CN107627292B - Multi-degree-of-freedom large-stroke high-precision motion platform - Google Patents
Multi-degree-of-freedom large-stroke high-precision motion platform Download PDFInfo
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- CN107627292B CN107627292B CN201710881691.4A CN201710881691A CN107627292B CN 107627292 B CN107627292 B CN 107627292B CN 201710881691 A CN201710881691 A CN 201710881691A CN 107627292 B CN107627292 B CN 107627292B
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Abstract
The invention discloses a multi-degree-of-freedom large-stroke high-precision motion platform, which comprises: three single-degree-of-freedom motion platforms, two rotating parts and a sliding part; one rotating part and the sliding part form a rotating sliding kinematic pair, and the other rotating part forms a rotating pair; the rotary sliding kinematic pair and the rotary pair are respectively arranged on the two single-degree-of-freedom motion platforms; the third single-degree-of-freedom motion platform is respectively fixed on the rotary sliding motion pair and the rotary pair. Therefore, a user can flexibly construct the multi-freedom-degree large-stroke high-precision motion platform with the required freedom degree according to specific requirements.
Description
Technical Field
The invention relates to the technical field of precision motion platforms, in particular to a multi-degree-of-freedom large-stroke high-precision motion platform.
Background
Along with the progress of science and technology, people have higher and higher requirements on products, and the requirements on the processing precision of the products by manufacturers are promoted to be higher and higher, the stroke of a high-precision feeding motion platform in the existing equipment is generally shorter, the precision of large-stroke common macro motion equipment cannot meet the actual requirements, and if special large-stroke high-precision motion equipment is adopted, the manufacturing cost of the products is greatly increased. Aiming at the current situation, the multi-directional motion platform which can combine macro motion with large stroke general precision and micro motion with high precision and small stroke and can realize large stroke high precision feeding is more and more favored by industries.
Disclosure of Invention
In the prior art, according to the inherent motion mode of the platform, the constructed platform is generally only one-dimensional or two-dimensional, has less degree of freedom, and cannot meet the actual needs of users. Based on the defects of the prior art, the invention provides a multi-degree-of-freedom large-stroke high-precision motion platform.
The utility model provides a multi freedom large stroke high accuracy motion platform which characterized in that includes: three single degree of freedom motion stages, a first rotating member (C401), a second rotating member (C401) and a sliding member (C402);
each of the single degree-of-freedom motion platforms includes: a base (C101, C201, C301) and a guide mechanism; the guide mechanism includes: a rigid support platform (C102, C202, C302) and a core motion platform (C103, C203, C303);
the first rotating part (C401) and the sliding part (C402) form a rotating sliding kinematic pair; the rotary sliding kinematic pair is rigidly connected with a core motion platform (C103) in the first single-degree-of-freedom motion platform and rigidly connected with a base (C301) in the third single-degree-of-freedom motion platform;
the second rotating part (C401) is rigidly connected with the core motion platform (C203) in the second single-degree-of-freedom motion platform and rigidly connected with the base (C301) in the third single-degree-of-freedom motion platform.
Preferably, the multi-freedom-degree large-stroke high-precision motion platform further comprises: a first connection (C403) and a second connection (C404);
the rotary sliding kinematic pair is rigidly connected with a base (C301) in the third single-degree-of-freedom motion platform through a first connecting piece (C403);
the second rotating part (C401) is rigidly connected with a base (C301) in the third single-degree-of-freedom motion platform through a second connecting piece (C404).
Preferably, the first rotating member (C401) and the second rotating member (C401) are cross roller collars.
Preferably, the sliding member (C402) is a short linear guide platform.
Preferably, each of the single degree of freedom motion platforms further comprises: a linear guide (A3) and a linear actuator (A4); the rigid support platform (A201) is connected with the base (A1) through a sliding pair formed by the linear guide rail (A3), the core motion platform (A203) is connected with a rotor of the linear driver (A4), and a stator part of the linear driver (A4) is rigidly connected with the base (A1).
Preferably, the guide mechanism further comprises: a main flexible hinge group (a 202); the main flexible hinge group (A202) is arranged between the rigid supporting platform (A201) and the core moving platform (A203); the linear driver (A4) drives the core motion platform (A203) to generate displacement under the rigidity constraint of the main flexible hinge group (A202).
Preferably, both the first single degree of freedom motion platform and the second single degree of freedom motion platform are provided on the base (C5).
Compared with the prior art, the invention has the beneficial effects that:
1. the multi-freedom-degree large-stroke high-precision motion platform with the required freedom degree can be flexibly constructed according to specific requirements;
2. all the single-degree-of-freedom large-stroke high-precision motion platform components are manufactured in a general machining mode, special components such as air floatation and magnetic suspension are not adopted, and the cost is low.
Drawings
FIG. 1 is a schematic diagram of a single degree of freedom motion platform.
FIG. 2 is an explosion diagram of a single degree of freedom motion platform
Fig. 3 is an overall schematic diagram of a three degree of freedom motion platform.
Fig. 4 is an exploded view of a three degree of freedom motion platform.
Fig. 5 is a schematic view of a flexible hinge guide mechanism including a rigidity reinforcing structure of embodiment 1 of the guide mechanism.
Fig. 6 is an axial side sectional view and a partial enlarged view of the guide mechanism of embodiment 1 of the guide mechanism.
Fig. 7 is a front sectional view and a partial enlarged view of embodiment 1 of the guide mechanism.
Fig. 8 is an axial cross-sectional view of an assembly of a guide mechanism of embodiment 1 of the guide mechanism.
Fig. 9 is an axial front sectional view and a partial enlarged view of an assembly of the guide mechanism of embodiment 1 of the guide mechanism.
Fig. 10 is a schematic overall view of embodiment 2 of the guide mechanism.
Fig. 11 is an axial cross-sectional view and a partial enlarged view of an assembly of a guide mechanism of embodiment 2 of the guide mechanism.
Fig. 12 is a front sectional view and a partial enlarged view of a guide mechanism assembly of embodiment 2 of the guide mechanism.
Detailed Description
The drawings are for illustrative purposes only and are not to be construed as limiting the present patent; for the purpose of better illustrating the embodiments, certain elements of the drawings may be omitted, enlarged or reduced and do not represent the actual product dimensions; it will be appreciated by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted. The positional relationship depicted in the drawings is for illustrative purposes only and is not to be construed as limiting the present patent.
The single degree of freedom motion platform is as shown in fig. 1 and 2, and comprises: the device comprises a guide mechanism, a linear guide rail (A3), a base (A1) and a core motion platform (A203). Wherein, guiding mechanism includes: a rigid support platform (A201), a main flexible hinge group (A202) and a linear actuator (A4). The rigid support platform (A201) is connected with the base (A1) through a sliding pair formed by the linear guide rail (A3), a core motion platform (A203) in the large-bearing flexible hinge guide mechanism is connected with a rotor of the linear driver (A4), and the core motion platform (A203) can be driven to generate displacement under the rigidity constraint of the main flexible hinge group (A202). The stator part of the linear drive (A4) is rigidly connected to the base (A1).
A three-degree-of-freedom motion platform of a multi-degree-of-freedom large-stroke high-precision motion platform is shown in fig. 3 and 4. The three-degree-of-freedom motion platform shown in fig. 3 and 4 adopts three sets of single-degree-of-freedom motion platform designs, namely single-degree-of-freedom motion platforms alpha, beta and theta. The single-degree-of-freedom motion platform alpha mainly comprises a base (C101) and a guide mechanism. Wherein, guiding mechanism includes: rigid support platform (C102), core motion platform (C103), etc. The single-degree-of-freedom motion platform beta mainly comprises a base (C201), a rigid support platform (C202), a core motion platform (C203) and other components, and the single-degree-of-freedom motion platform theta mainly comprises a base (C301), a rigid support platform (C302), a core motion platform (C303) and other components. In the embodiment, a rotary sliding kinematic pair is formed by a cross roller collar (C401) and a short linear guide platform (C402), and a rotary pair is formed by another cross roller collar (C401). The rotary sliding kinematic pair is rigidly connected with a core motion platform (C103) in the single-degree-of-freedom motion platform alpha and rigidly connected with a base (C301) in the single-degree-of-freedom motion platform theta through a connecting piece (C403). The revolute pair is rigidly connected with a core motion platform (C203) in the single-degree-of-freedom motion platform beta and rigidly connected with a base (C301) in the single-degree-of-freedom motion platform theta through a connecting piece (C404). The single-degree-of-freedom motion platforms alpha and beta are arranged on the base C5.
The core motion platforms (C103) and (C203) in the single-degree-of-freedom motion platforms alpha and beta can realize the motion in two degrees-of-freedom directions such as unidirectional linear motion, deflection motion and the like of the base in the single-degree-of-freedom motion platform theta in a differential motion mode. The core motion platform (C303) in the single-degree-of-freedom motion platform theta can realize motion in the third degree-of-freedom direction along the linear guide rail system fixed on the base (301). Through the mode, the three-degree-of-freedom motion platform can realize three degrees of freedom motion of x-y-theta.
The guide mechanism of the present invention includes two embodiments. Example 1 is shown in fig. 5. The main difference between the guide mechanism of embodiment 1 and the existing flexible hinge guide mechanism is the addition of a secondary flexible hinge (401) for carrying a large load and resisting deformation in the non-working direction. The guide mechanism of embodiment 1 works in the following principle: as shown in fig. 6 and 7, the core motion platform (3) is connected with the rigid support platform (1) through the main flexible hinge group (2) and the secondary flexible hinge group (401) respectively. The flexible hinges in the main flexible hinge group (2) and the secondary flexible hinge group (401) are integrally manufactured with the rigid support platform (1), and the secondary flexible hinge group (401) is connected with the core motion platform (3) through a rigid connection part (402). The main working directions of the flexible hinges in the main flexible hinge group (2) and the secondary flexible hinge group (401) are the displacement directions of the core motion platform (3). The layout directions of the flexible hinges of the main flexible hinge group (2) and the secondary flexible hinge group (401) are mutually perpendicular in a direction plane of the movement direction of the core movement platform (3), and are symmetrically arranged on the core movement platform (3), as shown in fig. 7. The flexible hinges in the main flexible hinge group (2) and the secondary flexible hinge group (401) which are arranged perpendicular to each other in the three-dimensional space can mutually strengthen each other's capacity of bearing large load and resisting deformation in the non-working direction.
The application of the flexible hinge guide structure of embodiment 1 to a motion platform is shown in fig. 8 and 9. The core motion platform (3) is driven by the linear driver (5), and the working displacement of the core motion platform (3) is obtained by measuring a grating displacement sensor (6). Deflection displacement caused by the moment acting on the core motion platform (3) by the driver (5) is counteracted by a secondary flexible hinge group symmetrically arranged with the core motion platform (3). When the core moving platform (3) bears a large load, sinking displacement of the moving platform (3) caused by lower rigidity of the main flexible hinge group (2) in the vertical load direction is counteracted by flexible hinges symmetrically arranged in the secondary flexible hinge group (401) relative to the horizontal center plane of the core moving platform (3). Through the working principle, the core motion platform (3) can greatly improve the capacity of bearing a large load to resist deformation in the non-working direction by utilizing the rigidity enhancement mode of the secondary flexible hinge group.
In particular, the weak portion of the rigid support platform (3) in embodiment 1 due to the processing of the secondary flexible hinge group (401) can increase the rigidity of the rigid support platform (3) by embedding a rigid block (403) and rigidly connecting with the bolt group a (404).
Embodiment 2 of the guide mechanism is shown in fig. 10 to 12. The main difference between the guide mechanism of embodiment 2 and the guide mechanism of embodiment 1 is that: the secondary flexible hinge assembly (401) of embodiment 1 is manufactured by machining integrally with the rigid support platform, and the secondary flexible hinge assembly of embodiment 2 is manufactured by assembling parts.
As shown in fig. 11 and 12, the secondary flexible hinge group includes a leaf spring (401 a), a bolt group B (405), a bolt group C (406), a connection block a (407), a connection block B (408), and the like. The spring piece (401 a) is rigidly connected with the rigid support platform (1) through the bolt group B (405), and the core motion platform (3) is rigidly connected with the middle part of the spring piece (401 a) through the connecting block B (408), the connecting block A (407), the bolt group C (406) and other parts. By the above-described rigid connection assembly, the spring piece (401 a) can achieve the same function as the sub-flexible hinge group (401) described in embodiment 1. The sub-flexible hinge assembly formed by the spring plate (401 a) assembly can be used for increasing the capacity of the core motion platform (3) to bear large load and resist deformation in the non-working direction.
It is to be understood that the above examples of the present invention are provided by way of illustration only and not by way of limitation of the embodiments of the present invention. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the invention are desired to be protected by the following claims.
Claims (7)
1. The utility model provides a multi freedom large stroke high accuracy motion platform which characterized in that includes: three single-degree-of-freedom motion platforms, a first rotating part, a second rotating part and a sliding part;
each of the single degree-of-freedom motion platforms includes: a base and a guide mechanism;
the guide mechanism includes: the device comprises a rigid support platform, a core motion platform, a main flexible hinge group and a secondary flexible hinge group;
the core motion platform is connected with the rigid support platform through a main flexible hinge group and a secondary flexible hinge group respectively;
the secondary flexible hinge group includes: a flexible hinge and a rigid connection;
the flexible hinges of the main flexible hinge group and the secondary flexible hinge group are integrally manufactured with the rigid support platform;
the flexible hinges of the secondary flexible hinge group are connected with the core motion platform through the rigid connection part;
the main working directions of the flexible hinges of the main flexible hinge group and the secondary flexible hinge group are the displacement directions of the core motion platform;
the layout directions of the flexible hinges of the main flexible hinge group and the secondary flexible hinge group are mutually perpendicular in the plane of the movement direction of the core movement platform and are symmetrically arranged on the core movement platform;
the guide mechanism further includes: a rigid block;
the rigid block is embedded into the rigid support platform and connected with the rigid support platform, and is used for increasing the rigidity of a weak part of the rigid support platform, wherein the weak part is generated by processing the secondary flexible hinge group;
the first rotating part and the sliding part form a rotating sliding kinematic pair;
the rotary sliding motion pair is rigidly connected with a core motion platform in the first single-degree-of-freedom motion platform and rigidly connected with a base in the third single-degree-of-freedom motion platform;
the second rotating part is rigidly connected with the core motion platform in the second single-degree-of-freedom motion platform and rigidly connected with the base in the third single-degree-of-freedom motion platform.
2. The multi-degree of freedom large-stroke high-precision motion platform according to claim 1, wherein: the multi-freedom-degree large-stroke high-precision motion platform further comprises: a first connector and a second connector;
the rotary sliding kinematic pair is rigidly connected with a base in the third single-degree-of-freedom motion platform through a first connecting piece;
the second rotating part is rigidly connected with the base in the third single-degree-of-freedom motion platform through a second connecting piece.
3. The multi-degree of freedom large-stroke high-precision motion platform according to claim 1 or 2, wherein: the first and second rotating members are cross roller collars.
4. A multiple degree of freedom large stroke high precision motion platform according to claim 3, wherein: the sliding part is a short linear guide rail platform.
5. The multi-degree of freedom large-stroke high-precision motion platform according to claim 1, wherein: each of the single degree of freedom motion platforms further comprises: a linear guide rail and a linear driver; the rigid support platform is connected with the base through a sliding pair formed by the linear guide rail, the core motion platform is connected with a rotor of a linear driver, and a stator part of the linear driver is rigidly connected with the base; the linear driver drives the core motion platform to generate displacement under the rigidity constraint of the main flexible hinge group.
6. The multi-degree of freedom large-stroke high-precision motion platform according to claim 1 or 2 or 4 or 5, wherein the motion platform is characterized in that: the first single-degree-of-freedom motion platform and the second single-degree-of-freedom motion platform are both arranged on the base.
7. A multiple degree of freedom large stroke high precision motion platform according to claim 3, wherein: the first single-degree-of-freedom motion platform and the second single-degree-of-freedom motion platform are both arranged on the base.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710881691.4A CN107627292B (en) | 2017-09-26 | 2017-09-26 | Multi-degree-of-freedom large-stroke high-precision motion platform |
| US15/853,847 US10564553B2 (en) | 2017-09-26 | 2017-12-24 | Large load-bearing guide mechanism and multi-DOF large-stroke high-precision motion platform system |
| JP2018000624A JP6860869B2 (en) | 2017-09-26 | 2018-01-05 | High load-bearing guidance mechanism and multi-degree-of-freedom, large stroke, high-precision moving stage system |
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| CN201710881691.4A CN107627292B (en) | 2017-09-26 | 2017-09-26 | Multi-degree-of-freedom large-stroke high-precision motion platform |
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| CN107627292B true CN107627292B (en) | 2023-10-03 |
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| CN110253308A (en) * | 2019-07-23 | 2019-09-20 | 广东工业大学 | A kind of double lathes and method for driving movement warp in compensation gantry |
| CN111804948B (en) * | 2020-07-01 | 2021-11-16 | 山西一禾铝业科技新材料有限公司 | Aluminum alloy processing machine |
| CN112008755B (en) * | 2020-08-27 | 2021-07-16 | 中国科学院宁波材料技术与工程研究所 | Flexible joint and double-drive gantry rectangular coordinate platform |
| CN112259488B (en) * | 2020-12-22 | 2021-03-09 | 上海隐冠半导体技术有限公司 | Micro-motion platform and motion device |
| CN114074318A (en) * | 2022-01-17 | 2022-02-22 | 常州铭赛机器人科技股份有限公司 | Gantry double-drive structure |
| CN114888868B (en) * | 2022-05-27 | 2024-04-12 | 长沙迪奥装饰工程有限公司 | Building decorative panel processing bed |
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