CN114074318A - Gantry double-drive structure - Google Patents
Gantry double-drive structure Download PDFInfo
- Publication number
- CN114074318A CN114074318A CN202210046621.8A CN202210046621A CN114074318A CN 114074318 A CN114074318 A CN 114074318A CN 202210046621 A CN202210046621 A CN 202210046621A CN 114074318 A CN114074318 A CN 114074318A
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- China
- Prior art keywords
- driving end
- crossed roller
- gantry
- driven end
- drive structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/023—Cartesian coordinate type
- B25J9/026—Gantry-type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J5/00—Manipulators mounted on wheels or on carriages
- B25J5/02—Manipulators mounted on wheels or on carriages travelling along a guideway
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
- B25J9/123—Linear actuators
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
- H02K11/22—Optical devices
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Machine Tool Units (AREA)
- Bearings For Parts Moving Linearly (AREA)
Abstract
The invention discloses a gantry double-drive structure which comprises a gantry type working platform, a driving end assembly and a driven end assembly, wherein linear guide rails are respectively installed on two longitudinal beams of the gantry type working platform, the driving end assembly slides along one linear guide rail, the driven end assembly slides along the other linear guide rail, and a linear motor and an absolute value grating encoder which are used for controlling the driving end assembly and the driven end assembly to synchronously slide on the corresponding linear guide rails at a constant speed are installed on two sides of the gantry type working platform. The gantry double-drive structure adopts a bilateral linear motor drive and a bilateral absolute value grating encoder to realize synchronization and homogenization of bilateral power output.
Description
Technical Field
The invention relates to the technical field of gantry driving structures, in particular to a gantry double-drive structure.
Background
As shown in figure 1, the existing gantry single-drive structure is mostly a structure with single-side drive and opposite-side follow-up, and the motion precision of the whole structure can be influenced by various aspects such as machining errors, assembly errors and the strength of the structure. Because the machining error and the assembly error of the existing gantry single-drive structure are difficult to avoid and cannot be completely erased, and the limit value which can be reached by the strength of the structure is limited, the parallelism and the straightness of the guide rails on the two sides of the driving end b and the driven end c on the frame a have deviation, when the problems are reflected in motion control, partial double-side asynchronization can occur, and further the precision is misaligned and fluctuated.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art.
Therefore, the invention provides a gantry double-drive structure which adopts a double-side linear motor drive and a double-side absolute value grating encoder to realize synchronization and homogenization of power output at two sides.
The gantry type working platform comprises two longitudinal beams, linear guide rails are respectively mounted on the two longitudinal beams, the driving end assembly slides along one of the linear guide rails, the driven end assembly slides along the other linear guide rail, and linear motors and absolute value grating encoders for controlling the driving end assembly and the driven end assembly to synchronously slide on the corresponding linear guide rails at a constant speed are mounted on two sides of the gantry type working platform.
The invention has the beneficial effects that the synchronization and the homogenization of the power output at two sides are realized by adopting the drive of the linear motors at two sides and the grating encoders at two sides.
According to one embodiment of the invention, the driving end component is a driving end flexible component, the driven end component is a driven end flexible component matched with the driving end flexible component, and the driving end flexible component and the driven end flexible component are respectively provided with crossed roller rings which are used for keeping parallelism of linear guide rails on two sides and can rotate.
According to one embodiment of the invention, the driving end flexible assembly is provided with a crossed roller guide which keeps the straightness of the linear guide on two sides and can realize transverse extension and contraction.
According to one embodiment of the invention, the driving end flexible assembly further comprises a driving end support, a sliding seat, a rotating shaft, a sealing cover and a flange, wherein the driving end support is arranged on a corresponding linear guide rail through a sliding block sliding frame, the crossed roller guide rail is arranged in a guide rail installation groove of the driving end support, the sliding seat is arranged on the crossed roller guide rail and slides transversely along the crossed roller guide rail, the rotating shaft and the crossed roller circular ring are embedded into a countersunk hole of the sliding seat, the sealing cover is arranged at an opening of the countersunk hole of the sliding seat, the flange is arranged above the sealing cover, the sealing cover is fixedly connected with the sliding seat through a fastener, the flange is connected with a cross beam of the gantry type working platform, the flange is fixedly connected with the rotating shaft through a fastener, and the rotating shaft rotates along with the crossed roller circular ring.
According to one embodiment of the invention, the driving end flexible assembly further comprises a limiting block for limiting the stroke of the sliding seat, and the limiting block is arranged in a limiting block mounting groove on the inner side of the driving end support in the transverse direction.
According to one embodiment of the invention, the step in the cover and slide shoe counterbore limits the displacement of the crossed roller ring in the axial direction.
According to one embodiment of the invention, the linear motor corresponding to the active end assembly is fixedly connected with the active end support in the active end assembly through a fastener.
According to one embodiment of the invention, the driven end flexible assembly further comprises a driven end support, a fixed seat, a rotating shaft, a sealing cover and a flange, the driven end support is arranged on the corresponding linear guide rail through a sliding block sliding frame, the fixed seat is fixed on the driven end support, the rotating shaft and the crossed roller ring are embedded into a countersunk hole of the fixed seat, the sealing cover is arranged at the opening of the countersunk hole of the fixed seat, the flange is arranged above the sealing cover, the sealing cover is fixedly connected with the fixed seat through a fastener, the flange is connected with a cross beam of the gantry type working platform and is fixedly connected with the rotating shaft through the fastener, and the rotating shaft rotates along with the crossed roller ring.
According to one embodiment of the invention, the step in the counter-sunk holes of the cover and the holder limits the displacement of the crossed roller ring in the axial direction.
According to one embodiment of the invention, a linear motor corresponding to the driven end assembly is fixedly connected to a driven end support in the driven end assembly by a fastener.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments or technical solutions in the prior art of the present invention, the drawings used in the description of the embodiments or prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic view of a conventional gantry single drive structure.
The reference numbers in fig. 1 are: a. a frame; b. a driving end; c. and a driven end.
FIG. 2 is a first schematic diagram of a gantry dual drive structure of the present invention;
FIG. 3 is a schematic diagram II of the gantry dual drive structure of the present invention;
FIG. 4 is a top view of the gantry dual drive configuration of the present invention;
FIG. 5 is an assembled schematic view of the active end flexible assembly;
FIG. 6 is an exploded schematic view of the active end flexible assembly;
FIG. 7 is a top view of the active end flexible assembly;
FIG. 8 is a cross-sectional view taken at A-A of FIG. 7;
FIG. 9 is an assembled schematic view of the driven end flexible assembly;
FIG. 10 is an exploded schematic view of the driven end flexible assembly;
FIG. 11 is a top view of the driven end flexible assembly;
FIG. 12 is a cross-sectional view taken at B-B of FIG. 11;
FIG. 13 is a schematic view of a portion of the structure of FIG. 3;
fig. 14 is a partial enlarged view at C in fig. 13.
The reference numerals in FIGS. 2 to 14 are: 1. a gantry-type work platform; 2. an active end assembly; 3. a driven end assembly; 4. a linear guide rail; 5. a linear motor; 6. an absolute value grating encoder; 61. a reading head; 62. a grating scale; 7. a crossed roller ring; 8. a cross roller guide; 9. an active end support; 10. a sliding seat; 11. a rotating shaft; 12. sealing the cover; 13. a flange; 14. a limiting block; 15. a driven end support; 16. a fixed seat.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The invention provides a gantry double-drive structure, which aims to eliminate the influence of factors such as machining errors and assembling errors on the running precision of a mechanism as far as possible and reduce the difficulty of assembling and debugging. The gantry double-drive structure has a wide application range, can be used in the field of glue dispensing and semiconductor mounting, and can also be used in other fields.
Referring to fig. 2 to 14, the gantry double-drive structure of the invention comprises a gantry type working platform 1, a driving end component 2 and a driven end component 3, wherein the gantry type working platform 1 comprises two longitudinal beams and a cross beam, linear guide rails 4 are respectively installed on the two longitudinal beams of the gantry type working platform 1, the linear guide rails 4 are distributed in parallel with the longitudinal beams of the gantry type working platform 1, the driving end component 2 slides along one of the linear guide rails 4, the driven end component 3 slides along the other linear guide rail 4, and a linear motor 5 and an absolute value grating encoder 6 for controlling the driving end component 2 and the driven end component 3 to synchronously and uniformly slide on the corresponding linear guide rails 4 are installed on both sides of the gantry type working platform 1.
It should be noted that: the linear guide 4, the linear motor 5 and the absolute value grating encoder 6 are all common components on the market, and they are standard components and can be purchased directly on the market. Compared with a common grating encoder, the absolute value grating encoder 6 does not need a matched far point and limit position switch. Gantry type work platform 1 can adopt the customization platform of marble material, guarantees the steady of platform.
According to the invention, the linear motors 5 used as power output are arranged on both sides of the gantry type working platform 1 and are matched with the absolute value grating encoders 6, so that the power output on both sides of the gantry type working platform 1 is more synchronous and stable, the problem of precision deviation caused by shaking of the driven end of the existing single-side driving structure due to the influence of inertia and resistance is solved, specifically, the gantry uses the double-side driving matched absolute value grating encoders 6, high-speed and high-precision motion control can be achieved, the double-side driving is more balanced compared with the single-side driving, the possibility that only one side has power and the other side shakes due to inertia and resistance is avoided, and meanwhile, the high-precision absolute value grating encoders 6 are matched, so that the consistency of the double-side power can be realized, and the dragging phenomenon caused by the uncoordinated double-side power is avoided.
The driving end component 2 is a driving end flexible component, the driven end component 3 is a driven end flexible component matched with the driving end flexible component, and the driving end flexible component and the driven end flexible component are both provided with crossed roller circular rings 7 which are used for keeping the parallelism of the linear guide rails 4 on two sides and can rotate. The driving end flexible assembly is provided with a crossed roller guide rail 8 which keeps the straightness of the linear guide rails 4 on two sides and can realize transverse extension. Specifically, the driving end assembly 2 and the driven end assembly 3 are matched for use to realize a flexible function, and when the two sides of the gantry type working platform are driven to form included angles due to the fact that guide rails are not parallel, the crossed roller circular rings 7 can rotate to keep the linear guide rails 4 on the two sides of the gantry type working platform 1 parallel; when the two-side drive meets the condition that the center distance is changed due to the fact that the straightness of the guide rails is poor, the crossed roller guide rails 8 can stretch in the transverse direction, so that the straightness of the linear guide rails 4 on the two sides of the gantry type working platform 1 is maintained; meanwhile, the selected crossed roller ring 7 and the selected crossed roller guide rail 8 have the characteristics of small volume, large load and high precision, can meet the requirements of high-precision and high-speed working conditions, and can greatly reduce the volume of a flexible structure.
The driving end flexible assembly also comprises a driving end support 9 for bearing a crossed roller guide rail 8, a sliding seat 10 for bearing a crossed roller ring 7, a rotating shaft 11, a sealing cover 12 and a flange 13 for connecting a cross beam of the gantry type working platform 1, wherein the crossed roller ring 7 and the crossed roller guide rail 8 are matched for use to realize the functions of rotation and extension, the driving end support 9 is arranged on the corresponding linear guide rail 4 through a sliding block sliding frame, the crossed roller guide rail 8 is arranged in a guide rail installation groove of the driving end support 9, the crossed roller guide rails 8 are vertically distributed with the linear guide rails 4, the number of the crossed roller guide rails 8 is two, the sliding seat 10 is erected on the two crossed roller guide rails 8 and slides transversely along the two crossed roller guide rails 8, the rotating shaft 11 and the crossed roller ring 7 are both embedded in a countersunk hole of the sliding seat 10, the sealing cover 12 is arranged at the opening of the countersunk hole of the sliding seat 10, the flange 13 is arranged above the sealing cover 12, the sealing cover 12 is fixedly connected with the sliding seat 10 through a fastener, the flange 13 is connected with a beam of the gantry type working platform 1, the flange 13 is fixedly connected with the rotating shaft 11 through a fastener, the rotating shaft 11 is not in contact with the sliding seat 10, and the rotating shaft 11 rotates along with the crossed roller ring 7. The driving end flexible assembly further comprises a limiting block 14 used for limiting the stroke of the sliding seat 10, the limiting block 14 is located in the middle position area between the two crossed roller guide rails 8, and the limiting block 14 is installed in a limiting block installation groove on the inner side of the driving end support 9 in the transverse direction. The seal cover 12 and the step in the countersunk hole of the sliding seat 10 limit the displacement of the crossed roller ring 7 in the axial direction, meanwhile, the shoulder of the rotating shaft 11 and the step in the countersunk hole of the sliding seat 10 limit the displacement of the crossed roller ring 7 in the radial direction, and the crossed roller ring 7 can only rotate in the circumferential direction. The linear motor 5 corresponding to the driving end component 2 is fixedly connected with a driving end support 9 in the driving end component 2 through a fastener.
It should be noted that: the cross roller ring 7 and the cross roller guide rail 8 in the driving end flexible assembly are universal parts on the market, are standard parts and can be purchased directly on the market, and the radial load and the axial load of the cross roller ring 7 are both large.
The driven end flexible assembly further comprises a driven end support 15 used for bearing the crossed roller ring 7, a fixed seat 16, a rotating shaft 11, a sealing cover 12 and a flange 13 used for connecting a cross beam of the gantry type working platform 1, the driven end support 15 is arranged on the corresponding linear guide rail 4 through a sliding block sliding frame, the fixed seat 16 is fixed on the driven end support 15, the fixed seat 16 is fixedly connected with the driven end support 15 through a fastener, the rotating shaft 11 and the crossed roller ring 7 are embedded into a countersunk hole of the fixed seat 16, the sealing cover 12 is arranged at the opening of the countersunk hole of the fixed seat 16, the flange 13 is arranged above the sealing cover 12, the sealing cover 12 is fixedly connected with the fixed seat 16 through the fastener, the flange 13 is connected with the cross beam of the gantry type working platform 1, the flange 13 is fixedly connected with the rotating shaft 11 through the fastener, and the rotating shaft 11 rotates along with the crossed roller ring 7. The step in the countersunk hole of the cover 12 and the fixing seat 16 limits the displacement of the crossed roller ring 7 in the axial direction, meanwhile, the shoulder of the rotating shaft 11 and the step in the countersunk hole of the fixing seat 16 limit the displacement of the crossed roller ring 7 in the radial direction, and the crossed roller ring 7 can only rotate in the circumferential direction. The linear motor 5 corresponding to the driven end assembly 3 is fixedly connected with a driven end support 15 in the driven end assembly 3 through a fastener.
It should be noted that: the crossed roller ring 7 in the driven end flexible assembly is a universal part on the market, is a standard part and can be directly purchased on the market, and the radial load and the axial load of the crossed roller ring 7 are both large.
The absolute value grating encoder 6 is divided into a reading head 61 and a grating scale 62. On one side of the active end component 2, the reading head 61 and the linear motor 5 are both arranged on the active end support 9 of the active end component 2, the grating ruler 62 is arranged along the moving direction of the active end component 2, and signals at different positions on the grating ruler 62 are read in the moving process of the reading head 61; on one side of the driven end assembly 3, the reading head 61 and the linear motor 5 are both arranged on the driven end support 15 of the driven end assembly 3, the grating ruler 62 is arranged along the moving direction of the driven end assembly 3, and signals of different positions on the grating ruler 62 are read during the movement of the reading head 61.
Of course, the cross roller guide rail 8 can be replaced by a common linear guide rail, the cross roller ring 7 can be replaced by an angular contact bearing, and the absolute value grating encoder 6 can be changed into a common grating encoder matched limit and origin photoelectricity.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention are equivalent to or changed within the technical scope of the present invention.
Claims (10)
1. The utility model provides a longmen dual-drive structure, has planer-type work platform (1), initiative end subassembly (2) and driven end subassembly (3), install linear guide (4) on two longerons of planer-type work platform (1) respectively, initiative end subassembly (2) slide along one of them linear guide (4), driven end subassembly (3) slide along another linear guide (4), its characterized in that: and linear motors (5) and absolute value grating encoders (6) which are used for controlling the driving end assembly (2) and the driven end assembly (3) to synchronously slide on the corresponding linear guide rails (4) at a constant speed are arranged on two sides of the gantry type working platform (1).
2. The gantry double-drive structure according to claim 1, characterized in that: the driving end assembly (2) is a driving end flexible assembly, the driven end assembly (3) is a driven end flexible assembly matched with the driving end flexible assembly, and the driving end flexible assembly and the driven end flexible assembly are both provided with crossed roller rings (7) which are used for keeping the parallelism of linear guide rails (4) on two sides and can rotate.
3. The gantry double-drive structure according to claim 2, characterized in that: the driving end flexible assembly is provided with a crossed roller guide rail (8) which keeps the straightness of the linear guide rails (4) on two sides and can realize transverse extension.
4. The gantry double-drive structure according to claim 3, characterized in that: the driving end flexible assembly further comprises a driving end support (9), a sliding seat (10), a rotating shaft (11), a sealing cover (12) and a flange (13), the driving end support (9) is arranged on the corresponding linear guide rail (4) through a sliding block sliding frame, the crossed roller guide rail (8) is arranged in a guide rail mounting groove of the driving end support (9), the sliding seat (10) is erected on the crossed roller guide rail (8) and transversely slides along the crossed roller guide rail (8), the rotating shaft (11) and the crossed roller ring (7) are embedded in a countersunk hole of the sliding seat (10), the sealing cover (12) is arranged at an opening of the countersunk hole of the sliding seat (10), the flange (13) is arranged above the sealing cover (12), the sealing cover (12) is fixedly connected with the sliding seat (10) through a fastener, and the flange (13) is connected with a cross beam of the gantry type working platform (1), and the flange (13) is fixedly connected with the rotating shaft (11) through a fastener, and the rotating shaft (11) rotates along with the crossed roller ring (7).
5. The gantry double drive structure according to claim 4, characterized in that: the driving end flexible assembly further comprises a limiting block (14) used for limiting the stroke of the sliding seat (10), and the limiting block (14) is installed in a limiting block installation groove on the inner side of the driving end support (9) in the transverse direction.
6. A gantry double-drive structure according to any one of claim 4, characterized in that: the cover (12) and the step in the countersunk head hole of the sliding seat (10) limit the displacement of the crossed roller circular ring (7) in the axial direction.
7. A gantry double drive structure according to any one of claims 4-6, characterized in that: the linear motor (5) corresponding to the driving end component (2) is fixedly connected with a driving end support (9) in the driving end component (2) through a fastener.
8. The gantry double-drive structure according to claim 3, characterized in that: the driven end flexible assembly also comprises a driven end support (15), a fixed seat (16), a rotating shaft (11), a sealing cover (12) and a flange (13), the driven end support (15) is arranged on the corresponding linear guide rail (4) through a sliding block sliding frame, the fixed seat (16) is fixed on the driven end support (15), the rotating shaft (11) and the crossed roller ring (7) are embedded in a countersunk hole of the fixed seat (16), the sealing cover (12) is arranged at the opening of the countersunk hole of the fixed seat (16), the flange (13) is arranged above the sealing cover (12), the sealing cover (12) is fixedly connected with the fixed seat (16) through a fastener, the flange (13) is connected with a beam of the gantry type working platform (1), and the flange (13) is fixedly connected with the rotating shaft (11) through a fastener, and the rotating shaft (11) rotates along with the crossed roller ring (7).
9. The gantry double drive structure according to claim 8, wherein: the steps in the countersunk holes of the cover (12) and the fixed seat (16) limit the displacement of the crossed roller ring (7) in the axial direction.
10. A gantry double drive structure according to any one of claims 8-9, characterized in that: the linear motor (5) corresponding to the driven end assembly (3) is fixedly connected with a driven end support (15) in the driven end assembly (3) through a fastener.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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CN202210046621.8A CN114074318A (en) | 2022-01-17 | 2022-01-17 | Gantry double-drive structure |
CN202220827219.9U CN217462893U (en) | 2022-01-17 | 2022-04-11 | Gantry double-drive structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202210046621.8A CN114074318A (en) | 2022-01-17 | 2022-01-17 | Gantry double-drive structure |
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CN114074318A true CN114074318A (en) | 2022-02-22 |
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CN202210046621.8A Pending CN114074318A (en) | 2022-01-17 | 2022-01-17 | Gantry double-drive structure |
CN202220827219.9U Active CN217462893U (en) | 2022-01-17 | 2022-04-11 | Gantry double-drive structure |
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CN202220827219.9U Active CN217462893U (en) | 2022-01-17 | 2022-04-11 | Gantry double-drive structure |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115076323A (en) * | 2022-06-16 | 2022-09-20 | 盛吉盛半导体科技(无锡)有限公司 | Loadlock transmission mechanism in PVD (physical vapor deposition) and CVD (chemical vapor deposition) equipment and control method thereof |
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JP2000058629A (en) * | 1998-07-31 | 2000-02-25 | Kyocera Corp | Stage device and electron beam lithography system using the same |
CN201054862Y (en) * | 2007-01-22 | 2008-04-30 | 北京慧摩森电子系统技术有限公司 | Placement machine positioning platform for linear motor drive |
CN107627292A (en) * | 2017-09-26 | 2018-01-26 | 广东工业大学 | A kind of multiple degrees of freedom large stroke and high precision motion platform |
CN109968047A (en) * | 2019-04-28 | 2019-07-05 | 横川机器人(深圳)有限公司 | A kind of flexible linear motor is double to drive gantry platform |
CN211540252U (en) * | 2019-12-31 | 2020-09-22 | 昆山晟丰精密机械有限公司 | Sliding base and alignment platform |
CN215469540U (en) * | 2021-09-18 | 2022-01-11 | 苏州华工自动化技术有限公司 | Double-station gantry double-drive linear motor motion platform |
-
2022
- 2022-01-17 CN CN202210046621.8A patent/CN114074318A/en active Pending
- 2022-04-11 CN CN202220827219.9U patent/CN217462893U/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000058629A (en) * | 1998-07-31 | 2000-02-25 | Kyocera Corp | Stage device and electron beam lithography system using the same |
CN201054862Y (en) * | 2007-01-22 | 2008-04-30 | 北京慧摩森电子系统技术有限公司 | Placement machine positioning platform for linear motor drive |
CN107627292A (en) * | 2017-09-26 | 2018-01-26 | 广东工业大学 | A kind of multiple degrees of freedom large stroke and high precision motion platform |
CN109968047A (en) * | 2019-04-28 | 2019-07-05 | 横川机器人(深圳)有限公司 | A kind of flexible linear motor is double to drive gantry platform |
CN211540252U (en) * | 2019-12-31 | 2020-09-22 | 昆山晟丰精密机械有限公司 | Sliding base and alignment platform |
CN215469540U (en) * | 2021-09-18 | 2022-01-11 | 苏州华工自动化技术有限公司 | Double-station gantry double-drive linear motor motion platform |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115076323A (en) * | 2022-06-16 | 2022-09-20 | 盛吉盛半导体科技(无锡)有限公司 | Loadlock transmission mechanism in PVD (physical vapor deposition) and CVD (chemical vapor deposition) equipment and control method thereof |
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CN217462893U (en) | 2022-09-20 |
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