CN201054862Y - Placement machine positioning platform for linear motor drive - Google Patents

Placement machine positioning platform for linear motor drive Download PDF

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Publication number
CN201054862Y
CN201054862Y CNU2007200024478U CN200720002447U CN201054862Y CN 201054862 Y CN201054862 Y CN 201054862Y CN U2007200024478 U CNU2007200024478 U CN U2007200024478U CN 200720002447 U CN200720002447 U CN 200720002447U CN 201054862 Y CN201054862 Y CN 201054862Y
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China
Prior art keywords
guide rail
linear motor
linear
motor drive
drive mechanism
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Expired - Lifetime
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CNU2007200024478U
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Chinese (zh)
Inventor
牛怀新
欧钟
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MicroE Systems Inc
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MicroE Systems Inc
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Abstract

The utility model relates to a motion platform using a linear motor to drive and being suitable for a placement machine. The utility model uses the linear motor to directly drive in the X and the Y directions or the X direction, cancels the transmission part such as a screw and a belt. Because of using the design structure of the linear motor, the utility model simplifies the mechanical structure, improves the dynamic stiffness of the system, can achieve rapid placement speed and precise positioning, can effectively reduce friction and noise, and enhance the service life of the placement machine. Because of using a gantry structure in the Y direction, and dual linear motors to drive simultaneously, the utility model eliminates the error resulted from the system inertia and improves the controllable performance of the platform system. The motion platform is detected, controlled and driven by a closed-loop control system formed between a linear grating position detection encoder and a driving mechanism, and the linear motor is used as an executive mechanism, to carry out precise positioning. The driving guide rail used can use linear rolling guide rails or linear air bearing guide rails.

Description

The chip mounter locating platform of linear motor driving
Technical field
The utility model relates to a kind of motor-driven locating platform, the chip mounter locating platform of the linear motor driving in especially a kind of surface-mounting equipment that is applied on pcb board to paste the paster chip.
Background technology
Make the requirement of micron order paster positioning accuracy for satisfying the integrated circuit circuit board, the positioning accuracy request of chip mounter is more and more higher, and speed is more and more faster.Chip mounter locating platform on the market mostly adopts linear rolling guide to add that the band leading screw drives the version of servomotor now.It is low and be difficult to realize precision positioning to locate chip mounter complex structure, inconvenient operation, the speed of this band lead screw transmission system, thereby can not satisfy the requirement of production.
The utility model content
At the problem that prior art exists, the purpose of this utility model be to provide a kind of simple in structure, can high-speed motion and the chip mounter locating platform of pinpoint linear motor driving.
For achieving the above object, chip mounter locating platform of the present utility model is provided with the two closed slide guiding of planer-type in the Y direction, and two driven in parallel motor-driven are arranged; The directions X telecontrol equipment places on the motion of Y direction, single motor-driven; Z realizes three-degree-of-freedom motion to motion in X, Y direction are moved formed plane.It is detected, controls and driven by the closed-loop control system of being formed between striated pattern position probing encoder and the driving mechanism, and linear electric motors are as actuator, to realize accurate location.
According to an aspect of the present utility model, motor-driven chip mounter locating platform, comprise X that quadrature installs to guide rail, Y to guide rail, X is positioned at Y on guide rail to guide rail; Described chip mounter locating platform comprises that also X detects encoder, Y to stop position detection encoder and control system to multiaxis navigation system, X to stop position to Linear Motor Drive Mechanism, Z to Linear Motor Drive Mechanism, Y; Described Z is connected to single motor-driven mechanism with described X to the multiaxis navigation system; Control system receives the information that above-mentioned stop position detects encoder feedback, and send target location instruction to Linear Motor Drive Mechanism and Y to Linear Motor Drive Mechanism to X according to this information, X links to Linear Motor Drive Mechanism to Linear Motor Drive Mechanism and Y, realizes that Z is to the location of multiaxis navigation system on the XY plane.
Further, described X is installed in X on guide rail base to guide rail, and it is single line slideway; Described Y is installed in Y on guide rail base to guide rail, and it can be the bilinear guide rail.
Further, described X is that X is to single linear electric motors to Linear Motor Drive Mechanism; Described Y is that Y is to dual linear motor to Linear Motor Drive Mechanism.
Further, described X can adopt linear rolling track or air bearing guide rail to guide rail and Y to guide rail.
Mechanical structure of the present invention and control device possess following effect and advantage:
1, platform motion information linear encoder directly feeds back.The hysteresis that does not have median error that mechanical connection brings and movable information to transmit.
2, Y is to adopting parallel linkage structure, and is insensitive to the error that the variation (as the variation of conditions such as temperature, humidity) of mechanical structure brings; And effectively the bucking-out system center of gravity changes the moment of inertia variation that brings, and improves the control ability and the kinematic accuracy of system.
3, adopt the power transmission shaft of linear electric motors not have transmission links such as bearing and leading screw, simple in structure, be easy to process and assemble, low cost of manufacture.
4, adopt the platform of air bearing guide rail not have the machinery friction, performance is good, and speed is fast.
Linear motor driving has been adopted in the utility model design, has cancelled the essential lead screw transmission of former locating platform system, has simplified project organization, has improved the dynamic stiffness of system, can realize the paster speed that is exceedingly fast realizing precision positioning; Can reduce friction noise effectively, improve the useful life of chip mounter.Adopt bi-motor to drive simultaneously in the Y direction, eliminate the error that causes owing to system inertia, improved the may command performance of plateform system.
The purpose of the utility model design is that the chip that runs in developing at chip mounter equipment is wide in variety, moving condition is complicated, high-speed and high-precision fixed bit platform bottleneck, use linear motor driving structure simple in structure, realize compact dimensions, reach the mechanical structure form of 10 micron orders or higher repeatable accuracy index
Description of drawings
Fig. 1 is a chip mounter locating platform structural representation;
Fig. 2 is that Z is to the platform perspective view;
Fig. 3 is that Y is to the platform perspective view;
Fig. 4 is that X is to the platform perspective view.
Embodiment
Further specify structure of the present utility model and operation principle below in conjunction with design example and accompanying drawing.Referring to Fig. 1-4.This is designed to the chip mounter locating platform, 10 microns of Design Orientation precision.
The structure of motor-driven chip mounter locating platform of the present utility model constitutes: pedestal (4), Y to two guide rail Dual-motors Driving mechanisms (3), X to single motor-driven mechanism (1), Z to multiaxis navigation system (2).
Pedestal (4) is accepted locating platform and lathe bed, and realization is connected with other position of chip mounter; Y directly links to each other with pedestal (4) to two guide rail Dual-motors Driving devices (3), and it is the twin shaft parallel driving apparatus, and Y is fixed on the pedestal (4) to motor (7) simultaneously, and is parallel with guide rail (5); X links to two guide rail Dual-motors Driving mechanisms (3) with Y to single motor-driven mechanism (1), realizes XY precisive plane location.
Y is respectively in Y to guide rail (5) side to linear electric motors (7), in the outside and upper and lower sides all can, the direction of motion is parallel to guide rail (5) direction of motion with Y, motor thrust directly acts on the guide rail movement direction, reduce friction, raise the efficiency, simplified structure, be easy to realize high-speed and high accuracy; Chip mounter locating platform Y is big to the span of guide rail (5), the load centroid position is changing again at any time, adopt the dual linear motor type of drive, two motor synchronous motions, eliminated owing to load quality and centroid position change the moment of inertia that causes and the torque influence to motion, system response time is fast, the precision height; The control system feedback information comes from the Y that is fixed on the pedestal (4) to striated pattern position probing encoder (6), and its installation direction is parallel to guide rail (5) traffic direction with Y, adopts dual coding device feedback in the actual design.
X installs to guide rail (5) quadrature with Y to guide rail (8), can adopt linear motor driving or leading screw to drive two kinds of versions.Performance requirement according to chip mounter is selected.The control system feedback information comes from the striated pattern position probing encoder (10) that is fixed on the pedestal, and its installation direction is parallel to guide rail (8) traffic direction with X.Z moves to guide rail (8) with X to multiaxis navigation system (2) on it.
When Z to multiaxis navigation system (2) along X when moving, will influence the driving center of gravity of two Y to motor.And the variation of center of gravity can be detected by the striated pattern position coder that is fixed on the pedestal (4), and feeds back to platform control system.Closed-loop control system is added in two electric current adjustment in the Y motor because center of gravity changes the influence that causes by adjustment, thereby guarantees that Z is to the positional precision of multiaxis navigation system (2) in the X-Y direction.
X adopts linear rolling track or air bearing guide rail to guide rail (8), Y to guide rail (5), and two kinds of guide rail modes are all within this patent claimed range.
After the target location that host computer provided is determined, the numerical value instruction action that the motor of Y and directions X (7) (9) provides according to control system, driving Z moves to multiaxis navigation system (2) and needs the position; Detect the feedback information of encoder (6) (10) according to stop position, control system calculate Z to the physical location of multiaxis navigation system (2) and with the error of target location, motor (7) (9) is accepted instruction back precision positioning, and realizes the paster operation by Z to multiaxis navigation system (2).
Y is a dual linear motor to motor (7), and X is linear electric motors to motor (9), and is simple and compact for structure, reduced middle transmission link, and reaction speed is fast, has eliminated machine error, has reduced the control difficulty, realizes precision positioning easily; Because mechanical connection reduces, frictional resistance is little, and the motion noise of this platform is very little.Y is synchronized with the movement to dual linear motor (7), has reduced motion and has impacted, and reduces X to moving to the quadrature error of Y to motion, has improved system accuracy.Y detects encoder (6) to stop position and has adopted the dual coding device, can control respectively to the motion of motor (7) Y, and kinematic accuracy is higher.

Claims (5)

1. a motor-driven chip mounter locating platform is characterized in that, comprise X that quadrature installs to guide rail, Y to guide rail, X is positioned at Y on guide rail to guide rail; Described chip mounter locating platform comprises that also X detects encoder, Y to stop position detection encoder and control system to multiaxis navigation system, X to stop position to Linear Motor Drive Mechanism, Z to Linear Motor Drive Mechanism, Y; Described Z is connected to single motor-driven mechanism with described X to the multiaxis navigation system; Control system receives the information that above-mentioned stop position detects encoder feedback, and send target location instruction to Linear Motor Drive Mechanism and Y to Linear Motor Drive Mechanism to X according to this information, X links to Linear Motor Drive Mechanism to Linear Motor Drive Mechanism and Y, realizes that Z is to the location of multiaxis navigation system on the XY plane.
2. motor-driven chip mounter locating platform as claimed in claim 1 is characterized in that described X is installed in X on guide rail base to guide rail, and it is single line slideway; Described Y is installed in Y on guide rail base to guide rail, and it can be the bilinear guide rail.
3. motor-driven chip mounter locating platform as claimed in claim 2 is characterized in that, described X is that X is to single linear electric motors to Linear Motor Drive Mechanism; Described Y is that Y is to dual linear motor to Linear Motor Drive Mechanism.
4. motor-driven chip mounter locating platform as claimed in claim 1 is characterized in that, described X can adopt linear rolling track or air bearing guide rail to guide rail and Y to guide rail.
5. motor-driven chip mounter locating platform as claimed in claim 1, it is characterized in that, described X is linear encoder to stop position detection encoder and Y to stop position detection encoder, X is parallel to guide rail with X to the installation direction that stop position detects encoder, and Y is parallel to guide rail with Y to the installation direction that stop position detects encoder.
CNU2007200024478U 2007-01-22 2007-01-22 Placement machine positioning platform for linear motor drive Expired - Lifetime CN201054862Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2007200024478U CN201054862Y (en) 2007-01-22 2007-01-22 Placement machine positioning platform for linear motor drive

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Application Number Priority Date Filing Date Title
CNU2007200024478U CN201054862Y (en) 2007-01-22 2007-01-22 Placement machine positioning platform for linear motor drive

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101804568A (en) * 2010-03-19 2010-08-18 中国电子科技集团公司第二研究所 Linear motor driven air suspension motion platform
CN102686038A (en) * 2011-12-31 2012-09-19 广东工业大学 Direct drive high-speed efficient chip mounter
CN105142356A (en) * 2015-08-20 2015-12-09 中国科学院合肥物质科学研究院 Linear motor driven chip mounter
CN105345958A (en) * 2015-11-10 2016-02-24 江苏远翔物联科技有限公司 Packaging device of chip packaging machine
CN105448798A (en) * 2015-12-16 2016-03-30 中国电子科技集团公司第二研究所 Double-drive type XY moving platform
WO2017113155A1 (en) * 2015-12-30 2017-07-06 四川蓝光英诺生物科技股份有限公司 Bioprinter movement platform and bioprinter
CN106998646A (en) * 2016-01-25 2017-08-01 韩华泰科株式会社 The error of chip part placement equipment and chip part placement equipment minimizes method
CN107101793A (en) * 2017-06-14 2017-08-29 苏州直为精驱控制技术有限公司 Multi-direction motion platform
CN108245398A (en) * 2018-01-30 2018-07-06 王子坤 A kind of medical bed for assisting carrying out CPR
CN108407474A (en) * 2018-04-28 2018-08-17 广东电网有限责任公司 A kind of circuit printing equipment
CN109324066A (en) * 2019-01-02 2019-02-12 湖南赛博诺格电子科技有限公司 A kind of synthetic plate batch detecting device and its method
CN112828609A (en) * 2019-11-22 2021-05-25 财团法人工业技术研究院 Online inertia matching synchronous control method for gantry mechanism
CN114074318A (en) * 2022-01-17 2022-02-22 常州铭赛机器人科技股份有限公司 Gantry double-drive structure
CN115437987A (en) * 2022-11-09 2022-12-06 合肥安迅精密技术有限公司 Encoder communication forwarding method and device, storage medium and chip mounter
DE102021130751A1 (en) 2021-11-24 2023-05-25 ASMPT GmbH & Co. KG Manufacturing device with segmented encoder strips

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101804568A (en) * 2010-03-19 2010-08-18 中国电子科技集团公司第二研究所 Linear motor driven air suspension motion platform
CN102686038A (en) * 2011-12-31 2012-09-19 广东工业大学 Direct drive high-speed efficient chip mounter
CN102686038B (en) * 2011-12-31 2015-07-08 广东工业大学 Direct drive high-speed efficient chip mounter
CN105142356B (en) * 2015-08-20 2018-06-05 中国科学院合肥物质科学研究院 A kind of chip mounter of linear motor driving
CN105142356A (en) * 2015-08-20 2015-12-09 中国科学院合肥物质科学研究院 Linear motor driven chip mounter
CN105345958A (en) * 2015-11-10 2016-02-24 江苏远翔物联科技有限公司 Packaging device of chip packaging machine
CN105448798A (en) * 2015-12-16 2016-03-30 中国电子科技集团公司第二研究所 Double-drive type XY moving platform
WO2017113155A1 (en) * 2015-12-30 2017-07-06 四川蓝光英诺生物科技股份有限公司 Bioprinter movement platform and bioprinter
CN106998646A (en) * 2016-01-25 2017-08-01 韩华泰科株式会社 The error of chip part placement equipment and chip part placement equipment minimizes method
CN107101793A (en) * 2017-06-14 2017-08-29 苏州直为精驱控制技术有限公司 Multi-direction motion platform
CN108245398A (en) * 2018-01-30 2018-07-06 王子坤 A kind of medical bed for assisting carrying out CPR
CN108407474A (en) * 2018-04-28 2018-08-17 广东电网有限责任公司 A kind of circuit printing equipment
CN109324066A (en) * 2019-01-02 2019-02-12 湖南赛博诺格电子科技有限公司 A kind of synthetic plate batch detecting device and its method
CN109324066B (en) * 2019-01-02 2019-06-04 湖南赛博诺格电子科技有限公司 A kind of synthetic plate batch detector methods
CN112828609A (en) * 2019-11-22 2021-05-25 财团法人工业技术研究院 Online inertia matching synchronous control method for gantry mechanism
US11331762B2 (en) 2019-11-22 2022-05-17 Industrial Technology Research Institute Method for synchronous control of gantry mechanism with online inertia matching
DE102021130751A1 (en) 2021-11-24 2023-05-25 ASMPT GmbH & Co. KG Manufacturing device with segmented encoder strips
CN114074318A (en) * 2022-01-17 2022-02-22 常州铭赛机器人科技股份有限公司 Gantry double-drive structure
CN115437987A (en) * 2022-11-09 2022-12-06 合肥安迅精密技术有限公司 Encoder communication forwarding method and device, storage medium and chip mounter

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Granted publication date: 20080430

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