CN104400763B - Gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment workbench - Google Patents
Gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment workbench Download PDFInfo
- Publication number
- CN104400763B CN104400763B CN201410591466.3A CN201410591466A CN104400763B CN 104400763 B CN104400763 B CN 104400763B CN 201410591466 A CN201410591466 A CN 201410591466A CN 104400763 B CN104400763 B CN 104400763B
- Authority
- CN
- China
- Prior art keywords
- air supporting
- working face
- guide rail
- supporting working
- slide plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/0007—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby for engines, motor-vehicles or bicycles
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment workbench belong to Precision Instrument and Machinery technical field; X is configured between base and Y-direction air supporting slide plate to air supporting slide plate, and X supports air film to being formed between the air supporting working face (x5) on air supporting slide plate and the air supporting working face (y3) on Y-direction air supporting slide plate, supporting Y-direction air supporting slide plate; Air supporting working face (z) on base and X are to the air supporting working face (x3) on air supporting slide plate and formed between air supporting working face (x4) and support air film, and X is to air supporting slide plate in supporting; Air supporting working face (z) of base is fixed with the guide rail (A) and (B) that are parallel to each other, on air supporting slide plate, is fixed with the guide rail (C) and guide rail (D) that are parallel to each other at X; Frictional damping unit (E1) and guide rail (A) contact with guide rail (B) and coordinate, and frictional damping unit (E2) and guide rail (C) contact with guide rail (D) and coordinate; The present invention establishes a kind of precision plane two-dimensional adjusting device taking into account high rigidity and high position stability.
Description
Technical field
The invention belongs to Precision Instrument and Machinery technical field, particularly a kind of gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment workbench.
Background technology
In recent years, along with advanced equipment manufacturing industry is gradually towards precise treatment and the development of superfinishing densification, the particularly continuous lifting of aero-engine performance, more and more higher to the required precision of engine process and assemble, especially, while the higher thrust-weight ratio of pursuit, the impact of factor on performance such as engine luggine, noise produced due to rigging error highlights gradually.This just proposes stern challenge to the test equipment performance of engine, has thus also had higher requirement to used adjustment positioning table performance.
2000, the people such as the Samir Mckid of French Compiegne polytechnical university were supported in the friction-driven workbench of development by hydrostatic slideway, and employed Zero-expansion material devitrified glass making guide rail, thus can reduce the requirement to environment.This table stroke is 220mm, positioning precision can reach 16nm. (Mekid S. High precision linear slide. Part I:design and construction [J]. International Journal of Machine Tools and Manufacture, 2000,40 (7): 1039 ~ 1050).
Calendar year 2001, the people such as the Shinno of Tokyo Institute of Technology have developed mixed straight line motor-driven two-stage drive Long Distances Ultraprecise platform, linear electric motors are adopted to carry out coarse positioning, voice coil motor precision positioning (Shinno H, Hashizume H. High speed nanometer positioning using a hybrid linear motor [J]. CIRP Annals-Manufacturing Technology, 2001,50 (1): 243 ~ 246).
The people such as the Chao.C.L of Taiwan Danjiang University also expand research to precision adjustment positioning table, and they adopt friction pulley to drive and the mode of air supporting designs workbench, use laser interferometer as feedback measurement mechanism.This workbench is in the environment of temperature 20 ± 1 DEG C with humidity 60 ± 5%, its positioning precision is better than 15nm (Chao.C.L, Neou J. Model reference adaptive control of air-lubricated capstan drive for precision positioning [J]. Precision engineering, 2000,24 (4): 285 ~ 290).
2003, the people such as Mao J, the Tachikawa H of Tokyo Institute of Technology, successfully have developed the ultraprecise nanopositioning stage adopting linear electric motors driving and static air pressure leading screw actuation techniques, and use aerostatic guide way to carry out supporting and leading, the positioning precision of whole workbench can reach ± 2nm (Mao J, Tachikawa H, Shimokohbe A. Precision positioning of a DC-motor-driven aerostatic slide system [J]. Precision engineering, 2003,27 (1): 32 ~ 41).
Above-mentioned motion platform all has higher positioning precision and displacement resolving power, but is all work in underloading situation, cannot meet the heavy load requirement of in aero-engine assembling hundreds of kilograms.
Patent CN201310166438 " Large-stroke micro-drive precise two-dimensional worktable " proposes a kind of Large-stroke micro-drive precise two-dimensional worktable, for one grand/micro-move device integrated structure; X comprises X to Long Distances feed arrangement and X to micro-feeding device to feed arrangement, and Y-direction feed arrangement comprises Y-direction Long Distances feed arrangement and Y-direction micro-feeding device; Y-direction Long Distances feed arrangement is arranged at X on micro-feeding device and can be mobile to the feed motion of micro-feeding device with X; The transition connecting plate of base is connected with lathe.
Patent CN200620072502 " large stroke and high precision two-dimentional work bench " proposes a kind of large stroke and high precision two-dimentional work bench, combined-type magnetic is adopted to float-rail plate, the version that the top guide face arranging two-dimensional movement workbench coincides with the measuring surface measuring grating, arranges and drives district and the isolation of workspace secondary.
Patent CN200920177016 " single-layer small stroke two-dimensional workbench " proposes a kind of single-layer small stroke two-dimensional workbench, be made up of fixing slide block, transition slide block, target slide block, leaf spring and adjustment screw, adopt ring-type plank frame, by the acting in conjunction of adjustment screw and leaf spring, make target slide block in same level layer, complete the movement of X-axis, Y-axis two-dimensional directional, the two-dimentional work bench solving general dual layer structure takies the problem of larger space.
The common problem that above-mentioned prior art exists is when large load, cannot realize the high displacement sensitivity of adjusting device and high reliability of positioning; In aero-engine alignment measurement, hundreds of kilograms are weighed because engine turns the revolving body such as stator and associated clamps assembly, its assembly work is directly carried out on the table, debug middle need and repeatedly adjust work in a large number to ensure assembly precision, while this just requires that the adjustment workbench used can bear large load, should meet and be easy to adjust workpiece, guarantee that adjustment aftertable has good position stability and enough rigidity again.
Summary of the invention
Object of the present invention is exactly for above-mentioned prior art Problems existing, proposes a kind of gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment workbench; By adopting gas lubrication to coordinate grating range finding, improve the kinematic accuracy of workbench; Made up the deficiency of gas lubrication position stability difference by the mode of frictional damping, improve stability and the rigidity of workbench.
Above-mentioned purpose is realized by following technical scheme:
A kind of gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment workbench, comprise base, X to air supporting slide plate, Y-direction air supporting slide plate, X to drive system, Y-direction drive system, work top, wireway and outside air supply system.
Described X is configured with air supporting working face x1, air supporting working face x2, air supporting working face x3, air supporting working face x4, air supporting working face x5, non-air supporting working face x6 and non-air supporting working face x7 on air supporting slide plate, wherein air supporting working face x1 and air supporting working face x2 is parallel to each other, air supporting working face x5 and air supporting working face x3 is parallel to each other, air supporting working face x3 and air supporting working face x4 is coplanar, and air supporting working face x1 is perpendicular to air supporting working face x3.
Described Y-direction air supporting slide plate is configured with air supporting working face y1, air supporting working face y2, air supporting working face y3, non-air supporting working face y4, non-air supporting working face y5 and non-air supporting working face y6, wherein air supporting working face y1 and air supporting working face y2 is parallel to each other, and air supporting working face y1 is perpendicular to air supporting working face y3.
Described X, to charged pressure gas between the air supporting working face y3 on the air supporting working face x5 on air supporting slide plate and Y-direction air supporting slide plate, forms supporting air film, supporting Y-direction air supporting slide plate.
The upper surface of described base is air supporting working face z, and at air supporting working face z and X to the air supporting working face x3 on air supporting slide plate and charged pressure gas between air supporting working face x4, form supporting air film, X is to air supporting slide plate in supporting; On air supporting working face z, centered by X-axis, upper and lower bilateral symmetry is fixed with guide rail A and guide rail B, guide rail A installation parallel with guide rail B; Air supporting working face a and X on guide rail A cooperatively interacts to the air supporting working face x1 on air supporting slide plate, charged pressure gas between air supporting working face a and air supporting working face x1, forms guiding air film; Air supporting working face b and X on guide rail B cooperatively interacts to the air supporting working face x2 on air supporting slide plate, charged pressure gas between air supporting working face b and air supporting working face x2, forms guiding air film.
At described X on the air supporting working face x1 and air supporting working face x2 of air supporting slide plate, be fixed with frictional damping unit E1, frictional damping unit E1 and guide rail A contact with guide rail B and coordinate;
On the air supporting working face x5 of X to air supporting slide plate, centered by Y-axis, arranged on left and right sides symmetry is fixed with guide rail C and guide rail D, guide rail C installation parallel with guide rail D; Air supporting working face y1 on air supporting working face c on guide rail C and Y-direction air supporting slide plate cooperatively interacts, charged pressure gas between air supporting working face c and air supporting working face y1, forms guiding air film; Air supporting working face y2 on air supporting working face d on guide rail D and Y-direction air supporting slide plate cooperatively interacts, charged pressure gas between air supporting working face d and air supporting working face y2, forms guiding air film.
On the air supporting working face y1 and air supporting working face y2 of described Y-direction air supporting slide plate, be fixed with frictional damping unit E2, frictional damping unit E2 and guide rail C contact with guide rail D and coordinate; On the non-air supporting working face y6 of Y-direction air supporting slide plate, offer multiple screwed hole, connect Y-direction air supporting slide plate and work top by screwed hole;
On the air supporting working face x1 of described X to air supporting slide plate, be fixed with grating scale F1, with the read head G1 adapted being arranged on guide rail A; On the air supporting working face y1 of described Y-direction air supporting slide plate, be fixed with grating scale F2, with the read head G2 adapted being arranged on guide rail C;
The non-air supporting working face x7 of described X to air supporting slide plate is fixed with stop W1, with the spacing trigger switch H1 adapted be packed on guide rail B, the non-air supporting working face y4 of described Y-direction air supporting slide plate is fixed with stop W2, with the spacing trigger switch H2 adapted be packed on guide rail D;
When X is to air supporting skateboarding, described frictional damping unit E1 does not contact with guide rail B with guide rail A, when X is to the stop motion of air supporting slide plate, and frictional damping unit E1 and guide rail A and guide rail B CONTACT WITH FRICTION.
When Y-direction air supporting skateboarding, described frictional damping unit E2 does not contact with guide rail D with guide rail C, when Y-direction air supporting slide plate stop motion, and frictional damping unit E2 and guide rail C and guide rail D CONTACT WITH FRICTION.
Described frictional damping unit E1 is symmetrical form configuration on air supporting working face x1, symmetrical form configuration on air supporting working face x2.
Described frictional damping unit E2 is symmetrical form configuration on air supporting working face y1, symmetrical form configuration on air supporting working face y2.
Described frictional damping unit E1 and the frictional force size between guide rail A and guide rail B adjustable, frictional damping unit E2 and the frictional force size between guide rail C and guide rail D adjustable.
The present invention has following characteristics and beneficial effect:
1, apparatus of the present invention all adopt gas lubrication structure along the motion guide of X-axis and Y-axis and supporting, significantly improve the linear movement guide precision of device, improve the displacement sensitivity of device;
2, apparatus of the present invention adopt the mode of grating range finding, coordinate the guide effect of gas lubrication, carry out Real-Time Monitoring, improve the adjustment positioning precision of device to device along the movement position of X-axis and Y-axis;
3, apparatus of the present invention compensate for the deficiency of gas lubrication position stability difference by the mode of frictional damping, improve position stability and the rigidity of workbench, achieve the instructions for use simultaneously taken into account adjusting device high accuracy, high rigidity, high stability.
Apparatus of the present invention are specially adapted to aero-engine quiet rotor alignment measurement occasion, solve the problem that the accurate adjustment of heavy load and super large load scenarios lower plane two-dimensional adjusting device and high position stability are taken into account.
Accompanying drawing explanation
Fig. 1 is gas lubrication and the frictional damping combined type high rigidity high stability two-dimension adjustment Working table structure schematic diagram of band workbench and outside air supply system;
Fig. 2 is gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment Working table structure schematic diagram;
Fig. 3 is that X is to air supporting skateboard schematic diagram;
Fig. 4 is Y-direction air supporting skateboard schematic diagram.
In figure: 1, base; 2, X is to air supporting slide plate; 3, Y-direction air supporting slide plate; 4, X is to drive system; 5, Y-direction drive system; 6, work top; 7, wireway; 8, outside air supply system; 9, screwed hole; A, guide rail A; B, guide rail B; C, guide rail C; D, guide rail D; E1, frictional damping unit E1; E2, frictional damping unit E2; F1, grating scale F1; F2, grating scale F2; G1, read head G1; G2, read head G2; H1, spacing trigger switch H1; H2, spacing trigger switch H2; W1, stop W1; W2, stop W2; A, air supporting working face a; B, air supporting working face b; C, air supporting working face c; D, air supporting working face d; X1, air supporting working face x1; X2, air supporting working face x2; X3, air supporting working face x4; X4, air supporting working face x4; X5, air supporting working face x5; X6, non-air supporting working face x6; X7, non-air supporting working face x7; Y1, air supporting working face y1; Y2, air supporting working face y2; Y3, air supporting working face y3; Y4, non-air supporting working face y4; Y5, non-air supporting working face y5; Y6, non-air supporting working face y6.
Detailed description of the invention
Below in conjunction with accompanying drawing, embodiments of the invention are elaborated.
A kind of gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment workbench, comprise base 1, X to air supporting slide plate 2, Y-direction air supporting slide plate 3, X to drive system 4, Y-direction drive system 5, work top 6, wireway 7 and outside air supply system 8.
Described X is configured with air supporting working face x1, air supporting working face x2, air supporting working face x3, air supporting working face x4, air supporting working face x5, non-air supporting working face x6 and non-air supporting working face x7 on air supporting slide plate 2, wherein air supporting working face x1 and air supporting working face x2 is parallel to each other, air supporting working face x5 and air supporting working face x3 is parallel to each other, air supporting working face x3 and air supporting working face x4 is coplanar, and air supporting working face x1 is perpendicular to air supporting working face x3.
Described Y-direction air supporting slide plate 3 is configured with air supporting working face y1, air supporting working face y2, air supporting working face y3, non-air supporting working face y4, non-air supporting working face y5 and non-air supporting working face y6, wherein air supporting working face y1 and air supporting working face y2 is parallel to each other, and air supporting working face y1 is perpendicular to air supporting working face y3.
Described X, to charged pressure gas between the air supporting working face y3 on the air supporting working face x5 on air supporting slide plate 2 and Y-direction air supporting slide plate 3, forms supporting air film, supporting Y-direction air supporting slide plate 3.
The upper surface of described base 1 is air supporting working face z, and at air supporting working face z and X to the air supporting working face x3 on air supporting slide plate 2 and charged pressure gas between air supporting working face x4, form supporting air film, X is to air supporting slide plate 2 in supporting; On air supporting working face z, centered by X-axis, upper and lower bilateral symmetry is fixed with guide rail A and guide rail B, guide rail A installation parallel with guide rail B; Air supporting working face a and X on guide rail A cooperatively interacts to the air supporting working face x1 on air supporting slide plate 2, charged pressure gas between air supporting working face a and air supporting working face x1, forms guiding air film; Air supporting working face b and X on guide rail B cooperatively interacts to the air supporting working face x2 on air supporting slide plate 2, charged pressure gas between air supporting working face b and air supporting working face x2, forms guiding air film.
At described X on the air supporting working face x1 and air supporting working face x2 of air supporting slide plate 2, the one end of the frictional damping unit E1 that is connected, the other end of frictional damping unit E1 matches with the guide rail below it and contacts.
On the air supporting working face x5 of X to air supporting slide plate 2, centered by Y-axis, arranged on left and right sides symmetry is fixed with guide rail C and guide rail D, guide rail C installation parallel with guide rail D; Air supporting working face c on guide rail C and air supporting working face y1 cooperatively interacts, charged pressure gas between the air supporting working face y1 on air supporting working face c and Y-direction air supporting slide plate 3, forms guiding air film; Air supporting working face y2 on air supporting working face d on guide rail D and Y-direction air supporting slide plate 3 cooperatively interacts, charged pressure gas between air supporting working face d and air supporting working face y2, forms guiding air film.
On the air supporting working face y1 and air supporting working face y2 of described Y-direction air supporting slide plate 3, the one end of the frictional damping unit E2 that is connected, the other end of frictional damping unit E2 matches with the guide rail below it and contacts.
On the non-air supporting working face y6 of described Y-direction air supporting slide plate 3, offer multiple screwed hole 9, be connected by screwed hole 9 and work top 6.
On the air supporting working face x1 of described X to air supporting slide plate 2, be fixed with grating scale F1, with the read head G1 adapted being arranged on guide rail A; On the air supporting working face y1 of described Y-direction air supporting slide plate 3, be fixed with grating scale F2, with the read head G2 adapted being arranged on guide rail C.
The non-air supporting working face x7 of described X to air supporting slide plate 2 is fixed with stop W1, with the spacing trigger switch H1 adapted be packed on guide rail B, the non-air supporting working face y4 of described Y-direction air supporting slide plate 3 is fixed with stop W2, with the spacing trigger switch H2 adapted be packed on guide rail D.
During X moving to air supporting slide plate 2 along X-axis, air supply system 8 by wireway 7 be X to air supporting slide plate 2 air feed, air supporting working face z forms vertical supporting to air supporting working face x3 and air supporting working face x4; Simultaneously between air supporting working face a and air supporting working face x1, guided bearing is formed between air supporting working face b and air supporting working face x2; X drives X to move to air supporting slide plate 2 along X-axis to drive system 4, and movement position coordinates grating scale F1 to carry out Real-Time Monitoring by read head G1, when moving to extreme position, starts position limitation protection by spacing trigger switch H1; When X moves to assigned address to air supporting slide plate 2, starting friction damping unit E1, carries out frictional damping location;
During the motion of Y-direction air supporting slide plate 3Y axle, air supply system 8 is Y-direction air supporting slide plate 3 air feed by wireway 7, and air supporting working face x5 forms vertical supporting to air supporting working face y3; Simultaneously between air supporting working face c and air supporting working face y1, guided bearing is formed between air supporting working face d and air supporting working face y2; Y-direction drive system 5 drives Y-direction air supporting slide plate 3 to move along Y-axis, and movement position coordinates grating scale F2 to carry out Real-Time Monitoring by read head G2, when moving to extreme position, starts position limitation protection by trigger switch H2; When Y-direction air supporting slide plate 3 moves to assigned address, starting friction damping unit E2, carries out frictional damping location.
When X moves to air supporting slide plate 2, described frictional damping unit E1 does not contact with guide rail B with guide rail A, when X is to 2 stop motion of air supporting slide plate, and frictional damping unit E1 and guide rail A and guide rail B CONTACT WITH FRICTION.
When Y-direction air supporting slide plate 3 moves, described frictional damping unit E2 does not contact with guide rail D with guide rail C, when Y-direction air supporting slide plate 3 stop motion, and frictional damping unit E2 and guide rail C and guide rail D CONTACT WITH FRICTION.
Described frictional damping unit E1 on air supporting working face x1 two in symmetric configuration, on air supporting working face x2 two in symmetric configuration.
Described frictional damping unit E2 on air supporting working face y1 two in symmetric configuration, on air supporting working face y2 two in symmetric configuration.
Described frictional damping unit E1 and the frictional force size between guide rail A and guide rail B adjustable, frictional damping unit E2 and the frictional force size between guide rail C and guide rail D adjustable.
Claims (6)
1. a gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment workbench, comprise base (1), X to air supporting slide plate (2), Y-direction air supporting slide plate (3), X to drive system (4), Y-direction drive system (5), work top (6), wireway (7) and outside air supply system (8), it is characterized in that:
Described X is configured with air supporting working face (x1) on air supporting slide plate (2), air supporting working face (x2), air supporting working face (x3), air supporting working face (x4), air supporting working face (x5), non-air supporting working face (x6) and non-air supporting working face (x7), wherein air supporting working face (x1) and air supporting working face (x2) are parallel to each other, air supporting working face (x5) and air supporting working face (x3) are parallel to each other, air supporting working face (x3) and air supporting working face (x4) coplanar, air supporting working face (x1) is perpendicular to air supporting working face (x3),
Described Y-direction air supporting slide plate (3) is configured with air supporting working face (y1), air supporting working face (y2), air supporting working face (y3), non-air supporting working face (y4), non-air supporting working face (y5) and non-air supporting working face (y6), wherein air supporting working face (y1) and air supporting working face (y2) are parallel to each other, and air supporting working face (y1) is perpendicular to air supporting working face (y3);
Described X is to charged pressure gas between the air supporting working face (x5) on air supporting slide plate (2) and the air supporting working face (y3) on Y-direction air supporting slide plate (3), form supporting air film, supporting Y-direction air supporting slide plate (3);
The upper surface of described base (1) is air supporting working face (z), at air supporting working face (z) and X to the air supporting working face (x3) on air supporting slide plate (2) and charged pressure gas between air supporting working face (x4), form supporting air film, X is to air supporting slide plate (2) in supporting; In air supporting working face (z), centered by X-axis, upper and lower bilateral symmetry is fixed with guide rail (A) and guide rail (B), guide rail (A) and guide rail (B) parallel installation; Air supporting working face (a) on guide rail (A) and X cooperatively interact to the air supporting working face (x1) on air supporting slide plate (2), charged pressure gas between air supporting working face (a) and air supporting working face (x1), forms guiding air film; Air supporting working face (b) on guide rail (B) and X cooperatively interact to the air supporting working face (x2) on air supporting slide plate (2), charged pressure gas between air supporting working face (b) and air supporting working face (x2), forms guiding air film;
At described X on the air supporting working face (x1) and air supporting working face (x2) of air supporting slide plate (2), be fixed with frictional damping unit (E1), frictional damping unit (E1) and guide rail (A) contact with guide rail (B) and coordinate;
On the air supporting working face (x5) of X to air supporting slide plate (2), centered by Y-axis, arranged on left and right sides symmetry is fixed with guide rail (C) and guide rail (D), guide rail (C) and guide rail (D) parallel installation; Air supporting working face (c) on guide rail (C) cooperatively interacts with the air supporting working face (y1) on Y-direction air supporting slide plate (3), charged pressure gas between air supporting working face (c) and air supporting working face (y1), forms guiding air film; Air supporting working face (d) on guide rail (D) cooperatively interacts with the air supporting working face (y2) on Y-direction air supporting slide plate (3), charged pressure gas between air supporting working face (d) and air supporting working face (y2), forms guiding air film;
On the air supporting working face (y1) and air supporting working face (y2) of described Y-direction air supporting slide plate (3), be fixed with frictional damping unit (E2), frictional damping unit (E2) and guide rail (C) contact with guide rail (D) and coordinate; On the non-air supporting working face (y6) of Y-direction air supporting slide plate (3), offer multiple screwed hole (9), connect Y-direction air supporting slide plate (3) and work top (6) by screwed hole (9);
On the air supporting working face (x1) of described X to air supporting slide plate (2), be fixed with grating scale (F1), with read head (G1) adapted being arranged on guide rail (A); On the air supporting working face (y1) of described Y-direction air supporting slide plate (3), be fixed with grating scale (F2), with read head (G2) adapted being arranged on guide rail (C);
The non-air supporting working face (x7) of described X to air supporting slide plate (2) is fixed with stop (W1), with spacing trigger switch (H1) adapted be packed on guide rail (B), the non-air supporting working face (y4) of described Y-direction air supporting slide plate (3) is fixed with stop (W2), with spacing trigger switch (H2) adapted be packed on guide rail (D).
2. gas lubrication according to claim 1 and frictional damping combined type high rigidity high stability two-dimension adjustment workbench, it is characterized in that: when X moves to air supporting slide plate (2), described frictional damping unit (E1) does not contact with guide rail (B) with guide rail (A), when X is to air supporting slide plate (2) stop motion, frictional damping unit (E1) and guide rail (A) and guide rail (B) CONTACT WITH FRICTION.
3. gas lubrication according to claim 1 and frictional damping combined type high rigidity high stability two-dimension adjustment workbench, it is characterized in that: when Y-direction air supporting slide plate (3) moves, described frictional damping unit (E2) does not contact with guide rail (D) with guide rail (C), when Y-direction air supporting slide plate (3) stop motion, frictional damping unit (E2) and guide rail (C) and guide rail (D) CONTACT WITH FRICTION.
4. gas lubrication according to claim 1 and frictional damping combined type high rigidity high stability two-dimension adjustment workbench, it is characterized in that: described frictional damping unit (E1), in the upper symmetrical form configuration of air supporting working face (x1), configures in the upper symmetrical form of air supporting working face (x2).
5. gas lubrication according to claim 1 and frictional damping combined type high rigidity high stability two-dimension adjustment workbench, it is characterized in that: described frictional damping unit (E2), in the upper symmetrical form configuration of air supporting working face (y1), configures in the upper symmetrical form of air supporting working face (y2).
6. gas lubrication according to claim 1 and frictional damping combined type high rigidity high stability two-dimension adjustment workbench, it is characterized in that: described frictional damping unit (E1) and the frictional force size between guide rail (A) and guide rail (B) adjustable, frictional damping unit (E2) and the frictional force size between guide rail (C) and guide rail (D) adjustable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410591466.3A CN104400763B (en) | 2014-10-29 | 2014-10-29 | Gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment workbench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410591466.3A CN104400763B (en) | 2014-10-29 | 2014-10-29 | Gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment workbench |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104400763A CN104400763A (en) | 2015-03-11 |
| CN104400763B true CN104400763B (en) | 2015-10-07 |
Family
ID=52638461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410591466.3A Active CN104400763B (en) | 2014-10-29 | 2014-10-29 | Gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment workbench |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104400763B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105252505B (en) * | 2015-11-30 | 2017-04-26 | 中国计量科学研究院 | Precise air-floatation displacement platform |
| CN106958590B (en) * | 2016-08-08 | 2019-02-05 | 哈尔滨工业大学 | The gas/solid combined type high-precision linear movement reference device of multiple degrees of freedom decoupling driving |
| CN107965485B (en) * | 2016-10-20 | 2019-09-17 | 北京精密机电控制设备研究所 | A kind of accurate positioning device for the debugging of local derviation jet servo valve prestage |
| CN107941279B (en) * | 2017-12-06 | 2019-12-03 | 合肥工业大学 | For measuring the measuring device of air film various parameters in air-flotation system |
| CN109605290A (en) * | 2019-01-25 | 2019-04-12 | 江苏塔帝思智能科技有限公司 | A kind of flexibility positioning table |
| CN112207773A (en) * | 2020-08-28 | 2021-01-12 | 南京沃瑞新能源科技有限公司 | Automatic positioning and fixing platform for new energy product production and manufacturing and use method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040182176A1 (en) * | 2003-03-21 | 2004-09-23 | Huang Han Chang | Three-dimensional measure device with air bearings |
| CN100575887C (en) * | 2008-11-14 | 2009-12-30 | 哈尔滨工业大学 | Horizontal gas/gas two-phase composite straight line reference method and device based on gravitational equilibrium |
| CN101403629B (en) * | 2008-11-14 | 2010-05-12 | 哈尔滨工业大学 | Vertical straight line reference method and apparatus based on external support type gas/gas two-phase combination |
-
2014
- 2014-10-29 CN CN201410591466.3A patent/CN104400763B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040182176A1 (en) * | 2003-03-21 | 2004-09-23 | Huang Han Chang | Three-dimensional measure device with air bearings |
| CN100575887C (en) * | 2008-11-14 | 2009-12-30 | 哈尔滨工业大学 | Horizontal gas/gas two-phase composite straight line reference method and device based on gravitational equilibrium |
| CN101403629B (en) * | 2008-11-14 | 2010-05-12 | 哈尔滨工业大学 | Vertical straight line reference method and apparatus based on external support type gas/gas two-phase combination |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104400763A (en) | 2015-03-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104400763B (en) | Gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment workbench | |
| CN103170845B (en) | Accuracy compensation method of coaxial macro-micro composite linear motion platform device | |
| CN103252761B (en) | There is the Long Distances two-dimensional nano work system of angle compensation function | |
| CN102145456B (en) | Tabletop milling machine, gantry tabletop milling machine and combined motion platform | |
| CN101241314B (en) | 6 freedom degrees precision positioning station capable of compensating Z-direction position | |
| JP5329349B2 (en) | Ultra-precision machine tool | |
| CN104440344A (en) | Co-stator multi-drive macro and micro integration high-speed precision movement two-dimensional platform for linear motor | |
| CN103226296B (en) | Rough-fine-movement laminated workbench with laser interferometer measurement | |
| CN104364893A (en) | A planar positioning system and method of using the same | |
| CN108817993A (en) | A kind of vertical liquid hydrostatic slideway servo feed system | |
| CN101386141A (en) | Mixed straight line gyration quick cutter servo device | |
| CN202106070U (en) | Desktop milling machine, gantry type desktop milling machine and combined moving platform | |
| CN203092144U (en) | Coaxial macro-micro composite linear motion platform device | |
| CN105290805A (en) | Parallel X-Y work table | |
| CN109227151B (en) | Multi-head efficient machining center | |
| CN109327126B (en) | A kind of linear motion device based on dynamic magnet steel arranged side by side | |
| CN101746711B (en) | H-shaped two-dimensional ultraprecise worktable structure | |
| CN104656682A (en) | Macro and micro two-stage driving precision positioning mechanism | |
| CN104400414B (en) | Based on the aero-engine alignment measurement integration aligning method and apparatus of close pearl rolling bearing | |
| CN103698984B (en) | A kind of superfinishing scanning plated film and location lithographic equipment | |
| CN104400374B (en) | Two frames coplanar guide type aligning method and apparatus of stator alignment measurement is turned for aero-engine | |
| CN105157661A (en) | Large travel submicron plane precision measuring system | |
| CN104440810B (en) | Based on the aero-engine alignment measurement system two dimension drive unit of plane crossing decoupling | |
| CN104440809B (en) | Planar adjusting device is used in the assembling of restoring force constant type aero-engine | |
| CN104440808B (en) | Aero-engine based on peripheral force decoupling zero turns stator two-freedom adjustment positioner |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |