CN203092144U - Coaxial macro-micro composite linear motion platform device - Google Patents
Coaxial macro-micro composite linear motion platform device Download PDFInfo
- Publication number
- CN203092144U CN203092144U CN 201320094304 CN201320094304U CN203092144U CN 203092144 U CN203092144 U CN 203092144U CN 201320094304 CN201320094304 CN 201320094304 CN 201320094304 U CN201320094304 U CN 201320094304U CN 203092144 U CN203092144 U CN 203092144U
- Authority
- CN
- China
- Prior art keywords
- grand
- flexible hinge
- platform
- motion
- driver
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Control Of Position Or Direction (AREA)
Abstract
The utility model discloses a coaxial macro-micro composite linear motion platform device and a precision compensation method of the platform device. The platform device comprises a macro motion device, a micro motion device, a control device and a position detecting device. The macro motion device is formed by a servo driver, a linear driving module, a linear guide rail, a base and a macro motion working platform. The micro motion device is formed by a piezoelectric ceramic driver or a voice coil motor, a flexible hinge amplifying mechanism, the flexible hinge amplifying mechanism is formed by a flexible hinge, a micro motion working platform and a frame, and the piezoelectric ceramic driver or the voice coil motor drives the flexible hinge amplifying mechanism and drives the micro motion working platform to generate displacement. The position detecting device detects the displacement information of the micro motion working platform in real time and sends the information to the control device. According to information detected by a displacement sensor of macro-micro motion, the control device drives the micro motion working platform to compensate the motion of the micro motion device in real time, and then high static precision and high dynamic precision of the coaxial macro-micro composite linear motion platform device are achieved.
Description
Technical field
The utility model relates to a kind of coaxial grand little composite straight line exemplary motion stage device, belongs to the innovative technology of coaxial grand little composite straight line exemplary motion stage device.
Background technology
Along with the improvement of social development and people's living condition, people are more and more higher to the requirement of product, and this requires manufacturing industry must improve constantly the machining accuracy of product.But the range of high-accuracy feed motion platform is generally shorter, and the common grand motion feeding platform precision of wide range can't satisfy actual needs.If adopt the special-purpose high-accuracy motion platform of wide range, the manufacturing cost of product will significantly increase.
At above-mentioned present situation, a kind of favor that the grand motion of wide range general precision and the mutually compound motion platform that can realize the high-accuracy feeding of wide range of the micromotion of the little range of high accuracy more and more can be subjected to people.
A kind of pcb board positioner and localization method thereof of high accuracy directional light exposure machine are disclosed among the domestic utility model patent CN102540765A.This positioner has comprised grand dynamic positioning system that is made of servomotor, leading screw, macro-moving stage and the positioning device for microscopic motion of being made up of piezoelectric ceramic actuator and piezoelectric ceramics support platform.Its concrete method of work is: A. driven by servomotor leading screw drives macro-moving stage and carries out the feeding of big stroke; B. position detecting device detects the displacement error in macro-moving stage and precalculated position: the C. controller drives the required displacement of piezoelectric ceramics micromotion platform when obtaining making pcb board to arrive assigned address according to the displacement error information in the B step, and then according to displacement drive power supply for piezoelectric ceramics is controlled.Above-mentioned positioner and method have realized the accurate location to pcb board, but this positioner and method still have following deficiency: (1) this device adopts leading screw to drive macro-moving stage and produces displacement, and the intrinsic creeping phenomenon of leading screw itself can cause macro-moving stage bigger displacement amplitude to occur from move to static process, and its time that reaches stabilization process is longer.This causes the action of the positioning device for microscopic motion in this positioner to have certain retardation, can not guarantee that fine motion pottery workbench remains kinematic accuracy in the motion overall process; (2) in this positioner and method, piezoelectric ceramic actuator directly drives the piezoelectric ceramics support platform and carries out the displacement adjustment.This requires the work range ability of the piezoelectric ceramic actuator in actual the use must be greater than the maximum displacement deviation of grand dynamic positioning system, and then the type selecting scope of restriction piezoelectric ceramics, has reduced the design freedom and the economy of positioner; (3) the piezoelectric ceramics support platform in the positioning device for microscopic motion is mated damping actions such as friction is arranged between the workpiece in this positioner, and this causes the operating load of its fine motion pottery workbench can not be too high, has limited its scope of application.
A kind of coaxial grand little composite straight line exemplary motion stage device is disclosed among the domestic utility model patent CN102528473A.This exemplary motion stage device comprises grand telecontrol equipment that is made of air-float guide rail, linear electric motors, macro-moving stage and the micromotion device that is made of flexible hinge, micromotion platform, piezoelectric ceramic actuator or voice coil loudspeaker voice coil electrical equipment.This telecontrol equipment can be realized the high precision displacement and the location of micromotion platform.But adopted grating chi and fine motion sensor to detect as the positional precision of coaxial direction in this scheme simultaneously, this requires its grating chi and fine motion sensor must reach the precision that is complementary, and causes cost to increase, and makes the precision compensation method complexity; Adopted parts such as air-float guide rail, linear electric motors in this scheme, caused the exemplary motion stage device cost higher, economy is relatively poor, has limited its promoted extension.
Summary of the invention
At the deficiency that existing grand little compound motion platform exists, the purpose of this utility model is to provide a kind of low cost, the grand little composite straight line exemplary motion stage device of high-precision coaxial.
For achieving the above object, the utility model has adopted following technical scheme:
Coaxial grand little composite straight line exemplary motion stage device of the present utility model, include grand telecontrol equipment, the micromotion device, control device and position detecting device, wherein grand telecontrol equipment includes servo-driver, the linear drives module, line slideway, base and grandly start building to do platform, servo-driver is connected with line slideway by the linear drives module, line slideway is installed on the base, grand starting building is installed on the line slideway as platform, the micromotion device includes high accuracy fine motion driver and flexible hinge enlarger, the flexible hinge enlarger includes flexible hinge, micromotion working platform, framework, wherein flexible hinge is installed on the framework, micromotion working platform is connected with flexible hinge, the motion of high accuracy fine motion driver drives flexible hinge, lay operating load on the micromotion working platform, described micromotion device starts building to do on the platform by frame fixation grand, be used for detecting and grandly start building to do platform and micromotion working platform and comprise grand moving displacement detector and fine motion displacement detector with respect to the position detecting device of the displacement information of base, the fine motion displacement detector is made of the grating ruler reading head that is fixed on the grating chi on the base in the grand telecontrol equipment and be fixed on the micromotion working platform; Grand moving displacement detector is made of the coding disk that is connected on the servo-driver, control device and servo-driver and high accuracy fine motion driver are for being electrically connected, control device sends the displacement control instruction to servo-driver and high accuracy fine motion driver, realizes the accuracy compensation of micromotion device to grand telecontrol equipment.
The utility model has following beneficial effect owing to adopt above technical scheme:
1) the micromotion device in the utility model has adopted piezoelectric ceramic actuator or voice coil motor and flexible hinge enlarger, guaranteed the micromotion working platform motion continuity, do not have hysteresis, do not have friction, exempt to lubricate, the characteristics of high response speed and mechanism's compactness;
2) the utility model can be realized accuracy compensation, has realized the high static accuracy and the high dynamic accuracy of motion overall process;
3) the utility model micromotion working platform is started building to do platform and is isolated with grand in the course of the work, and two planes are directly contact, has eliminated the influence of frictional resistance, and the uses of many simultaneously group flexible hinges also make micromotion working platform can carry higher operating load;
4) introduce the flexible hinge structure for amplifying in the coaxial grand little composite straight line exemplary motion stage device of the utility model, enlarged the range of ceramic driver or voice coil motor, improved the type selecting scope of high accuracy fine motion driver;
5) exemplary motion stage device in the utility model is simple in structure, and cost is lower, promotes easily.
The utility model is a kind of reasonable in design, and convenient and practical coaxial grand little composite straight line exemplary motion stage device can realize the accuracy compensation that grand little composite straight line moves.
Description of drawings
Fig. 1 is an overall structure schematic diagram of the present utility model.
1. servo-driver; 2. line slideway; 3. shaft coupling; 4. base; 5. grandly start building to do platform; 6. piezoelectric ceramic actuator or voice coil motor; 7. back-moving spring; 8. flexible hinge; 9. micromotion working platform; 10. framework; 11. grating ruler reading head; 12. ball-screw; 13. grating chi
The specific embodiment
Embodiment:
Overall structure schematic diagram of the present utility model as shown in Figure 1, coaxial grand little composite straight line exemplary motion stage device of the present utility model, include grand telecontrol equipment, the micromotion device, control device and position detecting device, wherein grand telecontrol equipment includes servo-driver 1, the linear drives module, line slideway 2, base 4 and grandly start building to do platform 5, servo-driver 1 is connected with line slideway 2 by the linear drives module, line slideway 2 is installed on the base 4, grandly start building to do platform 5 and be installed on the line slideway 2, the micromotion device includes high accuracy fine motion driver and flexible hinge enlarger, the flexible hinge enlarger includes flexible hinge 8, micromotion working platform 9, framework 10, wherein flexible hinge 8 is installed on the framework 10, micromotion working platform 9 is connected with flexible hinge 8,8 motions of high accuracy fine motion driver drives flexible hinge, lay operating load on the micromotion working platform 9, described micromotion device is fixed on by framework 10 and grandly starts building to do on the platform 5, be used for detecting and grandly start building to do platform 5 and micromotion working platform 9 and comprise grand moving displacement detector and fine motion displacement detector with respect to the position detecting device of the displacement information of base 4, the fine motion displacement detector is made of the grating ruler reading head 11 that is fixed on the grating chi on the base 4 13 in the grand telecontrol equipment and be fixed on the micromotion working platform 9; Grand moving displacement detector is made of the coding disk that is connected on the servo-driver 1, control device and servo-driver 1 and high accuracy fine motion driver are for being electrically connected, control device sends the displacement control instruction to servo-driver 1 and high accuracy fine motion driver, realizes the accuracy compensation of micromotion device to grand telecontrol equipment.Described grand moving displacement detector is in order to detect the grand displacement of platform 5 with respect to base of starting building to do; Described fine motion displacement detector is in order to detect micromotion working platform 9 and the grand stack displacement of starting building to do platform 5.In the present embodiment, described servo-driver 1 is a servomotor.Also be equiped with back-moving spring 7 between flexible hinge 8 and the framework 10.
In the present embodiment, described linear drives module is the feed screw nut transmission mechanism, includes leading screw 12 and is installed in nut on the leading screw 12, and leading screw 12 is connected with the output shaft of servomotor, and nut and leading screw 12 are formed the worm drive pairs, and line slideway 2 is connected with nut.In the present embodiment, servomotor is connected with leading screw 12 by shaft coupling 3, and in the present embodiment, leading screw 12 is a ball-screw, and described high accuracy fine motion driver is piezoelectric ceramic actuator or voice coil motor 6.Servomotor drives ball-screws by shaft coupling 3 and rotates, and ball-screw drives grandly to be started building to do platform 5 and move along line slideway 3; Described micromotion device is fixed on grandly to be started building to do on the platform 5; The flexible hinge 8 that described piezoelectric ceramic actuator or voice coil motor 6 drive in the flexible hinge structure for amplifying, and then drive micromotion working platform 9 generation displacements.
In the present embodiment, described flexible hinge enlarger is processed by a whole block material.The width of a stem portion of the flexible hinge in the described flexible hinge enlarger is wideer than the width of hinge fraction, and each two end of doing is the hinge position; The outline line at hinge position is the curve transition of symmetry.In addition, comprise at least one distortion in the described flexible hinge enlarger and recover parts.Described flexible hinge 8 and the micromotion working platform 9 that is connected with flexible hinge 8 are contactless with grand telecontrol equipment.
The precision compensation method of the coaxial grand little composite straight line exemplary motion stage device of the utility model comprises following steps:
1) grand telecontrol equipment and grand moving displacement detector are formed closed-loop control system, and micromotion device and fine motion displacement detector are formed closed-loop control system;
2) during described coaxial composite straight line exemplary motion stage device motion, describedly grandly start building to do platform 5 and drive the micromotion devices to desired location; Described grand moving displacement detector obtains the grand displacement information of starting building to do platform 5, and described fine motion displacement detector obtains grand absolute displacement information of starting building to do after platform 5 and micromotion working platform 9 stacks;
3) when described coaxial composite straight line exemplary motion stage device during to target travel, described grand start building to do platform 5 and micromotion working platform 9 equidirectional motions, the absolute displacement of wherein said micromotion working platform 9 relative bases 4 is greater than the grand displacement of starting building to do platform 5; When described micromotion working platform 9 arrives the precalculated position, describedly grandly start building to do platform 5 still at the volley, described control device sends control signal to described micromotion device, drive the initiatively grand displacement fluctuation of starting building to do platform 5 relative desired location of real-Time Compensation of micromotion working platform 9, until the described grand platform 5 complete stabilities arrival desired location of starting building to do;
4) when utilizing described coaxial composite straight line exemplary motion stage device to carry out in the dynamic process accuracy compensation, described controller is decomposed into desired dynamic movement process the Position Control of multiple spot, repeat above-mentioned steps 2) and step 3), realize the high dynamic accuracy of described coaxial grand little composite straight line exemplary motion stage device.The output control signal frequency of described control device is higher than the vibration frequency in the described grand telecontrol equipment motion process.
The utility model includes grand kinetic control system and the micromotion control system constitutes: the closed-loop control system that grand moving control system is made up of grand telecontrol equipment and grand moving displacement detector, the closed-loop control system that the fine motion control system is made up of micromotion device and fine motion displacement detector.When putting the position motion control, described controller sends the displacement of targets instruction to grand telecontrol equipment and micromotion device.Grand telecontrol equipment drives the micromotion device and moves to desired location, wherein micromotion platform 9 with respect to the displacement of base greater than the grand displacement of starting building to do platform 5 relative bases 4.When micromotion working platform 9 arrives desired location, described control device sends control signal to the micromotion device, drive the initiatively grand displacement fluctuation of starting building to do platform 5 relative desired location of real-Time Compensation of micromotion working platform 9, until the described grand platform 5 complete stabilities arrival desired location of starting building to do.During dynamic motion control, described control device is decomposed into above-mentioned some position control with desired dynamic movement process, repeats above-mentioned some position control step, realizes the high static accuracy and the high dynamic accuracy of described coaxial grand little composite straight line exemplary motion stage device.
Claims (8)
1. coaxial grand little composite straight line exemplary motion stage device, it is characterized in that including grand telecontrol equipment, the micromotion device, control device and position detecting device, wherein grand telecontrol equipment includes servo-driver (1), the linear drives module, line slideway (2), base (4) and grandly start building to do platform (5), servo-driver (1) is connected with line slideway (2) by the linear drives module, line slideway (2) is installed on the base (4), grandly start building to do platform (5) and be installed on the line slideway (2), the micromotion device includes high accuracy fine motion driver and flexible hinge enlarger, the flexible hinge enlarger includes flexible hinge (8), micromotion working platform (9), framework (10), wherein flexible hinge (8) is installed on the framework (10), micromotion working platform (9) is connected with flexible hinge (8), high accuracy fine motion driver drives flexible hinge (8) motion, micromotion working platform is laid operating load on (9), described micromotion device is fixed on by framework (10) and grandly starts building to do on the platform (5), be used for detecting and grandly start building to do platform (5) and micromotion working platform (9) and comprise grand moving displacement detector and fine motion displacement detector with respect to the position detecting device of the displacement information of base (4), the fine motion displacement detector is made of the grating ruler reading head (11) that is fixed on the grating chi (13) on the base in the grand telecontrol equipment (4) and be fixed on the micromotion working platform (9); Grand moving displacement detector is made of the coding disk that is connected on the servo-driver (1), control device and servo-driver (1) and high accuracy fine motion driver are for being electrically connected, control device sends the displacement control instruction to servo-driver (1) and high accuracy fine motion driver, realizes the accuracy compensation of micromotion device to grand telecontrol equipment.
2. coaxial grand little composite straight line exemplary motion stage device according to claim 1, it is characterized in that: described servo-driver (1) is a servomotor.
3. coaxial grand little composite straight line exemplary motion stage device according to claim 1, it is characterized in that: described linear drives module is the feed screw nut transmission mechanism, include leading screw (12) and be installed in nut on the leading screw (12), leading screw (12) is connected with the output shaft of servomotor, nut and leading screw (12) are formed the worm drive pair, and line slideway (2) is connected with nut.
4. coaxial grand little composite straight line exemplary motion stage device according to claim 1, it is characterized in that: described high accuracy fine motion driver is piezoelectric ceramic actuator or voice coil motor.
5. according to each described coaxial grand little composite straight line exemplary motion stage device of claim 1 to 4, it is characterized in that: the width of a stem portion of the flexible hinge in the described flexible hinge enlarger is wideer than the width of hinge fraction, and each two end of doing is the hinge position; The outline line at hinge position is the curve transition of symmetry.
6. coaxial grand little composite straight line exemplary motion stage device according to claim 5 is characterized in that: comprise at least one distortion in the described flexible hinge enlarger and recover parts.
7. coaxial grand little composite straight line exemplary motion stage device according to claim 6 is characterized in that: described flexible hinge (8) and the micromotion working platform (9) that is connected with flexible hinge (8) are contactless with grand telecontrol equipment.
8. coaxial grand little composite straight line exemplary motion stage device according to claim 7, it is characterized in that: described flexible hinge enlarger is processed by a whole block material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320094304 CN203092144U (en) | 2013-03-01 | 2013-03-01 | Coaxial macro-micro composite linear motion platform device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320094304 CN203092144U (en) | 2013-03-01 | 2013-03-01 | Coaxial macro-micro composite linear motion platform device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203092144U true CN203092144U (en) | 2013-07-31 |
Family
ID=48843587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320094304 Expired - Fee Related CN203092144U (en) | 2013-03-01 | 2013-03-01 | Coaxial macro-micro composite linear motion platform device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203092144U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103170845A (en) * | 2013-03-01 | 2013-06-26 | 广东工业大学 | Coaxial macro-micro composite linear motion platform device and accuracy compensation method thereof |
| CN104708329A (en) * | 2015-03-03 | 2015-06-17 | 青岛理工大学 | Active control platform for large-scale plate high-speed milling noise and control method thereof |
| CN107145164A (en) * | 2017-05-19 | 2017-09-08 | 广东工业大学 | A kind of grand micro- compound locating platform of vertical movement |
| CN109676423A (en) * | 2019-03-11 | 2019-04-26 | 佛山通达智能科技有限公司 | Ultraprecise high frequency sound two-pass fast tool servo processing unit (plant) |
| CN110345157A (en) * | 2019-06-14 | 2019-10-18 | 广东工业大学 | A kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch |
| CN110434835A (en) * | 2019-08-29 | 2019-11-12 | 华南理工大学 | A kind of macro micro- precisely locating platform device of two degrees of freedom and control method |
| CN114012188A (en) * | 2021-11-19 | 2022-02-08 | 哈尔滨工业大学 | Magnetic suspension servo drive spindle macro-micro composite micro-electrical discharge machining method and device |
| CN115781271A (en) * | 2022-11-10 | 2023-03-14 | 北京理工大学 | High-precision assembling and aligning device of gyroscope frame |
-
2013
- 2013-03-01 CN CN 201320094304 patent/CN203092144U/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103170845A (en) * | 2013-03-01 | 2013-06-26 | 广东工业大学 | Coaxial macro-micro composite linear motion platform device and accuracy compensation method thereof |
| CN103170845B (en) * | 2013-03-01 | 2015-06-03 | 广东工业大学 | Accuracy compensation method of coaxial macro-micro composite linear motion platform device |
| CN104708329A (en) * | 2015-03-03 | 2015-06-17 | 青岛理工大学 | Active control platform for large-scale plate high-speed milling noise and control method thereof |
| CN107145164A (en) * | 2017-05-19 | 2017-09-08 | 广东工业大学 | A kind of grand micro- compound locating platform of vertical movement |
| CN109676423A (en) * | 2019-03-11 | 2019-04-26 | 佛山通达智能科技有限公司 | Ultraprecise high frequency sound two-pass fast tool servo processing unit (plant) |
| CN109676423B (en) * | 2019-03-11 | 2024-01-23 | 北京广工精密技术有限公司 | Ultra-precise high-frequency response double-stroke fast cutter servo processing device |
| CN110345157A (en) * | 2019-06-14 | 2019-10-18 | 广东工业大学 | A kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch |
| CN110434835A (en) * | 2019-08-29 | 2019-11-12 | 华南理工大学 | A kind of macro micro- precisely locating platform device of two degrees of freedom and control method |
| CN114012188A (en) * | 2021-11-19 | 2022-02-08 | 哈尔滨工业大学 | Magnetic suspension servo drive spindle macro-micro composite micro-electrical discharge machining method and device |
| CN114012188B (en) * | 2021-11-19 | 2022-12-16 | 哈尔滨工业大学 | Magnetic suspension servo drive spindle macro-micro composite micro-electrical discharge machining method and device |
| CN115781271A (en) * | 2022-11-10 | 2023-03-14 | 北京理工大学 | High-precision assembling and aligning device of gyroscope frame |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103170845B (en) | Accuracy compensation method of coaxial macro-micro composite linear motion platform device | |
| CN203092144U (en) | Coaxial macro-micro composite linear motion platform device | |
| CN102943839B (en) | Precision positioning vibration isolation platform | |
| CN103318839B (en) | The grand microfluidic platform of high-speed, high precision based on piezoelectric ceramics and changing method | |
| CN101369155A (en) | Locking control method and system of large-stroke nanometer displacement positioning macro-movement bench | |
| CN102629122B (en) | Long-stroke high-speed dual-drive nano positioning system | |
| CN201054862Y (en) | Placement machine positioning platform for linear motor drive | |
| CN102543217A (en) | Macro-micro driven bidimensional integrated micro positioning platform | |
| CN101197197A (en) | Large moving range macro-micro dual drive locating platform | |
| CN109129412B (en) | Two-dimensional decoupling macro-micro motion platform and compensation method thereof | |
| CN105448798A (en) | Double-drive type XY moving platform | |
| CN103472679A (en) | Double-workpiece table long travel measurement apparatus and use method thereof | |
| CN204349758U (en) | A kind of grand micro-positioning table | |
| WO2013155947A1 (en) | Single degree of freedom vibration isolating device of linear motor and motion control method thereof | |
| CN202634339U (en) | Dual-motor parallel drive device | |
| CN104400763B (en) | Gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment workbench | |
| CN103427588A (en) | Linear rotary servo motor with two degrees of freedom | |
| CN105196025A (en) | Platform mechanism with adjustable free degree in x, y and z directions | |
| CN203269552U (en) | High-speed high-accuracy macro-micro platform based on piezoelectric ceramics | |
| CN205319138U (en) | Two formula XY motion platform that drive | |
| CN207888241U (en) | A kind of a wide range of Ultra-precision positioning work stage of numerically-controlled machine tool | |
| CN104485290B (en) | A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching | |
| CN203179557U (en) | Precise positioning one-dimensional platform | |
| CN202028928U (en) | Low-loading and high-speed XY working table | |
| CN103551862A (en) | Direct-driven micromotion platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130731 Termination date: 20180301 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |