hinges a2, A3 or the connecting line of the vertices 01, 04 corresponding to the spherical hinges a1, a4, that is, around the y axis or the parallel line with the y axis.
When the working platform 1 rotates around the parallel line of the angular bisector of the x axis and the y axis, the first amplification mechanism unit 20 works, the output displacement is transmitted to the working platform 1 through the spherical hinge A3, and the working platform 1 can rotate around the parallel line of the axes of the second amplification mechanism unit 21 and the fourth amplification mechanism unit 23 which pass through the spherical hinge A1 in a positive and negative way.
When the working platform 1 rotates around the perpendicular line of the angular bisector of the x-axis and the y-axis, the second amplification mechanism unit 21 works, and the output displacement is transmitted to the working platform 1 through the ball-type hinge A4, so that the working platform 1 can rotate forwards and backwards around the parallel line of the axes of the first amplification mechanism unit 20 and the third amplification mechanism unit 22 through the ball-type hinge A2.
The present invention is not limited to the above embodiments, and any person skilled in the art can make many modifications and equivalent variations by using the above-described structures and technical contents without departing from the scope of the present invention.
Claims (6)
1. The flexible parallel micromanipulator driven by multiple sources is characterized in that: comprises a working platform (1), an amplifying mechanism (2) and a base (3);
the base (3) is fixedly connected with an amplifying mechanism (2), and the working platform (1) is supported on the amplifying mechanism (2);
the amplifying mechanism (2) comprises a supporting disc (208) and N amplifying mechanism units which are uniformly distributed along the circumferential direction of the supporting disc (208) and have the same structure; wherein N is more than or equal to 4 and is an even number;
each amplification mechanism unit comprises a support rod (204), a first piezoelectric stacking driver (205), a second piezoelectric stacking driver (206), a first guide amplification rod (201), a second guide amplification rod (202), a third guide amplification rod (203) and a support frame (207);
one side of the support frame (207) is connected with the support plate (208), the other side of the support frame (207) extends to form a vertical supporting rod (2070), and a vertical supporting rod (204) is fixedly connected to the support frame (207) between the support plate (208) and the supporting rod (2070); a first guide amplification rod (201) is connected with a support rod (204) through a single-shaft circular cross section double-notch flexible hinge (2011), a first guide amplification rod (201) is connected with a second guide amplification rod (202) through a single-shaft circular cross section double-notch flexible hinge (2011), a second guide amplification rod (202) is connected with a third guide amplification rod (203) through a single-shaft circular cross section double-notch flexible hinge (2011), a third guide amplification rod (203) is connected with a support rod (2070) through a single-shaft circular cross section double-notch flexible hinge (2011), a first piezoelectric stacking driver (205) capable of driving the first guide amplification rod (201) to move is fixedly connected to a support plate (208), a second piezoelectric stacking driver (206) capable of driving the second guide amplification rod (202) to move is fixedly connected to a support frame (207) between the support rod (204) and the support rod (2070), and a spherical hinge (A) is fixedly connected to the end part of the third guide amplification rod (203), the spherical hinge (A) is detachably connected with the working platform (1), and the support frame (207) is detachably connected with the base (3).
2. The multi-source driven compliant parallel micromanipulator of claim 1, wherein: the single-shaft round section double-notch flexible hinge (2011) is a straight round type double-notch flexible hinge.
3. The multi-source driven compliant parallel micromanipulator of claim 1 or 2, wherein: the support disc (208) is a hollow disc.
4. The multi-source driven compliant parallel micromanipulator of claim 3, wherein: the working platform (1) is a circular platform with a section capable of covering the amplifying mechanism (2).
5. The multi-source driven compliant parallel micromanipulator of claim 1, 2 or 4, wherein: the supporting rod (207) is connected with the base (3) through a screw.
6. The multi-source driven compliant parallel micromanipulator of claim 5, wherein: n is 4.
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| CN110977821B (en) * | 2019-12-13 | 2021-07-06 | 宁波大学 | Multi-degree-of-freedom compliant micro gripper integrating multi-variable detection |
| CN114087275A (en) * | 2021-11-19 | 2022-02-25 | 汕头大学 | Novel double-shaft flexible hinge with oval cross section |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE19940124C2 (en) * | 1998-08-31 | 2003-04-10 | Olympus Optical Co | Platform with a displacement enhancement mechanism |
| CN201413642Y (en) * | 2009-06-08 | 2010-02-24 | 上海理工大学 | TDOF (three degrees of freedom) integrated flexible precision positioning table |
| CN103878766A (en) * | 2014-04-04 | 2014-06-25 | 苏州大学 | Three-PRS type micro-motion parallel robot |
| CN105003799A (en) * | 2015-06-26 | 2015-10-28 | 中国矿业大学 | Multi-configuration precision positioning platform |
| CN105904443B (en) * | 2016-06-17 | 2018-07-20 | 华南理工大学 | A kind of two-freedom compliant parallel mechanism of mobile decoupling |
| CN106251909B (en) * | 2016-08-19 | 2019-08-02 | 天津大学 | A kind of high-precision, big stroke freedom degree parallel connection mini positioning platform |
| CN107481767B (en) * | 2017-09-11 | 2023-01-24 | 河南理工大学 | Driving assembly and flexible precision positioning platform |
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Application publication date: 20190611 Assignee: Zhejiang Shangguo New Energy Co.,Ltd. Assignor: Ningbo University Contract record no.: X2022980026254 Denomination of invention: Compliant parallel micromanipulator driven by multiple sources Granted publication date: 20210525 License type: Common License Record date: 20221212 |
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Application publication date: 20190611 Assignee: Ningbo Science and Technology Innovation Association Assignor: Ningbo University Contract record no.: X2023980033633 Denomination of invention: Compliant parallel micromanipulator driven by multiple sources Granted publication date: 20210525 License type: Common License Record date: 20230317 |