CN103252761B - There is the Long Distances two-dimensional nano work system of angle compensation function - Google Patents

There is the Long Distances two-dimensional nano work system of angle compensation function Download PDF

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CN103252761B
CN103252761B CN201310156056.1A CN201310156056A CN103252761B CN 103252761 B CN103252761 B CN 103252761B CN 201310156056 A CN201310156056 A CN 201310156056A CN 103252761 B CN103252761 B CN 103252761B
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plate
piezoelectric ceramics
freedom
degrees
long distances
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CN103252761A (en
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黄强先
张昔峰
袁钰
韩彬
胡小娟
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Hefei University of Technology
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Hefei University of Technology
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Abstract

The invention discloses a kind of Long Distances two-dimensional nano work system with angle compensation function, adopt the six-freedom micro displacement worktable designed based on piezoelectric actuator and flexible hinge Long Distances two-dimentional work bench to be carried out to the comprehensive compensation of straight line location and angular error.In the present invention, Long Distances two-dimentional work bench adopts stepper motor in conjunction with the type of drive of ball-screw, and have the larger angle of pitch, deflection angle, roll angle error, positioning precision is at micron order; Six-freedom micro displacement worktable has the precise angular positions of nano level the linear positions and Millisecond.Both combine, and constitute Long Distances two-dimensional nano work system.This system carries out the comprehensive compensation of straight line position error and angular error under the control of closed-loop control system to Long Distances two-dimensional nano workbench by six-freedom micro displacement worktable, achieve two-dimensional large-stroke nanometer positioning.

Description

There is the Long Distances two-dimensional nano work system of angle compensation function
Technical field
The present invention relates to large scale and high accuracy positioning table system regions, be specially a kind of Long Distances two-dimensional nano work system with angle compensation function.
Background technology
In measuring system, workbench not only needs to have high the linear positions, and needs to reduce its movement angle error as much as possible.The angular error of workbench has amplification to its position error, and especially in the measuring system running counter to abbe ' s principle, the Abbe error caused because of lathe of work level angle error and Abbe arm be can not ignore especially.Traditional x-y two-dimentional work bench is many can the workbench of single axial movement be formed by stacking by two, the imperfection of guide rail causes sports platform to produce pitching, beat and rolling pendulum motion, if now two workbench spatially exist difference in height, then the position error of guide rail can be amplified on the measurement plane be reflected to residing for objective table.Such as stacking two-dimensional measurement platform, two guide rail movement faces do not overlap, and there is the difference in height of S=5cm, and lower floor's working table movement angle of inclination is, then give motion positions error=250nm that last layer workbench causes, this error magnitude be can not ignore for nano measurement.In general precision measuring system, the compensation can carrying out to a certain degree to this error by software compensation, but in nano-level measuring system, due to the change of workbench force deformation and measurement environment, or even the difference of workpiece location all can cause the additional micro-strain of workbench, when measuring machine stroke is larger, depends merely on compensation and be difficult to reach nanoscale.In order to head it off, researched and proposed copline Guide Rail Design scheme, the copline of this guiding and measuring surface designs, and eliminates guide track angle kinematic error and rail height difference to the amplification of platform position error.But when measuring, for the measured piece having certain altitude, the angular error of workbench still can introduce the measure error of can not ignore, and this error along with the shape of workpiece and placement location different and change, be difficult to compensate.By improving the machining accuracy of table slide and assembly precision has certain effect to the position error and angular deviation that reduce workbench, but under Long Distances and high-precision requirement, cost is high and be difficult to realize.
Summary of the invention
The object of this invention is to provide a kind of Long Distances two-dimensional nano work system with angle compensation function, to solve prior art Problems existing.
In order to achieve the above object, the technical solution adopted in the present invention is:
There is the Long Distances two-dimensional nano work system of angle compensation function, it is characterized in that: include base, the Long Distances two-dimentional work bench be arranged on base, the six-freedom micro displacement worktable supported by Long Distances two-dimentional work bench, be distributed in outer and two the Optical length measurement angle measuring systems mutually in 90 degree of angles of six-freedom micro displacement worktable two sides adjacent, wherein:
Described Long Distances two-dimentional work bench is formed by stacking by the two groups of single axis table top-bottom cross arranged along X to, Y-direction respectively, each single axis table is secondary as director element using cycle ball guide, coordinate ball-screw for type of drive with stepper motor, wherein superposed single axis table is fixed on the guide rail slide block of the single axis table being positioned at bottom;
The driving element of described six-freedom micro displacement worktable is piezoelectric ceramics, eight piezoelectric ceramics used are all undertaken clamping and pretension by the unstressed clamping pre-tightening mechanism of piezoelectric ceramics, guiding mechanism is flexible hinge elastic guide, six-freedom micro displacement worktable comprises connecting plate, rigidly connected on the guide rail slide block that described connecting plate is arranged on superposed single axis table in Long Distances two-dimentional work bench, connecting plate is provided with four groups of Piezoelectric Ceramic unit along Z-direction, four groups of Piezoelectric Ceramic unit are centrosymmetric and surround rectangle on connecting plate, and the side of rectangle respectively with X to, Y-direction is parallel, connecting plate is also supported with multiple degrees of freedom plate, described multiple degrees of freedom plate is by housing, be arranged on the center in housing and be arranged on the interior substrate formation in center, described multiple degrees of freedom plate is fixed on the rectangular top of four groups of Piezoelectric Ceramic unit compositions by substrate in it, and multiple degrees of freedom plate side is parallel with the rectangular edges that four groups of Piezoelectric Ceramic unit form, two Optical length measurement angle measuring systems are distributed in outside the adjacent side of multiple degrees of freedom plate two, the edge top that multiple degrees of freedom plate housing is positioned at one of them Optical length measurement angle measuring system homonymy is provided with X-axis reflector alignment support, the edge top that multiple degrees of freedom plate housing is positioned at another Optical length measurement angle measuring system homonymy is provided with Y-axis reflector alignment support, X-axis reflector alignment support and Y-axis reflector alignment support are distributed in the outer arch of multiple degrees of freedom plate in 90 degree each other, and X-axis reflector alignment cradle top is provided with as the X-axis speculum of X to Optical length measurement angle measuring system target mirror, Y-axis reflector alignment cradle top is provided with the Y-axis speculum as Y-direction Optical length measurement angle measuring system target mirror, X-axis speculum, the multiple degrees of freedom plate housing edge top of Y-axis speculum offside is separately separately installed with reflector alignment support, reflector alignment support is fixed with respectively the balancing weight of balance contralateral reflex mirror weight, described X, Y-axis reflector alignment support and X, the reflector alignment support of the counterweight of Y-axis reflector alignment support offside connects formation shaped as frame in multiple degrees of freedom plate housing top frame, and the outer arch of multiple degrees of freedom plate in the middle of shaped as frame is also provided with objective table.
The described Long Distances two-dimensional nano work system with angle compensation function, is characterized in that: described Optical length measurement angle measuring system is made up of photoelectric auto-collimator and Michelson laser interferometer respectively.
The described Long Distances two-dimensional nano work system with angle compensation function, it is characterized in that: described piezoelectric ceramics is unstressed, and clamping pre-tightening mechanism comprises rectangular piezoelectric ceramic, the unstressed pad be clamped on piezoelectric ceramics top and bottom insulation potsherd respectively, be embedded in the steel ball of the diameter 3mm between the bellmouth of one of them pad and the bellmouth of fixing base, be embedded in the steel ball of the diameter 3mm between the bellmouth of another pad and pre-loading screw head bellmouth, pre-loading screw and pre-load nut, the front of pad is processed with chute, the back side of pad is processed with bellmouth, two pad vis-a-vis and make chute direction become an angle of 90 degrees be stuck on the insulating ceramic film at piezoelectric ceramics two ends, the position of piezoelectric ceramics is defined, and the existence of chute makes when the bellmouth of pre-loading screw and fixing base is due to processing and the low and disalignment of assembly precision, two pads can to carry out small slip to compensate the additional stress of bellmouth owing to may introduce when processing and the low and disalignment of assembly precision due to pre-loading screw and fixing base along chute direction when assembling, the back side of two pads, the front end of fixing base and pre-loading screw is all processed with bellmouth, the steel ball of diameter 3mm is stuck in wherein, location and transmitting force is played between corresponding two bellmouths, the pretension of piezoelectric ceramics is by being embedded in pre-load nut in moving substrate and pre-loading screw realizes, pitch used is 0.35mm.
The described Long Distances two-dimensional nano work system with angle compensation function, it is characterized in that: multiple degrees of freedom plate adopts 7075 aluminium alloys to form through linear cutter, by interior substrate, center and housing are formed, two piezoelectric ceramics are installed between interior substrate and center, the clamping of two piezoelectric ceramics is consistent with described piezoelectric ceramics unstressed clamping pre-tightening mechanism structure with firmly beforehand means, when two potteries between interior substrate and center extend simultaneously, center rotates relative to interior substrate, X-direction piezoelectric ceramics and Y-direction piezoelectric ceramics is separately installed with in X direction and along Y-direction between center and housing, the clamping of two piezoelectric ceramics is consistent with described piezoelectric ceramics unstressed clamping pre-tightening mechanism structure with firmly beforehand means, when X-direction piezoelectric ceramics extends, housing moves to X-direction relative to center, when Y-direction piezoelectric ceramics extends, housing moves to Y-direction relative to center, when X-direction piezoelectric ceramics and Y-direction piezoelectric ceramics extend simultaneously, the relative center of housing does the resultant motion along XY direction, the surrounding of interior substrate is evenly equipped with four groups of Z-direction Piezoelectric Ceramic unit fixing holes and four Z-direction Piezoelectric Ceramic unit pre-loading screw holes, the corner, outside of interior substrate is processed with parallel-plate flexible hinge respectively, interior substrate is connected by four groups of parallel-plate flexible hinges with center, the outer corner of edge of center is processed with two-way parallel-plate flexible hinge respectively, center is connected by two-way parallel-plate flexible hinge with housing, uniform totally eight the objective table fixing holes in frame mouth corner of housing, housing drives pottery in outside and X-direction, the position that Y-direction drives ceramic phase right uniform three reflector alignment support fixing holes respectively, X-direction drives pottery, Y-direction drives the position of ceramic homonymy to be evenly equipped with two reflector alignment support fixing holes respectively.
The described Long Distances two-dimensional nano work system with angle compensation function, is characterized in that: described flexible hinge is parallel-plate flexible hinge.
The described Long Distances two-dimensional nano work system with angle compensation function, it is characterized in that: Z-direction Piezoelectric Ceramic unit is by matrix, the piezoelectric ceramics arranged in the base is formed, the clamping of piezoelectric ceramics is consistent with described piezoelectric ceramics unstressed clamping pre-tightening mechanism structure with firmly beforehand means, wherein the top of matrix is provided with connecting hole, the top center of matrix has through hole, the bottom of matrix is provided with lower connecting hole, described base bottom is bolted on connecting plate by being arranged in lower connecting hole, together with the upper connecting hole of described baseline top is bolted on the Z-direction Piezoelectric Ceramic unit fixing hole of substrate in multiple degrees of freedom plate, pre-load nut embeds in the Z-direction Piezoelectric Ceramic unit pre-loading screw hole in multiple degrees of freedom plate on substrate, pre-loading screw screws on the upside of multiple degrees of freedom plate, through the through hole at baseline top center, piezoelectric ceramics is clamped and pretension.
The present invention is based on the design that grand microassembly type of drive proposes a kind of Long Distances two-dimensional nano workbench, adopt the six-freedom micro displacement worktable based on piezoelectric actuator and flexible hinge design to position grand station of starting building and the comprehensive compensation of angular error, improve the precision of whole work system to greatest extent.
Beneficial effect of the present invention is: the large moving range with 200mm × 200mm, with low cost, controls simple; Control mode is simple, need not complicated algorithm, and between each free degree, hunt effect is little; There is the advantage that range of movement is large, positioning precision is high, movement angle error is little, with low cost.
Accompanying drawing explanation
Fig. 1 is overall structure schematic diagram of the present invention.
Fig. 2 is Long Distances two-dimentional work bench structure chart of the present invention.
Fig. 3 is six-freedom micro displacement worktable structure chart of the present invention.
Fig. 4 is the unstressed clamping pre-tightening mechanism of piezoelectric ceramics of the present invention.
Fig. 5 is that multiple degrees of freedom of the present invention hardens composition.
Fig. 6 is Z-direction Piezoelectric Ceramic cellular construction figure of the present invention.
Detailed description of the invention
See Fig. 1, Fig. 2, Fig. 3, the present invention includes a base 1, Long Distances two-dimentional work bench 5, six-freedom micro displacement worktable 3, two and overlap the Optical length measurement angle measuring system 2 and 4 of arranging in 90 degree of angles; For making the X of stage positioning systems, Y-axis the linear positions reaches nanoscale, the rectilinear motion of six-freedom micro displacement worktable 3 is utilized to carry out the compensation of straight line position error to Long Distances two-dimentional work bench 5, for making stage positioning systems obtain minimum angular error, by the rotating angle movement of 6-freedom micro-motion platform 3, Long Distances two-dimentional work bench 5 is carried out to the compensation of angular error;
Long Distances two-dimentional work bench 5 is formed by stacking by the two groups of single axis table top-bottom cross arranged along X to, Y-direction respectively, each single axis table is using cycle ball guide pair 7 as director element, coordinate ball-screw 8 as type of drive using stepper motor 6, wherein superposed single axis table is fixed on the guide rail slide block 10 of the single axis table being positioned at bottom, and Long Distances two-dimentional work bench 5 stroke after superposition is 200mm × 200mm.
The guide rail slide block 9 that six-freedom micro displacement worktable 3 passes through the superposed single axis table of keyset 11 and Long Distances two-dimentional work bench 5 is rigidly connected, the four groups of Z-direction Piezoelectric Ceramic unit 12 be fixed on keyset 11 provide workbench along the lifting of Z-direction with around X-axis, the rotation of Y-axis, four groups of Z-direction Piezoelectric Ceramic unit 12 are centrosymmetric and surround rectangle on connecting plate 11, and the side of rectangle respectively with X to, Y-direction is parallel, multiple degrees of freedom plate 13 is fixed on the rectangular top of four groups of Piezoelectric Ceramic unit 12 compositions by substrate in it 39, and multiple degrees of freedom plate 13 side is parallel with the rectangular edges that four groups of Piezoelectric Ceramic unit 12 form, two Optical length measurement angle measuring systems 2 and 4 are distributed in outside the adjacent side of multiple degrees of freedom plate 13 liang, workbench is in X direction with the translation of Y-direction and realized by multiple degrees of freedom plate 13 around the rotation of Z axis, the interior substrate 39 of multiple degrees of freedom plate 13 is connected with the Z-direction Piezoelectric Ceramic unit fixing hole 38 of four groups of Z-direction Piezoelectric Ceramic unit 12 by interior substrate 39 surrounding, the elevating movement that four Z-direction Piezoelectric Ceramic unit 12 aggregate motions are produced can pass to multiple degrees of freedom plate 13, the edge top that multiple degrees of freedom plate 13 housing 41 is positioned at one of them Optical length measurement angle measuring system homonymy is provided with X-axis reflector alignment support 17, the edge top that multiple degrees of freedom plate housing is positioned at another Optical length measurement angle measuring system homonymy is provided with Y-axis reflector alignment support 14, X-axis reflector alignment support 17 and Y-axis reflector alignment support 14 are distributed in housing 41 top of multiple degrees of freedom plate 13 each other in 90 degree, be connected with the housing 41 of multiple degrees of freedom plate 13 by three screws, there is the fine adjustment function of deflection angle and the angle of pitch, and X-axis reflector alignment support 17 top is provided with as the X-axis speculum 16 of X to Optical length measurement angle measuring system target mirror, Y-axis reflector alignment support 14 top is provided with the Y-axis speculum 15 as Y-direction Optical length measurement angle measuring system target mirror, X-axis speculum 16, the multiple degrees of freedom plate housing edge top of the respective offside of Y-axis speculum 15 is separately installed with reflector alignment support 21 and 20, reflector alignment support 21 and 20 is fixed with respectively the balancing weight 22 and 19 of balance contralateral reflex mirror weight, described X, Y-axis reflector alignment support 17 and 14 and X, the reflector alignment support 21 and 20 of the counterweight of Y-axis reflector alignment support offside connects formation shaped as frame in multiple degrees of freedom plate housing top frame, and the outer arch of multiple degrees of freedom plate in the middle of shaped as frame is also provided with objective table 18, objective table 18 is connected by the housing 41 of screw with how free plate 13.
Long Distances two-dimentional work bench 5 and six-freedom micro displacement worktable 3 adopt the position detecting system 2 and 4 shared, position detecting system 2 is made up of photoelectric auto-collimator and Michelson laser interferometer two parts, and the structure of position detecting system 4 is identical with position detecting system 2; Photoelectric auto-collimator is for measuring the angle of pitch and the deflection angle of objective table 18, and Michelson laser interferometer is for measuring the straight line position error of objective table 18; Position detecting system 2 becomes the high accuracy strip plane mirror 16 and 15 of 90 degree of angles layouts for target mirror with 4 with two of being fixed on six-freedom micro displacement worktable 3, the accumulated error introduced because of measuring basis disunity when avoiding Long Distances two-dimentional work bench 5 and six-freedom micro displacement worktable 3 to carry out position measurement respectively.
See Fig. 4, eight piezoelectric ceramics in six-freedom micro displacement worktable all adopt unstressed clamping pre-tightening mechanism to clamp, two pads 25 with 27 face-to-face and make chute become an angle of 90 degrees to be stuck on the insulating ceramic film at piezoelectric ceramics 26 two ends, be equivalent to and piezoelectric ceramics 26 is stuck in a cross chute, the position of piezoelectric ceramics 26 is defined, and the existence of chute 32 makes when the bellmouth of pre-loading screw 31 and fixing base 23 is due to processing and the low and disalignment of assembly precision, two pads 25 and 27 can to carry out small slip to compensate the additional stress of bellmouth owing to may introduce when processing and the low and disalignment of assembly precision due to pre-loading screw 31 and fixing base 23 along chute direction when assembling, the back side of pad 25 and 27 is processed with bellmouth 33, the front end of fixing base 23 and pre-loading screw 31 is processed with bellmouth equally, the steel ball 24 and 28 of diameter 3mm is stuck in the bellmouth between pad 25 and fixing base 23, between the bellmouth of pad 27 and pre-loading screw 31 front end, location and transmitting force is played between corresponding two bellmouths, the pretension of piezoelectric ceramics 26 is by being embedded in pre-load nut 29 in moving substrate 30 and pre-loading screw 31 realizes.
See Fig. 3, Fig. 5, Fig. 6, flexible hinge is parallel-plate flexible hinge, and parallel-plate flexible hinge structure is simple, easy to process, without the errors of principles.
Participate in Fig. 5, multiple degrees of freedom plate 13 adopts 7075 aluminium alloys to form through linear cutter, by interior substrate 39, center 40 and housing 41 are formed, two piezoelectric ceramics 42 and 44 are installed between interior substrate 39 and center 40, two piezoelectric ceramics 42 are consistent with described piezoelectric ceramics unstressed clamping pre-tightening mechanism structure with firmly beforehand means with the clamping of 44, when two piezoelectric ceramics 42 and 44 between interior substrate 39 and center 40 extend simultaneously, center 40 does the rotary motion around Z axis relative to interior substrate 39, X-direction piezoelectric ceramics 37 and Y-direction piezoelectric ceramics 34 is separately installed with in X direction and along Y-direction between center 40 and housing 41, two piezoelectric ceramics 37 are consistent with described piezoelectric ceramics unstressed clamping pre-tightening mechanism structure with firmly beforehand means with the clamping of 34, when X-direction piezoelectric ceramics 37 extends, housing 41 moves to X-direction relative to center 40, when Y-direction piezoelectric ceramics 34 extends, housing 41 moves to Y-direction relative to center 40, when X-direction piezoelectric ceramics 37 and Y-direction piezoelectric ceramics 34 extend simultaneously, housing 41 relatively center 40 does the resultant motion along XY direction, the surrounding of interior substrate 39 is evenly equipped with four groups of Z-direction Piezoelectric Ceramic unit fixing holes 38 and four Z-direction Piezoelectric Ceramic unit pre-loading screw holes 43, the corner, outside of interior substrate 39 is processed with parallel-plate flexible hinge 36 respectively, interior substrate 39 is connected by four groups of parallel-plate flexible hinges 36 with center 40, the outer corner of edge of center 40 is processed with two-way parallel-plate flexible hinge 35 respectively, center 40 is connected by two-way parallel-plate flexible hinge 35 with housing 41, uniform totally eight the objective table fixing holes 45 in frame mouth corner of housing 41, housing 41 drives pottery 37 in outside and X-direction, Y-direction drives position uniform three reflector alignment support fixing holes 46 respectively that pottery 34 is relative, reflector alignment support fixing hole 46 for the fine setting of reflector alignment support 17 and 14 with fixing, X-direction drives pottery 37, Y-direction drives the position of ceramic 34 homonymies to be evenly equipped with two reflector alignment support fixing holes 47 respectively, fixing for reflector alignment support 21 and 20.
See Fig. 6, Z-direction Piezoelectric Ceramic unit 12 is by matrix 55, the piezoelectric ceramics 54 be arranged in matrix 55 is formed, the clamping firmly beforehand means of piezoelectric ceramics 54 is consistent with described piezoelectric ceramics unstressed clamping pre-tightening mechanism, wherein the top of matrix 55 is provided with connecting hole 49, the top center of matrix 55 has through hole 52, the bottom of matrix 55 is provided with lower connecting hole 48, be bolted on connecting plate 11 by being arranged in lower connecting hole 48 bottom described matrix 55, together with the described upper connecting hole 49 at matrix 55 top is bolted on the Z-direction Piezoelectric Ceramic unit fixing hole 38 of the interior substrate 39 of multiple degrees of freedom plate 13, pre-load nut embeds in the Z-direction Piezoelectric Ceramic unit pre-loading screw hole 43 on the interior substrate 39 of multiple degrees of freedom plate 13, pre-loading screw 51 screws in above multiple degrees of freedom plate 13, through the through hole 52 of matrix 55 top center, piezoelectric ceramics 54 is clamped and pretension.

Claims (6)

1. there is the Long Distances two-dimensional nano work system of angle compensation function, it is characterized in that: include base, the Long Distances two-dimentional work bench be arranged on base, the six-freedom micro displacement worktable supported by Long Distances two-dimentional work bench, be distributed in outer and two the Optical length measurement angle measuring systems mutually in 90 degree of angles of six-freedom micro displacement worktable two sides adjacent, wherein:
Described Long Distances two-dimentional work bench is formed by stacking by the two groups of single axis table top-bottom cross arranged along X to, Y-direction respectively, each single axis table is secondary as director element using cycle ball guide, coordinate ball-screw for type of drive with stepper motor, wherein superposed single axis table is fixed on the guide rail slide block of the single axis table being positioned at bottom;
The driving element of described six-freedom micro displacement worktable is piezoelectric ceramics, eight piezoelectric ceramics used are all undertaken clamping and pretension by the unstressed clamping pre-tightening mechanism of piezoelectric ceramics, guiding mechanism is flexible hinge elastic guide, six-freedom micro displacement worktable comprises connecting plate, rigidly connected on the guide rail slide block that described connecting plate is arranged on superposed single axis table in Long Distances two-dimentional work bench, connecting plate is provided with four groups of Piezoelectric Ceramic unit along Z-direction, four groups of Piezoelectric Ceramic unit are centrosymmetric and surround rectangle on connecting plate, and the side of rectangle respectively with X to, Y-direction is parallel, connecting plate is also supported with multiple degrees of freedom plate, described multiple degrees of freedom plate is by housing, be arranged on the center in housing and be arranged on the interior substrate formation in center, described multiple degrees of freedom plate is fixed on the rectangular top of four groups of Piezoelectric Ceramic unit compositions by substrate in it, and multiple degrees of freedom plate side is parallel with the rectangular edges that four groups of Piezoelectric Ceramic unit form, two Optical length measurement angle measuring systems are distributed in outside the adjacent side of multiple degrees of freedom plate two, the edge top that multiple degrees of freedom plate housing is positioned at one of them Optical length measurement angle measuring system homonymy is provided with X-axis reflector alignment support, the edge top that multiple degrees of freedom plate housing is positioned at another Optical length measurement angle measuring system homonymy is provided with Y-axis reflector alignment support, X-axis reflector alignment support and Y-axis reflector alignment support are distributed in the outer arch of multiple degrees of freedom plate in 90 degree each other, and X-axis reflector alignment cradle top is provided with as the X-axis speculum of X to Optical length measurement angle measuring system target mirror, Y-axis reflector alignment cradle top is provided with the Y-axis speculum as Y-direction Optical length measurement angle measuring system target mirror, X-axis speculum, the multiple degrees of freedom plate housing edge top of Y-axis speculum offside is separately separately installed with reflector alignment support, reflector alignment support is fixed with respectively the balancing weight of balance contralateral reflex mirror weight, described X-axis reflector alignment support, Y-axis reflector alignment support and X-axis reflector alignment support, the reflector alignment support of the counterweight of Y-axis reflector alignment support offside connects formation shaped as frame in multiple degrees of freedom plate housing top frame, and the outer arch of multiple degrees of freedom plate in the middle of shaped as frame is also provided with objective table.
2. the Long Distances two-dimensional nano work system with angle compensation function according to claim 1, is characterized in that: described Optical length measurement angle measuring system is made up of photoelectric auto-collimator and Michelson laser interferometer respectively.
3. the Long Distances two-dimensional nano work system with angle compensation function according to claim 1, it is characterized in that: described piezoelectric ceramics is unstressed, and clamping pre-tightening mechanism comprises rectangular piezoelectric ceramic, the unstressed pad be clamped on piezoelectric ceramics top and bottom insulation potsherd respectively, be embedded in the steel ball of the diameter 3mm between the bellmouth of one of them pad and the bellmouth of fixing base, be embedded in the steel ball of the diameter 3mm between the bellmouth of another pad and pre-loading screw head bellmouth, pre-loading screw and pre-load nut, the front of pad is processed with chute, the back side of pad is processed with bellmouth, two pad vis-a-vis and make chute direction become an angle of 90 degrees be stuck on the insulating ceramic film at piezoelectric ceramics two ends, the position of piezoelectric ceramics is defined, and the existence of chute makes when the bellmouth of pre-loading screw and fixing base is due to processing and the low and disalignment of assembly precision, two pads to carry out small slip to compensate the additional stress of bellmouth owing to may introduce when processing and the low and disalignment of assembly precision due to pre-loading screw and fixing base along chute direction when assembling, the back side of two pads, the front end of fixing base and pre-loading screw is all processed with bellmouth, the steel ball of diameter 3mm is stuck in wherein, location and transmitting force is played between corresponding two bellmouths, the pretension of piezoelectric ceramics is by being embedded in pre-load nut in moving substrate and pre-loading screw realizes, pitch used is 0.35mm.
4. the Long Distances two-dimensional nano work system with angle compensation function according to claim 1, it is characterized in that: multiple degrees of freedom plate adopts 7075 aluminium alloys to form through linear cutter, by interior substrate, center and housing are formed, two piezoelectric ceramics are installed between interior substrate and center, the clamping of two piezoelectric ceramics is consistent with described piezoelectric ceramics unstressed clamping pre-tightening mechanism structure with firmly beforehand means, when two potteries between interior substrate and center extend simultaneously, center rotates relative to interior substrate, X-direction piezoelectric ceramics and Y-direction piezoelectric ceramics is separately installed with in X direction and along Y-direction between center and housing, the clamping of two piezoelectric ceramics is consistent with described piezoelectric ceramics unstressed clamping pre-tightening mechanism structure with firmly beforehand means, when X-direction piezoelectric ceramics extends, housing moves to X-direction relative to center, when Y-direction piezoelectric ceramics extends, housing moves to Y-direction relative to center, when X-direction piezoelectric ceramics and Y-direction piezoelectric ceramics extend simultaneously, the relative center of housing does the resultant motion along XY direction, the surrounding of interior substrate is evenly equipped with four groups of Z-direction Piezoelectric Ceramic unit fixing holes and four Z-direction Piezoelectric Ceramic unit pre-loading screw holes, the corner, outside of interior substrate is processed with parallel-plate flexible hinge respectively, interior substrate is connected by four groups of parallel-plate flexible hinges with center, the outer corner of edge of center is processed with two-way parallel-plate flexible hinge respectively, center is connected by two-way parallel-plate flexible hinge with housing, uniform totally eight the objective table fixing holes in frame mouth corner of housing, housing drives pottery in outside and X-direction, the position that Y-direction drives ceramic phase right uniform three reflector alignment support fixing holes respectively, X-direction drives pottery, Y-direction drives the position of ceramic homonymy to be evenly equipped with two reflector alignment support fixing holes respectively.
5. the Long Distances two-dimensional nano work system with angle compensation function according to claim 4, is characterized in that: described flexible hinge is parallel-plate flexible hinge.
6. the Long Distances two-dimensional nano work system with angle compensation function according to claim 1, it is characterized in that: Z-direction Piezoelectric Ceramic unit is by matrix, the piezoelectric ceramics arranged in the base is formed, the clamping of piezoelectric ceramics is consistent with described piezoelectric ceramics unstressed clamping pre-tightening mechanism structure with firmly beforehand means, wherein the top of matrix is provided with connecting hole, the top center of matrix has through hole, the bottom of matrix is provided with lower connecting hole, described base bottom is bolted on connecting plate by being arranged in lower connecting hole, together with the upper connecting hole of described baseline top is bolted on the Z-direction Piezoelectric Ceramic unit fixing hole of substrate in multiple degrees of freedom plate, pre-load nut embeds in the Z-direction Piezoelectric Ceramic unit pre-loading screw hole in multiple degrees of freedom plate on substrate, pre-loading screw screws on the upside of multiple degrees of freedom plate, through the through hole at baseline top center, piezoelectric ceramics is clamped and pretension.
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